TW202403466A - Lithography machine, pollution prevention device for illumination lamp chamber, and design method thereof which a uniform air flow field can be formed on both surfaces of the optical glass, achieving protection of both sides of the optical glass surface - Google Patents

Abstract

The present invention provides a lithography machine, a pollution prevention device for the illumination lamp chamber, and its design method. The pollution prevention device, through the establishment of a dual-channel structure for the illumination side protection device and a single-channel structure for the lamp chamber side protection device, can form an air protection layer on both surfaces of the optical glass, achieving protection against contamination on both sides of the optical glass surface from contaminants. The pollution prevention device for the illumination lamp chamber, according to the invention, includes: an illumination side protection device, configured with a dual-channel structure, for uniforming the flow velocity of air entering the illumination side protection device to form an air protection layer on the first surface of the optical glass; a lamp chamber side protection device, configured with a single-channel structure, for uniforming the flow velocity of air entering the lamp chamber side protection device to form an air protection layer on the second surface of the optical glass. The optical glass is positioned between the lamp chamber side protection device and the illumination side protection device.

Description

Photolithography machine, anti-pollution device for lighting lamp room and design method thereof

The present invention relates to the field of optical technology, and in particular to a photolithography machine, an anti-pollution device for lighting a lamp chamber, and a design method thereof.

Photolithography is a very important process in the semiconductor manufacturing process. It is a process in which the wafer patterns on a series of masks are sequentially transferred to the corresponding layers of the silicon wafer through exposure. It is considered to be the core of large-scale integrated circuit manufacturing. steps. A series of complex and time-consuming photolithography processes in semiconductor manufacturing are mainly completed by corresponding photolithography machines.

In the construction of lithography machines, highly sensitive devices such as lamp rooms require a stable operating environment based on low vibration. If a lighting module with multiple movable mechanisms is directly connected to the lamp room, it will not be able to ensure the low-vibration design and operation requirements of the lamp room. This feature enables a non-closed connection design in the lithography machine structure. This type of design will inevitably expose optical components, including optical glass, to the factory environment. In addition, the shutter that exists here needs to be cooled by air convection when closed. For example, the application of an exhaust unit may accelerate the occurrence of the above-mentioned pollution. The illumination side surface of the optical glass will therefore produce surface contamination in a foreseeable short time, causing the machine illumination to rapidly decrease. In addition, the open space inside the lamp chamber and the complex internal flow field caused by internal heat dissipation require effective protection on the side surface of the optical glass lamp chamber.

Therefore, there is a need for a protective device that can simultaneously protect the surfaces of both sides of the optical glass in a limited space to meet the exposure quality of the photolithography device under long-term operation.

The object of the present invention is to provide a photolithography machine, an anti-pollution device for a lighting lamp chamber, and a design method thereof to protect the surfaces on both sides of the optical glass.

In order to achieve the above objects and other related objects, the present invention provides an anti-pollution device for lighting lamp rooms, including: An illumination side protective device, which is arranged in a double flow channel structure and is used to uniformize the flow rate of the gas flowing into the illumination side protective device to form an air protective layer on the first surface of the optical glass; The lamp chamber side protective device is arranged in a single flow channel structure and is used to uniformize the flow rate of the gas flowing into the lamp chamber side protective device to form an air protective layer on the second surface of the optical glass, so The optical glass is disposed between the lamp chamber side protective device and the lighting side protective device.

Preferably, in the anti-pollution device for lighting a lamp room, the lamp room side protection device includes: a lamp room side inner circulation flow channel, a lamp room side air inlet and a lamp room side air outlet, so The gas output from the lamp chamber side air inlet passes through the lamp chamber side inner circulation channel to the second surface of the optical glass, and flows back to the lamp chamber side air outlet through the second surface of the optical glass. , the lamp chamber side inner circulation channel is provided with a plurality of non-uniformly distributed air outlets, and gas flows in the lamp chamber side inner circulation channel through the air outlets to the second surface of the optical glass.

Preferably, in the anti-pollution device for lighting a lamp chamber, the direction of the lamp chamber side air inlet is perpendicular to the optical axis direction of the optical glass.

Preferably, in the anti-pollution device for lighting a lamphouse, the lamphouse side protection device also includes a lamphouse side airflow equalization baffle, and the lamphouse side airflow equalization baffle is connected to the lamphouse side airflow equalization baffle. The lamp chamber side air inlets are arranged oppositely, and the gas output from the lamp chamber side air inlet is homogenized by the lamp chamber side air flow homogenizing baffle.

Preferably, in the anti-pollution device for lighting a lamp room, the lamp room side protection device further includes a first baffle and a second baffle, and the first baffle and the second baffle The deflector is disposed close to the air outlet of the lamp chamber side inner circulation channel, and there is a first gap between the first deflector and the second deflector. The lamp chamber side inner circulation channel The output gas passes through the first gap to the second surface of the optical glass.

Preferably, in the anti-pollution device for lighting a lamp room, the width of the first gap is no more than 3 mm.

Preferably, in the anti-pollution device for lighting lamp rooms, the first guide plate has a first guide surface for guiding gas, and the second guide plate has a first guide surface for guiding gas. The second flow guide surface for flowing gas, and by adjusting the angle β between the first flow guide surface and the direction perpendicular to the optical axis of the optical glass and pointing toward the center along the edge of the optical glass and/or the second flow guide surface The angle θ between the optical glass and the direction of the optical axis of the lighting side protection device pointing toward the lamp chamber side protection device is used to change the gas flow direction. The range of the included angle β is 45° to 90°; the range of the included angle θ It is 75°～86°.

Preferably, in the anti-pollution device for illuminating a lamp room, the lamp room side protection device further includes an isolation baffle, and the isolation baffle is arranged where the lamp room side protection device is in contact with the external device structure. s position.

Preferably, in the anti-pollution device for lighting lamp rooms, the lighting side protection device includes: lighting side air inlet, lighting side air outlet, lighting side inner circulation flow channel and lighting side outer circulation flow. channel, the gas output from the lighting side air inlet sequentially passes through the lighting side outer circulation channel and the lighting side inner circulation channel to the first surface of the optical glass, and then flows back to the first surface of the optical glass through the first surface of the optical glass. The lighting side air outlet, the lighting side inner circulation flow channel and the lighting side outer circulation flow channel are each provided with a plurality of non-uniformly distributed air outlets, and gas passes through the lighting side outer side in the lighting side outer circulation flow channel. The air outlet of the circulation flow channel flows into the illumination side inner circulation flow channel, and flows to the first surface of the optical glass through the air outlet of the illumination side inner circulation flow channel.

Preferably, in the anti-pollution device for lighting a lamp room, the direction of the lighting side air inlet is perpendicular to the optical axis direction of the optical glass.

Preferably, in the anti-pollution device for a lighting lamp room, the anti-pollution device further includes a lighting side cover, and the lighting side protection device further includes a lighting side air flow equalization baffle. The side cover is connected to an end of the lighting side protection device away from the lamp chamber side protection device, the lighting side airflow equalization baffle is disposed close to the air outlet of the lighting side inner circulation channel, and the lighting side There is a second gap between the side airflow equalization baffle and the illumination side cover, and the gas output from the illumination side inner circulation channel passes through the second gap to the first surface of the optical glass.

Preferably, in the anti-pollution device for lighting a lamp room, the width of the second gap is no greater than 2.5 mm.

Preferably, in the anti-pollution device for lighting lamp chambers, the lighting side air flow homogenizing baffle includes a homogenizing surface for gas homogenization and a gas homogenization surface opposite to the homogenization surface. The gas flow direction is changed by adjusting the angle α between the third flow guide surface and the direction perpendicular to the optical axis of the optical glass and pointing toward the edge along the center of the optical glass, so The included angle α ranges from 40° to 50°.

In order to achieve the above objects and other related objects, the present invention also provides a lithography machine, including an optical element for illuminating a lamp chamber, the optical element including an adapter ring, optical glass and the above-mentioned optical element for illuminating a lamp chamber. Anti-pollution device, the optical glass is fixed in the anti-pollution device through the adapter ring.

In order to achieve the above objects and other related objects, the present invention also provides a design method of an anti-pollution device for a lighting lamp room, which is applied to the above-mentioned anti-pollution device and includes the following steps: Set input gas flow parameters and output gas flow parameters; and According to the input gas flow parameter and the output gas flow parameter, the structure of the lighting side protection device with a double flow channel structure and the structure of the lamp room side protection device with a single flow channel structure are adjusted. The structures of the lighting side protection device and the lamp room side protection device are adjusted. to form the anti-pollution device.

Preferably, in the design method of the anti-pollution device for lighting a lamp room, the structure of the lamp room side protection device with a single flow channel structure is adjusted according to the input gas flow parameters and the output gas flow parameters, including the following: Steps: Adjust the width of the first gap according to the input gas flow parameter and the output gas flow parameter; Adjust the flow guide angle of the first guide plate and the second guide plate so that the output gas covers the second surface of the optical glass; and/or The adjustment of the structure of the lighting side protection device with a dual flow channel structure according to the input gas flow parameters and the output gas flow parameters includes the following steps: Adjust the width of the second gap according to the input gas flow parameter and the output gas flow parameter; Adjust the angle of the airflow homogenizing baffle on the illumination side so that the output gas covers the first surface of the optical glass.

Compared with the conventional technology, the technical solution of the present invention has the following beneficial effects: Through the double-flow channel structural design of the illumination side protection device and the single-flow channel structural design of the lamp chamber side protection device, the present invention can form a uniform airflow field on both sides of the optical glass surface, thereby realizing protection of the both sides of the optical glass surface. This further satisfies the exposure quality of the lithography device under long-term operation.

Secondly, the present invention sets non-uniformly distributed lamp room side air outlets on the lamp room side inner circulation channel, sets a lamp room side airflow equalizing baffle near the lamp room side air inlet, and sets a lamp room side airflow equalizing baffle on the inner side of the lighting side. Non-uniformly distributed lighting side air outlets are provided on the circulating flow channel and the lighting side outer circulation channel, which can help to achieve a uniform distribution of flow rates inside the lamp chamber side and the lighting side, ensuring a uniform air flow on the surfaces on both sides of the optical glass. field, and forms an air protective layer that can effectively resist lateral disturbance, prevent pollutants from contaminating the optical glass surface, maintain high optical properties of the system, and improve product service life, production efficiency, and product yield.

Moreover, the present invention can enhance the ability to resist lateral disturbance at low flow rates on the lamp chamber side by arranging an isolation baffle on the lamp chamber side protection device.

Furthermore, the present invention provides a first guide plate and a second guide plate on the lamp chamber side protection device, and adjusts the gap width between the first guide plate and the second guide plate and the first guide plate. The guide angle between the plate and the second guide plate enables the slow-flow gas after the guide to fully cover the first surface of the optical glass. By arranging a lighting side airflow homogenizing baffle on the lighting side protection device, and by adjusting the gap width between the lighting side airflow homogenizing baffle and the cover plate and the angle of the lighting side airflow homogenizing baffle, the output high-speed gas It can fully cover the first surface of optical glass, allowing it to continuously form an air protective layer under long-term operation, which can effectively prevent contaminants from contacting the optical glass and improve the imaging quality of the optical glass.

In addition, by extracting the structure and design parameters of key components, the present invention designs an anti-pollution device for lighting lamp rooms that can provide effective protection in a limited space, improves the imaging quality of optical glass, and can be effectively expanded to different limited spaces. In the design of anti-pollution devices for lighting lamp rooms.

The photolithography machine, the anti-pollution device for the lighting lamp chamber and the design method proposed by the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use imprecise proportions, and are only used to conveniently and clearly assist in explaining the embodiments of the present invention.

Referring to FIGS. 1 to 4 , the present invention provides an anti-pollution device 1 for a lighting lamp room, which includes: a lamp room side protection device 11 , a lighting side protection device 12 and a lighting side cover 15 . In this embodiment, the lighting side protection device 12, the lamp room side protection device 11, the optical glass 14 and the lighting side cover 15 are positioned in the order of pointing from the lighting side to the lamp room side: the lighting side cover 15, Illumination side protection device 12, optical glass 14 and lamp chamber side protection device 11. The optical glass 14 is installed between the lighting side protective device 12 and the lamp chamber side protective device 11, and is fixed using an adapter ring 13, and then is installed and fixed using the lamp chamber side protective device 11 to prevent optical Glass 14 fell off. A plurality of screw holes are distributed on the lighting side protective device 12, the adapter ring 13 and the lamp chamber side protective device 11, and they can be fixed by bolts. The lighting side cover 15 is installed on an end of the lighting side protection device 12 away from the lamp room side protection device 11 . The optical glass 14, the adapter ring 13 and the illumination side cover 15 in this embodiment are structural features in the conventional technology and will not be described again here.

Referring to Figures 5 to 8, by analyzing the available space inside the device, the lighting side protection device 12 adopts a dual-flow channel structure design, and the lighting side protection device 12 specifically includes: a lighting side air inlet 121, a lighting side air outlet ( (not marked in the figure), the lighting side inner circulation flow channel 122 and the lighting side outer circulation flow channel 123. The distance between the lighting side outer circulation flow channel 123 and the center point of the lighting side protection device 12 is greater than the lighting side inner side. The distance between the circulation flow channel 122 and the center point of the lighting side protection device 12 means that the lighting side inner circulation flow channel 122 is located inside the lighting side outer circulation flow channel 123 . The gas output from the lighting side air inlet 121 sequentially passes through the lighting side outer circulation channel 123 and the lighting side inner circulation channel 122 to the first surface of the optical glass 14, and passes through the third surface of the optical glass 14. One surface flows back to the lighting side air outlet. The surface of the optical glass 14 on the side away from the lamp chamber side protective device 11 serves as the first surface of the optical glass 14 .

The illumination side protection device 12 is specifically an annular structure, and the central area of the annular structure serves as the illumination side air outlet, that is, the annular structure surrounds the illumination side air outlet.

A plurality of air outlets are provided on the lighting side inner circulation channel 122 and the lighting side outer circulation channel 123 . Specifically, a plurality of illumination-side inner air outlets 1221 are provided on the inner surface of the illumination-side inner circulation channel 122, and a plurality of illumination-side outer air outlets 1231 are provided on the inner surface of the illumination-side outer circulation channel 123. The illumination side outer circulation channel 123 flows into the illumination side inner circulation channel 122 through the illumination side outer air outlet 1231, and flows to the third side of the optical glass 14 through the illumination side inner air outlet 1221. A surface. The number of air outlets on each flow channel structure of the lighting side protection device 12 can be selected as needed.

The positions of the air outlets on each of the flow channel structures may be uniformly distributed on the flow channel structure, or may be non-uniformly distributed on the flow channel structure, that is, the distance between adjacent air outlets may be the same or different. Since the gas pressure closer to the illumination side air inlet 121 is greater, the gas flow rate is also greater. Therefore, in order to better homogenize the gas input from the illumination side air inlet 121, each flow channel structure The density of the air outlets preferably increases as the distance from the lighting side air inlet 121 increases. That is, the farther away from the lighting side air inlet 121 is, the closer the distance between adjacent air outlets is.

The shape of the air outlet on each flow channel structure on the lighting side protection device 12 can be selected in different shapes under different usage conditions, such as circular or square. In this embodiment, it can be seen that the shape is circular. Small hole. In addition, the diameter of the air outlet holes on each flow channel structure on the lighting side protection device 12 may be uniform or non-uniform. Since the closer to the lighting side air inlet 121 is, the greater the gas pressure is and the greater the gas flow rate is. Therefore, it is necessary to set the apertures of the air outlets on each flow channel structure to be non-uniform in order to better homogenize the gas. Therefore, it is preferred that the air outlet holes on each flow channel structure have a non-uniform hole diameter. Furthermore, the aperture (ie, diameter) of the air outlet hole on each flow channel structure increases as the distance from the lighting side air inlet 121 increases. Furthermore, the diameter range of the air outlets on each flow channel structure can be controlled within the range of 0.8mm to 1.5mm based on 3D printing accuracy and design parameter requirements, and the distribution can be optimized based on the flow velocity distribution.

FIG. 9 shows a cross-sectional view of the anti-pollution device 1 , and FIG. 10 shows a structural diagram of area B in the anti-pollution device 1 . Referring to FIGS. 9 and 10 , in order to further homogenize the gas, in other embodiments, the lighting side protection device 12 may also include a lighting side airflow homogenizing baffle 124 , which is located between the lighting side cover 15 and the lighting side cover 15 . The gas output from the lighting side inner circulation channel 122 passes through the second gap to the first surface of the optical glass 14 . The lighting side airflow equalizing baffle 124 is disposed close to the lighting side inner air outlet 1221 , and the gas output from the lighting side inner air outlet 1221 is homogenized by the lighting side airflow equalizing baffle 124 .

Referring to FIG. 10 , in this embodiment, the illumination-side airflow equalization baffle 124 can be adjusted to adjust the gas flow direction passing through the illumination-side airflow equalization baffle 124 and the coverage area of the first surface of the optical glass 14 to be protected. The illumination side air flow equalization baffle 124 includes a leveling surface 1242 for gas leveling and a third flow guide surface 1241 opposite to the leveling surface 1242 for gas flow guiding. In this embodiment, the gas flow direction is changed by adjusting the angle α between the third flow guide surface 1241 and the direction perpendicular to the optical axis of the optical glass 14 and along the center of the optical glass 14 toward the edge. That is, the acute angle formed between the third flow guide surface 1241 and the vertical surface in the optical axis direction of the optical glass 14 is regarded as the included angle α. Under high exhaust flow velocity (for example, 4m/s), the lateral disturbance protection capability can be increased by increasing the included angle α. However, this design will reduce its protective properties at low exhaust flow rates. Under the current design and environmental constraints, the preferred range of the included angle α is 40° to 50°, which can be adjusted according to different extraction flow rates and protection environments. For example, Figures 11a to 11c show that the included angle α can be set to 40°, 45° and 50°. According to the size of the α angle of the third flow guide surface 1241 , the angle between the homogenizing surface 1242 and the direction perpendicular to the optical axis of the optical glass 14 and pointing toward the edge along the center of the optical glass 14 needs to be set to no more than 90°. within the range. The included angle of the homogenizing surface 1242 cooperates with the change of the α included angle of the third flow guide surface 1241, which can improve the lateral disturbance protection capability while homogenizing the gas.

The width of the second gap can adjust the output gas flow rate and also plays a certain role in homogenizing the gas. Further, the width of the second gap is not greater than 2.5mm. For example, after simulation analysis, the gap width between the lighting side airflow equalization baffle 124 and the lighting side cover 15 is locked (fixed to 1.5mm after simulation optimization), so that the outlet air flow rate is set to about 0.8m/s. And by adjusting the angle of the illumination side airflow homogenizing baffle 124 to 45°, the high-speed airflow can fully cover the surface of the optical glass 14 . The angle between the lighting side cover 15 and the horizontal direction is 90°, that is, the lighting side cover 15 is parallel to the vertical plane in the optical axis direction of the optical glass 14, and the flow guide angle is 90°, so the lighting The side cover 15 has no flow guiding effect to the surface of the optical glass 14 . This is mainly because the air outlet flow rate of the illumination side protective device 12 is relatively large, and it can fully cover the first surface of the optical glass 14 without adjusting the flow guide angle.

The illumination side protection device 12 also includes an illumination side powder cleaning hole 125, which is preferably located 150° opposite the illumination side air inlet 121, see Figure 6. The lighting side dust cleaning hole 125 is mainly used for removing dust from new equipment, and will be sealed when the new equipment is working normally to prevent air leakage.

In this embodiment, due to the interaction between the lighting side inner circulation channel 122 and the lighting side outer circulation channel 123 as well as the lighting side airflow equalization baffle 124, the gas input from the lighting side air inlet 121 is transported to the optical On the glass 14, gas will flow back vertically, so the optical axis directions of the illumination side air inlet 121 and the optical glass 14 are 90° to each other, that is, the direction of the illumination side air inlet 121 and the optical glass 14 are The optical axis direction of 14 is vertical, and an effective protective effect is achieved by forming an air protective gas layer that can resist lateral disturbance on the first surface of the optical glass 14 to be protected.

Referring to Figures 12 and 13, through the available space inside the analysis device, the lamp chamber side protective device 11 is set into a single flow channel structure for uniformizing the flow rate of the gas flowing into the lamp chamber side protective device 11, so as to An air protective layer is formed on the second surface of the optical glass 14 . Clean CDA (compressed air) flows into the lamp chamber side protective device 11 and the lighting side protective device 12 as the intake fluid at the same time.

The lamp chamber side protection device 11 specifically includes: a lamp chamber side air inlet 111, a lamp chamber side inner circulation flow channel 112, and a lamp chamber side air outlet (not marked in the figure). The lamp chamber side protection device 11 is specifically an annular structure, and the central area of the annular structure serves as the lamp chamber side air outlet, that is, the annular structure surrounds the lamp room side air outlet.

The gas output from the lamp chamber side air inlet 111 passes through the lamp chamber side inner circulation channel 112 to the second surface of the optical glass 14, and flows back to the second surface of the optical glass 14. The air outlet on the side of the lamp chamber. The surface of the optical glass 14 close to the lamp chamber side protective device 11 serves as the second surface of the optical glass 14 . The lamp chamber side air inlet 111 and the lighting side air inlet 121 are placed in the same direction, making it easy to set up the general air inlet air path. See Figure 5 .

The lamp chamber side inner circulation channel 112 is provided with a plurality of air outlets, namely lamp room side air outlets 1121. The lamp room side air outlets 1121 are used to remove the gas in the lamp room side inner circulation channel 112. Transported to the second surface of the optical glass 14 . The plurality of lamp chamber side air outlets 1121 are provided on the inner surface of the lamp chamber side inner circulation flow channel 112, and the number of the lamp chamber side air outlets 1121 can be selected as needed.

The lamp chamber side air outlets 1121 may be evenly distributed on the lamp chamber side inner circulation flow channel 112 , or may be non-uniformly distributed on the lamp room side inner circulation flow channel 112 . That is, the distance between adjacent lamp chamber side air outlets 1121 may be the same or different. Since the gas pressure closer to the lamp chamber side air inlet 111 is greater, the gas flow rate is also greater. Therefore, in order to better homogenize the gas output from the lamp chamber side air inlet 111, the lamp chamber side The arrangement density of the air outlets 1121 preferably increases as the distance from the lamp chamber side air inlet 111 increases. That is, the further away from the lamp chamber side air inlet 111 , the closer the distance between adjacent lamp chamber side air outlets 1121 is.

The shape of the air outlet hole 1121 on the side of the lamp chamber can be selected in different shapes under different usage conditions, such as circular or square. In this embodiment, it can be seen that it is a small circular hole. In addition, the aperture of the lamp chamber side air outlet hole 1121 may be uniform or non-uniform. Since the closer to the lamp chamber side air inlet 111 is, the greater the gas pressure is and the greater the gas flow rate is. Therefore, it is necessary to set the aperture of the lamp chamber side air outlet hole 1121 to be non-uniform in order to better homogenize the gas. Therefore, Preferably, the aperture of the lamp chamber side air outlet hole 1121 is a non-uniform aperture. Furthermore, the aperture of the lamp chamber side air outlet hole 1121 increases as the distance from the lamp chamber side air inlet 111 increases. Furthermore, the diameter range of the air outlets on each flow channel structure can be controlled within the range of 0.8mm to 1.5mm based on 3D printing accuracy and design parameter requirements, and the distribution can be optimized based on the flow velocity distribution. The design of the above-mentioned lamp chamber side protection device 11 ensures the formation of a uniform airflow field on the second surface of the optical glass 14 to be protected, and forms an air protective layer that can effectively resist lateral disturbance and prevent pollutants from contaminating the surface of the optical glass 14 .

In addition, in order to avoid the problem of insufficient uniform distribution of gas outlet flow rate due to the single-flow channel structure of the lamp chamber side protection device 11, a lamp chamber side air flow uniformity baffle is provided at a position opposite to the lamp chamber side air inlet 111. 118, please refer to Figure 13. That is, the lamp chamber side protection device 11 may also include a lamp chamber side air flow equalization baffle 118, and the gas output from the lamp chamber side air inlet 111 is homogenized by the lamp chamber side air flow equalization baffle 118. . In this embodiment, by analyzing the internal available space, the lamp chamber side protection device 11 uses a single flow channel structure, and the lamp chamber side air outlet 1121 and the lamp chamber side air flow uniformity baffle 118 with non-uniform aperture distribution complete the internal flow velocity uniform distribution. .

Referring to Figure 14, a structural diagram of area A in the anti-pollution device 1 is shown. The lamp chamber side protection device 11 may also include a first baffle 115 and a second baffle 116. The first baffle 115 and the second baffle 116 are disposed close to the inner side of the lamp chamber. The position of the air outlet of the flow channel 112, the directions of the first guide plate 115 and the second guide plate 116 are at a certain angle, and there is a third guide plate 115 between the first guide plate 115 and the second guide plate 116. A gap. The gas output from the lamp chamber side inner circulation channel 112 passes through the first gap to the second surface of the optical glass 14 . The range of the certain included angle is preferably 45° to 135°. The first guide plate 115 is disposed close to the lamp chamber side air outlet 1121 to guide the gas output from the lamp chamber side air outlet 1121 for the first time. For example, the first guide plate 115 The gas along the direction perpendicular to the optical axis of the optical glass 14 is guided to a direction close to the optical axis of the optical glass 14 . The gas output by the first guide plate 115 passes through the first gap to the second guide plate 116 , and the second guide plate 116 performs a second step on the gas output by the lamp chamber side air outlet 1121 . Secondary diversion. According to changes in requirements and standards for lamp room side protection, system design requirements can be met only by changing the structures of the first baffle 115 and the second baffle 116 . The first guide plate 115 has a first guide surface 1151 for guiding gas, and the second guide plate 116 has a second guide surface 1161 for guiding gas. The second guide surface 1161 is used for guiding gas. The surface 1161 is the surface of the second guide plate 116 close to the first guide plate 115. By adjusting the first guide surface 1151 and the optical axis perpendicular to the optical glass 14 and along the optical glass The angle β between the edge of 14 pointing to the center and/or the angle θ between the second guide surface 1161 and the optical axis direction of the optical glass 14 along the illumination side protection device 12 towards the lamp chamber side protection device 11 changes the gas conduction. In the flow direction, the range of the included angle β is preferably 45° to 90°; the range of the included angle θ is preferably 75° to 86°. That is, the acute angle or right angle formed between the first flow guide surface 1151 and the vertical plane in the optical axis direction of the optical glass 14 is regarded as the included angle β, while the second flow guide surface 1161 and the optical glass 14 The acute angle formed between the vertical planes in the direction of the optical axis and the angle θ are complementary angles to each other. Research has found that 81° is the limit value of the flow guide angle of the second flow guide surface 1161 on the lamp house side. When it is less than 75°, the airflow cannot cover the surface of the optical glass 14, and its protective performance is reduced; when it is greater than 75°, the airflow can evenly cover it, but when it is greater than 86°, the protective performance begins to decrease. Referring to Figures 15a to 15c, it is shown that the included angle θ is 75°, 81° and 86° respectively.

In this embodiment, the width of the first gap between the first baffle 115 and the second baffle 116 can adjust the output gas flow rate, and also plays a certain role in homogenizing the gas. The width of the first gap is preferably no greater than 3 mm.

In this embodiment, in order to consider the isolation requirements between the lamp room side protection device 11 and the external device structure, the lamp room side protection device 11 also includes an isolation baffle 114, and the isolation baffle 114 is disposed in the lamp room. Refer to Figure 9 for the position where the side protection device 11 contacts the external device structure. Therefore, the lamp chamber side protection device 11 has a stronger ability to resist lateral disturbance at low flow rates than the lighting side protection device 12 due to the presence of the isolation baffle 114 .

The lamp chamber side protection device 11 also includes a lamp chamber side air outlet for discharging gas on the second surface of the optical glass. In this embodiment, due to the interaction of the illumination side inner circulation flow channel 122, the lamp chamber side air flow equalization baffle 118, the first guide plate 115 and the second guide plate 116, the lamp chamber side air intake is The gas output from the port 111 is transported to the optical glass 14, and the gas will flow back vertically. Therefore, the direction of the lamp chamber side air inlet 111 is preferably 90° to the optical axis direction of the optical glass 14, that is, The direction of the lamp chamber side air inlet 111 is perpendicular to the optical axis direction of the optical glass 14, and an effective protective effect is achieved by forming an air protective gas layer that can resist lateral disturbance on the second surface of the optical glass 14 to be protected.

The lamp chamber side protection device 11 may also include a lamp chamber side powder cleaning hole 113, which is preferably located 180° opposite the lamp chamber side air inlet 111. The powder cleaning hole 113 on the side of the lamp chamber is mainly used for removing dust from new equipment, and will be sealed when the new equipment is working normally to prevent air leakage.

Referring to Figure 16, the principle of the anti-pollution device 1 of this embodiment is: clean CDA flows into the lamp chamber side protection device 11 and the lighting side protection device 12 simultaneously as the air intake fluid. By analyzing the internal available space, the lamp chamber side protection device 11 uses a single flow channel structure, and the air outlets and air flow uniformity baffles with non-uniform aperture distribution achieve uniform internal flow velocity distribution. The lighting side protection device 12 makes full use of the internal space and is provided with inner and outer double-sided flow channels. The internal gas flow rate is uniformized through the non-uniform aperture holes in the inner and outer circulation flow channels on the lighting side. The above design ensures the formation of a uniform airflow field on the optical glass surface to be protected, and forms an air protective layer that can effectively resist lateral disturbance and prevent pollutants from contaminating the optical glass surface. The pollutants are generally organic volatile matter and particulate matter with a particle size below 0.01mm.

The invention also provides a design method for an anti-pollution device for lighting lamp rooms, which includes the following steps: Step S1: Set input gas flow parameters and output gas flow parameters; and Step S2: Adjust the structures of the lamp chamber side protection device 11 and the lighting side protection device 12 according to the input gas flow parameters and the output gas flow parameters.

In step S1, the greater the gas flow rate input to the anti-pollution device 1, the better the homogenization effect will be, but the higher the cost will be. Therefore, in this embodiment, the input gas flow rate of the lamp chamber side protection device 11 is preferably not higher than 15L/min, and the input gas flow rate of the lighting side protection device 12 is preferably not higher than 25L/min. The output gas flow rate is set according to the process requirements. That is, the input gas flow parameters include two, which are the input gas flow parameters of the lamp chamber side protection device 11 and the input gas flow parameters of the lighting side protection device 12 . The output gas flow parameters also include two, which are the output gas flow parameters of the lamp chamber side protection device 11 and the output gas flow parameters of the lighting side protection device 12 . The lamp chamber side protective device 11 is adjusted according to the input gas flow parameters and output gas flow parameters of the lamp chamber side protective device 11 , and the lighting side protective device is adjusted according to the input gas flow parameters and output gas flow parameters of the lighting side protective device 12 12 structure.

In step S2, the key design elements of the lamp room side protection device 11 and the lighting side protection device 12 are similar, but the key design items are different. Since there is an isolation baffle 114 on the lamp chamber side protection device 11 , the lamp chamber side protection device 11 has a stronger ability to resist lateral disturbance at low flow rates than the lighting side protection device 12 due to the presence of the isolation baffle 114 . Therefore, the design focus of the lamp chamber side protection device 11 is to form an air protective layer with effective surface laminar flow protection under slow flow conditions. Adjusting the structure of the lamp chamber side protection device 11 according to the gas flow specifically includes the following steps: Adjust the width of the first gap according to the input gas flow parameter and the output gas flow parameter; and Adjust the flow guide angles of the first guide plate 115 and the second guide plate 116 so that the output gas covers the second surface of the optical glass 14 .

The adjustment of the width of the first gap according to the input gas flow parameter and the output gas flow parameter specifically includes: adjusting the first gap width between the first guide plate 115 and the second guide plate 116 according to the gas flow rate, The flow rate of the homogenized gas is stabilized at the first set value. The first setting value is the output gas flow parameter.

For example, under the constraint of 15L/min intake air flow, first adjust the gap width between the first baffle 115 and the second baffle 116 to 2mm (the value after simulation optimization), so that the outlet air flow rate after homogenization (output The gas flow rate) is stable at about 0.3m/s (the pollutant diffusion speed is set to 0.1m/s). Then adjust the flow guide angle of the second guide plate 116 (that is, the included angle θ) to 81° (the value after simulation optimization), and match the air outlet angle of the first guide plate 115 (that is, the included angle β) to 62°. (value after simulation optimization), so that the slow outflow airflow can effectively cover the second surface of the optical glass 14 .

The design of the lighting side protection device 12 is different from that of the lamp room side protection device 11. The external flow field of the lighting side protection device 12 has a large lateral disturbance due to the presence of an exhaust cooling device. Therefore, the lighting side protection device 12 needs to strengthen the design of the outlet air flow rate to form a high-speed outlet air flow after homogenization. Adjusting the structure of the lighting side protection device 12 according to the gas flow specifically includes the following steps: Adjust the width of the second gap according to the input gas flow parameter and the output gas flow parameter; and Adjust the angle of the illumination side airflow equalizing baffle 124 so that the output gas covers the first surface of the optical glass 14 .

The adjustment of the width of the second gap according to the input gas flow parameter and the output gas flow parameter specifically includes: adjusting the gap width between the lighting side airflow homogenizing baffle 124 and the lighting side cover 15 according to the gas flow parameter, The flow rate of the homogenized gas is stabilized at the second set value. The second set value is the output gas flow parameter.

For example, after simulation analysis, under the constraint of 25L/min intake air flow, the gap width between the lighting side airflow equalization baffle 124 and the lighting side cover 15 is locked to 1.5mm (the value after simulation optimization), so that the outlet air flow rate ( The output gas flow rate) is set to about 0.8m/s. And by adjusting the angle of the lighting side airflow homogenizing baffle 124 (ie, the included angle α) to 45° (the value after simulation optimization), the high-speed airflow can also fully cover the first surface of the optical glass 14. In the lighting protection device, the lighting side cover 15 has a flow guiding angle of 90°, that is, there is no flow guiding effect toward the surface of the optical glass 14 . This is mainly because the air outlet flow rate of the illumination side protective device 12 is relatively large, and it can fully cover the first surface of the optical glass 14 without adjusting the flow guide angle.

The main design parameters of this embodiment are the lamp chamber side airflow equalization baffle 118, the lighting side airflow equalization baffle 124, the first guide plate 115 and the second guide plate 116. Specifically, they are the flow guide change angle of the first guide plate 115 and the second guide plate 116, the height and angle of the lamp chamber side airflow equalization baffle 118 and the lighting side airflow equalization baffle 124, etc. Through simulation optimization analysis, the specific structure of the anti-pollution device that can effectively cover the surface of the optical glass 14 that needs to be protected in a limited space (7mm~10mm) and under different high and low airflow conditions is derived.

The present invention detects the pollution protection of the optical glass 14 under different air inlet flow rates of the anti-pollution device 1 and the presence or absence of lateral disturbance. That is, under the condition that the air inlet flow of the lighting side protective device 12 is 15L/min and the air inlet flow of the lighting side protective device 12 is 25L/min and with or without lateral disturbance, the surface contamination of the optical glass 14 to be protected can be controlled. below 0.5%. Therefore, the anti-pollution device 1 has effective pollution protection under simulation analysis; and the protection device is effective under limited space and chaotic disturbance.

Secondly, the present invention also found no tendency to contaminate the surface of the test paper through the 4-hour continuous anti-pollution effectiveness verification test. Moreover, the anti-pollution device 1 provided by the present invention has been verified by 5 machines operating in different environments, proving that it can effectively prevent the contamination of the optical glass 14 within a 6-month period and avoid the mercury lamp illumination due to surface contamination of the optical glass 14 Acceleration is reduced.

In summary, it can be seen that the present invention can form a uniform airflow field on both sides of the optical glass through the dual-flow channel structural design of the lighting side protective device and the single-flow channel structural design of the lamp chamber side protective device, thereby achieving the goal of protecting both sides of the optical glass. Provide protection to meet the exposure quality of the lithography equipment under long-term operation.

Secondly, in the present invention, non-uniformly distributed lamp chamber side air outlets are provided on the lamp chamber side inner circulation channel and a lamp chamber side airflow equalizing baffle is provided close to the lamp chamber side air inlet. Non-uniformly distributed lighting side air outlets are provided on the circulating flow channel and the lighting side outer circulation channel, which can help to achieve a uniform distribution of flow rates inside the lamp chamber side and the lighting side, ensuring a uniform air flow on the surfaces on both sides of the optical glass. field, and forms an air protective layer that can effectively resist lateral disturbance and prevent pollutants from contaminating the optical glass surface.

Moreover, the present invention can enhance the ability to resist lateral disturbance at low flow rates on the lamp chamber side by arranging an isolation baffle on the lamp chamber side protection device.

Furthermore, the present invention provides a first guide plate and a second guide plate on the lamp chamber side protection device, and adjusts the gap width between the first guide plate and the second guide plate and the first guide plate. The guide angle of the plate, combined with the angle of the gas outlet of the second guide plate, allows the slow outflow airflow to fully cover the first surface of the optical glass. By arranging the lighting side airflow homogenizing baffle on the lighting side protection device, and by adjusting the gap width between the lighting side airflow homogenizing baffle and the cover plate and the angle of the lighting side airflow homogenizing baffle, the high-speed airflow can be Fully cover the first surface of the optical glass.

In addition, by extracting key component structures and design parameters, the present invention designs an anti-pollution device that can provide effective protection in a limited space, improves the imaging quality of optical glass, and can be effectively extended to the design of anti-pollution devices in different limited spaces. middle.

In addition, the present invention also provides a photolithography machine, including an optical element for illuminating a lamp chamber. The optical element includes an adapter ring, optical glass, and the anti-pollution device for illuminating the lamp chamber in the above embodiment. device, the optical glass is fixed in the anti-pollution device through the adapter ring.

The lithography machine of the present invention adopts the anti-pollution device in the above embodiment, which can protect both sides of the optical glass and prevent pollutants from contaminating the surface of the optical glass, thus satisfying the exposure quality of the lithography machine under long-term operation.

It can be understood that although the present invention has been disclosed above in preferred embodiments, the above embodiments are not intended to limit the present invention. For any person familiar with the technical field of the present invention, without departing from the scope of the technical solution of the present invention, he or she can make many possible changes and modifications to the technical solution of the present invention using the technical content disclosed above, or modify it to be equivalent. Varied equivalent embodiments. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the protection scope of the technical solution of the present invention.

Furthermore, it is to be understood that this invention is not limited to the particular methods, compounds, materials, manufacturing techniques, uses and applications described herein, as they may vary. It should also be understood that the terminology described herein is used only to describe particular embodiments and is not intended to limit the scope of the invention. It must be noted that, as used herein and in the appended claims, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates a contrary meaning. Thus, for example, a reference to "a step" means a reference to one or more steps, and may include secondary steps. All conjunctions used should be understood in their broadest sense. Accordingly, the word "or" should be understood to have the definition of a logical "or" and not a logical "exclusive-or" unless the context clearly indicates the contrary. Structures described herein will be understood to also recite functional equivalents of that structure. Language that may be construed as approximate should be construed as such unless the context clearly indicates a contrary meaning.

1: Anti-pollution device 11:Lamp room side protection device 111: Lamp room side air inlet 112: Circulation channel inside the lamp chamber side 1121: Air outlet on the side of the lamp house 113: Powder cleaning hole on the side of the lamp chamber 114:Isolation baffle 115: First deflector 1151: First diversion surface 116:Second deflector 1161: Second diversion surface 118: Airflow equalization baffle on the side of the lamp room 12: Lighting side protection device 121: Lighting side air inlet 122: Inner circulation channel on lighting side 1221: Lighting side inner air outlet 123: Illumination side outer circulation channel 1231: Lighting side vent 124: Lighting side airflow equalization baffle 1241:Third diversion surface 1242: Homogenization surface 125: Lighting side clearing hole 13:Adapter ring 14:Optical glass 15: Lighting side cover

Figure 1 is a schematic structural diagram of an anti-pollution device for lighting a lamp room in an embodiment of the present invention; 2 to 4 are structural schematic diagrams of corresponding structures in an anti-pollution device for lighting a lamp room in an embodiment of the present invention; Figure 5 is a side view of an anti-pollution device for lighting a lamp room in an embodiment of the present invention; 6 to 8 are schematic structural diagrams of a lighting side protection device in an embodiment of the present invention; Figure 9 is a cross-sectional view of an anti-pollution device for lighting a lamp room in an embodiment of the present invention; Figure 10 is a structural diagram of area B in the anti-pollution device in Figure 9; Figures 11a to 11c are structural schematic diagrams of different lighting side airflow homogenizing baffle arrangements in an embodiment of the present invention; Figures 12 to 13 are schematic structural diagrams of a lamp chamber side protection device in an embodiment of the present invention; Figure 14 is a structural diagram of area A in the anti-pollution device in Figure 9; Figures 15a to 15c are structural schematic diagrams of different second baffle arrangements in an embodiment of the present invention; and FIG. 16 is a schematic diagram of the internal gas flow of an anti-pollution device for lighting a lamp room in an embodiment of the present invention.

11:Lamp room side protection device

112: Circulation channel inside the lamp chamber side

114:Isolation baffle

115: First deflector

116:Second deflector

122: Inner circulation channel on lighting side

123: Illumination side outer circulation channel

124: Lighting side airflow equalization baffle

15: Lighting side cover

Claims (16)

An anti-pollution device for lighting lamp rooms, wherein the anti-pollution device includes: An illumination-side protective device, which is configured as a double flow channel structure and is used to uniformize the flow rate of the gas flowing into the illumination-side protective device to form an air protective layer on a first surface of an optical glass; and A lamp chamber side protective device, which is configured as a single flow channel structure and is used to uniformize the flow rate of the gas flowing into the lamp chamber side protective device to form the air protective layer on a second surface of the optical glass, The optical glass is disposed between the lamp chamber side protective device and the lighting side protective device. The anti-pollution device for lighting lamp rooms as described in claim 1, wherein the lamp room side protection device includes: a lamp room side inner circulation flow channel, a lamp room side air inlet and a lamp room side air outlet , the gas output from the lamp chamber side air inlet passes through the lamp chamber side inner circulation channel to the second surface of the optical glass, and flows back through the second surface of the optical glass to the lamp chamber side air outlet, The lamp chamber side inner circulation channel is provided with a plurality of non-uniformly distributed air outlets, and gas flows to the second surface of the optical glass through the plurality of air outlets in the lamp chamber side inner circulation channel. The anti-pollution device for lighting a lamp house as claimed in claim 2, wherein the direction of the air inlet on the side of the lamp house is perpendicular to the direction of the optical axis of the optical glass. The anti-pollution device for a lighting lamp room as described in claim 2, wherein the lamp room side protection device further includes a lamp room side airflow equalizing baffle, and the lamp room side airflow equalizing baffle is in contact with the lamp. The chamber side air inlets are arranged oppositely, and the gas output from the lamp chamber side air inlet is homogenized by the lamp chamber side airflow homogenizing baffle. The anti-pollution device for lighting lamp rooms as claimed in claim 2, wherein the lamp room side protection device further includes a first guide plate and a second guide plate, and the first guide plate and the third guide plate The two baffles are disposed close to the plurality of air outlets of the circulation channel on the inner side of the lamp chamber. There is a first gap between the first baffle and the second baffle. The inner side of the lamp chamber The gas output from the circulation flow channel passes through the first gap to the second surface of the optical glass. The anti-pollution device for a lighting lamp room as claimed in claim 5, wherein the width of the first gap is no greater than 3 mm. The anti-pollution device for lighting lamp rooms as claimed in claim 5, wherein the first guide plate has a first guide surface for guiding gas, and the second guide plate has a first guide surface for guiding gas. A second flow guide surface for gas, and by adjusting the angle β between the first flow guide surface and the direction perpendicular to the optical axis of the optical glass and pointing toward the center along the edge of the optical glass and/or the second flow guide surface The direction of gas flow is changed by an angle θ between the optical glass and the optical axis direction of the illumination side protection device pointing to the lamp chamber side protection device. The included angle β ranges from 45° to 90°; the included angle θ The range is 75°～86°. The anti-pollution device for lighting lamp rooms as claimed in claim 2, wherein the lamp room side protection device further includes an isolation baffle, and the isolation baffle is disposed between the lamp room side protection device and an external device structure Contact location. The anti-pollution device for a lighting lamp room as claimed in claim 1, wherein the lighting side protection device includes: a lighting side air inlet, a lighting side air outlet, a lighting side inner circulation channel and a lighting side The gas output from the lighting side air inlet sequentially passes through the lighting side outer circulation channel and the lighting side inner circulation channel to the first surface of the optical glass, and passes through the first surface of the optical glass. The surface flows back to the lighting side air outlet. The lighting side inner circulation channel and the lighting side outer circulation channel are both provided with a plurality of non-uniformly distributed air outlets. The gas passes through the lighting side in the lighting side outer circulation channel. The plurality of air outlets of the outer circulation channel flow into the illumination-side inner circulation channel, and flow to the first surface of the optical glass through the plurality of air outlets of the illumination-side inner circulation channel. The anti-pollution device for a lighting lamp room as claimed in claim 9, wherein the direction of the lighting side air inlet is perpendicular to the direction of the optical axis of the optical glass. The anti-pollution device for a lighting lamp room as claimed in claim 9, wherein the anti-pollution device further includes a lighting side cover, the lighting side protection device further includes a lighting side airflow equalizing baffle, the lighting side The cover plate is connected to an end of the lighting side protection device away from the lamp chamber side protection device. The lighting side airflow equalizing baffle is disposed close to the air outlet of the lighting side inner circulation channel, and the lighting side airflow is uniform. There is a second gap between the baffle and the lighting side cover, and the gas output from the lighting side inner circulation channel passes through the second gap to the first surface of the optical glass. The anti-pollution device for a lighting lamp room as claimed in claim 11, wherein the width of the second gap is no greater than 2.5 mm. The anti-pollution device for a lighting lamp room as claimed in claim 11, wherein the illumination side air flow equalization baffle includes a leveling surface for gas leveling and a gas guiding surface opposite to the leveling surface. A third guide surface of the flow, and the gas guide direction is changed by adjusting the angle α between the third guide surface and the direction perpendicular to the optical axis of the optical glass and along the center of the optical glass pointing to the edge, The included angle α ranges from 40° to 50°. A lithography machine, which includes an optical element for illuminating a lamp chamber, the optical element including an adapter ring, optical glass, and an anti-pollution device for illuminating a lamp chamber as described in any one of claims 1 to 13 , the optical glass is fixed in the anti-pollution device through the adapter ring. A design method for an anti-pollution device for a lighting lamp room, applied to the anti-pollution device for a lighting lamp room as described in any one of claims 1 to 13, which includes the following steps: setting an input gas flow parameter and an output gas flow parameter; and According to the input gas flow parameter and the output gas flow parameter, the structure of the lighting side protection device with the double flow channel structure and the structure of the lamp room side protection device with the single flow channel structure are adjusted. The lighting side protection device and the The lamp house side protective device structure constitutes the anti-pollution device. The design method of an anti-pollution device for a lighting lamp room as described in claim 15, wherein the lamp room side protection device having the single flow channel structure is adjusted according to the input gas flow parameter and the output gas flow parameter. The structure includes the following steps: Adjust the width of the first gap according to the input gas flow parameter and the output gas flow parameter; Adjust the flow guide angle of the first guide plate and the second guide plate so that the output gas covers the second surface of the optical glass; and/or The adjustment of the structure of the lighting side protection device with the dual flow channel structure according to the input gas flow parameter and the output gas flow parameter includes the following steps: Adjust the width of the second gap according to the input gas flow parameter and the output gas flow parameter; Adjust the angle of the illumination side airflow equalizing baffle so that the output gas covers the first surface of the optical glass.