TW202337803A - Positioning device, driving device, positioning method, and positioning program capable of reliably detecting a reference mark provided on a mover - Google Patents

Abstract

To provide a positioning device capable of reliably detecting a reference mark provided on a mover. The positioning device (4) includes a plurality of magnetic sensors (S1 to S5) and a benchmark detection validating part (41). The plurality of magnetic sensors (S1 to S5) are configured along the moving direction of the mover to position the magnetic scale (C1, C2) installed on the mover, and the interval therebetween is less than the length of the magnetic scale (C1, C2) in the moving direction. The benchmark position of the mover is determined by detecting the reference marks (Z1, Z2) set on the mover. The benchmark detection validating part (41) is configured as when the detection range of the magnetic scale (C1, C2) moves from the state of spanning two adjacent magnetic sensors (S1 and S2, S2 and S3, S3 and S4, S4 and S5) to the state of being outside the detection range of one of the magnetic sensors, the detection of the reference marks (Z1, Z2) by the other magnetic sensor is validated.

Description

Positioning device, driving device, positioning method and positioning program

The present invention relates to a driving device for moving a mover along a track.

Patent Document 1 discloses a linear conveyance system as a drive device that moves a mover along a track. A plurality of magnetic sensors arranged along the track position the magnetic scale installed on the mover (i.e., the mover). The magnetic sensor can determine the reference position of the mover by detecting the reference mark set on the mover. [Prior technical literature] [Patent Document]

[Patent Document 1] Japanese Patent Publication No. 2021-164396

[Problem to be solved by the invention]

In the linear conveyance system of Patent Document 1, the intervals between the plurality of magnetic sensors are smaller than the length of the magnetic scale in the track direction. Therefore, a magnetic scale (ie, mover) sometimes spans the detection range of two adjacent magnetic sensors. In addition, when there are multiple movers, two different magnetic scales (that is, movers) sometimes enter the detection range of two adjacent magnetic sensors at the same time. Even in these complex situations, the magnetic sensor must be able to reliably detect each reference mark and determine the mover on which the aforementioned reference marks are installed.

The present invention was made in view of these circumstances, and an object thereof is to provide a positioning device and the like that can reliably detect a reference mark provided on a mover. [Technical means to solve problems]

In order to solve the above problems, a positioning device according to one aspect of the present invention includes a plurality of position detection units arranged along the moving direction of the mover in order to position a positioning scale mounted on the mover, and The interval is less than the length in the moving direction of the positioning scale, and the reference position of the mover is determined by detecting the reference mark provided on the mover; and a reference mark detection validating part, which is attached to the positioning scale When the ruler moves from a state spanning the detection range of two adjacent position detection parts to outside the detection range of one of the position detection parts, the detection of the reference mark by the other position detection part is enabled.

In this aspect, when the positioning scale moves from a state spanning the detection range of two adjacent position detection parts to outside the detection range of one of the position detection parts, the other position detection part performs The detection of the fiducial mark is enabled. For example, in the case where there are multiple movers (that is, positioning scales), even if two different positioning scales enter the detection range of two adjacent position detection parts at the same time, because in this state, the reference Since the detection of the mark is not effective, erroneous detection of the reference mark can be prevented.

Another aspect of the invention is a driving device. The device is equipped with: a plurality of movers driven along the track; a plurality of position detection parts arranged along the track in order to position the positioning scales installed on each mover, and the intervals between them are smaller than the positioning scales. The length of the scale in the track direction is determined by detecting the reference mark provided on each mover to determine the reference position of each mover; and a reference mark detection validating part, which is connected to the horizontal direction of the positioning scale. When the state spanning the detection ranges of two adjacent position detection units moves outside the detection range of one of the position detection units, the detection of the reference mark by the other position detection unit is enabled.

Another aspect of the present invention is a positioning method. This method is applied to a positioning device. The positioning device is provided with a plurality of position detection parts. The plurality of position detection parts are arranged along the moving direction of the mover in order to position a positioning scale installed on the mover. And the interval is less than the length in the moving direction of the positioning scale, and the reference position of the mover is determined by detecting the reference mark provided on the mover; wherein, the positioning method has a step of validating the detection of the reference mark, The steps for validating the detection of the reference mark are as follows: when the positioning scale moves from a state spanning the detection range of two adjacent position detection parts to outside the detection range of one of the position detection parts, the other of the position detection parts is The detection of the reference mark by the position detection unit is valid.

In addition, any combination of the above constituent elements or any form in which the expressions are converted into methods, devices, systems, recording media, computer programs, etc. are also included in the present invention. [Effects of the invention]

According to the present invention, the reference mark provided on the mover can be reliably detected.

Hereinafter, modes for implementing the present invention (hereinafter also referred to as embodiments) will be described in detail with reference to the drawings. In the description and/or drawings, the same or equivalent components, members, processes, etc. are denoted by the same symbols, and repeated descriptions are omitted. The scale and shape of each part shown in the drawings are set for convenience in order to simplify the description, and will not be interpreted restrictively unless otherwise mentioned. The embodiments are examples and do not limit the scope of the present invention in any way. All features described in the embodiments and their combinations are not necessarily limited to the essence of the present invention.

FIG. 1 is a perspective view showing the overall structure of a linear conveyance system 1 as a driving device of the present invention. The linear conveyance system 1 is provided with: a stator 2 that forms a ring-shaped guide rail or track; and a plurality of movers 3A, 3B, 3C, and 3D (hereinafter, collectively referred to as movers 3) that are driven relative to the stator 2 and Able to move along rails. With the electromagnet or coil provided on the stator 2 and the permanent magnet provided on the mover 3 facing each other, a linear motor is formed along the annular guide rail. In addition, the guide rail formed by the stator 2 may be in any shape, not limited to an annular shape. For example, the guide rail can be straight or curved, one guide rail can be bifurcated into a plurality of guide rails, and a plurality of guide rails can be merged into one guide rail. In addition, the installation direction of the guide rails formed by the stator 2 is also arbitrary. In the example of FIG. 1, the guide rails are arranged in a horizontal plane, but the guide rails can also be arranged in a vertical plane, a plane with any inclination angle, or a curved surface. within.

The stator 2 has a guide rail surface 21 with the horizontal direction as the normal direction. The guide rail surface 21 extends in a strip shape along the formation direction of the guide rail, and forms an annular strip shape connecting (imaginary) both ends when an annular guide rail is formed as in the example of FIG. 1 . On the guide rail surface 21 that can form a guide rail of any shape as described above, a plurality of drive modules (not shown) equipped with electromagnets are embedded or arranged continuously or periodically along the guide rail. The electromagnet in the drive module generates a magnetic field, which exerts a propulsive force along the guide rail on the permanent magnet of the mover 3 and/or the electromagnet itself. Specifically, when a driving current such as a three-phase alternating current flows through the plurality of electromagnets, a moving magnetic field is generated that linearly drives the mover 3 equipped with the permanent magnet in a desired tangential direction along the guide rail. In addition, in the example of FIG. 1 , the normal direction of the guide rail surface 21 in which the annular guide rail is formed in the horizontal plane is the horizontal direction, but the normal direction of the guide rail surface 21 may be the vertical direction or any other direction.

In the stator 2 , magnetic sensors as a plurality of position detection units are continuously or periodically embedded in the positioning portion 22 provided on the upper surface or the lower surface perpendicular to the guide rail surface 21 (not shown in FIG. 1 ), the magnetic sensor can measure the position of a magnetic scale (not shown in Figure 1) installed on the mover 3 as a positioning object or positioning scale. Magnetic sensors that use a magnetic scale formed of striped magnetic patterns or magnetic scales at constant intervals as a positioning object generally have a plurality of magnetic detection heads. By staggering the intervals between the plurality of magnetic detection heads and the intervals or periods of the magnetic patterns of the magnetic scale, the magnetic sensor can measure the position of the magnetic scale with high accuracy. In a typical magnetic sensor provided with two magnetic detection heads, for example, the distance between the two magnetic detection heads is offset from the magnetic pattern of the magnetic scale by 1/4 pitch (the phase is offset by 90 degrees). In addition, contrary to the above, a magnetic sensor may be provided on the mover 3 and a magnetic scale may be provided on the stator 2 . Furthermore, if the position of the mover 3 measured by the positioning unit 22 is differentiated with time, the speed of the mover 3 can be detected, and if the speed is differentiated with time, the acceleration of the mover 3 can be detected.

The position detection part provided on the stator 2 and the positioning object or positioning scale installed on the mover 3 are not limited to the above magnetic type, and may also be optical or other methods. In the case of the optical type, an optical scale formed by lines or scales at constant intervals is installed on the mover 3, and an optical sensor capable of optically reading the lines of the optical scale is provided on the stator 2. device. In the magnetic type or optical type, since the position detection unit measures the positioning object (magnetic scale or optical scale) without contact, it is possible to reduce the amount of the transported object transported by the mover 3 from scattering and entering the positioning part (the stator 2). (on the surface), there are risks such as malfunction of the position detection part. Among them, in the optical formula, if the optical scale is covered by the liquid, powder, etc. that enters the positioning position, the positioning accuracy deteriorates. Therefore, if the object is a conveyed object whose magnetism can be ignored, it is assumed that even if the object enters the positioning position, The magnetic type is preferred because its location does not degrade the positioning accuracy.

The mover 3 includes: a mover body 31 that faces the guide rail surface 21 of the stator 2; and a positioned portion 32 that extends in the horizontal direction from the upper portion of the mover body 31 and faces the positioning portion 22 of the stator 2. and the conveying part 33, which extends from the mover body 31 in the horizontal direction on the side opposite to the positioned part 32 (the side away from the stator 2) and holds or fixes the conveyed object. The mover body 31 is provided with one or a plurality of permanent magnets (not shown) facing a plurality of electromagnets embedded in the guide rail surface 21 of the stator 2 along the guide rails. Since the moving magnetic field generated by the electromagnet of the stator 2 exerts linear power or propulsion force in the tangential direction of the guide rail on the permanent magnet and/or the electromagnet itself of the mover 3, the mover 3 is linearly driven along the guide rail surface 21 relative to the stator 2. .

On the positioned part 32 of the mover 3, a magnetic scale or an optical scale as a positioning object or positioning scale is provided in a manner consistent with the position detection part (magnetic sensor) provided on the positioning part 22 of the stator 2. or optical sensor) facing each other. In the example of FIG. 1 in which the position detection unit is provided on the upper surface of the stator 2 , a positioning object such as a magnetic scale is installed on the lower surface of the positioned portion 32 of the mover 3 . When the positioning part 22 and the positioned part 32 are magnetic, the magnetic field between the electromagnet of the guide rail surface 21 and the permanent magnet of the mover body 31 does not affect the magnetic positioning of the positioning part 22 and the positioned part 32 In the stator 2, it is better to form the guide rail surface 21 and the positioning portion 22 on different surfaces or at separate locations. In the mover 3, it is better to form the mover body 31 and the positioned portion 32 on different surfaces or at separate locations. .

FIG. 1 illustrates four movers 3A, 3B, 3C, and 3D. However, for example, in a linear conveyance system 1 that conveys a small number of conveyed objects many times, it may be assumed that more than 1,000 movers 3 are required. Under these circumstances, it frequently occurs that two different positioning scales (ie, the mover 3) enter the detection range of two adjacent position detection parts at the same time. In addition, two movers 3 (i.e., positioning scales) that are close to each other may also enter the detection range of a position detection unit at the same time. Even in such complicated situations, each position detection unit must reliably detect the reference marks of the mover 3 described below and be able to uniquely identify the mover 3 provided with each reference mark.

FIG. 2 schematically shows a positioning device 4 composed of a position detection part and a positioning scale in the linear conveyance system 1 . The positioning device 4 is provided with magnetic sensors S1 to S5 as a plurality (five in the example shown) of position detection units. The magnetic sensors S1 to S5 are installed in a plurality of (in the example shown in the figure) position detection units. There are two in the middle) magnetic scales (hereinafter also referred to as magnetic scales C1, C2 for convenience) as positioning scales on the movers C1 and C2 for positioning along the track direction of the stator 2 or the mover. The moving directions of C1 and C2 (the left and right directions in FIG. 2 ) are embedded or arranged on the guide rail surface 21 .

The intervals between the magnetic sensors S1 to S5 in the moving direction may be different from each other. However, in this embodiment, an example in which all intervals are equal will be described. At this time, the distance between the magnetic sensors S1 to S5 in the moving direction is, for example, 30 mm. In addition, the lengths of the magnetic scales C1 and C2 in the moving direction may be different from each other. However, in this embodiment, an example in which all the lengths are the same will be described. At this time, the length of each magnetic scale C1 and C2 in the moving direction is, for example, 48 mm. In this way, in this embodiment, the distance between the magnetic sensors S1 to S5 in the moving direction (30 mm) is smaller than the length of the magnetic scales C1 and C2 in the moving direction (48 mm).

The magnetic scale C1 has two end portions E1L and E1R in the moving direction and a long scale body AB1 sandwiched by the two end portions E1L and E1R from both sides in the moving direction. A plurality of magnetic scales or magnetic patterns arranged at equal intervals along the moving direction are formed on the scale body AB1. Each of the magnetic sensors S1 to S5 that detects the magnetic scale of the scale body AB1 outputs general A-phase and B-phase pulses in a known linear encoder. Typically, the phase A pulses and phase B pulses are 90 degrees out of phase with each other. In addition, the same magnetic scale as that of the scale body AB1 may be formed on both ends E1L and E1R of the magnetic scale C1.

The length of each end portion E1L, E1R of the magnetic scale C1 in the moving direction is, for example, 8 mm. At this time, the length of the scale body AB1 in the moving direction is 32 mm, which is obtained by subtracting the total length of both ends E1L and E1R of 16 mm from the length of the magnetic scale C1 of 48 mm. In this way, in this embodiment, the distance between the magnetic sensors S1 to S5 in the moving direction (30 mm) is smaller than the length of the scale body AB1 of the magnetic scale C1 in the moving direction (32 mm).

A reference mark Z1 as a reference mark is provided on the mover C1 and/or the magnetic scale C1. Each of the magnetic sensors S1 to S5 that magnetically detects the reference mark Z1 outputs a general Z-phase pulse in a known linear encoder. Details will be described later, but the Z-phase pulse output based on the reference mark Z1 is used to determine the reference position of the mover C1. In the illustrated example, the reference mark Z1 is provided at the center of the magnetic scale C1 and/or the scale body AB1 in the moving direction. The distances (24 mm) between the two ends of the reference mark Z1 and the magnetic scale C1 in the moving direction are smaller than the intervals (30 mm) between the plurality of magnetic sensors S1 to S5. In addition, the distances (16 mm) between the two ends of the reference mark Z1 and the scale body AB1 in the moving direction are smaller than the intervals (30 mm) between the plurality of magnetic sensors S1 to S5.

The above description of the magnetic scale C1 is also applicable to other magnetic scales such as the magnetic scale C2. However, the dimensions of the above components and the positions of the reference marks are arbitrarily determined for each magnetic scale. Unless otherwise mentioned below, the description about the magnetic scale C1 is also applicable to the magnetic scale C2 and the like, and repeated description about the magnetic scale C2 and the like is omitted.

Each of the magnetic sensors S1 to S5 is provided with counting portions 51 to 55, which count portions 51 to 55 for measuring the A/B phases formed on the scale body AB1 and/or both end portions E1L and E1R of the magnetic scale C1. Magnetic scale for counting. The increasing and decreasing direction of the count value in each counting unit 51 to 55 corresponds to the moving direction of the magnetic scale C1 (ie, the mover C1) detected by the magnetic sensors S1 to S5. For example, when the mover C1 moves from the left to the right in FIG. 2 , the count value in each counting unit 51 to 55 increases according to the number of A/B phase pulses output by each magnetic sensor S1 to S5 , when the mover C1 moves from the right side to the left side in FIG. 2 , the count value in each counting unit 51 to 55 decreases according to the number of A/B phase pulses output by each magnetic sensor S1 to S5.

When the mover C1 moves on the guide rail, the magnetic sensors S1 to S5 for positioning the magnetic scale C1 are switched in sequence. FIG. 3 schematically shows a situation in which the positioning body of the magnetic scale C1 moving from the left to the right switches from the magnetic sensor S1 of the movement source to the magnetic sensor S2 of the movement destination. As shown in the figure, the magnetic sensors S1 and S2 are switched in a state where the scale body AB1 of the magnetic scale C1 spans the detection ranges of the two adjacent magnetic sensors S1 and S2. In the example shown in the figure, at the moment when the magnetic sensors S1 and S2 are at positions SW1 and SW2 that are symmetrical with respect to the center of the magnetic scale C1 in the moving direction (the position of the reference mark Z1), the positioning of the magnetic scale C1 The main body switches from magnetic sensor S1 to magnetic sensor S2.

The first switching position SW1 is a position within the scale body AB1 that is a predetermined distance from the boundary between the left end E1L and the scale body AB1, and the second switching position SW2 is a predetermined distance from the boundary between the right end E1R and the scale body AB1. The position within the scale body AB1. In the example shown in the figure, the distance between the first switching position SW1 and the left end of the scale body AB1 and the distance between the second switching position SW2 and the right end of the scale body AB1 are, for example, 1 mm. In these cases, the distance between the first switching position SW1 and the center of the scale body AB1 and the distance between the second switching position SW2 and the center of the scale body AB1 are 15mm, and the sum (30mm) of the distance between the first switching position SW1 and the center of the scale body AB1 is 15mm. The intervals between S1 and S2 are consistent.

When the positioning body of the magnetic scale C1 is switched from the magnetic sensor S1 to the magnetic sensor S2, the count value of the counting unit 51 of the magnetic sensor S1 of the movement source is replaced by the count value of the magnetic sensor S2 of the movement destination. The count value of the counting unit 52 is replaced. In the following, the count value of each counting unit 51 to 55 when each magnetic sensor S1 to S5 detects the center of the magnetic scale C1 (the position of the reference mark Z1) is set to zero, and each magnetic sensor S1 to S5 When the magnetic scale is detected on the opposite side (the left side in FIG. 3 ) to the moving direction of the mover C1 than the center of the magnetic scale C1 , the count value of each counting unit 51 to 55 is set to positive. When the sensors S1 to S5 detect the magnetic scale on the moving direction side of the mover C1 (right side in FIG. 3 ) relative to the center of the magnetic scale C1 , the count values of the respective counting units 51 to 55 are set to negative.

In the example shown in the figure, the position of the reference mark Z1 corresponds to the count value "0", the first switching position SW1 corresponds to the count value "+15,000", for example, and the second switching position SW2 corresponds to the count value "-15,000", for example. Hereinafter, the count value "+15,000" at the first switching position SW1 is also called the switching count value, and the count value "-15,000" at the second switching position SW2 is also called the start count value. In the example shown in the figure, the switching count value and the start count value only differ in sign. In the state shown in the figure, when the first switching position SW1 of the magnetic scale C1 comes to the magnetic sensor S1, the switching count value "+15,000" of the counting part 51 is converted to the second switching position SW2. The starting count value of the counting unit 52 of the magnetic sensor S2 is "-15,000". After that, the magnetic sensor S2 becomes the positioning body of the magnetic scale C1, and its counting unit 52 counts from the start count value "-15,000" to the next switching count value (to the magnetic sensor S3) "+15,000".

The reference mark detection control unit 40 in FIG. 2 includes: a reference mark detection validating unit 41 that validates the detection of the reference mark Z1 by the magnetic sensors S1 to S5 based on the count value in each of the counting units 51 to 55; and The reference mark detection disabling unit 42 disables the detection of the reference mark Z1 by each of the magnetic sensors S1 to S5 based on the count value in each of the counting units 51 to 55.

Before describing the detection control of the reference mark Z1 by the reference mark detection validating unit 41 and/or the reference mark detection invalidating unit 42, other embodiments are shown in FIGS. 4 and 5 . As shown in Figure 4, when the mover C1 is used for the first time in the linear conveying system 1, it is necessary to detect the magnetic mark by any one of a plurality of magnetic sensors (in the example of Figure 4, S1, S2). The reference mark Z1 of the scale C1 is used to determine or register the reference position or initial position of the mover C1. Each of the magnetic sensors S1 and S2 must reliably detect the reference mark Z1 and be able to determine the mark of the reference mark Z1 tied to the mover C1. Therefore, in order to prevent the erroneous detection of the reference mark Z1 and/or the mover C1, each of the magnetic sensors S1 and S2 is in a state in which it is unable to detect the reference mark Z1 in principle, and can only detect the reference mark Z1 and the mover C1 reliably. In this case, the detection of the reference mark Z1 is enabled.

As shown in FIG. 4 , assume that the mover C1 whose initial position is not registered in the linear conveyance system 1 moves along the guide rail from the left to the right of the magnetic sensor S1 . The position of the magnetic scale C1 in the state of Figure 4 is not on any of the magnetic sensors S1 and S2, and is shown as "S1 left" in Figure 5. In this "S1 left" state, since neither of the magnetic sensors S1 and S2 detects the magnetic scale of the A/B phase of the magnetic scale C1, the respective counting units 51 and 52 are schematically shown. (Figure 2) The count values of "S1-A/B phase" and "S2-A/B phase" in Figure 5 are both "0".

When the mover C1 moves from the state in Figure 4 and at least the right end E1R of the magnetic scale C1 comes to the magnetic sensor S1, the magnetic sensor S1 detects the formation on the right end E1R and/or the scale. On the A/B phase magnetic scale on the body AB1, the count value in the counting unit 51 increases according to the number of A/B phase pulses from the magnetic sensor S1. In the example of FIG. 5 , when the "scale position" of the magnetic scale C1 switches from "S1 left" to "S1 up", the "S1-A/B phase" indicating the count value of the counting unit 51 changes from "S1 left" to "S1 up". "1" is increased to "12". In the "S1 up" state, since the magnetic scale C1 is not on the magnetic sensor S2, the magnetic sensor S2 does not detect the A/B phase magnetic scale of the magnetic scale C1, so it indicates counting. The count value "S2-A/B phase" of part 52 remains "0". In addition, in this embodiment, in order to simplify the explanation, it is assumed that the count value "18" represents the full length of a magnetic scale, but the count value of each magnetic scale in the actual linear conveying system 1 is very large, for example, As mentioned above regarding Figure 3, it is around "30,000" ("-15,000" ~ "+15,000").

At the moment when the count value of "S1-A/B phase" in Figure 5 becomes "9", the "Z" appearing in the "S1-Z phase" column indicates that the reference mark Z1 has arrived on the magnetic sensor S1. However, as mentioned above, in principle, the magnetic sensor S1 is in a state in which it cannot detect the reference mark Z1 ("S1-Z detection" becomes "disabled"), so the count value of "S1-A/B phase" that does not detect becomes The reference mark Z1 at the time of "9".

During the period when the count value of "S1-A/B phase" in Figure 5 is "13" to "18", the magnetic scale C1 is in the "S1 & S2 upper" state that is located above both magnetic sensors S1 and S2. . Specifically, the part of the magnetic scale C1 that is further to the left than the reference mark Z1 (the left end part E1L or the left part of the scale body AB1) is located on the magnetic sensor S1, and the part of the magnetic scale C1 that is further to the left than the reference mark Z1 The part further to the right of Z1 (the right end part E1R or the right part of the scale body AB1) is located on the magnetic sensor S2. In this "S1 & S2 up" state, since any of the magnetic sensors S1 and S2 detects the magnetic scale of the A/B phase of the magnetic scale C1, " Both "S1-A/B phase" and "S2-A/B phase" increase similarly.

In this embodiment, "S1-A/B phase" and "S2-A/B phase" continuously increase or decrease the predetermined count value ("3" in the example shown in the figure) in the same direction at approximately the same time. ” count value), the detection of the reference mark Z1 by the magnetic sensor on the side of the increasing and decreasing direction, that is, the moving direction of the mover C1 is enabled. In the example shown in the figure, the increase of "13" to "15" in "S1-A/B phase" and the increase of "1" to "3" in "S2-A/B phase" occur at approximately the same time. Since "3" count values are continuously generated, the detection of the reference mark Z1 by the magnetic sensor S2 in the increasing direction, that is, from the left to the right moving direction side of the mover C1 (that is, the right side), is enabled. In this way, after the count value of "S2-A/B phase" is "4", "S2-Z detection" switches from "disabled" to "enabled".

In this state, when the count value of "S2-A/B phase" becomes "9", the reference mark Z1 comes to the magnetic sensor S2 ("Z" appears in the "S2-Z phase" column) , therefore, the reference mark Z1 is detected by the magnetic sensor S2, and the initial position of the mover C1 is registered in the linear conveyance system 1. In addition, at the moment when the count value of "S2-A/B phase" is "9", the magnetic scale C1 passes to the right side of the magnetic sensor S1, so the "scale position" becomes the representation of the magnetic scale C1 ( Only) located on the magnetic sensor S2 "on S2", the count value of "S1-A/B phase" remains unchanged at the maximum value "18".

As mentioned above, in the embodiments of FIGS. 4 and 5 , only when the count values of two adjacent magnetic sensors S1 and S2 change continuously in the same direction by a predetermined count value at approximately the same time, In this case, the detection of the reference mark Z1 by the magnetic sensor S2 on the moving direction side of the mover C1 is enabled, so that the two magnetic sensors S1 can reliably detect the magnetic sensor S2 at the moving destination. , the reference mark Z1 of the mover C1 detected by S2 at the same time. However, when two movers close to each other move at the same speed, it is possible to individually detect the count values of two adjacent magnetic sensors of each mover in the same direction at approximately the same time. A situation where the specified count value continuously changes, so there is a possibility of false detection of the reference mark and/or mover. According to this embodiment described below, by using the structure shown in FIG. 2 (especially the fiducial mark detection validating unit 41 and/or the fiducial mark detection invalidating unit 42), errors in the reference mark and/or the mover can be further reduced. Possibility of detection.

In FIG. 2 , the reference mark detection validating unit 41 detects the magnetic scales C1 and C2 across two adjacent magnetic sensors S1/S2 and S2/ based on the count values in the respective counting units 51 to 55. When the status of the detection range of S3, S3/S4, and S4/S5 moves outside the detection range of one of the magnetic sensors S1 to S5, the other one of the magnetic sensors S1 to S5 performs the reference mark Z1, The detection of Z2 is valid.

In the simple embodiment shown in FIGS. 6 and 7 , the reference mark detection validating unit 41 moves the magnetic scale C1 from across the When the state of the detection range of two adjacent magnetic sensors S1/S2 moves outside the detection range of one of the magnetic sensors S1 as shown by the dotted line, the other one on the moving direction side of the mover C1 The detection of the reference mark Z1 by the magnetic sensor S2 is effective.

As shown in FIG. 7 , the reference mark detection validating unit 41 changes the count values of the counting units 51 and 52 in the two adjacent magnetic sensors S1 and S2 in the same manner (in the same manner as in FIG. 5 ). In the example shown in the figure, when the count value of the magnetic sensor S1 increases to "13" to "15" and the count value of the magnetic sensor S2 increases to "1" to "3"), it is determined It means that the magnetic scale C1 is in the "S1&S2 up" state spanning two adjacent detection ranges. The magnetic scale C1 in the "S1 & S2 above" state is located above both the magnetic sensors S1 and S2 as shown by the solid line in FIG. 6 . At this time, the reference mark Z1 is located at a position sandwiched by the detection ranges of the two adjacent magnetic sensors S1 and S2.

As shown in Figure 7, the state of the magnetic scale C1 spanning two adjacent detection ranges "S1&S2" continues until the count value of the magnetic sensor S1 becomes "18" and the count value of the magnetic sensor S2 until the count value of the magnetic sensor S1 remains at "18" and only the count value of the magnetic sensor S2 increases to "7", as shown by the dotted line in Figure 6, the mover C1 moves It is outside the detection range of one of the magnetic sensors S1 on the opposite side to the moving direction and becomes the "S2 up" state. Therefore, the reference mark detection validating unit 41 causes the other magnetic sensor S2 on the moving direction side of the mover C1 to perform the reference mark Z1 at the time when the count value of only the magnetic sensor S2 increases to "7". The test is valid. In addition, when the magnetic sensor S1 cannot detect the magnetic scale of the A/B phase of the magnetic scale C1, the reference mark detection validating unit 41 may cause the other one on the moving direction side of the mover C1 to be magnetically induced. The detection of the reference mark Z1 by the detector S2 is valid.

At this time, the reference mark Z1, as shown by the dotted line in Figure 6, is still located at a position sandwiched by the detection ranges of the two adjacent magnetic sensors S1 and S2. Therefore, the mover C1 further moves in the same direction, thus the reference mark Z1 Marker Z1 comes to magnetic sensor S2. Specifically, when the count value of the magnetic sensor S2 becomes "9", the reference mark Z1 comes to the magnetic sensor S2 ("Z" appears in the "S2-Z phase" column), so the magnetic The sensor S2 detects the reference mark Z1, and the initial position of the mover C1 is registered in the linear transportation system 1. The fiducial mark detection disabling unit 42 in FIG. 2 detects the other magnetic sensor S2 on the moving direction side that is validated with the S2 count value “7” by the fiducial mark detection validating unit 41 with the S2 count value “9”. When reaching the reference mark Z1, after the S2 count value "10", the detection of the reference mark Z1 by the other magnetic sensor S2 is invalidated (making "S2-Z detection" "disabled").

Next, the case where there are multiple movers is explained. In such cases, two movers (i.e., magnetic scales) that are close to each other may enter the detection range of a magnetic sensor at the same time. Therefore, measures as shown in Figure 8 are taken in advance to prevent each magnetic scale. Measures for false detection are better.

FIG. 8 schematically shows a state in which two magnetic scales C1 and C2, which are close to the minimum accessible distance, simultaneously enter the detection range R of one magnetic sensor S1 to S5. In this example, the minimum accessible distance between the two magnetic scales C1 and C2 (the distance between the right end of the magnetic scale C1 and the left end of the magnetic scale C2 in the state shown in the figure) is 2mm, and the magnetic sensing The length of the detection range R of the devices S1 to S5 in the track direction (the left-right direction in Figure 8) is 5 mm. As described above, the right end portion E1R of the magnetic scale C1 and the left end portion E2L of the magnetic scale C2 are the same as the scale body AB1 of the magnetic scale C1 and the scale body AB2 of the magnetic scale C2. The ground has an A/B phase magnetic scale, so in the state shown in the figure, the magnetic sensors S1 to S5 will simultaneously detect the A/B phase magnetic scale of the right end E1R and the A/B phase magnetic scale of the left end E2L. scale. In these cases, the magnetic sensors S1 to S5 cannot distinguish between the two magnetic scales C1 and C2 for detection.

In order to prevent erroneous detection of the two magnetic scales C1 and C2 that are so close to each other, the right end portion E1R of the magnetic scale C1 and/or the left end portion E2L of the magnetic scale C2 is separated from the magnetic sensors S1 to S5. The detection range R is shielded by the shielding member B1R and/or the shielding member B2L.

The shielding member B1R shields at least the A/B phase magnetic scale provided on the right end side away from the scale body AB1 at the right end portion E1R of the magnetic scale C1. Specifically, as described above, of the right end portion E1R with a total length of 8 mm, the right end side portion is shielded by the shielding member B1R. If the length of the shielding member B1R in the track direction is set to be at least the length (5 mm) of the detection range R of the magnetic sensors S1 to S5 in the track direction, the magnetic sensors S1 to S5 can be individually shielded by the shielding member B1R. The detection range R prevents the magnetic scale C1 and the magnetic scale C2 from being detected at the same time. In addition, if the length of the shielding member B1R in the track direction is subtracted from the length of the detection range R of the magnetic sensors S1 to S5 in the track direction (5 mm) by subtracting the minimum approachable distance (2 mm) of the movers C1 and C2. If the length (3 mm) or more is obtained, the detection range R of the magnetic sensors S1 to S5 can be substantially shielded by the shielding member B1R alone, preventing the magnetic scale C1 and the magnetic scale C2 from being detected at the same time. Furthermore, if the length of the shielding member B1R in the track direction is subtracted from the length of the detection range R of the magnetic sensors S1 to S5 in the track direction (5 mm) by subtracting the minimum accessible distance (2 mm) of the movers C1 and C2, By obtaining more than half (1.5mm) of the length (3mm), the detection range R of the magnetic sensors S1 to S5 can be substantially shielded together with the shielding member B2L of the same length to prevent the magnetic scale C1 from interacting with the magnetic scale. Scale C2 is tested at the same time.

The shielding member B2L shields at least the A/B phase magnetic scale provided on the left end side away from the scale body AB2 at the left end portion E2L of the magnetic scale C2. Specifically, as described above, of the left end portion E2L with a total length of 8 mm, the portion on the left end side is shielded by the shielding member B2L. If the length of the shielding member B2L in the track direction is set to be at least the length (5 mm) of the detection range R of the magnetic sensors S1 to S5 in the track direction, the magnetic sensors S1 to S5 can be individually shielded by the shielding member B2L. The detection range R prevents the magnetic scale C2 and the magnetic scale C1 from being detected at the same time. In addition, if the length of the shielding member B2L in the track direction is subtracted from the length of the detection range R of the magnetic sensors S1 to S5 in the track direction (5 mm) by subtracting the minimum accessible distance (2 mm) of the movers C1 and C2, If the length (3 mm) or more is obtained, the detection range R of the magnetic sensors S1 to S5 can be substantially shielded by the shielding member B2L alone, preventing the magnetic scale C2 and the magnetic scale C1 from being detected at the same time. Furthermore, if the length of the shielding member B2L in the track direction is subtracted from the length of the detection range R of the magnetic sensors S1 to S5 in the track direction (5 mm) by subtracting the minimum accessible distance (2 mm) of the movers C1 and C2, By obtaining more than half (1.5mm) of the length (3mm), the detection range R of the magnetic sensors S1 to S5 can be substantially shielded together with the shielding member B1R of the same length to prevent the magnetic scale C2 from interacting with the magnetic scale. Scale C1 is tested at the same time.

In the magnetic scale C1, a shielding member similar to the shielding member B1R at the right end (or the shielding member B2L at the left end of the magnetic scale C2) may be provided at the left end (not shown), or may be provided only at the left end. Set up the masking component. Similarly, in the magnetic scale C2, the same shielding member as the shielding member B2L at the left end (or the shielding member B1R at the right end of the magnetic scale C1) may be provided at the right end (not shown), or only Provide a shielding member at the right end.

The shielding member B1R and/or the shielding member B2L is formed of a ferromagnetic material that magnetically shields at least one end of the magnetic scale C1 and/or the magnetic scale C2 from the magnetic sensors S1 to S5. Examples of ferromagnetic materials include metals or alloys such as iron, cobalt, nickel, gallium, and manganese. In addition, when an optical scale is used as the positioning scale instead of the magnetic scale, the shielding member can be formed by using a light-shielding material that optically shields the optical sensor as the position detection part. As described above, by taking measures as shown in FIG. 8 , even if the ends of the positioning scales of two movers that are close to each other enter the detection range of one position detection unit at the same time, it is possible to detect at least one position detector provided at the end. The shielding member on one side prevents the two positioning scales from being mistakenly detected by the position detection part at the same time.

Next, in the embodiments of FIGS. 4 and 5 (embodiments that do not use the fiducial mark detection validating unit 41 and/or the fiducial mark detection invalidating unit 42 ), there is a possibility of erroneous detection of the reference mark and/or the mover, and each other. A plurality of embodiments in which two movers in close proximity move at the same speed will be described.

In the first embodiment shown in Figs. 9 and 10, in the initial state shown in Fig. 9 (a state in which the movers C1 and C2, which have not registered their initial positions, start to move to the right), the mover C1 is located in the magnetic induction position. On both sides of the detectors S2 and S3, the mover C2 is located on the magnetic sensor S4. As shown in FIG. 10 , the reference mark detection validating unit 41 changes the magnetic scale C1 from a state spanning the detection range of the two adjacent magnetic sensors S2/S3 based on the count values in the counting units 52 and 53. When moving outside the detection range of one of the magnetic sensors S2, the detection of the reference mark Z1 by the other magnetic sensor S3 on the moving direction side of the mover C1 is enabled.

In this state, when the mover C1 further moves in the same direction, the reference mark Z1 comes to the magnetic sensor S3, so the reference mark Z1 is detected by the magnetic sensor S3, and the initial position of the mover C1 is Register in the online transport system 1. After the reference mark Z1 is detected by the magnetic sensor S3, the reference mark detection invalidating unit 42 invalidates the detection of the reference mark Z1 by the magnetic sensor S3. In addition, later, the magnetic scale C1 moves from a state spanning the detection range of two adjacent magnetic sensors S3/S4 to outside the detection range of one of the magnetic sensors S3. However, due to the magnetic scale The reference mark Z1 of the scale C1 has been detected by the magnetic sensor S3, so the detection of the reference mark Z1 by the magnetic sensor S4 is not valid.

On the other hand, the reference mark detection validating unit 41 moves the magnetic scale C2 from a state spanning the detection range of the two adjacent magnetic sensors S4/S5 to a state based on the count values in the counting units 54 and 55. When one of the magnetic sensors S4 is outside the detection range, the detection of the reference mark Z2 by the other magnetic sensor S5 on the moving direction side of the mover C2 is enabled. In this state, when the mover C2 further moves in the same direction, the reference mark Z2 comes to the magnetic sensor S5, so the reference mark Z2 is detected by the magnetic sensor S5, and the initial position of the mover C2 is Register in the online transport system 1. After the reference mark Z2 is detected by the magnetic sensor S5, the reference mark detection invalidating unit 42 invalidates the detection of the reference mark Z2 by the magnetic sensor S5. As described above, even when the two movers C1 and C2 that are close to each other move at the same speed, the reference marks Z1 and Z2 of the movers C1 and C2 can be reliably detected.

In the second embodiment shown in Figures 11 and 12, in the initial state shown in Figure 11, the mover C1 is located on the magnetic sensor S2, and the mover C2 is located on both the magnetic sensors S3 and S4. . As shown in FIG. 12 , the reference mark detection validating unit 41 changes the magnetic scale C2 from a state across the detection range of the two adjacent magnetic sensors S3/S4 based on the count values in the counting units 53 and 54. When moving outside the detection range of one of the magnetic sensors S3, the detection of the reference mark Z2 by the other magnetic sensor S4 on the moving direction side of the mover C2 is enabled.

In this state, when the mover C2 further moves in the same direction, the reference mark Z2 comes to the magnetic sensor S4, so the reference mark Z2 is detected by the magnetic sensor S4, and the initial position of the mover C2 is Register in the online transport system 1. After the reference mark Z2 is detected by the magnetic sensor S4, the reference mark detection invalidating unit 42 invalidates the detection of the reference mark Z2 by the magnetic sensor S4. In addition, later, the magnetic scale C2 moves from a state spanning the detection range of the two adjacent magnetic sensors S4/S5 to outside the detection range of one of the magnetic sensors S4. However, due to the magnetic scale The reference mark Z2 of the scale C2 has been detected by the magnetic sensor S4, so the detection of the reference mark Z2 by the magnetic sensor S5 is not valid.

On the other hand, the reference mark detection validating unit 41 moves the magnetic scale C1 from a state spanning the detection range of two adjacent magnetic sensors S2/S3 to a state based on the count values in the counting units 52 and 53. When one of the magnetic sensors S2 is outside the detection range, the detection of the reference mark Z1 by the other magnetic sensor S3 on the moving direction side of the mover C1 is enabled. In this state, when the mover C1 further moves in the same direction, the reference mark Z1 comes to the magnetic sensor S3, so the reference mark Z1 is detected by the magnetic sensor S3, and the initial position of the mover C1 is Register in the online transport system 1. After the reference mark Z1 is detected by the magnetic sensor S3, the reference mark detection invalidating unit 42 invalidates the detection of the reference mark Z1 by the magnetic sensor S3. As described above, even when the two movers C1 and C2 that are close to each other move at the same speed, the reference marks Z1 and Z2 of the movers C1 and C2 can be reliably detected.

In the third embodiment shown in FIGS. 13 and 14 , in the initial state shown in FIG. 13 , the mover C1 is located above both the magnetic sensors S1 and S2 , and the mover C2 is located above the magnetic sensors S3 and S2 . S4 above both sides. As shown in FIG. 14 , the reference mark detection validating unit 41 changes the magnetic scale C1 from a state spanning the detection range of the two adjacent magnetic sensors S1/S2 based on the count values in the counting units 51 and 52. When moving outside the detection range of one of the magnetic sensors S1, the detection of the reference mark Z1 by the other magnetic sensor S2 on the moving direction side of the mover C1 is enabled.

In this state, when the mover C1 further moves in the same direction, the reference mark Z1 comes to the magnetic sensor S2, so the reference mark Z1 is detected by the magnetic sensor S2, and the initial position of the mover C1 is Register in the online transport system 1. After the reference mark Z1 is detected by the magnetic sensor S2, the reference mark detection invalidating unit 42 invalidates the detection of the reference mark Z1 by the magnetic sensor S2. In addition, later, the magnetic scale C1 moves from a state spanning the detection range of two adjacent magnetic sensors S2/S3 to outside the detection range of one of the magnetic sensors S2. However, due to the magnetic scale The reference mark Z1 of the scale C1 has been detected by the magnetic sensor S2, so the detection of the reference mark Z1 by the magnetic sensor S3 is not valid.

On the other hand, the reference mark detection validating unit 41 moves the magnetic scale C2 from a state spanning the detection range of the two adjacent magnetic sensors S3/S4 to a state based on the count values in the counting units 53 and 54. When one of the magnetic sensors S3 is outside the detection range, the detection of the reference mark Z2 by the other magnetic sensor S4 on the moving direction side of the mover C2 is enabled.

In this state, when the mover C2 further moves in the same direction, the reference mark Z2 comes to the magnetic sensor S4, so the reference mark Z2 is detected by the magnetic sensor S4, and the initial position of the mover C2 is Register in the online transport system 1. After the reference mark Z2 is detected by the magnetic sensor S4, the reference mark detection invalidating unit 42 invalidates the detection of the reference mark Z2 by the magnetic sensor S4. In addition, although illustration is omitted, the magnetic scale C2 then moves from a state spanning the detection range of two adjacent magnetic sensors S4/S5 to outside the detection range of one of the magnetic sensors S4. However, since the reference mark Z2 of the magnetic scale C2 has been detected by the magnetic sensor S4, the detection of the reference mark Z2 by the magnetic sensor S5 is not effective. As described above, even when the two movers C1 and C2 that are close to each other move at the same speed, the reference marks Z1 and Z2 of the movers C1 and C2 can be reliably detected.

In the above first to third embodiments, the moving directions of the movers C1 and C2 are constant. However, even if the moving directions of the movers C1 and C2 change, each mover can be reliably detected. Reference marks Z1 and Z2 for C1 and C2. For example, after the other (for example, the right) magnetic sensor is activated by the reference mark detection validating unit 41 and before the other magnetic sensor detects the reference marks Z1 and Z2, the magnetic scales C1, When C2 returns to a state spanning the detection range of one (for example, the left) magnetic sensor and the other magnetic sensor and then moves outside the detection range of the other magnetic sensor, the fiducial mark detection is effective. The conversion part 41 enables the detection of the reference marks Z1 and Z2 by one of the magnetic sensors.

At this time, the reference mark detection invalidation unit 42 may activate the magnetic sensor after the other magnetic sensor is activated by the reference mark detection activation unit 41 and before the other magnetic sensor detects the reference marks Z1 and Z2. When the scales C1 and C2 return to a state spanning the detection range of one of the magnetic sensors and the other of the magnetic sensors and then move outside the detection range of the other magnetic sensor, the The detection of reference marks Z1 and Z2 by another magnetic sensor is invalid. Alternatively, the reference mark detection invalidating unit 42 may activate the other magnetic sensor by the reference mark detection validating unit 41 and before the other magnetic sensor detects the reference marks Z1 and Z2. When the scales C1 and C2 return to a state spanning the detection range of one of the magnetic sensors and the other of the magnetic sensors, the detection of the reference marks Z1 and Z2 by the other magnetic sensor is invalid. .

The present invention has been described above based on the embodiments. The embodiments are examples, and those skilled in the art will understand that various modifications can be made to the combination of each component and each processing step, and such modifications are also within the scope of the present invention.

In the embodiment, a linear transport system is illustrated in which the mover is driven based on the magnetic force between the permanent magnet provided on the mover and the electromagnet provided on the stator. However, the present invention can be applied to any principle based on other than magnetism (for example, Electrical, fluid) any driving device.

In addition, the functional structure of each device described in the embodiment can be realized by hardware resources or software resources, or by the cooperation of hardware resources and software resources. As hardware resources, processors, ROM, RAM, and other LSIs can be used. As software resources, operating systems, applications and other programs can be used. This application claims priority based on Japanese Patent Application No. 2022-032725 filed on March 3, 2022. The entire contents of this Japanese application are incorporated by reference into this specification.

1:Linear handling system 2:Stator 3: mover 4: Positioning device 40: Fiducial mark detection and control department 41: Fiducial mark detection and validation department 42: Fiducial mark detection invalidation part 51: Counting Department AB1: Scale body B1R: Masking component C1: Magnetic scale S1: Magnetic sensor Z1: Reference mark

[Fig. 1] is a perspective view showing the overall structure of the linear conveyance system. [Fig. 2] schematically shows a positioning device composed of a position detection unit and a positioning scale in a linear conveyance system. [Fig. 3] schematically shows a situation in which the positioning body of the moving magnetic scale is switched from the magnetic sensor of the movement source to the magnetic sensor of the movement destination. FIG. 4 shows an example in which the fiducial mark detection validating unit and/or the fiducial mark detection invalidating unit are not used. FIG. 5 shows an example in which the fiducial mark detection validating unit and/or the fiducial mark detection invalidating unit are not used. FIG. 6 shows an example using a fiducial mark detection validating unit and/or a fiducial mark detection invalidating unit. FIG. 7 shows an example using a fiducial mark detection validating unit and/or a fiducial mark detection invalidating unit. [Fig. 8] schematically shows a state in which two magnetic scales approaching the minimum accessible distance simultaneously enter the detection range of one magnetic sensor. [Fig. 9] shows the first embodiment in which a plurality of movers move at a constant speed. [Fig. 10] shows the first embodiment in which a plurality of movers move at a constant speed. [Fig. 11] shows a second embodiment in which a plurality of movers move at a constant speed. [Fig. 12] shows a second embodiment in which a plurality of movers move at a constant speed. [Fig. 13] shows a third embodiment in which a plurality of movers move at a constant speed. [Fig. 14] shows a third embodiment in which a plurality of movers move at a constant speed.

4: Positioning device

21: Guide rail surface

40: Fiducial mark detection and control department

41: Fiducial mark detection and validation department

42: Fiducial mark detection invalidation part

51: Counting Department

52: Counting Department

53: Counting Department

54: Counting Department

55: Counting Department

AB1: Scale body

AB2: Scale body

C1: Magnetic scale

C2: Magnetic scale

E1L: left end

E1R: Right end

E2L: left end

E2R: right end

S1: Magnetic sensor

S2: Magnetic sensor

S3: Magnetic sensor

S4: Magnetic sensor

S5: Magnetic sensor

Z1: Reference mark

Z2: Reference mark

Claims (11)

A positioning device having: A plurality of position detection parts are arranged along the moving direction of the mover in order to position the positioning scale installed on the mover, and the intervals between them are smaller than the length of the positioning scale in the moving direction, Determine the reference position of the mover by detecting the reference mark provided on the mover; and The reference mark detection validating unit is configured to activate one of the positioning scales when the positioning scale moves from a state spanning the detection ranges of two adjacent position detection units to outside the detection range of one of the position detection units. The other position detection unit is effective in detecting the aforementioned reference mark. Such as the positioning device of claim 1, wherein, It further includes a fiducial mark detection invalidating unit, and when the other one of the position detecting units detects the fiducial mark before being validated by the fiducial mark detection validating unit, the fiducial mark detection deactivating unit disables the other one of the position detecting units and detects the fiducial mark. The above-mentioned detection of the reference mark by the detection unit is invalid. Such as the positioning device of claim 1 or 2, wherein, It further includes a reference mark detection invalidating unit, and after the reference mark detection validating unit activates the other position detection unit and before the other position detection unit detects the reference mark, the positioning scale returns to the horizontal position. When the state straddles the detection range of one of the position detection parts and the other of the position detection parts and moves outside the detection range of the other of the position detection parts, the reference mark detection invalidation part causes the other one of the position detection parts to The detection of the aforementioned reference mark by one position detection unit is invalid. Such as the positioning device of claim 1 or 2, wherein, It further includes a reference mark detection invalidating unit, and after the reference mark detection validating unit activates the other position detection unit and before the other position detection unit detects the reference mark, the positioning scale returns to the horizontal position. In a state where the detection range of one of the position detection units and the other of the position detection units is straddled, the reference mark detection invalidation unit invalidates the detection of the reference mark by the other of the position detection units. Such as the positioning device of claim 1 or 2, wherein, After the reference mark detection validating section activates the other position detection section and before the other position detection section detects the reference mark, the positioning scale returns to the position across the one position detection section and When the state of the detection range of the other position detection unit further moves outside the detection range of the other position detection unit, the reference mark detection validating unit causes one of the position detection units to perform detection of the reference mark. The test is valid. Such as the positioning device of claim 1 or 2, wherein, The aforementioned positioning scale has a plurality of scales arranged along the aforementioned moving direction; The position detection unit includes a counting unit that counts each of the detected scales; When the count values of the counting units in two adjacent position detection units change in the same manner, the reference mark detection validating unit determines that the positioning scale is located across the two adjacent detection units. The status of the scope. Such as the positioning device of claim 1 or 2, wherein, In a state where the positioning scale spans the detection ranges of two adjacent position detection parts, the reference mark is located at a position sandwiched between the two detection ranges. Such as the positioning device of claim 1 or 2, wherein, Each distance between the reference mark and both ends in the movement direction of the positioning scale is smaller than an interval between the plurality of position detection parts. A driving device having: A plurality of movers, which are driven along the track; A plurality of position detection parts are arranged along the track in order to position the positioning scale installed on each of the movers, and their intervals are smaller than the length of the positioning scale in the track direction. The reference marks provided on each of the aforementioned movers are detected to determine the reference position of each mover; and The reference mark detection validating unit is configured to activate one of the positioning scales when the positioning scale moves from a state spanning the detection ranges of two adjacent position detection units to outside the detection range of one of the position detection units. The other position detection unit is effective in detecting the aforementioned reference mark. A positioning method is applied to a positioning device. The positioning device is provided with a plurality of position detection parts. The plurality of position detection parts move along the moving direction of the mover in order to position a positioning scale installed on the mover. Arranged, and the interval is less than the length of the aforementioned positioning scale in the aforementioned movement direction, the reference position of the mover is determined by detecting the reference mark provided on the aforementioned mover; wherein, The positioning method includes a step of validating reference mark detection. The step of validating reference mark detection is as follows: moving the positioning scale from a state spanning the detection range of two adjacent position detection parts to detecting one of the positions. If the detection range of the position detection part is outside the detection range of the position detection part, the detection of the aforementioned reference mark by the other position detection part is enabled. A positioning program is used in a positioning device. The positioning device is equipped with a plurality of position detection parts. The plurality of position detection parts move along the moving direction of the mover in order to position the positioning scale installed on the mover. Arranged, and the interval is less than the length of the aforementioned positioning scale in the aforementioned movement direction, the reference position of the mover is determined by detecting the reference mark provided on the aforementioned mover; wherein, The aforementioned positioning program causes the computer to execute the step of validating the detection of the fiducial mark. The steps of validating the detection of the fiducial mark are as follows: when the aforementioned positioning scale moves from a state spanning the detection range of two adjacent aforementioned position detection parts to one of the When the detection range of the position detection unit is outside, the detection of the aforementioned reference mark by the other position detection unit is enabled.

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