JPH038529Y2 - - Google Patents

Description

[Detailed description of the invention] Industrial field of application This invention uses a self-propelled cargo transport vehicle that is used to transport a case made up of a large number of plate-like objects such as wafers. This relates to a conveyance device.

Conventional technology Conventionally, wafers were transported by storing a large number of wafers in a horizontally parallel state in a case, and then placing the case on a horizontal load support surface provided on a self-propelled vehicle. This was done by running a running car. Furthermore, self-propelled vehicles were automatically stopped at stations formed at appropriate locations along a fixed route, and cases were loaded and unloaded using a transfer machine installed at the station.

Problems to be Solved by the Invention According to the above-mentioned conventional configuration, the wafers are placed horizontally in parallel on a horizontal surface and transported. When the objects come into contact (collide) with each other, noise is emitted, and if the collision is severe, the wafer may be damaged. Furthermore, unless the station is properly stopped, automatic transfer by the transfer machine cannot be carried out smoothly and accurately, so it is necessary to provide another mechanical stopper device at this station.

Means for Solving the Problems In order to solve the above-mentioned problems, a transport device using a self-propelled load transport vehicle according to the present invention is equipped with a self-propelled cart that can freely travel on a fixed route guided by a rail device. , a conveyance object support section is provided on the upper part of the self-propelled cart, a load support body that is swingable back and forth is provided on the conveyance object support section, and an inclination imparting device is provided to tilt the load support body with respect to the traveling direction. An actuating device for horizontally swinging and positioning the load support against the tilting device is provided on a station formed at a suitable position in a certain path.

Effect: According to this configuration, the load placed on the inclined load support surface will also be tilted, and therefore, if the load is a case in which plate-shaped objects are stored in parallel, these plate-shaped objects will be It can be transported while being received by the bottom surface of the case and the side surface of the lower inclined side. Further, by activating the actuating device after stopping the self-propelled cart at the station, the load can be positioned horizontally together with the load support, and the position of the load support can be corrected and positioned.

Embodiment An embodiment of the present invention will be described below based on the drawings. In Figures 1 to 3, 1 is a self-propelled trolley,
A pair of left and right first wheels 4 are attached to the machine frame 2 via an axle 3 so as to be freely rotatable; A pair of left and right second wheels 7 are attached so as to be rotatable, a lateral movement regulating wheel 8 is attached to both wheels 3 and 6, and a wheel 8 is attached to the machine frame 2 near the first wheel 4 via a drive shaft 9. A rotary propulsion wheel (friction rotary wheel) 10, a motor 11 attached to the machine frame 2 to drive the rotary propulsion wheel 10, and a speed reduction device 12 that interlocks and connects the motor 11 and the drive shaft 9. , a pinion gear 13 attached to the drive shaft 9, a current collector 15 attached to the machine frame 2, and the like. Reference numeral 16 denotes a shock absorber disposed on the machine frame 2, and a connecting portion 17 is connected upwardly from the top of the shock absorber. A conveyance object support section 18 is attached to the upper end of this connection section 17 . As shown in FIGS. 4 and 5, the shock absorber 16 attaches the connecting portion 17 to the self-propelled truck 1 so as to be relatively displaceable in the traveling direction against elasticity. A rod 21 disposed in the front-rear direction on one side of the top surface of 2, a bracket 22 fitted onto the rod 21 and slidable freely, a movable base 23 to which the bracket 22 is fixed to one side, and a movable base 23. an air damper 24 provided between the other side and the machine frame 2; a pair of springs 25A fitted externally to the rod 21 on both sides of the bracket 23;
25B, and a pair of stoppers 26A and 26B that restrict the maximum movement amount of the movable base 23, and the connecting portion 17 is erected from the movable base 23.
As shown in FIGS. 1 to 3, the conveyed object support section 1
Reference numeral 8 denotes a rod member 41 attached to the upper end of the connecting portion 17 so as to be orthogonal to the constant path 5, a pair of vertical plates 42 erected from both ends of the rod member 41, and these vertical plates 42. A pair of front and rear load supports 43 located between, mounting plates 44 erected from both sides of these load supports 43, and horizontal pins 45 that attach these mounting plates 44 to the vertical plate 42 so as to be swingable back and forth. A link 46 that connects mounting plates 44 that face each other in the front and rear so as to be relatively swingable, a tension spring 47 that is disposed between the seat of one load support 43 and the horizontal rod member 41, and a load support Vertical plate body 4 to regulate the maximum tilted posture of 43
It consists of a stopper 48 attached to 2. The above-mentioned 44 to 48 constitute an inclination device 49 that tilts the load support 43 with respect to the traveling direction, and the self-propelled cart 1 and the article support section 18 constitute a self-propelled load conveyance vehicle 50. . In this embodiment, a case 20 is shown in which a large number of plate-like objects 19 such as wafers are housed in parallel as a load placed on the load support surface 43a that is the upper surface of the load supporter 43. The parallel direction may be either the vertical direction or the horizontal direction as shown in FIG.

A pair of front and rear positioning rollers 51 is provided on the outer surface of one of the vertical plates 42 to protrude outward, and between the two positioning rollers 51, the link 4
A posture correcting roller 52 is provided protruding from the middle part of 6. Note that the posture correction roller 52 projects outward through a groove 53 formed in the vertical plate body 42.

Reference numeral 27 denotes a rail device for guiding the self-propelled trolley 1, which includes a first travel guide surface 28 that contacts the first wheel 4 from above, and a first travel guide surface that contacts the second wheel 7 and the propulsion rotating wheel 10 from below. The second running guide surface 29 has a second running guide surface 29 and a third running guide surface 30 that contacts the lateral movement regulating wheel 8 from the outside. and a rack 32 with which the pinion gear 13 engages in an inclined path or the like. The self-propelled truck 1 and the rail device 27 are arranged inside a box-shaped duct 33. On the bottom plate of this duct 33, a pair of left and right support rails 34 are provided in the travel route 5 direction, and between these support rails 34, a plurality of support frames 36 are provided in the constant route 5 direction with elastic buffers 35 interposed therebetween. The rail device 27 is attached to the frame 36 via a support 37. A slit 38 extending over the entire length of the fixed path 5 is formed in the top plate of the duct 33, and the connecting portion 17 is positioned in this slit 38. A suction duct 39 is disposed on the side of the duct 33, and a conveyed object support section 18 is disposed on the upper part.
A cover 40 is provided that surrounds the movement path of.

As shown in FIG. 7 to FIG.
4 is formed, and an actuating device 55 for horizontally swinging and positioning the load support 36 against the inclination device 49 is provided therein. That is, the cover 40 is removed from the station 54, and the support frame 56 is erected on the side of this removed portion. A pair of guide rods 57 are vertically disposed on the front side of the support frame 56 via a holding bracket 58, and an elevating body 59 guided by these guide rods 57 is provided. The elevating body 59 is raised and lowered by a cylinder device 60 provided between it and the holding bracket 58. A cam plate 61 is attached to the front surface of the elevating body 59, and the cam plate 61 has a recessed portion 62 in the center of its lower part into which the posture correction roller 52 can be fitted, and a recessed portion 62.
A first cam surface 63 extending downwardly and outwardly from the inlet portion of the
, a second cam surface 64 formed in a tapering shape on both sides of the lower part, and a regulating surface 65 that continues perpendicularly from the upper end of the second cam surface 64 . 66 indicates a transfer machine.

The self-propelled trolley 1 travels by applying the rotational force of the motor 11 to the propulsion rotating wheel 10 via the reduction gear 12 and the drive shaft 9.
This is possible by rolling the propulsion rotary wheels 10 in pressure contact with the second travel guide surface 29, and further by rolling the second wheels 7 against the second travel guide surface 29 and the first travel guide surface. Due to the rolling of the first wheel 4 with respect to 28 and the rolling of the lateral movement regulating wheel 8 with respect to the third travel guide surface 30, the horizontal
It is carried out stably on a fixed path 5 such as an incline without wobbling or rattling. During such traveling, dust is generated due to the rolling of the wheels 4, 7, 8 and the propulsion rotating wheel 10, but this dust is sucked into the suction duct 39 and is also sucked into the slit 38. Since a suction force is applied to the inside of the duct 33, there is no risk of dust coming out from inside the duct 33.

As shown in FIG. The other load support 43 is also tilted and swung.

The inclined position is maintained by contacting the stopper 48. Therefore, the load support 43a, which is the upper surface of the load support 43, is inclined.
Since the case 20 placed on the case 3a is also inclined, the 19 groups of plate-like objects stored therein are received at the same time as the bottom surface of the case 20 and the side surface on the lower side of the inclination, so that they are not affected by vibration. This prevents adjacent objects from rattling or colliding with each other.

As shown in FIGS. 7 to 10, the station 54
When the self-propelled load conveying vehicle 50 stops, a cam plate 61 is opposed above each roller 51, 52.
Now, if the vehicle is stopped at a position shifted by a certain distance as shown by the imaginary line in FIG. At the same time,
The second cam surface 64 contacts the positioning roller 51. As a result, the position is corrected by the distance as shown by the solid line, and positioning is performed via the regulating surface 65. At that time, only the conveyed object support section 18 is moved by the distance, and the self-propelled cart 1 remains stopped. i.e. spring 25
The movable base 23 moves against the elasticity of A or 25B, and the position is thereby corrected. Further, the posture correction roller 52 moves by a length α, which is the distance plus a predetermined actuation amount L. Due to this movement of the operating amount L, the tension spring 4
The link 46 moves against the force 7, thereby swinging both load supports 43 around the horizontal pin 45 to bring the load support surface 43a into a horizontal position. This attitude is maintained by fitting the recess 62 into the position correction roller 52. As a result, the case 20 is in a horizontal position and in a fixed position, so that the station 5
The automatic transfer by the transfer machine 66 in step 4 can always be performed smoothly and accurately.

Effects of the invention According to the present invention having the above structure, the load placed on the load support surface is inclined, and therefore, when the load is a case in which plate-like objects are stored in parallel, these plate-like objects are Objects are received simultaneously by the bottom surface of the case and the side surface of the lower sloped side, which prevents adjacent objects from rattling or colliding with each other due to vibrations during driving, which prevents noise generation and prevents the board from colliding with other objects. It is possible to transport objects without damage. In particular, by activating the actuating device after stopping the self-propelled cart at the station, the attitude of the load together with the load support can be changed horizontally, and the stopping position on the load support side can be corrected and positioned. I can do it. As a result, the automatic movement of the mobile device in the station can always be performed smoothly and accurately, and a special mechanical stopper device can be made unnecessary.

[Brief explanation of the drawing]

The drawings show an embodiment of the present invention, in which Fig. 1 is a partially cutaway side view during running, Fig. 2 is a front view, Fig. 3 is a plan view, and Fig. 4 is a partially cutaway view of the shock absorber section. A cutout side view, Fig. 5 is a plan view, Fig. 6 is a side view during load transfer, Fig. 7 is a side view of the station, Fig. 8 is a front view, and Fig. 9 is a plan view. , FIG. 10 is an explanatory diagram of the cam action. DESCRIPTION OF SYMBOLS 1... Self-propelled trolley, 5... Fixed path, 16... Buffer device, 18... Transported object support part, 19... Plate-shaped object, 20 Case, 23... Movable base, 27... Rail device, 42...
Vertical plate body, 43...Load support body, 43a...Load support surface, 4
5...Horizontal pin, 46...Link, 47...Tension spring,
49... Inclination imparting device, 50... Self-propelled vehicle for transporting loads, 5
DESCRIPTION OF SYMBOLS 1... Positioning roller, 52... Posture correction roller, 54... Station, 55... Actuation device, 59
... Elevating body, 61... Cam plate, 62... Recessed part, 63...
first cam surface, 64... second cam surface, 65... regulation surface,
66...Transfer machine.

Claims (1)

[Scope of utility model registration request] A self-propelled trolley that can freely travel on a fixed route guided by a rail device is provided, a conveyed object support section is provided on the upper part of this self-propelled trolley, and a load support body that can freely swing back and forth is provided on this conveyed object support section. At the same time, a tilting device is provided for tilting the load support with respect to the traveling direction,
A self-propelled vehicle for transporting loads is used, characterized in that a station formed at a proper location along a certain path is provided with an actuating device for horizontally swinging and positioning the load support against the inclination imparting device. Conveyance device.