TW202334512A - System for a chemical and/or electrolytic surface treatment of a substrate - Google Patents

Abstract

The disclosure relates to a system for a chemical and/or electrolytic surface treatment of a substrate comprises a catholyte chamber, an anolyte chamber, a distribution body, and a catholyte outlet. The distribution body is arranged in the catholyte chamber and the catholyte chamber is separated from the anolyte chamber by means of a membrane, wherein the membrane is tilted relative to the distribution body. The distribution body comprises jet openings for distributing a catholyte onto the substrate to be treated and drain openings for draining the catholyte out of a reaction space between the distribution body and the substrate. The catholyte outlet is arranged at the catholyte chamber in an eccentric position.

Description

Systems for chemical and/or electrolytic surface treatment of substrates

The present disclosure relates to a system for chemical and/or electrolytic surface treatment of a substrate.

When performing chemical and/or electrolytic surface treatments of a substrate (especially electroplating processes in the microelectronics industry), it becomes increasingly important to avoid chemical electrolyte mixtures that are consumed by side reactions rather than being available for the deposition process itself. These chemical electrolytes Fluid mixtures can be complex and expensive and often contain additives that are sensitive to oxidation. These side reactions, which result in expensive electrolyte losses and other problems (e.g., increased chemical waste), are often attributed to contact of electrolyte additives with the anode or (less often considered) contact of the electrolyte with air (which contains oxygen) The oxidation process.

This problem is particularly acute for certain plating processes, such as gold (Au), SnAg, Cu and/or other metal plating, in which expensive chemical electrolyte mixtures are used. Contains additive molecules that are sensitive to oxidation. These additives can oxidize and become ineffective when in contact with the anode or even air (which contains oxygen).

At the same time, performing surface treatments in the microelectronics industry, such as electroplating processes, to the required standards means achieving extremely uniform deposition patterns over the entire surface area of the substrate as quickly as possible.

In many cases, complex and expensive equipment must be designed and reliably constructed, operated and maintained to ensure adequate distribution of the plating electrolyte and distribution of current to the surface to achieve high process speeds, especially if high uniformity is to be achieved at the same time. In sexual situations. For example, to achieve this purpose, known systems are generally designed to ensure, inter alia, a good rotationally symmetrical discharge of the electrolyte from the coating chamber.

However, hardware features installed in the plating chamber to improve the desired plating uniformity and plating speed, such as an HSP (high speed plating) system, symmetrical electrolyte drainage system or dual electrolyte (anolyte and catholyte) ) plating system, which can result in the plating chamber having exceptionally large external dimensions.

Therefore, in terms of deposition uniformity even at high speeds and/or protection of the electrolyte mixture, it may be desirable to provide an improved system for chemical and/or electrolytic surface treatment of a substrate, and/or a structural The shape allows for a more compact size and/or simplified configuration of the system compared to prior art systems.

One or more of these problems are solved by the subject matter of the independent technical solution of the present disclosure, with other embodiments being incorporated into the dependent technical solution.

A system for chemical and/or electrolytic surface treatment of a substrate includes a catholyte chamber, an anolyte chamber, a distribution body and a catholyte outlet. The distribution main system is arranged in the catholyte chamber and the catholyte chamber is separated from the anolyte chamber by a diaphragm, wherein the diaphragm is inclined relative to the distribution main body. The separator can be tilted to incorporate and remove air bubbles generated at the anode. The removal of air bubbles is supported by anolyte flow. The distribution body includes: a spray opening for distributing a catholyte onto the substrate to be processed; and a discharge opening for discharging the catholyte from a reaction space between the distribution body and the substrate. . The catholyte outlet is arranged in an eccentric position of the catholyte chamber.

The advantages of this configuration are that due to the synergistic effect of the claimed features the system allows ensuring deposition uniformity even at high speeds and protecting the electrolyte mixture (i.e. anolyte and catholyte) and simplifying the system and/or Reduce system size. The eccentric configuration allows for simplification of the system. Desirable uniformity can be provided especially in conjunction with other features. Furthermore, the use of separators allows for proper separation of the anolyte and catholyte zones. Especially when combined with other features, diaphragms can allow optimal processing in terms of uniformity and speed, especially when used with injection openings and discharge openings. Thus, a combination of the claimed features may synergistically provide a configuration that is simultaneously desirable in terms of system size/complexity and uniform and high-speed processing.

Chemical and/or electrolytic surface treatment of a substrate may include an electroplating process, specifically electroplating of gold (Au), SnAg, Cu and/or other metals.

The substrate may include a conductor plate, a semiconductor substrate, a thin film substrate, a substantially plate-shaped metal or metallized workpiece, or the like. The substrate may be held in a substrate holder.

In the case of electrolytic surface treatment of a substrate, the substrate and the anode are connected via a current supply unit to primarily function as the cathode and the anode, respectively.

Anolyte and catholyte are liquids that provide the function of an electrolyte.

The term "membrane" can be understood as a selective barrier that allows the passage of certain parts (small molecules, ions, other small particles, etc.) but prevents or at least reduces the passage of other parts.

When the system is configured for its intended use, the membrane can be tilted relative to a horizontal plane. When the system is configured for the intended use, the allocation body may be configured horizontally. This is an optional embodiment. In this disclosure, this means that the injection openings and the discharge openings are arranged in a horizontally arranged array. This is an optional embodiment. When the system is configured for the intended use, in particular when the main distribution system is configured horizontally, the injection openings and/or the discharge openings may be configured to extend vertically. When the system is configured for its intended use, particularly in a horizontal configuration, the system may be configured to hold a substrate parallel to the dispensing body.

When the system is configured for the intended use, the eccentric position may refer to a center of the distribution body, especially a centerline extending vertically. The eccentric position may refer to a center of the distribution body, in particular a center line extending in a direction perpendicular to the longitudinal direction of the distribution body. When the distribution body has a cylindrical shape, the center of the eccentricity may be the cylindrical axis.

The separator may be a permeable ion-selective anode separator. It can be configured to allow ionic communication between the anode and cathode regions of the system while preventing certain particles or gas bubbles from the anode region (such as those generated at the anode) from entering the catholyte and reaching the substrate, and/ Or prevent specific particles from the cathode region (such as particles present in the catholyte) from entering the anode region and reaching the anode. Nonetheless, the separator allows the transmission of electrical current and supplies metal ions to aid the efficiency of surface treatment. However, when combined with other claimed features, the surface treatment using a separator can be synergistically improved.

The eccentric configuration provides a simpler/less complex system and allows for more robust and reliable catholyte injection from the catholyte chamber, and in particular allows for lower manufacturing costs. In addition, the asymmetric electrolyte injection allows the plating chamber to have an ultra-compact structure. Another factor that allows an ultra-compact construction of the electroplating chamber is a special configuration of the distribution body in terms of resistivity, which can be based on a geometric optimization of the electrical path through the distribution body. Use of this system may result in non-uniformity unless combined with other claimed features.

The spray opening allows a particularly uniform distribution of the catholyte towards the substrate surface through the spray opening, especially when combined with a drain hole and optionally a drain ring.

Furthermore, the drain hole and optionally the drain ring, especially together with the inclined diaphragm, allow efficient use of the above-mentioned eccentric catholyte outlet.

It can thus be seen that the claimed features, although each having certain advantages of its own, may synergistically provide a further improvement.

The catholyte chamber may have a lateral side extending substantially perpendicularly to a longitudinal direction of the distribution body, and the catholyte outlet may be disposed in the lateral side of the catholyte chamber.

For example, the lateral side may be a side wall of the catholyte chamber.

The longitudinal direction of the distribution body may be one of the directions along which the injection openings and/or the discharge openings are arranged. When the distribution main system is configured horizontally, the longitudinal direction may extend horizontally.

When the system is configured for its intended use, the catholyte outlet may be arranged below the distribution body, in particular in one of the catholyte chambers/the lateral sides. In other words, the catholyte outlet can be arranged between the distribution body and the membrane, in particular in one of the catholyte chambers/the lateral side. More specifically, when the system is configured for its intended use, the catholyte outlet may communicate with the catholyte chamber at a location underneath the distribution body, or in other words, the catholyte outlet may be at a location between the distribution body and the separator. The location is connected with the catholyte chamber.

A cross-section of the catholyte chamber may have a wedge shape.

This means that the height of the catholyte chamber increases from one side of the catholyte chamber to the opposite side of the catholyte chamber. The wedge shape may result, at least in part, from the tilted configuration of the diaphragm.

When configured for the intended use, the catholyte chamber may have a wedge shape and be configured in such a way that the lower end of the catholyte chamber tilts out from a horizontal position.

An advantage of this configuration may be that the catholyte can be easily collected at one end of the wedge (for example, at the lowest point of the catholyte chamber for draining the catholyte).

Therefore, only one outlet can be used for efficient discharge.

A cross-section of the wedge-shaped catholyte chamber may have a longer lateral side and a shorter lateral side, and the catholyte outlet may be disposed in the longer lateral side of the catholyte chamber.

In particular, the catholyte outlet may be disposed at the lower end of the longer lateral side when the system is configured for the intended use.

As an example, when the system is configured for its intended use, the upper end of the catholyte chamber may be configured horizontally. Therefore, the longer lateral sides of the catholyte chamber will extend further downward than the shorter lateral sides.

An advantage of this configuration may be that the catholyte can be easily collected at one point in the catholyte chamber (for example, at the lowest point of the catholyte chamber for draining the catholyte).

Therefore, only one outlet can be used for efficient discharge.

The catholyte outlet may be arranged in a non-rotationally symmetrical position at the catholyte chamber.

The axis of non-rotational symmetry with which the position is located may be an axis orthogonal to the surface of the substrate and extending through the center of the substrate. This means that the catholyte outlet does not need to be configured and arranged so that the catholyte can exit the chamber evenly around the substrate. For example, the catholyte outlet need not be annular. Rather, the outlet may be configured and arranged so that it is located only on one side of the chamber for the catholyte. This simplifies the configuration of the entire system.

In known systems, this configuration would not have allowed the required uniformity. However, the system of the present disclosure still allows for uniform deposition because the catholyte flows in through the drain holes of the distribution body by spraying and draining.

The catholyte chamber may include a discharge ring disposed around the distribution body to discharge the catholyte from the reaction space between the distribution body and the substrate.

This means that a portion of the catholyte flow will be discharged through the discharge ring. Thus, as an example, the drain ring can be used as an overflow to maintain a constant catholyte level in the reaction space and to vent any air bubbles generated or transported in the reaction space. This exhaust method can be supported by a rotating substrate holder.

The discharge openings and/or the discharge ring may be configured to discharge the catholyte substantially perpendicular to a surface of a substrate to be processed.

Vertical discharge can be particularly efficient at removing catholyte from the reaction space, thereby further improving uniformity.

In particular, such a configuration of the drain opening and/or drain ring may be used with a system configured such that the substrate is configured horizontally when the system is configured for its intended use. In that case, the opening and/or drain ring can drain the catholyte in a vertical direction. By this, the discharge is optimally assisted by gravity.

The spray openings may be configured to distribute the catholyte substantially vertically onto the substrate to be processed. This allows a particularly uniform surface treatment result. An even more uniform result can be achieved by using a rotating substrate holder.

The discharge openings may extend from a substrate-facing surface of the distribution body to a rear surface of the distribution body opposite the substrate-facing surface.

This means that the catholyte passes directly through the distribution body to an area where it can be easily collected and/or discharged.

The injection openings may extend only partially into the distribution body from the substrate-facing surface of the distribution body and lead to at least one catholyte inlet arranged at a lateral side of the distribution body.

This configuration allows an optimal supply of catholyte to the injection openings and therefore allows a high uniformity of surface treatment.

The catholyte chamber may include a protective gas system to provide a protective gas curtain between the catholyte and the surrounding atmosphere.

For example, the protective gas system may include a gas inlet, in particular several gas inlets arranged in a common plane so as to face each other. The or each gas inlet may be configured to introduce gas into the area where a protective gas curtain will be formed.

The protective gas system may also include an exhaust device for the gas.

For example, nitrogen can be used as a protective gas. However, other types of gases may be used, in particular gases that protect the chamber from the ingress of oxygen from the surrounding atmosphere.

By using a protective gas system, the catholyte is protected from degradation, especially from oxidation or other chemical reactions. In particular, by using a protective gas system, oxygen-sensitive additives in the catholyte can be effectively protected from the effects of the oxidizing composition.

The system may further include: a catholyte circulation system for circulating the catholyte in the catholyte chamber; and an anolyte circulation system for circulating the anolyte in the anolyte chamber, wherein The catholyte circulation system is separate from the anolyte circulation system.

The circulation system may include storage tanks for the catholyte and anolyte and delivery devices (eg, pumps) that drive the catholyte and anolyte to circulate through the system. The use of separate circulation systems will ensure reliable separation of catholyte and anolyte throughout the system. In addition, this circulation ensures a bubble separation in the anolyte/cathodeliquid storage tank and in the built-in bubble separator upstream of the anolyte/catholyte storage tank.

The membrane may be electrically and metal ion permeable. This allows efficient surface treatment.

Switchable spaced apart anodes may be provided, configured, and configured to allow the electric fields of the anodes to be configured to the size of the substrate. The anodes can be configured for one, two, or more different substrate sizes.

The anolyte chamber may include at least one inner anolyte inlet, optionally additional inner anolyte inlets or outer anolyte inlets, and at least one anolyte outlet, which inlets and outlets are selectable to adjust to different sized substrates. One of the anolyte flows. In other words, there may be multiple inlets and/or outlets, for example different inlets for different anolyte zones, especially configured to allow independent actuation of such anolyte zones.

At least one anolyte outlet may be, for example, located at the highest point in the anolyte chamber. That is, for example, the anolyte outlet may be configured to ensure that potential gas bubbles are collected at the highest point during operation. In particular, the system can be configured such that, for example, gas bubbles generated primarily by the anode can be removed through the anolyte outlet, for example, supported by a circulating anolyte flow. Alternatively or additionally, as appropriate, an anolyte outlet may be located at the lowest point of the anolyte chamber. That is, an anolyte outlet may be configured to enable removal of potential particles from the anolyte chamber. Utilizing the above features, bubbles and/or particles can be easily removed from the anolyte chamber. The high points and low points each refer to one configuration of the system for a given operation.

For example, an inner anolyte inlet may be positioned closer to the center of the anolyte chamber than an outer anolyte inlet. For example, the anolyte outlet may be disposed at a position opposite the outer anolyte inlet. Therefore, when anolyte enters through the inner anolyte inlet, it will cover a shorter distance en route than when the anolyte enters through the outer anolyte inlet and into the anolyte outlet. This means that by selecting an inner anolyte inlet or an outer anolyte inlet, the anolyte flow to substrates of different sizes can be adjusted.

The system can have a height ranging from 50 mm to 350 mm.

In one example, the system may have a height in the range of 50 mm to 80 mm, preferably 60 mm to 70 mm. This allows for a particularly compact overall arrangement and at the same time, due to the configuration as specified in this disclosure, reliable protection of the anolyte and catholyte as well as fast and uniform surface treatment. This height refers to the height of the system when configured for its intended use.

In one example, such as where pellets (eg Cu, SnAg) are used, the system may have a height in the range from 200 mm to 350 mm, especially 230 mm to 260 mm.

In another embodiment, for example where inert anodes are used, the system may have a height ranging from 50 mm to 200 mm, more preferably from 80 mm to 120 mm.

For example, the height may refer to the combined height of the anolyte chamber, catholyte chamber, and reaction space.

The system may be a modular system and one or more components of the system may be provided in a rapidly changing configuration, which allows efficient adaptation of the system, for example, to different substrate sizes or different process requirements. For example, a removable funnel may be provided at the anode. When configuring two or more substrates of different sizes, an optional funnel can be used between the segmented anodes to direct the electric field inside the anode chamber.

It will be understood that a preferred embodiment of the present disclosure may also be any combination of dependent technical solutions and independent technical solutions.

These and other aspects of the present disclosure will be apparent from and elucidated with reference to the embodiments set forth hereinafter.

1a and 1b schematically and exemplarily show one embodiment of a system 10 for chemical and/or electrolytic surface treatment of a substrate 11 according to the present disclosure. When the system is in use, the substrate 11 may be held in a substrate holder, which is not shown here for illustration and is not part of the system of the present disclosure.

The system includes a catholyte chamber 12 for catholyte 13 and an anolyte chamber 14 for anolyte 15 . The catholyte chamber 12 is separated from the anolyte chamber 14 by a diaphragm 18 arranged in the catholyte chamber 12 and inclined relative to the distribution body 16 . For example, a membrane permeable to electrical current and metal ions may be used as membrane 18 .

It should be noted that in the present disclosure, the anolyte chamber may have one anolyte zone or may have multiple anolyte zones, such as with separated anodes and funnels between the anolyte zones. When the anolyte chamber has multiple anolyte zones, the zones can be configured to activate independently of each other. For example, there can be an inner zone and an outer zone, and the inner zone can be enabled independently of the outer zone, for example, the inner zone can be enabled when the outer zone is deactivated; or when the outer zone is deactivated. When the zone is activated, the inner zone can be activated. In other words, the system may be configured for selective activation of one of the inner and outer zones, such that the inner and outer zones may be activated together or independently of each other based on an automatic selection and/or user selection. Start. For example, the inner zone can be selectively enabled alone or together with the outer zone. There may be multiple inlets and/or outlets, for example different inlets for different anolyte zones, especially configured to allow independent actuation of such anolyte zones.

In the example illustrated in Figure 1a, the anolyte chamber 14 is shown as including an inner anolyte inlet 14a, an outer anolyte inlet 14b, and an anolyte outlet 14c, which inlets and outlets are optionally oriented. Anolyte 15 flows through one of the substrates of different sizes. Different anode zones may be filled with pellets, which may be Cu pellets or SnAg pellets, for example.

For example, in this embodiment, a cross section of the catholyte chamber 12 has a wedge shape. For example, in this embodiment, the cross-section of the wedge-shaped catholyte chamber 12 has a longer lateral side 12a and a shorter lateral side 12b. However, catholyte chamber 12 may have other cross-sectional shapes.

The system further includes a catholyte outlet 17. The catholyte outlet 17 is arranged in an eccentric position 20 in the catholyte chamber 12 . More specifically, in this embodiment, the catholyte outlet 17 is disposed in one of the lateral sides of the catholyte chamber 12 , as an example in the longer lateral side 12 a of the catholyte chamber 12 . The catholyte outlet 17 is also arranged in a non-rotationally symmetric position 20 in the catholyte chamber 12 . However, other configurations are envisioned.

As can be seen from this figure, when the system is configured for its intended use, the catholyte outlet 17 can be arranged at a location underneath the distribution body 16, in particular in one of the lateral sides of the catholyte chamber. In other words, the catholyte outlet 17 can be arranged between the distribution body 16 and the membrane 18 , in particular in one of the lateral sides of the catholyte chamber. More specifically, when the system is configured for its intended use, the catholyte outlet 17 may communicate with the catholyte chamber at a location below the distribution body 16 or, in other words, the catholyte outlet 17 may communicate with the diaphragm between the distribution body 16 and the diaphragm. A position between 18 is connected with the catholyte chamber.

Catholyte chamber 12 optionally includes a protective gas system 12d to provide a protective gas curtain between the catholyte and the surrounding atmosphere. Protective gas can also be injected into the anolyte storage tank and catholyte storage tank.

Protective gas system 12d may be configured to provide a protective gas curtain between the catholyte and the surrounding atmosphere. The protective gas system 12d may include an inlet for the protective gas (eg, for nitrogen) and an outlet for the protective gas and/or other gases (eg, gases formed as part of the process).

As mentioned above, the system further includes a distribution body 16 disposed in the catholyte chamber 12 .

A reaction space 19 is arranged between the distribution body 16 and the substrate 11 .

The distribution body 16 includes a spray opening 16 a for distributing the catholyte 13 onto the substrate 11 to be processed. In particular, the spray openings 16a may be configured to distribute the catholyte 13 substantially vertically onto the substrate 11 to be processed. However, directions away from the vertical are conceivable.

In Figure 1a, the injection opening 16a is illustrated as extending only partially into the distribution body 16 from a substrate facing surface 16c of the distribution body 16 and leading to a catholyte inlet 16e disposed at one lateral side 16f of the distribution body 16.

The distribution body further includes a discharge opening 16 b for discharging the catholyte 13 from the reaction space 19 between the distribution body 16 and the substrate 11 .

In Figure la, the discharge opening 16b is shown extending from one of the substrate facing surfaces 16c of the dispensing body 16 to a rear surface 16d of the dispensing body 16 opposite the substrate facing surface 16c. However, other configurations are envisioned.

Discharge opening 16b may be configured to discharge catholyte 13 substantially perpendicularly to a substrate surface 11a to be processed. However, directions away from the vertical are conceivable.

The above-mentioned lateral sides 12a and 12b of the catholyte chamber 12 may extend substantially perpendicular to the substrate-facing surface 16c.

One longitudinal direction 21 of the dispensing body 16 is indicated in Figure 1a by a dashed line. In this particular example, the above-mentioned lateral sides 12 a and 12 b of the catholyte chamber 12 may extend substantially perpendicularly to the longitudinal direction 21 of the distribution body 16 .

In Figure 1a, system 10 is shown by way of example only, having a catholyte chamber 12 including a discharge disposed about distribution body 16 to discharge catholyte 13 from reaction space 19 between distribution body 16 and substrate 11 Ring 12c. Discharge ring 12c is configured to discharge catholyte 13 substantially perpendicularly to a substrate surface 11a to be processed.

Optionally, system 10 may include: a catholyte circulation system 24 for circulating catholyte 13 in catholyte chamber 12; and an anolyte circulation system 25 for circulating anolyte 15 in anolyte chamber 14. . As illustrated in Figure 1a, the circulation systems may include a catholyte tank 24a and an anolyte tank 25a, as well as (not illustrated) pumps or other delivery devices. The arrow 24b only schematically illustrates a flow direction of the catholyte, and the arrow 25b illustrates a flow direction of the anolyte. The catholyte circulation system 24 and the anolyte circulation system 25 are separate.

In the context of this content, it should be noted that since the 3D system is illustrated in 2D, one inlet for the anolyte overlaps with one for the catholyte in each figure. That is, an inlet for the anolyte (flow direction indicated by arrow 25b) is shown arranged in front of an inlet for catholyte (flow direction indicated by arrow 24b) in the viewing direction.

Figure 1b shows a system similar to that described above in the context of Figure 1a. The presence and movement of bubbles 27 are illustrated in Figure 1b. Furthermore, it can be seen that the catholyte and anolyte do not completely fill each tank, so there is a liquid level of 28 in each tank. As mentioned above, protective gas can also be injected into the anolyte and catholyte tanks. In this example, the injection of _N2 is indicated by the arrow. The air bubbles are released from the tank through a separate vent. Also shown in Figure Ib is an exemplary pump 29 for pumping the catholyte and anolyte and an inline gas extractor 30 for removing air bubbles.

Figure 2 shows schematically and exemplarily an enlarged view of one of the parts of the system of Figure 1a or Figure 1b. Specifically, FIG. 2 is used to provide an enlarged view of a portion of the system including the distribution body 16 and the diaphragm 18 . A diaphragm carrier plate 18a is also indicated. It should be noted that the membrane can be supported in two directions, with the catholyte chamber 12 including a support plate which in a given operation serves as an upper support.

Figures 3a-3c schematically illustrate catholyte and anolyte flow through a system (specifically, for purposes of illustration, through the system of Figure 1a or Figure 1b) in accordance with the present disclosure. As discussed above, the anolyte chamber 14 may include an inner anolyte inlet 14a, an outer anolyte inlet 14b, and an anolyte outlet 14c, which inlets and outlets are selectable to adjust an anode to different sizes of substrates. Liquid 15 flows. In the case of Figure 3a, the inner anolyte inlet 14a is selected, whereas in Figure 3b the inner anolyte inlet and the outer anolyte inlet are jointly selected.

It should be noted that in order to avoid a cluttered view, only the catholyte flow from the point where the catholyte leaves the reaction space is shown in Figures 3a and 3b. Figure 3c shows catholyte flow into and through the distribution body.

It should be noted that the systems of Figures 1-3 also include an anode and a cathode which are omitted to avoid clutter.

It should be noted that in preferred embodiments, the cathode size is generally chosen to match the anode size and wafer size.

Figure 4 schematically and exemplarily shows a cross-sectional side view of a system for chemical and/or electrolytic surface treatment of a substrate according to an embodiment. This system has a similar configuration to the system shown in Figures 1 to 3c. However, the height 26 is smaller than in these figures. This is used to illustrate that the claimed system 10 can have a particularly compact shape.

As an example, system 10 may have a height 26 in a range of 50 mm to 80 mm, preferably 60 mm to 70 mm. However, other sizes are envisioned.

As an example, system 10 may have a height 26 in a range of 50 mm to 350 mm. In one embodiment, for example where pellets (eg Cu, SnAg) are used, the height may preferably range from 200 mm to 350 mm, more preferably from 230 mm to 260 mm. In another example, where an inert anode is used, the height may preferably be in the range of 50 mm to 200 mm, more preferably 80 mm to 120 mm.

For example, the height may refer to the combined height of the anolyte chamber, catholyte chamber, and reaction space.

Although the present disclosure has been illustrated and described in detail in the drawings and the foregoing description, such illustrations and descriptions are to be considered illustrative or illustrative and not restrictive. The present disclosure is not limited to the disclosed embodiments. Based on a study of the drawings, the disclosure and the accompanying technical solutions, those skilled in the art can understand and implement other variations of the disclosed embodiments when practicing a claimed disclosure.

In the scope of the patent application, the word "comprising" does not exclude other elements or steps, and the indefinite article "a (a) or (an)" does not exclude the plural meaning. The fact that particular measures are cited in mutually different sub-technical solutions does not indicate that a combination of these measures cannot be used to advantage. Any element symbols in the claimed scope should not be construed as limiting the scope.

10:System 11:Substrate 11a: To treat the substrate surface 12: Catholyte chamber/wedge-shaped catholyte chamber 12a: Longer lateral side/transverse side 12b:Shorter lateral side/lateral side 12c: Emission ring 12d: Protective gas system 13: Catholyte 14:Anolyte chamber 14a:Inner anolyte inlet 14b: External anolyte inlet 14c: Anolyte outlet 15:Anolyte 16: Distribution subject 16a: Jet opening 16b: Discharge opening 16c: Facing the substrate surface 16d: rear surface 16e: Catholyte inlet 16f: Lateral side 17: Catholyte outlet 18: Diaphragm 18a: Diaphragm carrier plate 19:Reaction space 20: Eccentric position/non-rotationally symmetrical position 21:Portrait direction 24: Catholyte circulation system 24a: Catholyte tank 24b:arrow 25:Anolyte circulation system 25a: Anolyte tank 25b:arrow 26:Height 27: Bubbles 28:Liquid level height 29: Exemplary pump 30: Built-in gas extractor

Exemplary embodiments of the present disclosure will be described below with reference to the accompanying drawings:

Figure 1a schematically and exemplarily shows a cross-sectional side view of a system for chemical and/or electrolytic surface treatment of a substrate according to an embodiment;

Figure 1b schematically and exemplarily shows a cross-sectional side view of a system for chemical and/or electrolytic surface treatment of a substrate according to an embodiment;

Figure 2 shows schematically and exemplarily an enlarged view of one of the parts of the system of Figure 1a or Figure 1b;

Figures 3a to 3c schematically illustrate catholyte and anolyte flow through the system of Figure 1a or Figure 1b;

Figure 4 schematically and exemplarily shows a cross-sectional side view of a system for chemical and/or electrolytic surface treatment of a substrate according to an embodiment.

10:System

11:Substrate

11a: To treat the substrate surface

12: Catholyte chamber/wedge-shaped catholyte chamber

12a: Longer lateral side/transverse side

12b:Shorter lateral side/lateral side

12c: Emission ring

12d: Protective gas system

13: Catholyte

14:Anolyte chamber

14a:Inner anolyte inlet

14b: External anolyte inlet

14c: Anolyte outlet

15:Anolyte

16: Distribution subject

16a: Jet opening

16b: Discharge opening

16c: Facing the substrate surface

16d: rear surface

16f: Lateral side

17: Catholyte outlet

18: Diaphragm

19:Reaction space

20: Eccentric position/non-rotationally symmetrical position

21:Portrait direction

24: Catholyte circulation system

24a: Catholyte tank

24b:arrow

25:Anolyte circulation system

25a: Anolyte tank

25b:arrow

27: Bubbles

28:Liquid level height

29: Exemplary pump

30: Built-in gas extractor

Claims (15)

A system (10) for chemical and/or electrolytic surface treatment of a substrate (11), comprising: a catholyte chamber (12), an anolyte chamber (14), a distribution entity (16), and a catholyte outlet (17), wherein the distribution body (16) is arranged in the catholyte chamber (12), The catholyte chamber (12) is separated from the anolyte chamber (14) by a diaphragm (18), wherein the diaphragm (18) is inclined relative to the distribution body (16), The distribution body (16) includes: a spray opening (16a) for distributing a catholyte (13) onto the substrate (11) to be processed; and a discharge opening (16b) for distributing the catholyte (13). 13) is discharged from a reaction space (19) between the distribution body (16) and the substrate (11), and The catholyte outlet (17) is arranged in an eccentric position (20) of the catholyte chamber (12). The system (10) of claim 1, wherein the catholyte chamber (12) has a transverse side (12a, 12b) extending substantially perpendicularly to a longitudinal direction (21) of the distribution body (16), And the catholyte outlet (17) is arranged in the lateral side (12a, 12b) of the catholyte chamber (12). The system (10) of any one of claims 1 or 2, wherein a cross-section of the catholyte chamber (12) has a wedge shape. The system (10) of claim 2, wherein the wedge-shaped catholyte chamber (12) has a cross-section with a longer lateral side (12a) and a shorter lateral side (12b), and wherein the catholyte outlet (17) is arranged in the longer lateral side (12a) of the catholyte chamber (12). The system (10) of any one of claims 1 or 2, wherein the catholyte outlet (17) is arranged in a non-rotationally symmetrical position (20) at the catholyte chamber (12). The system (10) of any one of claims 1 or 2, wherein the catholyte chamber (12) includes a discharge ring (12c) arranged around the distribution body (16) to distribute the catholyte (13) is discharged from the reaction space (19) between the distribution body (16) and the substrate (11). If the system (10) of either request item 1 or 2, wherein the discharge openings (16b) and/or the discharge ring (12c) are configured to discharge the catholyte (13) substantially perpendicularly to a substrate surface (11a) to be processed, and/or The discharge ring (12c) is configured as an overflow port for the catholyte to flow out from the reaction space (19) and/or is configured as an overflow port for generating or transporting bubbles in the reaction space (19). A vent, and in particular wherein the system (10) includes a rotating substrate holder. The system (10) of any one of claims 1 or 2, wherein the spray openings (16a) are configured to distribute the catholyte (13) substantially vertically onto the substrate (11) to be processed . The system (10) of claim 1 or 2, wherein the discharge openings (16b) extend from one of the substrate-facing surfaces (16c) of the distribution body (16) to behind one of the distribution bodies (16) surface (16d), the rear surface being opposite the substrate-facing surface (16c). The system (10) of any one of claims 1 or 2, wherein the spray openings (16a) extend only partially from the substrate-facing surface (16c) of the distribution body (16) to the distribution body (16) , and leads to a catholyte inlet (16e) arranged at one lateral side (16f) of the distribution body (16). The system (10) of any one of claims 1 or 2, wherein the catholyte chamber (12) includes a protective gas system (12d) to provide a protection between the catholyte (13) and the surrounding atmosphere Sexual gas curtain. The system (10) of claim 1 or 2 further includes: a catholyte circulation system (24) for circulating the catholyte (13) in the catholyte chamber (12); and a catholyte circulation system (24). An anolyte circulation system (25) for circulating the anolyte (15) in the anolyte chamber (14), specifically, wherein the catholyte circulation system (24) and the anolyte circulation system (25) are separated, wherein the catholyte circulation system (24) is configured to circulate the catholyte in a manner that promotes bubble separation in a catholyte tank, and/or the anolyte circulation system (25) is configured such that Circulating the anolyte in a manner that promotes bubble separation in an anolyte tank, and/or The system (10) includes a first bubble separator upstream of the anolyte storage tank and/or a second bubble separator upstream of the catholyte storage tank. If the system (10) of either request item 1 or 2, wherein the separator (18) is tilted to incorporate and/or remove air bubbles generated at the anode, and/or The diaphragm (18) is permeable to current and metal ions. The system (10) of any one of claims 1 or 2, wherein the anolyte chamber (14) includes at least one inner anolyte inlet (14a), at least one outer anolyte inlet (14b) and at least one anolyte outlet (14c), the inlets and outlets are selectable to adjust the flow of anolyte (15) to substrates of different sizes, In particular, wherein the anolyte outlet (14c) is configured to allow removal of gas bubbles generated at the anode, in particular by means of an anolyte circulation system (25). If the system (10) of either request item 1 or 2, wherein the system (10) has a height (26) in a range of 50 mm to 350 mm, In particular, wherein the system (10) has one of a range from 200 mm to 350 mm, especially from 230 mm to 260 mm, or a range from 50 mm to 200 mm, more especially from 80 mm to 120 mm. height(26).