TW267245B - Probe apparatus - Google Patents
Probe apparatusInfo
- Publication number
- TW267245B TW267245B TW83108685A TW83108685A TW267245B TW 267245 B TW267245 B TW 267245B TW 83108685 A TW83108685 A TW 83108685A TW 83108685 A TW83108685 A TW 83108685A TW 267245 B TW267245 B TW 267245B
- Authority
- TW
- Taiwan
- Prior art keywords
- support block
- probe card
- recess
- work table
- main region
- Prior art date
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The probe apparatus for a semiconductor wafer has a work table on which a wafer is placed. A printed wiring board having a high rigidity is situated above the work table. A support block is mounted on the printed wiring board so as to pierce through its opening. The support block has a recess which opposes to the work table, and a flexible membrane-like probe card is detachably mounted on the support block so as to cover the recess. The probe card has a main region in which contact elements to be brought into contact with electrode pads of the semiconductor wafer are arranged. A rigid rectangular frame is attached to the rear surface of the probe card so as to surround the main region, thus imparting a flatness to the probe card. A pusher is provided in the recess of the support block so as to be brought into contact with the rear side of the main region of the probe card. The pusher is swingably arranged on the lower end of the shaft vertically supported. The shaft is supported by the support block via two belleville springs.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW83108685A TW267245B (en) | 1994-09-21 | 1994-09-21 | Probe apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW83108685A TW267245B (en) | 1994-09-21 | 1994-09-21 | Probe apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
TW267245B true TW267245B (en) | 1996-01-01 |
Family
ID=51396807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW83108685A TW267245B (en) | 1994-09-21 | 1994-09-21 | Probe apparatus |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW267245B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI401445B (en) * | 2009-12-08 | 2013-07-11 | Zhen Ding Technology Co Ltd | Apparatus for testing printed circuit board |
-
1994
- 1994-09-21 TW TW83108685A patent/TW267245B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI401445B (en) * | 2009-12-08 | 2013-07-11 | Zhen Ding Technology Co Ltd | Apparatus for testing printed circuit board |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |