TW202344773A - Device and method of multiple tanks jointly supplying gas characterized in that by using the temperature controller of each evaporation device to control the temperature of each storage tank at the same temperature, each storage tank can output gas with same pressure, thereby controlling the storage tank to output a predetermined amount of gas in a manner of more sensitivity, accuracy, safety and stability - Google Patents

Device and method of multiple tanks jointly supplying gas characterized in that by using the temperature controller of each evaporation device to control the temperature of each storage tank at the same temperature, each storage tank can output gas with same pressure, thereby controlling the storage tank to output a predetermined amount of gas in a manner of more sensitivity, accuracy, safety and stability Download PDF

Info

Publication number
TW202344773A
TW202344773A TW111117576A TW111117576A TW202344773A TW 202344773 A TW202344773 A TW 202344773A TW 111117576 A TW111117576 A TW 111117576A TW 111117576 A TW111117576 A TW 111117576A TW 202344773 A TW202344773 A TW 202344773A
Authority
TW
Taiwan
Prior art keywords
gas
storage tank
temperature
air supply
tanks
Prior art date
Application number
TW111117576A
Other languages
Chinese (zh)
Other versions
TWI825714B (en
Inventor
郭茂穗
朱富俊
Original Assignee
華豐應用設備有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 華豐應用設備有限公司 filed Critical 華豐應用設備有限公司
Priority to TW111117576A priority Critical patent/TWI825714B/en
Publication of TW202344773A publication Critical patent/TW202344773A/en
Application granted granted Critical
Publication of TWI825714B publication Critical patent/TWI825714B/en

Links

Images

Abstract

Disclosed are a device and a method of multiple tanks jointly supplying gas. The device and the method refer to a device and a method, which can simultaneously supply a predetermined amount of gas for a processing equipment from multiple liquefied liquid storage tanks and include a gas combiner, two or more sets of liquefied liquid storage tank heating evaporation gas supply facility (hereinafter referred to as an evaporation device) and a program controller. By using the temperature controller of each evaporation device to control the temperature of each storage tank at the same temperature, each storage tank can output gas with same pressure, thereby controlling the storage tank to output a predetermined amount of gas in a manner of more sensitivity, accuracy, safety and stability.

Description

多槽共同供氣之裝置及方法 Device and method for common air supply to multiple tanks

本發明係關於一種多槽共同供氣之裝置及方法;特別關於一種以分別控制各儲存槽的溫度的方式,將各儲存槽內的壓力控制在同一預定的壓力狀態下滿足供應製程所需的氣體的多槽共同供氣之裝置及方法。 The present invention relates to a device and method for jointly supplying air to multiple tanks; in particular, it relates to a method of controlling the temperature of each storage tank separately to control the pressure in each storage tank at the same predetermined pressure state to meet the requirements of the supply process. Devices and methods for jointly supplying gas to multiple tanks.

現今在許多工業的製程中需要使用很多的各種氣體,而為了方便運輸及儲存,大多將該氣體液化並存放在例如鋼瓶、鋼槽等液化液體儲存槽中,在需要使用時,再從儲存槽中蒸發排出所要的氣體。另外,當需要大量的供應氣體時,可以透過加熱儲存槽的方式,加速該液化液體蒸發。然而,若加熱溫度超過一定程度時,儲存槽會有過熱而爆炸的危險。故,由於儲存槽的耐熱上限等種種原因的限制,習用的技術既使加熱儲存槽仍然有供氣不足的問題發生。為了解決該問題,遂有多個儲存槽同時加熱供氣的需求,也因此許多加熱之控制方法被研發。 Nowadays, a lot of various gases are used in many industrial processes. In order to facilitate transportation and storage, most of the gases are liquefied and stored in liquefied liquid storage tanks such as cylinders and steel tanks. When needed, the gases are removed from the storage tanks. Evaporate and discharge the required gas. In addition, when a large amount of supply gas is required, the evaporation of the liquefied liquid can be accelerated by heating the storage tank. However, if the heating temperature exceeds a certain level, the storage tank may overheat and explode. Therefore, due to various limitations such as the upper limit of heat resistance of the storage tank, the conventional technology still has the problem of insufficient air supply even if the storage tank is heated. In order to solve this problem, there is a need to heat and supply air to multiple storage tanks at the same time. Therefore, many heating control methods have been developed.

習知的氣體液化液體之蒸發量控制方法可概分為二種,一種是依據出口壓力控制儲存槽加熱的方法,另一種是依據儲存槽的磅秤訊號控制儲存槽加熱的方法,兩者皆可具有短時間大量供應氣體的功效。 The conventional methods for controlling the evaporation of gas liquefied liquids can be roughly divided into two types. One is a method of controlling the heating of the storage tank based on the outlet pressure, and the other is a method of controlling the heating of the storage tank based on the scale signal of the storage tank. Both can be used. It has the effect of supplying a large amount of gas in a short time.

