TW202401023A - Pins detection system for multi-pins chip and method thereof - Google Patents

Pins detection system for multi-pins chip and method thereof Download PDF

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TW202401023A
TW202401023A TW111122586A TW111122586A TW202401023A TW 202401023 A TW202401023 A TW 202401023A TW 111122586 A TW111122586 A TW 111122586A TW 111122586 A TW111122586 A TW 111122586A TW 202401023 A TW202401023 A TW 202401023A
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detection
chip
pin
tested
jtag
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TW111122586A
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趙晉東
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英業達股份有限公司
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A Pins detection system for multi-pins chip and a method thereof are provided. A chip detection circuit board with test circuit, to-be-tested chip fixture, test chip and JTAG port is provided. Each pin of test chip are electrical connection to each pin of to-be-tested chip fixture respectively. JTAG port, test chip and to-be-tested chip fixture are connected in series through test circuit to form JTAG link. Detection device, JTAG controller and chip detection circuit board are connected in series. Detection signal is generated by detection device through JTAG controller to detect each pin of to-be-tested chip on chip detection circuit board and feedback detection result to detection device to complete detection of pin of to-be-detected chip. Therefore, the efficiency of providing convenient and fast functional detection of the pins of multi-pins chip may be achieved.

Description

適用於多腳位晶片的腳位檢測系統及其方法Pin detection system and method applicable to multi-pin chips

一種檢測系統及其方法,尤其是指一種提供JTAG連接埠、檢測用晶片與待測試晶片夾具透過檢測電路串接以構成JTAG鏈路的晶片檢測電路板,檢測裝置透過JTAG控制器對晶片檢測電路板的待檢測晶片進行腳位檢測的適用於多腳位晶片的腳位檢測系統及其方法。A detection system and method thereof, in particular, a chip detection circuit board that provides a JTAG connection port, a detection chip and a chip fixture to be tested are connected in series through a detection circuit to form a JTAG link. The detection device detects the chip detection circuit through a JTAG controller. A pin detection system and method suitable for multi-pin chips that perform pin detection on the chip to be detected on the board.

現有對於複雜的多腳位晶片的檢測,除了對晶片的外觀、錫球氧化…等對其進行品質確認之外,更需要對複雜的多腳位晶片進行功能檢測,複雜的多腳位晶片進行功能檢測一般是使用小批量打樣方式以測算良率,現有的檢測方式具有檢測成本較高、檢測週期較長以及檢測方式複雜不便批量化檢測的問題。The current inspection of complex multi-pin chips requires, in addition to quality assurance on the appearance of the chip, solder ball oxidation, etc., it is also necessary to conduct functional testing on complex multi-pin chips. Functional testing generally uses small-batch sampling to measure yield. Existing testing methods have problems such as high testing costs, long testing cycles, and complex testing methods that are inconvenient for batch testing.

綜上所述,可知先前技術中長期以來一直存在現有對於複雜的多腳位晶片檢測具有檢測成本較高、檢測週期較長以及檢測方式複雜不便批量化檢測的問題,因此有必要提出改進的技術手段,來解決此一問題。To sum up, it can be seen that there have long been problems in the previous technology that for complex multi-pin chip inspection, the inspection cost is high, the inspection period is long, and the inspection method is complex and inconvenient for batch inspection. Therefore, it is necessary to propose improved technology. means to solve this problem.

有鑒於先前技術存在現有對於複雜的多腳位晶片檢測具有檢測成本較高、檢測週期較長以及檢測方式複雜不便批量化檢測的問題,本發明遂揭露一種適用於多腳位晶片的腳位檢測系統及其方法,其中:In view of the existing problems in the prior art that the detection cost of complex multi-pin wafers is high, the detection cycle is long, and the detection method is complex and inconvenient for batch testing, the present invention discloses a pin detection method suitable for multi-pin wafers. System and method thereof, wherein:

本發明所揭露的適用於多腳位晶片的腳位檢測系統,其包含:晶片檢測電路板、聯合測試工作群組(Joint Test Action Group,JTAG)控制器以及檢測裝置,晶片檢測電路板更包含:待測試晶片夾具、檢測用晶片以及JTAG連接埠。The pin detection system disclosed by the present invention and suitable for multi-pin chips includes: a chip detection circuit board, a Joint Test Action Group (JTAG) controller and a detection device. The chip detection circuit board further includes : The chip fixture to be tested, the chip for detection and the JTAG connection port.

晶片檢測電路板具有檢測電路,晶片檢測電路板的待測試晶片夾具與檢測電路形成電性連接,待測試晶片夾具提供待檢測晶片夾持固定;檢測用晶片與檢測電路形成電性連接,檢測用晶片的每一個腳位分別與待測試晶片夾具對應的每一個腳位透過檢測電路彼此形成電性連接; 其中,JTAG連接埠、檢測用晶片與待測試晶片夾具透過所述檢測電路串接以構成JTAG鏈路。The wafer detection circuit board has a detection circuit. The wafer to be tested clamp of the wafer detection circuit board is electrically connected to the detection circuit. The wafer to be tested clamp provides clamping and fixation of the wafer to be detected. The detection wafer is electrically connected to the detection circuit. Each pin of the chip and each pin corresponding to the chip fixture to be tested are electrically connected to each other through the detection circuit; wherein, the JTAG connection port, the detection chip and the chip fixture to be tested are connected in series through the detection circuit to form a JTAG link.

JTAG控制器與JTAG連接埠形成電性連接;檢測裝置與JTAG控制器形成電性連接,檢測裝置生成檢測訊號;其中,檢測裝置發送檢測訊號至JTAG控制器,JTAG控制器發送檢測訊號至晶片檢測電路板,晶片檢測電路板依據檢測訊號對待檢測晶片的每一個腳位分別進行檢測並反饋檢測結果回檢測裝置以完成待檢測晶片腳位的檢測。The JTAG controller forms an electrical connection with the JTAG connection port; the detection device forms an electrical connection with the JTAG controller, and the detection device generates a detection signal; wherein, the detection device sends a detection signal to the JTAG controller, and the JTAG controller sends a detection signal to the chip detection Circuit board, chip detection The circuit board detects each pin of the chip to be detected based on the detection signal and feeds back the detection results to the detection device to complete the detection of the pins of the chip to be detected.

本發明所揭露的適用於多腳位晶片的腳位檢測方法,其包含下列步驟:The pin detection method disclosed in the present invention and suitable for multi-pin chips includes the following steps:

首先,提供具有檢測電路、待測試晶片夾具、檢測用晶片以及JTAG連接埠的晶片檢測電路板;接著,待測試晶片夾具與檢測電路形成電性連接,待測試晶片夾具提供待檢測晶片夾持固定;接著,檢測用晶片與檢測電路形成電性連接,檢測用晶片的每一個腳位分別與待測試晶片夾具對應的每一個腳位透過檢測電路彼此形成電性連接;接著,JTAG連接埠、檢測用晶片與待測試晶片夾具透過檢測電路串接以構成JTAG鏈路;接著,JTAG控制器與JTAG連接埠形成電性連接;接著,檢測裝置與JTAG控制器形成電性連接,檢測裝置生成檢測訊號;最後,檢測裝置發送檢測訊號至JTAG控制器,JTAG控制器發送檢測訊號至晶片檢測電路板,晶片檢測電路板依據檢測訊號對待檢測晶片的每一個腳位分別進行檢測並反饋檢測結果回檢測裝置以完成待檢測晶片腳位的檢測。First, a wafer detection circuit board with a detection circuit, a wafer clamp to be tested, a wafer for detection, and a JTAG connection port is provided; then, the wafer to be tested clamp is electrically connected to the detection circuit, and the wafer to be tested clamp provides clamping and fixation of the wafer to be detected. ; Then, the detection chip is electrically connected to the detection circuit, and each pin of the detection chip and each pin corresponding to the chip fixture to be tested are electrically connected to each other through the detection circuit; then, the JTAG connection port, detection The chip and the chip fixture to be tested are connected in series through the detection circuit to form a JTAG link; then, the JTAG controller forms an electrical connection with the JTAG connection port; then, the detection device forms an electrical connection with the JTAG controller, and the detection device generates a detection signal ; Finally, the detection device sends the detection signal to the JTAG controller, and the JTAG controller sends the detection signal to the chip detection circuit board. The chip detection circuit board detects each pin of the chip to be detected based on the detection signal and feeds back the detection results to the detection device. To complete the detection of the chip pins to be detected.

本發明所揭露的系統及方法如上,與先前技術之間的差異在於提供具有檢測電路、待測試晶片夾具、檢測用晶片以及JTAG連接埠的晶片檢測電路板,檢測用晶片的每一個腳位分別與待測試晶片夾具對應的每一個腳位透過檢測電路彼此形成電性連接,JTAG連接埠、檢測用晶片與待測試晶片夾具透過檢測電路串接以構成JTAG鏈路,檢測裝置、JTAG控制器與晶片檢測電路板形成串接,檢測裝置生成檢測訊號透過JTAG控制器對晶片檢測電路板的待檢測晶片的每一個腳位分別進行檢測並反饋檢測結果回檢測裝置以完成待檢測晶片腳位的檢測。The system and method disclosed by the present invention are as described above. The difference between the system and the prior art is that it provides a chip detection circuit board with a detection circuit, a chip fixture to be tested, a detection chip and a JTAG connection port. Each pin of the detection chip is separately Each pin corresponding to the chip fixture under test is electrically connected to each other through the detection circuit. The JTAG connection port, the chip for detection and the chip fixture under test are connected in series through the detection circuit to form a JTAG link. The detection device, JTAG controller and The chip detection circuit board forms a series connection, and the detection device generates detection signals through the JTAG controller to detect each pin of the chip to be detected on the chip detection circuit board and feeds back the detection results to the detection device to complete the detection of the pins of the chip to be detected. .

透過上述的技術手段,本發明可以達成提供方便且快速對多腳位晶片的腳位進行功能檢測的技術功效。Through the above technical means, the present invention can achieve the technical effect of providing convenient and rapid functional testing of the pins of a multi-pin chip.

以下將配合圖式及實施例來詳細說明本發明的實施方式,藉此對本發明如何應用技術手段來解決技術問題並達成技術功效的實現過程能充分理解並據以實施。The embodiments of the present invention will be described in detail below with reference to the drawings and examples, so that the implementation process of how to apply technical means to solve technical problems and achieve technical effects of the present invention can be fully understood and implemented accordingly.

以下首先要說明本發明所揭露的適用於多腳位晶片的腳位檢測系統,並請參考「第1圖」所示,「第1圖」繪示為本發明適用於多腳位晶片的腳位檢測系統的系統方塊圖。The following will first describe the pin detection system disclosed in the present invention suitable for multi-pin chips, and please refer to "Figure 1". "Figure 1" illustrates the pin detection system of the present invention suitable for multi-pin chips. System block diagram of bit detection system.

本發明所揭露的適用於多腳位晶片的腳位檢測系統,其包含:晶片檢測電路板10、JTAG控制器20以及檢測裝置30,晶片檢測電路板10更包含:待測試晶片夾具11、檢測用晶片12以及JTAG連接埠13。The pin detection system disclosed by the present invention and suitable for multi-pin chips includes: a chip detection circuit board 10, a JTAG controller 20 and a detection device 30. The chip detection circuit board 10 further includes: a wafer to be tested fixture 11, a detection device Use chip 12 and JTAG port 13.

晶片檢測電路板10具有檢測電路,晶片檢測電路板10的待測試晶片夾具11與檢測電路形成電性連接,待測試晶片夾具11提供待檢測晶片夾持固定,待測試晶片夾具11請參考「第2圖」所示,「第2圖」繪示為本發明適用於多腳位晶片的腳位檢測的待測試晶片夾具立體圖。The wafer detection circuit board 10 has a detection circuit. The wafer to be tested clamp 11 of the wafer detection circuit board 10 is electrically connected to the detection circuit. The wafer to be tested clamp 11 provides clamping and fixation of the wafer to be detected. Please refer to "Chapter 11" for the wafer to be tested clamp 11. As shown in Figure 2, Figure 2 is a three-dimensional view of the chip clamp under test suitable for pin position detection of multi-pin chips according to the present invention.

檢測用晶片12與檢測電路形成電性連接,檢測用晶片12的每一個腳位分別與待測試晶片夾具11對應的每一個腳位透過檢測電路彼此形成電性連接,當待檢測晶片夾持固定於待測試晶片夾具11中時,檢測用晶片12的每一個腳位即可分別與待檢測晶片對應的每一個腳位透過檢測電路彼此形成電性連接,值得注意的是,待測試晶片夾具11夾持固定的待測試晶片與檢測用晶片12為相同的晶片。The detection chip 12 is electrically connected to the detection circuit. Each pin of the detection chip 12 and each pin corresponding to the wafer clamp 11 to be tested are electrically connected to each other through the detection circuit. When the wafer to be detected is clamped and fixed, When the chip to be tested is in the fixture 11, each pin of the chip for testing 12 can be electrically connected to each other through the detection circuit with each pin of the chip to be tested. It is worth noting that the chip fixture 11 for the chip to be tested is The clamped and fixed wafer to be tested and the detection wafer 12 are the same wafer.

請參考「第3圖」所示,「第3圖」繪示為本發明適用於多腳位晶片的腳位檢測的JTAG鏈路圖。Please refer to "Figure 3", which is a JTAG link diagram suitable for pin detection of multi-pin chips according to the present invention.

待測試晶片夾具11依據被夾持固定的待測試晶片定義有測試資料輸入(Test Data Input,TDI)腳位、測試資料輸出(Test Data Output,TDO)腳位、測試時鐘(Test Clock,TCK)腳位以及測試模式選擇(Test Mode Select,TMS)腳位;檢測用晶片12亦定義有TDI腳位、TDO腳位、TCK腳位以及TMS腳位;JTAG連接埠13亦定義有TDI腳位、TDO腳位、TCK腳位以及TMS腳位。The wafer to be tested fixture 11 defines a test data input (TDI) pin, a test data output (TDO) pin, and a test clock (Test Clock, TCK) according to the clamped and fixed wafer to be tested. pins and Test Mode Select (TMS) pins; the detection chip 12 also defines TDI pins, TDO pins, TCK pins and TMS pins; the JTAG connection port 13 also defines TDI pins, TDO pin, TCK pin and TMS pin.

待測試晶片夾具11的TCK腳位、檢測用晶片12的TCK腳位以及JTAG連接埠13的TCK腳位彼此相連;待測試晶片夾具11的TMS腳位、檢測用晶片12的TMS腳位以及JTAG連接埠13的TMS腳位彼此相連。The TCK pins of the chip fixture 11 to be tested, the TCK pins of the detection chip 12 and the TCK pins of the JTAG connection port 13 are connected to each other; the TMS pins of the chip fixture 11 to be tested, the TMS pins of the detection chip 12 and JTAG The TMS pins of port 13 are connected to each other.

JTAG連接埠13的TDI腳位與檢測用晶片12的TDI腳位相連,檢測用晶片12的TDO腳位與待測試晶片夾具11的TDI腳位相連,待測試晶片夾具11的TDO腳位與JTAG連接埠13的TDO腳位相連The TDI pin of the JTAG connection port 13 is connected to the TDI pin of the detection chip 12. The TDO pin of the detection chip 12 is connected to the TDI pin of the chip fixture 11 to be tested. The TDO pin of the chip fixture 11 to be tested is connected to the JTAG Connect to the TDO pin of port 13

,藉此JTAG連接埠13、檢測用晶片12與待測試晶片夾具11即可透過檢測電路串接以構成JTAG鏈路。, whereby the JTAG connection port 13, the detection chip 12 and the chip fixture 11 to be tested can be connected in series through the detection circuit to form a JTAG link.

JTAG控制器20更包含JTAG連接埠21以及通用序列匯流排(Universal Serial Bus,USB)連接埠22,檢測裝置30更包含USB連接埠31,JTAG控制器20的JTAG連接埠21與晶片檢測電路板10的JTAG連接埠13透過JTAG連接線形成電性連接,檢測裝置30的USB連接埠31與JTAG控制器20的USB連接埠22透過USB連接線形成電性連接,前述的檢測裝置30例如是一般電腦、筆記型電腦…等,在此僅為舉例說明之,並不以此侷限本發明的應用範疇。The JTAG controller 20 further includes a JTAG connection port 21 and a Universal Serial Bus (USB) connection port 22. The detection device 30 further includes a USB connection port 31, the JTAG connection port 21 of the JTAG controller 20 and the chip detection circuit board. The JTAG connection port 13 of 10 is electrically connected through a JTAG connection cable, and the USB connection port 31 of the detection device 30 and the USB connection port 22 of the JTAG controller 20 are electrically connected through a USB connection cable. The aforementioned detection device 30 is, for example, a general Computers, notebook computers, etc. are only used as examples and do not limit the application scope of the present invention.

請參考「第4圖」所示,「第4圖」繪示為本發明適用於多腳位晶片的腳位檢測的待檢測晶片腳位檢測示意圖。Please refer to "Figure 4", which is a schematic diagram of the pin detection of the chip to be detected when the present invention is suitable for the pin detection of multi-pin chips.

檢測裝置30生成檢測訊號並發送至JTAG控制器20,JTAG控制器20即可將檢測訊號轉換為適用於邊界掃描(Boundary Scan,BS)檢測的JTAG格式檢測訊號,JTAG控制器20再將轉換後的檢測訊號發送至晶片檢測電路板10,晶片檢測電路板10即可依據檢測訊號對待檢測晶片的每一個腳位分別進行檢測並反饋檢測結果回檢測裝置以完成待檢測晶片腳位的檢測。The detection device 30 generates a detection signal and sends it to the JTAG controller 20. The JTAG controller 20 can convert the detection signal into a JTAG format detection signal suitable for boundary scan (Boundary Scan, BS) detection. The JTAG controller 20 then converts the converted signal into a detection signal. The detection signal is sent to the chip detection circuit board 10. The chip detection circuit board 10 can detect each pin of the chip to be detected based on the detection signal and feed back the detection results to the detection device to complete the detection of the pins of the chip to be detected.

如「第4圖」所示,檢測用晶片12的第一腳位121的檢測訊號為“0101”,待檢測晶片14的第一腳位141經過檢測的檢測結果為“0101”,檢測裝置30收到待檢測晶片14的第一腳位141所反饋的檢測結果為“0101”與檢測訊號為“0101”相比發現相同,即待檢測晶片14的第一腳位141為正常。As shown in "Figure 4", the detection signal of the first pin 121 of the detection chip 12 is "0101", and the detection result of the first pin 141 of the chip 14 to be detected is "0101". The detection device 30 The detection result received as feedback from the first pin 141 of the chip 14 to be tested is “0101” and the detection signal is “0101” and it is found to be the same, that is, the first pin 141 of the chip 14 to be tested is normal.

如「第4圖」所示,檢測用晶片12的第二腳位122的檢測訊號為“1010”,待檢測晶片14的第二腳位142經過檢測的檢測結果為“1111”,檢測裝置30收到待檢測晶片14的第二腳位142所反饋的檢測結果為“1111”未受到檢測訊號為“1010”的影響,即待檢測晶片14的第二腳位142的檢測結果為開路異常。As shown in "Figure 4", the detection signal of the second pin 122 of the detection chip 12 is "1010", and the detection result of the second pin 142 of the chip 14 to be detected is "1111". The detection device 30 The detection result feedback received from the second pin 142 of the chip 14 to be detected is "1111" and is not affected by the detection signal "1010", that is, the detection result of the second pin 142 of the chip 14 to be detected is an open circuit abnormality.

如「第4圖」所示,檢測用晶片12的第三腳位123的檢測訊號為“1010”以及檢測用晶片12的第四腳位124的檢測訊號為“1011”,待檢測晶片14的第三腳位143經過檢測的檢測結果為“1011”以及待檢測晶片14的第四腳位144經過檢測的檢測結果為“1011”,檢測裝置30收到待檢測晶片14的第三腳位143以及第四腳位144所反饋的檢測結果分別為“1011”以及“1011”。As shown in "Figure 4", the detection signal of the third pin 123 of the detection chip 12 is "1010" and the detection signal of the fourth pin 124 of the detection chip 12 is "1011". The detection signal of the chip 14 to be detected is The detection result of the third pin 143 is “1011” and the detection result of the fourth pin 144 of the wafer 14 to be detected is “1011”. The detection device 30 receives the third pin 143 of the wafer 14 to be detected. And the detection results fed back by the fourth pin 144 are “1011” and “1011” respectively.

由於待檢測晶片14的第三腳位143以及第四腳位144進行檢測的檢測訊號分別為“1010”以及“1011”,而待檢測晶片14的第三腳位143以及第四腳位144所反饋的檢測結果分別為“1011”以及“1011”,檢測裝置30即可檢測出待檢測晶片14的第三腳位143以及第四腳位144的檢測結果為短路異常。Since the detection signals detected by the third pin 143 and the fourth pin 144 of the chip 14 to be detected are “1010” and “1011” respectively, and the third pin 143 and the fourth pin 144 of the chip 14 to be detected are The feedback detection results are "1011" and "1011" respectively, and the detection device 30 can detect that the detection results of the third pin 143 and the fourth pin 144 of the chip 14 to be detected are short circuit abnormalities.

接著,以下將以說明本發明的運作方法,並請同時參考「第5圖」所示,「第5圖」繪示為本發明適用於多腳位晶片的腳位檢測方法的方法流程圖。Next, the operation method of the present invention will be described below, and please refer to "Fig. 5". "Fig. 5" is a flow chart of a pin detection method suitable for multi-pin chips according to the present invention.

本發明所揭露的適用於多腳位晶片的腳位檢測方法,其包含下列步驟:The pin detection method disclosed in the present invention and suitable for multi-pin chips includes the following steps:

首先,提供具有檢測電路、待測試晶片夾具、檢測用晶片以及JTAG連接埠的晶片檢測電路板(步驟101);接著,待測試晶片夾具與檢測電路形成電性連接,待測試晶片夾具提供待檢測晶片夾持固定(步驟102);接著,檢測用晶片與檢測電路形成電性連接,檢測用晶片的每一個腳位分別與待測試晶片夾具對應的每一個腳位透過檢測電路彼此形成電性連接(步驟103);接著,JTAG連接埠、檢測用晶片與待測試晶片夾具透過檢測電路串接以構成JTAG鏈路(步驟104);接著,JTAG控制器與JTAG連接埠形成電性連接(步驟105);接著,檢測裝置與JTAG控制器形成電性連接,檢測裝置生成檢測訊號(步驟106);最後,檢測裝置發送檢測訊號至JTAG控制器,JTAG控制器發送檢測訊號至晶片檢測電路板,晶片檢測電路板依據檢測訊號對待檢測晶片的每一個腳位分別進行檢測並反饋檢測結果回檢測裝置以完成待檢測晶片腳位的檢測(步驟107)。First, provide a chip detection circuit board with a detection circuit, a chip fixture to be tested, a chip for detection, and a JTAG connection port (step 101); then, the chip fixture to be tested forms an electrical connection with the detection circuit, and the chip fixture to be tested provides the chip to be tested. The chip is clamped and fixed (step 102); then, the detection chip is electrically connected to the detection circuit, and each pin of the detection chip and each pin corresponding to the wafer clamp to be tested are electrically connected to each other through the detection circuit. (Step 103); Then, the JTAG connection port, the detection chip and the chip fixture to be tested are connected in series through the detection circuit to form a JTAG link (Step 104); then, the JTAG controller and the JTAG connection port form an electrical connection (Step 105 ); then, the detection device forms an electrical connection with the JTAG controller, and the detection device generates a detection signal (step 106); finally, the detection device sends the detection signal to the JTAG controller, and the JTAG controller sends the detection signal to the chip detection circuit board, and the chip The detection circuit board detects each pin of the chip to be detected based on the detection signal and feeds back the detection results to the detection device to complete the detection of the pins of the chip to be detected (step 107).

綜上所述,可知本發明與先前技術之間的差異在於提供具有檢測電路、待測試晶片夾具、檢測用晶片以及JTAG連接埠的晶片檢測電路板,檢測用晶片的每一個腳位分別與待測試晶片夾具對應的每一個腳位透過檢測電路彼此形成電性連接,JTAG連接埠、檢測用晶片與待測試晶片夾具透過檢測電路串接以構成JTAG鏈路,檢測裝置、JTAG控制器與晶片檢測電路板形成串接,檢測裝置生成檢測訊號透過JTAG控制器對晶片檢測電路板的待檢測晶片的每一個腳位分別進行檢測並反饋檢測結果回檢測裝置以完成待檢測晶片腳位的檢測。To sum up, it can be seen that the difference between the present invention and the prior art is to provide a chip detection circuit board with a detection circuit, a fixture for the chip to be tested, a detection chip and a JTAG connection port. Each pin of the detection chip is connected to the chip to be tested. Each pin corresponding to the test chip fixture is electrically connected to each other through the detection circuit. The JTAG connection port, the detection chip and the chip fixture to be tested are connected in series through the detection circuit to form a JTAG link. The detection device, JTAG controller and chip detection The circuit boards are connected in series, and the detection device generates detection signals through the JTAG controller to detect each pin of the chip to be detected on the chip detection circuit board and feeds back the detection results to the detection device to complete the detection of the pins of the chip to be detected.

藉由此一技術手段可以來解決先前技術所存在現有對於複雜的多腳位晶片檢測具有檢測成本較高、檢測週期較長以及檢測方式複雜不便批量化檢測的問題,進而達成提供方便且快速對多腳位晶片的腳位進行功能檢測的技術功效。This technical means can solve the problems existing in the previous technology for complex multi-pin chip inspection, such as high inspection cost, long inspection period and complicated inspection methods that are inconvenient for batch inspection, thereby achieving the goal of providing convenient and fast inspection. The technical efficacy of functional testing of the pins of multi-pin chips.

雖然本發明所揭露的實施方式如上,惟所述的內容並非用以直接限定本發明的專利保護範圍。任何本發明所屬技術領域中具有通常知識者,在不脫離本發明所揭露的精神和範圍的前提下,可以在實施的形式上及細節上作些許的更動。本發明的專利保護範圍,仍須以所附的申請專利範圍所界定者為準。Although the embodiments disclosed in the present invention are as above, the described contents are not used to directly limit the patent protection scope of the present invention. Anyone with ordinary knowledge in the technical field to which the present invention belongs may make slight changes in the form and details of the implementation without departing from the spirit and scope of the present invention. The patent protection scope of the present invention must still be defined by the attached patent application scope.

10:晶片檢測電路板 11:待測試晶片夾具 12:檢測用晶片 121:第一腳位 122:第二腳位 123:第三腳位 124:第四腳位 13:JTAG連接埠 14:待檢測晶片 141:第一腳位 142:第二腳位 143:第三腳位 144:第四腳位 20:JTAG控制器 21:JTAG連接埠 22:USB連接埠 30:檢測裝置 31:USB連接埠 TDI:測試資料輸入腳位 TDO:測試資料輸出腳位 TCK:測試時鐘腳位 TMS:測試模式選擇腳位 步驟 101:提供具有檢測電路、待測試晶片夾具、檢測用晶片以及JTAG連接埠的晶片檢測電路板 步驟 102:待測試晶片夾具與檢測電路形成電性連接,待測試晶片夾具提供待檢測晶片夾持固定 步驟 103:檢測用晶片與檢測電路形成電性連接,檢測用晶片的每一個腳位分別與待測試晶片夾具對應的每一個腳位透過檢測電路彼此形成電性連接 步驟 104:JTAG連接埠、檢測用晶片與待測試晶片夾具透過檢測電路串接以構成JTAG鏈路 步驟 105:JTAG控制器與JTAG連接埠形成電性連接 步驟 106:檢測裝置與JTAG控制器形成電性連接,檢測裝置生成檢測訊號 步驟 107:檢測裝置發送檢測訊號至JTAG控制器,JTAG控制器發送檢測訊號至晶片檢測電路板,晶片檢測電路板依據檢測訊號對待檢測晶片的每一個腳位分別進行檢測並反饋檢測結果回檢測裝置以完成待檢測晶片腳位的檢測 10: Chip detection circuit board 11: Wafer fixture to be tested 12: Chip for detection 121:First foot position 122:Second foot position 123:Third foot position 124:Fourth pin 13:JTAG port 14: Wafer to be inspected 141:First foot position 142:Second foot position 143:Third foot position 144:Fourth pin 20:JTAG controller 21:JTAG port 22:USB port 30:Detection device 31:USB port TDI: test data input pin TDO: test data output pin TCK: test clock pin TMS: test mode selection pin Step 101: Provide a chip test circuit board with a test circuit, a fixture for the chip under test, a chip for test, and a JTAG connection port Step 102: The wafer clamp to be tested forms an electrical connection with the detection circuit, and the wafer clamp to be tested provides clamping and fixation of the wafer to be tested. Step 103: The detection chip is electrically connected to the detection circuit. Each pin of the detection chip and each pin corresponding to the chip fixture to be tested are electrically connected to each other through the detection circuit. Step 104: The JTAG connection port, the detection chip and the chip fixture to be tested are connected in series through the detection circuit to form a JTAG link Step 105: The JTAG controller forms an electrical connection with the JTAG port Step 106: The detection device forms an electrical connection with the JTAG controller, and the detection device generates a detection signal Step 107: The detection device sends a detection signal to the JTAG controller, and the JTAG controller sends the detection signal to the chip detection circuit board. The chip detection circuit board detects each pin of the chip to be detected based on the detection signal and feeds back the detection results to the detection device. To complete the detection of the chip pins to be detected

第1圖繪示為本發明適用於多腳位晶片的腳位檢測系統的系統方塊圖。 第2圖繪示為本發明適用於多腳位晶片的腳位檢測的待測試晶片夾具立體圖。 第3圖繪示為本發明適用於多腳位晶片的腳位檢測的JTAG鏈路圖。 第4圖繪示為本發明適用於多腳位晶片的腳位檢測的待檢測晶片腳位檢測示意圖。 第5圖繪示為本發明適用於多腳位晶片的腳位檢測方法的方法流程圖。 Figure 1 is a system block diagram of a pin detection system suitable for multi-pin chips according to the present invention. Figure 2 is a perspective view of a chip fixture under test suitable for pin detection of multi-pin chips according to the present invention. Figure 3 shows a JTAG link diagram applicable to pin detection of multi-pin chips according to the present invention. Figure 4 is a schematic diagram of the pin detection of the chip to be detected when the present invention is applicable to the pin detection of multi-pin chips. FIG. 5 is a flowchart of a pin detection method suitable for multi-pin chips according to the present invention.

10:晶片檢測電路板 10: Chip detection circuit board

11:待測試晶片夾具 11: Wafer fixture to be tested

12:檢測用晶片 12: Chip for detection

13:JTAG連接埠 13:JTAG port

20:JTAG控制器 20:JTAG controller

21:JTAG連接埠 21:JTAG port

22:USB連接埠 22:USB port

30:檢測裝置 30:Detection device

31:USB連接埠 31:USB port

Claims (10)

一種適用於多腳位晶片的腳位檢測系統,其包含: 一晶片檢測電路板,所述晶片檢測電路板具有檢測電路,所述晶片檢測電路板更包含: 一待測試晶片夾具,所述待測試晶片夾具與所述檢測電路形成電性連接,所述待測試晶片夾具提供一待檢測晶片夾持固定; 一檢測用晶片,所述檢測用晶片與所述檢測電路形成電性連接,所述檢測用晶片的每一個腳位分別與所述待測試晶片夾具對應的每一個腳位透過所述檢測電路彼此形成電性連接;及 一聯合測試工作群組(Joint Test Action Group,JTAG)連接埠,所述JTAG連接埠; 其中,所述JTAG連接埠、所述檢測用晶片與所述待測試晶片夾具透過所述檢測電路串接以構成JTAG鏈路; 一JTAG控制器,所述JTAG控制器與所述JTAG連接埠形成電性連接;及 一檢測裝置,所述檢測裝置與所述JTAG控制器形成電性連接,所述檢測裝置生成一檢測訊號; 其中,所述檢測裝置發送所述檢測訊號至所述JTAG控制器,所述JTAG控制器發送所述檢測訊號至所述晶片檢測電路板,所述晶片檢測電路板依據所述檢測訊號對所述待檢測晶片的每一個腳位分別進行檢測並反饋檢測結果回所述檢測裝置以完成所述待檢測晶片腳位的檢測。 A pin detection system suitable for multi-pin chips, which includes: A wafer detection circuit board, the wafer detection circuit board has a detection circuit, and the wafer detection circuit board further includes: A wafer clamp to be tested, the wafer clamp to be tested is electrically connected to the detection circuit, and the wafer to be tested clamp provides a clamping and fixing of the wafer to be tested; A detection chip, the detection chip is electrically connected to the detection circuit, and each pin of the detection chip corresponds to each pin of the wafer clamp to be tested through the detection circuit. form an electrical connection; and A joint test action group (Joint Test Action Group, JTAG) port, the JTAG port; Wherein, the JTAG connection port, the detection chip and the chip fixture to be tested are connected in series through the detection circuit to form a JTAG link; A JTAG controller, the JTAG controller is electrically connected to the JTAG connection port; and A detection device, the detection device is electrically connected to the JTAG controller, and the detection device generates a detection signal; Wherein, the detection device sends the detection signal to the JTAG controller, the JTAG controller sends the detection signal to the chip detection circuit board, and the chip detection circuit board detects the detection signal based on the detection signal. Each pin of the wafer to be detected is detected separately and the detection results are fed back to the detection device to complete the detection of the pins of the wafer to be detected. 如請求項1所述的適用於多腳位晶片的腳位檢測系統,其中所述檢測裝置比對提供待檢測晶片該腳位的檢測訊號與待檢測晶片該腳位反饋的檢測結果相同時,待檢測晶片該腳位為正常。The pin detection system suitable for multi-pin chips as described in claim 1, wherein the detection device compares the detection signal provided by the pin of the chip to be detected and the detection result fed back by the pin of the chip to be detected is the same, The pin position of the chip to be tested is normal. 如請求項1所述的適用於多腳位晶片的腳位檢測系統,其中所述檢測裝置比對提供待檢測晶片該腳位的檢測訊號與待檢測晶片該腳位反饋的檢測結果不相同時,待檢測晶片該腳位為開路異常。The pin detection system suitable for multi-pin chips as described in claim 1, wherein the detection device compares the detection signal provided by the pin of the chip to be detected and the detection result fed back by the pin of the chip to be detected is not the same. , the pin of the chip to be detected is an open circuit abnormality. 如請求項1所述的適用於多腳位晶片的腳位檢測系統,其中所述檢測裝置提供待檢測晶片的二個腳位不相同的檢測訊號,待檢測晶片的二個腳位反饋的檢測結果為相同的檢測結果,待檢測晶片的二個腳位為短路異常。The pin detection system suitable for multi-pin chips as described in claim 1, wherein the detection device provides different detection signals for the two pins of the chip to be detected, and the two pins of the chip to be detected feedback the detection The result is the same test result, and the two pins of the chip to be tested are short-circuited. 如請求項1所述的適用於多腳位晶片的腳位檢測系統,其中所述待測試晶片夾具、所述檢測用晶片以及所述JTAG連接埠分別定義有測試資料輸入(Test Data Input,TDI)腳位、測試資料輸出(Test Data Output,TDO)腳位、測試時鐘(Test Clock,TCK)腳位以及測試模式選擇(Test Mode Select,TMS)腳位,所述待測試晶片夾具、所述檢測用晶片以及所述JTAG連接埠的TCK腳位彼此相連,所述待測試晶片夾具、所述檢測用晶片以及所述JTAG連接埠的TMS腳位彼此相連,所述JTAG連接埠的TDI腳位與所述檢測用晶片的TDI腳位相連,所述檢測用晶片的TDO腳位與所述待測試晶片夾具的TDI腳位相連,所述待測試晶片夾具的TDO腳位與所述JTAG連接埠的TDO腳位相連,使所述JTAG連接埠、所述檢測用晶片與所述待測試晶片夾具透過檢測電路串接以構成JTAG鏈路。The pin detection system suitable for multi-pin chips as described in claim 1, wherein the chip fixture to be tested, the chip for detection and the JTAG connection port respectively define test data input (TDI). ) pin, test data output (Test Data Output, TDO) pin, test clock (Test Clock, TCK) pin and test mode select (Test Mode Select, TMS) pin, the chip fixture to be tested, the The detection chip and the TCK pin of the JTAG connection port are connected to each other, the chip fixture to be tested, the detection chip and the TMS pin of the JTAG connection port are connected to each other, and the TDI pin of the JTAG connection port is connected to each other. It is connected to the TDI pin of the detection chip, the TDO pin of the detection chip is connected to the TDI pin of the wafer clamp to be tested, and the TDO pin of the wafer clamp to be tested is connected to the JTAG connection port. The TDO pins are connected, so that the JTAG connection port, the detection chip and the chip fixture to be tested are connected in series through the detection circuit to form a JTAG link. 一種適用於多腳位晶片的腳位檢測方法,其包含下列步驟: 提供具有檢測電路、一待測試晶片夾具、一檢測用晶片以及一JTAG連接埠的一晶片檢測電路板; 所述待測試晶片夾具與所述檢測電路形成電性連接,所述待測試晶片夾具提供一待檢測晶片夾持固定; 所述檢測用晶片與所述檢測電路形成電性連接,所述檢測用晶片的每一個腳位分別與所述待測試晶片夾具對應的每一個腳位透過所述檢測電路彼此形成電性連接; 所述JTAG連接埠、所述檢測用晶片與所述待測試晶片夾具透過所述檢測電路串接以構成JTAG鏈路; 一JTAG控制器與所述JTAG連接埠形成電性連接; 一檢測裝置與所述JTAG控制器形成電性連接,所述檢測裝置生成一檢測訊號;及 所述檢測裝置發送所述檢測訊號至所述JTAG控制器,所述JTAG控制器發送所述檢測訊號至所述晶片檢測電路板,所述晶片檢測電路板依據所述檢測訊號對所述待檢測晶片的每一個腳位分別進行檢測並反饋檢測結果回所述檢測裝置以完成所述待檢測晶片腳位的檢測。 A pin detection method suitable for multi-pin chips, which includes the following steps: Provide a chip detection circuit board having a detection circuit, a chip fixture to be tested, a detection chip and a JTAG connection port; The wafer to be tested clamp is electrically connected to the detection circuit, and the wafer to be tested clamp provides a clamping and fixing of the wafer to be tested; The detection chip is electrically connected to the detection circuit, and each pin of the detection chip and each pin corresponding to the wafer clamp to be tested are electrically connected to each other through the detection circuit; The JTAG connection port, the detection chip and the chip fixture to be tested are connected in series through the detection circuit to form a JTAG link; A JTAG controller forms an electrical connection with the JTAG connection port; A detection device is electrically connected to the JTAG controller, and the detection device generates a detection signal; and The detection device sends the detection signal to the JTAG controller, the JTAG controller sends the detection signal to the chip detection circuit board, and the chip detection circuit board detects the detection signal based on the detection signal. Each pin of the chip is detected separately and the detection result is fed back to the detection device to complete the detection of the pin of the chip to be detected. 如請求項6所述的適用於多腳位晶片的腳位檢測方法,其中所述檢測裝置比對提供待檢測晶片該腳位的檢測訊號與待檢測晶片該腳位反饋的檢測結果相同時,待檢測晶片該腳位為正常。The pin detection method suitable for multi-pin chips as described in claim 6, wherein the detection device compares the detection signal provided by the pin of the chip to be detected and the detection result fed back by the pin of the chip to be detected is the same, The pin position of the chip to be tested is normal. 如請求項6所述的適用於多腳位晶片的腳位檢測方法,其中所述檢測裝置比對提供待檢測晶片該腳位的檢測訊號與待檢測晶片該腳位反饋的檢測結果不相同時,待檢測晶片該腳位為開路異常。The pin detection method suitable for multi-pin chips as described in claim 6, wherein the detection device compares the detection signal provided by the pin of the chip to be detected with the detection result fed back by the pin of the chip to be detected. , the pin of the chip to be detected is an open circuit abnormality. 如請求項6所述的適用於多腳位晶片的腳位檢測方法,其中所述檢測裝置提供待檢測晶片的二個腳位不相同的檢測訊號,待檢測晶片的二個腳位反饋的檢測結果為相同的檢測結果,待檢測晶片的二個腳位為短路異常。The pin detection method suitable for multi-pin chips as described in claim 6, wherein the detection device provides different detection signals for the two pins of the chip to be detected, and the two pins of the chip to be detected feedback the detection The result is the same test result, and the two pins of the chip to be tested are short-circuited. 如請求項6所述的適用於多腳位晶片的腳位檢測方法,其中所述待測試晶片夾具、所述檢測用晶片以及所述JTAG連接埠分別定義有TDI腳位、TDO腳位、TCK腳位以及TMS腳位,所述待測試晶片夾具、所述檢測用晶片以及所述JTAG連接埠的TCK腳位彼此相連,所述待測試晶片夾具、所述檢測用晶片以及所述JTAG連接埠的TMS腳位彼此相連,所述JTAG連接埠的TDI腳位與所述檢測用晶片的TDI腳位相連,所述檢測用晶片的TDO腳位與所述待測試晶片夾具的TDI腳位相連,所述待測試晶片夾具的TDO腳位與所述JTAG連接埠的TDO腳位相連,使所述JTAG連接埠、所述檢測用晶片與所述待測試晶片夾具透過檢測電路串接以構成JTAG鏈路。The pin detection method suitable for multi-pin chips as described in claim 6, wherein the chip fixture to be tested, the detection chip and the JTAG connection port respectively define TDI pins, TDO pins, and TCK pins and TMS pins, the chip fixture to be tested, the chip for detection and the TCK pins of the JTAG connection port are connected to each other, the chip fixture for the chip to be tested, the chip for detection and the JTAG connection port The TMS pins of the JTAG connection port are connected to each other, the TDI pin of the JTAG connection port is connected to the TDI pin of the detection chip, the TDO pin of the detection chip is connected to the TDI pin of the wafer fixture to be tested, The TDO pin of the chip to be tested fixture is connected to the TDO pin of the JTAG connection port, so that the JTAG connection port, the detection chip and the chip to be tested fixture are connected in series through the detection circuit to form a JTAG chain. road.
TW111122586A 2022-06-17 2022-06-17 Pins detection system for multi-pins chip and method thereof TW202401023A (en)

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