TW228607B - - Google Patents
Info
- Publication number
- TW228607B TW228607B TW081109685A TW81109685A TW228607B TW 228607 B TW228607 B TW 228607B TW 081109685 A TW081109685 A TW 081109685A TW 81109685 A TW81109685 A TW 81109685A TW 228607 B TW228607 B TW 228607B
- Authority
- TW
- Taiwan
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76837—Filling up the space between adjacent conductive structures; Gap-filling properties of dielectrics
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/922,897 US5382547A (en) | 1992-07-31 | 1992-07-31 | Void free oxide fill for interconnect spaces |
Publications (1)
Publication Number | Publication Date |
---|---|
TW228607B true TW228607B (zh) | 1994-08-21 |
Family
ID=25447737
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW081109685A TW228607B (zh) | 1992-07-31 | 1992-12-03 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5382547A (zh) |
EP (1) | EP0583866A1 (zh) |
JP (1) | JPH0697302A (zh) |
KR (1) | KR940002970A (zh) |
TW (1) | TW228607B (zh) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5567660A (en) * | 1995-09-13 | 1996-10-22 | Taiwan Semiconductor Manufacturing Company Ltd | Spin-on-glass planarization by a new stagnant coating method |
US5665657A (en) * | 1995-09-18 | 1997-09-09 | Taiwan Semiconductor Manufacturing Company, Ltd | Spin-on-glass partial etchback planarization process |
US5840623A (en) * | 1995-10-04 | 1998-11-24 | Advanced Micro Devices, Inc. | Efficient and economical method of planarization of multilevel metallization structures in integrated circuits using CMP |
US5665644A (en) * | 1995-11-03 | 1997-09-09 | Micron Technology, Inc. | Semiconductor processing method of forming electrically conductive interconnect lines and integrated circuitry |
US5789314A (en) * | 1995-12-05 | 1998-08-04 | Integrated Device Technology, Inc. | Method of topside and inter-metal oxide coating |
US5827782A (en) * | 1996-06-03 | 1998-10-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Multiple etch method for optimizing Inter-Metal Dielectric (IMD) spacer layer profile |
US5783481A (en) * | 1996-06-05 | 1998-07-21 | Advanced Micro Devices, Inc. | Semiconductor interlevel dielectric having a polymide for producing air gaps |
US6576976B2 (en) | 1997-01-03 | 2003-06-10 | Integrated Device Technology, Inc. | Semiconductor integrated circuit with an insulation structure having reduced permittivity |
US5926716A (en) * | 1997-03-31 | 1999-07-20 | Siemens Aktiengesellschaft | Method for forming a structure |
US5920791A (en) * | 1997-11-06 | 1999-07-06 | Vanguard International Semiconductor Corporation | Method of manufacturing intermetal dielectrics for sub-half-micron semiconductor devices |
KR100481981B1 (ko) * | 1997-12-29 | 2005-06-17 | 매그나칩 반도체 유한회사 | 반도체소자의층간절연막형성방법 |
US6177802B1 (en) | 1998-08-10 | 2001-01-23 | Advanced Micro Devices, Inc. | System and method for detecting defects in an interlayer dielectric of a semiconductor device using the hall-effect |
US6023327A (en) * | 1998-08-10 | 2000-02-08 | Advanced Micro Devices, Inc. | System and method for detecting defects in an interlayer dielectric of a semiconductor device |
US6384466B1 (en) * | 1998-08-27 | 2002-05-07 | Micron Technology, Inc. | Multi-layer dielectric and method of forming same |
JP4236805B2 (ja) | 2000-10-18 | 2009-03-11 | Necエレクトロニクス株式会社 | 半導体装置の製造方法および半導体装置 |
US7163881B1 (en) | 2004-06-08 | 2007-01-16 | Integrated Device Technology, Inc. | Method for forming CMOS structure with void-free dielectric film |
US7918383B2 (en) * | 2004-09-01 | 2011-04-05 | Micron Technology, Inc. | Methods for placing substrates in contact with molten solder |
JP2006310454A (ja) * | 2005-04-27 | 2006-11-09 | Toshiba Corp | 半導体装置およびその製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4481070A (en) * | 1984-04-04 | 1984-11-06 | Advanced Micro Devices, Inc. | Double planarization process for multilayer metallization of integrated circuit structures |
US4986878A (en) * | 1988-07-19 | 1991-01-22 | Cypress Semiconductor Corp. | Process for improved planarization of the passivation layers for semiconductor devices |
JPH0277140A (ja) * | 1988-09-13 | 1990-03-16 | Nec Corp | 集積回路の製造方法 |
JPH0279437A (ja) * | 1988-09-14 | 1990-03-20 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
EP0423907B1 (en) * | 1988-11-10 | 1996-04-24 | Applied Materials, Inc. | Method for planarizing an integrated circuit structure |
US5204288A (en) * | 1988-11-10 | 1993-04-20 | Applied Materials, Inc. | Method for planarizing an integrated circuit structure using low melting inorganic material |
US5192715A (en) * | 1989-07-25 | 1993-03-09 | Advanced Micro Devices, Inc. | Process for avoiding spin-on-glass cracking in high aspect ratio cavities |
US5119164A (en) * | 1989-07-25 | 1992-06-02 | Advanced Micro Devices, Inc. | Avoiding spin-on-glass cracking in high aspect ratio cavities |
US5101142A (en) * | 1990-09-05 | 1992-03-31 | Applied Lumens, Ltd. | Solid-state ballast for fluorescent lamp with multiple dimming |
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1992
- 1992-07-31 US US07/922,897 patent/US5382547A/en not_active Expired - Lifetime
- 1992-12-03 TW TW081109685A patent/TW228607B/zh active
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1993
- 1993-05-18 EP EP93303846A patent/EP0583866A1/en not_active Withdrawn
- 1993-06-17 JP JP5146314A patent/JPH0697302A/ja not_active Withdrawn
- 1993-07-02 KR KR1019930012440A patent/KR940002970A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP0583866A1 (en) | 1994-02-23 |
JPH0697302A (ja) | 1994-04-08 |
KR940002970A (ko) | 1994-02-19 |
US5382547A (en) | 1995-01-17 |