TW283789B - - Google Patents

Info

Publication number
TW283789B
TW283789B TW084103793A TW84103793A TW283789B TW 283789 B TW283789 B TW 283789B TW 084103793 A TW084103793 A TW 084103793A TW 84103793 A TW84103793 A TW 84103793A TW 283789 B TW283789 B TW 283789B
Authority
TW
Taiwan
Application number
TW084103793A
Other languages
Chinese (zh)
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of TW283789B publication Critical patent/TW283789B/zh

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/40Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/49Adaptable interconnections, e.g. fuses or antifuses
    • H10W20/491Antifuses, i.e. interconnections changeable from non-conductive to conductive
TW084103793A 1994-05-12 1995-04-18 TW283789B (ca)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6098548A JPH07307386A (ja) 1994-05-12 1994-05-12 半導体集積回路装置の製造方法

Publications (1)

Publication Number Publication Date
TW283789B true TW283789B (ca) 1996-08-21

Family

ID=14222749

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084103793A TW283789B (ca) 1994-05-12 1995-04-18

Country Status (4)

Country Link
JP (1) JPH07307386A (ca)
KR (1) KR950034685A (ca)
CN (1) CN1123956A (ca)
TW (1) TW283789B (ca)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100328709B1 (ko) * 1999-07-07 2002-03-20 박종섭 프로그래밍 부위 형성방법
US7271076B2 (en) * 2003-12-19 2007-09-18 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of thin film integrated circuit device and manufacturing method of non-contact type thin film integrated circuit device
CN101562151B (zh) * 2008-04-15 2012-04-18 和舰科技(苏州)有限公司 具有金属硅化物的半导体结构及形成金属硅化物的方法

Also Published As

Publication number Publication date
JPH07307386A (ja) 1995-11-21
KR950034685A (ko) 1995-12-28
CN1123956A (zh) 1996-06-05

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