319815 Λ7 _B7_ 五、發明説明(3 ) 庙笼h 利闲瓴诫 本發明傜關於C V D装置之裒空排氣閥者,:,(C V D : C h e m i c a 1 V a f> 〇「D e ρ 〇 s i 1:1 ο η 化學蒸汽激積) 以汴夕抟淅 以往.設於C V D装置之真空排氣系統的閥體,係如第 6圖所示,在右側具有氣體流入口 1,在下侧具有氣體流出 U 2之閥箱3内,以波紋軟管6密封上側之以致動器4開閉動 作之閥體5之動作連結部。在檔接於閥體5之閥座7之密封 襯(g a S k e t ) 8偽使用氣素橡嘐。 然而,若排氣溫度在U 〇°C以下時,則在閥座7或密封 襯S之表面及波紋軟管6上附著生成物,因而於閉閥時,氣 體會洩漏。 因此,鼐將閥予以加熱,惟因密封襯8煤使用氣素橡 膠,故閥體之加熱界限約為1 5 0 t ^然而以安装於閥箱體 3外面之橡膠加熱器9加熱,即使外部為1 5 0 t ,其内部僅 像約3 0 t,閥内若為真空時則其溫度更低。 .¾濟部中央標华馬舅工消f合作:f-t印戈 I- — — - - » I 1 - - -: —I— 11 士- I (琦先M-^片而之注意«,項汴4艿本贷) 如此,由橡膠加熱器9從外部之加熱,因閥箱體3與内 部之溫度差較大,無法將閥體5或波紋軟管6加熱至U (TC 以上,_、因而在閥體5或波紋軟管6上只好任其附箸生成物, 因此,須頻繁地施行閥體内之清洗,波紋钦管之壽命也縮 短,閥體之耐久性也欠缺。 β明欲解決:> 凓閗 本發明偽提供一種生成物不t附替於閥體或波紋軟管 等而可於閥體内施行穩定之加熱的CVD装置之真空排氣閥 本紙張尺度適用中國國家標準(CMS ) A4規格(210X297公釐} ό A7 B7 Μ濟部中央橾牟局負工消f合作社印裝 五、 發明説明(4 ) 1 1 者 1 1 1 解 決 閥 所 用 P 手 段 1 1 I 解 決 上 述 題 所 用 之 本 發 明 的 C V 1)装置之真空排氣閥, r-— 1 | 請 1 1 係 於 ,一 側 具 有 氣 體 流 入 Ρ 或 氣 體 出 口 9 而 在 下 側 具 氣 先 閲 1 f )青 1 I 體 ι 出 P 或 氣 體 流 入 π 的 内 以 波 紋 軟 管 密 封 9 上 刨 之 而 I 1 之 1 1 以 致 動 器 開 闋 動 作 之 閥 賊 m 之 動 作 連 結 部 的 C V D装置之真空 注 意 1 I Ψ 1 排 氣 閥 中 j 在 上 述 波 紋 軟 管 内 位 於 閥 體 之 動 作 連 結 部 外 固 項 -耳 填 1 側 配 設 具 有 伸 縮 彈 性 之 線 圏 狀 護 套 加 m 器 t 將 其 下 LLU 固 定 'Ί 本 裝 頁 1 於 閥 體 之 上 側 r 並 將 上 端 固 定 在 閥 箱 體 内 之 頂 面 P 而 連 接 1 於 閥 箱 體 外 之 線 者 0 1 1 tt 有 僅 以 上 述 護 套 加 熱 器 將 閥 體 内 連 缅 加 熱 成 18 0, I 1 2 0 0 t之情形, 惟控制護套加熱器溫度時, 你在閥箱體内 訂 1 位 於 護 套 加 熱 器 之 内 周 側 P 以 同 心 配 設 相 同 高 度 , 及 柑 同 1 | 線 圏 數 之 護 套 熱 電 偶 i 將 其 下 端 固 定 於 閥 體 上 方 而 將 上 端 1 I 固 定 在 閭 葙 體 内 之 頂 面 9 外 接 於 閥 箱 體 外 之 m 線 〇 1 J 上 述 傜 閥 箱 體 内 控 制 護 套 加 熱 器 溫 度 者 * 惟 從 閥 箱 Jdta till .水 1 外 予 以 溫 度 控 制 而 設 置 溫 度 控 制 器 P 將 溫 度 控 制 器 連 接 1 1 於 Μ 套 加 熱 器 之 導 線 及 m 套 熱 1 偶 之 線 也 可 以 〇 1 1 又 t 不 僅 由 内 部 Μ m 套 加 熱 器 加 熱 閥 體 内 j 亦 可 在 閥 1 | 箱 體 之 外 面 装 橡 膠 加 熱 器 t 由 閥 體 外 部 加 熱 亦 可 〇 此 時 I I η 溫 度 之 控 制 可 閥 體 外 之 溫 度 m 整 器 實 行 〇 1 I I 作 ίί! 1 1 I 如 上 所 述 i 本 發 明 之 真 空 排 氣 閥 ψ % 在 波 紋 軟 管 内 位 1 1 於 閥 體 之 動 作 連 結 部 外 固 側 配 設 可 彈 性 伸 縮 之 線 圏 狀 Μ Μ 1 1 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 4 經濟部中央螵翠局只工消f合作社印災 A7 B7 五、發明説明(5 ) 加熱器,將其下端固定於閥體之上側.並於閥葙體内頂而 固定其上端,而連接於閥箱體外之導線,在開閥及閉閥時 ,護套加熱器除與閥體之昇降為一體地縮短,伸昆而彈件 變位,因此,閥體或波紋軟管將普遍平均而穩定地被加科 ,尤其是,在護套加熱器内側設置護套熱電偶時,可將谣 套加熱器之加熱溫度設定在所需要之範圍,以得到穩定之 溫度控制目標。因此,生成物不容易附替在閥體或波紋軟 管上.而可大幅減少閥體内部之清洗頻度,延1波紋钦皆 之壽命,以及提高閥體之耐久性。 又,因護套加熱器,偽將金屬管成型為可彈性伸縮之 螺旋彈簧狀,並在其内邹插穿電熱線者,故在閥體之開閉 動作時,電熱線不受引拉成鸯曲等之外力.可在螺旋彈赉 狀之金屬管内自由變位,故不會産生摩損或斷線等。 啻旃例 依照圖式説明依本發明的C V D裝置之真空排氣閥之一 實施例:如圖1所示,在一·邊具有氣體流入口 1 ,而在下方 具有氣體流出口 2之閥箱體3内,在上方以^紋軟営6密封 致動器(a c t u a t 〇「),於本例即為;依氣缸4之開閉動作的 閥體5之勤作連結部,在檔接閥座7之閥體5的使用氟橡摆 為密封襯8的真空排氣閥中,將可彈性沖縮久護套加熱器 1 4配没在1:述波紋軟管6内部的茼狀體1 3外周側.該茼狀 體1 3偽S閥箱3之上板1 2之中央锯設,iffM史上述氣缸彳之活 塞捍9及連結於該活塞桿E連結於上述閥體5上而中央之保 持件1 0之推桿1 1在茼狀體1 3内滑動。該可彈性沖縮之護g 本紙張尺度適用中國固家標準(CNS ) Λ4規格(2】〇X297公釐) (請先閱讀泞而之注意事項再填巧耒茛 -裝319815 Λ7 _B7_ V. Description of the invention (3) Temple cage h Restricted by the present invention The evacuation valve of the CVD device is: (CVD: C hemica 1 V a f > 〇 "D e ρ 〇si 1: 1 ο η chemical vapor accretion) It has been used in the past. The valve body of the vacuum exhaust system installed in the CVD device has a gas inlet 1 on the right side and a gas on the lower side as shown in Figure 6 The valve box 3 flowing out of U 2 is sealed with a corrugated hose 6 on the upper side of the action connection part of the valve body 5 which is opened and closed by the actuator 4. At the seal liner connected to the valve seat 7 of the valve body 5 (ga S ket ) 8 Pseudo gas rubber is used. However, if the exhaust temperature is below U 〇 ° C, the product will adhere to the surface of the valve seat 7 or the sealing lining S and the corrugated hose 6, so when the valve is closed, The gas will leak. Therefore, Nai heats the valve, but because the sealing lining 8 uses gas rubber, the heating limit of the valve body is about 1 50 t ^ However, the rubber heater 9 installed outside the valve box body 3 Heating, even if the outside is 1 50 t, the inside is only about 30 t, if the inside of the valve is vacuum, the temperature is lower. Central Standard Hua Ma's uncle Gong Xiao f cooperation: ft Ingo I-----»I 1---: -I-11 Shi-I (Qi Xian M- ^ film and attention«, Xiang Bian 4 艿 本In this way, the rubber heater 9 is heated from the outside, because the temperature difference between the valve box 3 and the inside is large, and the valve body 5 or the corrugated hose 6 cannot be heated to U (above TC, _, so the valve body 5 or the corrugated hose 6 has to be left with the product of the chopsticks. Therefore, the valve body must be cleaned frequently, the life of the corrugated tube is shortened, and the durability of the valve body is also lacking. Β 明 要 解 :> The present invention provides a vacuum exhaust valve of a CVD device that can perform stable heating in the valve body without the product being attached to the valve body or the corrugated hose, etc. This paper standard is applicable to the Chinese National Standard (CMS) A4 Specifications (210X297mm) ό A7 B7 Printed by the Cooperative Society of the Central Ministry of Economic Affairs of the Ministry of Economy V. Description of the invention (4) 1 1 1 1 1 1 P used to solve the valve 1 1 I used to solve the above problem Invented CV 1) The vacuum exhaust valve of the device, r- 1 | Please 1 1 depends on, one side has gas inflow P or gas outlet 9 and one side has gas first reading 1 f) Qing 1 I body out P or gas inflow π with corrugated hose seal 9 planed And I 1 1 1 1 Vacuum of the CVD device of the action connection part of the valve thief m that opens and closes the actuator Note 1 I Ψ 1 In the exhaust valve j is located outside the action connection part of the valve body in the bellows hose Item-Ear filler 1 side is equipped with a telescopic elastic coil-shaped sheath plus m device t to fix the lower LLU'Ί This page 1 is installed on the upper side of the valve body r and the upper end is fixed on the top surface of the valve box body P and the wire connected to the outside of the valve box 0 1 1 tt There are only the above sheath heaters to heat the valve body to 18 0, I 1 2 0 0 t Shape, but when controlling the temperature of the sheath heater, you set 1 in the valve box body to be located on the inner peripheral side P of the sheath heater to be concentrically arranged at the same height, and the same 1 | sheath number thermocouple i The lower end is fixed above the valve body and the upper end 1 I is fixed on the top surface of the body. 9 The m line connected to the outside of the valve box. J1 Those who control the temperature of the sheath heater in the above valve valve body * Valve box Jdta till. Water 1 is temperature controlled outside and a temperature controller P is connected. Connect the temperature controller 1 1 to the heater wire of the M set and m set of heat 1 even the wire is also available. m sets of heaters to heat the valve body j can also be equipped with a rubber heater outside the valve 1 | outside the box t can also be heated from the outside of the valve body 〇 At this time II η temperature control can be achieved outside the valve temperature m the whole implement 〇1 II for ίί! 1 1 I as The vacuum exhaust valve ψ% of the present invention is in the inner position of the corrugated hose 1 1 A flexible coil shape Μ Μ 1 is provided on the outer solid side of the action connection part of the valve body. The paper size is applicable to Chinese national standards (CNS) A4 specification (210X297mm) 4 The Ministry of Economic Affairs, Central Bureau of Economics and Trade, only the work and cooperation of the cooperative printed the disaster A7 B7 5. Description of the invention (5) The heater, the lower end of which is fixed on the upper side of the valve body. The upper end of the body is fixed to the upper end, and the wire connected to the outside of the valve box is shortened when the valve is opened and closed, except for the lifting of the valve body, and the elastic member is displaced. Therefore, The valve body or the corrugated hose will be generally average and stable, especially when the sheath thermocouple is installed inside the sheath heater, the heating temperature of the rug heater can be set in the required range to obtain Stable temperature control target. Therefore, the product is not easy to be attached to the valve body or the corrugated hose. It can greatly reduce the cleaning frequency inside the valve body, extend the life of the corrugated kinkya, and improve the durability of the valve body. In addition, because the sheath heater pseudo-molds the metal tube into a coil spring shape that can be elastically stretched, and the electric heating wire is inserted through it, the electric heating wire is not drawn into a duck when the valve body is opened and closed External force such as bending. It can be freely displaced in the spiral elastic metal tube, so there will be no friction or wire breakage. An example of a vacuum exhaust valve of a CVD apparatus according to the present invention will be described in accordance with the drawings: As shown in FIG. 1, a valve box having a gas inlet 1 on one side and a gas outlet 2 on the bottom Inside the body 3, the actuator (actuat 〇 ") is sealed with a soft pattern 6 on the top, which is the case in this example; the valve body 5 according to the opening and closing action of the cylinder 4 is used as a connecting part, and the valve seat 7 is connected to the gear The use of the valve body 5 is a vacuum exhaust valve with a fluorine rubber pendulum as the sealing liner 8, and the elastic heater can be shrunk for a long time. Side. The crown-shaped body 1 3 pseudo S valve box 3 is sawn in the center of the upper plate 12, iffM history of the above-mentioned cylinder piston 9 and the piston rod E is connected to the valve body 5 and the center is maintained The push rod 1 1 of the piece 1 0 slides in the chrysanthemum 1 3. The elastic shrinkable protection g This paper scale is applicable to China Gujia Standard (CNS) Λ4 specification (2) 〇X297mm (please read first Regarding the matters needing attention, fill in the clever buttercup
、1T 319835 Λ 7 R7 五、發明説明(6 ) 架熱器U傲由金驅管成型為可彈性伸縮之螺旋彈簧狀,而 在其内部插穿電熱線者,其下端偽以旋渦狀向内方捲繞, 而以琿狀板丨5推壓並以螺栓1 6鎖定在閥體5上面之保持件 1 0上,其上端固定在閥箱體3内之頂面,並連接於閥箱體3 外之導線1 7。而且,作為其他黃+施例者,有;於上述護套 加熱器1 4之内周侧,如圖3所示,以相同高度,相同線圏 數同心配設護套熱電偶丨S ,下端固定於閥體5之上方,而 上端固定在閥箱體3内之頂面,連接於閥箱體3外之導線1 9 者。 如上述構成之實施例之圖1所示的真空排氣閥,係在 氣缸4上室供應空氣而動作時,推壓連結於活赛桿9之推桿 11,閥體5伸艮波紋軟管6而下降,如圖2所示,將閥體5下 面之密封襯3推壓至閥座而被密封,成為閉闕狀態。、油出 氣缸4上室之空氣,在T室供應空氣而使之相反動作時, 則將連结在活塞捍9之推桿U提高,閭體5縮短波紋軟管6 而上异,如圖1所示,閥體5之密封襯3從閥座7離開而形成 開閥狀態。 Μ濟部中央標準局員工消費合作'社印欠 (請先閱靖背而之注意事項再4肖木贫) 在這種閉閥及開閥狀態,圖1之宵施例的真空排氣閥, 均在波紋軟晋6内部,下端固定在閥體5上面之保持件1 0 , 而上端固定在閥箱體3内之頂而,設有一體上下移動之可 彈性ί申縮的護套加熱器1 4 ,因此,波紋軟管6可在所有之 良度上ϋ護套加熱器U之輻射熱苹均而穩定地連鑕加熱成 1 8 0〜2 0 0 C ,閥體5偽從護套加熱器1 4之下端部經由保持 件1 0之熱傳導而被加熱: 本紙張尺度適用中國國家標準(CNS ) Λ4現格(210Χ297公釐) 6 A7 B7 M濟部中央漂準局Μ工消f合作社印灰 五、 發明説明( 7 ) 1 ] 尤 其 1 在 圖 3之實施例的貞空排氣閥, 由護衮力1 1 1 1 14 之 加 熱 % 1# 護 套 熱 電 偶 13 於 事 先 設 定 14 0V - -1 6 0 :c 鉅 1 1 圍 的 加 熱 ΜΠ m 度 波 加 熱 t 而 肜 成 定 之 溫 度 控 制 如 此 9 在 1 I 讀 1 I 圖 3之裒空排氣閥, 生成物不容易附箸在波紋軟管6 或 閥 先 間 1 η 1 I 5上, 因此, 可大幅減少閥體内之清洗頻度, 延長波紋軟 而 1 ! 管 6之壽命, 亦提高閥體之耐久性。 1 I f 1 護 套 加 熱 器 14 將 金 1 管 成 型 為 可 彈 性 伸 縮 的 m 旋 彈 項 再 簧 狀 t 而 在 其 内 部 插 穿 m 熱 線 者 , 因 此 t 閥 體 之 開 閉 勁 作 本 裝 1 時 1 加 埶 ·/> > S 器 不 受 引 位 或 m 曲 等 之 外 力 > 在 螺 旋 彈 m 狀 之 金 ϊϊ 1 1 靥 管 内 自 由 變 位 » 而 不 會 産 生 摩 損 或 斷 線 0 1 1 上 述 圖 3之實施例, 偽從閥箱體3 内 控 制 護 套 加 熱 器 1 1 1 4 之 溫 度 j 惟 為 了 從 閥 箱 體 3外控制溫度, 可如圈4所 示 J 訂 I 在 閥 葙 體 3外設置溫度調整器2 0 , 將該溫度調整器2 〇連接 1 ! 於 護 套 加 熱 器 1 4 之 導 線 1 7 及 護 套 熱 電 偶 1 6 之 導 線 1 9 為 宜 1 1 | 而 且 t 不 但 從 内 部 護 套 加 埶 八> % 器 14加 埶 |Γ> % -ΐ 閥 體 内 部 > 如 1 J 第 5圖所示, 可在閥箱體3 之 外 面 安 装 橡 m 加 熱 器 2 1 y 而 從 i 閥 醴 之 外 部 加 熱 亦 可 0 此 時 , 橡 嘐 加 熱 器 2 1 之 溫 度 控 制 偽 1 1 如 圖 示 1 與 護 套 加 熱 器 1 4 時 同 樣 \ 為 了 μ 閥 體 外 之 溫 度 1 1 整 器 20施 行 溫 度 控 制 , 可 將 橡 1 加 熱 器 2 1 之 導 線 22 橡 輟 1 | 加 熱 器 用 熱 電 偶 之 線 2 3 :連 接 於 溫 度 整 器 2 0 較 理 想 二 1 1 明 果 1 1 1 如 上 所 述 1 本 發 明 之 空 排 氣 閥 Μ 由 致 動 器 m 閉 勐 1 1 作 的 閥 體 之 動 作 連 結 部 密 封 之 波 紋 軟 管 之 内 部 » 設 置 與 閥 1 1 體 一 m 勤 作 的 m 套 加 熱 器 9 因 此 * 可 {£ 開 閥 及 閉 閥 狀 態 r 1 1 本紙張尺度適用中國國家標準(CNS ) Λ4現格(2丨0X297公釐) 319815 A7 Η 7 經濟部中央標準局員工消f合作社印策 五、發明説明(8 ) 1 1 均 而 穩定地 加 埶 閥 體 或 波 紋 軟 t 尤 其 是 在 Μ 套 加 熱 器 1 ] 之 内 側 配設護 套 熱 電 偶 者 f 而 由 護 套 偶 可 施 m 定 於 [ I 所 需 溫 度的溫 度 控 制 0 因 此 1 生 成 物 不 容 易 附 替 在 閥 體 或 1 1 1 波 紋 軟 哲上, 果 » 可 大 減 少 閥 體 内 部 之 淸 洗 頻 度 而 V, 請 1 1 无 1 延 長 波 紋軟管 之 Μ 命 t 並 提 高 閥 體 之 耐 久 性 0 :¾ ii i If 1 圖 式 簡m说 明 而 :r 1 圖 1偽表 示 本 發 明 之 真 空 排 氣 閥 之 一 實 施 例 之 開 閥 狀 意 1 1 S I 態 的 縱 剖面圖 項 1 再 圆 2偽表 示 圖 1 中 之 真 空 排 氣 閥 之 閉 閥 狀 態 的 剖 面 4 太 裝 圖 >ί I I 圖 3偽表 示 本 發 明 之 真 空 排 氣 閥 之 其 他 g 施 例 之 m 閥 1 1 狀 態 的 縱剖面 圖 0 1 | 圖 4恪表 示 從 閥 體 外 控 制 本 發 明 之 真 空 排 氣 閥 溫 度 時 1 1 之 宵 施 例槪略 圖 0 訂 1 圖 5偽表 示 從 閥 體 内 與 閥 體 外 加 η 1 > VV 之 本 發 明 之 宾 空 排 1 I 氣 閥 9 並從閥 體 外 控 制 溫 度 時 之 實 施 例 概 略 圖 G 1 1 圖 6偽表 示 以 往 之 真 空 排 氣 閭 的 局 部 切 剖 正 面 圖 0 1 I 記 號 之 説明 1 ; 氣體流. λ. I =1 2 氣 體 流 出 □ 1 1 3 ; 閥箱體 4 致 動 器 1 5 ; 閥體 6 波 紋 軟 管 1 1 ϋ; 活塞1 (閥 體 之 動 作 連 結 部 ) 1 1 1 0 ; 保持件 1 1 1 1 ; 推桿 (m 體 之 動 作 連 結 邰 } 1 I 1 4 ; 護套> ijD ; 热; 17 、 1 9 ; 導 線 1 I I 1 8 ; 護套; 热: 1 1 20 * 溫 度 m 整 器 1 1 2 ;1 ; 橡嘐; 加; 执; 器 22 ; 橡 m 加 m 器 之 導 绵 1 1 23 ; 橡膠: 加; η, ! % % \ 器用護套熱電偶之導線 1 1 本紙張尺度適用中國國家標隼(CNS ) Λ4规格(2丨ΟΧ 297公釐)、 1T 319835 Λ 7 R7 V. Description of the invention (6) The heater U Ao is formed from a gold drive tube into an elastically retractable coil spring, and if the electric heating wire is inserted inside, the lower end of the heater is pseudo vortex inward It is wound around, and pushed by a hun-shaped plate 5 and locked with bolts 16 on the holder 10 above the valve body 5, the upper end of which is fixed on the top surface of the valve box 3 and connected to the valve box 3 Outside the lead 1 7. Moreover, as other yellow + examples, there are; on the inner peripheral side of the sheath heater 14 as shown in FIG. 3, the sheath thermocouple is concentrically arranged at the same height and the same coil number, the lower end It is fixed above the valve body 5, and the upper end is fixed on the top surface inside the valve box 3, and is connected to the wire 19 outside the valve box 3. The vacuum exhaust valve shown in FIG. 1 of the above-structured embodiment operates when the air is supplied to the upper chamber of the cylinder 4 and pushes the push rod 11 connected to the racing rod 9, and the valve body 5 extends into a corrugated hose 6 and descend, as shown in FIG. 2, the sealing lining 3 under the valve body 5 is pushed to the valve seat to be sealed, and it becomes a closed state. 1. When the air in the upper chamber of the cylinder 4 is supplied with oil and the air is supplied in the T chamber to reverse the action, the push rod U connected to the piston 9 is raised, the lug body 5 is shortened and the corrugated hose 6 is different, as shown in the figure As shown in FIG. 1, the sealing lining 3 of the valve body 5 is separated from the valve seat 7 to form a valve-open state. The Ministry of Economy, Central Standards Bureau, Employee Consumption Cooperation 'company is in arrears. , All inside the corrugated soft Jin 6, the lower end is fixed on the valve body 5 above the holding member 10, and the upper end is fixed on the top of the valve box 3, with an integral up and down flexible heating jacket heating 1 4, therefore, the corrugated hose 6 can heat the radiant heat of the sheath heater U stably and continuously to 1800 0 ~ 2 0 0 C in all goodness, the valve body 5 is pseudo-slave from the sheath The lower end of the heater 1 4 is heated by the heat conduction of the holder 10: The paper standard is in accordance with the Chinese National Standard (CNS) Λ4 present grid (210Χ297mm) 6 A7 B7 Printed by the cooperative. 5. Description of the invention (7) 1] Especially 1. In the embodiment of FIG. 3, the vacuum exhaust valve is heated by the protection force 1 1 1 1 14% 1 # sheath thermocouple 13 is set in advance 14 0V--1 6 0: c heating of 1 1 1 megawatt heating wave and the temperature of Xingchengding Make the 9 in 1 I read 1 I Figure 3 of the empty exhaust valve, the product is not easy to attach to the corrugated hose 6 or the valve first 1 η 1 I 5, so it can greatly reduce the cleaning of the valve body Frequency, extend the life of the soft corrugated tube 1 and 6 and also improve the durability of the valve body. 1 I f 1 Sheath heater 14 The gold 1 tube is formed into an elastically stretchable m spin spring item and then the spring t is inserted into the m hot wire inside it, so the opening and closing force of the valve body is used for this 1 hour 1 Jiaqi · / > > S device is not subject to external forces such as indexing or m-curve > Gold ϊϊ in the shape of a spiral spring 1 1 Free displacement in the tube 14 without friction or disconnection 0 1 1 In the embodiment shown in FIG. 3, the temperature j of the sheath heater 1 1 1 4 is pseudo-controlled from within the valve box 3. However, in order to control the temperature from outside the valve box 3, it can be set as indicated by the circle J in the valve body 3. Externally set the temperature regulator 2 0, connect the temperature regulator 2 〇 1! The wire 1 7 of the sheath heater 1 4 and the wire 1 9 of the sheath thermocouple 1 6 is appropriate 1 1 | and t not only from the inside Sheath plus eighth >% device 14 plus seventh | Γ >%-1 inside the valve body > As shown in Figure 5 of 1 J, it can be placed in the valve box 3 Install the rubber heater 2 1 y on the surface and heat it from the outside of the valve i. At this time, the temperature control of the rubber heater 2 1 is pseudo 1 1 as shown in the figure 1 and the sheath heater 1 4 is the same. μ Temperature outside the valve 1 1 Integrator 20 temperature control, can be connected to the heater 1 heater 2 1 wire 22 rubber drop 1 | heater thermocouple wire 2 3: connected to the temperature regulator 2 0 is ideal 2 1 1 Mingguo 1 1 1 As described above 1 The air exhaust valve M of the present invention is closed by the actuator m 1 1 1 The valve body is operated by the connecting portion sealed inside the corrugated hose »Installed with the valve 1 1 body 1 m The diligent m sets of heaters 9 therefore * can be opened (£ open and closed status r 1 1 This paper standard is applicable to the Chinese National Standard (CNS) Λ4 present grid (2 丨 0X297mm) 319815 A7 Η 7 Central Ministry of Economic Standards The bureau's policy of cooperating with the employees' cooperatives V. Description of the invention (8) 1 1 Add valves stably and steadily Or corrugated soft t, especially with a sheath thermocouple f inside the M heater 1], and the sheath couple can apply m to the temperature control of [I required temperature 0, so 1 product is not easy to replace On the valve body or 1 1 1 bellows, the result »can greatly reduce the washing frequency inside the valve body and V, please 1 1 no 1 extend the life of the bellows hose and improve the durability of the valve body 0: ¾ ii i If 1 is simplified by the description of m: r 1 FIG. 1 pseudo-represents the valve opening of one embodiment of the vacuum exhaust valve of the present invention 1 1 longitudinal section of the SI state item 1 round 2 pseudo-represents FIG. 1 Section 4 of the valve-closed state of the vacuum exhaust valve 4 Overfitted drawing> FIG. 3 pseudo-represents a longitudinal section of the m valve 1 1 in another embodiment of the vacuum exhaust valve of the present invention Fig. 0 1 | Fig. 4 shows the schematic diagram of the embodiment of 1 1 when the temperature of the vacuum exhaust valve of the present invention is controlled from the valve body 0 Order 1 Fig. 5 pseudo-shows that η 1 > VV is added from the valve body and the valve body The schematic diagram of the embodiment of the present invention when the guest air exhausts 1 I gas valve 9 and controls the temperature from the outside of the valve body G 1 1 FIG. 6 pseudo-represents a partial front view of a conventional vacuum exhaust vent 0 1 I Explanation of the symbol 1; Gas flow. Λ. I = 1 2 Gas outflow □ 1 1 3; Valve box 4 Actuator 1 5; Valve body 6 Corrugated hose 1 1 ϋ; Piston 1 (action connection part of valve body) 1 1 1 0 ; Holder 1 1 1 1; Push rod (the action of the m body connects Tai) 1 I 1 4; Sheath >ijD;Heat; 17, 1 9; Wire 1 II 1 8; Sheath; Heat: 1 1 20 * Temperature m Integrator 1 1 2; 1;嘐; Add; hold; device 22; rubber m plus m guide cotton 1 1 23; rubber: add; η,!%% \ Wire for sheathed thermocouple 1 1 This paper standard is applicable to China National Standard Falcon (CNS ) Λ4 specification (2 丨 ΟΧ 297mm)