TW202405374A - Measurement system - Google Patents
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Abstract
Description
本發明是有關於一種測量系統,且特別是有關於一種測量物體輪廓之測量系統。The present invention relates to a measurement system, and in particular to a measurement system for measuring the contour of an object.
一般非接觸式的輪廓量測是採用雷射光源掃描方法,藉由將雷射光束投射於被測物體的表面以形成剖線,再藉由光學感測器來感知剖線的資訊,並透過分析來求得被測物體的表面之高度資訊,也就是輪廓資訊。為了能確定輪廓的尺寸,需要從光學感測器平面中的點到投射到被測物體的光平面中的點的映射,以便使光學感測器平面中的座標可以被變換到真實世界的座標。獲得這種映射的過程一般被稱為校準。由於未知的映射的標度、未知的光平面相對於光學感測器的投影畸變和未知的光學裝置的畸變,因此這種校準一般借助參考物體的測量而被確定。Generally, non-contact contour measurement uses a laser light source scanning method to form a profile by projecting a laser beam on the surface of the object to be measured, and then uses an optical sensor to sense the profile information and pass it through. Analysis to obtain the height information of the surface of the object being measured, that is, the contour information. In order to be able to determine the dimensions of the contour, a mapping is required from points in the plane of the optical sensor to points in the plane of light projected onto the object being measured, so that the coordinates in the plane of the optical sensor can be transformed into real-world coordinates . The process of obtaining this mapping is generally called calibration. This calibration is generally determined by means of measurements of a reference object due to the unknown scale of the mapping, the unknown projection distortion of the light plane relative to the optical sensor and the unknown distortion of the optical device.
然而,在要求高精度寬視野量測場域中,通常需要多組雷射光源和光學感測器同時對被測物體進行分段量測,由於光學感測器所接收之資訊受到不同雷射光源的硬體條件和設置條件之影響使得基準存在差異,導致光學感測器所得到的每組輪廓資訊的精度都有些不同,而無法直接併接使用,導致被測物體的整體輪廓資訊無法被準確地得知。However, in areas requiring high-precision and wide-field measurement, multiple sets of laser light sources and optical sensors are usually required to simultaneously measure the measured object in sections, because the information received by the optical sensors is affected by different lasers. The influence of the hardware conditions and setting conditions of the light source causes differences in the benchmarks. As a result, the accuracy of each set of contour information obtained by the optical sensor is somewhat different, and cannot be used directly in parallel. As a result, the overall contour information of the measured object cannot be measured. Know accurately.
本發明之一態樣係提供一種一種測量系統 ,適用於測量一物體的輪廓。測量系統包含多個光源、校準單元、感測器、多個對位輔助單元及計算單元。多個光源分別用以投射至該物體的一部分,其中每相鄰兩光源投射至該物體時具有一重疊區域。校準單元設置對應該物體的位置處。感測器用以接收該等光源投射至該物體時所反射的輪廓資訊。多個對位輔助單元分別設置於該校準單元中對應該重疊區域的位置。計算單元用以接收該感測器所得到的輪廓資訊以計算該物體的輪廓。An aspect of the present invention provides a measurement system suitable for measuring the contour of an object. The measurement system includes multiple light sources, calibration units, sensors, multiple alignment auxiliary units and calculation units. A plurality of light sources are respectively used to project onto a part of the object, wherein each two adjacent light sources have an overlapping area when projecting onto the object. The calibration unit is set to the position corresponding to the object. The sensor is used to receive the profile information reflected by the light sources when they are projected onto the object. A plurality of alignment auxiliary units are respectively disposed at positions corresponding to the overlapping areas in the calibration unit. The computing unit is used to receive the contour information obtained by the sensor to calculate the contour of the object.
在一些實施例中,校準單元包括多個鋸齒形部,其中每一個鋸齒形部具有齒尖,且在兩個相鄰鋸齒形部之間形成齒穀。In some embodiments, the calibration unit includes a plurality of zigzag portions, wherein each zigzag portion has a tooth tip and a tooth valley is formed between two adjacent zigzag portions.
在一些實施例中,對位輔助單元包括相連的兩個邊部以及設置於兩邊部中間的一尖部,其中該邊部可以安置在該校準單元的該鋸齒形部的一邊上。In some embodiments, the alignment auxiliary unit includes two connected side portions and a tip portion disposed in the middle of the two side portions, wherein the side portion can be disposed on one side of the zigzag portion of the calibration unit.
在一些實施例中,該尖部的高度不等於該齒尖的高度。In some embodiments, the height of the tip is not equal to the height of the tooth tip.
在一些實施例中,該計算單元將對應該重疊區域的兩輪廓資訊的數據進行相關係數的計算以得到對應該重疊區域的兩光源所得到的輪廓資訊的併接位置處。In some embodiments, the calculation unit will perform correlation coefficient calculation on the data of the two contour information of the overlapping area to obtain the joint position of the contour information obtained by the two light sources corresponding to the overlapping area.
在一些實施例中,該計算單元透過式(1)計算相關係數; …(1) 其中, X i 為物體的輪廓資訊在X軸的位置, Z i 為物體的輪廓資訊對應 X i 位置的高度, 為 X 1 至 X n 的平均數, 為 Z 1 至 Z n 的平均數。 In some embodiments, the calculation unit calculates the correlation coefficient through equation (1); …(1) Among them, X i is the position of the object’s outline information on the X axis, Z i is the height of the object’s outline information corresponding to the X i position, is the average number from X 1 to X n , is the average number from Z 1 to Z n .
在一些實施例中,計算單元將該重疊區域的兩輪廓資訊的數據中具有最高相關係數的數據之位置設定為併接位置。In some embodiments, the calculation unit sets the position of the data with the highest correlation coefficient among the data of the two contour information in the overlapping area as the joining position.
在一些實施例中,該等光源系雷射光。In some embodiments, the light sources are laser light.
綜上所述,透過對位輔助單元,可得知兩相鄰光源投射至測量物體的重疊區域,再透過對此重疊區域的輪廓資訊進行相關係數的計算,可得到經由兩相鄰光源所得到的輪廓資訊的併接位置處,然後再進行接併的處理,從而得到量測物體的整體輪廓資訊。To sum up, through the alignment auxiliary unit, it is possible to know the overlapping area where two adjacent light sources are projected onto the measurement object, and then by calculating the correlation coefficient on the contour information of the overlapping area, the values obtained by the two adjacent light sources can be obtained at the merging position of the contour information, and then perform merging processing to obtain the overall contour information of the measured object.
為了讓本發明之上述及其他目的、特徵、優點能更明顯易懂,下文將特舉本發明較佳實施例,並配合所附圖式,作詳細說明如下。In order to make the above and other objects, features, and advantages of the present invention more apparent and understandable, preferred embodiments of the present invention will be described in detail below along with the accompanying drawings.
請參照第1圖,第1圖係繪示依照本發明之一實施例的一種測量系統的示意圖。測量系統10包括多個光源12和感測器14。光源12適合於以入射光平面18照亮測量物體16,該光平面也可以被稱為光的片。感測器14適合於檢測從測量物體16反射的光20,並根據該反射光20生成圖像。在一實施例中,測量系統10還包括計算單元24,以適合於存儲和/或分析由感測器14記錄的圖像。Please refer to Figure 1 , which is a schematic diagram of a measurement system according to an embodiment of the present invention. The measurement system 10 includes a plurality of light sources 12 and sensors 14 . The light source 12 is suitable for illuminating the measuring object 16 with an incident light plane 18 , which may also be referred to as a sheet of light. The sensor 14 is adapted to detect light 20 reflected from the measurement object 16 and to generate an image based on this reflected light 20 . In an embodiment, the measurement system 10 further includes a computing unit 24 adapted to store and/or analyze the images recorded by the sensor 14 .
在一實施例中,光源12為雷射光,使光平面18形成雷射平面。In one embodiment, the light source 12 is laser light, so that the light plane 18 forms a laser plane.
請一併參照第2圖。第2圖係繪示依照本發明之一實施例的一種具有校準單元的測量系統10’的示意圖。如第2圖所示,測量系統10’中還包括校準單元32,其被被引入光平面18中的對應性位置中。在一實施例中,校準單元32包括有多個鋸齒形部34,其中每一個鋸齒形部34具有齒尖,且其中在兩個相鄰鋸齒形部34之間形成齒穀。如此一來,校準單元32包括其間相對距離已被預先確定的多個點。透過校準單元32,計算單元24可以準確地經由感測器14接收的反射光資訊計算出測量物體的輪廓資訊。Please refer to Figure 2 as well. Figure 2 is a schematic diagram of a measurement system 10' with a calibration unit according to an embodiment of the present invention. As shown in Figure 2, a calibration unit 32 is also included in the measurement system 10' which is introduced into a corresponding position in the light plane 18. In one embodiment, the calibration unit 32 includes a plurality of zigzag portions 34 , wherein each zigzag portion 34 has a tooth tip, and a tooth valley is formed between two adjacent zigzag portions 34 . In this manner, the calibration unit 32 includes a plurality of points between which relative distances have been predetermined. Through the calibration unit 32 , the calculation unit 24 can accurately calculate the profile information of the measurement object through the reflected light information received by the sensor 14 .
如先前所述,測量系統10的多個光源12分別投射至測量物體16的一部分,並透過感測器14接收反射光以取得測量物體16每一部分的輪廓資訊,這些資訊可傳送至計算單元24以進行分析和產生對應的輪廓圖像。然而,由於每個光源12的硬體條件和設置條件之影響使得基準存在差異,導致光學感測器所得到的每組輪廓資訊的精度都有些不同,而無法直接併接使用。As mentioned previously, the plurality of light sources 12 of the measurement system 10 are projected onto a part of the measurement object 16 respectively, and the reflected light is received through the sensor 14 to obtain the contour information of each part of the measurement object 16. This information can be transmitted to the computing unit 24 to analyze and generate corresponding contour images. However, due to the influence of the hardware conditions and setting conditions of each light source 12, the reference is different, resulting in the accuracy of each set of contour information obtained by the optical sensor being somewhat different, and cannot be directly used in parallel.
請一併參照第3圖與第4圖。第3圖係繪示依照本發明之一實施例的一種對位輔助單元的示意圖。第4圖係繪示依照本發明之一實施例的一種測量系統10’’的示意圖。如第4圖所示,測量系統10’’還包括多個對位輔助單元40(圖中僅繪示一個),對位輔助單元40位於相鄰的光源12投射至校準單元32的重疊區域的齒穀上。在一實施例中,如第3A圖所示,對位輔助單元40具有相連的兩個邊部41以及設置於兩邊部中間的一尖部43。對位輔助單元40的邊部可以完全服貼至校準單元32的鋸齒形部34的其中一邊,使得對位輔助單元40可以完整且穩固地設置在校準單元32的齒殼上。在一實施例中,尖部43的高度不等於鋸齒形部34的齒尖的高度,較佳地,尖部43的高度遠小於齒尖的高度,如第4圖所示,使得校準單元32在規則排列的鋸齒形部34中形成一個不規則的形狀,此不規則形狀位於兩相鄰的光源12投射至校準單元32的重疊區域中。然而本發明並不以此為限,可根據校準單元的形狀對應地設計對位輔助單元40的形狀,只要讓原本具規則排列的校準單元可在重疊區域形成明顯不規則且可容易識別的形狀即可。如此一來,當計算單元24在分析輪廓資訊時,透過對位輔助單元40所給出的資訊便可得知在對應對位輔助單元40的位置中是兩光源12投射的重疊區域,此區域也就是之後要進行併接輪廓資訊的位置。Please refer to Figures 3 and 4 together. Figure 3 is a schematic diagram of an alignment auxiliary unit according to an embodiment of the present invention. Figure 4 is a schematic diagram of a measurement system 10'' according to an embodiment of the present invention. As shown in FIG. 4 , the measurement system 10 ″ also includes a plurality of alignment auxiliary units 40 (only one is shown in the figure). The alignment auxiliary units 40 are located in the overlapping area where the adjacent light sources 12 are projected onto the calibration unit 32 . On the tooth valley. In one embodiment, as shown in FIG. 3A , the alignment auxiliary unit 40 has two connected side portions 41 and a tip portion 43 disposed in the middle of the two side portions. The edge of the alignment auxiliary unit 40 can be completely attached to one side of the zigzag portion 34 of the calibration unit 32 , so that the alignment auxiliary unit 40 can be completely and stably disposed on the tooth shell of the calibration unit 32 . In one embodiment, the height of the tip 43 is not equal to the height of the tooth tip of the sawtooth-shaped portion 34 . Preferably, the height of the tip 43 is much smaller than the height of the tooth tip, as shown in FIG. 4 , so that the calibration unit 32 An irregular shape is formed in the regularly arranged zigzag portions 34 , and this irregular shape is located in the overlapping area where two adjacent light sources 12 project onto the calibration unit 32 . However, the present invention is not limited to this. The shape of the alignment auxiliary unit 40 can be designed correspondingly according to the shape of the calibration unit, as long as the originally regularly arranged calibration units can form an obviously irregular and easily identifiable shape in the overlapping area. That’s it. In this way, when the calculation unit 24 analyzes the contour information, it can know through the information provided by the alignment auxiliary unit 40 that the position corresponding to the alignment auxiliary unit 40 is the overlapping area projected by the two light sources 12. This area That is the location where the contour information will be merged later.
請參照第5A圖,第5A圖繪示了第4圖的測量系統10’’所得到的重疊區域的輪廓資訊。第5A圖(a)是經由測量系統10’’的左邊的光源12所得到的重疊區域的輪廓資訊,第5A圖(b)是經由測量系統10’’的右邊的光源12所得到的重疊區域的輪廓資訊。由於這兩筆輪廓資訊是經由不同的光源取得,因此兩者的資訊基準並不相同,必須進行校準後才能進行併接。在一實施例中,計算單元24將感測器接收到的輪廓資訊分別記錄在獨立的座標系統中,接著對這些輪廓資訊進行數據正規化以得到第5A圖的數據。接著,計算單元24透過式(1)來計算兩個圖表中數據的相關係數。 …(1) 其中, X i 為每一個數據在座標系統中的X軸座標(其代表被量測之物體的輪廓資訊在X軸的位置), Z i 為每一個數據在座標系統中的Z軸座標(其代表被量測之物體的輪廓資訊對應 X i 位置的高度), 為 X 1 至 X n 的平均數, 為 Z 1 至 Z n 的平均數。 Please refer to Figure 5A , which illustrates the outline information of the overlapping area obtained by the measurement system 10 ″ in Figure 4 . Figure 5A(a) is the outline information of the overlapping area obtained through the light source 12 on the left side of the measurement system 10", and Figure 5A(b) is the overlapping area obtained through the light source 12 on the right side of the measurement system 10". outline information. Since the two pieces of contour information are obtained through different light sources, the information standards of the two are different and must be calibrated before they can be connected. In one embodiment, the calculation unit 24 records the contour information received by the sensor in an independent coordinate system, and then performs data normalization on the contour information to obtain the data in Figure 5A. Next, the calculation unit 24 calculates the correlation coefficient of the data in the two charts through equation (1). … (1) Among them , Axis coordinates (which represent the height of the measured object's contour information corresponding to the X i position), is the average number from X 1 to X n , is the average number from Z 1 to Z n .
相關係數r為X和Z的共異變數除以X的標準差和Z的標準差的乘積。X和Z的共異變數可以以式(2)表示,X的標準差可以以式(3)表示,Z的標準差可以以式(4)表示。因此,將式(2)除以式(3)和式(4)的乘積便可得到式(1)。 …(2) …(3) …(4) The correlation coefficient r is the common variable of X and Z divided by the product of the standard deviation of X and the standard deviation of Z. The common variables of X and Z can be expressed by formula (2), the standard deviation of X can be expressed by formula (3), and the standard deviation of Z can be expressed by formula (4). Therefore, formula (1) can be obtained by dividing formula (2) by the product of formula (3) and formula (4). …(2) …(3) …(4)
具體來說,計算單元24可將第5A圖(a)的每一個位置的數據與第5A圖(b)中對應第5A圖(a)中相同位置(即相同的X座標上)的每一個數據計算出兩者的相關係數,其中每個數據代表著所量測到的物體的輪廓的其中一個位置的高度。接著,計算單元24將第5A圖(a)的所有數據位移一個單位後(例如右移一個X座標單位),再將第5A圖(a)位移後的每一個數據與第5A圖(b)中對應第5A圖(a)中位移後相同位置的每一個數據並計算出兩者的相關係數,以此類推直到完成所有可能的相關係數。在這所有計算過的相關係數中,相關係數越高代表兩個圖表的數據越接近併接的位置。因此,當完成所有數據的相關係數的計算後,相關係數最大的數據,便是可以進行併接的位置(也就是第5A圖(a)與第5A圖(b)相同的位置)。如第5B圖所示,第5B圖繪示了第4A圖的輪廓資訊進行併接後所得到的完整輪廓資訊,其中左半部對應於經由左邊光源12投射所得到的輪廓資訊,右半部對應於經由右邊光源12投射所得到的輪廓資訊。Specifically, the calculation unit 24 can compare the data of each position in Figure 5A (a) with each position in Figure 5A (b) corresponding to the same position in Figure 5A (a) (ie, on the same X coordinate). The correlation coefficient between the two is calculated from the data, where each data represents the measured height of one position of the object's outline. Next, the calculation unit 24 shifts all the data in Figure 5A (a) by one unit (for example, moves one X coordinate unit to the right), and then compares each shifted data in Figure 5A (a) with Figure 5A (b). Correspond to each data at the same position after displacement in Figure 5A (a) and calculate the correlation coefficient between the two, and so on until all possible correlation coefficients are completed. Among all the calculated correlation coefficients, the higher the correlation coefficient, the closer the data of the two charts are to the joint position. Therefore, after the calculation of the correlation coefficients of all data is completed, the data with the largest correlation coefficient is the position that can be connected (that is, the same position in Figure 5A (a) and Figure 5A (b)). As shown in Figure 5B, Figure 5B illustrates the complete contour information obtained after concatenating the contour information in Figure 4A. The left half corresponds to the contour information projected through the left light source 12, and the right half Corresponds to the contour information projected through the right light source 12 .
由上述之實施方式可知,透過本發明所提供的對位輔助單元,可得知兩相鄰光源投射至測量物體的重疊區域,再透過對此重疊區域的輪廓資訊進行相關係數的計算,可得到經由兩相鄰光源所得到的輪廓資訊的併接位置處,然後再進行接併的處理,從而得到量測物體的整體輪廓資訊。It can be seen from the above embodiments that through the alignment auxiliary unit provided by the present invention, the overlapping area projected by two adjacent light sources onto the measurement object can be known, and then by calculating the correlation coefficient on the outline information of the overlapping area, it can be obtained The combined position of the contour information obtained through two adjacent light sources is then combined to obtain the overall contour information of the measured object.
雖然本發明已以較佳實施例揭露,然其並非用以限制本發明,任何熟習此項技藝之人士,在不脫離本發明之精神和範圍內,當可作各種更動與修飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者爲準。Although the present invention has been disclosed in preferred embodiments, they are not intended to limit the present invention. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the present invention The scope of protection shall be subject to the scope of the patent application attached.
10、10’、10’’:測量系統 12:光源 14:感測器 16:測量物體 18:入射光平面 20:反射光 24:計算單元 32:校準單元 34:鋸齒形部 40:對位輔助單元 41:邊部 43:尖部 10, 10’, 10’’: measuring system 12:Light source 14: Sensor 16: Measuring objects 18: Incident light plane 20: Reflected light 24:Computing unit 32:Calibration unit 34:Zigzag part 40: Alignment auxiliary unit 41:Border 43:Tip
第1圖係繪示依照本發明之一實施例的一種測量系統的示意圖;Figure 1 is a schematic diagram of a measurement system according to an embodiment of the present invention;
第2圖係繪示依照本發明之一實施例的一種具有校準單元的測量系統的示意圖;Figure 2 is a schematic diagram of a measurement system with a calibration unit according to an embodiment of the present invention;
第3圖係繪示依照本發明之一實施例的一種對位輔助單元的示意圖;Figure 3 is a schematic diagram of an alignment auxiliary unit according to an embodiment of the present invention;
第4圖係繪示依照本發明之一實施例的一種測量系統的示意圖;Figure 4 is a schematic diagram of a measurement system according to an embodiment of the present invention;
第5A圖繪示了第4圖的測量系統所得到的重疊區域的輪廓資訊;以及Figure 5A illustrates the contour information of the overlapping area obtained by the measurement system in Figure 4; and
第5B圖繪示了第5A圖的輪廓資訊進行併接後所得到的完整輪廓資訊。Figure 5B shows the complete outline information obtained after concatenating the outline information in Figure 5A.
10”:測量系統 10”: Measuring system
12:光源 12:Light source
14:感測器 14: Sensor
20:反射光 20: Reflected light
24:計算單元 24:Computing unit
34:鋸齒形部 34:Zigzag part
41:邊部 41:Border
43:尖部 43:Tip
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