TW202303283A - Photosensitive resin composition for light shielding film, and light shielding film, colorfilter and display device with the same - Google Patents

Photosensitive resin composition for light shielding film, and light shielding film, colorfilter and display device with the same Download PDF

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TW202303283A
TW202303283A TW111111723A TW111111723A TW202303283A TW 202303283 A TW202303283 A TW 202303283A TW 111111723 A TW111111723 A TW 111111723A TW 111111723 A TW111111723 A TW 111111723A TW 202303283 A TW202303283 A TW 202303283A
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light
shielding film
resin composition
photosensitive resin
acid
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原口健太郎
小野悠樹
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日商日鐵化學材料股份有限公司
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/02Elements
    • C08K3/04Carbon
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133512Light shielding layers, e.g. black matrix
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/105Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
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  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
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  • Polymers & Plastics (AREA)
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  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Optical Filters (AREA)
  • Epoxy Resins (AREA)

Abstract

The invention provides a photosensitive resin composition for a light-shielding film, and a light-shielding film, a color filter and a display device using the same. The photosensitive resin composition for the light-shielding film can obtain a light-shielding film which can achieve both high light shielding and high resistance and is excellent in developing adhesion under the condition that a thin wire is formed. The invention also provides a light-shielding film, a color filter and a display device using the light-shielding film. A photosensitive resin composition for a light-shielding film, comprising (A) an epoxy compound, (B) an alkali-soluble resin containing a polymerizable unsaturated group, (C) a photopolymerizable monomer having at least one ethylenically unsaturated bond, (D) a light-shielding component containing carbon black as a light-shielding material, (E) a photopolymerization initiator, and (F) a solvent as essential components, the photosensitive resin composition for a light-shielding film is characterized in that the component (A) has an aromatic ring in the main chain, the number of aromatic rings relative to the number of glycidyl groups in the component (A) is 0.5-10, and the epoxy equivalent is 100-400 g/eq.

Description

遮光膜用感光性樹脂組成物以及使用其的遮光膜、彩色濾光片及顯示裝置Photosensitive resin composition for light-shielding film, light-shielding film, color filter, and display device using same

本發明有關一種適合於形成高遮光且高電阻的細線圖案的黑色矩陣(black matrix)的遮光膜用感光性樹脂組成物。The present invention relates to a photosensitive resin composition for a light-shielding film suitable for forming a black matrix with a high light-shielding and high-resistance thin line pattern.

彩色濾光片是影響液晶顯示裝置的可見性的重要構件之一,為了提高可見性、即獲得鮮明的圖像,需要對構成彩色濾光片的紅(R)、綠(G)、藍(B)等像素進行比迄今為止更高的色純度化,並且在黑色矩陣中達成高遮光化,為此,必須在感光性樹脂組成物中添加比從前更多量的著色劑。Color filters are one of the important components that affect the visibility of liquid crystal display devices. In order to improve visibility, that is, to obtain clear images, it is necessary to adjust the red (R), green (G), and blue ( B) The color purity of the pixels is higher than before, and high light-shielding is achieved in the black matrix. For this reason, it is necessary to add a larger amount of colorant to the photosensitive resin composition than before.

作為樹脂黑色矩陣用遮光材,一般已知有碳黑,但碳黑的遮光性優異,另一方面,電阻低,因此有時成為引起顯示裝置的誤動作的原因。因此,作為使用碳黑並使黑色矩陣的電阻變大的方法,提出了降低具有導電性的碳黑的比率、或應用預先在碳黑表面被覆樹脂而成的材料的方法,但在充分保持圖案化性的基礎上可實現的遮光度有限,難以實現所要求的高遮光性。Carbon black is generally known as a light-shielding material for resin black matrices, but carbon black is excellent in light-shielding properties and low in electrical resistance, so it may cause malfunction of a display device. Therefore, as a method of using carbon black to increase the resistance of the black matrix, it has been proposed to reduce the ratio of conductive carbon black or to apply a material that has been coated with a resin on the surface of carbon black in advance. The shading that can be achieved on the basis of chemical properties is limited, and it is difficult to achieve the required high shading.

另外,接受如上所述的現有技術,本申請的申請人提出了如下方法:調配具有特定的結構及酸值的含有聚合性不飽和基的鹼可溶性樹脂作為保持光密度OD與體積電阻率並且在形成了10 μm以下等細線的情況下顯影密合性也優異且也可充分確保與玻璃基板的密合性的遮光膜用感光性樹脂組成物(參照專利文獻1)。然而,在所述方法中,伴隨顯示裝置的高性能化而對黑色矩陣要求的特性也越來越高,因此在高遮光與高電阻的並存中還有進一步改善的餘地。 [現有技術文獻] [專利文獻] In addition, accepting the prior art as described above, the applicant of the present application proposed a method of formulating an alkali-soluble resin containing a polymerizable unsaturated group having a specific structure and acid value as a method of maintaining the optical density OD and volume resistivity and A photosensitive resin composition for a light-shielding film that is excellent in development adhesion even when thin lines such as 10 μm or less are formed, and can sufficiently secure adhesion to a glass substrate (see Patent Document 1). However, in this method, the characteristics required for the black matrix are becoming higher and higher as the performance of the display device is increased, so there is room for further improvement in the coexistence of high light-shielding and high resistance. [Prior art literature] [Patent Document]

[專利文獻1]日本專利特開2015-200881號公報 [專利文獻2]日本專利特開2014-145821號公報 [專利文獻3] 日本專利特開2019-070720號公報 [Patent Document 1] Japanese Patent Laid-Open No. 2015-200881 [Patent Document 2] Japanese Patent Laid-Open No. 2014-145821 [Patent Document 3] Japanese Patent Laid-Open No. 2019-070720

[發明所欲解決之課題][Problem to be Solved by the Invention]

因此,本申請的發明人們接受如上所述的從前的嘗試而對可使高遮光與高電阻並存的遮光膜用感光性樹脂組成物進一步進行研究後,得到如下想法。 即,得到:關於雖為了能達成高遮光而調配大量的作為遮光材的碳黑,卻可在不減少其量的情況下能實現高電阻化的方法,減少碳黑彼此的接觸機率、即應藉由實現抑制遮光膜的熱硬化時的熱收縮來避免碳黑彼此的接觸等想法,另外,得知未處理或實施了氧化處理的通常的碳黑在其表面具有大量酸性官能基,從而有意義的應是藉由調配具有在遮光膜的熱硬化過程中可與其優先反應的官能基的其他化合物等而使此種其他樹脂等存在於碳黑的表面附近等想法。 Therefore, the inventors of the present application received the above-mentioned conventional attempts and further studied a photosensitive resin composition for a light-shielding film that can achieve both high light-shielding and high resistance, and obtained the following idea. That is, it was obtained that although a large amount of carbon black as a light-shielding material is blended in order to achieve high light-shielding, it is possible to achieve high resistance without reducing the amount. It is meaningful to realize the idea of avoiding contact between carbon blacks by suppressing thermal shrinkage during heat curing of the light-shielding film, and it is also found that untreated or oxidized normal carbon black has a large number of acidic functional groups on its surface. The idea is to make such other resins or the like exist near the surface of the carbon black by preparing other compounds or the like having functional groups that can preferentially react with the light-shielding film during the thermal curing process.

而且,關於此種想法,對具有可抑制熱硬化時的熱收縮的高耐熱性並且具有熱硬化時可與碳黑的酸性官能基優先反應的官能基的化合物進行了努力研究,結果新發現:藉由在感光性樹脂組成物中調配規定量的規定的環氧化合物,可獲得能達成高遮光及高電阻的並存,並且在形成了例如3 μm~8 μm為止的細線的情況下顯影密合性也優異的硬化物(遮光膜),所述規定的環氧化合物在主鏈中具有芳香環且具有剛直的骨架,並且具有熱硬化時可與碳黑的酸性官能基反應的縮水甘油基。Furthermore, with regard to this idea, efforts have been made to study compounds having high heat resistance capable of suppressing heat shrinkage during thermosetting and having a functional group that preferentially reacts with acidic functional groups of carbon black during thermosetting, and as a result, it was newly found that: By blending a predetermined amount of a predetermined epoxy compound into the photosensitive resin composition, a combination of high light-shielding and high resistance can be achieved, and it can be developed and adhered when thin lines such as 3 μm to 8 μm are formed. The above-mentioned predetermined epoxy compound has an aromatic ring in the main chain and has a rigid skeleton, and has a glycidyl group that can react with an acidic functional group of carbon black during thermal curing.

此外,關於在感光性樹脂組成物中調配環氧化合物的技術,本申請的申請人們也已提出過(參照專利文獻2、專利文獻3),專利文獻2中記載的技術有關一種觸摸面板用途的黑色感光性樹脂組成物,特別公開為了滿足對於對加工製程中使用的化學品的高耐化學品性的要求,而含有相對較多量的環氧化合物。另外,專利文獻3的特徵在於:為了在耐熱性高為140℃的塑膠基板等上形成樹脂膜圖案,而在感光性樹脂組成物中必須調配硬化劑和/或硬化促進劑,且將它們與環氧化合物的合計量設為特定的範圍,只不過公開特別是以低溫硬化為目的時成為必須的成分。 即,在專利文獻2及專利文獻3中所記載的組成物中,必須進行如上所述的調配,且難以滿足高遮光與高電阻及細線化的全部。 In addition, the applicants of the present application have also proposed a technique for blending an epoxy compound into a photosensitive resin composition (see Patent Document 2 and Patent Document 3), and the technique described in Patent Document 2 relates to a touch panel application In particular, the black photosensitive resin composition is disclosed to contain a relatively large amount of epoxy compound in order to meet the requirement of high chemical resistance to chemicals used in the processing process. In addition, Patent Document 3 is characterized in that in order to form a resin film pattern on a plastic substrate with a high heat resistance of 140°C, it is necessary to mix a curing agent and/or a curing accelerator in the photosensitive resin composition, and combine them with The total amount of the epoxy compound is set within a specific range, but it is only disclosed that it is an essential component especially for the purpose of low-temperature curing. That is, in the compositions described in Patent Document 2 and Patent Document 3, the above-mentioned formulation must be performed, and it is difficult to satisfy all of high light shielding, high resistance, and thinning.

因此,本發明是基於如上所述的見解而發明的,其目的在於提供一種遮光膜用感光性樹脂組成物,其可形成使高遮光及高電阻並存,而且在形成了細線的情況下顯影密合性也優異的硬化物(遮光膜)。Therefore, the present invention was invented based on the above findings, and an object of the present invention is to provide a photosensitive resin composition for a light-shielding film that can form a high light-shielding film and a high resistance at the same time, and can be developed densely when thin lines are formed. A hardened product (shading film) that is also excellent in compatibility.

另外,本申請的另一目的在於提供一種遮光膜,其是使所述遮光膜用感光性樹脂組成物硬化而形成,進而,提供一種包括所述遮光膜的彩色濾光片及包括所述彩色濾光片的顯示裝置。In addition, another object of the present application is to provide a light-shielding film, which is formed by curing the photosensitive resin composition for the light-shielding film, and further, to provide a color filter including the light-shielding film and a color filter including the color filter. Filter display device.

[解決課題之手段] 即,本發明的主旨如以下所述。 〔1〕一種遮光膜用感光性樹脂組成物,包含下述(A)成分~(F)成分作為必需成分, (A)環氧化合物、 (B)含有聚合性不飽和基的鹼可溶性樹脂、 (C)具有至少一個乙烯性不飽和鍵的光聚合性單體、 (D)含有碳黑作為遮光材的遮光成分、 (E)光聚合起始劑、及 (F)溶劑,且所述遮光膜用感光性樹脂組成物的特徵在於: 所述(A)成分在主鏈中具有芳香環,另外,相對於縮水甘油基在(A)成分中所占的數量的芳香環數為0.5~10,進而,環氧當量為100 g/eq~400 g/eq。 〔2〕如〔1〕所述的遮光膜用感光性樹脂組成物,其特徵在於:(B)成分與(C)成分的質量比例(B)/(C)為50/50~90/10,相對於(D)成分100質量份而含有0.5質量份~15質量份的(A)成分,且在遮光膜用感光性樹脂組成物的固體成分中包含40質量%~70質量%的(D)成分。 〔3〕一種遮光膜,其特徵在於:使如〔1〕或〔2〕所述的遮光膜用感光性樹脂組成物硬化而形成。 〔4〕一種彩色濾光片,其特徵在於:包括如〔3〕所述的遮光膜。 〔5〕一種顯示裝置,具有如〔4〕所述的彩色濾光片。 [Means to solve the problem] That is, the gist of the present invention is as follows. [1] A photosensitive resin composition for a light-shielding film, comprising the following components (A) to (F) as essential components, (A) epoxy compound, (B) Alkali-soluble resins containing polymerizable unsaturated groups, (C) a photopolymerizable monomer having at least one ethylenically unsaturated bond, (D) Light-shielding components containing carbon black as a light-shielding material, (E) photopolymerization initiator, and (F) a solvent, and the photosensitive resin composition for a light-shielding film is characterized by: The component (A) has an aromatic ring in the main chain, and the number of aromatic rings relative to the number of glycidyl groups in the component (A) is 0.5 to 10, and the epoxy equivalent is 100 g/eq ~400 g/eq. [2] The photosensitive resin composition for a light-shielding film according to [1], wherein the mass ratio (B)/(C) of the component (B) to the component (C) is 50/50 to 90/10 , containing 0.5 to 15 parts by mass of component (A) with respect to 100 parts by mass of component (D), and containing 40 to 70% by mass of (D) in the solid content of the photosensitive resin composition for light-shielding films )Element. [3] A light-shielding film formed by curing the photosensitive resin composition for light-shielding film according to [1] or [2]. [4] A color filter comprising the light-shielding film according to [3]. [5] A display device comprising the color filter according to [4].

[發明的效果] 根據本發明,可提供一種遮光膜用感光性樹脂組成物,其可獲得能達成高遮光及高電阻的並存,並且在形成了例如3 μm~8 μm為止的細線的情況下顯影密合性也優異的硬化物(遮光膜)。 [Effect of the invention] According to the present invention, it is possible to provide a photosensitive resin composition for a light-shielding film, which can achieve both high light-shielding and high resistance, and also has good adhesion to development even when thin lines of, for example, 3 μm to 8 μm are formed. Excellent cured product (shading film).

如上所述,本發明的遮光膜用感光性樹脂組成物至少具有(A)環氧化合物、(B)含有聚合性不飽和基的鹼可溶性樹脂、(C)具有至少一個乙烯性不飽和鍵的光聚合性單體、(D)以碳黑為遮光材的遮光成分、(E)光聚合起始劑及(F)溶劑作為必需成分。以下,以這些成分為中心進行詳細說明。As described above, the photosensitive resin composition for a light-shielding film of the present invention has at least (A) an epoxy compound, (B) an alkali-soluble resin containing a polymerizable unsaturated group, (C) a resin having at least one ethylenically unsaturated bond, A photopolymerizable monomer, (D) a light-shielding component using carbon black as a light-shielding material, (E) a photopolymerization initiator, and (F) a solvent are essential components. Hereinafter, these components are mainly demonstrated in detail.

<(A)環氧化合物> 本發明的遮光膜用感光性樹脂組成物中的(A)環氧化合物需要在主鏈中具有芳香環。藉由在主鏈中具有芳香環,從而具備優異的耐熱性與機械特性,可抑制對使用其的本發明的遮光膜用感光性樹脂組成物進行加熱硬化而形成遮光膜時所產生的熱收縮,就此方面而言較佳。此處,所謂在主鏈中具有是指如在本技術領域中通常使用那樣,在成為碳數為最大的分子的骨架的結構中具有至少一個芳香環。另外,所謂芳香環,可列舉苯環、萘環、聯苯環、雙酚環等,它們的結構可未經取代,或者也可分別獨立地具有一個以上的取代基。作為取代基,可為碳數1~10的烷基或芳基,若為本發明的目標範圍內,則並無特別限定。 <(A) Epoxy compound> (A) The epoxy compound in the photosensitive resin composition for light-shielding films of this invention needs to have an aromatic ring in a main chain. By having an aromatic ring in the main chain, it has excellent heat resistance and mechanical properties, and can suppress thermal shrinkage that occurs when the photosensitive resin composition for light-shielding film of the present invention using it is heat-hardened to form a light-shielding film , which is better in this respect. Here, "having in the main chain" means having at least one aromatic ring in the structure of the skeleton of a molecule having the largest carbon number, as commonly used in this technical field. In addition, the aromatic ring includes a benzene ring, a naphthalene ring, a biphenyl ring, a bisphenol ring, and the like, and these structures may not be substituted, or may each independently have one or more substituents. The substituent may be an alkyl group or aryl group having 1 to 10 carbon atoms, and is not particularly limited as long as it is within the scope of the present invention.

此處,作為所述(A)成分,宜使用環氧當量為100 g/eq~400 g/eq、較佳為120 g/eq~380 g/eq、更佳為150 g/eq~360 g/eq的成分。在環氧當量未滿100 g/eq的情況下,有與(B)成分中所含的負責顯影溶解性的酸性官能基進行反應,而顯影性降低的擔憂,相反,在超過400 g/eq的情況下,有缺乏碳黑間距離的控制,而無法期待電阻提高的擔憂。Here, as the (A) component, it is preferable to use an epoxy equivalent of 100 g/eq to 400 g/eq, preferably 120 g/eq to 380 g/eq, more preferably 150 g/eq to 360 g The composition of /eq. When the epoxy equivalent is less than 100 g/eq, it may react with the acidic functional group contained in the (B) component responsible for the solubility of the development, and the developability may be reduced. On the contrary, if it exceeds 400 g/eq In the case of , there is a concern that the control of the distance between carbon blacks is lacking, and an increase in resistance cannot be expected.

另外,關於所述(A)成分,所述芳香環的數量以相對於縮水甘油基的數量計,芳香環數/縮水甘油基數為0.5~10,較佳為1.1~4,進而較佳為1.3~4,特佳為2~4。所謂此處所述的芳香環數是苯環的數量,例如,若為萘環,則為2,若為聯苯環,則為2,若為蒽環,則為3,若為雙酚芴環,則為4。作為芳香環,較佳為大體積(芳香環數多)的芳香環,更佳為雙酚芴環或萘環等具有稠環結構的芳香環。在芳香環數/縮水甘油基數未滿0.5的情況下,有如下擔憂:由因芳香環數少引起的耐熱性降低所致的電阻降低,或者因縮水甘油基數多而與(B)成分中所含的負責顯影溶解性的酸性官能基進行反應,從而顯影性降低。相反,在芳香環數/縮水甘油基數超過10的情況下,有如下擔憂:因縮水甘油基數少而缺乏碳黑間距離的控制,而不能期待電阻提高。In addition, regarding the (A) component, the number of aromatic rings relative to the number of glycidyl groups is 0.5-10, preferably 1.1-4, and more preferably 1.3. ~4, especially preferably 2~4. The number of aromatic rings mentioned here refers to the number of benzene rings, for example, if it is a naphthalene ring, it is 2, if it is a biphenyl ring, it is 2, if it is an anthracycline, it is 3, if it is a bisphenol fluorene ring, it is 4. The aromatic ring is preferably a bulky (large number of aromatic rings) aromatic ring, more preferably an aromatic ring having a condensed ring structure such as a bisphenol fluorene ring or a naphthalene ring. When the number of aromatic rings/number of glycidyl groups is less than 0.5, there are concerns about a decrease in electrical resistance due to a decrease in heat resistance due to a small number of aromatic rings, or a decrease in electrical resistance due to a large number of glycidyl groups due to a large number of glycidyl groups. The acidic functional group responsible for the solubility of the development reacts, thereby reducing the developability. On the contrary, when the number of aromatic rings/the number of glycidyl groups exceeds 10, there is a concern that the control of the distance between carbon blacks is lacking due to the small number of glycidyl groups, and an increase in electrical resistance cannot be expected.

此處,關於所述芳香環數/縮水甘油基數,可知:如下述所示那樣可基於考慮環氧化合物的重複單元時的芳香環數/縮水甘油基數與環氧當量的比例關係,並根據環氧當量來算出。即,雖然芳香環數或縮水甘油基數根據環氧化合物各自的化學結構或重複單元而變化,但可如上所述那樣藉由在具體地擬合若干個重複單元的基礎上事先掌握與所述環氧當量的關係式,並根據環氧當量的測定值來算出芳香環數/縮水甘油基數。此處,作為其具體的一例,以下述化學式(1)~化學式(4)所列舉的化合物為例而示出,關於這些以外的環氧化合物,也可同樣地求出。 ·雙酚芴型環氧化合物 [化1]

Figure 02_image001
在所述式(1)的情況下,芳香環數/縮水甘油基數=(4m 1+4)/2,例如,在m 1=1的情況下為4。此時,環氧當量為435。同樣地,m 1=2時的芳香環數/縮水甘油基數為6,環氧當量為638。根據所述關係而成為(環氧當量)=102×(芳香環數/縮水甘油基數)+28,因此可根據環氧當量來算出芳香環數/縮水甘油基數。 Here, regarding the number of aromatic rings/glycidyl group, it can be known that, as shown below, it can be based on the ratio relationship between the number of aromatic rings/glycidyl group and the epoxy equivalent in consideration of the repeating unit of the epoxy compound, and according to the ring Calculate the oxygen equivalent. That is, although the number of aromatic rings or the number of glycidyl groups varies depending on the chemical structure or repeating unit of each epoxy compound, as described above, the number of aromatic rings and the number of glycidyl groups can be determined in advance by fitting several repeating units specifically. The relational formula of oxygen equivalent, and calculate the aromatic ring number/glycidyl group number according to the measured value of epoxy equivalent. Here, as a specific example thereof, the compounds listed in the following chemical formula (1) to chemical formula (4) are shown as examples, and epoxy compounds other than these can also be obtained in the same manner. · Bisphenol fluorene type epoxy compound [Chemical 1]
Figure 02_image001
In the case of the formula (1), number of aromatic rings/number of glycidyl groups=(4m 1 +4)/2, for example, 4 when m 1 =1. At this time, the epoxy equivalent was 435. Similarly, when m 1 =2, the number of aromatic rings/glycidyl group is 6, and the epoxy equivalent is 638. From the relationship described above, (epoxy equivalent)=102×(number of aromatic rings/number of glycidyl groups)+28, and thus the number of aromatic rings/number of glycidyl groups can be calculated from the epoxy equivalent.

·1,6-萘二醇芳烷基型環氧化合物 [化2]

Figure 02_image003
在所述式(2)的情況下,芳香環數/縮水甘油基數=(3m 2+2)/(2m 2+2),例如,在m 2=1的情況下為1.25。此時,環氧當量為162。同樣地,m 2=2時的芳香環數/縮水甘油基數為1.33,環氧當量為170。根據所述關係而成為(環氧當量)=102×(芳香環數/縮水甘油基數)+34。 ·1,6-Naphthalene diol aralkyl epoxy compound [Chem. 2]
Figure 02_image003
In the case of the formula (2), number of aromatic rings/number of glycidyl groups=(3m 2 +2)/(2m 2 +2), for example, 1.25 when m 2 =1. At this time, the epoxy equivalent was 162. Similarly, when m 2 =2, the aromatic ring number/glycidyl group number was 1.33, and the epoxy equivalent was 170. From the relationship described above, (epoxy equivalent)=102×(number of aromatic rings/number of glycidyl groups)+34.

·1-萘酚芳烷基型環氧化合物 [化3]

Figure 02_image005
在所述式(3)的情況下,芳香環數/縮水甘油基數=(3m 3+2)/(m 3+1),例如,在m 3=1的情況下為2.5。此時,環氧當量為252。同樣地,m 3=2時的芳香環數/縮水甘油基數為2.67,環氧當量為269。根據所述關係而成為(環氧當量)=102×(芳香環數/縮水甘油基數)-3。 ·1-Naphthol aralkyl type epoxy compound [Chem. 3]
Figure 02_image005
In the case of the formula (3), number of aromatic rings/number of glycidyl groups=(3m 3 +2)/(m 3 +1), for example, 2.5 when m 3 =1. At this time, the epoxy equivalent was 252. Similarly, when m 3 =2, the number of aromatic rings/glycidyl group was 2.67, and the epoxy equivalent was 269. From the above relationship, (epoxy equivalent)=102×(number of aromatic rings/number of glycidyl groups)-3.

·苯酚酚醛清漆型環氧化合物 [化4]

Figure 02_image007
在所述式(4)的情況下,芳香環數/縮水甘油基數=(m 4+2)/(m 4+2),與環氧當量無關地成為(芳香環數/縮水甘油基數)=1。 · Phenol novolac type epoxy compound [Chem. 4]
Figure 02_image007
In the case of the formula (4), number of aromatic rings/number of glycidyl groups=(m 4 +2)/(m 4 +2), regardless of the epoxy equivalent, becomes (number of aromatic rings/number of glycidyl groups)= 1.

關於所述(A)成分,宜使用重量平均分子量為300~10000的成分。It is preferable to use the component whose weight average molecular weight is 300-10000 about the said (A) component.

作為此種(A)環氧化合物,若為在主鏈中具有芳香環的環氧化合物,則並無特別限定,例如可列舉:雙酚A型環氧化合物、雙酚F型環氧化合物、雙酚芴型環氧化合物、雙萘酚芴型環氧化合物、二苯基芴型環氧化合物、苯酚酚醛清漆型環氧化合物、甲酚酚醛清漆型環氧化合物、苯酚芳烷基型環氧化合物、包含萘骨架的苯酚酚醛清漆化合物(例如日本化藥公司製造的NC-7000L)、萘酚芳烷基型環氧化合物、三苯酚甲烷型環氧化合物、四苯酚乙烷型環氧化合物、多元醇的縮水甘油醚、多元羧酸的縮水甘油酯、甲基丙烯酸與甲基丙烯酸縮水甘油酯的共聚物所代表的包含(甲基)丙烯酸縮水甘油酯作為單元的具有(甲基)丙烯酸基的單體的共聚物、具有矽酮骨架的環氧化合物等。其中,就與碳黑的良好的親和性的觀點而言,較佳為使用多環芳香族環氧化合物。 此外,所述(A)成分可僅使用一種化合物,也可組合使用多種。 As such (A) epoxy compound, it will not specifically limit if it is an epoxy compound which has an aromatic ring in a main chain, For example, bisphenol A type epoxy compound, bisphenol F type epoxy compound, Bisphenol fluorene type epoxy compound, bisnaphthol fluorene type epoxy compound, diphenyl fluorene type epoxy compound, phenol novolac type epoxy compound, cresol novolac type epoxy compound, phenol aralkyl type epoxy compound Compounds, phenol novolac compounds containing a naphthalene skeleton (such as NC-7000L manufactured by Nippon Kayaku Co., Ltd.), naphthol aralkyl type epoxy compounds, trisphenol methane type epoxy compounds, tetraphenol ethane type epoxy compounds, Glycidyl ethers of polyhydric alcohols, glycidyl esters of polycarboxylic acids, and copolymers of methacrylic acid and glycidyl methacrylate, which contain glycidyl (meth)acrylate as units and have a (meth)acrylic group. Copolymers of monomers, epoxy compounds with a silicone skeleton, etc. Among them, it is preferable to use a polycyclic aromatic epoxy compound from the viewpoint of good affinity with carbon black. Moreover, the said (A) component may use only 1 type of compound, and may use multiple types together.

而且,關於所述(A)成分的調配量,相對於後述的(B)成分與(C)成分的合計100質量份,較佳為1質量份~25質量份,以更佳為1質量份~18質量份、進而較佳為1.5質量份~16質量份為宜。藉由相對於(B)成分與(C)成分而設為所述調配量,可獲得良好的圖案化特性,因此較佳。 進而,關於所述(A)成分,較佳為調配成相對於後述的(D)成分100質量份而為0.5質量份~15質量份,以更佳為設為1質量份~13質量份、進而較佳為設為1.0質量份~9.0質量份為宜。藉由如上所述那樣使相對於碳黑的量合理化,可保持與碳黑的良好親和性,並且達成充分的遮光性與電阻的並存,因此較佳。 Furthermore, the compounding quantity of the said (A) component is preferably 1 mass part - 25 mass parts with respect to the total 100 mass parts of (B) component and (C) component mentioned later, More preferably, it is 1 mass part -18 parts by mass, more preferably 1.5 -16 parts by mass. Since favorable patterning characteristics can be acquired by setting the said compounding quantity with respect to (B) component and (C)component, it is preferable. Furthermore, it is preferable to mix|blend the said (A) component so that it may be 0.5-15 mass parts with respect to 100 mass parts of (D) components mentioned later, More preferably, it shall be 1-13 mass parts, Furthermore, it is more preferable to set it as 1.0 mass part - 9.0 mass parts. By rationalizing the quantity with respect to carbon black as mentioned above, since good affinity with carbon black can be maintained, and sufficient light-shielding property and coexistence of electric resistance are achieved, it is preferable.

<(B)含有聚合性不飽和基的鹼可溶性樹脂> 本發明的遮光膜用感光性樹脂組成物中的(B)含有聚合性不飽和基的鹼可溶性樹脂若為在分子內具有聚合性不飽和基與酸性基的樹脂,則可無特別限制地使用,可較佳地應用的第一例為環氧(甲基)丙烯酸酯酸加成物,所述環氧(甲基)丙烯酸酯酸加成物是使具有兩個以上的環氧基的化合物與(甲基)丙烯酸(其是指丙烯酸和/或甲基丙烯酸)進行反應,並使(a)二羧酸或三羧酸或其酸單酐和/或(b)四羧酸或其酸二酐與所獲得的具有羥基的環氧(甲基)丙烯酸酯化合物進行反應而獲得。作為經衍生為環氧(甲基)丙烯酸酯酸加成物的具有兩個以上的環氧基的化合物,可例示雙酚型環氧化合物或酚醛清漆型環氧化合物。具體而言,可適宜地列舉下述通式(I)所表示的雙酚型環氧化合物。 [化5]

Figure 02_image009
<(B) Alkali-soluble resin containing a polymerizable unsaturated group> In the photosensitive resin composition for a light-shielding film of the present invention (B) the alkali-soluble resin containing a polymerizable unsaturated group has a polymerizable unsaturated group in the molecule. The resin of saturated group and acidic group can be used without special limitation. The first example that can be preferably applied is epoxy (meth)acrylate acid adduct, and described epoxy (meth)acrylate acid The adduct is to react a compound having two or more epoxy groups with (meth)acrylic acid (which refers to acrylic acid and/or methacrylic acid), and to make (a) dicarboxylic acid or tricarboxylic acid or its It is obtained by reacting an acid monoanhydride and/or (b) tetracarboxylic acid or its acid dianhydride with the obtained epoxy (meth)acrylate compound which has a hydroxyl group. A bisphenol-type epoxy compound or a novolak-type epoxy compound can be illustrated as a compound which has two or more epoxy groups derivatized into an epoxy (meth)acrylate acid adduct. Specifically, bisphenol-type epoxy compounds represented by the following general formula (I) are suitably mentioned. [chemical 5]
Figure 02_image009

通式(I)的式中,R 1、R 2、R 3及R 4分別獨立地表示氫原子、碳數1~5的烷基、鹵素原子或苯基,A表示-CO-、-SO 2-、-C(CF 3) 2-、-Si(CH 3) 2-、-CH 2-、-C(CH 3) 2-、-O-、芴-9,9-二基或直鍵。l為0~10的整數。較佳的R 1、R 2、R 3、R 4為氫原子,較佳的A為芴-9,9-二基。另外,關於l,通常混合存在多個值,因此平均值成為0~10(並不限於整數),較佳的l的平均值為0~3。 In the general formula (I), R 1 , R 2 , R 3 and R 4 each independently represent a hydrogen atom, an alkyl group with 1 to 5 carbons, a halogen atom or a phenyl group, and A represents -CO-, -SO 2 -, -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, fluorene-9,9-diyl or direct bond . l is an integer of 0-10. Preferred R 1 , R 2 , R 3 , and R 4 are hydrogen atoms, and preferred A is fluorene-9,9-diyl. In addition, about 1, a plurality of values are usually mixed, so the average value is 0-10 (not limited to an integer), and the preferable average value of 1 is 0-3.

雙酚型環氧化合物為使雙酚類與表氯醇進行反應而獲得的具有兩個縮水甘油醚基的環氧化合物,在所述反應時,通常伴隨有縮水甘油醚化合物的寡聚物化,因此含有包含兩個以上的雙酚骨架的環氧化合物。作為所述反應中所使用的雙酚類,可列舉:雙(4-羥基苯基)酮、雙(4-羥基-3,5-二甲基苯基)酮、雙(4-羥基-3,5-二氯苯基)酮、雙(4-羥基苯基)碸、雙(4-羥基-3,5-二甲基苯基)碸、雙(4-羥基-3,5-二氯苯基)碸、雙(4-羥基苯基)六氟丙烷、雙(4-羥基-3,5-二甲基苯基)六氟丙烷、雙(4-羥基-3,5-二氯苯基)六氟丙烷、雙(4-羥基苯基)二甲基矽烷、雙(4-羥基-3,5-二甲基苯基)二甲基矽烷、雙(4-羥基-3,5-二氯苯基)二甲基矽烷、雙(4-羥基苯基)甲烷、雙(4-羥基-3,5-二氯苯基)甲烷、雙(4-羥基-3,5-二溴苯基)甲烷、2,2-雙(4-羥基苯基)丙烷、2,2-雙(4-羥基-3,5-二甲基苯基)丙烷、2,2-雙(4-羥基-3,5-二氯苯基)丙烷、2,2-雙(4-羥基-3-甲基苯基)丙烷、2,2-雙(4-羥基-3-氯苯基)丙烷、雙(4-羥基苯基)醚、雙(4-羥基-3,5-二甲基苯基)醚、雙(4-羥基-3,5-二氯苯基)醚、9,9-雙(4-羥基苯基)芴、9,9-雙(4-羥基-3-甲基苯基)芴、9,9-雙(4-羥基-3-氯苯基)芴、9,9-雙(4-羥基-3-溴苯基)芴、9,9-雙(4-羥基-3-氟苯基)芴、9,9-雙(4-羥基-3-甲氧基苯基)芴、9,9-雙(4-羥基-3,5-二甲基苯基)芴、9,9-雙(4-羥基-3,5-二氯苯基)芴、9,9-雙(4-羥基-3,5-二溴苯基)芴、9,9-雙[4-(2-羥基乙氧基)苯基]芴、4,4'-雙酚、3,3'-雙酚等。其中,可特佳地使用具有芴-9,9-二基的雙酚類。The bisphenol-type epoxy compound is an epoxy compound having two glycidyl ether groups obtained by reacting bisphenols and epichlorohydrin. During the reaction, the oligomerization of the glycidyl ether compound is usually accompanied, Therefore, epoxy compounds containing two or more bisphenol skeletons are contained. Examples of bisphenols used in the reaction include bis(4-hydroxyphenyl)ketone, bis(4-hydroxy-3,5-dimethylphenyl)ketone, bis(4-hydroxy-3 ,5-Dichlorophenyl) Ketone, Bis(4-Hydroxyphenyl) Phenyl, Bis(4-Hydroxy-3,5-Dimethylphenyl) Phenyl, Bis(4-Hydroxy-3,5-Dichloro Phenyl) Phenyl, Bis(4-Hydroxyphenyl) Hexafluoropropane, Bis(4-Hydroxy-3,5-Dimethylphenyl) Hexafluoropropane, Bis(4-Hydroxy-3,5-Dichlorobenzene base) hexafluoropropane, bis(4-hydroxyphenyl)dimethylsilane, bis(4-hydroxy-3,5-dimethylphenyl)dimethylsilane, bis(4-hydroxy-3,5- Dichlorophenyl)dimethylsilane, bis(4-hydroxyphenyl)methane, bis(4-hydroxy-3,5-dichlorophenyl)methane, bis(4-hydroxy-3,5-dibromobenzene base) methane, 2,2-bis(4-hydroxyphenyl)propane, 2,2-bis(4-hydroxy-3,5-dimethylphenyl)propane, 2,2-bis(4-hydroxy- 3,5-dichlorophenyl)propane, 2,2-bis(4-hydroxy-3-methylphenyl)propane, 2,2-bis(4-hydroxy-3-chlorophenyl)propane, bis( 4-hydroxyphenyl) ether, bis(4-hydroxy-3,5-dimethylphenyl) ether, bis(4-hydroxy-3,5-dichlorophenyl) ether, 9,9-bis(4 -Hydroxyphenyl)fluorene, 9,9-bis(4-hydroxy-3-methylphenyl)fluorene, 9,9-bis(4-hydroxy-3-chlorophenyl)fluorene, 9,9-bis( 4-Hydroxy-3-bromophenyl)fluorene, 9,9-bis(4-hydroxy-3-fluorophenyl)fluorene, 9,9-bis(4-hydroxy-3-methoxyphenyl)fluorene, 9,9-bis(4-hydroxy-3,5-dimethylphenyl)fluorene, 9,9-bis(4-hydroxy-3,5-dichlorophenyl)fluorene, 9,9-bis(4 -Hydroxy-3,5-dibromophenyl)fluorene, 9,9-bis[4-(2-hydroxyethoxy)phenyl]fluorene, 4,4'-bisphenol, 3,3'-bisphenol wait. Among these, bisphenols having a fluorene-9,9-diyl group can be particularly preferably used.

作為與環氧(甲基)丙烯酸酯進行反應的(a)二羧酸或三羧酸的酸單酐,可使用鏈式烴二羧酸或三羧酸的酸單酐或脂環式二羧酸或三羧酸的酸單酐、芳香族二羧酸或三羧酸的酸單酐。此處,作為鏈式烴二羧酸或三羧酸的酸單酐,例如有琥珀酸、乙醯基琥珀酸、馬來酸、己二酸、衣康酸、壬二酸、檸蘋酸、丙二酸、戊二酸、檸檬酸、酒石酸、氧代戊二酸、庚二酸、癸二酸、辛二酸、二甘醇酸等的酸單酐,進而可為導入有任意的取代基的二羧酸或三羧酸的酸單酐。另外,作為脂環式二羧酸或三羧酸的酸單酐,例如有環丁烷二羧酸、環戊烷二羧酸、六氫鄰苯二甲酸、四氫鄰苯二甲酸、甲基四氫鄰苯二甲酸、甲基內亞甲四氫鄰苯二甲酸、氯菌酸、六氫偏苯三甲酸、降冰片烷二羧酸等的酸單酐,進而可為導入有任意的取代基的二羧酸或三羧酸的酸單酐。進而,作為芳香族二羧酸或三羧酸的酸單酐,例如有鄰苯二甲酸、間苯二甲酸、偏苯三甲酸、1,8-萘二羧酸、2,3-萘二羧酸等的酸單酐,進而可為導入有任意的取代基的二羧酸或三羧酸的酸單酐。As (a) acid monoanhydride of dicarboxylic acid or tricarboxylic acid to react with epoxy (meth)acrylate, acid monoanhydride of chain hydrocarbon dicarboxylic acid or tricarboxylic acid or alicyclic dicarboxylic acid can be used acid or tricarboxylic acid monoanhydride, aromatic dicarboxylic acid or tricarboxylic acid monoanhydride. Here, examples of acid monoanhydrides of chain hydrocarbon dicarboxylic acids or tricarboxylic acids include succinic acid, acetylsuccinic acid, maleic acid, adipic acid, itaconic acid, azelaic acid, citramalic acid, Acid monoanhydrides such as malonic acid, glutaric acid, citric acid, tartaric acid, oxoglutaric acid, pimelic acid, sebacic acid, suberic acid, diglycolic acid, etc., which may further introduce optional substituents Anhydrides of dicarboxylic or tricarboxylic acids. In addition, examples of acid monoanhydrides of alicyclic dicarboxylic acids or tricarboxylic acids include cyclobutane dicarboxylic acid, cyclopentane dicarboxylic acid, hexahydrophthalic acid, tetrahydrophthalic acid, methyl Acid monoanhydrides such as tetrahydrophthalic acid, methylendomethylenetetrahydrophthalic acid, chlorbacteric acid, hexahydrotrimellitic acid, norbornane dicarboxylic acid, etc., can further introduce arbitrary substitutions Acid monoanhydrides of dicarboxylic or tricarboxylic acids. Furthermore, examples of acid monoanhydrides of aromatic dicarboxylic acids or tricarboxylic acids include phthalic acid, isophthalic acid, trimellitic acid, 1,8-naphthalene dicarboxylic acid, 2,3-naphthalene dicarboxylic acid Acid monoanhydrides, such as acid, may further be an acid monoanhydride of a dicarboxylic acid or a tricarboxylic acid into which an arbitrary substituent is introduced.

另外,作為與環氧(甲基)丙烯酸酯進行反應的(b)四羧酸的酸二酐,可使用鏈式烴四羧酸的酸二酐或脂環式四羧酸的酸二酐、或芳香族四羧酸的酸二酐。此處,作為鏈式烴四羧酸的酸二酐,例如有丁烷四羧酸、戊烷四羧酸、己烷四羧酸等的酸二酐,進而可為導入有任意的取代基的四羧酸的酸二酐。另外,作為脂環式四羧酸的酸二酐,例如有環丁烷四羧酸、環戊烷四羧酸、環己烷四羧酸、環庚烷四羧酸、降冰片烷四羧酸等的酸二酐,進而可為導入有任意的取代基的四羧酸的酸二酐。進而,作為芳香族四羧酸的酸二酐,例如可列舉均苯四甲酸、二苯甲酮四羧酸、聯苯基四羧酸、聯苯基醚四羧酸、二苯基碸四羧酸、萘-1,4,5,8-四羧酸、萘-2,3,6,7-四羧酸等的酸二酐,進而可為導入有任意的取代基的四羧酸的酸二酐。In addition, as the (b) acid dianhydride of tetracarboxylic acid reacted with epoxy (meth)acrylate, acid dianhydride of chain hydrocarbon tetracarboxylic acid or acid dianhydride of alicyclic tetracarboxylic acid, Or the acid dianhydride of aromatic tetracarboxylic acid. Here, the acid dianhydrides of chain hydrocarbon tetracarboxylic acids include, for example, acid dianhydrides such as butane tetracarboxylic acid, pentane tetracarboxylic acid, and hexane tetracarboxylic acid. An acid dianhydride of tetracarboxylic acid. In addition, examples of acid dianhydrides of alicyclic tetracarboxylic acids include cyclobutane tetracarboxylic acid, cyclopentane tetracarboxylic acid, cyclohexane tetracarboxylic acid, cycloheptane tetracarboxylic acid, and norbornane tetracarboxylic acid. etc., the acid dianhydride of the tetracarboxylic acid which introduced the arbitrary substituent further may be used. Furthermore, as an acid dianhydride of an aromatic tetracarboxylic acid, for example, pyromellitic acid, benzophenone tetracarboxylic acid, biphenyl tetracarboxylic acid, biphenyl ether tetracarboxylic acid, diphenyl tetracarboxylic acid, acid dianhydrides such as naphthalene-1,4,5,8-tetracarboxylic acid, naphthalene-2,3,6,7-tetracarboxylic acid, etc., furthermore, it may be an acid of tetracarboxylic acid introduced with an arbitrary substituent Dianhydride.

與環氧(甲基)丙烯酸酯進行反應的(a)二羧酸或三羧酸的酸酐與(b)四羧酸的酸二酐的莫耳比(a)/(b)宜為0.01~10.0,更佳為以0.02以上且未滿3.0為宜。若莫耳比(a)/(b)為所述範圍,則容易獲得用以製成具有良好的光圖案化性的感光性樹脂組成物的最優分子量,另外,不損及鹼溶解性,因此較佳。The molar ratio (a)/(b) of (a) the acid anhydride of dicarboxylic acid or tricarboxylic acid and (b) the acid dianhydride of tetracarboxylic acid reacted with epoxy (meth)acrylate is preferably 0.01~ 10.0, more preferably 0.02 or more and less than 3.0. When the molar ratio (a)/(b) is in the above range, it is easy to obtain the optimum molecular weight for making a photosensitive resin composition having good photopatternability, and the alkali solubility is not impaired. Therefore better.

環氧(甲基)丙烯酸酯酸加成物可利用已知的方法、例如日本專利特開平8-278629號公報或日本專利特開2008-9401號公報等中記載的方法而製造。首先,作為使(甲基)丙烯酸與環氧化合物進行反應的方法,例如存在如下方法:將與環氧化合物的環氧基等莫耳的(甲基)丙烯酸添加至溶劑中,在催化劑(三乙基苄基氯化銨、2,6-二異丁基苯酚等)的存在下,一邊吹入空氣一邊以90℃~120℃進行加熱、攪拌而進行反應。其次,作為使酸酐與作為反應產物的環氧丙烯酸酯化合物的羥基進行反應的方法,存在如下方法:將環氧丙烯酸酯化合物與酸二酐及酸單酐的規定量添加至溶劑中,在催化劑(溴化四乙基銨、三苯基膦等)的存在下,以90℃~130℃進行加熱、攪拌而進行反應。利用所述方法而獲得的環氧丙烯酸酯酸加成物具有通式(II)的骨架。 [化6]

Figure 02_image011
〔式(II)中,R 1、R 2、R 3及R 4分別獨立地表示氫原子、碳數1~5的烷基、鹵素原子或苯基,A表示-CO-、-SO 2-、-C(CF 3) 2-、-Si(CH 3) 2-、-CH 2-、-C(CH 3) 2-、-O-、芴-9,9-二基或直鍵,X表示四價羧酸殘基,Y 1及Y 2分別獨立地表示氫原子或-OC-Z-(COOH) m(其中,Z表示二價或三價羧酸殘基,m表示1~2的數),n表示1~20的整數〕 The epoxy (meth)acrylate acid adduct can be produced by a known method, for example, the methods described in JP-A-8-278629 or JP-A-2008-9401. First, as a method of reacting (meth)acrylic acid with an epoxy compound, for example, there is a method in which (meth)acrylic acid, which is molar to the epoxy group of the epoxy compound, is added to a solvent, and the catalyst (three In the presence of ethylbenzyl ammonium chloride, 2,6-diisobutylphenol, etc.), heating and stirring at 90° C. to 120° C. were performed while air was blown in, and the reaction was carried out. Next, as a method of reacting an acid anhydride with a hydroxyl group of an epoxy acrylate compound as a reaction product, there is a method in which a predetermined amount of an epoxy acrylate compound, an acid dianhydride, and an acid monoanhydride are added to a solvent, and the catalyst In the presence of (tetraethylammonium bromide, triphenylphosphine, etc.), it reacts by heating and stirring at 90°C to 130°C. The epoxy acrylate acid adduct obtained by the method has a skeleton of the general formula (II). [chemical 6]
Figure 02_image011
[In formula (II), R 1 , R 2 , R 3 and R 4 each independently represent a hydrogen atom, an alkyl group with 1 to 5 carbons, a halogen atom or a phenyl group, and A represents -CO-, -SO 2 - , -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, fluorene-9,9-diyl or direct bond, X Represents a tetravalent carboxylic acid residue, Y 1 and Y 2 independently represent a hydrogen atom or -OC-Z-(COOH) m (wherein, Z represents a divalent or trivalent carboxylic acid residue, m represents 1 to 2 number), n represents an integer from 1 to 20]

作為(B)成分的其他例可列舉(甲基)丙烯酸、(甲基)丙烯酸酯等共聚物中具有(甲基)丙烯酸基與羧基的樹脂。例如為藉由如下方式而獲得的含有聚合性不飽和基的鹼可溶性樹脂:作為第一步驟,使包含(甲基)丙烯酸縮水甘油酯的(甲基)丙烯酸酯類在溶劑中共聚而獲得共聚物,作為第二步驟,使(甲基)丙烯酸與所獲得的共聚物進行反應,且在第三步驟中使二羧酸或三羧酸的酐進行反應。As another example of (B) component, the resin which has a (meth)acrylic group and a carboxyl group in copolymers, such as (meth)acrylic acid and (meth)acrylate, is mentioned. For example, it is an alkali-soluble resin containing a polymerizable unsaturated group obtained by copolymerizing (meth)acrylic acid esters containing glycidyl (meth)acrylate in a solvent as a first step to obtain a copolymerized As a second step, (meth)acrylic acid is reacted with the obtained copolymer, and in a third step, an anhydride of a dicarboxylic acid or a tricarboxylic acid is reacted.

作為(B)成分的另一個其他的例子,可列舉使作為第一成分的在分子中具有乙烯性不飽和鍵的多元醇化合物、作為第二成分的在分子中具有羧基的二醇化合物、作為第三成分的二異氰酸酯化合物進行反應而獲得的胺基甲酸酯化合物。作為所述系統的樹脂,可參考日本專利特開2017-76071號公報中示出的樹脂。As yet another example of the component (B), a polyol compound having an ethylenically unsaturated bond in the molecule as the first component, a diol compound having a carboxyl group in the molecule as the second component, A urethane compound obtained by reacting the diisocyanate compound of the third component. As the resin of the above-mentioned system, the resin disclosed in Japanese Patent Laid-Open No. 2017-76071 can be referred to.

(B)成分的含有聚合性不飽和基的鹼可溶性樹脂較佳為在本發明的遮光膜用感光性樹脂組成物的固體成分中調配10質量%~40質量%,更佳為以20質量%~40質量%為宜。另外,關於其重量平均分子量(Mw),通常較佳為2000~10000之間,更佳為3000~7000之間。若重量平均分子量(Mw)不足2000,則無法維持顯影時的圖案的密合性,產生圖案剝離,另外,若重量平均分子量(Mw)超過10000,則容易殘存顯影殘渣或未曝光部的殘膜。進而,(B)成分較佳為其酸值處於30 KOHmg/g~200 KOHmg/g的範圍。原因在於:若所述值小於30 KOHmg/g,則存在無法順利地進行鹼顯影或需要強鹼等特殊的顯影條件的情況,另外,若超過200 KOHmg/g,則鹼顯影液的浸透變得過快,容易產生剝離顯影。 此外,關於(B)成分的含有聚合性不飽和基的鹼可溶性樹脂,可僅使用其一種,也可使用兩種以上的混合物。 The polymerizable unsaturated group-containing alkali-soluble resin of the component (B) is preferably blended in an amount of 10% by mass to 40% by mass, more preferably 20% by mass, in the solid content of the photosensitive resin composition for a light-shielding film of the present invention. ~40% by mass is suitable. In addition, the weight average molecular weight (Mw) is usually preferably between 2,000 and 10,000, more preferably between 3,000 and 7,000. If the weight average molecular weight (Mw) is less than 2,000, the adhesion of the pattern during development cannot be maintained, and pattern peeling will occur. In addition, if the weight average molecular weight (Mw) exceeds 10,000, development residues or residual films on unexposed parts will easily remain. . Furthermore, the component (B) preferably has an acid value in the range of 30 KOHmg/g to 200 KOHmg/g. The reason is that if the value is less than 30 KOHmg/g, alkali development may not be carried out smoothly or special development conditions such as strong alkali are required. In addition, if it exceeds 200 KOHmg/g, the penetration of the alkali developing solution may be reduced. Too fast, easy to produce peeling development. Moreover, the polymerizable unsaturated group containing alkali-soluble resin of (B) component may use only 1 type, and may use the mixture of 2 or more types.

<(C)具有至少一個乙烯性不飽和鍵的光聚合性單體> 作為本發明的遮光膜用感光性樹脂組成物中的(C)具有至少一個乙烯性不飽和鍵的光聚合性單體,例如可列舉:(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸2-羥基己酯等具有羥基的(甲基)丙烯酸酯類、或乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、丁二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、三羥甲基乙烷三(甲基)丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇四(甲基)丙烯酸酯、丙三醇(甲基)丙烯酸酯、丙三醇二(甲基)丙烯酸酯、丙三醇三(甲基)丙烯酸酯、山梨糖醇五(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、或者二季戊四醇六(甲基)丙烯酸酯、山梨糖醇六(甲基)丙烯酸酯、磷腈(phosphazene)的環氧烷改性六(甲基)丙烯酸酯、己內酯改性二季戊四醇六(甲基)丙烯酸酯等(甲基)丙烯酸酯類、具有(甲基)丙烯醯基的樹枝狀聚合物等,可使用這些的一種或兩種以上。作為具有(甲基)丙烯醯基的樹枝狀聚合物,例如可例示在多官能(甲基)丙烯酸酯化合物的(甲基)丙烯醯基中的碳-碳雙鍵的一部分上加成多元巰基化合物中的硫醇基而獲得的已知的樹枝狀聚合物。 <(C) Photopolymerizable monomer having at least one ethylenically unsaturated bond> Examples of the (C) photopolymerizable monomer having at least one ethylenically unsaturated bond in the photosensitive resin composition for a light-shielding film of the present invention include: 2-hydroxyethyl (meth)acrylate, (meth) ) 2-hydroxypropyl acrylate, 2-hydroxyhexyl (meth)acrylate and other (meth)acrylates with hydroxyl groups, or ethylene glycol di(meth)acrylate, diethylene glycol di(methyl) ) acrylate, triethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, butylene glycol di(meth)acrylate, trimethylolpropane tri(meth)acrylate ester, trimethylolethane tri(meth)acrylate, pentaerythritol di(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol tetra(meth)acrylate Acrylates, glycerol (meth)acrylate, glycerol di(meth)acrylate, glycerol tri(meth)acrylate, sorbitol penta(meth)acrylate, dipentaerythritol penta( Meth)acrylate, or dipentaerythritol hexa(meth)acrylate, sorbitol hexa(meth)acrylate, alkylene oxide modified hexa(meth)acrylate of phosphazene, caprolactone (Meth)acrylates such as modified dipentaerythritol hexa(meth)acrylate, dendrimers having (meth)acryl groups, etc., one or more of these can be used. As a dendrimer having a (meth)acryl group, for example, a multifunctional mercapto group added to a part of the carbon-carbon double bond in the (meth)acryl group of a polyfunctional (meth)acrylate compound can be exemplified Known dendrimers obtained from thiol groups in compounds.

所述(C)成分可發揮使鹼可溶性樹脂的分子彼此交聯的作用,為了發揮所述功能,較佳為使用具有兩個以上的乙烯性不飽和鍵的成分。另外,只要單體的分子量除以一分子中的(甲基)丙烯醯基的數量所得的丙烯酸當量為50~300即可。The component (C) functions to cross-link the molecules of the alkali-soluble resin. In order to exhibit this function, it is preferable to use a component having two or more ethylenically unsaturated bonds. Moreover, the acrylic acid equivalent obtained by dividing the molecular weight of a monomer by the number of (meth)acryloyl groups in one molecule should just be 50-300.

關於(C)成分的調配量,作為與所述(B)成分的調配比例,以質量比例(B)/(C)計為50/50~90/10,較佳為60/40~80/20。若(B)成分的調配比例少於50/50,則有如下擔憂:光硬化後的硬化物變脆,另外,在未曝光部中塗膜的酸值低,因此對鹼顯影液的溶解性降低,圖案邊緣帶有鋸齒而不清晰。另外,若(B)成分的調配比例多於90/10,則有光反應性官能基在樹脂中所占的比例少,交聯結構的形成不充分,進而,樹脂成分的酸值度過高而曝光部的對鹼顯影液的溶解性變高的擔憂,因此有產生如下問題的擔憂:所形成的圖案變得比目標線寬細,或容易產生圖案的脫落等。Regarding the blending amount of the (C) component, as the blending ratio with the above-mentioned (B) component, the mass ratio (B)/(C) is 50/50 to 90/10, preferably 60/40 to 80/ 20. If the compounding ratio of (B) component is less than 50/50, there is a concern that the cured product after photocuring becomes brittle, and the acid value of the coating film in the unexposed part is low, so the solubility to the alkali developing solution may be feared. Lowered, pattern edges are jagged and not sharp. In addition, if the compounding ratio of the (B) component is more than 90/10, the proportion of the photoreactive functional group in the resin is small, the formation of the crosslinked structure is insufficient, and the acid value of the resin component is too high On the other hand, there is a possibility that the solubility of the exposed portion to an alkali developer may become high, and therefore there may be a problem that the formed pattern becomes thinner than the target line width, or the pattern may be easily peeled off.

<(D)含有碳黑作為遮光材的遮光成分> 本發明的遮光膜用感光性樹脂組成物中的(D)遮光成分必須含有未處理或經氧化處理的碳黑。此處,所謂未處理是不實施氧化處理或樹脂被覆處理等特別的表面處理,所謂氧化處理是在分散步驟前利用某氧化劑對碳黑的表面進行處理。此種未處理或經氧化處理的碳黑在表面具有大量酸性官能基,因此重要的是藉由在獲得遮光膜時的熱硬化時,與所述(A)成分的縮水甘油基進行反應而使大量(A)成分存在於碳黑附近。進而,在使用碳黑並欲進一步提高遮光膜的電阻值的情況下,可使用利用染料、顏料、樹脂等被覆碳黑表面而成的表面被覆碳黑。其中,較佳為在(D)成分中調配80質量%以上的碳黑。作為碳黑以外的遮光成分,可使用選自黑色有機顏料、混色有機顏料或遮光材中的遮光成分,以耐熱性、耐光性及耐溶劑性等優異的成分為宜。此處,作為黑色有機顏料,例如可列舉:苝黑、苯胺黑、花青黑、內醯胺黑等。作為混色有機顏料,可列舉將選自紅、藍、綠、紫、黃色、花青、品紅等中的兩種以上的顏料混合並疑似黑色化而成的有機顏料。作為遮光材,可列舉:氧化鉻、氧化鐵、鈦黑等。這些其他遮光成分也可適當選擇使用兩種以上。 <(D) Light-shielding component containing carbon black as a light-shielding material> The (D) light-shielding component in the photosensitive resin composition for light-shielding films of this invention must contain unprocessed or oxidation-processed carbon black. Here, "untreated" means that no special surface treatment such as oxidation treatment or resin coating treatment is performed, and "oxidation treatment" means that the surface of carbon black is treated with an oxidizing agent before the dispersion step. Such untreated or oxidized carbon black has a large number of acidic functional groups on the surface, so it is important to react with the glycidyl group of the (A) component during heat curing to obtain a light-shielding film. A large amount of (A) component exists near carbon black. Furthermore, when carbon black is used and the resistance value of a light-shielding film is desired to be further increased, surface-coated carbon black which coat|covers the surface of carbon black with a dye, a pigment, resin, etc. can be used. Among them, it is preferable to mix 80% by mass or more of carbon black in the component (D). As light-shielding components other than carbon black, those selected from black organic pigments, mixed-color organic pigments, and light-shielding materials can be used, and components excellent in heat resistance, light resistance, and solvent resistance are preferred. Here, as a black organic pigment, perylene black, aniline black, cyanine black, lactam black etc. are mentioned, for example. Examples of the mixed-color organic pigment include organic pigments obtained by mixing two or more pigments selected from red, blue, green, purple, yellow, cyanine, magenta, and the like and turning them into black. Examples of the light-shielding material include chromium oxide, iron oxide, titanium black, and the like. Two or more of these other light-shielding components can also be selected suitably and used.

另外,遮光成分較佳為以預先與分散劑一起分散於(F)溶劑中而製成遮光性分散液後,作為遮光膜用感光性樹脂組成物進行調配為宜。此處,分散的溶劑成為後述的(F)成分的一部分,因此若為所述(F)成分中列舉的溶劑,則可使用,例如可適宜地使用丙二醇單甲醚乙酸酯、乙酸3-甲氧基丁酯等。關於形成遮光性分散液的(D)成分的調配比例,以相對於本發明的遮光膜用感光性樹脂組成物的總固體成分而在40質量%~70質量%的範圍使用為宜,特佳為40質量%~60質量%的範圍。In addition, the light-shielding component is preferably formulated as a light-shielding film photosensitive resin composition after being previously dispersed in the (F) solvent together with a dispersant to prepare a light-shielding dispersion liquid. Here, the dispersed solvent is part of the (F) component described later, so any solvent listed in the (F) component can be used, for example, propylene glycol monomethyl ether acetate, acetic acid 3- Methoxybutyl Etc. Regarding the compounding ratio of the (D) component which forms the light-shielding dispersion liquid, it is preferable to use it in the range of 40 mass % - 70 mass % with respect to the total solid content of the photosensitive resin composition for light-shielding films of this invention, and it is especially preferable. It is the range of 40 mass % - 60 mass %.

另外,作為所述分散劑,可使用各種高分子分散劑等已知的分散劑。作為分散劑的例子,可無特別限制地使用從前用於顏料分散的已知的化合物(以分散劑、分散濕潤劑、分散促進劑等名稱來市售的化合物等),例如可列舉:陽離子性高分子系分散劑、陰離子性高分子系分散劑、非離子性高分子系分散劑、顏料衍生物型分散劑(分散助劑)等。特別適宜的是陽離子性高分子系分散劑,其具有咪唑基、吡咯基、吡啶基、一級胺基、二級胺基或三級胺基等陽離子性的官能基作為對顏料的吸附點,且胺值為1 mgKOH/g~100 mgKOH/g、數量平均分子量處於1千~10萬的範圍。關於所述分散劑的調配量,較佳為相對於(D)遮光成分而為1質量%~30質量%。In addition, known dispersants such as various polymer dispersants can be used as the dispersant. As an example of a dispersant, known compounds previously used for pigment dispersion (compounds commercially available under the name of dispersant, dispersion wetting agent, dispersion accelerator, etc., etc.) can be used without particular limitation. For example, cationic Polymer dispersant, anionic polymer dispersant, nonionic polymer dispersant, pigment derivative type dispersant (dispersion aid), etc. Particularly suitable is a cationic polymer system dispersant, which has cationic functional groups such as imidazolyl, pyrrolyl, pyridyl, primary amine, secondary amine or tertiary amine as adsorption points for pigments, and The amine value is 1 mgKOH/g to 100 mgKOH/g, and the number average molecular weight is in the range of 1,000 to 100,000. It is preferable that the compounding quantity of the said dispersing agent is 1 mass % - 30 mass % with respect to (D) light-shielding component.

<(E)光聚合起始劑> 作為本發明的遮光膜用感光性樹脂組成物中的(E)光聚合起始劑,例如可列舉:苯乙酮、2,2-二乙氧基苯乙酮、對二甲基苯乙酮、對二甲基胺基苯丙酮、二氯苯乙酮、三氯苯乙酮、對叔丁基苯乙酮、苄基二甲基縮酮等苯乙酮類;二苯甲酮、2-氯二苯甲酮、p,p'-雙二甲基胺基二苯甲酮、4,4'-雙二甲基胺基二苯甲酮(米氏酮)、4-苯基二苯甲酮、4,4'-二氯二苯甲酮、羥基二苯甲酮、4,4'-二乙基胺基二苯甲酮等二苯甲酮類;苯偶醯、安息香、安息香甲醚、安息香異丙醚、安息香異丁醚等安息香醚類;2-(鄰氯苯基)-4,5-苯基聯咪唑、2-(鄰氯苯基)-4,5-二(間甲氧基苯基)聯咪唑、2-(鄰氟苯基)-4,5-二苯基聯咪唑、2-(鄰甲氧基苯基)-4,5-二苯基聯咪唑、2,4,5-三芳基聯咪唑、2,2'-雙(2-氯苯基)-4,4',5,5'-四苯基-1,2-聯咪唑等聯咪唑系化合物類;2-三氯甲基-5-苯乙烯基-1,3,4-噁二唑、2-三氯甲基-5-(對氰基苯乙烯基)-1,3,4-噁二唑、2-三氯甲基-5-(對甲氧基苯乙烯基)-1,3,4-噁二唑等鹵甲基二唑化合物類;2,4,6-三(三氯甲基)-1,3,5-三嗪、2-甲基-4,6-雙(三氯甲基)-1,3,5-三嗪、2-苯基-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-氯苯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基萘基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(3,4,5-三甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲硫基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪等鹵甲基-均三嗪系化合物類;1,2-辛二酮,1-[4-(苯硫基)苯基]-,2-(O-苯甲醯基肟)、1-(4-苯基氫硫基苯基)丁烷-1,2-二酮-2-肟-O-苯甲酸酯、1-(4-甲基氫硫基苯基)丁烷-1,2-二酮-2-肟-O-乙酸酯、1-(4-甲基氫硫基苯基)丁烷-1-酮肟-O-乙酸酯、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-二環庚基-1-酮肟-O-乙酸酯、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-金剛烷基甲烷-1-酮肟-O-苯甲酸酯、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-金剛烷基甲烷-1-酮肟-O-乙酸酯、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-四氫呋喃基甲烷-1-酮肟-O-苯甲酸酯、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-四氫呋喃基甲烷-1-酮肟-O-乙酸酯、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-硫苯基甲烷-1-酮肟-O-苯甲酸酯、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-硫苯基甲烷-1-酮肟-O-乙酸酯、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-嗎啉基甲烷-1-酮肟-O-苯甲酸酯、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-嗎啉基甲烷-1-酮肟-O-乙酸酯、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-乙烷-1-酮肟-O-二環庚烷羧酸酯、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-乙烷-1-酮肟-O-三環癸烷羧酸酯、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-乙烷-1-酮肟-O-金剛烷羧酸酯、1-[4-(苯基氫硫基)苯基]辛烷-1,2-二酮=2-O-苯甲醯基肟、1-[9-乙基-6-(2-甲基苯甲醯基)咔唑-3-基]乙酮-O-乙醯基肟、(2-甲基苯基)(7-硝基-9,9-二丙基-9H-芴-2-基)-乙醯基肟、乙酮,1-[7-(2-甲基苯甲醯基)-9,9-二丙基-9H-芴-2-基]-1-(O-乙醯基肟)、乙酮,1-(9,9-二丁基-7-硝基-9H-芴-2-基)-1-O-乙醯基肟、乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯基肟)等O-醯基肟系化合物類;硫雜蒽酮、2-氯硫雜蒽酮、2,4-二甲基硫雜蒽酮、2,4-二乙基硫雜蒽酮、2-甲基硫雜蒽酮、2-異丙基硫雜蒽酮、4-異丙基硫雜蒽酮、2,4-二氯硫雜蒽酮、1-氯-4-丙氧基硫雜蒽酮等硫化合物;2-乙基蒽醌、八甲基蒽醌、1,2-苯並蒽醌、2,3-二苯基蒽醌等蒽醌類;偶氮雙異丁腈、苯甲醯基過氧化物、枯烯過氧化物等有機過氧化物;2-巰基苯並咪唑、2-巰基苯並噁唑、2-巰基苯並噻唑、丙酸β-巰酯、丙酸2-乙基己基-3-巰酯、丙酸正辛基-3-巰酯、丙酸甲氧基丁基-3-巰酯、丙酸硬脂基-3-巰酯、三羥甲基丙烷三(3-巰基丙酸酯)、三-[(3-巰基丙醯氧基)-乙基]-異氰脲酸酯、季戊四醇四(3-巰基丁酸酯)、季戊四醇四(3-巰基丙酸酯)、四乙二醇雙(3-巰基丙酸酯)、二季戊四醇六(3-巰基丙酸酯)、3,3'-硫代二丙酸、二硫代二丙酸、月桂基硫代丙酸等硫醇化合物等。其中,就容易獲得高靈敏度的遮光膜用感光性樹脂組成物的觀點而言,較佳為使用O-醯基肟系化合物類。另外,也可使用兩種以上的這些光聚合起始劑。此外,所謂本發明中所述的光聚合起始劑是以包含增感劑的含義使用。 <(E) Photopolymerization initiator> Examples of the (E) photopolymerization initiator in the photosensitive resin composition for a light-shielding film of the present invention include acetophenone, 2,2-diethoxyacetophenone, and p-dimethylacetophenone. , p-dimethylaminopropiophenone, dichloroacetophenone, trichloroacetophenone, p-tert-butylacetophenone, benzyl dimethyl ketal and other acetophenones; benzophenone, 2- Chlorobenzophenone, p,p'-bisdimethylaminobenzophenone, 4,4'-bisdimethylaminobenzophenone (Michler's ketone), 4-phenylbenzophenone Ketone, 4,4'-dichlorobenzophenone, hydroxybenzophenone, 4,4'-diethylaminobenzophenone and other benzophenones; benzoyl, benzoin, benzoin methyl ether , benzoin isopropyl ether, benzoin isobutyl ether and other benzoin ethers; 2-(o-chlorophenyl)-4,5-phenylbiimidazole, 2-(o-chlorophenyl)-4,5-di(m-methyl Oxyphenyl) biimidazole, 2-(o-fluorophenyl)-4,5-diphenylbiimidazole, 2-(o-methoxyphenyl)-4,5-diphenylbiimidazole, 2, 4,5-triarylbiimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2-biimidazole and other biimidazole compounds; 2-Trichloromethyl-5-styryl-1,3,4-oxadiazole, 2-trichloromethyl-5-(p-cyano-styryl)-1,3,4-oxadiazole , 2-trichloromethyl-5-(p-methoxystyryl)-1,3,4-oxadiazole and other halomethyldiazole compounds; 2,4,6-tri(trichloromethyl )-1,3,5-triazine, 2-methyl-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-phenyl-4,6-bis(trichloro Methyl)-1,3,5-triazine, 2-(4-chlorophenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-methyl Oxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-methoxynaphthyl)-4,6-bis(trichloromethyl) -1,3,5-triazine, 2-(4-methoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(3,4 ,5-trimethoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-methylthiostyryl)-4,6-bis (Trichloromethyl)-1,3,5-triazine and other halomethyl-s-triazine compounds; 1,2-octanedione, 1-[4-(phenylthio)phenyl]-, 2-(O-benzoyl oxime), 1-(4-phenylmercaptophenyl)butane-1,2-dione-2-oxime-O-benzoate, 1-(4 -Methylmercaptophenyl)butane-1,2-dione-2-oxime-O-acetate, 1-(4-methylmercaptophenyl)butane-1-ketoxime- O-acetate, 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]-dicycloheptyl-1-ketoxime-O-ethyl Ester, 1-[9-Ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]-adamantylmethane-1-ketoxime-O-benzoate , 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]-adamantylmethane-1-ketoxime-O-acetate, 1- [9-Ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]-tetrahydrofurylmethane-1-ketoxime-O-benzoate, 1-[9- Ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]-tetrahydrofurylmethane-1-ketoxime-O-acetate, 1-[9-ethyl-6 -(2-Methylbenzoyl)-9H-carbazol-3-yl]-thiophenylmethane-1-ketoxime-O-benzoate, 1-[9-ethyl-6-( 2-methylbenzoyl)-9H-carbazol-3-yl]-thiophenylmethane-1-one oxime-O-acetate, 1-[9-ethyl-6-(2-methyl ylbenzoyl)-9H-carbazol-3-yl]-morpholinylmethane-1-one oxime-O-benzoate, 1-[9-ethyl-6-(2-methylbenzene Formyl)-9H-carbazol-3-yl]-morpholinylmethane-1-ketoxime-O-acetate, 1-[9-ethyl-6-(2-methylbenzoyl )-9H-carbazol-3-yl]-ethane-1-ketoxime-O-dicycloheptanecarboxylate, 1-[9-ethyl-6-(2-methylbenzoyl) -9H-carbazol-3-yl]-ethane-1-ketoxime-O-tricyclodecane carboxylate, 1-[9-ethyl-6-(2-methylbenzoyl)- 9H-carbazol-3-yl]-ethane-1-ketoxime-O-adamantanecarboxylate, 1-[4-(phenylmercapto)phenyl]octane-1,2-dione =2-O-benzoyl oxime, 1-[9-ethyl-6-(2-methylbenzoyl)carbazol-3-yl]ethanone-O-acetyl oxime, (2 -Methylphenyl)(7-nitro-9,9-dipropyl-9H-fluoren-2-yl)-acetyl oxime, ethyl ketone, 1-[7-(2-methylbenzoyl base)-9,9-dipropyl-9H-fluoren-2-yl]-1-(O-acetyl oxime), ethyl ketone, 1-(9,9-dibutyl-7-nitro- 9H-fluoren-2-yl)-1-O-acetyl oxime, ethyl ketone, 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl ]-,1-(O-acetyl oxime) and other O-acyl oxime compounds; thioxanthone, 2-chlorothioxanthone, 2,4-dimethylthioxanthone, 2, 4-diethylthioxanthone, 2-methylthioxanthone, 2-isopropylthioxanthone, 4-isopropylthioxanthone, 2,4-dichlorothioxanthone, Sulfur compounds such as 1-chloro-4-propoxythioxanthone; anthracene such as 2-ethylanthraquinone, octamethylanthraquinone, 1,2-benzoanthraquinone, 2,3-diphenylanthraquinone, etc. Quinones; organic peroxides such as azobisisobutyronitrile, benzoyl peroxide, and cumene peroxide; 2-mercaptobenzimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzothiazole , β-mercapto propionate, 2-ethylhexyl-3-mercapto propionate, n-octyl-3-mercapto propionate, methoxybutyl-3-mercapto propionate, stearyl propionate -3-Mercaptoester, trimethylolpropane tris(3-mercaptopropionate), tris-[(3-mercaptopropionyloxy)-ethyl]-isocyanurate, pentaerythritol tetrakis(3-mercapto butyrate), pentaerythritol tetrakis(3-mercaptopropionate), tetraethylene glycol bis(3-mercaptopropionate), dipentaerythritol hexa(3-mercaptopropionate), 3,3'-thiobis Thiol compounds such as propionic acid, dithiodipropionic acid, laurylthiopropionic acid, etc. Among them, it is preferable to use O-acyl oxime compounds from the viewpoint of easily obtaining a highly sensitive photosensitive resin composition for a light-shielding film. In addition, two or more of these photopolymerization initiators may also be used. In addition, the photopolymerization initiator described in this invention is used in the meaning of including a sensitizer.

另外,其自身不作為光聚合起始劑或增感劑發揮作用,藉由與所述化合物組合使用,也可添加可使光聚合起始劑或增感劑的能力增大的化合物。此種化合物的例子包含與二苯甲酮組合使用時有效果的胺系化合物。所述胺系化合物的例子可列舉:三乙胺、三乙醇胺、甲基二乙醇胺、三異丙醇胺、4-二甲基胺基苯甲酸甲酯、4-二甲基胺基苯甲酸乙酯、4-二甲基胺基苯甲酸異戊酯、苯甲酸2-二甲基胺基乙酯、4-二甲基胺基苯甲酸2-乙基己酯、N,N-二甲基對甲苯胺、4,4'-雙(二甲基胺基)二苯甲酮、4,4'-雙(二乙基胺基)二苯甲酮、4,4'-雙(乙基甲基胺基)二苯甲酮等。In addition, it does not function as a photopolymerization initiator or a sensitizer by itself, and a compound capable of increasing the ability of a photopolymerization initiator or a sensitizer may be added by using it in combination with the above-mentioned compounds. Examples of such compounds include amine compounds that are effective when used in combination with benzophenone. Examples of the amine compounds include: triethylamine, triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate Esters, Isoamyl 4-Dimethylaminobenzoate, 2-Dimethylaminoethyl Benzoate, 2-Ethylhexyl 4-Dimethylaminobenzoate, N,N-Dimethylaminobenzoate p-toluidine, 4,4'-bis(dimethylamino)benzophenone, 4,4'-bis(diethylamino)benzophenone, 4,4'-bis(ethylamino)benzophenone Amino) benzophenone, etc.

關於(E)成分的調配量,較佳為相對於所述(B)成分與(C)成分的合計100質量份而為2質量份~40質量份,更佳為3質量份~30質量份。The compounding quantity of (E) component is preferably 2-40 mass parts with respect to the total 100 mass parts of said (B) component and (C) component, More preferably, it is 3-30 mass parts .

<(F)溶劑> 作為本發明的遮光膜用感光性樹脂組成物中的(F)溶劑,例如可列舉:甲醇、乙醇、正丙醇、異丙醇、乙二醇、丙二醇、3-甲氧基-1-丁醇、乙二醇單丁醚、3-羥基-2-丁酮、二丙酮醇等醇類;α-萜品醇或β-萜品醇等萜烯類等;丙酮、甲基乙基酮、環己酮、N-甲基-2-吡咯烷酮等酮類;甲苯、二甲苯、四甲基苯等芳香族烴類;甲基溶纖劑、乙基溶纖劑、甲基卡必醇、乙基卡必醇、丁基卡必醇、二乙二醇乙基甲基醚、丙二醇單甲醚、丙二醇單乙醚、二丙二醇單甲醚、二丙二醇單乙醚、三乙二醇單甲醚、三乙二醇單乙醚等二醇醚類;乙酸乙酯、乙酸丁酯、乳酸乙酯、乙酸3-甲氧基丁酯、乙酸3-甲氧基-3-丁酯、乙酸3-甲氧基-3-甲基-1-丁酯、溶纖劑乙酸酯、乙基溶纖劑乙酸酯、丁基溶纖劑乙酸酯、卡必醇乙酸酯、乙基卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等酯類等;藉由使用這些並進行溶解、混合,可製成均勻的溶液狀的組成物。 <(F) Solvent> Examples of the (F) solvent in the photosensitive resin composition for a light-shielding film of the present invention include methanol, ethanol, n-propanol, isopropanol, ethylene glycol, propylene glycol, and 3-methoxy-1-butyl alcohol, ethylene glycol monobutyl ether, 3-hydroxy-2-butanone, diacetone alcohol and other alcohols; α-terpineol or β-terpineol and other terpenes; acetone, methyl ethyl ketone, Cyclohexanone, N-methyl-2-pyrrolidone and other ketones; toluene, xylene, tetramethylbenzene and other aromatic hydrocarbons; methyl cellosolve, ethyl cellosolve, methyl carbitol, ethyl Base carbitol, butyl carbitol, diethylene glycol ethyl methyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monomethyl ether, triethylene glycol monomethyl ether, three Glycol ethers such as ethylene glycol monoethyl ether; ethyl acetate, butyl acetate, ethyl lactate, 3-methoxybutyl acetate, 3-methoxy-3-butyl acetate, 3-methoxy acetate -3-Methyl-1-butyl ester, cellosolve acetate, ethyl cellosolve acetate, butyl cellosolve acetate, carbitol acetate, ethyl carbitol acetate, Esters such as butyl carbitol acetate, propylene glycol monomethyl ether acetate, and propylene glycol monoethyl ether acetate; by using these and dissolving and mixing them, a homogeneous solution-like composition can be prepared.

<其他成分> 另外,本發明的遮光膜用感光性樹脂組成物可視需要來調配熱聚合抑制劑、抗氧化劑、增塑劑、填充材、流平劑、消泡劑、偶合劑、表面活性劑、黏度調整劑等添加劑。作為熱聚合抑制劑及抗氧化劑,可列舉:對苯二酚、對苯二酚單甲醚、鄰苯三酚、叔丁基鄰苯二酚、吩噻嗪、受阻酚系化合物等,作為增塑劑,可列舉:鄰苯二甲酸二丁酯、鄰苯二甲酸二辛酯、磷酸三甲苯酯等,作為填充材,可列舉:玻璃纖維、二氧化矽、雲母、氧化鋁等,作為消泡劑或流平劑,可列舉:矽酮系、氟系、丙烯酸系的化合物。另外,作為表面活性劑,可列舉:月桂基硫酸銨、聚氧乙烯烷基醚硫酸三乙醇胺等陰離子表面活性劑、硬脂基胺乙酸酯、月桂基三甲基氯化銨等陽離子表面活性劑、月桂基二甲基胺氧化物、月桂基羧基甲基羥基乙基咪唑鎓甜菜鹼等兩性表面活性劑、聚氧乙烯月桂醚、聚氧乙烯硬脂醚、山梨醇酐單硬脂酸酯等非離子表面活性劑、以聚二甲基矽氧烷等為主骨架的矽酮系表面活性劑、氟系表面活性劑等。作為偶合劑,可列舉:3-(縮水甘油氧基)丙基三甲氧基矽烷、3-異氰酸基丙基三乙氧基矽烷、3-脲基丙基三乙氧基矽烷等矽烷偶合劑。 <Other ingredients> In addition, the photosensitive resin composition for light-shielding film of the present invention may be formulated with thermal polymerization inhibitors, antioxidants, plasticizers, fillers, leveling agents, defoamers, coupling agents, surfactants, and viscosity modifiers as needed. and other additives. Examples of thermal polymerization inhibitors and antioxidants include: hydroquinone, hydroquinone monomethyl ether, pyrogallol, tert-butylcatechol, phenothiazine, hindered phenolic compounds, etc. Plasticizers include: dibutyl phthalate, dioctyl phthalate, tricresyl phosphate, etc., as fillers, include: glass fiber, silicon dioxide, mica, alumina, etc., as disinfectants Foaming agents or leveling agents include silicone-based, fluorine-based, and acrylic-based compounds. In addition, examples of the surfactant include anionic surfactants such as ammonium lauryl sulfate and triethanolamine polyoxyethylene alkyl ether sulfate, and cationic surfactants such as stearylamine acetate and lauryltrimethylammonium chloride. Amphoteric surfactants, lauryl dimethylamine oxide, lauryl carboxymethyl hydroxyethyl imidazolium betaine and other amphoteric surfactants, polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, sorbitan monostearate Non-ionic surfactants such as polydimethylsiloxane and other silicone-based surfactants, fluorine-based surfactants, etc. Examples of coupling agents include silane coupling agents such as 3-(glycidyloxy)propyltrimethoxysilane, 3-isocyanatopropyltriethoxysilane, and 3-ureidopropyltriethoxysilane. mixture.

<固體成分> 本發明的遮光膜用感光性樹脂組成物含有所述(A)成分~(F)成分作為主成分。在溶劑除外的固體成分(固體成分包含硬化後成為固體成分的單體)中,(A)成分~(E)成分較佳為以合計計為70質量%,以更佳為包含80質量%以上、進而較佳為包含90質量%以上為宜。(F)溶劑的量根據目標黏度而變化,宜設為在本發明的遮光膜用感光性樹脂組成物中以60質量%~90質量%的範圍包含。 <Solid content> The photosensitive resin composition for light-shielding films of this invention contains the said (A) component - (F) component as a main component. In the solid content excluding the solvent (the solid content includes monomers that become solid content after hardening), the total of components (A) to (E) is preferably 70% by mass, more preferably 80% by mass or more , More preferably, it is suitable to contain 90 mass % or more. (F) Although the amount of the solvent changes depending on the target viscosity, it is preferably included in the range of 60% by mass to 90% by mass in the photosensitive resin composition for light-shielding films of the present invention.

<遮光膜的形成方法> 本發明的遮光膜用感光性樹脂組成物例如作為彩色濾光片遮光膜形成用的感光性樹脂組成物而優異,作為遮光膜的形成方法,有如以下所述的光刻法。可列舉如下方法:首先,將感光性樹脂組成物塗布於透明基板上,繼而使溶媒乾燥(預烘烤)後,在以所述方式獲得的被膜上放上光遮罩,照射紫外線而使曝光部硬化,進而使用鹼水溶液來進行使未曝光部溶出的顯影而形成圖案,進而進行後烘烤(熱煆燒)來作為後乾燥。 <Method of forming light-shielding film> The photosensitive resin composition for a light-shielding film of the present invention is excellent, for example, as a photosensitive resin composition for forming a light-shielding film of a color filter. As a method for forming a light-shielding film, there is a photolithography method as described below. The following methods can be mentioned: First, the photosensitive resin composition is coated on a transparent substrate, and then the solvent is dried (pre-baked), and a photomask is placed on the film obtained in the above way, and ultraviolet rays are irradiated to expose The part is hardened, and then the unexposed part is developed by using an aqueous alkali solution to elute the unexposed part to form a pattern, and post-baking (heat sintering) is performed as post-drying.

作為塗布感光性樹脂組成物的透明基板,除了玻璃基板以外,還可例示在透明膜(例如,聚碳酸酯、聚對苯二甲酸乙二酯、聚醚碸等)上蒸鍍或圖案化氧化銦錫(indium tin oxide,ITO)或金等透明電極而成的基板等。作為在透明基板上塗布感光性樹脂組成物的溶液的方法,除了已知的溶液浸漬法、噴霧法以外,也可還採用使用輥塗布機、圓盤塗布機(Land coater machine)、狹縫塗布機或旋轉機的方法等任一方法。利用這些方法塗布為所需的厚度後,將溶劑去除(預烘烤),由此形成被膜。預烘烤是藉由利用烘箱、加熱板等進行加熱來進行。預烘烤中的加熱溫度及加熱時間是根據所使用的溶劑來適當選擇,例如在60℃~110℃的溫度下進行1分鐘~3分鐘。As a transparent substrate on which a photosensitive resin composition is applied, in addition to a glass substrate, vapor deposition or patterned oxidation on a transparent film (for example, polycarbonate, polyethylene terephthalate, polyethersulfone, etc.) can also be exemplified. Substrates made of transparent electrodes such as indium tin oxide (ITO) or gold. As a method of coating the solution of the photosensitive resin composition on the transparent substrate, in addition to the known solution dipping method and spray method, roll coater, land coater machine (land coater machine), slit coater, etc. can also be used. Either method such as machine or rotary machine method. After coating to a desired thickness by these methods, the solvent is removed (prebaked) to form a film. Prebaking is performed by heating with an oven, a hot plate, or the like. The heating temperature and heating time in the prebaking are appropriately selected according to the solvent to be used, for example, at a temperature of 60° C. to 110° C. for 1 minute to 3 minutes.

預烘烤後進行的曝光是利用紫外線曝光裝置來進行,藉由介隔光遮罩進行曝光,而僅使與圖案對應的部分的抗蝕劑感光。適當選擇曝光裝置及其曝光照射條件並使用超高壓水銀燈、高壓水銀燈、金屬鹵化物燈、遠紫外線燈等光源進行曝光,從而使塗膜中的感光性樹脂組成物光硬化。Exposure after the prebaking is performed using an ultraviolet exposure device, and exposure is performed through a photomask to sensitize only a portion of the resist corresponding to the pattern. The photosensitive resin composition in the coating film is photohardened by appropriately selecting an exposure device and its exposure irradiation conditions and exposing using a light source such as an ultra-high pressure mercury lamp, a high pressure mercury lamp, a metal halide lamp, or an extreme ultraviolet lamp.

曝光後的鹼顯影是出於將未經曝光的部分的抗蝕劑去除的目的而進行,藉由所述顯影而形成所需的圖案。作為適合於所述鹼顯影的顯影液,例如可列舉鹼金屬或鹼土類金屬的碳酸鹽的水溶液、鹼金屬的氫氧化物的水溶液等,特別宜使用含有0.05質量%~3質量%的碳酸鈉、碳酸鉀、碳酸鋰等碳酸鹽的弱鹼性水溶液,在23℃~28℃的溫度下進行顯影,可使用市售的顯影機或超聲波洗滌機等來精密地形成微細的圖像。Alkali development after exposure is performed for the purpose of removing the resist in unexposed parts, and a desired pattern is formed by this development. As a developing solution suitable for the above-mentioned alkali development, for example, aqueous solutions of carbonates of alkali metals or alkaline earth metals, aqueous solutions of hydroxides of alkali metals, etc., are particularly preferably used. , Potassium Carbonate, Lithium Carbonate and other weakly alkaline aqueous solutions of carbonates are developed at a temperature of 23°C to 28°C, and fine images can be precisely formed using commercially available developing machines or ultrasonic cleaners.

顯影後,較佳為在180℃~250℃的溫度及20分鐘~60分鐘的條件下進行熱處理(後烘烤)。所述後烘烤是出於用以提高經圖案化的遮光膜與基板的密合性等目的來進行。這與預烘烤同樣是藉由利用烘箱、加熱板等進行加熱來進行。本發明的經圖案化的遮光膜是經過以上的利用光刻法的各步驟來形成。After image development, heat processing (post-baking) is preferably performed at a temperature of 180° C. to 250° C. and on conditions of 20 minutes to 60 minutes. The post-baking is performed for the purpose of improving the adhesion between the patterned light-shielding film and the substrate. This is performed by heating with an oven, a hot plate, etc. similarly to prebaking. The patterned light-shielding film of the present invention is formed through the above steps of photolithography.

如上所述,本發明的遮光膜用感光性樹脂組成物適合於藉由曝光、鹼顯影等操作來形成微細圖案。另外,本發明的遮光膜用感光性樹脂組成物可適合用作塗布材,特別適合用作在液晶的顯示裝置或攝像元件中所使用的彩色濾光片用油墨,由此,所形成的遮光膜作為彩色濾光片、液晶投影用的黑色矩陣、遮光膜、觸摸面板用遮光膜等而有用。As mentioned above, the photosensitive resin composition for light-shielding films of this invention is suitable for forming a fine pattern by operations, such as exposure and alkali development. In addition, the photosensitive resin composition for a light-shielding film of the present invention can be suitably used as a coating material, especially as an ink for a color filter used in a liquid crystal display device or an imaging element. The film is useful as a color filter, a black matrix for liquid crystal projection, a light-shielding film, a light-shielding film for a touch panel, and the like.

本發明中所獲得的高遮光、高電阻的遮光膜在OD為3.9/μm以上時在10 V施加電壓下可確保1×10 8Ω·cm以上的體積電阻率。進而,本發明的感光性樹脂組成物適合於形成如下遮光膜圖案,所述遮光膜圖案在形成了例如3 μm~8 μm為止的細線的情況下顯影密合性也優異。 The high light-shielding and high-resistance light-shielding film obtained in the present invention can ensure a volume resistivity of 1×10 8 Ω·cm or more under an applied voltage of 10 V when the OD is 3.9/μm or more. Furthermore, the photosensitive resin composition of the present invention is suitable for forming a light-shielding film pattern having excellent development adhesion even when thin lines of, for example, 3 μm to 8 μm are formed.

以下,基於實施例及比較例,對本發明的實施方式進行具體說明,但本發明並不限定於這些。Hereinafter, embodiments of the present invention will be specifically described based on Examples and Comparative Examples, but the present invention is not limited thereto.

首先,示出相當於本發明的(B)成分的、含有聚合性不飽和基的鹼可溶性樹脂的合成例。合成例中的樹脂的評價是如以下那樣進行。First, a synthesis example of a polymerizable unsaturated group-containing alkali-soluble resin corresponding to (B) component of the present invention is shown. The evaluation of the resin in the synthesis example was performed as follows.

[固體成分濃度] 使合成例中所獲得的樹脂溶液1 g含浸於玻璃濾光片〔質量:W 0(g)〕中並進行秤量〔W 1(g)〕,根據在160℃下加熱2 hr後的質量〔W 2(g)〕並利用下式來求出。 固體成分濃度(質量%)=100×(W 2-W 0)/(W 1-W 0[Concentration of solid content] 1 g of the resin solution obtained in the synthesis example was impregnated into a glass filter [mass: W 0 (g)] and weighed [W 1 (g)], and heated at 160°C for 2 The mass [W 2 (g)] after hr was obtained by the following formula. Solid content concentration (mass%)=100×(W 2 -W 0 )/(W 1 -W 0 )

[酸值] 使樹脂溶液溶解於二噁烷中,使用電位差滴定裝置〔平沼製作所(股)製造的商品名COM-1600〕並利用1/10 N-KOH水溶液進行滴定來求出。 [acid value] The resin solution was dissolved in dioxane, and it was determined by titrating with a 1/10 N-KOH aqueous solution using a potentiometric titration device [trade name COM-1600 manufactured by Hiranuma Seisakusho Co., Ltd.].

[分子量] 利用凝膠滲透色譜法(Gel Permeation Chromatography,GPC)[東曹(Tosoh)(股)製造的商品名HLC-8220GPC、溶媒:四氫呋喃、管柱:TSKgelSuperH-2000(2根)+TSKgelSuperH-3000(1根)+TSKgelSuperH-4000(1根)+TSKgelSuper-H5000(1根)〔東曹(Tosoh)(股)製造〕、溫度:40℃、速度:0.6 ml/min]進行測定,作為標準聚苯乙烯〔東曹(Tosoh)(股)製造的PS-寡聚物套組〕換算值來求出重量平均分子量(Mw)。 [molecular weight] Gel Permeation Chromatography (GPC) [trade name HLC-8220GPC manufactured by Tosoh Co., Ltd., solvent: tetrahydrofuran, column: TSKgelSuperH-2000 (2 pieces) + TSKgelSuperH-3000 (1 root) + TSKgelSuperH-4000 (1 piece) + TSKgelSuper-H5000 (1 piece) [Tosoh Co., Ltd.], temperature: 40°C, speed: 0.6 ml/min] as a standard polystyrene The weight average molecular weight (Mw) was calculated from the converted value of [PS-Oligomer Kit manufactured by Tosoh Co., Ltd.].

[環氧當量] 使成為測定對象的環氧化合物溶解於二噁烷中後,加入溴化四乙基銨的乙酸溶液,使用電位差滴定裝置「COM-1600」(平沼產業股份有限公司製造)並利用1/10 N-高氯酸溶液進行滴定來求出。 [epoxy equivalent] After dissolving the epoxy compound to be measured in dioxane, add an acetic acid solution of tetraethylammonium bromide, and use a potentiometric titration device "COM-1600" (manufactured by Hiranuma Sangyo Co., Ltd.) to utilize 1/10 N - Calculated by titrating a perchloric acid solution.

另外,合成例中使用的簡稱如以下所述。 AA:丙烯酸(acrylic acid) BPFE:9,9-雙(4-羥基苯基)芴與氯甲基氧雜環丙烷的反應產物。在通式(I)的化合物中,A為芴-9,9-二基、R 1~R 4為氫原子的化合物。 BPDA:3,3',4,4'-聯苯四羧酸二酐(3,3',4,4'-biphenyl tetracarboxylic dianhydride) THPA:1,2,3,6-四氫鄰苯二甲酸酐(1,2,3,6-tetra hydro phthalic anhydride) TPP:三苯基膦(triphenylphosphine) PGMEA:丙二醇單甲醚乙酸酯(propylene glycol monomethyl ether acetate) TEAB:溴化四乙基銨(tetraethyl ammonium bromide) In addition, the abbreviations used in the synthesis example are as follows. AA: acrylic acid (acrylic acid) BPFE: a reaction product of 9,9-bis(4-hydroxyphenyl)fluorene and chloromethyloxirane. Among the compounds of the general formula (I), A is a fluorene-9,9-diyl group, and R 1 to R 4 are hydrogen atoms. BPDA: 3,3',4,4'-biphenyl tetracarboxylic dianhydride (3,3',4,4'-biphenyl tetracarboxylic dianhydride) THPA: 1,2,3,6-tetrahydrophthalic acid dianhydride Anhydride (1,2,3,6-tetra hydrophthalic anhydride) TPP: triphenylphosphine PGMEA: propylene glycol monomethyl ether acetate TEAB: tetraethylammonium bromide ammonium bromide)

[合成例1] 在附帶回流冷卻器的500 ml四口燒瓶中投入BPFE 114.4 g(0.23莫耳)、AA 33.2 g(0.46莫耳)、PGMEA 157 g及TEAB 0.48 g,在以100℃~105℃進行加熱下攪拌20 hr而進行反應。繼而,在燒瓶內投入BPDA 35.3 g(0.12莫耳)、THPA 18.3 g(0.12莫耳),在以120℃~125℃進行加熱下攪拌6 hr,獲得含有聚合性不飽和基的鹼可溶性樹脂溶液。所獲得的樹脂溶液的固體成分濃度為56.1質量%,酸值(固體成分換算)為103 mgKOH/g,利用GPC分析所得的Mw為3600。 [Synthesis Example 1] Put 114.4 g (0.23 mol) of BPFE, 33.2 g (0.46 mol) of AA, 157 g of PGMEA, and 0.48 g of TEAB into a 500 ml four-necked flask with a reflux cooler, and stir while heating at 100°C to 105°C 20 hr for the reaction. Next, 35.3 g (0.12 mol) of BPDA and 18.3 g (0.12 mol) of THPA were put into the flask, and stirred while heating at 120°C to 125°C for 6 hours to obtain an alkali-soluble resin solution containing a polymerizable unsaturated group . The solid content concentration of the obtained resin solution was 56.1 mass %, the acid value (solid content conversion) was 103 mgKOH/g, and the Mw obtained by GPC analysis was 3600.

[遮光膜用感光性樹脂組成物的製備] 根據表1至表4所示的組成來進行調配,製備實施例1~實施例34、比較例1~比較例9及基準比較例1~基準比較例5的感光性樹脂組成物。調配中使用的各成分如以下所述,表中的數值均為質量份。 [Preparation of Photosensitive Resin Composition for Light-shielding Film] Preparation was carried out according to the composition shown in Table 1-Table 4, and the photosensitive resin composition of Example 1-Example 34, Comparative Example 1-Comparative Example 9, and Standard Comparative Example 1-Basic Comparative Example 5 were prepared. Each component used for preparation is as follows, and the numerical values in a table|surface are all parts by mass.

(A)環氧化合物: (A)-1:雙酚芴型環氧化合物〔日鐵化學&材料(股)製造的ESF-300C、環氧當量240、相對於縮水甘油基數的芳香環數:2.09〕 (A)-2:1,6-萘二醇芳烷基型環氧化合物〔所述式(2)所表示的化合物、環氧當量167、相對於縮水甘油基數的芳香環數:1.30〕 (A)-3:1-萘酚芳烷基型環氧化合物〔所述式(3)所表示的化合物、環氧當量317、相對於縮水甘油基數的芳香環數:3.13〕 (A)-4:苯酚酚醛清漆型環氧化合物〔日鐵化學&材料(股)製造的YDPN-6300、環氧當量175、相對於縮水甘油基數的芳香環數:1〕 (A)-5:脂環型環氧化合物〔日鐵化學&材料(股)製造的ZX-1658GS、環氧當量132、相對於縮水甘油基數的芳香環數:0〕 (A) Epoxy compound: (A)-1: Bisphenol fluorene-type epoxy compound [ESF-300C manufactured by Nippon Steel Chemical & Materials Co., Ltd., epoxy equivalent 240, number of aromatic rings to the number of glycidyl groups: 2.09] (A)-2: 1,6-naphthalenediol aralkyl-type epoxy compound [the compound represented by the above-mentioned formula (2), epoxy equivalent 167, number of aromatic rings relative to the number of glycidyl groups: 1.30] (A)-3: 1-naphthol aralkyl type epoxy compound [the compound represented by the above-mentioned formula (3), epoxy equivalent 317, number of aromatic rings relative to the number of glycidyl groups: 3.13] (A)-4: Phenol novolak-type epoxy compound [YDPN-6300 manufactured by Nippon Steel Chemical & Materials Co., Ltd., epoxy equivalent 175, number of aromatic rings to the number of glycidyl groups: 1] (A)-5: Alicyclic epoxy compound [ZX-1658GS manufactured by Nippon Steel Chemical & Materials Co., Ltd., epoxy equivalent 132, number of aromatic rings relative to the number of glycidyl groups: 0]

(B)含有聚合性不飽和基的鹼可溶性樹脂: 所述合成例1中所獲得的含有聚合性不飽和基的鹼可溶性樹脂溶液 (B) Alkali-soluble resins containing polymerizable unsaturated groups: The alkali-soluble resin solution containing the polymerizable unsaturated group obtained in the synthesis example 1

(C)光聚合性單體: 二季戊四醇五丙烯酸酯與六丙烯酸酯的混合物〔日本化藥(股)製造的DPHA、丙烯酸當量96~115〕 (C) Photopolymerizable monomer: Mixture of dipentaerythritol pentaacrylate and hexaacrylate [DPHA manufactured by Nippon Kayaku Co., Ltd., acrylic acid equivalent 96-115]

(D)含有遮光成分的顏料分散體: (D)-1:碳黑25.0質量%、分散樹脂5.0質量%、高分子分散劑3.5質量%的丙二醇單甲醚乙酸酯溶劑的顏料分散體 (D)-2:碳黑25.0質量%、高分子分散劑6.3質量%的丙二醇單甲醚乙酸酯溶劑的顏料分散體 (D)-3:有機黑色顏料16.0質量%、高分子分散劑4.8質量%的丙二醇單甲醚乙酸酯溶劑的顏料分散體 (D)-4:鈦黑15.0質量%、高分子分散劑4.0質量%的丙二醇單甲醚乙酸酯溶劑的顏料分散體 (D)-5:染料被覆碳黑25.0質量%、分散樹脂(鹼可溶性樹脂(使用前述(B)成分))8.1質量%、高分子分散劑2.0%的丙二醇單甲醚乙酸酯溶劑的顏料分散體 (D) Pigment dispersions containing opacifying ingredients: (D)-1: Pigment dispersion in propylene glycol monomethyl ether acetate solvent of 25.0% by mass of carbon black, 5.0% by mass of dispersing resin, and 3.5% by mass of polymer dispersant (D)-2: Pigment dispersion of propylene glycol monomethyl ether acetate solvent with 25.0% by mass of carbon black and 6.3% by mass of polymer dispersant (D)-3: Pigment dispersion of propylene glycol monomethyl ether acetate solvent with 16.0% by mass of organic black pigment and 4.8% by mass of polymer dispersant (D)-4: Pigment dispersion of propylene glycol monomethyl ether acetate solvent with 15.0% by mass of titanium black and 4.0% by mass of polymer dispersant (D)-5: 25.0% by mass of dye-coated carbon black, 8.1% by mass of dispersing resin (alkali-soluble resin (using the above-mentioned (B) component)) 8.1% by mass, and 2.0% of polymer dispersant, propylene glycol monomethyl ether acetate solvent pigment Dispersions

(E)光聚合起始劑: 肟酯系光聚合起始劑〔艾迪科(ADEKA)(股)製造的NCI-831〕 (E) Photopolymerization initiator: Oxime ester-based photopolymerization initiator [NCI-831 manufactured by ADEKA Co., Ltd.]

(F)溶劑: (F)-1:丙二醇單甲醚乙酸酯 (F)-2:二乙二醇二甲醚 (F)-3:二乙二醇乙基甲基醚 (F)-4:二乙二醇二丁醚 (F) Solvent: (F)-1: Propylene glycol monomethyl ether acetate (F)-2: Diethylene glycol dimethyl ether (F)-3: Diethylene glycol ethyl methyl ether (F)-4: Diethylene glycol dibutyl ether

(G)矽烷偶合劑:信越化學(股)製造的KBM-803(G) Silane coupling agent: KBM-803 manufactured by Shin-Etsu Chemical Co., Ltd.

(H)表面活性劑:日本畢克化學(BYK-Chemie Japan)(股)製造的BYK-330(H) Surfactant: BYK-330 manufactured by BYK-Chemie Japan (stock)

[表1] 調配成分 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 比較例 比較例 比較例 基準比較例 1 2 3 4 5 6 7 8 9 10 11 1 2 3 1 (A)-1 0.71 3.50 5.00 (A)-2 0.71 3.50 5.00 (A)-3 0.71 3.50 5.00 (A)-4 0.71 5.00 (A)-5 0.71 3.50 5.00 (B) 31.3 31.3 31.3 31.3 27.9 27.9 27.9 26.0 26.0 26.0 26.0 31.3 27.9 26.0 32.2 (C) 9.36 9.36 9.36 9.36 8.71 8.71 8.71 8.36 8.36 8.36 8.36 9.36 8.71 8.36 9.50 (D)-1 208 208 208 208 208 208 208 208 208 208 208 208 208 208 208 (D)-2 (D)-3 (D)-4 (E) 2.64 2.64 2.64 2.64 2.43 2.43 2.43 2.36 2.36 2.36 2.36 2.64 2.43 2.36 2.64 (F)-1 155 155 155 155 156 156 156 157 157 157 157 155 156 157 155 (F)-2 184 184 184 184 184 184 184 184 184 184 184 184 184 184 184 (F)-3 104 104 104 104 104 104 104 104 104 104 104 104 104 104 104 (F)-4 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 (G) 0.18 0.18 0.18 0.18 0.18 0.18 0.18 0.18 0.18 0.18 0.18 0.18 0.18 0.18 0.18 (H) 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 [Table 1] Blending ingredients Example Example Example Example Example Example Example Example Example Example Example comparative example comparative example comparative example Benchmark comparison example 1 2 3 4 5 6 7 8 9 10 11 1 2 3 1 (A)-1 0.71 3.50 5.00 (A)-2 0.71 3.50 5.00 (A)-3 0.71 3.50 5.00 (A)-4 0.71 5.00 (A)-5 0.71 3.50 5.00 (B) 31.3 31.3 31.3 31.3 27.9 27.9 27.9 26.0 26.0 26.0 26.0 31.3 27.9 26.0 32.2 (C) 9.36 9.36 9.36 9.36 8.71 8.71 8.71 8.36 8.36 8.36 8.36 9.36 8.71 8.36 9.50 (D)-1 208 208 208 208 208 208 208 208 208 208 208 208 208 208 208 (D)-2 (D)-3 (D)-4 (E) 2.64 2.64 2.64 2.64 2.43 2.43 2.43 2.36 2.36 2.36 2.36 2.64 2.43 2.36 2.64 (F)-1 155 155 155 155 156 156 156 157 157 157 157 155 156 157 155 (F)-2 184 184 184 184 184 184 184 184 184 184 184 184 184 184 184 (F)-3 104 104 104 104 104 104 104 104 104 104 104 104 104 104 104 (F)-4 18 18 18 18 18 18 18 18 18 18 18 18 18 18 18 (G) 0.18 0.18 0.18 0.18 0.18 0.18 0.18 0.18 0.18 0.18 0.18 0.18 0.18 0.18 0.18 (H) 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04

[表2] 調配成分 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 基準比較例 12 13 14 15 16 17 18 19 20 21 22 23 24 2 (A)-1 0.64 3.00 4.29 1.50 1.50 1.00 (A)-2 0.64 3.00 4.29 1.50 1.50 1.00 (A)-3 0.64 3.00 4.29 1.50 1.50 1.00 (A)-4 (A)-5 (B) 42.3 42.3 42.3 39.4 39.4 39.4 37.8 37.8 37.8 39.4 39.4 39.4 39.4 43.1 (C) 7.93 7.93 7.93 7.43 7.43 7.43 7.14 7.14 7.14 7.43 7.43 7.43 7.43 8.07 (D)-1 (D)-2 208 208 208 208 208 208 208 208 208 208 208 208 208 208 (D)-3 (D)-4 (E) 2.21 2.21 2.21 2.07 2.07 2.07 2.00 2.00 2.00 2.07 2.07 2.07 2.07 2.29 (F)-1 146 146 146 147 147 147 148 148 148 147 147 147 147 146 (F)-2 184 184 184 184 184 184 184 184 184 184 184 184 184 184 (F)-3 104 104 104 104 104 104 104 104 104 104 104 104 104 104 (F)-4 18 18 18 18 18 18 18 18 18 18 18 18 18 18 (G) 0.14 0.14 0.14 0.14 0.14 0.14 0.14 0.14 0.14 0.14 0.14 0.14 0.14 0.18 (H) 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 [Table 2] Blending ingredients Example Example Example Example Example Example Example Example Example Example Example Example Example Benchmark comparison example 12 13 14 15 16 17 18 19 20 twenty one twenty two twenty three twenty four 2 (A)-1 0.64 3.00 4.29 1.50 1.50 1.00 (A)-2 0.64 3.00 4.29 1.50 1.50 1.00 (A)-3 0.64 3.00 4.29 1.50 1.50 1.00 (A)-4 (A)-5 (B) 42.3 42.3 42.3 39.4 39.4 39.4 37.8 37.8 37.8 39.4 39.4 39.4 39.4 43.1 (C) 7.93 7.93 7.93 7.43 7.43 7.43 7.14 7.14 7.14 7.43 7.43 7.43 7.43 8.07 (D)-1 (D)-2 208 208 208 208 208 208 208 208 208 208 208 208 208 208 (D)-3 (D)-4 (E) 2.21 2.21 2.21 2.07 2.07 2.07 2.00 2.00 2.00 2.07 2.07 2.07 2.07 2.29 (F)-1 146 146 146 147 147 147 148 148 148 147 147 147 147 146 (F)-2 184 184 184 184 184 184 184 184 184 184 184 184 184 184 (F)-3 104 104 104 104 104 104 104 104 104 104 104 104 104 104 (F)-4 18 18 18 18 18 18 18 18 18 18 18 18 18 18 (G) 0.14 0.14 0.14 0.14 0.14 0.14 0.14 0.14 0.14 0.14 0.14 0.14 0.14 0.18 (H) 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04

[表3] 調配成分 比較例 比較例 比較例 基準比較例 比較例 比較例 比較例 基準比較例 4 5 6 3 7 8 9 4 (A)-1 2.79 2.93 (A)-2 2.79 2.93 (A)-3 2.79 2.93 (A)-4 (A)-5 (B) 36.57 36.57 36.57 39.93 38.50 38.50 38.50 42.14 (C) 6.86 6.86 6.86 7.50 7.29 7.29 7.29 7.93 (D)-1 (D)-2 (D)-3 325 325 325 325 (D)-4 347 347 347 347 (E) 1.93 1.93 1.93 2.14 2.00 2.00 2.00 2.21 (F)-1 34 34 34 32 10 10 10 8 (F)-2 184 184 184 184 184 184 184 184 (F)-3 104 104 104 104 104 104 104 104 (F)-4 18 18 18 18 18 18 18 18 (G) 0.14 0.14 0.14 0.14 0.14 0.14 0.14 0.14 (H) 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 [table 3] Blending ingredients comparative example comparative example comparative example Benchmark comparison example comparative example comparative example comparative example Benchmark comparison example 4 5 6 3 7 8 9 4 (A)-1 2.79 2.93 (A)-2 2.79 2.93 (A)-3 2.79 2.93 (A)-4 (A)-5 (B) 36.57 36.57 36.57 39.93 38.50 38.50 38.50 42.14 (C) 6.86 6.86 6.86 7.50 7.29 7.29 7.29 7.93 (D)-1 (D)-2 (D)-3 325 325 325 325 (D)-4 347 347 347 347 (E) 1.93 1.93 1.93 2.14 2.00 2.00 2.00 2.21 (F)-1 34 34 34 32 10 10 10 8 (F)-2 184 184 184 184 184 184 184 184 (F)-3 104 104 104 104 104 104 104 104 (F)-4 18 18 18 18 18 18 18 18 (G) 0.14 0.14 0.14 0.14 0.14 0.14 0.14 0.14 (H) 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04

[表4] 調配成分 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 基準比較例 25 26 27 28 29 30 31 32 33 34 5 (A)-1 0.79 3.71 5.36    (A)-2 0.79 3.71 5.36    (A)-3 0.79 3.71 5.36    (A)-4 3.00 (A)-5    (B) 23.0 23.0 23.0 19.4 19.4 19.4 17.4 17.4 17.4 39.4 24.0 (C) 10.00 10.00 10.00 9.29 9.29 9.29 8.93 8.93 8.93 7.43 10.14 (D)-1    (D)-2 208 (D)-3    (D)-4    (D)-5 208 208 208 208 208 208 208 208 208    208 (E) 2.79 2.79 2.79 2.57 2.57 2.57 2.50 2.50 2.50 2.07 2.86 (F)-1 162 162 162 164 164 164 165 165 165 147 162 (F)-2 184 184 184 184 184 184 184 184 184 184 184 (F)-3 104 104 104 104 104 104 104 104 104 104 104 (F)-4 18 18 18 18 18 18 18 18 18 18 18 (G) 0.21 0.21 0.21 0.21 0.21 0.21 0.18 0.18 0.18 0.14 0.21 (H) 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 [Table 4] Blending ingredients Example Example Example Example Example Example Example Example Example Example Benchmark comparison example 25 26 27 28 29 30 31 32 33 34 5 (A)-1 0.79 3.71 5.36 (A)-2 0.79 3.71 5.36 (A)-3 0.79 3.71 5.36 (A)-4 3.00 (A)-5 (B) 23.0 23.0 23.0 19.4 19.4 19.4 17.4 17.4 17.4 39.4 24.0 (C) 10.00 10.00 10.00 9.29 9.29 9.29 8.93 8.93 8.93 7.43 10.14 (D)-1 (D)-2 208 (D)-3 (D)-4 (D)-5 208 208 208 208 208 208 208 208 208 208 (E) 2.79 2.79 2.79 2.57 2.57 2.57 2.50 2.50 2.50 2.07 2.86 (F)-1 162 162 162 164 164 164 165 165 165 147 162 (F)-2 184 184 184 184 184 184 184 184 184 184 184 (F)-3 104 104 104 104 104 104 104 104 104 104 104 (F)-4 18 18 18 18 18 18 18 18 18 18 18 (G) 0.21 0.21 0.21 0.21 0.21 0.21 0.18 0.18 0.18 0.14 0.21 (H) 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04 0.04

[評價] 使用實施例1~實施例34、比較例1~比較例9及基準比較例1~基準比較例5的感光性樹脂組成物,進行以下所述的評價。將它們的評價結果示於表5~表8中。 [evaluate] Using the photosensitive resin compositions of Examples 1 to 34, Comparative Examples 1 to 9, and Reference Comparative Examples 1 to 5, the following evaluations were performed. These evaluation results are shown in Table 5-Table 8.

<OD/μm的評價> 使用旋轉塗布機將所述獲得的各感光性樹脂組成物以後烘烤後的膜厚成為1.0 μm的方式塗布於125 mm×125 mm的玻璃基板(康寧(Corning)1737)上,並在90℃下預烘烤1分鐘。其後,不被覆負型光遮罩而利用i射線照度30 mW/cm 2的超高壓水銀燈照射40 mJ/cm 2的紫外線,進行光硬化反應。 <Evaluation of OD/μm> Each photosensitive resin composition obtained above was coated on a 125 mm×125 mm glass substrate (Corning 1737 ) and pre-bake at 90°C for 1 min. Thereafter, the photocuring reaction was performed by irradiating ultraviolet rays of 40 mJ/cm 2 with an ultra-high pressure mercury lamp with i-ray illuminance of 30 mW/cm 2 without covering the negative photomask.

其次,對於所述結束曝光的塗板,在23℃下使用0.04%氫氧化鉀水溶液,以1 kgf/cm 2的噴淋壓力進行80秒的顯影後,進行5 kgf/cm 2壓力的噴霧水洗,其後,使用熱風乾燥機在230℃下進行30分鐘熱後烘烤。使用透過濃度計對所述塗板的OD值進行評價。另外,對形成於塗板上的遮光膜的膜厚進行測定,將OD值除以膜厚所得的值設為OD/μm。 Next, for the above-mentioned exposed coated plate, use 0.04% potassium hydroxide aqueous solution at 23°C, after developing for 80 seconds with a spray pressure of 1 kgf/cm 2 , carry out spray water washing with a pressure of 5 kgf/cm 2 , Thereafter, post-baking was performed at 230° C. for 30 minutes using a hot air dryer. The OD value of the coated plate was evaluated using a permeation densitometer. Moreover, the film thickness of the light-shielding film formed on the coated board was measured, and the value obtained by dividing the OD value by the film thickness was made into OD/micrometer.

<熱硬化後殘膜率的評價> 使用旋轉塗布機將所述獲得的各感光性樹脂組成物以後烘烤後的膜厚成為3.0 μm的方式塗布於125 mm×125 mm的玻璃基板(康寧(Corning)1737)上,並在90℃下預烘烤1分鐘,然後對形成於塗板上的遮光膜的膜厚進行測定。其後,使用熱風乾燥機在230℃下進行180分鐘熱後烘烤後,再次測定形成於塗板上的遮光膜的膜厚,根據後烘烤前後的膜厚並基於以下計算式來算出。 殘膜率(%)=100×後烘烤後膜厚(μm)/後烘烤前膜厚(μm) <Evaluation of residual film rate after thermosetting> Each photosensitive resin composition obtained above was coated on a 125 mm×125 mm glass substrate (Corning 1737) with a film thickness of 3.0 μm after post-baking using a spin coater, and heated at 90° C. After pre-baking for 1 minute, the film thickness of the light-shielding film formed on the coated panel was measured. Thereafter, after post-baking at 230° C. for 180 minutes using a hot-air dryer, the film thickness of the light-shielding film formed on the coated panel was measured again, and calculated from the film thickness before and after post-baking based on the following calculation formula. Residual film rate (%)=100×film thickness after post-baking (μm)/film thickness before post-baking (μm)

<體積電阻率上升度的評價> 使用旋轉塗布機將所述獲得的各感光性樹脂組成物以後烘烤後的膜厚成為3.0 μm的方式塗布於100 mm×100 mm的鉻蒸鍍玻璃基板(康寧(Corning)1737)上,並在90℃下預烘烤1分鐘。其後,使用熱風乾燥機在230℃下進行180分鐘熱後烘烤後,使用靜電計(吉時利(Keithley)公司製造、「6517A型」),在以1 V步進並在各施加電壓下電壓保持各60秒的條件下測定施加電壓1 V至10 V下的體積電阻率。對於施加10 V時的體積電阻率,分別基於以下計算式來算出以不使用(A)成分的基準比較例1為基準時的實施例1~實施例11及比較例1~比較例3的上升度、以不使用(A)成分的基準比較例2為基準時的實施例12~實施例24的上升度、以不使用(A)成分的基準比較例3為基準時的比較例4~比較例6的上升度、以不使用(A)成分的基準比較例4為基準時的比較例7~比較例9的上升度、以不使用(A)成分的基準比較例5為基準時的實施例25~實施例33的上升度。此外,作為基準者在之後的表中表述為「Ref.」。 上升度=實施例或比較例的各體積電阻率(Ω·cm)/基準比較例的各體積電阻率(Ω·cm) 對於所算出的體積電阻率上升度,基於下述判定基準來判定體積電阻率上升度。 〇:100≦體積電阻率上升度 Δ:10≦體積電阻率上升度<100 ×:體積電阻率上升度<10 <Evaluation of volume resistivity increase> Each photosensitive resin composition obtained above was coated on a 100 mm×100 mm chrome-deposited glass substrate (Corning 1737) so that the film thickness after post-baking was 3.0 μm using a spin coater, and Prebake at 90°C for 1 minute. Thereafter, after post-baking at 230°C for 180 minutes using a hot air dryer, using an electrometer (manufactured by Keithley, "Type 6517A"), a voltage was applied in steps of 1 V at each The volume resistivity at an applied voltage of 1 V to 10 V was measured while maintaining the lower voltage for 60 seconds each. For the volume resistivity when 10 V is applied, the increases in Examples 1 to 11 and Comparative Examples 1 to 3 were calculated based on the following calculation formulas based on the standard Comparative Example 1 that does not use the component (A) degree, the degree of increase of Example 12 to Example 24 based on the standard comparative example 2 not using the (A) component, and the comparative example 4 to the comparative example 3 based on the standard comparative example 3 not using the (A) component The degree of rise of Example 6, the degree of rise of Comparative Examples 7 to 9 based on the standard Comparative Example 4 that does not use the (A) component, and the implementation of the standard Comparative Example 5 that does not use the (A) component Example 25-Example 33 rise degree. In addition, what is used as a reference is expressed as "Ref." in the following table. Degree of rise = each volume resistivity (Ω·cm) of the example or comparative example/each volume resistivity (Ω·cm) of the reference comparative example Regarding the calculated increase in volume resistivity, the increase in volume resistivity was determined based on the following determination criteria. 〇: 100≦Volume resistivity increase degree Δ: 10≦Volume resistivity increase degree<100 ×: volume resistivity increase <10

<顯影特性(最小分辨線寬)的評價> 使用旋轉塗布機將所述獲得的各感光性樹脂組成物以後烘烤後的膜厚成為1.2 μm的方式塗布於125 mm×125 mm的玻璃基板(康寧(Corning)1737)上,並在90℃下預烘烤1分鐘。其後,使存在1 μm~20 μm開口寬的線圖案的負型光遮罩密合於乾燥塗膜上,利用i射線照度30 mW/cm 2的超高壓水銀燈照射40 mJ/cm 2的紫外線,進行感光部分的光硬化反應。 <Evaluation of development characteristics (minimum resolution line width)> Each photosensitive resin composition obtained above was coated on a 125 mm×125 mm glass substrate ( Corning (Corning) 1737) and prebake at 90°C for 1 minute. Thereafter, a negative photomask having a line pattern with an opening width of 1 μm to 20 μm is closely bonded to the dry coating film, and 40 mJ/cm 2 of ultraviolet rays are irradiated with an ultra-high pressure mercury lamp with an i-ray illuminance of 30 mW/cm 2 , to carry out the photohardening reaction of the photosensitive part.

其次,對於所述結束曝光的塗板,在23℃下且在0.04%氫氧化鉀水溶液中,以1 kgf/cm 2的噴淋顯影壓力進行自開始出現圖案的顯影時間(間歇期(breaktime)=BT)起+60秒的顯影後,進行5 kgf/cm 2壓力的噴霧水洗,去除塗膜的未曝光部而在玻璃基板上形成線圖案,其後,使用熱風乾燥機在230℃下進行30分鐘熱後烘烤,然後獲得線圖案,將在所獲得的線圖案中未產生圖案剝離的最小開口線作為最小分辨線寬。 ◎:2 μm以上且未滿5 μm 〇:5 μm以上且未滿9 μm Δ:9 μm以上且未滿11 μm ×:11 μm以上 Next, with respect to the coated plate whose exposure was finished, the developing time from the beginning of pattern appearance was carried out at 23° C. in 0.04% potassium hydroxide aqueous solution with a shower developing pressure of 1 kgf/cm 2 (breaktime = After developing for +60 seconds from BT), spray water washing with a pressure of 5 kgf/cm 2 is carried out to remove the unexposed part of the coating film and form a line pattern on the glass substrate. After that, use a hot air dryer at 230°C for 30 Baking after heating for 1 minute, and then obtaining a line pattern, the smallest opening line without pattern peeling in the obtained line pattern was taken as the minimum resolution line width. ◎: 2 μm or more and less than 5 μm ○: 5 μm or more and less than 9 μm Δ: 9 μm or more and less than 11 μm ×: 11 μm or more

<體積電阻率降低率的評價(耐熱性)> 使用旋轉塗布機將所述實施例15~實施例17及實施例34以及基準比較例2中所獲得的各感光性樹脂組成物以後烘烤後的膜厚成為3.0 μm的方式塗布於100 mm×100 mm的鉻蒸鍍玻璃基板(康寧(Corning)1737)上,並在90℃下預烘烤1分鐘。其後,使用熱風乾燥機在230℃下進行180分鐘熱後烘烤後,使用靜電計(吉時利(Keithley)公司製造、「6517A型」),在以1 V步進並在各施加電壓下電壓保持各60秒的條件下測定施加電壓1 V至10 V下的體積電阻率。另外,與這些不同,將熱後烘烤的溫度變更為270℃,以相同的方式對實施例15~實施例17及實施例34以及基準比較例2的各感光性樹脂組成物實施相同的程序來測定體積電阻率。 對於施加10 V時的體積電阻率,基於下述計算式來算出熱後烘烤的溫度自230℃變為270℃時的體積電阻率的降低率(絕對值)。另外,在將基準比較例2時的降低率視為1時,基於下述計算式來算出相對於基準比較例2的實施例15~實施例17及實施例34的各相對值〔降低率的相對值(x)〕。此外,關於基準比較例2,在之後的表中表述為「Ref.」。 降低率(絕對值)=100×(logA-logB)/logB (此處,A是熱後烘烤為270℃時的體積電阻率的測定值(Ω·cm),B是熱後烘烤為230℃時的體積電阻率的測定值(Ω·cm)) 降低率的相對值(x)=實施例15、實施例16、實施例17或實施例34的各降低率/基準比較例2的降低率 對於所算出的降低率的相對值,將其作為耐熱性,基於下述判定基準來進行判定。 ◎:0≦x<0.5 〇:0.5≦x<0.8 Δ:0.8≦x<1.0 ×:1.0≦x <Evaluation of Volume Resistivity Reduction Rate (Heat Resistance)> Each of the photosensitive resin compositions obtained in Examples 15 to 17, Example 34, and Reference Comparative Example 2 was coated on a surface of 100 mm× A 100 mm chrome-evaporated glass substrate (Corning 1737) was prebaked at 90 °C for 1 min. Thereafter, after post-baking at 230°C for 180 minutes using a hot air dryer, using an electrometer (manufactured by Keithley, "Type 6517A"), a voltage was applied in steps of 1 V at each The volume resistivity at an applied voltage of 1 V to 10 V was measured while maintaining the lower voltage for 60 seconds each. In addition, differently from these, the temperature of the thermal post-baking was changed to 270° C., and the same procedure was implemented for each photosensitive resin composition of Examples 15 to 17, Example 34, and Reference Comparative Example 2 in the same manner. to measure volume resistivity. Regarding the volume resistivity when 10 V was applied, the decrease rate (absolute value) of the volume resistivity when the temperature of the post-baking was changed from 230° C. to 270° C. was calculated based on the following calculation formula. In addition, when the reduction rate in the reference comparative example 2 was regarded as 1, each relative value of Examples 15 to 17 and Example 34 with respect to the reference comparative example 2 was calculated based on the following calculation formula [reduction rate relative value (x)]. In addition, about the standard comparative example 2, it expresses as "Ref." in the following table|surface. Reduction rate (absolute value)=100×(logA-logB)/logB (Here, A is the measured value of volume resistivity (Ω·cm) at 270°C after heat-baking, and B is the measured value (Ω·cm) of volume resistivity at 230°C after heat-baking) Relative value of reduction rate (x) = each reduction rate of Example 15, Example 16, Example 17, or Example 34/reduction rate of Reference Comparative Example 2 The relative value of the calculated decrease rate was determined based on the following determination criteria as heat resistance. ◎: 0≦x<0.5 〇: 0.5≦x<0.8 Δ: 0.8≦x<1.0 ×: 1.0≦x

[表5] 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 比較例 比較例 比較例 基準比較例 1 2 3 4 5 6 7 8 9 10 11 1 2 3 1 OD(/μm) 4.0 4.0 4.0 4.0 4.0 4.0 4.0 4.0 3.9 4.0 4.0 4.0 4.0 4.0 4.0 熱硬化後殘膜率(%) 91.8 92.5 92.5 92.1 92.0 93.0 92.8 92.2 93.4 92.6 93.1 91.9 91.1 90.4 92.0 體積電阻率上升度 Δ Δ × × × Ref. 最小分辨線寬(μm) Δ Δ Δ Δ Δ [table 5] Example Example Example Example Example Example Example Example Example Example Example comparative example comparative example comparative example Benchmark comparison example 1 2 3 4 5 6 7 8 9 10 11 1 2 3 1 OD (/μm) 4.0 4.0 4.0 4.0 4.0 4.0 4.0 4.0 3.9 4.0 4.0 4.0 4.0 4.0 4.0 Residual film rate after thermal hardening (%) 91.8 92.5 92.5 92.1 92.0 93.0 92.8 92.2 93.4 92.6 93.1 91.9 91.1 90.4 92.0 volume resistivity increase Δ Δ x x x Ref. Minimum resolution line width (μm) Δ Δ Δ Δ Δ

[表6] 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 基準比較例 12 13 14 15 16 17 18 19 20 21 22 23 24 2 OD(/μm) 4.0 4.0 4.0 4.0 4.0 4.0 3.9 4.0 3.9 4.0 4.0 4.0 4.0 4.0 熱硬化後殘膜率(%) 91.0 92.0 91.5 92.1 92.3 91.3 92.8 92.5 91.8 91.1 90.4 90.7 90.5 91.0 體積電阻率上升度 Δ Δ Ref. 最小分辨線寬(μm) 耐熱性 - - - - - - - - - - Ref. [Table 6] Example Example Example Example Example Example Example Example Example Example Example Example Example Benchmark comparison example 12 13 14 15 16 17 18 19 20 twenty one twenty two twenty three twenty four 2 OD (/μm) 4.0 4.0 4.0 4.0 4.0 4.0 3.9 4.0 3.9 4.0 4.0 4.0 4.0 4.0 Residual film rate after thermal hardening (%) 91.0 92.0 91.5 92.1 92.3 91.3 92.8 92.5 91.8 91.1 90.4 90.7 90.5 91.0 volume resistivity increase Δ Δ Ref. Minimum resolution line width (μm) heat resistance - - - - - - - - - - Ref.

[表7] 比較例 比較例 比較例 基準比較例 比較例 比較例 比較例 基準比較例 4 5 6 3 7 8 9 4 OD(/μm) 2.2 2.2 2.2 2.2 4.2 4.2 4.2 4.2 熱硬化後殘膜率(%) 91.8 92.1 91.8 91.7 87.9 88.7 87.6 88.0 體積電阻率上升度 × × × Ref. × × × Ref. 最小分辨線寬(μm) Δ [Table 7] comparative example comparative example comparative example Benchmark comparison example comparative example comparative example comparative example Benchmark comparison example 4 5 6 3 7 8 9 4 OD (/μm) 2.2 2.2 2.2 2.2 4.2 4.2 4.2 4.2 Residual film rate after thermal hardening (%) 91.8 92.1 91.8 91.7 87.9 88.7 87.6 88.0 volume resistivity increase x x x Ref. x x x Ref. Minimum resolution line width (μm) Δ

[表8] 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 實施例 基準比較例 25 26 27 28 29 30 31 32 33 34 5 OD(/μm) 3.9 4.0 4.0 3.9 4.0 4.0 3.9 4.0 3.9 4.0 4.0 熱硬化後殘膜率(%) 88.9 89.5 89.2 89.1 89.8 89.7 89.4 89.9 90.2 - 88.2 體積電阻率上升度 Δ Δ Δ Ref. 最小分辨線寬(μm) - 耐熱性 - - - - - - - - - Δ - [Table 8] Example Example Example Example Example Example Example Example Example Example Benchmark comparison example 25 26 27 28 29 30 31 32 33 34 5 OD (/μm) 3.9 4.0 4.0 3.9 4.0 4.0 3.9 4.0 3.9 4.0 4.0 Residual film rate after thermal hardening (%) 88.9 89.5 89.2 89.1 89.8 89.7 89.4 89.9 90.2 - 88.2 volume resistivity increase Δ Δ Δ Ref. Minimum resolution line width (μm) - heat resistance - - - - - - - - - Δ -

根據實施例1~實施例34、比較例1~比較例9及基準比較例1~基準比較例5的結果而明確:藉由在含有以碳黑為遮光材的遮光成分的感光性樹脂組成物中添加作為(A)成分的環氧化合物,體積電阻率提高。其中,特別是實施例15~實施例17、實施例21~實施例24、實施例28~實施例30的體積電阻率的上升度非常高且最小分辨線寬細,因此是顯影密合性也優異且使高遮光、高電阻化與高精細化並存的遮光膜用感光性樹脂組成物。另外,可知在使用(A)成分中的(A)-1~(A)-3的環氧化合物的實施例15~實施例17的情況下,所述耐熱性優異,可知特別是在(A)-1及(A)-2的情況下,耐熱性更優異。According to the results of Examples 1 to 34, Comparative Examples 1 to 9, and Reference Comparative Examples 1 to 5, it is clear that by adding carbon black to the photosensitive resin composition containing the light-shielding component of the light-shielding material Adding an epoxy compound as the component (A) improves the volume resistivity. Among them, especially in Examples 15 to 17, Examples 21 to 24, and Examples 28 to 30, the increase in volume resistivity is very high and the minimum resolution line width is thin, so the development adhesion is also good. It is an excellent photosensitive resin composition for light-shielding film that combines high light-shielding, high-resistance, and high-definition. In addition, in the case of Examples 15 to 17 using the epoxy compounds of (A)-1 to (A)-3 in the (A) component, it was found that the heat resistance was excellent, and it was found that especially in (A) )-1 and (A)-2, the heat resistance was more excellent.

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Claims (5)

一種遮光膜用感光性樹脂組成物,其特徵在於包含下述(A)成分~(F)成分作為必需成分, (A)環氧化合物、 (B)含有聚合性不飽和基的鹼可溶性樹脂、 (C)具有至少一個乙烯性不飽和鍵的光聚合性單體、 (D)含有碳黑作為遮光材的遮光成分、 (E)光聚合起始劑、及 (F)溶劑, 所述(A)成分在主鏈中具有芳香環,另外,相對於縮水甘油基在(A)成分中所占的數量的芳香環數為0.5~10,進而,環氧當量為100 g/eq~400 g/eq。 A photosensitive resin composition for a light-shielding film, characterized by comprising the following components (A) to (F) as essential components, (A) epoxy compound, (B) Alkali-soluble resins containing polymerizable unsaturated groups, (C) a photopolymerizable monomer having at least one ethylenically unsaturated bond, (D) Light-shielding components containing carbon black as a light-shielding material, (E) photopolymerization initiator, and (F) solvent, The component (A) has an aromatic ring in the main chain, and the number of aromatic rings relative to the number of glycidyl groups in the component (A) is 0.5 to 10, and the epoxy equivalent is 100 g/eq ~400 g/eq. 如請求項1所述的遮光膜用感光性樹脂組成物,其特徵在於:(B)成分與(C)成分的質量比例(B)/(C)為50/50~90/10,相對於(D)成分100質量份而含有0.5質量份~15質量份的(A)成分,且在遮光膜用感光性樹脂組成物的固體成分中包含40質量%~70質量%的(D)成分。The photosensitive resin composition for a light-shielding film according to Claim 1, wherein the mass ratio (B)/(C) of component (B) to component (C) is 50/50 to 90/10, relative to (D) 100 mass parts of components contain 0.5-15 mass parts of (A) components, and 40-70 mass % of (D) components are contained in the solid content of the photosensitive resin composition for light-shielding films. 一種遮光膜,其特徵在於:使根據請求項1或請求項2所述的遮光膜用感光性樹脂組成物硬化而形成。A light-shielding film formed by curing the photosensitive resin composition for a light-shielding film according to Claim 1 or Claim 2. 一種彩色濾光片,其特徵在於:包括根據請求項3所述的遮光膜。A color filter, characterized by comprising the light-shielding film according to claim 3. 一種顯示裝置,具有根據請求項4所述的彩色濾光片。A display device having the color filter according to Claim 4.
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