TW202329085A - Electronic apparatus - Google Patents
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- TW202329085A TW202329085A TW111149805A TW111149805A TW202329085A TW 202329085 A TW202329085 A TW 202329085A TW 111149805 A TW111149805 A TW 111149805A TW 111149805 A TW111149805 A TW 111149805A TW 202329085 A TW202329085 A TW 202329085A
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/127—Active-matrix OLED [AMOLED] displays comprising two substrates, e.g. display comprising OLED array and TFT driving circuitry on different substrates
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
- G02B27/017—Head mounted
-
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Abstract
Description
本發明的一個實施方式係關於一種電子裝置。本發明的一個實施方式係關於一種具備顯示裝置的可穿戴電子裝置。One embodiment of the present invention relates to an electronic device. One embodiment of the present invention relates to a wearable electronic device with a display device.
注意,本發明的一個實施方式不侷限於上述技術領域。作為本說明書等所公開的本發明的一個實施方式的技術領域的一個例子,可以舉出半導體裝置、顯示裝置、發光裝置、蓄電裝置、記憶體裝置、電子裝置、照明設備、輸入裝置、輸入輸出裝置、其驅動方法或者其製造方法。Note that one embodiment of the present invention is not limited to the technical fields described above. Examples of the technical field of one embodiment of the present invention disclosed in this specification include semiconductor devices, display devices, light-emitting devices, power storage devices, memory devices, electronic devices, lighting equipment, input devices, input-output device, its driving method, or its manufacturing method.
近年來,適合於虛擬實境(VR:Virtual Reality)、擴增實境(AR:Augmented Reality)等用途的HMD(Head Mounted Display)型電子裝置已在普及。HMD可以根據用戶的頭部動作以及用戶的視線或操作在用戶的周圍360度的全方位顯示影像,因此用戶可以得到較高的沉浸感、真實感。In recent years, HMD (Head Mounted Display) type electronic devices suitable for applications such as virtual reality (VR: Virtual Reality) and augmented reality (AR: Augmented Reality) have been popularized. The HMD can display 360-degree images around the user according to the user's head movement and the user's line of sight or operation, so the user can get a higher sense of immersion and reality.
由於HMD的像素密度越高HMD越能夠顯示高的清晰的影像,所以例如用戶不容易看到像素。由此,HMD的用戶不容易感受到顆粒感,所以用戶可以得到高沉浸感及真實感。另一方面,由於在提高HMD的像素密度時難以增大HMD的顯示部的佔有面積,所以例如有時難以在用戶的周圍360度的全方位顯示影像。Since the higher the pixel density of the HMD, the higher the HMD can display a high-definition image, for example, it is difficult for the user to see the pixels. As a result, users of the HMD are not likely to experience graininess, so users can obtain a high sense of immersion and realism. On the other hand, since it is difficult to increase the occupied area of the display unit of the HMD when increasing the pixel density of the HMD, for example, it may be difficult to display video in all directions around the user in 360 degrees.
在專利文獻1中公開了包括第一顯示器、其像素密度比第一顯示器低的第二顯示器以及光學組合器的顯示裝置。在該顯示裝置中,藉由從第一顯示器射出並被光學組合器反射的光及從第二顯示器射出並透過光學組合器的光進入顯示裝置的用戶的眼睛,用戶可以看到影像。第一顯示器顯示被顯示裝置的用戶的視野中心及其附近看到的第一影像,第二顯示器顯示顯示於第一影像的周圍的第二影像。在專利文獻1所示的顯示裝置中,藉由使第二顯示器的像素密度比第一顯示器的像素密度低,與第二顯示器的像素密度相等於第一顯示器的像素密度的情況相比,可以增大顯示部整體的佔有面積而顯示裝置的用戶不感到影像品質的下降。A display device including a first display, a second display having a lower pixel density than the first display, and an optical combiner is disclosed in Patent Document 1. In the display device, the user can see images by the light emitted from the first display reflected by the optical combiner and the light emitted from the second display transmitted through the optical combiner entering the user's eyes of the display device. The first display displays a first image viewed from the center of the user's field of view of the display device and its vicinity, and the second display displays a second image displayed around the first image. In the display device shown in Patent Document 1, by making the pixel density of the second display lower than that of the first display, compared with the case where the pixel density of the second display is equal to the pixel density of the first display, it is possible to The user of the display device does not feel a decrease in image quality by increasing the occupied area of the entire display unit.
[專利文獻1]美國專利申請公開第2020/0033613號說明書[Patent Document 1] Specification of U.S. Patent Application Publication No. 2020/0033613
在專利文獻1所公開的結構中,從第一顯示器發射並透過光學組合器的光及從第二顯示器發射並被光學組合器反射的光成為損失。為了填補該損失,在提高從第一顯示器及第二顯示器發射的光的亮度時,第一顯示器及第二顯示器的功耗增大。In the structure disclosed in Patent Document 1, light emitted from the first display and transmitted through the optical combiner and light emitted from the second display and reflected by the optical combiner become losses. To make up for this loss, power consumption of the first display and the second display increases when the brightness of light emitted from the first display and the second display is increased.
本發明的一個實施方式的目的之一是提供一種低功耗的電子裝置。此外,本發明的一個實施方式的目的之一是提供一種用戶能夠看到高亮度的影像的電子裝置。此外,本發明的一個實施方式的目的之一是提供一種包括顯示高品質影像的顯示裝置的電子裝置。此外,本發明的一個實施方式的目的之一是提供一種包括高速驅動的顯示裝置的電子裝置。此外,本發明的一個實施方式的目的之一是提供一種小型電子裝置。此外,本發明的一個實施方式的目的之一是提供一種可靠性高的電子裝置。此外,本發明的一個實施方式的目的之一是提供一種新穎的電子裝置。One of the objectives of an embodiment of the present invention is to provide an electronic device with low power consumption. In addition, one of the objectives of an embodiment of the present invention is to provide an electronic device in which a user can view high-brightness images. In addition, an object of an embodiment of the present invention is to provide an electronic device including a display device for displaying high-quality images. Furthermore, one of the objects of one embodiment of the present invention is to provide an electronic device including a display device driven at high speed. Furthermore, one of the objects of an embodiment of the present invention is to provide a small electronic device. Furthermore, one of the objects of an embodiment of the present invention is to provide an electronic device with high reliability. Furthermore, one of the objects of an embodiment of the present invention is to provide a novel electronic device.
注意,這些目的的記載並不妨礙其他目的的存在。注意,本發明的一個實施方式並不需要實現所有上述目的。注意,可以從說明書、圖式、申請專利範圍等的記載衍生上述以外的目的。Note that the description of these purposes does not prevent the existence of other purposes. Note that it is not necessary for an embodiment of the present invention to achieve all of the above objects. Note that objects other than the above can be derived from descriptions in the specification, drawings, claims, and the like.
本發明的一個實施方式是一種電子裝置,包括:第一顯示裝置;以及第二顯示裝置,其中,第一顯示裝置包括第一顯示部,第二顯示裝置包括第二顯示部,在第一顯示部中排列多個第一像素,在第二顯示部中排列多個第二像素,第一顯示裝置與第二顯示裝置重疊,第二顯示部以在俯視時圍繞第一顯示部的至少一部分的方式設置,並且,每一個第一像素的佔有面積比每一個第二像素的佔有面積小。One embodiment of the present invention is an electronic device, including: a first display device; and a second display device, wherein the first display device includes a first display part, the second display device includes a second display part, and the first display device includes a second display part. A plurality of first pixels are arranged in a portion, a plurality of second pixels are arranged in a second display portion, the first display device overlaps with the second display device, and the second display portion surrounds at least a part of the first display portion in plan view. way, and the occupied area of each first pixel is smaller than the occupied area of each second pixel.
本發明的一個實施方式是一種電子裝置,包括:第一顯示裝置;以及第二顯示裝置,其中,第一顯示裝置包括第一基板、第一基板上的第一顯示部及第一顯示部上的第二基板,第二顯示裝置包括第三基板、第三基板上的第二顯示部及第二顯示部上的第四基板,在第一顯示部中排列多個第一像素,在第二顯示部中排列多個第二像素,第二基板與第三基板重疊,第二基板、第三基板及第四基板透過從第一像素射出的光,第二顯示部以在俯視時圍繞第一顯示部的至少一部分的方式設置,並且,每一個第一像素的佔有面積比每一個第二像素的佔有面積小。One embodiment of the present invention is an electronic device, including: a first display device; and a second display device, wherein the first display device includes a first substrate, a first display part on the first substrate, and a first display part on the first display part. The second substrate, the second display device includes a third substrate, a second display portion on the third substrate, and a fourth substrate on the second display portion, a plurality of first pixels are arranged in the first display portion, and a plurality of first pixels are arranged in the second display portion. A plurality of second pixels are arranged in the display part, the second substrate overlaps with the third substrate, the second substrate, the third substrate and the fourth substrate transmit the light emitted from the first pixel, and the second display part surrounds the first pixel when viewed from above. At least a part of the display portion is arranged in such a way that the occupied area of each first pixel is smaller than the occupied area of each second pixel.
在上述實施方式中,第一基板也可以為半導體基板。In the above embodiments, the first substrate may also be a semiconductor substrate.
在上述實施方式中,第三基板的厚度也可以比第一基板的厚度薄。In the above embodiment, the thickness of the third substrate may be thinner than that of the first substrate.
在上述實施方式中,第三基板也可以具有撓性。In the above embodiments, the third substrate may also have flexibility.
在上述實施方式中,也可以在第二基板與第三基板之間設置黏合層。In the above embodiments, an adhesive layer may also be provided between the second substrate and the third substrate.
在上述實施方式中,第二顯示部也可以包括不重疊於第一顯示部的區域。In the above embodiments, the second display unit may include a region that does not overlap the first display unit.
在上述實施方式中,第二顯示裝置也可以包括第三顯示部,第三顯示部也可以與第一顯示部重疊,並且第三顯示部也可以透過從第一像素射出的光。In the above embodiments, the second display device may include a third display unit, the third display unit may overlap the first display unit, and the third display unit may transmit light emitted from the first pixel.
在上述實施方式中,電子裝置也可以包括通訊電路、控制電路、第一源極驅動器電路及第二源極驅動器電路,第一源極驅動器電路也可以與第一像素電連接,第二源極驅動器電路也可以與第二像素電連接,通訊電路也可以具有接收影像資料的功能,並且控制電路也可以具有如下功能:根據影像資料生成表示從第一像素射出的光的亮度的第一資料及表示從第二像素射出的光的亮度的第二資料,且將第一資料供應給第一源極驅動器電路,將第二資料供應給第二源極驅動器電路。In the above embodiments, the electronic device may also include a communication circuit, a control circuit, a first source driver circuit, and a second source driver circuit. The first source driver circuit may also be electrically connected to the first pixel, and the second source driver circuit may also be electrically connected to the first pixel. The driver circuit may also be electrically connected to the second pixel, the communication circuit may also have the function of receiving image data, and the control circuit may also have the following function: generate first data representing the brightness of light emitted from the first pixel according to the image data and Second data indicating brightness of light emitted from the second pixel is supplied to the first source driver circuit, and the second data is supplied to the second source driver circuit.
在上述實施方式中,第一像素也可以包括第一發光元件,第二像素也可以包括第二發光元件,第一發光元件也可以包括第一像素電極及第一像素電極上的第一EL層,第一EL層也可以覆蓋第一像素電極的端部,第二發光元件也可以包括第二像素電極及第二像素電極上的第二EL層,並且也可以在第二像素電極與第二EL層之間設置覆蓋第二像素電極的端部的絕緣層。In the above embodiments, the first pixel may also include a first light-emitting element, the second pixel may also include a second light-emitting element, and the first light-emitting element may also include a first pixel electrode and a first EL layer on the first pixel electrode. , the first EL layer can also cover the end of the first pixel electrode, the second light-emitting element can also include the second pixel electrode and the second EL layer on the second pixel electrode, and can also be between the second pixel electrode and the second pixel electrode. An insulating layer covering an end portion of the second pixel electrode is provided between the EL layers.
根據本發明的一個實施方式可以提供一種低功耗的電子裝置。此外,根據本發明的一個實施方式可以提供一種用戶能夠看到高亮度的影像的電子裝置。此外,根據本發明的一個實施方式可以提供一種包括顯示高品質影像的顯示裝置的電子裝置。此外,根據本發明的一個實施方式可以提供一種包括高速驅動的顯示裝置的電子裝置。此外,根據本發明的一個實施方式可以提供一種小型電子裝置。此外,根據本發明的一個實施方式可以提供一種可靠性高的電子裝置。此外,根據本發明的一個實施方式可以提供一種新穎的電子裝置。According to one embodiment of the present invention, an electronic device with low power consumption can be provided. In addition, an embodiment of the present invention can provide an electronic device in which a user can view a high-brightness image. In addition, an embodiment of the present invention may provide an electronic device including a display device displaying high-quality images. In addition, according to one embodiment of the present invention, an electronic device including a display device driven at high speed may be provided. Furthermore, according to one embodiment of the present invention, a small electronic device can be provided. In addition, an electronic device with high reliability can be provided according to an embodiment of the present invention. Furthermore, a novel electronic device can be provided according to an embodiment of the present invention.
注意,這些效果的記載並不妨礙其他效果的存在。注意,本發明的一個實施方式並不需要具有所有上述效果。注意,可以從說明書、圖式、申請專利範圍等的記載衍生上述以外的效果。Note that the mention of these effects does not preclude the existence of other effects. Note that one embodiment of the present invention does not necessarily have all the above effects. Note that effects other than the above can be derived from descriptions in the specification, drawings, claims, and the like.
以下,參照圖式對實施方式進行說明。注意,所屬技術領域的通常知識者可以很容易地理解一個事實,就是實施方式可以以多個不同形式來實施,其方式和詳細內容可以在不脫離本發明的精神及其範圍的條件下被變換為各種各樣的形式。因此,本發明不應該被解釋為僅限定在以下所示的實施方式所記載的內容中。Embodiments will be described below with reference to the drawings. Note that those skilled in the art can easily understand the fact that the embodiments can be implemented in many different forms, and the methods and details can be changed without departing from the spirit and scope of the present invention. for various forms. Therefore, the present invention should not be interpreted as being limited only to the contents described in the embodiments shown below.
注意,在以下說明的發明的結構中,在不同的圖式之間共同使用相同的元件符號來表示相同的部分或具有相同功能的部分,而省略其重複說明。此外,當表示具有相同功能的部分時有時使用相同的陰影線,而不特別附加元件符號。Note that in the configuration of the invention described below, the same reference numerals are commonly used between different drawings to denote the same parts or parts having the same functions, and repeated description thereof will be omitted. In addition, the same hatching is sometimes used when indicating a portion having the same function, without particularly attaching a reference symbol.
另外,為了便於理解,有時圖式中示出的各構成的位置、大小及範圍等並不表示其實際的位置、大小及範圍等。因此,所公開的發明不一定侷限於圖式所公開的位置、大小及範圍等。In addition, in order to facilitate understanding, the positions, sizes, ranges, etc. of each component shown in the drawings may not represent the actual positions, sizes, ranges, etc. thereof. Therefore, the disclosed invention is not necessarily limited to the positions, sizes, ranges, etc. disclosed in the drawings.
另外,根據情況或狀態,可以互相調換“膜”和“層”。例如,有時可以將“導電層”變換為“導電膜”。或者,例如有時可以將“絕緣膜”變換為“絕緣層”。或者,例如有時可以將“半導體膜”變換為“半導體層”。In addition, "film" and "layer" may be interchanged with each other depending on the situation or state. For example, "conductive layer" may sometimes be changed to "conductive film". Alternatively, for example, "insulating film" may be changed to "insulating layer". Alternatively, for example, "semiconductor film" may be changed to "semiconductor layer".
在本說明書等中,為了方便起見,有時使用“上”、“下”、“上方”或“下方”等表示配置的詞句以參照圖式說明組件的位置關係。此外,組件的位置關係根據描述各結構的方向適當地改變。因此,不侷限於本說明書等中所說明的詞句,根據情況可以適當地換詞句。例如,在“位於導電層上的絕緣層”的表述中,藉由將所示的圖式的方向旋轉180度,也可以稱為“位於導電層下的絕緣層”。In this specification and the like, for the sake of convenience, the positional relationship of components is described with reference to the drawings by using words and phrases indicating arrangement such as "upper", "lower", "above" or "below". In addition, the positional relationship of the components is appropriately changed according to the directions in which the respective structures are described. Therefore, the words and phrases described in this specification and the like are not limited, and words and phrases may be appropriately replaced according to circumstances. For example, in the expression "an insulating layer located on a conductive layer", by rotating the direction of the illustrated drawing by 180 degrees, it can also be called an "insulating layer located below a conductive layer".
在本說明書等中,在沒有特別的說明的情況下,關態電流是指電晶體處於關閉狀態(也稱為非導通狀態、遮斷狀態)時的汲極電流。在沒有特別的說明的情況下,在n通道電晶體中,關閉狀態是指閘極與源極間的電壓V gs低於臨界電壓V th(p通道型電晶體中V gs高於V th)的狀態。 In this specification and the like, unless otherwise specified, the off-state current refers to the drain current when the transistor is in an off state (also referred to as a non-conductive state or an interrupted state). In the absence of special instructions, in n-channel transistors, the off state means that the voltage V gs between the gate and source is lower than the critical voltage V th (V gs is higher than V th in p-channel transistors) status.
在本說明書等中,金屬氧化物(metal oxide)是指廣義上的金屬的氧化物。金屬氧化物被分類為氧化物絕緣體、氧化物導電體(包括透明氧化物導電體)和氧化物半導體(Oxide Semiconductor,也簡稱為OS)等。例如,在將金屬氧化物用於電晶體的活性層的情況下,有時將該金屬氧化物稱為氧化物半導體。換言之,也可以將本說明書等中的“OS電晶體”稱為包含金屬氧化物或氧化物半導體的電晶體。In this specification and the like, metal oxide refers to an oxide of a metal in a broad sense. Metal oxides are classified into oxide insulators, oxide conductors (including transparent oxide conductors), oxide semiconductors (Oxide Semiconductor, also referred to as OS), and the like. For example, when a metal oxide is used for an active layer of a transistor, the metal oxide is sometimes called an oxide semiconductor. In other words, the "OS transistor" in this specification and the like may also be referred to as a transistor including a metal oxide or an oxide semiconductor.
實施方式1 在本實施方式中,說明根據本發明的一個實施方式的電子裝置及顯示裝置等。本發明的一個實施方式例如可以適用於VR或AR用途的可穿戴電子裝置,明確而言可以適用於HMD。 Embodiment 1 In this embodiment mode, an electronic device, a display device, and the like according to one embodiment of the present invention will be described. One embodiment of the present invention can be applied, for example, to a wearable electronic device for VR or AR use, specifically to an HMD.
本發明的一個實施方式的電子裝置包括第一顯示裝置及第二顯示裝置。第一顯示裝置及第二顯示裝置分別包括顯示部,在顯示部中像素排列為矩陣狀。像素包括發射可見光的發光元件(也稱為發光器件),藉由該發光元件發射對應影像資料的亮度的光,可以在顯示部顯示影像。An electronic device according to an embodiment of the present invention includes a first display device and a second display device. The first display device and the second display device respectively include a display part, and pixels are arranged in a matrix in the display part. A pixel includes a light-emitting element (also referred to as a light-emitting device) that emits visible light. The light-emitting element emits light with a brightness corresponding to the image data, and an image can be displayed on the display unit.
在本說明書等中,可見光是指波長為380nm以上且低於780nm的光。此外,紅外光是指波長為780nm以上的光。再者,近紅外光是指波長為780nm以上且2500nm以下的光。此外,從發光元件發射的光的峰波長在可見光、紅外光及近紅外光的範圍內的情況分別是指發光元件發射可見光、紅外光及近紅外光的情況。In this specification and the like, visible light refers to light having a wavelength of 380 nm or more and less than 780 nm. In addition, infrared light refers to light having a wavelength of 780 nm or more. In addition, near-infrared light refers to the light whose wavelength is 780 nm or more and 2500 nm or less. In addition, the case where the peak wavelength of light emitted from the light-emitting element is within the range of visible light, infrared light, and near-infrared light refers to the case where the light-emitting element emits visible light, infrared light, and near-infrared light, respectively.
在本說明書等中,發光元件在一對電極間包括EL層。EL層至少包括發光層。在此,作為EL層所包括的層(也被稱為功能層),可以舉出發光層、載子注入層(電洞注入層及電子注入層)、載子傳輸層(電洞傳輸層及電子傳輸層)及載子障壁層(電洞障壁層及電子障壁層)等。In this specification and the like, a light emitting element includes an EL layer between a pair of electrodes. The EL layer includes at least a light emitting layer. Here, the layers (also referred to as functional layers) included in the EL layer include light emitting layer, carrier injection layer (hole injection layer and electron injection layer), carrier transport layer (hole transport layer and Electron transport layer) and carrier barrier layer (hole barrier layer and electron barrier layer), etc.
在本發明的一個實施方式中,第一顯示裝置以與第二顯示裝置重疊的方式設置。並且,第二顯示裝置所包括的顯示部以在俯視時圍繞第一顯示裝置所包括的顯示部的方式設置。由此,第一顯示裝置例如可以顯示被電子裝置的用戶的視野中心及其附近看到的第一影像且第二顯示裝置可以顯示顯示於第一影像的周圍的第二影像。這裡,由於從第一顯示裝置射出的光透過第二顯示裝置,第二顯示裝置中的與第一顯示裝置的顯示部重疊的區域透過從第一顯示裝置射出的光。In one embodiment of the present invention, the first display device is arranged to overlap with the second display device. In addition, the display unit included in the second display device is provided so as to surround the display unit included in the first display device in plan view. Thus, for example, the first display device can display the first image seen by the user's visual field center and its vicinity, and the second display device can display the second image displayed around the first image. Here, since the light emitted from the first display device passes through the second display device, the region of the second display device overlapping with the display portion of the first display device transmits the light emitted from the first display device.
在本說明書等中,在A透過光B時,A的光B的穿透率為5%以上。In this specification and the like, when A transmits light B, the transmittance of A to light B is 5% or more.
人精細識別視野中心及其附近的影像且粗略識別其外側的影像。例如,人精細識別中心視野及有效視野的影像且粗略識別周邊視野的影像。因此,即使使第二影像的清晰度比第一影像的清晰度低,電子裝置的用戶也不容易感到影像品質的下降,例如很少感受到顆粒感。另一方面,由於藉由降低第二影像的清晰度可以降低第二顯示裝置的像素密度,所以例如可以增大顯示部整體的佔有面積。如上所述,藉由使第二影像的清晰度比第一影像的清晰度低,與在電子裝置中顯示的影像整體的清晰度均勻的情況相比,可以增大電子裝置所包括的顯示部整體的佔有面積,而電子裝置的用戶不感到影像品質的下降。Humans finely recognize images in and around the center of the visual field and roughly recognize images outside it. For example, humans finely recognize images in the central field of view and effective field of view and roughly recognize images in the peripheral field of view. Therefore, even if the definition of the second image is lower than that of the first image, the user of the electronic device will not easily feel the degradation of the image quality, such as seldom feel the graininess. On the other hand, since the pixel density of the second display device can be reduced by reducing the definition of the second image, for example, the occupied area of the entire display part can be increased. As described above, by making the resolution of the second image lower than that of the first image, compared with the case where the resolution of the entire image displayed on the electronic device is uniform, the display unit included in the electronic device can be enlarged. The overall occupied area, and the user of the electronic device does not feel the degradation of the image quality.
藉由第一顯示裝置以與第二顯示裝置重疊的方式設置,例如第一顯示裝置不與第二顯示裝置重疊,與使用半反射鏡等光學組合器結合第一影像與第二影像的情況相比,可以減少從顯示裝置射出的光的損失,例如可以減少從第一顯示裝置射出的光的損失。因此,本發明的一個實施方式的電子裝置可以為低功耗的電子裝置。此外,本發明的一個實施方式的電子裝置的用戶可以看到高亮度的影像。By setting the first display device in such a way that it overlaps with the second display device, for example, the first display device does not overlap the second display device, which is similar to the case where the first image and the second image are combined using an optical combiner such as a half mirror. Therefore, the loss of light emitted from the display device can be reduced, for example, the loss of light emitted from the first display device can be reduced. Therefore, the electronic device according to one embodiment of the present invention can be a low power consumption electronic device. In addition, the user of the electronic device according to an embodiment of the present invention can see high-brightness images.
<電子裝置的結構例子> 圖1A是示出本發明的一個實施方式的電子裝置的電子裝置10的結構例子的外觀圖。電子裝置10可以是HMD。此外,電子裝置10可以被稱為護目鏡式電子裝置。或者,有時電子裝置10也可以被稱為眼鏡式電子裝置。 <Structure example of electronic device> FIG. 1A is an external view showing a configuration example of an electronic device 10 as an electronic device according to an embodiment of the present invention. The electronic device 10 may be an HMD. Also, the electronic device 10 may be called a goggle type electronic device. Alternatively, sometimes the electronic device 10 may also be called a glasses-type electronic device.
電子裝置10包括外殼31、固定工具32、一對透鏡35(透鏡35L及透鏡35R)、一對鏡架36(鏡架36L及鏡架36R)以及一對顯示部37(顯示部37L及顯示部37R)。此外,電子裝置10可以包括通訊電路57及控制電路59。The electronic device 10 includes a housing 31, a fixing tool 32, a pair of lenses 35 (lens 35L and lens 35R), a pair of mirror frames 36 (mirror frames 36L and 36R), and a pair of display portions 37 (display portion 37L and display portion 37R). In addition, the electronic device 10 may include a communication circuit 57 and a control circuit 59 .
在電子裝置10中,例如通訊電路57從電子裝置10的外部接收影像資料。通訊電路57將接收的影像資料供應給控制電路59。控制電路59根據接收的影像資料進行控制以在顯示部37上顯示影像。顯示於顯示部37上的影像被透鏡35放大,且電子裝置10的用戶看到該影像。In the electronic device 10 , for example, the communication circuit 57 receives image data from the outside of the electronic device 10 . The communication circuit 57 supplies the received image data to the control circuit 59 . The control circuit 59 controls to display an image on the display unit 37 according to the received image data. The image displayed on the display unit 37 is magnified by the lens 35 , and the user of the electronic device 10 sees the image.
圖1B是示出顯示部37的結構例子的立體圖。這裡,圖1B所示的結構可以用於顯示部37L及顯示部37R。FIG. 1B is a perspective view showing a configuration example of the display unit 37 . Here, the structure shown in FIG. 1B can be used for the display portion 37L and the display portion 37R.
顯示部37包括顯示部37a及顯示部37b。顯示部37a可以為顯示部37的中心及其附近的區域,且顯示部37b可以為顯示部37a的周圍區域。也就是說,顯示部37b以在俯視時圍繞顯示部37a的方式設置。由此,電子裝置10的用戶可以由視野中心及其附近看到顯示於顯示部37a上的影像且由周邊視野看到顯示於顯示部37b上的影像。注意,顯示部37的中心也可以位於顯示部37b而不位於顯示部37a。此外,顯示部37b也可以不圍繞顯示部37a整體。例如,在顯示部37a的形狀為矩形時,顯示部37b也可以不圍繞顯示部37a的四個邊中的所有邊。例如,顯示部37b可以圍繞顯示部37a所包括的四個邊中的三個邊。或者,顯示部37b可以圍繞顯示部37a所包括的四個邊中的兩個邊的所有部分且圍繞剩下的兩個邊的一部分。The display unit 37 includes a display unit 37a and a display unit 37b. The display portion 37a may be the center of the display portion 37 and its vicinity, and the display portion 37b may be the surrounding area of the display portion 37a. That is, the display portion 37b is provided so as to surround the display portion 37a in plan view. Thus, the user of the electronic device 10 can see the image displayed on the display portion 37 a from the center of the field of view and its vicinity, and see the image displayed on the display portion 37 b from the peripheral field of view. Note that the center of the display portion 37 may be located on the display portion 37b instead of the display portion 37a. In addition, the display part 37b does not need to surround the whole display part 37a. For example, when the shape of the display part 37a is a rectangle, the display part 37b does not need to surround all four sides of the display part 37a. For example, the display portion 37b may surround three of the four sides included in the display portion 37a. Alternatively, the display portion 37b may surround all parts of two of the four sides included in the display portion 37a and surround a part of the remaining two sides.
在顯示部37a中排列多個像素27a,例如像素27a排列為矩陣狀。在顯示部37b中排列多個像素27b。像素27(像素27a及像素27b)包括發射可見光的發光元件,從發光元件發射的光作為光34(光34a及光34b)從像素27射出,因此可以在顯示部37上顯示影像。注意,從像素27a射出的光為光34a,從像素27b射出的光為光34b。A plurality of pixels 27a are arranged in the display portion 37a, for example, the pixels 27a are arranged in a matrix. A plurality of pixels 27b are arranged in the display portion 37b. Pixel 27 (pixel 27 a and pixel 27 b ) includes a light-emitting element that emits visible light, and light emitted from the light-emitting element is emitted from pixel 27 as light 34 (light 34 a and light 34 b ), so that an image can be displayed on display unit 37 . Note that light emitted from pixel 27a is light 34a, and light emitted from pixel 27b is light 34b.
作為發光元件,例如較佳為使用如OLED(Organic Light Emitting Diode;有機發光二極體)或QLED(Quantum-dot Light Emitting Diode;量子點發光二極體)。作為發光元件含有的發光物質,例如可以舉出發射螢光的物質(螢光材料)、發射磷光的物質(磷光材料)、呈現熱活化延遲螢光的物質(熱活化延遲螢光(Thermally Activated Delayed Fluorescence:TADF)材料)及無機化合物(例如量子點材料)。此外,作為發光元件,也可以使用Micro LED(Light Emitting Diode)等LED。As a light emitting element, for example, OLED (Organic Light Emitting Diode; organic light emitting diode) or QLED (Quantum-dot Light Emitting Diode; quantum dot light emitting diode) are preferably used. As the light-emitting substance contained in the light-emitting element, for example, a substance that emits fluorescence (fluorescent material), a substance that emits phosphorescence (phosphorescent material), a substance that exhibits thermally activated delayed fluorescence (Thermally Activated Delayed Fluorescence (Thermally Activated Delayed Fluorescence) Fluorescence: TADF) materials) and inorganic compounds (such as quantum dot materials). In addition, LEDs such as Micro LEDs (Light Emitting Diodes) can also be used as light emitting elements.
此外,像素27中設置有被用作控制發光元件的驅動的像素電路。像素電路包括電晶體。由此,像素27可以以主動矩陣方式驅動。In addition, a pixel circuit used to control the driving of the light emitting element is provided in the pixel 27 . The pixel circuit includes transistors. Thus, the pixels 27 can be driven in an active matrix manner.
如圖1B所示,顯示部37a的像素密度比顯示部37b的像素密度高。例如,設置於顯示部37a中的每一個像素27a的佔有面積比設置於顯示部37b中的每一個像素27b的佔有面積小。此外,相鄰的像素27a間的距離比相鄰的像素27b間的距離短。如上所述,顯示部37a可以顯示被電子裝置10的用戶的視野中心及其附近看到的影像,且顯示部37b可以顯示被周邊視野看到的影像。這裡,人精細識別視野中心及其附近的影像且粗略識別其外側的影像。例如,人精細識別中心視野及有效視野的影像且粗略識別周邊視野的影像。因此,即使顯示部37b的像素密度比顯示部37a的像素密度低且顯示於顯示部37b上的影像的清晰度比顯示於顯示部37a上的影像的清晰度低,電子裝置10的用戶也很少感到影像品質的下降,例如很少感受到顆粒感。另一方面,藉由降低顯示部37b的像素密度,例如可以增大顯示部37整體的佔有面積。如上所述,藉由使顯示部37b的像素密度比顯示部37a的像素密度低,與顯示部37整體上的像素密度均勻的情況相比,可以增大顯示部37的佔有面積,而電子裝置的用戶不感到影像品質的下降。As shown in FIG. 1B , the pixel density of the display portion 37 a is higher than that of the display portion 37 b. For example, the occupied area per pixel 27a provided in the display portion 37a is smaller than the occupied area per pixel 27b provided in the display portion 37b. In addition, the distance between adjacent pixels 27a is shorter than the distance between adjacent pixels 27b. As described above, the display unit 37a can display images viewed by the user's visual field center and its vicinity, and the display unit 37b can display images viewed by the peripheral visual field of the user of the electronic device 10 . Here, a person finely recognizes images in the center of the visual field and its vicinity and roughly recognizes images outside it. For example, humans finely recognize images in the central field of view and effective field of view and roughly recognize images in the peripheral field of view. Therefore, even if the pixel density of the display portion 37b is lower than that of the display portion 37a and the resolution of the image displayed on the display portion 37b is lower than the resolution of the image displayed on the display portion 37a, the user of the electronic device 10 will feel uncomfortable. Less image quality degradation, such as graininess, is less felt. On the other hand, by reducing the pixel density of the display portion 37b, for example, the occupied area of the display portion 37 as a whole can be increased. As described above, by making the pixel density of the display portion 37b lower than that of the display portion 37a, the occupied area of the display portion 37 can be increased compared with the case where the pixel density of the entire display portion 37 is uniform, and the electronic device of users do not experience a drop in image quality.
圖2A是示出沿圖1B中的點劃線A1-A2的結構例子的剖面圖,也是示出包括顯示部37的顯示裝置的結構例子的剖面圖。如圖2A所示,在顯示裝置41a中包括顯示部37a且在顯示裝置41b中包括顯示部37b。FIG. 2A is a cross-sectional view showing a structural example taken along the dashed-dotted line A1 - A2 in FIG. 1B , and is also a cross-sectional view showing a structural example of a display device including the display portion 37 . As shown in FIG. 2A , a display portion 37 a is included in the display device 41 a and a display portion 37 b is included in the display device 41 b.
顯示裝置41a包括基板11a、基板11a上的層12a以及層12a上的基板13a,顯示部37a設置在層12a中。顯示裝置41b包括基板11b、基板11b上的層12b以及層12b上的基板13b,顯示部37b設置在層12b中。此外,例如層12a中設置有用來驅動顯示裝置41a的驅動電路,層12b中設置有用來驅動顯示裝置41b的驅動電路。這些驅動電路中例如設置有電晶體,因此層12a及層12b包括電晶體。The display device 41a includes a substrate 11a, a layer 12a on the substrate 11a, and a substrate 13a on the layer 12a, and the display portion 37a is provided in the layer 12a. The display device 41b includes a substrate 11b, a layer 12b on the substrate 11b, and a substrate 13b on the layer 12b, and the display portion 37b is provided in the layer 12b. In addition, for example, a drive circuit for driving the display device 41a is provided in the layer 12a, and a drive circuit for driving the display device 41b is provided in the layer 12b. For example, transistors are provided in these drive circuits, so the layers 12a and 12b include transistors.
顯示裝置41b設置在顯示裝置41a上。顯示裝置41a與顯示裝置41b重疊。明確而言,例如基板13a與基板11b重疊。例如,基板13a包括與基板11b接觸的區域,顯示裝置41a固定在顯示裝置41b下。例如,藉由在顯示裝置41a中安裝第一外殼且在顯示裝置41b中安裝第二外殼且使第一外殼與第二外殼嚙合,可以將顯示裝置41a固定在顯示裝置41b下。此外,顯示裝置41b包括不與顯示裝置41a重疊的區域。明確而言,例如基板11b包括不與基板13a重疊的區域。The display device 41b is provided on the display device 41a. The display device 41a overlaps the display device 41b. Specifically, for example, the substrate 13a overlaps the substrate 11b. For example, the substrate 13a includes a region in contact with the substrate 11b, and the display device 41a is fixed under the display device 41b. For example, the display device 41a can be fixed under the display device 41b by installing a first housing in the display device 41a and a second housing in the display device 41b and engaging the first housing with the second housing. In addition, the display device 41b includes an area that does not overlap the display device 41a. Specifically, for example, the substrate 11b includes a region that does not overlap the substrate 13a.
顯示部37a可以藉由射出光34a顯示影像。顯示部37b可以藉由射出光34b顯示影像。光34a透過基板13a、基板11b、層12b及基板13b。光34b透過基板13b。如上所述,基板13a、基板11b、層12b及基板13b具有光34a透過的結構。此外,基板13b具有光34b透過的結構。這裡,基板11a可以具有光34a及光34b不透過的結構。因此,基板11a例如可以具有可見光不透過的結構。另一方面,基板11b、基板13a及基板13b例如具有可見光透過的結構。The display unit 37a can display images by emitting the light 34a. The display unit 37b can display images by emitting the light 34b. Light 34a passes through substrate 13a, substrate 11b, layer 12b, and substrate 13b. The light 34b passes through the substrate 13b. As described above, the substrate 13a, the substrate 11b, the layer 12b, and the substrate 13b have a structure through which the light 34a passes. In addition, the substrate 13b has a structure through which the light 34b passes. Here, the substrate 11a may have a structure that does not transmit the light 34a and the light 34b. Therefore, the substrate 11a may have a structure that does not transmit visible light, for example. On the other hand, the substrate 11b, the substrate 13a, and the substrate 13b have, for example, a structure through which visible light passes.
顯示部37a以包括不與顯示部37b重疊的區域的方式設置。由此,即使顯示部37b中不透過光34a或者顯示部37b的光34a的穿透率例如比層12b中的不設置顯示部37b的區域的光34a的穿透率低,也可以將入射到顯示裝置41b的光34a提取到顯示裝置41b的外部。因此,包括顯示裝置41a及顯示裝置41b的電子裝置10的用戶可以看到顯示於顯示部37a上的影像。The display portion 37a is provided so as to include a region that does not overlap with the display portion 37b. Thus, even if the display portion 37b does not transmit the light 34a or the transmittance of the light 34a of the display portion 37b is lower than the transmittance of the light 34a in the region where the display portion 37b is not provided in the layer 12b, the incident The light 34a of the display device 41b is extracted to the outside of the display device 41b. Therefore, the user of the electronic device 10 including the display device 41a and the display device 41b can see the image displayed on the display portion 37a.
注意,顯示部37a的一部分也可以與顯示部37b重疊。明確而言,顯示部37a的端部也可以與顯示部37b重疊且顯示部37b的端部也可以與顯示部37a重疊。藉由採用這種結構,可以防止在顯示部37a與顯示部37b之間形成不設置顯示部37的區域。由此,可以抑制電子裝置10的用戶看到顯示部37a與顯示部37b的邊界。這裡,即使是顯示部37a的一部分與顯示部37b重疊的情況,只要在俯視時顯示部37b的不與顯示部37a重疊的區域圍繞顯示部37a,就可以說顯示部37b以圍繞顯示部37a的方式設置。Note that a part of the display portion 37a may overlap the display portion 37b. Specifically, an end portion of the display portion 37a may overlap the display portion 37b, and an end portion of the display portion 37b may overlap the display portion 37a. By adopting such a structure, it is possible to prevent the formation of a region where the display portion 37 is not provided between the display portion 37a and the display portion 37b. Accordingly, it is possible to prevent the user of the electronic device 10 from seeing the boundary between the display portion 37a and the display portion 37b. Here, even if a part of the display portion 37a overlaps the display portion 37b, as long as the area of the display portion 37b that does not overlap the display portion 37a surrounds the display portion 37a in a plan view, it can be said that the display portion 37b surrounds the display portion 37a. mode settings.
如上所述,在電子裝置10中,顯示裝置41a以與顯示裝置41b重疊的方式設置,顯示裝置41b所包括的顯示部37b以在俯視時圍繞顯示裝置41a所包括的顯示部37a的方式設置。由此,例如與顯示裝置41a不與顯示裝置41b重疊且用半反射鏡等光學組合器結合在顯示部37a上顯示的影像與在顯示部37b上顯示的影像的情況相比,可以減少光34a的損失。此外,有時可以減少光34b的損失。因此,電子裝置10可以為低功耗的電子裝置。此外,電子裝置10的用戶可以看到高亮度的影像。As described above, in the electronic device 10, the display device 41a is provided so as to overlap the display device 41b, and the display unit 37b included in the display device 41b is provided so as to surround the display unit 37a included in the display device 41a in plan view. Thus, for example, compared with the case where the display device 41a does not overlap the display device 41b and the image displayed on the display part 37a and the image displayed on the display part 37b are combined by an optical combiner such as a half mirror, the light 34a can be reduced. Loss. In addition, the loss of light 34b can sometimes be reduced. Therefore, the electronic device 10 can be an electronic device with low power consumption. In addition, the user of the electronic device 10 can see high-brightness images.
以下說明能夠用於基板11a、基板11b、基板13a或基板13b的材料。Materials that can be used for the substrate 11a, the substrate 11b, the substrate 13a, or the substrate 13b will be described below.
如上所述,基板11a例如可以具有可見光不透過的結構。因此,作為基板11a例如可以使用半導體基板。明確而言,作為基板11a可以使用以矽或碳化矽等為材料的單晶半導體基板或多晶半導體基板、以矽鍺等為材料的化合物半導體基板或SOI基板等。As described above, the substrate 11a may have, for example, a structure that does not transmit visible light. Therefore, for example, a semiconductor substrate can be used as the substrate 11a. Specifically, as the substrate 11a, a single crystal semiconductor substrate or polycrystalline semiconductor substrate made of silicon or silicon carbide, a compound semiconductor substrate made of silicon germanium or the like, an SOI substrate, or the like can be used.
如上所述,基板13a、基板11b及基板13b例如具有可見光透過的結構。因此,作為基板13a、基板11b及基板13b,例如使用玻璃基板、石英基板、藍寶石基板或塑膠基板等。注意,玻璃基板、石英基板、藍寶石基板或塑膠基板等也可以用於基板11a作為絕緣體基板。As described above, the substrate 13a, the substrate 11b, and the substrate 13b have, for example, a structure through which visible light passes. Therefore, as the substrate 13a, the substrate 11b, and the substrate 13b, for example, a glass substrate, a quartz substrate, a sapphire substrate, or a plastic substrate is used. Note that a glass substrate, a quartz substrate, a sapphire substrate, a plastic substrate, or the like may also be used for the substrate 11a as the insulator substrate.
基板11a、基板13a、基板11b及基板13b的厚度可以為50μm以上且2mm以下,較佳為50μm以上且1mm以下,更佳為50μm以上且500μm以下,進一步較佳為50μm以上且300μm以下。The thickness of the substrate 11a, the substrate 13a, the substrate 11b, and the substrate 13b may be 50 μm or more and 2 mm or less, preferably 50 μm or more and 1 mm or less, more preferably 50 μm or more and 500 μm or less, and further preferably 50 μm or more and 300 μm or less.
在基板13a的與顯示部37a相反一側的面及基板13b的與顯示部37b相反一側的面可以配置各種光學構件。作為光學構件,可以舉出偏光板、相位差板、光擴散層(擴散薄膜等)、防反射層及聚光薄膜(condensing film)等。Various optical members may be disposed on the surface of the substrate 13a opposite to the display portion 37a and the surface of the substrate 13b opposite to the display portion 37b. As an optical member, a polarizing plate, a retardation film, a light-diffusion layer (diffusion film etc.), an antireflection layer, a light-condensing film (condensing film), etc. are mentioned.
圖2B是圖2A所示的結構的變形例子,圖2B與圖2A的結構的不同之處在於顯示裝置41b包括基板15代替基板11b並包括基板16代替基板13b。2B is a modified example of the structure shown in FIG. 2A. The difference between FIG. 2B and the structure of FIG. 2A is that the display device 41b includes a substrate 15 instead of the substrate 11b and a substrate 16 instead of the substrate 13b.
基板15及基板16具有撓性。由此,圖2B所示的顯示裝置41b具有撓性。因此,圖2B所示的顯示裝置41b可以說是撓性顯示器。The substrate 15 and the substrate 16 have flexibility. Thus, the display device 41b shown in FIG. 2B has flexibility. Therefore, the display device 41b shown in FIG. 2B can be said to be a flexible display.
具有撓性的基板可以比不具有撓性的基板薄。因此,例如基板15及基板16的厚度可以比基板11a的厚度薄。如上所述,藉由顯示裝置41b為撓性顯示器,例如可以使以基板11a的表面為基準的顯示部37b的高度與顯示部37a的高度之差縮小。由此,例如由於可以使從電子裝置10的用戶的眼睛到顯示部37a的距離與從電子裝置10的用戶的眼睛到顯示部37b的距離之差縮小,可以抑制在顯示部37a上顯示的影像和在顯示部37b上顯示的影像中的一者或兩者模糊。因此,電子裝置10的用戶可以看到高品質的影像。A flexible substrate may be thinner than a non-flexible substrate. Therefore, for example, the thickness of the substrate 15 and the substrate 16 may be thinner than the thickness of the substrate 11a. As described above, when the display device 41b is a flexible display, for example, the difference between the height of the display portion 37b and the height of the display portion 37a based on the surface of the substrate 11a can be reduced. Thus, for example, since the difference between the distance from the eyes of the user of the electronic device 10 to the display unit 37a and the distance from the eyes of the user of the electronic device 10 to the display unit 37b can be reduced, the image displayed on the display unit 37a can be suppressed. One or both of the images displayed on the display unit 37b are blurred. Therefore, the user of the electronic device 10 can watch high-quality images.
藉由例如使以基板11a的表面為基準的顯示部37b的高度與顯示部37a的高度之差縮小,可以抑制從顯示裝置41a所包括的顯示部37a發射的光34a入射到顯示部37b。例如,由於在顯示部37b所包括的發光元件的電極反射可見光時,入射到顯示部37b的光34a被該電極反射且不提取到顯示裝置41b的外部,所以藉由抑制光34a入射到顯示部37b,可以提高顯示裝置41a的光提取效率。For example, by reducing the difference between the height of the display portion 37b and the height of the display portion 37a based on the surface of the substrate 11a, the light 34a emitted from the display portion 37a included in the display device 41a can be prevented from entering the display portion 37b. For example, when the electrodes of the light-emitting elements included in the display portion 37b reflect visible light, the light 34a incident on the display portion 37b is reflected by the electrodes and is not extracted to the outside of the display device 41b, so by suppressing the light 34a from entering the display portion 37b, can improve the light extraction efficiency of the display device 41a.
注意,在圖2B所示的顯示裝置中,也可以設置圖2A所示的基板13b代替基板16。也就是說,顯示裝置41b所包括的基板中也可以只有設置在顯示部37a與顯示部37b之間的基板具有撓性。此外,顯示裝置41a所包括的基板13a也可以具有撓性。注意,例如也可以使圖2A所示的基板11b的厚度比基板11a的厚度薄。也就是說,也可以在顯示裝置41b所包括的基板為不具有撓性的基板的同時使該基板的厚度比基板11a的厚度薄。此外,也可以在基板13a為不具有撓性的基板的同時使基板13a的厚度比基板11a的厚度薄。Note that, in the display device shown in FIG. 2B , the substrate 13 b shown in FIG. 2A may also be provided instead of the substrate 16 . That is, among the substrates included in the display device 41b, only the substrate provided between the display portion 37a and the display portion 37b may have flexibility. In addition, the substrate 13a included in the display device 41a may also have flexibility. Note that, for example, the thickness of the substrate 11b shown in FIG. 2A may be made thinner than the thickness of the substrate 11a. That is, the substrate included in the display device 41b may be made thinner than the substrate 11a while the substrate is not flexible. In addition, the thickness of the substrate 13a may be made thinner than the thickness of the substrate 11a while the substrate 13a is a non-flexible substrate.
作為具有撓性的基板可以使用如下材料:聚對苯二甲酸乙二醇酯(PET)或聚萘二甲酸乙二醇酯(PEN)等聚酯樹脂、聚丙烯腈樹脂、丙烯酸樹脂、聚醯亞胺樹脂、聚甲基丙烯酸甲酯樹脂、聚碳酸酯(PC)樹脂、聚醚碸(PES)樹脂、聚醯胺樹脂(尼龍或芳香族聚醯胺等)、聚矽氧烷樹脂、環烯烴樹脂、聚苯乙烯樹脂、聚醯胺-醯亞胺樹脂、聚氨酯樹脂、聚氯乙烯樹脂、聚偏二氯乙烯樹脂、聚丙烯樹脂、聚四氟乙烯(PTFE)樹脂、ABS樹脂或者纖維素奈米纖維等。此外,也可以使用具有撓性的程度的厚度的玻璃。這裡,藉由將上述材料用於基板,該基板可以透過可見光。As the flexible substrate, the following materials can be used: polyester resin such as polyethylene terephthalate (PET) or polyethylene naphthalate (PEN), polyacrylonitrile resin, acrylic resin, polyamide Imine resin, polymethyl methacrylate resin, polycarbonate (PC) resin, polyether sulfide (PES) resin, polyamide resin (nylon or aromatic polyamide, etc.), polysiloxane resin, cyclo Olefin resin, polystyrene resin, polyamide-imide resin, polyurethane resin, polyvinyl chloride resin, polyvinylidene chloride resin, polypropylene resin, polytetrafluoroethylene (PTFE) resin, ABS resin or cellulose nanofibers, etc. In addition, glass having a thickness of a degree of flexibility can also be used. Here, by using the above-mentioned material for the substrate, the substrate can transmit visible light.
具有撓性的基板的厚度在可以同時實現撓性與機械強度的範圍內。例如,具有撓性的基板的厚度可以為1μm以上且300μm以下,較佳為10μm以上且300μm以下,更佳為10μm以上且100μm以下,進一步較佳為10μm以上且50μm以下。注意,例如圖2A所示的基板11b也可以在該厚度的範圍內。也就是說,也可以在顯示裝置41b所包括的基板為不具有撓性的基板的同時使該基板的厚度在上述厚度的範圍內。The thickness of the flexible substrate is within a range where both flexibility and mechanical strength can be achieved. For example, the thickness of the flexible substrate may be 1 μm to 300 μm, preferably 10 μm to 300 μm, more preferably 10 μm to 100 μm, further preferably 10 μm to 50 μm. Note that, for example, the substrate 11b shown in FIG. 2A may also be within this thickness range. That is, the thickness of the substrate included in the display device 41b may be within the above thickness range while being non-flexible.
後面所示的結構中有時用基板15代替基板11b且用基板16代替基板13b。In the structure shown later, the substrate 15 may be used instead of the substrate 11b and the substrate 16 may be used instead of the substrate 13b.
圖2C是圖2B所示的結構的變形例子,圖2C與圖2B的不同之處在於顯示裝置41a不包括基板13a。例如,可以在層12a上直接設置上述各種光學構件且在其上設置顯示裝置41b。FIG. 2C is a modified example of the structure shown in FIG. 2B . The difference between FIG. 2C and FIG. 2B is that the display device 41 a does not include the substrate 13 a. For example, the various optical members described above may be directly provided on the layer 12a and the display device 41b may be provided thereon.
藉由省略基板13a,例如可以使以基板11a的表面為基準的顯示部37b的高度與顯示部37a的高度之差縮小。由此,電子裝置10的用戶可以看到高品質的影像。此外,可以抑制光34a入射到顯示部37b,因此可以提高顯示裝置41a的光提取效率。注意,在圖2C所示的顯示裝置41b中,也可以設置基板11b代替基板15且設置基板13b代替基板16。也就是說,即使在顯示裝置41a中不設置基板13a,設置在顯示裝置41b中的基板也可以不具有撓性。By omitting the substrate 13a, for example, the difference between the height of the display portion 37b and the height of the display portion 37a based on the surface of the substrate 11a can be reduced. Thus, the user of the electronic device 10 can watch high-quality images. In addition, since the light 34a can be suppressed from entering the display portion 37b, the light extraction efficiency of the display device 41a can be improved. Note that, in the display device 41 b shown in FIG. 2C , a substrate 11 b may be provided instead of the substrate 15 and a substrate 13 b may be provided instead of the substrate 16 . That is, even if the substrate 13a is not provided in the display device 41a, the substrate provided in the display device 41b may not have flexibility.
圖3A是圖2A所示的結構的變形例子,圖3A與圖2A所示的結構的不同之處在於在基板13a與基板11b之間設置黏合層14。黏合層14透過光34a。黏合層14例如透過可見光。FIG. 3A is a modified example of the structure shown in FIG. 2A . The difference between FIG. 3A and the structure shown in FIG. 2A is that an adhesive layer 14 is provided between the substrate 13 a and the substrate 11 b. The adhesive layer 14 transmits the light 34a. The adhesive layer 14 transmits visible light, for example.
藉由使用黏合層14貼合顯示裝置41a與顯示裝置41b,可以抑制在顯示裝置41a與顯示裝置41b之間形成間隙。由此,可以抑制從顯示裝置41a射出的光34a被該間隙反射或折射。因此,顯示裝置41a可以顯示高品質的影像。By bonding the display device 41a and the display device 41b together using the adhesive layer 14, it is possible to suppress the formation of a gap between the display device 41a and the display device 41b. Thereby, the light 34a emitted from the display device 41a can be suppressed from being reflected or refracted by the gap. Therefore, the display device 41a can display high-quality images.
如上所述,在基板13a上的不與顯示部37b重疊的區域中較佳為設置黏合層14。另一方面,在基板13a上的不與顯示部37b重疊的區域中也可以不設置黏合層14。As described above, it is preferable to provide the adhesive layer 14 in a region on the substrate 13a that does not overlap the display portion 37b. On the other hand, the adhesive layer 14 does not need to be provided in the area which does not overlap with the display part 37b on the board|substrate 13a.
作為黏合層14,可以使用紫外線硬化型黏合劑等光硬化型黏合劑、反應硬化型黏合劑、熱固性黏合劑或厭氧黏合劑等各種硬化型黏合劑。作為這些黏合劑,可以舉出環氧樹脂、丙烯酸樹脂、矽酮樹脂、酚醛樹脂、聚醯亞胺樹脂、醯亞胺樹脂、PVC(聚氯乙烯)樹脂、PVB(聚乙烯醇縮丁醛)樹脂、EVA(乙烯-乙酸乙烯酯)樹脂等。尤其較佳為使用環氧樹脂等透濕性低的材料。另外,也可以使用兩液混合型樹脂。此外,例如也可以使用黏合薄片。As the adhesive layer 14 , various curable adhesives such as photocurable adhesives such as ultraviolet curable adhesives, reaction curable adhesives, thermosetting adhesives, and anaerobic adhesives can be used. Examples of these adhesives include epoxy resins, acrylic resins, silicone resins, phenolic resins, polyimide resins, imide resins, PVC (polyvinyl chloride) resins, and PVB (polyvinyl butyral) resin, EVA (ethylene-vinyl acetate) resin, etc. In particular, it is preferable to use a material with low moisture permeability such as epoxy resin. In addition, a two-liquid mixed type resin can also be used. In addition, for example, an adhesive sheet can also be used.
圖3B是圖2A所示的結構的變形例子,圖3B與圖2A所示的結構的不同之處在於顯示裝置41a上設置有基板13b,基板13b上設置有包括顯示部37b的層12b且層12b上設置有基板11b。3B is a modified example of the structure shown in FIG. 2A. The difference between FIG. 3B and the structure shown in FIG. A substrate 11b is provided on 12b.
例如在圖2A所示的顯示裝置41b中在顯示部37b的下側設置驅動電路。另一方面,在圖3B所示的顯示裝置41b中在顯示部37b的上側設置驅動電路。此外,例如在圖2A所示的顯示裝置41b中從顯示部37b射出的光34b透過基板13b。另一方面,在圖3B所示的顯示裝置41b中光34b透過基板11b。例如圖2A所示的顯示裝置41b是頂部發射型顯示裝置,圖3B所示的顯示裝置41b是底部發射型顯示裝置。For example, in the display device 41b shown in FIG. 2A, a drive circuit is provided below the display portion 37b. On the other hand, in the display device 41b shown in FIG. 3B, a drive circuit is provided above the display portion 37b. In addition, for example, in the display device 41b shown in FIG. 2A , the light 34b emitted from the display portion 37b passes through the substrate 13b. On the other hand, in the display device 41b shown in FIG. 3B, the light 34b passes through the substrate 11b. For example, the display device 41b shown in FIG. 2A is a top emission display device, and the display device 41b shown in FIG. 3B is a bottom emission display device.
圖3C是圖2A所示的結構的變形例子,圖3C與圖2A所示的結構的不同之處在於顯示裝置41b上設置有顯示裝置41a。如上所述,基板11a例如可以具有可見光不透過的結構。因此,例如可以以與顯示部37a整體重疊的方式設置顯示部37b。此外,基板11b例如具有可見光不透過的結構。FIG. 3C is a modified example of the structure shown in FIG. 2A . The difference between FIG. 3C and the structure shown in FIG. 2A is that a display device 41 a is provided on the display device 41 b. As described above, the substrate 11a may have, for example, a structure that does not transmit visible light. Therefore, for example, the display portion 37b may be provided so as to overlap the entirety of the display portion 37a. In addition, the substrate 11b has, for example, a structure that does not transmit visible light.
圖4A是圖2A所示的結構的變形例子,圖4A與圖2A所示的結構的不同之處在於顯示裝置41b的層12b中設置有顯示部37c。顯示部37c以與顯示裝置41a所包括的顯示部37a重疊的方式設置。在圖4A所示的結構中,顯示部37包括顯示部37a、顯示部37b及顯示部37c。雖然未圖示,但在顯示部37c中排列多個像素,例如像素排列為矩陣狀。像素包括發射可見光的發光元件,藉由從像素射出發光元件所發射的光作為光34c,可以在顯示部37c上顯示影像。這裡,顯示部37c的像素密度比顯示部37a的像素密度低,可以與顯示部37b的像素密度相等。因此,顯示在顯示部37c上的影像的清晰度比顯示在顯示部37a上的影像的清晰度低,可以與顯示在顯示部37b上的影像的清晰度相等。FIG. 4A is a modified example of the structure shown in FIG. 2A. The difference between FIG. 4A and the structure shown in FIG. 2A is that a display portion 37c is provided in the layer 12b of the display device 41b. The display unit 37c is provided so as to overlap the display unit 37a included in the display device 41a. In the configuration shown in FIG. 4A , the display unit 37 includes a display unit 37a, a display unit 37b, and a display unit 37c. Although not shown, a plurality of pixels are arranged in the display unit 37c, for example, the pixels are arranged in a matrix. The pixel includes a light-emitting element that emits visible light, and by emitting the light emitted from the light-emitting element from the pixel as light 34c, an image can be displayed on the display portion 37c. Here, the pixel density of the display portion 37c is lower than that of the display portion 37a, and may be equal to the pixel density of the display portion 37b. Therefore, the resolution of the video displayed on the display unit 37c is lower than that of the video displayed on the display unit 37a, and may be equal to the resolution of the video displayed on the display unit 37b.
光34c透過基板13b。此外,上述像素包括具有控制發光元件的驅動的功能的像素電路。如上所述,像素電路包括電晶體。The light 34c passes through the substrate 13b. In addition, the above-mentioned pixel includes a pixel circuit having a function of controlling the driving of the light-emitting element. As mentioned above, the pixel circuit includes transistors.
在圖4A所示的結構中,從顯示部37a射出的光34a入射到顯示部37c。因此,顯示部37c具有光34a透過的結構,明確而言,具有顯示部37c的光34a的穿透率比顯示部37b高的結構。例如,顯示部37c具有可見光透過的結構,明確而言顯示部37c的可見光穿透率比顯示部37b高。例如,設置在顯示部37c中的發光元件所包括的電極具有光34a透過的結構。此外,設置在顯示部37c中的像素電路所包括的電晶體中的層為光34a透過的層。另外,在該像素電路例如具有電容器時,構成電容器的層為光34a透過的層。再者,例如設置在顯示部37c中的佈線也具有光34a透過的結構。如上所述,顯示部37c可以透過光34a。In the configuration shown in FIG. 4A , the light 34a emitted from the display portion 37a enters the display portion 37c. Therefore, the display portion 37c has a structure in which the light 34a passes through, and specifically, the display portion 37c has a structure in which the transmittance of the light 34a is higher than that of the display portion 37b. For example, the display portion 37c has a structure through which visible light is transmitted. Specifically, the visible light transmittance of the display portion 37c is higher than that of the display portion 37b. For example, the electrodes included in the light emitting element provided in the display portion 37c have a structure through which the light 34a passes. In addition, the layer among the transistors included in the pixel circuit provided in the display portion 37c is a layer through which the light 34a passes. In addition, when the pixel circuit has a capacitor, for example, the layer constituting the capacitor is a layer through which the light 34 a passes. In addition, for example, wiring provided in the display portion 37c also has a structure through which the light 34a passes. As described above, the display portion 37c can transmit the light 34a.
如上所述,在圖4A所示的結構中,電子裝置10的用戶可以重疊地看到顯示裝置41b所包括的顯示部37c上顯示的影像與顯示裝置41a所包括的顯示部37a上顯示的影像。這裡,較佳為根據能夠顯示在顯示部37c上的影像的清晰度比能夠顯示在顯示部37a上的影像的清晰度低而在顯示部37a及顯示部37c上顯示影像。例如,可以在顯示部37c上顯示示出顯示部37a所顯示的影像的要注目的點的游標等標記。As described above, in the structure shown in FIG. 4A , the user of the electronic device 10 can see the image displayed on the display unit 37c included in the display device 41b and the image displayed on the display unit 37a included in the display device 41a in superposition. . Here, it is preferable to display the video on the display unit 37a and the display unit 37c because the resolution of the video that can be displayed on the display unit 37c is lower than that of the video that can be displayed on the display unit 37a. For example, a mark such as a cursor indicating a point to pay attention to in the video displayed on the display unit 37 a may be displayed on the display unit 37 c.
圖4B是圖4A所示的結構的變形例子,圖4B與圖4A所示的結構的不同之處在於顯示部37c包括不與顯示部37a重疊的區域。注意,圖4B示出顯示裝置41b不包括顯示部37b的例子,但顯示裝置41b也可以包括顯示部37b。例如,也可以在不與顯示裝置41a重疊的區域設置顯示部37b。注意,在圖4B所示的結構中有時顯示部37c的不與顯示裝置41a重疊的區域透過外光的光44。FIG. 4B is a modified example of the structure shown in FIG. 4A . The difference between FIG. 4B and the structure shown in FIG. 4A is that the display portion 37 c includes a region that does not overlap the display portion 37 a. Note that FIG. 4B shows an example in which the display device 41b does not include the display portion 37b, but the display device 41b may also include the display portion 37b. For example, the display unit 37b may be provided in a region that does not overlap the display device 41a. Note that, in the configuration shown in FIG. 4B , there may be cases where the outside light 44 is transmitted through a region of the display unit 37 c that does not overlap the display device 41 a.
圖5A是示出包括顯示部37a的顯示裝置41a的結構例子的方塊圖。如上所述,在顯示部37a中排列多個像素27a,例如像素27a排列為矩陣狀。此外,顯示裝置41a包括閘極驅動器電路42a及源極驅動器電路43a。雖然在圖5A中未示出,但閘極驅動器電路42a及源極驅動器電路43a與像素27a電連接。閘極驅動器電路42a及源極驅動器電路43a是顯示裝置41a的驅動電路。FIG. 5A is a block diagram showing a configuration example of a display device 41a including a display portion 37a. As described above, a plurality of pixels 27a are arranged in the display portion 37a, for example, the pixels 27a are arranged in a matrix. In addition, the display device 41a includes a gate driver circuit 42a and a source driver circuit 43a. Although not shown in FIG. 5A, the gate driver circuit 42a and the source driver circuit 43a are electrically connected to the pixel 27a. The gate driver circuit 42a and the source driver circuit 43a are drive circuits of the display device 41a.
在顯示裝置41a中可以由源極驅動器電路43a對閘極驅動器電路42a所選擇的像素27a寫入影像資料。藉由對像素27a寫入影像資料,像素27a射出對應影像資料的亮度的光34a。由此,可以在顯示部37a上顯示影像。In the display device 41a, image data can be written to the pixel 27a selected by the gate driver circuit 42a by the source driver circuit 43a. By writing the image data into the pixel 27a, the pixel 27a emits the light 34a with the brightness corresponding to the image data. Thereby, video can be displayed on the display unit 37a.
圖5B是示出包括顯示部37b的顯示裝置41b的結構例子的方塊圖。如上所述,在顯示部37b中排列多個像素27b。這裡,在顯示裝置41b中設置不排列像素27b的區域47,以圍繞區域47的方式設置顯示部37b。區域47是與顯示裝置41a的顯示部37a重疊的區域。注意,在顯示裝置41b具有圖4A所示的結構時,區域47設置有顯示部37c。此外,在顯示裝置41b具有圖4B所示的結構時,設置顯示部37c代替顯示部37b,也在區域47設置顯示部37c。FIG. 5B is a block diagram showing a configuration example of a display device 41b including a display portion 37b. As described above, a plurality of pixels 27b are arranged in the display portion 37b. Here, a region 47 in which the pixels 27 b are not arranged is provided in the display device 41 b, and the display portion 37 b is provided so as to surround the region 47 . The area 47 is an area overlapping the display portion 37a of the display device 41a. Note that when the display device 41b has the structure shown in FIG. 4A, the area 47 is provided with the display portion 37c. In addition, when the display device 41b has the structure shown in FIG. 4B, the display part 37c is provided instead of the display part 37b, and the display part 37c is also provided in the area|region 47.
顯示裝置41b包括閘極驅動器電路42b及源極驅動器電路43b。雖然圖5B未圖示,閘極驅動器電路42b及源極驅動器電路43b與像素27b電連接。閘極驅動器電路42b及源極驅動器電路43b是顯示裝置41b的驅動電路。The display device 41b includes a gate driver circuit 42b and a source driver circuit 43b. Although not shown in FIG. 5B, the gate driver circuit 42b and the source driver circuit 43b are electrically connected to the pixel 27b. The gate driver circuit 42b and the source driver circuit 43b are drive circuits of the display device 41b.
在顯示裝置41b中可以由源極驅動器電路43b對閘極驅動器電路42b所選擇的像素27b寫入影像資料。藉由對像素27b寫入影像資料,像素27b射出對應影像資料的亮度的光34b,由此可以在顯示部37b上顯示影像。In the display device 41b, image data can be written to the pixel 27b selected by the gate driver circuit 42b by the source driver circuit 43b. By writing video data to the pixel 27b, the pixel 27b emits light 34b with a brightness corresponding to the video data, thereby displaying a video on the display unit 37b.
圖6A是示出顯示裝置41a的結構例子的立體圖。如圖6A所示,顯示裝置41a可以包括層40、層40上的層50及層50上的層60。FIG. 6A is a perspective view showing a structural example of the display device 41a. As shown in FIG. 6A , display device 41 a may include layer 40 , layer 50 on layer 40 , and layer 60 on layer 50 .
在層50中排列多個像素電路51,在層60中排列多個發光元件61。像素電路51與發光元件61電連接,將其用作像素27a。因此,設置在層50中的多個像素電路51與設置在層60中的多個發光元件61重疊的區域被用作顯示部37a。A plurality of pixel circuits 51 are arranged in layer 50 , and a plurality of light emitting elements 61 are arranged in layer 60 . The pixel circuit 51 is electrically connected to the light emitting element 61, which is used as a pixel 27a. Therefore, a region where the plurality of pixel circuits 51 provided in the layer 50 overlaps with the plurality of light emitting elements 61 provided in the layer 60 is used as the display portion 37a.
層40中設置有閘極驅動器電路42a及源極驅動器電路43a。藉由閘極驅動器電路42a及源極驅動器電路43a設置在與像素電路51不同的層中,閘極驅動器電路42a及源極驅動器電路43a可以與顯示部37a重疊地設置。因此,與以不與顯示部37a重疊的方式設置閘極驅動器電路42a及源極驅動器電路43a的情況相比,可以縮小顯示部37a周圍的邊框的寬度。因此,可以增大顯示部37a的佔有面積。In the layer 40, a gate driver circuit 42a and a source driver circuit 43a are provided. Since the gate driver circuit 42a and the source driver circuit 43a are provided in a layer different from the pixel circuit 51, the gate driver circuit 42a and the source driver circuit 43a can be provided overlapping the display portion 37a. Therefore, compared with the case where the gate driver circuit 42a and the source driver circuit 43a are provided so as not to overlap the display portion 37a, the width of the frame around the display portion 37a can be reduced. Therefore, the occupied area of the display portion 37a can be increased.
藉由層疊地設置像素電路51和閘極驅動器電路42a及源極驅動器電路43a,可以縮短使它們彼此電連接的佈線。因此,佈線電阻及寄生電容得到降低。由此,例如由於可以縮短佈線的充放電所需的時間,所以可以高速驅動顯示裝置41a。此外,由於可以降低顯示裝置41a的功耗,所以可以降低電子裝置10的功耗。By stacking the pixel circuit 51, the gate driver circuit 42a, and the source driver circuit 43a, wiring for electrically connecting them can be shortened. Therefore, wiring resistance and parasitic capacitance are reduced. Thereby, for example, since the time required for charging and discharging the wiring can be shortened, the display device 41a can be driven at high speed. Furthermore, since the power consumption of the display device 41a can be reduced, the power consumption of the electronic device 10 can be reduced.
注意,閘極驅動器電路42a及源極驅動器電路43a也可以設置在與像素電路51相同的層中。此時,例如閘極驅動器電路42a所包括的電晶體及源極驅動器電路43a所包括的電晶體和像素電路51所包括的電晶體可以在同一製程中形成。此外,例如閘極驅動器電路42a所包括的電晶體的一部分及源極驅動器電路43a所包括的電晶體的一部分也可以設置在層50中。也就是說,閘極驅動器電路42a及源極驅動器電路43a也可以設置在層40和層50中。此外,閘極驅動器電路42a和源極驅動器電路43a中的一個也可以設置在層40中且閘極驅動器電路42a和源極驅動器電路43a中的另一個也可以設置在層50中。Note that the gate driver circuit 42 a and the source driver circuit 43 a may also be provided in the same layer as the pixel circuit 51 . At this time, for example, the transistors included in the gate driver circuit 42a, the transistors included in the source driver circuit 43a, and the transistors included in the pixel circuit 51 can be formed in the same process. Furthermore, for example, a part of the transistors included in the gate driver circuit 42 a and a part of the transistors included in the source driver circuit 43 a may also be provided in the layer 50 . That is to say, the gate driver circuit 42 a and the source driver circuit 43 a may also be provided in the layer 40 and the layer 50 . Furthermore, one of gate driver circuit 42 a and source driver circuit 43 a may also be provided in layer 40 and the other of gate driver circuit 42 a and source driver circuit 43 a may also be provided in layer 50 .
圖6B是圖6A所示的結構的變形例子,也是示出設置多個閘極驅動器電路42a及多個源極驅動器電路43a的例子。圖6B示出設置2行2列的閘極驅動器電路42a及源極驅動器電路43a的例子。FIG. 6B is a modification example of the structure shown in FIG. 6A, and also shows an example in which a plurality of gate driver circuits 42a and a plurality of source driver circuits 43a are provided. FIG. 6B shows an example in which gate driver circuits 42 a and source driver circuits 43 a are provided in two rows and two columns.
在圖6B中,將2行2列的閘極驅動器電路42a記載為閘極驅動器電路42a[1,1]、閘極驅動器電路42a[1,2]、閘極驅動器電路42a[2,1]及閘極驅動器電路42a[2,2]而進行區別。此外,將2行2列的源極驅動器電路43a記載為源極驅動器電路43a[1,1]、源極驅動器電路43a[1,2]、源極驅動器電路43a[2,1]及源極驅動器電路43a[2,2]而進行區別。In FIG. 6B, the gate driver circuit 42a of 2 rows and 2 columns is described as gate driver circuit 42a[1,1], gate driver circuit 42a[1,2], gate driver circuit 42a[2,1] and the gate driver circuit 42a[2,2]. In addition, the source driver circuit 43a of 2 rows and 2 columns is described as source driver circuit 43a[1,1], source driver circuit 43a[1,2], source driver circuit 43a[2,1], and source driver circuit 43a[1,1]. The driver circuit 43a[2,2] is distinguished.
藉由設置多個閘極驅動器電路42a,可以縮短像素電路51與閘極驅動器電路42a電連接的佈線。明確而言,可以減少從像素電路51到閘極驅動器電路42a的佈線長度的最大值。此外,藉由設置多個源極驅動器電路43a,可以縮短像素電路51與源極驅動器電路43a電連接的佈線。明確而言,可以減少從像素電路51到源極驅動器電路43a的佈線長度的最大值。因此,佈線電阻及寄生電容得到降低。由此,例如由於可以縮短佈線的充放電所需的時間,所以可以高速驅動顯示裝置41a。此外,由於可以降低顯示裝置41a的功耗,所以可以降低電子裝置10的功耗。再者,由於例如可以減少一個閘極驅動器電路42a掃描的像素電路51的行數,所以可以提高顯示裝置41a的圖框頻率。By providing a plurality of gate driver circuits 42a, wiring for electrically connecting the pixel circuit 51 and the gate driver circuits 42a can be shortened. Specifically, the maximum value of the wiring length from the pixel circuit 51 to the gate driver circuit 42a can be reduced. In addition, by providing a plurality of source driver circuits 43a, wiring for electrically connecting the pixel circuit 51 and the source driver circuits 43a can be shortened. Specifically, the maximum value of the wiring length from the pixel circuit 51 to the source driver circuit 43a can be reduced. Therefore, wiring resistance and parasitic capacitance are reduced. Thereby, for example, since the time required for charging and discharging the wiring can be shortened, the display device 41a can be driven at high speed. Furthermore, since the power consumption of the display device 41a can be reduced, the power consumption of the electronic device 10 can be reduced. Furthermore, since, for example, the number of rows of pixel circuits 51 scanned by one gate driver circuit 42a can be reduced, the frame frequency of the display device 41a can be increased.
圖6B示出閘極驅動器電路42a包括與源極驅動器電路43a重疊的區域的例子,但也可以不使閘極驅動器電路42a與源極驅動器電路43a重疊。藉由具有閘極驅動器電路42a包括與源極驅動器電路43a重疊的區域的結構,可以提高閘極驅動器電路42a及源極驅動器電路43a的佈局彈性。另一方面,藉由採用閘極驅動器電路42a不與源極驅動器電路43a重疊的結構,可以抑制閘極驅動器電路42a的驅動與源極驅動器電路43a的驅動彼此受到影響。FIG. 6B shows an example in which the gate driver circuit 42a includes a region overlapping the source driver circuit 43a, but the gate driver circuit 42a and the source driver circuit 43a need not overlap. By having a structure in which the gate driver circuit 42a includes a region overlapping with the source driver circuit 43a, the layout flexibility of the gate driver circuit 42a and the source driver circuit 43a can be improved. On the other hand, by adopting a structure in which the gate driver circuit 42a does not overlap the source driver circuit 43a, it is possible to suppress the driving of the gate driver circuit 42a and the driving of the source driver circuit 43a from being affected by each other.
圖7是圖6A所示的結構的變形例子,也示出在層40中除了閘極驅動器電路42a及源極驅動器電路43a以外還設置圖1A所示的通訊電路57及控制電路59的例子。也就是說,示出在顯示裝置41a中以包括與顯示部37a重疊的區域的方式設置通訊電路57及控制電路59的例子。由此,與通訊電路57及控制電路59設置在顯示裝置41a的外部的情況相比,可以增大顯示部37的佔有面積。注意,設置在電子裝置10中的通訊電路57及控制電路59以外的電路也可以設置在層40中。FIG. 7 is a modified example of the structure shown in FIG. 6A, and also shows an example in which the communication circuit 57 and the control circuit 59 shown in FIG. 1A are provided in the layer 40 in addition to the gate driver circuit 42a and the source driver circuit 43a. That is, an example is shown in which the communication circuit 57 and the control circuit 59 are provided in the display device 41 a so as to include a region overlapping with the display unit 37 a. This makes it possible to increase the area occupied by the display unit 37 compared to the case where the communication circuit 57 and the control circuit 59 are provided outside the display device 41 a. Note that circuits other than the communication circuit 57 and the control circuit 59 provided in the electronic device 10 may also be provided in the layer 40 .
在圖7所示的顯示裝置41a中,閘極驅動器電路42a和源極驅動器電路43a中的一者或兩者也可以設置在層50中。由此,可以增大設置通訊電路57及控制電路59等的區域的佔有面積。In the display device 41 a shown in FIG. 7 , one or both of the gate driver circuit 42 a and the source driver circuit 43 a may also be provided in the layer 50 . Thereby, the occupied area of the area where the communication circuit 57, the control circuit 59, etc. are provided can be enlarged.
圖8是示出電子裝置10的結構例子的方塊圖。電子裝置10所包括的顯示裝置41a、顯示裝置41b、通訊電路57及控制電路59藉由匯流排BW互相收發各種資料及信號等。這裡,圖1A所示的顯示部37L包括顯示部37aL及顯示部37bL,顯示部37R包括顯示部37aR及顯示部37bR。並且,包括顯示部37aL的顯示裝置41a為顯示裝置41aL,包括顯示部37aR的顯示裝置41a為顯示裝置41aR。此外,顯示裝置41aL所包括的閘極驅動器電路42a及源極驅動器電路43a分別為閘極驅動器電路42aL及源極驅動器電路43aL,顯示裝置41aR所包括的閘極驅動器電路42a及源極驅動器電路43a分別為閘極驅動器電路42aR及源極驅動器電路43aR。此外,包括顯示部37bL的顯示裝置41b為顯示裝置41bL,包括顯示部37bR的顯示裝置41b為顯示裝置41bR。再者,顯示裝置41bL所包括的閘極驅動器電路42b、源極驅動器電路43b及區域47分別為閘極驅動器電路42bL、源極驅動器電路43bL及區域47L,顯示裝置41bR所包括的閘極驅動器電路42b、源極驅動器電路43b及區域47分別為閘極驅動器電路42bR、源極驅動器電路43bR及區域47R。FIG. 8 is a block diagram showing a structural example of the electronic device 10 . The display device 41a, the display device 41b, the communication circuit 57, and the control circuit 59 included in the electronic device 10 send and receive various data and signals to each other through the bus BW. Here, the display unit 37L shown in FIG. 1A includes a display unit 37aL and a display unit 37bL, and the display unit 37R includes a display unit 37aR and a display unit 37bR. Furthermore, the display device 41a including the display portion 37aL is a display device 41aL, and the display device 41a including the display portion 37aR is a display device 41aR. In addition, the gate driver circuit 42a and the source driver circuit 43a included in the display device 41aL are respectively the gate driver circuit 42aL and the source driver circuit 43aL, and the gate driver circuit 42a and the source driver circuit 43a included in the display device 41aR These are the gate driver circuit 42aR and the source driver circuit 43aR, respectively. In addition, the display device 41b including the display portion 37bL is a display device 41bL, and the display device 41b including the display portion 37bR is a display device 41bR. Furthermore, the gate driver circuit 42b, the source driver circuit 43b and the region 47 included in the display device 41bL are respectively the gate driver circuit 42bL, the source driver circuit 43bL and the region 47L, and the gate driver circuit included in the display device 41bR 42b, source driver circuit 43b and region 47 are gate driver circuit 42bR, source driver circuit 43bR and region 47R, respectively.
通訊電路57具有以無線或有線與外部設備進行通訊的功能。通訊電路57例如具有從外部設備接收影像資料的功能。此外,通訊電路57也可以具有將電子裝置10所生成的資料發送到外部設備的功能。The communication circuit 57 has a function of wirelessly or wiredly communicating with external devices. The communication circuit 57 has, for example, a function of receiving image data from an external device. In addition, the communication circuit 57 may also have the function of sending the data generated by the electronic device 10 to an external device.
例如可以在通訊電路57中設置高頻電路(RF電路)進行RF信號的發送和接收。高頻電路是用來將各國法制所規定的頻帶的電磁信號與電信號彼此變換且使用該電磁信號以無線方式與其他通訊設備進行通訊的電路。在進行無線通訊時,作為通訊協定或通訊技術可以使用:通訊標準諸如LTE(Long Term Evolution:長期演進)、GSM(Global System for Mobile Communication:在日本註冊的商標:全球移動通訊系統)、EDGE(Enhanced Data Rates for GSM Evolution:GSM增強資料率演進)、CDMA2000(Code Division Multiple Access 2000:碼分多址2000)、W-CDMA(Wideband Code Division Multiple Access:在日本註冊的商標:寬頻碼分多址);或者由IEEE(電氣電子工程師學會)通訊標準化的規格諸如Wi-Fi(Wireless Fidelity:在日本註冊的商標:無線保真)、Bluetooth(在日本註冊的商標:藍牙)、ZigBee(在日本註冊的商標)等。此外,可以使用國際電信聯盟(ITU)所決定的第三代移動通訊系統(3G)、第四代移動通訊系統(4G)或第五代移動通訊系統(5G)等。For example, a high-frequency circuit (RF circuit) may be provided in the communication circuit 57 to transmit and receive RF signals. A high-frequency circuit is a circuit that converts electromagnetic signals and electrical signals in frequency bands prescribed by the laws and regulations of each country, and communicates with other communication devices wirelessly using the electromagnetic signals. When performing wireless communication, as a communication protocol or communication technology, communication standards such as LTE (Long Term Evolution: Long Term Evolution), GSM (Global System for Mobile Communication: a trademark registered in Japan: Global System for Mobile Communications), EDGE ( Enhanced Data Rates for GSM Evolution: GSM Enhanced Data Rate Evolution), CDMA2000 (Code Division Multiple Access 2000: Code Division Multiple Access 2000), W-CDMA (Wideband Code Division Multiple Access: Trademark registered in Japan: Wideband Code Division Multiple Access ); or specifications standardized by IEEE (Institute of Electrical and Electronics Engineers) communications such as Wi-Fi (Wireless Fidelity: registered trademark in Japan: Wireless Fidelity), Bluetooth (registered trademark in Japan: Bluetooth), ZigBee (registered trademark in Japan trademark), etc. In addition, the third generation mobile communication system (3G), the fourth generation mobile communication system (4G) or the fifth generation mobile communication system (5G), etc. determined by the International Telecommunication Union (ITU) can be used.
另外,通訊電路57也可以包括LAN(Local Area Network:區域網路)連接用端子、數位廣播接收用端子或連接AC轉接器的端子等外部埠。In addition, the communication circuit 57 may include an external port such as a LAN (Local Area Network) connection terminal, a digital broadcast reception terminal, or a terminal for connecting to an AC adapter.
控制電路59例如具有根據通訊電路57接收的影像資料生成表示設置在顯示部37a中的發光元件所發射的光的亮度的資料(第一亮度資料)及表示設置在顯示部37b中的發光元件所發射的光的亮度的資料(第二亮度資料)的功能。例如,在影像資料具有像素的地址資訊及各像素的亮度資訊時,控制電路59可以根據地址資訊選擇使各像素的亮度資訊包括在第一亮度資料中還是包括在第二亮度資料中。注意,亮度資料也可以說是影像資料。The control circuit 59, for example, has data (first luminance data) representing the luminance of light emitted by the light-emitting elements provided in the display portion 37a based on the image data received by the communication circuit 57 and data representing the luminance of light emitted by the light-emitting elements provided in the display portion 37b. A function of the brightness data (second brightness data) of the emitted light. For example, when the image data has address information of pixels and brightness information of each pixel, the control circuit 59 can select whether to include the brightness information of each pixel in the first brightness data or in the second brightness data according to the address information. Note that brightness data can also be called image data.
這裡,控制電路59可以具有進行降低影像資料的解析度的下轉換的功能。此外,控制電路59也可以具有進行提高影像資料的解析度的上轉換的功能。例如,控制電路59可以對第二亮度資料進行下轉換。此外,控制電路59也可以對第一亮度資料進行上轉換。Here, the control circuit 59 may have a down-conversion function for reducing the resolution of the image data. In addition, the control circuit 59 may also have a function of performing up-conversion to increase the resolution of the video data. For example, the control circuit 59 can down-convert the second luminance data. In addition, the control circuit 59 can also up-convert the first luminance data.
控制電路59具有如下功能:將第一亮度資料供應給顯示裝置41a,明確而言供應給顯示裝置41a所包括的源極驅動器電路43a,將第二亮度資料供應給顯示裝置41b,明確而言供應給顯示裝置41b所包括的源極驅動器電路43b。The control circuit 59 has the following functions: to supply the first luminance data to the display device 41a, specifically to the source driver circuit 43a included in the display device 41a, to supply the second luminance data to the display device 41b, specifically to supply to the source driver circuit 43b included in the display device 41b.
作為控制電路59,可以單獨或組合地使用中央處理器(CPU:Central Processing Unit)、DSP(Digital Signal Processor:數位信號處理器)或GPU(Graphics Processing Unit:圖形處理器)等微處理器。另外,這些微處理器也可以由FPGA(Field Programmable Gate Array:現場可程式邏輯閘陣列)或FPAA(Field Programmable Analog Array:現場可程式類比陣列)等PLD(Programmable Logic Device:可程式邏輯器件)來構成。As the control circuit 59 , microprocessors such as a central processing unit (CPU: Central Processing Unit), a DSP (Digital Signal Processor: Digital Signal Processor), or a GPU (Graphics Processing Unit: Graphics Processing Unit) can be used alone or in combination. In addition, these microprocessors can also be implemented by PLD (Programmable Logic Device: Programmable Logic Device) such as FPGA (Field Programmable Gate Array) or FPAA (Field Programmable Analog Array: Field Programmable Analog Array). constitute.
控制電路59藉由由處理器解釋且執行來自各種程式的指令,可以進行各種資料處理及程式控制。可由處理器執行的程式可以儲存在處理器中的記憶體區,也可以儲存在另外設置的記憶體電路中。作為記憶體電路,例如也可以使用適用非揮發性記憶元件的記憶體裝置諸如快閃記憶體、MRAM(Magnetoresistive Random Access Memory)、PRAM(Phase change RAM:相變隨機存取記憶體)、ReRAM(Resistive RAM:電阻隨機存取記憶體)、FeRAM(Ferroelectric RAM:鐵電隨機存取記憶體)等或者適用揮發性記憶元件的記憶體裝置如DRAM(Dynamic RAM)及SRAM(Static RAM:靜態隨機存取記憶體)等。The control circuit 59 can perform various data processing and program control by interpreting and executing instructions from various programs by the processor. Programs executable by the processor can be stored in the memory area of the processor, or in an additional memory circuit. As the memory circuit, for example, a memory device to which a non-volatile memory element is applied, such as a flash memory, MRAM (Magnetoresistive Random Access Memory), PRAM (Phase change RAM: phase change random access memory), ReRAM ( Resistive RAM: Resistive Random Access Memory), FeRAM (Ferroelectric RAM: Ferroelectric Random Access Memory), etc., or memory devices suitable for volatile memory elements such as DRAM (Dynamic RAM) and SRAM (Static RAM: Static Random Access Memory) access memory), etc.
圖8示出顯示裝置41b不包括顯示部37c的例子,但顯示裝置41b也可以包括顯示部37c。此時,閘極驅動器電路42b及源極驅動器電路43b除了顯示部37b所包括的像素以外還可以控制顯示部37c所包括的像素的驅動。此外,圖8示出通訊電路57及控制電路59設置在顯示裝置41a及顯示裝置41b的外部的例子,但通訊電路57及控制電路59例如也可以設置在顯示裝置41a內。FIG. 8 shows an example in which the display device 41b does not include the display portion 37c, but the display device 41b may include the display portion 37c. In this case, the gate driver circuit 42b and the source driver circuit 43b can control the driving of the pixels included in the display section 37c in addition to the pixels included in the display section 37b. 8 shows an example in which the communication circuit 57 and the control circuit 59 are provided outside the display device 41a and the display device 41b, but the communication circuit 57 and the control circuit 59 may be provided in the display device 41a, for example.
<顯示部的結構例子> 以下參照圖9A至圖9C及圖10A至圖10C說明本發明的一個實施方式的電子裝置所包括的顯示裝置的結構例子。明確而言,說明設置在顯示裝置的顯示部所包括的像素中的發光元件的結構例子。圖9A至圖9C示出可以適用於顯示裝置41a的顯示裝置的結構例子,圖10A至圖10C示出可以適用於顯示裝置41b的顯示裝置的結構例子。注意,圖9A至圖9C所示的顯示裝置也可以用於顯示裝置41b,圖10A至圖10C所示的顯示裝置也可以用於顯示裝置41a。 <Structure example of the display part> A structural example of a display device included in an electronic device according to an embodiment of the present invention will be described below with reference to FIGS. 9A to 9C and FIGS. 10A to 10C . Specifically, a structural example of a light emitting element provided in a pixel included in a display portion of a display device will be described. 9A to 9C show structural examples of display devices that can be applied to the display device 41a, and FIGS. 10A to 10C show structural examples of display devices that can be applied to the display device 41b. Note that the display device shown in FIGS. 9A to 9C can also be used for the display device 41b, and the display device shown in FIGS. 10A to 10C can also be used for the display device 41a.
圖9A是示出發光元件61R、發光元件61G及發光元件61B的結構例子的剖面圖。發光元件61R可以發射在紅色的波長區域具有強度的光34aR。發光元件61G可以發射在綠色的波長區域具有強度的光34aG。發光元件61B可以發射在藍色的波長區域具有強度的光34aB。這裡,一個像素例如可以具有包括一個發光元件61R、一個發光元件61G及一個發光元件61B的結構。此外,像素包括子像素,一個子像素例如可以具有包括發光元件61R、發光元件61G和發光元件61B中的任一個的結構。如上所述,圖9A是一個像素包括三個子像素的例子。注意,關於本發明的一個實施方式的電子裝置所包括的顯示裝置的像素佈局,可以參照實施方式2。FIG. 9A is a cross-sectional view showing a structural example of a light emitting element 61R, a light emitting element 61G, and a light emitting element 61B. The light emitting element 61R can emit light 34aR having intensity in the red wavelength region. Light emitting element 61G can emit light 34aG having intensity in the green wavelength region. Light emitting element 61B can emit light 34aB having intensity in the blue wavelength region. Here, one pixel may have a structure including, for example, one light emitting element 61R, one light emitting element 61G, and one light emitting element 61B. Furthermore, a pixel includes sub-pixels, and one sub-pixel may have, for example, a structure including any one of the light-emitting element 61R, the light-emitting element 61G, and the light-emitting element 61B. As described above, FIG. 9A is an example in which one pixel includes three sub-pixels. Note that Embodiment 2 can be referred to regarding the pixel layout of a display device included in an electronic device according to an embodiment of the present invention.
這裡,紅色光例如可以為峰波長為630nm以上且780nm以下的光。此外,綠色光例如可以為峰波長為500nm以上且低於570nm的光。再者,藍色光例如可以為峰波長為450nm以上且低於480nm的光。Here, the red light may be, for example, light having a peak wavelength of not less than 630 nm and not more than 780 nm. In addition, green light may be, for example, light having a peak wavelength of not less than 500 nm and less than 570 nm. In addition, blue light may be light whose peak wavelength is 450 nm or more and less than 480 nm, for example.
在本說明書等中,在設置有發光元件的子像素中,俯視時的EL層的面積為子像素的佔有面積。此外,構成像素的子像素的佔有面積的總和為像素的佔有面積。例如,在像素包括三個子像素時,三個子像素的佔有面積的總和為像素的佔有面積。In this specification and the like, in a sub-pixel provided with a light-emitting element, the area of the EL layer in plan view is the occupied area of the sub-pixel. In addition, the sum of the occupied areas of sub-pixels constituting a pixel is the occupied area of a pixel. For example, when a pixel includes three sub-pixels, the sum of the occupied areas of the three sub-pixels is the occupied area of the pixel.
在圖9A所示的顯示裝置中,基板11a上設置有層363。層363中例如設置有圖6A所示的像素電路51。此外,層363中設置有閘極驅動器電路42a及源極驅動器電路43a等顯示裝置41a的驅動電路。這些電路中例如設置有電晶體,因此層363包括電晶體。In the display device shown in FIG. 9A, a layer 363 is provided on the substrate 11a. In the layer 363, for example, the pixel circuit 51 shown in FIG. 6A is provided. In addition, drive circuits for the display device 41 a such as the gate driver circuit 42 a and the source driver circuit 43 a are provided in the layer 363 . For example, transistors are provided in these circuits, so layer 363 includes transistors.
以覆蓋設置在層363中的電晶體的方式設置絕緣層。該絕緣層也包括在層363中。該絕緣層既可以具有單層結構又可以具有疊層結構。此外,作為該絕緣層可以使用無機絕緣膜和有機絕緣膜中的一者或兩者。作為無機絕緣膜,例如可以舉出氧化矽膜、氧氮化矽膜、氮氧化矽膜、氮化矽膜、氧化鋁膜、氧氮化鋁膜及氧化鉿膜等氧化物絕緣膜及氮化物絕緣膜。作為有機絕緣膜,可以舉出丙烯酸樹脂、聚醯亞胺樹脂、環氧樹脂、亞胺樹脂、聚醯胺樹脂、聚醯亞胺醯胺樹脂、矽酮樹脂、矽氧烷樹脂、苯并環丁烯類樹脂、酚醛樹脂及這些樹脂的前驅物等。An insulating layer is provided in such a way as to cover the transistors provided in layer 363 . This insulating layer is also included in layer 363 . The insulating layer may have either a single layer structure or a stacked layer structure. In addition, one or both of an inorganic insulating film and an organic insulating film can be used as the insulating layer. Examples of the inorganic insulating film include oxide insulating films such as a silicon oxide film, a silicon oxynitride film, a silicon nitride oxide film, a silicon nitride film, an aluminum oxide film, an aluminum oxynitride film, and a hafnium oxide film, and nitrides. insulating film. Examples of organic insulating films include acrylic resins, polyimide resins, epoxy resins, imide resins, polyamide resins, polyimideamide resins, silicone resins, siloxane resins, benzocyclo Butene resins, phenolic resins and precursors of these resins, etc.
注意,在本說明書中,氮氧化物是指氮含量大於氧含量的化合物。另外,氧氮化物是指氧含量大於氮含量的化合物。此外,例如可以使用拉塞福背散射光譜學法(RBS:Rutherford Backscattering Spectrometry)來測定各元素的含量。Note that, in this specification, nitrogen oxides refer to compounds in which the nitrogen content is greater than the oxygen content. In addition, an oxynitride refers to a compound having an oxygen content greater than a nitrogen content. In addition, for example, the content of each element can be measured using Rutherford Backscattering Spectrometry (RBS: Rutherford Backscattering Spectrometry).
發光元件61R、發光元件61G及發光元件61B都設置在層363上。明確而言,設置在層363中的上述絕緣層上可以設置發光元件61R、發光元件61G及發光元件61B。The light emitting element 61R, the light emitting element 61G, and the light emitting element 61B are all provided on the layer 363 . Specifically, the light-emitting element 61R, the light-emitting element 61G, and the light-emitting element 61B may be provided on the above-mentioned insulating layer provided in the layer 363 .
發光元件61R包括層363上的導電層171、導電層171上的EL層172R及EL層172R上的導電層173。發光元件61G包括層363上的導電層171、導電層171上的EL層172G及EL層172G上的導電層173。發光元件61B包括層363上的導電層171、導電層171上的EL層172B及EL層172B上的導電層173。The light emitting element 61R includes the conductive layer 171 on the layer 363 , the EL layer 172R on the conductive layer 171 , and the conductive layer 173 on the EL layer 172R. The light emitting element 61G includes the conductive layer 171 on the layer 363 , the EL layer 172G on the conductive layer 171 , and the conductive layer 173 on the EL layer 172G. Light emitting element 61B includes conductive layer 171 on layer 363 , EL layer 172B on conductive layer 171 , and conductive layer 173 on EL layer 172B.
在本說明書等中,有時將在發光波長不同的發光元件中至少分別製造發光層的結構稱為SBS(Side By Side)結構。例如,圖9A所示的發光元件61R、發光元件61G及發光元件61B具有SBS結構。在SBS結構中,可以分別進行各發光元件的材料及結構的最佳化,材料及結構的選擇彈性增大,亮度的提高以及可靠性的提高變得容易。In this specification and the like, a structure in which at least light-emitting layers are separately produced in light-emitting elements having different light-emitting wavelengths may be referred to as an SBS (Side By Side) structure. For example, a light emitting element 61R, a light emitting element 61G, and a light emitting element 61B shown in FIG. 9A have an SBS structure. In the SBS structure, the material and structure of each light emitting element can be optimized individually, the flexibility of material and structure selection increases, and the improvement of luminance and reliability becomes easy.
導電層171被用作像素電極,按每個發光元件分離。此外,導電層173被用作共用電極,在發光元件61R、發光元件61G及發光元件61B間設置為共同使用的一連續的層。The conductive layer 171 is used as a pixel electrode and is separated for each light emitting element. In addition, the conductive layer 173 is used as a common electrode, and is provided as a continuous layer commonly used among the light emitting element 61R, the light emitting element 61G, and the light emitting element 61B.
EL層172R、EL層172G及EL層172B按每個發光元件分離。也就是說,EL層172R、EL層172G及EL層172B都形成為島狀。藉由EL層172R、EL層172G及EL層172B形成為島狀且彼此不接觸,可以適當地防止電流經過相鄰的兩個EL層流過而產生非意圖的發光(也稱為串擾)。因此,可以提高對比度而可以實現顯示品質高的顯示裝置。注意,EL層172R、EL層172G及EL層172B也可以形成為帶狀。也就是說,排列在同一方向上的多個發光元件61R間、排列在同一方向上的多個發光元件61G間以及排列在同一方向上的多個發光元件61B也可以分別共同使用EL層172R、EL層172G以及EL層172B。The EL layer 172R, the EL layer 172G, and the EL layer 172B are separated for each light emitting element. That is, the EL layer 172R, the EL layer 172G, and the EL layer 172B are all formed in an island shape. Since the EL layer 172R, the EL layer 172G, and the EL layer 172B are formed in an island shape without contacting each other, unintended light emission (also called crosstalk) caused by current flowing through two adjacent EL layers can be properly prevented. Therefore, the contrast ratio can be improved, and a display device with high display quality can be realized. Note that the EL layer 172R, the EL layer 172G, and the EL layer 172B may also be formed in a belt shape. That is, the EL layer 172R, EL layer 172G and EL layer 172B.
EL層172R、EL層172G及EL層172B的端部位於導電層171的端部的外側,EL層172R、EL層172G及EL層172B可以具有覆蓋導電層171的端部的結構。注意,EL層172R、EL層172G及EL層172B的端部也可以位於導電層171的端部的內側。The ends of EL layer 172R, EL layer 172G, and EL layer 172B are located outside the end of conductive layer 171 , and EL layer 172R, EL layer 172G, and EL layer 172B may have a structure covering the end of conductive layer 171 . Note that the ends of the EL layer 172R, the EL layer 172G, and the EL layer 172B may be located inside the ends of the conductive layer 171 .
EL層172R包含發射至少在紅色波長區域具有強度的光的發光性有機化合物。EL層172G包含發射至少在綠色波長區域具有強度的光的發光性有機化合物。EL層172B包含發射至少在藍色波長區域具有強度的光的發光性有機化合物。The EL layer 172R contains a light-emitting organic compound that emits light having an intensity at least in the red wavelength region. The EL layer 172G contains a light-emitting organic compound that emits light having an intensity at least in the green wavelength region. The EL layer 172B contains a light-emitting organic compound that emits light having an intensity at least in the blue wavelength region.
除了包含發光性有機化合物的層(發光層)以外,EL層172R、EL層172G及EL層172B各自還可以包括電子注入層、電子傳輸層、電洞注入層及電洞傳輸層中的一個以上。注意,關於本發明的一個實施方式的電子裝置所包括的發光元件的結構及材料的詳細內容,可以參照實施方式4。Each of the EL layer 172R, the EL layer 172G, and the EL layer 172B may include one or more of an electron injection layer, an electron transport layer, a hole injection layer, and a hole transport layer, in addition to a layer (light-emitting layer) containing a light-emitting organic compound. . Note that for details of the structure and materials of the light emitting element included in the electronic device according to one embodiment of the present invention, refer to Embodiment 4.
如上所述,基板11a可以具有可見光不透過的結構,基板13a可以具有可見光透過的結構。因此,藉由作為導電層171使用對可見光具有反射性的導電膜且作為導電層173使用對可見光具有透過性的導電膜,光34aR、光34aG及光34aB射出到基板13a一側。這種顯示裝置可以說是頂部發射型(top-emission)顯示裝置。As described above, the substrate 11a may have a structure that does not transmit visible light, and the substrate 13a may have a structure that transmits visible light. Therefore, by using a conductive film reflective to visible light as conductive layer 171 and a conductive film transparent to visible light as conductive layer 173 , light 34aR, light 34aG, and light 34aB are emitted to the substrate 13a side. Such a display device can be said to be a top-emission display device.
此外,在發光元件61(發光元件61R、發光元件61G及發光元件61B)間以覆蓋EL層172R的端部、EL層172G的端部及EL層172B的端部的方式設置保護層271。保護層271例如對水具有阻擋性。因此,藉由設置保護層271,可以抑制雜質(典型的是水等)侵入EL層172R、EL層172G及EL層172B的端部。此外,相鄰的發光元件61間的洩漏電流得到降低,所以彩度及對比度得到提高且功耗得到降低。Furthermore, the protective layer 271 is provided between the light emitting elements 61 (the light emitting element 61R, the light emitting element 61G, and the light emitting element 61B) so as to cover the ends of the EL layer 172R, the EL layer 172G, and the EL layer 172B. The protective layer 271 has barrier properties against water, for example. Therefore, by providing the protective layer 271 , the intrusion of impurities (typically water or the like) into the ends of the EL layer 172R, the EL layer 172G, and the EL layer 172B can be suppressed. In addition, leakage current between adjacent light emitting elements 61 is reduced, so chroma and contrast are improved and power consumption is reduced.
保護層271例如可以採用至少包括無機絕緣膜的單層結構或疊層結構。作為無機絕緣膜,例如可以舉出氧化矽膜、氧氮化矽膜、氮氧化矽膜、氮化矽膜、氧化鋁膜、氧氮化鋁膜、氧化鉿膜等氧化物膜或氮化物膜。另外,作為保護層271也可以使用銦鎵氧化物、銦鎵鋅氧化物(IGZO)等半導體材料。另外,保護層271利用原子層沉積(ALD:Atomic Layer Deposition)法、化學氣相沉積(CVD:Chemical Vapor Deposition)法及濺射法形成即可。注意,作為保護層271例示出具有包括無機絕緣膜的結構,但不侷限於此。例如,保護層271也可以具有無機絕緣膜和有機絕緣膜的疊層結構。The protective layer 271 may have, for example, a single-layer structure or a multilayer structure including at least an inorganic insulating film. Examples of the inorganic insulating film include oxide films or nitride films such as a silicon oxide film, a silicon oxynitride film, a silicon nitride oxide film, a silicon nitride film, an aluminum oxide film, an aluminum oxynitride film, and a hafnium oxide film. . In addition, semiconductor materials such as indium gallium oxide and indium gallium zinc oxide (IGZO) may be used as the protective layer 271 . In addition, the protective layer 271 may be formed by an atomic layer deposition (ALD: Atomic Layer Deposition) method, a chemical vapor deposition (CVD: Chemical Vapor Deposition) method, or a sputtering method. Note that a structure including an inorganic insulating film is exemplified as the protective layer 271 , but is not limited thereto. For example, the protective layer 271 may have a laminated structure of an inorganic insulating film and an organic insulating film.
當保護層271使用銦鎵鋅氧化物時,可以利用濕蝕刻法或乾蝕刻法進行加工。例如,當保護層271使用IGZO時,可以使用草酸、磷酸或混合藥液(例如,磷酸、醋酸、硝酸和水的混合藥液(也稱為混合酸鋁蝕刻劑))等藥液。該混合酸鋁蝕刻劑可以以磷酸:醋酸:硝酸:水=53.3:6.7:3.3:36.7及其附近的體積比進行配製。When indium gallium zinc oxide is used for the protective layer 271, it can be processed by wet etching or dry etching. For example, when IGZO is used for the protective layer 271 , a chemical solution such as oxalic acid, phosphoric acid, or a mixed chemical solution (for example, a mixed chemical solution of phosphoric acid, acetic acid, nitric acid, and water (also called a mixed acid aluminum etchant)) can be used. The mixed acid aluminum etchant can be prepared at a volume ratio of phosphoric acid: acetic acid: nitric acid: water = 53.3: 6.7: 3.3: 36.7 and its vicinity.
在發光元件61R、發光元件61G及發光元件61B的每一個中,EL層172(EL層172R、EL層172G及EL層172B)及保護層271包括隔著犧牲層270(犧牲層270R、犧牲層270G及犧牲層270B)彼此重疊的區域。犧牲層270由於後述的顯示裝置的製程而形成。注意,有時不設置犧牲層270。In each of the light emitting element 61R, the light emitting element 61G, and the light emitting element 61B, the EL layer 172 (EL layer 172R, EL layer 172G, and EL layer 172B) and the protective layer 271 include a 270G and the sacrificial layer 270B) overlap each other. The sacrificial layer 270 is formed due to the manufacturing process of the display device described later. Note that sometimes the sacrificial layer 270 is not provided.
在本說明書等中,也可以將犧牲層稱作遮罩層。此外,也可以將犧牲膜稱作遮罩膜。In this specification and the like, the sacrificial layer may also be referred to as a mask layer. In addition, the sacrificial film may also be called a mask film.
在相鄰的發光元件61之間的區域中,保護層271上設置有絕緣層278。圖9A示出絕緣層278的頂面具有凸曲面形狀的例子。注意,例如圖9A示出多個保護層271及多個絕緣層278的剖面,但是在俯視顯示面時,保護層271及絕緣層278分別被形成為連續的一層。也就是說,顯示裝置例如可以包括一個保護層271及一個絕緣層278。注意,顯示裝置也可以包括彼此分離的多個保護層271,也可以包括彼此分離的多個絕緣層278。In the region between adjacent light-emitting elements 61 , an insulating layer 278 is arranged on the protective layer 271 . FIG. 9A shows an example in which the top surface of the insulating layer 278 has a convexly curved shape. Note that, for example, FIG. 9A shows cross-sections of the plurality of protective layers 271 and the plurality of insulating layers 278 , but the protective layers 271 and the insulating layers 278 are each formed as a continuous layer when viewed from above the display surface. That is to say, the display device may include, for example, a protective layer 271 and an insulating layer 278 . Note that the display device may also include a plurality of protective layers 271 separated from each other, and may also include a plurality of insulating layers 278 separated from each other.
藉由在相鄰的發光元件61之間的區域設置具有凸曲面形狀的絕緣層278,可以填充該區域的起因於EL層172的步階。由此,可以提高導電層173的覆蓋性。因此,可以抑制因導電層173的斷開導致的連接不良以及因局部薄膜化導致的電阻上升。注意,在絕緣層278的頂面平坦時,可以更適當地抑制導電層173的斷開以及局部薄膜化。此外,在絕緣層278具有凹曲面形狀時,也可以抑制導電層173的斷開及局部薄膜化。By providing the insulating layer 278 having a convexly curved shape in a region between adjacent light emitting elements 61 , it is possible to fill the step in the region due to the EL layer 172 . Thereby, the coverage of the conductive layer 173 can be improved. Therefore, poor connection due to disconnection of the conductive layer 173 and resistance increase due to local thinning can be suppressed. Note that when the top surface of the insulating layer 278 is flat, disconnection and local thinning of the conductive layer 173 can be suppressed more appropriately. In addition, when the insulating layer 278 has a concave curved shape, it is also possible to suppress the disconnection and local thinning of the conductive layer 173 .
在本說明書等中,斷開是指層、膜或電極等因被形成面的形狀(例如,步階)而分離的現象。In this specification and the like, disconnection refers to a phenomenon in which layers, films, electrodes, etc. are separated due to the shape (for example, step) of the surface to be formed.
作為絕緣層278,可以舉出環氧樹脂、丙烯酸樹脂、矽酮樹脂、酚醛樹脂、聚醯亞胺樹脂、醯亞胺樹脂、PVC(聚氯乙烯)樹脂、PVB(聚乙烯醇縮丁醛)樹脂及EVA(乙烯-乙酸乙烯酯)樹脂等。另外,作為絕緣層278也可以使用光阻劑。被用作絕緣層278的光阻劑既可以是正型光阻劑,又可以是負型光阻劑。Examples of the insulating layer 278 include epoxy resins, acrylic resins, silicone resins, phenolic resins, polyimide resins, imide resins, PVC (polyvinyl chloride) resins, and PVB (polyvinyl butyral) resins. Resin and EVA (ethylene-vinyl acetate) resin, etc. In addition, a photoresist can also be used as the insulating layer 278 . The photoresist used as the insulating layer 278 may be either a positive type photoresist or a negative type photoresist.
在EL層172R、EL層172G、EL層172B及絕緣層278與導電層173之間可以設置共用層174。共用層174可以包括與EL層172R接觸的區域、與EL層172G接觸的區域及與EL層172B接觸的區域。共用層174在發光元件61R、發光元件61G及發光元件61B間設置為共同使用的一連續的層。A common layer 174 may be provided between the EL layer 172R, the EL layer 172G, the EL layer 172B, and the insulating layer 278 and the conductive layer 173 . The common layer 174 may include a region in contact with the EL layer 172R, a region in contact with the EL layer 172G, and a region in contact with the EL layer 172B. The common layer 174 is provided as a continuous layer commonly used among the light emitting element 61R, the light emitting element 61G, and the light emitting element 61B.
當在顯示裝置中設置共用層174時,被用作共用電極的導電層173可以在沉積共用層174之後連續進行沉積,而之間沒有進行蝕刻等製程。例如,在真空下形成共用層174之後無需將基板11a暴露於大氣,可以在真空下形成導電層173。換言之,可以始終在真空下形成共用層174及導電層173。由此,與顯示裝置沒有設置共用層174的情況相比可以使導電層173的底面清潔。When the common layer 174 is provided in the display device, the conductive layer 173 used as the common electrode can be continuously deposited after the common layer 174 is deposited without etching or other processes in between. For example, the conductive layer 173 may be formed under vacuum without exposing the substrate 11a to the atmosphere after forming the common layer 174 under vacuum. In other words, the common layer 174 and the conductive layer 173 can always be formed under vacuum. This makes it possible to clean the bottom surface of the conductive layer 173 compared to the case where the common layer 174 is not provided in the display device.
作為共用層174可以採用電洞注入層、電洞傳輸層、電洞障壁層、電子障壁層、電子傳輸層和電子注入層中的一個以上。例如,共用層174也可以為載子注入層。另外,共用層174也可以說是EL層172的一部分。注意,也可以不設置共用層174,此時可以使顯示裝置的製程簡化。在設置共用層174時,也可以不設置包括在EL層172中的層中具有與共用層174相同的功能的層。例如,在共用層174包括電子注入層時,EL層172可以不包括電子注入層。此外,例如在共用層174包括電洞注入層時,EL層172也可以不包括電洞注入層。注意,EL層172和共用層174也可以總稱為EL層。也就是說,既可以只將形成為島狀的層稱為“EL層”,也可以將形成為島狀的層和共用層中的兩者稱為“EL層”。One or more of a hole injection layer, a hole transport layer, a hole barrier layer, an electron barrier layer, an electron transport layer, and an electron injection layer can be used as the common layer 174 . For example, the common layer 174 may also be a carrier injection layer. In addition, the common layer 174 can also be said to be a part of the EL layer 172 . Note that the common layer 174 may also not be provided, and in this case, the manufacturing process of the display device may be simplified. When the common layer 174 is provided, a layer having the same function as the common layer 174 may not be provided among the layers included in the EL layer 172 . For example, when the common layer 174 includes an electron injection layer, the EL layer 172 may not include an electron injection layer. In addition, for example, when the common layer 174 includes a hole injection layer, the EL layer 172 may not include a hole injection layer. Note that the EL layer 172 and the common layer 174 may also be collectively referred to as an EL layer. That is, only the island-shaped layer may be referred to as an "EL layer", or both of the island-shaped layer and the common layer may be referred to as an "EL layer".
在本說明書等中,有時將電洞或電子稱為“載子”。明確而言,電洞注入層或電子注入層、電洞傳輸層或電子傳輸層以及電洞障壁層或電子障壁層有時分別被稱為“載子注入層”、”載子傳輸層”以及“載子障壁層”。注意,根據剖面形狀或特性等,有時不能明確地區別上述載子注入層、載子傳輸層及載子障壁層。另外,有時一個層具有作為載子注入層、載子傳輸層和載子障壁層中的兩個或三個的功能。In this specification and the like, holes or electrons are sometimes referred to as "carriers". Specifically, the hole injection layer or electron injection layer, hole transport layer or electron transport layer, and hole barrier layer or electron barrier layer are sometimes referred to as "carrier injection layer", "carrier transport layer" and "Carrier barrier layer". Note that depending on the cross-sectional shape or characteristics, the above-mentioned carrier injection layer, carrier transport layer, and carrier barrier layer may not be clearly distinguished in some cases. In addition, one layer may function as two or three of the carrier injection layer, carrier transport layer, and carrier barrier layer.
在導電層173上以覆蓋發光元件61R、發光元件61G及發光元件61B的方式設置保護層273。保護層273具有防止水等雜質從上方向各發光元件擴散的功能。保護層273可以使用與能夠用於保護層271的材料相同的材料。此外,保護層273例如可以利用ALD法、CVD法或濺射法形成。A protective layer 273 is provided on the conductive layer 173 so as to cover the light emitting element 61R, the light emitting element 61G, and the light emitting element 61B. The protective layer 273 has a function of preventing impurities such as water from diffusing from above to each light emitting element. The protective layer 273 can use the same material as that which can be used for the protective layer 271 . In addition, the protective layer 273 can be formed by, for example, an ALD method, a CVD method, or a sputtering method.
在保護層273上由黏合層122貼合基板13a。黏合層122可以使用與能夠用於圖3A所示的黏合層14的材料相同的材料。此外,在密封發光元件時採用中空密封結構的情況下,黏合層122也可以填充惰性氣體(氮或氬等)。注意,從層363到黏合層122例如可以為圖2A所示的層12a。The substrate 13 a is bonded on the protective layer 273 with the adhesive layer 122 . The adhesive layer 122 can use the same material as that which can be used for the adhesive layer 14 shown in FIG. 3A. In addition, when a hollow sealing structure is used for sealing the light emitting element, the adhesive layer 122 may also be filled with an inert gas (nitrogen or argon, etc.). Note that the layer 363 to the adhesive layer 122 can be, for example, the layer 12a shown in FIG. 2A.
藉由使發光元件61具有光學微腔諧振器(微腔)結構,可以提高發光顏色的色純度。在使發光元件61具有微腔結構時,將導電層171與導電層173間的距離d和EL層172的折射率n的積(光學距離)設定為波長λ的二分之一的m倍(m為1以上的整數),即可。距離d可以由數學式1求出。By making the light-emitting element 61 have an optical microcavity resonator (microcavity) structure, the color purity of the light-emitting color can be improved. When the light-emitting element 61 has a microcavity structure, the product (optical distance) of the distance d between the conductive layer 171 and the conductive layer 173 and the refractive index n of the EL layer 172 is set to m times ( m is an integer greater than or equal to 1). The distance d can be obtained from Mathematical Expression 1.
d=m×λ/(2×n) ・・・ 數學式1。d=m×λ/(2×n) ・・・ Mathematical formula 1.
根據數學式1,在微腔結構的發光元件61中基於所發射的光的波長(發光顏色)來決定距離d。距離d相當於EL層172的厚度。因此,EL層172G有時以比EL層172B厚的方式設置,EL層172R有時以比EL層172G厚的方式設置。According to Mathematical Formula 1, the distance d is determined based on the wavelength of emitted light (light emission color) in the light emitting element 61 having a microcavity structure. The distance d corresponds to the thickness of the EL layer 172 . Therefore, the EL layer 172G may be provided thicker than the EL layer 172B, and the EL layer 172R may be provided thicker than the EL layer 172G.
注意,嚴格地說,距離d是被用作反射電極的導電層171中的反射區至被用作具有所發的光的透射性及反射性的電極(半透射-半反射電極)的導電層173中的反射區的距離。例如,在導電層171是銀與透明導電膜的ITO(Indium Tin Oxide)的疊層且ITO位於EL層172一側的情況下,藉由調整ITO的厚度可以設定對應於發光顏色的距離d。就是說,即使EL層172R、EL層172G及EL層172B的厚度都相同,也藉由改變該ITO的厚度可以得到適合於發光顏色的距離d。Note that, strictly speaking, the distance d is from the reflective area in the conductive layer 171 used as a reflective electrode to the conductive layer used as an electrode (semi-transmissive-semi-reflective electrode) having transmittance and reflectivity of emitted light 173 in the reflective zone distance. For example, when the conductive layer 171 is a laminate of silver and transparent conductive film ITO (Indium Tin Oxide) and the ITO is on the side of the EL layer 172, the distance d corresponding to the light emission color can be set by adjusting the thickness of the ITO. That is, even if the thicknesses of the EL layer 172R, the EL layer 172G, and the EL layer 172B are the same, by changing the thickness of the ITO, the distance d suitable for the light emission color can be obtained.
然而,有時難以嚴格地決定導電層171及導電層173中的反射區的位置。此時,假設為,藉由將導電層171及導電層173中的任意位置假設為反射區可以充分得到微腔效應。However, sometimes it is difficult to strictly determine the positions of the reflective regions in the conductive layer 171 and the conductive layer 173 . At this time, it is assumed that the microcavity effect can be sufficiently obtained by assuming an arbitrary position in the conductive layer 171 and the conductive layer 173 as a reflection region.
為了提高微腔結構的光提取效率,較佳為將被用作反射電極的導電層171至發光層的光學距離設為λ/4的奇數倍。為了實現該光學距離,較佳為調整構成發光元件61的各層的厚度。In order to improve the light extraction efficiency of the microcavity structure, it is preferable to set the optical distance from the conductive layer 171 used as the reflective electrode to the light-emitting layer as an odd multiple of λ/4. In order to realize this optical distance, it is preferable to adjust the thickness of each layer constituting the light emitting element 61 .
另外,在從導電層173一側發射光時,導電層173的反射率較佳為比其穿透率高。導電層173的光透射率較佳為2%以上且50%以下,更佳為2%以上且30%以下,進一步較佳為2%以上且10%以下。藉由降低導電層173的穿透率(提高其反射率),可以提高微腔效應。In addition, when emitting light from the side of the conductive layer 173 , the reflectivity of the conductive layer 173 is preferably higher than the transmittance thereof. The light transmittance of the conductive layer 173 is preferably not less than 2% and not more than 50%, more preferably not less than 2% and not more than 30%, further preferably not less than 2% and not more than 10%. By reducing the transmittance of the conductive layer 173 (increasing its reflectivity), the microcavity effect can be enhanced.
圖9B是圖9A所示的結構的變形例子。圖9B示出例如將發射白色光的發光元件61W代替發光元件61R、發光元件61G及發光元件61B設置在層363上的例子。發光元件61W例如包括發射白色光的EL層172W作為EL層172。作為EL層172W,例如可以採用層疊有以各自的發光顏色成為補色關係的方式選擇的兩個以上的發光層的結構。另外,也可以使用在發光層之間夾著電荷產生層的疊層型EL層作為EL層172W。Fig. 9B is a modified example of the structure shown in Fig. 9A. FIG. 9B shows an example in which, for example, a light-emitting element 61W emitting white light is provided on the layer 363 instead of the light-emitting element 61R, the light-emitting element 61G, and the light-emitting element 61B. The light emitting element 61W includes, for example, an EL layer 172W that emits white light as the EL layer 172 . As the EL layer 172W, for example, a structure in which two or more light-emitting layers selected so that the respective light-emitting colors have a complementary color relation are stacked can be employed. In addition, a stacked EL layer in which a charge generation layer is sandwiched between light emitting layers may also be used as the EL layer 172W.
這裡,EL層172W按每個發光元件61W分離。由此,可以防止在相鄰的兩個發光元件61W中電流經過EL層172W流過而產生非意圖發光。特別是在作為EL層172W使用兩個發光層之間設有電荷產生層時具有如下問題:當清晰度越高,即相鄰的像素間的距離越小時,串擾的影響越明顯,而對比度降低。因此,藉由採用這種結構,可以實現兼具高清晰度和高對比的顯示裝置。注意,EL層172W也可以為一連續的層而不按每個發光元件61W分離。Here, the EL layer 172W is separated for each light emitting element 61W. Accordingly, it is possible to prevent unintentional light emission caused by current flowing through the EL layer 172W in two adjacent light emitting elements 61W. In particular, when a charge generation layer is provided between two light-emitting layers as the EL layer 172W, there is a problem that the higher the resolution, that is, the smaller the distance between adjacent pixels, the more obvious the influence of crosstalk and the lower the contrast. . Therefore, by adopting such a structure, a display device having both high definition and high contrast can be realized. Note that the EL layer 172W may also be a continuous layer without being separated for each light emitting element 61W.
此外,圖9B示出保護層273上設置有絕緣層276且絕緣層276上設置有彩色層183R、彩色層183G及彩色層183B的例子。明確而言,重疊於左側的發光元件61W的位置上設置有透過紅色光的彩色層183R,重疊於中央的發光元件61W的位置上設置有透過綠色光的彩色層183G,重疊於右側的發光元件61W的位置上設置有透過藍色光的彩色層183B。藉由設置彩色層183R、彩色層183G及彩色層183B,例如設置在顯示裝置中的所有發光元件都是發射白色光的發光元件,顯示裝置也可以顯示彩色影像。In addition, FIG. 9B shows an example in which the insulating layer 276 is provided on the protective layer 273 and the color layer 183R, the color layer 183G, and the color layer 183B are provided on the insulating layer 276 . Specifically, a color layer 183R that transmits red light is provided at a position overlapping the light emitting element 61W on the left side, a color layer 183G that transmits green light is provided at a position overlapping the light emitting element 61W in the center, and a color layer 183G that transmits green light is provided at a position overlapping the light emitting element 61W on the right side. A color layer 183B that transmits blue light is provided at the position 61W. By providing the color layer 183R, the color layer 183G, and the color layer 183B, for example, all the light-emitting elements provided in the display device are light-emitting elements that emit white light, and the display device can also display color images.
相鄰的彩色層183(彩色層183R、彩色層183G及彩色層183B)包括彼此重疊的區域。例如,在圖9B所示的剖面中,彩色層183G的一方的端部與彩色層183R重疊,彩色層183G的另一方的端部與彩色層183B重疊。因此,例如可以抑制設置在重疊於彩色層183G的位置上的發光元件61W所發射的光入射到彩色層183R或彩色層183B並該光從彩色層183R或彩色層183B射出。因此,可以實現顯示品質高的顯示裝置。Adjacent color layers 183 (color layer 183R, color layer 183G, and color layer 183B) include regions overlapping with each other. For example, in the cross section shown in FIG. 9B , one end of the colored layer 183G overlaps the colored layer 183R, and the other end of the colored layer 183G overlaps the colored layer 183B. Therefore, for example, light emitted from the light emitting element 61W provided at a position overlapping the colored layer 183G can be prevented from entering the colored layer 183R or the colored layer 183B and being emitted from the colored layer 183R or the colored layer 183B. Therefore, a display device with high display quality can be realized.
絕緣層276被用作平坦化層。絕緣層276例如可以使用有機材料。例如可以使用丙烯酸樹脂、聚醯亞胺樹脂、環氧樹脂、亞胺樹脂、聚醯胺樹脂、聚醯亞胺醯胺樹脂、矽酮樹脂、矽氧烷樹脂、苯并環丁烯類樹脂、酚醛樹脂或這些樹脂的前驅物等作為絕緣層276。The insulating layer 276 is used as a planarization layer. For the insulating layer 276, for example, an organic material can be used. For example, acrylic resins, polyimide resins, epoxy resins, imide resins, polyamide resins, polyimideamide resins, silicone resins, siloxane resins, benzocyclobutene resins, A phenolic resin or a precursor of these resins is used as the insulating layer 276 .
藉由在保護層273上設置絕緣層276,可以將彩色層183設置在平坦面上。因此,可以容易形成彩色層183。注意,在彩色層183上設置黏合層122,由黏合層122貼合基板13a。By disposing the insulating layer 276 on the protection layer 273, the color layer 183 can be disposed on a flat surface. Therefore, the colored layer 183 can be easily formed. Note that the adhesive layer 122 is provided on the color layer 183 , and the substrate 13 a is bonded by the adhesive layer 122 .
發光元件61W也可以與發光元件61R、發光元件61G及發光元件61B同樣地具有微腔結構。由此,例如與彩色層183R重疊的發光元件61W可以發射增強紅色的光,與彩色層183G重疊的發光元件61W可以發射增強綠色的光,例如與彩色層183B重疊的發光元件61W可以發射增強藍色的光。因此,藉由發光元件61W具有微腔結構,可以提高光34aR、光34aG及光34aB的色純度。The light emitting element 61W may have a microcavity structure similarly to the light emitting element 61R, the light emitting element 61G, and the light emitting element 61B. Thus, for example, the light-emitting element 61W overlapping with the color layer 183R can emit enhanced red light, the light-emitting element 61W overlapping with the color layer 183G can emit enhanced green light, and for example, the light-emitting element 61W overlapping with the color layer 183B can emit enhanced blue light. colored light. Therefore, since the light emitting element 61W has a microcavity structure, the color purity of the light 34aR, the light 34aG, and the light 34aB can be improved.
圖9C是圖9A所示的結構的變形例子,也示出保護層273上設置有絕緣層276且絕緣層276上設置有微透鏡陣列277的例子。注意,微透鏡陣列277上設置有黏合層122,由黏合層122貼合基板13a。FIG. 9C is a modified example of the structure shown in FIG. 9A , and also shows an example in which an insulating layer 276 is provided on the protective layer 273 and a microlens array 277 is provided on the insulating layer 276 . Note that an adhesive layer 122 is disposed on the microlens array 277 , and the substrate 13 a is bonded by the adhesive layer 122 .
在黏合層122的折射率比微透鏡陣列277的折射率低時,有時微透鏡陣列277可以聚集從發光元件61R、發光元件61G及發光元件61B發射的光。藉由聚集從發光元件61R、發光元件61G及發光元件61B發射的光,尤其是用戶從顯示裝置的顯示面的正面看該顯示面時,可以看到明亮的影像,因此是較佳的。When the refractive index of the adhesive layer 122 is lower than that of the microlens array 277 , the microlens array 277 may collect light emitted from the light emitting element 61R, the light emitting element 61G, and the light emitting element 61B. By concentrating the light emitted from the light emitting element 61R, the light emitting element 61G, and the light emitting element 61B, especially when the user looks at the display surface of the display device from the front, it is preferable to see a bright image.
注意,圖9B所示的結構中也可以設置微透鏡陣列277。例如,在彩色層183R上、彩色層183G上及彩色層183B上可以設置被用作平坦化層的絕緣層,在該絕緣層上可以設置微透鏡陣列277。此時,在微透鏡陣列277上設置黏合層122,由黏合層122貼合基板13a。此外,在圖9C所示的結構中也可以設置彩色層183R、彩色層183G及彩色層183B。例如,也可以在微透鏡陣列277上設置被用作平坦化層的絕緣層且在該絕緣層上設置彩色層183R、彩色層183G及彩色層183B。此時,在彩色層183上設置黏合層122,由黏合層122貼合基板13a。Note that a microlens array 277 may also be provided in the structure shown in FIG. 9B. For example, an insulating layer serving as a planarization layer may be provided on the color layer 183R, the color layer 183G, and the color layer 183B, and the microlens array 277 may be provided on the insulating layer. At this time, the adhesive layer 122 is provided on the microlens array 277 , and the substrate 13 a is bonded by the adhesive layer 122 . In addition, the color layer 183R, the color layer 183G, and the color layer 183B may be provided in the structure shown in FIG. 9C. For example, an insulating layer serving as a planarization layer may be provided on the microlens array 277 and the color layer 183R, the color layer 183G, and the color layer 183B may be provided on the insulating layer. At this time, the adhesive layer 122 is provided on the color layer 183 , and the substrate 13 a is bonded by the adhesive layer 122 .
圖10A是圖9A所示的結構的變形例子,也示出發光元件63R、發光元件63G及發光元件63B代替發光元件61R、發光元件61G及發光元件61B設置在層363上的例子。此外,圖10A示出設置基板11b及基板13b代替基板11a及基板13a的例子。注意,圖10A所示的例子中,從層363到黏合層122的組件例如可以為圖2A所示的層12b。10A is a modified example of the structure shown in FIG. 9A , and also shows an example in which light emitting elements 63R, 63G, and 63B are provided on layer 363 instead of light emitting elements 61R, 61G, and 61B. In addition, FIG. 10A shows an example in which a substrate 11b and a substrate 13b are provided instead of the substrate 11a and the substrate 13a. Note that in the example shown in FIG. 10A , the assembly from layer 363 to adhesive layer 122 may be, for example, layer 12b shown in FIG. 2A .
發光元件63R可以發射在紅色的波長區域具有強度的光34bR。發光元件63G可以發射在綠色的波長區域具有強度的光34bG。發光元件63B可以在藍色的波長區域具有強度的光34bB。The light emitting element 63R can emit light 34bR having intensity in the red wavelength region. Light emitting element 63G can emit light 34bG having intensity in the green wavelength region. Light emitting element 63B can have light 34bB with intensity in the blue wavelength region.
如上所述,基板11b及基板13b具有可見光透過的結構。因此,藉由導電層171使用對可見光具有反射性的導電膜且導電層173使用對可見光具有透過性的導電膜,光34bR、光34bG及光34bB射出到基板13b一側。這種顯示裝置可以說是頂部發射型顯示裝置。此外,藉由導電層173使用對可見光具有反射性的導電膜且導電層171使用對可見光具有透過性的導電膜,光34bR、光34bG及光34bB射出到基板11b一側。這種顯示裝置可以說是底部發射型(bottom-emission)顯示裝置。As described above, the substrate 11b and the substrate 13b have a structure through which visible light passes. Therefore, by using a conductive film reflective to visible light for the conductive layer 171 and a conductive film transparent to visible light for the conductive layer 173 , light 34bR, light 34bG, and light 34bB are emitted to the substrate 13b side. Such a display device can be said to be a top emission type display device. In addition, since the conductive layer 173 uses a conductive film reflective to visible light and the conductive layer 171 uses a conductive film transparent to visible light, light 34bR, light 34bG, and light 34bB are emitted to the substrate 11b side. Such a display device can be said to be a bottom-emission display device.
發光元件63R包括層363上的導電層171、導電層171上的EL層172R及EL層172R上的導電層173。發光元件63G包括層363上的導電層171、導電層171上的EL層172G及EL層172G上的導電層173。發光元件63B包括層363上的導電層171、導電層171上的EL層172B及EL層172B上的導電層173。The light emitting element 63R includes the conductive layer 171 on the layer 363 , the EL layer 172R on the conductive layer 171 , and the conductive layer 173 on the EL layer 172R. The light emitting element 63G includes the conductive layer 171 on the layer 363 , the EL layer 172G on the conductive layer 171 , and the conductive layer 173 on the EL layer 172G. Light emitting element 63B includes conductive layer 171 on layer 363 , EL layer 172B on conductive layer 171 , and conductive layer 173 on EL layer 172B.
圖10A示出覆蓋被用作像素電極的導電層171的端部設置絕緣層272的例子。藉由設置絕緣層272,可以防止相鄰的發光元件63(發光元件63R、發光元件63G及發光元件63B)所包括的導電層171非意圖地電短路而誤發光。因此,可以提供可靠性高的顯示裝置。FIG. 10A shows an example in which an insulating layer 272 is provided covering an end portion of a conductive layer 171 used as a pixel electrode. By providing the insulating layer 272 , it is possible to prevent the conductive layers 171 included in the adjacent light emitting elements 63 (the light emitting element 63R, the light emitting element 63G, and the light emitting element 63B) from being inadvertently electrically short-circuited and erroneously emitting light. Therefore, a highly reliable display device can be provided.
在發光元件63R、發光元件63G及發光元件63B中,EL層172R、EL層172G及EL層172B分別包括與導電層171的頂面接觸的區域及與絕緣層272的表面接觸的區域。此外,EL層172R、EL層172G及EL層172B的端部位於絕緣層272上。In light emitting element 63R, light emitting element 63G, and light emitting element 63B, EL layer 172R, EL layer 172G, and EL layer 172B respectively include a region in contact with the top surface of conductive layer 171 and a region in contact with the surface of insulating layer 272 . In addition, the ends of the EL layer 172R, the EL layer 172G, and the EL layer 172B are located on the insulating layer 272 .
絕緣層272的端部較佳為錐形形狀。此外,在圖10A所示的結構中不設置保護層271、犧牲層270、絕緣層278及共用層174。再者,發光元件63藉由與發光元件61同樣地具有微腔結構,可以提高發光顏色的色純度。The end of the insulating layer 272 is preferably tapered. In addition, in the structure shown in FIG. 10A , the protective layer 271 , the sacrificial layer 270 , the insulating layer 278 and the common layer 174 are not provided. Furthermore, since the light emitting element 63 has a microcavity structure similarly to the light emitting element 61, the color purity of the emitted light color can be improved.
注意,在本說明書等中,錐形形狀是指組件的側面的至少一部分相對於基板面或被形成面傾斜地設置的形狀。例如,較佳為具有傾斜的側面和基板面或被形成面所成的角度(也稱為錐角)小於90°的區域。在此,組件的側面、基板面及被形成面不一定需要為完全的平坦,也可以為具有微小曲率的近似平面狀或具有微細凹凸的近似平面狀。Note that in this specification and the like, the tapered shape means a shape in which at least a part of the side surface of the module is provided obliquely with respect to the substrate surface or the surface to be formed. For example, it is preferable to have a region where the angle (also referred to as taper angle) formed by the inclined side surface and the substrate surface or the surface to be formed is smaller than 90°. Here, the side surface of the module, the substrate surface, and the surface to be formed do not necessarily need to be completely flat, and may be substantially flat with slight curvature or substantially flat with fine unevenness.
絕緣層272例如可以使用有機材料或無機材料。作為可用於絕緣層272的有機材料,例如可以舉出丙烯酸樹脂、環氧樹脂、聚醯亞胺樹脂、聚醯胺樹脂、聚醯亞胺醯胺樹脂、聚矽氧烷樹脂、苯并環丁烯類樹脂及酚醛樹脂等。作為可用於絕緣層272的無機材料,可以舉出氧化矽、氧化鋁、氧化鎵、氧化鍺、氧化釔、氧化鋯、氧化鑭、氧化釹、氧化鉿、氧化鉭、氮化矽、氮化鋁、氧氮化矽、氧氮化鋁、氮氧化矽及氮氧化鋁等。For the insulating layer 272, for example, an organic material or an inorganic material can be used. Examples of organic materials that can be used for the insulating layer 272 include acrylic resins, epoxy resins, polyimide resins, polyamide resins, polyimideamide resins, polysiloxane resins, and benzocyclidine resins. Vinyl resins and phenolic resins, etc. Examples of inorganic materials that can be used for the insulating layer 272 include silicon oxide, aluminum oxide, gallium oxide, germanium oxide, yttrium oxide, zirconium oxide, lanthanum oxide, neodymium oxide, hafnium oxide, tantalum oxide, silicon nitride, and aluminum nitride. , silicon oxynitride, aluminum oxynitride, silicon oxynitride and aluminum oxynitride.
圖10B是圖10A所示的結構的變形例子,也示出例如發射白色光的發光元件63W代替發光元件63R、發光元件63G及發光元件63B設置在層363上的例子。發光元件63W包括EL層172W作為EL層172。注意,發光元件63W藉由與發光元件61W同樣地具有微腔結構,可以提高光34bR、光34bG及光34bB的色純度。10B is a modified example of the structure shown in FIG. 10A , and also shows an example in which, for example, a light emitting element 63W emitting white light is provided on layer 363 instead of light emitting element 63R, light emitting element 63G, and light emitting element 63B. The light emitting element 63W includes an EL layer 172W as the EL layer 172 . Note that the light-emitting element 63W can improve the color purity of the light 34bR, the light 34bG, and the light 34bB by having the same microcavity structure as the light-emitting element 61W.
圖10B示出在基板13b的基板11b一側的面設置彩色層183R、彩色層183G及彩色層183B的例子。此外,圖10B示出在基板13b的基板11b一側的面的不設置彩色層183R、彩色層183G及彩色層183B的區域設置遮光層117的例子。再者,圖10B示出彩色層183R、彩色層183G及彩色層183B的端部與遮光層117重疊的例子。注意,在圖10B所示的例子中,從層363到彩色層183R、彩色層183G、彩色層183B及遮光層117的組件例如可以為圖2A所示的層12b。注意,在圖10B所示的顯示裝置為底部發射型顯示裝置時,彩色層183R、彩色層183G、彩色層183B及遮光層117也可以設置在層363中。FIG. 10B shows an example in which a color layer 183R, a color layer 183G, and a color layer 183B are provided on the surface of the substrate 13b on the substrate 11b side. 10B shows an example in which the light shielding layer 117 is provided on the surface of the substrate 13b on the substrate 11b side where the colored layer 183R, the colored layer 183G, and the colored layer 183B are not provided. Furthermore, FIG. 10B shows an example in which the ends of the colored layer 183R, the colored layer 183G, and the colored layer 183B overlap with the light shielding layer 117 . Note that in the example shown in FIG. 10B , the components from the layer 363 to the colored layer 183R, the colored layer 183G, the colored layer 183B and the light shielding layer 117 may be, for example, the layer 12b shown in FIG. 2A . Note that when the display device shown in FIG. 10B is a bottom emission type display device, the color layer 183R, the color layer 183G, the color layer 183B, and the light shielding layer 117 may also be provided in the layer 363 .
藉由設置遮光層117,可以抑制發光元件63W所發射的光不透過所希望的彩色層183而從基板13b射出。明確而言,可以抑制重疊於彩色層183R的發光元件63W所發射的光不透過彩色層183R而從基板13b射出、重疊於彩色層183G的發光元件63W所發射的光不透過彩色層183G而從基板13b射出以及重疊於彩色層183B的發光元件63W所發射的光不透過彩色層183B而從基板13b射出。因此,顯示裝置可以顯示高品質的影像。By providing the light shielding layer 117, the light emitted from the light emitting element 63W can be prevented from being emitted from the substrate 13b without passing through the desired color layer 183. Specifically, light emitted from the light emitting element 63W overlapping the color layer 183R can be prevented from being emitted from the substrate 13b without passing through the color layer 183R, and light emitted from the light emitting element 63W overlapping the color layer 183G can be prevented from being emitted from the substrate 13b without passing through the color layer 183G. The light emitted from the substrate 13b and emitted from the light emitting element 63W overlapping the colored layer 183B is emitted from the substrate 13b without passing through the colored layer 183B. Therefore, the display device can display high-quality images.
遮光層117例如也可以設置在圖10A所示的顯示裝置中。此時,可以抑制發光元件63R、發光元件63G及發光元件63B所發射的光例如被基板13b反射且在顯示裝置的內部擴散。由此,顯示裝置可以顯示高品質的影像。另一方面,藉由不設置遮光層117,可以提高發光元件63R、發光元件63G及發光元件63B所發射的光的光提取效率。同樣地,例如在圖9A或圖9C所示的顯示裝置中也可以設置遮光層117。The light shielding layer 117 may also be provided, for example, in the display device shown in FIG. 10A . In this case, light emitted from the light emitting element 63R, the light emitting element 63G, and the light emitting element 63B can be suppressed from being reflected by the substrate 13 b and diffusing inside the display device, for example. Thus, the display device can display high-quality images. On the other hand, by not providing the light-shielding layer 117, the light extraction efficiency of the light emitted from the light-emitting element 63R, the light-emitting element 63G, and the light-emitting element 63B can be improved. Similarly, for example, the light-shielding layer 117 may also be provided in the display device shown in FIG. 9A or FIG. 9C .
在圖10B所示的例子中,在保護層273與彩色層183R、彩色層183G、彩色層183B及遮光層117之間設置黏合層122。由此,設置在基板13b上的彩色層183R、彩色層183G、彩色層183B及遮光層117貼合在保護層273上。In the example shown in FIG. 10B , the adhesive layer 122 is provided between the protective layer 273 and the colored layer 183R, 183G, 183B, and light shielding layer 117 . As a result, the color layer 183R, the color layer 183G, the color layer 183B, and the light shielding layer 117 provided on the substrate 13 b are bonded to the protective layer 273 .
藉由在基板13b上設置彩色層183R、彩色層183G、彩色層183B及遮光層117且將它們與保護層273貼合,可以提高彩色層183R、彩色層183G、彩色層183B及遮光層117的製造條件的彈性。例如,可以在比EL層172W的耐熱溫度高的溫度下進行加熱處理。另一方面,在貼合彩色層183R、彩色層183G、彩色層183B及遮光層117與保護層273時,有時發生錯位。因此,在像素微細到不能忽視該錯位時,例如如圖9B所示,較佳為在保護層273上形成彩色層183R、彩色層183G及彩色層183B,然後貼合基板13b。By disposing the colored layer 183R, the colored layer 183G, the colored layer 183B, and the light-shielding layer 117 on the substrate 13b and bonding them to the protective layer 273, the durability of the colored layer 183R, the colored layer 183G, the colored layer 183B, and the light-shielding layer 117 can be improved. Elasticity of manufacturing conditions. For example, heat treatment may be performed at a temperature higher than the heat-resistant temperature of the EL layer 172W. On the other hand, when the colored layer 183R, the colored layer 183G, the colored layer 183B, the light-shielding layer 117 and the protective layer 273 are bonded together, misalignment may occur in some cases. Therefore, when the pixel is so fine that the misalignment cannot be ignored, for example, as shown in FIG. 9B , it is preferable to form the color layer 183R, the color layer 183G, and the color layer 183B on the protective layer 273, and then bond the substrate 13b.
圖10B示出EL層172W為一連續的層而不按每個發光元件63W分離的例子。藉由EL層172W為一連續的層,可以使顯示裝置的製程簡化。注意,EL層172W也可以按每個發光元件63W分離。FIG. 10B shows an example in which the EL layer 172W is a continuous layer without being separated for each light emitting element 63W. Since the EL layer 172W is a continuous layer, the manufacturing process of the display device can be simplified. Note that the EL layer 172W may also be separated for each light emitting element 63W.
圖10C是圖10A所示的結構的變形例子,也示出在保護層273上設置絕緣層276且在絕緣層276上設置微透鏡陣列277的例子。注意,也可以在圖10B所示的結構中設置微透鏡陣列277。例如,可以在保護層273上設置絕緣層276且在絕緣層276上設置微透鏡陣列277。此時,在微透鏡陣列277與彩色層183R、彩色層183G、彩色層183B及遮光層117之間設置黏合層122。注意,在圖10C所示的例子中,從層363到黏合層122的組件例如可以為圖2A所示的層12b。FIG. 10C is a modified example of the structure shown in FIG. 10A , and also shows an example in which an insulating layer 276 is provided on a protective layer 273 and a microlens array 277 is provided on the insulating layer 276 . Note that the microlens array 277 may also be provided in the structure shown in FIG. 10B. For example, an insulating layer 276 may be disposed on the protective layer 273 and a microlens array 277 may be disposed on the insulating layer 276 . At this time, the adhesive layer 122 is provided between the microlens array 277 and the color layers 183R, 183G, 183B and the light shielding layer 117 . Note that in the example shown in FIG. 10C , the assembly from layer 363 to adhesive layer 122 may be, for example, layer 12b shown in FIG. 2A .
具有圖9A、圖9B及圖9C所示的結構的顯示裝置與具有圖10A、圖10B及圖10C所示的結構的顯示裝置相比可以提高清晰度而不降低對比度。例如,可以縮短相鄰的發光元件61間的距離。明確而言,發光元件61間的距離為1μm以下,較佳為500nm以下,更佳為200nm以下、100nm以下、90nm以下、70nm以下、50nm以下、30nm以下、20nm以下、15nm以下或10nm以下。換言之,設置相鄰的兩個EL層172中的一個的EL層172的端部與另一個的EL層172的端部之間的距離為1μm以下的區域,較佳為設置0.5μm(500nm)以下的區域,更佳為設置100nm以下的區域。The display device having the structures shown in FIGS. 9A , 9B, and 9C can improve sharpness without reducing contrast compared to the display device having the structures shown in FIGS. 10A , 10B, and 10C. For example, the distance between adjacent light emitting elements 61 can be shortened. Specifically, the distance between the light emitting elements 61 is 1 μm or less, preferably 500 nm or less, more preferably 200 nm or less, 100 nm or less, 90 nm or less, 70 nm or less, 50 nm or less, 30 nm or less, 20 nm or less, 15 nm or less or 10 nm or less. In other words, a region where the distance between the end of one EL layer 172 and the end of the other EL layer 172 of two adjacent EL layers 172 is 1 μm or less, preferably 0.5 μm (500 nm) The region of 100 nm or less is more preferably set at 100 nm or less.
另一方面,具有圖10A、圖10B及圖10C所示的結構的顯示裝置與具有圖9A、圖9B及圖9C所示的結構的顯示裝置相比可以以簡單的方法製造。因此,具有圖10A、圖10B及圖10C所示的結構的顯示裝置可以以低成本製造。On the other hand, the display device having the structure shown in FIGS. 10A , 10B, and 10C can be manufactured with a simpler method than the display device having the structure shown in FIGS. 9A , 9B, and 9C. Therefore, a display device having the structures shown in FIGS. 10A , 10B, and 10C can be manufactured at low cost.
如上所述,包括顯示部37a的顯示裝置41a的清晰度比包括顯示部37b的顯示裝置41b的清晰度高。因此,如上所述,圖9A、圖9B及圖9C所示的結構可以適用於顯示裝置41a。明確而言,設置在顯示部37a中的像素27a所包括的發光元件可以適合使用發光元件61。另一方面,如上所述,具有圖10A、圖10B及圖10C所示的結構的顯示裝置可以以低成本製造。因此,在顯示裝置41b具有圖10A、圖10B及圖10C所示的結構時,電子裝置10可以為低價的電子裝置,因此是較佳的。明確而言,設置在顯示部37b中的像素27b所包括的發光元件可以適用於發光元件63。As described above, the resolution of the display device 41a including the display portion 37a is higher than that of the display device 41b including the display portion 37b. Therefore, as described above, the structures shown in FIGS. 9A , 9B, and 9C can be applied to the display device 41a. Specifically, the light emitting element 61 can be suitably used as the light emitting element included in the pixel 27a provided in the display portion 37a. On the other hand, as described above, a display device having the structures shown in FIGS. 10A , 10B, and 10C can be manufactured at low cost. Therefore, when the display device 41b has the structures shown in FIGS. 10A , 10B, and 10C, the electronic device 10 can be a low-cost electronic device, which is preferable. Specifically, the light-emitting element 63 can be applied to the light-emitting element included in the pixel 27 b provided in the display portion 37 b.
注意,如上所述,顯示裝置41b也可以具有圖9A、圖9B及圖9C所示的結構。此時,例如用基板11b及基板13b代替基板11a及基板13a。此外,如上所述,顯示裝置41a也可以具有圖10A、圖10B及圖10C所示的結構。此時,例如用基板11a及及基板13a代替基板11b及基板13b。Note that, as described above, the display device 41b may also have the structures shown in FIGS. 9A , 9B, and 9C. In this case, for example, the substrate 11a and the substrate 13a are replaced with the substrate 11b and the substrate 13b. In addition, as described above, the display device 41a may have the configuration shown in FIGS. 10A , 10B, and 10C. In this case, for example, the substrate 11 a and the substrate 13 a are used instead of the substrate 11 b and the substrate 13 b.
以下,參照圖11A至圖13D說明具有圖9A所示的結構的顯示裝置的製造方法例子。Hereinafter, an example of a method of manufacturing the display device having the structure shown in FIG. 9A will be described with reference to FIGS. 11A to 13D .
首先,如圖11A所示,在基板11a上形成層363。明確而言,例如在基板11a上形成電晶體,以覆蓋電晶體的方式形成絕緣層。接著,如圖11A所示,在層363上形成導電層171。例如,藉由濺射法或真空蒸鍍法形成將成為導電層171的膜,例如使用光微影及蝕刻法加工該膜,因此可以形成導電層171。注意,在例如利用蝕刻法加工將成為導電層171的膜時,有時在層363中形成凹部。明確而言,有時在不重疊於導電層171的區域在位於層363的最表面的絕緣層中形成凹部。First, as shown in FIG. 11A, a layer 363 is formed on the substrate 11a. Specifically, for example, transistors are formed on the substrate 11a, and an insulating layer is formed to cover the transistors. Next, as shown in FIG. 11A , a conductive layer 171 is formed on layer 363 . For example, the conductive layer 171 can be formed by forming a film to be the conductive layer 171 by a sputtering method or a vacuum evaporation method, and processing the film using, for example, photolithography and etching. Note that, when a film to be the conductive layer 171 is processed by, for example, etching, a recess is sometimes formed in the layer 363 . Specifically, a recess may be formed in the insulating layer located on the outermost surface of the layer 363 in a region that does not overlap the conductive layer 171 .
接著,如圖11B所示,將後面成為EL層172R的EL膜172Rf形成在導電層171上及層363上。EL膜172Rf例如可以藉由蒸鍍法形成,明確而言藉由真空蒸鍍法形成。此外,EL膜172Rf也可以利用轉印法、印刷法、噴墨法、塗佈法等方法形成。Next, as shown in FIG. 11B , an EL film 172Rf which will later become an EL layer 172R is formed on the conductive layer 171 and on the layer 363 . The EL film 172Rf can be formed by, for example, a vapor deposition method, specifically, a vacuum vapor deposition method. In addition, the EL film 172Rf can also be formed by a method such as a transfer method, a printing method, an inkjet method, or a coating method.
接著,如圖11B所示,在EL膜172Rf上依次形成後面將成為犧牲層270R的犧牲膜270Rf及後面將成為犧牲層279R的犧牲膜279Rf。Next, as shown in FIG. 11B , a sacrificial film 270Rf which will later become a sacrificial layer 270R and a sacrificial film 279Rf which will later become a sacrificial layer 279R are sequentially formed on the EL film 172Rf.
注意,以下示出由犧牲膜270Rf及犧牲膜279Rf的兩層結構形成犧牲膜的例子,但犧牲膜既可以具有單層結構,也可以具有三層以上的疊層結構。Note that an example in which the sacrificial film is formed from a two-layer structure of the sacrificial film 270Rf and the sacrificial film 279Rf is shown below, but the sacrificial film may have a single-layer structure or a laminated structure of three or more layers.
藉由在EL膜172Rf上設置犧牲膜,可以降低在顯示裝置的製程中EL膜172Rf受到的損傷,而可以提高發光元件的可靠性。By providing the sacrificial film on the EL film 172Rf, damage to the EL film 172Rf during the manufacturing process of the display device can be reduced, and the reliability of the light-emitting element can be improved.
作為遮罩膜270Rf使用對EL膜172Rf的加工條件的耐性高的膜,明確而言與EL膜172Rf的蝕刻選擇比大的膜。作為犧牲膜279Rf,使用與犧牲膜270Rf的蝕刻選擇比大的膜。As the mask film 270Rf, a film having high resistance to the processing conditions of the EL film 172Rf, specifically, a film having a high etching selectivity ratio to the EL film 172Rf is used. As the sacrificial film 279Rf, a film having a large etching selectivity ratio to the sacrificial film 270Rf is used.
另外,遮罩膜270Rf及遮罩膜279Rf以低於EL膜172Rf的耐熱溫度的溫度形成。形成遮罩膜270Rf及遮罩膜279Rf時的基板溫度各自典型地為200℃以下,較佳為150℃以下,更佳為120℃以下,進一步較佳為100℃以下,更進一步較佳為80℃以下。In addition, the mask film 270Rf and the mask film 279Rf are formed at a temperature lower than the heat-resistant temperature of the EL film 172Rf. The substrate temperature for forming the mask film 270Rf and the mask film 279Rf is typically 200°C or lower, preferably 150°C or lower, more preferably 120°C or lower, further preferably 100°C or lower, and still more preferably 80°C or lower. below ℃.
作為犧牲膜270Rf及犧牲膜279Rf較佳為使用可以利用濕蝕刻法去除的膜。藉由利用濕蝕刻法,與利用乾蝕刻法的情況相比,可以減輕在犧牲膜270Rf及犧牲膜279Rf的加工中EL膜172Rf受到的損傷。As the sacrificial film 270Rf and the sacrificial film 279Rf, it is preferable to use a film that can be removed by wet etching. By using the wet etching method, damage to the EL film 172Rf during the processing of the sacrificial film 270Rf and the sacrificial film 279Rf can be reduced compared to the case of using the dry etching method.
犧牲膜270Rf及犧牲膜279Rf例如可以藉由濺射法、ALD法(熱ALD法或PEALD法等)、CVD法或真空蒸鍍法形成。The sacrificial film 270Rf and the sacrificial film 279Rf can be formed by, for example, sputtering, ALD (thermal ALD, PEALD, etc.), CVD, or vacuum deposition.
另外,以接觸於EL膜172Rf上的方式形成的犧牲膜270Rf較佳為利用對EL膜172Rf帶來的損傷比犧牲膜279Rf少的形成方法形成。例如,與濺射法相比,更佳為使用ALD法或真空蒸鍍法形成犧牲膜270Rf。In addition, the sacrificial film 270Rf formed so as to be in contact with the EL film 172Rf is preferably formed by a formation method that causes less damage to the EL film 172Rf than the sacrificial film 279Rf. For example, it is more preferable to form the sacrificial film 270Rf using the ALD method or the vacuum evaporation method than the sputtering method.
作為犧牲膜270Rf及犧牲膜279Rf,例如可以使用金屬膜、合金膜、金屬氧化物膜、半導體膜、有機絕緣膜和無機絕緣膜等中的一種或多種。As the sacrificial film 270Rf and the sacrificial film 279Rf, for example, one or more of a metal film, an alloy film, a metal oxide film, a semiconductor film, an organic insulating film, an inorganic insulating film, and the like can be used.
作為犧牲膜270Rf及犧牲膜279Rf例如各自可以使用金、銀、鉑、鎂、鎳、鎢、鉻、鉬、鐵、鈷、銅、鈀、鈦、鋁、釔、鋯及鉭等金屬材料或者包含該金屬材料的合金材料。尤其較佳為使用鋁或銀等低熔點材料。藉由作為犧牲膜270Rf和犧牲膜279Rf的一者或兩者使用能夠遮蔽紫外線的金屬材料,可以抑制紫外線照射到EL膜172Rf而可以抑制EL膜172Rf的劣化,所以是較佳的。As the sacrificial film 270Rf and the sacrificial film 279Rf, for example, metal materials such as gold, silver, platinum, magnesium, nickel, tungsten, chromium, molybdenum, iron, cobalt, copper, palladium, titanium, aluminum, yttrium, zirconium, and tantalum can be used or include Alloy material of the metal material. In particular, it is preferable to use a low-melting-point material such as aluminum or silver. It is preferable to use a metal material capable of shielding ultraviolet rays for one or both of the sacrificial film 270Rf and the sacrificial film 279Rf, since irradiation of ultraviolet rays to the EL film 172Rf can be suppressed and deterioration of the EL film 172Rf can be suppressed.
另外,作為犧牲膜270Rf及犧牲膜279Rf各自可以使用金屬氧化物諸如In-Ga-Zn氧化物、氧化銦、In-Zn氧化物、In-Sn氧化物、銦鈦氧化物(In-Ti氧化物)、銦錫鋅氧化物(In-Sn-Zn氧化物)、銦鈦鋅氧化物(In-Ti-Zn氧化物)、銦鎵錫鋅氧化物(In-Ga-Sn-Zn氧化物)或包含矽的銦錫氧化物等。In addition, as the sacrificial film 270Rf and the sacrificial film 279Rf, metal oxides such as In-Ga-Zn oxide, indium oxide, In-Zn oxide, In-Sn oxide, indium titanium oxide (In-Ti oxide ), indium tin zinc oxide (In-Sn-Zn oxide), indium titanium zinc oxide (In-Ti-Zn oxide), indium gallium tin zinc oxide (In-Ga-Sn-Zn oxide) or Indium tin oxide containing silicon, etc.
注意,也可以使用元素M(M為鋁、矽、硼、釔、錫、銅、釩、鈹、鈦、鐵、鎳、鍺、鋯、鉬、鑭、鈰、釹、鉿、鉭、鎢和鎂中的一種或多種)代替上述鎵。尤其是,M較佳為選自鎵、鋁和釔中的一種或多種。Note that the element M (M is aluminum, silicon, boron, yttrium, tin, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and one or more of magnesium) in place of the aforementioned gallium. In particular, M is preferably one or more selected from gallium, aluminum and yttrium.
另外,作為犧牲膜可以使用含有具有遮光性,尤其具有紫外線遮光性的材料的膜。例如,可以使用具有紫外線反射性的膜或吸收紫外線的膜。作為具有遮光性的材料,可以使用具有紫外線遮光性的金屬、絕緣體、半導體及半金屬等各種材料,因為該犧牲膜的一部分或全部將在後面製程中被去除,所以遮罩膜較佳為可以藉由蝕刻被加工的膜,尤其較佳為加工性良好的膜。In addition, as the sacrificial film, a film containing a material having light-shielding properties, especially ultraviolet light-shielding properties, can be used. For example, an ultraviolet reflective film or an ultraviolet absorbing film can be used. As a material with light-shielding properties, various materials such as metals, insulators, semiconductors, and semi-metals with ultraviolet light-shielding properties can be used. Because a part or all of the sacrificial film will be removed in the subsequent process, the mask film is preferably able to The film processed by etching is particularly preferably a film with good processability.
藉由作為犧牲膜使用具有紫外線遮光性的材料的膜,可以抑制例如在曝光製程中紫外線被照射到EL層。藉由抑制紫外線給EL層帶來損傷,可以提高發光元件的可靠性。By using a film of an ultraviolet light-shielding material as the sacrificial film, it is possible to suppress, for example, ultraviolet rays from being irradiated to the EL layer during an exposure process. By suppressing damage to the EL layer by ultraviolet rays, the reliability of the light-emitting device can be improved.
注意,含有具有紫外線遮光性的材料的膜在被用作下述保護膜271f的材料時也發揮同樣的效果。Note that even when a film containing a material having ultraviolet light shielding properties is used as a material for the protective film 271f described later, the same effect is exhibited.
此外,作為犧牲膜可以使用非常適合半導體的製造程序的材料。作為非常適合半導體的製造程序的材料,較佳為使用矽或鍺等的半導體材料。另外,可以使用上述半導體材料的氧化物或氮化物。另外,可以使用碳等的非金屬材料或其化合物。另外,可以使用鈦、鉭、鎢、鉻、鋁等的金屬或包含它們中的一個以上的合金。另外,可以使用包含氧化鈦或氧化鉻等上述金屬的氧化物或者氮化鈦、氮化鉻或氮化鉭等氮化物。In addition, as the sacrificial film, a material that is very suitable for a semiconductor manufacturing process can be used. As a material that is very suitable for a semiconductor manufacturing process, it is preferable to use a semiconductor material such as silicon or germanium. In addition, oxides or nitrides of the above-mentioned semiconductor materials may be used. In addition, non-metallic materials such as carbon or their compounds can be used. In addition, metals such as titanium, tantalum, tungsten, chromium, and aluminum, or alloys containing one or more of them can be used. In addition, oxides containing the above-mentioned metals such as titanium oxide or chromium oxide, or nitrides such as titanium nitride, chromium nitride, or tantalum nitride can be used.
另外,作為犧牲膜270Rf及犧牲膜279Rf,可以使用能夠用於保護層273的各種無機絕緣膜。尤其是,氧化絕緣膜的與EL膜172Rf的密接性比氮化絕緣膜的與EL膜172Rf的密接性高,所以是較佳的。例如,分別可以將氧化鋁、氧化鉿或氧化矽等無機絕緣材料用於犧牲膜270Rf及犧牲膜279Rf。作為犧牲膜270Rf及犧牲膜279Rf,例如可以利用ALD法形成氧化鋁膜。藉由利用ALD法,可以減輕對基底(尤其是EL層)帶來的損傷,所以是較佳的。In addition, various inorganic insulating films that can be used for the protective layer 273 can be used as the sacrificial film 270Rf and the sacrificial film 279Rf. In particular, it is preferable that the adhesion of the oxide insulating film to the EL film 172Rf is higher than the adhesion of the nitride insulating film to the EL film 172Rf. For example, inorganic insulating materials such as aluminum oxide, hafnium oxide, or silicon oxide can be used for the sacrificial film 270Rf and the sacrificial film 279Rf, respectively. As the sacrificial film 270Rf and the sacrificial film 279Rf, for example, an aluminum oxide film can be formed by the ALD method. By using the ALD method, damage to the substrate (especially the EL layer) can be reduced, which is preferable.
例如,作為犧牲膜270Rf可以使用利用ALD法形成的無機絕緣膜(例如,氧化鋁膜),並且作為犧牲膜279Rf可以使用利用濺射法形成的無機膜(例如,In-Ga-Zn氧化物膜、鋁膜或鎢膜)。For example, as the sacrificial film 270Rf, an inorganic insulating film (for example, an aluminum oxide film) formed by the ALD method can be used, and as the sacrificial film 279Rf, an inorganic film (for example, an In-Ga-Zn oxide film) formed by a sputtering method can be used. , aluminum film or tungsten film).
另外,作為犧牲膜270Rf和後面形成的保護層271的兩者可以使用相同無機絕緣膜。例如,作為犧牲膜270Rf和保護層271的兩者可以使用利用ALD法形成的氧化鋁膜。在此,犧牲膜270Rf和保護層271既可以採用相同沉積條件,也可以採用不同沉積條件。例如,藉由以與保護層271同樣的條件沉積犧牲膜270Rf,可以形成犧牲膜270Rf作為對水和氧中的至少一方的阻擋性高的絕緣層。另一方面,犧牲膜270Rf是其大部分或全部在後面的製程中被去除的層,所以較佳為容易被加工。因此,犧牲膜270Rf較佳為以與保護層271相比沉積時的基板溫度低的條件沉積。In addition, the same inorganic insulating film can be used for both the sacrificial film 270Rf and the protective layer 271 formed later. For example, an aluminum oxide film formed by the ALD method can be used as both the sacrificial film 270Rf and the protective layer 271 . Here, the sacrificial film 270Rf and the protective layer 271 may use the same deposition conditions or different deposition conditions. For example, by depositing the sacrificial film 270Rf under the same conditions as the protective layer 271, the sacrificial film 270Rf can be formed as an insulating layer having high barrier properties to at least one of water and oxygen. On the other hand, since most or all of the sacrificial film 270Rf is removed in a later process, it is preferable to be easily processed. Therefore, the sacrificial film 270Rf is preferably deposited under the condition that the substrate temperature during deposition is lower than that of the protective layer 271 .
作為犧牲膜270Rf和犧牲膜279Rf中的一者或兩者也可以使用有機材料。例如,作為有機材料也可以使用可溶解於至少對位於EL膜172Rf的最上部的膜在化學上穩定的溶劑的材料。尤其是,可以將溶解於水或醇的材料適用於犧牲膜270Rf和犧牲膜279Rf中的一者或兩者。當沉積上述材料時,較佳的是,在將材料溶解於水或醇等溶劑的狀態下藉由上述濕式的沉積方法塗佈該材料,然後進行用來使溶劑蒸發的加熱處理。此時,較佳為在減壓氛圍下進行加熱處理,由此可以在低溫且短時間下去除溶劑,而可以降低給EL膜172Rf帶來的熱損傷。An organic material may also be used as one or both of the sacrificial film 270Rf and the sacrificial film 279Rf. For example, a material that is soluble in a solvent that is chemically stable at least to the uppermost film of the EL film 172Rf may be used as the organic material. In particular, a material soluble in water or alcohol may be applied to one or both of the sacrificial film 270Rf and the sacrificial film 279Rf. When depositing the above-mentioned material, it is preferable to apply the material by the above-mentioned wet deposition method in a state where the material is dissolved in a solvent such as water or alcohol, and then perform heat treatment for evaporating the solvent. At this time, it is preferable to perform heat treatment under a reduced pressure atmosphere, whereby the solvent can be removed at a low temperature and in a short time, thereby reducing thermal damage to the EL film 172Rf.
犧牲膜270Rf及犧牲膜279Rf各自也可以使用聚乙烯醇(PVA)、聚乙烯醇縮丁醛、聚乙烯吡咯烷酮、聚乙二醇、聚甘油、普魯蘭多糖、水溶性纖維素、可溶解於醇的聚醯胺樹脂或全氟聚合物等氟樹脂等有機樹脂。For the sacrificial film 270Rf and the sacrificial film 279Rf, polyvinyl alcohol (PVA), polyvinyl butyral, polyvinyl pyrrolidone, polyethylene glycol, polyglycerin, pullulan, water-soluble cellulose, soluble in Alcohol-based polyamide resins or organic resins such as fluorine resins such as perfluoropolymers.
例如,作為犧牲膜270Rf可以使用利用蒸鍍法和上述濕式沉積方法中的任意個形成的有機膜(例如,PVA膜),並且作為犧牲膜279Rf可以使用利用濺射法形成的無機膜(例如,氮化矽膜)。For example, as the sacrificial film 270Rf, an organic film (eg, a PVA film) formed by vapor deposition and any of the wet deposition methods described above can be used, and as the sacrificial film 279Rf, an inorganic film (eg, PVA film) formed by a sputtering method can be used. , silicon nitride film).
注意,在本發明的一個實施方式的顯示裝置中,有時犧牲膜的一部分殘留為犧牲層。Note that in the display device according to one embodiment of the present invention, a part of the sacrificial film may remain as a sacrificial layer.
接著,如圖11B所示,在犧牲膜279Rf上形成光阻遮罩180R。光阻遮罩180R可以藉由塗佈感光材料(光阻劑)而進行曝光及顯影來形成。光阻遮罩180R也可以使用正型光阻劑材料或負型光阻劑材料製造。Next, as shown in FIG. 11B, a photoresist mask 180R is formed on the sacrificial film 279Rf. The photoresist mask 180R can be formed by coating a photosensitive material (photoresist), exposing and developing it. The photoresist mask 180R can also be fabricated using positive photoresist material or negative photoresist material.
接著,如圖11B及圖11C所示,使用光阻遮罩180R去除犧牲膜279Rf的一部分,由此形成犧牲層279R。接著,去除光阻遮罩180R。Next, as shown in FIGS. 11B and 11C , a part of the sacrificial film 279Rf is removed using the photoresist mask 180R, thereby forming the sacrificial layer 279R. Next, the photoresist mask 180R is removed.
接著,如圖11C及圖11D所示,將犧牲層279R用作遮罩(也稱為硬遮罩)去除犧牲膜270Rf的一部分而形成犧牲層270R。Next, as shown in FIGS. 11C and 11D , a part of the sacrificial film 270Rf is removed by using the sacrificial layer 279R as a mask (also called a hard mask) to form the sacrificial layer 270R.
犧牲膜270Rf及犧牲膜279Rf分別可以藉由濕蝕刻法或乾蝕刻法加工。The sacrificial film 270Rf and the sacrificial film 279Rf can be processed by wet etching or dry etching, respectively.
藉由利用濕蝕刻法,與利用乾蝕刻法的情況相比,可以減輕在犧牲膜270Rf及犧牲膜279Rf的加工中EL膜172Rf受到的損傷。在使用濕蝕刻法時,例如較佳為使用顯影液、四甲基氫氧化銨(TMAH)水溶液、稀氫氟酸、草酸、磷酸、乙酸、硝酸或包含上述兩個以上的混合溶液等。此外,在利用濕蝕刻法時,也可以使用包含水、磷酸、稀氫氟酸及硝酸的混酸類藥液。注意,用於濕蝕刻處理的藥液可以為鹼性或酸性。另一方面,由於乾蝕刻法的各向異性比濕蝕刻法高,所以藉由利用乾蝕刻法,可以與利用濕蝕刻法的情況相比進行微細加工。By using the wet etching method, damage to the EL film 172Rf during the processing of the sacrificial film 270Rf and the sacrificial film 279Rf can be reduced compared to the case of using the dry etching method. When wet etching is used, for example, it is preferable to use a developer solution, a tetramethylammonium hydroxide (TMAH) aqueous solution, dilute hydrofluoric acid, oxalic acid, phosphoric acid, acetic acid, nitric acid, or a mixed solution containing two or more of the above. In addition, when using the wet etching method, a mixed acid chemical solution containing water, phosphoric acid, dilute hydrofluoric acid, and nitric acid may also be used. Note that the chemical solution used for the wet etching process may be alkaline or acidic. On the other hand, since the anisotropy of the dry etching method is higher than that of the wet etching method, by using the dry etching method, microfabrication can be performed compared with the case of using the wet etching method.
在犧牲膜279Rf的加工中由於不露出EL膜172Rf,所以與犧牲膜270Rf的加工相比加工方法的選擇範圍更大。明確而言,在犧牲膜279Rf的加工中作為蝕刻氣體使用含氧的氣體也可以進一步抑制EL膜172Rf的劣化。Since the EL film 172Rf is not exposed during the processing of the sacrificial film 279Rf, the selection range of processing methods is wider than that of the processing of the sacrificial film 270Rf. Specifically, the use of an oxygen-containing gas as an etching gas in the processing of the sacrificial film 279Rf can further suppress the deterioration of the EL film 172Rf.
光阻遮罩180R例如可以藉由使用氧電漿的灰化被去除。或者,也可以使用氧氣體和CF 4、C 4F 8、SF 6、CHF 3、Cl 2、H 2O、BCl 3或第18族元素。作為第18族元素,例如可以使用He。或者,也可以藉由濕蝕刻去除光阻遮罩180R。此時,犧牲膜279Rf位於最表面且EL膜172Rf不露出,所以在光阻遮罩180R的去除製程中可以抑制EL膜172Rf受到損傷。另外,可以擴大光阻遮罩180R的去除方法的選擇範圍。 The photoresist mask 180R may be removed, for example, by ashing using oxygen plasma. Alternatively, oxygen gas and CF 4 , C 4 F 8 , SF 6 , CHF 3 , Cl 2 , H 2 O, BCl 3 or group 18 elements may also be used. As the Group 18 element, for example, He can be used. Alternatively, the photoresist mask 180R may also be removed by wet etching. At this time, the sacrificial film 279Rf is located on the outermost surface and the EL film 172Rf is not exposed, so that the EL film 172Rf can be prevented from being damaged during the removal process of the photoresist mask 180R. In addition, the selection range of the removal method of the photoresist mask 180R can be expanded.
接著,如圖11C及圖11D所示,加工EL膜172Rf形成EL層172R。例如,將犧牲層279R及犧牲層270R用作遮罩例如利用蝕刻去除EL膜172Rf的一部分而形成EL層172R。注意,雖然在圖11D中未圖示,但有時由於對EL膜172Rf進行的蝕刻處理在層363的不重疊於EL層172R的區域形成凹部。Next, as shown in FIGS. 11C and 11D , the EL film 172Rf is processed to form the EL layer 172R. For example, the EL layer 172R is formed by removing a part of the EL film 172Rf by etching, for example, using the sacrificial layer 279R and the sacrificial layer 270R as a mask. Note that although not shown in FIG. 11D , recesses are sometimes formed in regions of the layer 363 that do not overlap the EL layer 172R due to the etching process performed on the EL film 172Rf.
接著,如圖12A所示,將後面成為EL層172G的EL膜172Gf形成在導電層171上、犧牲層279R上及層363上。EL膜172Gf可以以與可在形成EL膜172Rf時使用的方法相同的方法形成。Next, as shown in FIG. 12A , an EL film 172Gf which will later become an EL layer 172G is formed on the conductive layer 171 , on the sacrificial layer 279R, and on the layer 363 . The EL film 172Gf can be formed in the same method as can be used when forming the EL film 172Rf.
接著,如圖12A所示,在EL膜172Gf上依次形成後面將成為犧牲層270G的犧牲膜270Gf及後面將成為犧牲層279G的犧牲膜279Gf。接著,形成光阻遮罩180G。犧牲膜270Gf及犧牲膜279Gf的材料及形成方法與可用於犧牲膜270Rf及犧牲膜279Rf的條件同樣。光阻遮罩180G的材料及形成方法與可用於光阻遮罩180R的條件同樣。Next, as shown in FIG. 12A, a sacrificial film 270Gf which will later become a sacrificial layer 270G and a sacrificial film 279Gf which will later become a sacrificial layer 279G are sequentially formed on the EL film 172Gf. Next, a photoresist mask 180G is formed. The material and formation method of the sacrificial film 270Gf and the sacrificial film 279Gf are the same as the conditions applicable to the sacrificial film 270Rf and the sacrificial film 279Rf. The material and forming method of the photoresist mask 180G are the same as those applicable to the photoresist mask 180R.
接著,如圖12A及圖12B所示,使用光阻遮罩180G去除犧牲膜279Gf的一部分而形成犧牲層279G。接著,去除光阻遮罩180G。犧牲層279G的形成及光阻遮罩180G的去除分別可以使用與可用於犧牲層279R的形成及光阻遮罩180R的去除的方法同樣的方法。Next, as shown in FIGS. 12A and 12B , a part of the sacrificial film 279Gf is removed using a photoresist mask 180G to form a sacrificial layer 279G. Next, the photoresist mask 180G is removed. The formation of the sacrificial layer 279G and the removal of the photoresist mask 180G can use the same methods as those used for the formation of the sacrificial layer 279R and the removal of the photoresist mask 180R, respectively.
接著,如圖12B及圖12C所示,將犧牲層279G用作遮罩去除犧牲膜270Gf的一部分而形成犧牲層270G。接著,加工EL膜172Gf形成EL層172G。例如,將犧牲層279G及犧牲層270G用作遮罩例如利用蝕刻去除EL膜172Gf的一部分而形成EL層172G。犧牲層270G的形成及EL層172G的形成分別可以使用與可用於犧牲層270R的形成及EL層172R的形成的方法同樣的方法。Next, as shown in FIGS. 12B and 12C , a part of the sacrificial film 270Gf is removed using the sacrificial layer 279G as a mask to form the sacrificial layer 270G. Next, the EL film 172Gf is processed to form the EL layer 172G. For example, the EL layer 172G is formed by removing a part of the EL film 172Gf by etching, for example, using the sacrificial layer 279G and the sacrificial layer 270G as a mask. The formation of the sacrificial layer 270G and the formation of the EL layer 172G can use the same methods as those used for the formation of the sacrificial layer 270R and the formation of the EL layer 172R, respectively.
接著,如圖12D所示,將後面成為EL層172B的EL膜172Bf形成在導電層171上、犧牲層279R上、犧牲層279G上及層363上。EL膜172Bf可以使用與可用於EL膜172Rf的形成的方法同樣的方法形成。Next, as shown in FIG. 12D , an EL film 172Bf which will later become an EL layer 172B is formed on the conductive layer 171 , on the sacrificial layer 279R, on the sacrificial layer 279G, and on the layer 363 . The EL film 172Bf can be formed using the same method as that used for the formation of the EL film 172Rf.
接著,如圖12D所示,在EL膜172Bf上依次形成後面將成為犧牲層270B的犧牲膜270Bf及後面將成為犧牲層279B的犧牲膜279Bf。接著,形成光阻遮罩180B。犧牲膜270Bf及犧牲膜279Bf的材料及形成方法與可用於犧牲膜270Rf及犧牲膜279Rf的條件同樣。光阻遮罩180B的材料及形成方法與可用於光阻遮罩180R的條件同樣。Next, as shown in FIG. 12D, a sacrificial film 270Bf which will later become a sacrificial layer 270B and a sacrificial film 279Bf which will later become a sacrificial layer 279B are sequentially formed on the EL film 172Bf. Next, a photoresist mask 180B is formed. The material and formation method of the sacrificial film 270Bf and the sacrificial film 279Bf are the same as the conditions applicable to the sacrificial film 270Rf and the sacrificial film 279Rf. The material and forming method of the photoresist mask 180B are the same as those applicable to the photoresist mask 180R.
接著,如圖12D及圖12E所示,使用光阻遮罩180B去除犧牲膜279Bf的一部分而形成犧牲層279B。接著,去除光阻遮罩180B。犧牲層279B的形成及光阻遮罩180B的去除分別可以使用與可用於犧牲層279R的形成及光阻遮罩180R的去除的方法同樣的方法。Next, as shown in FIGS. 12D and 12E , a part of the sacrificial film 279Bf is removed using a photoresist mask 180B to form a sacrificial layer 279B. Next, the photoresist mask 180B is removed. The formation of the sacrificial layer 279B and the removal of the photoresist mask 180B can use the same methods as those used for the formation of the sacrificial layer 279R and the removal of the photoresist mask 180R, respectively.
接著,如圖12E及圖12F所示,將犧牲層279B用作遮罩去除犧牲膜270Bf的一部分而形成犧牲層270B。接著,加工EL膜172Bf形成EL層172B。例如,將犧牲層279B及犧牲層270B用作遮罩例如利用蝕刻去除EL膜172Bf的一部分而形成EL層172B。犧牲層270B的形成及EL層172B的形成分別可以使用與可用於犧牲層270R的形成及EL層172R的形成的方法同樣的方法。Next, as shown in FIGS. 12E and 12F , a part of the sacrificial film 270Bf is removed using the sacrificial layer 279B as a mask to form the sacrificial layer 270B. Next, the EL film 172Bf is processed to form the EL layer 172B. For example, the EL layer 172B is formed by removing a part of the EL film 172Bf by etching, for example, using the sacrificial layer 279B and the sacrificial layer 270B as a mask. The formation of the sacrificial layer 270B and the formation of the EL layer 172B can use the same methods as those used for the formation of the sacrificial layer 270R and the formation of the EL layer 172R, respectively.
接著,如圖12F及圖13A所示,較佳為去除犧牲層279R、犧牲層279G及犧牲層279B。有時根據後面製程在顯示裝置中殘留犧牲層270R、犧牲層270G、犧牲層270B、犧牲層279R、犧牲層279G及犧牲層279B。藉由此時去除犧牲層279R、犧牲層279G及犧牲層279B,可以防止在顯示裝置中殘留犧牲層279R、犧牲層279G及犧牲層279B。例如,在作為犧牲層279R、犧牲層279G及犧牲層279B使用導電材料時,預先去除犧牲層279R、犧牲層279G及犧牲層279B,因此可以抑制因殘留的犧牲層279R、犧牲層279G及犧牲層279B導致的洩漏電流的發生及電容形成等。Next, as shown in FIG. 12F and FIG. 13A , preferably, the sacrificial layer 279R, the sacrificial layer 279G and the sacrificial layer 279B are removed. Sometimes the sacrificial layer 270R, the sacrificial layer 270G, the sacrificial layer 270B, the sacrificial layer 279R, the sacrificial layer 279G, and the sacrificial layer 279B remain in the display device according to subsequent processes. By removing the sacrificial layer 279R, the sacrificial layer 279G, and the sacrificial layer 279B at this time, it is possible to prevent the sacrificial layer 279R, the sacrificial layer 279G, and the sacrificial layer 279B from remaining in the display device. For example, when a conductive material is used as the sacrificial layer 279R, the sacrificial layer 279G, and the sacrificial layer 279B, the sacrificial layer 279R, the sacrificial layer 279G, and the sacrificial layer 279B are removed in advance, so that the remaining sacrificial layer 279R, the sacrificial layer 279G, and the Occurrence of leakage current and capacitance formation caused by 279B.
注意,在本實施方式中以去除犧牲層279R、犧牲層279G及犧牲層279B的情況為例進行說明,但也可以不去除犧牲層279R、犧牲層279G及犧牲層279B。Note that in this embodiment mode, the case of removing the sacrificial layer 279R, the sacrificial layer 279G, and the sacrificial layer 279B is described as an example, but the sacrificial layer 279R, the sacrificial layer 279G, and the sacrificial layer 279B may not be removed.
犧牲層的去除製程可以使用與犧牲層的加工製程同樣的方法。尤其是,藉由利用濕蝕刻法,與利用乾蝕刻法的情況相比,在去除犧牲層時可以降低給EL層172R、EL層172G及EL層172B帶來的損傷。The removal process of the sacrificial layer can use the same method as the processing process of the sacrificial layer. In particular, by using the wet etching method, damage to the EL layer 172R, the EL layer 172G, and the EL layer 172B can be reduced when removing the sacrificial layer, compared to the case of using the dry etching method.
另外,也可以將犧牲層溶解於水或醇等的溶劑來去除。作為醇,可以舉出乙醇、甲醇、異丙醇(IPA)及甘油等。Alternatively, the sacrificial layer may be removed by dissolving it in a solvent such as water or alcohol. Examples of the alcohol include ethanol, methanol, isopropanol (IPA), glycerin, and the like.
接著,如圖13B所示,以覆蓋EL層172R、EL層172G、EL層172B、犧牲層270R、犧牲層270G及犧牲層270B的方式形成後面將成為保護層271的保護膜271f。保護膜271f例如可以利用ALD法、濺射法、CVD法或PECVD法形成,較佳為利用給EL層172帶來的沉積損傷得到減少且覆蓋性高的ALD法形成。Next, as shown in FIG. 13B , a protective film 271f which will later become the protective layer 271 is formed to cover the EL layer 172R, the EL layer 172G, the EL layer 172B, the sacrificial layer 270R, the sacrificial layer 270G, and the sacrificial layer 270B. The protective film 271f can be formed by, for example, an ALD method, a sputtering method, a CVD method, or a PECVD method, and is preferably formed by an ALD method that reduces deposition damage to the EL layer 172 and has high coverage.
接著,如圖13B所示,在保護膜271f上形成後面將成為絕緣層278的絕緣膜278f。絕緣膜278f例如較佳為利用旋塗法使用感光材料形成。Next, as shown in FIG. 13B, an insulating film 278f which will later become an insulating layer 278 is formed on the protective film 271f. The insulating film 278f is preferably formed using a photosensitive material by spin coating, for example.
接著,如圖13B及圖13C所示,加工絕緣膜278f在EL層172間形成絕緣層278。明確而言,例如以與兩個EL層172的每一個的頂面的一部分重疊且包括該兩個EL層172的側面之間的區域的方式形成絕緣層278。Next, as shown in FIGS. 13B and 13C , the insulating film 278 f is processed to form an insulating layer 278 between the EL layers 172 . Specifically, the insulating layer 278 is formed, for example, to overlap a part of the top surface of each of the two EL layers 172 and to include a region between the side surfaces of the two EL layers 172 .
作為絕緣膜278f,在使用光阻劑等感光材料時,藉由對絕緣膜278f進行曝光以及顯影,可以形成絕緣層278。在作為絕緣膜278f使用正型感光材料時,在曝光製程中,對不形成絕緣層278的區域照射紫外線或可見光線。在作為絕緣膜278f使用負型感光材料時,在曝光製程中,對形成絕緣層278的區域照射紫外線或可見光線。When using a photosensitive material such as a photoresist as the insulating film 278f, the insulating layer 278 can be formed by exposing and developing the insulating film 278f. When a positive-type photosensitive material is used as the insulating film 278f, in the exposure process, ultraviolet rays or visible rays are irradiated to regions where the insulating layer 278 is not formed. When a negative photosensitive material is used as the insulating film 278f, in the exposure process, ultraviolet rays or visible rays are irradiated to the region where the insulating layer 278 is formed.
注意,在形成絕緣層278之後,也可以去除顯影時的殘渣(所謂的浮渣)。例如,藉由進行使用氧電漿的灰化,可以去除殘渣物。此外,也可以進行蝕刻以便調整絕緣層278的表面高度。絕緣層278例如也可以藉由利用氧電漿的灰化被加工。Note that residues at the time of development (so-called scum) may also be removed after the insulating layer 278 is formed. For example, by performing ashing using oxygen plasma, residues can be removed. In addition, etching may also be performed in order to adjust the surface height of the insulating layer 278 . The insulating layer 278 can also be processed, for example, by ashing with oxygen plasma.
接著,如圖13B及圖13C所示,將絕緣層278用作遮罩去除保護膜271f的一部分而形成保護層271。此外,去除犧牲層270R、犧牲層270G及犧牲層270B的一部分在犧牲層270R、犧牲層270G及犧牲層270B中形成開口。由此,EL層172R、EL層172G及EL層172B的頂面露出。注意,如圖13C所示,有時在與絕緣層278或保護層271重疊的區域犧牲層270R、犧牲層270G及犧牲層270B殘留。Next, as shown in FIGS. 13B and 13C , using the insulating layer 278 as a mask, a part of the protective film 271f is removed to form the protective layer 271 . In addition, removing a portion of the sacrificial layer 270R, the sacrificial layer 270G, and the sacrificial layer 270B forms openings in the sacrificial layer 270R, the sacrificial layer 270G, and the sacrificial layer 270B. Thereby, the top surfaces of the EL layer 172R, the EL layer 172G, and the EL layer 172B are exposed. Note that, as shown in FIG. 13C , the sacrificial layer 270R, the sacrificial layer 270G, and the sacrificial layer 270B may remain in regions overlapping the insulating layer 278 or the protective layer 271 .
接著,如圖13D所示,在EL層172R上、EL層172G上、EL層172B上及絕緣層278上形成共用層174。共用層174可以藉由蒸鍍法(包括真空蒸鍍法)、轉印法、印刷法、噴墨法、塗佈法等方法形成。Next, as shown in FIG. 13D , a common layer 174 is formed on the EL layer 172R, on the EL layer 172G, on the EL layer 172B, and on the insulating layer 278 . The common layer 174 can be formed by evaporation method (including vacuum evaporation method), transfer method, printing method, inkjet method, coating method and other methods.
接著,如圖13D所示,在共用層174上形成導電層173。導電層173可以藉由濺射法或真空蒸鍍法等方法形成。或者,也可以層疊藉由真空蒸鍍法形成的膜與藉由濺射法形成的膜來形成導電層173。Next, as shown in FIG. 13D , a conductive layer 173 is formed on the common layer 174 . The conductive layer 173 can be formed by methods such as sputtering or vacuum evaporation. Alternatively, the conductive layer 173 may be formed by laminating a film formed by a vacuum evaporation method and a film formed by a sputtering method.
這裡,導電層173可以在沉積共用層174之後連續進行沉積,而之間沒有進行蝕刻等製程。例如,可以始終在真空下形成共用層174及導電層173。由此,與在顯示裝置中沒有設置共用層174的情況相比可以使導電層173的底面清潔。Here, the conductive layer 173 may be continuously deposited after the common layer 174 is deposited, without performing processes such as etching in between. For example, the common layer 174 and the conductive layer 173 may always be formed under vacuum. This makes it possible to clean the bottom surface of the conductive layer 173 compared to the case where the common layer 174 is not provided in the display device.
接著,如圖13D所示,在導電層173上形成保護層273。保護層273可以藉由真空蒸鍍法、濺射法、CVD法或ALD法等方法形成。Next, as shown in FIG. 13D , a protective layer 273 is formed on the conductive layer 173 . The protective layer 273 can be formed by methods such as vacuum evaporation, sputtering, CVD, or ALD.
接著,使用黏合層122在保護層273上貼合基板13a。藉由上述製程可以製造具有圖9A所示的結構的顯示裝置。Next, the substrate 13 a is bonded on the protective layer 273 using the adhesive layer 122 . A display device having the structure shown in FIG. 9A can be manufactured through the above process.
在上述顯示裝置的製造方法中,EL層172R、EL層172G及EL層172B在整個面上沉積EL膜之後例如藉由光微影法及蝕刻法加工EL膜來形成,不使用高精細金屬遮罩。這裡,在使用高精細金屬遮罩形成EL層時,由於金屬遮罩的精度、金屬遮罩與基板的錯位、金屬遮罩的撓曲、以及例如蒸氣散射所導致的已沉積的膜的輪廓變大等各種影響,而島狀發光層的形狀及位置與設計時的形狀及位置產生偏差,難以實現顯示裝置的高清晰化及高開口率化。如上所述,不使用高精細金屬遮罩形成EL層的顯示裝置與使用高精細金屬遮罩形成EL層的顯示裝置相比可以實現高清晰的顯示裝置。此外,可以實現高開口率的顯示裝置。In the manufacturing method of the display device described above, the EL layer 172R, the EL layer 172G, and the EL layer 172B are formed by depositing an EL film on the entire surface, for example, by photolithography and etching, and then processing the EL film without using a high-definition metal mask. cover. Here, when the EL layer is formed using a high-definition metal mask, due to the accuracy of the metal mask, misalignment of the metal mask and the substrate, deflection of the metal mask, and, for example, changes in the profile of the deposited film due to vapor scattering However, the shape and position of the island-shaped light emitting layer deviate from the shape and position at the time of design, making it difficult to achieve high definition and high aperture ratio of the display device. As described above, a display device in which an EL layer is formed without using a high-definition metal mask can realize a display device with higher definition than a display device in which an EL layer is formed using a high-definition metal mask. In addition, a display device with a high aperture ratio can be realized.
在本說明書等中,有時將使用金屬遮罩或FMM(Fine Metal Mask,高精細金屬遮罩)製造的器件稱為具有MM(Metal Mask)結構的器件。此外,在本說明書等中,有時將不使用金屬遮罩或FMM製造的器件稱為具有MML(Metal Mask Less)結構的器件。In this specification and the like, a device manufactured using a metal mask or an FMM (Fine Metal Mask, high-definition metal mask) may be referred to as a device having an MM (Metal Mask) structure. In addition, in this specification and the like, a device manufactured without using a metal mask or FMM may be referred to as a device having an MML (Metal Mask Less) structure.
接著,參照圖14A至圖14D說明具有圖10A所示的結構的顯示裝置的製造方法例子。Next, an example of a method of manufacturing the display device having the structure shown in FIG. 10A will be described with reference to FIGS. 14A to 14D .
首先,如圖14A所示,在基板11b上設置層363。接著,藉由使用與圖11A說明的方法同樣的方法形成導電層171。接著,以覆蓋導電層171的端部的方式形成絕緣層272。例如,藉由沉積將成為絕緣層272的膜且加工該膜,可以形成絕緣層272。將成為絕緣層272的膜例如可以利用旋塗法、噴塗法、網版印刷法、CVD法、濺射法或真空蒸鍍法沉積。此外,將成為絕緣層272的膜的加工例如可以利用光微影法及蝕刻法進行。First, as shown in FIG. 14A, a layer 363 is provided on the substrate 11b. Next, the conductive layer 171 is formed by using the same method as that illustrated in FIG. 11A . Next, insulating layer 272 is formed to cover the end of conductive layer 171 . For example, the insulating layer 272 can be formed by depositing a film to be the insulating layer 272 and processing the film. The film to be the insulating layer 272 can be deposited using, for example, a spin coating method, a spray coating method, a screen printing method, a CVD method, a sputtering method, or a vacuum evaporation method. In addition, the processing of the film to be the insulating layer 272 can be performed by photolithography and etching, for example.
接著,如圖14B所示,使用FMM181R形成EL層172R。例如,藉由使用FMM181R的真空蒸鍍法或濺射法形成EL層172R。注意,也可以利用噴墨法形成EL層172R。圖14B示出利用在以被形成面位於下側的方式倒轉基板的狀態下進行沉積的所謂的面朝下(facedown)方式進行沉積的狀況。Next, as shown in FIG. 14B , an EL layer 172R is formed using an FMM 181R. For example, the EL layer 172R is formed by a vacuum evaporation method or a sputtering method using FMM181R. Note that the EL layer 172R may also be formed using an inkjet method. FIG. 14B shows a situation in which deposition is performed by a so-called face-down method in which the substrate is deposited with the substrate inverted so that the surface to be formed is located on the lower side.
接著,如圖14C所示,使用FMM181G形成EL層172G。EL層172G可以與EL層172R同樣的方法形成。同樣地,如圖14D所示,使用FMM181B形成EL層172B。Next, as shown in FIG. 14C , an EL layer 172G is formed using the FMM 181G. The EL layer 172G can be formed by the same method as that of the EL layer 172R. Likewise, as shown in FIG. 14D, an EL layer 172B is formed using an FMM 181B.
這裡,藉由在形成絕緣層272之後形成EL層172R、EL層172G及EL層172B,可以在防止FMM181(FMM181R、FMM181G及FMM181B)與導電層171的接觸的同時使FMM181靠近導電層171。因此,可以抑制EL層172比FMM181的開口大。因此,可以防止相鄰的EL層172彼此接觸。如上所述,與不形成絕緣層272使用FMM181形成EL層172的情況相比,可以提高顯示裝置的可靠性。Here, by forming EL layer 172R, EL layer 172G, and EL layer 172B after forming insulating layer 272 , FMM 181 (FMM 181R, FMM 181G, and FMM 181B) can be brought close to conductive layer 171 while preventing contact with conductive layer 171 . Therefore, the opening of the EL layer 172 can be suppressed from being larger than that of the FMM 181 . Therefore, adjacent EL layers 172 can be prevented from contacting each other. As described above, compared with the case where the EL layer 172 is formed using the FMM 181 without forming the insulating layer 272 , the reliability of the display device can be improved.
此外,在使用FMM181形成EL層172R、EL層172G及EL層172B時,也可以並不需要進行犧牲層的形成以及藉由光微影法及蝕刻法的EL膜的加工等。因此,在使用FMM181形成EL層172R、EL層172G及EL層172B時,與不使用FMM181形成EL層172R、EL層172G及EL層172B的情況相比,可以以簡單的方法製造顯示裝置。因此,可以以低成本製造顯示裝置。In addition, when the EL layer 172R, the EL layer 172G, and the EL layer 172B are formed using the FMM 181 , the formation of a sacrificial layer and the processing of the EL film by photolithography and etching may not be necessary. Therefore, when the EL layer 172R, the EL layer 172G, and the EL layer 172B are formed using the FMM 181 , a display device can be manufactured in a simpler manner than when the EL layer 172R, the EL layer 172G, and the EL layer 172B are formed without using the FMM 181 . Therefore, a display device can be manufactured at low cost.
接著,在EL層172R上、EL層172G上、EL層172B上及絕緣層272上形成導電層173。如上所述,導電層173可以藉由濺射法或真空蒸鍍法等方法形成。或者,也可以層疊藉由蒸鍍法形成的膜與藉由濺射法形成的膜來形成導電層173。Next, a conductive layer 173 is formed on the EL layer 172R, on the EL layer 172G, on the EL layer 172B, and on the insulating layer 272 . As mentioned above, the conductive layer 173 can be formed by methods such as sputtering or vacuum evaporation. Alternatively, the conductive layer 173 may be formed by laminating a film formed by vapor deposition and a film formed by sputtering.
接著,在導電層173上形成保護層273。如上所述,保護層273可以藉由真空蒸鍍法、濺射法、CVD法或ALD法等方法形成。由此,可以製造圖10A所示的顯示裝置。Next, a protective layer 273 is formed on the conductive layer 173 . As mentioned above, the protective layer 273 can be formed by methods such as vacuum evaporation, sputtering, CVD, or ALD. Thus, the display device shown in FIG. 10A can be manufactured.
注意,設置有絕緣層272的顯示裝置所包括的EL層172R、EL層172G及EL層172B也可以在不使用FMM181的情況下形成。例如,如圖11B至圖12F所示,在整個面上沉積EL膜之後例如藉由光微影法及蝕刻法加工EL膜,也可以形成EL層172R、EL層172G及EL層172B。此外,在不使用FMM181形成EL層172R、EL層172G及EL層172B時,也可以形成保護層271、絕緣層278及共用層174。再者,在作為EL層172形成如圖10B所示的一連續的EL層172W時,可以在不使用FMM181的情況下形成EL層172W,因此與使用FMM181按每個發光元件63W分離形成EL層172W的情況相比,可以使顯示裝置的製程簡化。Note that the EL layer 172R, the EL layer 172G, and the EL layer 172B included in the display device provided with the insulating layer 272 may also be formed without using the FMM 181 . For example, as shown in FIGS. 11B to 12F , after depositing an EL film on the entire surface, the EL film may be processed, for example, by photolithography and etching to form EL layer 172R, EL layer 172G, and EL layer 172B. In addition, when the EL layer 172R, the EL layer 172G, and the EL layer 172B are formed without using the FMM 181 , the protective layer 271 , the insulating layer 278 , and the common layer 174 may be formed. Furthermore, when forming a continuous EL layer 172W as shown in FIG. 10B as the EL layer 172, the EL layer 172W can be formed without using the FMM 181, so it is different from using the FMM 181 to form the EL layer separately for each light-emitting element 63W. Compared with the case of 172W, the manufacturing process of the display device can be simplified.
本實施方式所示的結構例子及對應於這些例子的圖式等的至少一部分可以與其他結構例子或圖式等適當地組合。At least a part of the structural examples shown in this embodiment and the drawings corresponding to these examples can be appropriately combined with other structural examples, drawings, and the like.
本實施方式的至少一部分可以與本說明書所記載的其他實施方式適當地組合而實施。At least a part of this embodiment mode can be implemented in combination with other embodiment modes described in this specification as appropriate.
實施方式2 在本實施方式中,說明本發明的一個實施方式的電子裝置所包括的顯示裝置的像素佈局。 Embodiment 2 In this embodiment mode, a pixel layout of a display device included in an electronic device according to one embodiment of the present invention will be described.
對構成顯示裝置的像素的子像素的排列沒有特別的限制,可以使用各種方法。作為子像素的排列,例如可以舉出條紋排列、S條紋排列、矩陣排列、Delta排列、拜耳排列及Pentile排列等。There is no particular limitation on the arrangement of sub-pixels constituting a pixel of a display device, and various methods can be used. Examples of the sub-pixel arrangement include a stripe arrangement, an S-stripe arrangement, a matrix arrangement, a Delta arrangement, a Bayer arrangement, and a Pentile arrangement.
本實施方式中的圖式所示的子像素的頂面形狀相當於發光區域的頂面形狀。The shape of the top surface of the sub-pixel shown in the drawings in this embodiment corresponds to the shape of the top surface of the light emitting region.
另外,作為子像素的頂面形狀,例如可以舉出三角形、四角形(包括矩形、正方形)、五角形等多角形、角部圓的上述多角形形狀、橢圓形或圓形等。In addition, examples of the shape of the top surface of the sub-pixel include polygons such as triangles, quadrangles (including rectangles, and squares), and pentagons, the above-mentioned polygons with rounded corners, ellipses, and circles.
構成子像素的電路佈局不侷限於圖式所示的子像素的範圍,也可以配置在其外側。The circuit layout constituting the sub-pixel is not limited to the range of the sub-pixel shown in the drawings, and may be arranged outside it.
圖15A所示的像素109採用S條紋排列。圖15A所示的像素109由子像素110a、子像素110b、子像素110c這三個子像素構成。The pixels 109 shown in FIG. 15A employ an S-stripe arrangement. The pixel 109 shown in FIG. 15A is composed of three sub-pixels of a sub-pixel 110a, a sub-pixel 110b, and a sub-pixel 110c.
圖15B所示的像素109包括具有角部呈圓形的近似三角形的頂面形狀的子像素110a、具有角部呈圓形的近似梯形的頂面形狀的子像素110b以及具有角部呈圓形的近似四角形或近似六角形的頂面形狀的子像素110c。另外,子像素110b的發光面積大於子像素110a。如此,各子像素的形狀及尺寸可以分別獨立決定。例如,包括可靠性高的發光元件的子像素的尺寸可以更小。The pixel 109 shown in FIG. 15B includes a sub-pixel 110a having an approximately triangular top surface shape with rounded corners, a sub-pixel 110b having an approximately trapezoidal top surface shape with rounded corners, and a sub-pixel 110b having a substantially trapezoidal top surface shape with rounded corners. The sub-pixel 110c has an approximately quadrangular or approximately hexagonal top surface shape. In addition, the light emitting area of the sub-pixel 110b is larger than that of the sub-pixel 110a. In this way, the shape and size of each sub-pixel can be independently determined. For example, the size of a sub-pixel including a highly reliable light-emitting element can be smaller.
圖15C所示的像素124a及像素124b採用Pentile排列。圖15C示出交替配置包括子像素110a及子像素110b的像素124a及包括子像素110b及子像素110c的像素124b的例子。The pixels 124a and 124b shown in FIG. 15C adopt a Pentile arrangement. FIG. 15C shows an example in which a pixel 124a including a sub-pixel 110a and a sub-pixel 110b and a pixel 124b including a sub-pixel 110b and a sub-pixel 110c are alternately arranged.
圖15D、圖15E及圖15F所示的像素124a及像素124b採用Delta排列。像素124a在上面的行(第一行)包括兩個子像素(子像素110a、子像素110b),在下面的行(第二行)包括一個子像素(子像素110c)。像素124b在上面的行(第一行)包括一個子像素(子像素110c),在下面的行(第二行)包括兩個子像素(子像素110a、子像素110b)。The pixels 124 a and 124 b shown in FIG. 15D , FIG. 15E , and FIG. 15F adopt a Delta arrangement. Pixel 124a includes two sub-pixels (sub-pixel 110a, sub-pixel 110b) in the upper row (first row) and one sub-pixel (sub-pixel 110c) in the lower row (second row). Pixel 124b includes one sub-pixel (sub-pixel 110c ) in the upper row (first row) and two sub-pixels (sub-pixel 110a , sub-pixel 110b ) in the lower row (second row).
圖15D是各子像素具有帶圓角的近似四角形的頂面形狀的例子,圖15E是各子像素具有圓形頂面形狀的例子,圖15F是各子像素具有帶圓角的近似六角形的頂面形狀的例子。Fig. 15D is an example in which each sub-pixel has an approximately quadrangular top surface shape with rounded corners, Fig. 15E is an example in which each sub-pixel has a circular top surface shape, and Fig. 15F is an example in which each sub-pixel has an approximate hexagonal shape with rounded corners. Example of top surface shape.
圖15G示出各顏色的子像素配置為鋸齒形狀的例子。明確而言,在俯視時,在列方向上排列的兩個子像素(例如,子像素110a與子像素110b以及子像素110b與子像素110c)的上邊的位置錯開。FIG. 15G shows an example in which sub-pixels of each color are arranged in a zigzag shape. Specifically, the positions of the upper sides of two sub-pixels (for example, sub-pixel 110 a and sub-pixel 110 b and sub-pixel 110 b and sub-pixel 110 c ) arranged in the column direction are shifted in plan view.
在圖15A至圖15G所示的各像素中,例如較佳的是,作為子像素110a使用發射紅色光的子像素R,作為子像素110b使用發射綠色光的子像素G,並且作為子像素110c使用發射藍色光的子像素B。注意,子像素的結構不侷限於此,可以適當地決定子像素所發射的顏色及排列順序。例如,也可以作為子像素110b使用發射紅色光的子像素R,作為子像素110a使用發射綠色光的子像素G。In each of the pixels shown in FIGS. 15A to 15G , for example, it is preferable to use a subpixel R that emits red light as the subpixel 110a, use a subpixel G that emits green light as the subpixel 110b, and use a subpixel G that emits green light as the subpixel 110c. Sub-pixel B that emits blue light is used. Note that the structure of the sub-pixels is not limited thereto, and the colors emitted by the sub-pixels and the order of arrangement can be appropriately determined. For example, a sub-pixel R that emits red light may be used as the sub-pixel 110b, and a sub-pixel G that emits green light may be used as the sub-pixel 110a.
在光微影法中,被加工的圖案越微細越不能忽視光的繞射所帶來的影響,所以在藉由曝光轉移光罩的圖案時其保真度下降,難以將光阻遮罩加工為所希望的形狀。因此,即使光罩的圖案為矩形,也易於形成帶圓角的圖案。因此,子像素的頂面形狀有時呈帶圓角的多角形形狀、橢圓形或圓形等。In the photolithography method, the finer the pattern to be processed, the more the influence of light diffraction cannot be ignored. Therefore, when the pattern of the photomask is transferred by exposure, its fidelity decreases, and it is difficult to process the photoresist mask. for the desired shape. Therefore, even if the pattern of the photomask is rectangular, it is easy to form a pattern with rounded corners. Therefore, the shape of the top surface of the sub-pixel may be a polygon with rounded corners, an ellipse, a circle, or the like.
並且,在本發明的一個實施方式的顯示裝置的製造方法中,使用光阻遮罩將EL層加工為島狀。形成在EL層上的光阻膜需要以低於EL層的耐熱溫度的溫度固化。因此,根據EL層的材料的耐熱溫度及光阻劑材料的固化溫度而有時光阻膜的固化不充分。固化不充分的光阻膜在被加工時有時呈遠離所希望的形狀的形狀。其結果是,EL層的頂面形狀有時呈帶圓角的多角形形狀、橢圓形或圓形等。例如,當要形成頂面形狀為正方形的光阻遮罩時,有時形成圓形頂面形狀的光阻遮罩而EL層的頂面形狀呈圓形。Furthermore, in the method of manufacturing a display device according to one embodiment of the present invention, the EL layer is processed into an island shape using a photoresist mask. The photoresist film formed on the EL layer needs to be cured at a temperature lower than the heat-resistant temperature of the EL layer. Therefore, depending on the heat resistance temperature of the material of the EL layer and the curing temperature of the photoresist material, the photoresist film may not be sufficiently cured. An insufficiently cured photoresist film may have a shape far from the desired shape when processed. As a result, the shape of the top surface of the EL layer may be a polygonal shape with rounded corners, an ellipse, a circle, or the like. For example, when a photoresist mask with a square top surface is to be formed, a circular top surface photoresist mask may be formed and the top surface of the EL layer may have a circular top surface shape.
為了使EL層的頂面形狀呈所希望的形狀,也可以預先利用以設計圖案與轉移圖案一致的方式校正遮罩圖案的技術(OPC(Optical Proximity Correction:光學鄰近效應修正)技術)。明確而言,在OPC技術中,例如對遮罩圖案上的圖形角部追加校正用圖案。In order to make the shape of the top surface of the EL layer a desired shape, it is also possible to use a technique (OPC (Optical Proximity Correction) technique) of correcting the mask pattern so that the design pattern matches the transfer pattern in advance. Specifically, in the OPC technique, for example, a correction pattern is added to a corner portion of a figure on a mask pattern.
如圖16A至圖16I所示,像素可以包括四個子像素。As shown in FIGS. 16A to 16I , a pixel may include four sub-pixels.
圖16A至圖16C所示的像素109採用條紋排列。The pixels 109 shown in FIGS. 16A to 16C employ a stripe arrangement.
圖16A是各子像素具有矩形頂面形狀的例子,圖16B是各子像素具有連接兩個半圓與矩形的頂面形狀的例子,圖16C是各子像素具有橢圓形頂面形狀的例子。16A is an example of each sub-pixel having a rectangular top shape, FIG. 16B is an example of each sub-pixel having a top shape connecting two semicircles and a rectangle, and FIG. 16C is an example of each sub-pixel having an elliptical top shape.
圖16D至圖16F所示的像素109採用矩陣排列。The pixels 109 shown in FIGS. 16D to 16F are arranged in a matrix.
圖16D是各子像素具有正方形的頂面形狀的例子,圖16E是各子像素具有角部呈圓形的近似正方形的例子,圖16F是各子像素具有圓形頂面形狀的例子。16D is an example in which each sub-pixel has a square top shape, FIG. 16E is an example in which each sub-pixel has a nearly square shape with rounded corners, and FIG. 16F is an example in which each sub-pixel has a circular top shape.
圖16G及圖16H示出一個像素109以兩行三列構成的例子。16G and 16H show an example in which one pixel 109 is constituted by two rows and three columns.
圖16G所示的像素109在上面的行(第一行)包括三個子像素(子像素110a、子像素110b、子像素110c)且在下面的行(第二行)包括一個子像素(子像素110d)。換言之,像素109在左列(第一列)包括子像素110a,在中間列(第二列)包括子像素110b,在右列(第三列)包括子像素110c,並包括橫跨這三個列的子像素110d。Pixel 109 shown in FIG. 16G includes three subpixels (subpixel 110a, subpixel 110b, subpixel 110c) in the upper row (first row) and one subpixel (subpixel 110c) in the lower row (second row) 110d). In other words, pixel 109 includes subpixel 110a in the left column (first column), subpixel 110b in the middle column (second column), subpixel 110c in the right column (third column), and includes column of sub-pixels 110d.
圖16H所示的像素109在上面的行(第一行)包括三個子像素(子像素110a、子像素110b、子像素110c)且在下面的行(第二行)包括三個子像素110d。換言之,像素109在左列(第一列)包括子像素110a及子像素110d,在中間列(第二列)包括子像素110b及子像素110d,在右列(第三列)包括子像素110c及子像素110d。如圖16H所示,藉由採用上面的行和下面的行的子像素的配置對齊的結構,可以高效地去除製造程序中可能產生的粉塵。因此,可以提供顯示品質高的顯示裝置。Pixel 109 shown in FIG. 16H includes three sub-pixels (sub-pixel 110a, sub-pixel 110b, sub-pixel 110c) in the upper row (first row) and three sub-pixels 110d in the lower row (second row). In other words, pixel 109 includes sub-pixel 110a and sub-pixel 110d in the left column (first column), sub-pixel 110b and sub-pixel 110d in the middle column (second column), and sub-pixel 110c in the right column (third column). and sub-pixel 110d. As shown in FIG. 16H , by adopting a structure in which the arrangement of sub-pixels in the upper row and the lower row are aligned, dust that may be generated during the manufacturing process can be efficiently removed. Therefore, a display device with high display quality can be provided.
圖16I示出一個像素109以三行兩列構成的例子。FIG. 16I shows an example in which one pixel 109 is configured in three rows and two columns.
圖16I所示的像素109在上面的行(第一行)包括子像素110a,在中間行(第二行)包括子像素110b,並包括橫跨第一行至第二行的子像素110c,在下面的行(第三行)包括一個子像素(子像素110d)。換言之,像素109在左列(第一列)包括子像素110a、子像素110b,在右列(第二列)包括子像素110c,並包括橫跨這兩個列的子像素110d。The pixel 109 shown in FIG. 16I includes sub-pixels 110a in the upper row (first row), sub-pixels 110b in the middle row (second row), and sub-pixels 110c across the first row to the second row, The lower row (third row) includes one sub-pixel (sub-pixel 110d). In other words, pixel 109 includes sub-pixel 110a, sub-pixel 110b in the left column (first column), sub-pixel 110c in the right column (second column), and sub-pixel 110d across the two columns.
圖16A至圖16I所示的像素109由子像素110a、子像素110b、子像素110c、子像素110d這四個子像素構成。The pixel 109 shown in FIGS. 16A to 16I is constituted by four sub-pixels of a sub-pixel 110 a , a sub-pixel 110 b , a sub-pixel 110 c , and a sub-pixel 110 d.
子像素110a、子像素110b、子像素110c、子像素110d可以包括發射彼此不同顏色的光的發光元件。作為子像素110a、子像素110b、子像素110c、子像素110d,可以舉出:R、G、B、白色(W)的四種顏色的子像素;R、G、B、Y的四種顏色的子像素;以及R、G、B、紅外光(IR)的四種顏色的子像素;等。The sub-pixel 110a, the sub-pixel 110b, the sub-pixel 110c, and the sub-pixel 110d may include light emitting elements that emit lights of different colors from each other. Examples of the sub-pixel 110a, the sub-pixel 110b, the sub-pixel 110c, and the sub-pixel 110d include sub-pixels of four colors of R, G, B, and white (W); and four colors of R, G, B, and Y. sub-pixels; and sub-pixels of four colors of R, G, B, and infrared light (IR); etc.
在圖16A至圖16I所示的各像素109中,例如較佳的是,作為子像素110a使用發射紅色光的子像素,作為子像素110b使用發射綠色光的子像素,作為子像素110c使用發射藍色光的子像素,作為子像素110d使用發射白色光的子像素、發射黃色光的子像素或發射近紅外光的子像素。在採用上述結構時,在圖16G及圖16H所示的像素109中,R、G、B的佈局成為條紋排列,所以可以提高顯示品質。另外,在圖16I所示的像素109中,R、G、B的佈局成為所謂的S條紋排列,所以可以提高顯示品質。In each pixel 109 shown in FIG. 16A to FIG. 16I, for example, it is preferable to use a sub-pixel emitting red light as the sub-pixel 110a, a sub-pixel emitting green light as the sub-pixel 110b, and a sub-pixel emitting green light as the sub-pixel 110c. As the sub-pixel for blue light, a sub-pixel that emits white light, a sub-pixel that emits yellow light, or a sub-pixel that emits near-infrared light is used as the sub-pixel 110d. When the above structure is adopted, in the pixel 109 shown in FIG. 16G and FIG. 16H , the layout of R, G, and B becomes a stripe arrangement, so that the display quality can be improved. In addition, in the pixel 109 shown in FIG. 16I, the layout of R, G, and B is a so-called S-stripe arrangement, so that the display quality can be improved.
如圖16J至圖16K所示,像素可以包括五種子像素。作為五種顏色的子像素,例如可以舉出R、G、B、Y、W這五種顏色的子像素。As shown in FIGS. 16J to 16K , a pixel may include five sub-pixels. Examples of sub-pixels of five colors include five-color sub-pixels of R, G, B, Y, and W.
圖16J示出一個像素109以兩行三列構成的例子。FIG. 16J shows an example in which one pixel 109 is constituted by two rows and three columns.
圖16J所示的像素109在上面的行(第一行)包括三個子像素(子像素110a、子像素110b、子像素110c)且在下面的行(第二行)包括兩個子像素(子像素110d、子像素110e)。換言之,像素109在左列(第一列)包括子像素110a、子像素110d,在中間列(第二列)包括子像素110b,在右列(第三列)包括子像素110c,並包括橫跨第二列至第三列的子像素110e。Pixel 109 shown in FIG. 16J includes three sub-pixels (sub-pixel 110a, sub-pixel 110b, sub-pixel 110c) in the upper row (first row) and two sub-pixels (sub-pixel 110c) in the lower row (second row) pixel 110d, sub-pixel 110e). In other words, pixel 109 includes sub-pixel 110a, sub-pixel 110d in the left column (first column), sub-pixel 110b in the middle column (second column), sub-pixel 110c in the right column (third column), and horizontal across the sub-pixels 110e from the second column to the third column.
圖16K示出一個像素109以三行兩列構成的例子。FIG. 16K shows an example in which one pixel 109 is configured in three rows and two columns.
圖16K所示的像素109在上面的行(第一行)包括子像素110a,在中間行(第二行)包括子像素110b,包括橫跨第一行至第二行的子像素110c,在下面的行(第三行)包括兩個子像素(子像素110d、子像素110e)。換言之,像素109在左列(第一列)包括子像素110a、子像素110b、子像素110d,在右列(第二列)包括子像素110c、子像素110e。The pixel 109 shown in FIG. 16K includes sub-pixels 110a in the upper row (first row), sub-pixels 110b in the middle row (second row), and sub-pixels 110c across the first row to the second row. The lower row (third row) includes two sub-pixels (sub-pixel 110d, sub-pixel 110e). In other words, the pixel 109 includes sub-pixels 110 a , 110 b , and 110 d in the left column (first column), and includes sub-pixels 110 c , 110 e in the right column (second column).
如上所述,在本發明的一個實施方式的顯示裝置中,可以對由包括發光元件的子像素構成的像素採用各種佈局。As described above, in the display device according to one embodiment of the present invention, various layouts can be adopted for pixels composed of sub-pixels including light-emitting elements.
本實施方式所示的結構例子及對應於這些例子的圖式等的至少一部分可以與其他結構例子或圖式等適當地組合。At least a part of the structural examples shown in this embodiment and the drawings corresponding to these examples can be appropriately combined with other structural examples, drawings, and the like.
本實施方式的至少一部分可以與本說明書所記載的其他實施方式適當地組合而實施。At least a part of this embodiment mode can be implemented in combination with other embodiment modes described in this specification as appropriate.
實施方式3 在本實施方式中,對本發明的一個實施方式的顯示裝置進行說明。 Embodiment 3 In this embodiment mode, a display device according to one embodiment of the present invention will be described.
[顯示模組] 圖17是顯示模組280的立體圖。顯示模組280包括顯示裝置100A及FPC290。注意,顯示模組280所包括的顯示裝置不侷限於顯示裝置100A,也可以是將在後面說明的顯示裝置100B至顯示裝置100G中的任一個。顯示裝置100A至顯示裝置100G可以適用於實施方式1所示的顯示裝置41a。圖17示出顯示裝置100A的組件中的基板11a、顯示部37a及基板13a。 [display module] FIG. 17 is a perspective view of the display module 280 . The display module 280 includes a display device 100A and an FPC 290 . Note that the display device included in the display module 280 is not limited to the display device 100A, and may be any one of the display devices 100B to 100G that will be described later. Display device 100A to display device 100G can be applied to display device 41 a described in Embodiment 1. FIG. FIG. 17 shows a substrate 11a, a display portion 37a, and a substrate 13a among components of the display device 100A.
FPC290被用作從外部向顯示裝置100A供應資料信號或電源電位等的佈線。此外,也可以在FPC290上安裝IC。FPC 290 is used as wiring for supplying data signals, power supply potential, and the like to display device 100A from the outside. In addition, IC can also be mounted on FPC290.
[顯示裝置100A] 圖18A是示出顯示裝置100A的結構例子的剖面圖,明確而言是示出顯示裝置100A所包括的像素的結構例子的剖面圖。顯示裝置100A包括基板301、發光元件61R、發光元件61G、發光元件61B、電容器240及電晶體310。 [Display device 100A] 18A is a cross-sectional view illustrating an example of the structure of the display device 100A, specifically, a cross-sectional view illustrating an example of the structure of a pixel included in the display device 100A. The display device 100A includes a substrate 301 , a light emitting element 61R, a light emitting element 61G, a light emitting element 61B, a capacitor 240 and a transistor 310 .
基板301相當於圖17中的基板11a。電晶體310是在基板301中具有通道形成區域的電晶體。電晶體310包括基板301的一部分、導電層311、一對低電阻區域312、絕緣層313及絕緣層314。導電層311被用作閘極電極。絕緣層313位於基板301與導電層311之間,並被用作閘極絕緣層。一對低電阻區域312是基板301中摻雜有雜質的區域,並被用作源極及汲極。絕緣層314覆蓋導電層311的側面。The substrate 301 corresponds to the substrate 11a in FIG. 17 . The transistor 310 is a transistor having a channel formation region in the substrate 301 . The transistor 310 includes a part of the substrate 301 , a conductive layer 311 , a pair of low resistance regions 312 , an insulating layer 313 and an insulating layer 314 . The conductive layer 311 is used as a gate electrode. The insulating layer 313 is located between the substrate 301 and the conductive layer 311 and is used as a gate insulating layer. A pair of low resistance regions 312 are regions doped with impurities in the substrate 301 and are used as source and drain. The insulating layer 314 covers side surfaces of the conductive layer 311 .
此外,在相鄰的兩個電晶體310之間,以嵌入基板301的方式設置有元件分離層315。In addition, an element isolation layer 315 is provided between two adjacent transistors 310 so as to be embedded in the substrate 301 .
此外,以覆蓋電晶體310的方式設置有絕緣層261,並絕緣層261上設置有電容器240。In addition, an insulating layer 261 is provided to cover the transistor 310 , and the capacitor 240 is provided on the insulating layer 261 .
電容器240包括導電層241、導電層245及位於它們之間的絕緣層243。導電層241用作電容器240中的一個電極,導電層245用作電容器240中的另一個電極,並且絕緣層243用作電容器240的介電質。The capacitor 240 includes a conductive layer 241 , a conductive layer 245 and an insulating layer 243 therebetween. The conductive layer 241 serves as one electrode in the capacitor 240 , the conductive layer 245 serves as the other electrode in the capacitor 240 , and the insulating layer 243 serves as a dielectric of the capacitor 240 .
導電層241設置在絕緣層261上,並嵌入於絕緣層254中。導電層241藉由嵌入於絕緣層261中的插頭275與電晶體310的源極和汲極中的一個電連接。絕緣層243以覆蓋導電層241的方式設置。導電層245設置在隔著絕緣層243與導電層241重疊的區域中。The conductive layer 241 is disposed on the insulating layer 261 and embedded in the insulating layer 254 . The conductive layer 241 is electrically connected to one of the source and the drain of the transistor 310 through a plug 275 embedded in the insulating layer 261 . The insulating layer 243 is provided to cover the conductive layer 241 . The conductive layer 245 is provided in a region overlapping the conductive layer 241 via the insulating layer 243 .
以覆蓋電容器240的方式設置絕緣層255a,在絕緣層255a上設置絕緣層255b,在絕緣層255b上設置絕緣層255c。在絕緣層255c上設置發光元件61R、發光元件61G及發光元件61B。圖18A示出發光元件61R、發光元件61G及發光元件61B具有圖9A所示的疊層結構的例子。發光元件61R發射光34aR,發光元件61G發射光34aG,發光元件61B發射光34aB。注意,顯示裝置100A例如也可以包括圖10A所示的發光元件63R、發光元件63G及發光元件63B代替發光元件61R、發光元件61G及發光元件61B。後述的顯示裝置也是同樣的。The insulating layer 255a is provided to cover the capacitor 240, the insulating layer 255b is provided on the insulating layer 255a, and the insulating layer 255c is provided on the insulating layer 255b. The light emitting element 61R, the light emitting element 61G, and the light emitting element 61B are provided on the insulating layer 255c. FIG. 18A shows an example in which a light emitting element 61R, a light emitting element 61G, and a light emitting element 61B have the stacked structure shown in FIG. 9A . The light emitting element 61R emits light 34aR, the light emitting element 61G emits light 34aG, and the light emitting element 61B emits light 34aB. Note that the display device 100A may include, for example, the light emitting element 63R, the light emitting element 63G, and the light emitting element 63B shown in FIG. 10A instead of the light emitting element 61R, the light emitting element 61G, and the light emitting element 61B. The same applies to the display device described later.
相鄰的發光元件61之間的區域中設置有絕緣物。例如在圖18A中,該區中設置有保護層271及保護層271上的絕緣層278。Insulators are provided in regions between adjacent light emitting elements 61 . For example, in FIG. 18A , a protective layer 271 and an insulating layer 278 on the protective layer 271 are disposed in this region.
以覆蓋發光元件61R所包括的導電層171的頂面及側面的方式設置EL層172R,以覆蓋發光元件61G所包括的導電層171的頂面及側面的方式設置EL層172G,以覆蓋發光元件61B所包括的導電層171的頂面及側面的方式設置EL層172B。此外,犧牲層270R位於EL層172R上,犧牲層270G位於EL層172G上,犧牲層270B位於EL層172B上。The EL layer 172R is provided to cover the top and side surfaces of the conductive layer 171 included in the light emitting element 61R, and the EL layer 172G is provided to cover the top and side surfaces of the conductive layer 171 included in the light emitting element 61G to cover the light emitting element. The EL layer 172B is provided on the top surface and side surfaces of the conductive layer 171 included in the 61B. In addition, a sacrificial layer 270R is located on the EL layer 172R, a sacrificial layer 270G is located on the EL layer 172G, and a sacrificial layer 270B is located on the EL layer 172B.
導電層171藉由嵌入於絕緣層243、絕緣層255a、絕緣層255b及絕緣層255c中的插頭256、嵌入於絕緣層254中的導電層241及嵌入於絕緣層261中的插頭275與電晶體310的源極和汲極中的一方電連接。絕緣層255c的頂面的高度與插頭256的頂面的高度一致或大致一致。插頭可以使用各種導電材料。The conductive layer 171 is formed by the plug 256 embedded in the insulating layer 243, the insulating layer 255a, the insulating layer 255b and the insulating layer 255c, the conductive layer 241 embedded in the insulating layer 254, the plug 275 embedded in the insulating layer 261, and the transistor. One of the source and the drain of 310 is electrically connected. The height of the top surface of the insulating layer 255 c is equal or substantially equal to the height of the top surface of the plug 256 . Various conductive materials can be used for the plug.
在發光元件61R、發光元件61G及發光元件61B上設置保護層273。保護層273上由黏合層122貼合有基板120。基板120相當於圖17中的基板13a。注意,從絕緣層261到黏合層122的組件可以為實施方式1所示的層12a。此外,從絕緣層261到絕緣層255c的組件可以為實施方式1所示的層363。A protective layer 273 is provided on the light emitting element 61R, the light emitting element 61G, and the light emitting element 61B. The substrate 120 is pasted on the protection layer 273 by the adhesive layer 122 . The substrate 120 corresponds to the substrate 13a in FIG. 17 . Note that the components from the insulating layer 261 to the adhesive layer 122 may be the layer 12a shown in Embodiment Mode 1. In addition, the components from the insulating layer 261 to the insulating layer 255c may be the layer 363 shown in the first embodiment.
也可以在基板120的黏合層122一側的面設置遮光層。此外,可以在基板120的外側配置各種光學構件。作為光學構件,可以使用偏光板、相位差板、光擴散層(擴散薄膜等)、防反射層及聚光薄膜(condensing film)等。此外,在基板120的外側也可以配置抑制塵埃的附著的抗靜電膜、不容易被弄髒的具有拒水性的膜、抑制使用時的損傷的硬塗膜、衝擊吸收層等表面保護層。例如,藉由作為表面保護層設置玻璃層或二氧化矽層(SiO x層),可以抑制表面被弄髒或受到損傷,所以是較佳的。另外,作為表面保護層也可以使用DLC(類金剛石碳)、氧化鋁(AlO x)、聚酯類材料或聚碳酸酯類材料等。另外,作為表面保護層較佳為使用可見光穿透率高的材料。另外,表面保護層較佳為使用硬度高的材料。 A light-shielding layer may be provided on the surface of the substrate 120 on the side of the adhesive layer 122 . In addition, various optical members may be arranged outside the substrate 120 . As the optical member, a polarizing plate, a retardation plate, a light diffusion layer (diffusion film, etc.), an antireflection layer, a condensing film, and the like can be used. In addition, a surface protection layer such as an antistatic film that suppresses adhesion of dust, a water-repellent film that is not easily stained, a hard coat film that suppresses damage during use, and a shock absorbing layer may be disposed on the outside of the substrate 120 . For example, it is preferable to provide a glass layer or a silicon dioxide layer (SiO x layer) as a surface protection layer because it can suppress the surface from being soiled or damaged. In addition, DLC (diamond-like carbon), aluminum oxide (AlO x ), polyester-based materials, polycarbonate-based materials, or the like may be used as the surface protection layer. In addition, it is preferable to use a material with high visible light transmittance as the surface protection layer. In addition, it is preferable to use a material with high hardness for the surface protection layer.
在將圓偏光板重疊於顯示裝置的情況下,較佳為將光學各向同性高的基板用作顯示裝置所包括的基板。光學各向同性高的基板是雙折射較低。注意,光學各向同性高的基板也可以說是雙折射量較少的基板。When laminating a circular polarizing plate on a display device, it is preferable to use a substrate with high optical isotropy as a substrate included in the display device. Substrates with high optical isotropy have low birefringence. Note that a substrate with high optical isotropy can also be said to have a small amount of birefringence.
光學各向同性高的基板的相位差值(retardation value)值的絕對值較佳為30nm以下,更佳為20nm以下,進一步較佳為10nm以下。The absolute value of the retardation value of the substrate with high optical isotropy is preferably at most 30 nm, more preferably at most 20 nm, further preferably at most 10 nm.
作為光學各向同性高的薄膜,可以舉出三乙酸纖維素(也被稱為TAC:Cellulose triacetate)薄膜、環烯烴聚合物(COP)薄膜、環烯烴共聚物(COC)薄膜及丙烯酸薄膜等。Examples of films with high optical isotropy include cellulose triacetate (also referred to as TAC: Cellulose triacetate) films, cycloolefin polymer (COP) films, cycloolefin copolymer (COC) films, and acrylic films.
此外,當作為基板使用薄膜時,有可能因薄膜的吸水而發生顯示裝置出現皺紋等形狀變化。因此,作為基板較佳為使用吸水率低的薄膜。例如,較佳為使用吸水率為1%以下的薄膜,更佳為使用吸收率為0.1%以下的薄膜,進一步較佳為使用吸收率為0.01%以下的薄膜。In addition, when a thin film is used as a substrate, there is a possibility that the shape of the display device may change due to water absorption by the thin film, such as wrinkles. Therefore, it is preferable to use a thin film with a low water absorption rate as the substrate. For example, it is preferable to use a film with a water absorption rate of 1% or less, more preferably a film with an absorption rate of 0.1% or less, and even more preferably a film with an absorption rate of 0.01% or less.
[顯示裝置100B] 圖18B所示的顯示裝置100B包括基板301、發光元件61W、電容器240及電晶體310。圖18B示出發光元件61W具有圖9B所示的疊層結構的例子。此外,顯示裝置100B包括彩色層183R、彩色層183G及彩色層183B以及一個發光元件61W重疊於彩色層183R、彩色層183G和彩色層183B中的一個的區域。在顯示裝置100B中,發光元件61W例如可以發射白色光。此外,例如彩色層183R可以透過紅色光,彩色層183G可以透過綠色光,彩色層183B可以透過藍色光。如上所述,顯示裝置100B例如可以射出紅色光34aR、綠色光34aG及藍色光34aB且進行全彩色顯示。 [Display device 100B] The display device 100B shown in FIG. 18B includes a substrate 301 , a light emitting element 61W, a capacitor 240 and a transistor 310 . FIG. 18B shows an example in which the light emitting element 61W has the laminated structure shown in FIG. 9B. In addition, the display device 100B includes a color layer 183R, a color layer 183G, and a color layer 183B, and a region where one light emitting element 61W overlaps one of the color layer 183R, the color layer 183G, and the color layer 183B. In the display device 100B, the light emitting element 61W can emit white light, for example. In addition, for example, the color layer 183R can transmit red light, the color layer 183G can transmit green light, and the color layer 183B can transmit blue light. As described above, the display device 100B can, for example, emit red light 34aR, green light 34aG, and blue light 34aB to perform full-color display.
[顯示裝置100C] 圖19所示的顯示裝置100C具有層疊有分別在半導體基板中形成通道的電晶體310A及電晶體310B的結構。注意,在後述的顯示裝置的說明中,有時省略說明與先前說明的顯示裝置同樣的部分。 [Display device 100C] A display device 100C shown in FIG. 19 has a structure in which a transistor 310A and a transistor 310B in which channels are formed in a semiconductor substrate are stacked. Note that in the description of the display device described later, the description of the same parts as those of the display device described above may be omitted.
顯示裝置100C具有貼合設置有電晶體310B、電容器240及發光元件61的基板301B與設置有電晶體310A的基板301A的結構。The display device 100C has a structure in which a substrate 301B provided with a transistor 310B, a capacitor 240 , and a light emitting element 61 is bonded to a substrate 301A provided with a transistor 310A.
在此,較佳為在基板301B的底面設置絕緣層345。此外,較佳為在設置在基板301A上的絕緣層261上設置絕緣層346。絕緣層345及絕緣層346是被用作保護層的絕緣層,並可以抑制雜質擴散到基板301B及基板301A。作為絕緣層345及絕緣層346可以使用能夠用於保護層273的無機絕緣膜。Here, preferably, an insulating layer 345 is provided on the bottom surface of the substrate 301B. In addition, it is preferable to provide the insulating layer 346 on the insulating layer 261 provided on the substrate 301A. The insulating layer 345 and the insulating layer 346 are insulating layers used as protective layers, and can suppress the diffusion of impurities into the substrate 301B and the substrate 301A. An inorganic insulating film that can be used for the protective layer 273 can be used as the insulating layer 345 and the insulating layer 346 .
基板301B設置有穿過基板301B及絕緣層345的插頭343。在此,較佳為以覆蓋插頭343的側面的方式設置絕緣層344。絕緣層344是被用作保護層的絕緣層,可以抑制雜質擴散到基板301B。作為絕緣層344,可以使用可用於保護層273的無機絕緣膜。The substrate 301B is provided with a plug 343 passing through the substrate 301B and the insulating layer 345 . Here, it is preferable to provide the insulating layer 344 so as to cover the side surfaces of the plug 343 . The insulating layer 344 is an insulating layer used as a protective layer, and can suppress the diffusion of impurities to the substrate 301B. As the insulating layer 344, an inorganic insulating film that can be used for the protective layer 273 can be used.
此外,基板301B的背面(基板301A一側的表面)一側的絕緣層345下設置有導電層342。導電層342較佳為以嵌入於絕緣層335中的方式設置。此外,較佳為使導電層342及絕緣層335的底面平坦化。在此,導電層342與插頭343電連接。In addition, a conductive layer 342 is provided under the insulating layer 345 on the back side of the substrate 301B (the surface on the substrate 301A side). The conductive layer 342 is preferably embedded in the insulating layer 335 . In addition, it is preferable to planarize the bottom surfaces of the conductive layer 342 and the insulating layer 335 . Here, the conductive layer 342 is electrically connected to the plug 343 .
另一方面,在基板301A與基板301B之間絕緣層346上設置有導電層341。導電層341較佳為以嵌入於絕緣層336中的方式設置。此外,導電層341及絕緣層336的頂面較佳為被平坦化。On the other hand, a conductive layer 341 is provided on an insulating layer 346 between the substrate 301A and the substrate 301B. The conductive layer 341 is preferably embedded in the insulating layer 336 . In addition, the top surfaces of the conductive layer 341 and the insulating layer 336 are preferably planarized.
導電層341與導電層342接合,由此基板301A與基板301B電連接。在此,藉由提高由導電層342及絕緣層335形成的面以及由導電層341及絕緣層336形成的面的平坦性,可以良好地貼合導電層341與導電層342。The conductive layer 341 is bonded to the conductive layer 342 , whereby the substrate 301A and the substrate 301B are electrically connected. Here, by improving the flatness of the surface formed by the conductive layer 342 and the insulating layer 335 and the surface formed by the conductive layer 341 and the insulating layer 336 , the conductive layer 341 and the conductive layer 342 can be bonded well.
作為導電層341及導電層342,較佳為使用相同的導電材料。例如,可以使用包含選自Al、Cr、Cu、Ta、Ti、Mo、W中的元素的金屬膜或以上述元素為成分的金屬氮化物膜(例如氮化鈦膜、氮化鉬膜或氮化鎢膜)等。作為導電層341及導電層342尤其較佳為使用銅。由此,可以使用Cu-Cu(銅-銅)直接接合技術(藉由彼此連接Cu(銅)的焊盤來進行電導通的技術)。It is preferable to use the same conductive material as the conductive layer 341 and the conductive layer 342 . For example, a metal film containing an element selected from Al, Cr, Cu, Ta, Ti, Mo, W or a metal nitride film (such as a titanium nitride film, a molybdenum nitride film, or a nitrogen film) containing the above elements as a component can be used. tungsten film), etc. Copper is particularly preferably used as the conductive layer 341 and the conductive layer 342 . Accordingly, a Cu—Cu (copper—copper) direct bonding technique (a technique of electrically conducting by connecting Cu (copper) pads to each other) can be used.
[顯示裝置100D] 圖20所示的顯示裝置100D具有導電層341及導電層342藉由凸塊347接合的結構。 [Display device 100D] The display device 100D shown in FIG. 20 has a structure in which the conductive layer 341 and the conductive layer 342 are joined by bumps 347 .
如圖20所示,藉由在導電層341與導電層342之間設置凸塊347,可以使導電層341與導電層342電連接。凸塊347例如可以使用包含金(Au)、鎳(Ni)、銦(In)或錫(Sn)等的導電材料形成。例如,有時作為凸塊347使用焊料。此外,也可以在絕緣層345與絕緣層346之間設置黏合層348。此外,在設置凸塊347時,也可以不設置絕緣層335及絕緣層336。As shown in FIG. 20 , by disposing bumps 347 between the conductive layer 341 and the conductive layer 342 , the conductive layer 341 and the conductive layer 342 can be electrically connected. The bump 347 can be formed using, for example, a conductive material including gold (Au), nickel (Ni), indium (In), tin (Sn), or the like. For example, solder is sometimes used as the bump 347 . In addition, an adhesive layer 348 may also be provided between the insulating layer 345 and the insulating layer 346 . In addition, when the bump 347 is provided, the insulating layer 335 and the insulating layer 336 may not be provided.
[顯示裝置100E] 圖21所示的顯示裝置100E的與顯示裝置100A不同之處主要在於電晶體的結構。 [Display device 100E] The difference between the display device 100E shown in FIG. 21 and the display device 100A mainly lies in the structure of the transistor.
電晶體320為OS電晶體。電晶體320包括半導體層321、絕緣層323、導電層324、一對導電層325、絕緣層326及導電層327。Transistor 320 is an OS transistor. The transistor 320 includes a semiconductor layer 321 , an insulating layer 323 , a conductive layer 324 , a pair of conductive layers 325 , an insulating layer 326 and a conductive layer 327 .
基板331相當於圖17中的基板11a。作為基板331可以使用絕緣基板或半導體基板。The substrate 331 corresponds to the substrate 11a in FIG. 17 . An insulating substrate or a semiconductor substrate can be used as the substrate 331 .
在基板331上設置有絕緣層332。絕緣層332被用作障壁層,該障壁層防止水或氫等雜質從基板331擴散到電晶體320且防止氧從半導體層321向絕緣層332一側脫離。作為絕緣層332,例如可以使用與氧化矽膜相比氫或氧不容易擴散的膜諸如氧化鋁膜、氧化鉿膜或氮化矽膜等。An insulating layer 332 is provided on the substrate 331 . The insulating layer 332 is used as a barrier layer that prevents impurities such as water and hydrogen from diffusing from the substrate 331 to the transistor 320 and prevents oxygen from detaching from the semiconductor layer 321 to the insulating layer 332 side. As the insulating layer 332 , for example, a film in which hydrogen or oxygen is less likely to diffuse than a silicon oxide film such as an aluminum oxide film, a hafnium oxide film, or a silicon nitride film or the like can be used.
在絕緣層332上設置有導電層327,並以覆蓋導電層327的方式設置有絕緣層326。導電層327用作電晶體320的第一閘極電極,絕緣層326的一部分用作第一閘極絕緣層。絕緣層326中的至少接觸半導體層321的區域較佳為使用氧化矽膜等氧化物絕緣膜。絕緣層326的頂面較佳為被平坦化。The conductive layer 327 is provided on the insulating layer 332 , and the insulating layer 326 is provided so as to cover the conductive layer 327 . The conductive layer 327 serves as a first gate electrode of the transistor 320, and a part of the insulating layer 326 serves as a first gate insulating layer. An oxide insulating film such as a silicon oxide film is preferably used for at least a region of the insulating layer 326 that contacts the semiconductor layer 321 . The top surface of the insulating layer 326 is preferably planarized.
半導體層321設置在絕緣層326上。半導體層321較佳為含有具有半導體特性的金屬氧化物膜。一對導電層325接觸於半導體層321上並用作源極電極及汲極電極。The semiconductor layer 321 is disposed on the insulating layer 326 . The semiconductor layer 321 preferably includes a metal oxide film having semiconductor properties. A pair of conductive layers 325 are in contact with the semiconductor layer 321 and serve as source electrodes and drain electrodes.
以覆蓋一對導電層325的頂面及側面以及半導體層321的側面等的方式設置有絕緣層328,絕緣層328上設置有絕緣層264。絕緣層328被用作障壁層,該障壁層防止水或氫等雜質從絕緣層264等擴散到半導體層321以及氧從半導體層321脫離。作為絕緣層328,可以使用與上述絕緣層332同樣的絕緣膜。The insulating layer 328 is provided to cover the top and side surfaces of the pair of conductive layers 325 and the side surfaces of the semiconductor layer 321 , and the like, and the insulating layer 264 is provided on the insulating layer 328 . The insulating layer 328 is used as a barrier layer that prevents impurities such as water or hydrogen from diffusing from the insulating layer 264 and the like to the semiconductor layer 321 and detachment of oxygen from the semiconductor layer 321 . As the insulating layer 328, the same insulating film as that of the insulating layer 332 described above can be used.
絕緣層328及絕緣層264中設置有到達半導體層321的開口。該開口內部嵌入有接觸於絕緣層264、絕緣層328及導電層325的側面以及半導體層321的頂面的絕緣層323、以及絕緣層323上的導電層324。導電層324被用作第二閘極電極,絕緣層323被用作第二閘極絕緣層。Openings reaching the semiconductor layer 321 are provided in the insulating layer 328 and the insulating layer 264 . The opening is embedded with the insulating layer 323 contacting the side surfaces of the insulating layer 264 , the insulating layer 328 and the conductive layer 325 and the top surface of the semiconductor layer 321 , and the conductive layer 324 on the insulating layer 323 . The conductive layer 324 is used as a second gate electrode, and the insulating layer 323 is used as a second gate insulating layer.
導電層324的頂面、絕緣層323的頂面及絕緣層264的頂面被進行平坦化處理以它們的高度都一致或大致一致,並以覆蓋它們的方式設置有絕緣層329及絕緣層265。The top surface of the conductive layer 324, the top surface of the insulating layer 323, and the top surface of the insulating layer 264 are planarized so that their heights are all the same or approximately the same, and the insulating layer 329 and the insulating layer 265 are provided to cover them. .
絕緣層264及絕緣層265被用作層間絕緣層。絕緣層329被用作障壁層,該障壁層防止水或氫等雜質從絕緣層265等擴散到電晶體320。絕緣層329可以使用與上述絕緣層328及絕緣層332同樣的絕緣膜。The insulating layer 264 and the insulating layer 265 are used as interlayer insulating layers. The insulating layer 329 is used as a barrier layer that prevents impurities such as water or hydrogen from diffusing from the insulating layer 265 and the like to the transistor 320 . As the insulating layer 329, the same insulating film as that of the insulating layer 328 and the insulating layer 332 described above can be used.
與一對導電層325中的一方電連接的插頭274嵌入絕緣層265、絕緣層329、絕緣層264及絕緣層328。在此,插頭274較佳為具有覆蓋絕緣層265、絕緣層329、絕緣層264及絕緣層328各自的開口的側面及導電層325的頂面的一部分的導電層274a以及與導電層274a的頂面接觸的導電層274b。此時,作為導電層274a,較佳為使用不容易擴散氫及氧的導電材料。The plug 274 electrically connected to one of the pair of conductive layers 325 is embedded in the insulating layer 265 , the insulating layer 329 , the insulating layer 264 and the insulating layer 328 . Here, the plug 274 preferably has a conductive layer 274a covering the sides of the respective openings of the insulating layer 265, the insulating layer 329, the insulating layer 264, and the insulating layer 328 and a part of the top surface of the conductive layer 325, and the top surface of the conductive layer 274a. The conductive layer 274b is in surface contact. In this case, as the conductive layer 274a, it is preferable to use a conductive material that does not easily diffuse hydrogen and oxygen.
注意,在顯示裝置100E中,從絕緣層332到黏合層122的組件可以為實施方式1所示的層12a。此外,從絕緣層332到絕緣層255c的組件可以為實施方式1所示的層363。Note that in the display device 100E, the components from the insulating layer 332 to the adhesive layer 122 may be the layer 12a shown in Embodiment Mode 1. In addition, the component from the insulating layer 332 to the insulating layer 255c may be the layer 363 shown in the first embodiment.
[顯示裝置100F] 圖22所示的顯示裝置100F具有層疊有分別在形成通道的半導體中含有氧化物半導體的電晶體320A及電晶體320B的結構。 [display device 100F] A display device 100F shown in FIG. 22 has a structure in which a transistor 320A and a transistor 320B each including an oxide semiconductor in a semiconductor forming a channel are stacked.
電晶體320A、電晶體320B及其周邊的結構可以援用上述顯示裝置100E。The structures of the transistor 320A, the transistor 320B and their surroundings can be referred to the above-mentioned display device 100E.
注意,在此,採用層疊兩個包括氧化物半導體的電晶體的結構,但是不侷限於該結構。例如,也可以採用層疊三個以上的電晶體的結構。Note that, here, a structure in which two transistors including an oxide semiconductor are stacked is employed, but is not limited to this structure. For example, a structure in which three or more transistors are stacked may be employed.
[顯示裝置100G] 在圖23所示的顯示裝置100G中,層疊有通道形成於基板301的電晶體310及形成通道的半導體層含有金屬氧化物的電晶體320。 [display device 100G] In a display device 100G shown in FIG. 23 , a transistor 310 in which a channel is formed on a substrate 301 and a transistor 320 in which a semiconductor layer forming a channel contains a metal oxide are stacked.
以覆蓋電晶體310的方式設置有絕緣層261,並且絕緣層261上設置有導電層251。此外,以覆蓋導電層251的方式設置有絕緣層262,並且絕緣層262上設置有導電層252。導電層251及導電層252都被用作佈線。此外,以覆蓋導電層252的方式設置有絕緣層263及絕緣層332,並且絕緣層332上設置有電晶體320。此外,以覆蓋電晶體320的方式設置有絕緣層265,並在絕緣層265上設置有電容器240。電容器240與電晶體320藉由插頭274電連接。An insulating layer 261 is provided to cover the transistor 310 , and a conductive layer 251 is provided on the insulating layer 261 . Furthermore, an insulating layer 262 is provided to cover the conductive layer 251 , and the conductive layer 252 is provided on the insulating layer 262 . Both the conductive layer 251 and the conductive layer 252 are used as wiring. In addition, an insulating layer 263 and an insulating layer 332 are provided to cover the conductive layer 252 , and the transistor 320 is provided on the insulating layer 332 . Furthermore, an insulating layer 265 is provided to cover the transistor 320 , and the capacitor 240 is provided on the insulating layer 265 . The capacitor 240 is electrically connected to the transistor 320 through a plug 274 .
電晶體320可以用作構成像素電路的電晶體。此外,電晶體310可以用作構成像素電路的電晶體或構成用來驅動該像素電路的驅動電路(閘極驅動電路或源極驅動電路等)的電晶體。此外,電晶體310及電晶體320可以用作構成運算電路或記憶體電路等各種電路的電晶體。The transistor 320 can be used as a transistor constituting a pixel circuit. Furthermore, the transistor 310 can be used as a transistor constituting a pixel circuit or a transistor constituting a drive circuit (a gate drive circuit or a source drive circuit, etc.) for driving the pixel circuit. In addition, the transistor 310 and the transistor 320 can be used as transistors constituting various circuits such as arithmetic circuits and memory circuits.
借助於這種結構,在發光元件正下不但可以形成像素電路例如還可以形成驅動電路,因此與在顯示區域的周圍設置驅動電路的情況相比,可以使顯示裝置小型化。With this structure, not only the pixel circuit but also the driver circuit can be formed directly under the light emitting element, so that the display device can be miniaturized compared with the case where the driver circuit is provided around the display area.
[顯示裝置100H] 圖24示出顯示裝置100H的立體圖。顯示裝置100H可以適用於實施方式1所示的顯示裝置41b。後述的顯示裝置100I至顯示裝置100M也是同樣的。 [Display device 100H] FIG. 24 shows a perspective view of the display device 100H. The display device 100H can be applied to the display device 41b described in the first embodiment. The same applies to the display device 100I to the display device 100M described later.
顯示裝置100H具有貼合基板13b與基板11b的結構。在圖24中,以虛線表示基板13b。The display device 100H has a structure in which a substrate 13b and a substrate 11b are bonded together. In FIG. 24, the substrate 13b is indicated by a dotted line.
顯示裝置100H包括顯示部37b、連接部140、電路164及佈線165等。圖24示出顯示裝置100H安裝有IC176及FPC177的例子。因此,也可以將圖24所示的結構稱為包括顯示裝置100H、IC(積體電路)及FPC的顯示模組。在此,安裝有FPC等連接器的顯示裝置的基板或安裝有IC的該基板被稱為顯示模組。The display device 100H includes a display portion 37b, a connection portion 140, a circuit 164, wiring 165, and the like. FIG. 24 shows an example in which IC 176 and FPC 177 are mounted in display device 100H. Therefore, the structure shown in FIG. 24 can also be called a display module including the display device 100H, an IC (Integrated Circuit), and an FPC. Here, a substrate of a display device on which a connector such as an FPC is mounted or the substrate on which an IC is mounted is referred to as a display module.
顯示部37b以圍繞區域47的方式設置。這裡,也可以在區域47設置實施方式1所示的顯示部37c。此外,設置顯示部37c代替顯示部37b,在區域47也可以設置顯示部37c。The display portion 37 b is provided to surround the area 47 . Here, the display unit 37c described in Embodiment 1 may be provided in the region 47 . In addition, the display part 37c may be provided instead of the display part 37b, and the display part 37c may be provided in the area|region 47.
連接部140設置在顯示部37b的外側。連接部140可以沿著顯示部37b的一個邊或多個邊設置。連接部140的個數也可以為一個或多個。圖24示出以圍繞顯示部37b的四邊的方式設置連接部140的例子。在連接部140,發光元件的共用電極與導電層電連接,可以對共用電極供應電位。The connecting portion 140 is provided outside the display portion 37b. The connection part 140 may be provided along one side or a plurality of sides of the display part 37b. The number of connecting parts 140 may also be one or more. FIG. 24 shows an example in which the connecting portion 140 is provided so as to surround the four sides of the display portion 37b. In the connection part 140, the common electrode of the light-emitting element is electrically connected to the conductive layer, and a potential can be supplied to the common electrode.
作為電路164,例如可以使用閘極驅動電路。As the circuit 164, for example, a gate drive circuit can be used.
可以藉由佈線165對顯示部37b及電路164供應信號及電力。該信號及電力從外部經由FPC177輸入到佈線165或者從IC176輸入到佈線165。Signals and power can be supplied to the display unit 37b and the circuit 164 via the wiring 165 . The signal and electric power are externally input to the wiring 165 via the FPC 177 or are input to the wiring 165 from the IC 176 .
圖24示出藉由COG(Chip On Glass)方式或COF(Chip On Film)方式等在基板11b上設置IC176的例子。作為IC176,例如可以使用包括閘極驅動電路或源極驅動電路等的IC。注意,顯示裝置100H及顯示模組不一定必須設置有IC。此外,例如也可以將IC利用COF方式安裝於FPC。FIG. 24 shows an example in which IC 176 is provided on a substrate 11 b by a COG (Chip On Glass) method, a COF (Chip On Film) method, or the like. As the IC 176 , for example, an IC including a gate driver circuit, a source driver circuit, or the like can be used. Note that the display device 100H and the display module do not necessarily have to be provided with ICs. In addition, for example, an IC may be mounted on an FPC by a COF method.
圖25A示出顯示裝置100H的包括FPC177的區域的一部分、電路164的一部分、顯示部107的一部分、連接部140的一部分及包括端部的區域的一部分的剖面的一個例子。這裡,圖24所示的顯示部37b可以具有顯示部107的結構。此外,當在區域47設置實施方式1所示的顯示部37c時,顯示部37c可以具有顯示部107的結構。25A shows an example of a cross section of a part of the region including FPC 177 , part of circuit 164 , part of display unit 107 , part of connection unit 140 , and part of the region including the end of display device 100H. Here, the display portion 37 b shown in FIG. 24 may have the structure of the display portion 107 . In addition, when the display portion 37 c described in Embodiment 1 is provided in the region 47 , the display portion 37 c may have the structure of the display portion 107 .
圖25A所示的顯示裝置100H在基板11b與基板13b之間包括電晶體201、電晶體205、發射紅色光34bR的發光元件63R、發射綠色光34bG的發光元件63G及發射藍色光34bB的發光元件63B等。此外,可以在基板13b的外側配置各種光學構件。作為光學構件,可以使用偏光板、相位差板、光擴散層(擴散薄膜等)、防反射層及聚光薄膜(condensing film)等。The display device 100H shown in FIG. 25A includes a transistor 201, a transistor 205, a light emitting element 63R emitting red light 34bR, a light emitting element 63G emitting green light 34bG, and a light emitting element emitting blue light 34bB between the substrate 11b and the substrate 13b. 63B et al. In addition, various optical members may be arranged outside the substrate 13b. As the optical member, a polarizing plate, a retardation plate, a light diffusion layer (diffusion film, etc.), an antireflection layer, a condensing film, and the like can be used.
發光元件63R、發光元件63G及發光元件63B都具有圖10A所示的疊層結構。關於發光元件63的詳細內容可以參照實施方式1。Each of the light emitting element 63R, the light emitting element 63G, and the light emitting element 63B has the stacked structure shown in FIG. 10A . For details of the light emitting element 63 , refer to the first embodiment.
注意,顯示裝置100H例如也可以包括圖9A所示的發光元件61R、發光元件61G及發光元件61B代替發光元件63R、發光元件63G及發光元件63B。後述的顯示裝置也是同樣的。Note that the display device 100H may include, for example, the light emitting element 61R, the light emitting element 61G, and the light emitting element 61B shown in FIG. 9A instead of the light emitting element 63R, the light emitting element 63G, and the light emitting element 63B. The same applies to the display device described later.
發光元件63所包括的被用作像素電極的導電層171藉由設置在絕緣層214中的開口與電晶體205所包括的導電層222b電連接。導電層171沿著絕緣層214的開口設置。由此,在導電層171中設置凹部。The conductive layer 171 included in the light emitting element 63 and used as a pixel electrode is electrically connected to the conductive layer 222 b included in the transistor 205 through the opening provided in the insulating layer 214 . The conductive layer 171 is disposed along the opening of the insulating layer 214 . Thus, a concave portion is provided in the conductive layer 171 .
此外,圖25A示出以覆蓋導電層171的端部的方式設置絕緣層272的例子。絕緣層272可以以嵌入導電層171的凹部的方式設置。In addition, FIG. 25A shows an example in which insulating layer 272 is provided so as to cover the end of conductive layer 171 . The insulating layer 272 may be provided so as to be embedded in the concave portion of the conductive layer 171 .
發光元件63R、發光元件63G及發光元件63B上設置有保護層273。保護層273和基板13b由黏合層122黏合。發光元件63的密封可以採用固體密封結構或中空密封結構等。在圖25A中,基板13b與保護層273之間的空間被黏合層122填充,即採用固體密封結構。或者,也可以使用惰性氣體(氮或氬等)填充該空間,即採用中空密封結構。此時,黏合層122也可以以不與發光元件重疊的方式設置。另外,也可以使用與設置為框狀的黏合層122不同的樹脂填充該空間。A protective layer 273 is provided on the light emitting element 63R, the light emitting element 63G, and the light emitting element 63B. The protective layer 273 and the substrate 13 b are bonded by the adhesive layer 122 . The sealing of the light emitting element 63 may adopt a solid sealing structure or a hollow sealing structure. In FIG. 25A, the space between the substrate 13b and the protective layer 273 is filled with the adhesive layer 122, that is, a solid sealing structure is adopted. Alternatively, the space can also be filled with an inert gas (nitrogen or argon, etc.), that is, a hollow sealed structure is adopted. At this time, the adhesive layer 122 may be provided so as not to overlap the light emitting element. In addition, the space may be filled with a resin different from that of the adhesive layer 122 provided in a frame shape.
圖25A示出連接部140包括加工與將成為導電層171的導電膜相同的導電膜而得到的導電層168的例子。導電層168被供應電源電位,並與被用作共用電極的導電層173電連接。因此,可以藉由導電層168對導電層173供應電源電位。FIG. 25A shows an example in which connection portion 140 includes conductive layer 168 obtained by processing the same conductive film as that to be conductive layer 171 . The conductive layer 168 is supplied with a power supply potential, and is electrically connected to the conductive layer 173 used as a common electrode. Therefore, the power supply potential can be supplied to the conductive layer 173 through the conductive layer 168 .
顯示裝置100H是頂部發射型顯示裝置。發光元件所發射的光射出到基板13b一側。被用作像素電極的導電層171包含反射可見光的材料,被用作共用電極的導電層173包含透過可見光的材料。The display device 100H is a top emission type display device. Light emitted from the light emitting element is output to the substrate 13b side. The conductive layer 171 used as a pixel electrode includes a material that reflects visible light, and the conductive layer 173 used as a common electrode includes a material that transmits visible light.
電晶體201及電晶體205都形成在基板11b上。這些電晶體可以使用同一材料及同一製程製造。注意,從電晶體201及電晶體205到黏合層122的組件可以為實施方式1所示的層12b。此外,從電晶體201及電晶體205到絕緣層214的組件可以為實施方式1所示的層363。Both the transistor 201 and the transistor 205 are formed on the substrate 11b. These transistors can be manufactured using the same material and the same process. Note that the components from the transistor 201 and the transistor 205 to the adhesive layer 122 can be the layer 12b shown in the first embodiment. In addition, the components from the transistor 201 and the transistor 205 to the insulating layer 214 may be the layer 363 shown in the first embodiment.
在基板11b上依次設置有絕緣層211、絕緣層213、絕緣層215及絕緣層214。絕緣層211的一部分用作各電晶體的第一閘極絕緣層。絕緣層213的一部分用作各電晶體的第二閘極絕緣層。絕緣層215以覆蓋電晶體的方式設置。絕緣層214以覆蓋電晶體的方式設置,並被用作平坦化層。此外,對閘極絕緣層的個數及覆蓋電晶體的絕緣層的個數沒有特別的限制,既可以為一個,又可以為兩個以上。An insulating layer 211 , an insulating layer 213 , an insulating layer 215 , and an insulating layer 214 are sequentially provided on the substrate 11 b. Part of the insulating layer 211 serves as a first gate insulating layer of each transistor. A part of the insulating layer 213 serves as a second gate insulating layer of each transistor. The insulating layer 215 is provided to cover the transistor. The insulating layer 214 is provided to cover the transistors, and is used as a planarization layer. In addition, there is no particular limitation on the number of gate insulating layers and the number of insulating layers covering the transistor, which may be one or more than two.
較佳的是,將水及氫等雜質不容易擴散的材料用於覆蓋電晶體的絕緣層中的至少一個。由此,可以將絕緣層用作障壁層。藉由採用這種結構,可以有效地抑制雜質從外部擴散到電晶體中,從而可以提高顯示裝置的可靠性。Preferably, a material from which impurities such as water and hydrogen do not easily diffuse is used for at least one of the insulating layers covering the transistor. Thus, the insulating layer can be used as a barrier layer. By adopting this structure, the diffusion of impurities from the outside into the transistor can be effectively suppressed, thereby improving the reliability of the display device.
作為絕緣層211、絕緣層213及絕緣層215較佳為使用無機絕緣膜。作為無機絕緣膜,例如可以使用氮化矽膜、氧氮化矽膜、氧化矽膜、氮氧化矽膜、氧化鋁膜或氮化鋁膜等。此外,也可以使用氧化鉿膜、氧化釔膜、氧化鋯膜、氧化鎵膜、氧化鉭膜、氧化鎂膜、氧化鑭膜、氧化鈰膜及氧化釹膜等。此外,也可以層疊上述絕緣膜中的兩個以上。It is preferable to use an inorganic insulating film as the insulating layer 211, the insulating layer 213, and the insulating layer 215. As the inorganic insulating film, for example, a silicon nitride film, a silicon oxynitride film, a silicon oxide film, a silicon oxynitride film, an aluminum oxide film, an aluminum nitride film, or the like can be used. In addition, hafnium oxide films, yttrium oxide films, zirconium oxide films, gallium oxide films, tantalum oxide films, magnesium oxide films, lanthanum oxide films, cerium oxide films, neodymium oxide films, and the like can also be used. In addition, two or more of the above insulating films may be laminated.
用作平坦化層的絕緣層214較佳為使用有機絕緣層。作為能夠用於有機絕緣層的材料,例如可以使用丙烯酸樹脂、聚醯亞胺樹脂、環氧樹脂、聚醯胺樹脂、聚醯亞胺醯胺樹脂、矽氧烷樹脂、苯并環丁烯類樹脂、酚醛樹脂及上述樹脂的前驅物等。此外,絕緣層214也可以具有有機絕緣層及無機絕緣層的疊層結構。絕緣層214的最表面層較佳為被用作蝕刻保護層。由此,在加工將成為導電層171的導電膜時,可以抑制在絕緣層214中形成凹部。或者,例如也可以在加工將成為導電層171的導電膜時在絕緣層214中設置凹部。The insulating layer 214 used as a planarization layer is preferably an organic insulating layer. Examples of materials that can be used for the organic insulating layer include acrylic resins, polyimide resins, epoxy resins, polyamide resins, polyimideamide resins, siloxane resins, and benzocyclobutenes. Resins, phenolic resins and precursors of the above resins, etc. In addition, the insulating layer 214 may also have a laminated structure of an organic insulating layer and an inorganic insulating layer. The uppermost layer of the insulating layer 214 is preferably used as an etch protection layer. Accordingly, it is possible to suppress the formation of recesses in the insulating layer 214 when the conductive film to be the conductive layer 171 is processed. Alternatively, for example, a recess may be provided in the insulating layer 214 at the time of processing the conductive film to be the conductive layer 171 .
電晶體201及電晶體205包括:用作閘極的導電層221;用作第一閘極絕緣層的絕緣層211;用作源極及汲極的導電層222a及導電層222b;半導體層231;用作第二閘極絕緣層的絕緣層213;以及用作閘極的導電層223。在此,藉由對同一導電膜進行加工而得到的多個層由相同的陰影線表示。絕緣層211位於導電層221與半導體層231之間。絕緣層213位於導電層223與半導體層231之間。The transistor 201 and the transistor 205 include: a conductive layer 221 used as a gate; an insulating layer 211 used as a first gate insulating layer; a conductive layer 222a and a conductive layer 222b used as a source and a drain; a semiconductor layer 231 ; an insulating layer 213 serving as a second gate insulating layer; and a conductive layer 223 serving as a gate. Here, a plurality of layers obtained by processing the same conductive film are indicated by the same hatching. The insulating layer 211 is located between the conductive layer 221 and the semiconductor layer 231 . The insulating layer 213 is located between the conductive layer 223 and the semiconductor layer 231 .
對本實施方式的顯示裝置所包括的電晶體結構沒有特別的限制。例如,可以採用平面型電晶體、交錯型電晶體或反交錯型電晶體等。此外,電晶體都可以具有頂閘極結構或底閘極結構。或者,也可以在形成通道的半導體層上下設置有閘極。There is no particular limitation on the transistor structure included in the display device of the present embodiment. For example, planar transistors, staggered transistors, or reverse staggered transistors can be used. In addition, the transistors can all have a top-gate structure or a bottom-gate structure. Alternatively, gate electrodes may be provided above and below the semiconductor layer forming the channel.
作為電晶體201及電晶體205,採用兩個閘極夾持形成通道的半導體層的結構。此外,也可以連接兩個閘極,並藉由對該兩個閘極供應同一信號,來驅動電晶體。或者,藉由對兩個閘極中的一個施加用來控制臨界電壓的電位,對另一個施加用來進行驅動的電位,可以控制電晶體的臨界電壓。As the transistor 201 and the transistor 205, a structure in which two gate electrodes sandwich a semiconductor layer forming a channel is adopted. In addition, it is also possible to connect two gates and drive the transistor by supplying the same signal to both gates. Alternatively, the threshold voltage of the transistor can be controlled by applying a potential for controlling the threshold voltage to one of the two gates and a potential for driving to the other.
對電晶體的半導體層的結晶性也沒有特別的限制,可以使用非晶半導體、具有結晶性的半導體(微晶半導體、多晶半導體、單晶半導體或其一部分具有結晶區域的半導體)。當使用具有結晶性的半導體時可以抑制電晶體的特性劣化,所以是較佳的。The crystallinity of the semiconductor layer of the transistor is also not particularly limited, and amorphous semiconductors and crystalline semiconductors (microcrystalline semiconductors, polycrystalline semiconductors, single crystal semiconductors, or semiconductors having crystalline regions in part thereof) can be used. It is preferable to use a semiconductor having crystallinity because deterioration in characteristics of the transistor can be suppressed.
電晶體的半導體層較佳為使用金屬氧化物。就是說,本實施方式的顯示裝置所包括的電晶體較佳為使用OS電晶體。The semiconductor layer of the transistor is preferably metal oxide. That is to say, the transistors included in the display device of this embodiment preferably use OS transistors.
作為能夠用於半導體層的金屬氧化物,例如可以舉出銦氧化物、鎵氧化物及鋅氧化物。此外,金屬氧化物較佳為包含選自銦、元素和鋅中的兩個或三個。注意,元素M為選自鎵、鋁、矽、硼、釔、錫、銅、釩、鈹、鈦、鐵、鎳、鍺、鋯、鉬、鑭、鈰、釹、鉿、鉭、鎢、鈷和鎂中的一種或多種。尤其是,元素M較佳為選自鋁、鎵、釔和錫中的一種或多種。Examples of metal oxides that can be used in the semiconductor layer include indium oxide, gallium oxide, and zinc oxide. In addition, the metal oxide preferably contains two or three selected from indium, element and zinc. Note that element M is selected from gallium, aluminum, silicon, boron, yttrium, tin, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, cobalt and one or more of magnesium. In particular, the element M is preferably one or more selected from aluminum, gallium, yttrium and tin.
尤其是,作為用於半導體層的金屬氧化物,較佳為使用包含銦(In)、鎵(Ga)及鋅(Zn)的氧化物(也記為IGZO)。或者,較佳為使用包含銦、錫及鋅的氧化物(也記為ITZO(註冊商標))。或者,較佳為使用包含銦、鎵、錫及鋅的氧化物。或者,較佳為使用包含銦(In)、鋁(Al)及鋅(Zn)的氧化物(也稱為IAZO)。或者,較佳為使用包含銦(In)、鋁(Al)、鎵(Ga)及鋅(Zn)的氧化物(也稱為IAGZO)。In particular, an oxide (also referred to as IGZO) containing indium (In), gallium (Ga), and zinc (Zn) is preferably used as the metal oxide used for the semiconductor layer. Alternatively, it is preferable to use an oxide (also referred to as ITZO (registered trademark)) containing indium, tin, and zinc. Alternatively, it is preferred to use oxides containing indium, gallium, tin and zinc. Alternatively, an oxide containing indium (In), aluminum (Al) and zinc (Zn) (also referred to as IAZO) is preferably used. Alternatively, an oxide containing indium (In), aluminum (Al), gallium (Ga) and zinc (Zn) (also referred to as IAGZO) is preferably used.
在用於半導體層的金屬氧化物為In-M-Zn氧化物時,該In-M-Zn氧化物中的In的原子個數比較佳為M的原子個數比以上。作為這種In-M-Zn氧化物的金屬元素的原子個數比,例如可以舉出In:M:Zn=1:1:1或其附近的組成、In:M:Zn=1:1:1.2或其附近的組成、In:M:Zn=1:3:2或其附近的組成、In:M:Zn=1:3:4或其附近的組成、In:M:Zn=2:1:3或其附近的組成、In:M:Zn=3:1:2或其附近的組成、In:M:Zn=4:2:3或其附近的組成、In:M:Zn=4:2:4.1或其附近的組成、In:M:Zn=5:1:3或其附近的組成、In:M:Zn=5:1:6或其附近的組成、In:M:Zn=5:1:7或其附近的組成、In:M:Zn=5:1:8或其附近的組成、In:M:Zn=6:1:6或其附近的組成、In:M:Zn=5:2:5或其附近的組成。此外,附近的組成包括所希望的原子個數比的±30%的範圍。When the metal oxide used for the semiconductor layer is an In-M-Zn oxide, the atomic number ratio of In in the In-M-Zn oxide is preferably greater than or equal to the atomic number ratio of M. Examples of the atomic number ratio of metal elements in such an In-M-Zn oxide include a composition of In:M:Zn=1:1:1 or its vicinity, In:M:Zn=1:1: 1.2 or its vicinity, In:M:Zn=1:3:2 or its vicinity, In:M:Zn=1:3:4 or its vicinity, In:M:Zn=2:1 :3 or its vicinity, In:M:Zn=3:1:2 or its vicinity, In:M:Zn=4:2:3 or its vicinity, In:M:Zn=4: 2:4.1 or its vicinity, In:M:Zn=5:1:3 or its vicinity, In:M:Zn=5:1:6 or its vicinity, In:M:Zn=5 : 1:7 or its vicinity, In:M:Zn=5:1:8 or its vicinity, In:M:Zn=6:1:6 or its vicinity, In:M:Zn= Compositions at or near 5:2:5. In addition, the composition in the vicinity includes a range of ±30% of the desired atomic number ratio.
例如,當記載為原子個數比為In:Ga:Zn=4:2:3或其附近的組成時包括如下情況:In為4時,Ga為1以上且3以下,Zn為2以上且4以下。此外,當記載為原子個數比為In:Ga:Zn=5:1:6或其附近的組成時包括如下情況:In為5時,Ga大於0.1且為2以下,Zn為5以上且7以下。此外,當記載為原子個數比為In:Ga:Zn=1:1:1或其附近的組成時包括如下情況:In為1時,Ga大於0.1且為2以下,Zn大於0.1且為2以下。For example, when the atomic number ratio is described as In:Ga:Zn=4:2:3 or its vicinity, the following cases are included: when In is 4, Ga is 1 to 3, and Zn is 2 to 4. the following. In addition, when the composition of the atomic number ratio is described as In:Ga:Zn=5:1:6 or its vicinity, the following cases are included: when In is 5, Ga is greater than 0.1 and 2 or less, and Zn is 5 or more and 7 or less. the following. In addition, when the atomic number ratio is described as In:Ga:Zn=1:1:1 or its vicinity, the following cases are included: when In is 1, Ga is greater than 0.1 and less than 2, and Zn is greater than 0.1 and is 2. the following.
半導體層也可以包括組成不同的兩層以上的金屬氧化物層。例如,可以較佳為使用In:M:Zn=1:3:4[原子個數比]或其附近的組成的第一金屬氧化物層及設置在該第一金屬氧化物層上的In:M:Zn=1:1:1[原子個數比]或其附近的組成的第二金屬氧化物層的疊層結構。此外,作為元素M特別較佳為使用鎵或鋁。The semiconductor layer may include two or more metal oxide layers having different compositions. For example, it may be preferable to use a first metal oxide layer having a composition of In:M:Zn=1:3:4 [atomic number ratio] or its vicinity and In provided on the first metal oxide layer: M: A laminated structure of the second metal oxide layer having a composition of Zn=1:1:1 [atomic number ratio] or its vicinity. Furthermore, it is particularly preferred to use gallium or aluminum as element M.
例如,也可以使用選自銦氧化物、銦鎵氧化物和IGZO中的任一個及選自IAZO、IAGZO和ITZO(註冊商標)中的任一個的疊層結構等。For example, a laminated structure of any one selected from indium oxide, indium gallium oxide, and IGZO, and any one selected from IAZO, IAGZO, and ITZO (registered trademark), or the like may be used.
作為具有結晶性的氧化物半導體,可以舉出CAAC(c-axis-aligned crystalline)-OS及nc(nanocrystalline)-OS等。Examples of crystalline oxide semiconductors include CAAC (c-axis-aligned crystalline)-OS, nc (nanocrystalline)-OS, and the like.
或者,也可以使用將矽用於通道形成區域的電晶體(Si電晶體)。作為矽可以舉出單晶矽、多晶矽及非晶矽等。尤其是,可以使用半導體層中含有低溫多晶矽(LTPS:Low Temperature Poly Silicon)的電晶體(也稱為LTPS電晶體)。LTPS電晶體具有高場效移動率以及良好的頻率特性。Alternatively, a transistor (Si transistor) using silicon for a channel formation region may also be used. Examples of silicon include single crystal silicon, polycrystalline silicon, and amorphous silicon. In particular, a transistor containing low temperature polysilicon (LTPS: Low Temperature Poly Silicon) in a semiconductor layer (also referred to as an LTPS transistor) can be used. LTPS transistors have high field efficiency mobility and good frequency characteristics.
藉由使用LTPS電晶體等Si電晶體,可以在同一基板上形成需要以高頻率驅動的電路(例如,資料驅動器電路)和顯示部。因此,可以使安裝到顯示裝置的外部電路簡化,可以縮減構件成本及安裝成本。By using Si transistors such as LTPS transistors, circuits that need to be driven at high frequencies (for example, data driver circuits) and a display section can be formed on the same substrate. Therefore, external circuits mounted on the display device can be simplified, and component costs and mounting costs can be reduced.
OS電晶體的場效移動率比使用非晶矽的電晶體高得多。另外,OS電晶體的關閉狀態下的源極和汲極間的洩漏電流(也稱為關態電流)極低,可以長期間保持與該電晶體串聯連接的電容器中儲存的電荷。另外,藉由使用OS電晶體,可以降低顯示裝置的功耗。The field effect mobility of OS transistors is much higher than that of transistors using amorphous silicon. In addition, the leakage current between the source and the drain of the OS transistor in the off state (also referred to as off-state current) is extremely low, and the charge stored in the capacitor connected in series with the transistor can be retained for a long period of time. In addition, by using the OS transistor, the power consumption of the display device can be reduced.
另外,在提高像素電路所包括的發光元件的發光亮度時,需要增大流過發光元件的電流量。為此,需要提高像素電路所包括的驅動電晶體的源極-汲極間電壓。因為OS電晶體的源極-汲極間的耐壓比Si電晶體高,所以可以對OS電晶體的源極-汲極間施加高電壓。由此,藉由作為像素電路所包括的驅動電晶體使用OS電晶體,可以增大流過發光元件的電流量而提高發光元件的發光亮度。In addition, when increasing the emission luminance of a light emitting element included in a pixel circuit, it is necessary to increase the amount of current flowing through the light emitting element. Therefore, it is necessary to increase the source-drain voltage of the driving transistor included in the pixel circuit. Since the withstand voltage between the source and the drain of the OS transistor is higher than that of the Si transistor, a high voltage can be applied between the source and the drain of the OS transistor. Thus, by using the OS transistor as the driving transistor included in the pixel circuit, the amount of current flowing through the light emitting element can be increased to improve the light emitting luminance of the light emitting element.
另外,當電晶體在飽和區域中驅動時,與Si電晶體相比,OS電晶體可以使隨著閘極-源極間電壓的變化的源極-汲極間電流的變化細小。因此,藉由作為像素電路所包括的驅動電晶體使用OS電晶體,可以藉由控制閘極-源極間電壓詳細決定流過源極-汲極間的電流。因此可以控制流過發光元件的電流量。由此,可以增大由像素電路表示的灰階。In addition, when the transistor is driven in a saturation region, the OS transistor can make the change of the source-drain current according to the change of the gate-source voltage smaller than that of the Si transistor. Therefore, by using the OS transistor as the driving transistor included in the pixel circuit, the current flowing between the source and the drain can be determined in detail by controlling the voltage between the gate and the source. It is thus possible to control the amount of current flowing through the light emitting element. Thereby, the gradation represented by the pixel circuit can be increased.
另外,關於電晶體在飽和區域中驅動時流過的電流的飽和特性,與Si電晶體相比,OS電晶體即使逐漸地提高源極-汲極間電壓也可以使穩定的電流(飽和電流)流過。因此,藉由將OS電晶體用作驅動電晶體,即使例如有機EL元件的電流-電壓特性發生不均勻,也可以使穩定的電流流過發光元件。也就是說,OS電晶體當在飽和區域中驅動時即使提高源極-汲極間電壓,源極-汲極間電流也幾乎不變。因此可以使發光元件的發光亮度穩定。In addition, regarding the saturation characteristics of the current flowing when the transistor is driven in the saturation region, compared with the Si transistor, the OS transistor can make a stable current (saturation current) flow even if the source-drain voltage is gradually increased. Pass. Therefore, by using the OS transistor as a driving transistor, even if, for example, the current-voltage characteristic of an organic EL element becomes uneven, a stable current can be caused to flow through the light emitting element. That is, when the OS transistor is driven in a saturation region, even if the source-drain voltage is increased, the source-drain current hardly changes. Therefore, the light emission luminance of the light emitting element can be stabilized.
如上所述,藉由作為像素電路所包括的驅動電晶體使用OS電晶體,可以實現黑色模糊的抑制、發光亮度的上升、多灰階化及發光元件的特性不均勻的抑制等。As described above, by using the OS transistor as the driving transistor included in the pixel circuit, it is possible to suppress black blur, increase luminous luminance, multi-gradation, suppress characteristic unevenness of the light-emitting element, and the like.
電路164所包括的電晶體和顯示部107所包括的電晶體既可以具有相同的結構,又可以具有不同的結構。電路164所包括的多個電晶體既可以具有相同的結構,又可以具有兩種以上的不同結構。與此同樣,顯示部107所包括的多個電晶體既可以具有相同的結構,又可以具有兩種以上的不同結構。The transistor included in the circuit 164 and the transistor included in the display unit 107 may have the same structure or may have a different structure. The multiple transistors included in the circuit 164 may have the same structure, or more than two different structures. Similarly, the plurality of transistors included in the display unit 107 may have the same structure, or may have two or more different structures.
顯示部107所包括的所有電晶體都也可以為OS電晶體或Si電晶體。此外,顯示部107所包括的部分電晶體也可以為OS電晶體且剩下的電晶體也可以為Si電晶體。All transistors included in the display unit 107 may be OS transistors or Si transistors. In addition, part of the transistors included in the display unit 107 may also be OS transistors and the remaining transistors may also be Si transistors.
例如,藉由在顯示部107中使用LTPS電晶體和OS電晶體的兩者,可以實現具有低功耗及高驅動能力的顯示裝置。此外,有時將組合LTPS電晶體和OS電晶體的結構稱為LTPO。此外,例如較佳的是,將OS電晶體用於被用作控制佈線的導通/非導通的開關的電晶體且將LTPS電晶體用於控制電流的電晶體。For example, by using both of the LTPS transistor and the OS transistor in the display section 107, a display device having low power consumption and high driving capability can be realized. Also, a structure combining an LTPS transistor and an OS transistor is sometimes referred to as LTPO. In addition, for example, it is preferable to use an OS transistor for a transistor used as a switch for controlling the conduction/non-conduction of a wiring, and use an LTPS transistor for a transistor for controlling a current.
例如,顯示部107所包括的電晶體之一被用作用來控制流過發光元件的電流的電晶體,可以稱為驅動電晶體。驅動電晶體的源極和汲極中的一個與發光元件的像素電極電連接。該驅動電晶體較佳為使用LTPS電晶體。由此,可以增大流過發光元件的電流。For example, one of the transistors included in the display section 107 is used as a transistor for controlling the current flowing through the light emitting element, and may be referred to as a driving transistor. One of the source and the drain of the driving transistor is electrically connected to the pixel electrode of the light emitting element. The driving transistor is preferably an LTPS transistor. Thus, the current flowing through the light emitting element can be increased.
另一方面,顯示部107所包括的電晶體的其他之一被用作用來控制像素的選擇和非選擇的開關功能,也可以被稱為選擇電晶體。選擇電晶體的閘極與閘極線電連接,源極和汲極中的一個與信號線電連接。選擇電晶體較佳為使用OS電晶體。由此,由於即使使圖框頻率極小(例如1fps以下)也可以維持像素的灰階,所以藉由在顯示靜態影像時停止驅動器,可以降低功耗。On the other hand, the other one of the transistors included in the display unit 107 is used as a switch function for controlling selection and non-selection of pixels, and may also be referred to as a selection transistor. The gate of the selection transistor is electrically connected to the gate line, and one of the source and the drain is electrically connected to the signal line. The selection transistor is preferably an OS transistor. Therefore, since the gray scale of the pixel can be maintained even if the frame frequency is extremely low (for example, 1 fps or less), power consumption can be reduced by stopping the driver when displaying a still image.
如此,本發明的一個實施方式的顯示裝置可以兼具高開口率、高清晰度、高顯示品質及低功耗。In this way, the display device according to one embodiment of the present invention can have high aperture ratio, high definition, high display quality and low power consumption.
注意,本發明的一個實施方式的顯示裝置採用包括OS電晶體以及具有MML結構的發光元件的結構。藉由採用該結構,可以使可流過電晶體的洩漏電流以及可在相鄰的發光元件間流過的洩漏電流極低。另外,藉由採用上述結構,在影像顯示在顯示裝置上時觀看者可以觀測到影像的鮮銳度、影像的銳度、高色飽和度和高對比中的任一個或多個。另外,藉由採用可流過電晶體的洩漏電流及發光元件間的橫向洩漏電流極低的結構,例如可以進行在顯示黑色時可發生的光洩露(所謂的黑色不純)極少的顯示。Note that a display device of one embodiment of the present invention employs a structure including an OS transistor and a light emitting element having an MML structure. By adopting this structure, the leakage current that can flow through the transistor and the leakage current that can flow between adjacent light emitting elements can be made extremely low. In addition, by adopting the above structure, the viewer can observe any one or more of sharpness of the image, sharpness of the image, high color saturation, and high contrast when the image is displayed on the display device. In addition, by adopting a structure in which the leakage current that can flow through the transistor and the lateral leakage current between light emitting elements are extremely low, for example, a display with very little light leakage (so-called black impurity) that may occur when displaying black can be realized.
尤其是,在從MML結構的發光元件中採用SBS結構時,設置在發光元件間的層被分割,由此可以消除側洩漏或使側洩漏極少。In particular, when the SBS structure is adopted from the light-emitting element of the MML structure, the layers provided between the light-emitting elements are divided, whereby side leakage can be eliminated or minimized.
圖25B及圖25C示出電晶體的其他結構例子。25B and 25C show other structural examples of transistors.
電晶體209及電晶體210包括:用作閘極的導電層221;用作第一閘極絕緣層的絕緣層211;包含通道形成區域231i及一對低電阻區域231n的半導體層231;與一對低電阻區域231n中的一個電連接的導電層222a;與一對低電阻區域231n中的另一個電連接的導電層222b;用作第二閘極絕緣層的絕緣層225;用作閘極的導電層223;以及覆蓋導電層223的絕緣層215。絕緣層211位於導電層221與通道形成區域231i之間。絕緣層225至少位於導電層223與通道形成區域231i之間。再者,還可以設置有覆蓋電晶體的絕緣層218。The transistor 209 and the transistor 210 include: a conductive layer 221 used as a gate; an insulating layer 211 used as a first gate insulating layer; a semiconductor layer 231 comprising a channel forming region 231i and a pair of low-resistance regions 231n; and a A conductive layer 222a electrically connected to one of the low-resistance regions 231n; a conductive layer 222b electrically connected to the other of the pair of low-resistance regions 231n; an insulating layer 225 serving as a second gate insulating layer; serving as a gate The conductive layer 223; and the insulating layer 215 covering the conductive layer 223. The insulating layer 211 is located between the conductive layer 221 and the channel formation region 231i. The insulating layer 225 is located at least between the conductive layer 223 and the channel forming region 231i. Furthermore, an insulating layer 218 covering the transistors may also be provided.
在圖25B所示的例子中,在電晶體209中絕緣層225覆蓋半導體層231的頂面及側面。導電層222a及導電層222b都藉由設置在絕緣層225及絕緣層215中的開口與低電阻區域231n電連接。在導電層222a及導電層222b中,一方被用作源極,另一方被用作汲極。In the example shown in FIG. 25B , the insulating layer 225 covers the top and side surfaces of the semiconductor layer 231 in the transistor 209 . Both the conductive layer 222 a and the conductive layer 222 b are electrically connected to the low-resistance region 231 n through openings disposed in the insulating layer 225 and the insulating layer 215 . Of the conductive layer 222a and the conductive layer 222b, one is used as a source, and the other is used as a drain.
另一方面,在圖25C所示的電晶體210中,絕緣層225與半導體層231的通道形成區域231i重疊而不與低電阻區域231n重疊。例如,藉由以導電層223為遮罩加工絕緣層225,可以形成圖25C所示的結構。在圖25C中,絕緣層215覆蓋絕緣層225及導電層223,並且導電層222a及導電層222b分別藉由絕緣層215的開口與低電阻區域231n電連接。On the other hand, in the transistor 210 shown in FIG. 25C, the insulating layer 225 overlaps the channel formation region 231i of the semiconductor layer 231 and does not overlap the low-resistance region 231n. For example, by processing the insulating layer 225 with the conductive layer 223 as a mask, the structure shown in FIG. 25C can be formed. In FIG. 25C , the insulating layer 215 covers the insulating layer 225 and the conductive layer 223 , and the conductive layer 222 a and the conductive layer 222 b are respectively electrically connected to the low-resistance region 231 n through the opening of the insulating layer 215 .
在基板11b的不重疊於基板13b的區域設置連接部204。在連接部204中,佈線165藉由導電層166及連接層242與FPC177電連接。導電層166可以為加工與將成為導電層171的導電膜相同的導電膜而得到的導電層。在連接部204的頂面導電層166露出。由此,可以藉由連接層242使連接部204與FPC177電連接。The connecting portion 204 is provided in a region of the substrate 11b that does not overlap the substrate 13b. In connection portion 204 , wiring 165 is electrically connected to FPC 177 via conductive layer 166 and connection layer 242 . The conductive layer 166 may be a conductive layer obtained by processing the same conductive film as the conductive film to be the conductive layer 171 . The conductive layer 166 is exposed on the top surface of the connection portion 204 . Accordingly, the connection portion 204 and the FPC 177 can be electrically connected via the connection layer 242 .
基板11b及基板13b各自可以採用可用於基板120的材料。Each of the substrate 11b and the substrate 13b can be made of a material that can be used for the substrate 120 .
作為連接層242,可以使用異方性導電膜(ACF:Anisotropic Conductive Film)、異方性導電膏(ACP:Anisotropic Conductive Paste)等。As the connection layer 242 , an anisotropic conductive film (ACF: Anisotropic Conductive Film), an anisotropic conductive paste (ACP: Anisotropic Conductive Paste), or the like can be used.
[顯示裝置100I] 圖26所示的顯示裝置100I是圖25A所示的顯示裝置100H的變形例子,顯示裝置100I與顯示裝置100H的不同之處在於設置基板15代替基板11b且設置基板16代替基板13b。 [Display device 100I] The display device 100I shown in FIG. 26 is a modified example of the display device 100H shown in FIG. 25A . The difference between the display device 100I and the display device 100H is that a substrate 15 is provided instead of the substrate 11 b and a substrate 16 is provided instead of the substrate 13 b.
基板15及基板16具有撓性。由此,顯示裝置100I具有撓性。也就是說,顯示裝置100I為撓性顯示器。基板15由黏合層156貼合絕緣層162,絕緣層162上設置有電晶體201及電晶體205。黏合層156可以使用與可用於黏合層122的材料相同的材料。絕緣層162可以使用與可用於絕緣層211、絕緣層213或絕緣層215的材料相同的材料。注意,在顯示裝置100I中,從黏合層156到黏合層122的組件可以為實施方式1所示的層12b。此外,從黏合層156到絕緣層214的組件可以為實施方式1所示的層363。The substrate 15 and the substrate 16 have flexibility. Thus, the display device 100I has flexibility. That is to say, the display device 100I is a flexible display. The substrate 15 is adhered to the insulating layer 162 by the adhesive layer 156 , and the transistor 201 and the transistor 205 are disposed on the insulating layer 162 . The adhesive layer 156 may use the same material that may be used for the adhesive layer 122 . The insulating layer 162 may use the same material as that which may be used for the insulating layer 211 , the insulating layer 213 or the insulating layer 215 . Note that in the display device 100I, the components from the adhesive layer 156 to the adhesive layer 122 may be the layer 12b shown in the first embodiment. In addition, the components from the adhesive layer 156 to the insulating layer 214 may be the layer 363 shown in the first embodiment.
在圖26所示的顯示裝置100I的製造方法中,首先,在製造基板上形成絕緣層162,在絕緣層162上形成各電晶體及發光元件63等。接著,例如在發光元件63上由黏合層122貼合基板16。然後,使用黏合層156在剝離製造基板而露出的面上貼合基板15,由此將形成在製造基板上的各組件轉置到基板15。藉由上述製程,可以製造顯示裝置100I。In the method of manufacturing the display device 100I shown in FIG. 26 , first, an insulating layer 162 is formed on a manufacturing substrate, and each transistor, light-emitting element 63 , and the like are formed on the insulating layer 162 . Next, for example, the substrate 16 is bonded to the light emitting element 63 by the adhesive layer 122 . Then, the substrate 15 is bonded to the surface exposed by peeling off the production substrate using the adhesive layer 156 , thereby transferring each component formed on the production substrate to the substrate 15 . Through the above process, the display device 100I can be manufactured.
[顯示裝置100J] 圖27所示的顯示裝置100J是圖25A所示的顯示裝置100H的變形例子,顯示裝置100J與顯示裝置100H的主要不同之處在於作為發光元件設置發光元件63W且包括彩色層183R、彩色層183G及彩色層183B。圖27示出發光元件63W具有圖10B所示的疊層結構的例子。 [display device 100J] The display device 100J shown in FIG. 27 is a modified example of the display device 100H shown in FIG. 25A. The main difference between the display device 100J and the display device 100H is that a light-emitting element 63W is provided as a light-emitting element and includes a color layer 183R and a color layer 183G. And the color layer 183B. FIG. 27 shows an example in which the light emitting element 63W has the laminated structure shown in FIG. 10B .
在顯示裝置100J中,一個發光元件63W具有重疊於彩色層183R、彩色層183G和彩色層183B中的一個的區域。彩色層183R、彩色層183G及彩色層183B可以設置在基板13b的基板11b一側的面上。In the display device 100J, one light emitting element 63W has a region overlapping one of the color layer 183R, the color layer 183G, and the color layer 183B. The color layer 183R, the color layer 183G, and the color layer 183B may be provided on the surface of the substrate 13b on the substrate 11b side.
在顯示裝置100J中,在顯示部107的不設置彩色層183R、彩色層183G及彩色層183B的區域設置遮光層117。再者,在顯示裝置100J中,可以在連接部140及電路164中設置遮光層117。注意,遮光層117也可以設置在顯示裝置100H或顯示裝置100I中。In the display device 100J, the light shielding layer 117 is provided in a region of the display unit 107 where the color layer 183R, the color layer 183G, and the color layer 183B are not provided. Furthermore, in the display device 100J, the light shielding layer 117 may be provided in the connection portion 140 and the circuit 164 . Note that the light shielding layer 117 may also be provided in the display device 100H or the display device 100I.
在顯示裝置100J中,發光元件63W例如可以發射白色光。此外,例如彩色層183R可以透過紅色光,彩色層183G可以透過綠色光,彩色層183B可以透過藍色光。如上所述,顯示裝置100J例如可以射出紅色光34bR、綠色光34bG及藍色光34bB且進行全彩色顯示。In the display device 100J, the light emitting element 63W can emit white light, for example. In addition, for example, the color layer 183R can transmit red light, the color layer 183G can transmit green light, and the color layer 183B can transmit blue light. As described above, the display device 100J can emit, for example, red light 34bR, green light 34bG, and blue light 34bB to perform full-color display.
[顯示裝置100K] 圖28所示的顯示裝置100K是圖25A所示的顯示裝置100H的變形例子,顯示裝置100K與顯示裝置100H的主要不同之處在於顯示裝置100K是底部發射型顯示裝置。 [display device 100K] The display device 100K shown in FIG. 28 is a modified example of the display device 100H shown in FIG. 25A , and the main difference between the display device 100K and the display device 100H is that the display device 100K is a bottom emission display device.
光34bR、光34bG及光34bB射出到基板11b一側。導電層171使用對可見光具有高透過性的材料。另一方面,導電層173較佳為使用反射可見光的材料。Light 34bR, light 34bG, and light 34bB are emitted to the substrate 11b side. The conductive layer 171 uses a material having high transmittance to visible light. On the other hand, the conductive layer 173 is preferably made of a material that reflects visible light.
[顯示裝置100L] 圖29所示的顯示裝置100L是圖26所示的顯示裝置100I的變形例子,顯示裝置100L與顯示裝置100I的主要不同之處在於顯示裝置100L是與圖28所示的顯示裝置100K同樣的底部發射型顯示裝置。 [display device 100L] The display device 100L shown in FIG. 29 is a modified example of the display device 100I shown in FIG. 26. The main difference between the display device 100L and the display device 100I is that the display device 100L has the same bottom as the display device 100K shown in FIG. emissive display device.
在顯示裝置100L中,從黏合層156到黏合層122的組件可以為實施方式1所示的層12b。此外,從黏合層156到絕緣層214的組件可以為實施方式1所示的層363。In the display device 100L, the components from the adhesive layer 156 to the adhesive layer 122 may be the layer 12b shown in the first embodiment. In addition, the components from the adhesive layer 156 to the insulating layer 214 may be the layer 363 shown in the first embodiment.
這裡,在將顯示裝置100K或顯示裝置100L的顯示部107用於實施方式1所示的顯示部37c時,導電層173採用對可見光具有透光性的結構。此外,構成電晶體205的層的至少一部分較佳為對可見光具有透光性。例如,導電層222a及導電層222b較佳為對可見光具有透光性。如上所述,在基板11b、絕緣層211、絕緣層213、絕緣層215、絕緣層214、絕緣層272、保護層273、黏合層122及基板13b對可見光具有透光性時,顯示裝置100K所包括的顯示部107透過外光。此外,在基板15、黏合層156、絕緣層162、絕緣層211、絕緣層213、絕緣層215、絕緣層214、絕緣層272、保護層273、黏合層122及基板16對可見光具有透光性時,顯示裝置100L所包括的顯示部107透過外光。明確而言,顯示裝置100K或顯示裝置100L所包括的顯示部107可以透過實施方式1所示的顯示裝置41a所包括的顯示部37a所發射的光34a。因此,電子裝置10的用戶可以藉由顯示部107看到實施方式1所示的顯示部37a上顯示的影像。Here, when the display unit 107 of the display device 100K or the display device 100L is used for the display unit 37 c described in Embodiment Mode 1, the conductive layer 173 has a light-transmitting structure for visible light. In addition, at least a part of the layers constituting the transistor 205 is preferably transparent to visible light. For example, the conductive layer 222a and the conductive layer 222b are preferably transparent to visible light. As mentioned above, when the substrate 11b, the insulating layer 211, the insulating layer 213, the insulating layer 215, the insulating layer 214, the insulating layer 272, the protective layer 273, the adhesive layer 122, and the substrate 13b are transparent to visible light, the display device 100K The included display portion 107 transmits external light. In addition, the substrate 15, the adhesive layer 156, the insulating layer 162, the insulating layer 211, the insulating layer 213, the insulating layer 215, the insulating layer 214, the insulating layer 272, the protective layer 273, the adhesive layer 122 and the substrate 16 have light transmittance to visible light. , the display unit 107 included in the display device 100L transmits external light. Specifically, the display unit 107 included in the display device 100K or the display device 100L can transmit the light 34a emitted from the display unit 37a included in the display device 41a described in the first embodiment. Therefore, the user of the electronic device 10 can see the image displayed on the display unit 37 a shown in Embodiment 1 through the display unit 107 .
此外,導電層221及導電層223也可以對可見光具有透光性或者對可見光具有反射性。在導電層221及導電層223對可見光具有透光性時,可以提高顯示部107的可見光穿透率。另一方面,在導電層221及導電層223對可見光具有反射性時,可以抑制可見光入射到半導體層231。因此,由於可以減輕半導體層231受到的損傷,因此可以提高顯示裝置100K或顯示裝置100L的可靠性。In addition, the conductive layer 221 and the conductive layer 223 may be transparent to visible light or reflective to visible light. When the conductive layer 221 and the conductive layer 223 are transparent to visible light, the visible light transmittance of the display portion 107 can be increased. On the other hand, when the conductive layer 221 and the conductive layer 223 are reflective to visible light, it is possible to suppress the incidence of visible light on the semiconductor layer 231 . Therefore, since damage to the semiconductor layer 231 can be reduced, the reliability of the display device 100K or the display device 100L can be improved.
注意,即使採用顯示裝置100H或顯示裝置100I等的頂部發射型顯示裝置也可以使構成電晶體205的層的至少一部分對可見光具有透光性。此時,導電層171也對可見光具有透光性。如上所述,可以提高顯示部107的可見光穿透率。Note that even if a top emission type display device such as the display device 100H or the display device 100I is used, at least a part of the layers constituting the transistor 205 can be made transparent to visible light. At this time, the conductive layer 171 is also transparent to visible light. As described above, the visible light transmittance of the display portion 107 can be improved.
[顯示裝置100M] 圖30所示的顯示裝置100M是圖27所示的顯示裝置100J的變形例子,顯示裝置100M與顯示裝置100J的主要不同之處在於顯示裝置100M是與圖28所示的顯示裝置100K同樣的底部發射型顯示裝置。 [Display device 100M] The display device 100M shown in FIG. 30 is a modified example of the display device 100J shown in FIG. 27. The main difference between the display device 100M and the display device 100J is that the display device 100M has the same bottom as the display device 100K shown in FIG. emissive display device.
彩色層183R、彩色層183G及彩色層183B設置在發光元件63W與基板11b之間。圖30示出在絕緣層215與絕緣層214之間設置彩色層183R、彩色層183G及彩色層183B的例子。The color layer 183R, the color layer 183G, and the color layer 183B are provided between the light emitting element 63W and the substrate 11b. FIG. 30 shows an example in which the color layer 183R, the color layer 183G, and the color layer 183B are provided between the insulating layer 215 and the insulating layer 214 .
在顯示裝置100M中,基板11b與電晶體205之間設置有遮光層117。遮光層117可以設置在不重疊於發光元件63W的發光區域的區域。圖30示出基板11b上設置有遮光層117、遮光層117上設置有絕緣層153以及絕緣層153上設置有電晶體201及電晶體205等的例子。注意,如圖30所示,遮光層117也可以設置在連接部140及電路164中。In the display device 100M, a light shielding layer 117 is provided between the substrate 11 b and the transistor 205 . The light shielding layer 117 may be provided in a region that does not overlap the light emitting region of the light emitting element 63W. 30 shows an example in which the light-shielding layer 117 is provided on the substrate 11b, the insulating layer 153 is provided on the light-shielding layer 117, and the transistor 201, the transistor 205, and the like are provided on the insulating layer 153. Note that, as shown in FIG. 30 , the light shielding layer 117 may also be provided in the connection portion 140 and the circuit 164 .
遮光層117也可以設置在顯示裝置100K或顯示裝置100L中。此時,可以抑制發光元件63R、發光元件63G及發光元件63B所發射的光例如被基板11b反射且該光擴散到顯示裝置100K或顯示裝置100L的內部。由此,顯示裝置100K及顯示裝置100L可以為顯示品質高的顯示裝置。另一方面,藉由不設置遮光層117,可以提高發光元件63R、發光元件63G及發光元件63B所發射的光的光提取效率。The light shielding layer 117 may also be provided in the display device 100K or the display device 100L. At this time, light emitted from the light emitting element 63R, the light emitting element 63G, and the light emitting element 63B can be suppressed from being reflected by, for example, the substrate 11b and diffused into the display device 100K or the display device 100L. Accordingly, the display device 100K and the display device 100L can be display devices with high display quality. On the other hand, by not providing the light-shielding layer 117, the light extraction efficiency of the light emitted from the light-emitting element 63R, the light-emitting element 63G, and the light-emitting element 63B can be improved.
顯示裝置100H至顯示裝置100M與顯示裝置100A至顯示裝置100G相比不容易提高像素密度但可以增大顯示部的佔有面積。因此,較佳的是,顯示裝置100A至顯示裝置100G用於實施方式1所示的顯示裝置41a且顯示裝置100H至顯示裝置100M用於顯示裝置41b。注意,顯示裝置100A至顯示裝置100G也可以用於顯示裝置41b。此外,顯示裝置100H至顯示裝置100M也可以用於顯示裝置41a。例如,在顯示裝置41b所包括的顯示部37b被要求的佔有面積的大小在顯示裝置100A至顯示裝置100G中可實現的範圍時,顯示裝置100A至顯示裝置100G可以用於顯示裝置41b。此外,在顯示裝置41a所包括的顯示部37a被要求的像素密度在顯示裝置100H至顯示裝置100M中可實現的範圍時,顯示裝置100H至顯示裝置100M可以用於顯示裝置41a。Compared with the display devices 100A to 100G, the display devices 100H to 100M are less likely to increase the pixel density, but can increase the occupied area of the display portion. Therefore, preferably, the display device 100A to the display device 100G are used for the display device 41 a described in Embodiment Mode 1 and the display device 100H to 100M are used for the display device 41 b. Note that the display device 100A to the display device 100G may also be used for the display device 41b. In addition, the display device 100H to the display device 100M may also be used for the display device 41 a. For example, when the size of the required occupied area of the display unit 37b included in the display device 41b is within the range achievable by the display devices 100A to 100G, the display devices 100A to 100G can be used for the display device 41b. In addition, when the pixel density required for the display unit 37a included in the display device 41a is within the range that can be realized by the display device 100H to the display device 100M, the display device 100H to the display device 100M can be used for the display device 41a.
本實施方式所示的結構例子及對應於這些例子的圖式等的至少一部分可以與其他結構例子或圖式等適當地組合。At least a part of the structural examples shown in this embodiment and the drawings corresponding to these examples can be appropriately combined with other structural examples, drawings, and the like.
本實施方式的至少一部分可以與本說明書所記載的其他實施方式適當地組合而實施。At least a part of this embodiment mode can be implemented in combination with other embodiment modes described in this specification as appropriate.
實施方式4 在本實施方式中,參照圖式對能夠用於本發明的一個實施方式的顯示裝置的發光元件進行說明。 Embodiment 4 In this embodiment, a light emitting element that can be used in a display device according to one embodiment of the present invention will be described with reference to the drawings.
如圖31A所示,發光元件在一對電極(下部電極761及上部電極762)間包括EL層763。EL層763可以由層780、發光層771及層790等多個層構成。As shown in FIG. 31A , the light emitting element includes an EL layer 763 between a pair of electrodes (a lower electrode 761 and an upper electrode 762 ). The EL layer 763 can be composed of multiple layers such as the layer 780 , the light emitting layer 771 , and the layer 790 .
發光層771至少包含發光物質。The light-emitting layer 771 contains at least a light-emitting substance.
在下部電極761及上部電極762分別為陽極及陰極的情況下,層780包括含有電洞注入性高的物質的層(電洞注入層)、含有電洞傳輸性高的物質的層(電洞傳輸層)和含有電子阻擋性高的物質的層(電子障壁層)中的一個或多個。另外,層790包括含有電子注入性高的物質的層(電子注入層)、含有電子傳輸性高的物質的層(電子傳輸層)和含有電洞阻擋性高的物質的層(電洞障壁層)中的一個或多個。在下部電極761及上部電極762分別為陰極及陽極的情況下,層780和層790的結構與上述反轉。In the case where the lower electrode 761 and the upper electrode 762 are an anode and a cathode, respectively, the layer 780 includes a layer containing a substance with a high hole injection property (hole injection layer), a layer containing a substance with a high hole transport property (hole injection layer), and a layer with a high hole transport property (hole injection layer). transport layer) and a layer containing a substance with high electron barrier property (electron barrier layer). In addition, the layer 790 includes a layer containing a substance with high electron injection property (electron injection layer), a layer containing a substance with high electron transport property (electron transport layer), and a layer containing a substance with high hole blocking property (hole barrier layer). ) of one or more. When the lower electrode 761 and the upper electrode 762 are respectively a cathode and an anode, the structures of the layer 780 and the layer 790 are reversed from the above.
包括設置在一對電極間的層780、發光層771及層790的結構可以被用作單一的發光單元,在本說明書中將圖31A的結構稱為單結構。A structure including layer 780, light-emitting layer 771, and layer 790 disposed between a pair of electrodes can be used as a single light-emitting unit, and the structure of FIG. 31A is referred to as a single structure in this specification.
另外,圖31B示出圖31A所示的發光元件所包括的EL層763的變形例子。明確而言,圖31B所示的發光元件包括下部電極761上的層781、層781上的層782、層782上的發光層771、發光層771上的層791、層791上的層792及層792上的上部電極762。In addition, FIG. 31B shows a modified example of the EL layer 763 included in the light emitting element shown in FIG. 31A . Specifically, the light-emitting element shown in FIG. 31B includes a layer 781 on the lower electrode 761, a layer 782 on the layer 781, a light-emitting layer 771 on the layer 782, a layer 791 on the light-emitting layer 771, a layer 792 on the layer 791, and Upper electrode 762 on layer 792 .
在下部電極761及上部電極762分別為陽極及陰極的情況下,例如,層781、層782、層791及層792可以分別為電洞注入層、電洞傳輸層、電子傳輸層及電子注入層。另外,在下部電極761及上部電極762分別為陰極及陽極的情況下,層781、層782、層791及層792可以分別為電子注入層、電子傳輸層、電洞傳輸層及電洞注入層。藉由採用上述層結構,可以將載子高效地注入到發光層771,由此可以提高發光層771內的載子的再結合的效率。In the case where the lower electrode 761 and the upper electrode 762 are respectively an anode and a cathode, for example, the layer 781, the layer 782, the layer 791 and the layer 792 may be respectively a hole injection layer, a hole transport layer, an electron transport layer and an electron injection layer . In addition, in the case where the lower electrode 761 and the upper electrode 762 are the cathode and the anode respectively, the layer 781, the layer 782, the layer 791 and the layer 792 can be respectively an electron injection layer, an electron transport layer, a hole transport layer and a hole injection layer . By employing the above-mentioned layer structure, carriers can be efficiently injected into the light emitting layer 771 , thereby improving the efficiency of recombination of carriers in the light emitting layer 771 .
此外,如圖31C及圖31D所示,層780與層790之間設置有多個發光層(發光層771、發光層772、發光層773)的結構也是單結構的變形例子。注意,雖然圖31C及圖31D示出包括三層發光層的例子,但具有單結構的發光元件中的發光層可以為兩層,也可以為四層以上。另外,具有單結構的發光元件也可以在兩個發光層之間包括緩衝層。In addition, as shown in FIG. 31C and FIG. 31D , the structure in which multiple light-emitting layers (light-emitting layer 771 , light-emitting layer 772 , and light-emitting layer 773 ) are provided between layers 780 and 790 is also a modified example of a single structure. Note that although FIG. 31C and FIG. 31D show an example including three light-emitting layers, the number of light-emitting layers in a light-emitting element having a single structure may be two or four or more. In addition, a light-emitting element having a single structure may include a buffer layer between two light-emitting layers.
另外,如圖31E及圖31F所示,在本說明書等中多個發光單元(發光單元763a及發光單元763b)隔著電荷產生層785(也稱為中間層)串聯連接的結構被稱為串聯結構。另外,也可以將串聯結構稱為疊層結構。藉由採用串聯結構,可以實現能夠以高亮度發光的發光元件。此外,串聯結構由於與單結構相比可以降低為了得到相同的亮度的電流,所以可以提高可靠性。In addition, as shown in FIG. 31E and FIG. 31F , in this specification and the like, a structure in which a plurality of light-emitting units (light-emitting unit 763a and light-emitting unit 763b ) are connected in series via a charge generation layer 785 (also referred to as an intermediate layer) is referred to as a series connection structure. structure. In addition, the series structure may also be referred to as a laminated structure. By employing a tandem structure, a light emitting element capable of emitting light with high luminance can be realized. In addition, since the series structure can reduce the current required to obtain the same luminance compared with the single structure, reliability can be improved.
圖31D及圖31F示出顯示裝置包括重疊於發光元件的層764的例子。圖31D示出層764重疊於圖31C所示的發光元件的例子,圖31F示出層764重疊於圖31E所示的發光元件的例子。在圖31D及圖31F中,上部電極762使用透過可見光的導電膜以將光提取到上部電極762一側。31D and 31F show examples in which a display device includes a layer 764 overlapping a light-emitting element. FIG. 31D shows an example in which the layer 764 is overlaid on the light-emitting element shown in FIG. 31C , and FIG. 31F shows an example in which the layer 764 is overlaid on the light-emitting element shown in FIG. 31E . In FIGS. 31D and 31F , the upper electrode 762 uses a conductive film that transmits visible light to extract light to the upper electrode 762 side.
作為層764可以使用顏色轉換層和濾色片(彩色層)中的一者或兩者。One or both of a color conversion layer and a color filter (color layer) can be used as the layer 764 .
在圖31C及圖31D中,也可以將發射相同顏色的光的發光物質,甚至為相同發光物質用於發光層771、發光層772及發光層773。例如,也可以將發射藍色光的發光物質用於發光層771、發光層772及發光層773。關於呈現藍色光的子像素,可以提取發光元件所發射的藍色光。另外,關於呈現紅色光的子像素及呈現綠色光的子像素,藉由作為圖31D所示的層764設置顏色轉換層,可以使發光元件所發射的藍色光轉換為更長波長的光而提取為紅色光或綠色光。另外,作為層764較佳為使用顏色轉換層和彩色層的兩者。發光元件所發射的光的一部分有時不經顏色轉換層的轉換而透過。當經由彩色層提取透過顏色轉換層的光時,可以由彩色層吸收所希望的顏色光之外的光而提高子像素所呈現的光的色純度。In FIGS. 31C and 31D , luminescent substances that emit light of the same color, or even the same luminescent substance, may be used for the light-emitting layer 771 , the light-emitting layer 772 , and the light-emitting layer 773 . For example, a light-emitting substance that emits blue light may be used for the light-emitting layer 771 , the light-emitting layer 772 , and the light-emitting layer 773 . With regard to sub-pixels that exhibit blue light, blue light emitted by the light emitting element can be extracted. In addition, for the sub-pixels that emit red light and the sub-pixels that emit green light, by providing a color conversion layer as the layer 764 shown in FIG. For red light or green light. In addition, it is preferable to use both a color conversion layer and a color layer as the layer 764 . A part of the light emitted by the light-emitting element may be transmitted without being converted by the color conversion layer. When the light passing through the color conversion layer is extracted through the color layer, the color layer can absorb light other than the desired color light to improve the color purity of the light presented by the sub-pixel.
另外,在圖31C及圖31D中,也可以將發射彼此不同顏色的光的發光物質用於發光層771、發光層772及發光層773。在發光層771、發光層772及發光層773各自所發射的光處於補色關係時,可以得到白色發光。例如,具有單結構的發光元件較佳為包括含有發射藍色光的發光物質的發光層以及含有發射比藍色波長長的可見光的發光物質的發光層。In addition, in FIG. 31C and FIG. 31D , light-emitting substances that emit lights of different colors may be used for the light-emitting layer 771 , the light-emitting layer 772 , and the light-emitting layer 773 . When the light emitted by each of the light emitting layer 771, the light emitting layer 772 and the light emitting layer 773 is in a complementary color relationship, white light emission can be obtained. For example, a light-emitting element having a single structure preferably includes a light-emitting layer containing a light-emitting substance emitting blue light and a light-emitting layer containing a light-emitting substance emitting visible light longer in wavelength than blue.
作為圖31D所示的層764,也可以設置濾色片。藉由白色光透過濾色片,可以得到所希望的顏色的光。A color filter may also be provided as the layer 764 shown in FIG. 31D. By passing the white light through the color filter, the light of the desired color can be obtained.
例如,在具有單結構的發光元件包括三層發光層的情況下,較佳為包括含有發射紅色(R)光的發光物質的發光層、含有發射綠色(G)光的發光物質的發光層以及發射藍色(B)光的發光物質的發光層。作為發光層的疊層順序,可以採用從陽極一側依次層疊R、G、B的順序或從陽極一側依次層疊R、B、G的順序等。此時,也可以在R與G或B之間設置緩衝層。For example, in the case where a light-emitting element having a single structure includes three light-emitting layers, it is preferable to include a light-emitting layer containing a light-emitting substance emitting red (R) light, a light-emitting layer containing a light-emitting substance emitting green (G) light, and Luminescent layer of luminescent substance that emits blue (B) light. As the stacking order of the light emitting layer, the order of stacking R, G, and B sequentially from the anode side, or the stacking sequence of R, B, and G from the anode side, etc., can be employed. At this time, a buffer layer may be provided between R and G or B.
另外,例如在具有單結構的發光元件包括兩層發光層的情況下,較佳為採用包括含有發射藍色(B)光的發光物質的發光層以及含有發射黃色(Y)光的發光物質的發光層的結構。有時將該結構稱為BY單結構。In addition, for example, in the case where a light-emitting element having a single structure includes two light-emitting layers, it is preferable to use a light-emitting layer containing a light-emitting substance emitting blue (B) light and a light-emitting substance containing a light-emitting substance emitting yellow (Y) light. The structure of the light-emitting layer. This structure is sometimes referred to as the BY single structure.
白色發光元件較佳為包含兩種以上的發光物質。為了得到白色發光,選擇各發光處於補色關係的兩種以上的發光物質即可。例如,藉由使第一發光層的發光顏色與第二發光層的發光顏色處於補色關係,可以得到在發光元件整體上以白色發光的發光元件。包括三個以上的發光層的發光元件也是同樣的。The white light-emitting element preferably contains two or more kinds of light-emitting substances. In order to obtain white light emission, it is sufficient to select two or more kinds of light emitting substances whose light emission is in a complementary color relationship. For example, by making the emission color of the first light-emitting layer and the light-emission color of the second light-emitting layer in a complementary color relationship, it is possible to obtain a light-emitting element that emits white light as a whole. The same applies to a light-emitting element including three or more light-emitting layers.
注意,圖31C和圖31D中的層780及層790也可以分別獨立地採用圖31B所示的由兩層以上的層而成的疊層結構。Note that the layer 780 and the layer 790 in FIG. 31C and FIG. 31D may each independently adopt a laminated structure composed of two or more layers as shown in FIG. 31B .
在圖31E及圖31F中,也可以將發射相同顏色的光的發光物質,甚至為相同發光物質用於發光層771及發光層772。例如,在呈現各顏色的光的子像素所包括的發光元件中,也可以將發射藍色光的發光物質用於發光層771及發光層772。關於呈現藍色光的子像素,可以提取發光元件所發射的藍色光。另外,關於呈現紅色光的子像素及呈現綠色光的子像素,藉由作為圖31F所示的層764設置顏色轉換層,可以使發光元件所發射的藍色光轉換為更長波長的光而提取為紅色光或綠色光。另外,作為層764較佳為使用顏色轉換層和彩色層的兩者。In FIG. 31E and FIG. 31F , luminescent substances that emit light of the same color, or even the same luminescent substance, may be used for the light-emitting layer 771 and the light-emitting layer 772 . For example, a light-emitting substance that emits blue light may be used for the light-emitting layer 771 and the light-emitting layer 772 in the light-emitting elements included in the sub-pixels that emit light of each color. With regard to sub-pixels that exhibit blue light, blue light emitted by the light emitting element can be extracted. In addition, for the sub-pixels that emit red light and the sub-pixels that emit green light, by providing a color conversion layer as the layer 764 shown in FIG. For red light or green light. In addition, it is preferable to use both a color conversion layer and a color layer as the layer 764 .
另外,在將圖31E或圖31F所示的結構的發光元件用於呈現各顏色的子像素時,也可以根據子像素使用不同發光物質。明確而言,在呈現紅色光的子像素所包括的發光元件中,也可以將發射紅色光的發光物質用於發光層771及發光層772。同樣地,在呈現綠色光的子像素所包括的發光元件中,也可以將發射綠色光的發光物質用於發光層771及發光層772。在呈現藍色光的子像素所包括的發光元件中,也可以將發射藍色光的發光物質用於發光層771及發光層772。可以說,具有這種結構的顯示裝置使用具有串聯結構的發光元件並具有SBS結構。由此,具有串聯結構及SBS結構的兩者的優點。由此,可以實現高亮度發光而實現可靠性高的發光元件。In addition, when the light-emitting element with the structure shown in FIG. 31E or FIG. 31F is used for sub-pixels representing each color, different light-emitting substances may be used for each sub-pixel. Specifically, in the light-emitting element included in the sub-pixel that emits red light, a light-emitting substance that emits red light may be used for the light-emitting layer 771 and the light-emitting layer 772 . Similarly, in the light-emitting element included in the sub-pixel that emits green light, a light-emitting substance that emits green light may also be used for the light-emitting layer 771 and the light-emitting layer 772 . In the light-emitting element included in the sub-pixel that emits blue light, a light-emitting substance that emits blue light may be used for the light-emitting layer 771 and the light-emitting layer 772 . It can be said that a display device having such a structure uses light-emitting elements having a tandem structure and has an SBS structure. Accordingly, there are advantages of both the tandem structure and the SBS structure. Thereby, high-intensity light emission can be realized and a highly reliable light-emitting element can be realized.
另外,在圖31E及圖31F中,也可以將發射彼此不同顏色的光的發光物質用於發光層771及發光層772。在發光層771所發射的光和發光層772所發射的光處於補色關係時,可以得到白色發光。作為圖31F所示的層764也可以設置濾色片。藉由白色光透過濾色片,可以得到所希望的顏色的光。In addition, in FIG. 31E and FIG. 31F , light-emitting substances that emit light of different colors may be used for the light-emitting layer 771 and the light-emitting layer 772 . When the light emitted from the light emitting layer 771 and the light emitted from the light emitting layer 772 are in a complementary color relationship, white light emission can be obtained. A color filter may also be provided as the layer 764 shown in FIG. 31F. By passing the white light through the color filter, the light of the desired color can be obtained.
注意,雖然圖31E及圖31F示出發光單元763a包括一層發光層771且發光單元763b包括一層發光層772的例子,但不侷限於此。發光單元763a及發光單元763b各自也可以包括兩層以上的發光層。Note that although FIG. 31E and FIG. 31F show examples in which the light emitting unit 763a includes a light emitting layer 771 and the light emitting unit 763b includes a light emitting layer 772, they are not limited thereto. Each of the light emitting unit 763a and the light emitting unit 763b may include two or more light emitting layers.
另外,雖然圖31E及圖31F例示出包括兩個發光單元的發光元件,但不侷限於此。發光元件也可以包括三個以上的發光單元。注意,也可以將包括兩個發光單元的結構及包括三個發光單元的結構分別稱為兩級串聯結構及三級串聯結構。In addition, although FIG. 31E and FIG. 31F illustrate a light emitting element including two light emitting units, the present invention is not limited thereto. The light emitting element may also include three or more light emitting units. Note that the structure including two light emitting units and the structure including three light emitting units may also be referred to as a two-stage series structure and a three-stage series structure, respectively.
另外,在圖31E及圖31F中,發光單元763a包括層780a、發光層771及層790a,發光單元763b包括層780b、發光層772及層790b。In addition, in FIG. 31E and FIG. 31F , the light emitting unit 763a includes a layer 780a, a light emitting layer 771, and a layer 790a, and the light emitting unit 763b includes a layer 780b, a light emitting layer 772, and a layer 790b.
在下部電極761及上部電極762分別為陽極及陰極的情況下,層780a及層780b各自包括電洞注入層、電洞傳輸層和電子障壁層中的一個或多個。另外,層790a及層790b各自包括電子注入層、電子傳輸層和電洞障壁層中的一個或多個。在下部電極761及上部電極762分別為陰極及陽極的情況下,層780a和層790a的結構與上述反轉,層780b和層790b的結構也與上述反轉。Where lower electrode 761 and upper electrode 762 are an anode and a cathode, respectively, layers 780a and 780b each include one or more of a hole injection layer, a hole transport layer, and an electron barrier layer. In addition, layer 790a and layer 790b each include one or more of an electron injection layer, an electron transport layer, and a hole barrier layer. When the lower electrode 761 and the upper electrode 762 are a cathode and an anode, respectively, the structures of the layers 780a and 790a are reversed from the above, and the structures of the layers 780b and 790b are also reversed.
在下部電極761及上部電極762分別為陽極及陰極的情況下,例如,層780a包括電洞注入層及電洞注入層上的電洞傳輸層,而且還可以包括電洞傳輸層上的電子障壁層。另外,層790a包括電子傳輸層,而且還可以包括發光層771與電子傳輸層之間的電洞障壁層。另外,層780b包括電洞傳輸層,而且還可以包括電洞傳輸層上的電子障壁層。另外,層790b包括電子傳輸層及電子傳輸層上的電子注入層,而且還可以包括發光層772與電子傳輸層之間的電洞障壁層。在下部電極761及上部電極762分別為陰極及陽極的情況下,例如,層780a包括電子注入層及電子注入層上的電子傳輸層,而且還可以包括電子傳輸層上的電洞障壁層。另外,層790a包括電洞傳輸層,而且還可以包括發光層771與電洞傳輸層之間的電子障壁層。另外,層780b包括電子傳輸層,而且還可以包括電子傳輸層上的電洞障壁層。另外,層790b包括電洞傳輸層及電洞傳輸層上的電洞注入層,而且還可以包括發光層772與電洞傳輸層之間的電子障壁層。In the case where the lower electrode 761 and the upper electrode 762 are an anode and a cathode, respectively, for example, the layer 780a includes a hole injection layer and a hole transport layer on the hole injection layer, and may also include an electron barrier on the hole transport layer. layer. In addition, the layer 790a includes an electron transport layer, and may further include a hole barrier layer between the light emitting layer 771 and the electron transport layer. In addition, layer 780b includes a hole transport layer, and may also include an electron barrier layer on the hole transport layer. In addition, the layer 790b includes an electron transport layer and an electron injection layer on the electron transport layer, and may further include a hole barrier layer between the light emitting layer 772 and the electron transport layer. In the case where the lower electrode 761 and the upper electrode 762 are respectively a cathode and an anode, for example, the layer 780a includes an electron injection layer and an electron transport layer on the electron injection layer, and may further include a hole barrier layer on the electron transport layer. In addition, the layer 790a includes a hole transport layer, and may further include an electron barrier layer between the light emitting layer 771 and the hole transport layer. In addition, layer 780b includes an electron transport layer, and may further include a hole barrier layer on the electron transport layer. In addition, the layer 790b includes a hole transport layer and a hole injection layer on the hole transport layer, and may further include an electron barrier layer between the light emitting layer 772 and the hole transport layer.
另外,當製造具有串聯結構的發光元件時,兩個發光單元隔著電荷產生層785層疊。電荷產生層785至少具有電荷產生區域。電荷產生層785具有在對一對電極間施加電壓時向兩個發光單元中的一方注入電子且向另一方注入電洞的功能。In addition, when manufacturing a light-emitting element having a tandem structure, two light-emitting units are laminated with the charge generation layer 785 interposed therebetween. The charge generation layer 785 has at least a charge generation region. The charge generating layer 785 has a function of injecting electrons into one of the two light emitting cells and injecting holes into the other when a voltage is applied between the pair of electrodes.
另外,作為串聯結構的發光元件的一個例子,可以舉出圖32A至圖32C所示的結構。In addition, as an example of a light-emitting element having a series structure, the structures shown in FIGS. 32A to 32C can be mentioned.
圖32A示出包括三個發光單元的結構。在圖32A中,多個發光單元(發光單元763a、發光單元763b及發光單元763c)隔著電荷產生層785彼此串聯連接。另外,發光單元763a包括層780a、發光層771及層790a,發光單元763b包括層780b、發光層772及層790b,發光單元763c包括層780c、發光層773及層790c。注意,層780c可以採用可用於層780a及層780b的結構,層790c可以採用可用於層790a及層790b的結構。FIG. 32A shows a structure including three light emitting units. In FIG. 32A , a plurality of light-emitting units (a light-emitting unit 763 a , a light-emitting unit 763 b , and a light-emitting unit 763 c ) are connected in series with each other via a charge generation layer 785 . In addition, the light emitting unit 763a includes a layer 780a, a light emitting layer 771, and a layer 790a, the light emitting unit 763b includes a layer 780b, a light emitting layer 772, and a layer 790b, and the light emitting unit 763c includes a layer 780c, a light emitting layer 773, and a layer 790c. Note that layer 780c can take a structure that can be used for layer 780a and layer 780b, and layer 790c can take a structure that can be used for layer 790a and layer 790b.
在圖32A中,發光層771、發光層772及發光層773較佳為包含發射相同顏色的光的發光物質。明確而言,可以採用如下結構:發光層771、發光層772及發光層773都包含紅色(R)發光物質的結構(所謂R\R\R三級串聯結構);發光層771、發光層772及發光層773都包含綠色(G)發光物質的結構(所謂G\G\G三級串聯結構);或者發光層771、發光層772及發光層773都包含藍色(B)發光物質的結構(所謂B\B\B三級串聯結構)。注意,“a\b”表示包含發射a的光的發光物質的發光單元上隔著電荷產生層設置有包含發射b的光的發光物質的發光單元,a、b表示顏色。In FIG. 32A, the luminescent layer 771, the luminescent layer 772, and the luminescent layer 773 preferably include luminescent substances that emit light of the same color. Specifically, the following structure can be adopted: a structure in which the light-emitting layer 771, the light-emitting layer 772, and the light-emitting layer 773 all contain red (R) light-emitting substances (the so-called R\R\R three-stage series structure); the light-emitting layer 771, the light-emitting layer 772 and the luminescent layer 773 all contain green (G) luminescent substances (so-called G\G\G three-level series structure); or the luminescent layer 771, luminescent layer 772 and luminescent layer 773 all contain blue (B) luminescent substances. (The so-called B\B\B three-stage series structure). Note that "a\b" means that a light-emitting unit including a light-emitting substance that emits light of a is provided with a light-emitting unit that includes a light-emitting substance that emits light of b via a charge generation layer, and a and b represent colors.
另外,在圖32A中,也可以將發射不同顏色的光的發光物質用於發光層771、發光層772和發光層773中的一部分或全部。作為發光層771、發光層772和發光層773的發光顏色的組合,例如可以舉出其中任兩個為藍色(B)且剩下一個為黃色(Y)的結構以及其中任一個為紅色(R),另一個為綠色(G)且剩下一個為藍色(B)的結構。In addition, in FIG. 32A , light-emitting substances that emit light of different colors may be used for some or all of the light-emitting layer 771 , the light-emitting layer 772 , and the light-emitting layer 773 . As a combination of the light-emitting colors of the light-emitting layer 771, the light-emitting layer 772, and the light-emitting layer 773, for example, a structure in which any two are blue (B) and the remaining one is yellow (Y) and any one of them is red ( R), the other in green (G) and the remaining one in blue (B).
注意,發光單元的結構不侷限於圖32A所示的結構。例如,如圖32B所示,也可以採用層疊包括多個發光層的發光單元的串聯型發光元件。在圖32B中,兩個發光單元(發光單元763a及發光單元763b)隔著電荷產生層785串聯連接。另外,發光單元763a包括層780a、發光層771a、發光層771b、發光層771c以及層790a,發光單元763b包括層780b、發光層772a、發光層772b、發光層772c以及層790b。Note that the structure of the light emitting unit is not limited to the structure shown in Fig. 32A. For example, as shown in FIG. 32B , a tandem-type light-emitting element in which light-emitting units including a plurality of light-emitting layers are stacked may be used. In FIG. 32B , two light emitting units (light emitting unit 763 a and light emitting unit 763 b ) are connected in series via a charge generation layer 785 . In addition, the light emitting unit 763a includes a layer 780a, a light emitting layer 771a, a light emitting layer 771b, a light emitting layer 771c, and a layer 790a, and the light emitting unit 763b includes a layer 780b, a light emitting layer 772a, a light emitting layer 772b, a light emitting layer 772c, and a layer 790b.
在圖32B中,關於發光層771a、發光層771b及發光層771c,選擇各自處於補色關係的發光物質,來使發光單元763a具有能夠實現白色發光(W)的結構。另外,關於發光層772a、發光層772b及發光層772c,也選擇各自處於補色關係的發光物質,來使發光單元763b具有能夠實現白色發光(W)的結構。也就是說,圖32B所示的結構是W\W兩級串聯結構。注意,對處於補色關係的發光物質的疊層順序沒有特別的限制。實施者可以適當地選擇最合適的疊層順序。雖然未圖示,但也可以採用W\W\W三級串聯結構或四級以上的串聯結構。In FIG. 32B , for the light-emitting layer 771 a , the light-emitting layer 771 b , and the light-emitting layer 771 c , light-emitting substances in a complementary color relationship are selected, so that the light-emitting unit 763 a has a structure capable of realizing white light emission (W). In addition, for the light-emitting layer 772a, the light-emitting layer 772b, and the light-emitting layer 772c, light-emitting substances in a complementary color relationship are also selected, so that the light-emitting unit 763b has a structure capable of realizing white light emission (W). That is to say, the structure shown in FIG. 32B is a W\W two-stage series structure. Note that there is no particular limitation on the stacking order of the luminescent substances in a complementary color relationship. The implementer can properly select the most suitable stacking sequence. Although not shown in the figure, it is also possible to adopt a W\W\W three-stage series structure or a four-stage or more series structure.
另外,在使用具有串聯結構的發光元件的情況下,可以舉出:包括發射黃色(Y)光的發光單元及發射藍色(B)光的發光單元的B\Y或Y\B兩級串聯結構;包括發射紅色(R)光及綠色(G)光的發光單元及發射藍色(B)光的發光單元的R·G\B或B\R·G兩級串聯結構;依次包括發射藍色(B)光的發光單元、發射黃色(Y)光的發光單元及發射藍色(B)光的發光單元的B\Y\B三級串聯結構;依次包括發射藍色(B)光的發光單元、發射黃綠色(YG)光的發光單元及發射藍色(B)光的發光單元的B\YG\B三級串聯結構;以及依次包括發射藍色(B)光的發光單元、發射綠色(G)光的發光單元及發射藍色(B)光的發光單元的B\G\B三級串聯結構等。注意,“a·b”表示一個發光單元包含發射a的光的發光物質及發射b的光的發光物質。In addition, in the case of using a light-emitting element with a series structure, it can be mentioned: B\Y or Y\B two-stage series connection including a light-emitting unit that emits yellow (Y) light and a light-emitting unit that emits blue (B) light Structure; R·G\B or B\R·G two-stage series structure including a light-emitting unit emitting red (R) light and green (G) light and a light-emitting unit emitting blue (B) light; The B\Y\B three-stage series structure of a light-emitting unit emitting yellow (B) light, a light-emitting unit emitting yellow (Y) light, and a light-emitting unit emitting blue (B) light; A light-emitting unit, a light-emitting unit that emits yellow-green (YG) light, and a light-emitting unit that emits blue (B) light in a B\YG\B three-stage series structure; and sequentially includes a light-emitting unit that emits blue (B) light, emits Green (G) light-emitting unit and blue (B) light-emitting unit B\G\B three-stage series structure, etc. Note that "a·b" indicates that one light-emitting unit includes a light-emitting substance that emits light of a and a light-emitting substance that emits light of b.
另外,如圖32C所示,也可以組合包括一個發光層的發光單元和包括多個發光層的發光單元。In addition, as shown in FIG. 32C, a light-emitting unit including one light-emitting layer and a light-emitting unit including a plurality of light-emitting layers may also be combined.
明確而言,在圖32C所示的結構中,多個發光單元(發光單元763a、發光單元763b及發光單元763c)隔著電荷產生層785彼此串聯連接。另外,發光單元763a包括層780a、發光層771及層790a,發光單元763b包括層780b、發光層772a、發光層772b、發光層772c及層790b,發光單元763c包括層780c、發光層773及層790c。Specifically, in the structure shown in FIG. 32C , a plurality of light-emitting units (light-emitting unit 763 a , light-emitting unit 763 b , and light-emitting unit 763 c ) are connected in series with each other via the charge generation layer 785 . In addition, the light-emitting unit 763a includes a layer 780a, a light-emitting layer 771, and a layer 790a, the light-emitting unit 763b includes a layer 780b, a light-emitting layer 772a, a light-emitting layer 772b, a light-emitting layer 772c, and a layer 790b, and the light-emitting unit 763c includes a layer 780c, a light-emitting layer 773, and a layer 790c.
例如,在圖32C所示的結構中可以採用B\R·G·YG\B三級串聯結構,其中發光單元763a為發射藍色(B)光的發光單元,發光單元763b為發射紅色(R)光、綠色(G)光及黃綠色(YG)光的發光單元,並且發光單元763c為發射藍色(B)光的發光單元。For example, in the structure shown in Figure 32C, a B\R·G·YG\B three-stage series structure can be adopted, where the light-emitting unit 763a is a light-emitting unit that emits blue (B) light, and the light-emitting unit 763b is a light-emitting unit that emits red (R ) light, green (G) light, and yellow-green (YG) light, and the light emitting unit 763c is a light emitting unit that emits blue (B) light.
例如,作為發光單元的疊層數及顏色順序,可以舉出從陽極一側層疊B和Y的兩級結構、層疊B和發光單元X的兩級結構、層疊B、Y和B的三級結構、層疊B、X和B的三級結構。作為發光單元X中的發光層的疊層數及顏色順序,可以採用從陽極一側層疊R和Y的兩層結構、層疊R和G的兩層結構、層疊G和R的兩層結構、層疊G、R和G的三層結構或層疊R、G和R的三層結構等。另外,也可以在兩個發光層之間設置其他層。For example, the number of stacked layers and the order of colors of the light-emitting units include a two-stage structure in which B and Y are stacked from the anode side, a two-stage structure in which B and light-emitting units are stacked, and a three-stage structure in which B, Y, and B are stacked. , The tertiary structure of stacking B, X and B. As the number of stacked layers and color order of the light emitting layers in the light emitting unit X, a two-layer structure in which R and Y are stacked from the anode side, a two-layer structure in which R and G are stacked, a two-layer structure in which G and R are stacked, a stacked A three-layer structure of G, R, and G, or a three-layer structure of stacking R, G, and R, etc. In addition, other layers may be provided between the two light emitting layers.
接著,說明可用於發光元件的材料。Next, materials that can be used for the light-emitting element will be described.
作為下部電極761和上部電極762中的提取光一側的電極使用透過可見光的導電膜。另外,作為不提取光一側的電極較佳為使用反射可見光的導電膜。另外,在顯示裝置包括發射紅外光的發光元件時,較佳為作為提取光一側的電極使用透過可見光及紅外光的導電膜且作為不提取光一側的電極使用反射可見光及紅外光的導電膜。A conductive film that transmits visible light is used as an electrode on the light extraction side of the lower electrode 761 and the upper electrode 762 . In addition, it is preferable to use a conductive film that reflects visible light as the electrode on the side where light is not extracted. In addition, when the display device includes a light-emitting element that emits infrared light, it is preferable to use a conductive film that transmits visible light and infrared light as the electrode on the light extraction side and use a conductive film that reflects visible light and infrared light as the electrode that does not extract light.
另外,不提取光一側的電極也可以使用透過可見光的導電膜。在此情況下,較佳為在反射層與EL層763間配置該電極。換言之,EL層763的發光也可以被該反射層反射而從顯示裝置提取。In addition, a conductive film that transmits visible light may be used for the electrode on the side where light is not extracted. In this case, it is preferable to arrange the electrode between the reflective layer and the EL layer 763 . In other words, light emitted from the EL layer 763 can also be reflected by the reflective layer and extracted from the display device.
作為形成發光元件的一對電極的材料,可以適當地使用金屬、合金、導電化合物及它們的混合物等。作為該材料,具體地可以舉出鋁、鎂、鈦、鉻、錳、鐵、鈷、鎳、銅、鎵、鋅、銦、錫、鉬、鉭、鎢、鈀、金、鉑、銀、釔及釹等金屬以及適當地組合它們的合金。另外,作為該材料,可以舉出銦錫氧化物、含有矽的銦錫氧化物、銦鋅氧化物、含有鎢的銦鋅氧化物等。另外,作為該材料,可以舉出含諸如鋁、鎳和鑭的合金(Al-Ni-La)等含鋁合金、銀和鎂的合金及銀、鈀和銅的合金(APC)等。另外,作為該材料,可以舉出以上沒有列舉的屬於元素週期表中第1族或第2族的元素(例如,鋰、銫、鈣、鍶)、銪、鐿等稀土金屬、適當地組合它們的合金以及石墨烯等。As a material for forming a pair of electrodes of a light-emitting element, metals, alloys, conductive compounds, mixtures thereof, and the like can be suitably used. Specific examples of such materials include aluminum, magnesium, titanium, chromium, manganese, iron, cobalt, nickel, copper, gallium, zinc, indium, tin, molybdenum, tantalum, tungsten, palladium, gold, platinum, silver, and yttrium. And metals such as neodymium and alloys combining them appropriately. In addition, examples of the material include indium tin oxide, silicon-containing indium tin oxide, indium zinc oxide, tungsten-containing indium zinc oxide, and the like. In addition, examples of the material include an alloy containing aluminum, nickel, and lanthanum (Al—Ni—La), an alloy containing silver and magnesium, an alloy of silver, palladium, and copper (APC), and the like. In addition, as the material, elements belonging to Group 1 or Group 2 of the periodic table (for example, lithium, cesium, calcium, strontium), europium, ytterbium and other rare earth metals not listed above can be mentioned, and these can be combined appropriately. alloys and graphene, etc.
發光元件較佳為採用微腔結構。因此,例如發光元件所包括的一對電極中的一個較佳為對可見光具有透過性及反射性的電極(透反射電極),另一個較佳為對可見光具有反射性的電極(反射電極)。當發光元件具有微腔結構時,可以在兩個電極之間使從發光層得到的發光諧振,並且可以增強從發光元件發射的光。The light emitting element preferably adopts a microcavity structure. Therefore, for example, one of the pair of electrodes included in the light-emitting element is preferably an electrode that is transparent and reflective to visible light (transflective electrode), and the other is preferably an electrode that is reflective to visible light (reflective electrode). When the light emitting element has a microcavity structure, light emission from the light emitting layer can be resonated between two electrodes, and light emitted from the light emitting element can be enhanced.
另外,半透過-半反射電極例如可以具有可被用作反射電極的導電層和可被用作對可見光具有透過性的電極(也稱為透明電極)的導電層的疊層結構。In addition, the semi-transmissive-semi-reflective electrode may have, for example, a laminated structure of a conductive layer that can be used as a reflective electrode and a conductive layer that can be used as an electrode that transmits visible light (also referred to as a transparent electrode).
透明電極的光穿透率為40%以上。例如,較佳為將可見光(波長為400nm以上且小於750nm的光)穿透率為40%以上的電極用作發光元件的透明電極。半透過-半反射電極的可見光反射率為10%以上且95%以下,較佳為30%以上且80%以下。反射電極的可見光反射率為40%以上且100%以下,較佳為70%以上且100%以下。另外,這些電極的電阻率較佳為1×10 -2Ωcm以下。 The light transmittance of the transparent electrode is above 40%. For example, an electrode having a transmittance of 40% or more for visible light (light having a wavelength of 400 nm or more and less than 750 nm) is preferably used as the transparent electrode of the light emitting element. The visible light reflectance of the transflective-semi-reflective electrode is not less than 10% and not more than 95%, preferably not less than 30% and not more than 80%. The visible light reflectance of the reflective electrode is not less than 40% and not more than 100%, preferably not less than 70% and not more than 100%. In addition, the resistivity of these electrodes is preferably 1×10 -2 Ωcm or less.
發光元件至少包括發光層。另外,作為發光層以外的層,發光元件還可以包括包含電洞注入性高的物質、電洞傳輸性高的物質、電洞阻擋材料、電子傳輸性高的物質、電子阻擋材料、電子注入性高的物質或雙極性的物質(電子傳輸性及電洞傳輸性高的物質)等的層。例如,發光元件除了發光層以外還可以包括電洞注入層、電洞傳輸層、電洞障壁層、電荷產生層、電子障壁層、電子傳輸層和電子注入層中的一層以上。The light emitting element includes at least a light emitting layer. In addition, as a layer other than the light-emitting layer, the light-emitting element may also include a substance with high hole-injection property, a substance with high-hole-transport property, a hole-blocking material, a substance with high electron-transport property, an electron-blocking material, an electron-injection property A layer of high material or bipolar material (substance with high electron transport property and high hole transport property). For example, the light-emitting element may include one or more of a hole injection layer, a hole transport layer, a hole barrier layer, a charge generation layer, an electron barrier layer, an electron transport layer, and an electron injection layer in addition to the light-emitting layer.
發光元件可以使用低分子化合物或高分子化合物,還可以包含無機化合物。構成發光元件的層可以藉由蒸鍍法(包括真空蒸鍍法)、轉印法、印刷法、噴墨法或塗佈法等方法形成。A light-emitting element may use a low-molecular compound or a high-molecular compound, and may also contain an inorganic compound. The layers constituting the light-emitting element can be formed by methods such as evaporation (including vacuum evaporation), transfer, printing, inkjet, or coating.
發光層包含一種或多種發光物質。作為發光物質,適當地使用呈現藍色、紫色、藍紫色、綠色、黃綠色、黃色、橙色或紅色等發光顏色的物質。此外,作為發光物質,也可以使用發射近紅外光的物質。The luminescent layer contains one or more luminescent substances. As the light-emitting substance, a substance showing a light-emitting color such as blue, purple, blue-violet, green, yellow-green, yellow, orange, or red is suitably used. In addition, as a light-emitting substance, a substance emitting near-infrared light can also be used.
作為發光物質,可以舉出螢光材料、磷光材料、TADF材料及量子點材料等。Examples of the luminescent substance include fluorescent materials, phosphorescent materials, TADF materials, and quantum dot materials.
作為螢光材料,例如可以舉出芘衍生物、蒽衍生物、聯伸三苯衍生物、茀衍生物、咔唑衍生物、二苯并噻吩衍生物、二苯并呋喃衍生物、二苯并喹㗁啉衍生物、喹㗁啉衍生物、吡啶衍生物、嘧啶衍生物、菲衍生物及萘衍生物等。Examples of fluorescent materials include pyrene derivatives, anthracene derivatives, triphenyl derivatives, fennel derivatives, carbazole derivatives, dibenzothiophene derivatives, dibenzofuran derivatives, and dibenzoquinone derivatives. Ozoline derivatives, quinoline derivatives, pyridine derivatives, pyrimidine derivatives, phenanthrene derivatives and naphthalene derivatives, etc.
作為磷光材料,例如可以舉出具有4H-三唑骨架、1H-三唑骨架、咪唑骨架、嘧啶骨架、吡嗪骨架或吡啶骨架的有機金屬錯合物(尤其是銥錯合物)、以具有拉電子基團的苯基吡啶衍生物為配體的有機金屬錯合物(尤其是銥錯合物)、鉑錯合物、稀土金屬錯合物等。As the phosphorescent material, for example, organometallic complexes (especially iridium complexes) having a 4H-triazole skeleton, a 1H-triazole skeleton, an imidazole skeleton, a pyrimidine skeleton, a pyrazine skeleton, or a pyridine skeleton, and Phenylpyridine derivatives with electron-withdrawing groups are ligands for organometallic complexes (especially iridium complexes), platinum complexes, rare earth metal complexes, etc.
發光層除了發光物質(客體材料)以外還可以包含一種或多種有機化合物(主體材料、輔助材料等)。作為一種或多種有機化合物,可以使用電洞傳輸性高的物質(電洞傳輸材料)和電子傳輸性高的物質(電子傳輸材料)中的一者或兩者。作為電洞傳輸材料,可以使用下述可用於電洞傳輸層的電洞傳輸性高的材料。作為電子傳輸材料,可以使用下述可用於電子傳輸層的電子傳輸性高的材料。此外,作為一種或多種有機化合物,也可以使用雙極性材料或TADF材料。The light-emitting layer may contain one or more organic compounds (host material, auxiliary material, etc.) in addition to the light-emitting substance (guest material). As one or more organic compounds, one or both of a substance with high hole transport property (hole transport material) and a substance with high electron transport property (electron transport material) can be used. As the hole transport material, the following materials with high hole transport properties that can be used for the hole transport layer can be used. As the electron-transporting material, the following materials having high electron-transporting properties that can be used for the electron-transporting layer can be used. Furthermore, as one or more organic compounds, bipolar materials or TADF materials can also be used.
例如,發光層較佳為包含磷光材料、容易形成激態錯合物的電洞傳輸材料及電子傳輸材料的組合。藉由採用這樣的結構,可以高效地得到利用從激態錯合物到發光物質(磷光材料)的能量轉移的ExTET(Exciplex-Triplet Energy Transfer:激態錯合物-三重態能量轉移)的發光。藉由選擇形成發射與發光物質的最低能量一側的吸收帶的波長重疊的光的激態錯合物的組合,可以使能量轉移變得順利,從而高效地得到發光。藉由採用上述結構,可以同時實現發光元件的高效率、低電壓驅動以及長壽命。For example, the light-emitting layer preferably comprises a combination of a phosphorescent material, a hole transport material that easily forms an excimer complex, and an electron transport material. By adopting such a structure, the luminescence of ExTET (Exciplex-Triplet Energy Transfer: Exciplex-Triplet Energy Transfer) utilizing the energy transfer from the exciplex to the light-emitting substance (phosphorescent material) can be efficiently obtained . By selecting a combination to form an exciplex that emits light overlapping with the wavelength of the absorption band on the lowest energy side of the luminescent substance, energy transfer can be smoothed and luminescence can be efficiently obtained. By adopting the above-mentioned structure, high efficiency, low-voltage driving, and long life of the light-emitting element can be simultaneously realized.
電洞注入層是將電洞從陽極注入到電洞傳輸層的包含電洞注入性高的材料的層。作為電洞注入性高的材料,可以舉出芳香胺化合物以及包含電洞傳輸材料及受體材料(電子受體材料)的複合材料等。The hole injection layer is a layer made of a material with high hole injection property that injects holes from the anode into the hole transport layer. Examples of materials with high hole injection properties include aromatic amine compounds, composite materials including hole transport materials and acceptor materials (electron acceptor materials), and the like.
作為電洞傳輸材料,可以使用下述可用於電洞傳輸層的電洞傳輸性高的材料。As the hole transport material, the following materials with high hole transport properties that can be used for the hole transport layer can be used.
作為受體材料,例如可以使用屬於元素週期表中的第4族至第8族的金屬的氧化物。明確而言,可以舉出氧化鉬、氧化釩、氧化鈮、氧化鉭、氧化鉻、氧化鎢、氧化錳及氧化錸。特別較佳為使用氧化鉬,因為其在大氣中也穩定,吸濕性低,並且容易處理。另外,也可以使用含有氟的有機受體材料。此外,也可以使用醌二甲烷衍生物、四氯苯醌衍生物及六氮雜聯伸三苯衍生物等有機受體材料。As the acceptor material, for example, oxides of metals belonging to Groups 4 to 8 in the periodic table of elements can be used. Specifically, molybdenum oxide, vanadium oxide, niobium oxide, tantalum oxide, chromium oxide, tungsten oxide, manganese oxide, and rhenium oxide are mentioned. Molybdenum oxide is particularly preferred because it is also stable in the atmosphere, has low hygroscopicity, and is easy to handle. In addition, organic acceptor materials containing fluorine can also be used. In addition, organic acceptor materials such as quinodimethane derivatives, chloranil derivatives, and hexaazatriphenyl derivatives can also be used.
例如,作為電洞注入性高的材料也可以使用包含電洞傳輸材料及上述屬於元素週期表中第4族至第8族的金屬的氧化物(典型的是氧化鉬)的材料。For example, a material containing a hole transport material and an oxide (typically molybdenum oxide) of the metal belonging to Groups 4 to 8 of the periodic table may be used as a material having a high hole injection property.
電洞傳輸層是將從陽極藉由電洞注入層注入的電洞傳輸到發光層的層。電洞傳輸層是包含電洞傳輸材料的層。作為電洞傳輸材料,較佳為採用電洞移動率為1×10 -6cm 2/Vs以上的物質。注意,只要電洞傳輸性比電子傳輸性高,就可以使用上述以外的物質。作為電洞傳輸材料,較佳為使用富π電子型雜芳族化合物(例如咔唑衍生物、噻吩衍生物或呋喃衍生物等)或者芳香胺(包含芳香胺骨架的化合物)等電洞傳輸性高的材料。 The hole transport layer is a layer that transports holes injected from the anode through the hole injection layer to the light emitting layer. The hole transport layer is a layer containing a hole transport material. As the hole transport material, it is preferable to use a substance having a hole mobility of 1×10 −6 cm 2 /Vs or higher. Note that substances other than the above may be used as long as the hole-transport property is higher than the electron-transport property. As the hole transport material, it is preferable to use hole transport properties such as heteroaromatic compounds rich in π electrons (such as carbazole derivatives, thiophene derivatives, or furan derivatives) or aromatic amines (compounds containing an aromatic amine skeleton). high material.
電子障壁層以接觸於發光層的方式設置。電子障壁層是具有電洞傳輸性並包含能夠阻擋電子的材料的層。可以將上述電洞傳輸材料中的具有電子阻擋性的材料用於電子障壁層。The electron barrier layer is provided so as to be in contact with the light emitting layer. The electron barrier layer is a layer having hole transport properties and containing a material capable of blocking electrons. Among the above-mentioned hole transport materials, materials having electron blocking properties can be used for the electron barrier layer.
電子障壁層具有電洞傳輸性,所以也可以被稱為電洞傳輸層。另外,電洞傳輸層中的具有電子阻擋性的層也可以被稱為電子障壁層。The electron barrier layer has hole transport properties, so it can also be called a hole transport layer. In addition, the electron-blocking layer in the hole transport layer may also be referred to as an electron barrier layer.
電子傳輸層是將從陰極藉由電子注入層注入的電子傳輸到發光層的層。電子傳輸層是包含電子傳輸材料的層。作為電子傳輸材料,較佳為採用電子移動率為1×10 -6cm 2/Vs以上的物質。注意,只要電子傳輸性比電洞傳輸性高,就可以使用上述以外的物質。作為電子傳輸材料,可以使用具有喹啉骨架的金屬錯合物、具有苯并喹啉骨架的金屬錯合物、具有㗁唑骨架的金屬錯合物或具有噻唑骨架的金屬錯合物等,還可以使用㗁二唑衍生物、三唑衍生物、咪唑衍生物、㗁唑衍生物、噻唑衍生物、啡啉衍生物、具有喹啉配體的喹啉衍生物、苯并喹啉衍生物、喹㗁啉衍生物、二苯并喹㗁啉衍生物、吡啶衍生物、聯吡啶衍生物、嘧啶衍生物或含氮雜芳族化合物等缺π電子型雜芳族化合物等電子傳輸性高的材料。 The electron transport layer is a layer that transports electrons injected from the cathode through the electron injection layer to the light emitting layer. The electron transport layer is a layer containing an electron transport material. As the electron transport material, it is preferable to use a substance having an electron mobility of 1×10 −6 cm 2 /Vs or higher. Note that substances other than the above may be used as long as the electron-transport property is higher than the hole-transport property. As the electron transport material, metal complexes having a quinoline skeleton, metal complexes having a benzoquinoline skeleton, metal complexes having a oxazole skeleton, or metal complexes having a thiazole skeleton can be used, and Diazole derivatives, triazole derivatives, imidazole derivatives, oxazole derivatives, thiazole derivatives, phenanthroline derivatives, quinoline derivatives having a quinoline ligand, benzoquinoline derivatives, quinoline derivatives, and quinoline derivatives can be used. Materials with high electron transport properties such as oxoline derivatives, dibenzoquinoline derivatives, pyridine derivatives, bipyridine derivatives, pyrimidine derivatives, or nitrogen-containing heteroaromatic compounds, such as π-electron-deficient heteroaromatic compounds.
電洞障壁層以接觸於發光層的方式設置。電洞障壁層是具有電子傳輸性並包含能夠阻擋電洞的材料的層。可以將上述電子傳輸材料中的具有電洞阻擋性的材料用於電洞障壁層。The hole barrier layer is provided so as to be in contact with the light emitting layer. The hole barrier layer is a layer having electron transport properties and containing a material capable of blocking holes. Among the above-mentioned electron transport materials, materials having hole barrier properties can be used for the hole barrier layer.
電洞障壁層具有電子傳輸性,所以也可以被稱為電子傳輸層。另外,電子傳輸層中的具有電洞阻擋性的層也可以被稱為電洞障壁層。The hole barrier layer has electron transport properties, so it can also be called an electron transport layer. In addition, the layer having hole blocking properties in the electron transport layer may also be referred to as a hole barrier layer.
電子注入層是將電子從陰極注入到電子傳輸層的包含電子注入性高的材料的層。作為電子注入性高的材料,可以使用鹼金屬、鹼土金屬或者它們的化合物。作為電子注入性高的材料,也可以使用包含電子傳輸材料及施體材料(電子施體材料)的複合材料。The electron injection layer is a layer containing a material with high electron injection property that injects electrons from the cathode into the electron transport layer. As a material having a high electron injection property, an alkali metal, an alkaline earth metal, or a compound thereof can be used. As a material with high electron injection properties, a composite material including an electron transport material and a donor material (electron donor material) can also be used.
另外,較佳的是,電子注入性高的材料的LUMO能階與用於陰極的材料的功函數值之差小(具體的是0.5eV以下)。In addition, it is preferable that the difference between the LUMO energy level of the material with high electron injectability and the work function value of the material used for the cathode is small (specifically, 0.5 eV or less).
電子注入層例如可以使用鋰、銫、鐿、氟化鋰(LiF)、氟化銫(CsF)、氟化鈣(CaF x,x為任意數)、8-(羥基喔啉)鋰(簡稱:Liq)、2-(2-吡啶基)苯酚鋰(簡稱:LiPP)、2-(2-吡啶基)-3-羥基吡啶(pyridinolato)鋰(簡稱:LiPPy)、4-苯基-2-(2-吡啶基)苯酚鋰(簡稱:LiPPP)、鋰氧化物(LiO x)或碳酸銫等鹼金屬、鹼土金屬或它們的化合物。另外,電子注入層也可以具有兩層以上的疊層結構。作為該疊層結構,例如可以舉出作為第一層使用氟化鋰且作為第二層設置鐿的結構。 For example, lithium, cesium, ytterbium, lithium fluoride (LiF), cesium fluoride (CsF), calcium fluoride (CaF x , x is any number), 8-(hydroxyoxaline) lithium (abbreviation: Liq), 2-(2-pyridyl) lithium phenoxide (abbreviation: LiPP), 2-(2-pyridyl)-3-hydroxypyridinolato (pyridinolato) lithium (abbreviation: LiPPy), 4-phenyl-2-( 2-pyridyl) Lithium phenate (abbreviation: LiPPP), lithium oxide (LiO x ) or cesium carbonate and other alkali metals, alkaline earth metals or their compounds. In addition, the electron injection layer may have a laminated structure of two or more layers. As this laminated structure, for example, a structure in which lithium fluoride is used as the first layer and ytterbium is provided as the second layer is mentioned.
電子注入層也可以包含電子傳輸材料。例如,可以將具有非共用電子對並具有缺電子雜芳環的化合物用於電子傳輸材料。明確而言,可以使用具有吡啶環、二嗪環(嘧啶環、吡嗪環、嗒𠯤環)以及三嗪環中的至少一個的化合物。The electron injection layer may also contain an electron transport material. For example, a compound having an unshared electron pair and having an electron-deficient heteroaromatic ring can be used for the electron transport material. Specifically, a compound having at least one of a pyridine ring, a diazine ring (pyrimidine ring, pyrazine ring, pyridoxine ring) and a triazine ring can be used.
具有非共用電子對的有機化合物的最低空分子軌域(LUMO:Lowest Unoccupied Molecular Orbital)能階較佳為-3.6eV以上且-2.3eV以下。一般來說,可以使用CV(循環伏安法)、光電子能譜法、吸收光譜法或逆光電子能譜法等估計有機化合物的最高佔據分子軌域(HOMO:Highest Occupied Molecular Orbital)能階及LUMO能階。The lowest unoccupied molecular orbital (LUMO: Lowest Unoccupied Molecular Orbital) energy level of an organic compound having an unshared electron pair is preferably not less than -3.6 eV and not more than -2.3 eV. In general, the highest occupied molecular orbital (HOMO: Highest Occupied Molecular Orbital) energy level and LUMO of organic compounds can be estimated by CV (cyclic voltammetry), photoelectron spectroscopy, absorption spectroscopy or inverse photoelectron spectroscopy. Energy level.
例如,可以將4,7-二苯基-1,10-啡啉(簡稱:BPhen)、2,9-二(萘-2-基)-4,7-二苯基-1,10-啡啉(簡稱:NBPhen)、2,2’-(1,3-亞苯)雙(9-苯基-1,10-啡啉)(簡稱:mPPhen2P)、二喹㗁啉并[2,3-a:2’,3’-c]吩嗪(簡稱:HATNA)或2,4,6-三[3’-(吡啶-3-基)聯苯-3-基]-1,3,5-三嗪(簡稱:TmPPPyTz)等用於具有非共用電子對的有機化合物。此外,與BPhen相比,NBPhen具有高玻璃化轉變點(Tg),從而具有高耐熱性。For example, 4,7-diphenyl-1,10-phenanthroline (abbreviation: BPhen), 2,9-di(naphthalene-2-yl)-4,7-diphenyl-1,10-phenanthroline can be phenoline (abbreviation: NBPhen), 2,2'-(1,3-phenylene)bis(9-phenyl-1,10-phenanthroline) (abbreviation: mPPhen2P), diquinoline[2,3- a: 2',3'-c]phenazine (abbreviation: HATNA) or 2,4,6-tris[3'-(pyridin-3-yl)biphenyl-3-yl]-1,3,5- Triazine (abbreviation: TmPPPyTz) and the like are used for organic compounds with non-shared electron pairs. In addition, NBPhen has a high glass transition point (Tg) compared to BPhen, resulting in high heat resistance.
如上所述,電荷產生層至少具有電荷產生區域。電荷產生區域較佳為包括受體材料,例如較佳為包括可應用於上述電洞注入層的電洞傳輸材料及受體材料。As described above, the charge generation layer has at least a charge generation region. The charge generation region preferably includes an acceptor material, for example, preferably includes a hole transport material and an acceptor material that can be applied to the above-mentioned hole injection layer.
另外,電荷產生層較佳為包括含有電子注入性高的材料的層。該層也可以被稱為電子注入緩衝層。電子注入緩衝層較佳為設置在電荷產生區域與電子傳輸層間。藉由設置電子注入緩衝層,可以降低電荷產生區域與電子傳輸層間的注入能障,所以將產生在電荷產生區域中的電子容易注入到電子傳輸層中。In addition, the charge generation layer preferably includes a layer containing a material with high electron injection properties. This layer may also be referred to as an electron injection buffer layer. The electron injection buffer layer is preferably disposed between the charge generation region and the electron transport layer. By providing the electron injection buffer layer, the injection energy barrier between the charge generation region and the electron transport layer can be reduced, so the electrons generated in the charge generation region can be easily injected into the electron transport layer.
電子注入緩衝層較佳為包含鹼金屬或鹼土金屬,例如可以包含鹼金屬的化合物或鹼土金屬的化合物。明確而言,電子注入緩衝層較佳為包含含有鹼金屬和氧的無機化合物或者含有鹼土金屬和氧的無機化合物,更佳為包含含有鋰和氧的無機化合物(例如,氧化鋰(Li 2O))。除此之外,作為電子注入緩衝層可以適當地使用可應用於上述電子注入層的材料。 The electron injection buffer layer preferably contains an alkali metal or an alkaline earth metal, for example, may contain an alkali metal compound or an alkaline earth metal compound. Specifically, the electron injection buffer layer preferably contains an inorganic compound containing an alkali metal and oxygen or an inorganic compound containing an alkaline earth metal and oxygen, more preferably an inorganic compound containing lithium and oxygen (for example, lithium oxide ( Li2O )). Besides, as the electron injection buffer layer, materials applicable to the above-mentioned electron injection layer can be appropriately used.
電荷產生層較佳為包括含有電子傳輸性高的材料的層。該層也可以被稱為電子中繼層。電子中繼層較佳為設置在電荷產生區域與電子注入緩衝層間。在電荷產生層不包括電子注入緩衝層時,電子中繼層較佳為設置在電荷產生區域與電子傳輸層間。電子中繼層具有抑制電荷產生區域與電子注入緩衝層(或電子傳輸層)的相互作用並順利地傳遞電子的功能。The charge generation layer preferably includes a layer containing a material with high electron transport properties. This layer may also be referred to as an electronic relay layer. The electron relay layer is preferably disposed between the charge generation region and the electron injection buffer layer. When the charge generation layer does not include the electron injection buffer layer, the electron relay layer is preferably disposed between the charge generation region and the electron transport layer. The electron relay layer has the function of suppressing the interaction of the charge generation region with the electron injection buffer layer (or electron transport layer) and smoothly transferring electrons.
作為電子中繼層,較佳為使用酞青銅(II)(簡稱:CuPc)等酞青類材料或者具有金屬-氧鍵合和芳香配體的金屬錯合物。As the electron relay layer, it is preferable to use phthalocyanine materials such as phthalocyanine copper (II) (abbreviation: CuPc) or metal complexes having metal-oxygen bonding and aromatic ligands.
注意,有時例如根據剖面形狀或特性不能明確地區別上述電荷產生區域、電子注入緩衝層及電子中繼層。Note that sometimes, the above-described charge generation region, electron injection buffer layer, and electron relay layer cannot be clearly distinguished, for example, by cross-sectional shape or characteristics.
另外,電荷產生層也可以包括施體材料代替受體材料。例如,作為電荷產生層也可以包括含有可應用於上述電子注入層的電子傳輸材料和施體材料的層。In addition, the charge generating layer may also include a donor material instead of an acceptor material. For example, a layer containing an electron transport material and a donor material applicable to the above-mentioned electron injection layer may also be included as the charge generation layer.
在層疊發光單元時,藉由在兩個發光單元間設置電荷產生層,可以抑制驅動電壓的上升。When stacking light-emitting units, by providing a charge generation layer between two light-emitting units, it is possible to suppress an increase in driving voltage.
本實施方式所示的結構例子及對應於這些例子的圖式等的至少一部分可以與其他結構例子或圖式等適當地組合。At least a part of the structural examples shown in this embodiment and the drawings corresponding to these examples can be appropriately combined with other structural examples, drawings, and the like.
本實施方式的至少一部分可以與本說明書所記載的其他實施方式適當地組合而實施。At least a part of this embodiment mode can be implemented in combination with other embodiment modes described in this specification as appropriate.
10:電子裝置 11a:基板 11b:基板 12a:層 12b:層 13a:基板 13b:基板 14:黏合層 15:基板 16:基板 27a:像素 27b:像素 27:像素 31:外殼 32:固定工具 34a:光 34aB:光 34aG:光 34aR:光 34b:光 34bB:光 34bG:光 34bR:光 34c:光 34:光 35L:透鏡 35R:透鏡 35:透鏡 36L:鏡架 36R:鏡架 36:鏡架 37a:顯示部 37aL:顯示部 37aR:顯示部 37b:顯示部 37bL:顯示部 37bR:顯示部 37c:顯示部 37L:顯示部 37R:顯示部 37:顯示部 40:層 41a:顯示裝置 41aL:顯示裝置 41aR:顯示裝置 41b:顯示裝置 41bL:顯示裝置 41bR:顯示裝置 42a:閘極驅動器電路 42aL:閘極驅動器電路 42aR:閘極驅動器電路 42b:閘極驅動器電路 42bL:閘極驅動器電路 42bR:閘極驅動器電路 43a:源極驅動器電路 43aL:源極驅動器電路 43aR:源極驅動器電路 43b:源極驅動器電路 43bL:源極驅動器電路 43bR:源極驅動器電路 44:光 47L:區域 47R:區域 47:區域 50:層 51:像素電路 57:通訊電路 59:控制電路 60:層 61B:發光元件 61G:發光元件 61R:發光元件 61W:發光元件 61:發光元件 63B:發光元件 63G:發光元件 63R:發光元件 63W:發光元件 63:發光元件 100A:顯示裝置 100B:顯示裝置 100C:顯示裝置 100D:顯示裝置 100E:顯示裝置 100F:顯示裝置 100G:顯示裝置 100H:顯示裝置 100I:顯示裝置 100J:顯示裝置 100K:顯示裝置 100L:顯示裝置 100M:顯示裝置 107:顯示部 109:像素 110a:子像素 110b:子像素 110c:子像素 110d:子像素 110e:子像素 117:遮光層 120:基板 122:黏合層 124a:像素 124b:像素 140:連接部 153:絕緣層 156:黏合層 162:絕緣層 164:電路 165:佈線 166:導電層 168:導電層 171:導電層 172B:EL層 172Bf:EL膜 172G:EL層 172Gf:EL膜 172R:EL層 172Rf:EL膜 172W:EL層 172:EL層 173:導電層 174:共用層 176:IC 177:FPC 180B:光阻遮罩 180G:光阻遮罩 180R:光阻遮罩 181B:FMM 181G:FMM 181R:FMM 181:FMM 183B:彩色層 183G:彩色層 183R:彩色層 183:彩色層 201:電晶體 204:連接部 205:電晶體 209:電晶體 210:電晶體 211:絕緣層 213:絕緣層 214:絕緣層 215:絕緣層 218:絕緣層 221:導電層 222a:導電層 222b:導電層 223:導電層 225:絕緣層 231i:通道形成區域 231n:低電阻區域 231:半導體層 240:電容器 241:導電層 242:連接層 243:絕緣層 245:導電層 251:導電層 252:導電層 254:絕緣層 255a:絕緣層 255b:絕緣層 255c:絕緣層 256:插頭 261:絕緣層 262:絕緣層 263:絕緣層 264:絕緣層 265:絕緣層 270B:犧牲層 270Bf:犧牲膜 270G:犧牲層 270Gf:犧牲膜 270R:犧牲層 270Rf:犧牲膜 270:犧牲層 271f:保護膜 271:保護層 272:絕緣層 273:保護層 274a:導電層 274b:導電層 274:插頭 275:插頭 276:絕緣層 277:微透鏡陣列 278f:絕緣膜 278:絕緣層 279B:犧牲層 279Bf:犧牲膜 279G:犧牲層 279Gf:犧牲膜 279R:犧牲層 279Rf:犧牲膜 280:顯示模組 290:FPC 301A:基板 301B:基板 301:基板 310A:電晶體 310B:電晶體 310:電晶體 311:導電層 312:低電阻區域 313:絕緣層 314:絕緣層 315:元件分離層 320A:電晶體 320B:電晶體 320:電晶體 321:半導體層 323:絕緣層 324:導電層 325:導電層 326:絕緣層 327:導電層 328:絕緣層 329:絕緣層 331:基板 332:絕緣層 335:絕緣層 336:絕緣層 341:導電層 342:導電層 343:插頭 344:絕緣層 345:絕緣層 346:絕緣層 347:凸塊 348:黏合層 363:層 761:下部電極 762:上部電極 763a:發光單元 763b:發光單元 763c:發光單元 763:EL層 764:層 771a:發光層 771b:發光層 771c:發光層 771:發光層 772a:發光層 772b:發光層 772c:發光層 772:發光層 773:發光層 780a:層 780b:層 780c:層 780:層 781:層 782:層 785:電荷產生層 790a:層 790b:層 790c:層 790:層 791:層 792:層 10: Electronic device 11a: Substrate 11b: Substrate 12a: layer 12b: layer 13a: Substrate 13b: Substrate 14: Adhesive layer 15: Substrate 16: Substrate 27a: Pixel 27b: Pixel 27: Pixels 31: shell 32: Fixing tool 34a: light 34aB: light 34aG: light 34aR: light 34b: light 34bB: light 34bG: light 34bR: light 34c: light 34: light 35L: lens 35R: lens 35: lens 36L: frame 36R: mirror frame 36: mirror frame 37a: display part 37aL: display part 37aR: display part 37b: display part 37bL: display part 37bR: display unit 37c: display part 37L: display part 37R: display part 37: Display part 40: layers 41a: display device 41aL: display device 41aR: display device 41b: display device 41bL: display device 41bR: display device 42a: Gate driver circuit 42aL: Gate driver circuit 42aR: Gate driver circuit 42b: Gate driver circuit 42bL: Gate driver circuit 42bR: Gate driver circuit 43a: Source driver circuit 43aL: Source driver circuit 43aR: Source driver circuit 43b: Source driver circuit 43bL: Source driver circuit 43bR: Source driver circuit 44: light 47L: area 47R: Area 47: area 50: layers 51: Pixel circuit 57: Communication circuit 59: Control circuit 60: layers 61B: Light emitting element 61G: Light emitting element 61R: Light emitting element 61W: light emitting element 61: Light emitting element 63B: Light emitting element 63G: Light emitting element 63R: Light emitting element 63W: light emitting element 63:Light-emitting element 100A: Display device 100B: display device 100C: display device 100D: display device 100E: display device 100F: Display device 100G: display device 100H: display device 100I: display device 100J: display device 100K: display device 100L: display device 100M: display device 107: display part 109: pixels 110a: sub-pixel 110b: sub-pixel 110c: sub-pixel 110d: sub-pixel 110e: sub-pixel 117: shading layer 120: Substrate 122: Adhesive layer 124a: pixel 124b: pixel 140: connection part 153: insulation layer 156: Adhesive layer 162: insulation layer 164: circuit 165: Wiring 166: conductive layer 168: conductive layer 171: Conductive layer 172B: EL layer 172Bf:EL film 172G:EL layer 172Gf:EL film 172R: EL layer 172Rf:EL film 172W: EL layer 172:EL layer 173: conductive layer 174: Shared layer 176:IC 177: FPC 180B: Photoresist mask 180G: photoresist mask 180R: photoresist mask 181B: FMM 181G:FMM 181R:FMM 181:FMM 183B: color layer 183G: color layer 183R: color layer 183: color layer 201: Transistor 204: connection part 205: Transistor 209: Transistor 210: Transistor 211: insulating layer 213: insulation layer 214: insulating layer 215: insulating layer 218: insulation layer 221: conductive layer 222a: conductive layer 222b: conductive layer 223: conductive layer 225: insulating layer 231i: channel formation area 231n: low resistance area 231: semiconductor layer 240: Capacitor 241: conductive layer 242: Connection layer 243: insulating layer 245: conductive layer 251: conductive layer 252: conductive layer 254: insulating layer 255a: insulating layer 255b: insulating layer 255c: insulating layer 256: plug 261: insulating layer 262: insulating layer 263: insulating layer 264: insulating layer 265: insulating layer 270B: sacrificial layer 270Bf: sacrificial film 270G: sacrificial layer 270Gf: sacrificial film 270R: sacrificial layer 270Rf: sacrificial film 270: sacrificial layer 271f: Protective film 271: protective layer 272: insulation layer 273: protective layer 274a: conductive layer 274b: Conductive layer 274: plug 275: plug 276: insulating layer 277: microlens array 278f: insulating film 278: insulation layer 279B: sacrificial layer 279Bf: sacrificial film 279G: sacrificial layer 279Gf: sacrificial film 279R: sacrificial layer 279Rf: sacrificial film 280: display module 290: FPC 301A: Substrate 301B: Substrate 301: Substrate 310A: Transistor 310B: Transistor 310: Transistor 311: conductive layer 312: low resistance area 313: insulating layer 314: insulating layer 315: component separation layer 320A: Transistor 320B: Transistor 320: Transistor 321: semiconductor layer 323: insulating layer 324: conductive layer 325: conductive layer 326: insulating layer 327: conductive layer 328: insulating layer 329: insulating layer 331: Substrate 332: insulating layer 335: insulating layer 336: insulating layer 341: conductive layer 342: conductive layer 343: plug 344: insulating layer 345: insulating layer 346: insulating layer 347: Bump 348: Adhesive layer 363: layer 761: lower electrode 762: Upper electrode 763a: Lighting unit 763b: Lighting unit 763c: Lighting unit 763:EL layer 764: layer 771a: luminous layer 771b: Emissive layer 771c: luminous layer 771: luminous layer 772a: luminous layer 772b: luminous layer 772c: luminous layer 772: luminescent layer 773: luminous layer 780a: layers 780b: layer 780c: layers 780: layer 781: layer 782: layer 785: Charge generation layer 790a: layers 790b: layer 790c: layers 790: layer 791: layer 792: layer
[圖1A]是示出電子裝置的結構例子的立體圖。[圖1B]是示出顯示部的結構例子的立體圖。 [圖2A]至[圖2C]是示出顯示裝置的結構例子的剖面圖。 [圖3A]至[圖3C]是示出顯示裝置的結構例子的剖面圖。 [圖4A]及[圖4B]是示出顯示裝置的結構例子的剖面圖。 [圖5A]及[圖5B]是示出顯示裝置的結構例子的方塊圖。 [圖6A]及[圖6B]是示出顯示裝置的結構例子的立體圖。 [圖7]是示出顯示裝置的結構例子的立體圖。 [圖8]是示出電子裝置的結構例子的方塊圖。 [圖9A]至[圖9C]是示出顯示裝置的結構例子的剖面圖。 [圖10A]至[圖10C]是示出顯示裝置的結構例子的剖面圖。 [圖11A]至[圖11D]是示出顯示裝置的製造方法例子的剖面圖。 [圖12A]至[圖12F]是示出顯示裝置的製造方法例子的剖面圖。 [圖13A]至[圖13D]是示出顯示裝置的製造方法例子的剖面圖。 [圖14A]至[圖14D]是示出顯示裝置的製造方法例子的剖面圖。 [圖15A]至[圖15G]是示出像素的結構例子的平面圖。 [圖16A]至[圖16K]是示出像素的結構例子的平面圖。 [圖17]是示出顯示模組的結構例子的立體圖。 [圖18A]及[圖18B]是示出顯示裝置的結構例子的剖面圖。 [圖19]是示出顯示裝置的結構例子的剖面圖。 [圖20]是示出顯示裝置的結構例子的剖面圖。 [圖21]是示出顯示裝置的結構例子的剖面圖。 [圖22]是示出顯示裝置的結構例子的剖面圖。 [圖23]是示出顯示裝置的結構例子的剖面圖。 [圖24]是示出顯示裝置的結構例子的立體圖。 [圖25A]是示出顯示裝置的結構例子的剖面圖。[圖25B]及[圖25C]是示出電晶體的結構例子的剖面圖。 [圖26]是示出顯示裝置的結構例子的剖面圖。 [圖27]是示出顯示裝置的結構例子的剖面圖。 [圖28]是示出顯示裝置的結構例子的剖面圖。 [圖29]是示出顯示裝置的結構例子的剖面圖。 [圖30]是示出顯示裝置的結構例子的剖面圖。 [圖31A]至[圖31F]是示出發光元件的結構例子的剖面圖。 [圖32A]至[圖32C]是示出發光元件的結構例子的剖面圖。 [ Fig. 1A ] is a perspective view showing a structural example of an electronic device. [ Fig. 1B ] is a perspective view showing a structural example of a display unit. [ FIG. 2A ] to [ FIG. 2C ] are cross-sectional views showing structural examples of the display device. [ FIG. 3A ] to [ FIG. 3C ] are cross-sectional views showing structural examples of the display device. [ FIG. 4A ] and [ FIG. 4B ] are cross-sectional views showing structural examples of a display device. [ FIG. 5A ] and [ FIG. 5B ] are block diagrams showing a configuration example of a display device. [FIG. 6A] and [FIG. 6B] are perspective views showing a configuration example of a display device. [ Fig. 7 ] is a perspective view showing a structural example of a display device. [ Fig. 8 ] is a block diagram showing a structural example of an electronic device. [ FIG. 9A ] to [ FIG. 9C ] are cross-sectional views showing structural examples of the display device. [ FIG. 10A ] to [ FIG. 10C ] are cross-sectional views showing structural examples of the display device. [ FIG. 11A ] to [ FIG. 11D ] are cross-sectional views illustrating an example of a method of manufacturing a display device. [ FIG. 12A ] to [ FIG. 12F ] are cross-sectional views illustrating an example of a method of manufacturing a display device. [ FIG. 13A ] to [ FIG. 13D ] are cross-sectional views illustrating an example of a method of manufacturing a display device. [ FIG. 14A ] to [ FIG. 14D ] are cross-sectional views illustrating an example of a manufacturing method of a display device. [ FIG. 15A ] to [ FIG. 15G ] are plan views showing structural examples of pixels. [ FIG. 16A ] to [ FIG. 16K ] are plan views showing structural examples of pixels. [ Fig. 17 ] is a perspective view showing a structural example of a display module. [ FIG. 18A ] and [ FIG. 18B ] are cross-sectional views showing structural examples of a display device. [ Fig. 19 ] is a cross-sectional view showing a structural example of a display device. [ Fig. 20 ] is a cross-sectional view showing a structural example of a display device. [ Fig. 21 ] is a cross-sectional view showing a structural example of a display device. [ Fig. 22 ] is a cross-sectional view showing a structural example of a display device. [ Fig. 23 ] is a cross-sectional view showing a structural example of a display device. [ Fig. 24 ] is a perspective view showing a structural example of a display device. [ Fig. 25A ] is a cross-sectional view showing a structural example of a display device. [ FIG. 25B ] and [ FIG. 25C ] are cross-sectional views showing structural examples of transistors. [ Fig. 26 ] is a cross-sectional view showing a structural example of a display device. [ Fig. 27 ] is a cross-sectional view showing a structural example of a display device. [ Fig. 28 ] is a cross-sectional view showing a structural example of a display device. [ Fig. 29 ] is a cross-sectional view showing a structural example of a display device. [ Fig. 30 ] is a cross-sectional view showing a structural example of a display device. [ FIG. 31A ] to [ FIG. 31F ] are cross-sectional views showing structural examples of light emitting elements. [ FIG. 32A ] to [ FIG. 32C ] are cross-sectional views showing structural examples of light emitting elements.
11a:基板 11a: Substrate
11b:基板 11b: Substrate
12a:層 12a: layer
12b:層 12b: layer
13a:基板 13a: Substrate
34a:光 34a: light
34b:光 34b: light
37:顯示部 37: Display part
37a:顯示部 37a: display part
37b:顯示部 37b: display part
41a:顯示裝置 41a: display device
41b:顯示裝置 41b: display device
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KR (1) | KR20240127991A (en) |
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JP2009058897A (en) * | 2007-09-03 | 2009-03-19 | Hitachi Displays Ltd | Display device |
JP2010015077A (en) * | 2008-07-07 | 2010-01-21 | Seiko Epson Corp | Display device |
TWI607670B (en) * | 2009-01-08 | 2017-12-01 | 半導體能源研究所股份有限公司 | Light emitting device and electronic device |
CN105974587B (en) * | 2011-11-24 | 2018-09-28 | 松下知识产权经营株式会社 | Head-mounted display device |
WO2017037560A1 (en) * | 2015-08-28 | 2017-03-09 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10388900B2 (en) * | 2016-07-28 | 2019-08-20 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting element, light-emitting device, electronic device, and lighting device |
US20200033613A1 (en) | 2018-07-26 | 2020-01-30 | Varjo Technologies Oy | Display apparatus and method of displaying using curved optical combiner |
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