TW345735B - Integrated circuit and process for its manufacture - Google Patents
Integrated circuit and process for its manufactureInfo
- Publication number
- TW345735B TW345735B TW086109658A TW86109658A TW345735B TW 345735 B TW345735 B TW 345735B TW 086109658 A TW086109658 A TW 086109658A TW 86109658 A TW86109658 A TW 86109658A TW 345735 B TW345735 B TW 345735B
- Authority
- TW
- Taiwan
- Prior art keywords
- integrated circuit
- manufacture
- substrate
- dielectric composition
- circuit lines
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 2
- 239000007795 chemical reaction product Substances 0.000 abstract 1
- 229920000587 hyperbranched polymer Polymers 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
- H01L21/02137—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC the material comprising alkyl silsesquioxane, e.g. MSQ
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/312—Organic layers, e.g. photoresist
- H01L21/3121—Layers comprising organo-silicon compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/5329—Insulating materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/739,133 US5767014A (en) | 1996-10-28 | 1996-10-28 | Integrated circuit and process for its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
TW345735B true TW345735B (en) | 1998-11-21 |
Family
ID=24970971
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086109658A TW345735B (en) | 1996-10-28 | 1997-07-09 | Integrated circuit and process for its manufacture |
Country Status (7)
Country | Link |
---|---|
US (1) | US5767014A (zh) |
JP (1) | JP3375048B2 (zh) |
KR (1) | KR100321832B1 (zh) |
CN (1) | CN1142593C (zh) |
MY (1) | MY115696A (zh) |
SG (1) | SG73471A1 (zh) |
TW (1) | TW345735B (zh) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5962113A (en) * | 1996-10-28 | 1999-10-05 | International Business Machines Corporation | Integrated circuit device and process for its manufacture |
US5953627A (en) * | 1997-11-06 | 1999-09-14 | International Business Machines Corporation | Process for manufacture of integrated circuit device |
US6177360B1 (en) * | 1997-11-06 | 2001-01-23 | International Business Machines Corporation | Process for manufacture of integrated circuit device |
US6110649A (en) * | 1997-11-19 | 2000-08-29 | International Business Machines Corporation | Process for manufacture of integrated circuit device |
US6166439A (en) * | 1997-12-30 | 2000-12-26 | Advanced Micro Devices, Inc. | Low dielectric constant material and method of application to isolate conductive lines |
EP1092234A1 (en) | 1998-06-05 | 2001-04-18 | Georgia Tech Research | Porous insulating compounds and method for making same |
US6143643A (en) * | 1998-07-08 | 2000-11-07 | International Business Machines Corporation | Process for manufacture of integrated circuit device using organosilicate insulative matrices |
US6333141B1 (en) | 1998-07-08 | 2001-12-25 | International Business Machines Corporation | Process for manufacture of integrated circuit device using inorganic/organic matrix comprising polymers of three dimensional architecture |
US6093636A (en) * | 1998-07-08 | 2000-07-25 | International Business Machines Corporation | Process for manufacture of integrated circuit device using a matrix comprising porous high temperature thermosets |
US6333390B1 (en) * | 1998-11-05 | 2001-12-25 | The Board Of Trustees Of The University Of Illinois | Branched and hyperbranched polyetherimides |
EP1141128B1 (en) | 1998-11-24 | 2006-04-12 | Dow Global Technologies Inc. | A composition containing a cross-linkable matrix precursor and a poragen, and a porous matrix prepared therefrom |
US6399666B1 (en) | 1999-01-27 | 2002-06-04 | International Business Machines Corporation | Insulative matrix material |
US6420441B1 (en) | 1999-10-01 | 2002-07-16 | Shipley Company, L.L.C. | Porous materials |
US6342454B1 (en) | 1999-11-16 | 2002-01-29 | International Business Machines Corporation | Electronic devices with dielectric compositions and method for their manufacture |
US6107357A (en) * | 1999-11-16 | 2000-08-22 | International Business Machines Corporatrion | Dielectric compositions and method for their manufacture |
US6759098B2 (en) | 2000-03-20 | 2004-07-06 | Axcelis Technologies, Inc. | Plasma curing of MSQ-based porous low-k film materials |
US6495479B1 (en) | 2000-05-05 | 2002-12-17 | Honeywell International, Inc. | Simplified method to produce nanoporous silicon-based films |
TWI226103B (en) | 2000-08-31 | 2005-01-01 | Georgia Tech Res Inst | Fabrication of semiconductor devices with air gaps for ultra low capacitance interconnections and methods of making same |
JP2004509468A (ja) * | 2000-09-13 | 2004-03-25 | シップレーカンパニー エル エル シー | 電子デバイスの製造 |
TW538319B (en) * | 2000-10-10 | 2003-06-21 | Shipley Co Llc | Antireflective composition, method for forming antireflective coating layer, and method for manufacturing electronic device |
TW588072B (en) | 2000-10-10 | 2004-05-21 | Shipley Co Llc | Antireflective porogens |
US6685983B2 (en) | 2001-03-14 | 2004-02-03 | International Business Machines Corporation | Defect-free dielectric coatings and preparation thereof using polymeric nitrogenous porogens |
US6670285B2 (en) | 2001-03-14 | 2003-12-30 | International Business Machines Corporation | Nitrogen-containing polymers as porogens in the preparation of highly porous, low dielectric constant materials |
US7255810B2 (en) * | 2004-01-09 | 2007-08-14 | Cabot Microelectronics Corporation | Polishing system comprising a highly branched polymer |
US8901268B2 (en) | 2004-08-03 | 2014-12-02 | Ahila Krishnamoorthy | Compositions, layers and films for optoelectronic devices, methods of production and uses thereof |
US8557877B2 (en) | 2009-06-10 | 2013-10-15 | Honeywell International Inc. | Anti-reflective coatings for optically transparent substrates |
US8864898B2 (en) | 2011-05-31 | 2014-10-21 | Honeywell International Inc. | Coating formulations for optical elements |
EP3194502A4 (en) | 2015-04-13 | 2018-05-16 | Honeywell International Inc. | Polysiloxane formulations and coatings for optoelectronic applications |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1356919A (en) * | 1970-04-17 | 1974-06-19 | Ici Ltd | Glass reinforced polymer composites |
US4001870A (en) * | 1972-08-18 | 1977-01-04 | Hitachi, Ltd. | Isolating protective film for semiconductor devices and method for making the same |
US4141877A (en) * | 1977-09-06 | 1979-02-27 | Corning Glass Works | Processing organic polymers with hydrated glasses |
US4535099A (en) * | 1984-04-03 | 1985-08-13 | Imi-Tech Corporation | Polyimide foam from mixture of silicon containing diamine and different aromatic diamine |
US4801507A (en) * | 1987-07-02 | 1989-01-31 | Akzo American Inc. | Arylsiloxane/silicate compositions useful as interlayer dielectric films |
US5043369A (en) * | 1988-10-17 | 1991-08-27 | Corning Incorporated | Glass/glass-ceramic-plastic alloy articles |
US5036145A (en) * | 1989-07-10 | 1991-07-30 | Armstrong World Industries, Inc. | Alkoxysilane and alkoxysilane terminated polyamic or polyimide lacquer composition |
US5206337A (en) * | 1990-05-10 | 1993-04-27 | Sumitomo Bakelite Company Limited | Solvent-soluble polyimidesiloxane oligomer and process for producing the same |
US5288842A (en) * | 1991-01-30 | 1994-02-22 | International Business Machines Corporation | Morphological composite materials formed from different precursors |
US5252654A (en) * | 1991-07-03 | 1993-10-12 | E. I. Du Pont De Nemours And Company | Organic-inorganic polymeric composites |
US5412016A (en) * | 1992-09-28 | 1995-05-02 | E. I. Du Pont De Nemours And Company | Process for making polymeric inorganic-organic compositions |
US5384376A (en) * | 1992-12-23 | 1995-01-24 | Eastman Kodak Company | Organic/inorganic hybrid materials |
JP2751820B2 (ja) * | 1994-02-28 | 1998-05-18 | 日本電気株式会社 | 半導体装置の製造方法 |
-
1996
- 1996-10-28 US US08/739,133 patent/US5767014A/en not_active Expired - Lifetime
-
1997
- 1997-06-30 KR KR1019970029753A patent/KR100321832B1/ko not_active IP Right Cessation
- 1997-07-09 TW TW086109658A patent/TW345735B/zh not_active IP Right Cessation
- 1997-09-24 SG SG1997003521A patent/SG73471A1/en unknown
- 1997-09-26 CN CNB971196664A patent/CN1142593C/zh not_active Expired - Lifetime
- 1997-09-26 MY MYPI97004488A patent/MY115696A/en unknown
- 1997-10-14 JP JP28044397A patent/JP3375048B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
SG73471A1 (en) | 2000-06-20 |
KR100321832B1 (ko) | 2002-03-08 |
MY115696A (en) | 2003-08-30 |
CN1189695A (zh) | 1998-08-05 |
JP3375048B2 (ja) | 2003-02-10 |
CN1142593C (zh) | 2004-03-17 |
JPH10135332A (ja) | 1998-05-22 |
US5767014A (en) | 1998-06-16 |
KR19980032198A (ko) | 1998-07-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |