CN115579701B

CN115579701B - Plug assembly capable of being electrically connected in rotating mode and semiconductor equipment

Info

Publication number: CN115579701B
Application number: CN202211575895.2A
Authority: CN
Inventors: 马保群; 宋维聪
Original assignee: Bitong Semiconductor Equipment Suzhou Co ltd
Current assignee: Bitong Semiconductor Equipment Suzhou Co ltd
Priority date: 2022-12-09
Filing date: 2022-12-09
Publication date: 2023-02-28
Anticipated expiration: 2042-12-09
Also published as: CN115579701A

Abstract

The invention provides a plug assembly capable of being electrically connected in a rotating way and semiconductor equipment, which comprise a fixing part, a shell, a stator, a first wiring end, a second wiring end, a rotor, a first rotating conducting rod, a second rotating conducting rod, a first contact structure, a second contact structure, a third wiring end and a fourth wiring end, wherein the shell is arranged on the fixing part and is provided with a central through hole, a first annular cavity and a second annular cavity; the stator comprises a first annular conductive component and a second annular conductive component, and a first terminal and a second terminal are respectively connected with the first annular conductive component and the second annular conductive component; the first rotating conducting rod and the second rotating conducting rod transversely penetrate through the rotor and respectively extend into the first annular cavity and the second annular cavity; the first contact structure and the second contact structure are respectively fixedly connected with the first rotating conducting rod and the second rotating conducting rod and are respectively connected with the first annular conducting assembly and the second annular conducting assembly in a sliding manner; the third and fourth terminals are connected to the first and second rotary conductive rods, respectively. The plug assembly which can be electrically connected in a rotating way can effectively avoid potential safety hazards such as electric leakage, electric shock, fire and the like caused by damage and breakage of the power supply lead.

Description

Plug assembly capable of being electrically connected in rotating mode and semiconductor equipment

Technical Field

The invention belongs to the field of manufacturing of semiconductor high-end equipment, and relates to a plug assembly capable of being electrically connected in a rotating mode and semiconductor equipment.

Background

Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD) are widely used in the semiconductor industry for thin film Deposition. For example, a CVD apparatus includes a reaction chamber and a wafer heating susceptor, and when two or more gaseous raw materials are introduced into the reaction chamber, the gaseous raw materials chemically react with each other to form a new material and deposit it on the surface of the wafer of the heating susceptor to form a deposited film.

The vapor deposition coating process is complex and diversified, various factors can influence the uniformity of the coating thickness during coating, and in order to meet higher coating process requirements, a wafer heater mechanism capable of lifting and reciprocating rotation is required.

When the rotary heating plate of the vapor deposition equipment rotates in the horizontal direction of 360 degrees, power needs to be supplied to the heating plate so as to reach the process temperature required by the wafer during film deposition. How to improve the plug assembly of the semiconductor device so that the rotating structure does not affect the power supply of the circuit while dynamically rotating, i.e. ensuring that the rotating structure does not damage the power supply wire, is an important issue to be addressed by those skilled in the art.

Disclosure of Invention

In view of the above-mentioned shortcomings of the prior art, the present invention provides a plug assembly capable of being electrically connected in a rotatable manner and a semiconductor device, which are used for solving the problem that the power supply of the circuit is easily affected while the rotating component is dynamically rotated in the prior art.

To achieve the above and other related objects, the present invention provides a plug assembly for rotatable electrical connection, comprising:

a fixed part;

the shell is arranged on the fixing part, a central through hole, a first annular cavity and a second annular cavity are arranged in the shell, the central through hole vertically penetrates through the upper surface and the lower surface of the shell, the second annular cavity is positioned above the first annular cavity, and the first annular cavity and the second annular cavity are opened from the inner wall of the central through hole and horizontally extend towards the direction close to the outer side wall of the shell;

the stator comprises a first annular conductive assembly and a second annular conductive assembly, the first annular conductive assembly is positioned in the first annular cavity and fixedly connected with the shell, and the second annular conductive assembly is positioned in the second annular cavity and fixedly connected with the shell;

the first terminal and the second terminal, one end of the first terminal is fixedly connected with the first annular conductive component, the other end of the first terminal protrudes out of the outer side wall of the shell, one end of the second terminal is fixedly connected with the second annular conductive component, and the other end of the second terminal protrudes out of the outer side wall of the shell;

the bottom end of the rotor extends into the central through hole, the top surface of the rotor is higher than that of the shell, the rotor is provided with an accommodating space, and the accommodating space vertically penetrates through the upper surface and the lower surface of the rotor;

the first rotating conducting rod transversely penetrates through the rotor, two ends of the first rotating conducting rod extend into the first annular concave cavity, the second rotating conducting rod transversely penetrates through the rotor, and two ends of the second rotating conducting rod extend into the second annular concave cavity;

the first contact structure is fixedly connected to two ends of the first rotating conducting rod and is in sliding connection with the first annular conducting assembly, and the second contact structure is fixedly connected to two ends of the second rotating conducting rod and is in sliding connection with the second annular conducting assembly;

and one end of the third terminal is fixedly connected with the first rotating conducting rod, the other end of the third terminal upwards penetrates through the accommodating space to protrude out of the top surface of the rotor, one end of the fourth terminal is fixedly connected with the second rotating conducting rod, and the other end of the fourth terminal upwards penetrates through the accommodating space to protrude out of the top surface of the rotor.

Optionally, the first annular conductive assembly includes a first slip ring and a second slip ring located on the first slip ring, the first slip ring is fixedly connected with the bottom wall of the first annular cavity, and the second slip ring is fixedly connected with the top wall of the first annular cavity; the second annular conductive assembly comprises a third slip ring and a fourth slip ring positioned on the third slip ring, the third slip ring is fixedly connected with the bottom wall of the second annular cavity, and the fourth slip ring is fixedly connected with the top wall of the second annular cavity.

Optionally, the first terminal is fixedly connected with the first slip ring and/or the second slip ring; the second terminal is fixedly connected with the third slip ring and/or the fourth slip ring.

Optionally, the first contact structure includes a connecting piece, a first supporting frame, a second supporting frame, a first supporting piece, a second supporting piece, a first ball, a second ball and an elastic component, the connecting piece is fixedly connected to the end of the first rotating conductive rod, the first supporting frame and the second supporting frame are both fixedly connected to one side of the connecting piece away from the first rotating conductive rod, the second supporting frame is located above the first supporting frame, the first supporting frame is provided with a first circular hole, the second supporting frame is provided with a second circular hole, the first circular hole and the second circular hole are oppositely arranged in the vertical direction, the first supporting piece and the second supporting piece are both located between the first supporting frame and the second supporting frame, the second support piece is positioned above the first support piece, the bottom end of the elastic part is connected with the top end of the first support piece, the top end of the elastic part is connected with the bottom end of the second support piece, the bottom surface of the first support piece is provided with a first hemispherical groove facing the first round hole, the top surface of the second support piece is provided with a second hemispherical groove facing the second round hole, the top part of the first ball is placed in the first hemispherical groove, the bottom surface of the first ball penetrates through the first round hole and protrudes out of the bottom surface of the first support piece, the bottom part of the second ball is placed in the second hemispherical groove, and the top surface of the second ball penetrates through the second round hole and protrudes out of the top surface of the second support piece; the second contact structure and the first contact structure adopt the same structure.

Optionally, the elastic component includes a vertically arranged spring, a first boss is arranged at the top end of the first support member, a second boss is arranged at the bottom end of the second support member, the first boss is sleeved at the bottom end of the spring, and the second boss is sleeved at the top end of the spring.

Optionally, the first slip ring is provided with a concave annular sliding groove, the second slip ring is provided with a concave annular sliding groove, the concave annular sliding groove and the concave annular sliding groove are arranged in a vertical direction in a relative manner, the first ball can roll and slide in the concave annular sliding groove, and the second ball can roll and slide in the concave annular sliding groove; the third slip ring and the first slip ring are of the same structure, and the fourth slip ring and the second slip ring are of the same structure.

Optionally, a lower concave annular groove corresponding to the lower concave annular sliding groove is formed in the bottom wall of the first annular cavity, and an upper concave annular groove corresponding to the upper concave annular sliding groove is formed in the top wall of the first annular cavity; the second annular concave cavity and the first annular concave cavity adopt the same structure.

Optionally, the rotor includes a first clamping portion and a second clamping portion, the first clamping portion includes a first annular base and a first splicing piece fixedly connected to the first annular base, the second clamping portion includes a second annular base and a second splicing piece fixedly connected to the second annular base, first through holes allowing the first rotating conductive rod to pass through are formed in two opposite side walls of the first annular base, second through holes allowing the second rotating conductive rod to pass through are formed in two opposite side walls of the second annular base, and the first splicing piece vertically passes through the second annular base and is spliced with the second splicing piece to form a tubular structure.

Optionally, the rotor is further provided with a first installation operation window and a second installation operation window, the first installation operation window transversely penetrates through the first annular base to expose a connection portion of the first rotating conductive rod and the third terminal, and the second installation operation window transversely penetrates through the second annular base and the first splicing member to expose a connection portion of the second rotating conductive rod and the fourth terminal.

Optionally, a first channel and a second channel are arranged in the housing, the first channel extends horizontally from an opening on an outer side wall of the housing in a direction close to the first annular cavity until communicating with the first annular cavity, the second channel extends horizontally from an opening on an outer side wall of the housing in a direction close to the second annular cavity until communicating with the second annular cavity, the first terminal transversely passes through the first channel, and the second terminal transversely passes through the second channel.

Optionally, the length of the portion of the first terminal protruding from the outer side wall of the housing is equal to the length of the portion of the second terminal protruding from the outer side wall of the housing.

Optionally, a top surface of the third terminal is flush with a top surface of the fourth terminal.

Optionally, an air gap is provided between the bottom surface of the rotor and the fixing portion.

The present invention also provides a semiconductor device comprising a rotatable member, wherein the semiconductor device further comprises a plug assembly as described in any one of the above which is electrically connected rotatably, the plug assembly being electrically connected to the rotatable member.

Optionally, the semiconductor apparatus comprises a vapor deposition apparatus comprising a deposition chamber and a rotatable heating plate located within the deposition chamber, the plug assembly being electrically connected to the rotatable heating plate.

As described above, the plug assembly of the present invention includes a fixing portion, a housing, a stator, a first terminal, a second terminal, a rotor, a first rotating conductive rod, a second rotating conductive rod, a first contact structure, a second contact structure, a third terminal, and a fourth terminal, wherein the housing is mounted on the fixing portion and has a central through hole, a first annular cavity, and a second annular cavity; the stator comprises a first annular conductive component and a second annular conductive component, one end of a first terminal is fixedly connected with the first annular conductive component, the other end of the first terminal protrudes out of the outer side wall of the shell, one end of a second terminal is fixedly connected with the second annular conductive component, and the other end of the second terminal protrudes out of the outer side wall of the shell; the bottom end of the rotor extends into the central through hole, the top surface of the rotor is higher than the top surface of the stator, and the rotor is provided with an accommodating space; the first rotating conducting rod transversely penetrates through the rotor, two ends of the first rotating conducting rod extend into the first annular concave cavity, the second rotating conducting rod transversely penetrates through the rotor, and two ends of the second rotating conducting rod extend into the second annular concave cavity; the first contact structure is fixedly connected to two ends of the first rotating conducting rod and is in sliding connection with the first annular conducting assembly, and the second contact structure is fixedly connected to two ends of the second rotating conducting rod and is in sliding connection with the second annular conducting assembly; one end of the third terminal is fixedly connected with the first rotating conducting rod, the other end of the third terminal upwards penetrates through the accommodating space to protrude out of the top surface of the rotor, one end of the fourth terminal is fixedly connected with the second rotating conducting rod, and the other end of the fourth terminal upwards penetrates through the accommodating space to protrude out of the top surface of the rotor. The plug assembly which can be electrically connected in a rotating way can effectively avoid potential safety hazards such as electric leakage, electric shock, fire and the like caused by damage and breakage of the power supply lead.

Drawings

Fig. 1 is a perspective view of a rotatable electrical connector plug assembly according to the present invention.

Fig. 2 shows a perspective cross-sectional view of a plug assembly of the rotatable electrical connection of the present invention.

Fig. 3 is a sectional view showing a structure in which a housing and a stator are combined in a plug assembly for rotatable electrical connection according to the present invention.

Fig. 4 is a perspective view of the stator, the first terminal and the second terminal of the plug assembly of the present invention.

Fig. 5 is a schematic perspective view of a structure of a rotor, a first rotating conductive rod, a second rotating conductive rod, a first contact structure, a second contact structure, a third terminal and a fourth terminal of the plug assembly of the present invention.

Fig. 6 is a cross-sectional view of a rotor, a first rotating conductive rod, a second rotating conductive rod, a first contact structure, a second contact structure, a third terminal, and a fourth terminal of a plug assembly of the rotatable electrical connection of the present invention.

Fig. 7 is a schematic perspective view of a first rotatable conductive rod, a second rotatable conductive rod, a first contact structure, a second contact structure, a third terminal and a fourth terminal of the rotatable electrically connected plug assembly of the present invention.

FIG. 8 is a cross-sectional view of the first rotating conductive rod, the second rotating conductive rod, the first contact structure, the second contact structure, the third terminal and the fourth terminal of the rotatable electrical connector plug assembly of the present invention in an assembled configuration.

Fig. 9 is a perspective view of a first contact structure of the rotatable electrical connector plug assembly of the present invention.

Fig. 10 shows a cross-sectional view of a first contact structure in a plug assembly for a rotatable electrical connection of the present invention.

FIG. 11 is a schematic perspective view of a chemical vapor deposition apparatus.

Fig. 12 is a sectional view of the chemical vapor deposition apparatus shown in fig. 11.

FIG. 13 is a cross-sectional view of the CVD apparatus with the deposition chamber and the sealing bellows omitted.

Fig. 14 shows a perspective view of a rotatable heating disk.

Element number description: 1. a stationary portion, a recess 101, a housing 2, a central through-hole 201, a first annular cavity 202, a second annular cavity 203, a first channel 204, a second channel 205, a stator 3, a first annular conductive component 301, a first slip ring 3011, a second slip ring 3012, a second annular conductive component 302, a third slip ring 3021, a fourth slip ring 3022, a first terminal 4, a second terminal 5, a rotor 6, a first clamping portion 601, a first annular base 6011, a first splice 6012, a first through-hole 6013, a first mounting window 6014, a second clamping portion 602, a second annular base 6021, a

second splice

6022, 6023 second through hole, 6024 second installation operation window, 7 first rotation conductive rod, 8 second rotation conductive rod, 9 first contact structure, 901 connecting piece, 902 first supporting frame, 903 second supporting frame, 904 first supporting piece, 905 second supporting piece, 906 first ball, 907 second ball, 908 elastic component, 10 second contact structure, 11 third terminal, 12 fourth terminal, 13 deposition cavity, 14 rotatable heating plate, 15 sealing corrugated pipe, 16 fixing guide sleeve, 17 jack, A concave annular chute, B concave annular chute, C concave annular groove, D concave annular groove.

Detailed Description

The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.

Please refer to fig. 1 to 14. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.

Example one

Referring to fig. 1 and 2, fig. 1 is a schematic perspective view of a plug assembly, and fig. 2 is a cross-sectional perspective view of the plug assembly, which includes a fixing portion 1, a housing 2, a stator 3, a first terminal 4, a second terminal 5, a rotor 6, a first rotating conductive rod 7, a second rotating conductive rod 8, a first contact structure 9, a second contact structure 10, a third terminal 11, and a fourth terminal 12.

Specifically, the housing 2 is installed on the fixing portion 1, the fixing portion 1 is used for fixing the housing 2, in this embodiment, the fixing portion 1 includes a bearing tray and a pair of side wings, the housing 2 is placed on the bearing tray, and the housing 2 and the bearing tray can be fixed by a fastening member. The pair of side wings are distributed on two sides of the bearing disc and fixedly connected with the bearing disc, and the side wings are provided with mounting holes for fixing the plug assembly on equipment adopting the plug assembly.

As shown in fig. 2, an air gap is provided between the bottom surface of the rotor 6 and the fixing portion 1 to prevent the rotor 6 from rubbing against the top surface of the fixing portion 1 during rotation. In this embodiment, the air gap is implemented by a groove 101 disposed on the top surface of the fixing portion 1, the bottom surface of the rotor 6 is located within the opening range of the groove 101, and the bottom surface of the rotor 6 is higher than the bottom surface of the groove 101.

Specifically, referring to fig. 3, a cross-sectional view of a structure formed by combining the housing 2 and the stator 3 is shown, wherein a central through hole 201 is formed in the housing 2, and the central through hole 201 vertically penetrates through the upper surface and the lower surface of the housing 2. In the present embodiment, the housing 2 is annular as a whole.

Specifically, as shown in fig. 3, a first annular cavity 202 and a second annular cavity 203 are further disposed in the housing 2, the second annular cavity 203 is located above the first annular cavity 202 and spaced from the first annular cavity 202 by a certain distance, the first annular cavity 202 and the second annular cavity 203 both open from the inner wall of the central through hole 201 and horizontally extend in a direction close to the outer side wall of the housing 2, the stator 3 includes a first annular conductive component 301 and a second annular conductive component 302, the first annular conductive component 301 is located in the first annular cavity 202 and fixedly connected to the housing 2, and the second annular conductive component 302 is located in the second annular cavity 203 and fixedly connected to the housing 2.

By way of example, the housing 2 is assembled from a four-layer structure, and it is easier to form the first annular cavity 202 and the second annular cavity 203 by a layered process.

Specifically, referring to fig. 4, a schematic perspective view of a structure formed by combining the stator 3, the first terminal 4 and the second terminal 5 is shown, in this embodiment, the first annular conductive component 301 includes a first slip ring 3011 and a second slip ring 3012 located on the first slip ring 3011; the second annular conductive assembly 302 includes a third slip ring 3021 and a fourth slip ring 3022 on the third slip ring 3021; the first slip ring 3011, the second slip ring 3012, the third slip ring 3021, and the fourth slip ring 3022 are all annular.

Specifically, referring to fig. 3 and fig. 4, the first slip ring 3011 is fixedly connected to the bottom wall of the first annular cavity 202, and the second slip ring 3012 is fixedly connected to the top wall of the first annular cavity 202; the third slip ring 3021 is fixedly connected to the bottom wall of the second annular cavity 203, and the fourth slip ring 3022 is fixedly connected to the top wall of the second annular cavity 203.

Specifically, referring to fig. 1 and fig. 4, in the embodiment, one end of the first terminal 4 is fixedly connected to the first annular conductive element 301, the other end of the first terminal 4 protrudes out of the outer sidewall of the housing 2, one end of the second terminal 5 is fixedly connected to the second annular conductive element 302, and the other end of the second terminal 5 protrudes out of the outer sidewall of the housing 2.

By way of example, the first terminal 4 is fixedly connected to the first slip ring 3011 and/or the second slip ring 3012; the second terminal 5 is fixedly connected to the third slip ring 3021 and/or the fourth slip ring 3022, wherein fig. 4 shows a situation in which the first terminal 4 is fixedly connected to the first slip ring 3011 only and the second terminal 5 is fixedly connected to the third slip ring 3021 only.

As an example, as shown in fig. 1, a first channel 204 and a second channel 205 are provided in the housing 2, the first channel 204 opens from an outer side wall of the housing 2 and horizontally extends in a direction close to the first annular cavity 202 until communicating with the first annular cavity 202, the second channel 205 opens from an outer side wall of the housing 2 and horizontally extends in a direction close to the second annular cavity 203 until communicating with the second annular cavity 203, the first terminal 4 transversely passes through the first channel 204, and the second terminal 5 transversely passes through the second channel 205.

As an example, the length of the portion of the first terminal 4 protruding from the outer side wall of the housing 2 is equal to the length of the portion of the second terminal 5 protruding from the outer side wall of the housing 2, wherein the portion of the first terminal 4 protruding from the outer side wall of the housing 2 and the portion of the second terminal 5 protruding from the outer side wall of the housing 2 are used for electrically connecting with a power supply circuit.

Specifically, as shown in fig. 2, the bottom end of the rotor 6 extends into the central through hole 201, and the top surface of the rotor 6 is higher than the top surface of the housing 2.

Specifically, referring to fig. 5, a schematic perspective view of a structure formed by combining the rotor 6, the first rotating conductive rod 7, the second rotating conductive rod 8, the first contact structure 9, the second contact structure 10, the third terminal 11, and the fourth terminal 12 is shown, in this embodiment, the rotor 6 is provided with an accommodating space, and the accommodating space vertically penetrates through an upper surface and a lower surface of the rotor 6.

Specifically, please refer to fig. 6, which shows a schematic perspective view of a structure formed by combining the first rotating conductive rod 7, the second rotating conductive rod 8, the first contact structure 9, the second contact structure 10, the third terminal 11 and the fourth terminal 12, in this embodiment, one end of the third terminal 11 is fixedly connected to the first rotating conductive rod 7, and one end of the fourth terminal 12 is fixedly connected to the second rotating conductive rod 8.

As an example, the first rotating conductive rod 7 is parallel to the second rotating conductive rod 8, the second rotating conductive rod 8 is located right above the first rotating conductive rod 7, the lower end of the third terminal 11 is fixedly connected to one side surface of the middle portion of the first rotating conductive rod 7, and the lower end of the fourth terminal 12 is fixedly connected to the other side surface of the middle portion of the second rotating conductive rod 8.

Specifically, referring back to fig. 5, the other end of the third terminal 11 passes through the accommodating space to protrude from the top surface of the rotor 6, and the other end of the fourth terminal 12 passes through the accommodating space to protrude from the top surface of the rotor 6.

Illustratively, the top surface of the third terminal 11 is flush with the top surface of the fourth terminal 12, and the portion of the third terminal 11 protruding above the top surface of the rotator 6 and the portion of the fourth terminal 12 protruding above the top surface of the rotator 6 are used to electrically connect to the rotatable heating disk for powering the heating disk.

Specifically, as shown in fig. 5, the first rotating conductor bar 7 transversely penetrates through the rotor 6, and the second rotating conductor bar 8 transversely penetrates through the rotor 6.

As an example, please refer to fig. 7, which is an exploded schematic view of the rotor 6, in this embodiment, the rotor 6 includes a first clamping portion 601 and a second clamping portion 602, the first clamping portion 601 includes a first annular base 6011 and a first splicing member 6012 fixedly connected to the first annular base 6011, the second clamping portion 602 includes a second annular base 6021 and a second splicing member 6022 fixedly connected to the second annular base 6021, two opposite sidewalls of the first annular base 6011 are respectively opened with a first through hole 6013 for allowing the first rotating conductive rod 7 to pass through, and two opposite sidewalls of the second annular base 6021 are respectively opened with a second through hole 6023 for allowing the second rotating conductive rod 8 to pass through.

Specifically, referring to fig. 5 and fig. 7, the first splicing member 6012 vertically penetrates through the second annular base 6021 and is spliced with the second splicing member 6022 to form a tubular structure, in this embodiment, the second annular base 6021 is located on the first annular base 6011, and the first splicing member 6012 and the second splicing member 6022 are tightly connected by a fastening member, so as to fix the first rotating conductive rod 7 and the second rotating conductive rod 8 and maintain the vertical distance between the first rotating conductive rod 7 and the second rotating conductive rod 8.

For example, the rotor 6 is further provided with a first installation operation window 6014 and a second installation operation window 6024, where the first installation operation window 6014 transversely penetrates through the first annular base 6011 to expose a connection portion between the first rotating conductive rod 7 and the third terminal 11, and the second installation operation window 6024 transversely penetrates through the second annular base 6021 and the first splicing member 6012 to expose a connection portion between the second rotating conductive rod 8 and the fourth terminal 12, in this embodiment, the first rotating conductive rod 7 and the third terminal 11 are connected by a fastener, and the second rotating conductive rod 8 and the fourth terminal 12 are connected by a fastener.

Specifically, referring back to fig. 2, two ends of the first rotating conductive rod 7 extend into the first annular cavity 202, and two ends of the second rotating conductive rod 8 extend into the second annular cavity 203.

Specifically, referring to fig. 8, which is a schematic diagram of a core structure of the plug assembly, in this embodiment, the first contact structure 9 is fixedly connected to two ends of the first rotating conductive rod 7 and slidably connected to the first annular conductive assembly 301, and the second contact structure 10 is fixedly connected to two ends of the second rotating conductive rod 8 and slidably connected to the second annular conductive assembly 302.

Specifically, referring to fig. 9 and 10, fig. 9 is a schematic perspective view of the first contact structure 9, and fig. 10 is a cross-sectional view of the first contact structure 9, in this embodiment, the first contact structure 9 includes a connecting member 901, a first supporting frame 902, a second supporting frame 903, a first supporting member 904, a second supporting member 905, a first ball 906, a second ball 907, and an elastic member 908. The second contact structure 10 is of the same construction as the first contact structure 9.

Referring to fig. 6, 9 and 10, in this embodiment, the connecting member 901 is fixedly connected to an end portion of the first rotating conductive rod 7, the first support frame 902 and the second support frame 903 are both fixedly connected to a side of the connecting member 901 away from the first rotating conductive rod 7, the second support frame 903 is located above the first support frame 902, the first support frame 902 is provided with a first circular hole, the second support frame 903 is provided with a second circular hole, the first circular hole and the second circular hole are vertically arranged in a relative manner, the first support 904 and the second support 905 are both located between the first support frame 902 and the second support frame 903, the second support 905 is located above the first support 904, a bottom end of the elastic member 908 is connected to a top end of the first support 904, a top end of the elastic member 908 is connected to a bottom end of the second support 905, a bottom surface of the first support 904 is provided with a first hemispherical recess facing the first circular hole, a top surface of the second support 905 is provided with a second hemispherical recess, a top surface of the second hemispherical recess 906 of the second hemispherical ball protrudes from a bottom surface of the second support 906, and a bottom surface of the second hemispherical recess 906 protrudes from the second hemispherical recess 906, and the second hemispherical recess 906 passes through the second hemispherical recess 906. The first round hole and the second round hole can guarantee the stability of rolling of the ball in the hemispherical groove of the supporting piece.

As an example, the elastic member 908 may include a vertically disposed spring or other suitable elastic element, in this embodiment, the elastic member 908 is a spring, a first boss is disposed at a top end of the first supporting member 904, a second boss is disposed at a bottom end of the second supporting member 905, a bottom end of the spring is sleeved on the first boss, and a top end of the spring is sleeved on the second boss.

Referring back to fig. 3, 8 and 9, the first slip ring 3011 has a concave annular sliding groove a, the second slip ring 3012 has a concave annular sliding groove B, the concave annular sliding groove a and the concave annular sliding groove B are arranged in a vertical direction, the first ball 906 can slide in the concave annular sliding groove a in a rolling manner, and the second ball 907 can slide in the concave annular sliding groove B in a rolling manner; the third slip ring 3021 and the first slip ring 3011 have the same structure, and the fourth slip ring 3022 and the second slip ring 3012 have the same structure.

For example, the inner walls of the concave annular chute a and the concave annular chute B need to be as smooth as possible, so that the balls can smoothly roll and slide in the chutes, and the normal electrical connection of the rotor 6 can be guaranteed to be unaffected while the rotor keeps rotating.

In the present embodiment, as shown in fig. 3, the bottom wall of the first annular cavity 202 is provided with a concave annular groove C corresponding to the concave annular sliding groove a, and the top wall of the first annular cavity 202 is provided with a concave annular groove D corresponding to the concave annular sliding groove B. The second annular cavity 203 is of the same construction as the first annular cavity 202.

The plug subassembly of rotatable electricity connection of this embodiment includes the fixed part, a housing, the stator, first wiring end, the second wiring end, the rotor, first conducting rod rotates, the second rotates the conducting rod, first contact structure, the second contact structure, third wiring end and fourth wiring end, wherein, first wiring end, the second wiring end respectively with the first annular conducting component of stator, second annular conducting component fixed connection, the third wiring end, the fourth wiring end respectively with the first conducting rod that rotates along with the rotor rotation, second dwang fixed connection, fixed connection is in the first contact structure at first conducting rod both ends that rotates, fixed connection is in the second contact structure at second dwang both ends respectively with the first annular conducting component of stator, second annular conducting component sliding connection. In the plug assembly capable of being electrically connected in a rotating mode, the first terminal and the second terminal are partially protruded out of the outer side wall of the shell and can be electrically connected with the circuit power supply part in a static state, the third terminal and the fourth terminal are partially protruded out of the top end of the rotor and can rotate along with the rotation of the rotor to supply power to the rotatable heating plate, and potential safety hazards such as electric leakage, electric shock and fire caused by damage and breakage of a power supply lead can be effectively avoided through the connection mode.

Example two

In this embodiment, a semiconductor device is provided, which includes a rotatable member, wherein the semiconductor device further includes a plug assembly electrically connected to rotate as described in the first embodiment, and the plug assembly is electrically connected to the rotatable member.

By way of example, the semiconductor device may be, but is not limited to, a vapor deposition device including a deposition chamber and a rotatable heater plate within the deposition chamber, wherein the plug assembly is electrically connected to the rotatable heater plate to power a heating function of the heater plate.

By way of example, the vapor deposition apparatus may be a chemical vapor deposition apparatus or a physical vapor deposition apparatus. A chemical vapor deposition apparatus is exemplified below.

Referring to fig. 11 and 12, fig. 11 is a schematic perspective view of a chemical vapor deposition apparatus, and fig. 12 is a cross-sectional view of the chemical vapor deposition apparatus, including a deposition chamber 13, a rotatable heating plate 14, and a plug assembly electrically connected in a rotatable manner according to a first embodiment, where the rotatable heating plate 14 is located in the deposition chamber 13, and the plug assembly electrically connected in a rotatable manner is located below the rotatable heating plate 14.

Specifically, the rotatable heating plate 14 includes a wafer bearing plate and a rotating support shaft located below the wafer bearing plate, and a bottom plate of the deposition chamber 13 is provided with a through hole for allowing the rotating support shaft to pass through.

As an example, the chemical vapor deposition apparatus further includes a sealing corrugated tube 15, the sealing corrugated tube 15 is located below the deposition chamber 13 and faces the through hole of the bottom plate of the deposition chamber 13, the top end of the sealing corrugated tube 15 is connected with the bottom plate of the deposition chamber 13 in a sealing manner, the bottom end of the sealing corrugated tube 15 is connected with the top surface of the housing 2 of the plug assembly in a sealing manner, and the portion of the rotor 6 protruding from the top surface of the housing 2 extends into the sealing corrugated tube 15.

Referring to fig. 13, a cross-sectional view of the chemical vapor deposition apparatus is shown after the deposition chamber 13 and the sealing bellows 15 are omitted, in this embodiment, the chemical vapor deposition apparatus further includes a fixed guide sleeve 16, the fixed guide sleeve 16 is sleeved around a portion of the rotor 6 protruding from the top surface of the housing 2, a top surface of the fixed guide sleeve 16 is higher than a top surface of the rotor 6, and a bottom end of the rotating support shaft extends into the fixed guide sleeve 16 to be connected with the rotor 6. On the one hand, the fixed guide sleeve 16 is used for guiding when the rotatable heating plate 14 is installed, and on the other hand, the fixed guide sleeve 16 is fixedly connected with the rotating support shaft and the rotor 6 and is used for fixing when the rotatable heating plate 14 rotates.

Referring to fig. 14, a schematic perspective view of the rotatable heating plate 14 is shown, in this embodiment, a bottom surface of a rotating support shaft of the rotatable heating plate 14 is provided with a jack 17 matched with the third terminal 11 and the fourth terminal 12, and the third terminal 11 and the fourth terminal 12 extend into the corresponding jack 17 to electrically connect the plug assembly and the rotatable heating plate, so that potential safety hazards such as electric leakage, electric shock, fire and the like caused by damage and breakage of power supply wires can be effectively avoided.

In summary, the plug assembly of the present invention includes a fixing portion, a housing, a stator, a first terminal, a second terminal, a rotor, a first rotating conductive rod, a second rotating conductive rod, a first contact structure, a second contact structure, a third terminal, and a fourth terminal, wherein the housing is disposed on the fixing portion and has a central through hole, a first annular cavity, and a second annular cavity; the stator comprises a first annular conductive component and a second annular conductive component, one end of a first terminal is fixedly connected with the first annular conductive component, the other end of the first terminal protrudes out of the outer side wall of the shell, one end of a second terminal is fixedly connected with the second annular conductive component, and the other end of the second terminal protrudes out of the outer side wall of the shell; the bottom end of the rotor extends into the central through hole, the top surface of the rotor is higher than the top surface of the stator, and the rotor is provided with an accommodating space; the first rotating conducting rod transversely penetrates through the rotor, two ends of the first rotating conducting rod extend into the first annular concave cavity, the second rotating conducting rod transversely penetrates through the rotor, and two ends of the second rotating conducting rod extend into the second annular concave cavity; the first contact structure is fixedly connected to two ends of the first rotating conducting rod and is in sliding connection with the first annular conducting assembly, and the second contact structure is fixedly connected to two ends of the second rotating conducting rod and is in sliding connection with the second annular conducting assembly; one end of the third terminal is fixedly connected with the first rotating conducting rod, the other end of the third terminal upwards penetrates through the accommodating space to protrude out of the top surface of the rotor, one end of the fourth terminal is fixedly connected with the second rotating conducting rod, and the other end of the fourth terminal upwards penetrates through the accommodating space to protrude out of the top surface of the rotor. The plug assembly which can be electrically connected in a rotating way can effectively avoid potential safety hazards such as electric leakage, electric shock, fire and the like caused by damage and breakage of the power supply lead. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.

The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which may be made by those skilled in the art without departing from the spirit and scope of the present invention as defined in the appended claims.

Claims

1. A plug assembly of rotatable electrical connection, comprising:

a fixed part;

the bottom end of the rotor extends into the central through hole, the top surface of the rotor is higher than the top surface of the shell, the rotor is provided with an accommodating space, and the accommodating space vertically penetrates through the upper surface and the lower surface of the rotor;

2. The plug assembly of claim 1, wherein: the first annular conductive assembly comprises a first slip ring and a second slip ring positioned on the first slip ring, the first slip ring is fixedly connected with the bottom wall of the first annular cavity, and the second slip ring is fixedly connected with the top wall of the first annular cavity; the second annular conductive assembly comprises a third slip ring and a fourth slip ring positioned on the third slip ring, the third slip ring is fixedly connected with the bottom wall of the second annular cavity, and the fourth slip ring is fixedly connected with the top wall of the second annular cavity.

3. The plug assembly of claim 2, wherein: the first terminal is fixedly connected with the first slip ring and/or the second slip ring; the second terminal is fixedly connected with the third slip ring and/or the fourth slip ring.

4. The plug assembly of claim 2, wherein: the first contact structure comprises a connecting piece, a first supporting frame, a second supporting frame, a first supporting piece, a second supporting piece, a first ball, a second ball and an elastic component, wherein the connecting piece is fixedly connected with the end part of the first rotating conducting rod, the first supporting frame and the second supporting frame are both fixedly connected with one side of the connecting piece away from the first rotating conducting rod, the second supporting frame is positioned above the first supporting frame, the first supporting frame is provided with a first round hole, the second supporting frame is provided with a second round hole, the first round hole and the second round hole are oppositely arranged in the vertical direction, and the first supporting piece and the second supporting piece are both positioned between the first supporting frame and the second supporting frame, the second support piece is positioned above the first support piece, the bottom end of the elastic part is connected with the top end of the first support piece, the top end of the elastic part is connected with the bottom end of the second support piece, the bottom surface of the first support piece is provided with a first hemispherical groove facing the first round hole, the top surface of the second support piece is provided with a second hemispherical groove facing the second round hole, the top part of the first ball is placed in the first hemispherical groove, the bottom surface of the first ball penetrates through the first round hole and protrudes out of the bottom surface of the first support piece, the bottom part of the second ball is placed in the second hemispherical groove, and the top surface of the second ball penetrates through the second round hole and protrudes out of the top surface of the second support piece; the second contact structure and the first contact structure adopt the same structure.

5. The plug assembly of claim 4, wherein: the elastic component comprises a vertically arranged spring, a first boss is arranged at the top end of the first supporting piece, a second boss is arranged at the bottom end of the second supporting piece, the bottom end of the spring is sleeved on the first boss, and the top end of the spring is sleeved on the second boss.

6. The plug assembly of claim 4, wherein: the first sliding ring is provided with a lower concave annular sliding groove, the second sliding ring is provided with an upper concave annular sliding groove, the lower concave annular sliding groove and the upper concave annular sliding groove are arranged oppositely in the vertical direction, the first ball can roll and slide in the lower concave annular sliding groove, and the second ball can roll and slide in the upper concave annular sliding groove; the third slip ring and the first slip ring are of the same structure, and the fourth slip ring and the second slip ring are of the same structure.

7. The plug assembly of claim 6, wherein: a lower concave annular groove corresponding to the lower concave annular sliding groove is formed in the bottom wall of the first annular concave cavity, and an upper concave annular groove corresponding to the upper concave annular sliding groove is formed in the top wall of the first annular concave cavity; the second annular concave cavity and the first annular concave cavity are of the same structure.

8. The plug assembly of claim 1, wherein: the rotor comprises a first clamping part and a second clamping part, the first clamping part comprises a first annular base and a first splicing piece fixedly connected to the first annular base, the second clamping part comprises a second annular base and a second splicing piece fixedly connected to the second annular base, first through holes allowing the first rotating conducting rod to penetrate through are formed in two opposite side walls of the first annular base, second through holes allowing the second rotating conducting rod to penetrate through are formed in two opposite side walls of the second annular base, and the first splicing piece vertically penetrates through the second annular base and is spliced into a tubular structure with the second splicing piece.

9. The plug assembly of claim 8, wherein: the rotor is further provided with a first installation operation window and a second installation operation window, the first installation operation window transversely penetrates through the first annular base to expose the connecting portion of the first rotating conducting rod and the third wiring end, and the second installation operation window transversely penetrates through the second annular base and the first splicing piece to expose the connecting portion of the second rotating conducting rod and the fourth wiring end.

10. The plug assembly of claim 1, wherein: the shell is internally provided with a first channel and a second channel, the first channel extends horizontally from the opening of the outer side wall of the shell in the direction close to the first annular cavity until the first channel is communicated with the first annular cavity, the second channel extends horizontally from the opening of the outer side wall of the shell in the direction close to the second annular cavity until the second channel is communicated with the second annular cavity, the first wiring end transversely penetrates through the first channel, and the second wiring end transversely penetrates through the second channel.

11. The plug assembly of claim 1, wherein: the length of the part of the first terminal protruding out of the outer side wall of the shell is equal to the length of the part of the second terminal protruding out of the outer side wall of the shell.

12. The plug assembly of claim 1, wherein: a top surface of the third terminal is flush with a top surface of the fourth terminal.

13. The plug assembly of claim 1, wherein: an air gap is arranged between the bottom surface of the rotor and the fixing part.

14. A semiconductor device comprising a rotatable member, characterized in that: the semiconductor device further comprising a plug assembly of any one of claims 1-13 in rotatable electrical connection, the plug assembly being in electrical connection with the rotating component.

15. The semiconductor device according to claim 14, wherein: the semiconductor equipment comprises vapor deposition equipment, the vapor deposition equipment comprises a deposition cavity and a rotatable heating plate located in the deposition cavity, and the plug assembly is electrically connected with the rotatable heating plate.