TW202310524A - Rotary connector - Google Patents

Abstract

Provided is a rotary connector that can function stably over a long period of time. The invention comprises: an outer-circumferential electrode 30; an inner-circumferential electrode 20 that is inserted to the outer-circumferential electrode 30 and that is pivotably disposed; a plurality of roller collectors 40 that are disposed so as to be capable of planetary motion between the outer-circumferential electrode 30 and the inner-circumferential electrode 20; a bearing 33 that pivotably supports the inner-circumferential electrode 20; and a bearing holder 31 for retaining the bearing 33. A passage 5 extends to the bearing 33 from a section where contact is made between the inner-circumferential electrode 20 and the roller collectors 40, the passage having bent sections 50-54.

Description

Rotary connector

field of invention

The present invention relates to a rotary connector for electrically connecting elements on the rotating side and elements on the stationary side in a rotating mechanism.

Background of the invention

In a variety of industrial fields, the rotary connector used to electrically connect the rotating side element and the stationary side element in the rotating mechanism can be arranged on the conductive element connected to the rotating side element. The current collecting element between the inner peripheral electrode and the conductive outer peripheral electrode connected to the stationary side element electrically connects the inner peripheral electrode and the outer peripheral electrode.

Regarding such a rotary connector, known current collecting elements include those filled with liquid metals such as mercury and gallium alloys, and those in which a plurality of conductive roller current collecting elements are arranged. In recent years, from the viewpoint of the environmental load caused by liquid leakage, the risk of electric leakage, etc., rotary connectors equipped with roller collectors have attracted attention.

For example, in the rotary connector disclosed in Patent Document 1, the inner peripheral electrode is inserted through the cylindrical outer peripheral electrode, and the cylindrical roller current collecting element is equally divided between the outer peripheral electrode and the inner peripheral electrode. In addition, bearing holders for holding bearings are respectively fixed to both axial ends of the outer peripheral electrode. The inner peripheral electrode is supported by the bearings so as to be able to rotate around the shaft. Thereby, when the rotating side element in the rotating mechanism is rotated, the inner peripheral electrode is driven by it to rotate. Furthermore, each roller current collecting element in contact with the outer peripheral surface of the inner peripheral electrode also rotates relatively to the inner peripheral electrode. At this time, since each roller current collecting element is also in contact with the inner peripheral surface of the outer peripheral electrode, the outer peripheral electrode rotates relatively. That is, each roller collector element is capable of performing a planetary motion that revolves around the inner peripheral electrode as an axis while rotating on its own axis, and electrically connects the inner peripheral electrode and the outer peripheral electrode. Prior art literature patent documents

Patent Document 1: Japanese Unexamined Patent Publication No. 2011-222463 (page 6, FIG. 2 )

Summary of the invention The problem to be solved by the invention

As far as the rotary connector like Patent Document 1 is concerned, the roller collector element is elastically deformable, and the outer diameter of the roller collector element is the radial direction between the outer peripheral surface of the inner peripheral electrode and the inner peripheral surface of the outer peripheral electrode. The size is also slightly larger, so the outer peripheral surface of the roller current collecting element is in surface contact with the outer peripheral surface of the inner peripheral electrode and the inner peripheral surface of the outer peripheral electrode respectively, so the current conduction efficiency is improved.

However, since the circumferential dimension of the inner circumferential surface of the outer circumferential electrode on the outer diameter side is longer than the circumferential dimension of the outer circumferential surface of the inner circumferential electrode located on the inner diameter side, the roller collector element is, on the one hand, Rotating along the outer peripheral surface of the inner peripheral electrode, on the other hand, it is easy to slide to the peripheral electrode.

In this way, during use, the roller current collector is elastically deformed and easily slides against the peripheral electrode, so it is easy to cause inclusions such as abrasion powder, peeling powder, etc. at the contact parts of the inner peripheral electrode, outer peripheral electrode, and roller collector element. In particular, if there is plating on the contact portion, inclusions are likely to be generated. Therefore, in the roller collector element such as Patent Document 1, where the axial direction is arranged along the vertical direction (vertical direction), foreign matter tends to enter the bearing on the lower side and become a factor that hinders the smooth rotation of the inner peripheral electrode. , so there is a situation where the life of the rotary connector is shortened.

The present invention is made in view of such problems, and aims to provide a rotary connector capable of stably functioning over a long period of time. means to solve problems

In order to solve the foregoing problems, the rotary connector of the present invention has: The outer peripheral electrode; the inner peripheral electrode, which is inserted through the aforementioned outer peripheral electrode and configured to be rotatable; a plurality of roller collector elements, configured to perform planetary motion between the aforementioned outer peripheral electrode and the aforementioned inner peripheral electrode; the bearing, which connects the aforementioned inner peripheral electrode an electrode supported for rotation about an axis; and a bearing holder retaining the aforementioned bearing, There is a bent portion in the path extending from the contact portion between the inner peripheral electrode and the roller collector element to the bearing. According to this, the foreign matter is blocked by the bent portion, so that it is suppressed from entering the bearing from the roller current collecting element. Thereby, the bearing is less likely to bite foreign matter. Therefore, the rotary connector can function stably for a long period of time.

The aforementioned rotary connector may be of a vertical type, and the aforementioned bent portion may be provided on the vertically lower side of the aforementioned roller collector element. According to this, the inclusions that descend by gravity are blocked by the curved portion, so that it can be prevented from moving linearly toward the bearing.

The aforementioned bearing may also be a bearing with a shield in which a shield element is provided at least on the upper side. According to this, the shielded bearing is less likely to bite into inclusions that have passed through the passage. Therefore, the rotary connector can function stably for a longer period of time.

It is also possible to form the above-mentioned curved portion by a protrusion extending in the radial direction. According to this, since the protrusions extending in the radial direction are blocked by the inclusions, it is possible to prevent them from moving linearly toward the bearing.

It is also possible to make the aforementioned protrusions have protrusions in the direction of the inner diameter and protrusions in the direction of the outer diameter, The protrusions in the inner diameter direction and the protrusions in the outer diameter direction overlap in the vertical direction. According to this, since the protrusions in the inner diameter direction and the protrusions in the outer diameter direction overlap in the vertical direction to form a plurality of bent portions, the passage is formed extending in a zigzag shape, so that the inclusions are less likely to reach the bearing. It is advisable to make the length of a part of the sawtooth of the passage perpendicular to the extending direction be less than half of the radial direction of the bearing, so that the inclusions are less likely to reach the bearing.

It is also possible to provide the above-mentioned curved portion with a concave opening that opens upward in the vertical direction. According to this, the ability of holding the blocked inclusions in the dimples provided in the bent portion is high.

It is also possible to make the above-mentioned pit be annular. According to this, the annular recess has high efficiency in blocking inclusions.

It is also possible that the aforementioned dimples are formed on the aforementioned bearing holder. According to this, since the bearing retainer is a stationary part that does not rotate, the rotational force does not act on the inclusions blocked by the dimples. Therefore, the dimples can securely hold inclusions.

It may also further include a protrusion extending toward the aforementioned recess. According to this, the protrusion not only prevents the foreign matter from moving linearly toward the bearing, but also easily induces the foreign matter to the recess.

It is also possible to make the aforesaid protrusion partly enter the aforesaid recess. According to this, the protrusions can form a labyrinth together with the recesses. Thereby, the protrusions and the dimples can more effectively prevent the movement of inclusions toward the bearing side.

form for carrying out the invention

The form of the rotary connector for implementing the present invention will be described below based on examples. [Example 1]

The rotary connector of Embodiment 1 will be described with reference to FIGS. 1 to 3 . Hereinafter, the top and bottom of the rotary connector will be described as viewed from the front in FIG. 1 . In detail, the upper side of the drawing on which the socket is arranged is regarded as the upper side of the rotary connector, and the lower side of the drawing on which the cover is arranged is taken as the lower side of the rotating connector.

The rotary connector 1 of this embodiment is a vertical type, and is used, for example, in a rotary part of a semiconductor manufacturing machine as a rotary mechanism. The rotary connector 1 supplies high-frequency power supplied from an external power source which is a static side element of a semiconductor manufacturing machine to a rotary shaft which is a rotary side element of a semiconductor manufacturing machine.

As shown in FIG. 1 , a rotary connector 1 is mainly composed of a rotating side element 2 , a stationary side element 3 , and a current collecting element 4 . The swivel-side element 2 connected to the swivel shaft of the semiconductor manufacturing machine is provided so as to be relatively rotatable to the stationary-side element 3 by being driven by the swivel shaft. The roller current collecting element 40 of the current collecting element 4 is set so as to be in electrical contact with the rotating side element 2 and the stationary side element 3 on the one hand with the rotation of the rotating side element 2, and to orbit the planet of the rotating side element 2 on the other hand. sports. In addition, the stationary-side element 3 has a connector 39 that can be connected to an external power source.

First, the swivel-side element 2 will be described. The rotating side element 2 is composed of an inner peripheral electrode 20 , a socket 21 , and a key 22 .

The inner peripheral electrode 20 is formed of metal or the like and has conductivity. As shown in Fig. 1 and Fig. 3, the inner peripheral electrode 20 is provided with an upper shaft 20a, a large-diameter body 20b, a middle-diameter body 20c (refer to Fig. 3 ), and a small-diameter body 20d (refer to Fig. ), lower shaft 20e. These are arranged so that the centers of the axes are on the same straight line.

The socket 21 is fixed on the upper shaft 20a by screwing. In addition, the key 22 is externally fitted and fixed to the outer peripheral surface of the upper shaft 20a.

The large-diameter body 20b is formed with a larger diameter than the upper shaft 20a. Also, an annular groove 20f is formed in the large-diameter body 20b so that its outer peripheral surface decreases in diameter toward the center in the axial direction. In addition, the outer peripheral surface of the large-diameter body 20b is plated with highly conductive silver, for example.

In addition, since plating is thin and complicates the drawing, it is omitted from illustration. The same applies to the plating described below.

The middle-diameter body 20c (refer to FIG. 3 ) is formed with a smaller diameter than the large-diameter body 20b. The small-diameter body 20d (refer to FIG. 3 ) is formed with a smaller diameter than the middle-diameter body 20c. The lower shaft 20e has approximately the same diameter as the upper shaft 20a, and in detail, is formed with approximately the same diameter as the part where the bearing 34 is embedded.

The socket 21 is formed of a material with high conductivity. The rotary shaft of the semiconductor manufacturing machine is connected to the socket 21 in a non-rotating state. In this state, the rotating shaft also constitutes anti-rotation because it is keyed with the key 22 .

Next, the stationary side requirement 3 will be described. The stationary element 3 is mainly composed of an outer peripheral electrode 30 , a lower bearing holder 31 , an upper bearing holder 32 , two bearings 33 , 34 , a case 35 , and a cover 36 . For convenience of description, let the bearings 33 and 34 be the stationary side element 3 .

The outer peripheral electrode 30 is formed of a highly conductive material into a cylindrical shape with a flange. The outer peripheral electrode 30 includes a cylindrical portion 30a, an outer flange portion 30b, and an inner flange portion 30k as a protrusion and an inner diameter direction protrusion.

The cylindrical portion 30a is formed in a cylindrical shape with a step extending in the radially inner direction below. On the inner diameter side of the outer peripheral electrode 30 , a large-diameter hole 30 c , a small-diameter hole 30 d , and a middle-diameter hole 30 e are sequentially formed from the upper side in the axial direction.

At the center of the large-diameter hole portion 30c in the axial direction, an annular groove 30f that expands in diameter toward the center in the axial direction is formed. This annular groove 30f is disposed opposite to the annular groove 20f of the inner peripheral electrode 20 . Furthermore, the inner peripheral surface of the large-diameter hole portion 30c is plated with highly conductive silver or the like.

The small-diameter hole portion 30d is a portion on the inner diameter side of the inner flange portion 30k, communicates with the large-diameter hole portion 30c, and has a smaller diameter than the large-diameter hole portion 30c. The middle-diameter hole portion 30e communicates with the small-diameter hole portion 30d, and is smaller in diameter than the large-diameter hole portion 30c and larger than the small-diameter hole portion 30d.

The outer flange part 30b is formed below the upper end edge of the cylindrical part 30a, and is annular and flat plate-shaped extending in the radially outer direction. The inner flange part 30k is formed slightly below the axial direction of the cylindrical part 30a, and is annular and flat plate-shaped extending in the inner diameter direction.

The lower side bearing holder 31 is formed of a resin molded product or the like, has high insulation properties, and is formed in a cylindrical shape with a flange. The lower bearing holder 31 includes a cylindrical portion 31a, an outer flange portion 31b, a protrusion, and an annular protrusion 37 that protrudes in the inner diameter direction in this order from the upper side in the axial direction.

The cylindrical portion 31a is formed in a cylindrical shape with a step extending in the radially inner direction above. On the inner diameter side of the lower side bearing holder 31 , a middle-diameter hole portion 31 c , a small-diameter hole portion 31 d , and a large-diameter hole portion 31 e are sequentially formed from the upper side in the axial direction.

The middle-diameter hole portion 31c opens upward in the axial direction. The small-diameter hole portion 31d is a portion on the inner diameter side of the annular protrusion 37, communicates with the middle-diameter hole portion 31c, and has a smaller diameter than the middle-diameter hole portion 31c. The large-diameter hole 31e communicates with the small-diameter hole 31d, opens downward, and has a larger diameter than the middle-diameter hole 31c.

The outer flange portion 31b is formed in an annular and flat plate shape that is substantially perpendicular to the lower end of the cylindrical portion 31a and extends in the radially outer direction.

As shown in FIG. 3 , the annular protrusion 37 includes a bottom portion 37 a and a radially inner cylindrical portion 37 b. The annular protrusion 37 is formed with an annular recess 38 which is an annular recess opening upward in the axial direction, that is, upward in the vertical direction.

The bottom portion 37a is formed in an annular and flat plate shape extending in the radially inner direction substantially perpendicular to the inner peripheral surface of the middle-diameter hole portion 31c. The radially inner cylindrical portion 37b is formed in a cylindrical shape extending upward in the axial direction substantially perpendicular to the radially inner end of the bottom portion 37a.

The bearing 33 is fitted in the large-diameter hole portion 31e. In addition, as will be described later, the outer ring 33c of the bearing 33 is in contact with the upper end surface of the large-diameter hole portion 31e.

The lower side bearing holder 31 is fixed by fitting its cylindrical portion 31 a into the diameter hole 30 e of the outer peripheral electrode 30 . In addition, the lower side bearing holder 31 has its outer flange portion 31b in contact with the lower end edge of the outer peripheral electrode 30 to obtain positional restriction. Thereby, the positioning of the outer wheel 33c of the bearing 33 is achieved.

The upper side bearing holder 32 is formed of a resin molded product or the like, has high insulation properties, and is formed in a cylindrical shape with a step extending in the inner diameter direction on the upper side.

The bearing 34 is fitted in the diameter hole 32 a of the upper side bearing holder 32 . In addition, since the bearings 33 and 34 have the same shape, in the following description, unless otherwise specified, the bearing 33 will be described and the description of the bearing 34 will be omitted.

The outer peripheral electrode 30 is fitted in the large-diameter hole portion 32 c of the upper bearing holder 32 . In addition, the upper end of the cylindrical portion 30 a of the outer peripheral electrode 30 is fitted into an annular concave portion 32 d of the upper side bearing holder 32 . Thereby, positioning of the outer peripheral electrode 30 in the radial direction and the axial direction with respect to the upper side bearing holder 32 is achieved.

Further, an annular groove 32 e that is open toward the upper side in the axial direction and recessed toward the lower side in the axial direction is formed at the upper end portion of the upper side bearing holder 32 . With this groove 32e, the creepage distance of the upper side bearing cage 32 becomes longer.

As shown in FIG. 3 , the bearing 33 is a bearing with a shield composed of an inner ring 33a, a plurality of balls 33b, an outer ring 33c, and lip seals 33d and 33e as shield elements. That is, the bearing 33 is a bearing with a shield in which lip seals 33d and 33e as shield elements are provided on the vertical upper side and the vertical lower side.

The lip seals 33d and 33e are ring-shaped, one end of which is fixed to the inner ring 33a, and the outer ring 33c slides on the lips. Thereby, inclusions are not easy to intrude into the rotating parts of the inner ring 33a, the ball 33b, and the outer ring 33c.

The lower shaft 20e of the inner peripheral electrode 20 is inserted into the bearing 33, more specifically, the inner ring 33a thereof. Also, the upper end of the inner ring 33a abuts against the lower end surface of the small-diameter body 20d.

The upper shaft 20 a of the inner peripheral electrode 20 is inserted into a bearing 34 .

By these bearings 33 and 34 , the inner peripheral electrode 20 is supported by the stationary side element 3 so as to be rotatable about an axis.

Returning to Fig. 1, the housing 35 has insulation and is formed in a cylindrical shape with steps. In addition, the cover 36 has insulating properties and is formed in a thin plate shape.

The upper side bearing holder 32 is embedded in the housing 35 . The bolts inserted into the communicating holes of the housing 35 are screwed into internal threads at the upper end of the upper bearing holder 32 , whereby the outer peripheral electrode 30 and the upper bearing holder 32 are integrally attached.

Moreover, the cover 36 is fixed to the lower end of the cylindrical part of the case 35 with a bolt.

The connector 39 is fixed on the side wall of the casing 35 . The peripheral electrode 30 and the connector 39 are electrically connected to each other by electric wires. Power can be supplied to the connector 39 from an external power source not shown.

Next, the current collection element 4 will be described. As shown in FIGS. 1 and 2 , the current collecting element 4 is composed of six roller current collecting elements 40 (refer to FIG. 2 ) and a current collecting element holder 41 . In addition, in FIG. 2, the annular grooves 20f and 30f are hatched.

The roller collector element 40 is made of metal etc., has high conductivity and is elastically deformable, and has a cylindrical shape with a diameter expanding from both ends in the axial direction to the center in the axial direction. Also, plating with highly conductive silver, for example, is applied to the outer peripheral surface.

The collector element holder 41 is composed of an upper side plate 41a, six pins 41b, and a lower side plate 41c. The upper side plate material 41a and the lower side plate material 41c are ring-shaped and thin-plate-shaped.

The pin 41b is highly conductive and elastically deformable. The six pins 41b are arranged in six equal parts (refer to FIG. 2 ), and the upper end of each pin is fixed to the upper side plate 41a.

The current collecting element 4 is configured by arranging six roller current collecting elements 40 in the annular groove 20f of the inner peripheral electrode 20, inserting six pins 41b through the corresponding roller current collecting elements 40 from the upper side in the axial direction, and inserting the pins 41b The lower end is pressed into the communicating hole of the corresponding lower side plate 41c for installation.

Furthermore, the collector element 4 is pressed into the annular groove 30f of the outer peripheral electrode 30 while the inner peripheral electrode 20 is inserted into the inner diameter side of the outer peripheral electrode 30 , while the collector element holder 41 and the pin 41b are elastically deformed. In addition, the installation method can be changed as appropriate. For example, it is also possible to form an introduction groove extending in the axial direction on the outer peripheral electrode 30 in accordance with the set position of each roller collector element 40. By making the roller collector element 40 along this The introduction groove is inserted so that the roller collector element 40 is inserted into the annular groove 30f.

In addition, in the gap between the annular groove 20f of the inner peripheral electrode 20 and the annular groove 30f of the outer peripheral electrode 30, the radial dimension of each position in the axial direction is slightly smaller than the radial dimension of the roller collector element 40 at the same position. short.

Thereby, the roller collector element 40 elastically deformed by being pinched by the annular groove 20f of the inner peripheral electrode 20 and the annular groove 30f of the outer peripheral electrode 30 is The shape groove 30f is a surface contact rather than a line contact. Therefore, in use, the inner peripheral electrode 20, the roller current collecting element 40, and the outer peripheral electrode 30 are in electrical contact reliably.

As shown in FIG. 3 , a passage 5 is formed between the element 2 on the rotating side and the element 3 on the stationary side, from the roller current collecting element 40 to the bearing 33 below.

The passage 5 is composed of an upper axial portion 50 , an upper radial portion 51 , a middle axial portion 52 , a lower radial portion 53 , and a lower axial portion 54 in order from the roller collector element 40 side. In addition, the channel 5 is formed by making the upper axial portion 50 and the upper radial portion 51, the upper radial portion 51 and the middle axial portion 52, the middle axial portion 52 and the lower radial portion 53, and the lower radial portion 52. The direction portion 53 and the lower axial direction portion 54 are substantially perpendicular to each other, and a plurality of bent portions are formed. That is, the passage 5 is formed in a zigzag shape by a plurality of bent portions.

Specifically, the upper axial portion 50 is mainly composed of the lower side plate 41c of the collector element holder 41 arranged at intervals in the radial direction between the outer peripheral surface of the large-diameter body 20b of the inner peripheral electrode 20 and the opposite outer peripheral surface. Divide the inner circumference. As a result, the upper axial portion 50 is opened toward the roller current collecting element 40 located on the upper side in the axial direction, and extends toward the lower side in the axial direction.

The upper radial portion 51 is divided by the lower end surface of the large-diameter body 20b of the inner peripheral electrode 20 and the upper end surface of the inner flange portion 30k of the outer peripheral electrode 30 arranged at intervals in the axial direction and slightly parallel to the lower end surface. Thereby, the upper radial portion 51 communicates with the lower end of the upper axial portion 50 , and extends toward the radially inner side in the radial direction approximately perpendicular to the lower end.

That is, the curved portion of the passage 5 formed by the upper axial portion 50 and the upper radial portion 51 being perpendicular to each other is formed by the protrusion of the outer peripheral electrode 30 extending from the cylindrical portion 30a toward the inner diameter direction, that is, the inward protrusion. The edge portion 30k is formed.

The middle axial portion 52 is mainly composed of the outer peripheral surface of the middle diameter body 20c of the inner peripheral electrode 20, the inner peripheral surface of the small-diameter hole portion 30d of the outer peripheral electrode 30 which is slightly parallel to the outer peripheral surface and spaced apart in the radial direction, and the inner peripheral surface of the diameter hole portion 31c of the lower side bearing holder 31. The inner peripheral surface of the small-diameter hole portion 30d and the inner peripheral surface of the middle-diameter hole portion 31c are arranged on the same straight line. Thereby, the middle axial portion 52 communicates with the inner radial end of the upper radial portion 51 , is substantially perpendicular to the inner radial end, and extends downward in the axial direction.

In addition, the middle axial portion 52 communicates with the annular recess 38 disposed in the extending direction thereof.

The lower radial portion 53 is formed from the lower end surface of the inner diameter body 20c of the inner peripheral electrode 20, and the upper end surface of the inner cylindrical portion 37b of the annular protrusion 37 arranged at intervals in the axial direction, which is slightly parallel to the lower end surface. to divide. Thereby, the upper radial portion 51 communicates with the lower end of the middle axial portion 52 , and extends toward the radially inner side in the radial direction approximately perpendicular to the lower end.

That is, the curved portion of the passage 5 formed by the middle axial portion 52 and the lower radial portion 53 being perpendicular to each other is formed by extending the lower bearing holder 31 from the cylindrical portion 31a toward the inner diameter direction. The protrusion, that is, the annular protrusion 37 is formed.

The lower axial portion 54 is mainly composed of the outer peripheral surface of the small-diameter body 20d of the inner peripheral electrode 20 and the inner diameter-side cylindrical portion 37b of the annular protrusion 37 arranged at intervals in the radial direction and slightly parallel to the outer peripheral surface. Zhou surface to divide. Thereby, it communicates with the inner diameter end of the lower radial direction portion 53 , extends toward the lower side in the axial direction approximately perpendicular to the inner diameter end, and opens toward the bearing 33 side located on the lower side in the axial direction.

The rotary connector 1 of this embodiment configured as described above makes the inner peripheral electrode 20 rotate relative to the outer peripheral electrode 30 by being driven by the rotary shaft of the semiconductor manufacturing machine.

Also, in this rotation, each roller current collecting element 40 rotates relatively to the outer peripheral surface of the large-diameter body 20b of the inner peripheral electrode 20, and on the other hand, the inner peripheral electrode 20 is used as an axis to move together with the current collecting element holder 41. Revolution.

At this time, each roller collector element 40 also rotates relatively to the inner peripheral surface of the large-diameter hole portion 30 c of the peripheral electrode 30 .

Thereby, in the state where the inner peripheral electrode 20 rotates relative to the peripheral electrode 30, each roller current collecting element 40 ensures a region where electricity can be conducted. Therefore, the rotary connector 1 can conduct electricity supplied from an external power source toward the rotary shaft of the semiconductor manufacturing machine.

In addition, each roller current collecting element 40 has a bottle shape in appearance. Furthermore, the annular grooves 20 f and 30 f are formed along the outer peripheral surface of the roller current collecting element 40 . Thus, even if the roller current collecting element 40 moves upward in the axial direction, its movement is restricted by the peripheral surfaces dividing the annular grooves 20f, 30f.

Furthermore, when the inner peripheral electrode 20 is to be tilted relative to the axis of the peripheral electrode 30, the roller current collecting element 40 is easy to track and divide the peripheral surface of the annular grooves 20f, 30f.

Therefore, in the rotary connector 1, the contact area between the roller current collecting element 40 and the peripheral surface defining the annular grooves 20f, 30f is not easily changed. Thereby, in the rotary connector 1 , it is easy to keep the amount of electricity supplied from the external power supply to be conducted toward the rotary shaft of the semiconductor manufacturing machine to be slightly constant.

In addition, each roller collector element 40 is rotatably supported by a high-conductivity pin 41b. Thereby, since the allowable current value from the pin 41b is added to the allowable current value from the roller collector element 40, the maximum amount of electricity that can be conducted becomes high.

In addition, the relative abutment of the roller current collecting elements 40 held by the current collecting element holder 41 in the circumferential direction is restricted. That is, the current collecting element holder 41 prevents the roller current collecting elements 40 from contacting each other and being damaged.

In addition, the bearing 33 is made of metal and has conductivity, while the bearing holders 31 and 32 are insulating. Therefore, the bearing holders 31 , 32 can prevent leakage of electricity conducted from the inner peripheral electrode 20 to the bearing 33 .

In addition, the rotary connector 1 is packaged by a case 35 and a cover 36 with high insulation properties. Therefore, the rotary connector 1 prevents unintentional electric leakage, inductance due to contact, and the like.

When each roller current collecting element 40 performs planetary motion, inclusions such as abrasion powder and plated peeling powder are generated due to friction, aging, and the like. Inclusions may fall into pathway 5 by gravity.

As mentioned above, the passage 5 is formed by making the upper axial portion 50 and the upper radial portion 51, the upper radial portion 51 and the middle axial portion 52, the middle axial portion 52 and the lower radial portion 53, and the lower axial portion 52 and the lower radial portion 53. The radial portion 53 and the lower axial portion 54 are respectively substantially perpendicular to each other, and a plurality of curved portions are formed, thereby forming a zigzag shape.

More specifically, the curved portion formed by making the upper axial portion 50 and the upper radial portion 51 approximately perpendicular is provided on the vertically lower side of the roller current collecting element 40, which prevents inclusions from falling in accordance with gravity. The case of moving linearly downward in the vertical direction. In addition, the curved portion formed by making the middle axial portion 52 and the lower radial portion 53 substantially perpendicular is also provided on the vertically lower side of the roller collector element 40, preventing inclusions from descending vertically according to gravity. The case of moving linearly downward in the direction. Here, in the description, the lower side in the vertical direction of the roller current collecting element 40 is not limited to just the lower side as long as it is the lower side. Thereby, foreign matter is less likely to reach the bearing 33 compared to a configuration in which the passage is formed in a straight line. In this way, the passage 5 is formed into a zigzag shape by a plurality of bent portions, thereby suppressing movement of inclusions.

In addition, since the passage 5 is narrow, it is difficult for foreign substances to move to the bearing 33 . In addition, regarding the degree of narrowing, from the perspective of preventing movement, the length of the passage 5 perpendicular to the extending direction (that is, the direction of the inclusions to the bearing 33) can also be less than half of the radial direction of the bearing, preferably the ball 33b below the diameter. In addition, although the present embodiment makes the upper axial portion 50, the upper radial portion 51, the middle axial portion 52, the lower radial portion 53, and the lower axial portion 54 of the passage 5 all narrow, it may also be One part is narrow.

In addition, the inclusions that descend while being guided by the upper axial portion 50 fall to the inner flange portion 30 k of the outer peripheral electrode 30 . That is, in the curved portion formed by making the upper axial portion 50 and the upper radial portion 51 substantially perpendicular, the inclusions fall down to the upper end surface of the inner flange portion 30k extending in the radial direction and are blocked, Therefore, movement of inclusions in the passage 5 can be restricted.

Furthermore, the inclusions that pass through the upper radial portion 51 and are guided by the middle axial portion 52 while descending fall to the annular recess 38 formed by the annular protrusion 37 of the lower bearing holder 31 . That is, in the bent portion formed by making the middle side axial direction portion 52 and the lower side radial direction portion 53 substantially perpendicular, the inclusions fall down to the annular recess formed by the annular protrusion 37 extending in the inner radial direction. The pit 38 is blocked, therefore, the movement of inclusions in the passage 5 can be restricted. Furthermore, since the annular protrusion 37 is arranged in the shape of an eave above the bearing 33, it is prevented that the inclusions move linearly toward the bearing 33. In addition, the annular protrusion 37 may not be formed with the annular recess 38. In this case, at the bent portion, the inclusions fall to the flat upper end surface of the annular protrusion 37 extending in the inner diameter direction to be blocked.

As described above, the inclusions are blocked by the bends formed in the passage 5, so that the entry from the roller collector element 40 into the bearing 33 side is suppressed. Thereby, the bearing 33 is less likely to bite foreign matter. Therefore, the rotary connector 1 can function stably for a long period of time.

Also, the rotary connector 1 of the present embodiment is a vertical type, and a curved portion is provided on the vertically lower side of the roller current collecting element 40, so that the inclusions that fall according to gravity are blocked by the curved portion, so that it can be prevented from falling. The case where the bearing moves linearly.

In addition, since the curved portion formed in the passage 5 is formed by the inner flange portion 30k and the annular protrusion 37 extending in the radially inner direction, it is possible to prevent foreign matter from moving linearly toward the bearing 33 . In addition, since the passage 5 is formed by extending the passage 5 in a zigzag shape by forming a plurality of bent portions, it is difficult for foreign matter to reach the bearing 33 .

Also, in the curved portion formed in the passage 5, the annular recess 38 formed in the annular protrusion 37 is formed in the shape of a groove opened upward in the axial direction. Therefore, the ability of the annular dimple 38 to retain the blocked inclusions is high.

In addition, the ring-shaped recess 38 can block falling inclusions irrespective of the position in the circumferential direction. Therefore, the efficiency of blocking inclusions by the annular recess 38 is high.

Also, the rotational force of the inner peripheral electrode 20 does not act on the annular recess 38 formed in the lower side bearing holder 31 which is a stationary member. Thereby, the rotational force of the inner peripheral electrode 20 does not act on the inclusions blocked by the annular recess 38 . Therefore, the annular dimple 38 can securely hold inclusions.

Also, the bearing 33, which is a bearing with a shield, is not easy to bite into the inclusions that have passed through the passage 5. Therefore, the rotary connector 1 can function stably for a longer period of time.

In addition, in the inner peripheral electrode 20, the large-diameter body 20b and the small-diameter body 20d are continuous. Since the protrusion 37 forms a curved portion, it is possible to prevent inclusions from moving linearly downward in the vertical direction according to gravity. [Example 2]

Next, the rotary connector of the second embodiment will be described with reference to FIG. 4 . In addition, the same components as those shown in the above-mentioned Example 1 are given the same reference numerals, and redundant descriptions are omitted.

As shown in FIG. 4 , the protrusion member 23 extending downward on the outer diameter side and the pushing member 24 extending downward on the inner diameter side are fixed to the inner peripheral electrode 120 .

The protruding member 23 is formed in a cylindrical shape with a flange, and has a cylindrical portion 23a as a protrusion extending toward the annular recess 38, and an inner flange portion 23b as a protrusion and a radially outer protrusion. The cylindrical portion 23a is formed in a cylindrical shape extending in the axial direction. The inner flange portion 23b is formed in an annular and flat plate shape extending in the radially inner direction substantially perpendicular to the upper end of the cylindrical portion 23a.

The protruding member 23 is fitted on the outer peripheral surface of the small-diameter body 120 d of the inner peripheral electrode 120 . In addition, the protruding member 23 is such that the upper end surface of the inner flange portion 23 b abuts against the lower end surface of the middle diameter body 120 c of the inner peripheral electrode 120 . Furthermore, the lower end surface of the inner flange portion 23b is disposed in substantially the same plane as the lower end surface of the small-diameter body 120d. That is, the inner flange portion 23b of the protruding member 23 extends from the small diameter body 120d of the inner peripheral electrode 120 toward the outer diameter direction, and the outer diameter end portion of the inner flange portion 23b protrudes further than the outer peripheral surface of the middle diameter body 120c. in the outer diameter direction. That is, the outer diameter end portion of the inner flange portion 23b constitutes a protrusion extending from the inner peripheral electrode 120 in the outer diameter direction.

The pressing member 24 is formed in a flanged cylindrical shape, and includes a cylindrical portion 24a and an outer flange portion 24b. The cylindrical portion 24a is formed in a cylindrical shape extending in the axial direction. The outer flange portion 24b is formed in an annular and flat plate shape extending in the radially outer direction substantially perpendicular to the upper end of the cylindrical portion 24a.

The pushing member 24 is externally embedded in the outer peripheral surface of the shaft 120e under the inner peripheral electrode 120 . In addition, the pushing member 24 straddles the lower end surface of the small-diameter body 120 d abutting against the inner peripheral electrode 120 and the lower end surface of the inner flange portion 23 b of the protruding member 23 on the upper end surface of the outer flange portion 24 b.

Moreover, the lower end edge of the pushing member 24 abuts against the inner ring 33 a of the bearing 33 to limit the position of the bearing 33 .

Here, the protruding member 23 is inserted into the annular recess 38 from the center of the cylindrical portion 23 a in the axial direction to the lower edge in more detail.

Thereby, the protruding member 23 is arranged in the shape of an eave above the axial direction of the annular recess 38 . Therefore, the protruding member 23 not only prevents the foreign matter from moving linearly toward the bearing 33 , but also easily induces the foreign matter to the annular recess 38 .

More specifically, the inner peripheral surface of the cylindrical portion 23 a is substantially parallel to the inner peripheral surface of the inner diameter-side cylindrical portion 37 b of the annular protrusion 37 and arranged at intervals in the radial direction. The lower end surface of the cylindrical portion 23 a is spaced apart from the upper end surface of the bottom 37 a of the annular protrusion 37 . The outer peripheral surface of the cylindrical portion 23a is substantially parallel to the inner peripheral surface of the diameter hole portion 31c of the lower side bearing holder 31 and arranged at intervals in the radial direction. That is, a labyrinth structure is formed by the cylindrical portion 23 a of the protruding member 23 and the annular recess 38 formed in the annular protrusion 37 .

Thereby, at the bent portion formed in the passage 5, inclusions fall down to the ring-shaped depression formed by the inner flange portion 23b of the protruding member 23 extending in the radially outer direction and the annular protrusion 37 extending in the radially inner direction. 38 is blocked, therefore, the movement of inclusions in the passage 5 can be restricted. Also, since the inner flange portion 23b extending in the radially outer direction and the annular protrusion 37 extending in the radially inner direction overlap in the vertical direction to form a plurality of curved portions, the passage 5 is formed to extend in a zigzag shape, so that inclusions Hard to reach bearings.

Furthermore, since the lower end of the cylindrical portion 23a extending downward from the inner flange portion 23b enters the annular recess 38 formed on the annular protrusion 37 to form a labyrinth structure, it is more effective to prevent the bearing from moving. Movement of inclusions on side 33. [Example 3]

Next, the rotary connector of Embodiment 3 will be described with reference to FIG. 5 . In addition, the same components as those shown in the above-mentioned Embodiments 1 and 2 are assigned the same symbols and redundant descriptions are omitted.

As shown in FIG. 5 , the inner peripheral electrode 220 has a large-diameter body 220b and a small-diameter body 220d continuous. Moreover, the small-diameter body 220d is formed with an annular protrusion 25 having a T-shaped cross section and an annular shape protruding from its outer peripheral surface in the outer diameter direction.

The annular protrusion 25 includes an annular plate portion 25 a as a protrusion and a radially outer protrusion, and a cylindrical portion 25 b as a protrusion extending toward the annular recess 38 . The annular plate portion 25a extends in the radially outer direction substantially perpendicular to the outer peripheral surface of the small-diameter body 220d. The cylindrical portion 25b is substantially perpendicular to the outer diameter end of the annular plate portion 25a, and extends upward and downward in the axial direction.

The annular protrusion 25 is arranged in the shape of an eave above the axial direction of the annular recess 38 . The cylindrical portion 25 b forms a labyrinth structure together with the annular recess 38 formed on the annular protrusion 37 .

Thus, in this embodiment, since the annular plate portion 25a of the annular protrusion 25 forms a plurality of bent portions in the passage 5 through the annular protrusion 37, the passage 5 is formed to extend in a zigzag shape, so that inclusions are difficult to reach bearing33.

Furthermore, since the lower end of the cylindrical portion 25b extending downward from the annular plate portion 25a enters the annular recess 38 formed on the annular protrusion 37 to form a labyrinth structure, it is more effective to prevent the bearing from moving. Movement of inclusions on side 33.

Also, above the annular protrusion 25, an annular recess 26 is formed as an annular recess opening upward in the axial direction by the upper end of the cylindrical portion 25b and the outer peripheral surface of the small-diameter body 220d. In this way, in addition to the annular recess 38 of the element 3 on the stationary side, the annular recess 26 of the element 2 on the rotating side can also be used to block inclusions.

Also, the length in the radial direction is such that the annular recess 26 is longer than the passage 5 between the annular protrusion 25 and the outer peripheral electrode 30 , and inclusions tend to flow into the annular recess 26 . [Example 4]

Next, the rotary connector of Embodiment 4 will be described with reference to FIG. 6 . In addition, the same components as the components shown in the above-mentioned Embodiments 1 to 3 are given the same symbols, and redundant descriptions are omitted.

As shown in FIG. 6 , the small-diameter body 320d of the inner peripheral electrode 320 is formed with an annular protrusion 27 as a protrusion protruding in the radially outer direction and protruding in the radially outer direction slightly perpendicular to the outer peripheral surface. The annular protrusion 27 is arranged in the shape of an eave above the axial direction of the annular recess 38 formed on the annular protrusion 37 .

Therefore, in this embodiment, since the annular protrusion 27 and the annular protrusion 37 form a plurality of curved portions in the passage 5 , the passage 5 is extended in a zigzag shape, so foreign objects are difficult to reach the bearing 33 .

In addition, the annular protrusion 27 defines a radial annular recess 28 together with the lower end surface of the large-diameter body 220b and the outer peripheral surface of the small-diameter body 320d. In this way, in addition to the annular recess 38 of the stationary side element 3, the radially annular recess 28 of the rotating side element 2, specifically the upper end surface of the annular protrusion 27, can also be used to block inclusions. Also, the length in the radial direction is such that the annular recess 28 in the radial direction is longer than the passage 5 between the annular protrusion 27 and the outer peripheral electrode 30 , and inclusions are easily blocked by the upper end surface of the annular protrusion 27 . [Example 5]

Next, the rotary connector of Embodiment 5 will be described with reference to FIG. 7 . In addition, the same components as the components shown in the above-mentioned Embodiments 1 to 4 are given the same reference numerals, and redundant descriptions are omitted.

As shown in FIG. 7 , the small-diameter body 420d of the inner peripheral electrode 420 is formed with a protrusion protruding radially from its outer peripheral surface and an annular protrusion 29 protruding in the radial direction with an L-shaped cross section.

The annular protrusion 29 includes an annular plate portion 29a and a cylindrical portion 29b. The annular plate portion 29a extends in the radially outer direction substantially perpendicular to the outer peripheral surface of the small-diameter body 420d. The cylindrical portion 29b extends upward in the axial direction substantially perpendicular to the outer diameter end of the annular plate portion 25a.

Thereby, the annular protrusion 29 is arranged in the shape of an eave above the axial direction of the annular recess 38 . Furthermore, the annular protrusion 29 forms an annular recess 426 together with the outer peripheral surface of the small-diameter body 420d.

The protrusions described in the foregoing embodiments 2 to 5 may be separate from the inner peripheral electrode, or may be integrated with the inner peripheral electrode. [Example 6]

Next, the rotary connector of Embodiment 6 will be described with reference to FIG. 8 . In addition, the same components as the components shown in the above-mentioned Examples 1 to 5 are given the same symbols, and redundant descriptions are omitted.

As shown in FIG. 8 , the difference from the first to fifth embodiments described above is that the outer peripheral electrode 530 does not include the inner flange portion 30k. That is, on the inner diameter side of the outer peripheral electrode 530, the large-diameter hole portion 530c and the middle-diameter hole portion 530e are continuous. In addition, compared with the first to fifth embodiments described above, the axial dimension of the outer peripheral electrode 530 on the lower side than the large-diameter hole portion 530c is shorter.

The lower side bearing holder 531 is formed in a cylindrical shape with a flange. The lower bearing holder 531 includes a cylindrical portion 531 a, an outer flange portion 531 b, and an annular protrusion 537 as a protrusion and an inner radial direction protrusion.

In the inner peripheral electrode 520, the large-diameter body 520b is continuous with the lower shaft 520e. Compared with the aforementioned embodiments 1-5, the axial dimension on the lower side of the large-diameter body 520b is shorter. Also, the protruding member 523 is fixed to the inner peripheral electrode 520 .

The protrusion member 523 is formed in a cylindrical shape with a flange, and includes a cylindrical portion 523a and an outer flange portion 523b as a protrusion and a protrusion in the outer diameter direction. The cylindrical portion 523a is formed in a cylindrical shape extending in the axial direction. The outer flange portion 523b is formed in an annular and flat plate shape extending in the radially outer direction substantially perpendicular to the upper end of the cylindrical portion 523a.

When the protruding member 523 is fitted on the outer peripheral surface of the lower shaft 520e of the inner peripheral electrode 520, the outer diameter end of the outer flange portion 523b protrudes in the outer diameter direction than the outer peripheral surface of the large diameter body 520b. That is, the outer radial end portion of the outer flange portion 523b constitutes a protrusion extending from the inner peripheral electrode 520 in the outer radial direction.

More specifically, the outer flange portion 523b extends substantially parallel to the upper end surface of the ring-shaped protrusion 537 that is a protrusion and inner diameter direction protrusion of the lower side bearing holder 531 at intervals in the axial direction. In addition, the outer diameter end edge of the outer flange portion 523b is disposed so as to be spaced from the inner peripheral surface of the inner diameter hole portion 530e of the outer peripheral electrode 530 in the radial direction.

In addition, the protruding member 523 defines a radial annular recess 528 together with the upper end surface of the bearing 33 . The annular protrusion 537 of the lower side bearing holder 531 is inserted into the radial annular recess 528, and the inner diameter end edge of the annular protrusion 537 is arranged to form the outer periphery of the cylindrical portion 523a of the protrusion member 523. The faces are radially spaced. That is, the protrusion member 523 and the annular protrusion 537 of the lower side bearing holder 531 constitute a labyrinth structure.

Thus, in this embodiment, since the outer flange portion 523b of the protruding member 523 and the annular protrusion 537 form a plurality of curved portions in the passage 5, the passage 5 is formed in a zigzag manner, so that foreign objects are difficult to reach. bearing33.

Furthermore, since the annular protrusion 537 is arranged in the shape of an eave above the bearing 33 , it is possible to prevent the inclusions from moving linearly toward the bearing 33 .

Furthermore, since the outer flange portion 523b of the protruding member 523 extending in the radially outer direction from the inner peripheral electrode 520 and the annular protrusion 537 extending in the radially inner direction from the bearing holder 531 on the lower side, a simple structure can be realized. Since a plurality of curved portions are formed, the path 5 leading from the roller current collecting element 40 to the bearing 33 below can also constitute a curved portion when the axial direction is small.

Also, since the protruding member 523 is separated from the inner peripheral electrode 520, the protruding member 523 can be formed of a material different from the inner peripheral electrode, for example, by selecting a material that is easy to absorb the inclusions so that the inclusions are easy to be absorbed. The end of the outer diameter of the outer flange portion 523b stops, which can more effectively prevent the movement of inclusions toward the bearing 33 side.

In addition, the protrusion described in this embodiment does not have to be formed as a protrusion member separate from the inner peripheral electrode, and may be integrally formed with the inner peripheral electrode to facilitate manufacture.

In addition, an annular recess opening upward in the axial direction may be formed on the upper end surface of the outer flange portion 523b or the upper end surface of the lower side bearing holder 531 , whereby inclusions can be blocked by using the annular recess.

Although Embodiments 1 to 6 of the present invention have been described above with reference to the drawings, the specific configuration is not limited to these Embodiments 1 to 6, and even if there are changes or additions within the scope of the gist of the present invention, they are not limited. included in the present invention.

For example, although the foregoing embodiments 1 to 6 have been described with a structure in which the inner peripheral electrode and the outer peripheral electrode are packaged by a case and a cover, they are not limited thereto, and may be exposed.

In addition, although the above-mentioned embodiments 1 to 6 are described with the configuration that the roller current collecting element is in the shape of a bottle, they are not limited thereto. The shape of the diameter can also be changed as appropriate. In response to this, the shape of the annular groove for disposing the roller current collecting element can also be appropriately changed. Furthermore, the annular groove may also be in a shape other than along the current collecting element of the roller.

In addition, although the above-mentioned Embodiments 1 to 6 have been described in which the pins of the retainer are formed of a highly conductive material, they are not limited thereto, and may be formed of a highly insulating material.

In addition, although the foregoing embodiments 1 to 6 have been described in the case where the pin of the cage is elastically deformable, it is not limited thereto, and may be a rigid body. With such a configuration, the contact area between the pin and the roller current collecting element can be reduced by making the pin thinner.

In addition, although the above-mentioned embodiments 1 to 6 have been described with ring-shaped pits, they are not limited thereto, and one or a plurality of non-annularly continuous pits may be formed.

In addition, although the foregoing embodiments 1 to 6 have been described with only one ring-shaped recess formed on the stationary side, they are not limited to this, and a plurality of recesses may be formed at intervals in the radial direction. In this regard, the same applies to the requirements on the rotation side.

In addition, although the above-mentioned embodiments 1 to 6 are described with the configuration that the ring-shaped protrusion and the ring-shaped recess are formed on the bearing holder on the lower side of the stationary side element, the stationary side element may also be formed on other elements such as peripheral electrodes.

In addition, although the above-mentioned embodiments 1 to 6 are described in terms of the configuration in which the inner peripheral electrode, the outer peripheral electrode, and the roller current collector are respectively applied with plating, they are not limited to this, and may be made of a material with high conductivity. formed, or no plating is applied.

In addition, although the above-mentioned embodiments 1 to 6 are described with the configuration that the upper and lower lip seals are respectively arranged on the bearing, they are not limited to this, at least the upper side is sufficient, and the lower side lip seals can also be used. be omitted.

1: Rotary connector 2: Rotating side elements 3: Static side elements 4: Collector elements 5: access 20, 120, 220, 320, 420, 520: inner peripheral electrodes 20a: upper shaft 20b, 220b, 520b: large diameter body 20c, 120c: medium diameter body 20d, 120d, 220d, 320d, 420d: small diameter body 20e, 120e, 520e: lower shaft 20f, 30f: ring groove 21: socket 22: key 23,523: Protruding members 23a, 25b: cylindrical part (protrusion part) 23b: Inner flange part (protrusion, protrusion in the outer diameter direction) 24: Push components 24a, 29b, 30a, 31a, 523a, 531a: cylindrical part 24b, 30b, 31b, 531b: Outer flange part 25: ring protrusion 25a: Annular plate portion (protrusion, protrusion in the outer diameter direction) 26, 38, 426: Annular pits (dimples) 27,29: Annular protrusions (protrusions, protrusions in the direction of the outer diameter) 28: Annular recess in radial direction 29a: Annular plate part 30,530: peripheral electrodes 30c, 31e, 32c, 530c: Large diameter hole 30d, 31d: small diameter hole 30e, 31c, 32a, 530e: middle diameter hole 30k: Inner flange part (protrusion, protrusion in the inner diameter direction) 31,531: Lower side bearing retainer 32: Upper side bearing retainer 32d: Annular recess 32e: ditch 33,34: Bearings (bearings with shields) 33a: inner wheel 33b: Ball 33c: outer wheel 33d, 33e: lip seals 35: Shell 36: cover 37,537: Annular protrusions (protrusions, protrusions in the direction of the inner diameter) 37a: Bottom 37b: inner diameter side cylindrical part 39: Connector 40: Roller collector element 41:Collector element holder 41a: Upper side plate 41b: pin 41c: Bottom side plate 50: Upper shaft direction part (curved part) 51: Upper radial direction part (curved part) 52: Medial axis direction part (curved part) 53: Lower radial direction part (curved part) 54: Lower shaft direction part (curved part) 523b: Outer flange part (protrusion, protrusion in the outer diameter direction) 528: Annular recess in radial direction

Fig. 1 is a sectional view of a rotary connector according to Embodiment 1 of the present invention. Fig. 2 is an axial sectional view of the rotary connector of the first embodiment. Fig. 3 is an enlarged view of important parts of the rotary connector of the first embodiment. Fig. 4 is an enlarged view of important parts of a rotary connector according to Embodiment 2 of the present invention. Fig. 5 is an enlarged view of important parts of a rotary connector according to Embodiment 3 of the present invention. Fig. 6 is an enlarged view of important parts of a rotary connector according to Embodiment 4 of the present invention. Fig. 7 is an enlarged view of important parts of a rotary connector according to Embodiment 5 of the present invention. Fig. 8 is an enlarged view of important parts of a rotary connector according to Embodiment 6 of the present invention.

5: access

20: inner peripheral electrode

20b: large diameter body

20c: medium diameter body

20d: small diameter body

20e: Lower shaft

20f, 30f: ring groove

30: Peripheral electrodes

30c, 31e: large diameter hole

30d, 31d: small diameter hole

30e, 31c: middle diameter hole

30k: Inner flange part (protrusion, protrusion in the inner diameter direction)

31: Lower side bearing retainer

31a: cylindrical part

31b: outer flange part

33: Bearing (bearing with shield)

33a: inner wheel

33b: Ball

33c: outer wheel

33d, 33e: lip seals

37: Annular protrusion (protrusion, protrusion in inner diameter direction)

37a: Bottom

37b: inner diameter side cylindrical part

38: Annular pit (pit)

40: Roller collector element

41b: pin

41c: Bottom side plate

50: Upper shaft direction part (curved part)

51: Upper radial direction part (curved part)

52: Medial axis direction part (curved part)

53: Lower radial direction part (curved part)

54: Lower shaft direction part (curved part)

Claims (10)

A rotary connector comprising: an outer peripheral electrode; an inner peripheral electrode inserted through the outer peripheral electrode and configured to be rotatable; a plurality of roller collector elements configured to be planetary between the outer peripheral electrode and the inner peripheral electrode. movement; a bearing supporting the aforementioned inner peripheral electrode to rotate about an axis; and a bearing retainer holding the aforementioned bearing, There is a bent portion in the path extending from the contact portion between the inner peripheral electrode and the roller collector element to the bearing. The rotary connector according to claim 1, wherein the rotary connector is a vertical type, and the curved portion is provided on the lower side of the roller collector element in the vertical direction. The rotary connector according to claim 2, wherein said bearing is a bearing with a shield provided with a shield element at least above the vertical direction. The rotary connector according to claim 2, wherein the bending portion is formed by a protrusion extending radially. The rotary connector according to claim 4, wherein the aforementioned protrusion has an inner diameter direction protrusion and an outer diameter direction protrusion, The protrusions in the inner diameter direction and the protrusions in the outer diameter direction overlap in the vertical direction. The rotary connector according to claim 4 or 5, wherein the above-mentioned curved portion has a concave opening vertically upward. The rotary connector as claimed in claim 6, wherein the aforementioned dimple is annular. The rotary connector as claimed in claim 7, wherein the dimple is formed in the bearing holder. The rotary connector according to claim 8, further comprising a protrusion extending toward the aforementioned recess. The rotary connector as claimed in claim 9, wherein a part of the protrusion enters the recess.

Images