TW202325552A - Tape attaching device - Google Patents

Tape attaching device Download PDF

Info

Publication number
TW202325552A
TW202325552A TW110149230A TW110149230A TW202325552A TW 202325552 A TW202325552 A TW 202325552A TW 110149230 A TW110149230 A TW 110149230A TW 110149230 A TW110149230 A TW 110149230A TW 202325552 A TW202325552 A TW 202325552A
Authority
TW
Taiwan
Prior art keywords
patch
adhesive film
moving component
pick
suction head
Prior art date
Application number
TW110149230A
Other languages
Chinese (zh)
Other versions
TWI787021B (en
Inventor
陳正欽
林柏育
Original Assignee
荌益國際有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荌益國際有限公司 filed Critical 荌益國際有限公司
Priority to TW110149230A priority Critical patent/TWI787021B/en
Application granted granted Critical
Publication of TWI787021B publication Critical patent/TWI787021B/en
Publication of TW202325552A publication Critical patent/TW202325552A/en

Links

Abstract

A tape attaching device includes a tape, a first film, and a tape pick-and-place mechanism. The tape includes a first surface and a second surface opposite to the first surface. The first film includes a third surface and, a fourth surface opposite to the third surface, and a side surface connecting the third surface and the fourth surface. The fixed object us attached to the third surface of the first film. The tape pick-and-place mechanism is configured to pick up the tape and fixes the first surface of the tape. The tape pick-and-place mechanism is further configured to attach the second surface of the tape onto the third surface of the film. The second surface of the tape extends outward from the side surface of the film to expose a portion of the second surface.

Description

貼片貼附裝置SMD attaching device

本發明係關於一種貼片貼附裝置,特別是關於一種用以自動地貼附一貼片於貼附有一固定物的一第一膠膜上,並且該貼片用以輔助一撕膠機構自該固定物撕除該第一膠膜。The present invention relates to a patch attaching device, in particular to a device for automatically attaching a patch to a first adhesive film attached to a fixture, and the patch is used to assist a tearing mechanism to automatically The fixing object removes the first adhesive film.

晶圓(Wafer)經過切割後形成多個裸晶(Die),由於切割成形的裸晶之間的多個間距極小,當裸晶在運送或是取晶的過程中,若是發生碰撞,裸晶的側邊便會發生碎裂。The wafer (Wafer) is cut to form multiple dies. Since the distance between the cut dies is extremely small, when the dies are in the process of being transported or picked up, if there is a collision, the dies will be damaged. The sides will be broken.

為解決切割後的裸晶可能發生的碰撞問題,在一切割晶圓的製程之後,會進行晶圓擴片製程。在晶圓切割前,其底面預先貼附有具延展性的擴片膠膜,並且在晶圓被切割、被分離出裸晶後,透過擴片裝置將擴片膠膜均勻的延展,便能夠同時地均勻拉開裸晶之間的間距。In order to solve the possible collision problem of the diced bare wafers, a wafer expansion process is performed after a wafer dicing process. Before the wafer is diced, the bottom surface of the wafer is pre-attached with a stretchable expansion film, and after the wafer is cut and separated from the bare die, the expansion film is evenly stretched through the expansion device, which can At the same time, the distance between the dies is evenly stretched.

當裸晶之間的間距被擴片膠膜拉開後,裸晶貼附有擴片膠膜的相對側會再貼附未受延展的移轉膠膜以固定裸晶之間的間距。當裸晶被貼附移轉膠膜後,擴片膠膜便必須被撕除。When the distance between the dies is stretched by the spreader film, the opposite side of the die to which the spreader film is attached is then attached with an unstretched transfer film to fix the distance between the dies. After the die is attached with the transfer film, the expansion film must be removed.

由於切割後的裸晶的外輪廓大致呈現為圓形,因此擴片膠膜的側邊也會裁切為圓形。而圓形的擴片膠膜與其貼附的裸晶在擴片膠膜的側邊部分的接觸面積將隨著該晶圓的尺寸提升而增大,而接觸面積增大即意味著擴片膠膜的撕除難度增加,使得擴片膠膜的側邊部分更不容易透過任何自動化設備撕起。Since the outer contour of the diced bare die is approximately circular, the side of the expansion film will also be cut into a circular shape. The contact area between the circular spreader film and the attached die on the side of the spreader film will increase as the size of the wafer increases, and the increase in the contact area means that the spreader The increased difficulty of film removal makes the side portions of the expander film less likely to be torn off by any automated equipment.

在現有的撕膠機構在撕膠過程中,往往會需要經由人工先行將擴片膠膜的側邊部分撕離裸晶一定的面積,才能讓撕膠機構接續撕膠過程。在產線中,由於連續的撕膠過程需要在人工以及撕膠機構之間交替接續,因此現有技術的撕膠過程不利於自動化製造或是無法有效提升生產效率。During the adhesive tearing process of the existing adhesive tearing mechanism, it is often necessary to manually tear the side part of the expansion film away from the bare die by a certain area, so that the adhesive tearing mechanism can continue the adhesive tearing process. In the production line, since the continuous glue tearing process needs to be alternately continued between manual and glue tearing mechanisms, the glue tearing process in the prior art is not conducive to automated manufacturing or cannot effectively improve production efficiency.

為解決習知技術在一晶圓擴片製程後的一撕膠機構在一撕膠過程中所面臨的問題,本發明提供一種貼片貼附裝置。該貼片貼附裝置包括一貼片、一第一膠膜、一固定物、以及一貼片取放機構。該貼片包括一第一表面以及相對該第一表面的一第二表面。該第一膠膜包括一第三表面、相對該第三表面的一第四表面、以及連接該第三表面以及該第四表面的一側邊。該固定物貼附於該第一膠膜的該第三表面。該貼片取放機構,用以撿取該貼片並且固定該貼片的該第一表面。該貼片取放機構還用以將該貼片的該第二表面貼附於該第一膠膜的該第三表面上。該貼片的該第二表面自該第一膠膜的該側邊向外延伸,以暴露出該貼片的一部分該第二表面。當以一撕膠機構撕除該第一膠膜時,該撕膠機構連接於該第一膠膜的該第四表面以及該貼片的該第二表面,該撕膠機構透過該貼片撕起該第一膠膜,使得該第一膠膜與該固定物分離。In order to solve the problems faced by a glue tearing mechanism after a wafer expansion process in the prior art during a glue tearing process, the present invention provides a chip attaching device. The patch sticking device includes a patch, a first adhesive film, a fixture, and a patch pick-and-place mechanism. The patch includes a first surface and a second surface opposite to the first surface. The first adhesive film includes a third surface, a fourth surface opposite to the third surface, and a side connecting the third surface and the fourth surface. The fixing object is attached to the third surface of the first adhesive film. The patch pick-and-place mechanism is used to pick up the patch and fix the first surface of the patch. The patch pick-and-place mechanism is also used to attach the second surface of the patch to the third surface of the first adhesive film. The second surface of the patch extends outward from the side of the first adhesive film to expose a part of the second surface of the patch. When tearing off the first adhesive film with a glue tearing mechanism, the glue tearing mechanism is connected to the fourth surface of the first glue film and the second surface of the patch, and the glue tearing mechanism tears through the patch. lifting the first adhesive film so that the first adhesive film is separated from the fixed object.

在一實施例中,該貼片的該第二表面包括一第一區域以及一第二區域,該第一區域凸出該第一膠膜的該側邊,該第二區域貼附於該第一膠膜的該第三表面上。In one embodiment, the second surface of the sticker includes a first area and a second area, the first area protrudes from the side of the first adhesive film, the second area is attached to the first on the third surface of an adhesive film.

在一實施例中,該貼片取放機構包括一吸頭,該吸頭用以撿取該貼片或是釋放該貼片於該第一膠膜上。In one embodiment, the patch pick-and-place mechanism includes a suction head for picking up the patch or releasing the patch on the first adhesive film.

在一實施例中,本發明之貼片貼附裝置還包括一貼片供給機構。該貼片供給機構用以供給該貼片予該貼片取放機構撿取。In one embodiment, the patch attaching device of the present invention further includes a patch supply mechanism. The patch supply mechanism is used to supply the patch to the patch pick-and-place mechanism to pick up.

在一實施例中,該貼片取放機構還包括一第一移動組件。該第一移動組件連接該吸頭。該貼片取放機構的該吸頭經由該第一移動組件往返該貼片供給機構以及該第一膠膜的該第三表面之間。In one embodiment, the patch pick-and-place mechanism further includes a first moving component. The first moving component is connected with the suction head. The suction head of the patch pick-and-place mechanism goes back and forth between the patch supply mechanism and the third surface of the first adhesive film via the first moving component.

在一實施例中,該貼片取放機構還包括一第二移動組件。該第一移動組件經由該第二移動組件連接該吸頭。該貼片取放機構的該吸頭經由該第一移動組件以及該第二移動組件往返該貼片供給機構以及該第一膠膜的該第三表面之間。In one embodiment, the patch pick-and-place mechanism further includes a second moving component. The first moving component is connected to the suction head via the second moving component. The suction head of the patch pick-and-place mechanism goes back and forth between the patch supply mechanism and the third surface of the first adhesive film via the first moving component and the second moving component.

在一實施例中,該第二移動組件經由該第一移動組件沿著一第一軸移動,以及該吸頭經由該第二移動組件沿著一第二軸移動。該第一軸與該第二軸垂直。該第二軸與該第一膠膜垂直。In one embodiment, the second moving component moves along a first axis via the first moving component, and the suction head moves along a second axis via the second moving component. The first axis is perpendicular to the second axis. The second axis is perpendicular to the first adhesive film.

在一實施例中,該第一移動組件以及該第二移動組件包括一滑軌與滑塊組或是一伸縮缸。In one embodiment, the first moving assembly and the second moving assembly include a slide rail and slider set or a telescopic cylinder.

在一實施例中,該貼片供給機構包括一貼片容置空間以及一貼片裁切元件。該貼片容置空間用以容置一貼片卷料。該貼片裁切元件用以裁切該貼片卷料為該貼片。In one embodiment, the patch supply mechanism includes a patch accommodating space and a patch cutting element. The sticker accommodating space is used for accommodating a sticker coil. The patch cutting element is used for cutting the patch roll material into the patch.

在一實施例中,該貼片供給機構包括一貼片容置空間。該貼片容置空間用以容置疊層的複數個該貼片。In one embodiment, the patch supply mechanism includes a patch accommodating space. The patch accommodating space is used for accommodating a plurality of stacked patches.

利用本發明的該貼片貼附裝置,能解決該晶圓擴片製程後的該撕膠過程中所面臨的問題。該貼片貼附裝置能夠自動地貼附該貼片於貼附於該固定物的該第一膠膜的該第三表面上並且部分凸出該第一膠膜的該側邊,使得該貼片能夠輔助該撕膠機構自動地自該固定物上撕除該第一膠膜,以達成自動化製造以及提升生產效率。Utilizing the chip attaching device of the present invention can solve the problems faced in the glue tearing process after the wafer expansion process. The patch attaching device can automatically attach the patch on the third surface of the first adhesive film attached to the fixture and partially protrude from the side of the first adhesive film, so that the patch The sheet can assist the adhesive tearing mechanism to automatically tear off the first adhesive film from the fixed object, so as to achieve automatic manufacturing and improve production efficiency.

爲了讓本發明之上述及其他目的、特徵、優點能更明顯易懂,下文將特舉本發明較佳實施例,並配合所附圖式,作詳細說明如下。In order to make the above and other objects, features, and advantages of the present invention more comprehensible, preferred embodiments of the present invention will be exemplified below in detail together with the attached drawings.

請參照圖1,其為本發明之貼片貼附裝置之立體圖。該貼片貼附裝置包括一貼片取放機構300。該貼片取放機構300用以將一貼片100貼附於一第一膠膜400上。Please refer to FIG. 1 , which is a perspective view of the patch attaching device of the present invention. The patch attaching device includes a patch pick-and-place mechanism 300 . The patch pick-and-place mechanism 300 is used to stick a patch 100 on a first adhesive film 400 .

如圖1所示,在一實施例中,該貼片取放機構200包括一吸頭310。該吸頭310用以撿取該貼片100或是釋放該貼片100於該第一膠膜400上。該吸頭310連接一真空系統。當該吸頭310接觸該貼片100時,該真空系統啟動,使得該吸頭310撿取該貼片100。當該吸頭310將該貼片100貼附於該第一膠膜400上時,該真空系統停止,使得該吸頭310釋放該貼片100。As shown in FIG. 1 , in an embodiment, the patch pick-and-place mechanism 200 includes a suction head 310 . The suction head 310 is used to pick up the patch 100 or release the patch 100 on the first adhesive film 400 . The suction head 310 is connected to a vacuum system. When the suction head 310 touches the patch 100 , the vacuum system is activated so that the suction head 310 picks up the patch 100 . When the suction head 310 sticks the patch 100 on the first adhesive film 400 , the vacuum system stops, so that the suction head 310 releases the patch 100 .

請參照圖2以及圖3。圖2為該第一膠膜400貼附有該貼片100時之上視圖。圖3為圖2的一局部區域A沿A-A剖面線之剖面圖。該貼片100包括一第一表面110以及相對該第一表面110的一第二表面120。該第一膠膜400包括一第三表面410、 相對該第三表面410的一第四表面420、以及連接該第三表面410以及該第四表面420的一側邊430。Please refer to Figure 2 and Figure 3 . FIG. 2 is a top view of the patch 100 attached to the first adhesive film 400 . FIG. 3 is a cross-sectional view of a partial area A of FIG. 2 along the section line A-A. The patch 100 includes a first surface 110 and a second surface 120 opposite to the first surface 110 . The first adhesive film 400 includes a third surface 410 , a fourth surface 420 opposite to the third surface 410 , and a side edge 430 connecting the third surface 410 and the fourth surface 420 .

在本實施例中,該貼片100經由該貼片取放機構300的該吸頭310固定該貼片100的該第一表面110,並且將該貼片100的該第二表面120貼附於該第一膠膜400的該第三表面410上。該貼片100的該第二表面120自該第一膠膜400的該側邊430向外延伸,以暴露出該貼片100的一部分該第二表面120。In this embodiment, the patch 100 fixes the first surface 110 of the patch 100 via the suction head 310 of the patch pick-and-place mechanism 300, and attaches the second surface 120 of the patch 100 to On the third surface 410 of the first adhesive film 400 . The second surface 120 of the patch 100 extends outward from the side 430 of the first adhesive film 400 to expose a part of the second surface 120 of the patch 100 .

如圖2以及圖3所示,該貼片100的該第二表面120包括一第一區域130以及一第二區域140。該第一區域130凸出該第一膠膜400的該側邊430。該第二區域140貼附於該第一膠膜400的該第三表面410上。該第一區域130即為上述實施例說明之該貼片100的該第二表面120自該第一膠膜400的該側邊430向外延伸並且暴露出的區域。As shown in FIG. 2 and FIG. 3 , the second surface 120 of the patch 100 includes a first area 130 and a second area 140 . The first region 130 protrudes from the side 430 of the first adhesive film 400 . The second region 140 is attached on the third surface 410 of the first adhesive film 400 . The first area 130 is the area where the second surface 120 of the patch 100 described in the above embodiment extends outward from the side 430 of the first adhesive film 400 and is exposed.

在本實施例中,該第一膠膜400的該第三表面410貼附有一固定物500,並且該第一膠膜400的該第四表面420被吸附於一真空平台600,並且維持固定。在一晶圓擴片製程後,用於該晶圓擴片製程的該第一膠膜400必須被撕除,以利後續的製程進行。因此,經過該晶圓擴片製程後的該第一膠膜400以及該固定物500被放置於該真空平台600上等待進行一撕膠過程以撕除該第一膠膜400。上述的該固定物500包括一晶圓或是該晶圓經過切割而成的多個裸晶。In this embodiment, the third surface 410 of the first adhesive film 400 is attached with a fixing object 500 , and the fourth surface 420 of the first adhesive film 400 is adsorbed on a vacuum platform 600 and kept fixed. After a wafer expansion process, the first adhesive film 400 used in the wafer expansion process must be removed to facilitate subsequent processes. Therefore, the first adhesive film 400 and the fixture 500 after the wafer expansion process are placed on the vacuum platform 600 to wait for a peeling process to remove the first adhesive film 400 . The fixture 500 mentioned above includes a wafer or a plurality of dies obtained by dicing the wafer.

如圖1所示,在一實施例中,該貼片貼附裝置還包括一貼片供給機構200。該貼片供給機構200用以供給該貼片100予該貼片取放機構300撿取。該貼片供給機構200包括一貼片容置空間210以及一貼片裁切元件220。As shown in FIG. 1 , in an embodiment, the patch attaching device further includes a patch supply mechanism 200 . The patch supply mechanism 200 is used to supply the patch 100 to the patch pick-and-place mechanism 300 to pick up. The patch supply mechanism 200 includes a patch accommodating space 210 and a patch cutting element 220 .

在一實施例中,該貼片容置空間210用以容置一貼片卷料150。該貼片裁切元件220用以裁切該貼片卷料150為該貼片100。在另一實施例中,該貼片容置空間210用以容置疊層的複數個該貼片100。該貼片供給機構200的該貼片容置空間210可以依據所容置的該貼片100的配置而變更,其結構並不以上述內容為限。In one embodiment, the patch accommodating space 210 is used for accommodating a patch roll 150 . The patch cutting element 220 is used for cutting the patch roll material 150 into the patch 100 . In another embodiment, the patch accommodating space 210 is used for accommodating a plurality of the patches 100 stacked. The patch accommodating space 210 of the patch supply mechanism 200 can be changed according to the configuration of the patch 100 accommodated, and its structure is not limited to the above content.

在一實施例中,該貼片100的一基底材料包括聚乙烯(polyethylene,PE)、聚氯乙烯(polyvinyl chloride,PVC )、聚丙烯(polypropylene,PP)、聚對苯二甲酸乙二酯(polyethylene terephthalate,PET)、或是聚醯亞胺(polyimide,PI)。並且,該貼片100的該第二表面120包括一黏著材料,該黏著材料包括丙烯酸(acrylic acid)膠以及乙酸第二丁酯(sec-butyl acetate)。In one embodiment, a base material of the patch 100 includes polyethylene (polyethylene, PE), polyvinyl chloride (polyvinyl chloride, PVC), polypropylene (polypropylene, PP), polyethylene terephthalate ( polyethylene terephthalate, PET), or polyimide (polyimide, PI). Moreover, the second surface 120 of the patch 100 includes an adhesive material, and the adhesive material includes acrylic acid glue and sec-butyl acetate.

如圖1所示,在一實施例中,該貼片取放機構200還包括一第一移動組件320。該第一移動組件320連接該吸頭310。該貼片取放機構300的該吸頭310經由該第一移動組件320往返該貼片供給機構200以及該第一膠膜400的該第三表面410之間。As shown in FIG. 1 , in an embodiment, the patch pick-and-place mechanism 200 further includes a first moving component 320 . The first moving component 320 is connected to the suction head 310 . The suction head 310 of the patch pick-and-place mechanism 300 travels between the patch supply mechanism 200 and the third surface 410 of the first adhesive film 400 via the first moving assembly 320 .

需要說明的是,該第一移動組件320連接該吸頭310之技術特徵應當包括該第一移動組件320直接連接該吸頭310、以及該第一移動組件320透過其他元件間接連接該吸頭310。因此,該第一移動組件320以任何形式連接該吸頭310而達成該貼片取放機構300的該吸頭310往返該貼片供給機構200以及該第一膠膜400的該第三表面410之間的技術效果,皆不脫離本發明的權利保護範圍。It should be noted that the technical features of the connection of the first moving component 320 to the suction head 310 should include that the first moving component 320 is directly connected to the suction head 310, and the first moving component 320 is indirectly connected to the suction head 310 through other components. . Therefore, the first moving assembly 320 is connected with the suction head 310 in any form to realize that the suction head 310 of the patch pick-and-place mechanism 300 goes back and forth between the patch supply mechanism 200 and the third surface 410 of the first adhesive film 400 The technical effects between all do not depart from the scope of protection of the present invention.

在本實施例中,該貼片取放機構200還包括一第二移動組件330。該第一移動組件320經由該第二移動組件330連接該吸頭310。該貼片取放機構300的該吸頭310經由該第一移動組件320以及該第二移動組件330往返該貼片供給機構200以及該第一膠膜400的該第三表面410之間。In this embodiment, the patch pick-and-place mechanism 200 further includes a second moving component 330 . The first moving assembly 320 is connected to the suction head 310 via the second moving assembly 330 . The suction head 310 of the patch pick-and-place mechanism 300 travels between the patch supply mechanism 200 and the third surface 410 of the first adhesive film 400 via the first moving component 320 and the second moving component 330 .

需要說明的是,該第一移動組件320經由該第二移動組件330連接該吸頭310之技術特徵應當包括該第一移動組件320、該第二移動組件330、以及該吸頭310之間直接連接或是間接連接。因此,該第一移動組件320、該第二移動組件330、以及該吸頭310之間以任何形式連接而達成該貼片取放機構300的該吸頭310往返該貼片供給機構200以及該第一膠膜400的該第三表面410之間的技術效果,皆不脫離本發明的權利保護範圍。It should be noted that the technical feature that the first moving component 320 is connected to the suction head 310 via the second moving component 330 should include the direct connection between the first moving component 320 , the second moving component 330 , and the suction head 310 . connection or indirect connection. Therefore, the first moving assembly 320, the second moving assembly 330, and the suction head 310 are connected in any form to achieve the suction head 310 of the patch pick-and-place mechanism 300 going back and forth between the patch supply mechanism 200 and the suction head 310. The technical effect between the third surface 410 of the first adhesive film 400 does not depart from the protection scope of the present invention.

如圖1所示,在一實施例中,該第二移動組件330可以經由該第一移動組件320沿著一第一軸X移動,以及該吸頭310可以經由該第二移動組件330沿著一第二軸Y移動。該第一軸X與該第二軸Y垂直。該第二軸Y與該第一膠膜400垂直。As shown in FIG. 1 , in one embodiment, the second moving assembly 330 can move along a first axis X via the first moving assembly 320 , and the suction head 310 can move along the first axis X via the second moving assembly 330 A second axis of Y movement. The first axis X is perpendicular to the second axis Y. The second axis Y is perpendicular to the first adhesive film 400 .

請參照圖4,其為本發明之貼片貼附裝置在一第一狀態時之立體圖。在本實施例中,該貼片貼附裝置在該第一狀態時,該第一移動組件320與連接於其上的該第二移動組件330沿著該第一軸X朝向該貼片供給機構200移動,並且該第二移動組件330與連接於其上的該吸頭310沿著該第二軸Y朝向該貼片供給機構200移動。在該第一狀態下,該貼片取放機構300的該吸頭310移動、對準、並且撿取該貼片供給機構200供給的該貼片100。Please refer to FIG. 4 , which is a perspective view of the patch attaching device of the present invention in a first state. In this embodiment, when the patch attaching device is in the first state, the first moving assembly 320 and the second moving assembly 330 connected thereto are directed toward the patch supply mechanism along the first axis X. 200 moves, and the second moving assembly 330 and the suction head 310 connected thereto move toward the patch supply mechanism 200 along the second axis Y. In the first state, the suction head 310 of the patch pick-and-place mechanism 300 moves, aligns, and picks up the patch 100 supplied by the patch supply mechanism 200 .

在本實施例中,該貼片貼附裝置在該第一狀態的同時,該真空平台600承載該第一膠膜400以及該固定物500沿著一第三軸Z朝向該貼片貼附裝置移動,並且停止於該貼片貼附裝置前的一預定位置。In this embodiment, while the patch attaching device is in the first state, the vacuum platform 600 carries the first adhesive film 400 and the fixture 500 toward the patch attaching device along a third axis Z. Move and stop at a predetermined position in front of the patch sticking device.

請參照圖5,其為本發明之貼片貼附裝置在一第二狀態時之立體圖。在本實施例中,該貼片貼附裝置在該第二狀態時,該第一移動組件320與連接於其上的該第二移動組件330沿著該第一軸X朝向該真空平台600的該預定位置移動,並且該第二移動組件330與連接於其上的該吸頭310沿著該第二軸Y朝向該真空平台600上的該第一膠膜400移動。在該第二狀態下,該貼片取放機構300的該吸頭310移動、對準、並且將吸附於該吸頭310的該貼片100貼附於該第一膠膜400的該第三表面410上。Please refer to FIG. 5 , which is a perspective view of the patch attaching device of the present invention in a second state. In this embodiment, when the patch attaching device is in the second state, the first moving assembly 320 and the second moving assembly 330 connected thereto face toward the vacuum platform 600 along the first axis X. The predetermined position moves, and the second moving assembly 330 and the suction head 310 connected thereto move toward the first adhesive film 400 on the vacuum platform 600 along the second axis Y. In the second state, the suction head 310 of the patch pick-and-place mechanism 300 moves, aligns, and attaches the patch 100 adsorbed by the suction head 310 to the third surface of the first adhesive film 400 . surface 410 .

在本實施例中,承載該第一膠膜400以及該固定物500的該真空平台600停止於該貼片貼附裝置前的該預定位置,以使得該第一膠膜400接受貼片貼附裝置貼附該貼片100。該真空平台600移動至該預定位置滿足該第一膠膜400的該側邊430與該貼片取放機構300的該吸頭310相交之條件,使得該真空平台600能夠配合該貼片貼附裝置精準貼附該貼片100於該第一膠膜400的該第三表面410上並且使得該貼片100部分凸出該第一膠膜400的該側邊430。In this embodiment, the vacuum platform 600 carrying the first adhesive film 400 and the fixture 500 stops at the predetermined position in front of the patch attachment device, so that the first adhesive film 400 accepts patch attachment The device attaches the patch 100 . The vacuum platform 600 moves to the predetermined position to meet the condition that the side 430 of the first adhesive film 400 intersects with the suction head 310 of the patch pick-and-place mechanism 300, so that the vacuum platform 600 can cooperate with the patch attachment The device precisely sticks the patch 100 on the third surface 410 of the first adhesive film 400 and makes the patch 100 partially protrude from the side 430 of the first adhesive film 400 .

為了達成該第一移動組件320沿著該第一軸X移動、以及該第二移動組件330沿著該第二軸Y移動,在一實施例中,該貼片取放機構300的該第一移動組件320以及該第二移動組件330包括一滑軌與滑塊組或是一伸縮缸。換句話說,該第一移動組件320或是該第二移動組件330是應用該滑軌與滑塊組於該第一軸X或是該第二軸Y上移動,或是該第一移動組件320或是該第二移動組件330是應用該伸縮缸於該第一軸X或是該第二軸Y上移動。In order to achieve the movement of the first moving assembly 320 along the first axis X and the movement of the second moving assembly 330 along the second axis Y, in one embodiment, the first The moving assembly 320 and the second moving assembly 330 include a sliding rail and a slider set or a telescopic cylinder. In other words, the first moving assembly 320 or the second moving assembly 330 uses the slide rail and slider to move on the first axis X or the second axis Y, or the first moving assembly 320 or the second moving component 330 uses the telescopic cylinder to move on the first axis X or the second axis Y.

需要說明的是,圖1、圖4、以及圖5所示的該貼片貼附裝置僅用以示例性說明本發明的各個元件之間的連接關係。在圖1、圖4、以及圖5中,該第一移動組件320為該滑軌與滑塊組,並且該第二移動組件330為該伸縮缸。然而,該貼片取放機構300的該第一移動組件320以及該第二移動組件330也可以同時為兩個該滑軌與滑塊組、或是同時為兩個該伸縮缸。本發明的該貼片貼附裝置的結構可以依據實際使用需求而變更元件配置,該貼片取放機構300的該第一移動組件320以及該第二移動組件330的結構並不以上述內容為限。It should be noted that the patch attaching device shown in FIG. 1 , FIG. 4 , and FIG. 5 is only used to illustrate the connection relationship between the various elements of the present invention. In FIG. 1 , FIG. 4 , and FIG. 5 , the first moving component 320 is the slide rail and slider assembly, and the second moving component 330 is the telescopic cylinder. However, the first moving assembly 320 and the second moving assembly 330 of the patch pick-and-place mechanism 300 can also be two sets of slide rails and sliders, or two telescopic cylinders at the same time. The structure of the patch attaching device of the present invention can change the configuration of components according to actual use requirements, and the structures of the first moving component 320 and the second moving component 330 of the patch pick-and-place mechanism 300 are not based on the above-mentioned content. limit.

在前述實施例中說明的該晶圓擴片製程後,用於該晶圓擴片製程的該第一膠膜400必須被撕除,以利該撕膠過程進行。請參照圖6以及圖7。圖6為貼附有該貼片100的該第一膠膜400在該撕膠過程之上視圖。圖7為圖6的一局部區域B沿B-B剖面線之剖面圖。為了將該第一膠膜400自該固定物500撕除,在該貼片100貼附於該第一膠膜400後,該固定物500相對該第一膠膜400的一表面將會貼附一第二膠膜700,並且以該第二膠膜700相對該固定物500的一側面貼附於該真空平台600上。換句話說,在進行該撕膠過程前,貼附有該貼片100以及該固定物500的該第一膠膜400,將連帶著貼附於該固定物500相對該第一膠膜400的該表面上的700被上下翻轉,並且改以該第二膠膜700固定於該真空平台600上。After the wafer expansion process described in the foregoing embodiments, the first adhesive film 400 used in the wafer expansion process must be removed to facilitate the adhesive tearing process. Please refer to FIG. 6 and FIG. 7 . FIG. 6 is a top view of the first adhesive film 400 attached with the patch 100 during the adhesive tearing process. FIG. 7 is a cross-sectional view of a partial area B of FIG. 6 along the section line B-B. In order to tear off the first adhesive film 400 from the fixing object 500 , after the patch 100 is attached to the first adhesive film 400 , the fixing object 500 will be attached to a surface of the first adhesive film 400 A second adhesive film 700 is attached on the vacuum platform 600 with a side of the second adhesive film 700 opposite to the fixture 500 . In other words, before performing the adhesive tearing process, the first adhesive film 400 attached with the patch 100 and the fixing object 500 will be attached to the fixing object 500 opposite to the first adhesive film 400 The surface 700 is turned upside down, and fixed on the vacuum platform 600 with the second adhesive film 700 instead.

如圖7所示,在該撕膠過程中,一撕膠機構800連接於該第一膠膜400的該第四表面420以及該貼片100的該第二表面120,並且經由該貼片100的輔助撕除該固定物500上的該第一膠膜400。該貼片100的該第二表面120用以提供該撕膠機構800連接,該撕膠機構800得以向該貼片100施加一牽引力,並且利用該牽引力拉起該貼片100以及該第一膠膜400,使得該第一膠膜400與該固定物500分離。As shown in FIG. 7 , in the glue tearing process, a glue tearing mechanism 800 is connected to the fourth surface 420 of the first adhesive film 400 and the second surface 120 of the patch 100 , and passes through the patch 100 Auxiliary to tear off the first adhesive film 400 on the fixture 500 . The second surface 120 of the patch 100 is used to provide the glue tearing mechanism 800 connection, the glue tearing mechanism 800 can apply a traction force to the patch 100, and use the traction force to pull up the patch 100 and the first glue. film 400 , so that the first adhesive film 400 is separated from the fixture 500 .

如圖3以及圖7的剖面圖所示,在該貼片100與該第一膠膜400的該第三表面410之間具有一第一點P1。由於圖3以及圖7僅為剖面圖作為結構示意,在實際狀況中,在該貼片100與該第一膠膜400的該第三表面410之間為由無限多個該第一點P1連成的一第一線段。同理,如圖3的剖面圖所示,在該第一膠膜400與該固定物500的一側邊510之間具有一第二點P2。由於圖3僅為剖面圖作為結構示意,在實際狀況中,在該第一膠膜400與該固定物500的該側邊510之間為由無限多個該第二點P2連成的一第二線段。As shown in the cross-sectional views of FIG. 3 and FIG. 7 , there is a first point P1 between the patch 100 and the third surface 410 of the first adhesive film 400 . Since FIG. 3 and FIG. 7 are only cross-sectional views as structural illustrations, in actual conditions, there are infinitely many first points P1 between the patch 100 and the third surface 410 of the first adhesive film 400. into a first line segment. Similarly, as shown in the cross-sectional view of FIG. 3 , there is a second point P2 between the first adhesive film 400 and one side 510 of the fixture 500 . Since FIG. 3 is only a cross-sectional view as a structural illustration, in actual conditions, between the first adhesive film 400 and the side 510 of the fixture 500 is a first connected by an infinite number of second points P2. Second line segment.

如圖7所示,在該撕膠過程在進行時,由於位於該第一點P1的該第一線段的兩側的該貼片100的該第二表面120的介質均勻地向外延伸,能夠分散該貼片100的該第二表面120的拉應力而不致應力集中,因此位於該第一線段的該貼片100的該第二表面120則會穩固的貼附該第一膠膜400。相較之下,如圖5所示,若是在該撕膠過程進行時,由於位於該第二點P2的該第二線段的兩側的該第一膠膜400的該第三表面410的介質無法均勻地向外延伸,容易使該第一膠膜400的該第三表面410產生應力集中,因此位於該第二線段的該第一膠膜400與該固定物500則容易分離。As shown in FIG. 7 , when the glue tearing process is in progress, since the medium on the second surface 120 of the patch 100 on both sides of the first line segment at the first point P1 extends outwards evenly, The tensile stress of the second surface 120 of the patch 100 can be dispersed without stress concentration, so the second surface 120 of the patch 100 located on the first line segment will be firmly attached to the first adhesive film 400 . In contrast, as shown in FIG. 5 , if the process of tearing glue is carried out, due to the medium of the third surface 410 of the first adhesive film 400 located on both sides of the second line segment of the second point P2 Failure to extend outward uniformly may easily cause stress concentration on the third surface 410 of the first adhesive film 400 , so the first adhesive film 400 located on the second line segment and the fixture 500 are easily separated.

在一實施例中,如圖2所示,為使得位於該第一點P1的該第一線段的兩側的該貼片100的該第二表面120的介質均勻地向外延伸,以分散該貼片100的該第二表面120的拉應力而不致應力集中,該貼片100的該第二表面120的該第二區域120的面積佔該貼片100的該第二表面120的面積約30%以上。換句話說,該貼片100的該第二表面120約有30%以上的面積貼附於該第一膠膜400的該第三表面410上,即可使該貼片100達成輔助該撕膠機構800自該固定物500上撕除該第一膠膜400的目標效果。In one embodiment, as shown in FIG. 2 , in order to make the medium of the second surface 120 of the patch 100 on both sides of the first line segment of the first point P1 extend outward evenly, so as to disperse The tensile stress of the second surface 120 of the patch 100 does not cause stress concentration, and the area of the second region 120 of the second surface 120 of the patch 100 accounts for about More than 30%. In other words, more than 30% of the area of the second surface 120 of the patch 100 is attached to the third surface 410 of the first adhesive film 400, so that the patch 100 can assist the tearing of the glue. The target effect of the mechanism 800 is to tear off the first adhesive film 400 from the fixture 500 .

在習知技術中,往往需要經由人工先行將該第一膠膜400的該第三表面410鄰近該側邊430的區域撕離該固定物500一定的面積,才能讓該撕膠機構800接續該撕膠過程,因此存在不利於自動化製造或是無法有效提升生產效率的問題。由上述各個實施例搭配圖1至圖7的說明可以得知,利用本發明的該貼片貼附裝置,能解決該晶圓擴片製程後的該撕膠過程中所面臨的問題。該貼片貼附裝置的該貼片供給機構200能夠自動且連續地供給該貼片100。該貼片取放機構300也能夠自動且連續地撿取該貼片100,同時將該貼片100貼附於該第一膠膜400的該第三表面410上並且部分凸出該第一膠膜400的該側邊430。因此,當該貼片100連接該撕膠機構800以進行該撕膠過程時,貼附於該第一膠膜400的該第三表面410上的該貼片100能夠作為引導,將該撕膠機構800經由該貼片的輔助撕起該第一膠膜400,使得該第一膠膜400與該固定物500分離。由於本發明的該貼片貼附裝置能夠自動地貼附該貼片100於貼附於該固定物500的該第一膠膜400的該第三表面410上並且部分凸出該第一膠膜400的該側邊430,使得該貼片100能夠輔助該撕膠機構800自動地自該固定物500上撕除該第一膠膜400,以達成自動化製造以及提升生產效率。In the conventional technology, it is often necessary to manually tear the area of the third surface 410 of the first adhesive film 400 adjacent to the side 430 away from the fixed object 500 by a certain area, so that the adhesive tearing mechanism 800 can be connected to the fixed object. Therefore, there are problems that are not conducive to automated manufacturing or cannot effectively improve production efficiency. It can be known from the description of the above embodiments with reference to FIG. 1 to FIG. 7 that the problem faced in the adhesive tearing process after the wafer expansion process can be solved by using the chip attachment device of the present invention. The patch supply mechanism 200 of the patch attaching device can automatically and continuously supply the patch 100 . The patch pick-and-place mechanism 300 can also automatically and continuously pick up the patch 100, and at the same time attach the patch 100 to the third surface 410 of the first adhesive film 400 and partially protrude from the first adhesive film. The side 430 of the membrane 400 . Therefore, when the patch 100 is connected with the glue tearing mechanism 800 to carry out the glue tearing process, the patch 100 attached to the third surface 410 of the first adhesive film 400 can be used as a guide to tear the glue The mechanism 800 tears the first adhesive film 400 with the aid of the patch, so that the first adhesive film 400 is separated from the fixing object 500 . Since the patch sticking device of the present invention can automatically stick the patch 100 on the third surface 410 of the first adhesive film 400 attached to the fixture 500 and partially protrude from the first adhesive film The side 430 of the patch 400 enables the patch 100 to assist the peeling mechanism 800 to automatically tear off the first adhesive film 400 from the fixed object 500, so as to achieve automatic manufacturing and improve production efficiency.

以上僅是本發明的較佳實施方式,應當指出,對於所屬領域技術人員,在不脫離本發明原理的前提下,還可以做出若干改進和潤飾,這些改進和潤飾也應視爲本發明的權利保護範圍。The above are only preferred embodiments of the present invention. It should be pointed out that for those skilled in the art, without departing from the principles of the present invention, some improvements and modifications can also be made, and these improvements and modifications should also be considered as part of the present invention. Scope of rights protection.

100:貼片 110:第一表面 120:第二表面 130:第一區域 140:第二區域 150:貼片卷料 200:貼片供給機構 210:貼片容置空間 220:貼片裁切元件 300:貼片取放機構 310:吸頭 320:第一移動組件 330:第二移動組件 400:第一膠膜 410:第三表面 420:第四表面 430:第一膠膜的側邊 500:固定物 510:固定物的側邊 600:真空平台 700:第二膠膜 800:撕膠機構 P1:貼片與膠膜的側邊之間的第一點 P2:膠膜與固定物的側邊之間的第二點 A:局部區域A B:局部區域B A-A:A-A剖面線 B-B:B-B剖面線 X:第一軸 Y:第二軸 Z:第三軸 100: patch 110: first surface 120: second surface 130: First area 140: Second area 150: SMT roll material 200: patch supply mechanism 210: Patch storage space 220: Patch cutting components 300: Patch pick-and-place mechanism 310: suction head 320: The first mobile component 330: The second mobile component 400: the first film 410: third surface 420: The fourth surface 430: the side of the first film 500: Fixtures 510: the side of the fixture 600: vacuum platform 700: Second film 800: glue tearing mechanism P1: The first point between the patch and the side of the film P2: The second point between the adhesive film and the side of the fixture A: local area A B: local area B A-A: A-A hatching B-B: B-B section line X: the first axis Y: second axis Z: the third axis

圖1為本發明之貼片貼附裝置之立體圖。 圖2為一第一膠膜貼附有一貼片時之上視圖。 圖3為圖2的一局部區域A沿A-A剖面線之剖面圖。 圖4為本發明之貼片貼附裝置在一第一狀態時之立體圖。 圖5為本發明之貼片貼附裝置在一第二狀態時之立體圖。 圖6為貼附有該貼片的該第一膠膜在一撕膠過程之上視圖。 圖7為圖6的一局部區域B沿B-B剖面線之剖面圖。 Fig. 1 is a perspective view of the patch attaching device of the present invention. Fig. 2 is a top view of a patch attached to a first adhesive film. FIG. 3 is a cross-sectional view of a partial area A of FIG. 2 along the section line A-A. Fig. 4 is a perspective view of the patch attaching device of the present invention in a first state. Fig. 5 is a perspective view of the patch attaching device of the present invention in a second state. FIG. 6 is a top view of the first adhesive film attached with the patch in a glue tearing process. FIG. 7 is a cross-sectional view of a partial area B of FIG. 6 along the section line B-B.

100:貼片 100: patch

150:貼片卷料 150: SMT roll material

200:貼片供給機構 200: patch supply mechanism

210:貼片容置空間 210: Patch storage space

220:貼片裁切元件 220: Patch cutting components

300:貼片取放機構 300: Patch pick-and-place mechanism

310:吸頭 310: suction head

320:第一移動組件 320: The first mobile component

330:第二移動組件 330: The second mobile component

400:第一膠膜 400: the first film

430:第一膠膜的側邊 430: the side of the first film

500:固定物 500: Fixtures

600:真空平台 600: vacuum platform

X:第一軸 X: the first axis

Y:第二軸 Y: second axis

Z:第三軸 Z: the third axis

Claims (10)

一種貼片貼附裝置,包括: 一貼片,包括一第一表面以及相對該第一表面的一第二表面; 一第一膠膜,包括一第三表面、相對該第三表面的一第四表面、以及連接該第三表面以及該第四表面的一側邊; 一固定物,貼附於該第一膠膜的該第三表面;以及 一貼片取放機構,用以撿取該貼片並且固定該貼片的該第一表面,該貼片取放機構還用以將該貼片的該第二表面貼附於該第一膠膜的該第三表面上,該貼片的該第二表面自該第一膠膜的該側邊向外延伸,以暴露出該貼片的一部分該第二表面; 其中,當以一撕膠機構撕除該第一膠膜時,該撕膠機構連接於該第一膠膜的該第四表面以及該貼片的該第二表面,該撕膠機構透過該貼片撕起該第一膠膜,使得該第一膠膜與該固定物分離。 A patch attachment device, comprising: A patch comprising a first surface and a second surface opposite the first surface; A first adhesive film, including a third surface, a fourth surface opposite to the third surface, and a side edge connecting the third surface and the fourth surface; a fixture attached to the third surface of the first adhesive film; and a patch pick-and-place mechanism for picking up the patch and fixing the first surface of the patch; the patch pick-and-place mechanism is also used for attaching the second surface of the patch to the first glue On the third surface of the film, the second surface of the patch extends outward from the side of the first adhesive film to expose a part of the second surface of the patch; Wherein, when the first adhesive film is torn off by a glue tearing mechanism, the glue tearing mechanism is connected to the fourth surface of the first glue film and the second surface of the sticker, and the glue tearing mechanism passes through the sticker The sheet tears the first adhesive film, so that the first adhesive film is separated from the fixing object. 如請求項1之貼片貼附裝置,其中,該貼片的該第二表面包括一第一區域以及一第二區域,該第一區域凸出該第一膠膜的該側邊,該第二區域貼附於該第一膠膜的該第三表面上。The patch attachment device according to claim 1, wherein the second surface of the patch includes a first area and a second area, the first area protrudes from the side of the first adhesive film, and the first area protrudes from the side of the first adhesive film. Two regions are attached on the third surface of the first adhesive film. 如請求項1之貼片貼附裝置,其中,該貼片取放機構包括一吸頭,該吸頭用以撿取該貼片或是釋放該貼片於該第一膠膜上。The patch sticking device according to claim 1, wherein the patch pick-and-place mechanism includes a suction head for picking up the patch or releasing the patch on the first adhesive film. 如請求項3之貼片貼附裝置,還包括一貼片供給機構,用以供給該貼片予該貼片取放機構撿取。The patch sticking device according to claim 3 further includes a patch supply mechanism for supplying the patch to the patch pick-and-place mechanism for picking up. 如請求項4之貼片貼附裝置,其中,該貼片取放機構還包括一第一移動組件,該第一移動組件連接該吸頭,該貼片取放機構的該吸頭經由該第一移動組件往返該貼片供給機構以及該第一膠膜的該第三表面之間。The patch attachment device according to claim 4, wherein the patch pick-and-place mechanism further includes a first moving component connected to the suction head, and the suction head of the patch pick-and-place mechanism passes through the first A moving component goes back and forth between the patch supply mechanism and the third surface of the first adhesive film. 如請求項5之貼片貼附裝置,其中,該貼片取放機構還包括一第二移動組件,該第一移動組件經由該第二移動組件連接該吸頭,以及該貼片取放機構的該吸頭經由該第一移動組件以及該第二移動組件往返該貼片供給機構以及該第一膠膜的該第三表面之間。The patch attaching device according to claim 5, wherein the patch pick-and-place mechanism further includes a second moving component, the first moving component is connected to the suction head through the second moving component, and the patch pick-and-place mechanism The suction head goes back and forth between the patch feeding mechanism and the third surface of the first adhesive film via the first moving component and the second moving component. 如請求項6之貼片貼附裝置,其中,該第二移動組件經由該第一移動組件沿著一第一軸移動,該吸頭經由該第二移動組件沿著一第二軸移動,該第一軸與該第二軸垂直,以及該第二軸與該第一膠膜垂直。The patch attaching device according to claim 6, wherein the second moving component moves along a first axis through the first moving component, the suction head moves along a second axis through the second moving component, the The first axis is perpendicular to the second axis, and the second axis is perpendicular to the first adhesive film. 如請求項6之貼片貼附裝置,其中,該第一移動組件以及該第二移動組件包括一滑軌與滑塊組或是一伸縮缸。The patch attaching device according to claim 6, wherein the first moving component and the second moving component include a slide rail and slider set or a telescopic cylinder. 如請求項1之貼片貼附裝置,其中,該貼片供給機構包括一貼片容置空間以及一貼片裁切元件,該貼片容置空間用以容置一貼片卷料,該貼片裁切元件用以裁切該貼片卷料為該貼片。The patch attaching device according to claim 1, wherein the patch supply mechanism includes a patch accommodating space and a patch cutting element, the patch accommodating space is used to accommodate a patch coil, the The patch cutting element is used for cutting the patch roll material into the patch. 如請求項1之貼片貼附裝置,其中,該貼片供給機構包括一貼片容置空間,該貼片容置空間用以容置疊層的複數個該貼片。The patch attaching device according to claim 1, wherein the patch supply mechanism includes a patch accommodating space, and the patch accommodating space is used for accommodating a plurality of the patches stacked.
TW110149230A 2021-12-28 2021-12-28 Tape attaching device TWI787021B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW110149230A TWI787021B (en) 2021-12-28 2021-12-28 Tape attaching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW110149230A TWI787021B (en) 2021-12-28 2021-12-28 Tape attaching device

Publications (2)

Publication Number Publication Date
TWI787021B TWI787021B (en) 2022-12-11
TW202325552A true TW202325552A (en) 2023-07-01

Family

ID=85795038

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110149230A TWI787021B (en) 2021-12-28 2021-12-28 Tape attaching device

Country Status (1)

Country Link
TW (1) TWI787021B (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9777195B2 (en) * 2010-06-22 2017-10-03 Zagg Intellectual Property Holding Co., Inc. Dry apply protective systems and methods
TWM409458U (en) * 2011-03-22 2011-08-11 fu-yi Xu Attaching film
CN209780089U (en) * 2019-01-28 2019-12-13 深圳恩特材料科技有限公司 Decorative paster

Also Published As

Publication number Publication date
TWI787021B (en) 2022-12-11

Similar Documents

Publication Publication Date Title
US7465142B2 (en) Method and apparatus for picking up a semiconductor chip, method and apparatus for removing a semiconductor chip from a dicing tape, and a method of forming a perforated dicing tape
US8141612B2 (en) Device for thin die detachment and pick-up
US6202292B1 (en) Apparatus for removing carrier film from a semiconductor die
TWI283457B (en) Manufacturing method of semiconductor device
KR101665249B1 (en) Die bonder and bonding method
KR101312908B1 (en) Method for joining adhesive tape to semiconductor wafer, method for separating protective tape from semiconductor wafer, and apparatuses using the methods
CN109867159B (en) Release film peeling method and release film peeling apparatus
KR20050059996A (en) Protective tape joining method and apparatus using the same as well as protective tape separating method and apparatus using the same
KR20190012112A (en) Device for picking up semiconductor chip, device and method for mounting semiconductor chip
JP2003257898A (en) Method and apparatus for pasting adhesive sheet and method for processing semiconductor wafer
JP2012216606A (en) Substrate transfer method and substrate transfer device
JP2018129401A (en) Semiconductor manufacturing equipment and method of manufacturing semiconductor device
JP2009272408A (en) Protective tape joining apparatus
TWI787021B (en) Tape attaching device
JP2001085360A (en) Pasting method for electronic part and formation method for ditching on adhesive tape
JP6621365B2 (en) How to peel off the protective tape
KR20190024631A (en) Method and apparatus for separating adhesive tape
JPS59169811A (en) Sticking process of adhering film
KR102388056B1 (en) Method and device of heat sink attachment to a circuit tape
JP2006005030A (en) Method and apparatus for picking up semiconductor chip
JP2009099865A (en) Removing device and method of removing protective tape
JP2019145707A (en) Ball loading device
TW201628958A (en) Methods of processing including peeling (2)
CN202816896U (en) Bare chip pick device
JP2016081976A (en) Separation device and separation method