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Priority claimed from JP4575192Aexternal-prioritypatent/JPH05167063A/ja
Application filed by Sumitomo Electric IndustriesfiledCriticalSumitomo Electric Industries
Application grantedgrantedCritical
Publication of TW225038BpublicationCriticalpatent/TW225038B/zh
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
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Computer Hardware Design
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Internal Circuitry In Semiconductor Integrated Circuit Devices
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