TW202323262A - 有機金屬加合化合物以及使用其製造積體電路裝置的方法 - Google Patents

有機金屬加合化合物以及使用其製造積體電路裝置的方法 Download PDF

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Publication number
TW202323262A
TW202323262A TW111134978A TW111134978A TW202323262A TW 202323262 A TW202323262 A TW 202323262A TW 111134978 A TW111134978 A TW 111134978A TW 111134978 A TW111134978 A TW 111134978A TW 202323262 A TW202323262 A TW 202323262A
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TW
Taiwan
Prior art keywords
fluorine atom
atom
substituted
formula
metal
Prior art date
Application number
TW111134978A
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English (en)
Chinese (zh)
Inventor
柳承旻
金潤洙
金在員
原野一树
斎藤和也
小出幸宜
青木雄太郎
朴圭熙
曺侖廷
布施若菜
眞鍋芳樹
内生蔵広幸
木村将之
吉井崇洋
Original Assignee
南韓商三星電子股份有限公司
日商艾迪科股份有限公司
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Priority claimed from KR1020210123465A external-priority patent/KR20220137522A/ko
Application filed by 南韓商三星電子股份有限公司, 日商艾迪科股份有限公司 filed Critical 南韓商三星電子股份有限公司
Publication of TW202323262A publication Critical patent/TW202323262A/zh

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TW111134978A 2021-09-15 2022-09-15 有機金屬加合化合物以及使用其製造積體電路裝置的方法 TW202323262A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2021-0123465 2021-09-15
KR1020210123465A KR20220137522A (ko) 2021-04-02 2021-09-15 유기금속 부가 화합물 및 이를 이용한 집적회로 소자의 제조 방법

Publications (1)

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TW202323262A true TW202323262A (zh) 2023-06-16

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TW111134978A TW202323262A (zh) 2021-09-15 2022-09-15 有機金屬加合化合物以及使用其製造積體電路裝置的方法

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JP (1) JP2023043193A (ja)
CN (1) CN115819449A (ja)
TW (1) TW202323262A (ja)

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Publication number Publication date
CN115819449A (zh) 2023-03-21
JP2023043193A (ja) 2023-03-28

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