TW249278B - - Google Patents

Info

Publication number
TW249278B
TW249278B TW080104300A TW80104300A TW249278B TW 249278 B TW249278 B TW 249278B TW 080104300 A TW080104300 A TW 080104300A TW 80104300 A TW80104300 A TW 80104300A TW 249278 B TW249278 B TW 249278B
Authority
TW
Taiwan
Application number
TW080104300A
Original Assignee
Mitsui Petroleum Chemicals Industry Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Petroleum Chemicals Industry Co filed Critical Mitsui Petroleum Chemicals Industry Co
Application granted granted Critical
Publication of TW249278B publication Critical patent/TW249278B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J9/0246—Measuring optical wavelength
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G01J2003/265—Read out, e.g. polychromator
TW080104300A 1990-06-01 1991-06-01 TW249278B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2143449A JPH0436622A (ja) 1990-06-01 1990-06-01 レーザ光の波長検出方法及び装置

Publications (1)

Publication Number Publication Date
TW249278B true TW249278B (zh) 1995-06-11

Family

ID=15338962

Family Applications (1)

Application Number Title Priority Date Filing Date
TW080104300A TW249278B (zh) 1990-06-01 1991-06-01

Country Status (6)

Country Link
US (1) US5319441A (zh)
EP (1) EP0459494A3 (zh)
JP (1) JPH0436622A (zh)
KR (1) KR920001184A (zh)
CA (1) CA2043582A1 (zh)
TW (1) TW249278B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2079282B1 (es) * 1993-09-13 1997-11-16 Fagor S Coop Dispositivo interferometrico y metodo para medir y para estabilizar la longitud de onda de diodo laser.
JP3417323B2 (ja) * 1998-02-03 2003-06-16 松下電器産業株式会社 エタロン評価方法及びエタロン評価装置並びにレーザ発振器
JP2001007007A (ja) * 1999-06-23 2001-01-12 Ushio Sogo Gijutsu Kenkyusho:Kk 半導体露光用エキシマレーザ光のための波長モニタ装置
KR20020069667A (ko) * 2001-02-27 2002-09-05 삼성전자 주식회사 퍼스널 컴퓨터를 이용한 음성 사서함 시스템 및 그 제어방법
US6816516B2 (en) * 2001-03-21 2004-11-09 Intel Corporation Error signal generation system
US7653095B2 (en) 2005-06-30 2010-01-26 Cymer, Inc. Active bandwidth control for a laser
KR20230014762A (ko) 2020-06-24 2023-01-30 사이머 엘엘씨 에탈론에서의 측정 에러의 결정

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1516925A (fr) * 1967-01-13 1968-02-05 Commissariat Energie Atomique Spectromètre électro-optique rapide
US4172663A (en) * 1977-04-27 1979-10-30 Board of Trustees Leland Stanford Jr., University Optical wavelength meter
US4173442A (en) * 1977-05-27 1979-11-06 The United States Of America As Represented By The Secretary Of Commerce Apparatus and method for determination of wavelength
WO1989002068A1 (en) * 1987-08-31 1989-03-09 Kabushiki Kaisha Komatsu Seisakusho Method and apparatus for detecting the wavelength of a laser beam
JPH0244219A (ja) * 1988-08-04 1990-02-14 Matsushita Electric Ind Co Ltd 波長検出装置

Also Published As

Publication number Publication date
EP0459494A2 (en) 1991-12-04
JPH0436622A (ja) 1992-02-06
KR920001184A (ko) 1992-01-30
EP0459494A3 (en) 1992-04-15
CA2043582A1 (en) 1991-12-02
US5319441A (en) 1994-06-07

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