TW202339101A - Wafer stage - Google Patents

Abstract

This disclosure is directed to a wafer stage having a clamp, a rotating mechanism and an actuating mechanism. The clamp has a seat and claw-groups annularly disposed on the seat. Each claw-group has claws. Each claw has a rotating shaft pivoted to the seat and a claw portion eccentrical relative to rotating shaft. The rotating mechanism is connected the seat for rotating the clamp. The actuating mechanism has an actuator, a driven member, actuating nuts on the driven member corresponding to the claw-groups, and actuating screws corresponding to the claw-groups. The claws of each claw-group are linked with each other. Each actuating screw is screwed with the corresponding actuating nut. Each actuating screw is coaxially connected to one of the corresponding rotation shafts. The actuator can move the driven member to linearly shift the actuating nuts, thereby rotating the actuating screws so as to rotate the claws.

Description

Wafer stage

The present invention relates to wafer processing equipment, in particular to a wafer stage suitable for holding wafers of various sizes.

Existing wafer processing equipment generally has a fixture for clamping the wafer, and during the wafer surface spraying process, the fixture rotates the wafer to allow the process solution or cleaning solution to evenly distribute on the wafer surface. Since the clamp is a rotatable moving part, it is difficult to install gas and liquid pipelines or other mechanical components on it. Therefore, it is generally difficult to design a complex movable mechanism on the clamp, and it is usually only suitable for clamping wafers of a single size. In order to allow the process equipment to quickly change the size of the working wafer, a common practice is to configure multiple fixtures of different sizes. Therefore, the equipment is bulky, the construction cost is high, and the multiple fixtures are difficult to position relative to each other.

In view of this, the inventor has devoted himself to research on the above-mentioned existing technology and cooperated with the application of academic theory to try his best to solve the above-mentioned problems, which has become the goal of the inventor's improvement.

The invention provides a wafer carrier suitable for clamping wafers of various sizes.

The invention provides a wafer stage, which includes a clamp, a rotating mechanism and an actuating mechanism. The clamp includes a base body and a plurality of clamping jaw groups arranged in a ring around the base body. Each clamping jaw group includes a plurality of clamping jaws. Each clamping jaw of the clamp has a rotation axis pivoted to the base body and an eccentrically arranged axis relative to the rotation axis. One claw. The rotating mechanism is connected to the base body to rotate the clamp. The actuation mechanism includes an actuator, a passive part, a plurality of actuation nuts provided on the passive part corresponding to each jaw group, and a plurality of actuation screw rods corresponding to each jaw group. The clamping jaws of each clamping jaw group are interconnected with each other through a connecting rod assembly. Each actuation screw is screwed to the corresponding actuation nut, and each actuation screw is coaxially connected to one of the clamping jaws of the corresponding clamping jaw group. The rotation axis, the actuator corresponding to the passive part is separated and configured to push the passive part along the axial direction of the actuation screw to linearly displace each actuation nut. When each actuation nut linearly displaces, it drives the corresponding actuation screw to rotate and drive each clamp. The claw spins.

In the wafer carrier of the present invention, the clamping jaws of each clamping jaw group at least include a first clamping jaw and a second clamping jaw. The first clamping jaw of the clamping tool is arranged in a ring, and the second clamping jaw of the clamping tool is arranged in an array with the second clamping jaw. One clamping jaw is arranged in a concentric ring.

In the wafer carrier of the present invention, the clamping jaws of each clamping jaw group include at least a first clamping jaw and a second clamping jaw. The first clamping jaws of the clamping jaws are of the same length, and the second clamping jaws of the clamping jaws are of the same length. Each second clamping jaw is longer than each first clamping jaw, the first clamping jaws of the clamp are arranged in a ring, and the second clamping jaws of the clamp are arranged concentrically around the first clamping jaw.

In the wafer carrier of the present invention, the clamping claws are erected on the base body and arranged parallel to each other.

In the wafer carrier of the present invention, each clamping jaw includes a cylinder erected on the base body, and the claw portion of the clamping jaw is arranged on an end surface of the end of the cylinder. The side of the claw is provided with a groove adjacent to the end surface.

In the wafer carrier of the present invention, the passive component is a ring body, and the actuating nut is arranged in a ring on the ring body.

The actuator of the wafer carrier of the present invention is a pneumatic cylinder or an electric cylinder.

In the wafer carrier of the present invention, an elastic member is connected between the base and the passive member. When the actuator releases the passive member, the elastic member returns the base and the passive member to their initial relative positions. The elastic member drives each clamping claw to rotate so that each claw portion moves relatively toward the rotation center axis of the clamp.

In the wafer stage of the present invention, the actuating mechanism drives each clamping claw to rotate so that each claw part moves away from the rotation center axis of the clamp.

Referring to FIGS. 1 to 3 , a preferred embodiment of the present invention provides a wafer stage, which includes a clamp 100 , a rotating mechanism 200 and an actuating mechanism 300 . The clamp 100 is used to clamp a wafer 10 , the rotation mechanism 200 is used to rotate the clamp 100 to rotate the wafer 10 , and the actuating mechanism 300 is used to actuate the clamp 100 to open to release the wafer 10 .

In this embodiment, the clamp 100 at least includes a base 110 and a plurality of clamping jaw groups 120 arranged on the base 110, and the clamping jaw groups 120 are arranged in a ring. Each jaw group 120 includes a plurality of jaws, and each jaw of the clamp 100 has a rotation axis 121a/122a pivotally connected to the base body 110 and a claw portion 121b eccentrically arranged relative to the rotation axis 121a/122a. /122b. In this embodiment, the clamping jaws are erected on the base 110 and arranged parallel to each other. Specifically, each clamping jaw includes a cylinder 121e/122e erected on the base 110. One end of the cylinder 121e/122e extends from the aforementioned rotation axis 121a/122a to pivot the base 110. The cylinder 121e The other end of /122e has an end surface 121c/122c, and the claw portion 121b/122b of the clamping jaw is arranged on this end surface 121c/122c.

In this embodiment, the aforementioned jaw groups 120 are arranged in a ring shape relative to the rotation center axis 101 of the clamp 100 . The clamping jaws of each clamping jaw group 120 at least include a first clamping jaw 121 and a second clamping jaw 122. The first clamping jaws 121 of the clamp 100 are arranged in a ring and the second clamping jaws 122 of the clamp 100 are arranged in a ring. The clamping jaws 122 are arranged in another ring concentric with the first clamping jaws 121 . Specifically, in the aforementioned clamp 100, the first clamping jaws 121 are of the same length, the second clamping jaws 122 are of the same length, and each second clamping jaw 122 is longer than each of the first clamping jaws 121. The second clamping jaws 122 The first clamping jaws 121 are concentrically surrounded. The first clamping jaws 121 and the second clamping jaws 122 are respectively used to clamp wafers 10 of two different diameters.

As shown in Figure 7, in this embodiment, a groove 121d/122d is provided on the side of the claw portion 121b/122b adjacent to the end surface 121c/122c. When the clamping claw clamps the wafer 10, the edge of the wafer 10 It is stuck into the groove 121d/122d and the end surface 121c/122c of the pillar 121e/122e is supported on the bottom surface of the wafer 10, whereby the clamp 100 clamps the wafer 10. As shown in Figures 4 and 5, when each clamping jaw rotates with its rotation axis 121a/122a, the claw portion 121b/122b arranged eccentrically with respect to the rotation axis 121a/122a revolves around the rotation axis 121a/122a. Therefore, the distance between the claw portions 121b/122b relative to the center of the annular arrangement of the clamping claws can be changed to open and close the clamp 100. Specifically, when using the first clamping jaws 121 , each first clamping jaw 121 is first rotated to move the claw portion 121 b of each third clamping jaw away from the center of the ring of the first clamping jaw 121 to accommodate wafers with corresponding diameters. 10 is placed between the first clamping jaws 121 , and the end surface 121 c of the cylinder 121 e of each first clamping jaw 121 is supported on the bottom surface of the wafer 10 . Next, as shown in FIGS. 7 and 8 , each first clamping jaw 121 is reversed so that the claw portion 121 b of each clamping jaw approaches the center of the ring of the first clamping jaw 121 so that the edge of the wafer 10 is inserted into each claw portion 121 b The wafer 10 is clamped and fixed in the groove 121d. The second clamping jaw 122 holds in the same manner as the first clamping jaw 121 .

