TW339450B - Coordinated cluster tool energy delivery system - Google Patents

Coordinated cluster tool energy delivery system

Info

Publication number
TW339450B
TW339450B TW086110594A TW86110594A TW339450B TW 339450 B TW339450 B TW 339450B TW 086110594 A TW086110594 A TW 086110594A TW 86110594 A TW86110594 A TW 86110594A TW 339450 B TW339450 B TW 339450B
Authority
TW
Taiwan
Prior art keywords
energy
delivery system
cluster tool
energy delivery
coordinated cluster
Prior art date
Application number
TW086110594A
Other languages
English (en)
Inventor
A Nering Eric
R Fleming Dan
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of TW339450B publication Critical patent/TW339450B/zh

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J1/00—Circuit arrangements for dc mains or dc distribution networks
    • H02J1/10—Parallel operation of dc sources
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J4/00—Circuit arrangements for mains or distribution networks not specified as ac or dc
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J7/00—Circuit arrangements for charging or depolarising batteries or for supplying loads from batteries
    • H02J7/34—Parallel operation in networks using both storage and other dc sources, e.g. providing buffering

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Inverter Devices (AREA)
  • Direct Current Feeding And Distribution (AREA)
  • Stand-By Power Supply Arrangements (AREA)
  • Generation Of Surge Voltage And Current (AREA)
  • Emergency Protection Circuit Devices (AREA)
  • Rectifiers (AREA)
TW086110594A 1996-08-01 1997-07-25 Coordinated cluster tool energy delivery system TW339450B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/690,925 US5784238A (en) 1996-08-01 1996-08-01 Coordinated cluster tool energy delivery system

Publications (1)

Publication Number Publication Date
TW339450B true TW339450B (en) 1998-09-01

Family

ID=24774516

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086110594A TW339450B (en) 1996-08-01 1997-07-25 Coordinated cluster tool energy delivery system

Country Status (6)

Country Link
US (1) US5784238A (zh)
EP (1) EP0825701A3 (zh)
JP (1) JPH1098830A (zh)
KR (1) KR19980018253A (zh)
SG (1) SG50872A1 (zh)
TW (1) TW339450B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI600564B (zh) * 2016-01-08 2017-10-01 Yi-Chiu Co Ltd 載具資訊之視覺圖案預警系統

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5784238A (en) * 1996-08-01 1998-07-21 Applied Materials, Inc. Coordinated cluster tool energy delivery system
US6312525B1 (en) 1997-07-11 2001-11-06 Applied Materials, Inc. Modular architecture for semiconductor wafer fabrication equipment
US6217272B1 (en) 1998-10-01 2001-04-17 Applied Science And Technology, Inc. In-line sputter deposition system
US6328858B1 (en) 1998-10-01 2001-12-11 Nexx Systems Packaging, Llc Multi-layer sputter deposition apparatus
US6222718B1 (en) 1998-11-12 2001-04-24 Lam Research Corporation Integrated power modules for plasma processing systems
US6440261B1 (en) 1999-05-25 2002-08-27 Applied Materials, Inc. Dual buffer chamber cluster tool for semiconductor wafer processing
US6558509B2 (en) * 1999-11-30 2003-05-06 Applied Materials, Inc. Dual wafer load lock
US6530733B2 (en) 2000-07-27 2003-03-11 Nexx Systems Packaging, Llc Substrate processing pallet and related substrate processing method and machine
US6821912B2 (en) 2000-07-27 2004-11-23 Nexx Systems Packaging, Llc Substrate processing pallet and related substrate processing method and machine
US6682288B2 (en) 2000-07-27 2004-01-27 Nexx Systems Packaging, Llc Substrate processing pallet and related substrate processing method and machine
WO2002079699A1 (fr) * 2001-03-29 2002-10-10 Kabushiki Kaisha Sankyo Seiki Seisakusho Systeme de production
US6765774B2 (en) * 2001-12-28 2004-07-20 Iwatt, Inc. High impedance insertion system for blocking EMI
SE528539C2 (sv) * 2005-05-20 2006-12-12 Aros Electronics Ab Metod och anordning för återvinningsbart upptagande av elektrisk retardationsenergi från ett industrirobotsystem
JP5295973B2 (ja) * 2006-12-08 2013-09-18 バリドゥス・ディーシー・システムズ，エルエルシー Ｄｃ電源システム
US9525285B2 (en) * 2011-06-13 2016-12-20 Demand Energy Networks, Inc. Energy systems and energy supply methods
NL2013296B1 (nl) * 2014-08-01 2016-09-21 Citytec B V Systeem voor het distribueren van elektrische energie.
US9754474B2 (en) 2015-09-02 2017-09-05 Elwha Llc Systems with interactive management of environmental objects relative to human appendages
US9740893B2 (en) 2015-09-02 2017-08-22 Elwha Llc Systems with interactive management of environmental objects relative to human appendages
US9734689B2 (en) 2015-09-02 2017-08-15 Elwha Llc Systems with interactive management of environmental objects relative to human appendages
US20170323240A1 (en) 2016-05-06 2017-11-09 General Electric Company Computing system to control the use of physical state attainment with inspection
US11489356B2 (en) * 2019-07-02 2022-11-01 Abb Schweiz Ag MVDC link-powered battery chargers and operation thereof

Family Cites Families (10)

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Publication number Priority date Publication date Assignee Title
US3359426A (en) * 1964-11-27 1967-12-19 Instron Corp Relay control circuit
US4031406A (en) * 1975-06-16 1977-06-21 Pacific Technology, Inc. Method and apparatus for controlling electrical loads
JPS62239870A (ja) * 1986-04-09 1987-10-20 Toshiba Corp 電圧形インバ−タ
US4760276A (en) * 1987-11-09 1988-07-26 Unisys Corporation Power supply system, for segmented loads, having phantom redundancy
ES2110964T3 (es) * 1989-02-06 1998-03-01 Boral Johns Perry Ind Pty Ltd Sistema de suministro de energia.
JPH02303327A (ja) * 1989-05-16 1990-12-17 Toshiba Corp 無停電電源システムの並列台数選択装置
EP0409226A3 (en) * 1989-07-21 1993-01-13 Hitachi, Ltd. Power supply control system
US5073848A (en) * 1990-11-21 1991-12-17 General Electric Company Power distribution system
US5576941A (en) * 1994-08-10 1996-11-19 York Technologies, Inc. Modular power supply system
US5784238A (en) * 1996-08-01 1998-07-21 Applied Materials, Inc. Coordinated cluster tool energy delivery system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI600564B (zh) * 2016-01-08 2017-10-01 Yi-Chiu Co Ltd 載具資訊之視覺圖案預警系統

Also Published As

Publication number Publication date
JPH1098830A (ja) 1998-04-14
EP0825701A3 (en) 1999-07-21
EP0825701A2 (en) 1998-02-25
SG50872A1 (en) 1998-07-20
KR19980018253A (ko) 1998-06-05
US5784238A (en) 1998-07-21

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