TW249294B - Process for preventing shift tunnelling of multi-layer metal via - Google Patents

Process for preventing shift tunnelling of multi-layer metal via

Info

Publication number
TW249294B
TW249294B TW83111175A TW83111175A TW249294B TW 249294 B TW249294 B TW 249294B TW 83111175 A TW83111175 A TW 83111175A TW 83111175 A TW83111175 A TW 83111175A TW 249294 B TW249294 B TW 249294B
Authority
TW
Taiwan
Prior art keywords
layer
tunnelling
etching
metal
etch
Prior art date
Application number
TW83111175A
Other languages
Chinese (zh)
Inventor
Charng-Er Perng
Jeng-Tsong Shyu
Chuen-Tsair Chang
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW83111175A priority Critical patent/TW249294B/en
Application granted granted Critical
Publication of TW249294B publication Critical patent/TW249294B/en

Links

Abstract

A process for preventing shift tunnelling of multi-layer metal via includes: forming oxide layer on polysilicon layer; forming BPSG layer; sputtering/masking/etching to form down metal layer; depositing a insulating material consisting of a liquid insulator sandwiched by two plasma oxide layers; implementing metal via mask to etch to form via connecting with down metal layer; sputtering top layer to fill in via to connect two metal layers; It features that: depositing to form an etch stop with proper thickness before forming down metal layer; etching channel by adopting etching agent with high etching efficiency; when etching agent reaching the etch stop, stopping tunnelling down to restrict etch depth of via.
TW83111175A 1994-12-01 1994-12-01 Process for preventing shift tunnelling of multi-layer metal via TW249294B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW83111175A TW249294B (en) 1994-12-01 1994-12-01 Process for preventing shift tunnelling of multi-layer metal via

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW83111175A TW249294B (en) 1994-12-01 1994-12-01 Process for preventing shift tunnelling of multi-layer metal via

Publications (1)

Publication Number Publication Date
TW249294B true TW249294B (en) 1995-06-11

Family

ID=51401257

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83111175A TW249294B (en) 1994-12-01 1994-12-01 Process for preventing shift tunnelling of multi-layer metal via

Country Status (1)

Country Link
TW (1) TW249294B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7527508B1 (en) 2008-07-08 2009-05-05 Xyz Science Co., Ltd. Sliding safety structure for power supply receptacles

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7527508B1 (en) 2008-07-08 2009-05-05 Xyz Science Co., Ltd. Sliding safety structure for power supply receptacles

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees