TW336278B - Remote control operation system for a wafer probe the invention relates to a remote control operation system for a wafer probe - Google Patents

Remote control operation system for a wafer probe the invention relates to a remote control operation system for a wafer probe

Info

Publication number
TW336278B
TW336278B TW085114896A TW85114896A TW336278B TW 336278 B TW336278 B TW 336278B TW 085114896 A TW085114896 A TW 085114896A TW 85114896 A TW85114896 A TW 85114896A TW 336278 B TW336278 B TW 336278B
Authority
TW
Taiwan
Prior art keywords
display
digits
probe
remote control
control operation
Prior art date
Application number
TW085114896A
Other languages
English (en)
Inventor
Shungen Iijima
Original Assignee
Tokyo Electron Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Co Ltd filed Critical Tokyo Electron Co Ltd
Application granted granted Critical
Publication of TW336278B publication Critical patent/TW336278B/zh

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Measuring Leads Or Probes (AREA)
TW085114896A 1995-12-05 1996-12-03 Remote control operation system for a wafer probe the invention relates to a remote control operation system for a wafer probe TW336278B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP31660795 1995-12-05
JP27471796A JP3749318B2 (ja) 1995-12-05 1996-10-17 ウェハプローバの遠隔操作システム

Publications (1)

Publication Number Publication Date
TW336278B true TW336278B (en) 1998-07-11

Family

ID=26551163

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085114896A TW336278B (en) 1995-12-05 1996-12-03 Remote control operation system for a wafer probe the invention relates to a remote control operation system for a wafer probe

Country Status (2)

Country Link
JP (1) JP3749318B2 (zh)
TW (1) TW336278B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI453000B (zh) * 2010-11-12 2014-09-21 Crystalvue Medical Corp 光學裝置及其運作方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11036390B2 (en) * 2018-05-25 2021-06-15 Mpi Corporation Display method of display apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI453000B (zh) * 2010-11-12 2014-09-21 Crystalvue Medical Corp 光學裝置及其運作方法

Also Published As

Publication number Publication date
JP3749318B2 (ja) 2006-02-22
JPH09219426A (ja) 1997-08-19

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Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees