TW343273B - Furnace type reactor and method of using the same - Google Patents
Furnace type reactor and method of using the sameInfo
- Publication number
- TW343273B TW343273B TW086107113A TW86107113A TW343273B TW 343273 B TW343273 B TW 343273B TW 086107113 A TW086107113 A TW 086107113A TW 86107113 A TW86107113 A TW 86107113A TW 343273 B TW343273 B TW 343273B
- Authority
- TW
- Taiwan
- Prior art keywords
- gas inlet
- type reactor
- same
- furnace type
- gas
- Prior art date
Links
Landscapes
- Furnace Details (AREA)
Abstract
A furnace type reactor comprising: a reaction furnace having a first gas inlet for inputting the process gas of a first process, a second gas inlet for inputting the process gas of a second process, a discharge outlet for releasing the process gases of the first process and the second process, and an evacuation outlet for obtaining a desired vacuum level by removing the process gases in the reaction furnace; and a control unit for controlling the open/close of the first gas inlet, the second gas inlet, the discharge outlet and the evacuation outlet to provide environments suitable for the first process and the second process.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086107113A TW343273B (en) | 1997-05-26 | 1997-05-26 | Furnace type reactor and method of using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086107113A TW343273B (en) | 1997-05-26 | 1997-05-26 | Furnace type reactor and method of using the same |
Publications (1)
Publication Number | Publication Date |
---|---|
TW343273B true TW343273B (en) | 1998-10-21 |
Family
ID=58263631
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086107113A TW343273B (en) | 1997-05-26 | 1997-05-26 | Furnace type reactor and method of using the same |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW343273B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI456682B (en) * | 2012-09-20 | 2014-10-11 | Motech Ind Inc | Semiconductor diffusion apparatus |
-
1997
- 1997-05-26 TW TW086107113A patent/TW343273B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI456682B (en) * | 2012-09-20 | 2014-10-11 | Motech Ind Inc | Semiconductor diffusion apparatus |
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Legal Events
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MK4A | Expiration of patent term of an invention patent |