然而,習用的依據出口壓力控制儲存槽加熱的方法只能輪流控制單一儲存槽的加熱器,沒有同時控制多座儲存槽的加熱器的功能,造成各儲存槽的加熱溫度及壓力不一,致使各儲存槽的蒸發氣體因為壓力不同而相互倒灌。此外,該方法是依據出口壓力控制儲存槽的加熱器的加熱電力輸出,有控制精確度不足的問題。再者,該方法因為溫度是因變數,因此也有儲存槽可能過熱而爆炸的危險。而習用的依據儲存槽磅秤訊號控制儲存槽加熱的方法主要特徵在於利用地磅取得儲存槽的重量訊號,再依據磅秤的重量訊號控制儲存槽的加熱器的加熱電力輸出,該控制方法同樣具有例如各儲存槽的蒸發氣體因為壓力不同而相互倒灌、控制精確度不足及儲存槽可能過熱而爆炸等問題。 However, the conventional method of controlling storage tank heating based on the outlet pressure can only control the heater of a single storage tank in turn, and does not have the function of controlling the heaters of multiple storage tanks at the same time. As a result, the heating temperature and pressure of each storage tank are inconsistent, resulting in The evaporated gases in each storage tank flow back into each other due to different pressures. In addition, this method controls the heating power output of the heater of the storage tank based on the outlet pressure, which has a problem of insufficient control accuracy. Furthermore, since the temperature is a dependent variable in this method, there is also a risk that the storage tank may overheat and explode. The main feature of the conventional method of controlling storage tank heating based on the storage tank scale signal is to use a floor scale to obtain the weight signal of the storage tank, and then control the heating power output of the heater of the storage tank based on the weight signal of the scale. This control method also has various features, such as There are problems such as the evaporation gases in the storage tank flowing back into each other due to different pressures, insufficient control accuracy, and the storage tank may overheat and explode.

發明人有鑑於此,積極研究,發現將各個儲存槽控制在同一溫度可將各個儲存槽的壓力控制在同一壓力,因此可以確保供氣出口的壓力穩定,也可以避免各供氣管線互相倒灌,再配合程序控制器依儲存槽重量資訊控制儲存槽供氣控制閥之開度或關閉以控制其流量,就可以達到各種目的,例如達到使各個儲存槽同時用盡的目的,或使單一儲存槽先用盡而方便單獨更換,以達到供氣不中斷的目的。如此並可以避免習用的以壓力控制加熱器或以重量控制加熱器的缺點,終於發展出本發明。 In view of this, the inventor actively researched and found that controlling each storage tank to the same temperature can control the pressure of each storage tank to the same pressure. Therefore, the pressure of the gas supply outlet can be ensured to be stable, and the gas supply pipelines can also avoid mutual backflow. Coupled with the program controller to control the opening or closing of the storage tank air supply control valve according to the storage tank weight information to control its flow, various purposes can be achieved, such as achieving the purpose of exhausting all storage tanks at the same time, or making a single storage tank Use it up first and replace it separately to achieve the purpose of uninterrupted air supply. In this way, the shortcomings of conventional pressure-controlled heaters or weight-controlled heaters can be avoided, and the present invention was finally developed.

本發明的目的在於提供一種可以控制多個儲 存槽一起更靈敏、精確、安全及穩定的控制儲存槽輸出預定量的氣體的多槽共同供氣之裝置。 The object of the present invention is to provide a method that can control multiple storage It is a multi-slot common gas supply device that controls the storage tank to output a predetermined amount of gas more sensitively, accurately, safely and stably.

本發明達成上述目的之結構包括:一氣體匯流器、二組以上的蒸發裝置及一程序控制器;該氣體匯流器設有一連接該製程設備的第一供氣管;該等蒸發裝置分別包括:一儲存槽,其內存放預定量的液化液體;一地磅,用以測量該儲存槽的重量以取得該儲存槽的重量資訊;一加熱器,用以加熱該儲存槽;一溫度控制器,該溫度控制器連接該加熱器,以控制該儲存槽維持在一預定溫度;一第二供氣管,該第二供氣管連接該儲存槽及該氣體匯流器;一控制閥,用以控制該第二供氣管的流量;該程序控制器分別連接該等蒸發裝置的地磅及控制閥;依據該等蒸發裝置的儲存槽重量資訊分別控制該控制閥的開度以調節其供氣流量或關閉。 The structure of the present invention to achieve the above object includes: a gas manifold, two or more sets of evaporation devices and a program controller; the gas manifold is provided with a first gas supply pipe connected to the process equipment; the evaporation devices respectively include: a A storage tank, which stores a predetermined amount of liquefied liquid; a floor scale, used to measure the weight of the storage tank to obtain weight information of the storage tank; a heater, used to heat the storage tank; a temperature controller, the temperature The controller is connected to the heater to control the storage tank to maintain a predetermined temperature; a second air supply pipe is connected to the storage tank and the gas manifold; a control valve is used to control the second air supply pipe. The flow rate of the gas pipe; the program controller is connected to the scales and control valves of the evaporation devices respectively; it controls the opening of the control valves to adjust or close the air supply flow based on the weight information of the storage tanks of the evaporation devices.

較佳者,該程序控制器可控制相對重量較輕的儲存槽的控制閥的開度以降低其供氣流量或關閉,以達到使各儲存槽的液化液體同時耗盡的目的。 Preferably, the program controller can control the opening of the control valve of the relatively light storage tank to reduce the air supply flow or close it, so as to achieve the purpose of depleting the liquefied liquid in each storage tank at the same time.

較佳者,該程序控制器可依據該等儲存槽的重量資訊去控制該控制閥,使該等儲存槽中之一的液化液體先耗盡。 Preferably, the program controller can control the control valve based on the weight information of the storage tanks so that the liquefied liquid in one of the storage tanks is exhausted first.

較佳者,該第一供氣管上設有一第一壓力錶以指示供氣壓力方便操作人員監測操作壓力。 Preferably, the first air supply pipe is provided with a first pressure gauge to indicate the air supply pressure to facilitate the operator to monitor the operating pressure.

較佳者,該等蒸發裝置的第二供氣管上分別設有一第二壓力警示器;該第二壓力警示器還連接該加熱 器,在當該第二壓力資訊超過一預定警示壓力時,會切斷該加熱器的加熱電力停止加熱並發出警示訊號,以提高儲存槽的安全性。 Preferably, the second air supply pipes of the evaporation devices are respectively provided with a second pressure warning device; the second pressure warning device is also connected to the heating device. When the second pressure information exceeds a predetermined warning pressure, the heater will cut off the heating power to stop heating and send out a warning signal to improve the safety of the storage tank.

較佳者,該等蒸發裝置的第二供氣管上分別設有一單向閥;該單向閥限制氣體只能從該儲存槽向該氣體匯流器輸出,可確保任一儲存槽輸出的氣體都不會倒灌到其他儲存槽中。 Preferably, the second gas supply pipes of the evaporation devices are respectively provided with a one-way valve; the one-way valve restricts the gas output from the storage tank to the gas manifold, ensuring that the gas output from any storage tank can be Will not pour into other storage tanks.

較佳者,該等蒸發裝置的儲存槽為鋼瓶或鋼槽等壓力容器。 Preferably, the storage tanks of these evaporation devices are pressure vessels such as cylinders or steel tanks.

較佳者,該儲存槽設有一溫度警示器;該溫度警示器用以測量該儲存槽的溫度,該溫度警示器連接該加熱器,當該儲存槽溫度超過一預定警示溫度時,該溫度警示器會切斷該加熱器之電力停止加熱並發出警示訊號,以提高安全性。 Preferably, the storage tank is provided with a temperature warning device; the temperature warning device is used to measure the temperature of the storage tank; the temperature warning device is connected to the heater; when the temperature of the storage tank exceeds a predetermined warning temperature, the temperature warning device It will cut off the power of the heater to stop heating and send a warning signal to improve safety.

較佳者,該等第二供氣管是以同一角度順流方向與該氣體匯流器相連接,以避免該等第二供氣管之氣流相互排擠。 Preferably, the second air supply pipes are connected to the gas manifold at the same angle in the downstream direction to prevent the air flows of the second air supply pipes from mutually expelling each other.

本發明的另一目的在於提供一種可以控制多個儲存槽一起更靈敏、精確、安全及穩定的控制儲存槽輸出預定量的氣體的多槽共同供氣之方法。 Another object of the present invention is to provide a multi-tank common gas supply method that can control multiple storage tanks together to more sensitively, accurately, safely and stably control the output of a predetermined amount of gas from the storage tanks.

本發明達成上述目的之方法包括下列步驟:將該等蒸發裝置的儲存槽的溫度控制在同一溫度,使該等儲存槽都輸出同一壓力的預定量的氣體。 The method of the present invention to achieve the above object includes the following steps: controlling the temperature of the storage tanks of the evaporation devices at the same temperature, so that the storage tanks all output a predetermined amount of gas at the same pressure.

較佳者,依據該等儲存槽重量資訊控制該等儲 存槽的氣體輸出流量,使相對重量較輕的儲存槽的氣體輸出流量小於相對重量較重的儲存槽的氣體輸出流量,以使各儲存槽的液化液體同時耗盡。 Preferably, the storage tanks are controlled based on the weight information of the storage tanks. The gas output flow rate of the storage tank is such that the gas output flow rate of the relatively lighter storage tank is smaller than the gas output flow rate of the relatively heavier storage tank, so that the liquefied liquid in each storage tank is exhausted at the same time.

較佳者,依據該等儲存槽重量資訊控制該等儲存槽的氣體輸出流量,使該等儲存槽中之一的液化液體先耗盡。 Preferably, the gas output flow rate of the storage tanks is controlled based on the weight information of the storage tanks so that the liquefied liquid in one of the storage tanks is exhausted first.

本發明為達到上述及其他目的,其所採取之技術手段、元件及其功效,茲採一較佳實施例配合圖示說明如下。 In order to achieve the above and other objects, the technical means, components and effects adopted by the present invention are described below using a preferred embodiment with illustrations.

100:多槽共同供氣之裝置 100: Device with multiple tanks for common air supply

1:氣體匯流器 1: Gas manifold

11:供氣管 11:Air supply pipe

12:第一壓力錶 12: First pressure gauge

2:蒸發裝置 2: Evaporation device

21:儲存槽 21:Storage tank

22:地磅 22: Floor scale

23:加熱器 23:Heater

24:溫度控制器 24: Temperature controller

25:第二供氣管 25:Second air supply pipe

26:控制閥 26:Control valve

27:第二壓力警示器 27: Second pressure alarm

28:單向閥 28: One-way valve

29:溫度警示器 29: Temperature warning device

3:程序控制器 3: Program controller

101:製程設備 101: Process equipment

[圖1]為本發明第一實施例的流程圖。 [Fig. 1] is a flow chart of the first embodiment of the present invention.

[圖2]為本發明第一實施例的結構示意圖。 [Fig. 2] is a schematic structural diagram of the first embodiment of the present invention.

[圖3]為本發明第一實施例中各種訊號傳遞的示意圖。 [Fig. 3] is a schematic diagram of various signal transmissions in the first embodiment of the present invention.

[圖4]為本發明第二實施例的流程圖。 [Fig. 4] is a flow chart of the second embodiment of the present invention.

圖1~3為本發明的第一實施例。如圖1~3所示,本發明多槽共同供氣之方法可以二組以上的蒸發裝置2共同向一製程設備101供應預定量的氣體,其中包括下列步驟:將該等蒸發裝置的儲存槽的溫度控制在同一溫度,使該等儲存槽都輸出同一壓力的預定量的氣體;藉此方法,可以達到更靈敏、精確、安全及穩定的控制儲存槽輸出預定量的氣體。下文將詳予說明。 Figures 1 to 3 show the first embodiment of the present invention. As shown in Figures 1 to 3, the multi-tank common gas supply method of the present invention can use two or more groups of evaporation devices 2 to jointly supply a predetermined amount of gas to a process equipment 101, which includes the following steps: The temperature is controlled at the same temperature, so that the storage tanks all output a predetermined amount of gas at the same pressure; by this method, a more sensitive, precise, safe and stable control of the storage tank's output of a predetermined amount of gas can be achieved. This will be explained in detail below.

圖2~3為配合多槽共同供氣之方法的多槽共同供氣之裝置100。該多槽共同供氣之裝置100的結構包括有一氣體匯流器1、二組以上的蒸發裝置2及一程序控制器3;該氣體匯流器1設有一連接該製程設備101的第一供氣管11;該等蒸發裝置2分別包括:一儲存槽21,其內存放預定量的液化液體;一地磅22,用以測量該儲存槽21的重量以取得該儲存槽的重量資訊;一加熱器23,用以加熱該儲存槽21;一溫度控制器24,該溫度控制器24連接該加熱器23,以控制該儲存槽21維持在一預定溫度;一第二供氣管25,該第二供氣管25連接該儲存槽21及該氣體匯流器1;一控制閥26,用以控制該第二供氣管25的流量;該程序控制器3分別連接該等蒸發裝置2的地磅22及控制閥26;依據該等蒸發裝置2的儲存槽21重量資訊分別控制該控制閥26的開度以調節其供氣流量或關閉。 Figures 2 to 3 show a multi-tank common air supply device 100 that cooperates with the multi-tank common air supply method. The structure of the multi-tank common gas supply device 100 includes a gas manifold 1, more than two sets of evaporation devices 2 and a program controller 3; the gas manifold 1 is provided with a first gas supply pipe 11 connected to the process equipment 101 ; The evaporation devices 2 respectively include: a storage tank 21, which stores a predetermined amount of liquefied liquid; a floor scale 22, used to measure the weight of the storage tank 21 to obtain the weight information of the storage tank; a heater 23, Used to heat the storage tank 21; a temperature controller 24, the temperature controller 24 is connected to the heater 23 to control the storage tank 21 to maintain a predetermined temperature; a second air supply pipe 25, the second air supply pipe 25 Connect the storage tank 21 and the gas manifold 1; a control valve 26 to control the flow of the second gas supply pipe 25; the program controller 3 is connected to the floor scales 22 and control valves 26 of the evaporation devices 2 respectively; according to The weight information of the storage tanks 21 of the evaporation devices 2 respectively controls the opening of the control valve 26 to adjust the air supply flow or close it.

氣體匯流器1設有一連接製程設備101的第一供氣管11,用於匯聚該等儲存槽21排出的氣體,藉以向製程設備101供應壓力穩定的氣體。 The gas manifold 1 is provided with a first gas supply pipe 11 connected to the process equipment 101 for collecting the gas discharged from the storage tanks 21 to supply gas with stable pressure to the process equipment 101 .

本發明具有二組以上的蒸發裝置2,在圖2中僅以二組蒸發裝置2為例,實際上可因應使用需求而採用三組、四組或更多組蒸發裝置。 The present invention has more than two sets of evaporation devices 2. In FIG. 2, only two sets of evaporation devices 2 are taken as an example. In fact, three, four or more sets of evaporation devices can be used according to the usage requirements.

儲存槽21內存放預定量的液化液體,可向外輸出氣體。儲存槽21可以是鋼瓶或鋼槽等壓力容器。 A predetermined amount of liquefied liquid is stored in the storage tank 21, and gas can be output to the outside. The storage tank 21 may be a pressure vessel such as a steel cylinder or a steel tank.

地磅22用以測量儲存槽21的重量以取得儲存槽的重量資訊。 The floor scale 22 is used to measure the weight of the storage tank 21 to obtain the weight information of the storage tank.

加熱器23用以加熱儲存槽21,可以是包覆在儲存槽21外側的加熱毯。 The heater 23 is used to heat the storage tank 21 and may be a heating blanket covering the outside of the storage tank 21 .

溫度控制器24連接加熱器23,以控制儲存槽21維持在一預定溫度,使該等儲存槽21都能輸出同一壓力的氣體,並避免各儲存槽21輸出的氣體互相倒灌。若以液化液體氨儲存槽為例,將該等儲存槽的溫度控制在24℃時即可將儲存槽的壓力控制在130psig,將儲存槽的溫度控制在35℃時即可將儲存槽的壓力控制在202psig。 The temperature controller 24 is connected to the heater 23 to control the storage tanks 21 to maintain a predetermined temperature so that the storage tanks 21 can all output gas at the same pressure and prevent the gas output from each storage tank 21 from flowing back into each other. Taking liquefied liquid ammonia storage tanks as an example, when the temperature of these storage tanks is controlled at 24°C, the pressure of the storage tanks can be controlled at 130 psig. When the temperature of the storage tanks is controlled at 35°C, the pressure of the storage tanks can be controlled. Control at 202psig.

第二供氣管25連接儲存槽21及氣體匯流器1,在第二供氣管25上裝有一控制閥26。該等儲存槽21的第二供氣管25是以同一角度順流方向與氣體匯流器1相連接,以避免該等第二供氣管25之氣流相互排擠。 The second gas supply pipe 25 is connected to the storage tank 21 and the gas manifold 1, and a control valve 26 is installed on the second gas supply pipe 25. The second air supply pipes 25 of the storage tanks 21 are connected to the gas manifold 1 at the same angle along the flow direction to prevent the air flows of the second air supply pipes 25 from mutually expelling each other.

控制閥26用以控制第二供氣管25的流量。 The control valve 26 is used to control the flow rate of the second air supply pipe 25 .

程序控制器3分別連接該等蒸發裝置2的地磅22及控制閥26;依據該等蒸發裝置2的儲存槽21重量資訊分別控制該控制閥26的開度以調節其供氣流量或關閉。在將該等儲存槽21控制在同一溫度的情況下,理論上可使該等儲存槽21有相同的消耗,但實際上仍然可能會有某些因素使某一儲存槽消耗較快,因此,程序控制器3可控制相對重量較輕的儲存槽的控制閥26的開度以降低其供氣流量或關閉,可達到使該等儲存槽21的液化液體均一消耗的目的。另外,程序控制器3可因應不同使用需求而控制該等蒸發裝置2的控制閥26的流量,藉以達到各種目的,例如達到使該等儲存槽21同時用盡的目的,或使單一儲存槽先 用盡而方便單獨更換,進而達到供氣不中斷的目的。 The program controller 3 is connected to the floor scales 22 and control valves 26 of the evaporation devices 2 respectively; it controls the opening of the control valves 26 to adjust or close the air supply flow according to the weight information of the storage tanks 21 of the evaporation devices 2 respectively. When the storage tanks 21 are controlled at the same temperature, the storage tanks 21 can theoretically have the same consumption, but in fact there may still be some factors that cause a certain storage tank to consume faster. Therefore, The program controller 3 can control the opening of the control valve 26 of the relatively light storage tank to reduce the air supply flow or close it, so as to achieve the purpose of uniform consumption of the liquefied liquid in the storage tanks 21 . In addition, the program controller 3 can control the flow rate of the control valves 26 of the evaporation devices 2 according to different usage requirements, so as to achieve various purposes, such as achieving the purpose of using up the storage tanks 21 at the same time, or making a single storage tank empty first. When used up, it is easy to replace separately, thereby achieving the purpose of uninterrupted air supply.

在第一供氣管11上可設有一第一壓力錶12以指示供氣壓力方便操作人員監測操作壓力。第一壓力錶12用於測量第一供氣管11內的壓力。第一供氣管11內的壓力即為提供給製程設備的供氣壓力。 A first pressure gauge 12 may be provided on the first air supply pipe 11 to indicate the air supply pressure to facilitate the operator to monitor the operating pressure. The first pressure gauge 12 is used to measure the pressure in the first air supply pipe 11 . The pressure in the first air supply pipe 11 is the air supply pressure provided to the process equipment.

在該等蒸發裝置2的第二供氣管25上分別設有一第二壓力警示器27;第二壓力警示器27用以測量第二供氣管25內的壓力以取得一第二壓力資訊;第二壓力警示器27還連接加熱器23,當第二壓力資訊超過一預定警示壓力時,會切斷該加熱器的加熱電力停止加熱並發出警示訊號,可提高安全性。另外,第二壓力警示器27也可具有壓力顯示功能,以方便操作人員查看。 A second pressure alarm 27 is respectively provided on the second air supply pipe 25 of the evaporation devices 2; the second pressure alarm 27 is used to measure the pressure in the second air supply pipe 25 to obtain a second pressure information; The pressure warning device 27 is also connected to the heater 23. When the second pressure information exceeds a predetermined warning pressure, the heating power of the heater will be cut off to stop heating and send out a warning signal, which can improve safety. In addition, the second pressure warning device 27 may also have a pressure display function to facilitate the operator's viewing.

在該等蒸發裝置2的第二供氣管25上可以分別設有一單向閥28;單向閥28限制氣體只能從儲存槽21向氣體匯流器1輸出。也就是說,可確保任一儲存槽21輸出的氣體都不會倒灌到其他儲存槽21中。 A one-way valve 28 can be provided on the second gas supply pipe 25 of the evaporation devices 2 respectively; the one-way valve 28 limits the gas to be output from the storage tank 21 to the gas manifold 1 . In other words, it is ensured that the gas output from any storage tank 21 will not flow back into other storage tanks 21 .

在該等蒸發裝置2的儲存槽21可分別設有一溫度警示器29;溫度警示器29用以測量該儲存槽21的溫度,該溫度警示器29連接該加熱器23,當該儲存槽21溫度超過一預定警示溫度時,該溫度警示器29會切斷該加熱器23之電力停止加熱並發出警示訊號。 The storage tanks 21 of the evaporation devices 2 can each be provided with a temperature alarm 29; the temperature alarm 29 is used to measure the temperature of the storage tank 21. The temperature alarm 29 is connected to the heater 23. When the temperature of the storage tank 21 When a predetermined warning temperature is exceeded, the temperature alarm 29 will cut off the power of the heater 23 to stop heating and send out a warning signal.

前述的第二壓力警示器27及溫度警示器29的警示訊號包括警示燈及警示聲音。 The warning signals of the aforementioned second pressure warning device 27 and temperature warning device 29 include warning lights and warning sounds.

如前所述,溫度控制器24是依據儲存槽溫度資 訊控制加熱器23。由查理定律及波義爾定律可知,理想氣體的壓力與絕對溫度成正比,亦即溫度變化1℃,壓力才隨之改變約1/273大氣壓,因此以溫度控制加熱器的方法,比習用的以壓力控制加熱器的方法能夠更靈敏、精確及穩定的控制儲存槽輸出預定量的氣體在預定的壓力。此外,以現今的溫度控制器可以將溫度控制在0.1℃的精確度,因此以溫度控制加熱器的方法不但靈敏、精確及穩定,而且安全性高。 As mentioned above, the temperature controller 24 is based on the storage tank temperature data. Information control heater 23. According to Charles's law and Boyle's law, the pressure of an ideal gas is directly proportional to the absolute temperature. That is, when the temperature changes by 1°C, the pressure will change by about 1/273 atmosphere. Therefore, the method of controlling the heater by temperature is more complicated than the conventional method. The method of controlling the heater by pressure can more sensitively, accurately and stably control the storage tank to output a predetermined amount of gas at a predetermined pressure. In addition, today's temperature controllers can control the temperature with an accuracy of 0.1°C. Therefore, the method of controlling the heater by temperature is not only sensitive, accurate and stable, but also highly safe.

如前所述,程序控制器3可依據該等蒸發裝置2的儲存槽重量資訊分別控制該控制閥26的開度以調節流量或關閉,藉以達到各種目的,茲舉例說明如下。 As mentioned above, the program controller 3 can respectively control the opening of the control valve 26 to adjust the flow rate or close it according to the weight information of the storage tanks of the evaporation devices 2, so as to achieve various purposes. Here are examples as follows.

在第一實施例中,在將該等儲存槽21的溫度控制在同一溫度後,可再依據該等儲存槽21重量資訊控制該等儲存槽21的氣體輸出流量,使相對重量較輕的儲存槽的氣體輸出流量小於相對重量較重的儲存槽的氣體輸出流量,以使各儲存槽的液化液體同時耗盡,方便同時更換儲存槽時減少浪費。 In the first embodiment, after controlling the temperatures of the storage tanks 21 to the same temperature, the gas output flow rate of the storage tanks 21 can be controlled based on the weight information of the storage tanks 21, so that the storage tanks with relatively light weight can be controlled. The gas output flow rate of the tank is smaller than the gas output flow rate of the relatively heavier storage tank, so that the liquefied liquid in each storage tank is exhausted at the same time, which facilitates the simultaneous replacement of storage tanks and reduces waste.

圖4為本發明第二實施例。如圖4所示,在第二實施例中,在將該等儲存槽21的溫度控制在同一溫度後,可再依據該等儲存槽21重量資訊控制該等儲存槽21的氣體輸出流量,使該等儲存槽中之一的液化液體先耗盡,以便單獨更換儲存槽,以達到供氣不中斷的目的。 Figure 4 is a second embodiment of the present invention. As shown in Figure 4, in the second embodiment, after controlling the temperatures of the storage tanks 21 to the same temperature, the gas output flow rate of the storage tanks 21 can be controlled based on the weight information of the storage tanks 21, so that The liquefied liquid in one of the storage tanks is exhausted first, so that the storage tank can be replaced separately to achieve the purpose of uninterrupted gas supply.

以上為本發明所舉之實施例,僅為便於說明而設,當不能以此限制本發明之意義,即大凡依所列申請專 利範圍所為之各種變換設計,均應包含在本發明之專利範圍中。 The above-mentioned embodiments of the present invention are only for convenience of explanation and should not be used to limit the significance of the present invention. Various transformation designs within the patent scope shall be included in the patent scope of the present invention.

100:多槽共同供氣之裝置 100: Device with multiple tanks for common air supply

1:氣體匯流器 1: Gas manifold

11:供氣管 11:Air supply pipe

12:第一壓力錶 12: First pressure gauge

2:蒸發裝置 2: Evaporation device

21:儲存槽 21:Storage tank

22:地磅 22: Floor scale

23:加熱器 23:Heater

25:第二供氣管 25:Second air supply pipe

26:控制閥 26:Control valve

27:第二壓力警示器 27: Second pressure alarm

28:單向閥 28: One-way valve

29:溫度警示器 29: Temperature warning device

101:製程設備 101: Process equipment

Claims (12)

一種多槽共同供氣之裝置,該裝置向一製程設備供應預定量的氣體,其中包括一氣體匯流器、二組以上的蒸發裝置及一程序控制器; A multi-tank joint gas supply device that supplies a predetermined amount of gas to a process equipment, including a gas manifold, two or more sets of evaporation devices and a program controller; 該氣體匯流器設有一連接該製程設備的第一供氣管; The gas manifold is provided with a first gas supply pipe connected to the process equipment; 該等蒸發裝置分別包括: The evaporation devices include: 一儲存槽,其內存放預定量的液化液體; a storage tank in which a predetermined amount of liquefied liquid is stored; 一地磅,用以測量該儲存槽的重量以取得該儲存槽的重量資訊; A floor scale used to measure the weight of the storage tank to obtain weight information of the storage tank; 一加熱器,用以加熱該儲存槽; a heater for heating the storage tank; 一溫度控制器,該溫度控制器連接該加熱器,以控制該儲存槽維持在一預定溫度; A temperature controller connected to the heater to control the storage tank to maintain a predetermined temperature; 一第二供氣管,該第二供氣管連接該儲存槽及該氣體匯流器; a second gas supply pipe connected to the storage tank and the gas manifold; 一控制閥,用以控制該第二供氣管的流量; a control valve to control the flow of the second air supply pipe; 該程序控制器分別連接該等蒸發裝置的地磅及控制閥;依據該等蒸發裝置的儲存槽重量資訊分別控制該控制閥的開度以調節其供氣流量或關閉。 The program controller is connected to the floor scales and control valves of the evaporation devices respectively; it controls the opening of the control valves to adjust or close the air supply flow according to the weight information of the storage tanks of the evaporation devices. 如請求項1之多槽共同供氣之裝置,其中該程序控制器可控制相對重量較輕的儲存槽的控制閥的開度以降低其供氣流量或關閉。 For example, the device of claim 1 for a multi-tank common air supply, wherein the program controller can control the opening of the control valve of the relatively light storage tank to reduce its air supply flow or close it. 如請求項1之多槽共同供氣之裝置,其中該程序控制器可依據該等儲存槽的重量資訊去控制該控制閥,使該等儲存槽中之一的液化液體先耗盡。 For example, in the device of claim 1 for a multi-tank common air supply, the program controller can control the control valve based on the weight information of the storage tanks so that the liquefied liquid in one of the storage tanks is exhausted first. 如請求項1之多槽共同供氣之裝置,其中該第一供氣管上設有一第一壓力錶以指示供氣壓力方便操作人員監測操作壓力。 For example, the device of claim 1 for a multi-slot common air supply, wherein a first pressure gauge is provided on the first air supply pipe to indicate the air supply pressure to facilitate the operator to monitor the operating pressure. 如請求項1之多槽共同供氣之裝置,其中該等蒸發裝置的第二供氣管上分別設有一第二壓力警示器;該第二壓力警示器還連接該加熱器,在當該第二壓力資訊超過一預定警示壓力時,會切斷該加熱器的加熱電力停止加熱並發出警示訊號。 For example, the multi-slot common air supply device of claim 1, wherein the second air supply pipes of the evaporation devices are respectively provided with a second pressure warning device; the second pressure warning device is also connected to the heater, and when the second When the pressure information exceeds a predetermined warning pressure, the heating power of the heater will be cut off to stop heating and a warning signal will be issued. 如請求項1之多槽共同供氣之裝置,其中該等蒸發裝置的第二供氣管上分別設有一單向閥;該單向閥限制氣體只能從該儲存槽向該氣體匯流器輸出。 For example, in claim 1, a multi-tank joint gas supply device is provided, in which the second gas supply pipes of the evaporation devices are respectively provided with a one-way valve; the one-way valve restricts the gas output from the storage tank to the gas manifold. 如請求項1之多槽共同供氣之裝置,其中該等蒸發裝置的儲存槽為鋼瓶或鋼槽等壓力容器。 For example, the device of claim 1 with multiple tanks for common gas supply, wherein the storage tanks of the evaporation devices are pressure vessels such as cylinders or steel tanks. 如請求項1之多槽共同供氣之裝置,其中包括一溫度警示器;該溫度警示器用以測量該儲存槽的溫度,該溫度警示器連接該加熱器,當該儲存槽溫度超 過一預定警示溫度時,該溫度警示器會切斷該加熱器之電力停止加熱並發出警示訊號。 For example, the multi-tank common air supply device of claim 1 includes a temperature warning device; the temperature warning device is used to measure the temperature of the storage tank; the temperature warning device is connected to the heater; when the temperature of the storage tank exceeds When a predetermined warning temperature is exceeded, the temperature alarm will cut off the power of the heater to stop heating and send out a warning signal. 如請求項1之多槽共同供氣之裝置,其中該等第二供氣管是以同一角度順流方向與該氣體匯流器相連接,以避免該等第二供氣管之氣流相互排擠。 For example, the multi-tank joint air supply device of claim 1, wherein the second air supply pipes are connected to the gas manifold at the same angle along the flow direction to prevent the air flows of the second air supply pipes from mutually expelling each other. 一種多槽共同供氣之方法,其可以二組以上的蒸發裝置共同向一製程設備供應預定量的氣體,其中包括下列步驟: A method for jointly supplying gas to multiple tanks, which allows two or more groups of evaporation devices to jointly supply a predetermined amount of gas to a process equipment, which includes the following steps: 將該等蒸發裝置的儲存槽的溫度控制在同一溫度,使該等儲存槽都輸出同一壓力的預定量的氣體。 The temperatures of the storage tanks of the evaporation devices are controlled at the same temperature, so that the storage tanks all output a predetermined amount of gas at the same pressure. 如請求項10之多槽共同供氣之方法,其中包括:依據該等儲存槽重量資訊控制該等儲存槽的氣體輸出流量,使相對重量較輕的儲存槽的氣體輸出流量小於相對重量較重的儲存槽的氣體輸出流量,以使各儲存槽的液化液體同時耗盡。 For example, the method for jointly supplying gas to multiple tanks in claim 10 includes: controlling the gas output flow rate of the storage tanks based on the weight information of the storage tanks, so that the gas output flow rate of the storage tank with a relatively lighter weight is smaller than that of a storage tank with a relatively heavier weight. The gas output flow rate of the storage tanks is such that the liquefied liquid in each storage tank is exhausted at the same time. 如請求項10之多槽共同供氣之方法,其中包括依據該等儲存槽重量資訊控制該等儲存槽的氣體輸出流量,使該等儲存槽中之一的液化液體先耗盡。 For example, the method for jointly supplying gas to multiple tanks in claim 10 includes controlling the gas output flow rate of the storage tanks based on the weight information of the storage tanks so that the liquefied liquid in one of the storage tanks is exhausted first.
TW111117576A 2022-05-09 2022-05-09 and methods TWI825714B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW111117576A TWI825714B (en) 2022-05-09 2022-05-09 and methods

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW111117576A TWI825714B (en) 2022-05-09 2022-05-09 and methods

Publications (2)

Publication Number Publication Date
TW202344773A true TW202344773A (en) 2023-11-16
TWI825714B TWI825714B (en) 2023-12-11

Family

ID=89720323

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111117576A TWI825714B (en) 2022-05-09 2022-05-09 and methods

Country Status (1)

Country Link
TW (1) TWI825714B (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2863341A1 (en) * 2003-12-04 2005-06-10 Air Liquide Electronics Sys SYSTEM FOR HEATING INDUCED LIQUEFIED GAS BOTTLES
US8468840B2 (en) * 2008-07-24 2013-06-25 Praxair Technology Method and apparatus for simultaneous gas supply from bulk specialty gas supply systems
US20110225986A1 (en) * 2010-03-22 2011-09-22 Justin Cole Germond Systems and methods for gas supply and usage
EP3314160B1 (en) * 2015-06-29 2022-05-18 Westport Fuel Systems Canada Inc. Multi-vessel fluid storage and delivery system

Also Published As

Publication number Publication date
TWI825714B (en) 2023-12-11

Similar Documents

Publication Publication Date Title
CN109682924B (en) Device and method for testing leakage ignition of high-pressure gas pipeline to form injection fire
JP6784711B2 (en) Liquefied gas supply device and liquefied gas supply method
US20110225986A1 (en) Systems and methods for gas supply and usage
CA2697916A1 (en) Apparatus and method for controlling the temperature of a cryogen
TWI825714B (en) and methods
JP5260157B2 (en) Natural gas calorie adjustment system and calorie adjustment method
CN105402454B (en) Gas supply adjusting device based on pressure reducer
CN112534174B (en) Method and apparatus for helium gas storage and supply
CN211853513U (en) Nitrogen gas replacement device
KR101671475B1 (en) LNG Regasification Plant
CN208852854U (en) A kind of gas mixer
JP5722186B2 (en) Liquefied gas supply method
CN111207290A (en) Nitrogen gas replacement device
CN206918630U (en) A kind of compressed gas charging system
CN220283895U (en) Kiln combustion control system and kiln
TWI626392B (en) Large supply of gas
JPH0243931A (en) Apparatus for making carbonated beverage
KR102136007B1 (en) Liquid nitrogen auto supply device using mass sensor
US11155758B2 (en) Method of dosing a system with HCL then evacuating and purging
CN210398389U (en) Feeding system
CN219160124U (en) Liquid nitrogen multiplexing device
CN2900534Y (en) Foul adding device for superhigh pressure natural gas
RU2730333C1 (en) Odorant evaporator
JPS63199998A (en) Filling device for cryogenic liquefied gas conveying vessel
CN111288296A (en) Control device and method of nitrogen replacement equipment