A6 B6 2050¾4 ΐ、發明説明（3 ) (産業方面之利用領域） •加工半導體製品及其他各種精密零組件之工廠，由於 要求超清淨度，故將該工廠設成無塵室，配置俗稱柵板（ grating)或穿孔金屬（punching .metal地板，即設有通氣 用小孔之地板面，並採用例如在天花板與地板面之間令空 氣循環之垂直層流方式之通氣，設成可防止塵埃飛揚之構 成者。 本發明傺與搬運車在上述無塵室等之地板面行駛之際 .應用在可能對車體有所衝擊，致令其上下震動之環境之 搬蓮工作，尤其適合用在用以搬蓮半導體晶片等，易因振 動衝擊受損之物體其搬蓮用台車方面之搬蓮用台車之懸吊 裝置有關。 (以往之技術） 以往，在無塵室中，進行搬蓮半導體晶片而搭載機器 人之搬蓮台車有如圔9所示者。 同圖中，1傜搬蓮用台車；2像車體框架；3偽動輪； 3a傜由馬達構成之驅動機構；4a、4b傷惰輪；5傺機器人； 5 a傺其手部；5 b則係臂部。 6傺貨台；7a、7b傜防震橡膠；8a、8b傺收纳有半導 體晶片卡匣；而9為柵板。 搬蓮用台車係於藉由機器人5其手部5a之操作，將放 置在無塵室内規定位置之收納有半導體晶片之晶片卡盒匣 8a、8b載置於貨台6上後，為將其搬運至次工程（例如CVD 裝置），在柵板9上行駛者。 本紙張尺度適用中國國家標準（CNS)甲4規格（210 X 297公釐） ----1---.---------('------裝——-----玎------ (請先閲讀背面之注意事項再塡寫本頁) 經濟部中央標準局員工消費合作社印製 81.9.20,000 3 經濟部中央標準局員工消費合作社印製 A6 B6 五、發明説明（4) (發明欲予解決之問題） 然而，當搬蓮用台車1在該柵板9上行駛時，動輪3、 惰輪4a或4b等車輪通過形成於柵板9之前後、左右方向之 小孔之際，車軸即産生上下震動，車體亦向前後左右搖動 .結果，貨台6上之晶片卡盒即遭受上下、前後左右方向 之震動。該上下震動現象在小徑之惰輪尤其顯著。至於， 貨台6之向前後左右方向之搖動則機器人在地板面上進行 臂部操作之際，或搬蓮用台車行駛在右轉彎或左轉彎之行 駛路上之際亦産生。 再者，以使用在上述無塵室等用途之搬蓮用台車而言 .由於行駛路之面積有限，故車髏寬度亦比較窄小，且由 於自配置於比較高處之位置，利用機器人搬蓮半導體晶片 ,故貨台勢必配置於高位置，因而搬蓮用台車其重心位置 亦隨之提高，而有成為在行駛方向向前後左右（橫）方向搖 動，或易於傾.斜之不穩定車體之傾向。 因此，於以往之搬運用台車1中，如圖示，在貨台6與 車體框架2間設置有防震橡膠7 a、 7 b，亦可吸收上下方向 之震動至一定程度，然而，僅靠此措施，尚難謂已足夠補 償震動之影響。 至於，對行駛方向之貨台其前後左右方向之震動或傾 斜則未採行任何對策，因此，於向前後左右方向之搖動或 於右轉彎等之際，車體一時傾斜現象相當大。 為了解決上述之問題，有考慮到在地板面敷設軌條， 令搬蓮用台車在軌條上行駛之辦法，然而敷設上述之軌條 (請先閲讀背面之注意事項再塡寫本頁) 裝. 訂. 本纸張尺度適用中國國家標準（CNS)甲4規格（210 X 297公釐） 4 81.9.20,000 205024 A6 B6 _ 五、發明説明（5 ) ，此不僅阻碍柵板之通氣性，即於維護、檢修配置於柵板 下方之電氣器具之配銭之際，需抬高該處之柵板時，每一 次，必須拆卸軌條，在實用上，問題不少。 另一方，收納於晶片卡盒8a.、8b内之半導體晶片，係 對卡匣保持若干小間隙收納者，且因其材質之機械性強度 小，於是由於上述原因引起之貨台6之上下方向之震動及 前後左右方向之搖動，將使半導體晶片與卡盒相碰撞而造 成損壞，而極待有效之解決方案。 另外，於以往之構造，亦可考慮減少搬蓮用台車之行 駛肆度，科減少因上述之震動等所産生之障礙，然而，如 此一來，生産效率亦降低。 亦即，業界殷望開發出一種搬用台車可應用於該領域 ;縱令其車軸間距短，重心位置高，容易呈現不穩定之小 型搬蓮用台車，而行駛於施予柵板等之地板面，或進行機 器人操作，或進一步提高目前之行駛速度，亦可減少貨台 之震動或前後左右方向之搖動甚或傾斜現象之搬蓮用台車 0 本發明傜以提供能解決上述問題之搬蓮用台車之懸吊 裝置為目的者。 (解決問題之手段） 本發明係與直接或中介貨台將搬蓮物品載置於車台上 面行駛之搬蓮用台車，卽設成在上述車台與各惰輪互相間 設置防震機構，同時亦設置以垂直方向配置之上下滑動機 構，並且選擇在單方向相對之惰輪之支承體互相配成一對 本紙張尺度適用中國國家標準（CNS)甲4規格（210 X 297公釐） 81.9.20,000 ----I*-------------(.------裝丨 —----.玎------Μ (請先閲讀背面之注意事項再塡本頁) 經濟部中央標準局员工消費合作社印*1衣 A6 B6 2050¾^ 五、發明説明（6 ) ，以連結板連結支承於上述車台之搬蓮用台車之懸吊裝置 者。 此時，利用連結板連結之一對惰輪則以選擇在搬蓮用 台車其駛行方向互相成為左右横方向之2個惰輪為佳。 此外，利用連結板連結之一對惰輪，以選擇在搬蓮用 台車其駛行方向互相成為前後方向之2値惰輪亦可。 再者，除上述對惰輪之選擇外，以設成在上述車台下 面與各動輪互相間設置防震機構，亦設置以垂直方向配置 之滑動機構，同時，將相對向之各動輪之支承體互相間， 由片連結板連結支承於上述車台為佳。 另外，上述防震機構以設成附有防震橡膠或空氣彈墊 (air cushion)等具有震動衰減作用之防震機構為佳。 至於上述上下滑動機構則以設成應用球珠襯套（b a 1 1 bushing)等之线性襯套為佳。· (作用） 本發明之搬蓮用台車之懸吊裝置，由於設成在搬蓮用 台車其車台與各車輪間設置防震機構，亦設置以垂直方向 配置之上下滑動機構，且以連結板將一對單方向，例如左 右方向之車輪加以連結之構造，故搬蓮用台車行駛於無磨 室之地板面之柵板上之際發生之上下震動即由上述防震機 構及上下滑動機構所吸收，同時，以往存在之機器人之臂 部操作或搬蓮用台車行駛時，左轉彎或右轉彎引起之前後 左右方向之貨架之搖動或傾斜現象即因連結板與上下滑動 機構間之相乘作用而可完全補償其影饗，可使載置有半導 本紙張尺度通用中國國家標準（CNS)甲4規格（210 X 297公釐） 81.9.20,000 6 -----------------^------裝------.玎------Μ (請先閲讀背面之注意事項再塡寫本頁) 經濟部中央標準局貝工消費合作社印製 公〇5〇的 A6 經濟部中央標準局貝工消費合作社印製 _B6_ 五、發明説明（7 ) 體晶片等之貨台經常保持在穩定狀態。 (實施例） 首先，依圖1及圖2所示之第1實施例說明本發明之具 體構造。 圖1(A)表示本發明第1實施例之自立無人車等搬蓮用 台車之側面圖，為方便於說明起見，以將車台外皮拆卸， 露出框體之形式顯示車台部分。另外，為使圖面簡單，搭 載於搬蓮用台車上之機器人則省略圖示。該圖（B)傺圖1( A )之A - A线截面圖；而圖1 ( C )則傜後方側之惰輪附近之搬 運用台車之下面圖。另外，於圔1(B)無地板面之圔示。至 於，画2則傺搬蓮用台車之正面圖。 各圔中，10傺本發明之搬蓮用台車；而11則傜車台， 車台11係由例如：上框架11a、下框架11b、以及，連結該 等各框架之垂直框架11C所構成。 12a及12b偽動輪，由馬逹、電池及其他所構成之動輪 機組12c所驅動，同時，亦中介同單元12c支承於下框架11 b 〇 13a〜13d各傺惰輪。該等4痼惰輪如圖示，以相對向 之一對惰輪，例如在行駛方向成為左右相對狀態之前方愤 輪13a、 13b及後方之惰輪13c、 13d各自成一對，設成由第 1之連結板14及第2連結板15，中介包含有各自之軸承部之 支承件13ai、 13bi及13ci、 13d彼此連結之構造。 另外，亦設成令各惰輪13a、 13b及13c、 13d中介各連 結板14、 15,各以各別之防震機構16a、 16b及16c、16d並 (請先閲讀背面之注意事項再塡·寫本頁) 裝· 訂_A6 B6 2050¾4 ls. Description of the invention (3) (Utilization field in industry) • A factory that processes semiconductor products and other various precision components requires ultra-cleanliness, so the factory is set up as a clean room with a grid commonly known as a grid (Grating) or perforated metal (punching .metal floor, that is, the floor surface with small holes for ventilation, and for example, a vertical laminar flow method for air circulation between the ceiling and the floor surface, which is set to prevent dust from flying. The composition of the present invention is that when the Ye and the transport vehicle are driving on the floor surface of the above-mentioned clean room, etc .. They are used in the environment of the lotus that may have an impact on the vehicle body, causing it to vibrate up and down, especially suitable for use. Suspension devices for lotus-carrying trolleys for lotus-carrying trolleys, such as lotus-semiconductor wafers and other objects that are easily damaged by vibration and shock. (Conventional technology) Conventionally, lotus-semiconductor wafers have been moved in clean rooms The lotus trolley with a robot is shown in Figure 9. In the same figure, 1 lotus trolley for lotus; 2 like a car body frame; 3 pseudo-moving wheels; 3a drive mechanism composed of a motor; 4a, 4b injured idler wheel; 5 Ye robot; 5 a Ye hand; 5 b is the arm. 6 Ye cargo platform; 7a, 7b Yue shockproof rubber; 8a, 8b Ye houses semiconductor wafer cassettes; 9 is grid The trolley for carrying lotus is based on the operation of the hand 5a of the robot 5 to place the wafer cassettes 8a, 8b containing semiconductor wafers placed at a predetermined position in the clean room on the cargo bed 6, for Carry it to a secondary project (such as a CVD device) and drive on the grid 9. This paper size is applicable to China National Standard (CNS) A 4 specifications (210 X 297 mm) ---- 1 ---.- -------- ('------ installed --------- 玎 ------ (please read the notes on the back before writing this page) Central Bureau of Standards, Ministry of Economic Affairs Printed by the employee consumer cooperative 81.9.20,000 3 Printed by the employee consumer cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A6 B6 V. Description of the invention (4) (Problems to be solved by the invention) However, when the trolley 1 for moving the lotus is on the grid 9 When driving, when the wheels such as the moving wheel 3, the idler 4a or 4b pass through the small holes formed in the front, rear, left and right directions of the grid 9, the axle produces up and down vibrations, and the body also shakes forward, backward, left and right. The wafer cassette on the cargo bed 6 is subject to vibrations in the up, down, front, back, left, and right directions. The up and down vibration phenomenon is particularly noticeable in the idler with a small diameter. As for the vibration of the cargo bed 6 in the front, back, left, and right directions, the robot is on the floor It also occurs when the arm operation is performed, or when the trolley for moving the lotus is driving on the right or left turning road. In addition, for the trolley for moving the lotus used in the above clean room and other purposes. The area is limited, so the width of the car is also relatively narrow, and because the robot is used to move the lotus semiconductor chip since it is arranged at a relatively high position, the cargo platform must be arranged at a high position, so the position of the center of gravity of the trolley for moving the lotus also follows As a result of this improvement, there is a tendency for the unstable vehicle body to oscillate forward, backward, left, and right (horizontal) in the direction of travel, or to tilt easily. Therefore, in the conventional trolley 1 for transportation, as shown in the figure, anti-vibration rubbers 7 a and 7 b are provided between the cargo bed 6 and the vehicle body frame 2 to absorb the vibration in the vertical direction to a certain degree, however, only This measure is hard to say enough to compensate for the impact of vibration. As for the vibration or tilting of the cargo bed in the direction of travel, no countermeasures are taken. Therefore, when the vehicle is rocking in the front-rear, left-right direction, or turning right, etc., the vehicle body may incline temporarily. In order to solve the above problems, there are considerations for laying rails on the floor surface, so that the lotus will use a trolley to drive on the rails, but laying the above rails (please read the precautions on the back before writing this page). . Order. This paper scale is applicable to the Chinese National Standard (CNS) A4 specifications (210 X 297 mm) 4 81.9.20,000 205024 A6 B6 _ 5. Description of the invention (5), which not only hinders the ventilation of the grid, that is When maintaining and overhauling the distribution of electrical appliances arranged under the grid, the grid must be removed every time when the grid needs to be raised there. In practice, there are many problems. On the other hand, the semiconductor wafers stored in the wafer cassettes 8a., 8b are kept in a small gap with the cassette, and the mechanical strength of the material is small, so the cargo platform 6 is up and down due to the above reasons. The vibration and the shaking in the front, back, left, and right directions will cause the semiconductor chip to collide with the cartridge and cause damage, and an effective solution is highly desired. In addition, in the conventional structure, it is also possible to reduce the travel speed of the trolley for moving the lotus, and reduce the obstacles caused by the above-mentioned vibrations. However, as a result, the production efficiency is also reduced. That is, the industry is eager to develop a moving trolley that can be used in this field; even if its axle spacing is short and the center of gravity is high, it is easy to present unstable small moving trolleys, and it is driven on the floor surface applied to the grid, etc. Or carry out robot operation, or further increase the current running speed, can also reduce the vibration of the cargo bed or the phenomenon of shaking or tilting in the front, back, left, and right directions. The present invention provides a trolley for moving lotus that can solve the above problems Suspension device for the purpose. (Means to solve the problem) The present invention is a trolley for moving lotus with a direct or intermediary cargo platform that loads lotus items on the carriage, and is provided with an anti-vibration mechanism between the carriage and the idler wheels, and at the same time The vertical and horizontal sliding mechanisms are arranged vertically, and the supporting bodies of the idler wheels that are opposed in one direction are matched with each other to form a pair. This paper standard is applicable to the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) 81.9.20,000- --I * ------------- (.------ 装 丨 ------. 玎 ------ Μ (Please read the precautions on the back first (This page) Printed by the Employees ’Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs * 1 Clothing A6 B6 2050¾ ^ 5. Description of the invention (6), the connection device is used to connect the suspension device of the trolley for carrying the lotus supported on the above platform. At this time, It is better to select one pair of idler wheels connected by connecting plates to select two idler wheels whose traveling directions are horizontal to each other in the trolley for moving the lotus. In addition, use a connecting plate to connect one pair of idler wheels to select The driving direction of the lotus trolley can be two idler wheels in the front-rear direction. Also, except for the above-mentioned idler wheels In addition to this, it is arranged to provide an anti-vibration mechanism between the undercarriage and the moving wheels, and a sliding mechanism arranged in a vertical direction, and at the same time, the supporting bodies of the opposing moving wheels are connected to each other by the sheet connecting plate. The above-mentioned vehicle platform is preferable. In addition, the above-mentioned anti-vibration mechanism is preferably provided with an anti-vibration mechanism with vibration damping effect such as anti-vibration rubber or air cushion. As for the above-mentioned up-and-down sliding mechanism, a ball bushing is used. (Ba 1 1 bushing) and other linear bushings are preferred. (Function) The suspension device of the trolley for carrying lotus of the present invention is provided with an anti-vibration mechanism between the platform and each wheel of the trolley for carrying lotus. The vertical sliding mechanism is arranged vertically, and a pair of wheels in a single direction, such as left and right directions, are connected by a connecting plate. Therefore, when the trolley for moving the lotus is running on the grid plate on the floor surface of the grinding room The up and down vibration is absorbed by the above-mentioned anti-shock mechanism and the up and down sliding mechanism. At the same time, when the arm of the robot that has existed in the past or when the trolley for moving the lotus moves, it turns left The right-hand turning causes the racking or tilting phenomenon of the front, back, left, and right directions, that is, due to the multiplication of the connecting plate and the up and down sliding mechanism, it can completely compensate for its shadow, and it can make the paper standard with semiconducting paper universal Chinese national standard ( CNS) A 4 specifications (210 X 297 mm) 81.9.20,000 6 ----------------- ^ ------ install ------. 玎- ----- Μ (Please read the precautions on the back before writing this page) A6 printed by the Peking Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Printed by the Peking Consumer Cooperative Co., Ltd. of the Central Bureau of Standards of the Ministry of Economic Affairs_B6_ 5. Description of the invention (7) Cargo platforms such as bulk wafers are often kept in a stable state. (Embodiment) First, the specific structure of the present invention will be described with reference to the first embodiment shown in Figs. 1 and 2. Fig. 1 (A) shows a side view of a trolley for carrying a lotus, such as a self-sustaining unmanned vehicle, according to the first embodiment of the present invention. For convenience of explanation, the platform portion is shown in the form of disassembling the cover of the platform to expose the frame. In addition, in order to simplify the drawing, the robot mounted on the trolley for carrying lotus is omitted. The figure (B) is a sectional view taken along line A-A of Ye Figure 1 (A); and Figure 1 (C) is the bottom view of the moving trolley near the idler wheel on the rear side of Tong. In addition, No. 1 (B) has no floor surface. As for the painting 2 is a front view of a trolley used by Ye to move the lotus. Among them, 10 are the trolleys for carrying the lotus of the present invention; 11 is the Taishen platform. The platform 11 is composed of, for example, an upper frame 11a, a lower frame 11b, and a vertical frame 11C that connects these frames. The pseudo moving wheels 12a and 12b are driven by a moving wheel unit 12c composed of horses, batteries, and others. At the same time, the same unit 12c is also supported by the idler wheels of the lower frames 11b, 13a to 13d. As shown in the figure, the four idler wheels are opposed to a pair of idler wheels, for example, the front angry wheels 13a, 13b and the rear idler wheels 13c, 13d are each paired before the driving direction becomes the left-right relative state, and set to The connecting plate 14 and the second connecting plate 15 of 1 have a structure in which the support members 13ai, 13bi, 13ci, and 13d of the respective bearing portions are connected to each other. In addition, it is also set up so that each idler 13a, 13b and 13c, 13d intermediary each connecting plate 14, 15, each with a separate anti-vibration mechanism 16a, 16b and 16c, 16d and (please read the precautions on the back first. Write this page)
A 本紙張尺度適用中國國家標準（CNS)甲4規格（210 X 297公货） 81.9.20,000 7 A6 B6 2〇5〇2'i 五、發明説明（8 ) 各別之上下滑動機構17a、17b及17c、 17d兩者，連繫支承 於下框架1 1 b。 此時，防震機構16a〜16d若使用例如就防震機構16a 部分，在圖3 (A)所例示之在线圈形彈簧’C外周裝着橡膠製 夕卜皮G之所謂防震橡膠，設成兼具彈簧作用與衰減作用各 功能之附有衰減作用之防震機構，則在降低諧振倍率方面 較為理想。 上述之附有衰減作用之防震機構，除圖3 ( A )之防震橡 膠1 6 a外，以如同圖（B )所示之將附有小孔（〇 r i f i c e )之空 氣箱T與空心之伸縮囊狀橡體G兩者連結而内裝空氣A之 空氣彈墊16a’取代之亦可；而可考慮各種變形方式。 至於，上下滑動機構1 7 a〜1 7 d則使用例如就上下滑動 機構17a部分所圖示，在垂直心棒R外周將複數對球珠B1〜 B 3内裝於環狀外殼S内所構成球珠襯套即可。除該種滾珠 軸承型球珠襯套外，上下滑動機構採用滑動軸承型者亦可 ，抵要應用具有總稱為钱性襯套（linear bush),亦即在 水平方向具有剛性，而可在上下方向滑動之功能者即可。 1 8傺柵板（g r a t i n g ) , S外，雖無圖示，但假定半導 體晶片等搬運品傺載置於上框架1 1 a上者。本發明第1實施 例之搬運用台車11之構造如以上所述。 當搬蓮用台車10於柵板18上行駛時，各惰輪13a〜13d ，動輪12a、 12b等各車輪即因柵板18之小孔而産生上下震 動。該上下震動其對小直徑之各惰輪1 3 a〜1 3 d之影饗尤甚 於對動輪1 2 a、 1 2 b之影響，車台1 1之上框架1 1 a即受其影 本紙張又度適用中國國家標準（CNS)甲4規格（210 X 297公釐） --------.---------^------裝-------玎------Λ (請先閲讀背面之注意事項再塡寫本頁) 經濟部中央標準局員工消費合作社印製 81.9.20,000 8 2050¾^ A6 B6 經濟部中央標準局員工消費合作社印製 五、發明説明（9 ) 攀而欲向上下方向震動。然而，本發明之構造則因設有防 震機構16a〜16d及上下滑動機構17a〜17d,故可補償上述 之上下方向之震動。 另外，於左轉彎或右轉彎等之際，因離心力作用而雖 為一時性現象，有一股欲令車體傾斜之力量加上。而適月j 本發明之重心位置高，車軸間距小之搬蓮用台車上，離心 力所賦予之影響力尤其顯著。圖4即提示此情況之模式者， 同圖中，為使圔面簡單以縱長矩形Z表示車台外包含機器 人機構之車體部分，以W iW 2表示車輪，以X i、 X 2表示防 震擇構，以Y 1、 Y 2表示上下滑動機構，而以L表示連結板。 另外，圖4中分別描繪有（A )及（B ) 2値圖面乃傺為說明 本發明之2値功能而採取者。亦即，如圖4(A)所示，設置 有本發明之構造之1之防震機構X 1、X 2與上下滑動機構Y 1 、Y2時，對車體（含車台）之上下方向之震動雖有補僂作用 ,然僅憑此功能，對車體之行駛方向上左右方向之搖動、 傾斜現象則全無補償作用，因此，如同圔所示，當有起因 於例如離心力而傾斜力作用在車體時，車體勢將發生傾斜 0 然而，本發明之構造則在行駛方向成為左右方向之相 對向惰輪互相間設置連結板L ,設成可藉由上下滑動機構 之剛度與連結板兩者之相乘作用，如圔4(A)所示，搬蓮用 台車即使因例如右轉彎行駛而有起因於離心力，欲令其向 左方傾斜之力量作用其上，亦可補償此作用，使車體不致 於發生傾斜。 本紙張尺度適用中國國家標準（CNS)甲4规格（210 X 297公釐） 81.9.20,000 ----I---.---------(------裝 - -----，玎------ (請先閲讀背面之注意事項再填..^本頁) 9 A6 B6 2050 沾 五、發明説明$ 〇 ) 如上述，本發明之對車體其左右方向之搖動、傾斜之 補僂作用.，對於起因於機器人臂部操作之車體之傾斜，或 在柵板上行駛時之左右方向之搖動方面亦同樣發揮作用。 另外，於圖1中，為使圖面簡單，動輪12a、 12b部分 有由電瓶等其他動輪機組形成為1 2 c將直結於下框架1 1 b , 然此偽中介上下滑動機構直結於下框架1 1 b ,設成動輪機 組1 2 c之上下方向震動不致直接傳逹於下框架1 1 b之構造者 0 其次，依圖5、圖6説明本發明之第2實施例。另外， 圖5係提示第2實施例構成之側面圔，圖6中，剖线Η - Η ’之 右方側傜省略地板面描繪之圖5中Β - Β ’线剖面圖，圔6中， 部面Η-Η’之左方側則提示圖5中所示搬蓮用台車之下面圔 0 於圖5及圖6中，與第1實施例相同之部分傺賦予與圖 1及圖2相同之符號。 圖5及圔6中，1 9乃連結板，傺為中介相對向之動輪1 2 a、 1 2 b其包含軸承部之支承體2 0 a或2 0 b ,為拘限各動輪1 2 a、 12b其左右方向之動作所設者。 2 1及2 2各傺上下方向滑動機構.，裝着於連結板1 9與下 框架lib之間。23係防震橡膠等防震機構，其亦裝着於連 結板1 9與下框架1 1 b之間。 另外，於如上述對動輪12a、 12b亦在車台間設置懸吊 機構時，有必要將防震機構之彈簧僳數選定在適當值，以 免動輪與作為行駛路之地板面間之摩擦阻力降低至規定值 本紙張尺度適用中國國家標準（CNS)甲4規格（210 X 297公釐） . 81.9.20,000 10 ----1-------------^------裝！----ΤΓ------^ {請先閲4?背面之注意事項再塡.罵本頁) 經濟部中央標準局員工消費合作社印製 經濟部中央標準局員工消費合作社印製 2050^4 A6 B6 五、發明説明q i ) 以下。 本發明之第2實施例之搬蓮用台車lOAm設成如上述之 構造者。 至於該搬運用台車1 ο A之情形則較之第1實施例之搬運 用台車，由於動輪12a、 12b部分亦有連結板19、上下滑動 機構21、 22,以及，防震機構23,具備可對車台11發生作 用之懸吊機搆，故亦與前面已說明之對各惰輪之作用同樣 ,對於在柵板18上行駛中發生之上下震動，利用防震機構 23與上下滑動機構21、 22兩者加以補償，另外，對於車台 左右方向之搖動及頤斜則利用連結板1 9與上下滑動機構2 1 、22之相乘作用發揮補僂作用，因此，搬運用台車10A乃 能包含貨台之上框架1 1 a在内，執行更為穩定之搬蓮行駛。 上述各實施例傜就考慮為補償一般在該類用途所産生 車台在行駛方向之左右橫方向之搖動或傾斜作用，中介支 承體連結在連結板之一對車輪，選擇以橫方向相對向之惰 輪13a、 13b及13c、 13d,進一步選擇動輪12a、 12b等，使 各成一對之情形說明者。 然而，視其用途，搬運用台車有時亦有在其行駛往復 動之行駛路上，有須要緊急停車之場地使用之情形。 因此，適用該等用途之搬運用台車，其連結板安裝方 式例如函1、圖2所示之第1實施例者，則將惰輪1 3 a、 1 3 c 及13b、 13d各配成一對，而安裝於連結板14、 15,即可藉 以發揮對發生於行駛方向之前後方行搖動之補償作用。 (發明之效果）_'_ 本紙張尺度適用中國國家標準（CNS)甲4规格（210 X 297公釐） 81.9.20,000 11 (請先閲讀背面之注意事項再塡寫本頁) .裝. 訂. A6 B6 2050¾^ 五、發明説明（i 2 ) 如以上所述，本發明係設成在搬蓮用台車之車台與各 車輪間設置防震機構及配置於垂直方向之上下滑動機構， 且以連結板將單方向，例如左右方向之一對車輪加以連結 之構造，因此，具有下述之優異.效果： ① 如本發明之實施例所示之型式，即車軸間距離小，重心 位置高之搬運用台車之懸架裝置，因構造簡單，故以低 廉之價格即可構成，而且具備有本裝置之搬蓮用台車， 當其行駛柵板等地板面時，所産生貨台之上下方向震動 即可由上述防震機構及上下滑動機構完全加以補償。 ② 另外，以往於機器人之臂部操作、搬蓮用台車行駛時之 左轉彎或右轉彎或往復動時所産生之貨台向左右方向搖 動、傾斜，或前後方向之搖動則可由連結板與上下滑動 機構兩者之相乘作用，大致完全加以補償。 ③ 從而，適用本發明之搬運用台車之貨台在上述搬蓮用台 車其上述各行駛、搬蓮狀態下，可常保持穩定狀態，闪 此，載置在上述貨台之半導體晶片等搬蓮物品在搬蓮中 不致使其損傷。因此，具備有本發明裝置之搬蓮用台車 極適合在無塵室中之半導體晶片等之搬蓮之用。 ④ 上述之事實，經圖7、圖8所示，就本發明第1實施例之 搬蓮用台車與以往型式者兩者所作比較實驗之結果，已 有如下之定量性確認。 亦即，圖7中，橫軸偽以單邊振幅之刻度提示搬蓮用 台車之行駛速度，而縱軸則傜同樣以單邊振幅之刻度提示 貨台其震動之最大加速度者。同圖中，P係將圖1之上框架 本纸張尺度適用中國國家標準（CNS)甲4規格（210 X 297公釐） 81.9.20,000 12 --------·---------(------裝！-----玎------義 (請先閲讀背面之注意事項再塡寫本頁) 經濟部中央標準局員工消費合作社印製 A6 B6 五、發明説明（〗3 ) (請先閱讀背面之注意事項再塡寫本頁) 11a充為貨台，另外，Q則偽將圖9之車體框架2上面充為貨 台測定者。 結果，如圖7所示，行駛速度增加至1.5km/h為止之前 ，可將震動之最大加速度抑制在0.22G程度，另外，即使 駛行速度增大至2.0km/h,亦可抑制在0.44G程度，可知實 遠較Q所示之以往例之情形，具有高度震動補償效果。 另外，圖8傜以波形圖提示圖7中之行駛速度2km/h時 之單位時間（1秒）之各貨台之震動最大加速度者，圖8(A) 提示以往例之情形，而圖8 ( B )則提示本發明之情形。雖然 為使波形狀態易於觀察，在圖8 ( B )中，將縱軸之長度加 以擴大以提示，而仍可確認本發明之震動之震幅，較之以 往例者顯示大幅補僂之狀態。 (圖面之簡單説明） 圖1 ( A)為係本發明第1實施例--搬蓮台車之側面圖； 圔1 ( B )傺圔1 ( A )之A - A ’线載面_ ;而圔1 ( C )則係後方側之 惰輪附近之搬運用台車之下面圖。 圖2傺圖1所示搬運用台車之正面圖。 經濟部中央標準局貝工消費合作社印製 圖3乃提示防震機構之構成例者，圖3(A)傺提示防震 橡膠，圖3 ( B )則傺提示空氣彈墊（a i r* c u s h i ο η )之縱斷正 面圖。 圖4為説明對本發明之上下震動與橫方向之搖動、傾 斜之2個補償作用所描繪搬蓮用台車其正面圖，圔1(A)偽 提示本發明之構成中欠缺連結板之構造者，而圖1(B)則係 提示具備有連結板之本發明之基本構t者。 81.9.20,000 本纸張尺度適用中國國家標準（CNS)甲4規格（210 X 297公釐） 13 ; A6 ___Β6___ 五、發明説明（14) 圖5係本發明第2實施例之搬蓮用台車其側面圖。 圖6係提示圖5所示之搬蓮用台車之主要部分；本圖中 ，剖线Η - Η ’之右方側為圖5之B - B ’线截面，而剖线Η - Η ’之 左方側則為搬蓮用台車之下面圖。 圖7傺將本發明之搬蓮用台車與以往例者兩者相比較 所提示，貨台之震動最大加速度對搬蓮用台車之行駛速度 間之關傜特性圖。 圖8乃提示圖7中搬蓮用台車之貨台之震動對行駛速度 2km/h時最大加速度之闋傜之每一單位時間波形画，圖8( A)偽以往例之情形，而圖8 ( B )則傺提示本發明之情形者。 圖9傺以往例之搬蓮用台車正面圖。 (符號之說明） 11 :車台（貨台） 11a :上框架 lib:下框架 12a、 12b:動輪 1 3 a〜1 3 d :惰輪 13a1〜13d1、20a、20b :支承體 (請先閲讀背面之注意事項再塡寫本頁) 丨裝. 訂. 經濟部中央標準局負工消費合作社印製 a a 構 機 一^^ 滑 構下 機上 板震 ： 結防22 連·· 、 3 1 : 2 2 9 1 、 \ 81.9.20,000 本紙張尺度適用中國國家標準（CNS)甲4規格（210 X 297公釐）A This paper scale is applicable to China National Standard (CNS) A4 specifications (210 X 297 public goods) 81.9.20,000 7 A6 B6 2〇5〇2'i 5. Description of the invention (8) Separate upper and lower sliding mechanisms 17a, 17b And 17c, 17d are connected and supported by the lower frame 11b. At this time, if the vibration-proof mechanisms 16a to 16d use, for example, the vibration-proof mechanism 16a, the so-called vibration-proof rubber in which a rubber-made rubber G is attached to the outer periphery of the coil spring 'C illustrated in FIG. 3 (A) is provided as both The anti-vibration mechanism with damping function for each function of spring function and damping function is ideal in reducing the resonance magnification. The above-mentioned anti-shock mechanism with attenuation function, except for the anti-shock rubber 16 a in FIG. 3 (A), expands and contracts the air box T with a small hole (〇rifice) and the hollow as shown in FIG. (B) The bladder-shaped rubber body G can be connected to each other and replaced by an air spring pad 16a 'containing air A; various deformation methods can be considered. As for the upper and lower sliding mechanisms 1 7 a to 17 d, for example, as shown in the upper and lower sliding mechanisms 17 a, a plurality of pairs of balls B1 to B 3 are installed in the annular shell S on the outer periphery of the vertical mandrel R. Bead bushings are sufficient. In addition to this ball bearing type ball bushing, the up and down sliding mechanism can also be a sliding bearing type. It is necessary to apply a linear bush, which is rigid in the horizontal direction, but can be up and down. The function of sliding direction is enough. 1 8 Ye grid (g r a t i n g), S, although not shown in the figure, it is assumed that the transport products such as semiconductor wafers are placed on the upper frame 11 a. The structure of the transport trolley 11 according to the first embodiment of the present invention is as described above. When the trolley 10 for moving the lotus is traveling on the grid 18, the idle wheels 13a to 13d, the moving wheels 12a, 12b and other wheels are vibrated up and down due to the small holes in the grid 18. The upper and lower vibrations affect the idler wheels 1 3 a ~ 1 3 d of small diameter more than the moving wheels 1 2 a and 1 2 b. The frame 1 1 a above the carriage 1 1 is affected by its copy paper Also applicable to China National Standard (CNS) A 4 specifications (210 X 297 mm) --------.--------- ^ ------ installed ----- -玎 ------ Λ (Please read the precautions on the back before writing this page) Printed by the Employees Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 81.9.20,000 8 2050¾ ^ A6 B6 Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Printing 5. Description of the invention (9) Climbing up and down to shake in the up and down directions. However, since the structure of the present invention is provided with anti-shock mechanisms 16a to 16d and up and down sliding mechanisms 17a to 17d, it is possible to compensate for the above-mentioned up-down vibrations. In addition, when turning left or right, etc., although it is a temporary phenomenon due to the centrifugal force, there is a force to tilt the car body. However, the effect of centrifugal force on the trolley for moving lotus with high center of gravity and small axle spacing is particularly remarkable. Figure 4 shows the mode of this situation. In the same figure, in order to make the squint surface simple, the vertical rectangle Z represents the body part of the vehicle body including the robot mechanism outside, W iW 2 represents the wheel, X i, X 2 represents shock Optional, Y 1, Y 2 means up and down sliding mechanism, and L means connecting plate. In addition, FIG. 4 depicts (A) and (B), respectively. The 2-value diagram is taken to explain the 2-value function of the present invention. That is, as shown in FIG. 4 (A), when the anti-shock mechanism X 1, X 2 and the vertical sliding mechanism Y 1, Y 2 of the structure 1 of the present invention are provided, the vibration of the vehicle body (including the vehicle platform) in the up and down direction Although there is a compensation function, this function alone does not compensate for the rocking and tilting phenomena in the left and right directions of the vehicle body. Therefore, as shown in the figure, when there is a tilting force due to centrifugal force, for example, When the car body, the car body will be tilted. However, the structure of the present invention is provided with a connecting plate L between the opposite idlers whose driving direction is the left and right direction, and the rigidity of the vertical sliding mechanism and the connecting plate The multiplication of the two, as shown in 圔 4 (A), even if the trolley for moving the lotus is caused by centrifugal force due to, for example, right-turn driving, the force to tilt it to the left can be compensated for this effect, Keep the car body from tilting. This paper scale is applicable to China National Standard (CNS) A4 specifications (210 X 297 mm) 81.9.20,000 ---- I ---.--------- (------ installed- -----, 玎 ------ (please read the precautions on the back before filling in. ^ This page) 9 A6 B6 2050 Zhanwu, description of invention $ 〇) As mentioned above, the car body of the invention The compensation of the left-right direction of shaking and tilting also plays a role in the tilting of the vehicle body caused by the operation of the robot arm, or in the left-right direction of shaking when traveling on the grid. In addition, in FIG. 1, in order to make the drawing simple, the moving wheels 12a and 12b are formed by batteries and other moving wheel units formed as 1 2 c and will be directly connected to the lower frame 1 1 b, but this pseudo intermediary up and down sliding mechanism is directly connected to the lower frame 1 1 b. It is assumed that the vibration of the moving wheel unit 1 2 c in the upper and lower directions does not directly propagate to the constructor of the lower frame 1 1 b. Next, the second embodiment of the present invention will be described with reference to FIGS. 5 and 6. In addition, FIG. 5 is a side view illustrating the configuration of the second embodiment. In FIG. 6, the right side of the cross-sectional line H-H 'is omitted. The cross-sectional view of the B-B' line in FIG. 5 is omitted from the drawing of the floor surface. The left side of the partial surface Η'Η 'shows the lower surface of the trolley for carrying lotus shown in Figure 5. In Figures 5 and 6, the same parts as in the first embodiment are given the same as in Figures 1 and 2. Symbol. In Fig. 5 and Fig. 6, 1 9 is a connecting plate, and Ye is a moving wheel 1 2 a, 1 2 b facing the intermediary. It includes a bearing body 2 0 a or 2 0 b, which is a restriction to each moving wheel 1 2 a , 12b It is set by the movement in the left and right direction. 2 1 and 2 2 each of the upper and lower sliding mechanism. It is installed between the connecting plate 19 and the lower frame lib. The 23 series anti-vibration rubber and other anti-vibration mechanisms are also installed between the connecting plate 19 and the lower frame 11b. In addition, when the suspension wheels are also installed between the counter wheels 12a and 12b as described above, it is necessary to select the spring number of the anti-vibration mechanism at an appropriate value to prevent the frictional resistance between the moving wheels and the floor surface as the driving road from being reduced to the prescribed level The paper size is applicable to China National Standard (CNS) Grade 4 (210 X 297 mm). 81.9.20,000 10 ---- 1 ------------- ^ ----- -Install! ---- ΤΓ ------ ^ {Please read 4? The precautions on the back and then the page. Scold this page) Printed by Employee Consumer Cooperative of Central Bureau of Standards of Ministry of Economic Affairs Printed by Employee Consumer Cooperative of Central Bureau of Standards of Economy, Ministry of Economics 2050 ^ 4 A6 B6 V. Description of invention qi) The following. According to the second embodiment of the present invention, the trolley 10Am for carrying a lotus is constructed as described above. As for the transportation trolley 1 ο A compared to the transportation trolley of the first embodiment, since the moving wheels 12a and 12b also have a connecting plate 19, vertical sliding mechanisms 21 and 22, and an anti-shock mechanism 23 The suspension mechanism that acts on the carriage 11 is also the same as the effect on the idler wheels described above. For the up and down vibrations that occur while traveling on the grid 18, the anti-shock mechanism 23 and the vertical sliding mechanisms 21 and 22 are used. It is compensated. In addition, for the rocking and tilting of the carriage in the left-right direction, the multiplying effect of the connecting plate 19 and the vertical sliding mechanisms 2 1 and 22 is used to compensate. Therefore, the transportation trolley 10A can include the cargo platform. Frame 1 1 a is included to perform a more stable moving lotus drive. The above embodiments are considered to compensate for the rolling or tilting effect of the vehicle platform in the driving direction in the left and right and transverse directions of the general use, the intermediate support body is connected to a pair of wheels of the connecting plate, and the idle direction in the horizontal direction is selected The case where the wheels 13a, 13b and 13c, 13d further select the moving wheels 12a, 12b, etc. to make each pair a pair. However, depending on the application, the transportation trolley may sometimes be used on a site where emergency stop is required on its reciprocating driving road. Therefore, for the transport trolleys suitable for these uses, the connection plate installation method such as the first embodiment shown in FIG. 1 and FIG. 2 is to configure the idlers 1 3 a, 1 3 c and 13 b, 13 d into one Yes, it can be installed on the connecting plates 14, 15 to play the role of compensating for the back and forth shaking occurring in the direction of travel. (Effects of invention) _'_ This paper scale is applicable to China National Standard (CNS) Grade 4 (210 X 297 mm) 81.9.20,000 11 (please read the precautions on the back before writing this page). Install. Order A6 B6 2050¾ ^ V. Description of the invention (i 2) As described above, the present invention is provided with an anti-shock mechanism and a vertical sliding mechanism arranged vertically between the platform of the trolley for carrying the lotus and each wheel, and connected by The plate connects the wheels in one direction, for example, one of the left and right directions, so it has the following excellent effects. ① As shown in the embodiment of the present invention, that is, the distance between the axles is small and the center of gravity is high. The suspension device of the trolley is simple in structure, so it can be constructed at a low price, and it is equipped with a trolley for moving lotus with this device. When it runs on the floor such as the grid, the vibration of the cargo platform in the up and down direction can be caused by The above-mentioned anti-shock mechanism and up and down sliding mechanism are fully compensated. ② In addition, in the past, the cargo platform caused by the left or right turn or reciprocation of the robot arm operation, the left or right turn or the reciprocating movement of the trolley for moving the lotus can be shaken in the left and right direction, or the back and forth direction can be shaken by the connecting plate and The synergistic effect of the two of the sliding mechanism is almost completely compensated. ③ Therefore, the cargo bed to which the trolley for transportation of the present invention is applied can always maintain a stable state in the above-mentioned trolleys for carrying lotus in the above-mentioned respective traveling and carrying states. The items do not cause damage during the lotus movement. Therefore, the trolley for carrying lotus with the device of the present invention is extremely suitable for carrying lotus for semiconductor wafers and the like in a clean room. ④ The above facts have been quantitatively confirmed as shown in Figs. 7 and 8 by comparing the results of a comparison experiment between the trolley for carrying a lotus in the first embodiment of the present invention and those of the conventional type. That is, in Fig. 7, the horizontal axis pseudo-symbolizes the traveling speed of the trolley for moving the lotus with the unilateral amplitude scale, while the vertical axis also indicates the maximum vibration acceleration of the cargo platform with the unilateral amplitude scale. In the same figure, the P series applies the paper standard on the frame above Figure 1 to the Chinese National Standard (CNS) Grade 4 (210 X 297 mm) 81.9.20,000 12 -------- · ---- ----- (------ installed! ----- 玎 ------ Yi (Please read the precautions on the back before writing this page) Printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A6 B6 V. Description of the invention (〗 3) (Please read the precautions on the back before writing this page) 11a is used as the cargo platform, and Q is falsely used as the cargo platform on the car body frame 2 of FIG. 9 As a result, as shown in Figure 7, the maximum acceleration of vibration can be suppressed to 0.22G before the driving speed is increased to 1.5km / h, and even if the driving speed is increased to 2.0km / h, it can also be suppressed At a level of 0.44G, it can be seen that it has a much higher vibration compensation effect than the conventional example shown in Q. In addition, Fig. 8 shows the unit time (1 second) at a driving speed of 2 km / h in Fig. 7 with a waveform diagram. For the maximum vibration acceleration of each cargo bed, Fig. 8 (A) shows the situation of the conventional example, and Fig. 8 (B) shows the situation of the present invention. Although the waveform state is easy to observe, in Fig. 8 (B) The length of the vertical axis is enlarged to indicate, and the amplitude of the vibration of the present invention can still be confirmed, which shows a state of substantial compensation compared to the previous example. (Simple description of the drawing) FIG. 1 (A) is the present invention The first embodiment-the side view of the moving trolley; the A-A 'line load surface of 圔 1 (B) 场 圔 1 (A); and 圔 1 (C) is moved near the idler wheel on the rear side The following figure of the trolley is used. Figure 2 Ye is the front view of the conveying trolley shown in Figure 1. Printed by the Beigong Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. Figure 3 shows the example of the structure of the anti-vibration mechanism, and Figure 3 (A) shows the earthquake prevention. Rubber, Figure 3 (B) shows the longitudinal front view of the air spring cushion (air * cushi ο η). Figure 4 illustrates the two compensation effects of the upper and lower vibrations and the horizontal shaking and tilting of the present invention. The front view of the lotus trolley, 圔 1 (A) falsely suggests that the structure of the present invention lacks a connecting plate, and FIG. 1 (B) shows the basic structure of the present invention with a connecting plate. 81.9. The standard of 20,000 papers is in accordance with Chinese National Standard (CNS) Grade 4 (210 X 297 mm) 13; A6 ___ Β6 ___ 5 DESCRIPTION OF THE INVENTION (14) FIG. 5 is a side view of a trolley for carrying lotus flowers according to a second embodiment of the present invention. FIG. 6 is a diagram showing the main part of the trolley for carrying lotions shown in FIG. 5; in this figure, the section line Η-Η ' The right side is the B-B 'cross section of FIG. 5, and the left side of the section line Η-Η' is the bottom view of the trolley for moving the lotus. Figure 7 Ye shows the trolley for moving the lotus of the present invention and the conventional example The comparison between the two suggests that the characteristic diagram of the relationship between the maximum vibration acceleration of the cargo bed and the traveling speed of the trolley for moving the lotus. Fig. 8 is a graph showing the vibration of the cargo bed of the trolley for moving the lotus in Fig. 7 against the unit acceleration time of the maximum acceleration at the driving speed of 2km / h. Fig. 8 (A) shows the pseudo-conventional case, and Fig. 8 (B) Yes, who prompts the situation of the present invention. Fig. 9 is a front view of a conventional trolley for moving lotus. (Description of symbols) 11: Carriage (cargo platform) 11a: Upper frame lib: Lower frame 12a, 12b: Moving wheels 1 3a ~ 1 3d: Idler wheels 13a1 ~ 13d1, 20a, 20b: Support body (please read the back side first) Note to be written on this page) 丨 Installed. Ordered. Printed aa structure machine of the negative work consumer cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs ^^ On-board vibration of the sliding structure: Knot defense 22 companies · 3 1: 2 2 9 1, \ 81.9.20,000 This paper scale is applicable to the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm)