TW202417871A - Test equipment, test system, and test method - Google Patents

Abstract

This application relates to a test equipment, a test system and a test method. The test equipment includes multiple test boards, a main control module and a co-processing module. Each test board implements different business functions; the main control module is connected to multiple test boards and is used to connect to the host and receive tests sent by the host. item, and sends each test sequence in the test item to each test board; multiple test boards are used to connect at least one device under test, send excitation signals to the device under test according to the received test sequence, and receive the device under test Based on the response signal fed back by the excitation signal, the device obtains the test data and sends it to the co-processing module; the co-processing module is connected to multiple test boards to process the test data obtained by the test boards, obtain the test results and send them to the host. This application can improve testing efficiency.

Description

Testing machine, testing system and testing method

The present application relates to the field of testing technology, and in particular to a testing machine, a testing system and a testing method.

Automatic Test Equipment (ATE) is a device used in the semiconductor industry to test the functional integrity of integrated circuits (ICs). It is used in the final process of IC production to ensure the quality of IC production.

ATE includes a host, a tester, and a device under test (DUT). The host sends the test sequence to the tester. The tester generates a stimulus signal based on the test sequence and sends it to the DUT. The DUT feeds back a response signal to the tester based on the stimulus signal. The tester obtains test data based on the response signal and sends it to the host. The host processes the test data and obtains the test results to instruct the handler to classify the DUT.

However, as the number of devices under test increases, test efficiency decreases.

Based on this, it is necessary to provide a test machine, a test system and a test method that can improve the test efficiency in order to solve the above technical problems.

In a first aspect, the present application provides a test machine. The test machine includes a plurality of test boards, a main control module and a co-processing module;

The main control module is respectively connected to the plurality of test boards and is used to connect to a host computer, receive test items sent by the host computer, and send each test sequence in the test items to each of the test boards;

The multiple test boards are used to connect to at least one device under test, send a stimulus signal to the device under test according to the received test sequence, receive a response signal fed back by the device under test based on the stimulus signal, obtain test data and send it to the co-processing module;

The co-processing module is connected to the multiple test boards respectively, and is used to process the test data obtained by the test boards, obtain the test results and send them to the host.

In one embodiment, the co-processing module is used to obtain expected data from the host and compare the expected data with the test data obtained by the test board to obtain the test result.

In one embodiment, the co-processing module is used to send the test result to the main control module, so that the main control module sends the test result to the host.

In one embodiment, the main control module is used to receive the test configuration sent by the host, the test configuration includes channel labels corresponding to each test sequence, the channel to which the channel label belongs is located between the test board and the test station, and each test station is used to set up a device under test; each test sequence and the channel label corresponding to the test sequence are sent to the test board corresponding to the channel label.

In one embodiment, the test board includes a controller and a functional circuit; the controller is respectively connected to the main control module and the functional circuit of the same test board, and is used to receive a test sequence sent by the main control module and a channel number corresponding to the test sequence, control the functional circuit to generate an excitation signal according to the received test sequence, and send the excitation signal generated by the functional circuit to the device under test set at the test station corresponding to the channel number.

In one embodiment, the controller is also connected to the co-processing module to receive a response signal of the device under test based on the stimulus signal feedback, obtain test data and send it to the co-processing module.

In one embodiment, the test board is used to, when the test data needs to be processed, send the test data to the co-processing module, so that the co-processing module processes the test data to obtain a test result; when the test data does not need to be processed, send the test data to the main control module, so that the main control module sends the test data to the host; or, send the test data to the co-processing module and the main control module respectively, so that the co-processing module processes the test data that needs to be processed to obtain a test result, and the main control module sends the test data that does not need to be processed to the host.

In one embodiment, the test machine further includes: a data interaction module, which is respectively connected to the multiple test boards and used to connect to the server, and is used to upload the test data obtained by the test boards to the server.

In one embodiment, the test machine further includes: a clock module connected to the main control module and used to provide a clock signal; a calibration module connected to the clock module and the main control module respectively and used to provide a calibration signal.

In one embodiment, the test machine further includes: a system monitoring module, which is respectively connected to the multiple test boards and used to connect to the host, and is used to monitor each of the test boards and feed back to the host.

In one embodiment, in a second aspect, the present application provides a test system, which includes a host computer and a test machine as provided in the first aspect.

In a third aspect, the present application provides a test method. The test method comprises: receiving a test item sent by a host; sending a stimulus signal to a device under test according to each test sequence in the test item; receiving a response signal fed back by the device under test based on the stimulus signal to obtain test data; processing the test data to obtain a test result and sending it to the host.

The above-mentioned test machine, test system and test method, the test machine includes multiple test boards, a main control module and a co-processing module, and each test board implements different business functions. The main control module is respectively connected to multiple test boards and is used to connect to the host, receive test items sent by the host, and send each test sequence in the test item to each test board. Multiple test boards are used to connect at least one device under test, send an excitation signal to the device under test according to the received test sequence, and receive a response signal based on the feedback of the excitation signal from the device under test, obtain test data and send it to the co-processing module. The co-processing module is respectively connected to multiple test boards, and is used to process the test data obtained by the test boards, obtain test results and send them to the host. In this way, the test data is processed inside the test machine, which can reduce the data processing volume of the host and the data processing time on the one hand, and shorten the feedback path of the test data and reduce the data transmission time on the other hand. Overall, the test efficiency is improved.

In order to facilitate understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. The drawings provide embodiments of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the application. The terms used herein in the specification of the application are only for the purpose of describing specific embodiments and are not intended to limit the application.

It will be understood that the terms "first", "second", etc. used in this application may be used herein to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish a first element from another element.

Spatially related terms such as "under," "beneath," "below," "under," "above," "above," etc., may be used herein to describe the relationship of an element or feature shown in the figures to other elements or features. It should be understood that in addition to the orientations shown in the figures, spatially related terms also include different orientations of the device in use and operation. For example, if the device in the accompanying drawings is flipped, the element or feature described as "under other elements" or "under it" or "under it" will be oriented as "on" the other elements or features. Therefore, the exemplary terms "under" and "under" can include both upper and lower orientations. In addition, the device may also include additional orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptors used herein are interpreted accordingly.

It should be noted that when an element is considered to be "connected" to another element, it can be directly connected to the other element, or connected to the other element through an intermediate element. In addition, the "connection" in the following embodiments should be understood as "electrical connection", "communication connection", etc. if there is transmission of electrical signals or data between the connected objects.

When used herein, the singular forms "a", "an" and "the" may also include plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "include/comprise" or "have" etc. specify the presence of the stated features, wholes, steps, operations, components, parts or combinations thereof, but do not exclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts or combinations thereof. At the same time, the term "and/or" used in this specification includes any and all combinations of the relevant listed items.

As described in the background technology, the test system in the prior art has the problem of low test efficiency. The inventors have found that the reason for this problem is that the existing test machine includes a main control module and at least one test board (instrument). The host sends a test sequence to the main control module, and the main control module forwards the test sequence to the test board. The test board generates an excitation signal based on the received test sequence and sends it to the device under test. The device under test feeds back a response signal to the test board based on the excitation signal. The test board obtains test data based on the response signal and sends it to the main control module, and the main control module forwards the test data to the host. The host processes the test data (such as comparing the data result with the preset value) to obtain the test result.

Among them, the test data obtained by the test board will be forwarded to the host through the main control module, and the host will process the test data. Since the test result of a device under test needs to be obtained based on a number of test data, the amount of test data increases significantly as the number of devices under test increases. Since all test data needs to be forwarded to the host through the main control module before the host can process the test results, a large amount of test data will cause the transmission channel to be congested, and the transmission time of the entire test data is relatively long, which seriously affects the test efficiency. In addition, all test structures need to be processed by the host to obtain test data. A large amount of test data will form a blockage in the host, and the processing time of the entire test data is also relatively long, further reducing the test efficiency.

Based on the above reasons, the present invention provides a test machine, a test system and a test method. By adding a co-processing module in the test machine, the test data obtained by the test board is processed, and the test results are obtained and then sent to the host. In this way, the test results can be obtained in advance at the test machine, which can shorten the feedback path of the test data. The test machine changes from sending test data to the host to sending test results to the host. Since the amount of test result data is much smaller than the test data, the data transmission time between the test machine and the host is greatly reduced, thereby improving the test efficiency. In addition, the test data of multiple test machines are processed inside each test machine, thereby avoiding the test data of multiple test machines being concentrated on the same host for processing, which can reduce the processing time of test data and further improve the test efficiency.

In one embodiment, as shown in FIG1 , a test machine is provided, including a plurality of test boards 10, a main control module 20 and a co-processing module 30. Each test board 10 implements different business functions. The main control module 20 is respectively connected to the plurality of test boards 10 and used to connect to the host 100, receive the test items sent by the host 100, and send each test sequence in the test items to each test board 10. The plurality of test boards 10 are used to connect to at least one device under test 200, send an excitation signal to the device under test 200 according to the received test sequence, receive a response signal fed back by the device under test 200 based on the excitation signal, obtain test data and send it to the co-processing module 30. The co-processing module 30 is respectively connected to a plurality of test boards 10 to process the test data obtained by the test boards 10, obtain the test results and send them to the host 100.

Among them, the test board 10 is a circuit board for testing. In actual application, multiple test boards 10 can be integrated into one, that is, multiple test boards 10 implement circuits for different business functions on the same board. Multiple test boards 10 can also be independent of each other, that is, multiple test boards 10 implement circuits for different business functions on different boards, such as the circuit for implementing one business function is distributed on one board to form a circuit board, and the circuit for implementing another business function is distributed on another board to form another circuit board.

The main control module 20 and the co-processing module 30 may both be processors. In practical applications, the main control module 20 and the co-processing module 30 may be implemented using the same processor or different processors. The number of processors implementing the main control module 20 or the co-processing module 30 may be one or more.

Specifically, the host 100 sends a test item to the main control module 20, and one test item includes multiple test sequences. The main control module 20 sends each test sequence in the test item to the corresponding test board 10. The test board 10 corresponding to the test sequence can be determined based on at least one of the business function that the test sequence needs to implement, whether the test board 10 is occupied, and the sending time of the test sequence. The test board 10 sends an excitation signal to the device under test 200 according to the received test sequence. The device under test 200 feeds back a response signal based on the received excitation signal. The test board 10 obtains test data according to the received response signal and sends it to the co-processing module 30. The co-processing module 30 processes the test data obtained by the test board 10, obtains the test result and sends it to the host 100. In practical applications, the co-processing module 30 can directly send the test result to the host 100, or first send the test result to the main control module 20, and then the main control module 20 sends the test result to the host 100.

Exemplarily, the co-processing module 30 is used to send the test result to the main control module 20, so that the main control module 20 sends the test result to the host 100.

FIG2 is a schematic diagram of information interaction in the test process in the prior art. As shown in FIG2, the test sequence is first sent from the host to the main control module in the test machine, then from the main control module to the test board in the test machine, and finally from the test board to the device under test to start the test. The test data obtained at the end of the test is first sent from the device under test to the test board, then from the test board to the main control module, and finally from the main control module to the host.

FIG3 is a schematic diagram of information interaction during a test process in an embodiment. As shown in FIG3, the test sequence is also first sent from the host to the main control module in the test machine, then sent from the main control module to the test board in the test machine, and finally sent from the test board to the device under test to start the test. Different from the prior art, after the test data obtained at the end of the test is sent from the device under test to the test board, the test board sends the test data to the main control module and the co-processing module in the test machine respectively. The main control module still sends the test data to the host. The co-processing module processes the test data according to the expected data sent by the main control module to obtain the test results, and sends the test results to the main control module and the host respectively.

It can be seen that the present invention advances the processing of test data from the host to the test machine, thereby shortening the feedback path of the test data and reducing the data transmission time. Moreover, by processing the test data by the test machine, the data processing amount of the host can be reduced and the data processing time can be reduced.

The above-mentioned test machine includes multiple test boards, a main control module and a co-processing module, and each test board implements different business functions. The main control module is connected to multiple test boards and is used to connect to the host, receive test items sent by the host, and send each test sequence in the test item to each test board. Multiple test boards are used to connect to at least one device under test, send a stimulus signal to the device under test according to the received test sequence, and receive a response signal based on the stimulus signal feedback from the device under test, obtain test data and send it to the co-processing module. The co-processing module is connected to multiple test boards and is used to process the test data obtained by the test boards, obtain test results and send them to the host. In this way, the test data is processed inside the test machine, which can reduce the data processing volume of the host and the data processing time on the one hand, and shorten the feedback path of the test data and reduce the data transmission time on the other hand. Overall, the test efficiency is improved.

Exemplarily, the test board 10 can adopt a dedicated test board, in which case one test board can complete the measurement of a device under test. The test board 10 can also adopt a universal test board, in which case multiple test boards can complete the measurement of a device under test together, and different test boards can be combined for measurement according to the different devices under test. For example, the multiple test boards include four test boards, namely a first test board, a second test board, a third test board, and a fourth test board. The business functions implemented by the four test boards are different, the first test board is a power board, the second test board is a digital circuit board, the third test board is a signal source board, and the fourth test board is an oscilloscope board.

In one embodiment, the co-processing module 30 is used to obtain expected data from the host 100 and compare the expected data with the test data obtained by the test board 10 to obtain the test result. The expected data is the data for determining whether the test is passed.

Exemplarily, the co-processing module 30 is used to receive expected data sent by the main control module 20, where the expected data is sent by the host 100 to the main control module 20.

Specifically, the host 100 can directly send the expected data to the co-processing module 30, or first send the expected data to the main control module 20, and then the main control module 20 sends the expected data to the co-processing module 30. The expected data is compared with the test data obtained by the test board 10, for example: if the test data obtained by the test board 10 is greater than or equal to the predicted data, the test is determined to have passed; if the test data obtained by the test board 10 is less than the predicted data, the test is determined to have failed. Alternatively, if the test data obtained by the test board 10 is less than or equal to the predicted data, the test is determined to have passed; if the test data obtained by the test board 10 is greater than the predicted data, the test is determined to have failed.

In the above embodiment, the co-processing module can replace the host to process the test data by obtaining expected data from the host, such as comparing the expected data with the test data obtained by the test board to obtain the test results.

In one embodiment, the main control module 20 is used to receive the test configuration sent by the host 100, the test configuration includes the channel number corresponding to each test sequence, the channel to which the channel number belongs is located between the test board 10 and the test station, and each test station is used to set a device under test 200; each test sequence and the channel number corresponding to the test sequence are sent to the test board 10 corresponding to the channel number. The test configuration is used to control the sending of each test sequence in the test item.

Specifically, the host 100 sends the test items and the test configuration to the main control module 20. The main control module 20 obtains the channel number corresponding to each test sequence in the test item from the test configuration. The channel to which the channel number belongs is located between the test board 10 and the test station. The test station is used to set the device under test 200. One channel number can correspond the test sequence to the test board 10 and the device under test 200, thereby controlling the main control module 20 to send the test sequence to the test board 10 corresponding to the channel number, and further controlling the test board 10 to send the stimulus signal generated according to the test sequence to the test station corresponding to the channel number, that is, the device under test 200.

Exemplarily, as shown in FIG. 1 , a load board 210 is provided, and a plurality of test stations are disposed on the load board, and the device under test 200 is disposed on the test station.

In one embodiment, as shown in FIG1 , the test board 10 includes a controller 11 and a functional circuit 12. The controller 11 is connected to the main control module 20 and the functional circuit 12 of the same test board 10, and is used to receive the test sequence sent by the main control module 20 and the channel number corresponding to the test sequence, control the functional circuit 12 to generate an excitation signal according to the received test sequence, and send the excitation signal generated by the functional circuit 12 to the device under test 200 set at the test station corresponding to the channel number.

The controller 11 implements information interaction between the test board 10 and the outside (including between the test boards 10), and the functional circuit 12 implements the business functions of the test board 10. In actual applications, the controller 11 may include a processor and a communication interface.

Specifically, the main control module 20 sends the test sequence and the channel number to the controller 11. The controller 11 controls the functional circuit 12 to generate a corresponding excitation signal according to the test sequence, and sends the excitation signal to the device under test 200 set at the test station corresponding to the channel number.

In the above embodiment, a controller is provided in the main control module to realize information interaction between the test board and the outside.

In one embodiment, the controller 11 is also connected to the co-processing module 30 to receive a response signal of the device under test 200 based on the stimulus signal feedback, obtain test data and send it to the co-processing module 30.

In one embodiment, the test board 10 is used to send the test data to the co-processing module 30 when the test data needs to be processed, so that the co-processing module 30 processes the test data to obtain the test results.

In one embodiment, the test board 10 is also used to send the test data to the main control module 20 when the test data does not need to be processed, so that the main control module 20 sends the test data to the host 100.

Specifically, some of the test data need to be processed, such as compared with expected data, and some do not need to be processed. The controller 11 sends the test data that needs to be processed to the co-processing module 30 for processing, obtains the test results and sends them to the host 100, and sends the test data that does not need to be processed to the main control module 20, and the main control module 20 directly sends the test data to the host 100.

In one embodiment, the test board 10 is used to send test data to the main control module 20 and the co-processing module 30 respectively, so that the main control module 20 sends the test data that does not need to be processed to the host 100, and the co-processing module 30 processes the test data that needs to be processed to obtain the test results.

In one embodiment, as shown in FIG1 , the test machine further includes a data interaction module 40 . The data interaction module 40 is respectively connected to a plurality of test boards 10 and is used to connect to a server 300 , and is used to upload the test data obtained by the test boards 10 to the server 300 .

The data interaction module 40 is a processor. In practical applications, the main control module 20, the co-processing module 30 and the data interaction module 40 can be implemented by the same processor or by different processors. The number of processors implementing the data interaction module 40 can be one or more.

Specifically, the test board 10 sends the test data to the data interaction module 40 in addition to sending the test data to the main control module 20 or the co-processing module 30. The data interaction module 40 uploads the test data to the server 300.

In the above embodiment, by adding a data interaction module, the test data can be uploaded to the server for easy query.

Exemplarily, the data interaction module 40 is also connected to the main control module 20 and the co-processing module 30 respectively, and is used to monitor the main control module 20 and the co-processing module 30.

In the above embodiment, the data interaction module can also monitor the operation status of the main control module and the cooperative processing module in real time.

In one embodiment, as shown in FIG1 , the test machine further includes a clock module 50. The clock module 50 is connected to the main control module 20 and is used to provide a clock signal.

Exemplarily, the clock module 50 is also connected to the test board 10 .

In the above embodiment, a clock module is added to provide a clock signal inside the test machine.

In one embodiment, as shown in FIG1 , the tester further includes a calibration module 60. The calibration module 60 is connected to the clock module 50 and the main control module 20 respectively, and is used to provide a calibration signal.

Exemplarily, the calibration module 60 is also connected to the test board 10.

In the above embodiment, a calibration module is added to calibrate the clock inside the test machine.

In one embodiment, as shown in FIG1 , the test machine further includes a system monitoring module 70. The system monitoring module 70 is respectively connected to a plurality of test boards 10 and is used to connect to a host computer 100, and is used to monitor each test board 10 and provide feedback to the host computer 100.

In the above embodiment, by adding a system monitoring module, the operating status of each test board can be monitored, which is conducive to timely alarm or processing when the test board is abnormal.

Based on the same inventive concept, a test system is also provided. As shown in FIG. 1 , the test system includes a host machine 100 and a test machine 400 provided in any of the above embodiments.

Based on the same invention concept, a testing method is also provided, as shown in FIG. 4 , including the following steps: S401, receiving a test item sent by a host.

Specifically, the test machine includes a main control module, which receives test items sent by the host.

In actual applications, the host receives the working mode confirmation signal input by the user, which includes the software and hardware debugging mode and the mass production mode, and loads the user program on the other hand. The user program includes the test configuration and test items. The host then verifies the hardware settings in the tester and the software configuration in the user program, and confirms the test configuration, such as the number of designated workstations, workstation numbers, external devices, etc. The tester then loads the test configuration and part of the test sequence, waiting for the Start of Test (SOT) signal. After the test is started, the tester starts testing the device under test. In addition, the tester sends an End of Test (EOT) signal to the host, and the host controls the robot to replace the device under test.

S402: Send a stimulus signal to the device under test according to each test sequence in the test item.

Specifically, the test machine also includes multiple test boards. The main control module sends each test sequence in the test item to the corresponding test board. The test board generates an excitation signal according to the received test sequence and sends it to the device under test.

S403, receiving a response signal of the device under test based on the stimulus signal feedback, and obtaining test data.

Specifically, the test board receives a response signal from the device under test based on feedback of a stimulus signal to obtain test data.

S404, process the test data, obtain the test results and send them to the host.

Specifically, the test machine also includes a co-processing module. The test board sends the test data to the co-processing module. The co-processing module processes the test data, obtains the test results and sends them to the host.

In the description of this specification, the description with reference to the terms "some embodiments", "other embodiments", "ideal embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic description of the above terms does not necessarily refer to the same embodiment or example.

The technical features of the above embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

The above-mentioned embodiments only express several implementation methods of the present application, and the description is relatively specific and detailed, but it should not be understood as limiting the scope of the invention patent. It should be pointed out that for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present application, and these are all within the scope of protection of the present application. Therefore, the scope of protection of the patent of the present application shall be based on the attached claims.

10: Test board 11: Controller 12: Functional circuit 20: Main control module 30: Co-processing module 40: Data interaction module 50: Clock module 60: Calibration module 70: System monitoring module 100: Host 200: Device under test 210: Carrier board 300: Server 400: Test machine

In order to more clearly illustrate the technical solutions in the embodiments of the present application or the traditional technology, the drawings required for use in the embodiments or the traditional technology descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technical personnel in this field, other drawings can be obtained based on these drawings without creative labor.

Figure 1: A schematic diagram of the structure of a test machine in an embodiment. Figure 2: A schematic diagram of information interaction during the test process in the prior art. Figure 3: A schematic diagram of information interaction during the test process in an embodiment. Figure 4: A schematic diagram of the process of a test method in an embodiment.

10: Test board

11: Controller

12: Functional circuit

20: Main control module

30: Co-processing module

40: Data interaction module

50: Clock module

60: Calibration module

70: System monitoring module

100:Host

200: Device under test

210: Carrier plate

300: Server

400: Testing machine

Claims (13)

A test machine, characterized in that the test machine includes multiple test boards, a main control module and a co-processing module; The main control module is respectively connected to the multiple test boards and used to connect to a host, receive test items sent by the host, and send each test sequence in the test items to each of the test boards; The multiple test boards are used to connect to at least one device under test, send an excitation signal to the device under test according to the received test sequence, and receive a response signal fed back by the device under test based on the excitation signal, obtain test data and send it to the co-processing module; The co-processing module is respectively connected to the multiple test boards, used to process the test data obtained by the test boards, obtain test results and send them to the host. The test machine according to claim 1 is characterized in that the co-processing module is used to obtain expected data from the host computer and compare the expected data with the test data obtained by the test board to obtain the test result. The test machine according to claim 2 is characterized in that the co-processing module is used to receive the expected data sent by the main control module, and the expected data is sent by the host to the main control module. The test machine according to claim 1 is characterized in that the co-processing module is used to send the test result to the main control module, so that the main control module sends the test result to the host. The test machine according to claim 1 is characterized in that the main control module is used to receive the test configuration sent by the host, the test configuration includes channel labels corresponding to each of the test sequences, the channels to which the channel labels belong are located between the test board and the test station, and each of the test stations is used to set up a device under test; each of the test sequences and the channel labels corresponding to the test sequences are sent to the test board corresponding to the channel labels. The test machine described in claim 5 is characterized in that the test board includes a controller and a functional circuit; the controller is respectively connected to the main control module and the functional circuit of the same test board, and is used to receive the test sequence sent by the main control module and the channel number corresponding to the test sequence, control the functional circuit to generate an excitation signal according to the received test sequence, and send the excitation signal generated by the functional circuit to the device under test set at the test station corresponding to the channel number. The test machine according to claim 6 is characterized in that the controller is also connected to the co-processing module to receive a response signal of the device under test based on the feedback of the stimulus signal, obtain test data and send it to the co-processing module. The test machine according to any one of claim 1 to claim 7 is characterized in that the test board is used to, when the test data needs to be processed, send the test data to the co-processing module so that the co-processing module processes the test data to obtain a test result; when the test data does not need to be processed, send the test data to the main control module so that the main control module sends the test data to the host; or, send the test data to the co-processing module and the main control module respectively, so that the co-processing module processes the test data that needs to be processed to obtain a test result, and the main control module sends the test data that does not need to be processed to the host. The test machine according to any one of claim 1 to claim 7 is characterized in that the test machine further includes: a data interaction module, which is respectively connected to the multiple test boards and used to connect to the server, and is used to upload the test data obtained by the test boards to the server. The test machine according to any one of claim 1 to claim 7 is characterized in that the test machine also includes: a clock module connected to the main control module and used to provide a clock signal; a calibration module respectively connected to the clock module and the main control module and used to provide a calibration signal. The test machine according to any one of claim 1 to claim 7 is characterized in that the test machine further includes: a system monitoring module, which is respectively connected to the multiple test boards and used to connect to the host, and is used to monitor each of the test boards and feed back to the host. A test system, characterized in that the test system includes a host computer and a test machine as described in any one of claim 1 to claim 11. A test method, characterized in that the method includes: receiving a test item sent by a host; sending a stimulus signal to a device under test according to each test sequence in the test item; receiving a response signal fed back by the device under test based on the stimulus signal to obtain test data; processing the test data to obtain a test result and sending it to the host.