TW267245B - Probe apparatus - Google Patents

Probe apparatus

Info

Publication number
TW267245B
TW267245B TW83108685A TW83108685A TW267245B TW 267245 B TW267245 B TW 267245B TW 83108685 A TW83108685 A TW 83108685A TW 83108685 A TW83108685 A TW 83108685A TW 267245 B TW267245 B TW 267245B
Authority
TW
Taiwan
Prior art keywords
support block
probe card
recess
work table
main region
Prior art date
Application number
TW83108685A
Other languages
Chinese (zh)
Inventor
Masayuki Yamada
Original Assignee
Tokyo Electron Co Ltd
Tel Yamanishi Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Co Ltd, Tel Yamanishi Kk filed Critical Tokyo Electron Co Ltd
Priority to TW83108685A priority Critical patent/TW267245B/en
Application granted granted Critical
Publication of TW267245B publication Critical patent/TW267245B/en

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

The probe apparatus for a semiconductor wafer has a work table on which a wafer is placed. A printed wiring board having a high rigidity is situated above the work table. A support block is mounted on the printed wiring board so as to pierce through its opening. The support block has a recess which opposes to the work table, and a flexible membrane-like probe card is detachably mounted on the support block so as to cover the recess. The probe card has a main region in which contact elements to be brought into contact with electrode pads of the semiconductor wafer are arranged. A rigid rectangular frame is attached to the rear surface of the probe card so as to surround the main region, thus imparting a flatness to the probe card. A pusher is provided in the recess of the support block so as to be brought into contact with the rear side of the main region of the probe card. The pusher is swingably arranged on the lower end of the shaft vertically supported. The shaft is supported by the support block via two belleville springs.
TW83108685A 1994-09-21 1994-09-21 Probe apparatus TW267245B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW83108685A TW267245B (en) 1994-09-21 1994-09-21 Probe apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW83108685A TW267245B (en) 1994-09-21 1994-09-21 Probe apparatus

Publications (1)

Publication Number Publication Date
TW267245B true TW267245B (en) 1996-01-01

Family

ID=51396807

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83108685A TW267245B (en) 1994-09-21 1994-09-21 Probe apparatus

Country Status (1)

Country Link
TW (1) TW267245B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI401445B (en) * 2009-12-08 2013-07-11 Zhen Ding Technology Co Ltd Apparatus for testing printed circuit board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI401445B (en) * 2009-12-08 2013-07-11 Zhen Ding Technology Co Ltd Apparatus for testing printed circuit board

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees