TW273622B - Manufacturing method for conductive carbon thin film - Google Patents

Manufacturing method for conductive carbon thin film

Info

Publication number
TW273622B
TW273622B TW83110979A TW83110979A TW273622B TW 273622 B TW273622 B TW 273622B TW 83110979 A TW83110979 A TW 83110979A TW 83110979 A TW83110979 A TW 83110979A TW 273622 B TW273622 B TW 273622B
Authority
TW
Taiwan
Prior art keywords
pan
centigrade
gas
heat treatment
thin film
Prior art date
Application number
TW83110979A
Other languages
English (en)
Inventor
Tzer-Haur Ke
Original Assignee
Nat Science Committee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Science Committee filed Critical Nat Science Committee
Priority to TW83110979A priority Critical patent/TW273622B/zh
Application granted granted Critical
Publication of TW273622B publication Critical patent/TW273622B/zh

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  • Carbon And Carbon Compounds (AREA)
TW83110979A 1994-11-25 1994-11-25 Manufacturing method for conductive carbon thin film TW273622B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW83110979A TW273622B (en) 1994-11-25 1994-11-25 Manufacturing method for conductive carbon thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW83110979A TW273622B (en) 1994-11-25 1994-11-25 Manufacturing method for conductive carbon thin film

Publications (1)

Publication Number Publication Date
TW273622B true TW273622B (en) 1996-04-01

Family

ID=51397182

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83110979A TW273622B (en) 1994-11-25 1994-11-25 Manufacturing method for conductive carbon thin film

Country Status (1)

Country Link
TW (1) TW273622B (zh)

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