As shown in Figures 7 and 9, the rotating mechanism 200 at least includes a rotating motor 210 connected to the base 110, and the rotating motor 210 can drive the base 110 of the clamp 100 to rotate, thereby driving the clamping jaws and their clamping The wafer rotates 10 times.

The actuation mechanism 300 at least includes an actuator 311 , a passive component 312 , a plurality of actuation nuts 321 corresponding to each jaw group 120 , and a plurality of actuation screw rods 322 corresponding to each jaw group 120 . In this embodiment, the actuator 311 may be in the form of a pneumatic cylinder or an electric cylinder (linear actuator), but the invention is not limited thereto. The actuator 311 may be other machinery capable of bidirectional linear actuating or bidirectional swinging. Component, the actuator 311 can touch or release the passive component 312 when activated. The actuation nut 321 is provided on the passive member 312. Specifically, the passive member 312 is an annular body, so the actuation nuts 321 can be annularly arranged on the annular body corresponding to the annularly arranged clamp jaw groups 120. The outer wall of each actuation nut 321 is provided with a flange 324. The outer wall of each actuation nut 321 is provided with external threads, and a fastening nut 323 is screwed to the outer wall through the external threads. Each actuation nut 321 is inserted through the passive component 312 , and is fixed to the passive component 312 by clamping the passive component 312 through the flange 324 and the fastening nut 323 . Each actuation screw rod 322 is screwed to the corresponding actuation nut 321 respectively, and each actuation screw rod 322 is coaxially connected to one of the clamping jaws of the corresponding clamping jaw set 120. The actuation screw rod 322 is preferably connected to this clamping jaw. Rotation axis 121a. The actuation screw 322 and its corresponding threaded actuation nut 321 can convert the rotation of the actuation screw 322 and the linear displacement of the actuation nut 321 .

As shown in FIGS. 6 and 7 , the actuator 311 is configured corresponding to the passive member 322 and is separated from the passive member 322 without interlocking. As shown in FIGS. 2 and 4 , the actuator 311 can move along the actuation screw 322 when actuating. The driven member 312 is pushed axially, thereby causing each actuation nut 321 to move linearly along the axial direction of the threaded actuation screw rod 322 and driving each actuation screw rod 322 to rotate with its axial direction as the rotation axis. Therefore, as shown in FIGS. 4 and 5 , when the actuator 311 pushes the driven member 312 , the clamping jaws in each clamping jaw group 120 that are axially connected to each actuation screw 322 are driven to rotate at the same time.

As shown in FIG. 3 , in this embodiment, the clamping jaws of each clamping jaw group 120 are connected by a link assembly 130 . Therefore, when any one of the clamping jaws of the clamping jaw set 120 rotates, the other clamping jaws of the clamping jaw set 120 can be driven by the connecting rod assembly 130 to cause all the clamping jaws of the clamping jaw set 120 to rotate synchronously. The link assembly 130 includes a plurality of rocker arms connected correspondingly to each clamping jaw in the corresponding clamping jaw group 120 and a connecting rod 133 linking the rocking arms. In this embodiment, the rocker arms include a first rocker arm 131 correspondingly connected to the first clamping jaw 121 and a second rocker arm 132 correspondingly connected to the second clamping jaw 122, and the connecting rods 133 are respectively pivoted to the first Rocker arm 131 and second rocker arm 132.

Referring to FIGS. 4 and 5 , in this embodiment, when the actuating mechanism 300 pushes the passive member 312 to the base 110 , each actuation nut 321 on the passive member 312 drives the corresponding threaded actuation screws 322 to rotate. Each clamping claw is driven to rotate, thereby moving each claw portion 121b away from the rotation center axis 101 of the clamp 100 to open the clamp 100 .

As shown in FIGS. 6 to 9 , an elastic member 330 is connected between the base 110 and the passive member 312 . When the actuator 311 releases the passive member 312 , the elastic member 330 returns the base 110 and the passive member 312 to their initial relative position. Location. That is to say, the elastic member 330 pushes the passive member 312 away from the base 110, and each screw on the passive member 312 drives the corresponding screw-connected actuation screw 322 to reverse and drive each clamping claw to reverse, thereby causing each claw to reverse. The portion 121b moves relatively toward the rotation center axis 101 of the clamp 100 to close the clamp 100.

The actuating mechanism 300 of the present invention includes an actuator 311 and a passive part 312 separately arranged on the clamp 100, so that the configuration of the actuator 311 is not limited by the rotation of the clamp 100. Moreover, the clamping jaws of different lengths are linked by the link assembly 130 to move synchronously. When the clamp 100 is stopped, the actuator 311 pushes the passive member 312 to drive each clamping jaw to move, so there is no need to have different clamping jaws corresponding to each size. Configure actuator 311. Furthermore, the first clamping jaws 121 and the second clamping jaws 122 corresponding to wafers 10 of different diameters have different lengths. The second clamping jaws 122 located in the outer ring are longer than the first clamping jaws 121 located in the inner ring. When the claws 122 clamp the large-sized wafer 10 , the first clamping claw 121 corresponding to the small-sized wafer 10 can avoid interfering with the large-sized wafer 10 .

The foregoing embodiments take the first clamping jaw 121 and the second clamping jaw 122 of two different lengths as examples to illustrate how the wafer carrier of the present invention is suitable for wafers 10 of two different sizes. However, each clamping jaw group 120 can also add more clamping jaws of different lengths to accommodate more wafers 10 of different sizes. The clamping jaws of each length are arranged in concentric rings, and each row of clamping jaws is longer than the ring on its inner side. The clamping jaws are shorter than the clamping jaws surrounding the outer side thereof to avoid drying the wafer 10 . The clamping jaws of different lengths in each clamping jaw group 120 are linked by the link assembly 130 to open and close synchronously. Moreover, the power transmission change between the actuation nut 321 and the actuation screw 322 is relatively stable, which can further prevent unstable clamping action from damaging the wafer 10 .

The above descriptions are only preferred embodiments of the present invention and are not intended to limit the patent scope of the present invention. Other equivalent changes that apply the patent spirit of the present invention shall all fall within the patent scope of the present invention.

10:wafer 100: Fixture 101:Rotation center axis 110: base body 120: Clamp set 121:First clamping jaw 121a:Rotation axis 121b:Claw 121c: End face 121d:Trench 121e:Cylinder 122:Second clamping jaw 122a:Rotation axis 122b:Claw 122c: End face 122d:Trench 122e:Cylinder 130: Connecting rod assembly 131:First rocker arm 132:Second rocker arm 133:Connecting rod 200: Rotating mechanism 210: Rotary motor 300: Actuating mechanism 311: Actuator 312: Passive parts 321: Actuation nut 322: Actuating screw 323: Fastening nut 324:Flange

FIG. 1 is a schematic three-dimensional view of the wafer carrier with its clamp in an open state according to the preferred embodiment of the present invention.

Figure 2 is a three-dimensional schematic diagram of the clamp in the open state.

FIG. 3 is an exploded three-dimensional view of the wafer carrier according to the preferred embodiment of the present invention.

4 and 5 are schematic diagrams of the opening of the clamp of the wafer carrier according to the preferred embodiment of the present invention.

Figure 6 is a three-dimensional schematic diagram of the clamp in the closed state.

7 and 8 are schematic diagrams of the closing operation of the clamp of the wafer carrier according to the preferred embodiment of the present invention.

FIG. 9 is a schematic three-dimensional view of the wafer carrier in a closed state with a clamp according to the preferred embodiment of the present invention.

120: Clamp set

121:First clamping jaw

121a:Rotation axis

121b:Claw

121c: End face

121d:Trench

121e:Cylinder

122:Second clamping jaw

122a:Rotation axis

122b:Claw

122c: End face

122d:Trench

122e:Cylinder

130: Connecting rod assembly

131:First rocker arm

132:Second rocker arm

133:Connecting rod

300: Actuating mechanism

311: Actuator

312: Passive parts

321: Actuation nut

322: Actuating screw

323: Fastening nut

Claims (11)

A wafer carrier including: A clamp includes a base body and a plurality of clamping jaw groups arranged on the base body. The clamping jaw groups are arranged in an annular shape. Each clamping jaw group includes a plurality of clamping jaws. Each clamping jaw of the clamp has a pivot connection. A rotation axis of the base body and a claw portion eccentrically arranged relative to the rotation axis; A rotating mechanism connected to the base body to rotate the clamp; and An actuation mechanism includes an actuator, a passive part, a plurality of actuation nuts arranged on the passive part corresponding to the jaw groups, and a plurality of actuation screws configured corresponding to the jaw groups; The clamping jaws of each clamping jaw group are interconnected with each other through a connecting rod assembly. Each actuation screw is screwed to the corresponding actuation nut, and each actuation screw is coaxially connected to the corresponding clamping jaw. On the rotation axis of one of the clamping jaws of the group, the actuator is separately arranged corresponding to the driven member and can move the driven member along the axial direction of the actuation screw to cause linear displacement of each actuation nut, and each actuation nut During linear displacement, the corresponding actuating screw is driven to rotate, thereby driving each clamping jaw to rotate. The wafer stage according to claim 1, wherein the clamping jaws of each clamping jaw group at least include a first clamping jaw and a second clamping jaw, and the first clamping jaws of the clamping tool are arranged in a ring. And the second clamping jaws of the clamp are arranged in another ring concentric with the first clamping jaws. The wafer stage according to claim 1, wherein the clamping jaws of each clamping jaw group include at least a first clamping jaw and a second clamping jaw, the first clamping jaws of the clamping tool are of equal length, and the The second clamping jaws of the clamp are equal in length, each second clamping jaw is longer than each first clamping jaw, the first clamping jaws are arranged in a ring, and the second clamping jaws are arranged concentrically around the first clamping jaws. Another ring of clamping jaws. The wafer stage according to claim 1, wherein the clamping jaws are erected on the base body and the clamping jaws are arranged parallel to each other. The wafer stage according to claim 1, wherein each clamping jaw includes a cylinder erected on the base, and the claw portion of the clamping jaw is disposed on an end surface of the end of the cylinder. The wafer stage of claim 5, wherein a groove is provided on a side surface of the claw portion adjacent to the end surface. The wafer stage according to claim 1, wherein the passive component is a ring body, and the actuating nuts are disposed on the ring body and arranged in a ring shape. The wafer stage of claim 1, wherein the actuator is a pneumatic cylinder or an electric cylinder. The wafer carrier of claim 1, wherein an elastic member is connected between the base and the passive member. When the actuator releases the passive member, the elastic member returns the base and the passive member to Initial relative position. The wafer stage according to claim 9, wherein when the elastic member drives each clamping jaw to rotate, each claw portion moves relatively toward the rotation center axis of the clamp. The wafer stage according to claim 1, wherein when the actuating mechanism drives each clamping jaw to rotate, each claw portion moves away from the rotation center axis of the clamp.

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