TW358877B - Integrating sphere ellipsometry analyzer - Google Patents

Integrating sphere ellipsometry analyzer

Info

Publication number
TW358877B
TW358877B TW086106304A TW86106304A TW358877B TW 358877 B TW358877 B TW 358877B TW 086106304 A TW086106304 A TW 086106304A TW 86106304 A TW86106304 A TW 86106304A TW 358877 B TW358877 B TW 358877B
Authority
TW
Taiwan
Prior art keywords
analyzer
integrating sphere
ellipsometry
sphere
incident
Prior art date
Application number
TW086106304A
Other languages
English (en)
Inventor
Hsiao-Wen Lee
Shih-Kwang Lee
Yun-Chang Yang
Original Assignee
Ahead Optoelectronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ahead Optoelectronics Inc filed Critical Ahead Optoelectronics Inc
Priority to TW086106304A priority Critical patent/TW358877B/zh
Application granted granted Critical
Publication of TW358877B publication Critical patent/TW358877B/zh

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
TW086106304A 1997-05-12 1997-05-12 Integrating sphere ellipsometry analyzer TW358877B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086106304A TW358877B (en) 1997-05-12 1997-05-12 Integrating sphere ellipsometry analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086106304A TW358877B (en) 1997-05-12 1997-05-12 Integrating sphere ellipsometry analyzer

Publications (1)

Publication Number Publication Date
TW358877B true TW358877B (en) 1999-05-21

Family

ID=57940540

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086106304A TW358877B (en) 1997-05-12 1997-05-12 Integrating sphere ellipsometry analyzer

Country Status (1)

Country Link
TW (1) TW358877B (zh)

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