TW277007B - - Google Patents

Info

Publication number
TW277007B
TW277007B TW83105409A TW83105409A TW277007B TW 277007 B TW277007 B TW 277007B TW 83105409 A TW83105409 A TW 83105409A TW 83105409 A TW83105409 A TW 83105409A TW 277007 B TW277007 B TW 277007B
Authority
TW
Taiwan
Application number
TW83105409A
Other languages
Chinese (zh)
Original Assignee
Tokyo Electron Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP25468293A external-priority patent/JPH0786188A/ja
Priority claimed from JP5254681A external-priority patent/JP3066691B2/ja
Priority claimed from JP25468093A external-priority patent/JP2741156B2/ja
Priority claimed from JP5256506A external-priority patent/JP2881371B2/ja
Priority claimed from JP25650793A external-priority patent/JPH0794489A/ja
Application filed by Tokyo Electron Co Ltd filed Critical Tokyo Electron Co Ltd
Application granted granted Critical
Publication of TW277007B publication Critical patent/TW277007B/zh

Links

TW83105409A 1993-09-17 1994-06-15 TW277007B (enrdf_load_stackoverflow)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP25468293A JPH0786188A (ja) 1993-09-17 1993-09-17 搬送室及びそのクリーニング方法
JP5254681A JP3066691B2 (ja) 1993-09-17 1993-09-17 マルチチャンバー処理装置及びそのクリーニング方法
JP25468093A JP2741156B2 (ja) 1993-09-17 1993-09-17 マルチチャンバー処理装置のクリーニング方法
JP5256506A JP2881371B2 (ja) 1993-09-20 1993-09-20 真空処理装置及び真空処理装置集合体のクリーニング方法
JP25650793A JPH0794489A (ja) 1993-09-20 1993-09-20 処理装置のクリーニング方法

Publications (1)

Publication Number Publication Date
TW277007B true TW277007B (enrdf_load_stackoverflow) 1996-06-01

Family

ID=51397368

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83105409A TW277007B (enrdf_load_stackoverflow) 1993-09-17 1994-06-15

Country Status (1)

Country Link
TW (1) TW277007B (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8398813B2 (en) 1999-08-13 2013-03-19 Tokyo Electron Limited Processing apparatus and processing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8398813B2 (en) 1999-08-13 2013-03-19 Tokyo Electron Limited Processing apparatus and processing method

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