TW263613B - Uniform film thickness deposition of sputtered materials - Google Patents
Uniform film thickness deposition of sputtered materialsInfo
- Publication number
- TW263613B TW263613B TW084102159A TW84102159A TW263613B TW 263613 B TW263613 B TW 263613B TW 084102159 A TW084102159 A TW 084102159A TW 84102159 A TW84102159 A TW 84102159A TW 263613 B TW263613 B TW 263613B
- Authority
- TW
- Taiwan
- Prior art keywords
- film thickness
- uniform film
- thickness deposition
- sputtered materials
- substrate
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
- G02B6/266—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/313,648 US5651085A (en) | 1994-09-27 | 1994-09-27 | All fiber attenuator |
Publications (1)
Publication Number | Publication Date |
---|---|
TW263613B true TW263613B (en) | 1995-11-21 |
Family
ID=23216546
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW084102159A TW263613B (en) | 1994-09-27 | 1995-03-07 | Uniform film thickness deposition of sputtered materials |
Country Status (2)
Country | Link |
---|---|
US (1) | US5651085A (zh) |
TW (1) | TW263613B (zh) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6344922B1 (en) * | 1998-07-21 | 2002-02-05 | Corvis Corporation | Optical signal varying devices |
US6839522B2 (en) | 1998-07-21 | 2005-01-04 | Corvis Corporation | Optical signal varying devices, systems and methods |
US6115174A (en) | 1998-07-21 | 2000-09-05 | Corvis Corporation | Optical signal varying devices |
WO2000025091A2 (en) * | 1998-10-09 | 2000-05-04 | Gc Technologies, Ltd. | A method and system for modal noise suppression in fiber optic systems |
US6356383B1 (en) | 1999-04-02 | 2002-03-12 | Corvis Corporation | Optical transmission systems including optical amplifiers apparatuses and methods |
US6587261B1 (en) * | 1999-05-24 | 2003-07-01 | Corvis Corporation | Optical transmission systems including optical amplifiers and methods of use therein |
FR2800218B1 (fr) * | 1999-10-22 | 2002-01-11 | Algety Telecom | Systeme de transmission par fibre optique utilisant des impulsions rz |
FR2800219B1 (fr) * | 1999-10-22 | 2006-06-30 | Algety Telecom | Procede d'ajustement de puissance pour un systeme de transmission optique a multiplexage en longueur d'onde |
US6344925B1 (en) | 2000-03-03 | 2002-02-05 | Corvis Corporation | Optical systems and methods and optical amplifiers for use therein |
US6501875B2 (en) | 2000-06-27 | 2002-12-31 | Oluma, Inc. | Mach-Zehnder inteferometers and applications based on evanescent coupling through side-polished fiber coupling ports |
US6625349B2 (en) | 2000-06-27 | 2003-09-23 | Oluma, Inc. | Evanescent optical coupling between a waveguide formed on a substrate and a side-polished fiber |
US6516114B2 (en) | 2000-06-27 | 2003-02-04 | Oluma, Inc. | Integration of fibers on substrates fabricated with grooves |
US6597833B1 (en) | 2000-06-27 | 2003-07-22 | Oluma, Inc. | Wavelength-division multiplexers and demultiplexers based on mach-zehnder interferometers and evanescent coupling |
US6621951B1 (en) | 2000-06-27 | 2003-09-16 | Oluma, Inc. | Thin film structures in devices with a fiber on a substrate |
US6490391B1 (en) | 2000-07-12 | 2002-12-03 | Oluma, Inc. | Devices based on fibers engaged to substrates with grooves |
US6571035B1 (en) | 2000-08-10 | 2003-05-27 | Oluma, Inc. | Fiber optical switches based on optical evanescent coupling between two fibers |
US6621952B1 (en) | 2000-08-10 | 2003-09-16 | Oluma, Inc. | In-fiber variable optical attenuators and modulators using index-changing liquid media |
US6542663B1 (en) | 2000-09-07 | 2003-04-01 | Oluma, Inc. | Coupling control in side-polished fiber devices |
CA2324193C (en) * | 2000-10-25 | 2008-05-06 | Itf Optical Technologies Inc.-Technologies Optiques Itf Inc. | Internal termination for optical fibers |
KR20020064506A (ko) * | 2001-02-02 | 2002-08-09 | (주)옵토네스트 | 평탄한 감쇄이득을 갖는 광감쇄기용 광섬유 |
US6712523B2 (en) * | 2001-06-01 | 2004-03-30 | Adc Telecommunications, Inc. | Bulkhead adapter with optical fiber for signal attenuation |
US6744948B1 (en) | 2001-06-20 | 2004-06-01 | Oluma, Inc. | Fiber tap monitor based on evanescent coupling |
IL147554A (en) * | 2002-01-10 | 2005-11-20 | Kiloambda Ip Ltd | Optical limiter |
EP2307796A4 (en) * | 2008-06-24 | 2012-08-08 | Kilolambda Tech Ltd | WINDOW OF LIMITATION OF LIGHT |
US10162109B2 (en) | 2017-02-07 | 2018-12-25 | Corning Incorporated | Multimode optical fibers for attenuators |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS574006A (en) * | 1980-06-09 | 1982-01-09 | Toshiba Corp | Attenuator for optical fiber and its production |
US4529262A (en) * | 1983-05-09 | 1985-07-16 | At&T Bell Laboratories | Inline optical fiber attentuator |
GB2158603B (en) * | 1984-05-11 | 1987-07-29 | Stc Plc | Single mode optical fibre attenuators |
US4639078A (en) * | 1984-10-05 | 1987-01-27 | Rockwell International Corporation | Optical fiber attenuator and method of fabrication |
GB8610053D0 (en) * | 1986-04-24 | 1986-05-29 | British Telecomm | Glass fibre |
JPS62275203A (ja) * | 1986-05-23 | 1987-11-30 | Fujitsu Ltd | シングルモ−ドフアイバ用固定減衰器 |
GB8713081D0 (en) * | 1987-06-04 | 1987-07-08 | Pirelli General Plc | Optical fibre attenuators |
JPS6450002A (en) * | 1987-08-21 | 1989-02-27 | Seiko Instr & Electronics | Optical attenuator and its manufacture |
CA1330729C (en) * | 1988-05-06 | 1994-07-19 | Hiroshi Okada | Light attenuator and process for fabrication thereof |
US5113476A (en) * | 1990-11-08 | 1992-05-12 | Mitsubishi Rayon Company Ltd. | Light attenuator and process for fabrication thereof |
US5095519A (en) * | 1990-11-30 | 1992-03-10 | At&T Bell Laboratories | Apparatus and method for producing an in-line optical fiber attenuator |
JP2946437B2 (ja) * | 1991-09-26 | 1999-09-06 | 京セラ株式会社 | 光固定減衰器 |
US5198270A (en) * | 1991-11-08 | 1993-03-30 | Bell Communications Research, Inc. | Method of forming a fiber preform with dopants dissolved in a liquid |
US5236481A (en) * | 1992-02-21 | 1993-08-17 | Corning Incorporated | Method of doping porous glass preforms |
US5274734A (en) * | 1992-08-28 | 1993-12-28 | At&T Bell Laboratories | Article comprising a rare earth or transition metal doped optical fiber |
US5363234A (en) * | 1993-10-14 | 1994-11-08 | Corning Incorporated | Amplifier having pump fiber filter |
-
1994
- 1994-09-27 US US08/313,648 patent/US5651085A/en not_active Expired - Lifetime
-
1995
- 1995-03-07 TW TW084102159A patent/TW263613B/zh active
Also Published As
Publication number | Publication date |
---|---|
US5651085A (en) | 1997-07-22 |
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