TW344114B - Process for increasing the charge storage capacity of roughened capacitive electrode - Google Patents
Process for increasing the charge storage capacity of roughened capacitive electrodeInfo
- Publication number
- TW344114B TW344114B TW086113654A TW86113654A TW344114B TW 344114 B TW344114 B TW 344114B TW 086113654 A TW086113654 A TW 086113654A TW 86113654 A TW86113654 A TW 86113654A TW 344114 B TW344114 B TW 344114B
- Authority
- TW
- Taiwan
- Prior art keywords
- roughened
- polysilicon layer
- increasing
- forming
- layer
- Prior art date
Links
Landscapes
- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
A process for increasing the capacitive storage charge capacity of a DRAM, the process comprising the following steps: forming a lower electrode plate of a capacitance on a semiconductor substrate silicon, the lower electrode plate being consisted of a first polysilicon layer and a hemi-spherical grain silicon layer formed on the first polysilicon layer; carrying out an etching process and a washing process on the surface of the hemi-spherical grain silicon layer and the first polysilicon layer thereby forming a roughened polysilicon layer having a roughened surface; forming a dielectric layer on the roughened polysilicon layer; and forming a second polysilicon layer on the dielectric layer to be used as an upper electrode plate of the capacitance.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086113654A TW344114B (en) | 1997-09-19 | 1997-09-19 | Process for increasing the charge storage capacity of roughened capacitive electrode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086113654A TW344114B (en) | 1997-09-19 | 1997-09-19 | Process for increasing the charge storage capacity of roughened capacitive electrode |
Publications (1)
Publication Number | Publication Date |
---|---|
TW344114B true TW344114B (en) | 1998-11-01 |
Family
ID=58263703
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086113654A TW344114B (en) | 1997-09-19 | 1997-09-19 | Process for increasing the charge storage capacity of roughened capacitive electrode |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW344114B (en) |
-
1997
- 1997-09-19 TW TW086113654A patent/TW344114B/en not_active IP Right Cessation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |