TW202415437A - Washing device for removing ammonia gas and organic matter - Google Patents

Abstract

The present invention relates to a washing device for removing ammonia gas and organic matter. A first filter device and a second filter device in the washing device are used to sequentially perform a cyclic acid washing mode (maintaining the pH value under 5) and a flushing water washing mode to simultaneously remove ammonia gas and organic matters having high concentrations in waste gas generated by wafer cleaning.

Description

Scrubbing device for removing ammonia and organic matter

The present invention relates to a cleaning device, in particular to a cleaning device for removing ammonia and organic matter in a wafer cleaning process.

In the ultra-large integrated circuit (ULSI) process, wafer cleaning technology and its cleanliness are often one of the important factors affecting the yield, component quality and reliability of the wafer process. Therefore, the wafer needs to be cleaned in the relevant process to meet the cleanliness requirements.

Wafer cleaning involves soaking a whole batch or a single wafer in chemicals or using pure water to clean the wafer surface, mainly to remove contaminants such as microparticles, organic pollutants, inorganic substances, metal ions and other impurities.

Currently, the industry is more likely to use wet cleaning methods, and the most accepted one is the RCA Clean method, which was developed by RCA in the 1960s. The cleaning principle is to use different chemical formulas for cleaning, such as Standard Cleaning Solution 1 (SC-1) and Standard Cleaning Solution 2 (SC-2).

When using chemical formulas such as SC-1 (APM), SC-2 (HPM), SPM, DHF and BHF for cleaning, a large amount of acid gas, alkaline gas and volatile organic matter are often discharged as mixed waste gas. Currently, the removal efficiency of volatile organic matter has not been able to achieve a good effect.

Volatile organic compounds (VOCs) are a general term for air pollutants that are organic compounds with a boiling point below 250°C under atmospheric pressure. The environmental pollution problems they cause are widely present in all types of industries.

The most common volatile organic compounds in industry are acetone (Acetone), isopropyl acetone (IPA), propylene glycol monomethyl ether (PGME), propylene glycol monomethyl ether acetate (PGMEA), dimethyl sulfoxide (DMSO), ethanolamine (MEA), nitrogen-methyl 2-tetrahydropyrrolidone (NMP), diethylene glycol monobutyl ether (BDG), tetramethylammonium hydroxide (TMAH) and other components.

In order to solve the problem of mixed exhaust gas, a wet scrubber is usually used to treat pollutants (acids, alkalis, and organic substances) in the exhaust gas. However, the removal efficiency of organic gases has not been able to achieve good results, especially in single-wafer cleaning machines. The removal efficiency of organic process exhaust gas (mainly isopropyl alcohol) has not been good.

The current wet scrubber cleaning method not only has a low efficiency in removing organic process waste gas, but also cannot remove highly concentrated corrosive process waste gas simultaneously with the organic process waste gas.

Therefore, in addition to improving and increasing the removal efficiency of wet scrubbers for organic substances such as isopropyl alcohol (IPA), a wet scrubber is also manufactured that can simultaneously remove high-concentration corrosive process exhaust gas while removing organic substances such as isopropyl alcohol (IPA). The high-concentration corrosive process exhaust gas and organic pollutants have high removal efficiency, which is a problem that technicians in this field want to solve.

The main purpose of the present invention is to provide a washing device for removing ammonia and organic matter, by setting a circulating acid washing mode (its pH value is maintained below 5) of the first filter device and a flushing water washing mode of the second filter device, to simultaneously remove high-concentration ammonia and organic matter in the waste gas.

In order to achieve the above-mentioned purpose, the present invention discloses a washing device for removing ammonia and organic matter, which is arranged in a cavity, and an air inlet and an air outlet are respectively arranged on both sides of the cavity, and its structure includes: a first filter device, which is arranged in the cavity and located on one side of the air inlet, and the first filter device includes; and a pickling chamber, and a first filter air inlet and a first filter air outlet are respectively arranged on both sides of the pickling chamber, and the air inlet is connected to the first filter air inlet through an air inlet connecting channel; a first filter element, which is arranged on the inner side of the pickling chamber and located above the first filter air inlet; a first spray device, which is arranged inside the pickling chamber and above the first filter element, and comprises at least one first spray head and a first pipeline, one end of the first pipeline is connected to the at least one first spray head, and the other end passes through the pickling chamber and is connected to a liquid switching valve; and a circulation pipeline, which is located below the pickling chamber and passes through the pickling chamber, and one end of the circulation pipeline is connected to the liquid switching valve, and the circulation pipeline is used to transport a first liquid through the liquid switching valve into the first pipeline, so that the first spray device sprays the first liquid on the first filter element, and the first liquid is an acidic liquid; a second filter device, which is arranged in the cavity and located on one side of the air outlet, the second filter device comprises: a water washing chamber, a second filter air inlet and a second filter air outlet are respectively arranged on both sides of the water washing chamber, the first filter air outlet is connected to the second filter air inlet through a gas connecting channel, and the second filter air outlet is connected to the air outlet; a second filter element, It is arranged on the inner side of the water washing chamber and located above the second filter air inlet; and a second spraying device is arranged on the inner side of the water washing chamber and located above the second filter element, the second spraying device includes at least one second nozzle and a second pipeline, one end of the second pipeline is connected to the at least one second nozzle, and the other end passes through the water washing chamber and is connected to a water washing liquid supply device.

The present invention provides an embodiment, wherein when a waste gas enters the pickling chamber, the waste gas contains ammonia and an organic substance, the concentration of the ammonia is greater than 800 ppm and the concentration of the organic substance is greater than 1000 ppm, the waste gas passes through the first filter element to remove the ammonia, and is discharged from the pickling chamber through the first filter outlet, and then enters the water washing chamber through the gas connection channel, and passes through the second filter element to remove the organic substance, and then the waste gas The first liquid is discharged from the water washing chamber through the second filter outlet, and the first liquid enters the acid washing chamber through the first pipeline, and after being sprayed on the waste gas passing through the first filter element by the at least one first nozzle, the first liquid is discharged from the acid washing chamber and flows into the circulation pipeline, and the second liquid enters the water washing chamber through the second pipeline, and after being sprayed on the waste gas passing through the second filter element by the at least one second nozzle, the second liquid is discharged from the water washing chamber.

The present invention provides an embodiment, the content of which is that the first filtering device further includes a monitoring module (a first transmission element), an acid-base detector, an acid discharge control device (a second transmission element, a timing element) and a pickling liquid supply device (a third transmission element).

The present invention provides an embodiment, the content of which is that when the acid-base detector detects that the acid-base value of the first liquid is greater than 5, the acid-base detector notifies the monitoring module, the monitoring module transmits an exclusion message to the acid discharge control device and discharges the first liquid in the pickling chamber, and the acid discharge control device transmits a replenishment message to the pickling liquid supply device, the pickling liquid supply device replenishes the first liquid to a liquid supply pipeline, one end of the liquid supply pipeline is connected to the liquid switching valve, and the other end is connected to the pickling liquid supply device.

The present invention provides an embodiment, the content of which is that when the timing element reaches a predetermined time value, the acid discharge control device automatically discharges the first liquid in the pickling chamber, and the acid discharge control device transmits the replenishment message to the pickling liquid supply device, and the pickling liquid supply device replenishes the first liquid to the liquid supply pipeline.

The present invention provides an embodiment, wherein the second filtering device further comprises a drainage device disposed below the washing chamber, and the drainage device is used to discharge the second liquid.

The present invention provides an embodiment, the content of which is that the first filter includes a first shell, at least one first porous element and at least one first ion adsorption element, the at least one first porous element (a first catalyst material is arranged on the top) and the at least one first ion adsorption element are stacked in sequence in the first shell, and the at least one first porous element is located on one side of the first filter air inlet, and the at least one first ion adsorption element is located on one side of the first filter air outlet.

The present invention provides an embodiment, the content of which is that the second filter element includes a second shell, at least one second porous element and at least one second ion adsorption element, the at least one second porous element (with a second catalyst material arranged on the top) and the at least one second ion adsorption element are stacked in sequence in the second shell, and the at least one second porous element is located on one side of the second filter air inlet, and the at least one second ion adsorption element is located on one side of the second filter air outlet.

In order to enable you to have a deeper understanding and knowledge of the features and effects of the present invention, we would like to provide practical examples and accompanying explanations as follows:

In view of the problem that it is impossible to remove high-concentration corrosive process exhaust gas simultaneously with the removal of organic pollutants (the removal efficiency is not high), the present invention proposes a cleaning device for removing ammonia and organic matter to solve the problem caused by the prior art.

The following will further describe the characteristics, structure and method of the cleaning device for removing ammonia and organic matter of the present invention:

First, please refer to FIG. 1A, which is a schematic diagram of the structure of an embodiment of the present invention. As shown in FIG. 1A, the cleaning device 1 for removing ammonia and organic matter of the present invention is arranged in a chamber 10, and the chamber 10 is provided with an air inlet 12 and an air outlet 14 on both sides thereof, and the structure thereof includes a first filter device 20 and a second filter device 30.

The first filter device 20 of this embodiment is disposed in the chamber 10 and located on one side of the air inlet 12, and its structure includes: a pickling chamber 21, a first filter element 22, a first spray device 23 and a circulation pipeline 24. A first filter air inlet 211 and a first filter air outlet 212 are disposed on both sides of the pickling chamber 21, respectively, and the air inlet 12 is connected to the first filter air inlet 211 through an air inlet connection channel 121.

The first filter element 22 of the present embodiment is disposed inside the pickling chamber 21 and above the first filter air inlet 211 , wherein the first filter element 22 includes a first shell 221 , at least one first porous element 222 and at least one first ion adsorption element 223 .

The at least one first porous element 222 and the at least one first ion adsorption element 223 are stacked in sequence in the first shell 221, and the at least one first porous element 221 is located on one side of the first filter air inlet 211, and the at least one first ion adsorption element 223 (which is a flat plate structure made of plastic, glass fiber, metal plate or ceramic filling material in a single or composite material to form a plate-like corrugated shape so that a gas channel is formed between the plates) is located on one side of the first filter air outlet 212.

A first catalyst material 2221 (such as titanium dioxide, silicon oxide, aluminum oxide or platinum, but not limited thereto) is disposed on the upper surface of the at least one first porous element 222 (such as stainless steel, titanium, platinum or aluminum, but not limited thereto).

Furthermore, the first spray device 23 of the present embodiment is arranged on the inner side of the pickling chamber 21 and is located above the first filter element 22. The first spray device 23 includes at least one first nozzle 231 and a first pipeline 232. The first pipeline 232 is connected to the at least one first nozzle 231 at one end, and the other end passes through the pickling chamber 21 and is connected to a liquid switching valve 233 (a ball valve or a ball valve structure, including a two-way valve, a three-way valve, a four-way valve, etc. In this embodiment, a three-way ball valve is used for illustration, but it is not limited to this).

The at least one first nozzle 231 sprays a first liquid W1 (an acidic liquid, sulfuric acid is used in this embodiment, but not limited to this, and the pH value of the first liquid W1 is adjusted with water according to the concentration of ammonia N and maintained below pH 5) onto the first filter element 22, so that the first filter element 22 is acidic (maintained below pH 5).

Furthermore, the circulation pipeline 24 of the first filter device 20 is located below the pickling chamber 21 and penetrates the pickling chamber 21, and one end of the circulation pipeline 24 is connected to the liquid switching valve 233. The circulation pipeline 24 is used to transport the first liquid W1 through the liquid switching valve 233 to re-enter the first pipeline 232, so that the first spraying device 23 sprays the first liquid W1 on the first filter element 33, and then enters the circulation pipeline 24 for circulation.

The second filter device 30 of this embodiment is disposed in the chamber 10 and located on one side of the air outlet 14. The second filter device 30 includes: a water washing chamber 31, a second filter element 32 and a second spray device 33. A second filter air inlet 311 and a second filter air outlet 312 are disposed on both sides of the water washing chamber 31. The first filter air outlet 311 is connected to the second filter air inlet 311 via a gas connection channel 122, and the second filter air outlet 312 is connected to the air outlet 14.

The second filter element 32 is disposed inside the water washing chamber 31 and above the second filter air inlet 311 , wherein the second filter element 32 includes a second shell 321 , at least one second porous element 322 and at least one second ion adsorption element 323 .

The at least one second porous element 322 and the at least one second ion adsorption element 323 are stacked in sequence in the second shell 321, and the at least one second porous element 322 is located on one side of the second filter air inlet 311, and the at least one second ion adsorption element 323 (which is a flat plate structure made of plastic, glass fiber, metal plate or ceramic filling material in a single or composite material to form a plate-like corrugated shape so that a gas channel is formed between the plates) is located on one side of the second filter air outlet 312.

A second catalyst material 3221 (titanium dioxide, silicon oxide, aluminum oxide or platinum, but not limited thereto) is disposed on the upper surface of the at least one second porous element 322 (the material of which is stainless steel, titanium, platinum or aluminum, but not limited thereto).

Furthermore, the second spray device 33 of the present embodiment is arranged on the inner side of the water washing chamber 31 and is located above the second filter element 32. The second spray device 33 includes at least one second nozzle 331 and a second pipe 332. One end of the second pipe 332 is connected to the at least one second nozzle 331, and the other end passes through the water washing chamber 31 and is connected to a water washing liquid supply device 34.

The at least one second nozzle 331 sprays a second liquid W2 (water in this embodiment, but not limited thereto) onto the second filter element 32 to make the second filter element 32 in a wet state.

Please further refer to FIG. 1B, which is a schematic diagram of the structure and operation of an embodiment of the present invention. First, a waste gas A generated by the wafer cleaning process (the waste gas A includes the ammonia N and an organic VOC, the concentration of the ammonia N is greater than 800ppm and the concentration of the organic VOC is greater than 1000ppm) enters the pickling chamber 21 located in the first filter device 20 (following the large arrow in FIG. 1B), and passes through the first filter 22, and then passes through the acid cleaning chamber 21. The first liquid W1 of the first filter element 22 (produced by the at least one first nozzle 23) removes the high-concentration ammonia N adsorbed in the waste gas A (at this time, the first filter element 22 is acidic due to the first liquid W1), and the waste gas A that has filtered out the ammonia N is continuously discharged from the pickling chamber 21 through the first filter outlet 211 and enters the second filter device 30.

Subsequently, the waste gas A from which the ammonia N is filtered out enters the water washing chamber 31 of the second filter device 30 through the gas connection channel 122, and after passing through the second liquid W2 (sprayed by the at least one second nozzle 22) of the second filter element 32 to remove the adsorbed organic VOC (at this time, the second filter element 32 is in a wet state due to the second liquid W2), the waste gas A (from which the high-concentration ammonia N and the organic VOC have been removed) is discharged from the water washing chamber 31 through the second filter outlet 312, and then discharged from the washing device 10.

Furthermore, the first liquid W1 of the present embodiment first enters the liquid switching valve 233 through a pickling liquid supply device 28 through a liquid supply pipeline 282, then enters the pickling chamber 21 through the first pipeline 232, and is sprayed on the first filter element 22 (in an acidic state) through the at least one first nozzle 23, and after adsorbing and removing the ammonia N in the waste gas A, the first liquid W1 will be discharged from the pickling chamber 21 and flow into the circulation pipeline 24, and then continue to be converted to the first pipeline 232 through the liquid switching valve 233 to enter the pickling chamber 21, thereby achieving an acidic circulation mode.

However, the second liquid W2 of the present embodiment first enters the water washing chamber 31 through the water washing liquid supply device 34 through the second pipe 332, and is sprayed on the second filter 32 (in a wet state) through the at least one second nozzle 331, and after adsorbing and removing the organic VOC in the waste gas A, the second liquid W2 is discharged from the water washing chamber 31 through a drainage device 35 (which is arranged below the water washing chamber 31 to discharge the second liquid W2) and no longer circulates.

In addition, please refer to FIG. 2, which is an enlarged schematic diagram of the structure of the ion adsorption element of the present invention. As shown in FIG. 2, the second filter element 32 is used as an example in this embodiment (the structural configuration and operation mode of the first filter element 22 of the present invention are also the same as the second filter element 32, so they are not described here in detail). A plurality of gas channels are formed between the at least one second ion adsorption element 323, and these gas channels (having a distance P between each other, and the distance P is between 3 mm and 30 mm) are arranged obliquely and continuously turn to the left or right. In this way, the waste gas A that has been dissolved and then dissipated again can be re-collected, which can effectively improve the removal rate of pollutants and reduce the probability of secondary dissipation. Furthermore, the setting of the spacing P can also prevent the problem of excessive gas pressure loss from occurring.

Furthermore, as shown in FIG. 2 , in this embodiment, the at least one second ion adsorption element 323 is designed to be in the form of the gas channels, so that the second liquid W2 can flow downward along the surface of the at least one second ion adsorption element 323 from top to bottom, in the opposite direction of the waste gas A, and the angles can conflict with each other, so that the pollutants in the waste gas A can be more easily adsorbed by the second liquid W2, and it can be ensured that the organic pollutants dissolved in the second liquid W2 are not easily released into the air again, so as to achieve a high-efficiency removal effect.

Furthermore, the gas channels and the at least one second porous element 322 form an angle θ, and the angle θ is between 30° and 90°, so that the waste gas A can more easily directly impact and absorb the second liquid W2 when passing through the gas channels, thereby being absorbed by the second liquid W2.

Furthermore, in order to maintain the removal rate, please further refer to FIG. 3A , which is a schematic diagram of signal transmission of the acid-base monitoring mode of the present invention. As shown in FIG. 3A , the first filter device 20 of the washing device 1 for removing ammonia and organic matter of the present invention further comprises a monitoring module 25 (a pH value controller, such as a microcomputer pH analyzer, for monitoring pH value), an acid-base detector 26 (an industrial pH three-in-one electrode pH meter, for measuring the pH value when the first liquid W1 is added), an acid discharge control device 27 (a pneumatic valve that can control the switch and control the amount of the first liquid W1 by the switch time of the pneumatic valve (such as a timing element 271)) and the pickling liquid supply device 28 (a pump is used to supply the first liquid W1 into the first filter device 20 of the washing device 1).

The monitoring module 25 and the acid-base detector 26 are both arranged on the inner side of the pickling chamber 21 and located below the first filter 22. The monitoring module 25 further includes: a first transmission element 251 (which is arranged in the monitoring module 25), and the acid-base detector 26 is electrically connected to the monitoring module 25 and used to detect the acid-base value of the first liquid W1 passing through the first filter 22.

The acid discharge control device 27 (comprising a timing element 271 and a second transmission element 272) is disposed outside the pickling chamber 21 and is electrically connected to the monitoring module 25. The pickling liquid supply device 28 (disposed outside the washing device 1 and comprising a third transmission element 281) is electrically connected to the acid discharge control device 27.

Acid-base monitoring mode: When the acid-base detector 26 detects that the acid-base value of the first liquid W1 is greater than 5, the acid-base detector 26 will send a warning message to notify the monitoring module 25, and the monitoring module 25 will send an exhaust message S1 to the acid exhaust control device 27. When the acid exhaust control device 27 exhausts the first liquid W1 in the pickling chamber 21, the acid exhaust control device 27 will send a supplementary message S2 to the The pickling liquid supply device 28 replenishes the first liquid W1 to the liquid supply pipeline 282 (one end of which is connected to the liquid switching valve 233 and the other end of which is connected to the pickling liquid supply device 28), and provides the first liquid W1 to the first pipeline 232 through the liquid switching valve 233, so as to maintain the pH value of the first liquid W1 inside the first filtering device 20 to be less than 5.

Through the above mode, the amount of the first liquid W1 added can be controlled by the acid-base detector 26 to maintain the pH value in the pickling chamber 21, and the amount of the first liquid W1 added can also be directly adjusted for different concentrations of the ammonia gas N.

In addition to the acid-base monitoring mode, the acid cycle mode is also time-monitored. Please refer to Figure 3B for a schematic diagram of signal transmission in the timing monitoring mode of the present invention. As shown in FIG. 3B , in the timing monitoring mode, when the timing element 271 reaches a predetermined time value (preferably 4-8 hours in the present embodiment, which can be adjusted according to the needs of the user), the acid discharge control device 27 will automatically discharge the first liquid W1 from the pickling chamber 21, and the acid discharge control device 27 transmits the replenishment message S2 to the pickling liquid supply device 28, and the pickling liquid supply device 28 replenishes the first liquid W1 to the liquid supply pipeline 282, and provides the first liquid W1 to the first pipeline 232 through the liquid switching valve 233, so as to maintain the acid-base value of the first liquid W1 inside the first filtering device 20.

Next, please refer to the following table, which is the experimental results table of this embodiment. Table, Experimental Results Table

According to Article 4 of the "Air Pollution Control and Emission Standards for Semiconductor Manufacturing Industry" published by the Environmental Protection Administration of the Executive Yuan, "Air pollutants generated by the semiconductor manufacturing industry shall be introduced into pollution control equipment through a closed exhaust system and treated to meet the requirements of the following table before they can be discharged." The table mentions the emission standards for volatile organic compounds: the emission reduction rate shall be greater than 90% or the total factory emission shall be less than 0.6 kg/hr (based on methane).

However, as can be seen from the table above, the control group used water for flushing mode, and did not use acidic liquid, nor did it circulate acidic liquid. The result shows that IPA (isopropyl alcohol for organic matter) needs to increase its water supply (LPM, liters/minute) (from 10 LPM to 16 LPM) to achieve a removal rate of more than 90%, which will waste its water resources.

Compared with the experimental group of this embodiment (in addition to water flushing, an acidic liquid is used for circulation mode, and its pH value is 2.8 and 2.9 respectively), this embodiment only needs to use 10 LPM to achieve an IPA (isopropyl alcohol) removal rate of more than 90%. Continuing, according to Appendix 2 of the "Stationary Pollution Source Hazardous Air Pollutant Emission Standards" announced by the Environmental Protection Administration of the Executive Yuan, the allowable concentration of ammonia is less than 50ppm. However, it can be seen from the above table that the control group uses water for flushing mode. No matter how the water supply is increased, the NH3 (ammonia) removal rate cannot reach more than 95% (never less than 50ppm), indicating that the control group not only wastes water resources, but also cannot increase the NH3 (ammonia) removal rate to more than 95%. Compared with the experimental group of this embodiment (in addition to water flushing, an acidic liquid is used for circulation mode, and its pH value is 2.8 and 2.9 respectively), this embodiment uses an acidic circulation mode, so only 10 LPM is needed to achieve an NH3 (ammonia) removal rate of more than 99% (NH3 (ammonia) concentration is less than 50ppm). From the above experiments, it can be seen that the present invention combines the acidic circulation mode with the water flushing mode of the washing device, which not only reduces the water consumption, but also can achieve an IPA (isopropyl alcohol) removal rate of more than 90%, and can also simultaneously achieve an NH3 (ammonia) removal rate of more than 99%.

Therefore, this invention is novel, progressive and can be used in the industry. It should undoubtedly meet the patent application requirements of the Patent Law of our country. Therefore, we have filed an invention patent application in accordance with the law and pray that the Bureau will approve the patent as soon as possible. I am deeply grateful.

However, the above is only a preferred embodiment of the present invention and is not intended to limit the scope of implementation of the present invention. All equivalent changes and modifications made according to the shape, structure, features and spirit described in the patent application scope of the present invention should be included in the patent application scope of the present invention.

1: Washing device 10: Chamber 12: Air inlet 121: Air inlet channel 122: Gas channel 14: Air outlet 20: First filter device 21: Pickling chamber 211: First filter air inlet 212: First filter air outlet 22: First filter element 221: First shell 222: First porous element 2221: First catalyst material 223: First ion adsorption element 23: First spray device 231: First nozzle 232: First pipeline 233: Liquid switching valve 24: Circulation pipeline 25: Monitoring module 251: First transmission element 26: Acid and alkali detector 27: Acid discharge control device 271: Timing element 272: Second transmission element 28: Pickling liquid supply device 281: Third transmission element 282: Liquid supply pipeline 30: Second filter device 31: Water washing chamber 311: Second filter air inlet 312: Second filter air outlet 32: Second filter element 321: Second shell 322: Second porous element 3221: Second catalyst material 323: Second ion adsorption element 33: Second spray device 331: Second nozzle 332: Second pipeline 34: Water washing liquid supply device 35: Drainage device A: Waste gas N: Ammonia P: Pitch S1: Exclusion message S2: Supplementary message VOC: Organic matter W1: First liquid W2: Second liquid θ: Angle

FIG. 1A is a schematic structural diagram of an embodiment of the present invention;

FIG. 1B is a schematic diagram of the structure and operation of an embodiment of the present invention;

FIG. 2 is an enlarged schematic diagram of the structure of the ion adsorption element of the present invention;

FIG. 3A is a schematic diagram of signal transmission in the acid-base monitoring mode of the present invention; and

Figure 3B is a schematic diagram of signal transmission in the timing monitoring mode of the present invention.

1: Washing device

10: Cavity

12: Air intake

121: Intake channel

122: Gas connection channel

14: Air outlet

20: First filter device

21: Pickling chamber

211: First filter air inlet

212: First filter outlet

22: First filter element

221: First shell

222: First porous element

2221: First catalyst material

223: First ion adsorption element

23: First spray device

231: First nozzle

232: First pipeline

233: Liquid switching valve

24: Circulation pipeline

25: Monitoring module

26: Acid and base detector

27: Acid discharge control device

271: Timing components

28: Pickling liquid supply device

282: Liquid supply pipeline

30: Second filter device

31: Water washing chamber

311: Second filter air inlet

312: Second filter outlet

32: Second filter element

321: Second shell

322: Second porous element

3221: Second catalyst material

323: Second ion adsorption element

33: Second spray device

331: Second nozzle

332: Second pipeline

34: Washing liquid supply device

35: Drainage device

W1: First liquid

W2: Second liquid

Claims (10)

A washing device for removing ammonia and organic matter is arranged in a cavity, and an air inlet and an air outlet are respectively arranged on both sides of the cavity, and its structure includes: A first filter device, which is arranged in the cavity and located on one side of the air inlet, and the first filter device includes; and A pickling chamber, a first filter air inlet and a first filter air outlet are respectively arranged on both sides of the pickling chamber, and the air inlet is connected to the first filter air inlet through an air inlet connecting channel; A first filter element, which is arranged on the inner side of the pickling chamber and located above the first filter air inlet; A first spray device, which is arranged inside the pickling chamber and above the first filter element, comprises at least one first spray head and a first pipeline, one end of the first pipeline is connected to the at least one first spray head, and the other end passes through the pickling chamber and is connected to a liquid switching valve; and A circulation pipeline, which is located below the pickling chamber and passes through the pickling chamber, one end of which is connected to the liquid switching valve, and the circulation pipeline is used to transport a first liquid through the liquid switching valve into the first pipeline, so that the first spray device sprays the first liquid on the first filter element, and the first liquid is an acidic liquid; A second filter device is arranged in the cavity and located on one side of the air outlet, and the second filter device includes; A water washing chamber, a second filter air inlet and a second filter air outlet are arranged on both sides of the water washing chamber, the first filter air outlet is connected to the second filter air inlet through a gas connecting channel, and the second filter air outlet is connected to the air outlet; A second filter element is arranged on the inner side of the water washing chamber and located above the second filter air inlet; and A second spray device, which is arranged inside the water washing chamber and above the second filter element, and includes at least one second spray head and a second pipeline, one end of the second pipeline is connected to the at least one second spray head, and the other end passes through the water washing chamber and is connected to a water washing liquid supply device; A waste gas enters the pickling chamber, the waste gas includes ammonia and an organic substance. After the waste gas passes through the first filter, the ammonia is removed and the waste gas is discharged from the pickling chamber through the first filter outlet. Then, the waste gas enters the water washing chamber through the gas connection channel and passes through the second filter to remove the organic substance. Then, the waste gas is discharged from the water washing chamber through the second filter outlet. The first liquid enters the acid cleaning chamber through the first pipeline, and after being sprayed on the waste gas passing through the first filter element by the at least one first nozzle, the first liquid is discharged from the acid cleaning chamber and flows into the circulation pipeline, and the second liquid enters the water cleaning chamber through the second pipeline, and after being sprayed on the waste gas passing through the second filter element by the at least one second nozzle, the second liquid is discharged from the water cleaning chamber. A washing device for removing ammonia and organic matter as described in claim 1, wherein the first filter device further comprises a monitoring module and an acid-base detector, which are arranged on the inner side of the pickling chamber and below the first filter element. The monitoring module comprises: a first transmission element, which is arranged in the monitoring module; the acid-base detector is electrically connected to the monitoring module, arranged on the inner side of the pickling chamber, and used to detect the acid-base value of the first liquid passing through the first filter element. The washing device for removing ammonia and organic matter as described in claim 2, wherein the first filtering device further comprises: an acid discharge control device, which is arranged outside the pickling chamber, is electrically connected to the monitoring module, and comprises a second transmission element and a timing element; and an acid pickling liquid supply device, which is electrically connected to the acid discharge control device and comprises a third transmission element; When the acid-base detector detects that the acid-base value of the first liquid is greater than 5, the acid-base detector notifies the monitoring module, and the monitoring module transmits an exhaust message to the acid exhaust control device and exhausts the first liquid in the pickling chamber, and the acid exhaust control device transmits a replenishment message to the pickling liquid supply device, and the pickling liquid supply device replenishes the first liquid to a liquid supply pipeline, one end of the liquid supply pipeline is connected to the liquid switching valve, and the other end is connected to the pickling liquid supply device. A washing device for removing ammonia and organic matter as described in claim 3, wherein when the timing element reaches a predetermined time value, the acid discharge control device automatically discharges the first liquid from the pickling chamber, and the acid discharge control device transmits the replenishment message to the pickling liquid supply device, and the pickling liquid supply device replenishes the first liquid to the liquid supply pipeline. The washing device for removing ammonia and organic matter as described in claim 2, wherein the second filtering device further comprises: a drainage device, which is arranged below the water washing chamber, and the drainage device is used to discharge the second liquid. A washing device for removing ammonia and organic matter as described in claim 1, wherein the first filter element comprises a first shell, at least one first porous element and at least one first ion adsorption element, the at least one first porous element and the at least one first ion adsorption element are stacked in sequence in the first shell, and the at least one first porous element is located on one side of the first filter air inlet, and the at least one first ion adsorption element is located on one side of the first filter air outlet. A washing device for removing ammonia and organic matter as described in claim 6, wherein a first catalyst material is disposed on the at least one first porous element. A washing device for removing ammonia and organic matter as described in claim 1, wherein the second filter element comprises a second shell, at least one second porous element and at least one second ion adsorption element, the at least one second porous element and the at least one second ion adsorption element are stacked in sequence in the second shell, and the at least one second porous element is located on one side of the second filter air inlet, and the at least one second ion adsorption element is located on one side of the second filter air outlet. A washing device for removing ammonia and organic matter as described in claim 8, wherein a second catalyst material is disposed on the at least one second porous element. A washing device for removing ammonia and organic matter as described in claim 7 or 9, wherein the material of the at least one first porous element and the at least one second porous element is stainless steel, titanium, platinum or aluminum, and further, the first catalyst material and the second catalyst material are titanium dioxide, silicon oxide, aluminum oxide or platinum.

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