TWI396766B - Flat end-block for carrying a rotatable sputtering target - Google Patents

Description

Flat end block for supporting a rotatable sputtering target

The present invention relates to an end block that is used to support a sputtering target in a sputtering apparatus. More particularly, the present invention relates to an end piece that is relatively flat when considered along the axis of symmetry of the target, while still accommodating all or some of the necessary mechanisms on the inside to energize, cool, seal, support, and rotate the target. .

Sputtering material from a target to cover a substrate has become a common practice in a wide range of technical fields, such as integrated circuit fabrication, large area glass coatings, and more and more coated flat panel displays. The sputtering is produced in a reduced pressure atmosphere wherein a sputtering or reactive gas or a mixture of the two is allowed in a controlled manner. Free electrons bouncate in the electromagnetically constrained wire slot plate, ionizing atoms or molecules adjacent to the target surface. These ions are sequentially accelerated toward the target of the negative bias, thus displacing the target atoms and giving the atoms sufficient kinetic energy to reach the substrate and coat it. The shape of the wire slot plate is defined by a magnetostatic array relative to the target surface of the sputtered surface. This deposition process is commonly referred to as "magnetron sputtering" due to the presence of a magnetic array.

A large number of devices have been developed, designed and built for specific applications. First, the smaller magnetron sputtering apparatus uses a fixed planar target that is initially predominantly circular (i.e., similar to the tantalum wafer being sputtered). There is then an elongated, rectangular shape (e.g., US 3878085) for coating through a larger substrate below the target. The elongated planar target is now commonly used in fine 'display coaters' to make flat panel displays such as liquid crystal displays (LCDs) and plasma screens. These planar targets are typically assembled in the access door of the device; the target surface is easily accessible (when the door is open) and extends in length and even extends over the width of the substrate. In a display coater, the coated substrate is held at an upright tilt angle (7° to 15°) and is tilted forward in a transport system. Since the target must be parallel to the substrate to achieve a uniform coating, the targets must be assembled at substantially the same angle.

The fixed target is easily cooled and energized (since it is stationary with respect to the device), but it has the advantage that the target material is only etched under the wire slot. The useful life of the target is thus limited to the point in time before the target is first penetrated. Magnetic arrays that are rotated relative to the target surface (such as, for example, for a circular planar magnetron as described in US 4,995,958) or with respect to a target surface, such as, for example, the elongated planar magnetron described in US 6,322,679, The problem of uneven corrosion must be addressed. Although this type of construction can alleviate the problem of uneven corrosion to a large extent, the system has been made more complicated.

The coating is, for example, a large area coater of all types of functional coating stacks of window glass, typically provided with a rotating tube sputtering target. In this application, economical drives are produced with low material costs and good quality. Rotating tubular targets are ideal because they can be extended to large widths and can be used for long periods of time. What must be exchanged is that because the target itself is rotated relative to the device, a complex and space-consuming 'end block' is required to support, rotate, energize, cool and isolate the coolant when it is held in the inner magnetic array. , air and electricity) rotate the target. There are two types of configurations: Such as the double right-angle end blocks disclosed in US 5096562 (Fig. 2, Fig. 6) and US 2003/0136672 A1, wherein the mechanisms for supporting, rotating, energizing, cooling and isolating (coolant, air and electricity) are divided. Between the two end blocks placed at each end of the target. The right angle system represents that the end blocks are all assembled on the wall parallel to the axis of rotation of the target. These end blocks are typically assembled at the bottom of the top box containing the auxiliary equipment. The top box with end blocks and assembly targets can be lifted completely away from the large area coater, making it easy to replace and maintain the target.

. A single straight line, such as disclosed in US 5200049 (Fig. 1), passes through the end blocks, wherein the mechanisms for supporting, rotating, energizing, cooling, and isolating are combined in one end block, and the target is cantilevered to hold in a large area coater Inside. The 'straight line through' axis representing the target is perpendicular to the wall on which the end block is assembled. A 'semi-cantilever' configuration is also described in US 5,620,577, in which the end of the target furthest from the end block is held by a mechanical support (without any functional mechanism incorporated in the support).

While rotatable targets can have many advantages when used to display painters (increasing exhaustion time, almost 100% use of targets), the assembly of these targets is still problematic: The choice of any single or double right end block is assembled to the door. In this case, however, most of the length of the door is occupied by the end blocks such that the target length can be used to not extend over the full length of the substrate width.

. Or, a choice of a single straight line through the end block, but in this case, due to the introduction of the one end block, it is necessary to completely variably display the coater.

Therefore, it is necessary to face the size limitation problem. A first possible solution is described in WO 2005/005682 A1, by reducing the width of the end blocks by means of a functional mechanism incorporating them on the inside of the target tube. While this solution is highly probable, the inventors have sought a further possibility of size reduction and have proposed the invention as described below which addresses the size limitation problem.

The general purpose of the present invention is to reduce or eliminate the problems associated with the prior art. One of the objects of the present invention is to enable a rotatable sputtering target to display a coater, whether it is a reset of an original equipment or an existing equipment. A further object of the invention is to reduce the length of the end blocks in the direction of the target axis of rotation, i.e. to provide a 'flat' end block. According to another aspect of the present invention, a sputtering apparatus using a flat end piece is provided.

In the interest of the inventors, all the prior art techniques such as US 5,096, 062, US 5,200, 049, and US 2003/0173217 are well assembled one after the other along the axis of rotation of the target tube inside the one end block. Different mechanisms for rotation, excitation, cooling, and isolation (air, coolant, and electricity). The idea outside the box carries these mechanisms to the basic principle of being placed radially in each other so that the space in the direction of the axis of rotation is saved. This new way of designing the end blocks is described in the appended claims, which are hereby incorporated by reference.

The first aspect of the present invention relates to an end block having a characteristic combination of the first item of the patent application scope. The features of the preferred embodiment of the end block of the present invention are set forth in Sections 2 through 21 of the related claims.

Reveal one end block. The one end block connects the sputtering target in the sputtering apparatus to the outside of the sputtering apparatus. Preferably, the one end block can be assembled as a single unit on the sputtering apparatus, but end blocks integrated with the wall can also be applied. The pressure in the end block is higher than in the venting device, preferably, the pressure is atmospheric pressure. A mechanism that can be removed from the target tube or a removable magnetic rod assembly is considered to be not an end block. The primary function of the end block is to support and rotate the target about the axis of rotation. When sputtering is performed at low gas pressure, the end blocks must be airtight at all times and of course also when rotating. Since the sputtering target will generate a lot of heat on the target surface, the target must be cooled, which is usually done with water or other suitable coolant. This coolant must be fed and discharged via the end block. Moreover, the target must feed current to keep the target above a certain potential. Again, this current must pass through the end block. In order to combine all of these functions, one end block can contain different mechanisms: A) A drive mechanism that rotates the target. Preferably, this is accomplished by a worm-gear system, or a cylindrical gear-gear system or a conical gear-to-gear cross-axis system, or a pulley-belt system, or any other mechanism of conventional rotatable targets. Any type of drive mechanism will occupy an area on the axis of rotation. The range of drive mechanisms is defined by the distance between the axes of rotation between two intersections of two planes perpendicular to the axis of rotation that are limited to drive gears or pulleys that rotate at the same rate of rotation as the target. In the case of gears, these planes define the maximum width of the gear. In the case of a pulley, these planes define the width of the pulley.

B) A rotatable electrical contact mechanism that supplies current to the target. This is preferably achieved by an electrical commutator mechanism provided with a brush in sliding contact with the commutator ring. In addition to the brush and ring configuration, two loops that slide toward each other can be used, or a conductive tape type connection such as a metal strip can be used. The latter solution conveniently combines the drive mechanisms radially to the electrical contact mechanism. In either case, the rotatable electrical contact mechanism can occupy a range on the axis of rotation that can again be defined by the intersection of the two planes and the axis of rotation that is perpendicular to the axis of rotation.

C) Most bearing mechanisms. More than one bearing mechanism will be required depending on the weight of the target. Those skilled in the art can select bearings of a suitable type from bearings of different known types, such as ball bearings, roll bearings, flat bearings, axial bearings or any other conventional type of bearing. Since a large number of bearing mechanisms may be required, each will define a range of bearing mechanisms on the axis of rotation. Again, the range of bearing mechanisms is defined as the spacing between the intersections of the bearing mechanisms on the axes of rotation perpendicular to the plane of rotation.

D) Most rotatable coolant sealing mechanisms. These coolant seals ensure that the coolant does not leak into the end block or worse into the vacuum device when the fixed and rotatable members of one end block are rotated relative to one another. In order to reduce this risk, most of the coolant seals are introduced step by step. A coolant detector is sometimes introduced between the primary and secondary seals to detect leakage and allow for controlled shutdown of the machine. A typical lip seal of the prior art is used as a coolant seal. However, other types of seals, such as mechanical face seals or meandering shaft seals, are not excluded, so that no omissions are made. As previously described, each coolant sealing mechanism defines a range of coolant sealing mechanisms between the intersections of the axes of rotation that limit the coolant seals and are perpendicular to the two parallel planes of the axis of rotation.

E) Finally, a majority of rotatable vacuum sealing mechanisms are required. These vacuum seals ensure vacuum integrity when the end block is fixed and the rotating parts are rotated relative to each other. A step series vacuum seal is preferred - the vacuum is gradually protected to reduce the risk of vacuum leaks. Again, a variety of different known seals are the most common of the lip seals, although other types of new seals such as iron fluid seals may of course be used. Similarly, each vacuum sealing mechanism defines a range of vacuum sealing mechanisms that cover the spacing between two points defined by the intersection of two parallel planes that are perpendicular to the axis of rotation and that limit the vacuum seal.

In addition to the foregoing, the end block can also have some mechanism for holding the magnetic array in a stable position, the array being introduced into the target tube before being assembled on the end block, with the target tube rotating therearound. At the other end of the magnetic array, a bearing mechanism typically holds an array of centerings associated with the target tube.

The end block of the present invention comprises at least two of the aforementioned five mechanisms (A, B, C, D and E). Thus, the end blocks of the present invention may comprise auxiliary groups of those mechanisms, as long as two or more of the mechanisms are in the auxiliary group and the other units are combined in the other end block (so increasing to 14 technically meaningful aids) group). The group of all five institutions is also considered to be an auxiliary group.

The basic idea of assembling these different mechanisms in a radial rather than a longitudinal direction (one after the other) can now be conveniently expressed in the characterizing part of claim 1 of the patent application. When the two ranges corresponding to those mechanisms overlap each other on the rotating shaft, the two mechanisms are considered to be radially assembled to each other. The overlap between the ranges can be local, that is, when the two ranges have only a part of the common. Or it may be complete, in which case a mechanism is completely covered radially inward or radially outward by other mechanisms. In the end block of the present invention, at least two mechanisms overlap each other. It thus does not exclude the existence of more than one pair of overlapping mechanisms, for example, two pairs of overlapping mechanisms are present in a single end block (which of course represents that the three mechanisms must be present in the end block). It also does not exclude that the three institutions overlap each other (equivalent to three pairs of overlaps). Those skilled in the art can easily understand that more mechanisms are radially constructed (up to five mechanisms, of course), which can further reduce the length/axial length of the end blocks.

In the items 2 to 9 of the patent application scope, a particularly useful auxiliary group of mechanisms included in one end block is disclosed, wherein at least two different mechanisms are radially assembled to each other.

In the first preferred embodiment - the scope of claim 2 - the drive mechanism (A), the electrical contact mechanism (B) and the coolant sealing mechanism (D) are combined in a single end block (other mechanisms are applied In the end block at the other end of the target, for example). With this preferred combination, a minimum mechanism is provided with all interconnections (coolant, power, motion) through a single end block. At least two institutions mentioned in the previous speed must overlap each other.

The second preferred auxiliary group - Patent Application No. 3 - contains the drive mechanism (A), the bearing mechanism (C) and the vacuum sealing mechanism (E) in a single end block (the other end block must accommodate the remaining mechanism). This one end block is described in Figure 3 of US 2003/0136672. Again, at least two mechanisms must overlap to have an end block in accordance with the present invention. Do not rule out more overlapping institutions.

In the third auxiliary group - Patent Application No. 4 - the end block densely accommodates the rotatable electrical contact mechanism (B), the bearing mechanism (C) and the vacuum sealing mechanism (E). At least two institutions must overlap, and of course do not rule out more overlap.

The fourth auxiliary group - patent application scope 5 - combined bearing mechanism (C), rotatable coolant sealing mechanism (D) and rotatable vacuum sealing mechanism (E) in a single end block (for example, shown in US 5096562, figure 6, the left end block). The concept of the invention requires at least two and possibly more machine pairs to overlap.

Fifth auxiliary group - patent application scope item 6 - combined drive mechanism (A), bearing mechanism (C), rotatable coolant sealing mechanism (D) and rotatable vacuum sealing mechanism (E) into a single end block Inside (similar to US 5096562, Figure 2, left end block). The four mechanisms of the end block of the present invention have at least two mechanisms in the overlapping position, and there may be more pairs of overlapping mechanisms.

Sixth Auxiliary Group - Patent Application No. 7 - Application Drive Mechanism (A), Rotatable Electrical Contact Mechanism (B), Bearing Mechanism (C) and Rotatable Vacuum Sealing Mechanism (E) in Single End Block (US 5096562, Figure 6, right end block). Again, in the end blocks of the present invention, at least two of the mechanisms are radially assembled and overlapped. The same, there may be more overlapping institutions.

The seventh auxiliary group - patent application scope 8 - includes a rotatable electrical contact mechanism (B), a bearing mechanism (C), a rotatable coolant sealing mechanism (D) and a rotatable vacuum sealing mechanism (E) at one end block Medium (eg US 2003/0136672, Figure 6). According to the inventive concept, at least two of the four mechanisms must be in an overlapping position. But more overlapping institutions are equally likely, up to six institutions.

Finally, the eighth auxiliary group - patent application scope 9 - contains all mechanisms, drive mechanism (A), rotatable electrical contact mechanism (B), bearing mechanism (C), coolant sealing mechanism (D) and vacuum seal The mechanism (E) is in a single end block (Figure 1 of US 5200049). It does not exclude that the other end is held by a bearing mechanism. In accordance with the teachings of the present invention, at least two mechanisms must be radially arranged, but equally likely there are more overlapping mechanisms.

The overlap of the two functions is further described in items 10 to 19 of the scope of the patent application. All combinations can be attached to item 1 of the scope of the patent application. For auxiliary groups in some institutions, there may only be several overlapping pairs. In the first preferred combination, at least the range of the drive mechanism overlaps with the range of the electrical contact mechanism (item 10 of the patent application). In the second combination (article 11 of the patent application), the drive mechanism and the bearing mechanism are all radially assembled to each other. Patent Application Serial No. 12 describes a preferred compact embodiment in which the drive mechanism is radially related to the coolant seal. Alternatively, the vacuum seal can be radially associated with the drive mechanism (item 13 of the patent application). Patent Application Nos. 14, 15, and 16 define a preferred combination, one of which consists of a bearing mechanism, a coolant seal placed radially to the electrical contact mechanism, and a vacuum seal: an easy-to-use compact implementation example. The combination of a radially assembled bearing mechanism and a coolant mechanism (Patent No. 17) or a combination of a bearing mechanism and a vacuum sealing mechanism (Application No. 18) is relatively easy to use at night, and thus a preferred dense end block. The foregoing can also be applied to the radial combination of the coolant sealing mechanism and the vacuum sealing mechanism (Patent No. 19 of the patent application).

Again: the combination defined in clauses 10 to 19 of the patent application does not exclude the possibility that more than one pair of mechanisms overlap in a single end block. There can be even more overlap in a single end block, such as three mechanisms that are radially opposite each other. Indeed, it is perfectly possible to assemble, for example, mutually radial bearing mechanisms, electrical contact mechanisms, and coolant seals, as will be exemplified in the embodiments.

The end block according to the invention may be of the right angle type (article 20 of the patent application), wherein the axis of rotation of the target is parallel to the wall of the mounting end block. Or it may be a straight-through type (Patent No. 21), that is, the axis of rotation of the target is perpendicular to the wall.

The second aspect of the present invention relates to a sputtering apparatus using the end block of the present invention according to the feature of claim 22 of the patent application. Specific features for the preferred assembly end blocks in the sputtering apparatus are defined in claims 23 to 24 of the scope of the patent application.

As explained in the object of the invention, the end blocks according to the invention are particularly desirable, but not limited, to be mounted inside a sputtering device such as a display coater. The sputtering apparatus has an ventable space defined by walls. Particularly disclosed (Patent Application No. 22) is a sputtering apparatus provided with an end block of the present invention or an end block located on one of the walls. More preferably, for ease of service, the end blocks are assembled on the movable wall of the chamber (Patent No. 23). The best end block can be assembled on an access door (Patent No. 24).

1A and B both show the problem solved by the present invention. Figure 1A schematically shows an open sputtering apparatus 10 that is oriented substantially perpendicular to a typical display coater. Figure 1B shows a cross section of the same device 10 with the door closed. The device 10 includes an exhaustable chamber 100. The chamber 100 can be part of a production line interconnected via a lock 101 to allow the chamber 100 to be separated from the remaining production line. In the chamber 100, the substrate 102 is sequentially transported by the transport system 104. The substrate 102 is tilted at a tilt angle on a series of rolls 105. The door 106 of the chamber 100 holds one, two or more rotatable targets 108, 108'. When the door is closed (Fig. 1B), the targets 108, 108' become parallel to the substrate 102, and each target is held by the two end blocks 110, 112 (target 108) and 110', 112' (target 108') on the door. . The end blocks 110, 112 are connectors between the rotatable target 108 and the fixed chamber. Its main function name is to allow the target 108 to rotate about its axis of rotation 111. In the end block, there is no low pressure environment, which is the baseline atmospheric pressure. The different mechanisms (A, B, C, D, and E) must be combined in a single end block (lower end block 110 or upper end block 112) or two end blocks 110, 112 that are assigned to the two ends of the target. The mechanism incorporated in the low voltage portion of the device is not considered to be the mechanical portion of the one end block. In the case of, for example, a single end block, the centering pin that is assembled to the door 106 at the target end that is connected to the target end of the end block is not considered to be an end block. Via the end block, the rotational motion 120, the target current 122, and the coolant 124 are fed to the target.

Figure 2 shows a schematic view of a first preferred embodiment of an end block in accordance with the present invention. End block 200 incorporates all of the mechanisms (A, B, C, D, and E) inside a single housing 201. It is a right angle type and can be assembled to a wall or door 202 of a coater to hold the upper end of the target 220. The target 220 is rotatable about its axis of rotation 222. Target 220 is coupled to retaining ring 226 by connector 224. The target coolant pipe 230 supporting the electromagnetic rod not shown in the drawing communicates with the coolant feed pipe 228 via the connector 232. The coolant feed pipe 228 is tightly and fixedly attached to the end block housing 201. The coolant is fed into the coolant tube 228 via the coolant feeder 234. The coolant is collected in a fixed coolant collector 229 that is coaxial with the coolant tube 228 and is withdrawn via tube 236.

The target 220 is rotationally driven by the gear 204 via the retaining ring 226, thus providing a drive mechanism (A). The combination of the teeth on the rotation and the worm shaft 205 is driven, for example, by an electric motor (not shown). The assembly ring 207 retains the axial bearing 208 acting as a bearing mechanism (C).

The rotatable electrical contact mechanism (B) is provided by a series of brushes 206 that are assembled into an annular section coaxially with the axis of rotation 222. These brushes 206 are each elastically fitted in the conductance ring 290 and slid toward the slip ring 203. The brush 206 receives the current fed by the electrical leads 209 via the conductive ring 290 on its rotation. The slip ring 203 is in electrical contact with the target 220 via the gear 204 and the retaining ring 226. Both rotatable vacuum sealing mechanisms (E) are provided by lip seals 212. The rotatable coolant sealing mechanism (D) is combined by a coolant seal 210 of a meandering shaft seal. The coolant seal 210 is fitted between the retaining ring 226 and the coolant collector 229.

Each of the aforementioned mechanisms occupies some length along the axis of rotation. For example, the width of the gear 204 occupies the range 'a' shown in FIG. The range 'a' is defined as the spacing on the axis of rotation formed by the limit gear 204 and the intersection of two planes perpendicular to the axis of rotation of the same axis of rotation. In the same way, other institutions will occupy certain ranges on the axis of rotation: The rotatable electrical contact mechanism (B) occupies a range 'b' which is equal to the axial width of the brush 206 and the rings 203, 290.

. The bearing mechanism (C) occupies a range 'c' covered by the bearing 208.

. The coolant sealing mechanism (D) occupies a range 'd' corresponding to the coolant seal 210.

. The vacuum sealing mechanism (E), with two vacuum seals 212, covers two ranges 'e1' and 'e2' on the axis of rotation.

Consistent with the inventive concept, the following partial overlap ranges are available (Table 1):

Where 'P' represents partial overlap and 'F' represents full overlap. Empty grids represent no overlap at all. It will be readily apparent to those skilled in the art that the foregoing configuration results in one end block not occupying too much space along the longitudinal axis of rotation.

Figure 3 shows an engineering drawing incorporating the features of the end blocks of the present invention. This detailed view can be used by those skilled in the art to make the end block. In order not to make this description too cumbersome, the functional parts will not be identified or explained. For example, a fixing mechanism such as a screw, a bolt, or the like, or a member of a fixed sealing mechanism such as an O-ring can be easily recognized in the drawings.

The end block 300 of the present invention supports a target 302 (partially shown) about the axis of rotation 304. The target 302 is removably secured to the end block via the mounting ring 303. The assembly ring system is attached to a rotatable intermediate piece 311. End block 300 is attached to wall 306 of a sputtering apparatus. The end block has holes 305, 307 for feeding and extracting coolant, and the arrows indicate the flow direction of the coolant. A magnetic rod (not shown) is stably held via a connector 309, and the connector 309 is tangentially locked into the inner tube 308 that is fixedly coupled to the inner side of the end block 300.

Target 302 is driven by a cross-axis, bevel gear pair 310-312 such that gear 312 is actuated by an electric motor (not shown) via axis 314. The main gear 310 is fixed to the target 302 via the rotatable intermediate piece 311. The commutator ring 320 is also attached to the intermediate member 311, which includes six brushes 322 that are distributed in a fan shape on the periphery of the ring 320. The brush 322 slides toward the inside of the fixed contact ring 324. The target 302 thus receives its current from a source of current (not shown) via leads (not shown), contact ring 324, brush 322, commutator ring 320, and intermediate 311. The target is rotatably supported by two bearings: a ball bearing 332 and a needle roller bearing 330. The coolant is held by two rotating lip seals: a primary seal 342 and a secondary seal 340. The vacuum integrity of the end blocks is ensured by the two rotary lip seals 350,352.

Again, the different scopes attached to these institutions can be identified. It is summarized in Table 2. Lower case letters are represented in the range of Figure 3.

Here, the letters P and F have the same meanings as those used in Table 1, and the spaces are identically represented without overlapping. Although the different mechanisms show only a small degree of overlap, it is clear from the table that the end blocks of Figure 3 are still under the same inventive concept of mutually radial assembly mechanisms.

Figure 4 shows a third preferred embodiment of the present invention. The end block 400 is provided with a connecting ring 403 to securely but removably connect the target tube (not shown) to the target receiving flange. The target tube (not shown) is rotated by the flange 401 about the axis of rotation 404. The coolant is fed to the target via an electrically insulating inner body 408 (not shown). The end of the inner body 408 is provided with a joint 409 which is mated with a magnetic rod insert (not shown) for stably holding the electromagnetic rod with respect to the rotating target. The coolant follows the direction of the arrow. End block 400 will be assembled on wall 406 of the sputtering apparatus.

The target (not shown) is driven by a toothed belt 412 that incorporates a belt gear 410. This belt gear is connected to the target receiving flange 401 via the intermediate piece 405. A fixed commutator 420 fixed to the connection electrode 421 embedded in the inner body 408 is provided inside the belt gear 410. The commutator is provided with six brushes 422 each covering a sector of the circumference of the commutator 420. The brushes are all elastically assembled and slid toward the inner ring 424 that is secured to the inside of the belt gear 410. The current thus follows the path from the current source (not shown) to the target (not shown): electrode 421, fixed commutator ring 420, fixed brush 422, rotating ring 424, belt gear 410, middleware 405 The target receives the flange 401. Needle roller bearing 430 and larger ball bearing 432 provide the necessary bearing mechanism. The mechanical seal cassette 443 provides a first coolant seal. The cassette has two rings of the same diameter each being axially pressed against each other. The contact faces are all very precisely polished so that no coolant can be released through the contact faces. One side of the mechanical seal cassette 443 is tangentially locked by the pins 441, 441'. The rotating tungsten intermediate ring 405 is closely coupled to the rotating intermediate piece 405 and is sealed from the coolant flow by two fixed O-rings. The secondary lip seal 440 further ensures coolant circuit integrity. Vacuum integrity is ensured via the primary vacuum lip seal 450' and the secondary lip seal 450.

Again, a table summarizing the overlapping regions of this design can be drawn - Table 3. The majority of the range occupied by the different mechanisms on the axis of rotation is represented by the lowercase letters -a, b, c1, c2, d1, d2, e1, e2 on Figure 4.

The third embodiment thus clearly embodies the aforementioned inventive concept of the inventors.

The foregoing embodiments have all the necessary mechanisms incorporated in a single end block. The other end of the end block can thus be freely erected or centered by a centering pin that is connected to the same wall as the wall on which the end block is assembled.

It is only a matter of skill for those skilled in the art to redistribute the mechanisms necessary to operate the device to the two end blocks (individually at each end of the target) by employing these preferred embodiments and excluding certain mechanisms therefrom. It will be readily understood that as long as these modified embodiments exhibit overlapping mechanisms, they fall within the scope of the present invention.

Similarly, all of the aforementioned end blocks are of a right angle type, i.e., the axis of rotation is parallel to the wall on which the end blocks are assembled. It is only a small problem for those skilled in the art to convert these right-angle types into a straight-through type (i.e., an end block whose axis of rotation is perpendicular to the wall on which the end block is assembled). For example, the embodiment of Figure 4 can be readily employed via the elongated intermediate member 405 such that there is sufficient space to fit the end block and face the wall of the sputter device with the target orientation (importing the necessary O-rings and securing mechanisms) .

Accordingly, all such modifications and changes are intended to be included within the scope of the invention and the scope of the invention.

10. . . Sputtering device

100. . . Exhaust chamber

101. . . lock

102. . . Substrate

104. . . Shipping system

105. . . Roll

106. . . wall

108. . . Rotatable target

108'. . . Rotatable target

110. . . End block

110'. . . End block

111. . . Rotation axis

111'. . . Rotation axis

112. . . End block

112'. . . End block

120. . . Rotational motion

122. . . Target current

124. . . Coolant

200. . . End block

201. . . Cover

202. . . door

203. . . Slide 澴

204. . . gear

205. . . Worm shaft

206. . . Brush

207. . . Assembly ring

208. . . Axial bearing

209. . . Electrical lead

210. . . Coolant seal

212. . . Lip seal

220. . . aims

222. . . Rotation axis

224. . . Connector

226. . . Holding ring

228. . . Coolant feed tube

229. . . Fixed coolant collector

230. . . Target coolant tube

232. . . Connector

234. . . Coolant feeder

236. . . tube

290. . . Conductive ring

300. . . End block

302. . . aims

303. . . Assembly ring

304. . . Rotation axis

305. . . Hole

306. . . wall

307. . . Hole

308. . . Inner tube

309. . . Connector

310. . . Main gear

311. . . Rotatable middleware

312. . . gear

314. . . Axis

320. . . Commutator ring

322. . . Brush

324. . . Contact ring

330. . . Needle roller bearing

332. . . Ball bearing

340. . . Secondary seal

342. . . Main seal

350. . . Rotating lip seal

352. . . Rotating needle roller seal

400. . . End block

401. . . Target bearing flange

403. . . Connecting ring

404. . . Rotation axis

405. . . Middleware

406. . . wall

408. . . Internal ontology

409. . . Connector

410. . . With gear

412. . . Toothed belt

420. . . Fixed commutator

421. . . Connecting electrode

422. . . Brush

424. . . Inner ring

430. . . Needle roller bearing

432. . . Ball bearing

440. . . Secondary lip seal

441. . . pin

441'. . . pin

442. . . Contact surfaces

443. . . Mechanical seal cassette

444. . . Relative tungsten carbide ring

450. . . Secondary lip seal

450'. . . Main vacuum lip seal

a. . . range

b. . . range

c. . . range

C1. . . range

C2. . . range

d. . . range

D1. . . range

D2. . . range

E1. . . range

E2. . . range

(A). . . Drive mechanism

(B). . . Rotatable electrical contact mechanism

(C). . . Bearing mechanism

(D). . . Coolant sealing mechanism

(E). . . Rotatable vacuum sealing mechanism

The invention will now be described in more detail with reference to the accompanying drawings in which:

Figure 1A is a schematic perspective view showing a display coater.

Figure 1B is a schematic cross-sectional view showing the display coater perpendicular to the direction of travel of the substrate.

Figure 2 shows a schematic embodiment of an end block incorporating all necessary mechanisms and having a large degree of overlap.

Figure 3 shows a design cross section in which the rotatable electrical contact mechanism overlaps the coolant sealing mechanism and partially overlaps the bearing mechanism.

Figure 4 shows a design cross section in which the drive mechanism overlaps a rotatable electrical contact mechanism that overlaps the primary coolant sealing mechanism in its rotation, and the drive mechanism also overlaps the bearing mechanism.

200. . . End block

201. . . Cover

202. . . door

203. . . Slide 澴

204. . . gear

205. . . Worm shaft

206. . . Brush

207. . . Assembly ring

208. . . Axial bearing

209. . . Electrical lead

210. . . Coolant seal

212. . . Lip seal

220. . . aims

222. . . Rotation axis

224. . . Connector

226. . . Holding ring

228. . . Coolant feed tube

229. . . Fixed coolant collector

230. . . Target coolant tube

232. . . Connector

234. . . Coolant feeder

236. . . tube

290. . . Conductive ring

a, b, c, d, e1, e2. . . range

Claims (24)

An end block for rotatably supporting a target about an axis of rotation in an exhaust gas sputter device, the end block comprising an auxiliary group consisting of at least two of the following mechanisms: a drive mechanism covering a range of the drive mechanism on the axis, the drive mechanism range being defined as a vertical protrusion of the drive mechanism on the axis. a rotatable electrical contact mechanism covering a range of contact mechanisms on the axis, the contact mechanism range being defined as a vertical protrusion of the contact mechanism on the axis. a plurality of bearing mechanisms covering a range of bearing mechanisms on the axis, the range of bearing mechanisms being defined as vertical protrusions of the bearing mechanisms on the axis. a plurality of rotatable coolant sealing mechanisms that cover a range of coolant sealing mechanisms on the axis, the range of coolant sealing mechanisms being defined as vertical protrusions of the coolant sealing mechanisms on the axis, . a plurality of rotatable vacuum sealing mechanisms covering a range of vacuum sealing mechanisms on the axis, the vacuum sealing mechanism range being defined as vertical protrusions of the vacuum sealing mechanisms on the axis, characterized in that At least two of the auxiliary groups within the mechanisms are radially oriented to each other Arranged so that at least two ranges corresponding to the at least two mechanisms overlap each other on the axis. For example, in the end block of claim 1, the auxiliary group includes the following institutions: a drive mechanism covering a range of the drive mechanism on the axis, the drive mechanism range being defined as a vertical protrusion of the drive mechanism on the axis. a rotatable electrical contact mechanism covering a range of contact mechanisms on the axis, the contact mechanism range being defined as a vertical protrusion of the contact mechanism on the axis. A plurality of rotatable coolant sealing mechanisms cover a range of coolant sealing mechanisms on the axis, the range of coolant sealing mechanisms being defined as vertical protrusions of the coolant sealing mechanisms on the axis. For example, in the end block of claim 1, the auxiliary group includes the following institutions: a drive mechanism covering a range of the drive mechanism on the axis, the drive mechanism range being defined as a vertical protrusion of the drive mechanism on the axis. a plurality of bearing mechanisms covering a range of bearing mechanisms on the axis, the range of bearing mechanisms being defined as vertical protrusions of the bearing mechanisms on the axis. a plurality of rotatable vacuum sealing mechanisms covering a range of vacuum sealing mechanisms on the axis, the vacuum sealing mechanism range Defined as vertical projections of the vacuum sealing mechanisms on the axis. For example, in the end block of claim 1, the auxiliary group includes the following institutions: a rotatable electrical contact mechanism covering a range of contact mechanisms on the axis, the contact mechanism range being defined as a vertical protrusion of the contact mechanism on the axis. a plurality of bearing mechanisms covering a range of bearing mechanisms on the axis, the range of bearing mechanisms being defined as vertical protrusions of the bearing mechanisms on the axis. A plurality of rotatable vacuum sealing mechanisms cover a range of vacuum sealing mechanisms on the axis, the vacuum sealing mechanism range being defined as vertical projections of the vacuum sealing mechanisms on the axis. For example, in the end block of claim 1, the auxiliary group includes the following institutions: a drive mechanism covering a range of the drive mechanism on the axis, the drive mechanism range being defined as a vertical protrusion of the drive mechanism on the axis. a plurality of rotatable coolant sealing mechanisms that cover a range of coolant sealing mechanisms on the axis, the range of coolant sealing mechanisms being defined as vertical protrusions of the coolant sealing mechanisms on the axis, . A plurality of rotatable vacuum sealing mechanisms cover a range of vacuum sealing mechanisms on the axis, the vacuum sealing mechanism range being defined as vertical projections of the vacuum sealing mechanisms on the axis. For example, in the end block of claim 1, the auxiliary group includes the following institutions: a drive mechanism covering a range of the drive mechanism on the axis, the drive mechanism range being defined as a vertical protrusion of the drive mechanism on the axis. a plurality of bearing mechanisms covering a range of bearing mechanisms on the axis, the range of bearing mechanisms being defined as vertical protrusions of the bearing mechanisms on the axis. a plurality of rotatable coolant sealing mechanisms that cover a range of coolant sealing mechanisms on the axis, the range of coolant sealing mechanisms being defined as vertical protrusions of the coolant sealing mechanisms on the axis, . A plurality of rotatable vacuum sealing mechanisms cover a range of vacuum sealing mechanisms on the axis, the vacuum sealing mechanism range being defined as vertical projections of the vacuum sealing mechanisms on the axis. For example, in the end block of claim 1, the auxiliary group includes the following institutions: a drive mechanism covering a range of the drive mechanism on the axis, the drive mechanism range being defined as a vertical protrusion of the drive mechanism on the axis. a rotatable electrical contact mechanism covering a range of contact mechanisms on the axis, the contact mechanism range being defined as a vertical protrusion of the contact mechanism on the axis. Most bearing mechanisms that cover the axis on the axis The range of the bearing mechanism is defined as the vertical protrusion of the bearing mechanism on the axis. A plurality of rotatable vacuum sealing mechanisms cover a range of vacuum sealing mechanisms on the axis, the vacuum sealing mechanism range being defined as vertical projections of the vacuum sealing mechanisms on the axis. For example, in the end block of claim 1, the auxiliary group includes the following institutions: a rotatable electrical contact mechanism covering a range of contact mechanisms on the axis, the contact mechanism range being defined as a vertical protrusion of the contact mechanism on the axis. a plurality of bearing mechanisms covering a range of bearing mechanisms on the axis, the range of bearing mechanisms being defined as vertical protrusions of the bearing mechanisms on the axis. a plurality of rotatable coolant sealing mechanisms that cover a range of coolant sealing mechanisms on the axis, the range of coolant sealing mechanisms being defined as vertical protrusions of the coolant sealing mechanisms on the axis, . A plurality of rotatable vacuum sealing mechanisms cover a range of vacuum sealing mechanisms on the axis, the vacuum sealing mechanism range being defined as vertical projections of the vacuum sealing mechanisms on the axis. For example, in the end block of claim 1, the auxiliary group includes the following institutions: a drive mechanism covering a range of drive mechanisms on the axis, the range of drive mechanisms being defined as a vertical projection of the drive mechanism on the axis Up, a rotatable electrical contact mechanism covering a range of contact mechanisms on the axis, the contact mechanism range being defined as a vertical protrusion of the contact mechanism on the axis. a plurality of bearing mechanisms covering a range of bearing mechanisms on the axis, the range of bearing mechanisms being defined as vertical protrusions of the bearing mechanisms on the axis. a plurality of rotatable coolant sealing mechanisms that cover a range of coolant sealing mechanisms on the axis, the range of coolant sealing mechanisms being defined as vertical protrusions of the coolant sealing mechanisms on the axis, . A plurality of rotatable vacuum sealing mechanisms cover a range of vacuum sealing mechanisms on the axis, the vacuum sealing mechanism range being defined as vertical projections of the vacuum sealing mechanisms on the axis. The end block of any one of claims 1, 2, 7 or 9 wherein the range of the drive mechanism overlaps with the range of the contact mechanism. The end block of any one of claims 1, 3, 6, 7, or 9, wherein the range of the drive mechanism overlaps with at least one of the bearing mechanism ranges. The end block of any one of claims 1, 2, 6 or 9 wherein the range of the drive mechanism overlaps with at least one of the coolant sealing mechanisms. The end block of any one of claims 1, 3, 6, 7, or 9, wherein the range of the drive mechanism is at least one of the range of the vacuum sealing mechanism overlapping. The end block of any one of claims 1, 4, 7, 8, or 9, wherein the range of the contact mechanism overlaps with at least one of the bearing mechanism ranges. The end block of any one of claims 1, 2, 8 or 9 wherein the range of the contact mechanism overlaps with at least one of the coolant sealing mechanisms. The end block of any one of claims 1, 4, 7, 8, or 9, wherein the range of the contact mechanism overlaps with at least one of the vacuum sealing mechanisms. The end block of any one of claims 1, 5, 6, 8, or 9, wherein at least one of the bearing mechanisms ranges from at least one of the coolant sealing mechanisms. An end block of any one of claims 1, 3, 4, 5, 6, 7, 8, or 9 of the patent application, wherein at least one of the bearing mechanism ranges overlaps at least one of the vacuum sealing mechanisms . The end block of any one of claims 1, 3, 4, 5, 7 or 8 wherein at least one of the coolant sealing mechanisms overlaps at least one of the vacuum sealing mechanisms. The end block of claim 1, wherein the end block is for supporting a target, the target having an axis of rotation for assembling a wall of a sputtering apparatus, the end block further It is characterized in that the axis of rotation is parallel to the wall. For example, the end block of claim 1 of the patent scope, wherein the end block is used To support a target, the target has an axis of rotation for assembly on a wall of a sputtering apparatus, the end block being further characterized in that the axis of rotation is perpendicular to the wall. A sputtering apparatus comprising a wall for providing an ventable space, the apparatus further comprising an end block mountable to one of the walls, the end block having any one of claims 1 to 21 Characteristics. A sputtering apparatus according to claim 22, wherein the wall to which the end block is fitted is removable. A sputtering apparatus according to claim 23, wherein the removable wall system is hingedly joined to the apparatus.