TW329558B - The method & apparatus for manufacturing DRAM & SRAM on single semiconductor chip - Google Patents

The method & apparatus for manufacturing DRAM & SRAM on single semiconductor chip

Info

Publication number
TW329558B
TW329558B TW085111532A TW85111532A TW329558B TW 329558 B TW329558 B TW 329558B TW 085111532 A TW085111532 A TW 085111532A TW 85111532 A TW85111532 A TW 85111532A TW 329558 B TW329558 B TW 329558B
Authority
TW
Taiwan
Prior art keywords
sram
dram
manufacturing
semiconductor chip
film transistor
Prior art date
Application number
TW085111532A
Other languages
English (en)
Inventor
meng-song Liang
Show-Gwo Wuu
Chyuan-Jong Wang
Jong-Huei Su
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Priority to TW085111532A priority Critical patent/TW329558B/zh
Application granted granted Critical
Publication of TW329558B publication Critical patent/TW329558B/zh

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  • Semiconductor Memories (AREA)
TW085111532A 1996-09-20 1996-09-20 The method & apparatus for manufacturing DRAM & SRAM on single semiconductor chip TW329558B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW085111532A TW329558B (en) 1996-09-20 1996-09-20 The method & apparatus for manufacturing DRAM & SRAM on single semiconductor chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW085111532A TW329558B (en) 1996-09-20 1996-09-20 The method & apparatus for manufacturing DRAM & SRAM on single semiconductor chip

Publications (1)

Publication Number Publication Date
TW329558B true TW329558B (en) 1998-04-11

Family

ID=58262543

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085111532A TW329558B (en) 1996-09-20 1996-09-20 The method & apparatus for manufacturing DRAM & SRAM on single semiconductor chip

Country Status (1)

Country Link
TW (1) TW329558B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI385729B (zh) * 2008-07-02 2013-02-11 Applied Materials Inc 用以製造高效能金屬氧化物和金屬氮氧化物薄膜電晶體之閘極介電層處理
US10211344B2 (en) 2009-10-16 2019-02-19 Semiconductor Energy Laboratory Co., Ltd. Logic circuit and semiconductor device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI385729B (zh) * 2008-07-02 2013-02-11 Applied Materials Inc 用以製造高效能金屬氧化物和金屬氮氧化物薄膜電晶體之閘極介電層處理
US10211344B2 (en) 2009-10-16 2019-02-19 Semiconductor Energy Laboratory Co., Ltd. Logic circuit and semiconductor device
US10593810B2 (en) 2009-10-16 2020-03-17 Semiconductor Energy Laboratory Co., Ltd. Logic circuit and semiconductor device
US10770597B2 (en) 2009-10-16 2020-09-08 Semiconductor Energy Laboratory Co., Ltd. Logic circuit and semiconductor device
US11302824B2 (en) 2009-10-16 2022-04-12 Semiconductor Energy Laboratory Co., Ltd. Logic circuit and semiconductor device
US11742432B2 (en) 2009-10-16 2023-08-29 Semiconductor Energy Laboratory Co., Ltd. Logic circuit and semiconductor device

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees