TW360768B - Air current controlling device and clean room adopting the same - Google Patents

Air current controlling device and clean room adopting the same

Info

Publication number
TW360768B
TW360768B TW085113421A TW85113421A TW360768B TW 360768 B TW360768 B TW 360768B TW 085113421 A TW085113421 A TW 085113421A TW 85113421 A TW85113421 A TW 85113421A TW 360768 B TW360768 B TW 360768B
Authority
TW
Taiwan
Prior art keywords
clean room
air current
controlling device
current controlling
same
Prior art date
Application number
TW085113421A
Other languages
English (en)
Inventor
Joung-Sun Lee
Jae-Jun Ruy
Kun-Hyung Lee
Sang-Young Mun
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of TW360768B publication Critical patent/TW360768B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Combustion & Propulsion (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Ventilation (AREA)
  • Bidet-Like Cleaning Device And Other Flush Toilet Accessories (AREA)
  • Electrostatic Separation (AREA)
TW085113421A 1995-11-20 1996-11-04 Air current controlling device and clean room adopting the same TW360768B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950042341A KR0165476B1 (ko) 1995-11-20 1995-11-20 기류 제어장치, 이 장치를 이용하는 청정 실 및 청정 실내의 온도편차를 감소시키는 방법

Publications (1)

Publication Number Publication Date
TW360768B true TW360768B (en) 1999-06-11

Family

ID=19434765

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085113421A TW360768B (en) 1995-11-20 1996-11-04 Air current controlling device and clean room adopting the same

Country Status (7)

Country Link
US (1) US5792226A (zh)
JP (1) JPH09145113A (zh)
KR (1) KR0165476B1 (zh)
CN (1) CN1138101C (zh)
DE (1) DE19639771A1 (zh)
GB (1) GB2307545B (zh)
TW (1) TW360768B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202010012958U1 (de) 2009-11-20 2011-03-24 APEX MFG. CO., LTD., Tali City Sicherheitstacker

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1130436A (ja) * 1997-07-11 1999-02-02 Nittetsu Semiconductor Kk クリーンルーム及びクリーンルームの改装方法
US6383241B1 (en) 2000-02-16 2002-05-07 Battelle Memorial Institute Protective filtration system for enclosures within buildings
ATE295516T1 (de) * 2001-01-29 2005-05-15 Joseph A Mcgill Regulierbarer dämpfer für luftstromsysteme
JP4038352B2 (ja) * 2001-08-24 2008-01-23 株式会社日立産機システム クリーンルーム
DE102005062523A1 (de) * 2005-12-19 2007-06-21 M+W Zander Holding Ag Filter-Ventilator-Einheit
JP5427833B2 (ja) * 2011-05-18 2014-02-26 パナソニック株式会社 クリーンルームの逆流防止装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2104279A (en) * 1935-06-10 1938-01-04 Excel Auto Radiator Company Air distributing means
GB686666A (en) * 1948-12-22 1953-01-28 Karl Michaelis Improvements in or relating to air duct dampers
US2783702A (en) * 1950-09-30 1957-03-05 Air Devices Inc Adjustable vortex damper
US2822741A (en) * 1954-07-19 1958-02-11 Barber Colman Co Air distribution outlet
US3179125A (en) * 1960-10-07 1965-04-20 Air Devices Inc One motor mixing box
US3473461A (en) * 1968-03-28 1969-10-21 Joseph Madl Jr Damper-provided air-passing floor structure
US3465666A (en) * 1968-12-10 1969-09-09 Kidde & Co Walter Cleanroom filtering method
US4548068A (en) * 1983-11-10 1985-10-22 Cambridge Filter Corp. Downflow air filter construction and methods for air flow adjustment and leak testing thereof
GB2155170B (en) * 1984-03-05 1987-06-03 Waterloo Grille Company Limite Adjustable ventilators
US4666477A (en) * 1986-04-22 1987-05-19 Weber Technical Products, Division Of Craig Systems Corporation Adjustable damper for clean room systems
JP2571774B2 (ja) * 1987-01-08 1997-01-16 株式会社 大氣社 空調用空気吹出器
US4917713A (en) * 1989-05-23 1990-04-17 Comp-Aire Systems, Inc. Low-profile air filtration module
SE500707C2 (sv) * 1990-08-22 1994-08-15 Jk Vvs Projektering Ab Tilluftdon med halvsfärisk utströmningsdel uppvisande poröst material
US5322533A (en) * 1992-07-08 1994-06-21 Arco Restoration, Inc. Decontamination system for removal of hazardous substances

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202010012958U1 (de) 2009-11-20 2011-03-24 APEX MFG. CO., LTD., Tali City Sicherheitstacker

Also Published As

Publication number Publication date
KR970030209A (ko) 1997-06-26
JPH09145113A (ja) 1997-06-06
GB2307545A (en) 1997-05-28
CN1138101C (zh) 2004-02-11
GB2307545B (en) 1999-10-13
GB9620639D0 (en) 1996-11-20
CN1157897A (zh) 1997-08-27
US5792226A (en) 1998-08-11
KR0165476B1 (ko) 1999-02-01
DE19639771A1 (de) 1997-05-22

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees