TW202400399A - Method for producing film - Google Patents

Method for producing film Download PDF

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Publication number
TW202400399A
TW202400399A TW112123452A TW112123452A TW202400399A TW 202400399 A TW202400399 A TW 202400399A TW 112123452 A TW112123452 A TW 112123452A TW 112123452 A TW112123452 A TW 112123452A TW 202400399 A TW202400399 A TW 202400399A
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film
heat treatment
hot air
bis
acid
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TW112123452A
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Chinese (zh)
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水口傳一朗
米蟲治美
涌井洋行
北村幸太
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日商東洋紡股份有限公司
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Publication of TW202400399A publication Critical patent/TW202400399A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29BPREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
    • B29B13/00Conditioning or physical treatment of the material to be shaped
    • B29B13/02Conditioning or physical treatment of the material to be shaped by heating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C55/00Shaping by stretching, e.g. drawing through a die; Apparatus therefor
    • B29C55/02Shaping by stretching, e.g. drawing through a die; Apparatus therefor of plates or sheets
    • B29C55/04Shaping by stretching, e.g. drawing through a die; Apparatus therefor of plates or sheets uniaxial, e.g. oblique
    • B29C55/08Shaping by stretching, e.g. drawing through a die; Apparatus therefor of plates or sheets uniaxial, e.g. oblique transverse to the direction of feed
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F1/00Compounds containing elements of Groups 1 or 11 of the Periodic Table
    • C07F1/10Silver compounds

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)

Abstract

To provide a method for producing a film such that during the production of the film, no breakage, tearing or anomalies in external appearance are caused to the film not only at the central part of the film but also at both fixed edges of the film or the vicinity thereof. This method for producing a film comprises: a step A in which fixtures are set at both edges in the width direction of one surface of a not-yet-heat-treated film, and the not-yet-heat-treated film is fixed in place using the fixtures; a step B in which hot air is blown onto both surfaces of the not-yet-heat-treated film; and a step C in which the not-yet-heat-treated film is conveyed. In the step B, the speed of the hot air blown onto the surface where the fixtures are not set is greater than or equal to the speed of the hot air blown onto the surface where the fixtures are set.

Description

薄膜之製造方法Film manufacturing method

本發明係關於薄膜之製造方法之發明。The present invention relates to a method for producing a thin film.

以往,在薄膜之製造步驟中,已知拉幅機式輸送裝置,其係在將薄膜進行輸送/乾燥/熱處理等時,藉由以多個針、夾子來把持薄膜的寬度方向的兩端部,而在對薄膜在寬度方向施加張力的狀態下進行輸送(例如,參照專利文獻1)。Conventionally, in the film manufacturing process, a tenter-type conveying device has been known, which holds both ends of the film in the width direction with a plurality of needles and clamps when the film is conveyed, dried, heat treated, etc. , and the film is conveyed while applying tension in the width direction (for example, see Patent Document 1).

拉幅機式輸送裝置有數種輸送方式。該等輸送方式之中,藉由沿著流動方向將薄膜的兩端部插在多個針上來把持薄膜之針梳拉幅機式輸送裝置,其具有多個針,該多個針係被配設在由被互相平行配置之一對移動鏈條所把持之針板上。雖藉由該針來把持、輸送薄膜,但若薄膜的撕裂強度低則有在輸送中斷裂的情況。There are several conveying methods for tenter-type conveying devices. Among these conveying methods, a pin-comb tenter type conveying device that holds the film by inserting both ends of the film onto a plurality of needles along the flow direction has a plurality of needles, and the plurality of needles are equipped with It is located on a needle plate held by a pair of moving chains arranged parallel to each other. Although the film is held and transported by the needle, if the tear strength of the film is low, the film may break during transportation.

為了解決此課題,有人提出在撕裂強度低的薄膜的把持部(端部),重疊撕裂強度高的薄膜作為補強薄膜(例如,參照專利文獻2)。 [先前技術文獻] [專利文獻] In order to solve this problem, it has been proposed to overlap a film with high tear strength as a reinforcing film at the holding portion (end portion) of a film with low tear strength (for example, see Patent Document 2). [Prior technical literature] [Patent Document]

[專利文獻1]日本特公昭39-29211號公報 [專利文獻2]日本特開平11-254521號公報 [Patent Document 1] Japanese Patent Publication No. Sho 39-29211 [Patent Document 2] Japanese Patent Application Publication No. 11-254521

[發明欲解決之課題][Problem to be solved by the invention]

然而,專利文獻2的方法,係在撕裂強度低的薄膜上,重疊撕裂強度高的薄膜,因此有原材料的浪費變多的問題。又,使用這樣的輸送裝置對薄膜吹送熱風以進行化學反應、溶劑的揮發時,被針把持之薄膜的兩端部,因針板會遮擋熱風,故比起中央部,供給之熱風變得更難以到達。因此,即使在兩端部重疊撕裂強度高的薄膜,在薄膜兩端部附近仍會出現化學反應的未完成狀態、未乾燥狀態,而導致在把持部、其附近之斷裂、裂痕、外觀異常。若如這般發生薄膜兩端部的斷裂、裂痕,則輸送中的薄膜會從針把持部脫離,薄膜會滯留在輸送裝置內而變得無法得到目的之薄膜。又,即使在這樣的輸送裝置內未發生滯留,薄膜兩端部的裂痕、斷裂,仍會使薄膜經適當地張開之狀態變得難以維持,結果,亦成為薄膜整體產生皺摺等端部以外的品質降低的要因。再者,若在薄膜兩端部附近發生裂痕、外觀異常,則將把持部切斷時必須切斷至更靠近中央部,成為生產損失的原因。However, the method of Patent Document 2 involves laminating a film with high tear strength on a film with low tear strength, so there is a problem of increased waste of raw materials. In addition, when such a conveying device is used to blow hot air onto the film to carry out chemical reactions and evaporate solvents, the needle plates block the hot air at both ends of the film held by the needles, so the hot air supplied becomes stronger than the central part. Hard to reach. Therefore, even if a film with high tear strength is overlapped at both ends, an unfinished state of chemical reaction and an undried state will still occur near both ends of the film, resulting in breaks, cracks, and abnormal appearance at and near the gripping portion. . If breaks or cracks occur at both ends of the film in this way, the film being conveyed will be separated from the needle holding portion, and the film will remain in the conveying device, making it impossible to obtain the intended film. In addition, even if stagnation does not occur in such a conveying device, cracks and breaks at both ends of the film will still make it difficult to maintain the film in a properly opened state. As a result, the entire film will become wrinkled, other than at the ends, etc. Causes of quality degradation. Furthermore, if cracks or abnormal appearance occur near both ends of the film, the gripping portion must be cut closer to the center, causing production losses.

這樣的課題,容易發生在輸送中同時進行化學反應與溶劑揮發之系統中,例如一邊輸送含有一定量的溶劑之聚醯亞胺前驅物薄膜一邊進行熱處理而得到之聚醯亞胺薄膜這般的系統。尤其是透明且高耐熱的薄膜,會有為了確保其物性而不得不選擇脆且容易撕裂的分子結構的情況,解決上述課題成為瓶頸。Such problems are likely to occur in systems where chemical reactions and solvent volatilization occur simultaneously during transportation, such as polyimide films obtained by heat treatment while conveying a polyimide precursor film containing a certain amount of solvent. system. In particular, for transparent and highly heat-resistant films, a molecular structure that is brittle and easy to tear may have to be selected in order to ensure its physical properties. Solving the above problems becomes a bottleneck.

本發明係鑑於上述之課題而完成者,其目的在於提供一種在藉由拉幅機式輸送裝置來固定薄膜的兩端並進行輸送時,可更有效地抑制薄膜兩端部及其附近的斷裂、裂痕、外觀異常的薄膜之製造方法。 [用以解決課題之手段] The present invention was completed in view of the above-mentioned problems, and its object is to provide a method that can more effectively suppress breakage at both ends of the film and its vicinity when both ends of the film are fixed and conveyed by a tenter-type conveying device. , cracks and abnormal appearance of the film. [Means used to solve problems]

本發明人等為了解決前述課題而仔細探討,結果完成了本發明。即,本發明提供以下適合的態樣。The present inventors conducted careful research to solve the aforementioned problems, and as a result completed the present invention. That is, the present invention provides the following suitable aspects.

[1]一種薄膜之製造方法,其係薄膜之製造方法,其具有: 步驟A,將固定件設置在熱處理前薄膜的一側的面的寬度方向的兩端部,以前述固定件固定前述熱處理薄膜, 步驟B,對前述熱處理前薄膜的兩面吹送熱風, 步驟C,輸送前述熱處理前薄膜, 前述步驟B之對未設置固定件之面吹送之熱風的風速,係與對設置固定件之面吹送之熱風的風速相同或比其更大。 [2]如[1]記載之薄膜之製造方法,其中前述步驟B之未設置前述固定件之面的風速,係設置前述固定件之面的風速的1.1倍以上。 [3]如[1]或[2]記載之薄膜之製造方法,其中前述固定件為針板。 [4]如[1]至[3]中任一項記載之薄膜之製造方法,其中前述薄膜為聚醯亞胺薄膜。 [5]如[4]記載之薄膜之製造方法,其中前述聚醯亞胺薄膜為透明聚醯亞胺薄膜。 [6]一種薄膜之製造裝置,其係薄膜之製造裝置,其具有: 固定機構A,將固定件設置在熱處理前薄膜的一側的面的寬度方向的兩端部,以前述固定件固定前述熱處理薄膜, 送風機構B,對前述熱處理前薄膜的兩面吹送熱風, 輸送機構C,輸送前述熱處理前薄膜, 前述送風機構B之對未設置固定件之面吹送之熱風的風速,係與對設置固定件之面吹送之熱風的風速相同或比其更大。 [7]如[6]記載之薄膜之製造裝置,其中前述送風機購B之未設置前述固定件之面的風速,係設置前述固定件之面的風速的1.1倍以上。 [8]如[6]或[7]記載之薄膜之製造裝置,其中前述固定件為針板。 [9]如[6]至[8]中任一項記載之薄膜之製造裝置,其中前述薄膜為聚醯亞胺薄膜。 [10]如[9]記載之薄膜之製造裝置,其中前述聚醯亞胺薄膜為透明聚醯亞胺薄膜。 [發明之效果] [1] A method for manufacturing a thin film, which is a method for manufacturing a thin film, which has: Step A, placing fixing members on both ends in the width direction of one side of the film before heat treatment, and fixing the heat-treated film with the fixing members, Step B, blow hot air on both sides of the film before heat treatment, Step C, transporting the aforementioned film before heat treatment, The wind speed of the hot air blown to the surface without the fixing parts in the aforementioned step B is the same as or greater than the wind speed of the hot air blown to the surface with the fixing parts. [2] The method for manufacturing a film as described in [1], wherein the wind speed on the side where the fixing member is not provided in step B is 1.1 times or more of the wind speed on the side where the fixing member is provided. [3] The method for manufacturing a film according to [1] or [2], wherein the fixing member is a needle plate. [4] The method for producing a film according to any one of [1] to [3], wherein the film is a polyimide film. [5] The method for producing a film according to [4], wherein the polyimide film is a transparent polyimide film. [6] A thin film manufacturing device, which is a thin film manufacturing device having: The fixing mechanism A arranges fixing members at both ends in the width direction of one side of the film before heat treatment, and fixes the heat-treated film with the fixing members, The air blowing mechanism B blows hot air to both sides of the film before heat treatment. The conveying mechanism C conveys the aforementioned film before heat treatment, The wind speed of the hot air blown by the aforementioned air blowing mechanism B to the surface without the fixing parts is the same as or greater than the wind speed of the hot air blown to the surface with the fixing parts. [7] The film manufacturing apparatus according to [6], wherein the wind speed on the side of the air blower (B) without the fixing member is 1.1 times or more of the wind speed on the side where the fixing member is provided. [8] The film manufacturing device according to [6] or [7], wherein the fixing member is a needle plate. [9] The film manufacturing apparatus according to any one of [6] to [8], wherein the film is a polyimide film. [10] The film manufacturing apparatus according to [9], wherein the polyimide film is a transparent polyimide film. [Effects of the invention]

根據本發明,在薄膜之製造中,能夠提供一種不僅是薄膜中央部,在固定薄膜之兩端部、其附近也不會發生斷裂、裂痕、外觀異常的薄膜之製造方法。According to the present invention, it is possible to provide a method for producing a film in which breakage, cracks, and appearance abnormalities do not occur not only in the central portion of the film but also in the two end portions of the fixed film and the vicinity thereof.

若在薄膜兩端部發生斷裂、裂痕,則輸送中的薄膜會從薄膜固定結構(例如,針)脫離,薄膜會滯留在輸送裝置內而變得無法得到目的之薄膜。又,即使在這樣的輸送裝置內未發生滯留,薄膜兩端部的裂痕、斷裂,仍會使薄膜經適當地張開之狀態變得難以維持,結果,亦成為薄膜整體產生皺摺等端部以外的品質降低的要因。再者,若在薄膜兩端部附近發生裂痕、外觀異常,則將固定部(把持部)切斷時必須切斷至更靠近中央部,成為生產損失的原因。If breaks or cracks occur at both ends of the film, the film being conveyed will be separated from the film fixing structure (for example, a needle), and the film will remain in the conveying device, making it impossible to obtain the intended film. In addition, even if stagnation does not occur in such a conveying device, cracks and breaks at both ends of the film will still make it difficult to maintain the film in a properly opened state. As a result, the entire film will become wrinkled, other than at the ends, etc. Causes of quality degradation. Furthermore, if cracks or abnormal appearance occur near both ends of the film, the fixed portion (grip portion) must be cut closer to the center, causing production losses.

相對於此,根據本發明,能夠抑制起因於薄膜兩端部的斷裂、裂痕之薄膜輸送不良。又,亦能夠抑制起因於兩端部的異常之中央部的皺褶,能夠提供穩定品質的薄膜。再者,亦能夠抑制薄膜兩端部附近的斷裂、裂痕、外觀異常,因此能夠將切斷之兩端部變小,能夠減少生產損失。又,若使用本發明的方法,則不會對薄膜中央部供給過剩的熱,因此不會在薄膜中央部引起異常,能夠提供穩定品質的薄膜。On the other hand, according to the present invention, it is possible to suppress film conveyance failures caused by breaks or cracks at both ends of the film. In addition, wrinkles in the center portion caused by abnormalities at both ends can also be suppressed, and a film of stable quality can be provided. Furthermore, fractures, cracks, and abnormal appearance near both ends of the film can also be suppressed, so the cut ends can be made smaller and production losses can be reduced. Furthermore, if the method of the present invention is used, excessive heat will not be supplied to the central portion of the film, so an abnormality will not be caused in the central portion of the film, and a film of stable quality can be provided.

[用以實施發明的形態][Form used to implement the invention]

以下,針對本發明的實施形態進行說明。此外,本發明的範圍並未限定於此處說明之實施形態,在不損及本發明的主旨之範圍內能夠進行各種變更。Hereinafter, embodiments of the present invention will be described. In addition, the scope of the present invention is not limited to the embodiment described here, and various changes can be made within the scope that does not impair the gist of the present invention.

製造薄膜時,有時會使熱處理前薄膜通過加熱爐內,藉此使有機溶劑揮發、或引起化學反應,以謀求各種物性的提升。此處,欲使有機溶劑揮發之目的薄膜為乾燥前的薄膜,欲引起化學反應之目的薄膜為前驅物薄膜(胚膜),但本說明書中,將此等合併稱為熱處理前薄膜。When manufacturing a film, the film may be passed through a heating furnace before heat treatment to volatilize organic solvents or cause chemical reactions to improve various physical properties. Here, the target film to volatilize the organic solvent is the film before drying, and the target film to cause the chemical reaction is the precursor film (embryonic membrane). However, in this specification, these are collectively referred to as the film before heat treatment.

如這般使熱處理前薄膜通過加熱爐內時,必須將固定件設置在熱處理前薄膜的一側的面的寬度方向的兩端部,以前述固定件固定前述熱處理薄膜(步驟A)。固定方法並未特別限定。在輸送中進行加熱處理時,一般會使用拉幅機式輸送裝置。使用拉幅機式輸送裝置時,較佳為藉由將前述熱處理前薄膜的兩端部插在針梳拉幅機式輸送裝置的複數個針上來進行固定。熱處理前薄膜較佳為僅在前述兩端部進行固定。藉由僅在前述兩端部進行固定,熱處理前薄膜的兩端部以外的地方(例如,中央部)的送風變得不會被遮擋。在上述拉幅機式輸送裝置內將熱處理前薄膜加熱時,大多使用熱風產生機構作為加熱源。熱風產生機構,係對熱處理前薄膜的非固定件設置面(例如,熱處理前薄膜的上側的面)及熱處理前薄膜的固定件設置面(例如,熱處理前薄膜的下側的面)吹拂熱風,藉此進行加熱(步驟B)。藉由進行加熱處理,使熱處理前薄膜的有機溶劑揮發、或引起化學反應,可謀求各種物性的提升。前述熱處理前薄膜的非固定件設置面的熱風的風速,必須設為與固定件設置面的熱風的風速相同或比其更大。此處,對熱處理前薄膜吹送熱風亦稱為熱處理。When the pre-heat-treated film is passed through the heating furnace in this way, fixing members must be provided at both ends in the width direction of one side of the pre-heat-treated film, and the heat-treated film must be fixed with the fixing members (step A). The fixing method is not particularly limited. When heat treatment is performed during transportation, a tenter-type conveying device is generally used. When using a tenter-type conveyor, it is preferable to fix both ends of the film before heat treatment by inserting it into a plurality of pins of a pin-comb tenter-type conveyor. Before heat treatment, the film is preferably fixed only at the two ends. By fixing only the two end portions, the air flow in places other than the two end portions (for example, the center portion) of the film before heat treatment is not blocked. When heating the film before heat treatment in the tenter-type conveying device, a hot air generating mechanism is often used as the heating source. The hot air generating mechanism blows hot air to the non-fastener mounting surface of the film before heat treatment (for example, the upper side surface of the film before heat treatment) and the fastener mounting surface of the film before heat treatment (for example, the lower side surface of the film before heat treatment), Heating is thereby performed (step B). By performing heat treatment, the organic solvent in the film before heat treatment is volatilized or a chemical reaction is caused, thereby improving various physical properties. The wind speed of the hot air on the surface of the film without the fasteners before heat treatment must be the same as or greater than the wind speed of the hot air on the surface where the fasteners are installed. Here, blowing hot air onto the film before heat treatment is also called heat treatment.

其次,與前述熱處理同時輸送熱處理前薄膜(步驟C)。Next, the film before heat treatment is transported simultaneously with the aforementioned heat treatment (step C).

圖1係示意地顯示本發明輸送中的熱處理前薄膜的狀態之說明圖。熱處理前薄膜係從紙面的裏側被輸送至表面側(或從表面側輸送至裏側)。在熱處理前薄膜1的固定件設置面(下側的面)設置針板11(薄膜固定件),將熱處理前薄膜1的兩端部插在針板11的上面具備之針11a(薄膜固定結構)上藉此來進行固定(把持)。然後,在此狀態下對熱處理前薄膜1進行熱處理。熱處理係以下述方式進行:從熱處理前薄膜1的上下兩面同時吹拂熱風31、與熱風32,該熱風31係由熱處理前薄膜1的非固定件設置面側(上側的面)具備之熱風吹出口21產生,該熱風32係由其相對側的固定件設置面側(下側的面)具備之熱風吹出口22產生。此時,熱風31會吹拂至熱處理前薄膜1而不會被針板11遮擋,但熱風32的一部分會被針板11遮擋,不會到達熱處理前薄膜端部1b。熱風32對於熱處理前薄膜中央部1a的吹拂與熱風31相同,會吹拂而不會被遮擋。若是通常情況下,這會成為原因,導致熱處理前薄膜端部1b引起化學反應的未完成狀態、溶劑的未乾燥狀態。又,若欲增加對於熱處理前薄膜端部1b的熱風31(未被針板11遮擋的熱風)的吹拂量,而增加熱風31與熱風32的合計風量,則會對成為製品之薄膜中央部1a供給過剩的熱,引起以過度乾燥等為原因之白濁、黃變、斷裂等異常。然而,根據本發明,在不改變熱風31與熱風32的合計風量的情況下,使熱風31的風速與熱風32的風速相同或比其更大,藉此減少熱風32(被針板11遮擋之熱風)的比例,增加熱風31(未被針板11遮擋之熱風)的比例,因此變得能夠對薄膜端部1b更有效率地吹送熱風,而能夠避免熱處理前薄膜端部1b之前述狀態,不會在成為製品之薄膜中央部1a引起前述異常。圖1中,熱處理前薄膜1的熱風吹出口21側為非固定件設置面,熱風吹出口22側為固定件設置面。FIG. 1 is an explanatory diagram schematically showing the state of the film before heat treatment during transportation according to the present invention. Before heat treatment, the film is transported from the back side to the front side of the paper (or from the front side to the back side). A needle plate 11 (film fixing device) is provided on the fixing device installation surface (lower surface) of the film 1 before heat treatment, and both ends of the film 1 before heat treatment are inserted into the pins 11a (film fixing structure) provided on the upper surface of the needle plate 11 ) is used to fix (hold). Then, the film 1 before heat treatment is heat-treated in this state. The heat treatment is performed in the following manner: hot air 31 and hot air 32 are blown simultaneously from the upper and lower surfaces of the film 1 before heat treatment. The hot air 31 is provided from the hot air blowing outlet provided on the non-fixed installation surface side (upper side) of the film 1 before heat treatment. 21 is generated, and the hot air 32 is generated by the hot air blowing outlet 22 provided on the side (lower side) of the fixing member installation surface on the opposite side. At this time, the hot air 31 will blow to the pre-heat treatment film 1 without being blocked by the needle plate 11 , but a part of the hot air 32 will be blocked by the needle plate 11 and will not reach the end 1 b of the pre-heat treatment film. The hot air 32 blows the central part 1a of the film before heat treatment in the same way as the hot air 31, and it blows without being blocked. Under normal circumstances, this may cause an unfinished state of chemical reaction and an undried state of the solvent at the film end 1b before heat treatment. Furthermore, if the amount of hot air 31 (hot air not blocked by the needle plate 11) is increased to the film end portion 1b before heat treatment and the total air volume of the hot air 31 and the hot air 32 is increased, the center portion 1a of the film that becomes the product will be affected. Excessive supply of heat can cause abnormalities such as cloudiness, yellowing, and cracking caused by excessive drying. However, according to the present invention, without changing the total air volume of the hot air 31 and the hot air 32, the wind speed of the hot air 31 is made the same as or greater than the wind speed of the hot air 32, thereby reducing the hot air 32 (blocked by the needle plate 11). (hot air) increases the proportion of hot air 31 (hot air not blocked by needle plate 11), so hot air can be blown to the film end 1b more efficiently, and the aforementioned state of the film end 1b before heat treatment can be avoided. The above-mentioned abnormality will not be caused in the central portion 1a of the film that becomes the product. In FIG. 1 , the hot air blowing port 21 side of the film 1 before heat treatment is the non-fixing member installation surface, and the hot air blowing port 22 side is the fastening member setting surface.

本發明亦可如圖2所示般在熱處理前薄膜的上側的面設置針梳拉幅機11,將熱處理前薄膜1兩端部插在針板11的下側的面具備之針11a上來進行固定。此情況下,使熱處理前薄膜1的非固定件設置面側(下側的面)的熱風31的風速,與熱處理前薄膜1的固定件設置面側(上側的面)的熱風32的風速相同、或比其更大。圖2中,熱處理前薄膜1的熱風吹出口22側為固定件設置面,熱風吹出口21側為非固定件設置面。The present invention can also be carried out by installing a pin comb tenter 11 on the upper surface of the film before heat treatment as shown in Figure 2, and inserting both ends of the film 1 before heat treatment onto the needles 11a provided on the lower surface of the needle plate 11. fixed. In this case, the wind speed of the hot air 31 on the side (lower side) of the film 1 before heat treatment where the non-fixtures are installed is made equal to the wind speed of the hot air 32 on the side (upper side) of the film 1 before heat treatment on which the fasteners are installed. , or larger than that. In FIG. 2 , the hot air blowing port 22 side of the film 1 before heat treatment is the fixing member installation surface, and the hot air blowing port 21 side is the non-fixing member setting surface.

前述針梳拉幅機式輸送裝置,一般具有多個針,該多個針係被配設在由被互相平行配置之一對移動鏈條所固定(把持)之針板上。被配設在此針板之針,可為針板的上側的面,亦可為下側的面。針的配置並未特別限定,能夠使用以往周知者等。The aforementioned pin comb tenter type conveying device generally has a plurality of needles, and the plurality of needles are arranged on a needle plate fixed (held) by a pair of moving chains arranged in parallel to each other. The needles arranged on this needle plate may be the upper surface or the lower surface of the needle plate. The arrangement of the needles is not particularly limited, and those known in the art can be used.

對熱處理前薄膜的非固定件設置面及固定件設置面吹送(吹拂)之熱風的溫度,為了溶劑揮發、化學反應的促進,較佳為80℃以上500℃以下。在容易去除熱處理前薄膜所含之溶劑、且熱處理前薄膜為聚醯亞胺的前驅物(聚醯胺酸)的情況下,從變得容易進行醯亞胺化(熱醯亞胺化)來看,更佳為120℃以上,進一步較佳為150℃以上,特佳為200℃以上。又,從抑制薄膜的熱所致之損傷來看,更佳為450℃以下,進一步較佳為400℃以下,特佳為380℃以下。若為前述範圍內,則在輸送中會抑制薄膜的斷裂、裂痕,薄膜的品質變得良好。非固定件設置面及固定件設置面的熱風溫度,可各自相同,亦可不同,從裝置的簡樸化來看較佳為相同溫度。薄膜輸送中的熱風的溫度的變化並未特別限定,可為連接複數個加熱爐以階段性地使熱風的溫度變化般的設計,亦可為使熱風的溫度朝向輸送方向慢慢地上升或者下降般的設計。在複數個加熱爐內進行熱處理的情況下,加熱爐較佳為2個以上10個以下,更佳為3個以上8個以下,進一步較佳為4個以上6個以下。藉由在複數個加熱爐內進行熱處理,能夠使熱處理前薄膜階段性地乾燥、或熱醯亞胺化,藉此薄膜的品質會提升。The temperature of the hot air blowing (blowing) to the non-fastener mounting surface and the fastener mounting surface of the film before heat treatment is preferably 80°C or more and 500°C or less in order to promote solvent volatilization and chemical reaction. When the solvent contained in the film before heat treatment is easily removed and the film before heat treatment is a precursor of polyimide (polyamide acid), imidization (thermal imidization) becomes easy. It is seen that the temperature is more preferably 120°C or higher, further preferably 150°C or higher, and particularly preferably 200°C or higher. In addition, from the viewpoint of suppressing heat-induced damage to the film, the temperature is more preferably 450°C or lower, further preferably 400°C or lower, and particularly preferably 380°C or lower. If it is within the above range, breakage and cracks of the film during transportation are suppressed, and the quality of the film becomes good. The hot air temperatures of the non-fixed part installation surface and the fixed part installation surface may be the same or different. From the viewpoint of simplicity of the device, the hot air temperatures are preferably the same temperature. The temperature change of the hot air during film conveyance is not particularly limited. It may be designed to connect a plurality of heating furnaces to change the temperature of the hot air in stages, or it may be designed to gradually increase or decrease the temperature of the hot air in the conveying direction. like design. When heat treatment is performed in a plurality of heating furnaces, the number of heating furnaces is preferably from 2 to 10, more preferably from 3 to 8, and further preferably from 4 to 6. By performing heat treatment in a plurality of heating furnaces, the film can be dried in stages or thermally imidized before heat treatment, thereby improving the quality of the film.

對熱處理前薄膜的非固定件設置面吹送之熱風的風速,較佳為0.5m/秒鐘以上15m/秒鐘以下。在熱風充分到達熱處理前薄膜、容易去除熱處理前薄膜所含之溶劑、且熱處理前薄膜為聚醯亞胺的前驅物(聚醯胺酸)的情況下,從變得容易進行醯亞胺化(熱醯亞胺化)來看,更佳為1m/秒鐘以上,進一步較佳為1.5m/秒鐘以上,更進一步較佳為2m/秒鐘以上,特佳為3m/秒鐘以上。又,從抑制熱處理前薄膜的顫動所致之斷裂、裂痕、針脫離等來看,較佳為13m/秒鐘以下,更佳為12m/秒鐘以下,進一步較佳為10m/秒鐘以下。The wind speed of the hot air blown to the non-fixed part installation surface of the film before heat treatment is preferably 0.5m/second or more and 15m/second or less. When the hot air reaches the pre-heat treatment film sufficiently, the solvent contained in the pre-heat treatment film is easily removed, and the pre-heat treatment film is a precursor of polyimide (polyamide acid), the imidization becomes easier ( In terms of thermal imidization), it is more preferably 1 m/second or more, further preferably 1.5 m/second or more, still more preferably 2 m/second or more, and particularly preferably 3 m/second or more. In addition, from the viewpoint of suppressing breakage, cracks, needle detachment, etc. caused by vibration of the film before heat treatment, it is preferably 13 m/second or less, more preferably 12 m/second or less, and still more preferably 10 m/second or less.

對熱處理前薄膜的固定件設置面吹送之熱風的風速,較佳為0.4m/秒鐘以上14m/秒鐘以下。在容易去除熱處理前薄膜所含之溶劑、且熱處理前薄膜為聚醯亞胺的前驅物(聚醯胺酸)的情況下,從變得容易進行醯亞胺化(熱醯亞胺化)來看,更佳為0.9m/秒鐘以上,進一步較佳為1.4m/秒鐘以上,更進一步較佳為1.9m/秒鐘以上。又,從抑制熱處理前薄膜的顫動所致之斷裂、裂痕、針脫離等來看,較佳為12m/秒鐘以下,更佳為11m/秒鐘以下,進一步較佳為9m/秒鐘以下。The wind speed of the hot air blowing from the mounting surface of the film before heat treatment is preferably 0.4m/second or more and 14m/second or less. When the solvent contained in the film before heat treatment is easily removed and the film before heat treatment is a precursor of polyimide (polyamide acid), imidization (thermal imidization) becomes easy. It is seen that it is more preferably 0.9 m/second or more, further preferably 1.4 m/second or more, and still more preferably 1.9 m/second or more. In addition, from the viewpoint of suppressing breakage, cracks, needle detachment, etc. caused by vibration of the film before heat treatment, it is preferably 12 m/second or less, more preferably 11 m/second or less, and still more preferably 9 m/second or less.

對前述熱處理前薄膜的非固定件設置面吹送之熱風的風速,必須與對固定件設置面吹送之熱風的風速相同或比其更大。非固定件設置面與固定件設置面的風速的比率(非固定件設置面/固定件設置面),較佳為大於1.0。從抑制被固定件(針板11)遮擋之熱風的比率、熱風充分到達熱處理前薄膜兩端部、熱處理前薄膜的兩端部的乾燥、化學反應變得容易完成來看,較佳為1.05以上,更佳為1.1以上。又,從抑制固定件設置面側的空間的溫度降低、及伴隨前述溫度降低之薄膜本身的溫度降低,熱處理前薄膜整體的乾燥、化學反應變得容易完成來看,較佳為10以下,更佳為5以下,進一步較佳為3以下。The wind speed of the hot air blown to the non-fastener mounting surface of the film before heat treatment must be the same as or greater than the wind speed of the hot air blown to the fastener mounting surface. The ratio of the wind speed between the non-fixed element installation surface and the fixed element installation surface (non-fixed element installation surface/fixed element installation surface) is preferably greater than 1.0. It is preferably 1.05 or more from the viewpoint of suppressing the ratio of hot air blocked by the fixing member (needle plate 11), sufficient hot air reaching both ends of the film before heat treatment, drying of both ends of the film before heat treatment, and easy completion of chemical reactions. , preferably 1.1 or above. In addition, from the viewpoint of suppressing the temperature drop of the space on the fixing member installation surface side and the temperature drop of the film itself accompanying the aforementioned temperature drop, and making it easier to complete the drying of the entire film before heat treatment and the chemical reaction, it is preferably 10 or less, and more preferably It is preferably 5 or less, and further preferably 3 or less.

若對前述熱處理前薄膜的非固定件設置面吹送之熱風的風速,比對固定件設置面吹送之熱風的風速小,則被薄膜固定件遮擋之熱風的比率會增大,對熱處理前薄膜端部吹送之熱風會減少。因此,與熱處理前薄膜中央部相比,熱處理前薄膜端部到乾燥、化學反應的完成為止變得需要更多的時間。只有此薄膜端部乾燥、化學反應為未完成的狀態時,薄膜端部無法得到充分的強度,有會引起以薄膜固定結構(針11a)為起點之裂痕、伸長等外觀異常的情況。若此異常顯著地發生,則有斷裂之薄膜因卡在爐內出口等而滯留,薄膜輸送本身變得困難的情況。又,這樣的以薄膜端部為起點之外觀異常,有可能不會停止在端部而是延伸至薄膜中央部附近,成為品質降低、生產損失的原因。If the wind speed of the hot air blown to the non-fixed part setting surface of the film before heat treatment is smaller than the hot air blowing to the fixed part setting surface, the ratio of the hot air blocked by the film fixing part will increase, which will affect the end of the film before heat treatment. The hot air blowing from the part will be reduced. Therefore, it takes more time for drying and completion of chemical reaction in the film end portion before heat treatment than in the center portion of the film before heat treatment. If only the ends of the film are dry and the chemical reaction is not completed, sufficient strength cannot be obtained at the ends of the film, and appearance abnormalities such as cracks and elongation starting from the film fixing structure (needle 11a) may occur. If this abnormality occurs significantly, the broken film may become stuck in the furnace outlet, etc., and the film transportation itself may become difficult. In addition, such appearance abnormalities starting from the ends of the film may not stop at the ends but extend to the vicinity of the center of the film, causing quality degradation and production losses.

經熱處理之乾燥後的薄膜所含之殘留溶劑,較佳為500ppm以下,更佳為200ppm以下,進一步較佳為100ppm以下。殘留溶劑量越少越好,但工業上亦可為1ppm以上,為10ppm以上亦無妨。The residual solvent contained in the dried film after heat treatment is preferably 500 ppm or less, more preferably 200 ppm or less, and further preferably 100 ppm or less. The smaller the amount of residual solvent, the better, but industrially it can be 1 ppm or more, and it does not matter if it is 10 ppm or more.

本發明的薄膜,較佳為藉由以寬度為300mm以上、長度為10m以上的長條狀薄膜的形式捲繞之方式來製造。又,將熱處理前薄膜的一側的面的寬度方向的兩端部進行固定之方法並未特別限定,可以插在針梳拉幅機式輸送裝置的針上來進行把持,亦可以用夾子拉幅機式輸送裝置的夾子夾住來進行把持。The film of the present invention is preferably produced by winding a long film with a width of 300 mm or more and a length of 10 m or more. In addition, the method of fixing both ends in the width direction of one side of the film before heat treatment is not particularly limited. The film may be held by inserting it into the pins of a pin comb tenter type conveyor, or may be tentered with a clip. Clamp the machine-type conveyor to hold it.

前述兩端部的寬度(各端部的寬度),只要是可利用以往周知的拉幅機式輸送裝置固定的寬度,則並未特別限定。具體來說,就下限而言,較佳為5mm以上,更佳為10mm以上。或者,較佳為兩端部的寬度的合計為熱處理前薄膜總寬度的0.1%以上,更佳為0.5%以上,進一步較佳為1%以上。 又,就前述兩端部的寬度(各端部的寬度)的上限而言,較佳為100mm以下,更佳為50mm以下。或者,較佳為兩端部的寬度的合計為薄膜總寬度的50%以下,更佳為30%以下,進一步較佳為10%以下。 The width of both ends (width of each end) is not particularly limited as long as it is a width that can be fixed using a conventionally known tenter-type conveyor device. Specifically, the lower limit is preferably 5 mm or more, and more preferably 10 mm or more. Alternatively, the total width of both ends is preferably 0.1% or more of the total width of the film before heat treatment, more preferably 0.5% or more, and further preferably 1% or more. Moreover, the upper limit of the width of both ends (width of each end) is preferably 100 mm or less, more preferably 50 mm or less. Alternatively, the total width of both ends is preferably 50% or less of the total width of the film, more preferably 30% or less, and still more preferably 10% or less.

熱處理前薄膜的寬度方向之中央部,在將熱處理前薄膜總寬度設為100%時,以與一端相距30~70%之位置為較佳,更佳為相距40~60%之位置,進一步較佳為相距45~55%之位置。When the total width of the film before heat treatment is 100%, the center part of the film in the width direction before heat treatment is preferably 30 to 70% away from one end, more preferably 40 to 60% away from one end, and further preferably The best position is 45 to 55% apart.

熱處理前薄膜的輸送速度,能夠依熱處理條件(熱風的溫度、風速等)適當設定。適當的輸送速度取決於熱處理爐的爐長,因此難以嚴密地確定,但若慢則有招致生產性降低之虞。較佳為0.05m/分鐘以上,更佳為0.1m/分鐘以上。The conveying speed of the film before heat treatment can be appropriately set according to the heat treatment conditions (hot air temperature, wind speed, etc.). The appropriate conveying speed depends on the furnace length of the heat treatment furnace, so it is difficult to determine strictly. However, if it is slow, productivity may decrease. It is preferably 0.05m/min or more, more preferably 0.1m/min or more.

<薄膜> 就本發明的薄膜(熱處理後薄膜)而言,能夠例示:聚醯亞胺、聚醯胺醯亞胺、聚醚醯亞胺、氟化聚醯亞胺等聚醯亞胺系樹脂(例如,芳香族聚醯亞胺樹脂、脂環族聚醯亞胺樹脂);聚乙烯、聚丙烯等聚烯烴系樹脂;聚對苯二甲酸乙二酯、聚對苯二甲酸丁二酯、聚2,6-萘二甲酸乙二酯等共聚合聚酯(例如,全芳香族聚酯、半芳香族聚酯);以聚甲基丙烯酸甲酯作為代表之(甲基)丙烯酸酯共聚物;聚碳酸酯;聚醯胺;聚碸;聚醚碸;聚醚酮;乙酸纖維素;硝酸纖維素;芳香族聚醯胺;聚氯乙烯;多酚;聚芳酯;聚苯硫醚;聚伸苯醚;聚苯乙烯等薄膜。 <Film> Examples of the film (heat-treated film) of the present invention include polyimide-based resins such as polyamideimide, polyamideimide, polyetherimide, and fluorinated polyimide (for example, Aromatic polyimide resin, alicyclic polyimide resin); polyolefin resins such as polyethylene and polypropylene; polyethylene terephthalate, polybutylene terephthalate, poly2, Copolymerized polyesters such as 6-ethylene naphthalate (for example, fully aromatic polyester, semi-aromatic polyester); (meth)acrylate copolymers represented by polymethyl methacrylate; polycarbonate Ester; polyamide; polyester; polyether ketone; polyetherketone; cellulose acetate; cellulose nitrate; aromatic polyamide; polyvinyl chloride; polyphenol; polyarylate; polyphenylene sulfide; polyphenylene sulfide Ether; polystyrene and other films.

前述薄膜,以可適當使用於伴隨250℃以上的熱處理之製程為前提,因此例示之高分子薄膜之中能夠實際應用者是有限的。前述薄膜之中,較佳為使用了所謂的超級工程塑膠之薄膜,更具體來說,可列舉:聚醯亞胺系樹脂、聚醯胺系樹脂、聚醯胺醯亞胺系樹脂、唑系樹脂。作為特佳的具體例,可列舉:芳香族聚醯亞胺薄膜、芳香族醯胺薄膜、芳香族醯胺醯亞胺薄膜、芳香族苯并㗁唑薄膜、芳香族苯并噻唑薄膜、芳香族苯并咪唑薄膜等。It is a premise that the above-mentioned film can be suitably used in a process involving a heat treatment of 250° C. or higher. Therefore, those of the exemplified polymer films that can be actually used are limited. Among the aforementioned films, films using so-called super engineering plastics are preferred. More specifically, polyamide-based resins, polyamide-based resins, polyamide-imide-based resins, and azole-based plastics are preferred. resin. Particularly preferred examples include aromatic polyimide films, aromatic amide films, aromatic amide imide films, aromatic benzothiazole films, aromatic benzothiazole films, aromatic Benzimidazole film, etc.

本發明的熱處理前薄膜,可列舉:前述薄膜中含有有機溶劑之薄膜(乾燥前薄膜)、化學反應前的薄膜(前驅物薄膜)、或含有有機溶劑之前驅物薄膜(乾燥前前驅物薄膜)等。 就熱處理前薄膜的有機溶劑含量而言,從能夠固定(把持)熱處理前薄膜兩端而進行輸送來看,較佳為50質量%以下,更佳為45質量%以下,進一步較佳為40質量%以下。又,從製造效率、成本的觀點來看,較佳為10質量%以上,更佳為15質量%以上,進一步較佳為20質量%以上。 Examples of the film before heat treatment of the present invention include: a film containing an organic solvent (film before drying), a film before chemical reaction (precursor film), or a precursor film containing an organic solvent (precursor film before drying). wait. The organic solvent content of the film before heat treatment is preferably 50 mass % or less, more preferably 45 mass % or less, and still more preferably 40 mass % from the viewpoint of being able to fix (hold) both ends of the film before heat treatment for transportation. %the following. Moreover, from the viewpoint of manufacturing efficiency and cost, it is preferably 10 mass% or more, more preferably 15 mass% or more, and further preferably 20 mass% or more.

以下針對為前述薄膜的一例之聚醯亞胺系樹脂薄膜(有時亦稱為聚醯亞胺薄膜)的詳細內容進行說明。一般而言聚醯亞胺系樹脂薄膜係藉由以下而得:將在溶劑中使二胺類與四羧酸類反應所得到之聚醯胺酸(聚醯亞胺前驅物)溶液,塗布在聚醯亞胺薄膜製作用支撐體上並乾燥以作成胚膜(以下亦稱為「聚醯胺酸薄膜」),進一步在聚醯亞胺薄膜製作用支撐體上、或者在從該支撐體剝離之狀態下將胚膜高溫熱處理以進行脫水閉環反應。此聚醯胺酸薄膜即為聚醯亞胺的前驅物薄膜。The details of a polyimide-based resin film (sometimes also referred to as a polyimide film), which is an example of the film, will be described below. Generally speaking, a polyamide-based resin film is obtained by coating a polyamide acid (polyamide precursor) solution obtained by reacting diamines and tetracarboxylic acids in a solvent on a polyamide resin film. On a support for producing a polyimide film and drying it to form an embryonic membrane (hereinafter also referred to as a "polyamide film"), it is further placed on a support for producing a polyimide film or after being peeled off from the support. The embryonic membrane is heat treated at high temperature to perform dehydration and closed-loop reaction. This polyamide film is the precursor film of polyimide.

聚醯胺酸(為聚醯亞胺前驅物,以下亦稱為聚醯胺酸)溶液的塗布,例如能夠適當使用旋塗、刮刀、塗布器、缺角輪塗布器、網版印刷法、狹縫塗布、逆向塗布、浸塗、簾塗、狹縫模塗等以往周知的溶液的塗布方法。The polyamide acid (which is a polyimide precursor, and is also referred to as polyamide acid below) solution can be coated by, for example, spin coating, a doctor blade, a coater, a notch wheel coater, a screen printing method, or a narrow-frame printing method. Conventionally known solution coating methods such as slot coating, reverse coating, dip coating, curtain coating, and slot die coating are used.

就構成聚醯胺酸之二胺類而言,並無特別限制,能夠使用聚醯亞胺合成通常使用之芳香族二胺類、脂肪族二胺類、脂環式二胺類等。從耐熱性的觀點來看,較佳為芳香族二胺類。二胺類可單獨使用亦可併用二種以上。The diamines constituting the polyamide are not particularly limited, and generally used aromatic diamines, aliphatic diamines, alicyclic diamines, etc. can be synthesized using polyimide. From the viewpoint of heat resistance, aromatic diamines are preferred. The diamines may be used alone or in combination of two or more types.

就二胺類而言,並無特別限定,可列舉例如:氧基二苯胺(雙(4-胺基苯基)醚)、對苯二胺(1,4-苯二胺)等。The diamines are not particularly limited, and examples thereof include oxydiphenylamine (bis(4-aminophenyl)ether), p-phenylenediamine (1,4-phenylenediamine), and the like.

就構成聚醯胺酸之四羧酸類而言,能夠使用聚醯亞胺合成通常使用之芳香族四羧酸類(包含其酸酐)、脂肪族四羧酸類(包含其酸酐)、脂環族四羧酸類(包含其酸酐)。此等為酸酐時,於分子內酐結構可為1個亦可為2個,較佳為具有2個酐結構者(二酐)。四羧酸類可單獨使用,亦可併用二種以上。As for the tetracarboxylic acids constituting the polyamide acid, commonly used aromatic tetracarboxylic acids (including their acid anhydrides), aliphatic tetracarboxylic acids (including their acid anhydrides), and alicyclic tetracarboxylic acids (including their acid anhydrides) can be synthesized using polyimide. Acids (including their anhydrides). When these are acid anhydrides, there may be one or two anhydride structures in the molecule, and those having two anhydride structures (dianhydrides) are preferred. Tetracarboxylic acids may be used alone, or two or more types may be used in combination.

就四羧酸而言,並無特別限定,可列舉例如:均苯四甲酸二酐、3,3’,4,4’-聯苯四甲酸二酐等。The tetracarboxylic acid is not particularly limited, and examples thereof include pyromellitic dianhydride, 3,3',4,4'-biphenyltetracarboxylic dianhydride, and the like.

前述聚醯亞胺薄膜,亦可為透明聚醯亞胺薄膜。The aforementioned polyimide film may also be a transparent polyimide film.

針對為前述薄膜的一例之無色透明聚醯亞胺進行說明。以下為了避免複雜,亦簡單記載為透明聚醯亞胺。就透明聚醯亞胺的透明性而言,較佳為總光線穿透率為75%以上者。更佳為80%以上,進一步較佳為83%以上,更進一步較佳為84%以上,特佳為85%以上。前述透明聚醯亞胺的總光線穿透率的上限並未特別限制,但為了作為撓性電子裝置使用,較佳為98%以下,更佳為97%以下。本發明之無色透明聚醯亞胺,較佳為總光線穿透率75%以上的聚醯亞胺。Colorless and transparent polyimide, which is an example of the aforementioned film, will be described. In order to avoid complexity below, it will also be simply described as transparent polyimide. In terms of the transparency of the transparent polyimide, a total light transmittance of 75% or more is preferred. More preferably, it is 80% or more, still more preferably, it is 83% or more, still more preferably, it is 84% or more, and particularly preferably, it is 85% or more. The upper limit of the total light transmittance of the transparent polyimide is not particularly limited, but for use as a flexible electronic device, it is preferably 98% or less, and more preferably 97% or less. The colorless and transparent polyimide of the present invention is preferably a polyimide with a total light transmittance of more than 75%.

就用以得到無色透明性高的聚醯亞胺的芳香族四羧酸類而言,可列舉:4,4’-(2,2-六氟亞異丙基)二鄰苯二甲酸、4,4’-氧基二鄰苯二甲酸、雙(1,3-二側氧基-1,3-二氫-2-苯并呋喃-5-甲酸)1,4-伸苯基、雙(1,3-二側氧基-1,3-二氫-2-苯并呋喃-5-基)苯-1,4-二甲酸酯、4,4’-[4,4’-(3-側氧基-1,3-二氫-2-苯并呋喃-1,1-二基)雙(苯-1,4-二基氧基)]二苯-1,2-二甲酸、3,3’,4,4’-二苯基酮四甲酸、4,4’-[(3-側氧基-1,3-二氫-2-苯并呋喃-1,1-二基)雙(甲苯-2,5-二基氧基)]二苯-1,2-二甲酸、4,4’-[(3-側氧基-1,3-二氫-2-苯并呋喃-1,1-二基)雙(1,4-二甲苯-2,5-二基氧基)]二苯-1,2-二甲酸、4,4’-[4,4’-(3-側氧基-1,3-二氫-2-苯并呋喃-1,1-二基)雙(4-異丙基-甲苯-2,5-二基氧基)]二苯-1,2-二甲酸、4,4’-[4,4’-(3-側氧基-1,3-二氫-2-苯并呋喃-1,1-二基)雙(萘-1,4-二基氧基)]二苯-1,2-二甲酸、4,4’-[4,4’-(3H-2,1-苯并㗁硫醇(benzoxathiol)-1,1-二氧代-3,3-二基)雙(苯-1,4-二基氧基)]二苯-1,2-二甲酸、4,4’-二苯基酮四甲酸、4,4’-[(3H-2,1-苯并㗁硫醇-1,1-二氧代-3,3-二基)雙(甲苯-2,5-二基氧基)]二苯-1,2-二甲酸、4,4’-[(3H-2,1-苯并㗁硫醇-1,1-二氧代-3,3-二基)雙(1,4-二甲苯-2,5-二基氧基)]二苯-1,2-二甲酸、4,4’-[4,4’-(3H-2,1-苯并㗁硫醇-1,1-二氧代-3,3-二基)雙(4-異丙基-甲苯-2,5-二基氧基)]二苯-1,2-二甲酸、4,4’-[4,4’-(3H-2,1-苯并㗁硫醇-1,1-二氧代-3,3-二基)雙(萘-1,4-二基氧基)]二苯-1,2-二甲酸、3,3’,4,4’-二苯基酮四甲酸、3,3’,4,4’-二苯基酮四甲酸、3,3’,4,4’-二苯基碸四甲酸、3,3’,4,4’-聯苯四甲酸、2,3,3’,4’-聯苯四甲酸、均苯四甲酸、4,4’-[螺(𠮿-9,9’-茀)-2,6-二基雙(氧基羰基)]二鄰苯二甲酸、4,4’-[螺(𠮿-9,9’-茀)-3,6-二基雙(氧基羰基)]二鄰苯二甲酸等四羧酸及此等的酸酐。此等之中,適合為具有2個酸酐結構之二酐,尤其是較佳為4,4’-(2,2-六氟亞異丙基)二鄰苯二甲酸酐、4,4’-氧基二鄰苯二甲酸酐。此外,芳香族四羧酸類可單獨使用,亦可併用二種以上。當重視耐熱性的情況,芳香族四羧酸類的共聚量係例如較佳為全部四羧酸類的50質量%以上,更佳為60質量%以上,進一步較佳為70質量%以上,更進一步較佳為80質量%以上,特佳為90質量%以上,為100質量%亦無妨。Examples of aromatic tetracarboxylic acids used to obtain colorless and highly transparent polyimide include: 4,4'-(2,2-hexafluoroisopropylidene)diphthalic acid, 4, 4'-Oxydiphthalic acid, bis(1,3-bisoxy-1,3-dihydro-2-benzofuran-5-carboxylic acid) 1,4-phenylene, bis(1 ,3-Dihydro-1,3-dihydro-2-benzofuran-5-yl)benzene-1,4-dicarboxylate, 4,4'-[4,4'-(3- Pendant oxy-1,3-dihydro-2-benzofuran-1,1-diyl)bis(benzene-1,4-diyloxy)]diphenyl-1,2-dicarboxylic acid, 3, 3',4,4'-diphenylketotetracarboxylic acid, 4,4'-[(3-side oxy-1,3-dihydro-2-benzofuran-1,1-diyl)bis( Toluene-2,5-diyloxy)]diphenyl-1,2-dicarboxylic acid, 4,4'-[(3-side oxy-1,3-dihydro-2-benzofuran-1, 1-Diyl)bis(1,4-dimethylbenzene-2,5-diyloxy)]diphenyl-1,2-dicarboxylic acid, 4,4'-[4,4'-(3-side oxygen 1,3-Dihydro-2-benzofuran-1,1-diyl)bis(4-isopropyl-toluene-2,5-diyloxy)]diphenyl-1,2-di Formic acid, 4,4'-[4,4'-(3-side oxy-1,3-dihydro-2-benzofuran-1,1-diyl)bis(naphthalene-1,4-diyl) Oxygen)] diphenyl-1,2-dicarboxylic acid, 4,4'-[4,4'-(3H-2,1-benzothiol)-1,1-dioxo-3 ,3-Diyl)bis(phenyl-1,4-diyloxy)]diphenyl-1,2-dicarboxylic acid, 4,4'-diphenylketotetracarboxylic acid, 4,4'-[(3H -2,1-Benzethanethiol-1,1-dioxo-3,3-diyl)bis(toluene-2,5-diyloxy)]diphenyl-1,2-dicarboxylic acid, 4,4'-[(3H-2,1-benzoethanethiol-1,1-dioxo-3,3-diyl)bis(1,4-xylene-2,5-diyloxy base)] diphenyl-1,2-dicarboxylic acid, 4,4'-[4,4'-(3H-2,1-benzoethanethiol-1,1-dioxo-3,3-di base)bis(4-isopropyl-toluene-2,5-diyloxy)]diphenyl-1,2-dicarboxylic acid, 4,4'-[4,4'-(3H-2,1- Benzethanethiol-1,1-dioxo-3,3-diyl)bis(naphthalene-1,4-diyloxy)]diphenyl-1,2-dicarboxylic acid, 3,3', 4,4'-diphenylketotetracarboxylic acid, 3,3',4,4'-diphenylketotetracarboxylic acid, 3,3',4,4'-diphenyltetracarboxylic acid, 3,3',4,4'-biphenyltetracarboxylic acid, 2,3,3',4'-biphenyltetracarboxylic acid, pyromellitic acid, 4,4'-[spiro(𠮿 -9,9'-茀)-2,6-diylbis(oxycarbonyl)]diphthalic acid, 4,4'-[spiro(𠮿 Tetracarboxylic acids such as -9,9'-fluorine)-3,6-diylbis(oxycarbonyl)]diphthalic acid and their anhydrides. Among these, dianhydrides having two acid anhydride structures are suitable, and 4,4'-(2,2-hexafluoroisopropylidene)diphthalic anhydride and 4,4'- Oxydiphthalic anhydride. In addition, aromatic tetracarboxylic acids may be used alone, or two or more types may be used in combination. When attaching importance to heat resistance, the copolymerization amount of aromatic tetracarboxylic acids is, for example, preferably 50 mass% or more of all tetracarboxylic acids, more preferably 60 mass% or more, further preferably 70 mass% or more, and still more preferably Preferably, it is 80 mass % or more, and particularly preferably, it is 90 mass % or more, and 100 mass % may also be sufficient.

就脂環式四羧酸類而言,可列舉:1,2,3,4-環丁烷四甲酸、1,2,3,4-環戊烷四甲酸、1,2,3,4-環己烷四甲酸、1,2,4,5-環己烷四甲酸、3,3’,4,4’-雙環己基四甲酸、雙環[2,2,1]庚烷-2,3,5,6-四甲酸、雙環[2,2,2]辛烷-2,3,5,6-四甲酸、雙環[2,2,2]辛-7-烯-2,3,5,6-四甲酸、四氫蒽-2,3,6,7-四甲酸、十四氫-1,4:5,8:9,10-三甲橋蒽(trimethanoanthracene)-2,3,6,7-四甲酸、十氫萘-2,3,6,7-四甲酸、十氫-1,4:5,8-二甲橋萘(dimethanonaphthalene)-2,3,6,7-四甲酸、十氫-1,4-乙橋-5,8-甲橋萘-2,3,6,7-四甲酸(decahydro-1,4-ethano-5,8-methanonaphthalene-2,3,6,7-tetracarboxylic acid)、降莰烷-2-螺-α-環戊酮-α’-螺-2”-降莰烷-5,5”,6,6”-四甲酸(別稱「降莰烷-2-螺-2’-環戊酮-5’-螺-2”-降莰烷-5,5”,6,6”-四甲酸」)、甲基降莰烷-2-螺-α-環戊酮-α’-螺-2”-(甲基降莰烷)-5,5”,6,6”-四甲酸、降莰烷-2-螺-α-環己酮-α’-螺-2”-降莰烷-5,5”,6,6”-四甲酸(別稱「降莰烷-2-螺-2’-環己酮-6’-螺-2”-降莰烷-5,5”,6,6”-四甲酸」)、甲基降莰烷-2-螺-α-環己酮-α’-螺-2”-(甲基降莰烷)-5,5”,6,6”-四甲酸、降莰烷-2-螺-α-環丙酮-α’-螺-2”-降莰烷-5,5”,6,6”-四甲酸、降莰烷-2-螺-α-環丁酮-α’-螺-2”-降莰烷-5,5”,6,6”-四甲酸、降莰烷-2-螺-α-環庚酮-α’-螺-2”-降莰烷-5,5”,6,6”-四甲酸、降莰烷-2-螺-α-環辛酮-α’-螺-2”-降莰烷-5,5”,6,6”-四甲酸、降莰烷-2-螺-α-環壬酮-α’-螺-2”-降莰烷-5,5”,6,6”-四甲酸、降莰烷-2-螺-α-環癸酮-α’-螺-2”-降莰烷-5,5”,6,6”-四甲酸、降莰烷-2-螺-α-環十一酮-α’-螺-2”-降莰烷-5,5”,6,6”-四甲酸、降莰烷-2-螺-α-環十二酮-α’-螺-2”-降莰烷-5,5”,6,6”-四甲酸、降莰烷-2-螺-α-環十三酮-α’-螺-2”-降莰烷-5,5”,6,6”-四甲酸、降莰烷-2-螺-α-環十四酮-α’-螺-2”-降莰烷-5,5”,6,6”-四甲酸、降莰烷-2-螺-α-環十五酮-α’-螺-2”-降莰烷-5,5”,6,6”-四甲酸、降莰烷-2-螺-α-(甲基環戊酮)-α’-螺-2”-降莰烷-5,5”,6,6”-四甲酸、降莰烷-2-螺-α-(甲基環己酮)-α’-螺-2”-降莰烷-5,5”,6,6”-四甲酸等四羧酸及此等的酸酐。此等之中,適合為具有2個酸酐結構之二酐,尤其是較佳為1,2,3,4-環丁烷四甲酸二酐、1,2,3,4,-環己烷四甲酸二酐、1,2,4,5-環己烷四甲酸二酐,更佳為1,2,3,4-環丁烷四甲酸二酐、1,2,4,5-環己烷四甲酸二酐,進一步較佳為1,2,3,4-環丁烷四甲酸二酐。此外,此等可單獨使用,亦可併用二種以上。當重視透明性的情況,脂環式四羧酸類的共聚量係例如較佳為全部四羧酸類的50質量%以上,更佳為60質量%以上,進一步較佳為70質量%以上,更進一步較佳為80質量%以上,特佳為90質量%以上,為100質量%亦無妨。As for alicyclic tetracarboxylic acids, examples include: 1,2,3,4-cyclobutanetetracarboxylic acid, 1,2,3,4-cyclopentanetetracarboxylic acid, 1,2,3,4-cyclobutanetetracarboxylic acid Hexanetetracarboxylic acid, 1,2,4,5-cyclohexanetetracarboxylic acid, 3,3',4,4'-bicyclohexyltetracarboxylic acid, bicyclo[2,2,1]heptane-2,3,5 ,6-tetracarboxylic acid, bicyclo[2,2,2]octane-2,3,5,6-tetracarboxylic acid, bicyclo[2,2,2]octane-7-ene-2,3,5,6- Tetracarboxylic acid, tetrahydroanthracene-2,3,6,7-tetracarboxylic acid, tetrahydroanthracene-1,4:5,8:9,10-trimethanoanthracene-2,3,6,7-tetracarboxylic acid Formic acid, decahydronaphthalene-2,3,6,7-tetracarboxylic acid, decahydro-1,4:5,8-dimethanonaphthalene-2,3,6,7-tetracarboxylic acid, decahydro- 1,4-ethano-5,8-methanonaphthalene-2,3,6,7-tetracarboxylic acid ), norbornane-2-spiro-α-cyclopentanone-α'-spiro-2"-norbornane-5,5",6,6"-tetracarboxylic acid (also known as "norbornane-2-spiro- -2'-cyclopentanone-5'-spiro-2”-norbornane-5,5”,6,6”-tetracarboxylic acid”), methylnorbornane-2-spiro-α-cyclopentanone -α'-spiro-2"-(methylnorbornane)-5,5",6,6"-tetracarboxylic acid, norbornane-2-spiro-α-cyclohexanone-α'-spiro-2 "-Norbornane-5,5",6,6"-tetracarboxylic acid (also known as "norbornane-2-spiro-2'-cyclohexanone-6'-spiro-2"-norbornane-5, 5",6,6"-tetracarboxylic acid"), methylnorbornane-2-spiro-α-cyclohexanone-α'-spiro-2"-(methylnorbornane)-5,5", 6,6”-tetracarboxylic acid, norbornane-2-spiro-α-cyclopropanone-α’-spiro-2”-norbornane-5,5”,6,6”-tetracarboxylic acid, norbornane- 2-Spiro-α-cyclobutanone-α'-spiro-2”-norbornane-5,5”,6,6”-tetracarboxylic acid, norbornane-2-spiro-α-cycloheptanone-α '-Spiro-2"-norbornane-5,5",6,6"-tetracarboxylic acid, norbornane-2-spiro-α-cyclooctanone-α'-spiro-2"-norbornane- 5,5”,6,6”-tetracarboxylic acid, norbornane-2-spiro-α-cyclononanone-α’-spiro-2”-norbornane-5,5”,6,6”-tetracarboxylic acid Formic acid, norbornane-2-spiro-α-cyclodecanone-α'-spiro-2”-norbornane-5,5”,6,6”-tetracarboxylic acid, norbornane-2-spiro-α -Cyclundecanone-α'-spiro-2"-norbornane-5,5",6,6"-tetracarboxylic acid, norbornane-2-spiro-α-cyclododecanone-α'-spiro -2"-norbornane-5,5",6,6"-tetracarboxylic acid, norbornane-2-spiro-α-cyclotridecone-α'-spiro-2"-norbornane-5, 5”,6,6”-tetracarboxylic acid, norbornane-2-spiro-α-cyclotetradecanone-α’-spiro-2”-norbornane-5,5”,6,6”-tetracarboxylic acid , norbornane-2-spiro-α-cyclopentadecanone-α'-spiro-2”-norbornane-5,5”,6,6”-tetracarboxylic acid, norbornane-2-spiro-α -(Methylcyclopentanone)-α'-spiro-2”-norbornane-5,5”,6,6”-tetracarboxylic acid, norbornane-2-spiro-α-(methylcyclohexanone )-α'-spiro-2"-norbornane-5,5", 6,6"-tetracarboxylic acid and other tetracarboxylic acids and their anhydrides. Among these, dianhydrides having two acid anhydride structures are suitable, and 1,2,3,4-cyclobutanetetracarboxylic dianhydride and 1,2,3,4-cyclohexanetetracarboxylic dianhydride are particularly preferred. Formic dianhydride, 1,2,4,5-cyclohexanetetracarboxylic dianhydride, more preferably 1,2,3,4-cyclobutanetetracarboxylic dianhydride, 1,2,4,5-cyclohexane Tetracarboxylic dianhydride, more preferably 1,2,3,4-cyclobutane tetracarboxylic dianhydride. In addition, these may be used individually or in combination of 2 or more types. When transparency is important, the copolymerization amount of alicyclic tetracarboxylic acids is, for example, preferably 50 mass% or more of all tetracarboxylic acids, more preferably 60 mass% or more, further preferably 70 mass% or more, and further still It is preferably 80 mass% or more, particularly preferably 90 mass% or more, and 100 mass% may also be used.

就三羧酸類而言,可列舉:偏苯三酸(trimellitic acid)、1,2,5-萘三甲酸、二苯基醚-3,3’,4’-三甲酸、二苯基碸-3,3’,4’-三甲酸等芳香族三羧酸、或者六氫偏苯三酸等上述芳香族三羧酸的氫化物、乙二醇雙偏苯三酸酯、丙二醇雙偏苯三酸酯、1,4-丁二醇雙偏苯三酸酯、聚乙二醇雙偏苯三酸酯等烷二醇雙偏苯三酸酯、及此等的一酐、酯化物。此等之中,適合為具有1個酸酐結構之一酐,尤其是較佳為偏苯三酸酐、六氫偏苯三酸酐。此外,此等可單獨使用亦可組合複數種使用。Examples of tricarboxylic acids include trimellitic acid, 1,2,5-naphthalenetricarboxylic acid, diphenylether-3,3',4'-tricarboxylic acid, and diphenyltricarboxylic acid. Aromatic tricarboxylic acids such as 3,3',4'-tricarboxylic acid, or hydrides of the above aromatic tricarboxylic acids such as hexahydrotrimellitic acid, ethylene glycol bis-trimellitate, propylene glycol bis-trimellitic acid Acid esters, alkylene glycol bis-trimellitic acid esters such as 1,4-butanediol bis-trimellitate, polyethylene glycol bis-trimellitate, and their monoanhydrides and esterified products. Among these, an anhydride having one acid anhydride structure is suitable, and trimellitic anhydride and hexahydrotriellitic anhydride are particularly preferred. In addition, these can be used individually or in combination of multiple types.

就二羧酸類而言,可列舉:對苯二甲酸、間苯二甲酸、鄰苯二甲酸、萘二甲酸、4,4’-氧基二苯甲酸等芳香族二羧酸、或者1,6-環己烷二甲酸等上述芳香族二羧酸的氫化物、草酸、丁二酸、戊二酸、己二酸、庚二酸、辛二酸、壬二酸、癸二酸、十一烷二酸、十二烷二酸、2-甲基丁二酸、及此等的醯氯或者酯化物等。此等之中,適合為芳香族二羧酸及其氫化物,尤其是較佳為對苯二甲酸、1,6-環己烷二甲酸、4,4’-氧基二苯甲酸。此外,二羧酸類可單獨使用亦可組合複數種使用。Examples of dicarboxylic acids include aromatic dicarboxylic acids such as terephthalic acid, isophthalic acid, phthalic acid, naphthalene dicarboxylic acid, and 4,4'-oxydibenzoic acid, or 1,6 -Hydrogenates of the above aromatic dicarboxylic acids such as cyclohexanedicarboxylic acid, oxalic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, undecane Diacid, dodecanedioic acid, 2-methylsuccinic acid, and their chloride or esterified products, etc. Among these, aromatic dicarboxylic acids and their hydrogenates are suitable, and terephthalic acid, 1,6-cyclohexanedicarboxylic acid, and 4,4'-oxydibenzoic acid are particularly preferred. In addition, dicarboxylic acids can be used alone or in combination of plural types.

就得到無色透明性高的聚醯亞胺所用的二胺類或者異氰酸酯類而言,並無特別限制,能夠使用:通常使用於聚醯亞胺合成、聚醯胺醯亞胺合成、聚醯胺合成之芳香族二胺類、脂肪族二胺類、脂環式二胺類、芳香族二異氰酸酯類、脂肪族二異氰酸酯類、脂環式二異氰酸酯類等。從耐熱性的觀點來看,較佳為芳香族二胺類,從透明性的觀點來看較佳為脂環式二胺類。又,若使用具有苯并㗁唑結構之芳香族二胺類,則變得可在顯現高耐熱性的同時,也顯現高彈性模數、低熱收縮性、低線膨脹係數。二胺類及異氰酸酯類,可單獨使用亦可併用二種以上。The diamines or isocyanates used to obtain a colorless and highly transparent polyamide imide are not particularly limited and can be used: usually used in polyamide imine synthesis, polyamide imine synthesis, and polyamide imine synthesis. Synthetic aromatic diamines, aliphatic diamines, alicyclic diamines, aromatic diisocyanates, aliphatic diisocyanates, alicyclic diisocyanates, etc. From the viewpoint of heat resistance, aromatic diamines are preferred, and from the viewpoint of transparency, alicyclic diamines are preferred. Furthermore, when aromatic diamines having a benzoethazole structure are used, it becomes possible to exhibit high heat resistance, high elastic modulus, low thermal shrinkage, and low linear expansion coefficient. Diamines and isocyanates may be used alone or two or more types may be used in combination.

就芳香族二胺類而言,可列舉例如:2,2’-二甲基-4,4’-二胺基聯苯、1,4-雙[2-(4-胺基苯基)-2-丙基]苯、1,4-雙(4-胺基-2-三氟甲基苯氧基)苯、4,4’-二胺基-2,2’-二(三氟甲基)聯苯、4,4’-雙(4-胺基苯氧基)聯苯、4,4’-雙(3-胺基苯氧基)聯苯、雙[4-(3-胺基苯氧基)苯基]酮、雙[4-(3-胺基苯氧基)苯基]硫醚、雙[4-(3-胺基苯氧基)苯基]碸、2,2-雙[4-(3-胺基苯氧基)苯基]丙烷、2,2-雙[4-(3-胺基苯氧基)苯基]-1,1,1,3,3,3-六氟丙烷、間苯二胺、鄰苯二胺、對苯二胺、間胺基苄胺、對胺基苄胺、4-胺基-N-(4-胺基苯基)苯甲醯胺、3,3’-二胺基二苯基醚、3,4’-二胺基二苯基醚、4,4’-二胺基二苯基醚、2,2’-三氟甲基-4,4’-二胺基二苯基醚、3,3’-二胺基二苯基硫醚、3,4’-二胺基二苯基硫醚、4,4’-二胺基二苯基硫醚、3,3’-二胺基二苯基亞碸、3,4’-二胺基二苯基亞碸、4,4’-二胺基二苯基亞碸、3,3’-二胺基二苯基碸、3,4’-二胺基二苯基碸、4,4’-二胺基二苯基碸、3,3’-二胺基二苯基酮、3,4’-二胺基二苯基酮、4,4’-二胺基二苯基酮、3,3’-二胺基二苯基甲烷、3,4’-二胺基二苯基甲烷、4,4’-二胺基二苯基甲烷、雙[4-(4-胺基苯氧基)苯基]甲烷、1,1-雙[4-(4-胺基苯氧基)苯基]乙烷、1,2-雙[4-(4-胺基苯氧基)苯基]乙烷、1,1-雙[4-(4-胺基苯氧基)苯基]丙烷、1,2-雙[4-(4-胺基苯氧基)苯基]丙烷、1,3-雙[4-(4-胺基苯氧基)苯基]丙烷、2,2-雙[4-(4-胺基苯氧基)苯基]丙烷、1,1-雙[4-(4-胺基苯氧基)苯基]丁烷、1,3-雙[4-(4-胺基苯氧基)苯基]丁烷、1,4-雙[4-(4-胺基苯氧基)苯基]丁烷、2,2-雙[4-(4-胺基苯氧基)苯基]丁烷、2,3-雙[4-(4-胺基苯氧基)苯基]丁烷、2-[4-(4-胺基苯氧基)苯基]-2-[4-(4-胺基苯氧基)-3-甲基苯基]丙烷、2,2-雙[4-(4-胺基苯氧基)-3-甲基苯基]丙烷、2-[4-(4-胺基苯氧基)苯基]-2-[4-(4-胺基苯氧基)-3,5-二甲基苯基]丙烷、2,2-雙[4-(4-胺基苯氧基)-3,5-二甲基苯基]丙烷、2,2-雙[4-(4-胺基苯氧基)苯基]-1,1,1,3,3,3-六氟丙烷、1,4-雙(3-胺基苯氧基)苯、1,3-雙(3-胺基苯氧基)苯、1,4-雙(4-胺基苯氧基)苯、4,4’-雙(4-胺基苯氧基)聯苯、雙[4-(4-胺基苯氧基)苯基]酮、雙[4-(4-胺基苯氧基)苯基]硫醚、雙[4-(4-胺基苯氧基)苯基]亞碸、雙[4-(4-胺基苯氧基)苯基]碸、雙[4-(3-胺基苯氧基)苯基]醚、雙[4-(4-胺基苯氧基)苯基]醚、1,3-雙[4-(4-胺基苯氧基)苯甲醯基]苯、1,3-雙[4-(3-胺基苯氧基)苯甲醯基]苯、1,4-雙[4-(3-胺基苯氧基)苯甲醯基]苯、4,4’-雙[(3-胺基苯氧基)苯甲醯基]苯、1,1-雙[4-(3-胺基苯氧基)苯基]丙烷、1,3-雙[4-(3-胺基苯氧基)苯基]丙烷、3,4’-二胺基二苯基硫醚、2,2-雙[3-(3-胺基苯氧基)苯基]-1,1,1,3,3,3-六氟丙烷、雙[4-(3-胺基苯氧基)苯基]甲烷、1,1-雙[4-(3-胺基苯氧基)苯基]乙烷、1,2-雙[4-(3-胺基苯氧基)苯基]乙烷、雙[4-(3-胺基苯氧基)苯基]亞碸、4,4’-雙[3-(4-胺基苯氧基)苯甲醯基]二苯基醚、4,4’-雙[3-(3-胺基苯氧基)苯甲醯基]二苯基醚、4,4’-雙[4-(4-胺基-α,α-二甲基苄基)苯氧基]二苯基酮、4,4’-雙[4-(4-胺基-α,α-二甲基苄基)苯氧基]二苯基碸、雙[4-{4-(4-胺基苯氧基)苯氧基}苯基]碸、1,4-雙[4-(4-胺基苯氧基)苯氧基-α,α-二甲基苄基]苯、1,3-雙[4-(4-胺基苯氧基)苯氧基-α,α-二甲基苄基]苯、1,3-雙[4-(4-胺基-6-三氟甲基苯氧基)-α,α-二甲基苄基]苯、1,3-雙[4-(4-胺基-6-氟苯氧基)-α,α-二甲基苄基]苯、1,3-雙[4-(4-胺基-6-甲基苯氧基)-α,α-二甲基苄基]苯、1,3-雙[4-(4-胺基-6-氰基苯氧基)-α,α-二甲基苄基]苯、3,3’-二胺基-4,4’-二苯氧基二苯基酮、4,4’-二胺基-5,5’-二苯氧基二苯基酮、3,4’-二胺基-4,5’-二苯氧基二苯基酮、3,3’-二胺基-4-苯氧基二苯基酮、4,4’-二胺基-5-苯氧基二苯基酮、3,4’-二胺基-4-苯氧基二苯基酮、3,4’-二胺基-5’-苯氧基二苯基酮、3,3’-二胺基-4,4’-二聯苯氧基二苯基酮、4,4’-二胺基-5,5’-二聯苯氧基二苯基酮、3,4’-二胺基-4,5’-二聯苯氧基二苯基酮、3,3’-二胺基-4-聯苯氧基二苯基酮、4,4’-二胺基-5-聯苯氧基二苯基酮、3,4’-二胺基-4-聯苯氧基二苯基酮、3,4’-二胺基-5’-聯苯氧基二苯基酮、1,3-雙(3-胺基-4-苯氧基苯甲醯基)苯、1,4-雙(3-胺基-4-苯氧基苯甲醯基)苯、1,3-雙(4-胺基-5-苯氧基苯甲醯基)苯、1,4-雙(4-胺基-5-苯氧基苯甲醯基)苯、1,3-雙(3-胺基-4-聯苯氧基苯甲醯基)苯、1,4-雙(3-胺基-4-聯苯氧基苯甲醯基)苯、1,3-雙(4-胺基-5-聯苯氧基苯甲醯基)苯、1,4-雙(4-胺基-5-聯苯氧基苯甲醯基)苯、2,6-雙[4-(4-胺基-α,α-二甲基苄基)苯氧基]苯甲腈、4,4’-[9H-茀-9,9-二基]雙苯胺(別稱「9,9-雙(4-胺基苯基)茀」)、螺(𠮿-9,9’-茀)-2,6-二基雙(氧基羰基)]雙苯胺、4,4’-[螺(𠮿-9,9’-茀)-2,6-二基雙(氧基羰基)]雙苯胺、4,4’-[螺(𠮿-9,9’-茀)-3,6-二基雙(氧基羰基)]雙苯胺等。又,上述芳香族二胺的芳香環上的氫原子的一部分或者全部,亦可被鹵素原子、碳數1~3的烷基或者烷氧基、或氰基取代,再者,前述碳數1~3的烷基或者烷氧基的氫原子的一部分或者全部亦可被鹵素原子取代。又,就前述具有苯并㗁唑結構之芳香族二胺類而言,並無特別限定,可列舉例如:5-胺基-2-(對胺基苯基)苯并㗁唑、6-胺基-2-(對胺基苯基)苯并㗁唑、5-胺基-2-(間胺基苯基)苯并㗁唑、6-胺基-2-(間胺基苯基)苯并㗁唑、2,2’-對伸苯基雙(5-胺基苯并㗁唑)、2,2’-對伸苯基雙(6-胺基苯并㗁唑)、1-(5-胺基苯并㗁唑)-4-(6-胺基苯并㗁唑)苯、2,6-(4,4’-二胺基二苯基)苯并[1,2-d:5,4-d’]雙㗁唑、2,6-(4,4’-二胺基二苯基)苯并[1,2-d:4,5-d’]雙㗁唑、2,6-(3,4’-二胺基二苯基)苯并[1,2-d:5,4-d’]雙㗁唑、2,6-(3,4’-二胺基二苯基)苯并[1,2-d:4,5-d’]雙㗁唑、2,6-(3,3’-二胺基二苯基)苯并[1,2-d:5,4-d’]雙㗁唑、2,6-(3,3’-二胺基二苯基)苯并[1,2-d:4,5-d’]雙㗁唑等。此等之中,尤其是較佳為4,4’-二胺基-2,2’-二(三氟甲基)聯苯、4-胺基-N-(4-胺基苯基)苯甲醯胺、4,4’-二胺基二苯基碸、3,3’-二胺基二苯基酮。此外,芳香族二胺類可單獨使用亦可組合複數種使用。Examples of aromatic diamines include: 2,2'-dimethyl-4,4'-diaminobiphenyl, 1,4-bis[2-(4-aminophenyl)- 2-propyl]benzene, 1,4-bis(4-amino-2-trifluoromethylphenoxy)benzene, 4,4'-diamino-2,2'-bis(trifluoromethyl) )biphenyl, 4,4'-bis(4-aminophenoxy)biphenyl, 4,4'-bis(3-aminophenoxy)biphenyl, bis[4-(3-aminobenzene) Oxy)phenyl]ketone, bis[4-(3-aminophenoxy)phenyl]sulfide, bis[4-(3-aminophenoxy)phenyl]terine, 2,2-bis [4-(3-Aminophenoxy)phenyl]propane, 2,2-bis[4-(3-aminophenoxy)phenyl]-1,1,1,3,3,3- Hexafluoropropane, m-phenylenediamine, o-phenylenediamine, p-phenylenediamine, m-aminobenzylamine, p-aminobenzylamine, 4-amino-N-(4-aminophenyl)benzamide , 3,3'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 4,4'-diaminodiphenyl ether, 2,2'-trifluoromethyl- 4,4'-diaminodiphenyl ether, 3,3'-diaminodiphenyl sulfide, 3,4'-diaminodiphenyl sulfide, 4,4'-diaminobis Phenyl sulfide, 3,3'-diaminodiphenyl sulfide, 3,4'-diaminodiphenyl sulfide, 4,4'-diaminodiphenyl sulfoxide, 3,3 '-Diaminodiphenyl terine, 3,4'-diaminodiphenyl terine, 4,4'-diaminodiphenyl terine, 3,3'-diamino diphenyl ketone, 3 ,4'-Diaminodiphenylketone, 4,4'-Diaminodiphenylketone, 3,3'-Diaminodiphenylmethane, 3,4'-Diaminodiphenylmethane , 4,4'-diaminodiphenylmethane, bis[4-(4-aminophenoxy)phenyl]methane, 1,1-bis[4-(4-aminophenoxy)benzene ethane, 1,2-bis[4-(4-aminophenoxy)phenyl]ethane, 1,1-bis[4-(4-aminophenoxy)phenyl]propane, 1,2-bis[4-(4-aminophenoxy)phenyl]propane, 1,3-bis[4-(4-aminophenoxy)phenyl]propane, 2,2-bis[ 4-(4-Aminophenoxy)phenyl]propane, 1,1-bis[4-(4-aminophenoxy)phenyl]butane, 1,3-bis[4-(4- Aminophenoxy)phenyl]butane, 1,4-bis[4-(4-aminophenoxy)phenyl]butane, 2,2-bis[4-(4-aminophenoxy) base)phenyl]butane, 2,3-bis[4-(4-aminophenoxy)phenyl]butane, 2-[4-(4-aminophenoxy)phenyl]-2 -[4-(4-Aminophenoxy)-3-methylphenyl]propane, 2,2-bis[4-(4-aminophenoxy)-3-methylphenyl]propane, 2-[4-(4-Aminophenoxy)phenyl]-2-[4-(4-aminophenoxy)-3,5-dimethylphenyl]propane, 2,2-bis [4-(4-Aminophenoxy)-3,5-dimethylphenyl]propane, 2,2-bis[4-(4-aminophenoxy)phenyl]-1,1, 1,3,3,3-hexafluoropropane, 1,4-bis(3-aminophenoxy)benzene, 1,3-bis(3-aminophenoxy)benzene, 1,4-bis( 4-Aminophenoxy)benzene, 4,4'-bis(4-aminophenoxy)biphenyl, bis[4-(4-aminophenoxy)phenyl]one, bis[4- (4-Aminophenoxy)phenyl]sulfide, bis[4-(4-aminophenoxy)phenyl]sulfoxide, bis[4-(4-aminophenoxy)phenyl] Bis[4-(3-aminophenoxy)phenyl]ether, bis[4-(4-aminophenoxy)phenyl]ether, 1,3-bis[4-(4-amine) phenoxy)benzyl]benzene, 1,3-bis[4-(3-aminophenoxy)benzyl]benzene, 1,4-bis[4-(3-aminobenzene) Oxy)benzyl]benzene, 4,4'-bis[(3-aminophenoxy)benzyl]benzene, 1,1-bis[4-(3-aminophenoxy) Phenyl]propane, 1,3-bis[4-(3-aminophenoxy)phenyl]propane, 3,4'-diaminodiphenyl sulfide, 2,2-bis[3-( 3-Aminophenoxy)phenyl]-1,1,1,3,3,3-hexafluoropropane, bis[4-(3-aminophenoxy)phenyl]methane, 1,1- Bis[4-(3-aminophenoxy)phenyl]ethane, 1,2-bis[4-(3-aminophenoxy)phenyl]ethane, bis[4-(3-amine phenoxy)phenyl]terine, 4,4'-bis[3-(4-aminophenoxy)benzyl]diphenyl ether, 4,4'-bis[3-(3 -Aminophenoxy)benzoyl]diphenyl ether, 4,4'-bis[4-(4-amino-α,α-dimethylbenzyl)phenoxy]diphenylketone , 4,4'-bis[4-(4-amino-α,α-dimethylbenzyl)phenoxy]diphenylsine, bis[4-{4-(4-aminophenoxy) )phenoxy}phenyl]benzene, 1,4-bis[4-(4-aminophenoxy)phenoxy-α,α-dimethylbenzyl]benzene, 1,3-bis[4 -(4-Aminophenoxy)phenoxy-α,α-dimethylbenzyl]benzene, 1,3-bis[4-(4-amino-6-trifluoromethylphenoxy) -α,α-dimethylbenzyl]benzene, 1,3-bis[4-(4-amino-6-fluorophenoxy)-α,α-dimethylbenzyl]benzene, 1,3 -Bis[4-(4-amino-6-methylphenoxy)-α,α-dimethylbenzyl]benzene, 1,3-bis[4-(4-amino-6-cyano) Phenoxy)-α,α-dimethylbenzyl]benzene, 3,3'-diamino-4,4'-diphenoxydiphenylketone, 4,4'-diamino-5 ,5'-diphenoxydiphenyl ketone, 3,4'-diamino-4,5'-diphenoxydiphenyl ketone, 3,3'-diamino-4-phenoxy Diphenyl ketone, 4,4'-diamino-5-phenoxydiphenyl ketone, 3,4'-diamino-4-phenoxydiphenyl ketone, 3,4'-diamine -5'-phenoxydiphenyl ketone, 3,3'-diamino-4,4'-diphenoxydiphenyl ketone, 4,4'-diamino-5,5' -Diphenoxydiphenyl ketone, 3,4'-diamino-4,5'-diphenoxydiphenyl ketone, 3,3'-diamino-4-diphenyloxy Diphenyl ketone, 4,4'-diamino-5-biphenyloxydiphenyl ketone, 3,4'-diamino-4-biphenyloxydiphenyl ketone, 3,4'- Diamino-5'-biphenoxydiphenyl ketone, 1,3-bis(3-amino-4-phenoxybenzoyl)benzene, 1,4-bis(3-amino- 4-phenoxybenzyl)benzene, 1,3-bis(4-amino-5-phenoxybenzyl)benzene, 1,4-bis(4-amino-5-phenoxy) benzene, 1,3-bis(3-amino-4-biphenyloxybenzyl)benzene, 1,4-bis(3-amino-4-biphenyloxybenzene) Formyl)benzene, 1,3-bis(4-amino-5-biphenyloxybenzyl)benzene, 1,4-bis(4-amino-5-biphenyloxybenzyl)benzene benzene, 2,6-bis[4-(4-amino-α,α-dimethylbenzyl)phenoxy]benzonitrile, 4,4'-[9H-fluorine-9,9- Diyl]bisaniline (also known as "9,9-bis(4-aminophenyl)benzene"), spiro(𠮿 -9,9'-茀)-2,6-diylbis(oxycarbonyl)]bisaniline, 4,4'-[spiro(𠮿 -9,9'-茀)-2,6-diylbis(oxycarbonyl)]bisaniline, 4,4'-[spiro(𠮿 -9,9'-fluoro)-3,6-diylbis(oxycarbonyl)]bisaniline, etc. In addition, part or all of the hydrogen atoms on the aromatic ring of the above-mentioned aromatic diamine may be substituted by a halogen atom, an alkyl group or an alkoxy group having 1 to 3 carbon atoms, or a cyano group. Furthermore, the above-mentioned alkyl group having 1 to 3 carbon atoms may be substituted. Part or all of the hydrogen atoms of the alkyl group or alkoxy group of ~3 may be substituted by halogen atoms. In addition, the aromatic diamines having a benzoethazole structure are not particularly limited, and examples include: 5-amino-2-(p-aminophenyl)benzoethazole, 6-amine 2-(p-aminophenyl)benzoethazole, 5-amino-2-(m-aminophenyl)benzoethazole, 6-amino-2-(m-aminophenyl)benzoyl Trioxazole, 2,2'-p-phenylenebis(5-aminobenzoethazole), 2,2'-p-phenylenebis(6-aminobenzoethazole), 1-(5 -Aminobenzoethazole)-4-(6-aminobenzoethazole)benzene, 2,6-(4,4'-diaminodiphenyl)benzo[1,2-d:5 ,4-d']bisethazole, 2,6-(4,4'-diaminodiphenyl)benzo[1,2-d:4,5-d']bisethazole, 2,6 -(3,4'-Diaminodiphenyl)benzo[1,2-d:5,4-d']bisethazole, 2,6-(3,4'-diaminodiphenyl )benzo[1,2-d:4,5-d']bisethazole, 2,6-(3,3'-diaminodiphenyl)benzo[1,2-d:5,4 -d']bisethazole, 2,6-(3,3'-diaminodiphenyl)benzo[1,2-d:4,5-d']bisethazole, etc. Among these, 4,4'-diamino-2,2'-bis(trifluoromethyl)biphenyl and 4-amino-N-(4-aminophenyl)benzene are particularly preferred. Formamide, 4,4'-diaminodiphenyl ketone, 3,3'-diaminodiphenyl ketone. In addition, aromatic diamines can be used individually or in combination of multiple types.

就脂環式二胺類而言,可列舉例如:1,4-二胺基環己烷、1,4-二胺基-2-甲基環己烷、1,4-二胺基-2-乙基環己烷、1,4-二胺基-2正丙基環己烷、1,4-二胺基-2-異丙基環己烷、1,4-二胺基-2-正丁基環己烷、1,4-二胺基-2-異丁基環己烷、1,4-二胺基-2-第二丁基環己烷、1,4-二胺基-2-第三丁基環己烷、4,4’-亞甲基雙(2,6-二甲基環己胺)等。此等之中,尤其是較佳為1,4-二胺基環己烷、1,4-二胺基-2-甲基環己烷,更佳為1,4-二胺基環己烷。此外,脂環式二胺類可單獨使用亦可組合複數種使用。Examples of alicyclic diamines include 1,4-diaminocyclohexane, 1,4-diamino-2-methylcyclohexane, and 1,4-diamino-2 -Ethylcyclohexane, 1,4-diamino-2-n-propylcyclohexane, 1,4-diamino-2-isopropylcyclohexane, 1,4-diamino-2- n-butylcyclohexane, 1,4-diamino-2-isobutylcyclohexane, 1,4-diamino-2-butylcyclohexane, 1,4-diamino- 2-tert-butylcyclohexane, 4,4'-methylenebis(2,6-dimethylcyclohexylamine), etc. Among these, 1,4-diaminocyclohexane and 1,4-diamino-2-methylcyclohexane are particularly preferred, and 1,4-diaminocyclohexane is more preferred. . In addition, alicyclic diamines can be used individually or in combination of multiple types.

就二異氰酸酯類而言,可列舉例如:二苯基甲烷-2,4’-二異氰酸酯、3,2’-或3,3’-或4,2’-或4,3’-或5,2’-或5,3’-或6,2’-或6,3’-二甲基二苯基甲烷-2,4’-二異氰酸酯、3,2’-或3,3’-或4,2’-或4,3’-或5,2’-或5,3’-或6,2’-或6,3’-二乙基二苯基甲烷-2,4’-二異氰酸酯、3,2’-或3,3’-或4,2’-或4,3’-或5,2’-或5,3’-或6,2’-或6,3’-二甲氧基二苯基甲烷-2,4’-二異氰酸酯、二苯基甲烷-4,4’-二異氰酸酯、二苯基甲烷-3,3’-二異氰酸酯、二苯基甲烷-3,4’-二異氰酸酯、二苯基醚-4,4’-二異氰酸酯、二苯基酮-4,4’-二異氰酸酯、二苯基碸-4,4’-二異氰酸酯、甲伸苯基-2,4-二異氰酸酯、甲伸苯基-2,6-二異氰酸酯、間苯二甲基二異氰酸酯、對苯二甲基二異氰酸酯、萘-2,6-二異氰酸酯、4,4’-(2,2雙(4-苯氧基苯基)丙烷)二異氰酸酯、3,3’-或2,2’-二甲基聯苯-4,4’-二異氰酸酯、3,3’-或2,2’-二乙基聯苯-4,4’-二異氰酸酯、3,3’-二甲氧基聯苯-4,4’-二異氰酸酯、3,3’-二乙氧基聯苯-4,4’-二異氰酸酯等芳香族二異氰酸酯類、及將此等任一者氫化而成之二異氰酸酯(例如,異佛酮二異氰酸酯、1,4-環己烷二異氰酸酯、1,3-環己烷二異氰酸酯、4,4’-二環己基甲烷二異氰酸酯、六亞甲基二異氰酸酯)等。此等之中,從低吸濕性、尺寸穩定性、價格及聚合性的點來看,較佳為二苯基甲烷-4,4’-二異氰酸酯、甲伸苯基-2,4-二異氰酸酯、甲伸苯基-2,6-二異氰酸酯、3,3’-二甲基聯苯-4,4’-二異氰酸酯、萘-2,6-二異氰酸酯、4,4’-二環己基甲烷二異氰酸酯、1,4-環己烷二異氰酸酯。此外,二異氰酸酯類可單獨使用亦可組合複數種使用。Examples of diisocyanates include diphenylmethane-2,4'-diisocyanate, 3,2'- or 3,3'- or 4,2'- or 4,3'- or 5, 2'-or 5,3'-or 6,2'-or 6,3'-dimethyldiphenylmethane-2,4'-diisocyanate, 3,2'-or 3,3'-or 4 ,2'-or 4,3'-or 5,2'-or 5,3'-or 6,2'-or 6,3'-diethyldiphenylmethane-2,4'-diisocyanate, 3,2'-or 3,3'-or 4,2'-or 4,3'-or 5,2'-or 5,3'-or 6,2'-or 6,3'-dimethoxy diphenylmethane-2,4'-diisocyanate, diphenylmethane-4,4'-diisocyanate, diphenylmethane-3,3'-diisocyanate, diphenylmethane-3,4'- Diisocyanate, diphenyl ether-4,4'-diisocyanate, diphenyl ketone-4,4'-diisocyanate, diphenyl tereine-4,4'-diisocyanate, toxylene-2,4 -Diisocyanates, tolylene-2,6-diisocyanate, m-xylylene diisocyanate, p-xylylene diisocyanate, naphthalene-2,6-diisocyanate, 4,4'-(2,2 Bis(4-phenoxyphenyl)propane) diisocyanate, 3,3'- or 2,2'-dimethylbiphenyl-4,4'-diisocyanate, 3,3'- or 2,2' -Diethylbiphenyl-4,4'-diisocyanate, 3,3'-dimethoxybiphenyl-4,4'-diisocyanate, 3,3'-diethoxybiphenyl-4,4 Aromatic diisocyanates such as '-diisocyanate, and diisocyanates obtained by hydrogenating any of these (for example, isophorone diisocyanate, 1,4-cyclohexane diisocyanate, 1,3-cyclohexane diisocyanate, 4,4'-dicyclohexylmethane diisocyanate, hexamethylene diisocyanate), etc. Among these, diphenylmethane-4,4'-diisocyanate and tolynylene-2,4-diisocyanate are preferred from the viewpoints of low hygroscopicity, dimensional stability, price, and polymerizability. Isocyanate, tolylene-2,6-diisocyanate, 3,3'-dimethylbiphenyl-4,4'-diisocyanate, naphthalene-2,6-diisocyanate, 4,4'-dicyclohexyl Methane diisocyanate, 1,4-cyclohexane diisocyanate. In addition, diisocyanates can be used individually or in combination of multiple types.

就前述溶劑而言,只要可溶解聚醯亞胺或者聚醯亞胺的前驅物即可,能夠適當使用非質子性極性溶劑等。可列舉例如:N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N,N-二乙基乙醯胺、N,N-二甲基甲氧基乙醯胺等N,N-二低級烷基羧醯胺類、N-甲基-2-吡咯啶酮、N-乙基-2-吡咯啶酮、二甲基亞碸、二甲基碸、1,3-二甲基-2-咪唑啉酮、γ-丁內酯、二甘二甲醚(diglyme)、間甲酚、六甲基磷醯胺、N-乙醯基-2-吡咯啶酮、六甲基磷醯胺、乙基賽路蘇乙酸酯、二乙二醇二甲基醚、環丁碸、對氯酚等。此外,溶劑亦可為2種以上的混合物。The solvent may be any solvent that can dissolve polyimide or a precursor of polyimide, and an aprotic polar solvent or the like can be used appropriately. Examples include: N,N-dimethylformamide, N,N-dimethylacetamide, N,N-diethylacetamide, N,N-dimethylmethoxyacetamide Etc. N,N-dilower alkylcarboxamides, N-methyl-2-pyrrolidone, N-ethyl-2-pyrrolidone, dimethylsulfoxide, dimethylsulfoxide, 1,3 -Dimethyl-2-imidazolinone, γ-butyrolactone, diglyme, m-cresol, hexamethylphosphatidamide, N-acetyl-2-pyrrolidone, hexagonal Methylphosphonamide, ethylthiosulfate acetate, diethylene glycol dimethyl ether, cyclotenine, p-chlorophenol, etc. In addition, the solvent may be a mixture of two or more types.

前述薄膜的厚度較佳為3μm以上,更佳為7μm以上,進一步較佳為14μm以上,更進一步較佳為20μm以上。前述薄膜的厚度的上限並未特別限制,但為了作為撓性電子裝置使用,較佳為250μm以下,更佳為100μm以下,進一步較佳為50μm以下。The thickness of the film is preferably 3 μm or more, more preferably 7 μm or more, further preferably 14 μm or more, still more preferably 20 μm or more. The upper limit of the thickness of the thin film is not particularly limited, but for use as a flexible electronic device, it is preferably 250 μm or less, more preferably 100 μm or less, and further preferably 50 μm or less.

前述薄膜為透明聚醯亞胺薄膜時,其黃色指數(以下亦稱為「Yellow Index」或「YI」)較佳為10以下,更佳為7以下,進一步較佳為5以下,更進一步較佳為3以下。前述透明聚醯亞胺的黃色指數的下限並未特別限定,但為了作為撓性電子裝置使用,較佳為0.1以上,更佳為0.2以上,進一步較佳為0.3以上。When the aforementioned film is a transparent polyimide film, its yellow index (hereinafter also referred to as "Yellow Index" or "YI") is preferably 10 or less, more preferably 7 or less, further preferably 5 or less, and still more preferably The best value is 3 or less. The lower limit of the yellow index of the transparent polyimide is not particularly limited, but for use as a flexible electronic device, it is preferably 0.1 or more, more preferably 0.2 or more, and still more preferably 0.3 or more.

前述薄膜係以在其製造時被捲繞成寬度為300mm以上且長度為10m以上的長條薄膜之形態來得到者為較佳,被捲繞於捲繞芯之卷狀薄膜之形態者為更佳。若前述薄膜被捲成卷狀,則以被捲成卷狀之薄膜之形態進行的運送變得容易。The aforementioned film is preferably obtained in the form of a long film with a width of 300 mm or more and a length of 10 m or more during its production, and is more preferably in the form of a roll film wound on a winding core. good. If the film is rolled into a roll, transportation in the form of the film rolled into a roll becomes easy.

前述薄膜中,為了確保處理性及生產性,係以在薄膜中添加/含有0.03~3質量%左右的粒徑為10~1000nm左右的潤滑劑(粒子)來對薄膜表面賦予細微的凹凸以確保滑動性為較佳。潤滑劑的粒徑較佳為20~500nm,更佳為30~300nm,進一步較佳為50~200nm。藉由將潤滑劑的粒徑設為10nm以上,可顯現相對於添加量而言為充分的滑動性。又,藉由將潤滑劑的粒徑設為1000nm以下,能夠減少機械強度的降低、薄膜的白濁等問題。In order to ensure handleability and productivity, about 0.03 to 3% by mass of lubricant (particles) with a particle size of about 10 to 1000 nm is added/contained in the film to provide fine unevenness on the surface of the film to ensure The sliding properties are better. The particle size of the lubricant is preferably 20 to 500 nm, more preferably 30 to 300 nm, further preferably 50 to 200 nm. By setting the particle size of the lubricant to 10 nm or more, sufficient sliding properties relative to the added amount can be achieved. In addition, by setting the particle size of the lubricant to 1000 nm or less, problems such as a decrease in mechanical strength and cloudiness of the film can be reduced.

本發明的薄膜之製造裝置,其具有: 固定機構A,將固定件設置在熱處理前薄膜的一側的面的寬度方向的兩端部,以前述固定件固定前述熱處理薄膜, 送風機構B,對前述熱處理前薄膜的兩面吹送熱風, 輸送機構C,輸送前述熱處理前薄膜, 前述送風機構B之對未設置固定件之面吹送之熱風的風速,係與對設置固定件之面吹送之熱風的風速相同或比其更大。 前述製造裝置中之薄膜及機構A~C,與薄膜之製造方法中說明之內容同義。 [實施例] The film manufacturing device of the present invention has: The fixing mechanism A arranges fixing members at both ends in the width direction of one side of the film before heat treatment, and fixes the heat-treated film with the fixing members, The air blowing mechanism B blows hot air to both sides of the film before heat treatment. The conveying mechanism C conveys the aforementioned film before heat treatment, The wind speed of the hot air blown by the aforementioned air blowing mechanism B to the surface without the fixing parts is the same as or greater than the wind speed of the hot air blown to the surface with the fixing parts. The film and mechanisms A to C in the aforementioned manufacturing device are synonymous with those described in the film manufacturing method. [Example]

以下,關於本發明,使用實施例詳細地進行說明,但本發明只要不超過其主旨,並未限定於以下實施例。Hereinafter, the present invention will be described in detail using examples. However, the present invention is not limited to the following examples as long as the gist is not exceeded.

<合成例1(聚醯胺酸溶液A的製備)> 將具備氮氣導入管、回流管、攪拌棒之反應容器內進行氮氣置換後,以使二氧化矽在聚醯胺酸溶液中的聚合物固體成分總量成為0.15質量%的方式添加33.36質量份的4,4’-二胺基-2,2’-二(三氟甲基)聯苯(TFMB)、270.37質量份的N,N-二甲基乙醯胺(DMAc)與膠體二氧化矽分散於二甲基乙醯胺而成之分散體(日產化學工業製「SNOWTEX(註冊商標)DMAC-ST」)並使其完全溶解,接著,以固體的原狀分次添加9.81質量份的1,2,3,4-環丁烷四甲酸二酐(CBDA)、11.34質量份的3,3’,4,4’-聯苯四甲酸二酐(BPDA)、4.85質量份的4,4’-氧基二鄰苯二甲酸二酐(ODPA)後,在室溫攪拌24小時。之後,添加165.7質量份的DMAc進行稀釋,得到固體成分18質量%、還原黏度2.7dl/g的聚醯胺酸溶液A(PAA-A)(TFMB//CBDA/BPDA/ODPA的莫耳比=1.00// 0.48/0.37/0.15)。 <Synthesis Example 1 (Preparation of Polyamide Solution A)> After replacing nitrogen in a reaction vessel equipped with a nitrogen inlet pipe, a reflux pipe, and a stirring rod, 33.36 parts by mass of silicon dioxide was added so that the total polymer solid content of silicon dioxide in the polyamide solution became 0.15 mass%. 4,4'-diamino-2,2'-bis(trifluoromethyl)biphenyl (TFMB), 270.37 parts by mass of N,N-dimethylacetamide (DMAc) and colloidal silica dispersed The dispersion ("SNOWTEX (registered trademark) DMAC-ST" manufactured by Nissan Chemical Industry) in dimethylacetamide was completely dissolved, and then 9.81 parts by mass of 1,2 was added in portions as a solid. , 3,4-cyclobutanetetracarboxylic dianhydride (CBDA), 11.34 parts by mass of 3,3',4,4'-biphenyltetracarboxylic dianhydride (BPDA), 4.85 parts by mass of 4,4'-oxygen After adding diphthalic dianhydride (ODPA), the mixture was stirred at room temperature for 24 hours. Thereafter, 165.7 parts by mass of DMAc was added and diluted to obtain a polyamide solution A (PAA-A) with a solid content of 18 mass % and a reduced viscosity of 2.7 dl/g (molar ratio of TFMB//CBDA/BPDA/ODPA = 1.00// 0.48/0.37/0.15).

<合成例2(聚醯胺酸溶液B的製備)> 一邊使氮氣通過具備氮氣導入管、攪拌葉片之反應器,一邊加入3.16質量份的均苯四甲酸二酐(PMDA)、2.84質量份的3,3’,4,4’-聯苯四甲酸二酐(BPDA)、7.73質量的4,4’-二胺基-2,2’-二(三氟甲基)聯苯(TFMB),並以使膠體二氧化矽(潤滑劑)相對於聚醯胺酸溶液中的聚合物固體成分總量成為0.15質量%的方式添加N,N-二甲基乙醯胺(DMAc,77.8質量份)、膠體二氧化矽(潤滑劑)分散於二甲基乙醯胺而成之分散體(日產化學工業製「SNOWTEX(註冊商標)DMAC-ST-ZL」)後,在25℃下攪拌24小時,藉以得到聚醯胺酸溶液B(PAA-B)(TFMB//PMDA/BPDA)。 <Synthesis Example 2 (Preparation of Polyamide Solution B)> While passing nitrogen gas through a reactor equipped with a nitrogen inlet pipe and a stirring blade, 3.16 parts by mass of pyromellitic dianhydride (PMDA) and 2.84 parts by mass of 3,3',4,4'-biphenyltetracarboxylic acid dianhydride (PMDA) were added. anhydride (BPDA), 7.73 mass of 4,4'-diamino-2,2'-bis(trifluoromethyl)biphenyl (TFMB), and so that colloidal silica (lubricant) is relatively N,N-dimethylacetamide (DMAc, 77.8 parts by mass) and colloidal silica (lubricant) were added and dispersed in dimethylacetamide so that the total polymer solid content in the amine acid solution became 0.15% by mass. A dispersion made of amide ("SNOWTEX (registered trademark) DMAC-ST-ZL" manufactured by Nissan Chemical Industry) was stirred at 25°C for 24 hours to obtain polyamide solution B (PAA-B) (TFMB //PMDA/BPDA).

實施例1 使用缺角輪塗布器,以最終膜厚成為20μm的方式,將得到之聚醯胺酸溶液A塗布在聚對苯二甲酸乙二酯製薄膜A4100(東洋紡股份有限公司製)的無潤滑劑面上。在90℃將其乾燥15分鐘。乾燥後將得到自我支撐性之聚醯胺酸薄膜從作為支撐體之A4100薄膜剝離,得到聚醯胺酸薄膜(熱處理前薄膜)。接著,以針11a(薄膜固定結構)朝上的方式將針梳拉幅機11(薄膜固定件)設置在熱處理前薄膜的下側的面的端部,並將熱處理前膜端部插在針上來藉此進行固定。接著,以熱處理前薄膜不會斷裂的方式調整針板間隔並進行輸送,分別在250℃3分鐘、290℃3分鐘、340℃3分鐘、350℃3分鐘的條件下從上部吹出口對非固定件設置面及從下部吹出口對固定件設置面吹送熱風並進行加熱,使醯亞胺化反應進行。此時,在各個溫度區,在相對於熱處理前薄膜的通過位置上下距離175mm處設置熱風吹出口,從該上部吹出口(薄膜的非固定件設置面方向)供給風速3.8m/秒鐘之熱風,從下部吹出口(薄膜的固定件設置面方向)供給風速3.6m/秒鐘之熱風。之後,用2分鐘冷卻至室溫,利用切割機切掉薄膜的兩端的平面性差的部分,捲成卷狀,得到100m的寬度500mm的聚醯亞胺薄膜。 Example 1 Using a notch wheel coater, the obtained polyamide solution A was applied to the non-lubricant surface of polyethylene terephthalate film A4100 (manufactured by Toyobo Co., Ltd.) so that the final film thickness became 20 μm. superior. Dry it at 90°C for 15 minutes. After drying, the self-supporting polyamide film is peeled off from the A4100 film as a support to obtain a polyamide film (film before heat treatment). Next, the pin comb tenter 11 (film fixing member) is placed at the end of the lower surface of the film before heat treatment with the pins 11a (film fixing structure) facing upward, and the end of the film before heat treatment is inserted into the pins. Come up and fix it. Next, the distance between the needle plates is adjusted so that the film will not break before heat treatment, and the needle plate is conveyed, and the non-fixed needle plates are separated from the upper blowout port at 250°C for 3 minutes, 290°C for 3 minutes, 340°C for 3 minutes, and 350°C for 3 minutes. Hot air is blown onto the mounting surface of the fixture and the fixing fixture mounting surface from the lower blowout port to heat it, so that the imidization reaction proceeds. At this time, in each temperature zone, a hot air blowing outlet is provided at a distance of 175 mm up and down from the passing position of the film before heat treatment, and hot air with a wind speed of 3.8 m/s is supplied from the upper blowing outlet (direction of the non-fixed member installation surface of the film) , hot air with a wind speed of 3.6m/sec is supplied from the lower blower outlet (direction of the film fixing installation surface). Thereafter, the film was cooled to room temperature over 2 minutes, and the parts with poor flatness at both ends of the film were cut off using a cutting machine, and rolled into a roll to obtain a 100-meter polyimide film with a width of 500 mm.

實施例2~4 將使用之樹脂、製造條件設為如表1所示,與實施例1相同地進行操作,分別得到聚醯亞胺薄膜。 Examples 2 to 4 The resin and production conditions used were set as shown in Table 1, and the same operations were performed as in Example 1 to obtain polyimide films.

比較例1~2 將使用之樹脂、製造條件設為如表1所示,與實施例1相同地進行操作,分別得到聚醯亞胺薄膜。 Comparative examples 1 to 2 The resin and production conditions used were set as shown in Table 1, and the same operations were performed as in Example 1 to obtain polyimide films.

<吹出口風速測定> 在室溫狀態的熱處理爐設定成送入室溫的風之狀態,在熱風吹出口使用風速計(Kanomax:ANEMOMASTER:MODEL6003)進行測定。 <Measurement of blower outlet wind speed> The heat treatment furnace at room temperature is set to a state where air at room temperature is sent, and an anemometer (Kanomax: ANEMOMASTER: MODEL6003) is used for measurement at the hot air outlet.

<薄膜外觀(端部)> 以目視確認爐內輸送中的熱處理前薄膜的狀態、及熱處理後的薄膜端部(固定部)的狀態並進行評價。評價係依下述三階段進行。 ○:薄膜輸送沒問題,能夠維持薄膜經適當地張開之狀態 △:薄膜輸送沒問題,但無法維持薄膜經適當地張開之狀態 ×:因斷裂、裂痕而分離或者下垂之薄膜接觸到爐內壁面等,無法輸送 <Film appearance (end)> The state of the film before heat treatment during transportation in the furnace and the state of the end portion (fixed portion) of the film after heat treatment were visually confirmed and evaluated. The evaluation is carried out in the following three stages. ○: There is no problem with film transportation and the film can be maintained in a properly opened state. △: There is no problem with film transportation, but the film cannot be maintained in a properly opened state. ×: The film separated due to breakage, cracks or sagging comes into contact with the furnace wall, etc., and cannot be transported.

<薄膜外觀(中央部)> 以目視評價固定部經切割之殘留部分整體是否有斷裂、裂痕、皺褶等異常。評價係依下述二階段進行。 ○:除了薄膜端部(固定部)之外,均沒有斷裂、裂痕、皺褶等異常 ×:除了薄膜端部(固定部)之外,觀察到斷裂、裂痕、皺褶等異常 <Film appearance (center part)> Visually evaluate whether there are any abnormalities such as breaks, cracks, wrinkles, etc. in the remaining cut portion of the fixed part. The evaluation is carried out in the following two stages. ○: There are no abnormalities such as breaks, cracks, or wrinkles except for the ends of the film (fixed portion). ×: Except for the film end (fixed portion), abnormalities such as breaks, cracks, and wrinkles were observed

<總光線穿透率> 使用HAZEMETER(NDH5000,日本電色公司製)測定薄膜的總光線穿透率(TT)。就光源而言,使用D65燈。從捲成卷狀之薄膜捲出2m並切出5片50mm見方的薄膜,針對各個薄膜進行1次測定,採用藉此所得到之合計5個測定值的算術平均值。 <Total light transmittance> The total light transmittance (TT) of the film was measured using HAZEMETER (NDH5000, manufactured by Nippon Denshoku Co., Ltd.). As far as the light source is concerned, a D65 lamp is used. The film rolled into a roll was rolled out by 2 m and cut into five pieces of 50 mm square film. Each film was measured once, and the arithmetic mean of the total five measured values obtained was used.

<膜厚> 使用薄膜厚度測定器HKT-1216(Mahr公司製)測定薄膜的膜厚。從捲成卷狀之薄膜捲出2.5m,從薄膜的任意一端向內側以2cm間隔測定總寬度,將其平均作為薄膜的膜厚。 <Film thickness> The film thickness of the film was measured using a film thickness measuring instrument HKT-1216 (manufactured by Mahr Corporation). Roll out the film 2.5m from the roll, measure the total width from either end of the film inward at 2cm intervals, and average the thickness as the film thickness.

<YI> 使用色度計(ZE6000,日本電色公司製)及C2光源,以ASTM D1925作為基準測定薄膜的三刺激值XYZ值,利用下述式算出黃色指數(YI)。從捲成卷狀之薄膜捲出3m並切出5片50mm見方的薄膜,針對各個薄膜進行1次測定,採用藉此所得到之合計5個測定值的算術平均值。 YI=100×(1.28X-1.06Z)/Y <YI> Using a colorimeter (ZE6000, manufactured by Nippon Denshoku Co., Ltd.) and a C2 light source, the tristimulus XYZ values of the film were measured based on ASTM D1925, and the yellowness index (YI) was calculated using the following formula. The film rolled into a roll was rolled out by 3 meters, and five pieces of 50 mm square film were cut out. Each film was measured once, and the arithmetic mean of the total five measured values obtained was used. YI=100×(1.28X-1.06Z)/Y

<Tg(玻璃轉移溫度)> 玻璃轉移溫度,係由從捲成卷狀之薄膜捲出3.5m的地方的寬度方向中心部分,切出1片5mm×20mm的尺寸的薄膜,使用動態黏彈性測定裝置(TA儀器公司製DMA Q800),從30℃至450℃,以升溫速度5℃/分鐘、頻率10Hz進行測定,將彈性模數變化(機械tanδ)成為最大之溫度作為玻璃轉移溫度。詳細的測定條件係如下述。 測定模式:DMA Multi-Frequency-strain Tenshion film/Rectangular strain:0.1% Preload force:0.02N Force track:125% Poisson’s ratio:0.440 <Tg (glass transition temperature)> The glass transition temperature is measured by cutting out a 5 mm × 20 mm film from the center part in the width direction of the roll-shaped film at a position of 3.5 m, and using a dynamic viscoelasticity measuring device (DMA Q800 manufactured by TA Instruments Co., Ltd. ), measured from 30°C to 450°C at a heating rate of 5°C/min and a frequency of 10Hz, and the temperature at which the change in elastic modulus (mechanical tan δ) reaches the maximum is regarded as the glass transition temperature. Detailed measurement conditions are as follows. Measurement mode: DMA Multi-Frequency-strain Tenshion film/Rectangular strain:0.1% Preload force:0.02N Force track: 125% Poisson’s ratio: 0.440

<CTE(線熱膨脹係數)> 由從捲成卷狀之薄膜捲出4m的地方的寬度方向中心部分,切出1片以塗布時的流動方向(MD方向)作為長邊之20mm×2mm的尺寸的薄膜與1片以寬度方向(TD方向)作為長邊之20mm×2mm的尺寸的薄膜,各自在下述條件下測定伸縮率,測定如30℃~45℃、45℃~60℃這樣的15℃的間隔的伸縮率/溫度,進行該測定直到300℃,算出全部測定值的平均值作為CTE,進一步求出以MD方向作為長邊之薄膜之算出結果與以TD方向作為長邊之薄膜之算出結果的平均值。 機器名稱;MAC Science公司製TMA4000S 試樣長度;20mm 試樣寬度;2mm 升溫起始溫度;25℃ 升溫結束溫度;300℃ 升溫速度;5℃/min 環境;氬 <CTE (coefficient of linear thermal expansion)> From the center part of the width direction where the film is rolled out 4 m, cut out a piece of film with a size of 20 mm (TD direction) As a film with a size of 20 mm × 2 mm on the long side, the expansion ratio is measured under the following conditions, and the expansion ratio/temperature at intervals of 15°C is measured such as 30°C to 45°C and 45°C to 60°C. The measurement was carried out up to 300°C, and the average of all measured values was calculated as CTE. Furthermore, the calculated results of the film with the MD direction as the long side and the calculated results of the film with the TD direction as the long side were calculated. Machine name: TMA4000S made by MAC Science Sample length; 20mm Sample width; 2mm Heating starting temperature; 25℃ End temperature of heating up; 300℃ Heating rate: 5℃/min environment; argon

關於上述實施例及比較例所得到之薄膜,將針對薄膜外觀(中央部及端部)、YI、Tg、CTE進行評價之結果示於下述表1。Table 1 below shows the results of evaluation of film appearance (center part and end parts), YI, Tg, and CTE of the films obtained in the above Examples and Comparative Examples.

[表1] 實施例1 實施例2 實施例3 實施例4 比較例1 比較例2 製 造 條 件 塗布 條件 樹脂 合成例1 合成例1 合成例2 合成例2 合成例1 合成例2 PAA-A PAA-A PAA-B PAA-B PAA-A PAA-B 潤滑劑量 ppm 1500 1500 1500 1500 1500 1500 溶劑種類 DMAc DMAc DMAc DMAc DMAc DMAc 初期 乾燥條件 乾燥溫度 90 90 90 90 90 90 乾燥時間 分鐘 15 15 15 15 15 15 熱處理前 薄膜 溶劑含量 % 33 33 34 34 33 34 熱處理條件 溫度區1 吹出口溫度 250 250 250 250 250 250 處理時間 分鐘 3 3 3 3 3 3 溫度區2 吹出口溫度 290 290 290 290 290 290 處理時間 分鐘 3 3 3 3 3 3 溫度區3 吹出口溫度 340 340 340 340 340 340 處理時間 分鐘 3 3 3 3 3 3 溫度區4 吹出口溫度 350 350 350 350 350 350 處理時間 分鐘 3 3 3 3 3 3 吹出口風速A (非固定件設置面) m/秒鐘 3.8 4.5 3.8 4.5 3.1 3.1 吹出口風速B (固定件設置面) m/秒鐘 3.6 3.1 3.6 3.1 4.6 4.6 風速A/風速B 1.1 1.5 1.1 1.5 0.7 0.7 物 性 薄膜 外觀 中央部 × × 端部 膜厚 μm 20 20 20 20 20 20 總光線穿透率 % 88.6 88.5 85.8 85.5 88.5 85.7 YI(黃色) 7.2 7.1 10.3 10.5 7.2 10.3 Tg(玻璃轉移溫度) 381 381 418 418 381 418 CTE (線膨脹係數) MD方向 ppm/℃ 45 44 9 11 52 25 TD方向 ppm/℃ 43 43 8 9 53 28 [產業上利用之可能性] [Table 1] Example 1 Example 2 Example 3 Example 4 Comparative example 1 Comparative example 2 manufacturing conditions Coating conditions Resin Synthesis example 1 Synthesis example 1 Synthesis example 2 Synthesis example 2 Synthesis example 1 Synthesis example 2 PAA-A PAA-A PAA-B PAA-B PAA-A PAA-B Lubricant amount ppm 1500 1500 1500 1500 1500 1500 Solvent type DMAc DMAc DMAc DMAc DMAc DMAc Initial drying conditions Drying temperature 90 90 90 90 90 90 Drying time minute 15 15 15 15 15 15 Film before heat treatment Solvent content % 33 33 34 34 33 34 Heat treatment conditions Temperature zone 1 Blowing outlet temperature 250 250 250 250 250 250 processing time minute 3 3 3 3 3 3 Temperature zone 2 Blowing outlet temperature 290 290 290 290 290 290 processing time minute 3 3 3 3 3 3 Temperature zone 3 Blowing outlet temperature 340 340 340 340 340 340 processing time minute 3 3 3 3 3 3 Temperature zone 4 Blowing outlet temperature 350 350 350 350 350 350 processing time minute 3 3 3 3 3 3 Air outlet wind speed A (non-fixed installation surface) m/second 3.8 4.5 3.8 4.5 3.1 3.1 Blower outlet wind speed B (fixture installation surface) m/second 3.6 3.1 3.6 3.1 4.6 4.6 Wind speed A/wind speed B 1.1 1.5 1.1 1.5 0.7 0.7 physical properties Film appearance Central Department × × Ends Film thickness μm 20 20 20 20 20 20 total light transmittance % 88.6 88.5 85.8 85.5 88.5 85.7 YI(yellow) 7.2 7.1 10.3 10.5 7.2 10.3 Tg (glass transition temperature) 381 381 418 418 381 418 CTE (coefficient of linear expansion) MD direction ppm/℃ 45 44 9 11 52 25 TD direction ppm/℃ 43 43 8 9 53 28 [Possibility of industrial application]

本發明在薄膜之製造中,能夠提供一種不僅是薄膜中央部,在固定薄膜之兩端部、其附近也不會發生斷裂、裂痕、外觀異常的薄膜,能夠良好地應用於例如撓性電子裝置。In the production of a film, the present invention can provide a film that does not have breakage, cracks, or abnormal appearance not only in the central portion of the film but also at both ends of the fixed film and in the vicinity thereof, and can be favorably applied to, for example, flexible electronic devices. .

1:薄膜(熱處理前薄膜) 1a:薄膜中央部 1b:薄膜端部 11:針板(薄膜固定件) 11a:針(薄膜固定結構) 21:未設置薄膜固定件之面側的熱風吹出口 22:設置薄膜固定件之面側的熱風吹出口 31:對未設置薄膜固定件之面側吹拂之熱風 32:對設置薄膜固定件之面側吹拂之熱風 1: Film (film before heat treatment) 1a: Center part of film 1b: Film end 11: Needle plate (film fixing piece) 11a: Needle (film fixed structure) 21: There is no hot air blowing outlet on the side of the film fixing part. 22: Set up the hot air blowing outlet on the side of the film fixing piece 31: Blow hot air to the side without film fixing device 32: Blow hot air to the side where the film fixing device is installed

圖1係示意地顯示本發明輸送中的薄膜的狀態之說明圖。 圖2係示意地顯示本發明輸送中的薄膜的其他狀態之說明圖。 此外,圖1、圖2中,熱風不是從上下各3點吹出,而是從吹出口的寬度方向整體均等地吹出。又,吹出口係在薄膜的輸送方向配置複數個。 FIG. 1 is an explanatory diagram schematically showing the state of a film being conveyed according to the present invention. FIG. 2 is an explanatory diagram schematically showing another state of the film being conveyed according to the present invention. In addition, in FIGS. 1 and 2 , the hot air is not blown out from three points at the top and bottom, but is blown out uniformly from the entire width direction of the blower outlet. Moreover, a plurality of blowing outlets are arranged in the conveyance direction of the film.

無。without.

Claims (6)

一種薄膜之製造方法,其係薄膜之製造方法,其具有: 步驟A,將固定件設置在熱處理前薄膜的一側的面的寬度方向的兩端部,以該固定件固定該熱處理薄膜, 步驟B,對該熱處理前薄膜的兩面吹送熱風, 步驟C,輸送該熱處理前薄膜, 該步驟B之對未設置固定件之面吹送之熱風的風速,係與對設置固定件之面吹送之熱風的風速相同或比其更大。 A method for manufacturing a thin film, which is a method for manufacturing a thin film, and has the following features: Step A, disposing fixing members at both ends in the width direction of one side of the film before heat treatment, and fixing the heat-treated film with the fixing members, Step B, blow hot air on both sides of the film before heat treatment, Step C, transporting the film before heat treatment, In step B, the wind speed of the hot air blown to the surface without the fixing piece is the same as or greater than the wind speed of the hot air blown to the side with the fixing piece. 如請求項1之薄膜之製造方法,其中該步驟B之未設置該固定件之面的風速,大於設置該固定件之面的風速的1.0倍。The method for manufacturing a film according to claim 1, wherein the wind speed on the side without the fixing member in step B is greater than 1.0 times the wind speed on the side with the fixing member. 如請求項1或2之薄膜之製造方法,其中該固定件為針板。The method of manufacturing a film according to claim 1 or 2, wherein the fixing member is a needle plate. 如請求項1或2之薄膜之製造方法,其中該薄膜為聚醯亞胺薄膜。The method for manufacturing a film according to claim 1 or 2, wherein the film is a polyimide film. 如請求項4之薄膜之製造方法,其中該聚醯亞胺薄膜為透明聚醯亞胺薄膜。The method for manufacturing a film according to claim 4, wherein the polyimide film is a transparent polyimide film. 一種薄膜之製造裝置,其係薄膜之製造裝置,其具有: 固定機構A,將固定件設置在熱處理前薄膜的一側的面的寬度方向的兩端部,以該固定件固定該熱處理薄膜, 送風機構B,對該熱處理前薄膜的兩面吹送熱風, 輸送機構C,輸送該熱處理前薄膜, 該送風機構B之對未設置固定件之面吹送之熱風的風速,係與對設置固定件之面吹送之熱風的風速相同或比其更大。 A film manufacturing device, which is a film manufacturing device and has: The fixing mechanism A arranges fixing members at both ends in the width direction of one side of the film before heat treatment, and fixes the heat-treated film with the fixing members, Air blower B blows hot air to both sides of the film before heat treatment. The conveying mechanism C conveys the film before heat treatment, The wind speed of the hot air blown by the air blowing mechanism B to the surface without the fixing parts is the same as or greater than the wind speed of the hot air blown to the surface with the fixing parts.
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