TW347552B - Method for storing nitrogen closet with low moisture and high vacuum - Google Patents
Method for storing nitrogen closet with low moisture and high vacuumInfo
- Publication number
- TW347552B TW347552B TW086112624A TW86112624A TW347552B TW 347552 B TW347552 B TW 347552B TW 086112624 A TW086112624 A TW 086112624A TW 86112624 A TW86112624 A TW 86112624A TW 347552 B TW347552 B TW 347552B
- Authority
- TW
- Taiwan
- Prior art keywords
- nitrogen
- closet
- high vacuum
- low moisture
- articles
- Prior art date
Links
Landscapes
- Packages (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A method for storing a nitrogen closet with low moisture and high vacuum, which is applied in the semiconductor industry for ensuring the quality of the storage articles in a storage environment in the nitrogen closet at a low moisture and a high vacuum, in which the nitrogen closet is mounted with an air duct and a manometer, which comprises the following steps: (a) placing the articles to be stored in the nitrogen closet, and sealing the nitrogen closet; (b) replacing the air in the nitrogen closet with an external gas stream; (c) after completion of the previous gas replacement, introducing a nitrogen gas stream into the nitrogen closet; (d) after completion of introducing nitrogen into the nitrogen closet, evacuating the nitrogen gas from the nitrogen closet thereby forming a high vacuum, low moisture status in the nitrogen closet; and (e) storing the articles in the nitrogen closet in a high vacuum, low moisture status.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086112624A TW347552B (en) | 1997-09-02 | 1997-09-02 | Method for storing nitrogen closet with low moisture and high vacuum |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086112624A TW347552B (en) | 1997-09-02 | 1997-09-02 | Method for storing nitrogen closet with low moisture and high vacuum |
Publications (1)
Publication Number | Publication Date |
---|---|
TW347552B true TW347552B (en) | 1998-12-11 |
Family
ID=58263980
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086112624A TW347552B (en) | 1997-09-02 | 1997-09-02 | Method for storing nitrogen closet with low moisture and high vacuum |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW347552B (en) |
-
1997
- 1997-09-02 TW TW086112624A patent/TW347552B/en not_active IP Right Cessation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |