TW202332947A - Self-lit display panel - Google Patents

Abstract

A self-lit display panel includes a photonic integrated circuit layer including an array of waveguides and an array of out-couplers for out-coupling portions of the illuminating light through pixels of the panel. The self-lit display panel may include a transparent electronic circuitry layer backlit by the photonic integrated circuit layer; the two layers may be on a same substrate or on opposed substrates defining a cell filled with an electro-active material. The configuration allows for chief ray engineering, zonal illuminating, and separate illumination with red, green, and blue illuminating light.

Description

Self-luminous display panel

The present disclosure relates to electro-optical devices, and in particular, to visual display panels and methods of making the same. References to related applications

This application refers to U.S. Provisional Application No. 63/288,342, which was filed on December 10, 2021 and is titled "Backplane Embedded Photonic Integrated Circuit" and was filed on December 13, 2021 and is titled "Backplane Priority of U.S. Provisional Application No. 63/288,920 for "Embedded Photonic Integrated Circuits" and U.S. Non-Provisional Application No. 17/741,393 filed on May 10, 2022, all of which are incorporated by reference in their entirety. incorporated herein.

Visual displays provide information including still images, videos, data, etc. to the viewer. Visual displays have applications in diverse fields including entertainment, education, engineering, science, professional training, advertising, to name just a few examples. Some visual displays, such as televisions, display images to several users, and some visual display systems, such as near-eye displays (NED), are intended for individual users.

Artificial reality systems typically include NEDs, such as headphones or a pair of glasses, configured to present content to a user. Near-eye displays can display virtual objects or images that combine real objects and virtual objects, such as in virtual reality (VR), augmented reality (AR) or mixed reality (MR) applications. . For example, in an AR system, a user can view images of virtual objects (e.g., computer-generated images or CGI) overlaid with the surrounding environment by looking at a "combiner" component. Wearable display assemblies are typically transparent to external light but include some light routing optics to direct display light into the user's field of view.

Since HMD or NED displays are usually worn on the user's head, a large, bulky, unbalanced and heavy display device with a heavy battery would be cumbersome and uncomfortable for the user to wear. Accordingly, head-mounted display devices may benefit from compact and efficient configurations, including efficient light sources and illuminators that provide illumination of the display panel, high-throughput collimators, and other optical components in the string of image-forming elements.

One aspect of the invention is a self-luminous display panel, which includes: an electronic circuit system layer; a photonic integrated circuit layer including a waveguide array for guiding illumination light; and a pixelated electrode layer including pixel electrodes Array; wherein the photonic integrated circuit layer includes an array of couplers coupled to the waveguide array for passing through the pixel electrode at a chief ray angle that varies spatially from one pixel electrode to another pixel electrode The array couples out part of the illumination light.

The self-luminous display panel according to aspects of the invention further includes a first substrate supporting the electronic circuit system layer, wherein the photonic integrated circuit layer is supported by the electronic circuit system layer and the pixelated electrode layer is supported by the photonic circuit system layer. Integrated circuit layer support; the self-luminous display panel further includes a via array extending from the electronic circuit system layer through the photonic integrated circuit layer between the waveguides in the waveguide array and extending to the Pixel electrode array.

The self-luminous display panel according to aspects of the present invention further includes: a second substrate opposite to the first substrate; a backplane electrode layer supported by the second substrate; the pixelated electrode layer and the backplane electrode layer; The plate electrode layer defines a unit; and an electroactive layer is located in the unit; wherein in operation, the illumination light portions propagate through the pixel electrodes, the electroactive layer, the backplate electrode layer and the second substrate in sequence .

The self-luminescent display panel according to aspects of the invention further includes a first substrate supporting the photonic integrated circuit layer, wherein the electronic circuitry layer is supported by the photonic integrated circuit layer and the pixelated electrode layer is coupled to The electronic circuit system layer.

The self-luminous display panel according to aspects of the present invention further includes: a second substrate opposite to the first substrate; a backplane electrode layer supported by the second substrate; the pixelated electrode layer and the backplane electrode layer; The plate electrode layer defines a unit; and an electroactive layer is located in the unit; wherein in operation, the illumination light portions pass through the electronic circuit system layer, the pixel electrodes, the electroactive layer, and the backplane electrode layer in sequence and the second substrate propagates.

The self-luminous display panel according to aspects of the present invention further includes: a first substrate supporting the photonic integrated circuit layer; a backplane electrode layer supported by the photonic integrated circuit layer; and a second substrate supporting the photonic integrated circuit layer. Supporting the electronic circuit system layer, the pixelated electrode layer and the backplane electrode layer define a unit; and an electroactive layer located in the unit; wherein in operation, the illumination light portions sequentially pass through the backplane electrode layer , the electroactive layer, the pixel electrodes, the electronic circuit system layer and the second substrate.

In an autoluminescent display panel according to aspects of the invention, the coupler array includes a grating formed in the waveguide array.

In a self-luminous display panel according to aspects of the invention, the gratings are tilted in a plane of the photonic integrated circuit layer to provide the spatially varying chief ray angle.

In the self-luminous display panel according to aspects of the invention, the coupler array further includes an array of nanostructures supported by the gratings to provide the spatially varying chief ray angle.

In an autoluminescent display panel according to aspects of the invention, the coupler array includes a nanoantenna array configured to provide the spatially varying chief ray angle.

In the self-luminous display panel according to aspects of the invention, the illumination light includes a plurality of color channels; each waveguide in the waveguide array is configured to transmit each of the plurality of color channels; and the coupling Each coupler in the coupler array is configured to couple out each of the plurality of color channels at substantially the same chief ray angle.

Another aspect of the invention is a self-luminous display panel including: an electronic circuitry layer; a photonic integrated circuit layer including a waveguide array for directing illumination light including a plurality of color channels; and pixelation An electrode layer including a pixel electrode array; wherein the waveguide array includes a plurality of sub-arrays, wherein each sub-array is configured to carry a specific color channel of the plurality of color channels of the illumination light; and wherein the photonic integrated circuit layer includes A coupler array coupled to the waveguide array for coupling out a portion of the illumination light through the pixel electrode array.

The self-luminous display panel according to another aspect of the present invention further includes a first substrate supporting the electronic circuit system layer, wherein the photonic integrated circuit layer is supported by the electronic circuit system layer and the pixelated electrode layer is formed by The photonic integrated circuit layer support; the self-luminous display panel further includes a via array extending from the electronic circuit system layer through the photonic integrated circuit layer between waveguides in the waveguide array and extending to the pixel electrode array.

The self-luminous display panel according to another aspect of the present invention further includes: a second substrate, which is opposite to the first substrate; a backplane electrode layer, which is supported by the second substrate, the pixelated electrode layer and The backplane electrode layer defines a unit; and an electroactive layer is located in the unit; wherein in operation, the illumination light portions sequentially pass through the pixel electrodes, the electroactive layer, the backplane electrode layer and the second Substrate spread.

The self-luminous display panel according to another aspect of the present invention further includes a first substrate supporting the photonic integrated circuit layer, wherein the electronic circuit system layer is supported by the photonic integrated circuit layer and the pixelated electrode layer coupled to the electronic circuitry layer.

The self-luminous display panel according to another aspect of the present invention further includes: a second substrate, which is opposite to the first substrate; a backplane electrode layer, which is supported by the second substrate, the pixelated electrode layer and The backplane electrode layer defines a unit; and an electroactive layer is located in the unit; wherein in operation, the illumination light portions sequentially pass through the electronic circuit system layer, the pixel electrodes, the electroactive layer, and the backplane The electrode layer and the second substrate propagate.

The self-luminous display panel according to another aspect of the present invention further includes: a first substrate supporting the photonic integrated circuit layer; a backplane electrode layer supported by the photonic integrated circuit layer; a second substrate , which supports the electronic circuit system layer, the pixelated electrode layer and the backplane electrode layer define a unit; and an electroactive layer located in the unit; wherein in operation, the illumination light portions pass through the backplane sequentially The electrode layer, the electroactive layer, the pixel electrodes, the electronic circuitry layer and the second substrate propagate.

In a self-luminous display panel according to another aspect of the invention, the waveguides of different sub-arrays of the plurality of sub-arrays are staggered and run parallel to each other in a common plane.

In a self-luminous display panel according to another aspect of the invention, the waveguides of different sub-arrays in the plurality of sub-arrays run up and down each other.

Yet another aspect of the invention is a self-luminous display panel including: an electronic circuitry layer; a photonic integrated circuit layer including a waveguide array for directing illumination light including a plurality of color channels; and pixelation An electrode layer including a pixel electrode array; wherein the waveguide array includes a plurality of sub-arrays, each sub-array coupled to a beam splitter for illuminating a specific geometric area in the pixel electrode array; and wherein the photonic integrated circuit layer includes a coupler A coupler array is coupled to the waveguide array for coupling out a portion of the illumination light through the pixel electrode array.

Although the present teachings are described in connection with various specific examples and examples, the present teachings are not intended to be limited to such specific examples. On the contrary, the present teachings cover various alternatives and equivalents, as one of ordinary skill in the art will appreciate. All statements herein reciting principles, aspects, and specific examples of the present disclosure, as well as specific examples thereof, are intended to encompass both structural and functional equivalents thereof. Additionally, it is intended that such equivalents include both currently known equivalents as well as equivalents developed in the future, that is, any elements developed that perform the same function, regardless of structure.

As used herein, the terms "first," "second," etc. are not intended to imply a sequential order, but are intended to distinguish one element from another element unless expressly stated. Similarly, the sequential order of method steps does not imply a sequential order of their performance unless expressly stated. In FIG. 1(A), FIG. 1(B), and FIGS. 2 to 4, similar numerals refer to similar elements.

Resolution, power consumption and appearance size are important performance factors in AR displays. MicroLED displays (μLEDs) have the advantage of high brightness, but the efficiency of such displays drops rapidly as pixel size decreases. Additionally, realizing a single-panel full-color μLED display can be challenging due to the different materials required for red and blue/green LEDs. Therefore, it may be necessary to use three separate μLED projectors for color display applications, resulting in three times the light engine size and weight. Another approach is to use a 2D scanning beam produced by a laser or superluminescent light-emitting diode (SLED) shining on a microelectromechanical system (MEMS) scanning reflector. However, drivers and graphics processing controllers are quite complex and power-consuming, and the overall achievable resolution can be limited by the size of the scan mirror.

Microdisplay panels based on nematic or ferroelectric liquid crystals on silicon (LCoS and FLCoS respectively) offer alternative solutions for light engines that can be used in near-eye displays, such as virtual reality or augmented reality displays. With improvements in new ferroelectric liquid crystal materials, pixel sizes smaller than 1.5 microns (down to 350 nanometers) are becoming possible. However, unlike light-emitting displays, (F)LCoS displays require additional lighting optics that add size and weight to the system, such as polarizing beam splitters.

A subsequent limitation of (F)LCoS display panels can be overcome by integrating the lighting circuitry directly onto the (F)LCoS substrate. A photonic integrated circuit (PIC) layer can be provided on the integrated circuit layer of a complementary metal oxide semiconductor (CMOS) wafer to provide a self-luminous display panel. Additionally, PLC technology may be adapted to provide so-called master light engineering capabilities. PLC technology can be used to direct the principal rays of the beams emitted by each pixel towards a common collimating element, resulting in a significant reduction in overall size and/or vignetting losses, and an increase in the overall wall-plug efficiency of the display device. Additionally, PIC technology may provide features such as area lighting of display panels for higher perceived contrast and power savings. Additionally, CMOS technology may be adapted to provide circuitry with substantially transparent pixel areas, thereby providing a wider variety of CMOS PLC lighting configurations and opening the way to transparent or translucent self-luminous displays.

According to the present disclosure, a self-luminous panel is provided, which includes: an electronic circuit system layer; a photonic integrated circuit (PIC) layer including a waveguide array for guiding illumination light; and a pixelated electrode layer including pixels Electrode array. The PIC layer includes a coupler array of portions coupled to the waveguide array for coupling out illumination light through the pixel electrode array at chief ray angles that vary spatially from one pixel electrode to the other pixel electrode.

In some embodiments, the self-luminous display panel further includes a first substrate supporting an electronic circuit system layer. The PIC layer may be supported by the electronic circuitry layer and the pixelated electrode layer by the PIC layer. The self-luminescent display panel may further include an array of vias extending from the electronic circuitry layer through the PIC layer between the waveguides in the waveguide array and to the pixel electrode array. The second substrate may be disposed relative to the first substrate. The backplane electrode layer may be supported by the second substrate, and the pixelated electrode layer and the backplane electrode layer define units. An electroactive layer can be disposed in the cell. In operation, the illumination light portion may sequentially propagate through the pixel electrode, the electroactive layer, the backplane electrode layer, and the second substrate.

In some specific examples, the self-luminous display panel further includes a first substrate supporting the PIC layer. The electronic circuitry layer can be supported by the PIC layer, and the pixelated electrode layer can be coupled to the electronic circuitry layer. The second substrate may be disposed relative to the first substrate. The backplane electrode layer may be supported by the second substrate, and the pixelated electrode layer and the backplane electrode layer define units. An electroactive layer can be disposed in the cell. In operation, the illumination light portion may sequentially propagate through the electronic circuitry layer, the pixel electrode, the electroactive layer, the backplane electrode layer, and the second substrate.

In some specific examples, the self-luminous display panel further includes: a first substrate supporting a PIC layer; a backplane electrode layer supported by the PIC layer; and a second substrate supporting an electronic circuit system layer and a pixelated electrode layer and the backplane electrode layer define the unit. An electroactive layer can be disposed in the cell. In operation, the illumination light portion may sequentially propagate through the backplane electrode layer, the electroactive layer, the pixel electrode, the electronic circuitry layer, and the second substrate.

In some embodiments, the coupler array includes a grating formed in a waveguide array. The grating can be tilted in the plane of the PIC layer to provide spatially varying chief ray angles. The coupler array may further include an array of nanostructures supported by gratings to provide spatially varying chief ray angles. In some embodiments, the coupler array includes an array of nanoantennas configured to provide spatially varying chief ray angles.

In embodiments where the illumination light includes a plurality of color channels, each waveguide in the waveguide array may be configured to transmit each of the plurality of color channels. Each coupler in the coupler array may be configured to couple out each of the plurality of color channels at substantially the same chief ray angle.

According to the present disclosure, a self-luminous display panel is provided, which includes: an electronic circuit system layer; a photonic integrated circuit (PIC) layer including a waveguide array for guiding illumination light including a plurality of color channels; and pixels. electrode layer, which includes a pixel electrode array. A waveguide array may include a plurality of sub-arrays. Each sub-array may be configured to carry a specific one of the plurality of color channels of illumination light. The PIC layer may include a coupler array coupled to a portion of the waveguide array for coupling out illumination light through the pixel electrode array.

In some embodiments, the self-luminous display panel further includes a first substrate supporting an electronic circuit system layer. The PIC layer may be supported by the electronic circuitry layer and the pixelated electrode layer by the PIC layer. The self-luminescent display panel may further include an array of vias extending from the electronic circuitry layer through the PIC layer between the waveguides in the waveguide array and to the pixel electrode array. The self-luminous display panel may further include: a second substrate opposite to the first substrate; a backplane electrode layer supported by the second substrate, the pixelated electrode layer and the backplane electrode layer defining units; and an electroactive layer, Located in the unit. In operation, the illumination light portion may sequentially propagate through the pixel electrode, the electroactive layer, the backplane electrode layer, and the second substrate.

In some specific examples, the self-luminous display panel further includes a first substrate supporting the PIC layer. The electronic circuitry layer can be supported by the PIC layer, and the pixelated electrode layer can be coupled to the electronic circuitry layer. The second substrate may be disposed relative to the first substrate. The backplane electrode layer may be supported by the second substrate, and the pixelated electrode layer and the backplane electrode layer define units. An electroactive layer can be disposed in the cell. In operation, the illumination light portion may sequentially propagate through the electronic circuitry layer, the pixel electrode, the electroactive layer, the backplane electrode layer, and the second substrate.

In some specific examples, the self-luminous display panel further includes: a first substrate supporting a PIC layer; a backplane electrode layer supported by the PIC layer; a second substrate supporting an electronic circuit system layer, a pixelated electrode layer, and A backplane electrode layer defines the cell; and an electroactive layer is located in the cell. In operation, the illumination light portion propagates through the backplane electrode layer, the electroactive layer, the pixel electrode, the electronic circuit system layer and the second substrate in sequence.

The waveguides of different sub-arrays of the plurality of sub-arrays may be interleaved and run parallel to each other in a common plane. Waveguides of different sub-arrays of the plurality of sub-arrays may travel up and down the substrate.

According to the present disclosure, a self-luminous display panel is further provided, which includes: an electronic circuit system layer; a photonic integrated circuit (PIC) layer including a waveguide array for guiding illumination light including a plurality of color channels; and A pixelated electrode layer including an array of pixel electrodes. The waveguide array includes a plurality of sub-arrays, each sub-array coupled to a beam splitter for illuminating a specific geometric area of the pixel electrode array. The PIC layer includes an array of couplers coupled to portions of the waveguide array for coupling out illumination light through the array of pixel electrodes.

Referring now to FIG. 1(A) , the self-luminous display panel 100 includes an electronic circuit system layer 102 supported by a first substrate 104, such as a CMOS circuit system layer formed on a silicon substrate. The electronic circuitry layer 102 may include electronic gates 103 for independently controlling individual pixels of the display panel 100 . The pixels of the display panel 100 are defined by a pixelated electrode layer 106 that includes a pixel electrode array 107 .

Photonic integrated circuit (PIC) layer 108 may be formed on, disposed on, and/or supported by electronic circuitry layer 102 . PIC layer 108 may include a waveguide array 109 , such as a single-mode or few-mode ridge running under pixel electrode array 107 and configured to guide illumination light 110 emitted by an optional semiconductor light source 112 optically coupled to waveguide 109 type waveguide. In this article, the term "few-mode waveguide" refers to a waveguide that supports up to 12 lateral propagation modes. The semiconductor light source 112 may be, for example, a superluminescent diode, a laser diode or an array of such diodes. PIC layer 108 supports pixelated electrode layer 106 .

PIC layer 108 may include a coupler array 111 , such as a grating coupler optically coupled to waveguide array 109 for coupling out portion 110A of illumination light 110 via pixel electrode array 107 , thereby providing display panel 100 with an auto-coupler. Body luminescence ability. In this article, the term "self-lighting" or "self-lit" means as opposed to reflective or transmissive display panels that require an external light source to illuminate the panel from the outside in order to operate. It means that the pixels of the display panel are illuminated from the inside by the internal lighting or the light guide structure. The couplers 111 are aligned with respect to the pixel electrodes 107 , for example one coupler 111 can be placed directly under one pixel electrode 107 .

In the specific example shown in FIG. 1(A) , the display panel 100 includes a second substrate 120 disposed opposite to the first substrate 104 and a backplane electrode layer 122 supported by the second substrate 120 . The pixelated electrode layer 106 and the backplane electrode layer 118 define cells 116, which are typically plane-parallel cells from 1 to 9 microns thick. An electroactive layer 124, such as a nematic or ferroelectric liquid crystal fluid layer, may fill the cells 116. Electroactive layer 124 responds to electric fields applied by pixelated electrode layer 106 and backplane electrode layer 118 . As used herein, the term "responsive to an electric field" means that the electroactive layer 124 changes its properties by applying an electric field that affects the optical properties (such as the polarization state) of the portion 110A of the illumination light 110 .

The second substrate 120 is transparent to the portion 110A of the illuminating light 110 . In the specific example illustrated, PIC layer 108 is disposed between electronic circuitry layer 102 and pixelated electrode layer 106 and electrically separates these two layers. To electrically couple the electronic gate 103 to the respective pixel electrode 107 , an array of conductive vias 114 may be provided, allowing the gate 103 of the electronic circuitry layer to apply electrical signals to the respective pixel electrode 107 . As best seen in FIG. 1(B) , via array 114 may extend from electronic circuitry layer 102 through PIC layer 108 between array waveguide 109 and pixel electrode array 107 at a distance large enough to substantially It does not interfere with the optical functions of the waveguide 109 and the coupler 111.

In operation, the illumination light portion 110A coupled out from the waveguide 109 by the coupler 111 propagates through the pixel electrode 107, the electroactive layer 124, the backplane electrode layer 122 and the transparent second substrate 120 in sequence. The optical properties of portion 110A (e.g., its polarization state) can be controlled in a spatially selective manner by applying signals to gates 103 that are electrically coupled to respective pixel electrodes 107 via vias 114 to vary the applied local electric fields to respective portions of electroactive layer 124 . The spatially varying polarization state of the outcoupled illumination light portion 110A may be converted into an optical power density distribution by a downstream polarizer, which is not shown for simplicity. The light power density distribution of the illumination light portion 110A corresponds to the image displayed by the display panel 100 .

Referring to FIG. 2 , the self-luminous display panel 200 is similar to the self-luminous display panel 100 of FIG. 1 and includes similar components. The self-luminous display panel 200 of Figure 2 includes: an electronic circuit system layer 102, which is supported by a transparent first substrate 204 (such as glass, sapphire, crystal, etc.); a PIC layer 108, which is located on the electronic circuit system layer 102; pixelation An electrode layer 106 is located on the PIC layer 108, with vias 114 electrically coupling the pixelated electrode layer 106 to the electronic circuitry layer 102 via the PIC layer 108 as described above. Cells 116 defined by pixelated electrodes 106 and backplane electrode layer 118 are filled with electroactive layer 124 . The second substrate 120 supports the backplane electrode layer 118 including the backplane electrode 122 .

The opaque substrate material may be removed in the area 202 under the pixel electrode 107 between the electronic gates 103 so that the first substrate 204 with the electronic circuitry layer 102 is transparent to incident light in the area of the pixel electrode 107 . The transparent substrate 204 and the transparent electronic circuitry layer 102 enable the self-luminous display panel 200 to be used in a variety of applications, such as and not limited to augmented reality (AR) applications, in which the light is formed by the outcoupling portion 110A of the illumination light 110 Image light needs to be combined with external light from the surrounding environment. Methods of fabricating the electronic circuitry layer 102 on the transparent substrate 204 will be considered further below.

Referring to FIG. 3 , a self-luminous display panel 300 is similar to the self-luminous display panel 200 of FIG. 2 and includes similar components. In the self-luminous display panel 300 of FIG. 3 , the positions of the electronic circuit system layer 102 and the PIC layer 108 in the layer stack supported by the first substrate 204 are exchanged. That is, the transparent first substrate 204 supports the PIC layer 108 and the PIC layer 108 . Layer 108 in turn supports electronic circuitry layer 102 . Such a configuration does not require vias because the pixelated electrode layer 106 can be directly coupled to the electronic circuitry layer 102, allowing the electronic circuitry gate 103 to apply electrical signals to the respective pixel electrodes 107. The overall construction is simplified because through-hole manufacturing adds many steps to the manufacturing process.

In operation, the illumination light portion 110A coupled out of the waveguide 109 by the coupler array 111 sequentially passes through the electronic circuitry layer 102 (specifically, through the region 202 that is transparent to the illumination light portion 110), the pixelated electrode The layer 106 , the electroactive layer 124 , and the backplane electrode layer 118 propagate through the second substrate 120 and the self-luminous display panel 300 . A collimator, not shown for simplicity, can receive the illumination light portion 110A and convert the image in the linear domain displayed by the self-luminous display panel 300 into an image in the angular domain. As used herein, the term "image in the angular domain" means an image in which the different elements of the image in the linear or spatial domain (i.e., the pixels of the image displayed by the display panel) are represented by the angles of the corresponding rays of the image light. These The light rays carry optical power levels and/or color compositions that correspond to the brightness and/or color values of the image pixels.

Referring now to FIG. 4 , a self-luminous display panel 400 is similar to the self-luminous display panel 300 of FIG. 3 and includes similar components. In the self-luminous display panel 400 of FIG. 4 , the electronic circuit system layer 102 is moved to another substrate; in other words, the first substrate 204 supports the PIC layer 108 supporting the backplane electrode layer 118 , while the second substrate 120 supports the electronic circuit system. Layer 102, the electronic circuitry layer supports the pixelated electrode layer 106 (shown in reverse in Figure 4). The pixelated electrode layer 106 and the backplane electrode layer 118 define cells 116 in which the electroactive layer 124 is disposed, as in the previous embodiment.

In operation, the illumination light portion 110A coupled out from the waveguide 109 through the plurality of couplers 111 sequentially passes through the backplate electrode 122, the electroactive layer 124, the pixel electrode 107, and the electronic circuit system layer 102 (more specifically, propagates through the transparent area 202) and the second transparent substrate 120, and further to the unillustrated collimation/imaging optics.

Referring to Figure 5, a method 500 of manufacturing a self-luminous display panel of the present disclosure includes forming (502) an electronic circuitry layer on a sacrificial substrate, such as a CMOS electronic circuitry layer on a silicon substrate. Depending on the expected display operation requirements, the electronic circuit system layer may include pixel control gates, connections, vias, pixelated electrode layers including pixel electrode arrays, etc. The formed electronic circuitry layer is bonded (504) to a first substrate, such as a glass or sapphire transparent substrate, from opposite sides of the electronic circuitry layer. The sacrificial substrate is then removed (506), such as by etching.

Opaque material from under the pixelated electrodes can be cleared (508) and the resulting structure can be backfilled or planarized (510) to form transparent areas, such as the self-luminous display panel 200 of Figure 2, the self-luminescent display panel 300 of Figure 3 Or the area 202 under the pixel electrode of the self-luminous display panel 400 in FIG. 4 . A PIC layer may then be provided (512). The PIC layer may be disposed on a planarized electronic circuitry layer (the "EC layer" in FIG. 5), such as in the self-luminous display panel 300 of FIG. 3. The electronic circuitry layer may be placed on another substrate such as a unit in, for example, self-luminous display panel 400 of FIG. 4 . As explained above with reference to Figures 1-4, the PIC layer may be formed to include an array of waveguides for guiding the illumination light, and an array of external couplers coupled to the array of waveguides for coupling out portions of the illumination light. The cell may then be formed (514) by providing a second substrate in fixed spaced relationship with the first substrate, the second substrate supporting the backplane electrode layer. The cells are defined by electrodes facing the cells in the display panels of Figures 1-4. The cell may then be filled (516) with an electroactive material such as, for example, a nematic or ferroelectric LC fluid.

In some embodiments, such as in the self-luminescent display panel 200 of FIG. 2 and the self-luminescent display panel 300 of FIG. 3 , the PIC layer is formed on the first substrate so as to face the cells when the cells are formed. In such embodiments, the electronic circuitry layer may be disposed between the PIC layer and the electroactive material. In some embodiments, such as in the self-luminous display panel 400 of FIG. 4 , the PIC layer may be formed on the second substrate, facing the cells as they are formed.

The self-luminous properties obtained by the PIC structure with waveguide and coupler arrays allow the chief rays of the individually coupled illumination light portions to be directed to predefined positions, for example to collimating elements (such as collimating lenses, so-called principal rays). light engineering) location. As used herein, the term "chief ray" refers to the ray that carries the majority of the emitted light energy compared to other rays in the ray fan representing the beam. It should be noted that the term "chief ray" as defined herein does not necessarily propagate through the center of the optical system.

Referring to FIG. 6A for a non-limiting illustrative example, a display device 650A shown in partial view includes a self-illuminating display panel 600A optically coupled to a collimator 630. The self-luminescent display panel 600A includes a pixel array defined by respective pixel electrodes, as described above with reference to the self-luminescent display 100 of (A) of FIG. 1 , the self-luminescent display 200 of FIG. 2 , and the self-luminescent display of FIG. 3 respectively. 300 and the self-luminescent display 400 of FIG. 4 . Each pixel emits a cone of light to be collimated by co-collimator 630 into a collimated beam. Collimator 630 is positioned a focal distance away from the self-luminous display panel 600A. In other words, the self-luminous display panel 600A is disposed in the focal plane 632 of the collimator 630 . The angle of the collimated beam about the x-axis depends on the x-coordinate of the emitting pixel. For example, pixel 601A of autoluminescent display panel 600A emits a light cone, or divergent beam 602A, which is collimated by collimator 630 at an angle β about the X-axis into collimated beam 604A.

Each pixel of the self-luminous display panel 600A emits a light cone, in which the chief ray is perpendicular to the plane of the self-luminous display panel 600A or the XY plane, that is, the angle α between the chief ray and the XY plane is equal to 90 degrees. In other words, most of the light energy emitted by the pixel travels along the Z-axis as indicated by dashed line 606. It can be seen that the external rays (two external rays on each side of collimator 630) are intercepted and do not propagate through collimator 630 because in this example, collimator 630 is smaller than self-luminous display panel 600A . This will cause vignetting of the image displayed by the self-luminous display panel 600A.

Referring now to FIG. 6B , display device 650B includes a self-illuminating display panel 600B optically coupled to collimator 630 . The self-luminescent display panel 600B includes a pixel array defined by respective pixel electrodes, as described above with reference to the self-luminescent display 100 of (A) of FIG. 1 , the self-luminescent display 200 of FIG. 2 , and the self-luminescent display of FIG. 3 respectively. 300 and the self-luminescent display 400 of FIG. 4 . Each pixel emits a cone of light to be collimated by a common collimator 630, which is positioned one focal length away from the self-illuminating display panel 600B. The angle of the collimated beam about the x-axis depends on the x-coordinate of the pixel. For example, pixel 601B of self-luminous display panel 600B emits a light cone or divergent beam 602B, which is collimated by collimator 630 at an angle β about the X-axis into collimated beam 604B. The chief ray angles of the divergent light beams emitted by different pixels of the self-luminous display panel 600B depend on the X-coordinate to direct the chief ray toward the collimator 630 . For example, as in Figure 6A, divergent beam 602B is tilted and not straight. This enables the vignetting of images displayed by the self-luminous display panel 600B to be avoided or significantly reduced. It should be further noted that in the first approximation, the angle β of the collimated beam 604B is not affected by the tilt angle α of the chief ray because the angle β only depends on the pixel coordinates. The required guidance of the main ray of the light beam emitted by the pixels of the self-luminous display panel 600B can be achieved by configuring the coupler array 111 (FIG. 1(A), FIG. 2, FIG. 3, and FIG. 4). The output array is coupled to the waveguide array 109 for coupling out a portion 110A of the illumination light 110 through the pixel electrode array 107 at a chief ray angle that varies spatially from one pixel electrode 107 to the other pixel electrode 107 , e.g., to couple all of the light rays 110A. Pass through the collimator. It should be further noted that the coupler 111 may also be configured to control the cone angle of the divergent beam 602B of the outcoupled illumination light portion, ie, the angular width of the emitted light cone 602B.

A non-limiting example of a coupler 111 for any of the self-luminous display panels of the present disclosure will now be presented. Configurations can be used for key ray engineering and can be optimized for uniform illumination, exit pupil control, etc. Referring first to Figure 7A, the coupler 711A includes an etched grating structure 702A in the core 704 of the ridge waveguide of the PIC layer. The period or spacing of grating structure 702A can be selected to couple a portion of the illumination light toward the electroactive layer at a desired coupling angle. The etching depth of grating structure 702A may be spatially varied to provide spatially varying outcoupling efficiency.

In Figure 7B, the coupler 711B includes a grating structure 702B supported by a spacer layer 706 supported by a core 704 of the ridge waveguide. The period or spacing of grating structure 702B can be selected to couple a portion of the illumination light toward the electroactive layer at a desired coupling angle. The thickness of spacer layer 706 may vary spatially to provide spatially varying outcoupling efficiency.

Referring now to Figure 7C, coupler 711C is similar to coupler 711A of Figure 7A. Coupler 711C of Figure 7C includes an etched tilted grating structure 702C in the core 704 of the ridge waveguide of the PIC layer. The tilt of grating structure 702C enables changing (increasing or decreasing) the amount of light energy entering selected diffraction orders.

Referring to Figure 7D, coupler 711D is similar to coupler 711C of Figure 7C. The coupler 711D of Figure 7D includes an etched binary tilt grating structure 702D in the core 704 of the ridge waveguide of the PIC layer. The binary tilted grating structure 702D can be obtained by a series of linear etching steps. In Figures 7A-7D, grating structures 702A-702D may be provided on the top and/or bottom of respective ridge waveguides. The spacing between grating structures 702A to 702D can be chirped to control the cone angle, ie, the angular spread of the outcoupled portion of the illumination light.

Referring now to Figure 8A, coupler 811A is similar to coupler 711A of Figure 7A and includes similar components. The etched grating structure 802A in the core 804 of the ridge waveguide of the PIC layer is tilted in the plane of the PIC layer (i.e., in the ) redirect the chief ray corresponding to the portion of the outcoupled illumination light to reduce vignetting and improve light utilization efficiency as explained above with reference to FIGS. 6A and 6B . More generally, the etched grating structure can be in two planes (i.e., in the plane of Figure 7C (XZ plane) perpendicular to the PIC layer plane (XY plane) and in the plane of Figure 8A (XY plane)) Tilt to redirect the chief ray in two orthogonal directions. The etched grating structure 802A can also be chirped for taper angle control.

Referring to Figure 8B, coupler 811B includes a grating 802B etched in a ridge waveguide, an optional spacer layer 806 supported by the grating 802B, and an array of nanostructures 808 supported by the spacer layer 806. Nanostructure array 808 can be configured to provide desired chief ray angles, light cone widths, etc.

Referring to Figure 8C, coupler 811C includes a nanoantenna 802C that is shaped and sized to provide the desired pyramid width and chief ray angle of the portion of illumination light coupled out of core 804 of the ridge waveguide. The length L and width W of nanoantenna 802C and the material of nanoantenna 802B can be selected to provide desired outcoupling strength and angular characteristics, such as due to the electromagnetic resonance of nanoantenna 802C that is defined by its geometry and material. Nanoantenna 802B may be dielectric or metallic (plasmonic). The length L and width W are typically less than one micron. Nanoantenna arrays 802C may be provided, with columns of the array coupled to individual ridge waveguides. Furthermore, in all examples of the couplers of FIGS. 7A-7D and 8A-8C , the relevant parameters of the coupler may vary spatially to provide spatial variation as explained above with reference to FIGS. 6A and 6B The main light angle.

Exemplary color lighting configurations for the PIC layer in the self-luminous display panel of the present disclosure will now be described. 9A is a top view of the PIC layer 908A, which is the self-luminous display panel 100 of FIG. 1(A), the self-luminous display panel 200 of FIG. 2, the self-luminous display panel 300 of FIG. 3, and the self-luminous display panel of FIG. 4. Variation of the PIC layer 108 of any of the volume-emitting display panels 400. PIC layer 908A of Figure 9A includes a waveguide array 905A that includes a plurality of sub-arrays, each sub-array configured to carry a specific one of the plurality of color channels of illumination light. Specifically, in this example, the waveguide array 905A includes a red waveguide sub-array 904R for transmitting the illumination light of the red channel, a green waveguide sub-array 904G for transmitting the illumination light of the green channel, and a red waveguide sub-array 904G for transmitting the illumination light of the blue channel. Illuminating light blue waveguide sub-array 904B. Red sub-array 904R, green sub-array 904G, and blue sub-array 904B are staggered in a common plane (ie, the XY plane) and run parallel to each other, as shown in Figure 9A. The waveguide of the red waveguide sub-array 904R includes a plurality of grating couplers 902R for coupling out a portion of the illumination light; the waveguide of the green waveguide sub-array 904G includes a plurality of grating couplers 902G for coupling out a portion of the green illumination light. ; and the waveguide of the blue waveguide sub-array 904B includes a plurality of grating couplers 902B for coupling out portions of the blue illumination light.

Referring to FIG. 9B, the PIC layer 908B is the self-luminous display panel 100 of FIG. 1(A), the self-luminous display panel 200 of FIG. 2, the self-luminous display panel 300 of FIG. 3, and the self-luminous display of FIG. 4. Variation of the PIC layer 108 of any of the panels 400. PIC layer 908B of Figure 9B includes a waveguide array 905B that includes a plurality of sub-arrays, each sub-array configured to carry a specific one of the plurality of color channels of illumination light. Specifically, in this example, the waveguide array 905B includes a red waveguide sub-array 904R for transmitting the illumination light of the red channel, a green waveguide sub-array 904G for transmitting the illumination light of the green channel, and a red waveguide sub-array 904G for transmitting the illumination light of the blue channel. Illuminating light blue waveguide sub-array 904B. As shown, the waveguides of red sub-array 904R, green sub-array 904G, and blue sub-array 904B run at different z-depths from each other in PIC layer 908B. The waveguides of the red sub-array 904R, the green sub-array 904G and the blue sub-array 904B include a plurality of grating couplers 902R and 902G respectively used to couple parts of the red illumination light 910R, the green illumination light 910G and the blue illumination light 910B. and 902B. As shown, grating couplers 902R, 902G, and 902B that illuminate the same pixel are positioned one after another.

Referring to FIG. 9C, the PIC layer 908C is the self-luminous display panel 100 of FIG. 1(A), the self-luminous display panel 200 of FIG. 2, the self-luminous display panel 300 of FIG. 3, and the self-luminous display of FIG. 4. Variation of the PIC layer 108 of any of the panels 400. PIC layer 908C of Figure 9C includes an array of waveguides 905C, each waveguide 905C including an array of color non-selective couplers 902. Each color non-selective coupler 902 is configured to couple out each of the plurality of color channels (ie, red illumination light 910R, green illumination light 910G, and blue illumination light 910B) at substantially the same chief ray angle. Examples of color non-selective couplers are given, for example, in US Pat. No. 10,877,214 B2 to Shipton et al., which is incorporated herein by reference in its entirety.

Referring to Figure 10, the PIC layer 1008 is the self-luminous display panel 100 of Figure 1(A), the self-luminescent display panel 200 of Figure 2, the self-luminescent display panel 300 of Figure 3, and the self-luminescent display of Figure 4. Variation of the PIC layer 108 of any of the panels 400. The PIC layer 1008 of Figure 10 includes a waveguide array including a plurality of sub-arrays 1004-1, 1004-2, ..., 1004-N, each sub-array coupled to a beam splitter 1009- for illuminating a specific geometric area of the pixel electrode array 1007. 1, 1009-2, ..., 1009-N. Each sub-array may include red, green, and blue waveguides for directing light for individual color channels (i.e., one configured for directing red (R), green (G), and blue (B) illumination light. waveguide). Such configurations offer self-luminous display panels with the possibility of area illumination, that is, the possibility of reducing or even switching off the illumination light in dark areas of the displayed image, thus achieving an image in which only part of the image is bright. This results in overall energy savings and improved overall perceived image contrast.

In some specific examples, each area is illuminated by a dedicated laser source or a group of laser sources or more generally a semiconductor light source, as illustrated in Figure 10. In some specific examples, a single light source per color channel may be used, such as a light source for the R color channel, a light source for the G color channel, and a light source for the B color channel. Light sources for each of the R, G, and B color channels can be coupled to specialized on-chip active PIC components, such as optical switches or variable beam splitters, which redistribute light energy between different areas depending on image content.

11 , a virtual reality (VR) near-eye display 1100 includes a frame 1101 supporting a self-luminescent display panel 1110 for each eye, such as any of the self-luminous display panels disclosed herein; and a visual lens or The collimator 1120 is used to convert the image in the linear domain generated by the display panel 1110 into an image in the angle domain for direct observation at the eyebox 1112 . A plurality of eye zone illuminators 1106 , shown as black dots, may be placed around the display panel 1110 on the surface facing the eye zone 1112 . Eye tracking cameras 1104 may be provided for each eye movement zone 1112.

The purpose of the eye tracking camera 1104 is to determine the position and/or orientation of the user's two eyes. The eye zone illuminator 1106 illuminates the eye at the corresponding eye zone 1112 to allow the eye tracking camera 1104 to obtain an image of the eye and provide a reference reflection (ie, flash). The flash can serve as a reference point in the captured image of the eye, thereby facilitating eye gaze direction determination by determining the position of the eye's pupil image relative to the flash image. In order to avoid distracting the user's attention due to the light of the eye movement zone illuminator 1106, the eye movement zone illuminator 1106 can be made to emit light that is invisible to the user. For example, infrared light may be used to illuminate eye movement zone 1112.

Referring to Figure 12, HMD 1200 is an example of an AR/VR wearable display system. In order to immerse the user in the AR/VR environment to a greater extent, the AR/VR wearable display system encloses the front of the user. HMD 1200 can produce fully virtual 3D images. The HMD 1200 may include a front body 1202 and a strap 1204 that may be secured around the user's head. The front body 1202 is configured for secure and comfortable placement in front of the user's eyes. The display system 1280 may be disposed in the front body 1202 to present AR/VR images to the user. Display system 1280 may include any of the self-luminescent display panels disclosed herein. Sides 1206 of front body 1202 may be opaque or transparent.

In some embodiments, the front body 1202 includes a positioner 1208 and an inertial measurement unit (IMU) 1210 for tracking the acceleration of the HMD 1200 , and a position sensor 1212 for tracking the position of the HMD 1200 . IMU 1210 is an electronic device that generates data indicative of the position of HMD 1200 based on measurement signals received from one or more of position sensors 1212 that generate a or Multiple measurement signals. Examples of position sensors 1212 include: one or more accelerometers, one or more gyroscopes, one or more magnetometers, another suitable type of sensor for detecting motion, error correction for IMU 1210 The type of sensor, or a combination thereof. Position sensor 1212 may be located external to IMU 1210, internal to IMU 1210, or some combination thereof.

The locator 1208 is tracked by an external imaging device of the virtual reality system, so that the virtual reality system can track the position and orientation of the entire HMD 1200 . The information generated by the IMU 1210 and the position sensor 1212 may be compared with the position and orientation obtained by the tracking locator 1208 for improving the tracking accuracy of the position and orientation of the HMD 1200 . When the user moves and rotates in 3D space, accurate position and orientation are crucial to presenting the user with an appropriate virtual scenery system.

HMD 1200 may further include a depth camera assembly (DCA) 1211 that captures data describing depth information for some or all local areas surrounding HMD 1200 . The depth information may be compared with information from the IMU 1210 for better accuracy in determining the position and orientation of the HMD 1200 in 3D space.

The HMD 1200 may further include an eye tracking system 1214 for instantly determining the orientation and position of the user's eyes. The acquired position and orientation of the eyes also allows HMD 1200 to determine the direction of the user's gaze and adjust the image produced by display system 1280 accordingly. The determined gaze direction and vergence angle may be used to adjust the display system 1280 to reduce vergence adjustment conflicts. Direction and vergence may also be used for exit pupil steering of displays as disclosed herein. In addition, the determined convergence and gaze angles can be used to interact with users, highlight objects, bring objects to the foreground, generate additional objects or indicators, etc. The audio system may also be provided including a set of smaller speakers built into the front body 1202, for example.

Specific examples of this disclosure may include, or be implemented with, artificial reality systems. The artificial reality system adjusts the sensory information about the external world obtained through sensing in a certain way before presenting it to the user, such as visual information, audio, contact (somatosensory) information, acceleration, balance, etc. By way of non-limiting example, artificial reality may include virtual reality (VR), augmented reality (AR), mixed reality (MR), composite reality, or some combination and/or derivative thereof. Artificial reality content may include fully generated content or generated content combined with captured (eg, real-world) content. Artificial reality content may include video, audio, physical or tactile feedback, or some combination thereof. Any of this content may be presented in a single channel or in multiple channels, such as in stereoscopic video, which creates a three-dimensional effect on the viewer. Additionally, in some embodiments, artificial reality may also be used with applications such as creating content in the artificial reality and/or otherwise being used in the artificial reality (e.g., performing activities in the artificial reality), products, accessories, services, or a combination thereof. Artificial reality systems that provide artificial reality content can be implemented on a variety of platforms, including wearable displays such as HMDs connected to host computer systems, stand-alone HMDs, near-eye displays with the appearance of glasses, mobile devices or computing systems, or any other hardware platform capable of providing artificial reality content to one or more observers.

The scope of the present disclosure is not limited by the specific examples described herein. Indeed, various other specific examples and modifications, in addition to those described herein, will be apparent to those skilled in the art from the foregoing description and accompanying drawings. Accordingly, such other specific examples and modifications are intended to be within the scope of this disclosure. Furthermore, although the disclosure has been described herein for particular purposes in the context of particular implementations in particular environments, those of ordinary skill in the art will recognize that its validity is not so limited and that the disclosure may Advantageously implemented in any number of environments for any number of purposes. Accordingly, the patentable scope set forth below should be construed in view of the full scope and spirit of the present disclosure as described herein.

100:Self-luminous display panel 102: Electronic circuit system layer 103: Electronic gate 104: First substrate 106: Pixelated electrode layer 107: Pixel electrode array 108: Photonic integrated circuit layer 109:Waveguide Array 110: Illumination light 110A: Illumination light part 111: Coupler array 112:Semiconductor light source 114: Conductive via array 116:Unit 118: Backplane electrode layer 120: Second substrate 122: Backplane electrode layer/backplane electrode 124:Electroactive layer 200:Self-luminous display panel 202:Region 204: First substrate 300:Self-luminous display panel 400:Self-luminous display panel 500:Method 600A: Self-luminous display panel 600B: Self-luminous display panel 601A: Pixel 601B: Pixel 602A: Divergent beam 602B: Divergent beam 604A:Collimated beam 604B:Collimated beam 606: dashed line 630:Collimator 632:focal plane 650A:Display equipment 650B: Display device 702A: Grating structure 702B: Grating structure 702C: Grating structure 702D: Grating structure 704:Core 706: Spacer layer 711A: Coupler 711B: Coupler 711C: Coupler 711D: Coupler 802A: Grating structure 802B: Grating/Nano Antenna 802C: Nano Antenna 804:Core 806: Spacer layer 808: Nanostructure Array 811A: Coupler 811B: Coupler 811C: Coupler 902: Color non-selective coupler 902B:Grating coupler 902G: Grating coupler 902R: Grating coupler 904B: Blue waveguide sub-array/blue sub-array 904G: Green waveguide sub-array/green sub-array 904R:Red waveguide sub-array / red sub-array 905A:Waveguide Array 905B:Waveguide Array 905C:Waveguide Array 908A: Photonic integrated circuit layer 908B: Photonic integrated circuit layer 908C: Photonic integrated circuit layer 910B: blue illumination light 910G: Green lighting light 910R: red illumination light 1004-1, 1004-2,…, 1004-N: Subarray 1007: Pixel electrode array 1008: Photonic integrated circuit layer 1009-1, 1009-2,…, 1009-N: Beam splitter 1100: Virtual reality near-eye display 1101:Frame 1104:Eye Tracking Camera 1106: Eye movement zone illuminator 1110:Self-luminous display panel 1112: Eye movement area 1120:Visual lens or collimator 1200:Head mounted display 1202: Front body 1204:strip 1206:Side 1208:Locator 1210:Inertial Measurement Unit 1211: Depth camera assembly 1212: Position sensor 1214: Eye tracking system 1280:Display system L: length W: Width α: angle β: angle

Illustrative specific examples will be described in connection with the drawings, wherein: (A) of [Figure 1] is a side cross-sectional view of a self-luminous display panel including a photonic integrated circuit layer formed above an electronic circuit system layer on a silicon substrate; [Figure 1](B) is a three-dimensional partial view of the illumination waveguide and through-hole area of the self-luminous display panel of Figure 1(A); [Fig. 2] is a side cross-sectional view of a self-luminous display panel including a photonic integrated circuit layer supported by an electronic circuit system layer on a transparent substrate; [Fig. 3] is a side cross-sectional view of a self-luminous display panel including an electronic circuit system layer supported by a photonic integrated circuit layer on a substrate; [Figure 4] is a side cross-sectional view of a self-luminous display panel including a photonic integrated circuit and an electronic circuit system layer on an opposing substrate; [Figure 5] is a flow chart of a method for manufacturing an electronic circuit system layer on a transparent substrate and a self-luminous display based thereon; [Figure 6A] and [Figure 6B] are based on Figure 1 (A), Figure 1 (B) and Figure 2 to Figure 4 without (Figure 6A) and with (Figure 6B) main light engineering. Schematic diagram of a near-eye display of a volume-luminescent display panel; [Fig. 7A] to [Fig. 7D] are side cross-sectional views of various specific examples of the grating coupler of the photonic integrated circuit of the self-luminous display panel of the present disclosure; [Fig. 8A] is a top view of a specific example of a tilted grating of a coupler outside the photonic integrated circuit of the self-luminous display panel of the present disclosure; [Fig. 8B] is a side cross-sectional view of a grating coupler with nanostructure-based chief ray angle control in a photonic integrated circuit that can be used in the self-luminous display panel of the present disclosure; [Fig. 8C] is a top view of a specific example of a nanoantenna of a coupler of a photonic integrated circuit of a self-luminous display panel according to the present disclosure; [FIG. 9A] to [FIG. 9C] are schematic diagrams of the color lighting configuration of the self-luminous display panel used in the present disclosure; [FIG. 10] is a top view schematic diagram of a photonic integrated circuit configured for area lighting of a display panel of the present disclosure; [Fig. 11] is a view of a near-eye display of the present disclosure having the appearance dimensions of a pair of glasses; and [Figure 12] is a three-dimensional view of the head-mounted display (HMD) of this disclosure.

100:Self-luminous display panel

102: Electronic circuit system layer

103: Electronic gate

104: First substrate

106: Pixelated electrode layer

107: Pixel electrode array

108: Photonic integrated circuit layer

109:Waveguide Array

110: Illumination light

110A: Illumination light part

111: Coupler array

112:Semiconductor light source

114: Conductive via array

116:Unit

118: Backplane electrode layer

120: Second substrate

122: Backplane electrode layer

124:Electroactive layer

Claims (20)

A self-luminous display panel including: Electronic circuit system layer; A photonic integrated circuit layer including an array of waveguides for guiding illumination light; and a pixelated electrode layer including a pixel electrode array; Wherein the photonic integrated circuit layer includes a coupler array coupled to the waveguide array for coupling through the pixel electrode array at a chief ray angle that varies spatially from one pixel electrode to another pixel electrode. The part that comes out of the illuminating light. The self-luminous display panel of claim 1, further comprising a first substrate supporting the electronic circuit system layer, wherein the photonic integrated circuit layer is supported by the electronic circuit system layer and the pixelated electrode layer is supported by the photonic integrated circuit layer. circuit layer support; The self-luminous display panel further includes a via array extending from the electronic circuitry layer through the photonic integrated circuit layer between waveguides in the waveguide array and extending to the pixel electrode array. For example, the self-luminous display panel of claim 2 further includes: a second substrate opposite the first substrate; a backplane electrode layer supported by the second substrate, the pixelated electrode layer and the backplane electrode layer defining a unit; and an electroactive layer located in the unit; In operation, the illumination light portions propagate through the pixel electrodes, the electroactive layer, the backplane electrode layer and the second substrate in sequence. The self-luminous display panel of claim 1, further comprising a first substrate supporting the photonic integrated circuit layer, wherein the electronic circuit system layer is supported by the photonic integrated circuit layer and the pixelated electrode layer is coupled to the electron circuit system layer. For example, the self-luminous display panel of claim 4 further includes: a second substrate opposite the first substrate; a backplane electrode layer supported by the second substrate, the pixelated electrode layer and the backplane electrode layer defining a unit; and an electroactive layer located in the unit; In operation, the illumination light portions propagate through the electronic circuit system layer, the pixel electrodes, the electroactive layer, the backplane electrode layer and the second substrate in sequence. For example, the self-luminous display panel of claim 1 further includes: a first substrate supporting the photonic integrated circuit layer; a backplane electrode layer supported by the photonic integrated circuit layer; A second substrate supports the electronic circuitry layer, the pixelated electrode layer and the backplane electrode layer defining a unit; and an electroactive layer located in the unit; In operation, the illumination light portions propagate through the backplane electrode layer, the electroactive layer, the pixel electrodes, the electronic circuit system layer and the second substrate in sequence. The self-luminous display panel of claim 1, wherein the coupler array includes a grating formed in the waveguide array. The self-luminous display panel of claim 7, wherein the gratings are tilted in a plane of the photonic integrated circuit layer to provide the spatially varying chief ray angle. The self-luminous display panel of claim 7, wherein the coupler array further includes a nanostructure array supported by the gratings to provide the spatially varying chief ray angle. The self-luminous display panel of claim 1, wherein the coupler array includes a nanoantenna array configured to provide the spatially varying chief ray angle. For example, the self-luminous display panel of claim 1, wherein: The illumination light contains multiple color channels; Each waveguide in the waveguide array is configured to transmit each color channel of the plurality of color channels; and Each coupler in the coupler array is configured to couple out each of the plurality of color channels at substantially the same chief ray angle. A self-luminous display panel including: Electronic circuit system layer; A photonic integrated circuit layer including an array of waveguides for directing illumination light including a plurality of color channels; and a pixelated electrode layer including a pixel electrode array; wherein the waveguide array includes a plurality of sub-arrays, wherein each sub-array is configured to carry a specific color channel of the plurality of color channels of the illumination light; and The photonic integrated circuit layer includes a coupler array coupled to the waveguide array for coupling out a portion of the illumination light through the pixel electrode array. The self-luminous display panel of claim 12, further comprising a first substrate supporting the electronic circuit system layer, wherein the photonic integrated circuit layer is supported by the electronic circuit system layer and the pixelated electrode layer is supported by the photonic integrated circuit layer. circuit layer support; The self-luminous display panel further includes a via array extending from the electronic circuitry layer through the photonic integrated circuit layer between waveguides in the waveguide array and extending to the pixel electrode array. For example, the self-luminous display panel of claim 13 further includes: a second substrate opposite the first substrate; a backplane electrode layer supported by the second substrate, the pixelated electrode layer and the backplane electrode layer defining a unit; and an electroactive layer located in the unit; In operation, the illumination light portions propagate through the pixel electrodes, the electroactive layer, the backplane electrode layer and the second substrate in sequence. The self-luminous display panel of claim 12, further comprising a first substrate supporting the photonic integrated circuit layer, wherein the electronic circuit system layer is supported by the photonic integrated circuit layer and the pixelated electrode layer is coupled to the electronic circuit system layer. For example, the self-luminous display panel of claim 15 further includes: a second substrate opposite the first substrate; a backplane electrode layer supported by the second substrate, the pixelated electrode layer and the backplane electrode layer defining a unit; and an electroactive layer located in the unit; In operation, the illumination light portions propagate through the electronic circuit system layer, the pixel electrodes, the electroactive layer, the backplane electrode layer and the second substrate in sequence. For example, the self-luminous display panel of claim 12 further includes: a first substrate supporting the photonic integrated circuit layer; a backplane electrode layer supported by the photonic integrated circuit layer; A second substrate supports the electronic circuitry layer, the pixelated electrode layer and the backplane electrode layer defining a unit; and an electroactive layer located in the unit; In operation, the illumination light portions propagate through the backplane electrode layer, the electroactive layer, the pixel electrodes, the electronic circuit system layer and the second substrate in sequence. The self-luminous display panel of claim 12, wherein the waveguides of different sub-arrays of the plurality of sub-arrays are staggered and run parallel to each other in a common plane. The self-luminous display panel of claim 12, wherein the waveguides of different sub-arrays in the plurality of sub-arrays run up and down each other. A self-luminous display panel including: Electronic circuit system layer; A photonic integrated circuit layer including an array of waveguides for directing illumination light including a plurality of color channels; and a pixelated electrode layer including a pixel electrode array; wherein the waveguide array includes a plurality of sub-arrays, each sub-array coupled to a beam splitter for illuminating a specific geometric area in the pixel electrode array; and The photonic integrated circuit layer includes a coupler array coupled to the waveguide array for coupling out a portion of the illumination light through the pixel electrode array.

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