TW249294B - Process for preventing shift tunnelling of multi-layer metal via - Google Patents
Process for preventing shift tunnelling of multi-layer metal viaInfo
- Publication number
- TW249294B TW249294B TW83111175A TW83111175A TW249294B TW 249294 B TW249294 B TW 249294B TW 83111175 A TW83111175 A TW 83111175A TW 83111175 A TW83111175 A TW 83111175A TW 249294 B TW249294 B TW 249294B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- tunnelling
- etching
- metal
- etch
- Prior art date
Links
Abstract
A process for preventing shift tunnelling of multi-layer metal via includes: forming oxide layer on polysilicon layer; forming BPSG layer; sputtering/masking/etching to form down metal layer; depositing a insulating material consisting of a liquid insulator sandwiched by two plasma oxide layers; implementing metal via mask to etch to form via connecting with down metal layer; sputtering top layer to fill in via to connect two metal layers; It features that: depositing to form an etch stop with proper thickness before forming down metal layer; etching channel by adopting etching agent with high etching efficiency; when etching agent reaching the etch stop, stopping tunnelling down to restrict etch depth of via.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW83111175A TW249294B (en) | 1994-12-01 | 1994-12-01 | Process for preventing shift tunnelling of multi-layer metal via |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW83111175A TW249294B (en) | 1994-12-01 | 1994-12-01 | Process for preventing shift tunnelling of multi-layer metal via |
Publications (1)
Publication Number | Publication Date |
---|---|
TW249294B true TW249294B (en) | 1995-06-11 |
Family
ID=51401257
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW83111175A TW249294B (en) | 1994-12-01 | 1994-12-01 | Process for preventing shift tunnelling of multi-layer metal via |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW249294B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7527508B1 (en) | 2008-07-08 | 2009-05-05 | Xyz Science Co., Ltd. | Sliding safety structure for power supply receptacles |
-
1994
- 1994-12-01 TW TW83111175A patent/TW249294B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7527508B1 (en) | 2008-07-08 | 2009-05-05 | Xyz Science Co., Ltd. | Sliding safety structure for power supply receptacles |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |