TW202318556A - Picker hand - Google Patents

Picker hand Download PDF

Info

Publication number
TW202318556A
TW202318556A TW111139078A TW111139078A TW202318556A TW 202318556 A TW202318556 A TW 202318556A TW 111139078 A TW111139078 A TW 111139078A TW 111139078 A TW111139078 A TW 111139078A TW 202318556 A TW202318556 A TW 202318556A
Authority
TW
Taiwan
Prior art keywords
picker
pickup
pad
electronic component
support
Prior art date
Application number
TW111139078A
Other languages
Chinese (zh)
Other versions
TWI815699B (en
Inventor
元孝俊
鄭想一
Original Assignee
南韓商泰克元有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 南韓商泰克元有限公司 filed Critical 南韓商泰克元有限公司
Publication of TW202318556A publication Critical patent/TW202318556A/en
Application granted granted Critical
Publication of TWI815699B publication Critical patent/TWI815699B/en

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/286External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865Holding devices, e.g. chucks; Handlers or transport devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/286External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2868Complete testing stations; systems; procedures; software aspects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2893Handling, conveying or loading, e.g. belts, boats, vacuum fingers

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Manipulator (AREA)
  • Liquid Crystal (AREA)
  • Control And Other Processes For Unpacking Of Materials (AREA)

Abstract

The present invention relates to a picker hand. Specifically, according to an embodiment of the present invention, there may be provided a picker hand including: a hand; a picker unit detachably connected to the hand and configured to grip an electronic component disposed in a supine state; and a support configured to support the electronic component, wherein the picker unit includes a picker pad that is in a contact state in which one end portion of the picker pad is in contact with the electronic component, and in a grip state in which the picker pad grips the electronic component by moving toward the electronic component by a predetermined length so that a contact area between the picker pad and the electronic component is larger than that in the contact state, and wherein the support is spaced apart from the electronic component by the predetermined length when the picker pad is in the contact state, and comes into contact with the electronic component when the picker pad is in the grip state.

Description

拾取器手具picker hand

本發明係有關於拾取器手具。The present invention relates to a picker hand.

為了測試半導體元件,需要測試電氣連接之電子組件的一測試器及一測試處理器,該測試處理器係電氣地連接該等電子組件及該測試器之設備。In order to test semiconductor components, a tester for testing electrically connected electronic components and a test handler which is a device for electrically connecting the electronic components and the tester are required.

同時,供應欲在該測試處理器中測試之電子組件係在電子組件被裝載在一使用者托盤上之一狀態下進行。通常,欲裝載在一使用者托盤上之電子組件可藉由一手具傳送。該手具可包括用於夾持該等電子組件之一拾取器。該拾取器可藉由真空吸附包含在該電子組件中之一半導體元件之一表面來夾持該半導體元件。此外,複數拾取器可包含在該手具中以夾持複數半導體元件。該等複數拾取器係耦合在一個手具中且同時地操作。Meanwhile, supplying electronic components to be tested in the test handler is performed in a state where the electronic components are loaded on a user tray. Typically, electronic components to be loaded on a user tray are conveyed by a hand. The tool may include a picker for holding the electronic components. The picker can hold a semiconductor element included in the electronic component by vacuum suctioning a surface of the semiconductor element. In addition, multiple pickers can be included in the tool to hold multiple semiconductor components. The plurality of pick-ups are coupled in one handpiece and operate simultaneously.

在習知技術中具有一前或後平坦寬表面之少數半導體元件係配置在一電子組件之一PCB上,且該等半導體元件之間實質上沒有高度或位置差。此外,無貼紙附接在該半導體元件上,或未包含如一光學感測器或一指紋辨識感測器等感光感測器。In the prior art, a few semiconductor elements with a front or rear flat wide surface are arranged on a PCB of an electronic component, and there is substantially no height or position difference between these semiconductor elements. In addition, no stickers are attached to the semiconductor device, or photosensitive sensors such as an optical sensor or a fingerprint recognition sensor are not included.

但是,近年來,因為對於一電子組件增加數種組態,所以產生具有配置在一PCB上高度或配置狀態不同之半導體元件的一電子組件。當透過習知技術之一拾取器夾持配置複雜組態之該電子組件時,有未完全地夾持該等半導體元件之一問題。However, in recent years, since several configurations have been added to an electronic component, an electronic component having semiconductor elements of different heights or arrangement states arranged on a PCB is produced. When clamping the electronic component configured in a complex configuration by a picker of the prior art, there is a problem of not fully clamping the semiconductor components.

例如,當一半導體元件被包含在該拾取器中之一拾取器墊夾持時,有該拾取器墊在該半導體元件之一上表面上滑動的一問題。此外,即使當配置在該PCB之中心部份中的一半導體元件被一個拾取器墊夾持時,亦有該電子組件被夾持成當該電子組件之一重心位在該電子組件之一側時該電子組件相對一水平方向傾斜之一狀態的一問題。另外,當先夾持複數半導體元件中具有一比較大高度之一半導體元件時,有該電子組件朝向配置具有比較小高度之半導體元件的側傾斜且無法準確地夾持該電子組件的一問題。For example, when a semiconductor component is held by a picker pad included in the picker, there is a problem that the picker pad slides on one of the upper surfaces of the semiconductor component. In addition, even when a semiconductor element disposed in the central portion of the PCB is held by a pick-up pad, the electronic component is held such that when a center of gravity of the electronic component is on one side of the electronic component A problem in a state where the electronic component is tilted relative to a horizontal direction. In addition, when one of the plurality of semiconductor elements having a relatively large height is clamped first, there is a problem that the electronic component is tilted toward the side where the semiconductor component having a relatively small height is disposed and the electronic component cannot be accurately clamped.

本發明之實施例係鑒於上述背景而發明,且本發明之一目的係提供防止一拾取器墊在一半導體元件上滑動的一拾取器手具。Embodiments of the present invention are invented in view of the above-mentioned background, and an object of the present invention is to provide a picker hand that prevents a picker pad from sliding on a semiconductor device.

本發明之另一目的係提供可與一電子組件之一重心無關地穩定夾持該電子組件的一拾取器手具。Another object of the present invention is to provide a picker hand that can stably hold an electronic component irrespective of a center of gravity of the electronic component.

本發明之又一目的係提供當夾持一半導體元件時防止一電子組件朝偏離一水平方向之一方向傾斜的一拾取器手具。Yet another object of the present invention is to provide a picker tool that prevents an electronic component from tilting in a direction deviated from a horizontal direction when holding a semiconductor device.

依據本發明之一態樣,提供一種拾取器手具,其包括:一手具;一拾取器單元,其與該手具可拆卸地連接且組配成夾持呈一平躺狀態設置之一電子組件;及一支持件,其組配成支持該電子組件,其中該拾取器單元包括一拾取器墊,該拾取器墊係能維持於一接觸狀態及一夾持狀態,於該接觸狀態下,該拾取器墊之一端部接觸該電子組件,而於該夾持狀態下,該拾取器墊藉由朝向該電子組件移動一預定長度來夾持該電子組件,使得該拾取器墊與該電子組件間之一接觸面積比該拾取器墊呈該接觸狀態時之接觸面積大,且其中該支持件在該拾取器墊呈該接觸狀態時與該電子組件分開該預定長度且在該拾取器墊呈該夾持狀態時接觸該電子組件。According to one aspect of the present invention, there is provided a picker hand tool, which includes: a hand tool; a picker unit, which is detachably connected to the hand tool and assembled to clamp an electronic component arranged in a flat state and a support member configured to support the electronic component, wherein the pickup unit includes a pickup pad, the pickup pad can be maintained in a contact state and a clamping state, and in the contact state, the One end of the pick-up pad contacts the electronic component, and in the clamped state, the pick-up pad clamps the electronic component by moving toward the electronic component by a predetermined length, so that the gap between the pick-up pad and the electronic component is A contact area is larger than the contact area when the pick-up pad is in the contact state, and wherein the support member is separated from the electronic component by the predetermined length when the pick-up pad is in the contact state and the pick-up pad is in the contact state Access to the electronic component while clamped.

此外,該拾取器單元可更包括:一拾取器本體,其組配成支持該拾取器墊;及一連結本體,其設置在該手具與該拾取器本體之間且與該拾取器本體之一上部份連接,該支持件可包括一假支持件,該假支持件在一水平方向上與該拾取器本體分開設置,使得該假支持件之一中心與該拾取器本體之一中心分開,且該假支持件可包括一或多個假支持件。In addition, the pick-up unit may further include: a pick-up body configured to support the pick-up pad; and a connecting body disposed between the hand tool and the pick-up body and between the pick-up body An upper part connection, the support may include a dummy support that is spaced apart from the pickup body in a horizontal direction such that a center of the dummy support is separated from a center of the pickup body , and the dummy support may include one or more dummy supports.

此外,該拾取器手具可更包括一接頭,該接頭在一上下方向延伸,且具有與該拾取器本體可拆卸地連接之一下部份及與該連結本體可拆卸地連接之一上部份,其中該連結本體可透過該接頭與該拾取器本體之該上部份間接地連接。In addition, the picker hand may further include a joint extending in an up-down direction and having a lower part detachably connected with the picker body and an upper part detachably connected with the connecting body , wherein the connection body can be indirectly connected to the upper part of the pickup body through the joint.

此外,該拾取器本體可包括一或多個拾取器本體,且該拾取器墊可包括一或多個拾取器墊,該一或多個拾取器本體各包括一第一拾取器本體及一第二拾取器本體,該第一拾取器本體可與該連結本體及該拾取器墊直接地連接,且該第二拾取器本體可透過該接頭與該連結本體間接地連接,並且與該第一拾取器本體連接的該拾取器墊的一下端可設置在與該第二拾取器本體連接的該拾取器墊之一下端上方。In addition, the picker body may include one or more picker bodies, and the picker pad may include one or more picker pads, each of the one or more picker bodies includes a first picker body and a first picker body. Two pickup bodies, the first pickup body can be directly connected with the connection body and the pickup pad, and the second pickup body can be indirectly connected with the connection body through the joint, and can be connected with the first pickup body A lower end of the pickup pad connected to the second pickup body may be disposed above a lower end of the pickup pad connected to the second pickup body.

此外,該拾取器單元可更包括:一拾取器本體,其組配成支持該拾取器墊;及一連結本體,其設置在該手具與該拾取器本體之間且與該拾取器本體之一上部份連接,且該支持件可包括設置成包圍該拾取器本體之至少一部份的一外罩支持件。In addition, the pick-up unit may further include: a pick-up body configured to support the pick-up pad; and a connecting body disposed between the hand tool and the pick-up body and between the pick-up body An upper portion is attached, and the support may include a housing support configured to surround at least a portion of the pickup body.

此外,該拾取器手具可更包括:一接頭,該接頭在一上下方向延伸且具有與該拾取器墊可拆卸地連接之一下部份,該拾取器單元可更包括:一拾取器本體,其組配成支持該拾取器墊;及一連結本體,其設置在該手具與該拾取器本體之間且與該接頭之一上部份及該拾取器本體之一上部份連接,該接頭之該上部份與該連結本體可拆卸地連接,且該支持件可包括設置成包圍該接頭之至少一部份的一外罩支持件。In addition, the picker hand may further include: a joint extending in an up-down direction and having a lower portion detachably connected to the picker pad, and the picker unit may further include: a picker body, It is assembled to support the picker pad; and a connecting body is disposed between the hand tool and the picker body and is connected with an upper portion of the joint and an upper portion of the picker body, the The upper part of the joint is detachably connected with the connection body, and the supporting member may include a cover supporting member arranged to surround at least a part of the joint.

此外,提供一種拾取器手具,其包括:一手具;一拾取器單元,其與該手具可拆卸地連接且組配成夾持呈一平躺狀態設置之一電子組件;及一接頭,其與該拾取器單元可拆卸地連接,其中該拾取器單元包括:一拾取器本體,其組配成支持該拾取器墊;一連結本體,其設置在該手具與該拾取器本體之間且與該拾取器本體之一上部份連接;及一拾取器墊,其可維持於一接觸狀態及一夾持狀態,於該接觸狀態下,該拾取器墊之一端部接觸該電子組件,而於該夾持狀態下,該拾取器墊藉由朝向該電子組件移動一預定長度來夾持該電子組件,使得該拾取器墊與該電子組件間之一接觸面積比該拾取器墊呈該接觸狀態時之接觸面積大,且其中該接頭在一上下方向延伸且具有與該拾取器本體及該拾取器墊中之至少一者可拆卸地連接之一下部份及與該連結本體可拆卸地連接之一上部份。In addition, a picker hand tool is provided, which includes: a hand tool; a picker unit, which is detachably connected to the hand tool and configured to clamp an electronic component arranged in a lying state; and a connector, which It is detachably connected with the picker unit, wherein the picker unit includes: a picker body, which is assembled to support the picker pad; a connecting body, which is arranged between the handle and the picker body and connected with an upper part of the pickup body; and a pickup pad, which can be maintained in a contact state and a clamping state, and in the contact state, one end of the pickup pad contacts the electronic component, and In the clamping state, the picker pad clamps the electronic component by moving toward the electronic component by a predetermined length, so that a contact area between the picker pad and the electronic component is larger than the contact area of the picker pad. The contact area in the state is large, and wherein the joint extends in a vertical direction and has a lower part detachably connected with at least one of the pickup body and the pickup pad and is detachably connected with the connecting body one of the upper part.

依據本發明之一實施例的該拾取器手具具有防止該拾取器墊在該半導體元件上滑動之一效果。The picker tool according to an embodiment of the present invention has an effect of preventing the picker pad from sliding on the semiconductor device.

此外,該拾取器手具具有與該電子組件之一重心無關地穩定地夾持該電子組件的一效果。In addition, the picker hand has an effect of stably holding the electronic component irrespective of a center of gravity of the electronic component.

另外,該拾取器手具具有當該電子組件被夾持時防止該電子組件朝偏離一水平方向之一方向傾斜的一效果。In addition, the picker hand has an effect of preventing the electronic component from tilting in a direction deviating from a horizontal direction when the electronic component is held.

以下,參照圖式詳細地說明用以實施本發明之一精神的特定實施例。Hereinafter, specific embodiments for implementing one spirit of the present invention will be described in detail with reference to the drawings.

說明本揭示時,可省略習知組態或功能之詳細說明來闡明本揭示。When describing the present disclosure, detailed descriptions of conventional configurations or functions may be omitted to clarify the present disclosure.

當提及一元件與另一元件「連接」、被另一元件「支持」、被另一元件「抓住」、由另一元件「釋放」或被另一元件「吸附」時,應了解的是該元件可直接地與另一元件連接、被另一元件支持、被另一元件抓住、由另一元件釋放或被另一元件吸附,但其他元件可存在中間。When an element is referred to as being "connected to," "supported by," "held by," "released" by, or "attached" to, another element, it should be understood that Yes, the element may be directly connected to another element, supported by another element, caught by another element, released by another element, or attracted by another element, but other elements may exist in between.

在本揭示中使用之用語只是用於說明特定實施例,且非意圖限制本揭示。除非上下文另外清楚地表示,否則單數表示包括複數表示。The terms used in the present disclosure are for describing particular embodiments only, and are not intended to limit the present disclosure. A singular expression includes a plural expression unless the context clearly dictates otherwise.

包括如第一及第二等序數之用語可用於說明各種元件,但該等對應元件不限於這些用語。這些用語只是用於區分一元件與另一元件。Terms including ordinal numbers such as first and second may be used to describe various elements, but the corresponding elements are not limited to these terms. These terms are only used to distinguish one element from another.

在本說明書中,應了解的是如「包括」等用語係意圖表示存在說明中揭露之某些形貌體、區域、整數、步驟、動作、元件、組合及/或其群組,且非意圖排除一或多個其他某些形貌體、區域、整數、步驟、動作、元件、組合及/或其群組可存在或可添加之可能性。In this specification, it should be understood that terms such as "comprising" are intended to indicate the presence of certain features, regions, integers, steps, actions, elements, combinations and/or groups thereof disclosed in the description, and are not intended to The possibility that one or more other certain features, regions, integers, steps, actions, elements, combinations and/or groups thereof may exist or may be added is excluded.

此外,在本揭示中,應注意的是如一上部份或一上表面等表示係依據圖之顯示來說明,但若方向或對應物體改變則可修改。Furthermore, in this disclosure, it should be noted that representations such as an upper portion or an upper surface are described according to the representation of the figures, but may be modified if the orientation or corresponding object changes.

以下,參照圖式說明依據本發明之一第一實施例之一測試處理器1的一詳細組態。Hereinafter, a detailed configuration of a test processor 1 according to a first embodiment of the present invention will be described with reference to the drawings.

以下,請參閱圖1,依據本發明之第一實施例的測試處理器1可測試透過一製程製成之電子組件D、依據測試結果將該等電子組件D分級及將該等電子組件D裝載在一訂製托盤上。此外,該測試處理器1可與一測試器(未圖示)可拆卸地耦合。該測試處理器1可包括一處理器本體10、一拾取器手具模組20及用於移動該處理器本體10之一處理器運輸器30。Hereinafter, referring to FIG. 1 , the test processor 1 according to the first embodiment of the present invention can test the electronic components D manufactured through a process, classify the electronic components D according to the test results, and load the electronic components D. On a custom tray. In addition, the test processor 1 can be detachably coupled with a tester (not shown). The test handler 1 may include a handler body 10 , a picker tool module 20 and a handler transporter 30 for moving the handler body 10 .

該處理器本體10可為支持該拾取器手具模組20之一框架。該處理器本體10可支持複數拾取器手具模組20。此外,該處理器本體10可被該處理器運輸器30移動。The processor body 10 can be a frame supporting the picker hand module 20 . The processor body 10 can support a plurality of picker hand modules 20 . In addition, the processor body 10 can be moved by the processor transporter 30 .

請再參閱圖2,該拾取器手具模組20可移動各種電子組件D至一期望位置。該拾取器手具模組20可包括一拾取器手具支持件21、一拾取器手具22、一控制器23、一氣動裝置24及用於一流徑之一管(未圖示)。Please refer to FIG. 2 again, the picker hand module 20 can move various electronic components D to a desired position. The picker hand module 20 may include a picker hand support 21 , a picker hand 22 , a controller 23 , a pneumatic device 24 and a tube (not shown) for a path.

該拾取器手具支持件21可為與該拾取器手具22連接之一框架且可支持該拾取器手具22。此外,該拾取器手具支持件21可組配成與該處理器本體10連接且與該處理器本體10一起移動。The picker hand support 21 can be a frame connected with the picker hand 22 and can support the picker hand 22 . In addition, the picker hand support 21 can be configured to be connected with the processor body 10 and move together with the processor body 10 .

該拾取器手具22可使用一真空吸附方法夾持或釋放相對地面躺臥地設置之一電子組件D的一半導體元件。該釋放表示該被夾持半導體元件偏離一夾持狀態。該電子組件D之躺臥設置可表示該電子組件D之一比較寬表面放置成與地面平行的一狀態。The picker tool 22 can use a vacuum suction method to hold or release a semiconductor element of an electronic component D lying on the ground. The release indicates that the clamped semiconductor component deviates from a clamped state. The lying arrangement of the electronic component D may mean that a relatively wide surface of the electronic component D is placed parallel to the ground.

當該半導體元件之形狀改變時,該拾取器手具22可依據該半導體元件之變形而穩定地夾持或釋放該半導體元件。換言之,即使當該半導體元件之一寬度及一長度中之至少一者改變或該半導體元件之形狀改變時,該拾取器手具22亦可穩定地夾持或釋放該半導體元件。此外,該半導體元件可具有各種半導體元件配置在一PCB上之一形狀。可設置複數該等拾取器手具22。例如,該等複數拾取器手具22可與該拾取器手具支持件21連接使得該等複數拾取器手具22配置在一方向上。該拾取器手具22可包括一手具100、一拾取器單元200、一接頭300及一支持件400。When the shape of the semiconductor device changes, the picker tool 22 can stably hold or release the semiconductor device according to the deformation of the semiconductor device. In other words, the picker hand 22 can stably hold or release the semiconductor element even when at least one of a width and a length of the semiconductor element changes or the shape of the semiconductor element changes. In addition, the semiconductor element may have a shape in which various semiconductor elements are arranged on a PCB. A plurality of such picker hands 22 may be provided. For example, the plurality of picker hands 22 may be connected to the picker hand support 21 such that the plurality of picker hands 22 are arranged in one direction. The picker hand 22 may include a hand tool 100 , a picker unit 200 , a joint 300 and a support 400 .

該手具100可透過該氣動裝置24抽吸或排放一流體。例如,當該手具100抽吸該流體時,該半導體元件可被吸附在該拾取器單元200上且成為一夾持狀態。此外,當該手具100排放該流體時,該半導體元件可成為偏離該夾持狀態之一夾持釋放狀態,即該半導體元件被吸附在該拾取器單元200上之一狀態。The hand tool 100 can suck or discharge a fluid through the pneumatic device 24 . For example, when the hand tool 100 sucks the fluid, the semiconductor device can be adsorbed on the picker unit 200 and become a holding state. In addition, when the hand tool 100 discharges the fluid, the semiconductor element may become a clamp release state deviated from the clamp state, that is, a state in which the semiconductor element is adsorbed on the picker unit 200 .

請再參閱圖3,在該手具100與該拾取器單元200連接之一狀態下,該手具100可與該拾取器單元200一起移動使得該半導體元件可被以下所述之拾取器墊260夾持在一預定位置。該手具100可包括一手具本體110、一閂鎖部份120及一校準部份130。Please refer to FIG. 3 again. In a state where the hand tool 100 is connected to the picker unit 200, the hand tool 100 can move together with the picker unit 200 so that the semiconductor element can be picked up by the picker pad 260 described below. clamped in a predetermined position. The hand tool 100 may include a hand tool body 110 , a latch portion 120 and a calibration portion 130 .

當該手具100及該拾取器單元200互相連接時,該手具本體110可支持該拾取器單元200。此外,該手具本體110可設置相對外側抽吸或排放之一流體流動通過的一或多個手具流徑110a。此外,可插入以下所述之一固定銷240的一固定銷槽110b可形成在該手具本體110中。When the hand tool 100 and the picker unit 200 are connected to each other, the hand tool body 110 can support the picker unit 200 . In addition, the handpiece body 110 may be provided with one or more handpiece flow paths 110a through which a fluid is sucked or discharged relative to the outside. In addition, a fixing pin groove 110b into which one of the fixing pins 240 described below may be inserted may be formed in the hand tool body 110 .

該手具流徑110a可為朝該流體流動通過之一垂直方向延伸的一通道。在該手具流徑110a中,被一吸附器(未圖示)抽吸之一外流體可向上流動。此外,在該手具流徑110a中,藉由一鼓風機(未圖示)在該手具流徑110a中流動之流體可向外流動。另外,一個手具本體110可設置一個手具流徑110a。當該手具100及該拾取器單元200互相分開時,該手具流徑110a可與外側連通。The hand flow path 110a may be a channel extending in a vertical direction through which the fluid flows. In the handpiece flow path 110a, an external fluid sucked by an adsorber (not shown) may flow upward. In addition, in the hand flow path 110a, the fluid flowing in the hand flow path 110a by a blower (not shown) can flow outward. In addition, one handpiece body 110 may be provided with one handpiece flow path 110a. When the hand tool 100 and the picker unit 200 are separated from each other, the hand flow path 110a can communicate with the outside.

當該固定銷240插入該固定銷槽110b時,該固定銷240可被該手具本體110支持。該固定銷槽110b可在該手具本體110之一前後方向形成在另一側。該前後方向係定義為如下所述之一第二連結流徑210b延伸之一方向,且在該前後方向上之一側可表示例如一前側,且可表示圖2中之手具本體110的左側。此外,在該前後方向上之另一側可表示例如一背側,且可表示圖2中之手具本體110的右側。When the fixing pin 240 is inserted into the fixing pin slot 110 b, the fixing pin 240 can be supported by the hand tool body 110 . The fixing pin slot 110b may be formed on the other side of the hand tool body 110 in a front-rear direction. The front-rear direction is defined as a direction in which a second connecting flow path 210b extends as described below, and one side in the front-rear direction may represent, for example, a front side, and may represent the left side of the hand tool body 110 in FIG. 2 . In addition, the other side in the front-rear direction may represent, for example, a back side, and may represent the right side of the hand tool body 110 in FIG. 2 .

該閂鎖部份120可容許該拾取器單元200被卡掣在該手具本體110上。例如,當該拾取器單元200被卡掣時,該閂鎖部份120可支持該拾取器單元200。該閂鎖部份120可與該手具本體110的在該前後方向上之一側連接。在該前後方向之一側可表示例如該前側且可表示圖2中之手具本體110的左側。例如,該閂鎖部份120可組配成可相對該手具本體110環繞一預定旋轉軸旋轉,該旋轉軸係設置在於該手具本體110的在前後方向上之一側。該閂鎖部份120可與該手具本體110一起組配成單一構件或亦可組配成一分開構件。The latch portion 120 allows the picker unit 200 to be locked on the handle body 110 . For example, the latch portion 120 can support the pickup unit 200 when the pickup unit 200 is engaged. The latch portion 120 may be connected to one side of the hand tool body 110 in the front-rear direction. One side in the front-rear direction may represent, for example, the front side and may represent the left side of the hand tool body 110 in FIG. 2 . For example, the latch portion 120 may be configured to be rotatable relative to the handle body 110 around a predetermined rotation axis, and the rotation axis is disposed on one side of the handle body 110 in the front-rear direction. The latch portion 120 can be combined with the handle body 110 as a single component or can also be combined as a separate component.

當該拾取器單元200與該手具本體110連接時,該校準部份130可改善該連接之配合性。此外,複數校準部份130可設置且連接在該手具本體110之一下部份上。該校準部份130可包括一第一校準銷131及一第二校準銷132。該第一校準銷131及該第二校準銷132可設置成互相分開。例如,該第一校準銷131及該第二校準銷132可配置成在該前後方向上分開。此外,該第一校準銷131可組配成可插入以下所述之一第一校準槽210e。另外,該第二校準銷132可組配成可插入以下所述之一第二校準槽210d。該拾取器單元200可在一就緒狀態下透過該手具100夾持或釋放該半導體元件。該就緒狀態係定義為該拾取器單元200係設置成面對該躺臥設置之半導體元件且該拾取器單元200與該手具100連接的一狀態。此外,可更換與該手具100連接之該拾取器單元200。例如,該拾取器單元200可設置成複數不同拾取器單元200。When the pick-up unit 200 is connected with the hand tool body 110, the calibration part 130 can improve the compatibility of the connection. In addition, a plurality of calibration parts 130 can be disposed and connected to a lower part of the hand tool body 110 . The calibration part 130 may include a first calibration pin 131 and a second calibration pin 132 . The first calibration pin 131 and the second calibration pin 132 can be disposed apart from each other. For example, the first alignment pin 131 and the second alignment pin 132 may be configured to be separated in the front-rear direction. In addition, the first alignment pin 131 can be configured to be inserted into one of the first alignment slots 210e described below. In addition, the second alignment pin 132 can be configured to be inserted into one of the second alignment slots 210d described below. The picker unit 200 can hold or release the semiconductor device through the hand tool 100 in a ready state. The ready state is defined as a state in which the picker unit 200 is arranged to face the lying semiconductor device and the picker unit 200 is connected to the hand tool 100 . In addition, the picker unit 200 connected to the hand tool 100 can be replaced. For example, the pickup unit 200 may be provided as a plurality of different pickup units 200 .

該拾取器單元200可包括一連結本體210、一鎖固顎夾220、一閂鎖銷230、該固定銷240、一拾取器本體250及該拾取器墊260。The picker unit 200 may include a connecting body 210 , a locking jaw 220 , a latch pin 230 , the fixing pin 240 , a picker body 250 and the picker pad 260 .

該連結本體210可設置在該手具100與該拾取器本體250之間。該連結本體210可與該手具100可拆卸地連接。該連結本體210可與該拾取器本體250連接。例如,該拾取器本體250之一上部份可與該連結本體210之一下部份連接。The connecting body 210 can be disposed between the hand tool 100 and the picker body 250 . The connecting body 210 can be detachably connected with the hand tool 100 . The connecting body 210 can be connected with the picker body 250 . For example, an upper portion of the picker body 250 can be connected with a lower portion of the connecting body 210 .

該連結本體210可傳送該手具100抽吸流體之一流體吸力及該手具100排放流體之一噴射力至該拾取器墊260。該連結本體210可設置在該就緒狀態下與該手具流徑110a連通之一連結流徑。該連結流徑可設置一第一連結流徑210a、一第二連結流徑210b、一第三連結流徑210c、該第二校準槽210d及該第一校準槽210e。The coupling body 210 can transmit the fluid suction force of the hand 100 for sucking fluid and the ejection force of the hand 100 for discharging fluid to the pickup pad 260 . The connection body 210 can be provided with a connection flow path communicated with the hand flow path 110 a in the ready state. The connection flow path can be provided with a first connection flow path 210a, a second connection flow path 210b, a third connection flow path 210c, the second calibration groove 210d and the first calibration groove 210e.

該第一連結流徑210a可為朝一垂直方向延伸之一通道。該第一連結流徑210a可與該手具流徑110a連通。該第一連結流徑210a之寬度可與該手具流徑110a之寬度相同。該第一連結流徑210a可形成在該手具流徑110a下方。該第一連結流徑210a可為由該第二連結流徑210b向上分支之一流徑。The first connecting flow path 210a can be a channel extending in a vertical direction. The first connection flow path 210a can communicate with the hand flow path 110a. The width of the first connection flow path 210a may be the same as the width of the hand flow path 110a. The first connection flow path 210a may be formed under the hand flow path 110a. The first connecting flow path 210a may be a flow path branched upward from the second connecting flow path 210b.

該第二連結流徑210b可為朝一水平方向延伸之一通道。例如,該第二連結流徑210b可為與該第一連結流徑210a垂直地延伸且朝與該固定銷240插入該固定銷槽110b之一方向平行的一方向延伸的一通道。該第二連結流徑210b可與該第一連結流徑210a連通。此外,該第二連結流徑210b可與該第三連結流徑210c連通。The second connecting flow path 210b can be a channel extending in a horizontal direction. For example, the second connecting flow path 210b may be a channel extending perpendicularly to the first connecting flow path 210a and extending in a direction parallel to a direction in which the fixing pin 240 is inserted into the fixing pin groove 110b. The second connection flow path 210b can communicate with the first connection flow path 210a. In addition, the second connecting flow path 210b can communicate with the third connecting flow path 210c.

該第三連結流徑210c可設置成對應拾取器墊260之數目。例如,當該等拾取器墊260之數目係兩個時,該第三連結流徑210c可形成為對應該等兩個拾取器本體250之各拾取器本體。換言之,一或多個第三連結流徑210c可設置於一個拾取器手具22。該第三連結流徑210c之一上側可鄰接該第二連結流徑210b,且該第三連結流徑210c之一下側可鄰接該拾取器本體250。該第三連結流徑210c可為由該第二連結流徑210b向下分支之一流徑。The third connection flow path 210c can be set to correspond to the number of the pickup pads 260 . For example, when the number of the pickup pads 260 is two, the third connecting flow path 210c may be formed to correspond to each of the two pickup bodies 250 . In other words, one or more third connecting flow paths 210c can be disposed on one picker tool 22 . An upper side of the third connection flow path 210c may adjoin the second connection flow path 210b , and a lower side of the third connection flow path 210c may adjoin the pickup body 250 . The third connection flow path 210c may be a flow path branched downward from the second connection flow path 210b.

該第二校準銷132可選擇地插入該第二校準槽210d。例如,在該就緒狀態中,該第二校準銷132可插入該第二校準槽210d。該第二校準槽210d可形成在該連結本體210之上側。該第二校準槽210d可形成在該連結本體210中並對應該第二校準銷132之寬度。例如,該第二校準銷132可壓入配合在該第二校準槽210d中。The second alignment pin 132 is selectively inserted into the second alignment slot 210d. For example, in the ready state, the second alignment pin 132 can be inserted into the second alignment slot 210d. The second alignment groove 210d can be formed on the upper side of the connecting body 210 . The second alignment groove 210d can be formed in the connecting body 210 and corresponds to the width of the second alignment pin 132 . For example, the second alignment pin 132 may be press fit in the second alignment slot 210d.

該第一校準銷131可選擇地插入該第一校準槽210e。例如,在該就緒狀態中,該第一校準銷131可插入該第一校準槽210e。該第一校準槽210e可形成為與該第二校準槽210d在該連結本體210之上側分開一預定距離。該第一校準槽210e可形成為具有比該第一校準銷131大之一寬度。換言之,即使當該第一校準銷131插入該第一校準槽210e時,該第一校準銷131可未接觸包圍該第一校準槽210e的該連結本體210之一部份。The first alignment pin 131 is selectively inserted into the first alignment slot 210e. For example, in the ready state, the first alignment pin 131 can be inserted into the first alignment slot 210e. The first alignment groove 210e may be formed to be separated from the second alignment groove 210d by a predetermined distance on the upper side of the coupling body 210 . The first alignment groove 210e may be formed to have a larger width than the first alignment pin 131 . In other words, even when the first alignment pin 131 is inserted into the first alignment groove 210e, the first alignment pin 131 may not contact a portion of the coupling body 210 surrounding the first alignment groove 210e.

該第一校準槽210e及該第二校準槽210d可為一槽孔或一孔。較佳地,該第一校準槽210e可為一槽孔且該第二校準槽210d可為一孔。The first alignment groove 210e and the second alignment groove 210d can be a slot or a hole. Preferably, the first calibration groove 210e can be a slot hole and the second calibration groove 210d can be a hole.

在一就緒狀態中,該鎖固顎夾220可防止該固定銷240朝向在該前後向上之一側移動超過一預定距離。在該就緒狀態中,該鎖固顎夾220可具有朝向該固定銷240突出之一形狀。當該固定銷240被卡掣在該鎖固顎夾220上或該鎖固顎夾220與該固定銷240之間在該前後方向上的一距離等於或小於一預定距離時,可解除該手具100及該拾取器單元200之固定。In a ready state, the locking jaw 220 prevents the fixing pin 240 from moving more than a predetermined distance toward one side in the front-back direction. In the ready state, the locking jaw 220 may have a shape protruding towards the fixing pin 240 . When the fixing pin 240 is caught on the locking jaw 220 or a distance between the locking jaw 220 and the fixing pin 240 in the front-rear direction is equal to or less than a predetermined distance, the hand can be released. The tool 100 and the picker unit 200 are fixed.

該閂鎖部份120可被卡掣在該閂鎖銷230上。該閂鎖銷230與該連結本體210之另一側連接,且該連結本體210可透過該閂鎖銷230被該閂鎖部份120支持。此外,該閂鎖銷230可提供一預定旋轉軸使得該連結本體210可相對該手具100旋轉。該旋轉軸可為朝與該第一連結流徑210a延伸之一方向及該第二連結流徑210b延伸之一方向垂直的一方向延伸的一虛擬直線。在該就緒狀態中,該閂鎖銷230可防止該拾取器單元200在該前後方向相對該手具100移動。換言之,該閂鎖部份120之一中心部份的高度可比該閂鎖銷230之一下端的高度高,且該閂鎖部份120之一下端的高度比該閂鎖銷230的高度高。該閂鎖部份120之一端部的一部份的高度可比該閂鎖銷230之下端的一高度高。The latch portion 120 can be locked on the latch pin 230 . The latch pin 230 is connected to the other side of the connecting body 210 , and the connecting body 210 can be supported by the latch part 120 through the latch pin 230 . In addition, the latch pin 230 can provide a predetermined rotation axis so that the connecting body 210 can rotate relative to the hand tool 100 . The rotation axis may be a virtual straight line extending in a direction perpendicular to a direction in which the first connecting flow path 210a extends and a direction in which the second connecting flow path 210b extends. In the ready state, the latch pin 230 prevents the picker unit 200 from moving relative to the hand tool 100 in the front-back direction. In other words, the height of a central portion of the latch portion 120 may be higher than that of a lower end of the latch pin 230 , and the height of a lower end of the latch portion 120 may be higher than that of the latch pin 230 . A height of a portion of one end of the latch portion 120 may be higher than a height of a lower end of the latch pin 230 .

該固定銷240可將該拾取器單元200固定在該手具100上。例如,當該固定銷240插入該固定銷槽110b時,該拾取器單元200可被該手具100固定地支持。該固定銷240可被栓結在該手具100上。例如,用於將該固定銷240栓結在該手具100上之一螺紋可形成在該手具100中。該等固定銷240之兩端部的寬度可互不相同。例如,在該固定銷240的在該前後方向上之一端部的寬度可比在該前後方向上之另一端部的寬度大。此外,該固定銷240的在該前後方向上之另一端部的寬度可比該固定銷240之一中心部份的寬度大。當該固定銷240朝向在該前後方向上之一側移動一預定距離時,該固定銷240的在該前後方向上之另一端部的寬度容許該固定銷240被卡掣在該鎖固顎夾220上。The fixing pin 240 can fix the picker unit 200 on the hand tool 100 . For example, when the fixing pin 240 is inserted into the fixing pin groove 110 b, the picker unit 200 may be fixedly supported by the hand 100 . The fixing pin 240 can be bolted to the hand tool 100 . For example, a thread for fastening the securing pin 240 to the hand tool 100 may be formed in the hand tool 100 . The widths of the two ends of the fixing pins 240 may be different from each other. For example, a width at one end portion of the fixing pin 240 in the front-rear direction may be greater than a width at the other end portion in the front-rear direction. In addition, the width of the other end portion of the fixing pin 240 in the front-rear direction may be greater than the width of a center portion of the fixing pin 240 . When the fixing pin 240 moves a predetermined distance toward one side in the front-rear direction, the width of the other end portion of the fixing pin 240 in the front-rear direction allows the fixing pin 240 to be caught in the locking jaw. 220 on.

該拾取器本體250可與該拾取器墊260連接使得該拾取器墊260與該連結本體210垂直地分開。例如,該拾取器本體250之一下部份可與該拾取器墊260連接使得該拾取器墊260係設置在該連結本體210下方。該拾取器本體250可朝一垂直方向延伸。The picker body 250 may be connected with the picker pad 260 such that the picker pad 260 is vertically separated from the coupling body 210 . For example, a lower portion of the picker body 250 may be connected to the picker pad 260 so that the picker pad 260 is disposed below the connecting body 210 . The picker body 250 can extend in a vertical direction.

此外,可設置複數拾取器本體250。該等複數拾取器本體250可配置成在一水平方向上互相分開。該等複數拾取器本體250中之某些拾取器本體可為與該連結本體210直接地連接之一上部份,及與該拾取器墊260直接地連接之一下部份。該等複數拾取器本體250中之某些拾取器本體可稱為一第一拾取器本體。同時,該等複數拾取器本體250中之其他拾取器本體的上部份可透過該接頭300與該連結本體210間接地連接、其下部份可透過該接頭300與該拾取器墊260間接地連接,或該等上部份及該等下部份兩者都透過該等接頭300與該連結本體210及該拾取器墊260分別地連接。換言之,該等複數拾取器本體250中之其他拾取器本體的上與下部份中的至少一者可與該接頭300連接。與該接頭300連接的該等複數拾取器本體250中之其他拾取器本體可稱為第二拾取器本體。In addition, plural pickup bodies 250 may be provided. The plurality of pickup bodies 250 may be arranged to be separated from each other in a horizontal direction. Some of the plurality of picker bodies 250 may have an upper portion directly connected to the link body 210 and a lower portion directly connected to the picker pad 260 . Some of the plurality of pickup bodies 250 may be referred to as a first pickup body. At the same time, the upper part of other pickup bodies in the plurality of pickup bodies 250 can be indirectly connected to the connecting body 210 through the joint 300, and the lower part can be indirectly connected to the pickup pad 260 through the joint 300. connection, or both the upper parts and the lower parts are respectively connected to the link body 210 and the picker pad 260 through the joints 300. In other words, at least one of the upper and lower parts of other pickup bodies of the plurality of pickup bodies 250 can be connected with the joint 300 . The other pickup bodies of the plurality of pickup bodies 250 connected to the connector 300 may be referred to as second pickup bodies.

該拾取器本體250可設置一拾取器流徑250a。該拾取器流徑250a可為朝一垂直方向延伸之一通道。該拾取器流徑250a可與該第三連結流徑210c連通。此外,該拾取器流徑250a之寬度可小於或等於該手具流徑110a、該第一連結流徑210a、該第二連結流徑210b及該第三連結流徑210c中之至少一者的寬度。另外,一個拾取器流徑250a可設置在一個拾取器本體250中。但是,本發明之精神不必受限於此,且複數拾取器流徑250a可設置在一個拾取器本體250中。再者,該拾取器流徑250a、該手具流徑110a、該第一連結流徑210a及該第三連結流徑210c之流徑的中心可位在同一線上。換言之,該拾取器流徑250a、該手具流徑110a、該第一連結流徑210a及該第三連結流徑210c可形成為朝該垂直方向延伸之一單一流徑。The pickup body 250 can be provided with a pickup flow path 250a. The pickup flow path 250a can be a channel extending in a vertical direction. The pickup flow path 250a can communicate with the third connecting flow path 210c. In addition, the picker flow path 250a may have a width less than or equal to at least one of the tool flow path 110a, the first connection flow path 210a, the second connection flow path 210b, and the third connection flow path 210c. width. In addition, one pickup flow path 250 a may be provided in one pickup body 250 . However, the spirit of the present invention is not necessarily limited thereto, and a plurality of pickup flow paths 250 a may be provided in one pickup body 250 . Moreover, the centers of the flow paths of the picker flow path 250a, the hand flow path 110a, the first connection flow path 210a and the third connection flow path 210c may be located on the same line. In other words, the picker flow path 250a, the hand flow path 110a, the first connection flow path 210a and the third connection flow path 210c can be formed as a single flow path extending toward the vertical direction.

請再參閱圖4及5,該拾取器墊260成為該拾取器墊260之至少一部份接觸該電子組件D之一接觸狀態、該拾取器墊260夾持該電子組件D之一夾持狀態,或該拾取器墊260釋放該電子組件D之一夾持釋放狀態。該接觸狀態表示當該拾取器墊260設置成面對該電子組件D之半導體元件時,該拾取器墊260之一下端接觸該半導體元件的一狀態。該夾持狀態表示當該拾取器墊260呈該接觸狀態時,該拾取器墊260朝向該半導體元件移動一預定長度h1使得該拾取器墊260與該電子組件D間之一接觸面積增加。該夾持釋放狀態表示偏離該夾持狀態之一狀態。Please refer to FIGS. 4 and 5 again, the picker pad 260 becomes a contact state where at least a part of the picker pad 260 contacts the electronic component D, and the picker pad 260 clamps the electronic component D in a clamping state. , or the picker pad 260 releases one of the electronic components D from the clamping release state. The contact state indicates a state in which a lower end of the picker pad 260 contacts the semiconductor device of the electronic component D when the picker pad 260 is disposed to face the semiconductor device. The clamping state means that when the picker pad 260 is in the contact state, the picker pad 260 moves toward the semiconductor device by a predetermined length h1 so that a contact area between the picker pad 260 and the electronic component D increases. The clamp release state indicates a state deviated from the clamp state.

複數拾取器墊260可設置於一個電子組件D。此外,該等複數拾取器墊260中之一拾取器墊可與該第一拾取器本體之一下部份連接,且另一拾取器墊可與該第二拾取器本體之一下部份連接。A plurality of pickup pads 260 can be provided on one electronic component D. As shown in FIG. In addition, one of the plurality of pickup pads 260 may be connected to a lower portion of the first pickup body, and the other pickup pad may be connected to a lower portion of the second pickup body.

一墊流徑260a可形成在該拾取器墊260中。該墊流徑260a可與該拾取器流徑250a連通。該墊流徑260a可朝與形成該拾取器流徑250a之一方向平行的一方向形成。此外,當該拾取器墊260呈接觸狀態時,該墊流徑260a之一下端可與該半導體元件垂直地分開一預定距離。例如,當該拾取器墊260呈該夾持狀態時該墊流徑260a之下端與該半導體元件間之一分開距離可比當該拾取器墊260呈該接觸狀態時該墊流徑260a之下端與該半導體元件間之一分開距離小。另外,當該拾取器墊260呈該夾持狀態時,該墊流徑260a及該半導體元件可在無互相分開之情形下互相鄰接。A pad flow path 260a may be formed in the pickup pad 260 . The pad flow path 260a may communicate with the pickup flow path 250a. The pad flow path 260a may be formed in a direction parallel to a direction in which the pickup flow path 250a is formed. In addition, when the pickup pad 260 is in a contact state, a lower end of the pad flow path 260a may be vertically separated from the semiconductor device by a predetermined distance. For example, when the pick-up pad 260 is in the clamping state, a separation distance between the lower end of the pad flow path 260a and the semiconductor element can be compared with the lower end of the pad flow path 260a and the lower end of the pad flow path 260a when the pick-up pad 260 is in the contact state. A separation distance between the semiconductor elements is small. In addition, when the pickup pad 260 is in the sandwiched state, the pad flow path 260a and the semiconductor element can be adjacent to each other without being separated from each other.

該拾取器墊260可具有彈性。例如,該拾取器墊260可組配成使得當該拾取器墊260從該接觸狀態變成該夾持狀態時,該拾取器墊260與該半導體元件間之接觸面積逐漸地增加。該拾取器墊260可具有其周長由下至上減少之一形狀。此外,可設置複數拾取器墊260。該等複數拾取器墊260可與配置在水平方向上的各個拾取器本體250之下部份連接。The picker pad 260 may have elasticity. For example, the picker pad 260 can be configured such that when the picker pad 260 changes from the contact state to the clamping state, the contact area between the picker pad 260 and the semiconductor device gradually increases. The picker pad 260 may have a shape whose circumference decreases from bottom to top. In addition, a plurality of picker pads 260 may be provided. The plurality of pickup pads 260 may be connected to the lower part of each pickup body 250 arranged in the horizontal direction.

該接頭300可調整該拾取器墊260與該連結本體210間之一分開距離。該接頭300可朝該垂直方向延伸。例如,該拾取器墊260與該連結本體210間之分開距離可由該接頭300之一延伸長度決定。該接頭300可依據該電子組件D之半導體元件高度的相對減少來增加該拾取器墊260與該連結本體210間之分開距離。The joint 300 can adjust a separation distance between the picker pad 260 and the connecting body 210 . The joint 300 can extend toward the vertical direction. For example, the separation distance between the pickup pad 260 and the connecting body 210 can be determined by an extension length of the connector 300 . The joint 300 can increase the separation distance between the pickup pad 260 and the connection body 210 according to the relative reduction in the height of the semiconductor element of the electronic component D. Referring to FIG.

同時,在依據本實施例之圖中,該接頭300係顯示成具有比拾取器本體250小之一垂直長度,但本發明之精神不必受限於此。因此,該接頭300可具有與該拾取器本體250相同之垂直長度或比該拾取器本體250大之一垂直長度。此外,該接頭300可形成為具有與該第一拾取器本體相同之長度且可形成為具有比該第二拾取器本體小之長度。Meanwhile, in the drawing according to the present embodiment, the joint 300 is shown to have a vertical length smaller than that of the pickup body 250, but the spirit of the present invention is not necessarily limited thereto. Therefore, the joint 300 can have the same vertical length as the pickup body 250 or a vertical length larger than the pickup body 250 . In addition, the joint 300 may be formed to have the same length as the first pickup body and may be formed to have a smaller length than the second pickup body.

該接頭300之一上部份可與該連結本體210連接且其一下部份可與該拾取器本體250連接。換言之,該接頭300可設置在該連結本體210與該拾取器本體250之間。一接頭流徑300a可形成在該接頭300中。該接頭流徑300a可與該拾取器流徑250a及該墊流徑260a連通。此外,該接頭流徑300a可與該第一連結流徑210a、該第二連結流徑210b及該第三連結流徑210c連通。An upper portion of the joint 300 can be connected with the connecting body 210 and a lower portion can be connected with the picker body 250 . In other words, the joint 300 can be disposed between the connecting body 210 and the picker body 250 . A joint flow path 300a may be formed in the joint 300 . The joint flow path 300a can communicate with the pickup flow path 250a and the pad flow path 260a. In addition, the joint flow path 300a can communicate with the first connection flow path 210a, the second connection flow path 210b and the third connection flow path 210c.

當該拾取器墊260呈該夾持狀態時,該支持件400可支持該電子組件D。例如,該支持件400可防止該拾取器墊260成為該夾持狀態後,該拾取器墊260由於該電子組件D朝該水平方向偏離之一方向傾斜而偏離該夾持狀態。換言之,該支持件400可維持該電子組件D之半導體元件在面對該拾取器墊260時接觸該拾取器墊260的一狀態。該支持件400可包括一假支持件401。When the picker pad 260 is in the clamping state, the supporting member 400 can support the electronic component D. As shown in FIG. For example, the supporting member 400 can prevent the pickup pad 260 from deviating from the clamping state due to the electronic component D tilting in a direction that deviates from the horizontal direction after the picker pad 260 becomes the clamping state. In other words, the supporting member 400 can maintain a state where the semiconductor element of the electronic component D contacts the picker pad 260 when facing the picker pad 260 . The support 400 may include a dummy support 401 .

該假支持件401可在一水平方向上與該拾取器本體250及該拾取器墊260分開且與該連結本體210連接。該假支持件401之一下表面可在該水平方向上。例如,當該拾取器墊260成為該接觸狀態時,該假支持件401之下表面可與該半導體元件之一上表面平行。The dummy support 401 can be separated from the picker body 250 and the picker pad 260 in a horizontal direction and connected with the connecting body 210 . A lower surface of the dummy supporting member 401 may be in the horizontal direction. For example, when the pickup pad 260 is in the contact state, the lower surface of the dummy support 401 may be parallel to an upper surface of the semiconductor device.

當該拾取器墊260成為該接觸狀態時,該假支持件401可設置成面對該半導體元件。例如,當該拾取器墊260成為該接觸狀態時,該假支持件401可設置成面對該半導體元件且與該半導體元件垂直地分開該預定長度h1。該假支持件401可設置成使得該假支持件401之一中心軸與該拾取器本體250及該拾取器墊260中之至少一者的一中心軸互相平行且互相分開。即使該手具100之流體吸力未增加時,該假支持件401亦容許該電子組件D被該拾取器手具22穩定地夾持成一躺臥狀態。When the pickup pad 260 becomes the contact state, the dummy supporter 401 may be disposed to face the semiconductor device. For example, when the pickup pad 260 becomes the contact state, the dummy supporter 401 may be disposed to face the semiconductor element and be vertically separated from the semiconductor element by the predetermined length h1. The dummy support 401 can be arranged such that a central axis of the dummy support 401 is parallel to and separated from a central axis of at least one of the pickup body 250 and the pickup pad 260 . Even when the fluid suction force of the hand tool 100 is not increased, the dummy support member 401 allows the electronic component D to be stably held by the picker hand tool 22 in a lying state.

當該拾取器墊260成為該夾持狀態時,該假支持件401可接觸該半導體元件且支持該電子組件D。例如,當該墊流徑260a之下端鄰接該半導體元件時,該假支持件401可接觸該半導體元件。當該拾取器墊260成為該夾持狀態時,該假支持件401可防止該拾取器墊260變形。此外,該假支持件401可設置成當該拾取器墊260成為該夾持狀態時在一水平方向上與該拾取器墊260分開。When the picker pad 260 becomes the clamping state, the dummy supporter 401 can contact the semiconductor device and support the electronic component D. Referring to FIG. For example, the dummy support 401 may contact the semiconductor device when the lower end of the pad flow path 260a adjoins the semiconductor device. When the picker pad 260 becomes the clamping state, the dummy support 401 can prevent the picker pad 260 from being deformed. In addition, the dummy support member 401 may be disposed to be separated from the picker pad 260 in a horizontal direction when the picker pad 260 becomes the clamped state.

此外,當該拾取器墊260成為該夾持狀態時,該假支持件401可防止該拾取器墊260對該電子組件D加壓超過一預定壓力。換言之,當該拾取器墊260接觸該半導體元件時,該假支持件401可防止該拾取器墊260朝該水平方向滑動。In addition, when the picker pad 260 becomes the clamping state, the dummy support member 401 can prevent the picker pad 260 from pressing the electronic component D beyond a predetermined pressure. In other words, when the picker pad 260 contacts the semiconductor device, the dummy support member 401 can prevent the picker pad 260 from sliding toward the horizontal direction.

請再參閱圖6,該假支持件401可朝一垂直方向延伸。可設置複數假支持件401。該等複數假支持件401及該等複數拾取器本體250可配置在該水平方向上。Please refer to FIG. 6 again, the dummy supporting member 401 can extend in a vertical direction. A plurality of dummy supports 401 may be provided. The plurality of dummy supports 401 and the plurality of pickup bodies 250 can be arranged in the horizontal direction.

該控制器23可控制該氣動裝置24。該氣動裝置24可供應一流體至形成在該手具100中之手具流徑110a或自該手具流徑110a抽吸一流體。該控制器23可控制該氣動裝置24使得該氣動裝置24抽吸該流體且該拾取器墊260夾持該半導體元件。此外,該控制器23可控制該氣動裝置24使得該氣動裝置24供應該流體至該手具流徑110a且該拾取器墊260釋放該半導體元件。該控制器23可用包括一微處理器之一運算裝置來實施,且因為一實施方法對所屬技術領域中具有通常知識者顯而易見,所以省略其進一步之詳細說明。用於一流徑之管可設置在該手具流徑110a、該連結流徑及該拾取器流徑220a內且與該氣動裝置連接。The controller 23 can control the pneumatic device 24 . The pneumatic device 24 can supply a fluid to or pump a fluid from the hand flow path 110a formed in the hand 100 . The controller 23 can control the pneumatic device 24 such that the pneumatic device 24 sucks the fluid and the picker pad 260 clamps the semiconductor device. In addition, the controller 23 can control the pneumatic device 24 so that the pneumatic device 24 supplies the fluid to the tool flow path 110a and the picker pad 260 releases the semiconductor device. The controller 23 can be implemented by a computing device including a microprocessor, and since an implementation method is obvious to those skilled in the art, further detailed description thereof is omitted. Tubing for a flow path may be provided within the hand flow path 110a, the link flow path, and the pickup flow path 220a and connected to the pneumatic device.

同時,除了這組態以外,依據本發明之一第二實施例,該支持件400可更包括一外罩支持件402。此外,該接頭300可與該連結本體210及該拾取器墊260連接。以下,參照圖7至12進一步說明本發明之第二實施例。在第二實施例之說明中,主要說明在上述實施例與該第二實施例間之差異,且相同說明及符號請參照上述實施例。Meanwhile, in addition to this configuration, according to a second embodiment of the present invention, the supporting member 400 may further include a housing supporting member 402 . In addition, the joint 300 can be connected with the connecting body 210 and the picker pad 260 . Hereinafter, the second embodiment of the present invention will be further described with reference to FIGS. 7 to 12 . In the description of the second embodiment, the differences between the above-mentioned embodiment and the second embodiment are mainly explained, and the same explanations and symbols refer to the above-mentioned embodiment.

請參閱圖7及8,該接頭300之上部份可與該連結本體210連接,且該接頭300之下部份可與該拾取器墊260連接。該接頭300可配置成在一水平方向上與該拾取器本體250分開。該接頭300之垂直長度可與該拾取器本體250之垂直長度不同。例如,當該接頭300之垂直長度比該拾取器本體250之垂直長度大時,該拾取器墊260及與該接頭300連接之該連結本體210間的垂直距離比與該拾取器本體250連接之該拾取器墊260及該連結本體210間的垂直距離大。可設置一或多個接頭300。例如,當設置複數拾取器本體250時,複數接頭300可設置成對應該等複數拾取器本體250。在一更詳細之例子中,當設置複數拾取器本體250時,一個接頭300設置於該等複數拾取器本體250中之任一拾取器本體且複數接頭300可設置於其他拾取器本體250。此外,設置於該等複數拾取器本體250中之任一拾取器本體的該接頭300之垂直長度可與設置於其他拾取器本體250的該接頭300之垂直長度不同。Referring to FIGS. 7 and 8 , the upper part of the joint 300 can be connected with the connection body 210 , and the lower part of the joint 300 can be connected with the pick-up pad 260 . The joint 300 can be configured to be separated from the pickup body 250 in a horizontal direction. The vertical length of the connector 300 may be different from the vertical length of the pickup body 250 . For example, when the vertical length of the connector 300 is greater than the vertical length of the pickup body 250, the vertical distance between the pickup pad 260 and the connection body 210 connected to the connector 300 is greater than that of the pickup body 250. The vertical distance between the picker pad 260 and the connecting body 210 is large. One or more connectors 300 may be provided. For example, when plural pickup bodies 250 are provided, plural joints 300 may be provided corresponding to the plural pickup bodies 250 . In a more detailed example, when a plurality of pickup bodies 250 are provided, one connector 300 is provided on any one of the plurality of pickup bodies 250 and the plurality of connectors 300 can be provided on other pickup bodies 250 . In addition, the vertical length of the connector 300 provided on any one of the plurality of pickup bodies 250 may be different from the vertical length of the connector 300 provided on the other pickup bodies 250 .

當需要二或二個以上拾取器本體250時,該拾取器手具22具有被適當地安裝在該等複數拾取器本體250之各拾取器本體上的接頭300穩定地夾持具有不同高度之複數配置半導體元件的一效果。此外,該拾取器手具22具有防止該等複數拾取器墊260與該等複數半導體元件之間透過該接頭300產生一間隙的一效果。When two or more picker bodies 250 are needed, the picker handle 22 has a joint 300 that is properly installed on each of the plurality of picker bodies 250 to stably hold multiple pickers with different heights. An effect of configuring semiconductor elements. In addition, the picker handle 22 has an effect of preventing a gap between the picker pads 260 and the semiconductor devices through the joint 300 .

在該等複數拾取器墊中與該拾取器本體250連接之該拾取器墊可稱為一第一拾取器墊,且在該等複數拾取墊中與該接頭300連接之該拾取器墊可稱為一第二拾取器墊。Among the plurality of pickup pads, the pickup pad connected to the pickup body 250 may be referred to as a first pickup pad, and among the plurality of pickup pads, the pickup pad connected to the joint 300 may be referred to as is a second pickup pad.

請再參閱圖9及10,該外罩支持件402之一上部份可與該連結本體210連接。該外罩支持件402之一下表面可在該水平方向上。例如,當該拾取器墊260呈該接觸狀態時,該外罩支持件402之下表面可與該半導體元件之上表面平行。Referring to FIGS. 9 and 10 again, an upper portion of the cover support 402 can be connected with the connection body 210 . A lower surface of the cover supporting member 402 may be in the horizontal direction. For example, when the pickup pad 260 is in the contact state, the lower surface of the housing support 402 may be parallel to the upper surface of the semiconductor device.

當該拾取器墊260呈該接觸狀態時,該外罩支持件402可設置成面對該半導體元件。例如,當該拾取器墊260呈該接觸狀態時,該外罩支持件402可設置成面對該半導體元件且與該半導體元件垂直地分開一預定長度h2。When the picker pad 260 is in the contact state, the housing supporter 402 can be disposed to face the semiconductor device. For example, when the picker pad 260 is in the contact state, the housing support member 402 may be disposed to face the semiconductor device and be vertically separated from the semiconductor device by a predetermined length h2.

請再參閱圖11及12,當該拾取器墊260呈該夾持狀態時,該外罩支持件402可接觸該半導體元件且支持該電子組件D。例如,當該墊流徑260a之下端鄰接該半導體元件時,該外罩支持件402可接觸該半導體元件。此外,當該拾取器墊260呈該夾持狀態時,該外罩支持件402可防止該拾取器墊260變形。Please refer to FIGS. 11 and 12 again. When the picker pad 260 is in the clamping state, the housing supporting member 402 can contact the semiconductor device and support the electronic component D. Referring to FIG. For example, the housing support 402 may contact the semiconductor device when the lower end of the pad flow path 260a abuts the semiconductor device. In addition, when the picker pad 260 is in the clamping state, the cover support member 402 can prevent the picker pad 260 from being deformed.

此外,該外罩支持件402可設置成當該拾取器墊260呈該夾持狀態時在一水平方向上與該拾取器墊260分開。該外罩支持件402之一中心軸可與該拾取器本體250及該拾取器墊260中之至少一者的中心軸相同。藉由該外罩支持件402,當該電子組件D被夾持時,可防止該電子組件D環繞與該拾取器墊260之中心軸垂直的一軸旋轉。例如,即使當設置在該拾取器墊260前側的該被夾持電子組件D之一前部份重量比設置在該拾取器墊260後側的該被夾持電子組件D之一後部份重量大時,亦可透過該外罩支持件402防止該電子組件D向前及向下傾斜。即使當該手具100之流體吸力未增加時,該外罩支持件402亦容許該電子組件D以一躺臥狀態被該拾取器手具22穩定地夾持。In addition, the housing support 402 may be disposed to be separated from the picker pad 260 in a horizontal direction when the picker pad 260 is in the clamped state. A central axis of the housing support 402 may be the same as a central axis of at least one of the pickup body 250 and the pickup pad 260 . With the housing support 402, when the electronic component D is clamped, the electronic component D can be prevented from rotating around an axis perpendicular to the central axis of the picker pad 260. For example, even when a front portion of the clamped electronic component D disposed on the front side of the picker pad 260 weighs more than a rear portion of the clamped electronic component D disposed on the rear side of the picker pad 260 When it is large, the electronic component D can also be prevented from tilting forward and downward through the cover support member 402 . Even when the fluid suction force of the hand tool 100 is not increased, the housing support 402 allows the electronic component D to be stably held by the picker hand 22 in a lying state.

該外罩支持件402可包括一第一外罩支持件及一第二外罩支持件。該第一外罩支持件可設置成包圍該拾取器本體250。此外,該第二外罩支持件可設置成包圍該接頭300。另外,該第一外罩支持件及該第二外罩支持件可朝一垂直方向延伸不同長度。例如,當該拾取器本體250之垂直長度比該接頭300之垂直長度小時,該第一外罩支持件之垂直長度可比該第二外罩支持件之垂直長度小。在一更詳細例子中,該拾取器本體250之垂直長度及該接頭300之垂直長度間的差可與該第一外罩支持件及該第二外罩支持件間之差相同。The cover support 402 may include a first cover support and a second cover support. The first housing support may be disposed to surround the pickup body 250 . Furthermore, the second housing support may be arranged to surround the joint 300 . In addition, the first cover supporter and the second cover supporter may extend different lengths in a vertical direction. For example, when the vertical length of the pickup body 250 is smaller than the vertical length of the joint 300, the vertical length of the first housing holder may be smaller than the vertical length of the second housing holder. In a more detailed example, the difference between the vertical length of the pickup body 250 and the vertical length of the connector 300 may be the same as the difference between the first housing support and the second housing support.

以下,說明依據本發明實施例之該測試處理器1的操作。The operation of the test processor 1 according to the embodiment of the present invention will be described below.

該測試處理器1可被該處理器運輸器30移動使得該拾取器墊260面對該躺臥設置電子組件D之半導體元件的上表面。該拾取器墊260可成為該拾取器墊260之下端接觸該半導體元件之上表面的接觸狀態。該拾取器墊260呈該接觸狀態時可朝向該電子組件D向下移動該預定長度h1。當該拾取器墊260之一下表面完全地接觸該電子組件D且控制該氣動裝置24抽吸該流體時,該電子組件D可被該拾取器墊260夾持且該拾取器墊260可成為該夾持狀態。此外,當該拾取器墊260成為該夾持狀態時,該支持件400之一下表面可接觸該半導體元件之上表面。The test handler 1 can be moved by the handler transporter 30 so that the picker pad 260 faces the upper surface of the semiconductor device of the lying electronic assembly D. The picker pad 260 can be in a contact state where the lower end of the picker pad 260 contacts the upper surface of the semiconductor device. The picker pad 260 can move downward toward the electronic component D by the predetermined length h1 when the picker pad 260 is in the contact state. When a lower surface of the pick-up pad 260 fully contacts the electronic component D and controls the pneumatic device 24 to suck the fluid, the electronic component D can be held by the pick-up pad 260 and the pick-up pad 260 can become the clamping state. In addition, when the picker pad 260 is in the clamping state, a lower surface of the supporting member 400 can contact the upper surface of the semiconductor device.

該電子組件D可被該處理器運輸器30移動而呈該拾取器墊260成為該夾持狀態且該支持件400接觸該半導體元件之一狀態。該電子組件D可移動至一目標位置同時維持該躺臥狀態。The electronic component D can be moved by the processor transporter 30 to a state where the picker pad 260 becomes the clamping state and the support member 400 contacts the semiconductor device. The electronic component D can move to a target position while maintaining the lying state.

以上說明了本揭示之例子作為特定實施例,但這些特定實施例只是例子,且本揭示不限於此並且應被視為具有依據在本說明書中揭露之技術精神的最廣範圍。所屬技術領域中具有通常知識者可組合/取代該等揭露實施例以實施未揭露之一形狀的一型樣,且它亦未偏離本揭示之範圍。此外,所屬技術領域中具有通常知識者可依據本說明書輕易地改變或修改該等揭露實施例,且可了解的是該等改變或修改亦屬於本揭示之範圍。The examples of the present disclosure have been described above as specific embodiments, but these specific embodiments are just examples, and the present disclosure is not limited thereto and should be considered to have the widest scope according to the technical spirit disclosed in this specification. Those skilled in the art may combine/substitute the disclosed embodiments to implement an undisclosed version of a shape without departing from the scope of the present disclosure. In addition, those skilled in the art can easily change or modify the disclosed embodiments according to the present description, and it can be understood that such changes or modifications also fall within the scope of the present disclosure.

1:測試處理器 10:處理器本體 20:拾取器手具模組 21:拾取器手具支持件 22:拾取器手具 23:控制器 24:氣動裝置 30:處理器運輸器 100:手具 110:手具本體 110a:手具流徑 110b:固定銷槽 120:閂鎖部份 130:校準部份 131:第一校準銷 132:第二校準銷 200:拾取器單元 210:連結本體 210a:第一連結流徑 210b:第二連結流徑 210c:第三連結流徑 210d:第二校準槽 210e:第一校準槽 220:鎖固顎夾 230:閂鎖銷 240:固定銷 250:拾取器本體 250a:拾取器流徑 260:拾取器墊 260a:墊流徑 300:接頭 300a:接頭流徑 400:支持件 401:假支持件 402:外罩支持件 D:電子組件 h1,h2:預定長度 1: Test Processor 10: Processor body 20: Pickup Hand Tool Mod 21: Pickup Handle Support 22: Pickup Grip 23: Controller 24: Pneumatic device 30: Processor Transporter 100: Hand tools 110: Tool body 110a: hand tool flow path 110b: fixed pin groove 120: Latch part 130: Calibration part 131: First calibration pin 132: Second calibration pin 200: Pickup unit 210: Link ontology 210a: the first connection flow path 210b: the second connection flow path 210c: the third connection flow path 210d: the second calibration slot 210e: the first calibration tank 220: Locking Jaws 230: Latch pin 240: fixed pin 250: Pickup body 250a: Pickup flow path 260: Pickup Pad 260a: pad flow path 300: Connector 300a: joint flow path 400: support piece 401: fake support 402: Outer cover support D: electronic components h1, h2: predetermined length

圖1係依據本發明之一第一實施例之一測試處理器的立體圖。 圖2係依據本發明之第一實施例之一拾取器手具模組的立體圖。 圖3係沿著圖2之線A-A'截取之橫截面圖。 圖4係圖3之B的放大圖,顯示一拾取器墊接觸一電子組件之一狀態。 圖5係顯示圖4之拾取器墊夾持該電子組件之一狀態的一放大圖。 圖6係顯示設置複數假支持件之一狀態的橫截面圖。 圖7係依據本發明之一第二實施例之一拾取器手具模組的立體圖。 圖8係圖7中之拾取器手具模組的分解立體圖。 圖9係圖7之線C-C'截取之橫截面圖。 圖10係圖9之D的放大圖。 圖11係顯示圖10中之一拾取器墊成為一夾持狀態之狀態的放大圖。 圖12係顯示一個拾取器墊夾持一個電子組件之一狀態的橫截面圖。 FIG. 1 is a perspective view of a test handler according to a first embodiment of the present invention. Fig. 2 is a perspective view of a picker hand module according to the first embodiment of the present invention. FIG. 3 is a cross-sectional view taken along line AA' of FIG. 2 . FIG. 4 is an enlarged view of B in FIG. 3 , showing a state where a pick-up pad contacts an electronic component. FIG. 5 is an enlarged view showing a state where the electronic component is clamped by the pick-up pad of FIG. 4 . Fig. 6 is a cross-sectional view showing a state in which one of the plurality of dummy supports is set. FIG. 7 is a perspective view of a picker hand module according to a second embodiment of the present invention. FIG. 8 is an exploded perspective view of the picker tool module in FIG. 7 . Fig. 9 is a cross-sectional view taken along line CC' of Fig. 7 . FIG. 10 is an enlarged view of D in FIG. 9 . FIG. 11 is an enlarged view showing a state where one of the picker pads in FIG. 10 is brought into a clamping state. Fig. 12 is a cross-sectional view showing a state in which a pickup pad holds one of an electronic component.

1:測試處理器 1: Test Processor

10:處理器本體 10: Processor body

20:拾取器手具模組 20: Pickup Hand Tool Mod

21:拾取器手具支持件 21: Pickup Handle Support

22:拾取器手具 22: Pickup Grip

23:控制器 23: Controller

24:氣動裝置 24: Pneumatic device

30:處理器運輸器 30: Processor Transporter

100:手具 100: Hand tools

200:拾取器單元 200: Pickup unit

210:連結本體 210: Link ontology

250:拾取器本體 250: Pickup body

260:拾取器墊 260: Pickup Pad

400:支持件 400: support piece

401:假支持件 401: fake support

Claims (7)

一種拾取器手具,其包含: 一手具; 一拾取器單元,其與該手具可拆卸地連接且組配成夾持呈一平躺狀態設置之一電子組件;及 一支持件,其組配成支持該電子組件, 其中該拾取器單元包括一拾取器墊,該拾取器墊係能維持於一接觸狀態及一夾持狀態,於該接觸狀態下,該拾取器墊之一端部接觸該電子組件,而於該夾持狀態下,該拾取器墊藉由朝向該電子組件移動一預定長度來夾持該電子組件,使得該拾取器墊與該電子組件間之一接觸面積比該拾取器墊呈該接觸狀態時之接觸面積大,且 其中該支持件在該拾取器墊呈該接觸狀態時與該電子組件分開該預定長度且在該拾取器墊呈該夾持狀態時接觸該電子組件。 A picker hand comprising: a hand tool; a picker unit, which is detachably connected with the hand tool and configured to hold an electronic component arranged in a flat state; and a support member configured to support the electronic component, Wherein the pickup unit includes a pickup pad, the pickup pad can be maintained in a contact state and a clamping state, and in the contact state, one end of the pickup pad contacts the electronic component, and the pickup pad is in the clamping state In the holding state, the picker pad clamps the electronic component by moving toward the electronic component by a predetermined length, so that a contact area between the picker pad and the electronic component is smaller than that of the picker pad in the contact state. large contact area, and Wherein the support member is separated from the electronic component by the predetermined length when the picker pad is in the contact state and contacts the electronic component when the picker pad is in the clamping state. 如請求項1之拾取器手具,其中該拾取器單元更包括: 一拾取器本體,其組配成支持該拾取器墊;及 一連結本體,其設置在該手具與該拾取器本體之間且與該拾取器本體之一上部份連接, 其中該支持件包括一假支持件,該假支持件在一水平方向上與該拾取器本體分開設置,使得該假支持件之一中心與該拾取器本體之一中心分開,且 其中該假支持件包括一或多個假支持件。 The picker tool according to claim 1, wherein the picker unit further includes: a pickup body configured to support the pickup pad; and a connecting body, which is arranged between the hand tool and the picker body and connected with an upper part of the picker body, Wherein the support includes a dummy support that is separated from the pickup body in a horizontal direction such that a center of the dummy support is separated from a center of the pickup body, and Wherein the false supports include one or more false supports. 如請求項2之拾取器手具,更包含: 一接頭,其在一上下方向延伸,且具有與該拾取器本體可拆卸地連接之一下部份及與該連結本體可拆卸地連接之一上部份, 其中該連結本體係透過該接頭與該拾取器本體之該上部份間接地連接。 For example, the picker tool of claim 2 further includes: a joint extending in a vertical direction and having a lower portion detachably connected with the pickup body and an upper portion detachably connected with the linking body, Wherein the connecting body is indirectly connected with the upper part of the pickup body through the joint. 如請求項3之拾取器手具,其中該拾取器本體包括一或多個拾取器本體,且該拾取器墊可包括一或多個拾取器墊, 其中該一或多個拾取器本體各包括一第一拾取器本體及一第二拾取器本體, 其中該第一拾取器本體係與該連結本體及該拾取器墊直接地連接,且該第二拾取器本體係透過該接頭與該連結本體間接地連接,且 其中與該第一拾取器本體連接的該拾取器墊之一下端係設置在與該第二拾取器本體連接的該拾取器墊之一下端上方。 The picker tool according to claim 3, wherein the picker body includes one or more picker bodies, and the picker pad may include one or more picker pads, wherein each of the one or more pickup bodies includes a first pickup body and a second pickup body, wherein the first pickup body is directly connected to the connection body and the pickup pad, and the second pickup body is indirectly connected to the connection body through the joint, and Wherein a lower end of the pickup pad connected with the first pickup body is arranged above a lower end of the pickup pad connected with the second pickup body. 如請求項1之拾取器手具,其中該拾取器單元更包括: 一拾取器本體,其組配成支持該拾取器墊;及 一連結本體,其設置在該手具與該拾取器本體之間且與該拾取器本體之一上部份連接,且 其中該支持件包括設置成包圍該拾取器本體之至少一部份的一外罩支持件。 The picker tool according to claim 1, wherein the picker unit further includes: a pickup body configured to support the pickup pad; and a connecting body, which is arranged between the hand tool and the picker body and is connected to an upper part of the picker body, and Wherein the support includes a cover support arranged to surround at least a part of the pickup body. 如請求項1之拾取器手具,更包含: 一接頭,該接頭在一上下方向延伸且具有與該拾取器墊可拆卸地連接之一下部份, 其中該拾取器單元更包括: 一拾取器本體,其組配成支持該拾取器墊;及 一連結本體,其設置在該手具與該拾取器本體之間且與該接頭之一上部份及該拾取器本體之一上部份連接, 其中該接頭之該上部份與該連結本體可拆卸地連接,且 其中該支持件包括設置成包圍該接頭之至少一部份的一外罩支持件。 For example, the picker tool of claim 1 further includes: a joint extending in a vertical direction and having a lower portion detachably connected to the picker pad, Wherein the pickup unit further includes: a pickup body configured to support the pickup pad; and a connecting body, which is arranged between the hand tool and the picker body and connected with an upper part of the joint and an upper part of the picker body, wherein the upper portion of the connector is detachably connected to the connecting body, and Wherein the support includes a housing support disposed to surround at least a portion of the connector. 一種拾取器手具,其包含: 一手具; 一拾取器單元,其與該手具可拆卸地連接且組配成夾持呈一平躺狀態設置之一電子組件;及 一接頭,其與該拾取器單元可拆卸地連接, 其中該拾取器單元包括: 一拾取器本體,其組配成支持該拾取器墊; 一連結本體,其設置在該手具與該拾取器本體之間且與該拾取器本體之一上部份連接;及 一拾取器墊,其係能維持於一接觸狀態及一夾持狀態,於該接觸狀態下,該拾取器墊之一端部接觸該電子組件,而於該夾持狀態下,該拾取器墊藉由朝向該電子組件移動一預定長度來夾持該電子組件,使得該拾取器墊與該電子組件間之一接觸面積比該拾取器墊呈該接觸狀態時之接觸面積大,且 其中該接頭在一上下方向延伸,且具有與該拾取器本體及該拾取器墊中之至少一者可拆卸地連接之一下部份及與該連結本體可拆卸地連接之一上部份。 A picker hand comprising: a hand tool; a picker unit, which is detachably connected with the hand tool and configured to hold an electronic component arranged in a flat state; and a joint, which is detachably connected to the pickup unit, Wherein the pickup unit includes: a pickup body configured to support the pickup pad; a connecting body disposed between the hand tool and the picker body and connected to an upper portion of the picker body; and A pickup pad capable of being maintained in a contact state in which one end of the pickup pad contacts the electronic component and in a clamping state in which the pickup pad is clamping the electronic component by moving a predetermined length toward the electronic component such that a contact area between the picker pad and the electronic component is larger than when the picker pad is in the contact state, and Wherein the joint extends in a vertical direction, and has a lower part detachably connected with at least one of the pickup body and the pickup pad and an upper part detachably connected with the connecting body.
TW111139078A 2021-10-14 2022-10-14 Picker hand TWI815699B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2021-0136484 2021-10-14
KR20210136484 2021-10-14

Publications (2)

Publication Number Publication Date
TW202318556A true TW202318556A (en) 2023-05-01
TWI815699B TWI815699B (en) 2023-09-11

Family

ID=86098626

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111139078A TWI815699B (en) 2021-10-14 2022-10-14 Picker hand

Country Status (2)

Country Link
KR (1) KR20230053541A (en)
TW (1) TWI815699B (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5343954B2 (en) * 2010-11-01 2013-11-13 株式会社安川電機 Substrate transfer hand, substrate transfer apparatus and substrate transfer method including the same
PH12018000383A1 (en) * 2017-11-27 2019-06-10 Mi Equipment M Sdn Bhd Pick up head methodology using miniature spring for cushioning

Also Published As

Publication number Publication date
KR20230053541A (en) 2023-04-21
TWI815699B (en) 2023-09-11

Similar Documents

Publication Publication Date Title
TWI754747B (en) Wafer Fixtures with Identification Marks
TWI713991B (en) Die bonding device and manufacturing method of semiconductor device
JP7452936B2 (en) Probe card manufacturing jig, probe alignment system including the same, and probe cards manufactured using the same
KR20110110014A (en) Substrate transport hand and substrate transport robot
KR102297846B1 (en) Die bonding apparatus and manufacturing method of semiconductor device
US6502881B2 (en) Gripper for picking apparatus of a module IC handler
CN107450011B (en) Electronic component conveying device and electronic component inspection device
CN103929940B (en) Bowl formula feeder assembly and electronic component mounting apparatus
WO2014109196A1 (en) Probe apparatus and wafer transfer system
JP3662372B2 (en) Carrier mounting table
TW202318556A (en) Picker hand
TWI840007B (en) Picker hand and test handler including the same
US9400358B2 (en) Alignment jig for optical lens array
TWI836600B (en) Picker hand module
CN103987244B (en) Electronic component mounting apparatus and electronic component mounting method
CN108293322B (en) Working device
JP5903596B2 (en) Component suction nozzle
CN114043208A (en) Sensor assembling mechanism and assembling equipment
TW202430342A (en) Picker hand
JP2000183592A (en) Handling unit for carrying large board device
US20020036774A1 (en) Apparatus and method for handling and testing of wafers
JPH09232794A (en) Mounting head
JP2020202324A (en) Robot hand
JP5529034B2 (en) Detachable device, contact arm, and electronic component handling device
TWI854224B (en) Rack, board assembly and burn-in chamber apparatus including same