TW202342776A - Titanium material - Google Patents

Titanium material Download PDF

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TW202342776A
TW202342776A TW112108617A TW112108617A TW202342776A TW 202342776 A TW202342776 A TW 202342776A TW 112108617 A TW112108617 A TW 112108617A TW 112108617 A TW112108617 A TW 112108617A TW 202342776 A TW202342776 A TW 202342776A
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titanium
oxide film
less
concentration
titanium material
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松本實菜美
高橋一浩
三好遼太郎
金子道郎
山本昌宏
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日商日本製鐵股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21BROLLING OF METAL
    • B21B1/00Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations
    • B21B1/22Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations for rolling plates, strips, bands or sheets of indefinite length
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21BROLLING OF METAL
    • B21B3/00Rolling materials of special alloys so far as the composition of the alloy requires or permits special rolling methods or sequences ; Rolling of aluminium, copper, zinc or other non-ferrous metals
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C14/00Alloys based on titanium
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/16Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
    • C22F1/18High-melting or refractory metals or alloys based thereon

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
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Abstract

This titanium material is configured such that: in a range from the surface to a position at which the oxygen concentration measured in the thickness direction from the surface by a glow discharge spectroscopic analysis method is 1/3 the maximum value, the average nitrogen concentration and the average carbon concentration are both 14.0 at% or less, and the average hydrogen concentration is 30.0 at% or less; and the difference between the c-axis lattice constant of [alpha]-phase Ti as determined by X-ray diffraction measurement by a parallel beam method in which the angle of incidence on the surface is 0.3 degrees and the c-axis lattice constant of [alpha]-phase Ti as determined by X-ray diffraction measurement by an intensive method at the plate thickness center is 0.015 Å or less.

Description

鈦材Titanium

發明領域 本發明是有關於一種鈦材。 Field of invention The invention relates to a titanium material.

發明背景 鈦材由於在大氣環境下會顯示出極為優異的耐蝕性,因而被使用在建築物之屋頂、外壁這樣的建材用途上。惟,長期間持續使用後的鈦材有時會變色。鈦材變色,從設計性觀點來看有時會是問題。因此,一直以來就有人提出一種抑制住變色且耐變色性優異的鈦材。 Background of the invention Because titanium exhibits extremely excellent corrosion resistance in atmospheric environments, it is used as a building material such as roofs and exterior walls of buildings. However, titanium materials sometimes change color after long-term use. Discoloration of titanium materials can sometimes be a problem from a design perspective. Therefore, titanium materials that suppress discoloration and have excellent discoloration resistance have been proposed.

例如,專利文獻1揭示一種耐變色性優異的鈦材或鈦合金材,特徵在於:厚度100Å以下的氧化皮膜存在於基底表面,同時,該表面氧化皮膜中的C量為30原子%以下,並且在前述氧化皮膜下之基底表層部中的C量為30原子%以下。For example, Patent Document 1 discloses a titanium material or titanium alloy material with excellent discoloration resistance, characterized in that an oxide film with a thickness of 100 Å or less exists on the surface of the substrate, and the amount of C in the surface oxide film is 30 atomic % or less, and The amount of C in the base surface layer under the oxide film is 30 atomic % or less.

專利文獻2揭示一種在大氣環境中不易發生變色的鈦,特徵在於:表面起算100nm之深度範圍中的平均碳濃度為14at%以下,並且,在最外表面具有厚度12~40nm的氧化膜。Patent Document 2 discloses titanium that is less likely to discolor in an atmospheric environment and is characterized by having an average carbon concentration of 14 at% or less in a depth range of 100 nm from the surface, and having an oxide film with a thickness of 12 to 40 nm on the outermost surface.

專利文獻3揭示一種不易發生變色的鈦材,特徵在於:表面之氧化皮膜中的氟量為7at%以下。Patent Document 3 discloses a titanium material that is resistant to discoloration and is characterized in that the fluorine content in the oxide film on the surface is 7at% or less.

專利文獻4揭示一種鈦板的製造方法,特徵在於:為了有效率地製造出在照光環境下不太變色的鈦或鈦合金板,使用下述潤滑劑將鈦板進行了冷輥軋,所述潤滑劑可使冷輥軋後之鈦板表層的碳濃化層碳量為150mg/m 2以下,之後,在氧化性氣體環境下進行退火,接著,透過熔融鹽浸漬處理與硝氟酸水溶液進行酸洗來除鏽。 Patent Document 4 discloses a method for manufacturing a titanium plate, which is characterized in that in order to efficiently manufacture a titanium or titanium alloy plate that is less discolored in a light environment, the titanium plate is cold-rolled using the following lubricant: The lubricant can make the carbon content of the carbon-concentrated layer on the surface of the cold-rolled titanium plate be less than 150 mg/ m2 . After that, it is annealed in an oxidizing gas environment, and then immersed in molten salt and nitric fluoric acid aqueous solution. Pickling to remove rust.

專利文獻5揭示一種在大氣環境中不易發生變色的鈦或鈦合金,特徵在於:表面起算100nm之深度範圍中的平均碳濃度為14at%以下,在表面具有厚度12nm以上且30nm以下的氧化膜,並且,鈦表面之算術平均高度(Ra)為0.035μm以下。 先前技術文獻 Patent Document 5 discloses a titanium or titanium alloy that is less likely to discolor in an atmospheric environment. It is characterized in that the average carbon concentration in a depth range of 100 nm from the surface is 14 at% or less, and it has an oxide film with a thickness of 12 nm or more and 30 nm or less on the surface. Furthermore, the arithmetic mean height (Ra) of the titanium surface is 0.035 μm or less. Prior technical literature

專利文獻 [專利文獻1]日本特開2000-1729號公報 [專利文獻2]日本特開2002-12962號公報 [專利文獻3]日本特開2002-47589號公報 [專利文獻4]日本特開2002-60984號公報 [專利文獻5]日本特開2005-272870號公報 patent documents [Patent Document 1] Japanese Patent Application Publication No. 2000-1729 [Patent Document 2] Japanese Patent Application Publication No. 2002-12962 [Patent Document 3] Japanese Patent Application Publication No. 2002-47589 [Patent Document 4] Japanese Patent Application Publication No. 2002-60984 [Patent Document 5] Japanese Patent Application Publication No. 2005-272870

[非專利文獻] [非專利文獻1]宮下勤,「再複習一次表面粗糙度(Review of Surface Roughness)」,精密工學會誌,公益社團法人精密工學會,Vol.73,No.2,2007年,第201-205頁 [Non-patent literature] [Non-patent document 1] Tsutomu Miyashita, "Review of Surface Roughness", Journal of the Society of Precision Engineering, Society of Precision Engineering, Vol.73, No.2, 2007, No. 201- 205 pages

發明概要 發明所欲解決之課題 在專利文獻1~5所記載的技術中,是透過降低表面碳濃度來抑制鈦材耐變色性的劣化。又,以往鈦材的耐變色性評價是例如專利文獻5所記載,是透過浸漬於溫度60℃且pH3的硫酸中14天後的色差來進行評價。惟,近年來則追求一種耐變色性比以往鈦材還要優異的鈦材。 Summary of the invention Invent the problem to be solved In the technologies described in Patent Documents 1 to 5, the deterioration of the discoloration resistance of the titanium material is suppressed by reducing the surface carbon concentration. In addition, conventional discoloration resistance evaluation of titanium materials is based on the color difference after immersing in sulfuric acid with a temperature of 60° C. and a pH of 3 for 14 days, as described in Patent Document 5, for example. However, in recent years, a titanium material with better discoloration resistance than conventional titanium materials has been pursued.

本發明是有鑑於上述問題而完成者,其目的在於提供一種鈦材,其比以往鈦材更能長期持續抑制變色且耐變色性優異。本發明之目的在於提供一種鈦材,其即使施行比諸如專利文獻1~5所記載的評價還長期間的浸漬,也不會發生變色。The present invention was completed in view of the above problems, and its object is to provide a titanium material that can continuously suppress discoloration for a long time and has excellent discoloration resistance than conventional titanium materials. An object of the present invention is to provide a titanium material that does not undergo discoloration even if it is immersed for a longer period than the evaluation described in Patent Documents 1 to 5, for example.

用以解決課題之手段 基於上述見解所完成之本發明要點乃如以下所述。 [1]本發明之一態樣的鈦材,其透過輝光放電光譜分析法從表面朝厚度方向測定氧濃度,從前述表面起算至所測得氧濃度為最大值之1/3的位置為止之範圍的平均氮濃度及平均碳濃度分別為14.0原子%以下,平均氫濃度為30.0原子%以下; 在前述表面以入射角為0.3度之平行光束法(collimated beam method)進行X射線繞射測定所求出的α相之Ti之c軸的晶格常數、及在板厚中央以集中法進行X射線繞射測定所求出的α相之Ti之c軸的晶格常數,兩者之差值為0.015Å以下。 [2]上述[1]所記載的鈦材亦可具備:厚度為30.0nm以下的氧化皮膜。 [3]上述[1]或[2]所記載的鈦材,其亦可如下: 具有:鈦基材、及配置於前述鈦基材表面的氧化皮膜; 以X射線光電子光譜法進行分析時,前述氧化皮膜中源自氮化物的氮濃度之最大值為2.0~10.0原子%, 以SiO 2之濺射速度來換算時,前述氧化皮膜中,前述源自氮化物的氮濃度顯示為最大值之位置存在於前述氧化皮膜表面起算2~10nm之範圍, 氧濃度達最大值之1/2的位置起算至鈦基材側20nm之範圍,於該範圍中存在的前述源自氮化物的氮濃度是小於前述氧化皮膜中前述源自氮化物的氮濃度之最大值且為7原子%以下, 前述氧化皮膜中前述源自氮化物的前述氮濃度之最大值為前述氧化皮膜中前述源自氮化物之前述氮濃度達最大之位置之源自碳化物的碳濃度以上。 [4]上述[1]或[2]所記載的鈦材,其亦可如下: 具備鈦基材,前述鈦基材在算術平均粗糙度Ra達最大之方向的粗糙度曲線中,算術平均粗糙度Ra與要素長度RSm的比即Ra/RSm為0.006~0.015,並且,均方根傾斜(root mean square slope)RΔq為0.150~0.280;前述鈦基材之峰度(kurtosis)Rku大於3,前述鈦基材之偏度(skewness)Rsk大於-0.5。 [5]上述[3]所記載的鈦材,其亦可如下: 在前述鈦基材之算術平均粗糙度Ra達最大之方向的粗糙度曲線中,算術平均粗糙度Ra與要素長度RSm的比即Ra/RSm為0.006~0.015,並且,均方根傾斜RΔq為0.150~0.280;前述鈦基材之峰度Rku大於3,前述鈦基材之偏度Rsk大於-0.5。 Means for Solving the Problems The gist of the present invention based on the above findings is as follows. [1] A titanium material according to an aspect of the present invention, in which the oxygen concentration is measured from the surface toward the thickness direction by glow discharge spectroscopy, starting from the surface to a position where the measured oxygen concentration is 1/3 of the maximum value. The average nitrogen concentration and the average carbon concentration in the range are 14.0 atomic % or less, and the average hydrogen concentration is 30.0 atomic % or less; The difference between the c-axis lattice constant of α-phase Ti and the c-axis lattice constant of α-phase Ti determined by X-ray diffraction measurement at the center of the plate thickness is less than 0.015Å. [2] The titanium material described in [1] above may be provided with an oxide film having a thickness of 30.0 nm or less. [3] The titanium material according to the above [1] or [2], which may be as follows: having a titanium base material and an oxide film disposed on the surface of the titanium base material; when analyzed by X-ray photoelectron spectroscopy, The maximum value of the nitrogen concentration derived from nitride in the oxide film is 2.0 to 10.0 atomic %. When converted by the sputtering speed of SiO2 , the nitrogen concentration derived from nitride in the oxide film is one of the maximum values. The position exists in the range of 2 to 10 nm from the surface of the oxide film, and the range of 20 nm from the position where the oxygen concentration reaches 1/2 of the maximum value to the titanium substrate side. The concentration of nitrogen derived from the nitride existing in this range is is less than the maximum value of the nitrogen concentration derived from nitride in the oxide film and 7 atomic % or less, and the maximum value of the nitrogen concentration derived from nitride in the oxide film is the nitride-derived concentration in the oxide film The maximum nitrogen concentration is greater than the carbon concentration derived from carbides. [4] The titanium material according to the above [1] or [2], which may be as follows: provided with a titanium base material, and the titanium base material has an arithmetic mean roughness in a roughness curve in a direction in which the arithmetic mean roughness Ra reaches a maximum. The ratio of the degree Ra to the element length RSm, that is, Ra/RSm, is 0.006~0.015, and the root mean square slope RΔq is 0.150~0.280; the kurtosis (kurtosis) Rku of the aforementioned titanium base material is greater than 3, and the aforementioned The skewness (skewness) Rsk of the titanium substrate is greater than -0.5. [5] The titanium material according to the above [3], which may be as follows: In the roughness curve in the direction in which the arithmetic mean roughness Ra of the titanium base material reaches the maximum, the ratio of the arithmetic mean roughness Ra to the element length RSm That is, Ra/RSm is 0.006~0.015, and the root mean square tilt RΔq is 0.150~0.280; the kurtosis Rku of the titanium base material is greater than 3, and the skewness Rsk of the titanium base material is greater than -0.5.

發明效果 依照本發明,就能提供一種鈦材,其比以往鈦材更能長期持續抑制變色且耐變色性優異。 Invention effect According to the present invention, it is possible to provide a titanium material that can continuously suppress discoloration for a longer period of time than conventional titanium materials and has excellent discoloration resistance.

本發明的實施形態 用以實施發明之形態 以下,一邊參照圖式一邊說明本發明一實施形態之鈦材。另外,圖中各構成要素的尺寸、比率並不代表實際各構成要素的尺寸、比率。 Embodiments of the present invention Form used to implement the invention Hereinafter, a titanium material according to an embodiment of the present invention will be described with reference to the drawings. In addition, the size and ratio of each component in the figure do not represent the actual size and ratio of each component.

另外,關於包夾以下記載之「~」所記載的數值限定範圍,下限值及上限值含於該範圍中。關於標示「小於」、「大於」的數值,該值不含於數值範圍中。In addition, regarding the limited range of numerical values enclosed by "~" described below, the lower limit value and the upper limit value are included in this range. Regarding values marked "less than" and "greater than", these values are not included in the numerical range.

本案發明人等終至完成本發明,首先詳細說明本案發明人等經檢討所獲得的創新見解。The inventors of the present invention have finally completed the present invention. First, they will describe in detail the innovative insights obtained by the inventors of the present application through review.

鈦材是如下的結構:鈦基材之表面配置有氧化皮膜;關於鈦材的變色,一直被認為是起因於酸雨等而導致氧化皮膜厚度增加所致。鈦材表面附近的碳濃度會對氧化皮膜厚度增加帶來影響,因此,以往以提升耐變色性為目的之鈦材都會限制其表面的碳濃度。本案發明人等為了獲得比以往更能長期持續抑制變色且耐變色性優異的鈦材,進行了檢討。Titanium materials have the following structure: an oxide film is arranged on the surface of the titanium base material; the discoloration of titanium materials has been considered to be caused by an increase in the thickness of the oxide film due to acid rain, etc. The carbon concentration near the surface of titanium materials will affect the thickness of the oxide film. Therefore, in the past, titanium materials with the purpose of improving discoloration resistance would limit the carbon concentration on the surface. The inventors of the present invention conducted examinations in order to obtain a titanium material that can suppress discoloration for a longer period of time than conventional materials and has excellent discoloration resistance.

首先,本案發明人等透過輝光放電光譜分析法(Glow Discharge Spectroscopy,以下稱為「GDS」),從鈦材表面(換言之,氧化皮膜表面)朝厚度方向測定氧濃度、碳濃度及氮濃度。可瞭解到,鈦材具有氧化皮膜,以GDS測得氧濃度為最大值之1/3的位置是位於氧化皮膜與鈦基材之界面附近且位於鈦基材側的部位。以下,從鈦材表面起算朝厚度方向至GDS所測得氧濃度為最大值之1/3的位置為止之範圍,稱為:鈦材表層部。First, the inventors of the present invention measured the oxygen concentration, carbon concentration, and nitrogen concentration from the titanium material surface (in other words, the oxide film surface) toward the thickness direction through glow discharge spectroscopy (hereinafter referred to as "GDS"). It can be understood that titanium has an oxide film, and the position where the oxygen concentration measured by GDS is 1/3 of the maximum value is located near the interface between the oxide film and the titanium base material and on the side of the titanium base material. Hereinafter, the range from the surface of the titanium material in the thickness direction to the position where the oxygen concentration measured by GDS is 1/3 of the maximum value is called the titanium material surface layer portion.

接著,本案發明人等將鈦材浸漬於pH3、60℃之硫酸水溶液中4週,並基於浸漬前後之色差來評價耐變色性。此浸漬前後明顯發生變色之鈦材與幾乎沒有變色的鈦材進行比較後瞭解到,在浸漬前的鈦材中,GDS所測得之碳濃度及氮濃度是不同的。具體而言瞭解到,就浸漬於pH3、60℃之硫酸水溶液中4週後明顯發生變色之鈦材而言,其浸漬前的鈦材中,氧化皮膜內部、以及氧化皮膜與基材之界面起靠基材側之界面附近是有氮及碳存在。以往都未曾考量到,氧化皮膜、以及氧化皮膜與基材之界面起靠基材側之界面附近存在的氮會對鈦材變色造成影響。不過可推測,鈦材長期持續暴露於酸雨環境時,氧化皮膜及其附近存在的氮也會與碳同樣成為起點而發生氧化皮膜成長。Next, the inventors of the present invention immersed the titanium material in a sulfuric acid aqueous solution with pH 3 and 60° C. for 4 weeks, and evaluated the discoloration resistance based on the color difference before and after immersion. After comparing the titanium material with obvious discoloration before and after impregnation and the titanium material with almost no discoloration, it was found that the carbon concentration and nitrogen concentration measured by GDS were different in the titanium material before impregnation. Specifically, it was found that for the titanium material that changed color significantly after being immersed in a sulfuric acid aqueous solution of pH 3 and 60°C for 4 weeks, in the titanium material before immersion, the inside of the oxide film and the interface between the oxide film and the substrate began to change. Nitrogen and carbon are present near the interface on the substrate side. It has never been considered in the past that the oxide film and the nitrogen present near the interface between the oxide film and the base material on the base material side will affect the discoloration of the titanium material. However, it can be speculated that when titanium materials are continuously exposed to an acid rain environment for a long time, the oxide film and the nitrogen present in its vicinity will become the same starting point as carbon and the oxide film will grow.

再者,本案發明人等檢討結果所獲得的見解是,氧化皮膜及其附近的氮濃度也會與碳濃度同樣對鈦材的耐變色性帶來影響,透過限制氮濃度會提升耐變色性。更瞭解到,從鈦材表面起算朝厚度方向至GDS所測得氧濃度為最大值之1/3的位置為止之範圍中,若平均氮濃度及平均碳濃度分別為14.0原子%以下,則鈦材的耐變色性會比以往還要提升。鈦材表層部的平均碳濃度可透過提高退火溫度或者延長退火時間來使其降低。平均氮濃度則可透過提高熱處理之真空度來使其降低。Furthermore, the inventors of the present case obtained the insight from the examination results that the nitrogen concentration in and around the oxide film has the same impact on the discoloration resistance of the titanium material as the carbon concentration, and that limiting the nitrogen concentration improves the discoloration resistance. It is also understood that in the range from the surface of the titanium material in the thickness direction to the position where the oxygen concentration measured by GDS is 1/3 of the maximum value, if the average nitrogen concentration and the average carbon concentration are each 14.0 atomic % or less, the titanium The discoloration resistance of the material will be improved than before. The average carbon concentration in the surface layer of titanium materials can be reduced by increasing the annealing temperature or extending the annealing time. The average nitrogen concentration can be reduced by increasing the vacuum degree of heat treatment.

接著,本案發明人等著眼於鈦材表層部的氫濃度,並針對鈦材表層部的氫濃度對鈦材的耐變色性帶來的影響進行了檢討。結果發現,若鈦材表層部的平均氫濃度為30.0原子%以下,則耐變色性會更加提升。於大氣之酸雨環境下,鈦的氫化物在熱力學上是比氧化鈦還不安定。因鈦材中氫濃度增加而促進氧化鈦生成時,耐變色性就有可能會降低。不過可認為,若鈦材表層部的平均氫濃度為30.0原子%以下,則氫化鈦不會變化成氧化鈦,可抑制耐變色性降低。Next, the inventors of the present invention focused on the hydrogen concentration in the surface layer of the titanium material and examined the influence of the hydrogen concentration in the surface layer of the titanium material on the discoloration resistance of the titanium material. It was found that if the average hydrogen concentration in the surface layer of the titanium material is 30.0 atomic % or less, the discoloration resistance will be further improved. In the acid rain environment of the atmosphere, titanium hydride is thermodynamically more unstable than titanium oxide. When the hydrogen concentration in the titanium material increases and the formation of titanium oxide is promoted, the discoloration resistance may decrease. However, it is considered that if the average hydrogen concentration in the surface layer of the titanium material is 30.0 atomic % or less, the titanium hydride will not change into titanium oxide, and a decrease in discoloration resistance can be suppressed.

接著,本案發明人等著眼於鈦材表面之Ti的結晶結構變化。本案發明人等發現,最密六方晶體的α相之Ti之c軸的變化會對鈦材的耐變色性帶來影響。Next, the inventors of the present invention focused on changes in the crystal structure of Ti on the surface of the titanium material. The inventors of this case discovered that changes in the c-axis of Ti in the α phase of the densest hexagonal crystal will affect the discoloration resistance of titanium materials.

根據本案發明人等的檢討而瞭解到,在鈦材表面以入射角為0.3度之平行光束法進行X射線繞射測定所求出的α相之Ti之c軸的晶格常數、及在板厚中央(亦稱厚度中央)以集中法進行X射線繞射測定所求出的α相之Ti之c軸的晶格常數,兩者的差值若為0.015Å以下,就能大幅提升耐變色性。關於上述X射線繞射測定,X射線的滲透程度會因X射線繞射能量而有所不同,但透過在鈦材表面與鈦材板厚中央施行上述X射線繞射測定,藉此就能測定出各自的α相之Ti之c軸的晶格常數。在本案中,是如以下所述來定義表層部的α相之Ti之c軸的晶格常數的增加。亦即,在鈦材表面以入射角為0.3度之平行光束法進行X射線繞射測定所求出的α相之Ti之c軸的晶格常數、及在板厚中央以集中法進行X射線繞射測定所求出的α相之Ti之c軸的晶格常數,兩者之差值稱呼為:表層部中的α相之Ti之c軸的晶格常數的增加。以入射角為0.3度之平行光束法進行X射線繞射測定中的測定深度,雖然不會嚴密地與GDS測定表層部之厚度方向的範圍一致,不過大致上能夠測定表層部中的α相之Ti之c軸的晶格常數的增加。 可認為,鈦材表層部中的α相之Ti之c軸的晶格常數的增加是與氧有關。若氧固溶於鈦材表層部中的α相之Ti,則其c軸的晶格常數會增大。可推測,若存在於鈦材表面的α相之Ti之c軸的晶格常數大於存在於厚度中央的α相之Ti之c軸的晶格常數,則隨著酸雨的作用,會生成缺陷濃度高的氧化鈦且氧化皮膜會變得容易成長,耐變色性會劣化。鈦材表層部中的α相之Ti的結晶結構會受到熱處理的溫度、時間、真空度而影響。透過提升熱處理之氣體環境中的真空度,藉此,固溶於鈦材表層部中的α相之Ti的氧量會減少,鈦材表層部中的α相之Ti之c軸的晶格常數的增加會被抑制。本案發明人等經檢討所獲得之創新見解,至此說明完畢。 According to the review by the inventors of the present case, it was found that the c-axis lattice constant of the α-phase Ti was determined by X-ray diffraction measurement using the parallel beam method with an incident angle of 0.3 degrees on the surface of the titanium material, and the lattice constant on the plate If the difference between the c-axis lattice constant of α-phase Ti and the thick center (also called the thickness center) is 0.015Å or less, which is determined by X-ray diffraction measurement using the concentration method, the discoloration resistance can be greatly improved. sex. Regarding the above-mentioned X-ray diffraction measurement, the penetration degree of X-rays varies depending on the X-ray diffraction energy. However, by performing the above-mentioned X-ray diffraction measurement on the surface of the titanium material and in the center of the titanium material plate thickness, it can be measured. Find the lattice constant of the c-axis of Ti in each α phase. In this case, the increase in the lattice constant of the c-axis of Ti in the α phase in the surface layer is defined as follows. That is, the lattice constant of the c-axis of α-phase Ti was determined by X-ray diffraction measurement using the parallel beam method with an incident angle of 0.3 degrees on the surface of the titanium material, and X-rays were measured using the concentration method at the center of the plate thickness. The difference between the c-axis lattice constant of α-phase Ti and the two is determined by diffraction measurement is called the increase in the c-axis lattice constant of α-phase Ti in the surface layer portion. The measurement depth in X-ray diffraction measurement using the parallel beam method with an incident angle of 0.3 degrees does not exactly match the thickness direction range of the surface layer measured by GDS, but it can roughly measure the α phase in the surface layer. The increase in the lattice constant of the c-axis of Ti. It is considered that the increase in the c-axis lattice constant of the α-phase Ti in the surface layer of the titanium material is related to oxygen. If oxygen is solidly dissolved in the α-phase Ti in the surface layer of the titanium material, the lattice constant of the c-axis will increase. It can be speculated that if the lattice constant of the c-axis of Ti in the α-phase present on the surface of the titanium material is larger than the c-axis lattice constant of the Ti in the α-phase present in the center of the thickness, then a defect concentration will be generated due to the action of acid rain. With high titanium oxide content, the oxide film will grow easily and the discoloration resistance will deteriorate. The crystal structure of the α-phase Ti in the surface layer of the titanium material is affected by the temperature, time, and vacuum degree of the heat treatment. By increasing the degree of vacuum in the gas environment during heat treatment, the amount of oxygen dissolved in the α-phase Ti in the surface part of the titanium material will be reduced, and the c-axis lattice constant of the α-phase Ti in the surface part of the titanium material will be reduced. The increase will be suppressed. This concludes the explanation of the innovative insights obtained by the inventors of this case through review.

接著,一邊參照圖1一邊說明本發明一實施形態之鈦材。圖1是一示意性擴大剖面圖,其顯示本實施形態之鈦材之層結構。關於本實施形態之鈦材,透過輝光放電光譜分析法從表面朝厚度方向測定氧濃度,從前述表面起算至所測得氧濃度為最大值之1/3的位置為止之範圍的平均氮濃度及平均碳濃度分別為14.0原子%以下,平均氫濃度為30.0原子%以下;在前述表面以入射角為0.3度之平行光束法進行X射線繞射測定所求出的α相之Ti之c軸的晶格常數、及在板厚中央以集中法進行X射線繞射測定所求出的α相之Ti之c軸的晶格常數,兩者之差值為0.015Å以下。以下詳細說明本實施形態之鈦材。Next, a titanium material according to an embodiment of the present invention will be described with reference to FIG. 1 . FIG. 1 is a schematic enlarged cross-sectional view showing the layer structure of the titanium material of this embodiment. Regarding the titanium material of this embodiment, the oxygen concentration is measured from the surface toward the thickness direction by the glow discharge spectrometry method, and the average nitrogen concentration in the range from the surface to the position where the measured oxygen concentration is 1/3 of the maximum value, and The average carbon concentration is 14.0 atomic % or less, and the average hydrogen concentration is 30.0 atomic % or less; the c-axis of α-phase Ti is determined by X-ray diffraction measurement using the parallel beam method with an incident angle of 0.3 degrees on the aforementioned surface. The difference between the lattice constant and the c-axis lattice constant of Ti in the α phase determined by X-ray diffraction measurement using the concentration method at the center of the plate thickness is 0.015Å or less. The titanium material of this embodiment will be described in detail below.

(鈦材1) 如圖1所示,本實施形態之鈦材1是一種在鈦基材10表面形成有氧化皮膜20的鈦材。換言之,鈦材1具有:鈦基材10、及形成於該鈦基材10表面的氧化皮膜20。表層部30是一從鈦材1表面(言換之,氧化皮膜20表面)起算朝厚度方向至GDS所測得氧濃度為最大值之1/3的位置為止的區域,其包含鈦基材10之一部分。 (titanium material 1) As shown in FIG. 1 , the titanium material 1 of this embodiment is a titanium material in which an oxide film 20 is formed on the surface of a titanium base material 10 . In other words, the titanium material 1 has a titanium base material 10 and an oxide film 20 formed on the surface of the titanium base material 10 . The surface portion 30 is a region starting from the surface of the titanium material 1 (in other words, the surface of the oxide film 20 ) in the thickness direction to a position where the oxygen concentration measured by GDS is 1/3 of the maximum value, and includes the titanium base material 10 part of it.

(鈦基材10) 鈦材1的鈦基材10是純鈦、工業用純鈦或鈦合金。鈦基材10是例如Ti含量為70質量%以上的純鈦、工業用純鈦或鈦合金。以下,有時會將此等統稱為「鈦」。純鈦之結晶結構為最密六方晶體的α相,且不含體心立方結構的β相。工業用純鈦主要是由α相所構成,有時會因為化學組成等而含有β相。鈦合金可為:僅有α相的α型合金;亦可為:含有體心立方結構之β相的α+β型合金。又,鈦基材10可為例如工業用鈦。用於鈦基材10的工業用鈦可舉例如:JIS H 4600:2012所記載之各種工業用鈦的板及條、JIS H 4650:2016所記載之各種工業用鈦的棒。若要求加工性,則宜為已減少不純物的JIS1種(例如JIS H 4600:2012)的工業用純鈦。又,若需要強度,則可將JIS2種~4種的工業用純鈦應用於鈦基材10。就鈦合金而言可舉例如:為了提升耐蝕性而含有微量貴金屬系元素例如鈀、鉑、釕等的JIS11種~23種;或者,含有較多元素的JIS60種,例如Ti-6Al-4V系合金、60E種、61種及61F種等。另外,在建築物中主要使用:JIS1種、與其同等之ASTMGr.1所規定之工業用純鈦或其同等材。 (titanium base material 10) The titanium base material 10 of the titanium material 1 is pure titanium, industrial pure titanium or titanium alloy. The titanium base material 10 is, for example, pure titanium with a Ti content of 70% by mass or more, industrial pure titanium, or a titanium alloy. Hereinafter, these materials may be collectively referred to as "titanium". The crystal structure of pure titanium is the α phase of the densest hexagonal crystal and does not contain the β phase of the body-centered cubic structure. Industrial pure titanium is mainly composed of α phase, and sometimes contains β phase due to chemical composition, etc. Titanium alloys can be: α-type alloys with only α-phase; or they can be: α+β-type alloys containing β-phase with a body-centered cubic structure. In addition, the titanium base material 10 may be industrial titanium, for example. Examples of industrial titanium used for the titanium base material 10 include various industrial titanium plates and strips described in JIS H 4600:2012, and various industrial titanium rods described in JIS H 4650:2016. If workability is required, industrial pure titanium of JIS Class 1 (for example, JIS H 4600: 2012) with reduced impurities is preferred. Moreover, if strength is required, JIS type 2 to 4 industrial pure titanium can be applied to the titanium base material 10 . Examples of titanium alloys include: JIS 11 to 23 containing trace amounts of precious metal elements such as palladium, platinum, ruthenium, etc., in order to improve corrosion resistance; or JIS 60 containing a larger number of elements, such as Ti-6Al-4V series Alloy, 60E type, 61 type and 61F type, etc. In addition, mainly used in buildings: industrial pure titanium specified in JIS Class 1, its equivalent ASTM Gr.1, or its equivalent.

關於以α相為主之鈦合金,有例如:高耐蝕性合金(JIS規格之11種~13種、17種、19種~22種、及ASTM規格之Grade7、11、13、14、17、30、31所規定之鈦合金,或者進一步少量含有各種元素的鈦合金(Ti-Ru-Mm等))、Ti-0.5Cu、Ti-1.0Cu、Ti-1.0Cu-0.5Nb、Ti-1.0Cu-1.0Sn-0.35Si-0.25Nb等。Mm表示稀土金屬合金(mischmetal)。Regarding titanium alloys mainly composed of α phase, there are, for example, high corrosion resistance alloys (JIS grades 11 to 13, 17, 19 to 22, and ASTM grades 7, 11, 13, 14, 17, Titanium alloys specified in 30 and 31, or titanium alloys containing small amounts of various elements (Ti-Ru-Mm, etc.), Ti-0.5Cu, Ti-1.0Cu, Ti-1.0Cu-0.5Nb, Ti-1.0Cu -1.0Sn-0.35Si-0.25Nb, etc. Mm represents rare earth metal alloy (mischmetal).

關於α+β型鈦合金,有例如:Ti-3Al-2.5V、Ti-5Al-1Fe、Ti-6Al-4V等。Regarding α+β type titanium alloys, there are examples: Ti-3Al-2.5V, Ti-5Al-1Fe, Ti-6Al-4V, etc.

如Ti-6Al-4V系合金這般,在鈦基材10含有鋁之情況下,有時耐蝕性會劣化並對耐變色性帶來不良影響。因此,作為鈦基材10之鈦合金其表面若要形成氧化皮膜20,則推薦預先調查合金元素對於用途的影響,並因應鈦基材10而適宜調整各層之組成、厚度。When the titanium base material 10 contains aluminum like the Ti-6Al-4V based alloy, the corrosion resistance may be deteriorated and the discoloration resistance may be adversely affected. Therefore, if the oxide film 20 is to be formed on the surface of the titanium alloy as the titanium base material 10, it is recommended to investigate the influence of the alloy elements on the application in advance and appropriately adjust the composition and thickness of each layer according to the titanium base material 10.

鈦基材10為例如工業用純鈦或鈦合金,其以質量%計含有: Co:0%以上且1.0%以下、 Cr:0%以上且0.5%以下、 Ni:0%以上且1.00%以下、 Ta:0%以上且6.00%以下、 Al:0%以上且7.0%以下、 V:0%以上且5.0%以下、 S:0%以上且0.3%以下、 Cu:0%以上且1.50%以下、 Nb:0%以上且0.70%以下、 Sn:0%以上且1.40%以下、 Si:0%以上且0.55%以下、 Mo:0%以上且0.5%以下、 W:0%以上且0.5%以下、 Pd:0%以上且0.25%、 Ru:0%以上且0.15%以下、 Rh:0%以上且0.15%以下、 Os:0%以上且0.15%以下、 Ir:0%以上且0.15%以下、 Pt:0%以上且0.15%以下、 REM:0%以上且0.10%以下、 C:0%以上且0.18%以下、 H:0%以上且0.015%以下、 O:0%以上且0.40%以下、 N:0%以上且0.05%以下、及 Fe:0%以上且2.50%以下, 剩餘部分由Ti及不純物所構成。 在此所謂REM是稀土族元素,具體而言是選自Sc、Y、輕稀土族元素(La、Ce、Pr、Nd、Pm、Sm、Eu)及重稀土族元素(Gd、Tb、Dy、Ho、Er、Tm、Yb、Lu)所構成群組中之一種以上的元素。 The titanium base material 10 is, for example, industrial pure titanium or titanium alloy, which contains: in mass %: Co: 0% or more and less than 1.0%, Cr: 0% or more and 0.5% or less, Ni: 0% or more and 1.00% or less, Ta: 0% or more and 6.00% or less, Al: 0% or more and 7.0% or less, V: 0% or more and 5.0% or less, S: 0% or more and 0.3% or less, Cu: 0% or more and 1.50% or less, Nb: 0% or more and 0.70% or less, Sn: 0% or more and 1.40% or less, Si: 0% or more and 0.55% or less, Mo: 0% or more and 0.5% or less, W: 0% or more and 0.5% or less, Pd: 0% or more and 0.25%, Ru: 0% or more and 0.15% or less, Rh: 0% or more and 0.15% or less, Os: 0% or more and 0.15% or less, Ir: 0% or more and 0.15% or less, Pt: 0% or more and 0.15% or less, REM: 0% or more and 0.10% or less, C: 0% or more and 0.18% or less, H: 0% or more and 0.015% or less, O: 0% or more and 0.40% or less, N: 0% or more and 0.05% or less, and Fe: 0% or more and 2.50% or less, The remainder consists of Ti and impurities. REM here refers to rare earth elements, specifically selected from Sc, Y, light rare earth elements (La, Ce, Pr, Nd, Pm, Sm, Eu) and heavy rare earth elements (Gd, Tb, Dy, One or more elements in the group consisting of Ho, Er, Tm, Yb, Lu).

又,鈦基材10為例如工業用純鈦,其以質量%計含有: C:0%以上且0.10%以下、 H:0%以上且0.015%以下、 O:0%以上且0.40%以下、 N:0%以上且0.05%以下、及 Fe:0%以上且0.50%以下, 剩餘部分由Ti及不純物所構成。 In addition, the titanium base material 10 is, for example, industrial pure titanium, which contains: in mass %: C: 0% or more and 0.10% or less, H: 0% or more and 0.015% or less, O: 0% or more and 0.40% or less, N: 0% or more and 0.05% or less, and Fe: 0% or more and 0.50% or less, The remainder consists of Ti and impurities.

又,鈦基材10為例如鈦合金,其以質量%計含有: Co:0%以上且0.80%以下、 Pd:0%以上且0.25%以下、 Cr:0%以上且0.2%以下、 Ru:0%以上且0.06%以下、 Ni:0%以上且0.60%以下、 Ta:0%以上且6.0%以下、 N:0%以上且0.05%以下、 C:0%以上且0.08%以下、 H:0%以上且0.015%以下、 O:0%以上且0.35%以下、及 Fe:0%以上且0.30%以下, 剩餘部分由Ti及不純物所構成。 In addition, the titanium base material 10 is, for example, a titanium alloy, which contains: in mass %: Co: 0% or more and less than 0.80%, Pd: 0% or more and 0.25% or less, Cr: 0% or more and 0.2% or less, Ru: 0% or more and 0.06% or less, Ni: 0% or more and 0.60% or less, Ta: 0% or more and 6.0% or less, N: 0% or more and 0.05% or less, C: 0% or more and 0.08% or less, H: 0% or more and 0.015% or less, O: 0% or more and 0.35% or less, and Fe: 0% or more and 0.30% or less, The remainder consists of Ti and impurities.

又,鈦基材10為例如鈦合金,其以質量%計含有: Al:2.0%以上且7.0%以下、 V:1.0%以上且5.0%以下、 S:0%以上且0.3%以下、 REM:0%以上且0.08%以下、 N:0%以上且0.05%以下、 C:0%以上且0.10%以下、 H:0%以上且0.015%以下、 O:0%以上且0.35%以下、及 Fe:0%以上且2.5%以下, 剩餘部分由Ti及不純物所構成。 In addition, the titanium base material 10 is, for example, a titanium alloy, which contains: in mass %: Al: 2.0% or more and 7.0% or less, V: 1.0% or more and 5.0% or less, S: 0% or more and 0.3% or less, REM: 0% or more and 0.08% or less, N: 0% or more and 0.05% or less, C: 0% or more and 0.10% or less, H: 0% or more and 0.015% or less, O: 0% or more and 0.35% or less, and Fe: 0% or more and 2.5% or less, The remainder consists of Ti and impurities.

又,鈦基材10為例如鈦合金,其以質量%計含有: Cu:0.3%以上且1.50%以下、 Nb:0%以上且0.70%以下、 Sn:0%以上且1.40%以下、 Si:0%以上且0.55%以下、 N:0%以上且0.05%以下、 C:0%以上且0.10%以下、 H:0%以上且0.015%以下、 O:0%以上且0.15%以下、及 Fe:0%以上且0.10%以下, 剩餘部分由Ti及不純物所構成。 In addition, the titanium base material 10 is, for example, a titanium alloy, which contains: in mass %: Cu: 0.3% or more and 1.50% or less, Nb: 0% or more and 0.70% or less, Sn: 0% or more and 1.40% or less, Si: 0% or more and 0.55% or less, N: 0% or more and 0.05% or less, C: 0% or more and 0.10% or less, H: 0% or more and 0.015% or less, O: 0% or more and 0.15% or less, and Fe: 0% or more and 0.10% or less, The remainder consists of Ti and impurities.

又,鈦基材10為例如鈦合金,其以質量%計含有: V:0%以上且0.5%以下、 Ni:0%以上且1.00%以下、 Cr:0%以上且0.5%以下、 Co:0%以上且1.0%以下、 Mo:0%以上且0.5%以下、 W:0%以上且0.5%以下、 Pd:0%以上且0.15%以下、 Ru:0%以上且0.15%以下、 Rh:0%以上且0.15%以下、 Os:0%以上且0.15%以下、 Ir:0%以上且0.15%以下、 Pt:0%以上且0.15%以下、 REM:0.001%以上且0.10%以下、 N:0%以上且0.03%以下、 C:0%以上且0.18%以下、 H:0%以上且0.015%以下、 O:0%以上且0.35%以下、 Fe:0%以上且0.30%以下、及 Pd、Ru、Rh、Os、Ir及Pt之合計:0.01%以上且0.15%以下, 剩餘部分由Ti及不純物所構成。 In addition, the titanium base material 10 is, for example, a titanium alloy, which contains: in mass %: V: 0% or more and 0.5% or less, Ni: 0% or more and 1.00% or less, Cr: 0% or more and 0.5% or less, Co: 0% or more and less than 1.0%, Mo: 0% or more and 0.5% or less, W: 0% or more and 0.5% or less, Pd: 0% or more and 0.15% or less, Ru: 0% or more and 0.15% or less, Rh: 0% or more and 0.15% or less, Os: 0% or more and 0.15% or less, Ir: 0% or more and 0.15% or less, Pt: 0% or more and 0.15% or less, REM: 0.001% or more and 0.10% or less, N: 0% or more and 0.03% or less, C: 0% or more and 0.18% or less, H: 0% or more and 0.015% or less, O: 0% or more and 0.35% or less, Fe: 0% or more and 0.30% or less, and The total of Pd, Ru, Rh, Os, Ir and Pt: 0.01% or more and 0.15% or less, The remainder consists of Ti and impurities.

就不純物而言,無關乎添加的意圖,是存在於鈦中且在所得鈦材中本來沒必要存在的成分。「不純物」之用語,其概念包含工業上製造鈦時從原料或製造環境等所混入的不純物在內。不純物可舉例如:Cl、Na、Mg、Ca及B。不純物之各元素含量宜為0.1質量%以下,總量則宜為0.4質量%以下。In terms of impurities, they are components that exist in titanium and are not necessarily present in the obtained titanium material regardless of the intention of addition. The term "impurities" is a concept that includes impurities mixed in from raw materials or the manufacturing environment during the industrial production of titanium. Examples of impurities include Cl, Na, Mg, Ca and B. The content of each element of impurities should be less than 0.1 mass%, and the total amount should be less than 0.4 mass%.

鈦基材10通常為板、條、管、直線,或是構成此等適宜加工後的形狀。鈦基材10亦可為任意形狀,例如球狀或長方體狀。The titanium substrate 10 is usually a plate, a strip, a tube, a straight line, or is formed into such a suitably processed shape. The titanium base material 10 can also be in any shape, such as spherical or rectangular parallelepiped.

(氧化皮膜20) 在鈦基材10的表面形成有氧化皮膜20。氧化皮膜20的厚度並不特別限定,但若大於30.0nm,則有時會因為光的干涉作用而對鈦材1之顯色帶來影響。因此,氧化皮膜20的厚度宜為30.0nm以下。從抑制光的干涉作用所致之顯色的觀點來看,氧化皮膜20的厚度較宜為25.0nm以下,更宜為20.0nm以下。氧化皮膜20的厚度雖大於0nm,不過亦可為例如10.0nm以上。又,鈦材的耐變色性會因為確保氧化皮膜20的厚度而提升。因此,從提升耐變色性之觀點來看,鈦材1表面之氧化皮膜20的厚度較宜為12.0nm以上。 (Oxide film 20) An oxide film 20 is formed on the surface of the titanium base material 10 . The thickness of the oxide film 20 is not particularly limited, but if it is greater than 30.0 nm, the color development of the titanium material 1 may be affected due to interference of light. Therefore, the thickness of the oxide film 20 is preferably 30.0 nm or less. From the viewpoint of suppressing color development due to interference of light, the thickness of the oxide film 20 is preferably 25.0 nm or less, more preferably 20.0 nm or less. Although the thickness of the oxide film 20 is greater than 0 nm, it may be, for example, 10.0 nm or more. In addition, the discoloration resistance of the titanium material will be improved by ensuring the thickness of the oxide film 20 . Therefore, from the viewpoint of improving discoloration resistance, the thickness of the oxide film 20 on the surface of the titanium material 1 is preferably 12.0 nm or more.

氧化皮膜20的厚度是透過GDS來測定。以GDS所為之測定是透過以下的方法來進行。以GDS所為之測定是使用堀場製作所(股)公司製之JOBIN YVON GD-Profiler2,以35W之定功率(constant power)模式來進行,氬氣之壓力定為600Pa,放電範圍定為直徑4mm。以GDS所為之測定中的測定間距為0.5nm。以GDS所為之測定中,從鈦材1表面進行分析O(氧)、N(氮)、C(碳)、H(氫)及Ti。上述各元素濃度(原子%)是以上述元素合計為100原子%來計算。氧化皮膜20的厚度是從GDS所測得之氧濃度來求算。具體而言,從表面起算至氧濃度相對最大值為減半之位置為止之厚度方向距離即為氧化皮膜20的厚度。平均氮濃度、平均碳濃度及平均氫濃度為各測定點之氮濃度、碳濃度及氫濃度之數值的算術平均值。The thickness of the oxide film 20 is measured by GDS. The measurement using GDS is carried out by the following method. The GDS was measured using the JOBIN YVON GD-Profiler2 manufactured by Horiba Manufacturing Co., Ltd. in a constant power mode of 35W. The pressure of the argon gas was set to 600Pa, and the discharge range was set to a diameter of 4mm. The measurement pitch in the measurement based on GDS is 0.5nm. In the measurement performed by GDS, O (oxygen), N (nitrogen), C (carbon), H (hydrogen), and Ti are analyzed from the surface of the titanium material 1. The concentration (atomic %) of each of the above elements is calculated based on the total of the above elements being 100 atomic %. The thickness of the oxide film 20 is calculated from the oxygen concentration measured by GDS. Specifically, the distance in the thickness direction from the surface to the position where the oxygen concentration is halved relative to the maximum value is the thickness of the oxide film 20 . The average nitrogen concentration, average carbon concentration and average hydrogen concentration are the arithmetic average values of the nitrogen concentration, carbon concentration and hydrogen concentration at each measurement point.

在鈦基材10中與氧化皮膜20之界面附近之源自氮化物的氮濃度宜為:小於XPS測定氧化皮膜20中之氮濃度的最大值且為7原子%以下。透過後述之本實施形態之鈦材1的製造方法,會於氧化皮膜20形成氮化物,不過若根據該方法則在鈦基材10與氧化皮膜20之界面附近形成之氮化物是不存在的或為極少量。鈦基材10即母材其氮含量就化學分析所得數值來說為0.05~0.07質量%左右,最多也就0.20原子%左右,是不純物程度。該含量由於是鈦中的氮固溶限度以下,因而不會形成氮化物。據此,鈦基材10與氧化皮膜20之界面附近若存在氮化物時,該氮化物是在本實施形態之鈦材1的製造方法之一例中的退火處理時氮從表面擴散至內部所形成者。因此,在鈦基材10中與氧化皮膜20之界面附近之源自氮化物的氮濃度宜為:小於XPS測定氧化皮膜20中之氮濃度的最大值且為7原子%以下。在鈦基材10中與氧化皮膜20之界面附近之源自氮化物的氮濃度若小於XPS測定氧化皮膜20中之氮濃度的最大值且為7.0原子%以下,就會抑制鈦材1長期持續暴露於酸雨環境時氧化皮膜成長且會抑制變色。在鈦基材10中與氧化皮膜20之界面附近之源自氮化物的氮濃度較宜為:小於氧化皮膜20中之氮濃度的最大值且為3.0原子%以下。另一方面,在鈦基材10中與氧化皮膜20之界面附近之源自氮化物的氮濃度之下限並不限制。因此,根據本實施形態之鈦材1的製造方法之一例,在鈦基材10中與氧化皮膜20之界面附近之源自氮化物的氮濃度之下限為0原子%,不過若考量分離XPS尖峰所致情況(不會是零)則有時會是0.5原子%左右。The nitrogen concentration derived from nitride in the vicinity of the interface between the titanium base material 10 and the oxide film 20 is preferably less than the maximum value of the nitrogen concentration in the oxide film 20 measured by XPS and 7 atomic % or less. Nitride will be formed on the oxide film 20 through the manufacturing method of the titanium material 1 of this embodiment described later. However, according to this method, the nitride formed near the interface between the titanium base material 10 and the oxide film 20 does not exist or For a very small amount. The nitrogen content of the titanium base material 10, that is, the base material, based on the value obtained by chemical analysis, is about 0.05 to 0.07 mass %, or at most about 0.20 atomic %, which is an impurity level. Since this content is below the solid solution limit of nitrogen in titanium, nitrides are not formed. According to this, if nitride exists near the interface between the titanium base material 10 and the oxide film 20, the nitride is formed by nitrogen diffusing from the surface to the inside during the annealing process in one example of the method for manufacturing the titanium material 1 of this embodiment. By. Therefore, the nitrogen concentration derived from nitrides near the interface between the titanium base material 10 and the oxide film 20 is preferably less than the maximum value of the nitrogen concentration in the oxide film 20 measured by XPS and 7 atomic % or less. If the nitrogen concentration derived from nitrides near the interface between the titanium base material 10 and the oxide film 20 is less than the maximum value of the nitrogen concentration in the oxide film 20 measured by XPS and is 7.0 atomic % or less, the long-term durability of the titanium material 1 will be inhibited. When exposed to acid rain, an oxide film grows and inhibits discoloration. The nitrogen concentration derived from nitride in the vicinity of the interface between the titanium base material 10 and the oxide film 20 is preferably less than the maximum value of the nitrogen concentration in the oxide film 20 and 3.0 atomic % or less. On the other hand, the lower limit of the nitrogen concentration derived from nitride in the vicinity of the interface with the oxide film 20 in the titanium base material 10 is not limited. Therefore, according to an example of the manufacturing method of the titanium material 1 of this embodiment, the lower limit of the nitrogen concentration derived from nitride in the vicinity of the interface with the oxide film 20 in the titanium base material 10 is 0 atomic %. However, if the separation of XPS peaks is considered The resulting situation (not zero) is sometimes around 0.5 atomic %.

另外,所謂在鈦基材10中與氧化皮膜20之界面附近,是指:以XPS進行測定時從該界面起算朝鈦基材側20nm之範圍。在後述XPS所測定之圖(例如,圖4)中,XPS測得氧濃度達最大值之1/2的位置定為前述界面。因此,從XPS測得氧濃度達最大值之1/2的位置起至鈦基材側20nm範圍定為:鈦基材10中與氧化皮膜21之界面附近。在鈦基材10中與氧化皮膜20之界面附近是一個與表層部30相異之區域。 氧化皮膜20雖然可透過GDS或XPS來鑑別,但各測定方法所得之氧化皮膜厚度常常會因為測定方法不同而不會嚴密一致。惟,就各測定方法來說,氧濃度達最大值之1/2的位置定為氧化皮膜,以此點看,氧化皮膜的定義是一致的。在本案中,在鈦基材10中與氧化皮膜20之界面附近之源自氮化物的氮濃度進行測定時的氧化皮膜是以XPS來測定。 In addition, the vicinity of the interface between the titanium base material 10 and the oxide film 20 refers to a range of 20 nm toward the titanium base material side from the interface when measured by XPS. In the diagram measured by XPS described later (for example, FIG. 4 ), the position where the oxygen concentration reaches 1/2 of the maximum value measured by XPS is determined as the aforementioned interface. Therefore, the range from the position where the oxygen concentration reaches 1/2 of the maximum value measured by XPS to 20 nm on the titanium base material side is defined as the vicinity of the interface between the titanium base material 10 and the oxide film 21 . There is a region different from the surface layer portion 30 near the interface with the oxide film 20 in the titanium base material 10 . Although the oxide film 20 can be identified through GDS or XPS, the thickness of the oxide film obtained by each measurement method is often not strictly consistent due to different measurement methods. However, for each measurement method, the position where the oxygen concentration reaches 1/2 of the maximum value is designated as an oxide film. From this point of view, the definition of oxide film is consistent. In this case, when the nitrogen concentration derived from nitride in the vicinity of the interface between the titanium base material 10 and the oxide film 20 is measured, the oxide film is measured by XPS.

氧化皮膜20宜含有源自氮化物的氮。氧化皮膜20中源自氮化物的氮可透過X射線光電子光譜法(X-ray Photoelectron Spectroscopy;XPS)來測定。圖2是展示下列的圖:本實施形態之鈦材1以X射線光電子光譜法而得之能譜之深度方向變化的一例。圖3是展示下列的圖:一般鈦材以X射線光電子光譜法而得之能譜之深度方向變化的一例。圖2(A)及圖3(A)展示N1s能譜之深度方向的變化,圖2(B)及圖3(B)展示C1s能譜之深度方向的變化,圖2(C)及圖3(C)展示O1s能譜之深度方向的變化,圖2(D)及圖3(D)展示Ti2p能譜之深度方向的變化。如圖2(C)所示,在本實施形態之鈦材1中,在相當於氧化皮膜20之深度有時可確認到源自氮化物的明顯尖峰。另一方面,如圖3(C)所示,在一般鈦材中,源自氮化物的尖峰極低。如此,本實施形態之鈦材1宜在氧化皮膜20含有預定量之源自氮化物的氮。以下,詳細說明氧化皮膜20中源自氮化物的氮含量。另外,在本實施形態之鈦材1中,伴隨著圖2(C)之氮化物(Nitride)的峰值強度持續增加,圖2(A)之TiN相關尖峰強度也在增加,由此可認為,圖2(C)之氮化物是源自鈦的氮化物。The oxide film 20 preferably contains nitrogen derived from nitride. Nitrogen derived from nitride in the oxide film 20 can be measured through X-ray photoelectron spectroscopy (XPS). FIG. 2 is a diagram showing an example of the change in the depth direction of the energy spectrum of the titanium material 1 of this embodiment obtained by X-ray photoelectron spectroscopy. Figure 3 is a diagram showing the following: an example of the depth direction change of the energy spectrum of a general titanium material obtained by X-ray photoelectron spectroscopy. Figure 2(A) and Figure 3(A) show the changes in the depth direction of the N1s energy spectrum, Figure 2(B) and Figure 3(B) show the changes in the depth direction of the C1s energy spectrum, Figure 2(C) and Figure 3 (C) shows the change in the depth direction of the O1s energy spectrum, and Figure 2(D) and Figure 3(D) show the change in the depth direction of the Ti2p energy spectrum. As shown in FIG. 2(C) , in the titanium material 1 of this embodiment, a clear peak derived from nitride may sometimes be recognized at a depth corresponding to the oxide film 20 . On the other hand, as shown in FIG. 3(C) , in general titanium materials, the peak originating from nitride is extremely low. Thus, the titanium material 1 of this embodiment preferably contains a predetermined amount of nitrogen derived from nitride in the oxide film 20 . Next, the nitrogen content derived from nitride in the oxide film 20 will be described in detail. In addition, in the titanium material 1 of this embodiment, as the peak intensity of nitride (Nitride) in Figure 2(C) continues to increase, the peak intensity related to TiN in Figure 2(A) also increases. From this, it can be considered that, The nitride in Figure 2(C) is a nitride derived from titanium.

氧化皮膜20中源自氮化物的氮含量(氮濃度之最大值)宜為2.0~10.0原子%。所謂氧化皮膜20中源自氮化物的氮含量,是指:XPS所測定之氧化皮膜20中源自氮化物的氮濃度最大值。就未顯色材而言,若氧化皮膜20含有源自氮化物的氮為2.0原子%以上,則耐變色性會更加提升。其理由雖未必明朗,不過可認為原因如下:若氧化皮膜20內存在氮化物,則原子排列會混亂,氧化皮膜20內應變分布會變化;或者,因為導電性變化、奈米級電位分布變化等,而屏蔽離子在氧化皮膜20中穿透的功能(屏蔽功能)發生變化。 若氧化皮膜20中源自氮化物的氮含量為2.0原子%以上,就能更確實提升屏蔽功能,能更確實獲得提升耐變色性的效果。若考慮製造上之安定性,則氧化皮膜20中源自氮化物的氮含量較宜為4.0原子%以上。另一方面,若氧化皮膜20中源自氮化物的氮含量大於10.0原子%,則有時屏蔽功能會降低而無法獲得提升耐變色性的效果,不過,若氧化皮膜20中源自氮化物的氮含量為10.0原子%以下,則能維持屏蔽功能且獲得更顯著提升耐變色性的效果。若考慮製造上之安定性,則氧化皮膜20中源自氮化物的氮含量較宜為8.0原子%以下。 The nitrogen content derived from nitride in the oxide film 20 (the maximum value of the nitrogen concentration) is preferably 2.0 to 10.0 atomic %. The nitrogen content derived from nitrides in the oxide film 20 refers to the maximum value of the nitrogen concentration derived from nitrides in the oxide film 20 measured by XPS. For uncolored materials, if the oxide film 20 contains 2.0 atomic % or more of nitrogen derived from nitrides, the discoloration resistance will be further improved. Although the reason for this is not necessarily clear, it is considered that the reasons are as follows: if nitride exists in the oxide film 20, the atomic arrangement will be disordered, and the strain distribution in the oxide film 20 will change; or due to changes in conductivity, changes in nanoscale potential distribution, etc. , and the function of shielding ions from penetrating into the oxide film 20 (shielding function) changes. If the nitrogen content derived from nitride in the oxide film 20 is 2.0 atomic % or more, the shielding function can be more reliably improved, and the effect of improving the discoloration resistance can be more reliably achieved. In consideration of manufacturing stability, the nitrogen content derived from nitride in the oxide film 20 is preferably 4.0 atomic % or more. On the other hand, if the nitrogen content derived from nitride in the oxide film 20 exceeds 10.0 atomic %, the shielding function may be reduced and the effect of improving discoloration resistance may not be obtained. However, if the nitrogen content derived from nitride in the oxide film 20 When the nitrogen content is 10.0 atomic % or less, the shielding function can be maintained and the discoloration resistance can be more significantly improved. In consideration of manufacturing stability, the nitrogen content derived from nitride in the oxide film 20 is preferably 8.0 atomic % or less.

此外,本案發明人等還想到透過控制氧化皮膜20中源自氮化物的氮分布來提升耐變色性。圖4是展示下列的圖:本實施形態之鈦材1(本發明例)及一般鈦材(習知例)以X射線光電子光譜法而得之深度方向元素濃度分布的一例。圖4中橫軸的濺射深度是以SiO 2之濺射速度所換算之深度。圖4之本發明例為圖2所示本實施形態之鈦材的元素濃度分布。圖4之習知例則為圖3所示一般鈦材(工業用純鈦1種)的元素濃度分布。 In addition, the inventors of the present invention also thought of improving the discoloration resistance by controlling the distribution of nitrogen derived from nitrides in the oxide film 20 . FIG. 4 is a diagram showing an example of the element concentration distribution in the depth direction obtained by X-ray photoelectron spectroscopy of the titanium material 1 of this embodiment (example of the present invention) and the general titanium material (conventional example). The sputtering depth on the horizontal axis in Figure 4 is the depth converted by the sputtering speed of SiO2 . The example of the present invention shown in FIG. 4 is the element concentration distribution of the titanium material of this embodiment shown in FIG. 2 . The conventional example shown in Figure 4 is the element concentration distribution of a general titanium material (one type of industrial pure titanium) shown in Figure 3.

如圖4所示,本實施形態之鈦材1在以SiO 2之濺射速度換算後之濺射深度為2~10nm之位置中,源自氮化物的氮濃度呈現最大值。另一方面,在一般鈦材中,氮濃度極低。據此,氧化皮膜20中源自氮化物的氮濃度達最大之深度以SiO 2之濺射速度來換算時宜為2~10nm。另外,該濺射深度之上限宜設為:包含與上述氧化皮膜20之界面附近之範圍在內的30nm以上。又,亦可因應氧化皮膜20的厚度而變更,宜設為氧化皮膜20厚度的約3倍以上。 As shown in FIG. 4 , in the titanium material 1 of this embodiment, the nitrogen concentration derived from nitride exhibits a maximum value at a position where the sputtering depth converted from the sputtering speed of SiO 2 is 2 to 10 nm. On the other hand, in general titanium materials, the nitrogen concentration is extremely low. Accordingly, the depth at which the nitrogen concentration derived from nitride reaches the maximum in the oxide film 20 is preferably 2 to 10 nm in terms of the sputtering speed of SiO 2 . In addition, the upper limit of the sputtering depth is preferably 30 nm or more including the range near the interface with the oxide film 20 . In addition, it may be changed according to the thickness of the oxide film 20, but it is preferably about three times or more the thickness of the oxide film 20.

此外,本案發明人等還調查了,上述氧化皮膜20中源自氮化物的氮濃度達最大之深度中的氮濃度對於耐變色性所帶來的影響。圖5是展示下列的圖:氧化皮膜20內之源自氮化物的氮其濃度最大值、與變色試驗前後之色差ΔE ab的關係。 In addition, the inventors of the present invention also investigated the effect of the nitrogen concentration at the depth where the nitrogen concentration derived from nitride reaches the maximum in the oxide film 20 on the discoloration resistance. FIG. 5 is a graph showing the relationship between the maximum concentration of nitrogen derived from nitrides in the oxide film 20 and the color difference ΔE * ab before and after the discoloration test.

色差ΔE ab是透過以下方法來求得。在60℃浸漬於pH3硫酸水溶液4週,並測定浸漬前後之鈦材表面的L a b ,根據JIS Z 8730:2009所求出之明度L 及色度a 、b ,再從各自之浸漬前後的差值ΔL 、Δa 、Δb 並透過下式來計算。 ΔE ab=[(ΔL ) 2+(Δa ) 2+(Δb ) 2] 1/2色差ΔE ab越小則在試驗前後之變色程度就越低,意指:耐變色性優異。 The color difference ΔE * ab is obtained by the following method. Immerse in the pH 3 sulfuric acid aqueous solution at 60°C for 4 weeks, and measure L * a * b * on the surface of the titanium material before and after immersion. The lightness L * and chromaticity a * and b * are calculated according to JIS Z 8730:2009. The difference values ΔL * , Δa * , and Δb * before and after immersion are calculated by the following formula. ΔE * ab = [(ΔL * ) 2 + (Δa * ) 2 + (Δb * ) 2 ] 1/2 color difference ΔE * ab The smaller the color difference ΔE * ab is, the lower the degree of discoloration before and after the test, which means: excellent discoloration resistance .

如圖5所示,氧化皮膜20中源自氮化物的氮濃度達最大之深度中的氮濃度若小於2.0原子%,則屏蔽性會提升不足,有時色差會大於8。另一方面,源自氮化物的氮濃度若大於10.0原子%,則屏蔽性會降低,有時色差會大於8。又,氧化皮膜20中源自氮化物的氮濃度達最大之深度中的氮濃度若大於10.0原子%,則有時會變成帶有金色或黃色之色調。變成帶有金色或黃色之色調時,由於色調會改變,故有時會不適合追求鈦本身之銀色的這類用途上。這種色彩變化推測是因為顯現出鈦之氮化物的物質顏色所致。因此,氧化皮膜20中源自氮化物的氮濃度達最大之深度中的氮濃度為2.0~10.0原子%。As shown in FIG. 5 , if the nitrogen concentration in the depth where the nitrogen concentration derived from nitride reaches the maximum in the oxide film 20 is less than 2.0 atomic %, the shielding property will not be improved enough, and the color difference may be greater than 8. On the other hand, if the nitrogen concentration derived from the nitride exceeds 10.0 atomic %, the shielding properties will decrease, and the color difference may exceed 8. In addition, if the nitrogen concentration in the depth where the nitrogen concentration derived from nitride reaches the maximum in the oxide film 20 exceeds 10.0 atomic %, it may become golden or yellow in color. When it turns into a gold or yellow hue, the color tone will change, so it may not be suitable for such applications where the silver color of titanium itself is pursued. This color change is presumably due to the material color of titanium nitride. Therefore, the nitrogen concentration at the depth where the nitrogen concentration derived from nitride reaches the maximum in the oxide film 20 is 2.0 to 10.0 atomic %.

此外,如圖5所示,氧化皮膜20中源自氮化物的氮濃度達最大之深度中的氮濃度若小於相同深度中的源自碳化物的碳濃度,則有時色差會大於8。此點亦如前所述,可認為是歸因於:對氧化皮膜20內之應變分布帶來影響、導電性變化而對奈米級電位分布帶來影響等。因此,氧化皮膜20中源自氮化物的氮濃度達最大之深度中的氮濃度宜為:氧化皮膜20中源自氮化物的氮濃度達最大之位置的源自碳化物的碳濃度以上。In addition, as shown in FIG. 5 , if the nitrogen concentration at the depth where the nitrogen concentration derived from nitride reaches the maximum in the oxide film 20 is smaller than the carbon concentration derived from carbides at the same depth, the color difference may be greater than 8. As mentioned above, this is considered to be due to the influence on the strain distribution in the oxide film 20 and the influence on the nanoscale potential distribution due to the change in conductivity. Therefore, the nitrogen concentration at the depth where the nitrogen concentration derived from nitrides reaches the maximum in the oxide film 20 is preferably greater than the carbon concentration derived from carbides at the position where the nitrogen concentration derived from nitrides reaches the maximum in the oxide film 20 .

鈦基材10及氧化皮膜20中,源自氮化物、碳化物、氧化物的N、C、O以及Ti的濃度在計算上,可使用X射線光電子光譜分析法,對鈦材表面以Ar離子濺射來執行。詳言之,分析條件定為:X射線源:mono-AlKα(hν:1486.6eV),光束直徑:200μmΦ(≒分析區域),檢測深度:數nm,獲取角度:45°,濺射條件:Ar +,濺射速率4.3nm/min.(SiO 2換算值)。所謂SiO 2換算值是如下的濺射速度:預先使用橢圓偏光計(ellipsometer)測定SiO 2膜之厚度,再使用該膜並在相同測定條件下求算後的濺射速度。 以束縛能約393~408eV之位置所示尖峰作為N1s的尖峰來進行測定,並令源自有機物的N為約399~401eV、令源自氮化物的N為約397±1eV而分離出這兩者。以束縛能約280~395eV之位置所示尖峰作為C1s的尖峰來進行測定,並令源自有機物的C為約284~289eV、令源自碳化物的C為約281.5±1eV而分離出這兩者。以束縛能約525~540eV之位置所示尖峰作為O1s的尖峰來進行測定,並令源自有機物的O為約399~401eV、令源自金屬氧化物的O為約529.5~530.5eV。以束縛能為450~470eV之位置所示尖峰作為Ti2p的尖峰來進行測定。上述物質之束縛能為一般性的數值,可能會因為測定樣品之帶電等而改變。作為帶電校正法之一,可適用下列方法:連同源自有機物的C中之C-C鍵結的尖峰位置一起進行校正的方法。 就使用這些尖峰進行解析的一般作法而言,可使用解析軟體即MultiPak並針對元素濃度、依化學狀態區分的濃度進行解析。以下記載一般的工序。基於Shirley法將背景進行校正。接著,關於化合物是使用Gauss-Lorents函數,至於金屬則使用Asymmetric函數,就各元素依化學狀態區分來對尖峰進行擬合(fitting)。然後,源自各化學狀態之尖峰的面積比率乘以元素濃度(原子%)而算出依化學狀態區分的濃度(原子%)。以此種工序來求算源自氮化物的氮含量、源自碳化物的碳含量。另外,前述元素濃度則是針對XPS所檢測出之各元素,算出包含該元素相關全部尖峰在內的(不作分離)尖峰面積,再對前述尖峰面積除以各元素之靈敏度係數而換算成百分率。 關於氧化皮膜20中源自氮化物的氮含量,至此已詳細說明完畢。 The concentrations of N, C, O, and Ti derived from nitrides, carbides, and oxides in the titanium base material 10 and the oxide film 20 can be calculated by using X-ray photoelectron spectroscopy to analyze the surface of the titanium material with Ar ions. Sputtering is performed. In detail, the analysis conditions are set as follows: X-ray source: mono-AlKα (hν: 1486.6eV), beam diameter: 200 μmΦ (≒ analysis area), detection depth: several nm, acquisition angle: 45°, sputtering conditions: Ar + , sputtering rate 4.3nm/min. (SiO 2 conversion value). The SiO 2 conversion value is the sputtering speed obtained by measuring the thickness of the SiO 2 film in advance using an ellipsometer and then calculating the sputtering speed under the same measurement conditions using the film. The peak shown at a position with a binding energy of about 393~408eV is measured as the peak of N1s, and the N derived from organic matter is set to about 399~401eV, and the N derived from nitride is set to be about 397±1eV, and the two are separated. By. The peak shown at a position with a binding energy of approximately 280~395eV is measured as the peak of C1s, and the C derived from organic matter is set to approximately 284~289eV, and the C derived from carbide is set to approximately 281.5±1eV to separate the two. By. The peak shown at a position with a binding energy of about 525 to 540 eV was measured as the peak of O1s, and O derived from organic matter was set to about 399 to 401 eV, and O derived from metal oxides was set to about 529.5 to 530.5 eV. The peak shown at the position of binding energy 450 to 470 eV was measured as the peak of Ti2p. The bound energy of the above substances is a general value and may change due to the charge of the measurement sample, etc. As one of the charge correction methods, the following method can be applied: a method of correcting together with the peak position of CC bonding in C derived from organic matter. As for the general practice of using these peaks for analysis, the analysis software MultiPak can be used to analyze the concentration of elements and the concentration according to the chemical state. General procedures are described below. The background is corrected based on Shirley's method. Next, the Gauss-Lorents function is used for compounds, and the Asymmetric function is used for metals to fit the peaks according to the chemical states of each element. Then, the area ratio of the peak originating from each chemical state is multiplied by the element concentration (atomic %) to calculate the concentration (atomic %) by chemical state. This process is used to calculate the nitrogen content derived from nitrides and the carbon content derived from carbides. In addition, the aforementioned element concentration is calculated by calculating the peak area including all peaks related to the element (without separation) for each element detected by XPS, and then dividing the aforementioned peak area by the sensitivity coefficient of each element to convert it into a percentage. The nitrogen content derived from nitride in the oxide film 20 has been described in detail.

(表層部30) 鈦材1的耐變色性會因為表層部30的平均氮濃度及平均碳濃度減少而提升。從耐變色性之觀點來看,透過上述方法之GDS從鈦材1表面朝厚度方向所測得之表層部30的平均氮濃度及平均碳濃度分別為14.0原子%以下。鈦材1之表層部30的平均氮濃度宜為12.0原子%以下,較宜為10.0原子%以下。鈦材1之表層部30的平均碳濃度宜為13.0原子%以下,較宜為12.0原子%以下,更宜為10.0原子%以下。鈦材1之表層部30的平均氮濃度可為0原子%,亦可為1.0原子%以上。鈦材1之表層部30的平均碳濃度可為0原子%,亦可為1.0原子%以上。 (Surface part 30) The discoloration resistance of the titanium material 1 will be improved as the average nitrogen concentration and the average carbon concentration of the surface layer 30 are reduced. From the viewpoint of discoloration resistance, the average nitrogen concentration and the average carbon concentration of the surface layer portion 30 measured from the surface of the titanium material 1 toward the thickness direction by GDS using the above method are 14.0 atomic % or less respectively. The average nitrogen concentration of the surface layer portion 30 of the titanium material 1 is preferably 12.0 atomic % or less, more preferably 10.0 atomic % or less. The average carbon concentration of the surface layer portion 30 of the titanium material 1 is preferably 13.0 atomic % or less, more preferably 12.0 atomic % or less, and more preferably 10.0 atomic % or less. The average nitrogen concentration of the surface layer portion 30 of the titanium material 1 may be 0 atomic % or more than 1.0 atomic %. The average carbon concentration of the surface layer 30 of the titanium material 1 may be 0 atomic % or more than 1.0 atomic %.

鈦材1的耐變色性會因為表層部30的平均氫濃度減少而更加提升。鈦材1之表層部30的氫濃度為30.0原子%以下,宜為25.0原子%以下,較宜為20.0原子%以下。鈦是一種與氫之親和性高的金屬,表層部30的氫濃度亦可為10.0原子%以上。The discoloration resistance of the titanium material 1 will be further improved due to the reduction in the average hydrogen concentration of the surface layer 30 . The hydrogen concentration of the surface layer portion 30 of the titanium material 1 is 30.0 atomic % or less, preferably 25.0 atomic % or less, more preferably 20.0 atomic % or less. Titanium is a metal with high affinity for hydrogen, and the hydrogen concentration in the surface layer 30 may be 10.0 atomic % or more.

(表層部30中的α相之Ti之c軸的晶格常數之差值) 鈦材1之表層部30中的α相之Ti的結晶結構會對耐變色性帶來影響。具體而言,鈦材1之表層部30中的α相之Ti之c軸的晶格常數若增加,則耐變色性會劣化。鈦材1之表層部30中的α相之Ti之c軸的晶格常數的增量是透過下述差值來評價:在鈦材1表面以入射角為0.3度之平行光束法進行X射線繞射測定所求出的α相之Ti之c軸的晶格常數、及在板厚中央以集中法進行X射線繞射測定所求出的α相之Ti之c軸的晶格常數,兩者之差值。從耐變色性之觀點來看,鈦材1之表層部30中的α相之Ti之c軸的晶格常數的增量為0.015Å以下,宜為0.010Å以下。鈦材1表面的α相之Ti之c軸的晶格常數的增量越小越好,亦可為0Å。該增量為負值時,原因為測定誤差,增量可視為0Å。 (Difference in lattice constants of the c-axis of Ti in the α phase in the surface layer portion 30) The crystal structure of the α-phase Ti in the surface layer portion 30 of the titanium material 1 affects the discoloration resistance. Specifically, if the lattice constant of the c-axis of the α-phase Ti in the surface layer portion 30 of the titanium material 1 increases, the discoloration resistance will deteriorate. The increment of the c-axis lattice constant of the α-phase Ti in the surface layer portion 30 of the titanium material 1 is evaluated by the following difference: The c-axis lattice constant of α-phase Ti determined by diffraction measurement, and the c-axis lattice constant of α-phase Ti determined by X-ray diffraction measurement at the center of the plate thickness. The difference between them. From the viewpoint of discoloration resistance, the increment of the c-axis lattice constant of Ti in the α phase in the surface layer portion 30 of the titanium material 1 is 0.015Å or less, preferably 0.010Å or less. The smaller the increment of the lattice constant of the c-axis of Ti in the α phase on the surface of titanium material 1, the better, and it can also be 0Å. When the increment is a negative value, the reason is measurement error, and the increment can be regarded as 0Å.

關於鈦材1之表層部30中的α相之Ti之c軸的晶格常數,可透過在鈦材表面使用了平行光束法的X射線繞射測定來求得。關於使用了平行光束法的X射線繞射測定,可使用理科(Rigaku)(股)公司製之X射線繞射裝置SmartLab,且X射線源為Co-Kα(波長λ=1.7902Å)。關於Kβ射線的除去,是在X射線入射側使用W/Si多層膜鏡(multilayer mirror)。X射線源負載功率(管電壓/管電流)分別為5.4kW(40kV/135mA)。X射線對樣品的入射角為0.3度,並掃描繞射角2θ。在測定上,透過機械加工從鈦材切出25mm(縱)×50mm(橫)之尺寸的樣品來使用。以樣品之12.5mm(縱)×25mm(橫)為中心而照射光束,在樣品表面實施測定。另外,所切出之樣品在待測定之表面可能附著有髒汙,因而以丙酮、乙醇進行洗淨。The lattice constant of the c-axis of Ti in the α phase in the surface layer portion 30 of the titanium material 1 can be obtained by X-ray diffraction measurement using the parallel beam method on the surface of the titanium material. For X-ray diffraction measurement using the parallel beam method, the X-ray diffraction device SmartLab manufactured by Rigaku Co., Ltd. can be used, and the X-ray source is Co-Kα (wavelength λ = 1.7902 Å). Regarding the removal of Kβ rays, a W/Si multilayer mirror is used on the X-ray incident side. The X-ray source load power (tube voltage/tube current) is 5.4kW (40kV/135mA) respectively. The incident angle of X-rays on the sample is 0.3 degrees, and the diffraction angle 2θ is scanned. For measurement, a sample with a size of 25 mm (length) × 50 mm (width) was cut out from the titanium material through machining and used. A beam is irradiated with the sample's 12.5mm (vertical) × 25mm (horizontal) center as the center, and the measurement is performed on the sample surface. In addition, the cut sample may have dirt attached to the surface to be measured, so clean it with acetone or ethanol.

在鈦材板厚中央的α相之Ti的結晶結構,則可透過使用了集中法的X射線繞射進行測定。用以解析鈦材板厚中央的α相之Ti的結晶結構所使用的樣品,是透過機械研磨及電解研磨進行精加工,以使鈦材板厚中央成為施行X射線繞射測定的測定面。關於使用了集中法的X射線繞射測定,使用:平行光束法之X射線繞射測定所使用的X射線繞射裝置即可;X射線源、除去Kβ射線的濾波器、及X射線源負載功率亦可與上述平行光束法的條件相同。Ti的結晶結構若是在板厚中央就都會相同,故亦可從板寬、輥軋方向等部位來製作樣品。在本案中,是從板寬的約四分之一起算由中央部來製作樣品,並實施了試驗。The crystal structure of the α-phase Ti in the center of the titanium plate thickness can be measured by X-ray diffraction using the concentration method. The sample used to analyze the crystal structure of the α-phase Ti in the center of the titanium plate thickness was finished by mechanical grinding and electrolytic polishing so that the center of the titanium plate thickness became the measurement surface for X-ray diffraction measurement. For X-ray diffraction measurement using the concentration method, it is sufficient to use: an X-ray diffraction device used for X-ray diffraction measurement using the parallel beam method; an X-ray source, a filter to remove Kβ rays, and an X-ray source load The power can also be the same as the above-mentioned parallel beam method. The crystal structure of Ti will be the same in the center of the plate thickness, so samples can also be produced from the plate width, rolling direction, etc. In this case, a sample was made from the center part starting from about a quarter of the plate width, and the test was conducted.

在鈦材表面及板厚中央的α相之Ti之c軸的晶格常數是使用Spectris(股)公司製之軟體(X'Pert HighScore Plus)從(0002)面之繞射峰來算出。即使是在鈦基材為α+β型之情況,也可從α相之Ti之繞射峰算出α相之Ti之c軸的晶格常數。The lattice constant of the c-axis of the α phase of Ti on the surface of the titanium material and in the center of the plate thickness was calculated from the diffraction peak of the (0002) plane using software (X'Pert HighScore Plus) manufactured by Spectris Co., Ltd. Even when the titanium base material is of the α+β type, the lattice constant of the c-axis of the α-phase Ti can be calculated from the diffraction peak of the α-phase Ti.

(Ra/RSm:0.006~0.015) (RΔq:0.150~0.280) 此外,本案發明人等還詳細檢討了鈦材表面性質狀態與耐變色性之關係,結果獲得下列見解:關於鈦材的耐變色性,鈦基材表面的算術平均粗糙度Ra與輪廓曲線要素的平均長度RSm之比即Ra/RSm、以及粗糙度曲線要素的均方根傾斜RΔq會對耐變色性帶來影響。 (Ra/RSm: 0.006~0.015) (RΔq: 0.150~0.280) In addition, the inventors of the present case also examined the relationship between the surface properties and the discoloration resistance of the titanium material in detail, and obtained the following insights: Regarding the discoloration resistance of the titanium material, the arithmetic mean roughness Ra of the titanium base material surface and the contour curve element The ratio of the average length RSm, that is, Ra/RSm, and the root mean square slope RΔq of the roughness curve element have an impact on the discoloration resistance.

算術平均粗糙度Ra、輪廓曲線要素的平均長度RSm、以及粗糙度曲線要素的均方根傾斜RΔq可透過依據JIS B 0601:2013之方法來測定。另外,後述之峰度Rku及偏度Rsk也可透過依據JIS B 0601:2013之方法來測定。The arithmetic mean roughness Ra, the average length RSm of the contour curve elements, and the root mean square slope RΔq of the roughness curve elements can be measured by the method in accordance with JIS B 0601:2013. In addition, the kurtosis Rku and skewness Rsk described later can also be measured by methods based on JIS B 0601:2013.

本實施形態之算術平均粗糙度Ra是JIS B 0601:2013所規定之算術平均粗糙度Ra,且是基準長度中的總座標值Zj之絕對值的平均。算術平均粗糙度Ra可透過下述式(1)來算出。 另外,作為算術平均粗糙度Ra之計算基礎的粗糙度曲線,是定為如下者:將截止波長λc=0.8mm之低通濾波器應用至氧化皮膜之測定剖面曲線而取得剖面曲線,再進一步將截止波長λs=2.667μm之高通濾波器應用至該剖面曲線,藉此所得之粗糙度曲線。又,粗糙度曲線之基準長度是定為與截止波長λc相等長度,亦即0.8mm。λc是用以定義粗糙度構成部分與波紋度構成部分之分界的濾波器。λs則是用以定義粗糙度構成部分與波長較其還短之構成部分之分界的濾波器。 The arithmetic mean roughness Ra of this embodiment is the arithmetic mean roughness Ra specified in JIS B 0601:2013, and is the average of the absolute values of the total coordinate values Zj in the reference length. The arithmetic mean roughness Ra can be calculated by the following formula (1). In addition, the roughness curve that is the basis for calculating the arithmetic mean roughness Ra is determined as follows: a low-pass filter with a cutoff wavelength λc = 0.8 mm is applied to the measured profile curve of the oxide film to obtain the profile curve, and then the profile curve is obtained A high-pass filter with a cutoff wavelength λs = 2.667 μm is applied to the profile curve to obtain a roughness curve. In addition, the reference length of the roughness curve is set to be the same length as the cut-off wavelength λc, which is 0.8mm. λc is a filter used to define the boundary between the roughness component and the waviness component. λs is a filter used to define the boundary between the roughness component and the component with a shorter wavelength.

[數學式1] [Mathematical formula 1]

上述式(1)中,n為測定點的數量,Zj是粗糙度曲線中第j個測定點的高度。In the above formula (1), n is the number of measurement points, and Zj is the height of the j-th measurement point in the roughness curve.

輪廓曲線要素的平均長度RSm可透過下述式(2)來算出。The average length RSm of the contour curve elements can be calculated by the following equation (2).

[數學式2] [Mathematical formula 2]

上述式(2)中,m為測定點的數量,Xsi為基準長度中之輪廓曲線要素的長度。In the above formula (2), m is the number of measurement points, and Xsi is the length of the contour curve element in the reference length.

粗糙度曲線要素的均方根傾斜RΔq可透過下述式(3)來算出。The root mean square slope RΔq of the roughness curve element can be calculated by the following equation (3).

[數學式3] [Mathematical formula 3]

上述式(3)中,N為測定點的數量。(dZj/dXj)是在粗糙度曲線中第j個測定點中的局部傾斜,可透過下述式(4)來定義。In the above formula (3), N is the number of measurement points. (dZj/dXj) is the local tilt at the j-th measurement point in the roughness curve, and can be defined by the following equation (4).

[數學式4] [Mathematical formula 4]

上述式(4)中,ΔX為測定間隔。在本實施形態中,測定間隔ΔX如以下方式訂定即可。亦即,測定間隔ΔX是透過表面粗糙度形狀測定機所設定之數值,量測該測定長度L時數值數據(data)若取得N點,則以測定間隔來說ΔX平均會是L/(N-1)。例如,使用東京精密製之SURFCOM 1900DX,軟體TIMS Ver.9.0.3,針對測定長度5mm進行量測時,數位數字資料若取得25601點,則ΔX會是5mm/25600點且平均約0.195μm。In the above formula (4), ΔX is the measurement interval. In this embodiment, the measurement interval ΔX may be determined as follows. That is, the measurement interval ΔX is a value set by the surface roughness shape measuring machine. If the numerical data (data) is obtained when N points are measured when measuring the measurement length L, then the average ΔX will be L/(N based on the measurement interval) -1). For example, when using Tokyo Seiko's SURFCOM 1900DX and software TIMS Ver.9.0.3 to measure a measurement length of 5mm, if 25601 points of digital data are obtained, ΔX will be 5mm/25600 points and average about 0.195μm.

粗糙度曲線要素的均方根傾斜RΔq是一規範下列傾斜角(局部傾斜dZ/dX)的參數:該傾斜角是形成表面凹凸之微小範圍相對粗糙度曲線之基準長度X的傾斜角。The root-mean-square inclination RΔq of the roughness curve element is a parameter that specifies the inclination angle (local inclination dZ/dX) of the minute range that forms the surface unevenness relative to the reference length X of the roughness curve.

本案發明人等製作了鈦材是變更了Ra/RSm及RΔq,並檢討鈦基材之Ra/RSm及RΔq對於耐變色性所帶來的影響。圖6是展示下列的圖:鈦基材之算術平均粗糙度Ra與輪廓曲線要素的平均長度RSm之比即Ra/RSm、以及粗糙度曲線要素的均方根傾斜RΔq,其等和耐變色性的關係。The inventors of this case produced titanium materials by changing Ra/RSm and RΔq, and examined the effects of Ra/RSm and RΔq of the titanium base material on the discoloration resistance. Figure 6 is a graph showing the following: the ratio of the arithmetic mean roughness Ra of the titanium base material to the average length RSm of the contour curve element, that is, Ra/RSm, and the root mean square inclination RΔq of the roughness curve element, and the discoloration resistance. relationship.

如上所述,耐變色性可透過色差ΔE ab及外觀觀察來進行評價。不過,用以評價色差ΔE ab的色調L a b 在測定上,是於鈦板正上方設置日光光源,並從該日光光源照射光。因此,有時會與實際外觀有所不同。尤其在RΔq大的鈦板中,即使色差ΔE ab小,在太陽光下的肉眼觀察中有時會看得見變色。據此,就耐變色性之評價而言,在太陽光下的肉眼觀察也很重要。 As mentioned above, discoloration resistance can be evaluated through color difference ΔE * ab and appearance observation. However, for the measurement of the hue L * a * b * used to evaluate the color difference ΔE * ab, a sunlight source is installed directly above the titanium plate and light is irradiated from the sunlight source. Therefore, the actual appearance may sometimes differ. Especially in a titanium plate with a large RΔq, even if the color difference ΔE * ab is small, discoloration may be visible when observed with the naked eye under sunlight. Accordingly, in terms of evaluation of discoloration resistance, visual observation under sunlight is also important.

圖6中的「〇」是表示如下的條件:色差ΔE ab為5以下,並且透過肉眼的感官評價中認為變色不顯眼的人之比率為80%以上;「×」則是表示如下的條件:雖然色差ΔE ab為5以下,但透過肉眼的感官評價中認為變色不顯眼的人之比率小於80%。在本案中,關於這個透過肉眼觀察的感官評價,尚未供至前述本案之促進變色試驗的鈦材、與本案之促進變色試驗後的鈦材預先併排在平板上,10位評價人員在太陽光下從各種角度邊看邊比較,判斷是否出現了可肉眼辨認出變色顯眼的角度。就認為變色不顯眼的人之比率作比較。另外,這個肉眼觀察是設想了實際建築物之屋頂、牆壁的條件,且是一種連色調因觀看角度而變化這件事都納入設想的評價方式。 "O" in Figure 6 indicates the following conditions: the color difference ΔE * ab is 5 or less, and the rate of people who believe that the discoloration is inconspicuous in sensory evaluation with the naked eye is 80% or more; "×" indicates the following conditions : Although the color difference ΔE * ab is 5 or less, the rate of people who feel that the discoloration is inconspicuous in sensory evaluation with the naked eye is less than 80%. In this case, regarding this sensory evaluation through naked eye observation, the titanium materials that have not yet been submitted to the accelerated discoloration test of this case and the titanium materials that have been subjected to the accelerated discoloration test of this case were placed side by side on a flat plate in advance, and 10 evaluators evaluated them under the sun. Look and compare from various angles to determine whether there is an angle where discoloration is noticeable to the naked eye. Compare the proportion of people who think discoloration is inconspicuous. In addition, this visual observation assumes the conditions of the roof and walls of an actual building, and is an evaluation method that also takes into account the change in color tone depending on the viewing angle.

如圖6所示瞭解到,本實施形態之鈦材就其表面而言,若算術平均粗糙度Ra與輪廓曲線要素的平均長度RSm之比即Ra/RSm為0.006~0.015,並且,粗糙度曲線要素的均方根傾斜RΔq為0.150~0.280,則即使在更高溫且酸性環境下耐變色性仍優異。這種鈦材是一種即使在高溫且酸性環境下耐變色性仍優異的鈦材,其能更進一步抑制歷經長期間的變色。As shown in Figure 6, it is understood that for the surface of the titanium material of this embodiment, if the ratio of the arithmetic mean roughness Ra to the average length RSm of the contour curve elements, that is, Ra/RSm, is 0.006 to 0.015, and the roughness curve When the root mean square slope RΔq of the element is 0.150~0.280, the discoloration resistance is excellent even in a higher temperature and acidic environment. This titanium material has excellent discoloration resistance even under high temperature and acidic environments, and can further suppress discoloration over a long period of time.

若Ra/RSm小於0.006,則鈦基材表面的凹凸是小的,該凹凸的間隔是寬的。若Ra/RSm小於0.006,則鈦材表面比較平滑,因為氧化皮膜表面所反射的光與鈦基材表面所反射的光之光程差,有時會辨識出因應此光程差而增強的光色。亦即,鈦材有時會變色。可認為,若Ra/RSm為0.006~0.015,則會因為鈦材表面之比較大的傾斜,氧化皮膜表面所反射的光與鈦基材表面所反射的光之光程差會變小,並沒有在可見光範圍內增強的光,因而抑制變色。若從該抑制變色之機制來考量,則無理由將Ra/RSm上限限定在0.015,不過,大於0.015這種又深又窄的谷狀凹凸在工業製作上是困難的。因此,Ra/RSm之上限宜為可明確獲得本發明效果的0.015。If Ra/RSm is less than 0.006, the unevenness on the surface of the titanium base material is small, and the intervals between the unevenness are wide. If Ra/RSm is less than 0.006, the surface of the titanium material is relatively smooth. Because of the optical path difference between the light reflected on the oxide film surface and the light reflected on the titanium substrate surface, sometimes the light enhanced by this optical path difference can be recognized. color. That is, titanium materials sometimes change color. It can be considered that if Ra/RSm is 0.006~0.015, the optical path difference between the light reflected by the oxide film surface and the light reflected by the titanium substrate surface will become smaller due to the relatively large tilt of the titanium surface, and there will be no Enhanced light in the visible range, thus inhibiting discoloration. Considering the mechanism of suppressing discoloration, there is no reason to limit the upper limit of Ra/RSm to 0.015. However, industrial production of deep and narrow valley-shaped unevenness exceeding 0.015 is difficult. Therefore, the upper limit of Ra/RSm is preferably 0.015, which can clearly obtain the effects of the present invention.

若RΔq為0.150以上,則氧化皮膜中較微細的凹凸的傾斜是大的,因為這種局部傾斜,照射至鈦基材表面之光的正反射會被抑制而漫射。因此,在鈦基材表面上,反射方向是在氧化皮膜表面的反射光方向上的反射光其強度會變小。結果,難以辨識出增強的光色。若RΔq小於0.150,則不會發生上述作用,故有時會看得到鈦材變色。另一方面,若RΔq大於0.280,則即使色差為5以下這般低值,在太陽光下有時會出現看得出變色顯眼的角度。可認為其原因如下:若RΔq大於0.280,則在斜視鈦材時存在變成正反射方向的傾斜,氧化皮膜厚度增加所致干涉色會增強且變得能肉眼辨識。If RΔq is 0.150 or more, the inclination of the relatively fine unevenness in the oxide film is large. Due to this local inclination, the regular reflection of the light irradiated onto the surface of the titanium base material is suppressed and diffused. Therefore, on the surface of the titanium base material, the intensity of the reflected light in the direction of the reflected light on the surface of the oxide film becomes smaller. As a result, the enhanced light color is difficult to discern. If RΔq is less than 0.150, the above effect will not occur, so discoloration of the titanium material may be seen. On the other hand, if RΔq is greater than 0.280, even if the color difference is as low as 5 or less, there may be an angle at which discoloration becomes conspicuous under sunlight. The reason is considered to be as follows: if RΔq is greater than 0.280, the titanium material is tilted in the direction of regular reflection when viewed obliquely, and the interference color due to the increase in the thickness of the oxide film is enhanced and becomes visible to the naked eye.

若Ra/RSm為0.006~0.015,並且,粗糙度曲線要素的均方根傾斜RΔq為0.150~0.280,則可獲得上述作用的疊加,故能更進一步抑制鈦材變色。此外,具有上述表面狀態的鈦材在其表面即使氧化皮膜成長至數十nm左右,仍會抑制色調變化,也就是抑制變色。據此,鈦基材宜在算術平均粗糙度Ra達最大之方向的粗糙度曲線中,算術平均粗糙度Ra與要素長度RSm的比即Ra/RSm為0.006~0.015,並且,均方根傾斜RΔq為0.150~0.280。Ra/RSm之下限較宜為0.007。又,RΔq較宜為0.190以上。若RΔq達0.190~0.0280,則促進變色試驗之色差會是6以下,可獲得更高效果。If Ra/RSm is 0.006~0.015, and the root mean square slope RΔq of the roughness curve element is 0.150~0.280, then the superposition of the above effects can be obtained, so the discoloration of the titanium material can be further suppressed. In addition, even if the oxide film on the surface of a titanium material having the above-mentioned surface state grows to a thickness of about several tens of nanometers, a change in color tone, that is, discoloration is suppressed. According to this, the titanium base material should have a roughness curve in the direction where the arithmetic mean roughness Ra reaches the maximum. The ratio of the arithmetic mean roughness Ra to the element length RSm, that is, Ra/RSm, should be 0.006~0.015, and the root mean square slope RΔq is 0.150~0.280. The lower limit of Ra/RSm is preferably 0.007. Moreover, RΔq is preferably 0.190 or more. If RΔq reaches 0.190~0.0280, the color difference of the accelerated discoloration test will be less than 6, and higher effects can be obtained.

關於算術平均粗糙度Ra及輪廓曲線要素的平均長度RSm,如上所述,Ra/RSm宜為0.006~0.015,不過,算術平均粗糙度Ra較宜為0.700~3.0μm,輪廓曲線要素的平均長度RSm較宜為60~300μm。算術平均粗糙度Ra設為0.700~3.0μm、以及輪廓曲線要素的平均長度RSm設為60~300μm,此等透過後述之製造方法在工業上能較容易實現。Regarding the arithmetic mean roughness Ra and the average length RSm of the contour curve elements, as mentioned above, Ra/RSm is preferably 0.006~0.015. However, the arithmetic mean roughness Ra is preferably 0.700~3.0 μm, and the average length RSm of the contour curve elements is preferably 0.006~0.015. Preferably it is 60~300μm. The arithmetic mean roughness Ra is set to 0.700~3.0μm, and the average length RSm of the contour curve element is set to 60~300μm, which can be easily realized industrially through the manufacturing method described below.

[峰度Rku:大於3] 峰度Rku是顯示振幅分布曲線之銳度的指標。圖7是用以說明峰度Rku的圖。另外,圖7揭示於宮下勤、「再複習一次表面粗糙度」、精密工學會誌、公益社團法人精密工學會、Vol.73,No.2、2007年、第205頁。峰度Rku是表示:透過均方根高度Rq之四次方進行了無因次化的基準長度中,Zj之四次方平均。 [Kurtosis Rku: greater than 3] Kurtosis Rku is an indicator showing the sharpness of the amplitude distribution curve. FIG. 7 is a diagram for explaining the kurtosis Rku. In addition, Figure 7 is shown in Tsutomu Miyashita, "Reviewing Surface Roughness," Journal of the Society of Precision Engineering, Society of Precision Engineering, Vol. 73, No. 2, 2007, page 205. The kurtosis Rku represents the average of the fourth power of Zj in the dimensionless reference length obtained by taking the fourth power of the root mean square height Rq.

[數學式5] [Mathematical formula 5]

Zj是粗糙度曲線中第j個測定點的高度。Rq是均方根高度,且可透過下述式(6)來表示。Zj is the height of the jth measurement point in the roughness curve. Rq is the root mean square height and can be expressed by the following equation (6).

[數學式6] [Mathematical formula 6]

峰度Rku是顯示高度分布之銳度的指標;峰度Rku為3時,如圖7所示,高度分布為常態分佈;峰度Rku小於3則隨著數值降低,表面會變得平坦;峰度Sku大於3則隨著數值增高,在鈦材表面會出現尖銳的山頂或谷底。Kurtosis Rku is an indicator that shows the sharpness of the height distribution; when the kurtosis Rku is 3, as shown in Figure 7, the height distribution is a normal distribution; if the kurtosis Rku is less than 3, the surface will become flat as the value decreases; Peak If Sku is greater than 3, as the value increases, sharp peaks or valleys will appear on the surface of the titanium material.

在算術平均粗糙度Ra達最大之方向的粗糙度曲線中,鈦基材之峰度Rku宜大於3。峰度Rku大於3時,鈦基材表面的凹凸尖銳,於凹凸尖銳的表面上,就能更進一步抑制鈦基材表面所反射的光中顯現出干涉色的正反射構成部分。結果,即使氧化皮膜厚度增加,干涉色也難以變得更加顯眼,因而能更進一步抑制鈦材之變色。In the roughness curve in the direction where the arithmetic mean roughness Ra reaches the maximum, the kurtosis Rku of the titanium base material should be greater than 3. When the kurtosis Rku is greater than 3, the unevenness on the surface of the titanium base material is sharp. On the surface with sharp unevenness, the regular reflection components that show interference colors in the light reflected by the surface of the titanium base material can be further suppressed. As a result, even if the thickness of the oxide film increases, the interference color is less likely to become more conspicuous, so the discoloration of the titanium material can be further suppressed.

[偏度Rsk:大於-0.5] 偏度Rsk又稱為歪度,是顯示表面凹凸之銳度的指標。偏度Rsk是表示:利用均方根高度Rq的三次方進行了無因次化的基準長度中之Z(x)三次方平均,且可透過下述式(7)來表示。 [Skewness Rsk: greater than -0.5] Skewness Rsk, also known as skewness, is an indicator of the sharpness of surface unevenness. The skewness Rsk represents the cubic average of Z(x) in the reference length that is dimensionless using the cube of the root mean square height Rq, and can be expressed by the following equation (7).

[數學式7] [Mathematical formula 7]

上述式(7)中,N為測定點的數量,Zj是粗糙度曲線中第j個測定點的高度。In the above formula (7), N is the number of measurement points, and Zj is the height of the j-th measurement point in the roughness curve.

在粗糙度曲線中,谷底長度大於山頂長度時,偏度Rsk就會大於0。換言之,偏度Rsk大於0時,在粗糙度曲線的平均線中,凹部之比例高。亦即,粗糙度曲線中的山頂(凸部)的頂端會又銳利又尖,且谷底(凹部)底端會變寬廣。所謂粗糙度曲線的平均線是指:顯示透過截止波長λc遮斷之長波長構成部分的曲線。 另一方面,谷底長度小於山頂長度時,偏度Rsk就會小於0。換言之,偏度Rsk小於0時,在粗糙度曲線的平均線中,凹部之比例高。亦即,粗糙度曲線中的山頂(凸部)的頂端會變寬廣,且谷底(凹部)底端會又銳利又尖。 偏度Rsk為0時,粗糙度曲線中的凹凸形狀會相對平均面呈對稱。 In the roughness curve, when the length of the valley bottom is greater than the length of the top of the mountain, the skewness Rsk will be greater than 0. In other words, when the skewness Rsk is greater than 0, the average line of the roughness curve has a high proportion of concave portions. That is, the top of the mountain top (convex part) in the roughness curve will be sharp and pointed, and the bottom of the valley (concave part) will become wider. The average line of the roughness curve refers to a curve showing the long wavelength component blocked by the transmission cutoff wavelength λc. On the other hand, when the length of the valley bottom is less than the length of the top of the mountain, the skewness Rsk will be less than 0. In other words, when the skewness Rsk is less than 0, the average line of the roughness curve has a high proportion of concave portions. That is, the top of the mountain top (convex part) in the roughness curve will become wider, and the bottom of the valley (concave part) will be sharp and pointed. When the skewness Rsk is 0, the concave and convex shapes in the roughness curve will be symmetrical relative to the average surface.

在算術平均粗糙度Ra達最大之方向的粗糙度曲線中,鈦基材之偏度Rsk宜大於-0.5。偏度Rsk大於-0.5時,粗糙度曲線中的山頂(凸部)之頂端是尖的,透過靠近光源者亦即山頂(凸部),鈦基材表面所反射之光會變得更容易散射而會更進一步抑制變色。由於具有山頂(凸部)帶來的遮蔽效果,因而會變得難以看得出變色原因即干涉色,故可推斷遠離光源者亦即谷底(凸部)是比山頂(凸部)還不易產生影響。In the roughness curve in the direction where the arithmetic mean roughness Ra reaches the maximum, the skewness Rsk of the titanium base material should be greater than -0.5. When the skewness Rsk is greater than -0.5, the top of the mountain top (convex part) in the roughness curve is pointed. Through the top of the mountain (convex part) close to the light source, the light reflected from the surface of the titanium substrate will become easier to scatter. This will further inhibit discoloration. Due to the shielding effect brought by the mountain top (convex part), it becomes difficult to see the interference color, which is the cause of the discoloration. Therefore, it can be inferred that the valley bottom (convex part) far away from the light source is less likely to occur than the mountain top (convex part). influence.

本實施形態之鈦材至此說明完畢。本實施形態之鈦材的厚度可為例如0.2mm以上,亦可為0.3mm以上。又,本實施形態之鈦材的厚度並不特別限制,可為例如5.0mm以下,亦可為3.0mm以下或2.0mm以下。This completes the description of the titanium material of this embodiment. The thickness of the titanium material in this embodiment may be, for example, 0.2 mm or more, or may be 0.3 mm or more. In addition, the thickness of the titanium material in this embodiment is not particularly limited, and may be, for example, 5.0 mm or less, 3.0 mm or less, or 2.0 mm or less.

在本實施形態之鈦材中,透過輝光放電光譜分析法從表面朝厚度方向測定氧濃度,從前述表面起算至所測得氧濃度為最大值之1/3的位置為止之範圍的平均氮濃度及平均碳濃度分別為14.0原子%以下,平均氫濃度為30.0原子%以下;在前述表面以入射角為0.3度之平行光束法進行X射線繞射測定所求出的α相之Ti之c軸的晶格常數、及在板厚中央以集中法進行X射線繞射測定所求出的α相之Ti之c軸的晶格常數,兩者之差值為0.015Å以下。藉此,本實施形態之鈦材就會比以往鈦材更能長期持續抑制變色且耐變色性優異。In the titanium material of this embodiment, the oxygen concentration is measured from the surface toward the thickness direction by the glow discharge spectrometry method, and the average nitrogen concentration in the range from the surface to the position where the measured oxygen concentration is 1/3 of the maximum value is obtained. The average carbon concentration is 14.0 atomic % or less, and the average hydrogen concentration is 30.0 atomic % or less; the c-axis of α-phase Ti is determined by X-ray diffraction measurement on the aforementioned surface using the parallel beam method with an incident angle of 0.3 degrees. The difference between the lattice constant of Ti and the c-axis lattice constant of α-phase Ti determined by X-ray diffraction measurement using the concentration method at the center of the plate thickness is 0.015Å or less. As a result, the titanium material of this embodiment can continuously suppress discoloration over a long period of time and has excellent discoloration resistance compared to conventional titanium materials.

又,在氧化皮膜中,以X射線光電子光譜法進行分析時之源自氮化物的氮濃度之最大值為2.0~10.0原子%,以SiO 2之濺射速度來換算時,前述氧化皮膜中前述源自氮化物的氮濃度顯示為最大值之位置存在於前述氧化皮膜表面起算2~10nm之範圍,前述鈦基材中與前述氧化皮膜之界面附近存在之前述源自氮化物的氮其濃度是小於前述氧化皮膜中前述源自氮化物的氮濃度之最大值且為7.0原子%以下,前述氧化皮膜中前述源自氮化物的前述氮濃度之最大值為前述氧化皮膜中前述源自氮化物之前述氮濃度達最大之位置之源自碳化物的碳濃度以上,若為如此,則即使在高溫且酸性環境下耐變色性仍優異。然後,即使在高溫且酸性環境下耐變色性仍優異的鈦材,其能更進一步抑制歷經長期間的變色。 In addition, in the oxide film, the maximum value of the nitrogen concentration derived from nitride when analyzed by X-ray photoelectron spectroscopy is 2.0 to 10.0 atomic %, and when converted by the sputtering speed of SiO2 , the aforementioned oxide film The maximum concentration of nitrogen derived from nitride exists in the range of 2 to 10 nm from the surface of the oxide film. The concentration of nitrogen derived from nitride that exists near the interface between the titanium base material and the oxide film is: is less than the maximum value of the nitrogen concentration derived from nitride in the oxide film and 7.0 atomic % or less, and the maximum value of the nitrogen concentration derived from nitride in the oxide film is the concentration of nitrogen derived from nitride in the oxide film If the nitrogen concentration reaches the maximum position above the carbon concentration derived from the carbide, the discoloration resistance will be excellent even in a high temperature and acidic environment. Furthermore, titanium materials that are excellent in discoloration resistance even under high temperatures and acidic environments can further suppress discoloration over a long period of time.

(鈦材的製造方法) 說明本實施形態之鈦材的製造方法之一例。惟,本實施形態之鈦材並不受限於以下說明之製造方法所製得者。又,外裝材等建材所使用之純鈦及鈦合金由於多半為板狀,故以下說明板狀鈦材的製造方法之一例。 (How to manufacture titanium materials) An example of the manufacturing method of the titanium material of this embodiment is demonstrated. However, the titanium material of this embodiment is not limited to the one produced by the manufacturing method described below. In addition, since pure titanium and titanium alloys used in building materials such as exterior materials are mostly in the form of plates, an example of a method of manufacturing plate-shaped titanium materials will be described below.

關於鈦材,是將素材的純鈦或鈦合金以冷輥軋進行輥軋後施予退火處理及冷卻處理來製造。Titanium materials are manufactured by cold-rolling pure titanium or titanium alloys as raw materials, and then subjecting them to annealing treatment and cooling treatment.

供於冷輥軋的鈦素材可使用已知方法所製得者。例如,將用以添加海綿鈦、合金元素的母合金等作為原料,並透過真空電弧熔煉法、電子束熔煉法或電漿熔煉法等爐膛熔煉法等之各種熔解法,製作出具有上述成分之純鈦或鈦合金的鑄錠。接著,將所得鑄錠因應所需而分塊,並進行熱鍛造而作成扁胚。之後,將扁胚進行熱輥軋而作成具有上述組成之純鈦或鈦合金的熱軋捲材。 另外,對於扁胚亦可因應所需而施予洗淨處理、切削等前處理。又,以爐膛熔煉法作成能夠熱軋之矩形時,亦可不進行熱鍛造等就供於熱輥軋。 The titanium material used for cold rolling can be produced by known methods. For example, a master alloy to which titanium sponge and alloying elements are added is used as a raw material, and various melting methods such as vacuum arc melting, electron beam melting, or furnace melting such as plasma melting are used to produce products having the above composition. Ingots of pure titanium or titanium alloys. Then, the obtained ingot is divided into pieces as required and hot forged to form flat blanks. Thereafter, the flat blank is hot-rolled to produce a hot-rolled coil of pure titanium or titanium alloy having the above composition. In addition, the flat embryos can also be subjected to pre-processing such as washing and cutting as needed. Furthermore, when a rectangular shape capable of hot rolling is formed by the furnace melting method, it can be subjected to hot rolling without hot forging or the like.

接著,將熱軋捲材供於冷輥軋。在冷輥軋中雖可使用潤滑油,但所使用之潤滑油有時會是退火處理時鈦材表面的碳濃度增高的原因。因此,宜在施予退火處理前,透過鹼性脫脂、使用毛面輥進行之輥軋即毛面輥軋、捲材磨床、或研磨等來除去鈦素材表面所存在的油性成分。另外,若在鈦素材表面塗佈潤滑油而進行冷輥軋時,則鈦素材表面會因為機械化學反應而含有碳。供於最終退火處理之冷鈦素材亦可適宜進行酸洗、退火。Next, the hot-rolled coil is subjected to cold rolling. Although lubricating oil can be used in cold rolling, the lubricating oil used may cause the carbon concentration on the surface of the titanium material to increase during annealing. Therefore, it is advisable to remove oily components present on the surface of the titanium material through alkaline degreasing, rolling using a matte roller (matte rolling), coil grinder, or grinding before annealing. In addition, when lubricating oil is applied to the surface of the titanium material and cold rolling is performed, the surface of the titanium material will contain carbon due to a mechanochemical reaction. The cold titanium material used for final annealing treatment can also be suitably pickled and annealed.

對於冷輥軋後之鈦素材或除去油性成分處理後之鈦素材,施予最終退火處理。最終退火處理一般而言是如下之步驟:將鈦素材即純鈦或鈦合金中因冷輥軋所導入應變予以降低而使該鈦素材軟化的步驟。在本實施形態之鈦材的製造中,最終退火處理及接續其後的冷卻處理此等步驟之目的在於控制:鈦材表層部的平均氮濃度及平均碳濃度、平均氫濃度、鈦材表層部中的α相之Ti之c軸的晶格常數、還有氧化皮膜厚度。可認為,透過提高最終退火處理溫度,鈦材表層部中起因於不純物的氮及碳會朝厚度方向擴散,鈦材表層部的平均氮濃度及平均碳濃度會降低。可認為,透過提高最終退火處理之真空度,會降低鈦材表層部的平均氫濃度、及鈦材表層部中的α相之Ti之c軸的晶格常數。因此,最終燒純處理是在作成真空氣體環境後之非活性氣體(氮氣除外)氣體環境中或者就直接維持在真空中進行施作。以下說明最終退火處理之加熱溫度及最終退火處理之氣體環境。在此所謂非活性氣體是指對鈦而言非活性的氣體,也就是指氬、氦、氖。A final annealing treatment is applied to the titanium material after cold rolling or the titanium material after treatment to remove oily components. Generally speaking, the final annealing treatment is a step of softening the titanium material by reducing the strain introduced by cold rolling into the titanium material, that is, pure titanium or titanium alloy. In the production of the titanium material of this embodiment, the purpose of the steps of the final annealing treatment and the subsequent cooling treatment is to control: the average nitrogen concentration and the average carbon concentration of the titanium material surface layer, the average hydrogen concentration, the titanium material surface layer part The lattice constant of the c-axis of Ti in the α phase, and the thickness of the oxide film. It is considered that by increasing the final annealing treatment temperature, nitrogen and carbon caused by impurities in the surface layer of the titanium material will diffuse in the thickness direction, and the average nitrogen concentration and average carbon concentration in the surface layer of the titanium material will decrease. It is considered that by increasing the vacuum degree of the final annealing treatment, the average hydrogen concentration in the surface layer of the titanium material and the lattice constant of the c-axis of Ti in the α phase in the surface layer of the titanium material will be reduced. Therefore, the final calcining treatment is performed in an inert gas (except nitrogen) gas environment after creating a vacuum gas environment or directly maintained in a vacuum. The heating temperature of the final annealing process and the gas environment of the final annealing process are explained below. The so-called inactive gas here refers to a gas that is inactive for titanium, that is, argon, helium, and neon.

從降低鈦材表層部的平均氮濃度及平均碳濃度之觀點來看,最終退火處理之加熱溫度(退火溫度)為630℃以上。從降低鈦材表層部的平均碳濃度之觀點來看,退火溫度宜為650℃以上。退火溫度之上限並不特別設定,不過從製造成本之觀點來看則宜為750℃以下。在此所謂退火溫度是退火處理所使用之加熱爐內的溫度,是使用設置於加熱爐之熱電偶來作測定。從降低鈦材表層部的平均氮濃度及平均碳濃度之觀點來看,退火時間宜為5小時以上。退火時間較宜為10小時以上。由於維持冷軋狀態的鈦材可以進行退火,因此退火時間亦可為3小時以上。另一方面,從生產性之觀點來看,退火時間宜為48小時以下。又,若退火時間大於10小時,則有時結晶粒徑會變得過於粗大而招致抗拉強度降低或加工導致皺紋等缺點。據此,從維持抗拉強度等之觀點來看,退火時間宜為10小時以下。另外,在此所謂退火時間是內部具有鈦材之加熱爐內的溫度維持在退火溫度的時間。From the viewpoint of reducing the average nitrogen concentration and average carbon concentration in the surface layer of the titanium material, the heating temperature (annealing temperature) of the final annealing treatment is 630°C or more. From the viewpoint of reducing the average carbon concentration in the surface layer of the titanium material, the annealing temperature is preferably 650°C or higher. The upper limit of the annealing temperature is not particularly set, but from the viewpoint of manufacturing cost, it is preferably 750°C or lower. The annealing temperature here refers to the temperature in the heating furnace used for the annealing process, and is measured using a thermocouple installed in the heating furnace. From the viewpoint of reducing the average nitrogen concentration and average carbon concentration in the surface layer of the titanium material, the annealing time is preferably 5 hours or more. The annealing time is preferably more than 10 hours. Since the titanium material maintained in the cold-rolled state can be annealed, the annealing time can also be more than 3 hours. On the other hand, from the viewpoint of productivity, the annealing time is preferably 48 hours or less. In addition, if the annealing time is longer than 10 hours, the crystal grain size may become too coarse, which may cause defects such as a decrease in tensile strength or wrinkles due to processing. Accordingly, from the viewpoint of maintaining tensile strength and the like, the annealing time is preferably 10 hours or less. In addition, the annealing time here refers to the time during which the temperature in the heating furnace containing the titanium material is maintained at the annealing temperature.

最終退火處理是在真空氣體環境、非活性氣體氣體環境(氮氣除外)、或在作成真空氣體環境後導入非氮之非活性氣體後的非活性氣體氣體環境下施行。真空氣體環境之真空度例如為1.0×10 -2Pa以下。非活性氣體氣體環境宜為惰性氣體環境,較宜為Ar氣體環境。從抑制鈦材表層部中的α相之Ti之c軸的晶格常數增大、降低鈦材表層部的平均氫濃度及平均氮濃度之觀點來看,最終退火處理中作成非活性氣體氣體環境前之真空度宜為1.0×10 -2Pa以下。從降低鈦材表層部的平均氫濃度之觀點來看,最終退火處理中作成非活性氣體氣體環境前之真空度較宜為5.0×10 -3Pa以下。又,關於非活性氣體氣體環境,例如將加熱爐內作成含有99.99體積%以上之Ar的氣體環境即可。非活性氣體環境亦可為含有99.99體積%以上之He(氦)的氣體環境。亦可在最終退火處理之開始加熱前將加熱爐內作成真空氣體環境,之後才作成非活性氣體氣體環境;亦可在開始加熱前將加熱爐內作成真空氣體環境,並在開始加熱起至開始冷卻為止之間將加熱爐內從真空氣體環境變更成非活性氣體氣體環境。 The final annealing treatment is performed in a vacuum gas environment, an inert gas environment (except nitrogen), or an inert gas environment in which an inert gas other than nitrogen is introduced after a vacuum gas environment is created. The vacuum degree of the vacuum gas environment is, for example, 1.0×10 -2 Pa or less. The inert gas environment should be an inert gas environment, and an Ar gas environment is more suitable. From the viewpoint of suppressing the increase in the lattice constant of the c-axis of the α phase Ti in the surface layer of the titanium material and reducing the average hydrogen concentration and average nitrogen concentration in the surface layer of the titanium material, an inert gas atmosphere is created during the final annealing treatment. The previous vacuum degree should be below 1.0×10 -2 Pa. From the viewpoint of reducing the average hydrogen concentration in the surface layer of the titanium material, the degree of vacuum before creating an inert gas atmosphere in the final annealing treatment is preferably 5.0×10 -3 Pa or less. Furthermore, regarding the inert gas atmosphere, for example, it is sufficient to create a gas atmosphere containing 99.99% by volume or more of Ar in the heating furnace. The inert gas environment may also be a gas environment containing more than 99.99% by volume of He (helium). It is also possible to create a vacuum gas environment in the heating furnace before starting the heating of the final annealing treatment, and then create an inert gas environment; it is also possible to create a vacuum gas environment in the heating furnace before starting the heating, and to create a vacuum gas environment from the beginning to the beginning of the heating. Before cooling, change the inside of the heating furnace from a vacuum gas environment to an inert gas environment.

在真空氣體環境中、或者在作成真空氣體環境後導入非氮之非活性氣體後的非活性氣體氣體環境(氮除外)中,以上述退火溫度與退火時間施行最終退火處理,藉此,在鈦材表面會形成氧、氮、碳、氫為低之狀態。在最終退火處理中,這般使鈦材表面成為潔淨度高的表面狀態,藉此在之後的冷卻處理時,開放於大氣、氮氣氣體環境、含氮氣10%以上的非活性氣體氣體環境,能透過此等氣體環境所含之氮而在氧化皮膜內生成預定量的氮化物。以最終退火處理進行冷卻後開放於大氣的鈦材中,即使重新在含氮之氣體環境中加熱,也無法在氧化皮膜內生成預定的氮化物。In a vacuum gas environment, or in an inert gas gas environment (excluding nitrogen) after creating a vacuum gas environment and introducing an inert gas other than nitrogen, a final annealing treatment is performed at the above-mentioned annealing temperature and annealing time, whereby the titanium is The surface of the material will form a state in which oxygen, nitrogen, carbon, and hydrogen are low. In the final annealing process, the surface of the titanium material is brought into a highly clean surface state, whereby during the subsequent cooling process, it can be exposed to the atmosphere, a nitrogen gas environment, and an inert gas environment containing more than 10% nitrogen. A predetermined amount of nitride is generated in the oxide film through the nitrogen contained in the gas environment. In titanium materials that have been cooled by final annealing and then exposed to the atmosphere, even if they are reheated in a nitrogen-containing gas environment, the intended nitride cannot be generated in the oxide film.

退火氣體環境之氮濃度為0.005體積%以下之非活性氣體。另外,在一般工業用純氣體中,不純物當中氮佔半數以下,因此,使用了上述非活性氣體的本實施形態中的退火處理,就其氣體環境而說是足夠的純度。The nitrogen concentration of the annealing gas environment is an inactive gas below 0.005% by volume. In addition, in general industrial pure gas, nitrogen accounts for less than half of the impurities. Therefore, the annealing process in this embodiment using the above-mentioned inert gas has sufficient purity in terms of the gas environment.

最終退火處理之氣體環境是維持至退火處理後的鈦材不帶有回火色之溫度以下,例如300℃以下之溫度。退火氣體環境亦可維持至冷卻到室溫,亦可在300℃以下之溫度下將加熱爐內開放於大氣等。The gas environment of the final annealing treatment is maintained below the temperature at which the annealed titanium material does not have tempering color, such as a temperature below 300°C. The annealing gas environment can also be maintained until it cools to room temperature, or the heating furnace can be opened to the atmosphere at a temperature below 300°C.

最終退火處理後,將鈦素材進行冷卻。關於冷卻氣體環境例如可為:一剛開始冷卻時,是與退火氣體環境為相同氣體環境;當加熱爐內之溫度為300℃以下時,則是由氮氣構成之氣體環境、含氮10體積%以上之氬或氦的混合氣體環境、或者大氣。After the final annealing treatment, the titanium material is cooled. For example, the cooling gas environment can be: when cooling is first started, it is the same gas environment as the annealing gas environment; when the temperature in the heating furnace is below 300°C, it is a gas environment composed of nitrogen and containing 10 volume% of nitrogen. The above mixed gas environment of argon or helium, or the atmosphere.

最終退火處理後之冷卻速度並不特別限制。不過,在開放的300℃以下時,為了使存在於氧化皮膜之源自氮化物的氮量為預定範圍,宜以後述條件進行。又,在抑制冷卻時鈦材熱收縮所致之形狀錯亂的意圖下,至開放為止(至300℃以下為止)的冷卻速度宜為50℃/分鐘以下,較宜為30℃/分鐘以下;此外,若要冷卻1噸以上之大型鈦材,則宜為1℃/分鐘。The cooling rate after the final annealing treatment is not particularly limited. However, in order to keep the amount of nitrogen derived from nitrides present in the oxide film within a predetermined range at the open temperature of 300° C. or lower, it is preferable to proceed under the following conditions. In addition, in order to suppress shape disorder caused by thermal shrinkage of the titanium material during cooling, the cooling rate until opening (until 300°C or lower) is preferably 50°C/min or less, more preferably 30°C/min or less; in addition, , if you want to cool large titanium materials of more than 1 ton, it should be 1℃/minute.

最終退火處理後之冷卻中,宜在加熱爐內溫度達300℃以下之溫度的時間點就將氮氣導入加熱爐內或是將加熱爐內開放於大氣,來將加熱爐內作成含氮10體積%以上之氮氣體環境。存在於氧化皮膜之源自氮化物的氮量除了溫度與氣體環境之外,還會隨著鈦材表面潔淨度而變化。可認為其原因在於,雖然存在於鈦素材表面之微量碳、氧、氫、氮會競爭而在鈦材表面發生反應,但氮與鈦之反應量會因為優先發生何種反應而變化,伴隨而來的就是氮化物生成量也會變化。惟,變更氣體環境時(開放時)之溫度若為300℃以下,則鈦與氮就會充分發生反應,並且生成的氮化物也不會過量。因此,透過接續退火處理後的冷卻處理,就能將存在於氧化皮膜之源自氮化物的氮濃度之最大值設為2.0~10.0原子%。另一方面,變更氣體環境時之溫度若小於200℃,則氧化皮膜之源自氮化物的氮含量就會小於2.0原子%。其原因在於,溫度若低則氮與鈦之反應就會變緩慢。上述溫度宜為250℃以上,較宜為280℃以上。During the cooling after the final annealing treatment, it is advisable to introduce nitrogen gas into the heating furnace when the temperature in the heating furnace reaches a temperature below 300°C or to open the heating furnace to the atmosphere to make the heating furnace contain 10 volumes of nitrogen. % or more nitrogen gas environment. In addition to temperature and gas environment, the amount of nitrogen derived from nitride present in the oxide film also changes with the surface cleanliness of the titanium material. It is believed that the reason is that although trace amounts of carbon, oxygen, hydrogen, and nitrogen present on the surface of the titanium material compete to react on the surface of the titanium material, the amount of reaction between nitrogen and titanium changes depending on which reaction takes place preferentially. The result is that the amount of nitride produced will also change. However, if the temperature when changing the gas environment (when opening) is 300°C or lower, titanium and nitrogen will fully react, and the nitride generated will not be excessive. Therefore, by following the cooling process after the annealing process, the maximum value of the nitrogen concentration derived from nitride existing in the oxide film can be set to 2.0 to 10.0 atomic %. On the other hand, if the temperature when changing the gas environment is less than 200°C, the nitrogen content derived from nitride in the oxide film will be less than 2.0 atomic %. The reason is that if the temperature is low, the reaction between nitrogen and titanium will become slower. The above-mentioned temperature is preferably above 250°C, more preferably above 280°C.

將加熱爐內作成氮氣體環境後,達到200℃為止的冷卻時間宜設為1.5小時以上,較宜設為2.0小時以上。將加熱爐內作成氮氣體環境後,達到200℃為止的冷卻時間設為1.5小時以上,藉此,氧化皮膜中以X射線光電子光譜法進行分析時源自氮化物的氮濃度之最大值就會是2.0~10.0原子%,並且,以SiO 2之濺射速度來換算時,前述氧化皮膜中前述源自氮化物的氮濃度顯示為最大值之位置就會存在於前述氧化皮膜表面起算2~10nm之範圍。 After creating a nitrogen gas environment in the heating furnace, the cooling time until reaching 200°C is preferably 1.5 hours or more, more preferably 2.0 hours or more. After creating a nitrogen gas environment in the heating furnace, the cooling time until reaching 200°C is set to 1.5 hours or more. This allows the maximum value of the nitrogen concentration derived from nitrides in the oxide film to be analyzed by X-ray photoelectron spectroscopy. is 2.0 to 10.0 atomic %, and when converted based on the sputtering speed of SiO 2 , the position where the nitrogen concentration derived from the nitride in the oxide film reaches the maximum value exists 2 to 10 nm from the surface of the oxide film. range.

另外,即使對於冷卻處理後之鈦材以軋縮率5%以下施予冷輥軋且該冷輥軋包含使用了毛面輥的輥軋,仍可維持住本實施形態之鈦材的特徴。In addition, even if the titanium material after the cooling treatment is cold rolled at a reduction rate of 5% or less and the cold rolling includes rolling using a matte roller, the characteristics of the titanium material of this embodiment can still be maintained.

在本實施形態之鈦材的製造方法中,宜具有研磨步驟與毛面輥軋步驟;該研磨步驟是使用研磨微粉將鈦素材表面進行研磨,且該研磨微粉具有依據JIS R 6001-2:2017之#320以下號數之粒度分布;該毛面輥軋步驟是使用表面粗糙度Ra為0.5μm以上的軋輥,以總軋縮率達0.10%以上之方式將鈦素材進行軋縮。上述研磨步驟是在上述最終退火處理前實施,而上述毛面輥軋步驟則是在上述最終退火處理後施行。透過上述研磨步驟及毛面輥軋步驟,鈦基材表面的Ra/RSm就會是0.006~0.015,並且,粗糙度曲線要素的均方根傾斜RΔq就會是0.150~0.280。以下說明上述研磨步驟及毛面輥軋步驟。In the manufacturing method of the titanium material of this embodiment, it is preferable to have a grinding step and a rough surface rolling step; the grinding step is to use grinding powder to grind the surface of the titanium material, and the grinding powder has the properties according to JIS R 6001-2:2017 The particle size distribution is below #320; the rough side rolling step is to use a roller with a surface roughness Ra of more than 0.5 μm to roll the titanium material in such a way that the total reduction rate reaches more than 0.10%. The grinding step is performed before the final annealing treatment, and the matte rolling step is performed after the final annealing treatment. Through the above grinding steps and matte rolling steps, the Ra/RSm of the titanium substrate surface will be 0.006~0.015, and the root mean square slope RΔq of the roughness curve element will be 0.150~0.280. The above-mentioned grinding step and matte rolling step will be described below.

[研磨步驟] 在本步驟中,是使用研磨微粉將鈦素材表面進行研磨,且該研磨微粉具有依據JIS R 6001-2:2017之#320以下號數之粒度分布。鈦素材表面的研磨手段並不特別限制,可使用例如刷輥、捲材磨床等已知手段。 [Grinding steps] In this step, the surface of the titanium material is ground using abrasive powder, and the abrasive powder has a particle size distribution of No. 320 or less in accordance with JIS R 6001-2:2017. The means for grinding the surface of the titanium material is not particularly limited, and known means such as brush rollers and coil grinders can be used.

例如,使用捲材磨床時,是透過以下方法將捲板狀之鈦素材表面進行研磨。透過捲線研磨機並使用#320以下,例如#320、#240、#100、#80等號數的研磨帶將鈦材進行研磨。研磨帶所使用的研磨微粉宜為#100以下號數者。為了獲得更均等的研磨表面,有時會以相同號數或變更號數而施行數次研磨。For example, when using a coil grinder, the surface of a coil-shaped titanium material is ground by the following method. Grind the titanium material through a wire grinder and use abrasive belts below #320, such as #320, #240, #100, #80, etc. The grinding powder used in the grinding belt should be #100 or below. In order to obtain a more uniform grinding surface, grinding is sometimes carried out several times with the same number or changing the number.

供於研磨步驟之鈦素材可使用已知方法所製得者。例如,將用以添加海綿鈦、合金元素的母合金等作為原料,並透過真空電弧熔煉法、電子束熔煉法或電漿熔煉法等爐膛熔煉法等之各種熔解法,製作出具有上述成分之純鈦或鈦合金的鑄錠。接著,將所得鑄錠因應所需而分塊,並進行熱鍛造而作成扁胚。之後,將扁胚進行熱輥軋而作成具有上述組成之純鈦或鈦合金的熱軋捲材。將該熱軋捲材進行冷輥軋,並對冷輥軋後之鈦素材實施研磨步驟即可。要供於研磨步驟之冷輥軋後鈦素材亦可適宜施予退火。 另外,對於扁胚亦可因應所需而施予研磨、切削等前處理。又,以爐膛熔煉法作成能夠熱軋之矩形時,亦可不進行分塊、熱鍛造等就供於熱輥軋。 冷輥軋條件亦不特別限制,以能獲得所欲厚度、特性等的條件適宜施行即可。 The titanium material used in the grinding step can be prepared by known methods. For example, a master alloy to which titanium sponge and alloying elements are added is used as a raw material, and various melting methods such as vacuum arc melting, electron beam melting, or furnace melting such as plasma melting are used to produce products having the above composition. Ingots of pure titanium or titanium alloys. Then, the obtained ingot is divided into pieces as required and hot forged to form flat blanks. Thereafter, the flat blank is hot-rolled to produce a hot-rolled coil of pure titanium or titanium alloy having the above composition. The hot-rolled coil is cold-rolled, and the cold-rolled titanium material is ground. The cold-rolled titanium material required for the grinding step can also be suitably annealed. In addition, the flat blanks can also be subjected to pre-processing such as grinding and cutting as needed. In addition, when the furnace smelting method is used to form a rectangular shape that can be hot-rolled, it can be subjected to hot rolling without segmentation, hot forging, etc. The cold rolling conditions are not particularly limited, as long as the desired thickness, characteristics, etc. can be obtained.

[毛面輥軋步驟] 在本步驟中,是使用表面的算術平均粗糙度Ra為0.5μm以上之輥軋工作輥(往後稱為軋輥),將鈦素材進行軋縮。使用上述軋輥以總軋縮率達0.10%以上之方式將鈦素材進行軋縮,藉此能在鈦素材表面賦予構成更局部傾斜的凹凸。軋輥之表面的算術平均粗糙度Ra過大時,透過研磨步驟事前所賦予之凹凸形狀有時會大幅變化,因此,軋輥之表面的算術平均粗糙度Ra宜為2.0μm以下。 軋輥之表面粗糙度可透過研磨、珠粒噴擊來調整。 [Matte side rolling step] In this step, the titanium material is rolled using a rolling work roll (hereinafter referred to as a roll) with a surface arithmetic mean roughness Ra of 0.5 μm or more. Using the above-mentioned rollers to roll the titanium material to a total reduction rate of 0.10% or more can provide the surface of the titanium material with concavities and convexes that constitute a more local slope. When the arithmetic mean roughness Ra of the surface of the roll is too large, the uneven shape provided in advance by the polishing step may change significantly. Therefore, the arithmetic mean roughness Ra of the surface of the roll is preferably 2.0 μm or less. The surface roughness of the roll can be adjusted through grinding and bead blasting.

為了賦予構成局部傾斜之凹凸,總軋縮率宜設為0.10%以上;較宜的是,從捲材整體長度的表面置入安定性來看,總軋縮率宜設為0.2%以上。另一方面,為了不使前一步驟之研磨所形成的表面粗糙度因冷軋受損而讓所需之凹凸形狀消失,宜設為1.5%以下。又,為了獲得本發明之表面特徴,該冷軋以1道次就足夠,但考量長條的捲材中盡可能讓整體長度都精加工成均等表面這點,以2道次以上的數次來實施冷軋即可。考量此點而規定總軋縮率,若為複數道次之情況,則總軋縮率是定為:從初期與完工之板厚差值所求得之軋縮率。 [實施例] In order to provide unevenness that constitutes a local slope, the total reduction rate should be set to 0.10% or more; more preferably, from the perspective of surface placement stability over the entire length of the coil, the total reduction rate should be set to 0.2% or more. On the other hand, in order to prevent the surface roughness formed by the grinding in the previous step from being damaged by cold rolling and causing the desired uneven shape to disappear, it should be set to 1.5% or less. In addition, in order to obtain the surface characteristics of the present invention, one pass of cold rolling is enough. However, considering the fact that the entire length of a long coiled material is finished to have a uniform surface as much as possible, two or more passes are required. Just implement cold rolling. Taking this point into consideration, the total reduction rate is specified. In the case of multiple passes, the total reduction rate is determined as the reduction rate obtained from the difference in plate thickness between the initial stage and the finished plate. [Example]

(實施例1) 將表1所示鈦素材冷輥軋至厚度0.4mm後,使用鹼或有機溶劑等進行脫脂,除去鈦素材表面的油性成分。在本實施例中,是使用了依據JIS H 4600:2012的JIS1種純鈦(與ASTM Gr.1相當)、JIS2種純鈦(與ASTM Gr.2相當)、JIS3種純鈦(與ASTM Gr.3相當)、JIS4種純鈦(與ASTM Gr.4相當)、JIS11種鈦合金(與ASTM Gr.11相當,Ti-0.15Pd)、JIS21種鈦合金(與ASTM Gr.13相當,Ti-0.5Ni-0.05Ru)、JIS17種鈦合金(與ASTM Gr.7相當,Ti-0.05Pd)、Ti-Ru-Mm,Ti-3Al-2.5V、Ti-5Al-1Fe、及JIS60種鈦合金(與ASTM Gr.5相當,Ti-6Al-4V)。Ti-Ru-Mm中的Mm表示稀土金屬合金。 之後,在本發明例1~23中,對於各鈦素材,以表1所示條件施行了退火處理。表1所示開放溫度是:在各退火溫度進行各退火時間的保持之後,於冷卻過程使爐內開放時的溫度。此時的溫度是使用了熱電偶所測定之爐內溫度。 在本發明例1~13、19~23及比較例1~3中,在表1之「真空度」所示真空氣體環境下開始加熱,且在至開始冷卻為止之間,將99.99體積%以上之Ar氣導入退火爐內。各鈦素材在各退火溫度之爐內僅保持各退火時間,在這之後的冷卻過程中,維持各退火氣體環境直至表1所示開放溫度,當爐內溫度降低至開放溫度之時間點使爐內開放。 在本發明例14、15中,在Ar氣體環境下開始加熱,且維持該Ar氣體環境直至使爐內開放為止。 在本發明例16~18中,在表1之「真空度」所示真空氣體環境下開始加熱,且維持該真空度直至使爐內開放為止。 在比較例4及比較例5中,將表1所示鈦素材冷輥軋至厚度0.4mm後,使用鹼或有機溶劑等進行脫脂,之後,不實施最終退火處理就施行了硝氟酸酸洗加工。 (Example 1) After the titanium material shown in Table 1 is cold-rolled to a thickness of 0.4 mm, alkali or organic solvents are used to degrease the surface of the titanium material to remove oily components. In this example, JIS type 1 pure titanium (equivalent to ASTM Gr.1), JIS type 2 pure titanium (equivalent to ASTM Gr.2), and JIS type 3 pure titanium (equivalent to ASTM Gr.2) based on JIS H 4600:2012 were used. .3 equivalent), JIS 4 types of pure titanium (equivalent to ASTM Gr.4), JIS 11 titanium alloys (equivalent to ASTM Gr.11, Ti-0.15Pd), JIS 21 titanium alloys (equivalent to ASTM Gr.13, Ti- 0.5Ni-0.05Ru), JIS17 titanium alloys (equivalent to ASTM Gr.7, Ti-0.05Pd), Ti-Ru-Mm, Ti-3Al-2.5V, Ti-5Al-1Fe, and JIS60 titanium alloys ( Equivalent to ASTM Gr.5, Ti-6Al-4V). Mm in Ti-Ru-Mm represents rare earth metal alloy. Thereafter, in Examples 1 to 23 of the present invention, each titanium material was annealed under the conditions shown in Table 1. The opening temperature shown in Table 1 is the temperature when the furnace is opened during the cooling process after each annealing temperature is maintained for each annealing time. The temperature at this time is the temperature in the furnace measured using a thermocouple. In Examples 1 to 13, 19 to 23 and Comparative Examples 1 to 3 of the present invention, heating was started in a vacuum gas environment as shown in the "vacuum degree" in Table 1, and 99.99% by volume or more was used until cooling was started. The Ar gas is introduced into the annealing furnace. Each titanium material is only kept in the furnace at each annealing temperature for each annealing time. During the subsequent cooling process, each annealing gas environment is maintained until the opening temperature shown in Table 1. When the temperature in the furnace drops to the opening temperature, the furnace is Open inside. In Examples 14 and 15 of the present invention, heating was started in an Ar gas environment, and the Ar gas environment was maintained until the furnace was opened. In Examples 16 to 18 of the present invention, heating was started in the vacuum gas environment shown in "vacuum degree" in Table 1, and the vacuum degree was maintained until the furnace was opened. In Comparative Examples 4 and 5, the titanium materials shown in Table 1 were cold rolled to a thickness of 0.4 mm, degreased using an alkali or an organic solvent, and then nitric fluoric acid pickling was performed without final annealing. processing.

[表1] [Table 1]

表層部的平均氮濃度、平均碳濃度及平均氫濃度是透過以下方法來求得。針對O、N、C、H及Ti,是以GDS進行分析。在測定上,使用了堀場製作所(股)公司製之JOBIN YVON GD-Profiler2。測定條件定為:35W之定功率模式、氬氣之壓力為600Pa、放電範圍為直徑4mm。以GDS所為之測定中,測定間距為0.5nm。 上述各元素濃度(原子%)是以上述元素合計為100原子%來計算。從鈦材表面起算朝厚度方向至GDS所測得氧濃度為最大值之1/3的位置為止的範圍定為鈦材表層部。平均氮濃度、平均碳濃度及平均氫濃度定為各測定點之氮濃度、碳濃度及氫濃度之數值的算術平均值。 The average nitrogen concentration, average carbon concentration, and average hydrogen concentration in the surface layer are determined by the following method. For O, N, C, H and Ti, GDS is used for analysis. For measurement, JOBIN YVON GD-Profiler2 manufactured by Horiba Manufacturing Co., Ltd. was used. The measurement conditions are as follows: 35W constant power mode, argon gas pressure of 600Pa, and discharge range of 4mm in diameter. In the measurement using GDS, the measurement pitch is 0.5nm. The concentration (atomic %) of each of the above elements is calculated based on the total of the above elements being 100 atomic %. The range from the surface of the titanium material in the thickness direction to the position where the oxygen concentration measured by GDS is 1/3 of the maximum value is defined as the surface layer of the titanium material. The average nitrogen concentration, average carbon concentration and average hydrogen concentration are determined as the arithmetic mean of the values of nitrogen concentration, carbon concentration and hydrogen concentration at each measurement point.

關於鈦材表面中的α相之Ti之c軸的晶格常數,是透過使用了平行光束法的X射線繞射測定來求得。關於使用了平行光束法的X射線繞射測定,可使用理科(Rigaku)(股)公司製之X射線繞射裝置SmartLab,且X射線源為Co-Kα(波長λ=1.7902Å)。關於Kβ射線的除去,是在X射線入射側使用W/Si多層膜鏡。X射線源負載功率(管電壓/管電流)分別為5.4kW(40kV/135mA)。X射線對樣品的入射角為0.3度,並掃描繞射角2θ。關於測定樣品,是透過機械加工將板厚0.4mm之鈦材切成25mm(縱)×50mm(橫),以鈦材表面的中央位置,換言之,以測定樣品表面的12.5mm(縱)×25mm(橫)之位置為中心照射光束而實施了測定。另外,所切出之樣品在待測定之表面可能附著有髒汙,因而以丙酮進行了洗淨。The lattice constant of the c-axis of Ti in the α phase on the surface of the titanium material was determined by X-ray diffraction measurement using the parallel beam method. For X-ray diffraction measurement using the parallel beam method, the X-ray diffraction device SmartLab manufactured by Rigaku Co., Ltd. can be used, and the X-ray source is Co-Kα (wavelength λ = 1.7902 Å). Regarding the removal of Kβ rays, a W/Si multilayer mirror is used on the X-ray incident side. The X-ray source load power (tube voltage/tube current) is 5.4kW (40kV/135mA) respectively. The incident angle of X-rays on the sample is 0.3 degrees, and the diffraction angle 2θ is scanned. Regarding the measurement sample, a titanium material with a thickness of 0.4mm was cut into 25mm (vertical) x 50mm (horizontal) through mechanical processing, and the center position of the surface of the titanium material was measured. In other words, 12.5mm (vertical) x 25mm on the surface of the sample was measured. The position of (horizontal) was irradiated with a beam at the center and measured. In addition, the cut out sample may have dirt attached to the surface to be measured, so it must be cleaned with acetone.

在鈦材板厚中央的α相之Ti之c軸的晶格常數,則是透過使用了集中法的X射線繞射進行測定。用以解析鈦材板厚中央的α相之Ti的結晶結構所使用的樣品,是透過機械研磨及電解研磨進行精加工,以使鈦材板厚中央成為施行X射線繞射測定的測定面。關於使用了集中法的X射線繞射測定,是使用:平行光束法之X射線繞射測定所使用的X射線繞射裝置,並且,X射線源、除去Kβ射線的濾波器、及X射線源負載功率也設為與上述平行光束法的條件相同。The lattice constant of the c-axis of the α-phase Ti in the center of the titanium plate thickness was measured by X-ray diffraction using the concentration method. The sample used to analyze the crystal structure of the α-phase Ti in the center of the titanium plate thickness was finished by mechanical grinding and electrolytic polishing so that the center of the titanium plate thickness became the measurement surface for X-ray diffraction measurement. X-ray diffraction measurement using the concentration method uses an X-ray diffraction device used in X-ray diffraction measurement using the parallel beam method, an X-ray source, a filter for removing Kβ rays, and an X-ray source. The load power is also set to the same conditions as the above-mentioned parallel beam method.

鈦材表面及板厚中央的α相之Ti之c軸的晶格常數,是從(0002)面之繞射峰來算出。 鈦材表面中的α相之Ti之c軸的晶格常數之差值,則是從鈦材表面所算出之晶格常數與板厚中央所算出之晶格常數這兩者之差值來求得。 The lattice constant of the c-axis of the α phase of Ti on the surface of the titanium material and in the center of the plate thickness is calculated from the diffraction peak of the (0002) plane. The difference in the lattice constant of the c-axis of Ti in the α phase on the surface of the titanium material is calculated from the difference between the lattice constant calculated on the surface of the titanium material and the lattice constant calculated in the center of the plate thickness. have to.

氧化皮膜厚度可藉由GDS並透過上述方法所測得氧濃度來求得。具體而言,從表面起算至氧濃度相對最大值為減半之位置為止之厚度方向距離定為氧化皮膜厚度。The thickness of the oxide film can be determined by GDS and the oxygen concentration measured by the above method. Specifically, the distance in the thickness direction from the surface to the position where the oxygen concentration is halved relative to the maximum value is defined as the oxide film thickness.

氧化皮膜所含之源自氮化物的氮含量是透過下列方法來測定。亦即,藉由以下方法測得深度方向之源自氮化物的氮濃度分布,並從該氮濃度分布,將氧化皮膜內之最大值定為氧化皮膜所含之源自氮化物的氮含量。The nitrogen content derived from nitride contained in the oxide film is measured by the following method. That is, the nitride-derived nitrogen concentration distribution in the depth direction is measured by the following method, and from the nitrogen concentration distribution, the maximum value in the oxide film is determined as the nitride-derived nitrogen content contained in the oxide film.

氧化皮膜內之源自氮化物的氮濃度及源自碳化物的碳濃度之深度方向(膜厚方向)分布,還有鈦基材中與氧化皮膜之界面附近(自該界面起算朝鈦基材側20nm)之源自氮化物的氮濃度,是透過以下方法測定。亦即,使用XPS,對鈦材表面濺射Ar離子並測定深度方向之濃度分布,分析N1s、C1s、O1s及Ti2p之各峰位置各自的元素狀態,算出源自氮化物、碳化物、氧化物的N、C、O及Ti濃度。詳細而言是透過上述工序來計算出。XPS之分析條件則如以下所述。 裝置:ULVAC-PHI製之Quantera SXM X射線源:mono-AlKα(hν:1486.6eV) 光束直徑:200μmΦ(≒分析區域) 檢測深度:數nm 獲取角度:45° 濺射條件:Ar +,濺射速率4.3nm/min.(SiO 2換算值) 所謂SiO 2換算值是如下的濺射速度:預先使用橢圓偏光計測定SiO 2膜之厚度,再使用該膜並在相同測定條件下求算後的濺射速度。 The depth direction (film thickness direction) distribution of the nitrogen concentration derived from nitrides and the carbon concentration derived from carbides in the oxide film, and in the vicinity of the interface with the oxide film in the titanium base material (from the interface toward the titanium base material The nitrogen concentration derived from the nitride (20 nm on the side) is measured by the following method. That is, using XPS, Ar ions are sputtered on the surface of the titanium material and the concentration distribution in the depth direction is measured. The element states at each peak position of N1s, C1s, O1s and Ti2p are analyzed to calculate the elements originating from nitrides, carbides and oxides. N, C, O and Ti concentrations. Specifically, it is calculated through the above-mentioned process. The XPS analysis conditions are as follows. Device : Quantera SXM made by ULVAC-PHI Rate 4.3nm/min. (SiO 2 converted value) The SiO 2 converted value is the sputtering speed calculated by measuring the thickness of the SiO 2 film in advance using an ellipsometer and then using the film under the same measurement conditions. Sputtering speed.

依據JIS B 0601:2013並透過以下條件來測定所製造之鈦材表面粗糙度之各參數(算術平均粗糙度Ra、輪廓曲線要素的平均長度RSm、粗糙度曲線要素的均方根傾斜RΔq、峰度Rku、偏度Rsk)。 裝置機器:表面粗糙度形狀測定機(東京精密(股)製之SURFCOM 1900DX,解析軟體:TiMS Ver.9.0.3) 探針:東京精密(股)製之形狀探針(型式:DT43801) 參數計算標準:JIS-01標準 測定類別:粗糙度測定 截止類別:GAUSSIAN 傾斜校正:最小平方直線校正 測定距離:5.0mm 截止波長λc:0.8mm 測定範圍:±64.0μm 測定速度:0.3mm/sec 移動/返回速度:0.6mm/sec 返回設定:通常測定 預驅動長度:(截止波長/3)×2 測定間隔Δx:0.195μm λs截止比率:300 λs截止波長:2.667μm 拾取器(pickup)類別:標準拾取器(Standard pickup) 極性:正轉 According to JIS B 0601:2013, various parameters of the surface roughness of the manufactured titanium material (arithmetic mean roughness Ra, average length of the contour curve element RSm, root mean square inclination RΔq of the roughness curve element, peak degree Rku, skewness Rsk). Equipment: Surface roughness and shape measuring machine (SURFCOM 1900DX manufactured by Tokyo Precision Co., Ltd., analysis software: TiMS Ver.9.0.3) Probe: Tokyo Precision Co., Ltd. shape probe (Type: DT43801) Parameter calculation standard: JIS-01 standard Measurement Category: Roughness Measurement Cutoff Category: GAUSSIAN Tilt Correction: Least Squares Straight Line Correction Measuring distance: 5.0mm Cutoff wavelength λc: 0.8mm Measuring range: ±64.0μm Measuring speed: 0.3mm/sec Movement/return speed: 0.6mm/sec Return to setting: normal measurement Pre-drive length: (cutoff wavelength/3)×2 Measurement interval Δx: 0.195μm λs cutoff ratio: 300 λs cutoff wavelength: 2.667μm Pickup category: Standard pickup Polarity: forward rotation

關於測定位置,是在Ra達最大之方向測定3點並求出其平均值。在此關於Ra達最大之方向,若鈦材為板時,則輥軋方向之平行方向定為0°,並在22.5°、45°、90°(輥軋方向之垂直方向)的4個方向上測定粗糙度,而確定出Ra達最大之方向。若使用軋輥來輥軋鈦素材作成鈦材時,或者,使埋有研磨粒的輥子朝輥軋方向旋轉來對板表面作研磨時,在輥軋方向之垂直方向即90°方向上,Ra會達最大。Regarding the measurement position, three points were measured in the direction where Ra reaches the maximum and the average value was calculated. Regarding the direction in which Ra reaches the maximum, if the titanium material is a plate, the direction parallel to the rolling direction is set to 0°, and the direction is 22.5°, 45°, and 90° (the direction perpendicular to the rolling direction). Measure the roughness and determine the direction in which Ra reaches the maximum. If a roller is used to roll a titanium material to make a titanium material, or if a roller embedded with abrasive grains is rotated in the rolling direction to grind the plate surface, Ra will be in the 90° direction perpendicular to the rolling direction. up to maximum.

分別將所製造之鈦材浸漬於pH3、60℃之硫酸水溶液中4週,並算出浸漬前後之色差,再根據色差之數值來實施耐變色性之評價。色差ΔE為0以上且5以下者定為耐變色性極為良好(A),大於5且在10以下者定為耐變色性良好(B),大於10者則判斷為不良(C)。另外,試驗前後之色差ΔE是透過下式來算出。 ΔE=((L*2-L*1) 2+(a*2-a*1) 2+(b*2-b*1) 2)1/2 在此,L*1、a*1、b*1是變色試驗前之色彩測定結果,L*2、a*2、b*2則為變色試驗後之色彩測定結果;其等是基於JIS Z 8729所規定之L*a*b*表色法而得者。 又,關於色差之測定,是使用KONICA MINOLTA(股)公司製之CR400並以測定面積之直徑8mm及使用D65之光源的條件來實施。 The titanium materials produced were immersed in a sulfuric acid aqueous solution of pH 3 and 60°C for 4 weeks, and the color difference before and after immersion was calculated. The discoloration resistance was evaluated based on the value of the color difference. If the color difference ΔE is 0 or more and 5 or less, the discoloration resistance is extremely good (A), if it is more than 5 and 10 or less, the discoloration resistance is good (B), and if it is more than 10, it is judged as poor (C). In addition, the color difference ΔE before and after the test is calculated by the following formula. ΔE=((L*2-L*1) 2 +(a*2-a*1) 2 +(b*2-b*1) 2 )1/2 Here, L*1, a*1, b*1 is the color measurement result before the discoloration test, L*2, a*2, and b*2 are the color measurement results after the discoloration test; they are based on the L*a*b* table specified in JIS Z 8729 Those who gain from color. In addition, the measurement of color difference was carried out using CR400 manufactured by KONICA MINOLTA Co., Ltd. under the conditions of a measurement area of 8 mm in diameter and a D65 light source.

又,對於所製造出的各鈦材,施行透過肉眼的感官評價。關於透過肉眼觀察的評價,尚未供至本案之促進變色試驗的鈦材、與本案之促進變色試驗後的鈦材預先併排在平板上,10位評價人員在太陽光下從各種角度邊看邊比較,判斷是否出現了可肉眼辨認出變色顯眼的角度。10位評價人員中的90%以上判定為變色不顯眼時,定為A+++;10位評價人員中的80%以上且小於90%判定為變色不顯眼時,定為A++;10位評價人員中的70%以上且小於80%判定為變色不顯眼時,定為A+;10位評價人員中的50%以上且小於70%判定為變色不顯眼時,定為A0;10位評價人員中的30%以上且小於50%判定為變色不顯眼時,定為B;10位評價人員中的小於30%判定為變色不顯眼時,定為C;評價為C時定為不合格。另外,這個肉眼觀察是設想了實際建築物之屋頂、牆壁的條件,且是一種連色調因觀看角度而變化這件事都納入設想的評價方式。 結果列示於表2、3。表2、3中的底線表示本發明之範圍外。 In addition, sensory evaluation with the naked eye was performed on each titanium material produced. Regarding the evaluation through naked eye observation, the titanium materials that have not yet been submitted to the accelerated discoloration test of this case and the titanium materials that have been subjected to the accelerated discoloration test of this case were placed side by side on a flat plate in advance, and 10 evaluators observed and compared them from various angles under the sun. , to determine whether there is an angle at which discoloration is visible to the naked eye. When more than 90% of the 10 evaluators judge that the discoloration is inconspicuous, it is rated as A+++; when more than 80% but less than 90% of the 10 evaluators judge that the discoloration is inconspicuous, it is rated as A++; When more than 70% and less than 80% judge that the discoloration is inconspicuous, it is rated as A+; when more than 50% and less than 70% of the 10 evaluators judge that the discoloration is inconspicuous, it is rated as A0; 30% of the 10 evaluators If it is more than 50% and less than 50% determines that the discoloration is inconspicuous, it will be graded as B; if less than 30% of the 10 evaluators determine that the discoloration is inconspicuous, it will be graded as C; if the evaluation is C, it will be graded as unqualified. In addition, this visual observation assumes the conditions of the roof and walls of an actual building, and is an evaluation method that also takes into account the change in color tone depending on the viewing angle. The results are shown in Tables 2 and 3. The bottom lines in Tables 2 and 3 indicate that they are outside the scope of the present invention.

[表2] [Table 2]

[表3] [table 3]

關於本發明例1~23,其等之表層部的平均氮濃度及平均碳濃度皆為14.0原子%以下,平均氫濃度為30.0原子%以下,鈦材表面及板厚中央之α相之Ti之c軸的晶格常數差值為0.015Å以下,其等之色差評價結果為B以上,透過肉眼的感官評價結果為B以上。 比較例1由於退火處理時之真空度低至1.0×10 -1Pa,故表層部的平均氮濃度高。結果,比較例1之鈦材的色差評價結果及透過肉眼的感官評價結果皆不合格。 比較例2的退火溫度低,表層部的平均碳濃度高。結果,比較例2之鈦材的色差評價結果及透過肉眼的感官評價結果皆不合格。 比較例3由於退火處理時之真空度低至8.0×10 -2Pa,故推測鈦材表層部的氧濃度變高、表層部中的α相之Ti之c軸的晶格常數變大、晶格常數差值變大。結果,比較例3之鈦材的色差評價結果及透過肉眼的感官評價結果皆不合格。 在比較例4、5中,表層部的平均氫濃度高,比較例3之鈦材的色差評價結果及透過肉眼的感官評價結果皆不合格。 Regarding Examples 1 to 23 of the present invention, the average nitrogen concentration and the average carbon concentration in the surface layer are both 14.0 atomic % or less, the average hydrogen concentration is 30.0 atomic % or less, and the α phase of Ti on the surface of the titanium material and in the center of the plate thickness is The difference in lattice constants along the c-axis is 0.015Å or less, the color difference evaluation result is B or above, and the sensory evaluation result through the naked eye is B or above. In Comparative Example 1, the degree of vacuum during the annealing treatment was as low as 1.0×10 -1 Pa, so the average nitrogen concentration in the surface layer was high. As a result, the titanium material of Comparative Example 1 failed to pass the color difference evaluation results and the sensory evaluation results through the naked eye. Comparative Example 2 has a low annealing temperature and a high average carbon concentration in the surface layer. As a result, the titanium material of Comparative Example 2 failed to pass the color difference evaluation results and the sensory evaluation results through the naked eye. In Comparative Example 3, since the degree of vacuum during the annealing treatment was as low as 8.0×10 -2 Pa, it is speculated that the oxygen concentration in the surface layer of the titanium material becomes higher, the lattice constant of the c-axis of the α phase Ti in the surface layer becomes larger, and the crystal structure becomes smaller. The difference in lattice constants becomes larger. As a result, the titanium material of Comparative Example 3 failed to pass the color difference evaluation results and the sensory evaluation results through the naked eye. In Comparative Examples 4 and 5, the average hydrogen concentration in the surface layer portion was high, and the titanium material of Comparative Example 3 was unsatisfactory in both the color difference evaluation results and the sensory evaluation results with the naked eye.

如以上所示,本實施形態之鈦材即使長期間處在模擬了嚴峻酸雨之pH3硫酸水溶液中,也仍具有優異的耐變色性。本發明在屋頂或牆板這類屋外環境中的用途上特別有效,可謂其產業上價值極高。As shown above, the titanium material of this embodiment has excellent discoloration resistance even if it is exposed to a pH 3 sulfuric acid aqueous solution that simulates severe acid rain for a long period of time. The present invention is particularly effective for use in outdoor environments such as roofs and wall panels, and its industrial value is extremely high.

(實施例2) 將表4所示鈦素材冷輥軋至厚度0.4mm後,使用鹼或有機溶劑等進行脫脂,除去鈦素材表面的油性成分。之後,對於各鈦素材,以表4所示條件施行了退火處理。表4所示開放溫度是:在各退火溫度進行各退火時間的保持之後,於冷卻過程使爐內開放時的溫度。此時的溫度是使用了熱電偶所測定之爐內溫度。 (Example 2) After the titanium material shown in Table 4 is cold-rolled to a thickness of 0.4 mm, alkali or organic solvents are used to degrease the surface of the titanium material to remove oily components. After that, each titanium material was annealed under the conditions shown in Table 4. The opening temperature shown in Table 4 is the temperature when the furnace is opened during the cooling process after each annealing temperature is maintained for each annealing time. The temperature at this time is the temperature in the furnace measured using a thermocouple.

[表4] [Table 4]

對於所製造出的各鈦材,施行與實施例1相同的評價。結果列示於表5、6。The same evaluation as in Example 1 was performed on each titanium material produced. The results are shown in Tables 5 and 6.

[表5] [table 5]

[表6] [Table 6]

如表5、6所示,關於本發明例24~39,其等之氧化皮膜中以X射線光電子光譜法進行分析時源自氮化物的氮濃度之最大值為2.0~10.0原子%,且以SiO 2之濺射速度來換算時,氧化皮膜中源自氮化物的氮濃度顯示為最大值之位置存在於前述氧化皮膜表面起算2~10nm之範圍,鈦基材中與氧化皮膜之界面附近存在的源自氮化物的氮濃度是小於氧化皮膜中源自氮化物的氮濃度之最大值且為7原子%以下,氧化皮膜中源自氮化物的氮濃度之最大值為氧化皮膜中源自氮化物的氮濃度達最大之位置之源自碳化物的碳濃度以上。其等的色差評價結果為A,此外,透過肉眼的感官評價結果也皆為A++,耐變色性優異。 As shown in Tables 5 and 6, regarding Examples 24 to 39 of the present invention, the maximum value of the nitrogen concentration derived from nitrides in the oxide films analyzed by X-ray photoelectron spectroscopy was 2.0 to 10.0 atomic %, and When converted to the sputtering speed of SiO 2 , the maximum value of the nitrogen concentration derived from nitride in the oxide film exists in the range of 2 to 10 nm from the surface of the oxide film, and exists near the interface with the oxide film in the titanium base material. The nitrogen concentration derived from nitride is less than the maximum value of the nitrogen concentration derived from nitride in the oxide film and is 7 atomic % or less, and the maximum value of the nitrogen concentration derived from nitride in the oxide film is the nitrogen derived from the oxide film The nitrogen concentration of the compound reaches the maximum position above the carbon concentration of the carbide. The color difference evaluation results were A, and the sensory evaluation results with the naked eye were all A++, indicating excellent discoloration resistance.

(實施例3) 將表7所示鈦素材冷輥軋至厚度0.4mm後,以表7及表8所示條件依序施行研磨步驟、洗淨、退火處理、及毛面輥軋步驟。表7所示「研磨道次數」是表示:鈦素材在捲材磨床之產線的過板次數,所述捲材磨床之產線是由3台配置有研磨帶之研磨軋台所構成。 在本發明例40~72中,對於各鈦素材,以表8所示條件最終施行了退火處理。表8所示開放溫度是:在各退火溫度進行各退火時間的保持之後,於冷卻過程使爐內開放時的溫度。此時的溫度是使用了熱電偶所測定之爐內溫度。 在本發明例40~61、63~72中,是在表8之「真空度」所示真空氣體環境下開始加熱,且在至開始冷卻為止之間,將99.99體積%以上之Ar氣導入退火爐內。各鈦素材在各退火溫度之爐內僅保持各退火時間,在這之後的冷卻過程中,維持各退火氣體環境直至表8所示開放溫度,當爐內溫度降低至開放溫度之時間點使爐內開放。 在本發明例62中,在表8之「真空度」所示真空氣體環境下開始加熱,且維持該真空度直至使爐內開放為止。 在比較例6中,將鈦素材冷輥軋至厚度0.4mm後,使用鹼或有機溶劑等進行脫脂,之後,不實施最終退火處理就施行了硝氟酸酸洗加工。 (Example 3) After the titanium material shown in Table 7 is cold rolled to a thickness of 0.4 mm, the grinding step, washing, annealing treatment, and matte side rolling steps are performed in sequence under the conditions shown in Table 7 and Table 8. The "number of grinding passes" shown in Table 7 represents the number of times the titanium material passes through the production line of the coil grinder. The production line of the coil grinder is composed of three grinding and rolling tables equipped with grinding belts. In Examples 40 to 72 of the present invention, each titanium material was finally annealed under the conditions shown in Table 8. The opening temperature shown in Table 8 is the temperature when the furnace is opened during the cooling process after each annealing temperature is maintained for each annealing time. The temperature at this time is the temperature in the furnace measured using a thermocouple. In Examples 40 to 61 and 63 to 72 of the present invention, heating was started in a vacuum gas environment as shown in the "vacuum degree" in Table 8, and 99.99% by volume or more of Ar gas was introduced and retreated until cooling was started. Inside the stove. Each titanium material is only kept in the furnace at each annealing temperature for each annealing time. During the subsequent cooling process, each annealing gas environment is maintained until the opening temperature shown in Table 8. When the temperature in the furnace drops to the opening temperature, the furnace is Open inside. In Example 62 of the present invention, heating was started in the vacuum gas environment shown in "vacuum degree" in Table 8, and the vacuum degree was maintained until the furnace was opened. In Comparative Example 6, the titanium material was cold rolled to a thickness of 0.4 mm, degreased using an alkali or an organic solvent, and then nitric fluoric acid pickling was performed without final annealing.

[表7] [Table 7]

[表8] [Table 8]

對於所製造出的各鈦材,施行了與實施例1相同之評價。結果列示於表9、10。表9中的底線表示本發明之範圍外。The same evaluation as in Example 1 was performed on each titanium material produced. The results are shown in Tables 9 and 10. The bottom line in Table 9 indicates outside the scope of the present invention.

[表9] [Table 9]

[表10] [Table 10]

如表7~10所示,若控制熱處理溫度、時間及熱處理氣體環境,還有控制冷卻氣體環境,則可達成:在算術平均粗糙度Ra達最大之方向的粗糙度曲線中,算術平均粗糙度Ra與要素長度RSm的比即Ra/RSm為0.006~0.015,並且,均方根傾斜RΔq為0.150~0.280,鈦基材之峰度Rku大於3,鈦基材之偏度Rsk大於-0.5,且評價結果更加優異。尤其是本發明例59~61,其等之表層部的平均氮濃度及平均碳濃度皆為14.0原子%以下,平均氫濃度為30.0原子%以下,鈦材表面及板厚中央之α相之Ti之c軸的晶格常數差值為0.015Å以下,氧化皮膜中以X射線光電子光譜法進行分析時源自氮化物的氮濃度之最大值為2.0~10.0原子%,且以SiO 2之濺射速度來換算時,氧化皮膜中源自氮化物的氮濃度顯示為最大值之位置存在於前述氧化皮膜表面起算2~10nm之範圍,鈦基材中與氧化皮膜之界面附近存在之源自氮化物的氮濃度是小於氧化皮膜中源自氮化物的氮濃度之最大值且為7原子%以下,氧化皮膜中源自氮化物的氮濃度之最大值為氧化皮膜中源自氮化物的氮濃度達最大之位置之源自碳化物的碳濃度以上。結果,其等之色差評價結果為A,透過肉眼的感官評價結果為A+++,耐變色性極為優異。 As shown in Tables 7 to 10, if the heat treatment temperature, time and heat treatment gas environment are controlled, as well as the cooling gas environment, it can be achieved that: in the roughness curve in the direction where the arithmetic mean roughness Ra reaches the maximum, the arithmetic mean roughness The ratio of Ra to the element length RSm, that is, Ra/RSm, is 0.006~0.015, and the root mean square slope RΔq is 0.150~0.280. The kurtosis Rku of the titanium base material is greater than 3, and the skewness Rsk of the titanium base material is greater than -0.5, and The evaluation results are even better. Especially in Examples 59 to 61 of the present invention, the average nitrogen concentration and the average carbon concentration in the surface layer are both 14.0 atomic % or less, the average hydrogen concentration is 30.0 atomic % or less, and the α-phase Ti on the surface of the titanium material and in the center of the plate thickness The lattice constant difference of the c-axis is less than 0.015Å, the maximum nitrogen concentration derived from nitride in the oxide film is 2.0~10.0 atomic % when analyzed by X-ray photoelectron spectroscopy, and the sputtering of SiO 2 When converted in terms of speed, the maximum concentration of nitrogen derived from nitrides in the oxide film exists in the range of 2 to 10 nm from the surface of the oxide film, and the nitride derived concentration exists near the interface with the oxide film in the titanium base material. The nitrogen concentration is less than the maximum value of the nitrogen concentration derived from nitrides in the oxide film and is 7 atomic % or less. The maximum value of the nitrogen concentration derived from nitrides in the oxide film is the maximum value of the nitrogen concentration derived from nitrides in the oxide film. The maximum position is above the carbon concentration derived from carbide. As a result, the color difference evaluation result was A, the sensory evaluation result through the naked eye was A+++, and the discoloration resistance was extremely excellent.

1:鈦材 10:鈦基材 20:氧化皮膜 30:表層部 1:Titanium material 10:Titanium base material 20: Oxide film 30: Surface part

圖1是一示意性的擴大剖面圖,其展示本發明一實施形態之鈦材之層結構。 圖2是展示下列的圖:同實施形態之鈦材以X射線光電子光譜法而得之能譜(spectrum)之深度方向變化的一例。 圖3是展示下列的圖:一般鈦材以X射線光電子光譜法而得之能譜之深度方向變化的一例。 圖4是展示下列的圖:同實施形態之鈦材及一般鈦材以X射線光電子光譜法而得之深度方向元素濃度分布的一例。 圖5是展示下列的圖:氧化皮膜內的鈦之源自氮化物的氮其濃度最大值、與變色試驗前後之色差ΔE ab的關係。 圖6是展示下列的圖:算術平均粗糙度Ra與輪廓曲線要素的平均長度(mean width of the profile elements)RSm之比即Ra/RSm、以及粗糙度曲線要素的均方根傾斜RΔq,其等和耐變色性的關係。 圖7是一示意圖,用以說明峰度Rku。 FIG. 1 is a schematic enlarged cross-sectional view showing the layer structure of a titanium material according to an embodiment of the present invention. FIG. 2 is a diagram showing an example of the change in the depth direction of the energy spectrum (spectrum) obtained by X-ray photoelectron spectroscopy of the titanium material of the same embodiment. Figure 3 is a diagram showing the following: an example of the depth direction change of the energy spectrum of a general titanium material obtained by X-ray photoelectron spectroscopy. FIG. 4 is a diagram showing an example of the element concentration distribution in the depth direction obtained by X-ray photoelectron spectroscopy for titanium materials of the same embodiment and general titanium materials. Figure 5 is a graph showing the relationship between the maximum concentration of nitride-derived nitrogen in titanium in the oxide film and the color difference ΔE * ab before and after the discoloration test. 6 is a diagram showing the following: the ratio of the arithmetic mean roughness Ra to the mean length (mean width of the profile elements) RSm, that is, Ra/RSm, and the root mean square slope RΔq of the roughness curve element, etc. and discoloration resistance. Figure 7 is a schematic diagram illustrating kurtosis Rku.

1:鈦材 1:Titanium material

10:鈦基材 10:Titanium base material

20:氧化皮膜 20: Oxide film

30:表層部 30: Surface part

Claims (5)

一種鈦材,其透過輝光放電光譜分析法從表面朝厚度方向測定氧濃度,從前述表面起算至所測得氧濃度為最大值之1/3的位置為止之範圍的平均氮濃度及平均碳濃度分別為14.0原子%以下,平均氫濃度為30.0原子%以下; 在前述表面以入射角為0.3度之平行光束法進行X射線繞射測定所求出的α相之Ti之c軸的晶格常數、及在板厚中央以集中法進行X射線繞射測定所求出的α相之Ti之c軸的晶格常數,兩者之差值為0.015Å以下。 A titanium material in which the oxygen concentration is measured from the surface toward the thickness direction by glow discharge spectroscopy, and the average nitrogen concentration and the average carbon concentration are measured from the surface to the position where the measured oxygen concentration is 1/3 of the maximum value. respectively below 14.0 atomic %, and the average hydrogen concentration is below 30.0 atomic %; The lattice constant of the c-axis of Ti in the α phase was determined by X-ray diffraction measurement using the parallel beam method with an incident angle of 0.3 degrees on the aforementioned surface, and X-ray diffraction measurement using the concentration method at the center of the plate thickness. The calculated lattice constant of the c-axis of Ti in the α phase is found to be less than 0.015Å. 如請求項1的鈦材,其具備:厚度為30.0nm以下的氧化皮膜。For example, the titanium material of claim 1 has: an oxide film with a thickness of 30.0 nm or less. 如請求項1或2的鈦材,其具有: 鈦基材、及 配置於前述鈦基材表面的氧化皮膜; 以X射線光電子光譜法進行分析時, 前述氧化皮膜中源自氮化物的氮濃度之最大值為2.0~10.0原子%, 以SiO 2之濺射速度來換算時,前述氧化皮膜中,前述源自氮化物的氮濃度顯示為最大值之位置存在於前述氧化皮膜表面起算2~10nm之範圍, 氧濃度達最大值之1/2的位置起算至鈦基材側20nm之範圍,於該範圍中存在的前述源自氮化物的氮濃度是小於前述氧化皮膜中前述源自氮化物的氮濃度之最大值且為7原子%以下, 前述氧化皮膜中前述源自氮化物的前述氮濃度之最大值為前述氧化皮膜中前述源自氮化物之前述氮濃度達最大之位置之源自碳化物的碳濃度以上。 The titanium material of claim 1 or 2, which has: a titanium base material, and an oxide film disposed on the surface of the titanium base material; when analyzed by X-ray photoelectron spectroscopy, the nitrogen concentration derived from nitride in the aforementioned oxide film is The maximum value is 2.0 to 10.0 atomic %. When converted based on the sputtering speed of SiO 2 , the position where the nitrogen concentration derived from the nitride shows the maximum value in the oxide film exists 2 to 10 nm from the surface of the oxide film. The range is the range from the position where the oxygen concentration reaches 1/2 of the maximum value to the range of 20 nm from the titanium substrate side. The concentration of nitrogen derived from nitride existing in this range is smaller than the concentration of nitrogen derived from nitride in the aforementioned oxide film. The maximum value of the nitrogen concentration is 7 atomic % or less, and the maximum value of the nitrogen concentration derived from nitrides in the oxide film is derived from carbonization at the position in the oxide film where the nitrogen concentration derived from nitrides reaches the maximum. above the carbon concentration of the substance. 如請求項1或2的鈦材,其具備鈦基材,前述鈦基材在算術平均粗糙度Ra達最大之方向的粗糙度曲線中,算術平均粗糙度Ra與要素長度RSm的比即Ra/RSm為0.006~0.015,並且,均方根傾斜RΔq為0.150~0.280; 前述鈦基材之峰度Rku大於3, 前述鈦基材之偏度Rsk大於-0.5。 For example, the titanium material of claim 1 or 2 has a titanium base material. In the roughness curve of the titanium base material in the direction where the arithmetic mean roughness Ra reaches the maximum, the ratio of the arithmetic mean roughness Ra to the element length RSm is Ra/ RSm is 0.006~0.015, and the root mean square tilt RΔq is 0.150~0.280; The kurtosis Rku of the aforementioned titanium substrate is greater than 3, The skewness Rsk of the aforementioned titanium base material is greater than -0.5. 如請求項3的鈦材,其中前述鈦基材在算術平均粗糙度Ra達最大之方向的粗糙度曲線中,算術平均粗糙度Ra與要素長度RSm的比即Ra/RSm為0.006~0.015,並且,均方根傾斜RΔq為0.150~0.280; 前述鈦基材之峰度Rku大於3, 前述鈦基材之偏度Rsk大於-0.5。 Such as the titanium material of claim 3, wherein in the roughness curve of the direction in which the arithmetic mean roughness Ra reaches the maximum of the titanium base material, the ratio of the arithmetic mean roughness Ra to the element length RSm, that is, Ra/RSm, is 0.006~0.015, and , the root mean square tilt RΔq is 0.150~0.280; The kurtosis Rku of the aforementioned titanium substrate is greater than 3, The skewness Rsk of the aforementioned titanium base material is greater than -0.5.
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