TW276338B - - Google Patents

Info

Publication number
TW276338B
TW276338B TW084104347A TW84104347A TW276338B TW 276338 B TW276338 B TW 276338B TW 084104347 A TW084104347 A TW 084104347A TW 84104347 A TW84104347 A TW 84104347A TW 276338 B TW276338 B TW 276338B
Authority
TW
Taiwan
Application number
TW084104347A
Original Assignee
Materials Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Materials Research Corp filed Critical Materials Research Corp
Application granted granted Critical
Publication of TW276338B publication Critical patent/TW276338B/zh

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/73Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/7368Non-polymeric layer under the lowermost magnetic recording layer
    • G11B5/7373Non-magnetic single underlayer comprising chromium
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/73Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/7368Non-polymeric layer under the lowermost magnetic recording layer
    • G11B5/7377Physical structure of underlayer, e.g. texture
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851Coating a support with a magnetic layer by sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
TW084104347A 1994-09-12 1995-05-01 TW276338B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/304,561 US5616218A (en) 1994-09-12 1994-09-12 Modification and selection of the magnetic properties of magnetic recording media through selective control of the crystal texture of the recording layer

Publications (1)

Publication Number Publication Date
TW276338B true TW276338B (zh) 1996-05-21

Family

ID=23177030

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084104347A TW276338B (zh) 1994-09-12 1995-05-01

Country Status (4)

Country Link
US (1) US5616218A (zh)
AU (1) AU1511095A (zh)
TW (1) TW276338B (zh)
WO (1) WO1996008817A1 (zh)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2753567B1 (fr) * 1996-09-19 1998-11-13 Alsthom Cge Alcatel Procede de depot d'un film ferromagnetique sur un guide d'onde, et un composant magneto-optique comprenant un film mince ferromagnetique depose selon le procede
US6248416B1 (en) * 1997-11-10 2001-06-19 Carnegie Mellon University Highly oriented magnetic thin films, recording media, transducers, devices made therefrom and methods of making
US6482301B1 (en) * 1998-06-04 2002-11-19 Seagate Technology, Inc. Target shields for improved magnetic properties of a recording medium
US6268036B1 (en) * 1998-06-26 2001-07-31 International Business Machines Corporation Thin film disk with highly faulted crystalline underlayer
US6592728B1 (en) 1998-08-04 2003-07-15 Veeco-Cvc, Inc. Dual collimated deposition apparatus and method of use
US6187508B1 (en) * 1998-08-14 2001-02-13 Agfa-Gevaert, N.V. Heat mode recording element based on a thin metal layer
US7294242B1 (en) * 1998-08-24 2007-11-13 Applied Materials, Inc. Collimated and long throw magnetron sputtering of nickel/iron films for magnetic recording head applications
US6461750B1 (en) 1998-09-30 2002-10-08 Seagate Technology, Inc. Magnetic recording medium with dual magnetic layers and high in-plane coercivity
US6432563B1 (en) 2000-04-03 2002-08-13 Carnegie Mellon University Zinc enhanced hard disk media
JP2002151757A (ja) * 2000-11-09 2002-05-24 Alps Electric Co Ltd 薄膜磁気素子及びその製造方法
US6671117B2 (en) 2000-12-20 2003-12-30 Seagate Technology Llc Magnetic writer for noise suppression in perpendicular recording media
KR100374792B1 (ko) * 2000-12-29 2003-03-04 삼성전자주식회사 수직 자기 기록 디스크
US8110489B2 (en) 2001-07-25 2012-02-07 Applied Materials, Inc. Process for forming cobalt-containing materials
US20090004850A1 (en) 2001-07-25 2009-01-01 Seshadri Ganguli Process for forming cobalt and cobalt silicide materials in tungsten contact applications
JP2005504885A (ja) 2001-07-25 2005-02-17 アプライド マテリアルズ インコーポレイテッド 新規なスパッタ堆積方法を使用したバリア形成
US9051641B2 (en) 2001-07-25 2015-06-09 Applied Materials, Inc. Cobalt deposition on barrier surfaces
US20030029715A1 (en) 2001-07-25 2003-02-13 Applied Materials, Inc. An Apparatus For Annealing Substrates In Physical Vapor Deposition Systems
US6743340B2 (en) * 2002-02-05 2004-06-01 Applied Materials, Inc. Sputtering of aligned magnetic materials and magnetic dipole ring used therefor
US20050014295A1 (en) * 2003-07-16 2005-01-20 Manish Sharma Method of manufacture of a magneto-resistive device
JP2005123412A (ja) * 2003-10-16 2005-05-12 Anelva Corp 磁気抵抗多層膜製造方法及び製造装置
US7118815B2 (en) * 2004-02-05 2006-10-10 Seagate Technology Llc Method to improve coercivity radial profile in magnetic recording media and product thereof
CN101627146A (zh) * 2007-01-02 2010-01-13 Oc欧瑞康巴尔斯公司 用阴极溅射制作方向层的方法及其实施装置
US8435399B2 (en) * 2010-01-11 2013-05-07 Seagate Technology Llc Formation of patterned media by selective anodic removal followed by targeted trench backfill

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4816127A (en) * 1984-11-15 1989-03-28 Xidex Corporation Method of producing thin-film storage disk
US4767516A (en) * 1985-05-20 1988-08-30 Sanyo Electric Co., Ltd. Method for making magnetic recording media
JPS6282516A (ja) * 1985-10-07 1987-04-16 Victor Co Of Japan Ltd 磁気デイスクの製造法
US5316631A (en) * 1989-02-16 1994-05-31 Victor Company Of Japan, Ltd. Method for fabricating a magnetic recording medium
EP0440377B1 (en) * 1990-01-29 1998-03-18 Varian Associates, Inc. Collimated deposition apparatus and method
US5057200A (en) * 1990-08-15 1991-10-15 Hmt Technology Corporation Method of forming thin-film recording medium
US5084152A (en) * 1990-10-02 1992-01-28 Industrial Technology Research Institute Method for preparing high density magnetic recording medium
US5223108A (en) * 1991-12-30 1993-06-29 Materials Research Corporation Extended lifetime collimator
JPH0693439A (ja) * 1992-09-16 1994-04-05 Hitachi Ltd スパッタリング装置及び磁性膜作製法

Also Published As

Publication number Publication date
AU1511095A (en) 1996-03-29
US5616218A (en) 1997-04-01
WO1996008817A1 (en) 1996-03-21

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