TW202248354A - Low dielectric loss resin composition, method for producing same, molded body for high frequency devices, and high frequency device - Google Patents

Low dielectric loss resin composition, method for producing same, molded body for high frequency devices, and high frequency device Download PDF

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TW202248354A
TW202248354A TW111114244A TW111114244A TW202248354A TW 202248354 A TW202248354 A TW 202248354A TW 111114244 A TW111114244 A TW 111114244A TW 111114244 A TW111114244 A TW 111114244A TW 202248354 A TW202248354 A TW 202248354A
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resin
low dielectric
dielectric loss
resin composition
inorganic filler
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大野貴志
藤原啓伍
佐藤友哉
山本雅士
二井啓一
西田哲郎
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日商斯特拉化工公司
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    • H05K1/0373Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement containing additives, e.g. fillers

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Abstract

To provide: a novel low dielectric loss resin composition which has a low coefficient of loss in a high frequency band, while being excellent in terms of low dielectric loss characteristics; a method for producing this low dielectric loss resin composition; a molded body for high frequency devices; and a high frequency device. A low dielectric loss resin composition according to the present invention contains at least a polymer resin and an inorganic filler, and is characterized in that the inorganic filler contains at least one substance that is selected from the group consisting of BiF3, ZrF4, HfF4, CeF3 and K2SiF6. This low dielectric loss resin composition is applicable to a molded body for high frequency devices that are used in a frequency band of 1 GHz or more, and to a high frequency device that is used in a frequency band of 1 GHz or more.

Description

低介電耗損樹脂組成物、其製造方法、高頻機器用成形體及高頻機器Low dielectric loss resin composition, manufacturing method thereof, molded body for high-frequency equipment, and high-frequency equipment

本發明係關於至少包含高分子樹脂與無機填充劑,可適用於電路基板等之電子零件或資訊通訊機器等之低介電耗損樹脂組成物、其製造方法、高頻機器用成形體及高頻機器。The present invention relates to a low dielectric loss resin composition containing at least a polymer resin and an inorganic filler, which can be applied to electronic parts such as circuit boards or information communication equipment, its production method, a molded body for high-frequency equipment, and a high-frequency machine.

近年,於印刷配線基板,可撓性配線基板及高頻基板等之電子零件,以及資訊通訊機器等之中,為實現高速且大容量之資料通訊,促使使用之電性信號之高頻化。In recent years, in electronic components such as printed wiring boards, flexible wiring boards, and high-frequency substrates, as well as information and communication equipment, in order to realize high-speed and large-capacity data communication, the high frequency of electrical signals used has been promoted.

尤其,高頻用途之電子零件等之中,伴隨頻率之增加,由於傳送路徑之傳送損失,電性信號之衰減變大,而有使得傳送可靠性下降之情形。為此,高頻機器或該零件等之,在頻率以外之傳送損失之要素之損失係數中,需求該值為小之材料。在此,損失係數係經由相對電容率(ε r)之平方根之值與損耗正切(tanδ)之值之積而所得者。 In particular, in electronic components for high-frequency applications, the attenuation of electrical signals increases due to the transmission loss of the transmission path as the frequency increases, and the transmission reliability may decrease. For this reason, among the loss coefficients of transmission loss factors other than frequency, materials with a small value are required for high-frequency equipment or these parts. Here, the loss coefficient is obtained by multiplying the value of the square root of the relative permittivity (ε r ) and the value of the loss tangent (tanδ).

例如,專利文獻1中,為達成多層印刷電路基板之低相對電容率及低損耗正切為目的,揭示有(A)具有羧基或酸無水物基,且,具有數均分子量為300~6,000之線狀烴構造之聚醯亞胺樹脂、(B)環氧樹脂、(C)沸點為100℃以上之有機溶劑、及球狀矽石為必須成分之熱硬化性樹脂組成物。根據此專利文獻1時,具有與導體之充分密合性,可形成高耐熱性、難燃性、低電容率、低損耗正切及低吸水率之層間絕緣樹脂層。For example, in Patent Document 1, for the purpose of achieving low relative permittivity and low loss tangent of multilayer printed circuit boards, it is disclosed that (A) has a carboxyl group or an anhydrous acid group, and has a number average molecular weight of 300~6,000. Polyimide resin with a hydrocarbon structure, (B) epoxy resin, (C) organic solvent with a boiling point of 100°C or higher, and a thermosetting resin composition with spherical silica as essential components. According to this patent document 1, it has sufficient adhesion to the conductor, and can form an interlayer insulating resin layer with high heat resistance, flame retardancy, low permittivity, low loss tangent, and low water absorption.

又,於專利文獻2中,揭示有順序導入烷基及與環氧樹脂之相溶性及反應性優異之胺基,使表面改性之無機填充劑。根據此專利文獻2時,經由使用表面改性之無機填充劑,製造環氧樹脂組成物,可賦予低電容率之特性。Also, Patent Document 2 discloses an inorganic filler in which an alkyl group and an amine group excellent in compatibility and reactivity with epoxy resins are sequentially introduced to modify the surface. According to this patent document 2, by using a surface-modified inorganic filler to produce an epoxy resin composition, the characteristic of low permittivity can be imparted.

又於專利文獻3中,揭示有具有金屬氧化物粒子材料、和表面處理前述金屬氧化物粒子材料之聚有機矽氧烷化合物之已表面處理金屬氧化物粒子材料。根據此專利文獻3時,經由將已表面處理金屬氧化物粒子材料含於樹脂材料中,可抑制所得樹脂組成物之黏度,且可抑制該樹脂組成物之相對電容率及損耗正切。Also, Patent Document 3 discloses a surface-treated metal oxide particle material having a metal oxide particle material and a polyorganosiloxane compound surface-treated on the metal oxide particle material. According to this patent document 3, by including the surface-treated metal oxide particle material in the resin material, the viscosity of the obtained resin composition can be suppressed, and the relative permittivity and loss tangent of the resin composition can be suppressed.

惟,揭示於專利文獻1及2之技術係控制樹脂組成物本身之低介電耗損特性者。又,揭示於專利文獻3之技術係經由於無機填充劑,施以表面改性,控制樹脂組成物之低介電耗損者。又,揭示於專利文獻1~3之技術係使用具有優異之低介電耗損特性,提升或改善樹脂組成物之無機填充劑之低介電耗損。 [先前技術文獻] [專利文獻] However, the techniques disclosed in Patent Documents 1 and 2 are for controlling the low dielectric loss characteristics of the resin composition itself. Also, the technique disclosed in Patent Document 3 is to control the low dielectric loss of the resin composition through surface modification with inorganic fillers. In addition, the technologies disclosed in Patent Documents 1 to 3 use the excellent low dielectric loss characteristics to enhance or improve the low dielectric loss of the inorganic filler of the resin composition. [Prior Art Literature] [Patent Document]

[專利文獻1] 日本特許第5564012號 [專利文獻2] 日本特開2015-67534號公報 [專利文獻3] 日本特開2020-66678號公報 [Patent Document 1] Japanese Patent No. 5564012 [Patent Document 2] Japanese Unexamined Patent Publication No. 2015-67534 [Patent Document 3] Japanese Patent Laid-Open No. 2020-66678

[發明欲解決之課題][Problem to be solved by the invention]

本發明係提供於高頻帶域,損失係數為小,低介電耗損特性優異之新穎低介電耗損樹脂組成物、其製造方法、高頻機器用成形體及高頻機器為目的。 [為解決課題之手段] The purpose of the present invention is to provide a novel low dielectric loss resin composition with a small loss coefficient and excellent low dielectric loss characteristics in the high frequency range, a manufacturing method thereof, a molded body for high frequency equipment, and a high frequency equipment. [As a means to solve the problem]

本發明係為解決前述課題,發現在於1GHz以上之高頻帯域具有優異低介電耗損特性之無機填充劑,經由使該無機填充劑含於低介電耗損樹脂組成物,可提升該低介電耗損樹脂組成物之低介電耗損特性。In order to solve the aforementioned problems, the present invention has discovered an inorganic filler having excellent low dielectric loss characteristics in the high frequency band above 1 GHz, and the low dielectric loss can be improved by including the inorganic filler in a low dielectric loss resin composition Low dielectric loss characteristics of lossy resin composition.

即,本發明之低介電耗損樹脂組成物係為解決前述之課題,至少含有高分子樹脂與無機填充劑之低介電耗損樹脂組成物中,前述無機填充劑係包含至少1種選自BiF 3、ZrF 4、HfF 4、CeF 3及K 2SiF 6所成群為特徵。 That is, the low dielectric loss resin composition of the present invention is to solve the aforementioned problems. In the low dielectric loss resin composition containing at least a polymer resin and an inorganic filler, the aforementioned inorganic filler contains at least one selected from BiF 3. It is characterized by groups of ZrF 4 , HfF 4 , CeF 3 and K 2 SiF 6 .

於前述之構成中,前述無機填充劑之含有量係對於前述低介電耗損樹脂組成物之全質量而言,為0.01質量%~85質量%為佳。In the aforementioned constitution, the content of the aforementioned inorganic filler is preferably 0.01% by mass to 85% by mass relative to the total mass of the aforementioned low dielectric loss resin composition.

於前述之構成中,前述高分子樹脂係包含至少1種以上之至少1種之熱可塑性樹脂及/或至少1種之熱硬化性樹脂為佳。In the aforementioned configuration, it is preferable that the polymeric resin includes at least one kind of at least one kind of thermoplastic resin and/or at least one kind of thermosetting resin.

前述構成中,前述高分子樹脂係選自至少1種烯烴系樹脂、苯乙烯系樹脂、聚乙烯樹脂、甲基丙烯基樹脂、熱可塑性彈性體樹脂、熱可塑性聚氨酯樹脂、聚丙烯腈樹脂、聚乳酸樹脂、聚醯胺聚甲醛樹脂、聚碳酸酯樹脂、聚苯醚樹脂、聚對苯二甲酸乙二醇酯、聚碸樹脂、聚醚碸樹脂、聚苯硫醚、聚醚醚酮、液晶聚合物樹脂、聚醯亞胺樹脂、氟樹脂、酚醛樹脂、胺樹脂、呋喃樹脂、不飽和聚酯樹脂、環氧樹脂、鄰苯二甲酸二烯丙酯樹脂、胍胺樹脂、酮樹脂、聚矽氧樹脂、熱硬化性樹脂、天然橡膠、合成橡膠、及此等變性體所成群為佳。In the aforementioned constitution, the polymeric resin is selected from at least one kind of olefin-based resin, styrene-based resin, polyethylene resin, methacrylic resin, thermoplastic elastomer resin, thermoplastic polyurethane resin, polyacrylonitrile resin, poly Lactic acid resin, polyamide acetal resin, polycarbonate resin, polyphenylene ether resin, polyethylene terephthalate, polyethylene resin, polyether resin, polyphenylene sulfide, polyether ether ketone, liquid crystal Polymer resin, polyimide resin, fluororesin, phenolic resin, amine resin, furan resin, unsaturated polyester resin, epoxy resin, diallyl phthalate resin, guanamine resin, ketone resin, poly Groups of silicone resin, thermosetting resin, natural rubber, synthetic rubber, and their modified forms are preferred.

本發明之低介電耗損樹脂組成物之製造方法係為解決前述之課題,至少含有高分子樹脂與無機填充劑之低介電耗損樹脂組成物之製造方法中,包含使金屬鹽、和含有氟離子及/或銨離子之溶液反應,製作金屬氟化物之淤漿之工程、和加熱乾燥前述金屬氟化物之淤漿,製作含有該金屬氟化物之前述無機填充劑的工程;前述金屬鹽係選自至少1種鉍、鋯、鉿或鈰之、氯化物、硫酸鹽、醋酸鹽、硝酸鹽及氫氧化物所成群,前述金屬氟化物係選自至少1種BiF 3、ZrF 4、HfF 4及CeF 3所成群為特徵。 The production method of the low dielectric loss resin composition of the present invention is to solve the aforementioned problems. In the production method of the low dielectric loss resin composition containing at least a polymer resin and an inorganic filler, a metal salt and a fluorine-containing Ion and/or ammonium ion solution reaction, the project of making the slurry of metal fluoride, and the project of heating and drying the slurry of the aforementioned metal fluoride, and making the aforementioned inorganic filler containing the metal fluoride; the aforementioned metal salt is selected Grouped from at least one kind of bismuth, zirconium, hafnium or cerium, chloride, sulfate, acetate, nitrate and hydroxide, the aforementioned metal fluoride is selected from at least one kind of BiF 3 , ZrF 4 , HfF 4 And CeF 3 groups are characteristic.

於前述之構成中,含有前述氟離子及銨離子之溶液係含有氟化物及銨化合物之溶液為佳。In the aforementioned configuration, the solution containing the aforementioned fluoride ions and ammonium ions is preferably a solution containing fluoride and ammonium compounds.

又,本發明之低介電耗損樹脂組成物之製造方法係為解決前述之課題,至少含有高分子樹脂與無機填充劑之低介電耗損樹脂組成物之製造方法中,包含使矽氟化物水溶液與氟化氫鉀反應,製作K 2SiF 6之淤漿之工程、和加熱乾燥前述K 2SiF 6之淤漿,製作含有該K 2SiF 6之前述無機填充劑的工程為特徵。 In addition, the method for producing a low dielectric loss resin composition of the present invention is to solve the above-mentioned problems. In the method for producing a low dielectric loss resin composition containing at least a polymer resin and an inorganic filler, an aqueous solution of silicon fluoride is included. The process of preparing the slurry of K 2 SiF 6 by reacting with potassium hydrogen fluoride, and the process of heating and drying the slurry of K 2 SiF 6 to produce the aforementioned inorganic filler containing the K 2 SiF 6 are characterized.

本發明之高頻機器用成形體係為解決前述之課題,係在1GHz以上之頻率帶域使用之高頻機器用成形體中,由前述低介電耗損樹脂組成物之成形體所成為特徵。In order to solve the aforementioned problems, the molding system for high-frequency equipment of the present invention is characterized by a molded article of the aforementioned low dielectric loss resin composition among molded articles for high-frequency equipment used in a frequency band above 1 GHz.

本發明之高頻機器係為解決前述之課題,係在1GHz以上之頻率帶域使用之高頻機器中,包含前述低介電耗損樹脂組成物為特徵。In order to solve the aforementioned problems, the high-frequency equipment of the present invention is characterized in that the above-mentioned low dielectric loss resin composition is included in the high-frequency equipment used in the frequency band above 1 GHz.

又,本發明之高頻機器係為解決前述之課題,係在1GHz以上之頻率帶域使用之高頻機器中,具備前述低介電耗損樹脂組成物之成形體為特徵。 [發明效果] In addition, the high-frequency equipment of the present invention is to solve the above-mentioned problems, and is characterized in that the molded body of the above-mentioned low dielectric loss resin composition is provided in the high-frequency equipment used in the frequency band above 1 GHz. [Invention effect]

根據本發明時,做為無機填充劑,經由使用至少1種選自BiF 3、ZrF 4、HfF 4、CeF 3及K 2SiF 6所成群,可減低含有此無機填充劑與高分子樹脂之低介電耗損樹脂組成物之高頻帶域之損失係數,而提升低介電耗損特性。又,將本發明之低介電耗損樹脂組成物使用於高頻機器用成形體或高頻機器,即使在1GHz以上之高頻帶域下使用,亦可抑制傳送損失所造成之電性信號之衰減,而可進行高速・高頻傳送。 According to the present invention, as the inorganic filler, by using at least one group selected from BiF 3 , ZrF 4 , HfF 4 , CeF 3 and K 2 SiF 6 , the gap between the inorganic filler and the polymer resin can be reduced. The loss coefficient of the high frequency band of the low dielectric loss resin composition improves the low dielectric loss characteristics. In addition, when the low dielectric loss resin composition of the present invention is used in molded articles for high-frequency equipment or high-frequency equipment, even if it is used in a high-frequency band above 1 GHz, it can suppress the attenuation of electrical signals caused by transmission loss , and can perform high-speed and high-frequency transmission.

(低介電耗損樹脂組成物)(Low dielectric loss resin composition)

首先,對於關於本發明之實施形態之低介電耗損樹脂組成物,說明如下。 本實施之形態之低介電耗損樹脂組成物係至少含有高分子樹脂與無機填充劑。本實施之形態之低介電耗損樹脂組成物係可為糊狀之組成物。 First, the low dielectric loss resin composition according to the embodiment of the present invention will be described below. The low dielectric loss resin composition of this embodiment contains at least a polymer resin and an inorganic filler. The low dielectric loss resin composition of this embodiment can be a paste-like composition.

<無機填充劑> 無機填充劑係選自至少1種BiF 3、ZrF 4、HfF 4、CeF 3及K 2SiF 6所成群之固體粒子。 <Inorganic filler> The inorganic filler is a group of solid particles selected from at least one of BiF 3 , ZrF 4 , HfF 4 , CeF 3 and K 2 SiF 6 .

無機填充劑之相對電容率ε r(-)之上限值係在1GHz以上之頻率及25℃之溫度下,6以下為佳,更佳為4以下,尤以3以下為佳。無機填充劑之相對電容率ε r為6以下時,可達成損失係數之減低,達成低介電耗損之抑制。 The upper limit of the relative permittivity ε r (-) of the inorganic filler is preferably 6 or less, more preferably 4 or less, and especially preferably 3 or less at a frequency above 1 GHz and a temperature of 25°C. When the relative permittivity ε r of the inorganic filler is 6 or less, the reduction of the loss coefficient can be achieved, and the suppression of low dielectric loss can be achieved.

又,無機填充劑之損耗正切tanδ(-)之上限值係在1GHz以上之頻率及25℃之溫度下,0.005以下為佳,更佳為0.002以下,尤以0.001以下為佳。無機填充劑之損耗正切tanδ為0.005以下時,可達成損失係數之減低,達成低介電耗損之抑制。Also, the upper limit of the loss tangent tanδ(-) of the inorganic filler is preferably 0.005 or less, more preferably 0.002 or less, and especially preferably 0.001 or less at a frequency of 1 GHz or higher and a temperature of 25°C. When the loss tangent tanδ of the inorganic filler is less than 0.005, the reduction of the loss coefficient can be achieved, and the suppression of low dielectric loss can be achieved.

無機填充劑之損失係數之上限值係不足6為佳,更佳為4以下,尤以3以下為佳。損失係數不足6時,可減低低介電耗損樹脂組成物之損失係數,提升低介電耗損特性。The upper limit of the loss coefficient of the inorganic filler is preferably less than 6, more preferably 4 or less, especially preferably 3 or less. When the loss coefficient is less than 6, the loss coefficient of the low dielectric loss resin composition can be reduced, and the low dielectric loss characteristic can be improved.

然而,使用於介電特性及介電損失之數值化之相對電容率ε r及損耗正切tanδ之各數值係根據測定無機填充劑所成粉體、或無機填充劑分散於溶媒中之分散液等之淤漿(以下稱「無機填充劑之粉體等」。),從該測定值換算而得之值者。測定方法係測定對象物之形態,即對應粉體或淤漿之任一形態加以適切選擇。具體而言,例如可經由後述之實施例所述方法,各別加以測定。又,淤漿之形態時,做為分散無機填充劑之溶媒,不損及相對電容率、損耗正切及損失係數之各物性值,且可維持做為淤漿之流動性的有機溶媒為佳。做為如此有機溶媒,例如可列舉n-十六烷等。 However, the values of relative permittivity ε r and loss tangent tanδ used in the numericalization of dielectric properties and dielectric loss are based on the measurement of powders made of inorganic fillers, or dispersions of inorganic fillers dispersed in solvents, etc. The slurry (hereinafter referred to as "inorganic filler powder, etc.") is the value converted from the measured value. The measurement method refers to the shape of the object to be measured, that is, to choose appropriately for any shape of powder or slurry. Specifically, for example, they can be measured individually by the method described in the Examples described later. Also, in the form of slurry, it is preferable to use an organic solvent as a solvent for dispersing inorganic fillers, which does not damage the physical properties of relative permittivity, loss tangent, and loss coefficient, and can maintain the fluidity of the slurry. As such an organic solvent, n-hexadecane etc. are mentioned, for example.

損失係數係可使用無機填充劑之粉體等之相對電容率ε r及損耗正切tanδ之測定值,根據以下之式,算出損失係數之值。 (損失係數)=(ε r) 1/2×tanδ×10 3(式中、ε r[-]係表示於測定使用之無機填充劑之粉體等之相對電容率,tanδ[-]係表示此等之損耗正切。) The loss coefficient can be calculated by using the measured values of relative permittivity ε r and loss tangent tan δ of inorganic filler powder, etc., according to the following formula. (Loss coefficient)=(ε r ) 1/2 ×tanδ×10 3 (where, ε r [-] represents the relative permittivity of the powder of the inorganic filler used in the measurement, and tanδ[-] represents The loss tangent of these.)

相對電容率(ε r)係擴示於測定使用之無機填充劑之粉體等之分極程度之參數,相對電容率愈言,電性信號之傳播延遲則愈大。因此,為提高信號之傳播速度,相對電容率較低者為佳。損耗正切(tanδ)係顯示傳播在於測定所使用之無機填充劑之粉體等之內部之信號,被變換成熱而失去之量的參數,損耗正切愈低,信號之損失愈少,可提升信號傳達率。 The relative permittivity (ε r ) is a parameter used to measure the degree of polarization of the inorganic filler powder used. The higher the relative permittivity, the greater the propagation delay of electrical signals. Therefore, in order to increase the propagation speed of the signal, it is better to have a lower relative permittivity. Loss tangent (tanδ) is a parameter that shows the amount of signal that propagates inside the powder of the inorganic filler used in the measurement, and is converted into heat and lost. The lower the loss tangent, the less the loss of the signal, and the signal can be improved. Conveyance rate.

無機填充劑之平均粒徑D50(體積基準累計粒度分布之累計粒度為50%之粒子徑)係未特別加以限定,例如在含有低介電耗損樹脂組成物之成形品之大小或厚度等之形狀、及低介電耗損樹脂組成物之製作中,可對應含有無機填充劑之材料之流動性之調整等之理由而適切設加以設定。通常,無機填充劑之平均粒徑D50之上限值係50μm以下,較佳為10μm以下,更佳為1μm以下。其一方面,無機填充劑之平均粒徑D50之下限值係0.001μm以上,較佳為0.01μm以上,更佳為0.1μm以上。無機填充劑之粒徑D50過大時,難以使成形品之表面成為平坦面。其結果,例如形成層積物時,經由成形品表面之凹凸,有損及層積物之電性特性之情形。另一方面,無機填充劑之粒徑D50過小之時,於高分子樹脂混合無機填充劑時,難以均勻混合,混合物之黏度會上昇至難以使低介電耗損樹脂組成物之成形。The average particle size D50 of the inorganic filler (the particle size at which the cumulative particle size of the volume-based cumulative particle size distribution is 50%) is not particularly limited, for example, in the shape of the size or thickness of a molded product containing a low dielectric loss resin composition , and in the production of low dielectric loss resin composition, appropriate settings can be set in response to reasons such as adjustment of fluidity of materials containing inorganic fillers. Usually, the upper limit of the average particle diameter D50 of the inorganic filler is 50 μm or less, preferably 10 μm or less, more preferably 1 μm or less. On the one hand, the lower limit of the average particle diameter D50 of the inorganic filler is 0.001 μm or more, preferably 0.01 μm or more, more preferably 0.1 μm or more. When the particle size D50 of the inorganic filler is too large, it is difficult to make the surface of the molded article flat. As a result, for example, when a laminate is formed, the electrical properties of the laminate may be impaired due to irregularities on the surface of the molded product. On the other hand, if the particle size D50 of the inorganic filler is too small, it will be difficult to mix the inorganic filler with the polymer resin evenly, and the viscosity of the mixture will increase so that it is difficult to form the low dielectric loss resin composition.

又,無機填充劑之平均粒徑D50係本實施之形態之低介電耗損樹脂組成物為薄膜狀或薄片狀之成形品之時,對於成形品之厚度而言,設定成1/5以下為佳,更佳為設定成1/10以下。例如,低介電耗損樹脂組成物之成形品為厚度10μm程度之薄膜狀或薄片狀之時,無機填充劑之平均粒徑D50係2μm以下為佳,更佳為1μm以下。In addition, when the average particle diameter D50 of the inorganic filler is a low dielectric loss resin composition in the form of the present embodiment is a film-shaped or sheet-shaped molded product, it is set to be less than 1/5 of the thickness of the molded product. Good, more preferably set to 1/10 or less. For example, when the molded product of the low dielectric loss resin composition is in the form of a film or sheet with a thickness of about 10 μm, the average particle diameter D50 of the inorganic filler is preferably 2 μm or less, more preferably 1 μm or less.

然而,無機填充劑之平均粒徑D50係例如使用Microtrac MT3300EXII(商品名、日機裝(股份有限公司)製)經由雷射繞射・散亂法加以測定所得之值。However, the average particle diameter D50 of the inorganic filler is, for example, a value measured by the laser diffraction/scattering method using Microtrac MT3300EXII (trade name, manufactured by Nikkiso Co., Ltd.).

無機填充劑之形狀未特別加以限制,例如考量將該無機填充劑混合於高分子樹脂時之混合物之流動性加以適切選擇。又,可對應含有低介電耗損樹脂組成物之成形品之機械性強度、熱傳導性及氣體擴散性等之控制等、目的,適切加以選擇。The shape of the inorganic filler is not particularly limited, and is appropriately selected in consideration of, for example, the fluidity of the mixture when the inorganic filler is mixed with a polymer resin. In addition, it can be appropriately selected according to the purpose of controlling the mechanical strength, thermal conductivity, and gas diffusibility of molded articles containing the low dielectric loss resin composition.

做為無機填充劑之形狀,具體而言,例如列舉球狀、略球狀,橢圓狀、棒狀、針狀、紡錘狀、板狀等之任意形狀。又,此等之形狀之無機填充劑中,可為在於內部設置空間之中空狀者。更且,本實施之形態之低介電耗損樹脂組成物中,可含有同種形狀之無機填充劑,亦可含2種以上之不同形狀之無機填充劑。Specific examples of the shape of the inorganic filler include arbitrary shapes such as a spherical shape, a substantially spherical shape, an elliptical shape, a rod shape, a needle shape, a spindle shape, and a plate shape. Moreover, the inorganic filler of these shapes may be hollow in the internal installation space. Furthermore, the low dielectric loss resin composition of this embodiment may contain inorganic fillers of the same shape, or two or more inorganic fillers of different shapes.

無機填充劑係對於高分子樹脂之浸潤性之提升,對於高分子樹脂之分散性之提升,含有低介電耗損樹脂組成物之成形品之成型時及成型後之加工性之改善,與高分子樹脂之密合性,低介電耗損樹脂組成物之機械性強度之提升,無機填充劑所成吸濕或氧化之抑制或防止,無機填充劑之處理時之帶電之防止,無機填充劑之凝聚之防止,或對應於用途之著色或折射率之調整等為目的,施以表面處理(表面改性)亦可。Inorganic fillers improve the wettability of polymer resins, improve the dispersibility of polymer resins, improve the processability of molded products containing low dielectric loss resin compositions during and after molding, and combine with polymer resins. Adhesion of resin, improvement of mechanical strength of low dielectric loss resin composition, inhibition or prevention of moisture absorption or oxidation by inorganic filler, prevention of electrification during treatment of inorganic filler, aggregation of inorganic filler Surface treatment (surface modification) may be performed for the purpose of preventing, or for the purpose of coloring or adjusting the refractive index according to the application.

做為可使用於無機填充劑之表面改性之表面改性劑,具體而言,對應於目的,列舉硬脂酸、油酸及亞油酸等之脂肪酸;陰離子系、陽離子系及非離子系等之界面活性劑;磷酸系、矽烷系及羧酸系等之偶合劑;馬來酸改性聚丙烯等之高分子系表面改性劑等。此等之表面改性劑中,從對於高分子樹脂之浸潤性及對於高分子樹脂之無機填充劑之分散性之提升之觀點視之,使用磷酸系、矽烷系及羧酸系等之偶合劑為佳。As surface modifiers that can be used for surface modification of inorganic fillers, specifically, fatty acids such as stearic acid, oleic acid, and linoleic acid; anionic, cationic, and nonionic, depending on the purpose Surfactants such as surfactants; coupling agents of phosphoric acid, silane and carboxylic acid systems; polymer surface modifiers such as maleic acid-modified polypropylene, etc. Among these surface modifiers, phosphoric acid-based, silane-based, and carboxylic acid-based coupling agents are used from the viewpoint of improving the wettability of polymer resins and the dispersibility of inorganic fillers in polymer resins. better.

關於無機填充劑之含有量,該下限值係對於低介電耗損樹脂組成物之全質量而言,1質量%以上為佳,較佳為10質量%以上,尤以20質量%以上為佳。另一方面,無機填充劑之含有量之上限值係對於低介電耗損樹脂組成物之全質量而言,85質量%以下為佳,較佳為82質量%以下,尤以79質量%以下為佳。無機填充劑之含有量之下限值為1質量%以上時,低介電耗損樹脂組成物之損失係數為小,可達成低介電耗損特性之提升。另一方面,無機填充劑之含有量之上限值為85質量%以下時,可防止脆性等之物理性強度之,可進行硬度提升,熱膨脹係數(CTE:Coefficient of Thermal Expansion)之下降及耐候性之提升。Regarding the content of the inorganic filler, the lower limit is preferably at least 1% by mass, more preferably at least 10% by mass, especially preferably at least 20% by mass, with respect to the total mass of the low dielectric loss resin composition . On the other hand, the upper limit of the content of the inorganic filler is preferably not more than 85% by mass, more preferably not more than 82% by mass, especially not more than 79% by mass, with respect to the total mass of the low dielectric loss resin composition better. When the lower limit of the content of the inorganic filler is more than 1% by mass, the loss coefficient of the low dielectric loss resin composition is small, and the improvement of the low dielectric loss property can be achieved. On the other hand, when the upper limit of the content of the inorganic filler is 85% by mass or less, the physical strength such as brittleness can be prevented, the hardness can be improved, the coefficient of thermal expansion (CTE: Coefficient of Thermal Expansion) can be reduced, and weather resistance can be achieved. Enhancement of sex.

又,本實施之形態之無機填充劑中,例如進行400℃以上之加熱處理後之質量減少部分,對於加熱處理前之無機填充劑之質量而言,可使用2質量%以下,較佳為1.5質量%以下,更佳為1質量%以下者。經由使用前述加熱處理後之質量減少部分為2質量%以下之無機填充劑,經由形成高分子樹脂之單體之聚合時之發熱、或熱處理時之不純物之脫氣及高分子樹脂之主成分之熱分解等,可防止低介電耗損樹脂組成物之低介電耗損特性及機械性強度等之下降。於無機填充劑中,做為將前述加熱處理後之質量減少部分減低至2質量%以下之方法,則未特別加以限制,例如可列舉將含於無機填充劑之加熱分解溫度高之材料或加熱時不產生相變化之材料、於無機填充劑之合成時成為質量減少原因之不純物,預先施以熱處理或藥液處理加以除去乃至於減少者。然而,前述之無機填充劑之含有量係表示400℃以上之加熱處理前之值。In addition, in the inorganic filler of this embodiment, for example, the mass reduction after heat treatment at 400° C. or higher can be used in an amount of 2 mass % or less, preferably 1.5 mass %, with respect to the mass of the inorganic filler before heat treatment. mass % or less, more preferably 1 mass % or less. Through the use of inorganic fillers whose mass reduction after heat treatment is 2% by mass or less, heat generation during polymerization of monomers forming polymer resins, degassing of impurities during heat treatment, and degassing of main components of polymer resins Thermal decomposition, etc., can prevent the low dielectric loss properties and mechanical strength of the low dielectric loss resin composition from decreasing. Among the inorganic fillers, there are no particular limitations on the method of reducing the mass loss after the heat treatment to 2% by mass or less. For example, materials with high thermal decomposition temperature or heating Materials that do not undergo a phase change from time to time, and impurities that cause mass loss during the synthesis of inorganic fillers, which are removed or reduced by heat treatment or chemical solution treatment in advance. However, the above-mentioned content of the inorganic filler shows the value before the heat treatment at 400° C. or higher.

<無機填充劑之製造方法> 接著,對於無機填充劑之製造方法,說明如下。 首先,對於無機填充劑為BiF 3、ZrF 4、HfF 4、或CeF 3之時之製造方法加以說明。 <The manufacturing method of the inorganic filler> Next, the manufacturing method of the inorganic filler is demonstrated as follows. First, the production method when the inorganic filler is BiF 3 , ZrF 4 , HfF 4 , or CeF 3 will be described.

無機填充劑為BiF 3等之時之製造方法係包含使金屬鹽、和含氟離子及/或銨離子之溶液反應,製作金屬氟化物之淤漿的工程,和固液分離金屬氟化物之淤漿,更加以洗淨的工程,和從洗淨後之金屬氟化物之糊劑,除去水分及溶媒,製作選自至少1種BiF 3、ZrF 4、HfF 4、及CeF 3所成群之無機填充劑之乾燥固體的工程。固液分離金屬氟化物之淤漿,更進行洗淨的工程係對應適切之需要,可加以省略。 When the inorganic filler is BiF3 , etc., the production method includes the process of making a metal fluoride slurry by reacting a metal salt with a solution containing fluoride ions and/or ammonium ions, and the process of separating the metal fluoride from solid and liquid. The slurry is further cleaned, and the water and solvent are removed from the cleaned metal fluoride paste, and an inorganic compound selected from at least one kind of BiF 3 , ZrF 4 , HfF 4 , and CeF 3 is produced. The dry solid engineering of fillers. The solid-liquid separation of the metal fluoride slurry and the further cleaning process can be omitted as appropriate.

製作金屬氟化物之淤漿的工程之金屬鹽、和氟離子及/或銨離子之反應係例如可將固體之金屬鹽,添加於含氟化物及/或銨化合物之溶液(以下稱「氟化物等溶液」。)加以進行。又,混合金屬鹽溶液、和氟化物等溶液加以進行亦可。然而,金屬鹽溶液或氟化物等溶液係在使用於此等反應之前,預先經由過,除去異物為佳。The reaction system between metal salts and fluoride ions and/or ammonium ions for making metal fluoride slurries can be, for example, adding solid metal salts to solutions containing fluoride and/or ammonium compounds (hereinafter referred to as "fluoride Wait for the solution".) to proceed. Also, it may be carried out by mixing a metal salt solution and a solution such as a fluoride compound. However, it is preferable to pass through a solution such as a metal salt solution or a fluoride compound before being used in these reactions to remove foreign substances.

做為金屬鹽未特別加以限定,例如列舉氯化鉍、硫酸鉍、醋酸鉍、硝酸鉍、氫氧化鉍、氯化鋯、硫酸鋯、醋酸鋯、硝酸鋯、氫氧化鋯、氯化鉿、硫酸鉿、醋酸鉿、硝酸鉿、氫氧化鉿、氯化鈰、硫酸鈰、醋酸鈰、硝酸鈰、氫氧化鈰等。此等之金屬鹽係可單獨使用1種,可混合2種以上使用。The metal salt is not particularly limited, and examples include bismuth chloride, bismuth sulfate, bismuth acetate, bismuth nitrate, bismuth hydroxide, zirconium chloride, zirconium sulfate, zirconium acetate, zirconium nitrate, zirconium hydroxide, hafnium chloride, sulfuric acid Hafnium, hafnium acetate, hafnium nitrate, hafnium hydroxide, cerium chloride, cerium sulfate, cerium acetate, cerium nitrate, cerium hydroxide, etc. These metal salts may be used alone or in combination of two or more.

做為金屬鹽溶液之溶媒未特別加以限定,可列舉水、甲醇、乙醇、丙醇、異丙醇、乙二醇、丙二醇、及甘油等。此等之溶媒係可單獨使用1種,可混合2種以上使用。The solvent of the metal salt solution is not particularly limited, and examples thereof include water, methanol, ethanol, propanol, isopropanol, ethylene glycol, propylene glycol, and glycerin. These solvents may be used alone or in combination of two or more.

前述金屬鹽溶液係將金屬鹽溶解於溶媒而獲得。將金屬鹽溶解於溶媒時之溶媒溫度係對應對於金屬鹽之溶媒而言之溶解度等,適切加以設定。例如金屬鹽在室溫下,對於溶媒而言,顯示充分之溶解性時,在室溫下將金屬鹽溶解於溶媒亦可。又,對於金屬鹽之溶媒而言之溶解性,在室溫下為小之時,加溫溶媒之後,再將金屬鹽亦可。由此,可達成金屬鹽溶解於溶媒所需之時間之縮短。The aforementioned metal salt solution is obtained by dissolving metal salt in a solvent. The temperature of the medium at the time of dissolving the metal salt in the solvent is appropriately set in accordance with the solubility of the metal salt in the solvent and the like. For example, when the metal salt exhibits sufficient solubility in the solvent at room temperature, the metal salt may be dissolved in the solvent at room temperature. Also, when the solubility of the solvent of the metal salt is small at room temperature, the metal salt may be added after heating the solvent. Thereby, shortening of the time required for the metal salt to dissolve in the solvent can be achieved.

氟化物等溶液之氟化物及銨化合物則未特別加以限定,例如列舉氟化銨、酸性氟化銨、氟化鈉、氟化鉀、烷基銨氟化物、氯化銨、硫酸銨、硝酸銨、及氟化氫等。此等之氟化物及銨化合物係可單獨使用1種,可混合2種以上使用。Fluoride and ammonium compounds in solutions such as fluoride are not particularly limited, for example, ammonium fluoride, acidic ammonium fluoride, sodium fluoride, potassium fluoride, alkyl ammonium fluoride, ammonium chloride, ammonium sulfate, ammonium nitrate , And hydrogen fluoride etc. These fluorides and ammonium compounds may be used alone or in combination of two or more.

做為氟化物等溶液之溶媒未特別加以限定,可列舉水、醇等之有機溶媒,及此等之混合溶媒等。The solvent of the solution of fluoride and the like is not particularly limited, and examples thereof include organic solvents such as water and alcohol, and mixed solvents thereof.

氟化物等溶液係可經由將氟化物及/或銨化合物溶解於溶媒而加以製作。Solutions such as fluoride can be prepared by dissolving fluoride and/or ammonium compounds in a solvent.

固體之金屬鹽或金屬鹽溶液、和氟化物等溶液之反應溫度雖未特別加以限定,通常,下限值為20℃以上,上限值為60℃以下,較佳為下限值為20℃以上,上限值為50℃以下。經由使反應溫度成為20℃以上,可抑制固體之金屬鹽或金屬鹽溶液,和氟化物等溶液之反應之進行過度下降。另一方面,經由使反應溫度成為60℃以下,可防止從固體之金屬鹽或金屬鹽溶液,以及氟化物等溶液,揮發一部分之成分,改變此等之溶液等之濃度。Although the reaction temperature of solid metal salt or metal salt solution, and fluoride and other solutions is not particularly limited, usually, the lower limit is above 20°C, and the upper limit is below 60°C, preferably the lower limit is 20°C Above, the upper limit is 50°C or less. By setting the reaction temperature at 20° C. or higher, it is possible to suppress an excessive decline in the reaction between a solid metal salt or a metal salt solution, and a solution such as a fluoride. On the other hand, by keeping the reaction temperature below 60°C, it is possible to prevent the volatilization of some components from the solid metal salt or metal salt solution, and fluoride and other solutions, and change the concentration of these solutions.

將固體之金屬鹽添加於氟化物等溶液,或混合金屬鹽和氟離子等之溶液時,金屬鹽與氟離子及/或銨離子之反應則快速進行,生成析出氟化鋯酸銨等之金屬氟化物,而得金屬氟化物之淤漿。然而。為析出更多金屬氟化物,經由加熱或減壓金屬鹽溶液或氟化物等溶液之方法加以濃縮,或添加弱溶媒亦可。在此,做為弱溶媒未特別加以限定,可列舉甲醇、乙醇、丙醇、丙醇等之醇溶液及醇溶液與水之混合溶液等。When a solid metal salt is added to a solution such as fluoride, or a solution of a mixed metal salt and fluoride ions, the reaction between the metal salt and fluoride ions and/or ammonium ions proceeds rapidly, resulting in the precipitation of ammonium fluoride zirconate and other metals Fluoride, resulting in a slurry of metal fluoride. However. In order to precipitate more metal fluorides, it can be concentrated by heating or reducing the pressure of metal salt solution or fluoride solution, or adding a weak solvent. Here, the weak solvent is not particularly limited, and examples thereof include alcohol solutions such as methanol, ethanol, propanol, and propanol, and mixed solutions of alcohol solutions and water.

然而,對於本工程所得金屬氟化物之淤漿,施以乾燥處理亦可。此時,做為乾燥方法,未特別加以限定,例如可列舉自然乾燥、熱風乾燥等。又,對於乾燥溫度或乾燥小時等之乾燥條件亦未特別加以限定,可適切進行設定。However, for the slurry of metal fluoride obtained in this project, it is also possible to apply drying treatment. In this case, although it does not specifically limit as a drying method, For example, natural drying, hot-air drying, etc. are mentioned. Moreover, drying conditions, such as a drying temperature and drying hours, are not specifically limited, either, and can be set suitably.

做為金屬氟化物之淤漿之固液分離之方法,未特別加以限定,例如可列舉離心脫水、加壓過濾等。惟,金屬氟化物之粒徑為小而微細,吸引過濾、離心脫水及加壓過濾難以進行固液分離時,可使用離心分離機。又,蒸發亁涸金屬氟化物之淤漿本身亦可。The method for solid-liquid separation of the metal fluoride slurry is not particularly limited, and examples thereof include centrifugal dehydration and pressure filtration. However, the particle size of the metal fluoride is small and fine, and when the solid-liquid separation is difficult for suction filtration, centrifugal dehydration, and pressure filtration, a centrifuge can be used. Also, the slurry itself of the metal fluoride may be dried up by evaporation.

更且,做為經由固液分離所得金屬氟化物之糊劑之洗淨方法,未特別加以限定,例如可列舉水洗等。由此,可從金屬氟化物之糊劑,除去未反應之氟化物及其他之陰離子。然而,對於洗淨溫度或洗淨時間係未特別加以限定,可依需要適切進行設定。Furthermore, the method of cleaning the metal fluoride paste obtained by solid-liquid separation is not particularly limited, and examples thereof include washing with water. Thereby, unreacted fluoride and other anions can be removed from the metal fluoride paste. However, the washing temperature and washing time are not particularly limited, and can be appropriately set as needed.

做為從洗淨後之金屬氟化物之糊劑,除去水分及溶媒(例如含水醇成分或銨成分)之方法,例如可列舉加熱處理。由此,可得金屬氟化物之乾燥粉末。做為加熱處理方法,未特別加以限定,可列舉於乾燥台置入金屬氟化物之糊劑,在乾燥機內進行乾燥之方法等。As a method of removing moisture and a solvent (such as a water-containing alcohol component or an ammonium component) from the washed metal fluoride paste, for example, heating treatment is mentioned. Thus, a dry powder of the metal fluoride can be obtained. The heat treatment method is not particularly limited, and examples include a method in which a metal fluoride paste is placed in a drying table and dried in a dryer.

加熱處理時之加熱溫度係100℃~600℃之範圍內為佳,400℃~600℃之範圍內為更佳。經由將加熱溫度成為100℃以上,可充分除去或減低含於金屬氟化物之糊劑中之水分及銨成分。另一方面,經由使加熱溫度成為600℃以下,可防止金屬氟化物彼此之熱熔著或熱分解。The heating temperature during heat treatment is preferably in the range of 100°C to 600°C, more preferably in the range of 400°C to 600°C. By setting the heating temperature to 100° C. or higher, moisture and ammonium components contained in the metal fluoride paste can be sufficiently removed or reduced. On the other hand, by setting the heating temperature at 600° C. or lower, thermal fusion or thermal decomposition of metal fluorides can be prevented.

加熱處理時之加熱時間係1小時~48小時之範圍內為佳,3小時~8小時之範圍內為更佳。經由使加熱時間成為1小時以上,可充分除去或減低含於金屬氟化物之糊劑中之水分及銨成分。另一方面,經由使加熱時間成為48小時以下,可防止金屬氟化物彼此之熱熔著或熱分解。The heating time during the heat treatment is preferably in the range of 1 hour to 48 hours, more preferably in the range of 3 hours to 8 hours. By setting the heating time to 1 hour or more, the moisture and ammonium components contained in the metal fluoride paste can be sufficiently removed or reduced. On the other hand, by setting the heating time to 48 hours or less, thermal fusion or thermal decomposition of metal fluorides can be prevented.

又,加熱處理係可在大氣下進行、或在非活性氣體環境下進行。做為非活性氣體,未特別加以限定,例如可列舉氮氣、氬氣等。又,從促進金屬氟化物之糊劑之乾燥之觀點視之,例如在減壓環境下,進行加熱處理亦可。對於減壓之程度雖未特別加以限定,通常使用無油乾式真空幫浦或油迴轉真空泵,在10 -5Pa~10 -2Pa之範圍下進行為佳。 In addition, the heat treatment may be performed in the atmosphere or in an inert gas atmosphere. It does not specifically limit as an inert gas, For example, nitrogen gas, argon gas, etc. are mentioned. Also, from the viewpoint of accelerating the drying of the metal fluoride paste, for example, heat treatment may be performed under a reduced pressure environment. Although the degree of decompression is not particularly limited, it is better to use an oil-free dry vacuum pump or an oil rotary vacuum pump in the range of 10 -5 Pa to 10 -2 Pa.

接著,對於無機填充劑為K 2SiF 6之時之製造方法加以說明。 於無機填充劑為K 2SiF 6之時之製造方法中,將製作前述金屬氟化物之淤漿工程之金屬鹽,置換為矽氟化物加以實施。更詳細而言,包含使矽氟化物、和氟化氫鉀反應,製作K 2SiF 6之淤漿的工程,和固液分離K 2SiF 6之淤漿,更加以洗淨的工程,和從洗淨後之K 2SiF 6之糊劑,除去水分及溶媒,製作K 2SiF 6所成之無機填充劑之乾燥固體的工程。 Next, the production method when the inorganic filler is K 2 SiF 6 will be described. In the production method when the inorganic filler is K 2 SiF 6 , the metal salt in the slurry process for making the aforementioned metal fluoride is replaced by silicon fluoride. In more detail, it includes the process of making a slurry of K 2 SiF 6 by reacting silicon fluoride and potassium hydrogen fluoride, and the process of separating the slurry of K 2 SiF 6 from solid and liquid for further cleaning, and from cleaning After the K 2 SiF 6 paste, the water and solvent are removed, and the dry solid of the inorganic filler made of K 2 SiF 6 is made.

製作K 2SiF 6之淤漿的工程之矽氟化物、和氟化氫鉀之反應係例如可將固體之氟化氫鉀,添加於矽氟化物之水溶液而進行。又,混合矽氟化物之溶液、和溶解氟化氫鉀之溶液加以進行亦可。然而,矽氟化物之水溶液或溶解氟化氫鉀之溶液係在使用於此等反應之前,預先經由過濾,除去異物為佳。 The reaction of silicon fluoride and potassium hydrogen fluoride in the process of making K 2 SiF 6 slurry can be carried out by adding solid potassium hydrogen fluoride to an aqueous solution of silicon fluoride, for example. Also, it may be performed by mixing a solution of silicon fluoride and a solution in which potassium hydrogen fluoride is dissolved. However, it is better to filter the aqueous solution of silicon fluoride or the solution of dissolving potassium bifluoride before using in these reactions to remove foreign matter.

做為矽氟化物係未特別加以限定,例如列舉矽氟化氫(H 2SiF 6)、矽氟化銨((NH 4) 2SiF 6)、六氟矽酸(H 2SiF 6)等。 The silicon fluoride system is not particularly limited, and examples thereof include hydrogen silicon fluoride (H 2 SiF 6 ), ammonium silicon fluoride ((NH 4 ) 2 SiF 6 ), and hexafluorosilicic acid (H 2 SiF 6 ).

固液分離K 2SiF 6之淤漿,加以洗淨的工程,及從洗淨後之K 2SiF 6之糊劑,除去水分及溶媒,製作K 2SiF 6之乾燥固體的工程係與製造前述BiF 3等所成無機填充劑時相同。因此,此詳細說明則省略。 The process of solid-liquid separation of K 2 SiF 6 slurry and cleaning, and the process of removing water and solvent from the washed K 2 SiF 6 paste to make K 2 SiF 6 dry solid and the above-mentioned The same applies to inorganic fillers such as BiF 3 . Therefore, this detailed description is omitted.

經由以上,可製造本實施之形態之無機填充劑。以上之說明中,以將BiF 3或K 2SiF 6等之無機填充劑,經由濕式法加以製造之情形為例做了說明。但是,本發明之無機填充劑係可經由乾式法加以製造。即,例如做為無機填充劑,製造ZrF 4之時,將做為原料之(NH 4) 2ZrF 6,在非活性氣體之環境下加熱處理。由此,可熱分解(NH 4) 2ZrF 6生成ZrF 4。是為如此乾式法時,相較濕式法,可製造減低不純物之含有之無機填充劑。做為非活性氣體,未特別加以限定,例如可列舉氮氣或氬氣等。 Through the above, the inorganic filler of the aspect of this embodiment can be manufactured. In the above description, the case where an inorganic filler such as BiF 3 or K 2 SiF 6 is produced by a wet method has been described as an example. However, the inorganic filler of the present invention can be produced by a dry method. That is, for example, when producing ZrF 4 as an inorganic filler, (NH 4 ) 2 ZrF 6 as a raw material is heat-treated in an inert gas atmosphere. Thus, (NH 4 ) 2 ZrF 6 can be thermally decomposed to generate ZrF 4 . In this dry method, compared with the wet method, it is possible to produce inorganic fillers with reduced impurities. It does not specifically limit as an inert gas, For example, nitrogen gas, argon gas, etc. are mentioned.

加熱處理時之加熱溫度係400℃~500℃之範圍內為佳。經由使加熱溫度成為400℃以上,可充分熱分解(NH 4) 2ZrF 6。另一方面,經由使加熱溫度成為500℃以下,可防止ZrF 4彼此之熱熔著或熱分解。 The heating temperature during heat treatment is preferably in the range of 400°C to 500°C. By setting the heating temperature at 400°C or higher, (NH 4 ) 2 ZrF 6 can be sufficiently thermally decomposed. On the other hand, by setting the heating temperature at 500° C. or lower, thermal fusion or thermal decomposition of ZrF 4 can be prevented.

加熱處理時之加熱時間係2小時~6小時之範圍內為佳。經由使加熱時間成為2小時以上,可充分熱分解(NH 4) 2ZrF 6。另一方面,經由使加熱時間成為6小時以下,可防止ZrF 4彼此之熱熔著或熱分解。 The heating time during heat treatment is preferably in the range of 2 hours to 6 hours. By setting the heating time to 2 hours or more, (NH 4 ) 2 ZrF 6 can be sufficiently thermally decomposed. On the other hand, by setting the heating time to 6 hours or less, thermal fusion or thermal decomposition of ZrF 4 can be prevented.

然而,調整所得無機填充劑之平均粒徑之時,例如可將無機填充劑以公知之粉碎方法等加以粉碎進行。粉碎方法則不特別加以限制,例如可列舉使用玻珠研磨機、噴射碾磨機等之粉碎裝置,經由乾式法或濕式法加以進行。粉碎方法係考量無機填充劑之粒徑之程度或純度等,適切加以選擇即可。However, when adjusting the average particle diameter of the obtained inorganic filler, it can grind|pulverize an inorganic filler by a well-known pulverization method etc., for example. The pulverization method is not particularly limited, and examples thereof include a dry method or a wet method using a pulverization device such as a bead mill or a jet mill. The pulverization method is to consider the degree of particle size or purity of the inorganic filler, and it can be selected appropriately.

又,於無機填充劑之製造過程中,可控制粒徑及形狀。例如,製造氟化鋯(ZrF 4)之時,製作氟化鋯之淤漿之工程中,經由適當變更鋯鹽、和氟離子及/或銨離子之反應溫度,可調整無機填充劑成長之環境及該程度,控制無機填充劑之粒徑及形狀。又,於製作氟化鋯之乾燥固體之工程後,經由進行熱處理等之後處理工程,亦可進行無機填充劑之粒徑及形狀之控制。進行熱處理時之加熱溫度及加熱時間係未特別加以限定,可適切進行設定。然而,控制BiF 3、HfF 4、CeF 3及K 2SiF 6之粒徑以及形狀之時,亦可與ZrF 4同樣地進行。 In addition, in the production process of the inorganic filler, the particle size and shape can be controlled. For example, when producing zirconium fluoride (ZrF 4 ), in the process of making zirconium fluoride slurry, the environment for the growth of inorganic fillers can be adjusted by appropriately changing the reaction temperature of zirconium salt, fluoride ion and/or ammonium ion And to this extent, the particle size and shape of the inorganic filler are controlled. In addition, after the process of producing the dry solid of zirconium fluoride, the particle size and shape of the inorganic filler can also be controlled by performing post-processing processes such as heat treatment. The heating temperature and heating time during the heat treatment are not particularly limited, and can be appropriately set. However, the particle size and shape of BiF 3 , HfF 4 , CeF 3 , and K 2 SiF 6 can be controlled in the same manner as ZrF 4 .

<高分子樹脂> 高分子樹脂係包含至少1種之熱可塑性樹脂及/或至少1種之熱硬化性樹脂為佳。 <Polymer resin> The polymer resin preferably contains at least one kind of thermoplastic resin and/or at least one kind of thermosetting resin.

高分子樹脂係更具體而言,例如可列舉聚乙烯樹脂及聚丙烯樹脂等之烯烴系樹脂;聚苯乙烯樹脂及丙烯腈丁二烯苯乙烯樹脂(ABS樹脂)等之苯乙烯系樹脂;聚乙酸乙烯酯樹脂、聚氯乙烯樹脂、聚乙烯醇樹脂及聚偏二氯乙烯樹脂等之聚乙烯樹脂;甲基丙烯酸樹脂;熱可塑性彈性體樹脂;熱可塑性聚氨酯樹脂;聚丙烯腈樹脂;聚乳酸樹脂;聚醯胺聚甲醛樹脂;聚碳酸酯樹脂;聚苯醚樹脂;聚對苯二甲酸乙二醇酯樹脂;聚碸樹脂;聚醚碸樹脂;聚苯硫醚樹脂;聚醚醚酮樹脂;液晶聚合物樹脂;聚醯亞胺樹脂;聚四氟乙烯(PTFE)、聚四氟乙烯與全氟烷氧基乙烯基之共聚物(PFA)、聚氯三氟乙烯樹脂(PCTFE)、四氟乙烯-六氟丙烯共聚物(FEP)及四氟乙烯-乙烯共聚物(ETFE)等之氟樹脂;酚醛樹脂;尿素樹脂及三聚氰胺樹脂等之胺樹脂;呋喃樹脂;不飽和聚酯樹脂;環氧樹脂;鄰苯二甲酸二烯丙酯樹脂;胍胺樹脂;酮樹脂;聚矽氧樹脂;熱硬化性彈性體樹脂;天然橡膠;氯丁二烯橡膠、苯乙烯丁二烯橡膠、異戊二烯橡膠、丁基橡膠及胺甲酸乙酯橡膠等之合成橡膠;以及此等之改性體等。此等之高分子樹脂係對應於低介電耗損樹脂組成物之加工性及用途等,可單獨使用1種,或混合2種以上使用。例如,使用在於聚苯醚樹脂混合環氧樹脂之高分子樹脂時,經由增大流動性,可提升加工性。然而,高分子樹脂之聚合度係未特別加以限定,可對應於低介電耗損樹脂組成物之用途等,適切加以選擇。More specifically, polymer resins include olefin-based resins such as polyethylene resins and polypropylene resins; styrene-based resins such as polystyrene resins and acrylonitrile butadiene styrene resins (ABS resins); Polyethylene resins such as vinyl acetate resin, polyvinyl chloride resin, polyvinyl alcohol resin and polyvinylidene chloride resin; methacrylic resin; thermoplastic elastomer resin; thermoplastic polyurethane resin; polyacrylonitrile resin; polylactic acid Resin; polyamide acetal resin; polycarbonate resin; polyphenylene ether resin; polyethylene terephthalate resin; polyethylene resin; polyether resin; polyphenylene sulfide resin; polyether ether ketone resin ; liquid crystal polymer resin; polyimide resin; polytetrafluoroethylene (PTFE), polytetrafluoroethylene and perfluoroalkoxy vinyl copolymer (PFA), polychlorotrifluoroethylene resin (PCTFE), four Fluorine resins such as fluoroethylene-hexafluoropropylene copolymer (FEP) and tetrafluoroethylene-ethylene copolymer (ETFE); phenolic resins; amine resins such as urea resins and melamine resins; furan resins; unsaturated polyester resins; Oxygen resin; diallyl phthalate resin; guanamine resin; ketone resin; silicone resin; thermosetting elastomer resin; natural rubber; chloroprene rubber, styrene butadiene rubber, isoprene Synthetic rubbers such as diene rubber, butyl rubber and urethane rubber; and their modified products, etc. These polymer resins can be used alone or in combination of two or more depending on the processability and application of the low dielectric loss resin composition. For example, when using a polymer resin mixed with polyphenylene ether resin and epoxy resin, the processability can be improved by increasing the fluidity. However, the degree of polymerization of the polymer resin is not particularly limited, and may be appropriately selected according to the application of the low dielectric loss resin composition.

高分子樹脂之含有量係未特別加以限定,可依需要適切進行設定。The content of the polymer resin is not particularly limited, and can be appropriately set as needed.

<其他之事項> 於本實施之形態之低介電耗損樹脂組成物中,在不違反本發明之目的之範圍下,可含有不純物。做為不純物,例如可列舉具有Bi、Zr、Hf、Ce、Si及F以外之元素之金屬不純物、金屬氧化物及金屬氟化物等。不純物之含有量係對於低介電耗損樹脂組成物之全質量而言,100ppm以下為佳,更佳為10ppm以下。 <Other matters> In the low dielectric loss resin composition of this embodiment, impurities may be contained within the range that does not violate the object of the present invention. Examples of impurities include metal impurities having elements other than Bi, Zr, Hf, Ce, Si, and F, metal oxides, and metal fluorides. The content of impurities is preferably 100 ppm or less, more preferably 10 ppm or less, with respect to the total mass of the low dielectric loss resin composition.

又,於本實施之形態之低介電耗損樹脂組成物中,在不違反本發明之目的之範圍下,可含有其他之添加劑。做為其他之添加劑,未特別加以限定,可列舉硬化劑、潤滑劑、結晶成核劑、紫外線防止劑、著色劑、難燃劑、安定劑、可塑劑及強化劑等。In addition, the low dielectric loss resin composition of this embodiment may contain other additives within the range that does not violate the object of the present invention. The other additives are not particularly limited, and examples thereof include hardeners, lubricants, crystal nucleating agents, UV protection agents, colorants, flame retardants, stabilizers, plasticizers, and strengthening agents.

其他之添加劑之含有量係未特別加以限定,可對應用途或目的等,適切進行設定。The content of other additives is not particularly limited, and can be appropriately set according to the application or purpose.

又,本實施之形態之低介電耗損樹脂組成物中,可含有前述無機填充劑以外之其他之無機填充劑。做為其他之無機填充劑,未特別加以限定,例如可列舉矽石、氧化鋁、硫酸鋇、滑石、黏土、雲母粉、氫氧化鋯、氫氧化鎂、碳酸鈣、碳酸鎂、氧化鎂、氮化硼、硼酸鋯、鈦酸鋇、鈦酸鈣、鈦酸鎂、鈦酸鉍、氧化鈦、鋯酸鋇、鋯酸鈣、及氟化合物等。又做為其他之無機填充劑,可將紙、玻璃不織布、合成纖維、纖維素絕緣材、碳纖維、及奈米碳管等之纖維狀填充劑,不限定在低介電耗損樹脂組成物之形狀等加以使用。In addition, the low dielectric loss resin composition of this embodiment may contain other inorganic fillers than the aforementioned inorganic fillers. Other inorganic fillers are not particularly limited, and examples include silica, alumina, barium sulfate, talc, clay, mica powder, zirconium hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, magnesium oxide, nitrogen Boron oxide, zirconium borate, barium titanate, calcium titanate, magnesium titanate, bismuth titanate, titanium oxide, barium zirconate, calcium zirconate, and fluorine compounds. As other inorganic fillers, fibrous fillers such as paper, glass non-woven fabrics, synthetic fibers, cellulose insulation materials, carbon fibers, and carbon nanotubes are not limited to the shape of low dielectric loss resin compositions Wait for it to be used.

其他之無機填充劑之含有量係未特別加以限定,可對應用途或目的等,適切進行設定。The content of other inorganic fillers is not particularly limited, and can be appropriately set according to the application or purpose.

然而,本實施之形態之低介電耗損樹脂組成物係含有其他之添加劑或其他之無機填充劑之情形之外,亦包含僅含無機填充劑與高分子樹脂之情形。However, the low dielectric loss resin composition of this embodiment includes not only the case where other additives or other inorganic fillers are included, but also the case where only the inorganic filler and polymer resin are included.

本實施之形態之低介電耗損樹脂組成物係可為絕緣膜用樹脂組成物(阻焊劑)、半導體封閉樹脂組成物、黏著劑、塗料、電源用及通信用等之配線之被覆材等加以使用。The low dielectric loss resin composition of this embodiment can be a resin composition for an insulating film (solder resist), a semiconductor sealing resin composition, an adhesive, a paint, a coating material for wiring such as power supply and communication, etc. use.

<低介電耗損樹脂組成物之製造方法> 接著,對於本實施之形態之低介電耗損樹脂組成物之製造方法,說明如下。 本實施之形態之低介電耗損樹脂組成物係可於高分子樹脂中,添加無機填充劑、及任意之其他之添加劑,經由均勻混合或混練加以製造。又,亦可在高分子樹脂、或形成高分子樹脂之單體溶解或分散於有機溶媒等之溶液(例如清漆或分散液等。),經由添加無機填充劑、及任意之其他之添加劑等加以分散而製造。 <Manufacturing method of low dielectric loss resin composition> Next, the method of manufacturing the low dielectric loss resin composition according to this embodiment will be described below. The low dielectric loss resin composition of this embodiment can be produced by adding an inorganic filler and any other additives to a polymer resin through uniform mixing or kneading. In addition, it is also possible to dissolve or disperse polymer resins or monomers forming polymer resins in organic solvents (such as varnishes or dispersions, etc.), by adding inorganic fillers and any other additives. Distributed and manufactured.

(高頻機器用成形體及其製造方法) 本實施之形態之高頻機器用成形體(以下稱「成形體」。)係由包含低介電耗損樹脂組成物之成形體所成。 (Molded body for high-frequency equipment and its manufacturing method) The molded article for high-frequency equipment (hereinafter referred to as "the molded article") according to this embodiment is made of a molded article containing a low dielectric loss resin composition.

成形體係例如可經由公知之混練機及押出機加以製造。做為混練機,例如可使用密閉式之加壓捏和機或開煉機。使用此等混練機,製造薄片狀之低介電耗損樹脂組成物材料後,可使用該低介電耗損樹脂組成物材料,製造成形體。又,經由押出機,製造顆粒狀之低介電耗損樹脂組成物材料後,可使用射出形成機,製造成形體。使用押出機等之成形機,進行高分子樹脂與無機填充劑及其他添加劑等之混合時,可削減工程數,可達成生產效率之提升。又,無機填充劑係由於易於吸附水分之故,於與高分子樹脂之混合前,可進行適切乾燥處理等。The molding system can be produced, for example, through known kneading machines and extruders. As the kneading machine, for example, a closed pressurized kneader or an open kneader can be used. After using these kneading machines to produce a sheet-like low dielectric loss resin composition material, a molded body can be produced using the low dielectric loss resin composition material. In addition, after the pelletized low dielectric loss resin composition material is produced by an extruder, a molded body can be produced by using an injection molding machine. When using molding machines such as extruders to mix polymer resins with inorganic fillers and other additives, the number of processes can be reduced and production efficiency can be improved. In addition, since the inorganic filler is easy to absorb moisture, it can be properly dried before being mixed with the polymer resin.

又,製造薄片狀之成形體時,可經由公知之方法製造。例如,在充滿含高分子樹脂之溶液(樹脂清漆)之清漆槽,添加無機填充劑、及任意之其他之添加劑加以均勻分散,將分散液在特定之溫度條件下加熱。將經由加熱製造之硬化物,延伸成薄片狀,由此製造薄片狀之成形體。Moreover, when manufacturing a sheet-shaped molded body, it can manufacture by a well-known method. For example, in a varnish tank filled with a polymer resin-containing solution (resin varnish), add an inorganic filler and any other additives to uniformly disperse them, and heat the dispersion at a specific temperature. The cured product produced by heating is stretched into a thin sheet to produce a thin sheet-shaped molded body.

又,於含高分子樹脂、無機填充劑及任意之其他之添加劑等之分散液之液槽,在浸漬玻璃爿維、接合薄片等之薄片狀基材之狀態下加以通過,於該薄片狀基材,含浸分散液。之後,可在含浸分散液之薄片,施以乾燥處理,製造含浸低介電耗損樹脂組成物之含浸薄片。然而,經由令薄片狀狀基材通過分散液之液槽之次數為複數次,可製造層積複數之低介電耗損樹脂組成物層之層積物。Also, pass through a liquid tank containing a dispersion liquid of a polymer resin, an inorganic filler, and any other additives, etc., while impregnating a sheet-shaped base material such as glass valves, bonding sheets, etc., on the sheet-shaped base material, impregnated with dispersion liquid. Afterwards, the sheet impregnated with the dispersion liquid can be dried to produce an impregnated sheet impregnated with the low dielectric loss resin composition. However, a laminate in which a plurality of low dielectric loss resin composition layers are laminated can be produced by passing the sheet-like base material through the liquid tank of the dispersion liquid multiple times.

(高頻機器) 關於本實施之形態之高頻機器係包含低介電耗損樹脂組成物,或具備低介電耗損樹脂組成物之成形體。 (high frequency machine) The high-frequency equipment related to the form of this embodiment includes a low dielectric loss resin composition, or a molded body having a low dielectric loss resin composition.

本實施之形態之高頻機器係處理電子信號而進行之資訊處理,及使用於資訊通訊者。尤其,本實施之形態之高頻機器係使用在使用於通訊時之電波信號之頻率帶域為1GHz以上,更佳為10GHz以上之高頻帶域。又,本實施之形態之高頻機器中,亦包含在該高頻帶域所使用之高頻電子零件。The high-frequency equipment in this embodiment is used for information processing and information communication by processing electronic signals. In particular, the high-frequency device of this embodiment is used in a frequency band of radio signals used for communication of 1 GHz or higher, more preferably 10 GHz or higher. In addition, the high-frequency equipment of this embodiment also includes high-frequency electronic components used in the high-frequency band.

做為高頻機器,例如可列舉情報處理及情報通訊機器之框體、電路基板、印刷配線板、傳送線路、電容器及電感等之高頻電子零件、或設置高頻機器之房間之屋頂材及壁材等。又,具備做為經由低介電耗損樹脂組成物成膜之絕緣膜或半導體封閉樹脂、被覆材,經由低介電耗損樹脂組成物被覆之配線等之高頻機器,亦包含於本實施之形態之高頻機器。 [實施例] Examples of high-frequency equipment include housings, circuit boards, printed wiring boards, transmission lines, capacitors, and inductors for information processing and information communication equipment, and roofing materials for rooms where high-frequency equipment is installed. Wall materials, etc. In addition, high-frequency equipment equipped with an insulating film or semiconductor sealing resin formed with a low dielectric loss resin composition, a covering material, wiring coated with a low dielectric loss resin composition, etc., are also included in the form of this embodiment. The high frequency machine. [Example]

以下,將此發明之適切實施例,以例示加以詳細說明。材料惟,記載於以下之實施例之材料或配合量等如未有特別之限定性之記載,本發明之範圍則非限定於此等。Hereinafter, suitable embodiments of this invention will be described in detail by way of example. Materials However, the scope of the present invention is not limited to the materials and compounding amounts described in the following examples unless there is any particular limitation.

(BiF 3之製造例) 各別加以計測,將50g之Bi(OH) 3(高純度化學研究所(股份有限公司)製)、和72g之純水、和66g之HNO 3水溶液(濃度:69質量%、富士軟片和光純藥業(股份有限公司)製),置入PFA製反應容器,經由水浴將液溫成為60℃,生成硝酸鉍。接著,將液溫保持在60℃加以攪拌,將41g之HF水溶液(濃度:50質量%,STELLA CHEMIFA(股份有限公司)製)花費約30分鐘,少量地連續地添加,得反應液。之後,將反應液之溫度保持60℃之下,將反應液熟成1小時。 (Manufacturing example of BiF 3 ) Measured separately, 50 g of Bi(OH) 3 (manufactured by High Purity Chemical Research Institute Co., Ltd.), 72 g of pure water, and 66 g of HNO 3 aqueous solution (concentration: 69 % by mass, manufactured by Fujifilm Wako Pure Pharmaceutical Co., Ltd.), was placed in a reaction container made of PFA, and the temperature of the liquid was raised to 60° C. in a water bath to generate bismuth nitrate. Next, the liquid temperature was kept at 60° C. and stirred, and 41 g of HF aqueous solution (concentration: 50% by mass, manufactured by STELLA CHEMIFA Co., Ltd.) was continuously added in small amounts over about 30 minutes to obtain a reaction liquid. Afterwards, the temperature of the reaction solution was kept below 60° C., and the reaction solution was matured for 1 hour.

接著,將反應容器從水浴中取出,靜置30分鐘,沉澱生成物。丟棄上澄液後,添加甲醇(200g、富士軟片和光純藥業(股份有限公司)製),攪拌5分鐘。接著,將攪拌後之反應液以濾膜(孔徑5μm:Millipore製)吸引過濾,做為過濾器殘留,得粗BiF 3粒子(51.1g)。將所得白色粉末填充於氧化鋁坩堝,使用電氣爐,在N 2氣體環境下,熱處理白色粉末。熱處理溫度係600℃,熱處理時間係2小時。熱處理後,在N 2氣體環境下,回到室溫,從氧化鋁坩堝,取出49.0g之白色粉末。將白色粉末以XRD(X-ray Diffraction,商品名:RINT-Ultima III,Rigaku公司製)分析之結果,白色粉末為BiF 3。又,BiF 3之產率為95%。 Next, the reaction container was taken out from the water bath, and was left still for 30 minutes to precipitate a product. After discarding the supernatant, methanol (200 g, manufactured by Fujifilm Wako Pure Pharmaceutical Co., Ltd.) was added, followed by stirring for 5 minutes. Next, the stirred reaction solution was suction-filtered with a filter membrane (pore size: 5 μm: manufactured by Millipore), and left as a filter to obtain rough BiF 3 particles (51.1 g). The obtained white powder was filled in an alumina crucible, and the white powder was heat-treated in an N2 gas environment using an electric furnace. The heat treatment temperature was 600° C., and the heat treatment time was 2 hours. After the heat treatment, return to room temperature under N 2 gas atmosphere, and take out 49.0 g of white powder from the alumina crucible. As a result of analyzing the white powder by XRD (X-ray Diffraction, trade name: RINT-Ultima III, manufactured by Rigaku Corporation), the white powder is BiF 3 . Also, the yield of BiF 3 was 95%.

(ZrF 4之製造例) 將1250g之(NH 4) 2ZrF 6(STELLA CHEMIFA(股份有限公司)製)填充於氧化鋁坩堝,使用電氣爐,在N 2氣體環境下,施以加熱處理。熱處理溫度係400℃,熱處理時間係2小時。加熱處理後,在N 2氣體環境下,回到室溫,從氧化鋁坩堝,取出860g之白色粉末。將白色粉末以XRD(X-ray Diffraction,商品名:RINT-Ultima III,Rigaku公司製)分析之結果,白色粉末為ZrF 4。又,ZrF 4之產率為99%。 (Production example of ZrF 4 ) An alumina crucible was filled with 1250 g of (NH 4 ) 2 ZrF 6 (manufactured by STELLA CHEMIFA Co., Ltd.), and heat-treated in an N 2 gas atmosphere using an electric furnace. The heat treatment temperature was 400° C., and the heat treatment time was 2 hours. After the heat treatment, return to room temperature under N 2 gas atmosphere, and take out 860 g of white powder from the alumina crucible. As a result of analyzing the white powder by XRD (X-ray Diffraction, trade name: RINT-Ultima III, manufactured by Rigaku Corporation), the white powder is ZrF 4 . Also, the yield of ZrF 4 was 99%.

(HfF 4製造例) 各別加以計測,將10g之HfO 2(富士軟片和光純藥業(股份有限公司)製)、和40g之純水,置入PFA製反應容器,經由水浴將液溫成為20℃後,將液溫保持於20℃加以攪拌,將5.1g之HF水溶液(濃度:75質量%,STELLA CHEMIFA(股份有限公司)製)花費約30分鐘,少量地連續地添加,得反應液。之後,將反應液之溫度保持30℃之下,將反應液熟成2小時。 (Manufacturing example of HfF 4 ) Measured separately, 10g of HfO 2 (manufactured by Fujifilm Wako Pure Pharmaceutical Co., Ltd.) and 40g of pure water were placed in a reaction vessel made of PFA, and the temperature of the liquid was adjusted to After 20°C, keep the liquid temperature at 20°C and stir, and add 5.1 g of HF aqueous solution (concentration: 75% by mass, manufactured by STELLA CHEMIFA Co., Ltd.) continuously for about 30 minutes in small amounts to obtain a reaction liquid . Thereafter, the temperature of the reaction solution was kept below 30° C., and the reaction solution was matured for 2 hours.

接著,將反應容器從水浴取出,載置2小時,當反應液成為室溫時,添加異丙醇(150g,富士軟片和光純藥業(股份有限公司)製),充分攪拌。接著,將攪拌後之反應液以濾膜(孔徑5μm:Millipore製)吸引過濾,做為過濾器殘留,得粗HfF 4粒子(11g)。將所得白色粉末填充於氧化鋁坩堝,使用電氣爐,在N 2氣體環境下,熱處理白色粉末。熱處理溫度係400℃,熱處理時間係2小時。熱處理後,在N 2氣體環境下,回到室溫,從氧化鋁坩堝,取出11g之白色粉末。將白色粉末以XRD(X-ray Diffraction,商品名:RINT-Ultima III,Rigaku公司製)分析之結果,白色粉末為HfF 4。又,HfF 4之產率為91%。 Next, the reaction container was taken out from the water bath and placed on a stand for 2 hours. When the reaction solution reached room temperature, isopropanol (150 g, manufactured by Fujifilm Wako Pure Chemical Co., Ltd.) was added and stirred well. Next, the stirred reaction solution was suction-filtered with a filter membrane (pore size: 5 μm: manufactured by Millipore), and left as a filter to obtain coarse HfF 4 particles (11 g). The obtained white powder was filled in an alumina crucible, and the white powder was heat-treated in an N2 gas environment using an electric furnace. The heat treatment temperature was 400° C., and the heat treatment time was 2 hours. After the heat treatment, return to room temperature under N 2 gas atmosphere, and take out 11 g of white powder from the alumina crucible. As a result of analyzing the white powder by XRD (X-ray Diffraction, trade name: RINT-Ultima III, manufactured by Rigaku Corporation), the white powder was HfF 4 . Also, the yield of HfF 4 was 91%.

(CeF 3之製造例) 各別加以計測,將10g之CeCl 3・7H 2O(高純度化學研究所)、和115g之純水、和7.4g之HNO 3水溶液(濃度:69質量%、富士軟片和光純藥業(股份有限公司)製),置入PFA製反應容器,經由水浴將液溫成為60℃,生成硝酸鈰。更且,將液溫保持在60℃加以攪拌,將3.3g之HF水溶液(濃度:50質量%,STELLA CHEMIFA(股份有限公司)製)花費約30分鐘,少量地連續地添加,得反應液。之後,將反應液之溫度保持60℃之下,將反應液熟成1小時。 (Manufacturing example of CeF 3 ) Measured separately, 10g of CeCl 3・7H 2 O (High Purity Chemical Laboratory), 115g of pure water, and 7.4g of HNO 3 aqueous solution (concentration: 69% by mass, Fuji Wako Pure Pharmaceutical Co., Ltd.) was placed in a reaction vessel made of PFA, and the temperature of the liquid was brought to 60° C. in a water bath to generate cerium nitrate. Furthermore, while stirring while keeping the liquid temperature at 60° C., 3.3 g of HF aqueous solution (concentration: 50% by mass, manufactured by STELLA CHEMIFA Co., Ltd.) was continuously added in small amounts over about 30 minutes to obtain a reaction liquid. Afterwards, the temperature of the reaction solution was kept below 60° C., and the reaction solution was matured for 1 hour.

接著,將反應容器從水浴中取出,靜置30分鐘,沉澱生成物。丟棄上澄液後,添加甲醇(100g、富士軟片和光純藥業(股份有限公司)製),攪拌5分鐘。接著,將攪拌後之反應液以濾膜(孔徑5μm:Millipore製)吸引過濾,做為過濾器殘留,得粗CeF 3粒子(4.9g)。將所得白色粉末填充於氧化鋁坩堝,使用電氣爐,在N 2氣體環境下,熱處理白色粉末。熱處理溫度係600℃,熱處理時間係2小時。熱處理後,在N 2氣體環境下,回到室溫,從氧化鋁坩堝,取出4.8g之白色粉末。將白色粉末以XRD(X-ray Diffraction,商品名:RINT-Ultima III,Rigaku公司製)分析之結果,白色粉末為CeF 3。又,CeF 3之產率為91%。 Next, the reaction container was taken out from the water bath, and was left still for 30 minutes to precipitate a product. After discarding the supernatant, methanol (100 g, manufactured by Fujifilm Wako Pure Pharmaceutical Co., Ltd.) was added, followed by stirring for 5 minutes. Next, the stirred reaction solution was suction-filtered with a filter membrane (pore size: 5 μm: manufactured by Millipore) and left on the filter to obtain coarse CeF 3 particles (4.9 g). The obtained white powder was filled in an alumina crucible, and the white powder was heat-treated in an N2 gas environment using an electric furnace. The heat treatment temperature was 600° C., and the heat treatment time was 2 hours. After the heat treatment, return to room temperature under N 2 gas atmosphere, and take out 4.8 g of white powder from the alumina crucible. As a result of analyzing the white powder by XRD (X-ray Diffraction, trade name: RINT-Ultima III, manufactured by Rigaku Corporation), the white powder is CeF 3 . Also, the yield of CeF 3 was 91%.

(K 2SiF 6之製造例) 各別加以計測,將400g之H 2SiF 6水溶液(濃度:40質量%),置入PFA製反應容器,經由水浴將液溫成為40℃後,將液溫保持於40℃加以攪拌,將208g之KF・HF(STELLA CHEMIFA(股份有限公司)製)花費約30分鐘,少量地連續地添加,得反應液。之後,將反應液之溫度保持40℃之下,將反應液熟成2小時。 (Production example of K 2 SiF 6 ) Each was measured, and 400 g of H 2 SiF 6 aqueous solution (concentration: 40% by mass) was placed in a reaction container made of PFA, and the liquid temperature was adjusted to 40° C. in a water bath. Stirring was maintained at 40°C, and 208 g of KF・HF (manufactured by STELLA CHEMIFA Co., Ltd.) was continuously added in small amounts over about 30 minutes to obtain a reaction liquid. Thereafter, the temperature of the reaction solution was kept below 40° C., and the reaction solution was matured for 2 hours.

接著,將反應容器從水浴取出,靜置2小時,當反應液成為室溫時,添加異丙醇(600g,富士軟片和光純藥業(股份有限公司)製),充分攪拌。接著,將攪拌後之反應液以濾膜(孔徑5μm:Millipore製)吸引過濾,做為過濾器殘留,得粗K 2SiF 6粒子(238g)。將所得白色粉末(K 2SiF 6結晶)填充於氧化鋁坩堝,使用電氣爐,在N 2氣體環境下,熱處理白色粉末。熱處理溫度係400℃,熱處理時間係4小時。然而,熱處理後之K 2SiF 6之質量減少部分((熱處理前之K 2SiF 6之質量)-(熱處理後之K 2SiF 6之質量))/(熱處理前之K 2SiF 6之質量)×100(質量%))係0.1質量%以下。 Next, the reaction container was taken out from the water bath and left to stand for 2 hours. When the reaction liquid reached room temperature, isopropanol (600 g, manufactured by Fujifilm Wako Pure Pharmaceutical Co., Ltd.) was added and stirred well. Next, the stirred reaction solution was suction-filtered with a filter membrane (pore size: 5 μm: manufactured by Millipore), and left as a filter to obtain coarse K 2 SiF 6 particles (238 g). The obtained white powder (K 2 SiF 6 crystal) was filled in an alumina crucible, and the white powder was heat-treated in an electric furnace under N 2 gas atmosphere. The heat treatment temperature was 400° C., and the heat treatment time was 4 hours. However, the mass reduction of K 2 SiF 6 after heat treatment is ((mass of K 2 SiF 6 before heat treatment)-(mass of K 2 SiF 6 after heat treatment))/(mass of K 2 SiF 6 before heat treatment) ×100 (mass %)) is 0.1 mass % or less.

熱處理後,在N 2氣體環境下,回到室溫,從氧化鋁坩堝,取出237g之白色粉末。將白色粉末以XRD (X-ray Diffraction,商品名:RINT-Ultima III,Rigaku公司製)分析之結果,白色粉末為K 2SiF 6。又,K 2SiF 6之產率為97%。 After the heat treatment, return to room temperature under N 2 gas atmosphere, and take out 237 g of white powder from the alumina crucible. As a result of analyzing the white powder by XRD (X-ray Diffraction, trade name: RINT-Ultima III, manufactured by Rigaku Corporation), the white powder is K 2 SiF 6 . Also, the yield of K 2 SiF 6 was 97%.

(實施例1) 於氟樹脂製管中,填充預先製作之前述之無機填充劑ZrF 4(D50:5.0μm)之粉體,在溫度19℃,相對濕度50%之環境氣氛下,經由10GHz頻率領域之空腔共振器法,各別測定相對電容率及損耗正切。測定中,使用電路網路分析儀(Keysight Technologies(股份有限公司)製,商品名:E8361A)。之後,對於填充無機填充劑之氟樹脂管之相對電容率及損耗正切之測定值而言,使用無機填充劑之容積密度及真密度、和導於填充容積之無機填充劑之填充量,進行空隙部分之補正,算出無機填充劑之相對電容率與損耗正切。更且,補正無機填充劑之相對電容率及損耗正切之測定值,使用補正後之值,將無機填充劑之介電損失,根據以下之式,加以算出。將其結果示於表1。然而,表1中之無機填充劑之相對電容率及損耗正切之值係表示補正測定值之值。 (損失係數)=(ε r1) 1/2×tanδ 1×10 3(式中、ε r1[-]係表示無機填充劑之粉體等之相對電容率,tanδ 1[-]係表示無機填充劑之損耗正切。) (Example 1) In a tube made of fluororesin, the powder of the aforementioned inorganic filler ZrF 4 (D50: 5.0 μm) was filled in advance, and passed through a frequency of 10 GHz at a temperature of 19°C and an ambient atmosphere of a relative humidity of 50%. The cavity resonator method in the field measures the relative permittivity and loss tangent respectively. In the measurement, a circuit network analyzer (manufactured by Keysight Technologies Co., Ltd., trade name: E8361A) was used. After that, for the relative permittivity and loss tangent measurements of the fluororesin tubes filled with inorganic fillers, the bulk density and true density of the inorganic fillers, and the filling amount of the inorganic fillers that lead to the filled volume, were used for porosity measurement. For partial correction, calculate the relative permittivity and loss tangent of the inorganic filler. Furthermore, the measured values of relative permittivity and loss tangent of the inorganic filler are corrected, and the dielectric loss of the inorganic filler is calculated according to the following formula using the corrected value. The results are shown in Table 1. However, the values of the relative permittivity and loss tangent of the inorganic filler in Table 1 represent corrected measured values. (Loss coefficient)=(ε r1 ) 1/2 ×tanδ 1 ×10 3 (where, ε r1 [-] represents the relative permittivity of inorganic filler powder, etc., and tanδ 1 [-] represents the inorganic filler agent loss tangent.)

(實施例2) 於實施例2中,如表1所示,將無機填充劑、變更為預先製作之前述之K 2SiF 6(D50:1.9μm)。除此之外,與實施例1相同加以測定。 (Example 2) In Example 2, as shown in Table 1, the inorganic filler was changed to the previously prepared K 2 SiF 6 (D50: 1.9 μm). Other than that, it measured similarly to Example 1.

(比較例1) 比較例1中,如表1所示,將無機填充劑、變更為SiO 2(D50:2.0μm)。除此之外,與實施例1相同加以測定。 (Comparative Example 1) In Comparative Example 1, as shown in Table 1, the inorganic filler was changed to SiO 2 (D50: 2.0 μm). Other than that, it measured similarly to Example 1.

Figure 02_image001
Figure 02_image001

(結果1) 如表1所示,在實施例1及2使用之無機填充劑係相較在比較例1使用之無機填充劑,在相同頻率測定之損失係數為小,確認到低介電耗損特性優異。 (result 1) As shown in Table 1, the inorganic fillers used in Examples 1 and 2 have smaller loss coefficients measured at the same frequency than the inorganic fillers used in Comparative Example 1, and it was confirmed that they have excellent low dielectric loss characteristics.

(實施例3) 將80.0g之前述之無機填充劑BiF 3(D50:8.5μm)、和120g之n-十六烷(富士軟片和光純藥(株)製,試藥特級等級),置入容器杯,以組織均質機加以攪拌,製作淤漿。 (Example 3) 80.0 g of the aforementioned inorganic filler BiF 3 (D50: 8.5 μm) and 120 g of n-hexadecane (manufactured by Fujifilm Wako Pure Chemical Co., Ltd., premium grade for reagents) were placed in The container cup is stirred with a tissue homogenizer to make a slurry.

接著,將製作之無機填充劑之淤漿,經由注射器等,注入PFA熱収縮管(長8cm,外徑2.2mm,內徑1.8mm),不使淤漿洩漏,以PFA棒(口徑2mm)加以封閉,以熱風吹風機加熱。由此,製作內含本實施例之無機填充劑之淤漿之試驗片。Next, inject the prepared inorganic filler slurry into a PFA heat-shrinkable tube (length 8cm, outer diameter 2.2mm, inner diameter 1.8mm) through a syringe, etc., to prevent the slurry from leaking, and use a PFA rod (diameter 2mm) to Closed and heated with a hot air hairdryer. Thereby, the test piece of the slurry containing the inorganic filler of this Example was produced.

接著,對於所得試驗片之無機填充劑之淤漿,在溫度19℃,相對濕度50%之環境氣氛下,經由空腔共振器法,各別測定1GHz及10GHz頻率領域之相對電容率及損耗正切。測定中,使用電路網路分析儀(Keysight Technologies(股份有限公司)製,商品名:E8361A)。將無機填充劑之淤漿之損失係數,使用無機填充劑之淤漿之相對電容率及損耗正切之測定值,根據以下之式,加以算出。將結果示於表2。 (損失係數)=(ε r2) 1/2×tanδ 2×10 3(式中、ε r2[-]係表示無機填充劑之淤漿之相對電容率,tanδ 2[-]係表示無機填充劑之淤漿之損耗正切。) Then, for the slurry of the inorganic filler in the obtained test piece, the relative permittivity and loss tangent of the 1GHz and 10GHz frequency ranges were respectively measured by the cavity resonator method in an ambient atmosphere with a temperature of 19°C and a relative humidity of 50%. . In the measurement, a circuit network analyzer (manufactured by Keysight Technologies Co., Ltd., trade name: E8361A) was used. The loss coefficient of the slurry of the inorganic filler was calculated using the measured values of the relative permittivity and loss tangent of the slurry of the inorganic filler according to the following formula. The results are shown in Table 2. (Loss coefficient)=(ε r2 ) 1/2 ×tanδ 2 ×10 3 (where, ε r2 [-] represents the relative permittivity of the slurry of the inorganic filler, and tanδ 2 [-] represents the inorganic filler The loss tangent of the slurry.)

(實施例4~9) 於實施例4~9中,如表2所示,將無機填充劑,各別變更為ZrF 4(D50:5.0μm)、HfF 4(D50:5.9μm)、CeF 3(D50:2.0μm)、或K 2SiF 6(D50:1.9μm)。又,無機填充劑之質量百分比濃度及該體積百分比濃度,各別變更成表2所示之值。除此之外,與實施例3相同,製作關於各實施例4~9之試驗片。更且,對於關於各實施例4~9之無機填充劑,與實施例1同樣地,測定相對電容率及損耗正切,各別算出損失係數。將結果示於表2。 (Examples 4~9) In Examples 4~9, as shown in Table 2, the inorganic fillers were changed to ZrF 4 (D50: 5.0 μm), HfF 4 (D50: 5.9 μm), CeF 3 (D50: 2.0 μm), or K 2 SiF 6 (D50: 1.9 μm). In addition, the mass percent concentration and the volume percent concentration of the inorganic filler were changed to the values shown in Table 2, respectively. Other than that, it carried out similarly to Example 3, and produced the test piece about each of Examples 4-9. Furthermore, the relative permittivity and loss tangent were measured similarly to Example 1 about each inorganic filler of Examples 4-9, and the loss coefficient was calculated, respectively. The results are shown in Table 2.

(比較例2~7) 於比較例2~7中,如表2所示,將無機填充劑各別變更為MgF 2(D50:20μm)、CaF 2(D50:9.0μm)、或SiO 2(D50:2.0μm)。又,無機填充劑之質量百分比濃度及該體積百分比濃度,各別變更成表2所示之值。除此之外,與實施例3相同,製作關於各比較例2~7之試驗片。更且,對於關於各比較例2~7之無機填充劑,與實施例1同樣地,測定相對電容率及損耗正切,各別算出損失係數。將結果示於表2。 (Comparative Examples 2 to 7) In Comparative Examples 2 to 7, as shown in Table 2, the inorganic filler was changed to MgF 2 (D50: 20 μm), CaF 2 (D50: 9.0 μm), or SiO 2 ( D50: 2.0 μm). In addition, the mass percent concentration and the volume percent concentration of the inorganic filler were changed to the values shown in Table 2, respectively. Except for this, it carried out similarly to Example 3, and produced the test piece about each of Comparative Examples 2-7. Furthermore, the relative permittivity and loss tangent were measured similarly to Example 1 about each inorganic filler of Comparative Examples 2-7, and the loss coefficient was calculated, respectively. The results are shown in Table 2.

Figure 02_image003
Figure 02_image003

(結果2) 如表2所示,在實施例3~9所使用之無機填充劑係相較在比較例2~7所使用之無機填充劑,在相同頻率、體積濃度所測定之損失係數為小,確認到低介電耗損特性優異。 (result 2) As shown in Table 2, compared with the inorganic fillers used in Comparative Examples 2 to 7, the inorganic fillers used in Examples 3 to 9 have smaller loss coefficients measured at the same frequency and volume concentration, confirming that Excellent low dielectric loss characteristics.

(實施例10(使用環氧樹脂之試驗片之製作)) 將環氧樹脂(商品名:jER(註冊商標)820、三菱化學(股份有限公司)製)10g、環氧樹脂硬化劑(商品名:jERCURE(註冊商標)、三菱化學(股份有限公司)製)5g、及無機填充劑(ZrF 4(D50:5.0μm))15g,置入容器杯,於脫泡攪拌機加以混錬,製作糊狀之低介電耗損樹脂組成物。 (Example 10 (production of test piece using epoxy resin)) 10 g of epoxy resin (trade name: jER (registered trademark) 820, manufactured by Mitsubishi Chemical Co., Ltd.), epoxy resin hardener (trade name : jERCURE (registered trademark), Mitsubishi Chemical Co., Ltd.) 5g, and inorganic filler (ZrF 4 (D50: 5.0μm)) 15g, put in a container cup, mix in a defoaming mixer, and make a paste low dielectric loss resin composition.

將製作之糊狀之低介電耗損樹脂組成物,置入金屬模具,在室溫下更硬化1天,之後在80℃、3小時,進行加熱硬化。之後,從金屬模具取出,製作關於實施例10之低介電耗損樹脂組成物之成形體(無機有機複合材試驗片)。The prepared paste-like low dielectric loss resin composition was put into a metal mold, and cured at room temperature for 1 day, and then heated and cured at 80° C. for 3 hours. After that, it was taken out from the metal mold, and a molded body (inorganic-organic composite material test piece) of the low dielectric loss resin composition of Example 10 was produced.

接著,對於所得成形體,在溫度19℃,相對濕度50%之環境氣氛下,經由空腔共振器法,測定10GHz頻率領域之相對電容率及損耗正切。測定中,使用電路網路分析儀(商品名:E8361A,Keysight Technologies(股份有限公司)製)。更且,將成形體之損失係數,根據以下之式加以算出。將結果示於表3。 (損失係數)=(ε r3) 1/2×tanδ 3×10 3(式中、ε r3[-]係表示成形體之相對電容率,tanδ 3[-]係表示成形體之損耗正切。) Next, the relative permittivity and loss tangent in the frequency range of 10 GHz were measured for the obtained molded body by the cavity resonator method in an ambient atmosphere at a temperature of 19°C and a relative humidity of 50%. For the measurement, a circuit network analyzer (trade name: E8361A, manufactured by Keysight Technologies Co., Ltd.) was used. Furthermore, the loss coefficient of the molded body was calculated according to the following formula. The results are shown in Table 3. (Loss coefficient)=(ε r3 ) 1/2 ×tanδ 3 ×10 3 (In the formula, ε r3 [-] means the relative permittivity of the molded body, and tanδ 3 [-] means the loss tangent of the molded body.)

(實施例11~17(使用環氧樹脂之試驗片之製作)) 於實施例11~17中,如表3所示,將無機填充劑,各別變更為HfF 4(D50:5.9μm)、或K 2SiF 6(D50:1.9μm)。又,將無機填充劑之質量百分比濃度,各別變更成表3所示之值。除此之外,與實施例10相同,製作關於各實施例11~17之低介電耗損樹脂組成物之成形體。更且,對於關於各實施例11~17之成形體,與實施例10同樣地,測定相對電容率及損耗正切,各別算出損失係數。將結果示於表3。 (Examples 11 to 17 (production of test pieces using epoxy resin)) In Examples 11 to 17, as shown in Table 3, the inorganic filler was changed to HfF 4 (D50: 5.9 μm), Or K 2 SiF 6 (D50: 1.9 μm). Moreover, the mass percentage concentration of the inorganic filler was changed to the value shown in Table 3, respectively. Other than that, in the same manner as in Example 10, molded articles of the low dielectric loss resin compositions of Examples 11 to 17 were produced. Furthermore, the relative permittivity and loss tangent were measured in the same manner as in Example 10 for the molded articles of Examples 11 to 17, and the loss coefficients were calculated respectively. The results are shown in Table 3.

(比較例8~11(使用環氧樹脂之試驗片之製作)) 於比較例8~10中,如表3所示,將無機填充劑各別變更為CaF 2(D50:9.0μm)、SiO 2(D50:2.0μm)或Al 2O 3(D50:4.7μm)。又,比較例11中,未使用無機填充劑。除此之外,與實施例10相同,製作關於各比較例8~11之低介電耗損樹脂組成物之成形體。更且,對於關於各比較例8~11之成形體,與實施例10同樣地,測定相對電容率及損耗正切,各別算出損失係數。將結果示於表3。 (Comparative Examples 8~11 (production of test pieces using epoxy resin)) In Comparative Examples 8~10, as shown in Table 3, the inorganic fillers were changed to CaF 2 (D50: 9.0μm), SiO 2 (D50: 2.0 μm) or Al 2 O 3 (D50: 4.7 μm). In addition, in Comparative Example 11, no inorganic filler was used. Other than that, in the same manner as in Example 10, molded articles of the low dielectric loss resin compositions of Comparative Examples 8 to 11 were produced. Furthermore, the relative permittivity and loss tangent were measured in the same manner as in Example 10 for the molded articles of Comparative Examples 8 to 11, and the loss coefficients were calculated respectively. The results are shown in Table 3.

(比較例12(使用環氧樹脂之試驗片之製作)) 又,比較例12中,如表3所示,未使用無機填充劑。除此之外,與實施例17相同,製作關於比較例12之低介電耗損樹脂組成物之成形體。更且,對於關於比較例12之成形體,與實施例17同樣地,測定相對電容率及損耗正切,各別算出損失係數。將結果示於表3。 (Comparative example 12 (production of test piece using epoxy resin)) In addition, in Comparative Example 12, as shown in Table 3, no inorganic filler was used. Other than that, similarly to Example 17, a molded body of the low dielectric loss resin composition of Comparative Example 12 was produced. Furthermore, with respect to the molded article of Comparative Example 12, the relative permittivity and loss tangent were measured in the same manner as in Example 17, and the loss coefficients were calculated respectively. The results are shown in Table 3.

Figure 02_image005
Figure 02_image005

(結果3) 如表3所示,實施例10~17之低介電耗損樹脂組成物所成成形體係相較比較例8~12之成形體,無機填充劑之含有量在相同質量百分比濃度下,亦可減低損失係數。又,實施例10~17之低介電耗損樹脂組成物所成成形體係相較比較例8~12之成形體,在無機填充劑之含有量為低之體積百分比濃度下,亦可減低損失係數。由此,實施例10~17之低介電耗損樹脂組成物所成成形體係相較比較例8~12之成形體,可確認到在低介電耗損特性上為優異。 (result 3) As shown in Table 3, compared with the molded products of Comparative Examples 8-12, the low dielectric loss resin composition of Examples 10-17 can reduce the content of inorganic filler at the same mass percentage concentration. loss factor. In addition, the molding system formed by the low dielectric loss resin composition of Examples 10-17 can also reduce the loss coefficient when the content of the inorganic filler is a low volume percentage concentration compared with the moldings of Comparative Examples 8-12 . Therefore, it can be confirmed that the molded systems formed by the low dielectric loss resin compositions of Examples 10-17 are superior in low dielectric loss characteristics compared with the molded bodies of Comparative Examples 8-12.

Claims (10)

一種低介電耗損樹脂組成物,為至少含有高分子樹脂與無機填充劑之低介電耗損樹脂組成物,其特徵係 前述無機填充劑係包含選自由BiF 3、ZrF 4、HfF 4、CeF 3及K 2SiF 6所成群之至少1種。 A low dielectric loss resin composition, which is a low dielectric loss resin composition containing at least a polymer resin and an inorganic filler, characterized in that the aforementioned inorganic filler is selected from BiF 3 , ZrF 4 , HfF 4 , and CeF 3 and at least one group of K 2 SiF 6 . 如請求項1記載之低介電耗損樹脂組成物,其中,前述無機填充劑之含有量係對於前述低介電耗損樹脂組成物之全質量而言,為0.01質量%~85質量%。The low dielectric loss resin composition according to Claim 1, wherein the content of the inorganic filler is 0.01% by mass to 85% by mass relative to the total mass of the low dielectric loss resin composition. 如請求項1記載之低介電耗損樹脂組成物,其中,前述高分子樹脂係包含至少1種之熱可塑性樹脂及/或至少1種之熱硬化性樹脂。The low dielectric loss resin composition according to claim 1, wherein the polymer resin includes at least one kind of thermoplastic resin and/or at least one kind of thermosetting resin. 如請求項1記載之低介電耗損樹脂組成物,其中,前述高分子樹脂為選自由烯烴系樹脂、苯乙烯系樹脂、聚乙烯樹脂、甲基丙烯基樹脂、熱可塑性彈性體樹脂、熱可塑性聚氨酯樹脂、聚丙烯腈樹脂、聚乳酸樹脂、聚醯胺聚甲醛樹脂、聚碳酸酯樹脂、聚苯醚樹脂、聚對苯二甲酸乙二醇酯、聚碸樹脂、聚醚碸樹脂、聚苯硫醚、聚醚醚酮、液晶聚合物樹脂、聚醯亞胺樹脂、氟樹脂、酚醛樹脂、胺樹脂、呋喃樹脂、不飽和聚酯樹脂、環氧樹脂、鄰苯二甲酸二烯丙酯樹脂、胍胺樹脂、酮樹脂、聚矽氧樹脂、熱硬化性樹脂、天然橡膠、合成橡膠、及此等變性體所成群之至少1種。The low dielectric loss resin composition as described in Claim 1, wherein the polymer resin is selected from olefin resins, styrene resins, polyethylene resins, methacrylic resins, thermoplastic elastomer resins, thermoplastic Polyurethane resin, polyacrylonitrile resin, polylactic acid resin, polyamide acetal resin, polycarbonate resin, polyphenylene ether resin, polyethylene terephthalate, polyethylene resin, polyether resin, polyphenylene Sulfide, polyether ether ketone, liquid crystal polymer resin, polyimide resin, fluororesin, phenolic resin, amine resin, furan resin, unsaturated polyester resin, epoxy resin, diallyl phthalate resin , guanamine resin, ketone resin, polysiloxane resin, thermosetting resin, natural rubber, synthetic rubber, and at least one of these modified groups. 一種低介電耗損樹脂組成物之製造方法,為至少含有高分子樹脂與無機填充劑之低介電耗損樹脂組成物之製造方法,其特徵係包含 使金屬鹽、和含有氟離子及/或銨離子之溶液反應,製作金屬氟化物之淤漿之工程、 和加熱乾燥前述金屬氟化物之淤漿,製作含有該金屬氟化物之前述無機填充劑的工程; 前述金屬鹽為選自由鉍、鋯、鉿或鈰之、氯化物、硫酸鹽、醋酸鹽、硝酸鹽及氫氧化物所成群之至少1種, 前述金屬氟化物係選自由BiF 3、ZrF 4、HfF 4及CeF 3所成群之至少1種。 A method for manufacturing a low dielectric loss resin composition, which is a method for manufacturing a low dielectric loss resin composition containing at least a polymer resin and an inorganic filler. The solution reaction of ions, the process of making the slurry of metal fluoride, and the process of heating and drying the slurry of the aforementioned metal fluoride to produce the aforementioned inorganic filler containing the metal fluoride; the aforementioned metal salt is selected from bismuth, zirconium, At least one of the group consisting of hafnium or cerium, chloride, sulfate, acetate, nitrate and hydroxide, the aforementioned metal fluoride is selected from the group consisting of BiF 3 , ZrF 4 , HfF 4 and CeF 3 At least 1 species. 如請求項5記載之低介電耗損樹脂組成物之製造方法,其中,含有前述氟離子及/或銨離子之溶液為含有氟化物及/或銨化合物之溶液。The method for producing a low dielectric loss resin composition according to claim 5, wherein the solution containing the aforementioned fluoride ions and/or ammonium ions is a solution containing fluoride and/or ammonium compounds. 一種低介電耗損樹脂組成物之製造方法,為至少含有高分子樹脂與無機填充劑之低介電耗損樹脂組成物之製造方法,其特徵係包含 使矽氟化物水溶液與氟化氫鉀反應,製作K 2SiF 6之淤漿之工程、 和加熱乾燥前述K 2SiF 6之淤漿,製作含有該K 2SiF 6之前述無機填充劑的工程。 A method for producing a low dielectric loss resin composition, which is a method for producing a low dielectric loss resin composition containing at least a polymer resin and an inorganic filler. 2 Process of SiF 6 slurry, and process of heating and drying the aforementioned K 2 SiF 6 slurry to produce the aforementioned inorganic filler containing K 2 SiF 6 . 一種高頻機器用成形體,為在1GHz以上之頻率帶域使用之高頻機器用成形體,其特徵係 由包含請求項1~4之任1項記載之低介電耗損樹脂組成物之成形體所成。 A molded body for high-frequency machines, which is a molded body for high-frequency machines used in a frequency band above 1 GHz, characterized by It is made of a molded body containing the low dielectric loss resin composition described in any one of Claims 1 to 4. 一種高頻機器,為在1GHz以上之頻率帶域使用之高頻機器,其特徵係 包含請求項1~4之任1項記載之低介電耗損樹脂組成物。 A high-frequency machine for use in a frequency band above 1 GHz, characterized by Including the low dielectric loss resin composition described in any one of Claims 1-4. 一種高頻機器,為在1GHz以上之頻率帶域使用之高頻機器,其特徵係 具備請求項8記載之低介電耗損樹脂組成物之成形體。 A high-frequency machine for use in a frequency band above 1 GHz, characterized by A molded body comprising the low dielectric loss resin composition described in Claim 8.
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