TW347552B - Method for storing nitrogen closet with low moisture and high vacuum - Google Patents

Method for storing nitrogen closet with low moisture and high vacuum

Info

Publication number
TW347552B
TW347552B TW086112624A TW86112624A TW347552B TW 347552 B TW347552 B TW 347552B TW 086112624 A TW086112624 A TW 086112624A TW 86112624 A TW86112624 A TW 86112624A TW 347552 B TW347552 B TW 347552B
Authority
TW
Taiwan
Prior art keywords
nitrogen
closet
high vacuum
low moisture
articles
Prior art date
Application number
TW086112624A
Other languages
Chinese (zh)
Inventor
Shyh-Kuen Jih
Jiann-An Dan
Original Assignee
Mos Electronics Taiwan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mos Electronics Taiwan Inc filed Critical Mos Electronics Taiwan Inc
Priority to TW086112624A priority Critical patent/TW347552B/en
Application granted granted Critical
Publication of TW347552B publication Critical patent/TW347552B/en

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  • Packages (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A method for storing a nitrogen closet with low moisture and high vacuum, which is applied in the semiconductor industry for ensuring the quality of the storage articles in a storage environment in the nitrogen closet at a low moisture and a high vacuum, in which the nitrogen closet is mounted with an air duct and a manometer, which comprises the following steps: (a) placing the articles to be stored in the nitrogen closet, and sealing the nitrogen closet; (b) replacing the air in the nitrogen closet with an external gas stream; (c) after completion of the previous gas replacement, introducing a nitrogen gas stream into the nitrogen closet; (d) after completion of introducing nitrogen into the nitrogen closet, evacuating the nitrogen gas from the nitrogen closet thereby forming a high vacuum, low moisture status in the nitrogen closet; and (e) storing the articles in the nitrogen closet in a high vacuum, low moisture status.
TW086112624A 1997-09-02 1997-09-02 Method for storing nitrogen closet with low moisture and high vacuum TW347552B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086112624A TW347552B (en) 1997-09-02 1997-09-02 Method for storing nitrogen closet with low moisture and high vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086112624A TW347552B (en) 1997-09-02 1997-09-02 Method for storing nitrogen closet with low moisture and high vacuum

Publications (1)

Publication Number Publication Date
TW347552B true TW347552B (en) 1998-12-11

Family

ID=58263980

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086112624A TW347552B (en) 1997-09-02 1997-09-02 Method for storing nitrogen closet with low moisture and high vacuum

Country Status (1)

Country Link
TW (1) TW347552B (en)

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees