TW332222B - Sputtering apparatus with isolated coolant and sputtering target therefor the invention relates to a replaceable sputtering target device comprising a round target unit, a recessed rim having an annular rim, an annular rim rear face, tension members and annular waterproof surface. - Google Patents

Sputtering apparatus with isolated coolant and sputtering target therefor the invention relates to a replaceable sputtering target device comprising a round target unit, a recessed rim having an annular rim, an annular rim rear face, tension members and annular waterproof surface.

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Publication number
TW332222B
TW332222B TW084109919A TW84109919A TW332222B TW 332222 B TW332222 B TW 332222B TW 084109919 A TW084109919 A TW 084109919A TW 84109919 A TW84109919 A TW 84109919A TW 332222 B TW332222 B TW 332222B
Authority
TW
Taiwan
Prior art keywords
annular
sputtering
rim
target
rear face
Prior art date
Application number
TW084109919A
Other languages
Chinese (zh)
Inventor
D Hurwitt Steven
Original Assignee
Materials Res Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/626,987 external-priority patent/US5130005A/en
Priority claimed from US07/791,415 external-priority patent/US5284561A/en
Priority claimed from US07/816,137 external-priority patent/US5409590A/en
Priority claimed from US08/388,205 external-priority patent/US5490914A/en
Priority claimed from US08/439,490 external-priority patent/US6689254B1/en
Application filed by Materials Res Corporation filed Critical Materials Res Corporation
Application granted granted Critical
Publication of TW332222B publication Critical patent/TW332222B/en

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Abstract

A replaceable sputtering target device comprising: a round target unit (25) in which at least a portion of which is a target center made of a sputtering material, the front face of the target unit is a sputtering face (32) made of a target center material, the rear face (33) has received a waterproof treatment, its annular heat-dissipating surface is symmetrical to its center point; a recessed rim (34) having: an annular rim in which its front face (34a) surrounds the sputtering face (32) and retracts backward from the sputtering face (34a) and has a function of vacuum seal; an annular rim rear face (34b) surrounding the rear face (33) of the target unit and having a waterproof function; tension members (35,75) installed at the center point of the target rear face; and annular waterproof surface on the surrounding of the rear plate center tension member.
TW084109919A 1990-10-31 1995-09-21 Sputtering apparatus with isolated coolant and sputtering target therefor the invention relates to a replaceable sputtering target device comprising a round target unit, a recessed rim having an annular rim, an annular rim rear face, tension members and annular waterproof surface. TW332222B (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US60670190A 1990-10-31 1990-10-31
US07/626,987 US5130005A (en) 1990-10-31 1990-12-13 Magnetron sputter coating method and apparatus with rotating magnet cathode
US07/791,415 US5284561A (en) 1991-11-13 1991-11-13 Method and apparatus for sputter coating employing machine readable indicia carried by target assembly
US07/816,137 US5409590A (en) 1989-04-17 1991-12-31 Target cooling and support for magnetron sputter coating apparatus
US08/164,759 US5449445A (en) 1991-11-13 1993-12-10 Sputtering target with machine readable indicia
US08/388,205 US5490914A (en) 1995-02-14 1995-02-14 High utilization sputtering target for cathode assembly
US08/439,490 US6689254B1 (en) 1990-10-31 1995-05-11 Sputtering apparatus with isolated coolant and sputtering target therefor

Publications (1)

Publication Number Publication Date
TW332222B true TW332222B (en) 1998-05-21

Family

ID=60654555

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084109919A TW332222B (en) 1990-10-31 1995-09-21 Sputtering apparatus with isolated coolant and sputtering target therefor the invention relates to a replaceable sputtering target device comprising a round target unit, a recessed rim having an annular rim, an annular rim rear face, tension members and annular waterproof surface.

Country Status (1)

Country Link
TW (1) TW332222B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI396766B (en) * 2005-03-11 2013-05-21 Soleras Advanced Coatings Nv Flat end-block for carrying a rotatable sputtering target
TWI495748B (en) * 2013-11-28 2015-08-11 Metal Ind Res & Dev Ct Deposition apparatus
TWI641710B (en) * 2014-12-03 2018-11-21 愛發科股份有限公司 Target assembly

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI396766B (en) * 2005-03-11 2013-05-21 Soleras Advanced Coatings Nv Flat end-block for carrying a rotatable sputtering target
TWI495748B (en) * 2013-11-28 2015-08-11 Metal Ind Res & Dev Ct Deposition apparatus
TWI641710B (en) * 2014-12-03 2018-11-21 愛發科股份有限公司 Target assembly
US10435783B2 (en) 2014-12-03 2019-10-08 Ulvac, Inc. Target assembly

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