TW279202B - - Google Patents

Info

Publication number
TW279202B
TW279202B TW83110996A TW83110996A TW279202B TW 279202 B TW279202 B TW 279202B TW 83110996 A TW83110996 A TW 83110996A TW 83110996 A TW83110996 A TW 83110996A TW 279202 B TW279202 B TW 279202B
Authority
TW
Taiwan
Application number
TW83110996A
Other languages
Chinese (zh)
Original Assignee
Tokyo Electron Co Ltd
Tokyo Electron Evi Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP29296093A external-priority patent/JPH07147304A/ja
Priority claimed from JP6103331A external-priority patent/JP2984541B2/ja
Application filed by Tokyo Electron Co Ltd, Tokyo Electron Evi Kk filed Critical Tokyo Electron Co Ltd
Application granted granted Critical
Publication of TW279202B publication Critical patent/TW279202B/zh

Links

TW83110996A 1993-11-24 1994-11-25 TW279202B (cg-RX-API-DMAC7.html)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP29296093A JPH07147304A (ja) 1993-11-24 1993-11-24 オートセットアップ式プローブ検査方法
JP6103331A JP2984541B2 (ja) 1994-04-18 1994-04-18 プロービング方法およびプローブ装置

Publications (1)

Publication Number Publication Date
TW279202B true TW279202B (cg-RX-API-DMAC7.html) 1996-06-21

Family

ID=51397490

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83110996A TW279202B (cg-RX-API-DMAC7.html) 1993-11-24 1994-11-25

Country Status (1)

Country Link
TW (1) TW279202B (cg-RX-API-DMAC7.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI387030B (zh) * 2004-12-20 2013-02-21 松下電器產業股份有限公司 探針卡及其製造方法、以及對準方法
TWI485628B (zh) * 2006-09-19 2015-05-21 東京威力科創股份有限公司 A re-registration method for locating a target object, and a recording medium for recording the method
TWI571644B (zh) * 2015-07-16 2017-02-21 旺矽科技股份有限公司 針測裝置
CN119199487A (zh) * 2024-11-27 2024-12-27 泰克半导体装备(深圳)有限公司 一种芯片测试方法、装置、电子设备及存储介质

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI387030B (zh) * 2004-12-20 2013-02-21 松下電器產業股份有限公司 探針卡及其製造方法、以及對準方法
TWI485628B (zh) * 2006-09-19 2015-05-21 東京威力科創股份有限公司 A re-registration method for locating a target object, and a recording medium for recording the method
TWI571644B (zh) * 2015-07-16 2017-02-21 旺矽科技股份有限公司 針測裝置
CN119199487A (zh) * 2024-11-27 2024-12-27 泰克半导体装备(深圳)有限公司 一种芯片测试方法、装置、电子设备及存储介质

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Legal Events

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