TW226053B - - Google Patents

Info

Publication number
TW226053B
TW226053B TW82106946A TW82106946A TW226053B TW 226053 B TW226053 B TW 226053B TW 82106946 A TW82106946 A TW 82106946A TW 82106946 A TW82106946 A TW 82106946A TW 226053 B TW226053 B TW 226053B
Authority
TW
Taiwan
Application number
TW82106946A
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of TW226053B publication Critical patent/TW226053B/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041Cleaning
    • H01L21/02043Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02052Wet cleaning only

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
TW82106946A 1992-04-29 1993-08-27 TW226053B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US87587192A 1992-04-29 1992-04-29

Publications (1)

Publication Number Publication Date
TW226053B true TW226053B (zh) 1994-07-01

Family

ID=25366514

Family Applications (1)

Application Number Title Priority Date Filing Date
TW82106946A TW226053B (zh) 1992-04-29 1993-08-27

Country Status (3)

Country Link
EP (1) EP0567939A3 (zh)
JP (1) JPH06204200A (zh)
TW (1) TW226053B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5695569A (en) * 1991-02-28 1997-12-09 Texas Instruments Incorporated Removal of metal contamination
EP0502356A3 (en) * 1991-02-28 1993-03-10 Texas Instruments Incorporated Photo-stimulated removal of trace metals
EP0702400A3 (en) * 1992-05-29 1996-05-15 Texas Instruments Inc Removal of metallic contaminants
JPH0817815A (ja) * 1994-06-30 1996-01-19 Toshiba Corp 半導体デバイスの製造方法、半導体基板の処理方法、分析方法及び製造方法
WO2001054181A2 (en) * 2000-01-22 2001-07-26 Ted Albert Loxley Process and apparatus for cleaning silicon wafers
WO2003029830A1 (en) * 2001-10-03 2003-04-10 Genomic Solutions Acquisitions Limited Cleaning method
JP2005030378A (ja) 2003-05-30 2005-02-03 Mahindra & Mahindra Ltd 重力充填式燃料供給ポンプを備えるディーゼルエンジンのセルフエア抜き燃料供給システム
CN101107082B (zh) * 2004-11-25 2010-07-21 荷兰联合利华有限公司 清洁装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01111337A (ja) * 1987-10-26 1989-04-28 Toshiba Corp ウエーハ洗浄装置
JPH03136329A (ja) * 1989-10-23 1991-06-11 Nippon Telegr & Teleph Corp <Ntt> シリコン基板表面の清浄化方法
JPH0475339A (ja) * 1990-07-17 1992-03-10 Seiko Epson Corp 電界洗浄法

Also Published As

Publication number Publication date
JPH06204200A (ja) 1994-07-22
EP0567939A3 (en) 1993-12-15
EP0567939A2 (en) 1993-11-03

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