TW322530B - Manufacturing method of electro deposition transfer plates - Google Patents

Abstract

A manufacturing method for electro deposition transfer plates includes: a. adhere a metal film on a plain base plate with glue A; b. produce lots of metal exposed elements in rows and columns and separates them with insulated films; c. dip a metal layer on those elements for pixel patterns; d. paint a photosensitive insulated film for all and make a conductive join on each; e. paint a layer of conductive metal film on the photosensitive insulated film; f. use the metal film to produce three insulated electro wires on each column; g. adhere the plate after f. process to the transfer base plate with glue B; h. get rid of the base plate of a., glue A and metal film and accomplish the product.

Description

A7 B7 322530 V. Description of the invention (i) Background of the invention With the rapid development of information technology, the display technology has also continued to innovate and break through. The small flat panel display (FPD) has gradually replaced the trend of the traditional cathode ray tube, and the liquid crystal display (LCD) is the leader of the flat panel display because of its light weight and thin thickness. It has the advantages of low driving voltage and low power consumption, and has developed rapidly. In recent years, due to the successful development of thin film transistor LCDs, it can provide high-performance full-color displays, and the future development is even more limitless. Multi-color (multi-cotor) or full-color (fUllc〇t〇r) LCD needs to have two control mechanisms of hue and light and dark, these mechanisms are controlled by high grayscale black and white LCD, color filter and backlighting (backlighting) materials Among them, the color filter is the most important technology to control color. At present, there are five methods for making color filter films that have been commercialized: (1) dyeing (2) etching (3) pigment deposition (4) pigment deposition (4) electrowriting ( electro deposition) (5) Printing Dyeing and etching are based on dyes. There are many types of dyes, uniform hue, high dyeing power, and good color density and penetration with the resin. Therefore, the main coloring materials for resins used in making color filter films are US Patent Nos. 4 82〇619 and 4 837 〇98 Dyeing method is used. However, due to the poor light resistance and heat resistance of dyes, pigments are now gradually replaced by pigment dispersion methods and electro-authoring methods that use pigments as the main technology. The latter two are arguably the most popular method at present. Pigment has better thermal property, its particles are dispersed in resin, the particle size is controlled below 0.2um, and it has excellent color rendering power. U.S. Patent Nos. 5, 〇85,973, 4,786,148 and Japanese Patent Application disclose the ready-to-use pigment dispersion method of Sho 60-129739. This method uses a photosensitive photocurable resin coating, and the paper size is applicable to China Guohong A Fu / ___________ _________ 83. 3.10, ((Please read the precautions on the back before filling out this page). Industrial and consumer cooperative printing and printing 322530 printed by the Ministry of Economic Affairs Central Sample Bureau of the Consumer Labor Cooperative V. Description of the invention (2) Lithography to produce color filter films for TFT LCD with high resolution and arrangement of pixels (pixei pattern) Convenient and flexible; but the process is complicated, at least three masks are required, and it must be repeatedly and accurately aligned, occasionally, it affects the yield, and the resin has free radical reaction when it hardens, and it must be covered with a protective film to isolate the air from it. Disadvantages. The electro-authoring method is to attach polymers and pigments dispersed in water to the patterned ITO (indium tin oxide) transparent electrode by electrophoresis to make pixels. The advantage of this method is the color filter The film thickness is uniform, the film surface is flat, suitable for making thin circuits, and the cost is also lower than the pigment dispersion method. However, due to the design of the electric plate, the electric plate is generally only used for stripe (stripe) IT0 transparent electrode, so it is only suitable for making STN LCD color filter film. Although the printing method is the lowest cost among all manufacturing methods, but because of its poor dimensional accuracy, flatness and reliability, the acceptance of advanced electronic products Low. In order to take advantage of the pigment dispersion method and the electro-authoring method and overcome its shortcomings, Japan Ink (Nippon Paint) first developed the electrophotographic lithography transfer method (eD. US Patent 5,214,541 uses this method. This method combines In the second project, the use of a photomask with three or more different light transmittance areas, only need to be exposed once to get different exposure areas, and then use different developer to remove each photoresist-strip, and in During this period, red, green and blue pixels are sequentially printed, and finally the completed color filter is transferred to another transparent substrate. The advantages of this method can be summarized as follows: (1) Only one exposure is required, only one light is required The cover does not need to repeat the precise alignment project; (2) combined with the photoresist project can obtain a finer pattern than the electrographic method; (3) the pixel pattern can be arranged with a large degree of freedom, either striped or non-striped patterns; (4) Just like the electronic writing, the color is light The film thickness is uniform and the film surface is flat; (5) No transparent conductive layer is needed, and the light transmittance is not lost. However, at least three developer solutions with different concentrations are required for stripping the photoresist, the operating conditions are narrow, and the photoresist selection is difficult. In addition, the combination of photoresist and electro-hydraulic fluid is also limited. At the same time, the color filter made by this method can only be used once, regardless of success or failure, it can not be used again after transfer once, and it must be started from scratch. Applicable to China National Standard (CNS) A々 present grid (21〇297297) 83. 3.10,000 (please read the precautions on the back before filling out this page) Printed by the Ministry of Economic Affairs Central Bureau of Samples and Printing 322530 at ----B7 V. Description of the invention (3) Each step of lithography, electrophotography and transfer must be L and maintain a very high yield to make a good quality color filter. Based on the transfer characteristics described above, Yoshimoto Printing Co., Ltd. published the patent applications Hei 5-127010 and Hei 5-164913 'of the Yoshimoto Printing Co., Ltd. to develop an electrical transfer process that can be used repeatedly to make color filters Printed circuit board, its breakthrough circuit design can freely arrange pixel patterns, which is very suitable for making color filter film required for TFT LCD, but the disadvantage is the complicated process. Especially the process of using the optical semiconductor layer as the conductive member includes exposure, Steps such as electrolytic reduction are the most complicated in the entire process. The optical semiconductor layer is a photosensitive resin layer with zinc oxide dispersed therein. The photo-semiconductor layer is only temporarily conductive after being exposed. For permanent conductivity, zinc oxide needs to be reduced to zinc metal. In the manufacturing process, first use a layer of patterned photoresist to separate the conductive and insulating parts, then expose, electrolyze to reduce to black zinc, and then remove the photoresist to complete this conductive succession step, which is complicated and cumbersome. In addition, the process of optical semiconductors still has the following considerations: 1. Too high zinc oxide, the strength of the conductive connection layer is not good; too low, the resolution is not good, so often need to add lacquer sensitizer; 2. Oxidation The expansion coefficients of zinc and resin must be selected to avoid the problem of non-conduction due to dimensional changes. In addition, the electroprinting plate printed by Dainippon needs good sealing technology between the pixels and the substrate of the electrowork, and it needs to be polished or smoothed to meet the requirements of flatness. However, the biggest problem is the technology of the photo-semiconductor layer. Its resolution is currently only 240-300 dpi (dots per inch). If you want to meet the requirements of the current color filter (20mm), there is still a long way to go go. It is necessary to create a method that is suitable for manufacturing STN or TFTLCD color filters and has a relatively simple process. This paper scale is applicable to the Chinese National Standard (CNS) ΑΊ specification (21 〇X 297 mm) 83. 3.! 0, 〇〇〇 (please read the precautions on the back before filling out this page) Order ·-% · 322530 A7 _ B7 V. Description of the invention (4) Purpose of the invention The present inventors have invented an improved manufacturing method after a long period of experimental research in view of the shortcomings of the current manufacturing method of the electrotransfer printing plate for color filters for liquid crystal displays . Fate is' The main purpose of the present invention is to invent a manufacturing method that can be used to make a color filter film with a simple manufacturing process. The second object of the present invention is to create a method for manufacturing a color filter film electrotransfer transfer plate, the transfer plate can be freely arranged pixel patterns, suitable for making STN or TFT LCD. Another object of the present invention In the creation of a manufacturing method for the production of electrophotographic transfer plates for color filter films, the lithography technology of the integrated circuit (1C) can be directly used to produce the conducting member, and the resolution can fully meet the requirements of the color filter film. Another object of the present invention is to create a method for manufacturing an electrographic transfer plate for color filter films. The electrographic transfer plate can be reused, can be enlarged in size, and has low cost. The detailed description of the present invention is to enable your reviewing committee to better understand the physical content, features and effects of the present invention. The detailed descriptions are as follows in conjunction with the attached drawings: (1) Part of the drawing Printed Figure 1. Electric copying and transfer flow chart of the method of the present invention for electric transfer printing plate Figure 2. Exposed pattern of the metal film of the electric transfer plate manufacturing method of the present invention Figure 3. The electric transfer of the present invention The pattern of the conduction point of the board manufacturing method, that is, the pixel pattern. Figure 4. The circuit diagram (part number) of the electric work of the electric book transfer method of the invention

1. PET flat substrate 2. Adhesive A 83.3.10,000 (please read the precautions on the back and then fill out this page) This paper size is applicable to China National Standard (CNS) A4 specification (210X297mm) 5 Ministry of Economic Affairs_Central Printed by the quasi-bureau consumer labor cooperative

322530 V. Description of the invention (5) 2. Metal film 5. Bare metal film surface 7. Photosensitive insulating layer 9. Metal film 11. Adhesive B 13. Release agent 17. Adhesive C A7 B7 4. Photoresist 6. Electrode electrode plate 8. Small holes of conductive contacts 10. Wire 12. Transfer substrate 14.15.16. Pixels of electrowork 18. Glass plate The manufacturing method of the electrotransfer plate for making color filter in the present invention includes The following steps: 1. Adhere a layer of metal film (3) on a flat substrate (1) with a hot-melt adhesive A (2). Flat 3 The substrate material is poly terephthalate-PET (polyethylene terephthalate-PET); the metal film is copper foil, aluminum foil or tin foil. 2. Apply photoresist ⑷ on the metal film and develop it to develop a series of small exposed surfaces (5) as shown in Fig. 1② and Fig. 2 in order to expose the metal film. 3. Plating a layer of metal different from the metal film (3) on these small exposed surfaces (5), such as Shou or its alloys, these electroplated metal layers are electroplated plates (pixels) (pixel pattem (pixel) 6). Choose different electroplating metals to prevent the electroplated metal from being removed when the metal film is finally removed. 4. Spin coating method is applied on the electroplating electrode plate and the left photoresist part ( Spincoating) or roller coating (roller coating) coating a uniform layer of photosensitive insulating layer ⑺ and then exposed and developed to make a small hole (8) on the surface of each electrode plate, the bottom of the hole is The exposed electrode plate surface (6), these small holes will be used as conductive contacts ⑻ (via hole) between the wire (1〇) to be made on the photosensitive insulating layer ⑺ and the electrode plate (6) 〇These conductive contacts can be in the left, middle, or right part of the longer side of the electric plates (6), and the positions of the conductive contacts of the electric plates in the same row or column The left, center, and right parts of the plate are repeated, as shown in Figure 1④ and Figure 3. This paper is from Shicaiguanjiaxian (⑽) A4 ^ (21Qx297 public) f ----.---- ----------,玎 ------ 线 '(Please read the precautions on the back before filling in this page) 83. 3.1〇, 〇〇〇322530 A7 B7 V. Description of the invention (6)' ~~~~~~~~ 5 . A metal film layer (9) is coated on the photosensitive insulating layer ⑺. The wire or copper can be coated by chemical deposition, or gold, copper, chromium or nickel can be coated by evaporation or sputtering. This layer The metal film can be used to etch the wire (10) directly, or to increase the conductivity, it can also be coated with a second metal film on it. The second metal film can be coated by electroplating. 6. On the metal film A layer of photoresist is coated on the layer, and then exposed and developed, and the excess metal part is etched away with an etching solution, leaving only three anti-etching wires (10) under each electric plate (6). One of the three conductors leads to a conductive contact ⑻ of an electric plate, as shown in Figure 4 and Figure 1. The three wires are a group of wire loops for electric writing, and the three-dimensional wiring is completed. The photoresist on the wire can be It is not necessary to remove it. 7. Use PET B (11) to stick the PET flat substrate (1) together with the wires (10) to a transfer substrate (12). The transfer substrate (12) can be PET or stainless steel sheet ; Adhesive B is a thermosetting type. The transferred transfer substrate (12) is bonded by heat baking and hardening. Then dissolve the hot melt adhesive a (2) and remove the flat substrate (1). The adhesive is removed with a solvent. 8. Remove the metal film with an etching solution to expose a flat surface electrotransfer substrate. The electrotransfer substrate is now complete. 9. Apply a layer of paint to the electrotransfer substrate Forming agent, and then red, green, and blue three-color electric writing (14, 15, 16). General electric writing conditions: voltage: l〇-i〇〇v; time: 5-180 seconds, can be plated 1-3 um film thickness. The composition of the electro-hydraulic fluid is based on water-soluble anionic resin as an example: anionic resin, neutralizing agent, a small amount of solvent and pigments dispersed therein such as pigmentred 177, Blue 15: 3 and Green 7. The electrotransfer transfer plate after electro-composition is directly bonded to the glass (18) plate coated with light-curing resin (adhesive C) (17). 10. Press the transfer plate and glass plate together, peel off the transfer plate after UV exposure and hardening, and then transfer the red, green, and blue colors (14, 15, 16). The exposure energy of adhesive C is about 100 mJ / cm2, and the thickness is about lum. This paper scale is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the back of the matter first and then write the ear j -T., -0 Printed by Beigong Consumer Cooperative, Central Bureau of Standards, Ministry of Economic Affairs 83 . 3.10,000 A7 ______ B7 5. Description of the invention (7) The embodiment is on a PET flat substrate 1300 × 300 mm, thickness 4 mil, with hot-melt adhesive A (2). The copper foil (3) is pressed. Then it is coated on it with a negative photoresist, and the shadow is exposed through a photomask to produce a pixel pattern, and part of the copper surface is exposed. On these bare copper surfaces (painting) Element pattern) is electroplated with nickel as the transfer electrode plate ⑹, the size of the electrode plate is 300 × 100 feet. After the photoresist layer is stripped off, a layer of photosensitive acrylic resin is spin coated It is a photosensitive insulating film with a thickness of 25 am. After exposure and development, a conductive contact ⑻ is made on the surface of each electrode plate. Then a metal nickel film is coated on the photosensitive insulating layer ⑺ by chemical deposition, second The nickel film is electroplated with copper, and a layer of photoresist is coated on the copper film, and then the electric wire circuit (10) is etched. The iron oxide solution is used to etch away For other copper and nickel parts, the three-dimensional wiring is completed. Use a thermosetting adhesive to stick the PET flat substrate (1) together with the wires (10) and the like to the -PET transfer substrate (12) and bake at 200 1〇 After 20 minutes, the adhesive B is cured by heat, and the transfer substrate (12) is firmly adhered. The adhesive A (2) is heated and melted, and the PET board (1) can be easily peeled off. Then the residual thermal adhesion is washed away with a two-gas solvent. Glue A (2), and finally etch away the copper foil (3) with sodium persulfate solution, which presents a flat surface of the electro-transfer substrate. (Please read the precautions on the back before filling this page)

, tT The Ministry of Economic Affairs, Central Bureau of Standards, Pui Kong Consumer Cooperative printed the various materials used in this example and their composition formulas are as follows: (1) Hot melt adhesive A-acrylic resin monomer with a weight average molecular weight of about 3,000 Weight ratio Acrylic acid 13 Butyl acrylate 60 Methyl methacrylate 27 Methyl ethyl Ketone 67 (2) Weight ratio of photoresist-acrylic negative photoresist composition This paper scale is applicable to China National Standard (CNS) A4 specification (210X297mm) 83 3.10,000 322530 V. Description of the invention (8) Novolac epoxy acrylate A * 100 1,6, Hexadiol diacrylate 30 (Nippon Chemical Co., Ltd.) Irgacure-651 (Ciba-Geigy Inc.) 10 Cellosolve acetate 60 * It is a phenolic ring Oxygen resin (ECN I2 ", product of Ciba-Geigy), synthetic product with acrylic acid and acid Sf (phthalic anhydride), the ratio of the three is 1: 1.05: 0.60 (3) photosensitive insulating film 1 Photosensitive acrylic resin composition The weight ratio of the composition printed by the Consumer Labor Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Novolac epoxy acrylate 100 1,6-Hexadiol diacrylate 20 (Nippon Chemical Co., Ltd.) Irgacure-907 10 (product of Ciba-Geigy Inc) Epon 82.8 20 BaSo4 50 Cellosolve acetate 47 Viscose B—weight ratio of thermosetting resin composition EPON 828 100 Tetra Hydrophthalic Anhydride 10 Dimethyl benzylamine 2 Hardening conditions: 150 eC, 30 Min; Thickness: 25um (5) Preparation of electroplating solution This paper scale uses the Chinese National Standard (CNS) A4 said grid (210X297mm) 83 * 3.! 0, 〇〇〇L --- ^ ---. ----------- order ------ line / (please read the notes on the back before filling in this page) A7 B7 5. Description of the invention (9) Nickel plating solution composition g / e Copper plating solution composition! NiSo4.6H2〇330 CuS04 · 51 ^ 0 NiCl2.6H2〇45 Qiu 04 H3BO3 38 H20 Electroplating conditions anode Ni / Cu plate distance 10cm current 3A voltage 1.8v time 5-10 minutes 240 35 (please Read the precautions on the back and then fill out this page) (6) Electroless nickel deposits are pre-activated, activated, accelerated and deposited (reduced) in 4 steps. Each solution is prepared as follows: (1) Pre-activated composition 彳 -1 PD- 472 240g (Electrochemicals, Inc. product) HC ^ 35c.c. DIH2〇 Operating conditions: 25-50 1 C, 2 minutes (2) Activated composition c-473 40C.C. (ElectrochemicalSjInc.) PD-472 240g The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 10 Threading f Ministry of Economic Affairs Central Standards Bureau Printed by employee consumer cooperatives 83. 3.10,000 A7 B7 822530_ V. Description of invention (〗 〇) HCl 35c.c

D.I.I ^ O Operating conditions: 25-50 eC 6.5 minutes 3) Accelerate A-474 (Electrochemicals Inc. product) 70C.C. formulated as a hydrochloride solution of Η and let stand for 4 minutes

4) Deposition composition Φ sodium citrate 11.25 times sodium squamous sodium 6 NiCl2 · 61 ^ 0 5.25 NH4C1 7.5 During operation, the pH value should be controlled between 8-9, the temperature 30-40 eC used in Example 2 and Example 1 The material is the same. On a 300 X 300mm PET board, use adhesive A to flatly paste the copper foil. Using photoresist and etching to expose the same pattern of the electroplating plate (pixel), then electroplating nickel on it as the electroplating plate of the transfer plate, and then applying a layer of photosensitive insulating film to make conductive contacts. Then, a layer of gold film was sputtered all over, and then a layer of copper metal film was plated on it. The photoresist is used as an anti-etching agent to make the wire, and then the copper film other than the wire is etched with sodium persulfate; the gold layer is etched with a mixed solution of nitric acid and hydrochloric acid (丨 / 3). Finally, the PET flat substrate together with the wires and the like are adhered to a stainless steel sheet with adhesive B, and the PET flat substrate is peeled off with 200 " C hot melt adhesive A, and the residual adhesive A is washed away, and then persulfated The sodium doping solution etched away the copper foil on the surface, and a flat surface electrotransfer substrate was completed. (CNS) A4 ^ f ^-(21〇ν? 〇7Λ \ «-, --------- (please read the precautions on the back before filling out this page) Order the consumption of shellfish by the Central Bureau of Standards of the Ministry of Economic Affairs Cooperative printing 83. 3.10,000 A7 B7 V. Description of the invention (1 1 Application example 1 Application of electro-transfer transfer plate to make color filter film The electro-transfer transfer plate made in Examples 1 and 2 is produced according to the following steps Color Yunguang film r- > Electric washing and drying

Adhesive C, adhesive exposure, heat transfer, baking twice, red, green and blue three times (please read the precautions on the back before filling this page). For example, the red, green, and blue electro-hydraulic composition is as follows: g) Composition red-green-blue electro-hydraulic conditions Anionic binder ** 100 100 100 Current 1A Triethylamine (80% neutralization amount) Voltage 20V EP828 20 20 20 Time 120 seconds Butyl Cellosolve 60 60 60 Thickness 2 n-butanol 40 40 40 DI water CIpigment Red 177 60 CIpigment Green 7 70 CIpigment Blue 15: 3 50 ^ Anionic binder is an anionic acrylic resin, its composition is: Methyl Methacrylate 20 Acrylic acid 20 Hydroxy ethyl acrylate 30 This paper scale is applicable to the Chinese National Standard (CNS) Α4 specification (210Χ297mm) Line 83. 3.10,000 A7 B7 30 V. Description of invention (1 2) Ethyl acrylate Cellosolve acetate First Apply a very thin layer of release agent, KF-96 (product of Shin-Etsu Corporation, Japan) to the electric substrate, and then turn the red, , Blue tri-color electro-coated on the electro-transfer transfer substrate, and then the transfer substrate and the glass plate (300 X 300 X 1.1mm) coated with photo-curable resin (adhesive c) are closely adhered and then cured by exposure After that, the substrate is peeled off and the transfer is completed. The composition of adhesive C is: Composition weight ratio Novolac epoxy acrylate A 100 1.6-Hexandiol diacrylate (product of Yoshimoto Chemical Co., Ltd.) 30 Irgacure-651 10 (Ciba-Geigylnc . Product) Epon 828 30 exposure energy is about 100mJ / cm2, thickness is about lmm. (Please read the precautions on the back and then fill out this page) Order M3 of the Central Bureau of Standards of the Ministry of Economic Affairs; printed by the Industrial and Consumer Cooperative Society Using ordinary metal as the conducting member (isoline and conductive contacts) reduces many steps 'and when making the substrate', start with the transfer plate surface, the plate surface is smooth, almost no polishing, and no need to fill the gap with epoxy resin , And can also freely arrange the electric plate (pixel) pattern, which is very suitable for the color extinction and light film required by STN and TFT LCD. The electrographic transfer plate produced by the manufacturing method of the present invention only needs to be accurately manufactured once, and can be used to repeatedly make color filter films infinitely. It has practical compensation and meets the conditions of the invention patent. It remains to be said that all changes and modifications made according to the characteristics and spirit of the patent application of the present invention should still fall within the scope of the invention. The line / dagger paper scale applies the Chinese National Standard (CNS) A4 specification (210X297 company director) 13 83. 3.10,000

Claims (1)

Α8 322530 塁 六. The scope of the patent application for the patent fan garden: 1. A method for making a color filter film electrotransfer transfer board, including the following steps: a. On a flat substrate, a layer of metal film is adhered with adhesive A B. On the metal film, many small rows of small exposed surfaces of the metal are neatly arranged, and each exposed surface of the small tree is separated by an insulating film; c. A layer of metal is electroplated on the small exposed surfaces as an electrode plate D. Coat a layer of photosensitive insulating film all over, and make a conductive contact exposing the electroplated metal layer on each electrode plate; e. Coat a conductive metal layer on the photosensitive insulating film; f · Using this conductive metal layer, three electrically insulated wires that are insulated from each other are produced on each row of electrically-charged electrode plates; g. The board on which the electrically-charged wires have been completed is adhered to a transfer substrate with adhesive B; and h .Remove the flat substrate of a, adhesive A and metal film to obtain a color filter film. Electric transfer plate. 2. The manufacturing method as described in patent application Fan Gu 1, wherein the material of the planar substrate in item a is polyethylene terephthalate. 3. The manufacturing method as described in patent application scope 1, wherein the adhesive A in item a is a hot melt adhesive. 4. The method as described in Patent Application Park 1, wherein the metal film in item a may be copper foil, aluminum foil or tin foil. 5_ The manufacturing method as described in patent application scope 1, wherein many small trees exposed in item b are coated on the metal film with photoresist and then developed. 6. The manufacturing method as described in patent application scope 1, wherein the electroplated metal described in item c may be nickel or its alloy. The size of this paper is applicable to China National Standard (CNS) Α4 specification (21〇X297mm) 14 (Please read the precautions on the back before filling out this page) -β Ministry of Economy Central Standards Bureau Beigong Consumer Cooperative Printing and Printing Ministry The Central Bureau of Standards printed 32253 __ for the Industrial and Consumer Cooperatives, and the application method described in Chapter 1 of the Japanese Patent Fan Garden, where the delta electrical contact on the electro-electrode plate described in item d refers to the photosensitive The insulating film is exposed and developed and exposed. According to the manufacturing method described in Application Specific, the photosensitive insulating film described in item d is an acrylic resin composition, negative type, and the film thickness is 20-40 μm. As described in Patent Application Model 81 1 'where the metal plating described in item e and the metal coating described in a $ are different metals. 〇. For example, the method of making a patent application, in which the conductive metal layer of ship 0 is electroless copper or electroless nickel by chemical deposition. L. The manufacturing method described in patent application Gu 1, wherein the conductive metal layer described in item e includes two layers. The first layer is a chemically deposited metal layer, and the second layer is a metal layer for electrical bonding. 12. The conductive Jinqi as described in patent application side 1, wherein the first layer is copper or nickel, and the third layer is copper. 13. The manufacturing method as described in the patent application side, wherein the conductive metal layer described in item e is made by evaporation or quenching. 14. The method as described in the application for Shan Fanyuan 1, whose towels are conductive gold, thin, gold or chain. 15. The method as described in Patent Application Park, wherein the conductive layer described in item e contains two layers, the first layer is a sputtered metal layer, such as copper, gold, chromium or nickel; the second layer is electroplated copper . 16. For example, the method of applying the patent Fanyuan 1 scale, in which the photosensitive insulating film of d; ^ is coated on the electro-electrode plate by a spin coating method or a roller coating method. 17. The method as described in application specific model 1, wherein the electric plate of item d is rectangular, and the conductive contact may be on the left, middle, or right side of the longer side of the electric plate, and The positions of the conductive contacts of the electric writing plates in the same row or the same row are repeated in the left, middle or right part of the electric writing plates in sequence. 18. The method as described in Patent Application Park 1, wherein the electrical wire described in item f is formed by applying a layer of photoresist on the conductive metal layer, and then developing and engraving. The scale of the dagger paper is in accordance with the Chinese National Standard (€?) 84 specifications (210 > < 297mm) 15 .-----:-, -------- order ------ line 1. (Please read the precautions on the back before filling in this I) r ^ 53〇_ ί, 'Scope ~ ^. ~ ^ 19 · The method as described in the patent application Fan Gui', among the three mentioned in item f The electric leads are connected to the conductive contacts of the left, middle, or right part of the same row of electric writing plates respectively. . Bing as described in the patent application scope 1S, in which the photoresist left after closing can be removed or not. 21. The method according to claim 5 or 18, wherein the photoresist is negative and the film thickness is 10-30mn. According to the method of applying for the special item _, the towel, switch B in item g is a thermosetting adhesive. 23. The method and method as described in patent application scope i, wherein the conversion board described in item g may be polyethylene terephthalate (PET) or stainless steel plate. (Please read the precautions on the back before filling out this page) Bookmark and print 1 copy printed by the Staff Consumer Cooperative of the Central Standardization Bureau of the Ministry of Economic Affairs-paper copy suitable 握 家 one rule one centimeter 7 7 2