TW202244092A - Alkali-soluble resin, photosensitive resin composition, cured product, and image display device - Google Patents

Alkali-soluble resin, photosensitive resin composition, cured product, and image display device Download PDF

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TW202244092A
TW202244092A TW111104539A TW111104539A TW202244092A TW 202244092 A TW202244092 A TW 202244092A TW 111104539 A TW111104539 A TW 111104539A TW 111104539 A TW111104539 A TW 111104539A TW 202244092 A TW202244092 A TW 202244092A
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soluble resin
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伊藤祥穂
阿波茂樹
森本竜生
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日商大阪有機化學工業股份有限公司
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    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
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    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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Abstract

A purpose of the present invention is to provide: an alkali-soluble resin able to form a cured film having excellent development adhesiveness and resolution even if the film is thick; and a photosensitive resin composition that contains the alkali-soluble resin. Another purpose of the present invention is to provide a photosensitive resin composition which, in addition to the characteristics mentioned above, can be developed in a short time even if a weakly alkaline developing solution is used. This alkali-soluble resin contains one or more types of repeating unit X represented by general formula (1). (In the formula, R1 is hydrogen or a methyl group, R2 is a linking group having one or more carbon atoms, R3 is an organic group which is represented by general formula (2) and bonds to a carbon atom in the linking group, and R4 is a hydroxyl group or organic group which bonds to a carbon atom in the linking group.) (In the formula, R5 is an organic group which includes a heteroatom and which has 3-8 carbon atoms in the main structure, or an organic group which includes a carboxyl group and which has 2-7 carbon atoms in the main structure.).

Description

鹼可溶性樹脂、感光性樹脂組成物、硬化物、及影像顯示裝置Alkali-soluble resin, photosensitive resin composition, cured product, and image display device

本發明係關於一種鹼可溶性樹脂、感光性樹脂組成物、硬化物、及影像顯示裝置。The invention relates to an alkali-soluble resin, a photosensitive resin composition, a cured product, and an image display device.

於液晶顯示元件中,使用光間隔件(photospacer)以保持夾持於濾色片側基板與薄膜電晶體(TFT)側基板間之液晶層之厚度。In liquid crystal display elements, photo spacers are used to maintain the thickness of the liquid crystal layer sandwiched between the color filter side substrate and the thin film transistor (TFT) side substrate.

光間隔件一般藉由如下方法形成:將感光性樹脂組成物塗佈於基板,於乾燥後以通過具有特定微細圖案之光罩之光進行曝光,而進行顯影。A photo-spacer is generally formed by coating a photosensitive resin composition on a substrate, exposing it to light passing through a photomask having a specific fine pattern after drying, and developing it.

近年來,隨著液晶顯示裝置等影像顯示裝置之高功能化(例如3D立體視覺化、視角擴大化等),要求光間隔件之厚膜化(10 μm以上)。In recent years, along with the high functionality of image display devices such as liquid crystal display devices (such as 3D stereoscopic vision, widening viewing angle, etc.), thicker film thickness (10 μm or more) of photo-spacers is required.

例如,專利文獻1之目的在於提供一種即便進行膜厚為10 μm以上之厚膜加工亦可形成顯影密接性及解析度優異、形狀良好之微細光間隔件之負型感光性樹脂組成物, 提出一種負型感光性樹脂組成物,其含有(A)鹼可溶性樹脂、(B)光自由基聚合起始劑、及(C)光聚合性單體,上述(C)光聚合性單體含有(C-1)具有異三聚氰酸骨架之光聚合性單體及(C-2)具有茀骨架之光聚合性單體。 For example, the object of Patent Document 1 is to provide a negative-type photosensitive resin composition capable of forming a fine photo-spacer with excellent development adhesion and resolution and a good shape even when processing a thick film with a film thickness of 10 μm or more. A negative-type photosensitive resin composition is proposed, which contains (A) an alkali-soluble resin, (B) a photoradical polymerization initiator, and (C) a photopolymerizable monomer, and the above-mentioned (C) photopolymerizable monomer contains (C-1) a photopolymerizable monomer having an isocyanuric acid skeleton, and (C-2) a photopolymerizable monomer having a fennel skeleton.

又,專利文獻2之目的在於提供一種可形成10 μm以上之間隙、與基板之密接性良好、且可確保曝光後之透明性之感光性樹脂組成物, 提出一種感光性樹脂組成物,其用作間隔件形成材料,包含(A)成分:黏合劑聚合物、(B)成分:光聚合性化合物、(C)成分:光聚合起始劑、及(D)成分:含巰基之氫供體,上述(B)光聚合性化合物包含具有乙烯性不飽和基及異三聚氰酸環結構之光聚合性化合物。 [先前技術文獻] [專利文獻] Furthermore, the object of Patent Document 2 is to provide a photosensitive resin composition capable of forming a gap of 10 μm or more, having good adhesion to the substrate, and ensuring transparency after exposure. A photosensitive resin composition, which is used as a spacer forming material, is proposed, comprising (A) component: binder polymer, (B) component: photopolymerizable compound, (C) component: photopolymerization initiator, and ( D) Component: a hydrogen donor containing a mercapto group, and the above-mentioned (B) photopolymerizable compound includes a photopolymerizable compound having an ethylenically unsaturated group and an isocyanuric acid ring structure. [Prior Art Literature] [Patent Document]

[專利文獻1]日本特開2019-124929號公報 [專利文獻2]國際公開第2013/115262號公報 [Patent Document 1] Japanese Patent Laid-Open No. 2019-124929 [Patent Document 2] International Publication No. 2013/115262

[發明所欲解決之課題][Problem to be Solved by the Invention]

但是,專利文獻1或2所記載之感光性樹脂組成物於光間隔件之厚膜化時,對於顯影密接性及解析度存在改善餘地。又,從環境方面來看,需要一種可使用較稀之弱鹼性水溶液顯影之感光性樹脂組成物,但專利文獻1或2所記載之感光性樹脂組成物當使用弱鹼性水溶液顯影時,會擔憂顯影時間變長、生產性降低之問題。However, the photosensitive resin composition described in Patent Document 1 or 2 has room for improvement in image development adhesiveness and resolution when the photo-spacer is thickened. Also, from an environmental point of view, there is a need for a photosensitive resin composition that can be developed using a relatively dilute weak alkaline aqueous solution, but when the photosensitive resin composition described in Patent Document 1 or 2 is developed using a weak alkaline aqueous solution, There are concerns about longer developing time and lower productivity.

本發明之目的在於提供一種即便於厚膜化之情形時亦可形成顯影密接性及解析度優異之硬化膜之鹼可溶性樹脂、及含有上述鹼可溶性樹脂之感光性樹脂組成物。又,本發明之目的在於提供一種感光性樹脂組成物,其除了具有上述特性以外,即便於使用弱鹼性顯影液之情形時亦可於短時間內顯影。進而,本發明之目的在於提供一種由上述感光性樹脂組成物獲得之硬化物、及包含上述硬化物之影像顯示裝置。 [解決課題之技術手段] An object of the present invention is to provide an alkali-soluble resin capable of forming a cured film excellent in development adhesion and resolution even when the film is thickened, and a photosensitive resin composition containing the above-mentioned alkali-soluble resin. Moreover, the objective of this invention is providing the photosensitive resin composition which can develop in a short time even when using weak alkaline developing solution, in addition to having the said characteristic. Furthermore, an object of the present invention is to provide a cured product obtained from the above-mentioned photosensitive resin composition, and an image display device including the above-mentioned cured product. [Technical means to solve the problem]

本發明人等為解決上述課題而反覆進行積極研究,結果發現,藉由使用下述鹼可溶性樹脂、及含有該鹼可溶性樹脂之感光性樹脂組成物可達到上述目的,從而完成了本發明。As a result of intensive studies to solve the above-mentioned problems, the inventors of the present invention found that the above-mentioned object can be achieved by using the following alkali-soluble resin and a photosensitive resin composition containing the alkali-soluble resin, and completed the present invention.

本發明係關於一種鹼可溶性樹脂(以下亦稱為「鹼可溶性樹脂A」),其包含一種以上由下述通式(1)所表示之重複結構單元X。

Figure 02_image005
(式中,R 1為氫或甲基,R 2為碳數為1以上之連結基,R 3為鍵結於上述連結基之碳原子之由下述通式(2)所表示之有機基,R 4為鍵結於上述連結基之碳原子之羥基或有機基)
Figure 02_image007
(式中,R 5為母體之碳數為3~8且包含雜原子之有機基、或母體之碳數為2~7且具有羧基之有機基) The present invention relates to an alkali-soluble resin (hereinafter also referred to as "alkali-soluble resin A") comprising one or more repeating structural units X represented by the following general formula (1).
Figure 02_image005
(In the formula, R1 is hydrogen or a methyl group, R2 is a linking group with a carbon number of 1 or more, and R3 is an organic group represented by the following general formula (2) bonded to the carbon atom of the linking group , R 4 is a hydroxyl group or an organic group bonded to the carbon atom of the above linking group)
Figure 02_image007
(In the formula , R5 is an organic group whose parent has 3-8 carbon atoms and contains heteroatoms, or an organic group whose parent has 2-7 carbon atoms and has a carboxyl group)

又,本發明係關於一種鹼可溶性樹脂(以下亦稱為「鹼可溶性樹脂B」),其包含一種以上由下述通式(1')所表示之重複結構單元X',但不包含具備如下分支側鏈之重複結構單元,該分支側鏈具有各者以自由基聚合性取代基結尾之2~3個末端。

Figure 02_image009
(式中,R 1為氫或甲基,R 2為碳數為1以上之連結基,R 3'為鍵結於上述連結基之碳原子之由下述通式(2')所表示之有機基,R 4為鍵結於上述連結基之碳原子之羥基或有機基)
Figure 02_image011
(式中,R 5'為母體之碳數為2~7之烴基、母體之碳數為3~8且包含雜原子之有機基、或母體之碳數為2~7且具有羧基之有機基) Also, the present invention relates to an alkali-soluble resin (hereinafter also referred to as "alkali-soluble resin B"), which includes one or more repeating structural units X' represented by the following general formula (1'), but does not include the following: A repeating structural unit of a branched side chain having 2 to 3 ends each terminated with a radically polymerizable substituent.
Figure 02_image009
(In the formula, R 1 is hydrogen or methyl, R 2 is a linking group with a carbon number of 1 or more, and R 3' is a carbon atom bonded to the above linking group represented by the following general formula (2') Organic group, R4 is a hydroxyl group or an organic group bonded to the carbon atom of the above linking group)
Figure 02_image011
(wherein, R 5' is a hydrocarbon group whose parent body has 2 to 7 carbon atoms, an organic group whose parent body has 3 to 8 carbon atoms and contains heteroatoms, or an organic group whose parent body has 2 to 7 carbon atoms and has a carboxyl group )

上述鹼可溶性樹脂A或B中,較佳為上述R 2之連結基為母體之碳數為1~10之烴基、或母體之碳數為1~10且包含雜原子之有機基。 In the above-mentioned alkali-soluble resin A or B, it is preferable that the linking group of the above - mentioned R2 is a hydrocarbon group with a parent body having 1 to 10 carbon atoms, or an organic group with a parent body having 1 to 10 carbon atoms and containing heteroatoms.

上述鹼可溶性樹脂A或B中,較佳為上述R 4之有機基為包含選自由丙烯醯氧基、甲基丙烯醯氧基、醯氧基、醯胺氧基、烷氧基、芳氧基、胺基、及含氮雜環所組成之群中之一種以上官能基之有機基。 In the above-mentioned alkali-soluble resin A or B, it is preferable that the organic group of the above - mentioned R4 is selected from the group consisting of acryloxy, methacryloxy, acyloxy, amidooxy, alkoxy, aryloxy , amine group, and an organic group with more than one functional group in the group consisting of nitrogen-containing heterocyclic rings.

又,上述鹼可溶性樹脂A或B中,較佳為上述R 2之連結基為母體之碳數為1~7之烴基、或母體之碳數為1~7且包含雜原子之有機基,且 上述R 4為鍵結於上述R 2之連結基之碳原子之羥基、丙烯醯氧基、或甲基丙烯醯氧基。 In addition, in the above-mentioned alkali-soluble resin A or B, it is preferable that the linking group of the above - mentioned R2 is a hydrocarbon group whose parent body has 1 to 7 carbon atoms, or an organic group whose parent body has 1 to 7 carbon atoms and contains heteroatoms, and The above-mentioned R 4 is a hydroxyl group, an acryloxy group, or a methacryloxy group bonded to a carbon atom of the linking group of the above-mentioned R 2 .

又,上述鹼可溶性樹脂A或B中,較佳為上述R 2之連結基為母體之碳數為1~7之烴基、或母體之碳數為1~7且包含雜原子之有機基, 上述R 5或上述R 5'為由下述通式(3)所表示之有機基,且 上述R 4為鍵結於上述R 2之連結基之碳原子之羥基、丙烯醯氧基、甲基丙烯醯氧基、或由下述通式(4)所表示之有機基。

Figure 02_image013
(式中,R 6及R 7分別獨立地為母體之碳數為1~6之烴基,R 6及R 7之母體之合計碳數為3~8)
Figure 02_image015
(式中,R 8為氫或甲基,R 9為母體之碳數為1~5之烴基、或母體之碳數為1~5且包含雜原子之有機基) In addition, in the above-mentioned alkali-soluble resin A or B, it is preferable that the linking group of the above - mentioned R2 is a hydrocarbon group whose parent body has 1 to 7 carbon atoms, or an organic group whose parent body has 1 to 7 carbon atoms and contains heteroatoms. R 5 or the above R 5' is an organic group represented by the following general formula (3), and the above R 4 is a hydroxyl group, acryloxy group, methacryl group bonded to the carbon atom of the linking group of the above R 2 an acyloxy group, or an organic group represented by the following general formula (4).
Figure 02_image013
(In the formula, R 6 and R 7 are independently a hydrocarbon group whose parent body has 1 to 6 carbon atoms, and the total carbon number of the parent body of R 6 and R 7 is 3 to 8)
Figure 02_image015
(In the formula, R 8 is hydrogen or methyl, R 9 is a hydrocarbon group whose parent has 1 to 5 carbons, or an organic group whose parent has 1 to 5 carbons and contains heteroatoms)

上述鹼可溶性樹脂A或B中,較佳為上述重複結構單元X或X'之含量於所有重複結構單元中為5~50莫耳%。In the above-mentioned alkali-soluble resin A or B, the content of the above-mentioned repeating structural unit X or X' is preferably 5 to 50 mol% in all repeating structural units.

上述鹼可溶性樹脂A或B較佳為酸值為20~120 mgKOH/g。The above-mentioned alkali-soluble resin A or B preferably has an acid value of 20 to 120 mgKOH/g.

上述鹼可溶性樹脂A或B較佳為重量平均分子量為5000~40000。The above-mentioned alkali-soluble resin A or B preferably has a weight average molecular weight of 5,000 to 40,000.

本發明之感光性樹脂組成物至少含有上述鹼可溶性樹脂A及/或B、聚合性單體、及光聚合起始劑。The photosensitive resin composition of the present invention contains at least the above-mentioned alkali-soluble resin A and/or B, a polymerizable monomer, and a photopolymerization initiator.

本發明之硬化物係由上述感光性樹脂組成物獲得。The cured product of the present invention is obtained from the above photosensitive resin composition.

上述硬化物較佳為光間隔件、間隔壁材料、透鏡材料、層間絕緣膜材料、保護膜材料、光波導材料、或平坦化膜材料。The cured product is preferably an optical spacer, a partition wall material, a lens material, an interlayer insulating film material, a protective film material, an optical waveguide material, or a planarizing film material.

又,本發明係關於一種影像顯示裝置,其包含上述硬化物。 [發明之效果] Also, the present invention relates to an image display device including the above-mentioned cured product. [Effect of Invention]

本發明之鹼可溶性樹脂A或B之主要特徵在於具有如下結構:包含一種以上由上述通式(1)或(1')所表示之重複結構單元X或X',上述重複結構單元X或X'中,側鏈長度為一定以上之長度,於其側鏈之末端具有羧基。本發明之鹼可溶性樹脂A或B藉由具有該特徵之結構,從而即便於厚膜化之情形時亦可獲得顯影密接性及解析度優異之硬化膜。又,本發明之鹼可溶性樹脂A或B由於具有鍵結於連結基R 2之碳原子之羥基或有機基,故而可進而具有源自該等基之特性。又,包含本發明之鹼可溶性樹脂A及/或B之感光性樹脂組成物由於即便於使用弱鹼性顯影液之情形時亦可於短時間內顯影,故而可提高光間隔件等硬化物之生產性。尤其是,於上述R 4為有機基之情形時,本發明之鹼可溶性樹脂A或B具有側鏈分支之結構,因此即便於厚膜化之情形時亦可獲得顯影密接性及解析度進而優異之硬化膜。關於其理由,雖然不一定受理論的拘束,但認為原因在於,由於上述R 3或R 3'一定程度上較長(原子數較多),故而末端之羧基容易朝向與主鏈相對向之方向,因此可參與與基材之密接之羧基數量增加。進而,認為原因在於,於上述R 4為有機基之情形時,鹼可溶性樹脂A或B之側鏈為分支之結構,因此上述R 3或R 3'之末端之羧基更加容易朝向與主鏈相對向之方向,可參與與基材之密接之羧基數量進而增加。 The main feature of the alkali-soluble resin A or B of the present invention is that it has the following structure: it contains more than one repeating structural unit X or X' represented by the above-mentioned general formula (1) or (1'), and the above-mentioned repeating structural unit X or X In ', the length of the side chain is not less than a certain length, and there is a carboxyl group at the end of the side chain. The alkali-soluble resin A or B of this invention can obtain the cured film excellent in image development adhesiveness and resolution even when it thickens a film by having the structure of this characteristic. In addition, the alkali-soluble resin A or B of the present invention has a hydroxyl group or an organic group bonded to the carbon atom of the linking group R 2 , so it can further have characteristics derived from these groups. Also, since the photosensitive resin composition comprising the alkali-soluble resin A and/or B of the present invention can be developed in a short time even when using a weakly alkaline developing solution, it can improve the hardness of cured products such as photo-spacers. productive. In particular, when the above-mentioned R 4 is an organic group, the alkali-soluble resin A or B of the present invention has a branched side chain structure, so even when the film is thickened, it can obtain excellent adhesiveness and resolution for development. hardened film. The reason for this is not bound by theory, but it is believed that the carboxyl group at the end tends to face the direction opposite to the main chain because the above-mentioned R 3 or R 3' is relatively long (more atoms) , so the number of carboxyl groups that can participate in the close contact with the substrate increases. Furthermore, the reason is considered to be that when the above-mentioned R 4 is an organic group, the side chain of the alkali-soluble resin A or B has a branched structure, so the carboxyl group at the end of the above-mentioned R 3 or R 3' is more likely to be oriented opposite to the main chain In this direction, the number of carboxyl groups that can participate in the close contact with the substrate increases.

本發明之鹼可溶性樹脂A包含一種以上由下述通式(1)所表示之重複結構單元X。

Figure 02_image017
(式中,R 1為氫或甲基,R 2為碳數為1以上之連結基,R 3為鍵結於上述連結基之碳原子之由下述通式(2)所表示之有機基,R 4為鍵結於上述連結基之碳原子之羥基或有機基)
Figure 02_image019
(式中,R 5為母體之碳數為3~8且包含雜原子之有機基、或母體之碳數為2~7且具有羧基之有機基) The alkali-soluble resin A of the present invention contains one or more repeating structural units X represented by the following general formula (1).
Figure 02_image017
(In the formula, R1 is hydrogen or a methyl group, R2 is a linking group with a carbon number of 1 or more, and R3 is an organic group represented by the following general formula (2) bonded to the carbon atom of the linking group , R 4 is a hydroxyl group or an organic group bonded to the carbon atom of the above linking group)
Figure 02_image019
(In the formula , R5 is an organic group whose parent has 3-8 carbon atoms and contains heteroatoms, or an organic group whose parent has 2-7 carbon atoms and has a carboxyl group)

又,本發明之鹼可溶性樹脂B包含一種以上由下述通式(1')所表示之重複結構單元X',但不包含具備如下分支側鏈之重複結構單元,該分支側鏈具有各者以自由基聚合性取代基結尾之2~3個末端。

Figure 02_image021
(式中,R 1為氫或甲基,R 2為碳數為1以上之連結基,R 3'為鍵結於上述連結基之碳原子之由下述通式(2')所表示之有機基,R 4為鍵結於上述連結基之碳原子之羥基或有機基)
Figure 02_image023
(式中,R 5'為母體之碳數為2~7之烴基、母體之碳數為3~8且包含雜原子之有機基、或母體之碳數為2~7且具有羧基之有機基) Also, the alkali-soluble resin B of the present invention includes one or more repeating structural units X' represented by the following general formula (1'), but does not include repeating structural units having branched side chains having each 2 to 3 ends ending in radically polymerizable substituents.
Figure 02_image021
(In the formula, R 1 is hydrogen or methyl, R 2 is a linking group with a carbon number of 1 or more, and R 3' is a carbon atom bonded to the above linking group represented by the following general formula (2') Organic group, R4 is a hydroxyl group or an organic group bonded to the carbon atom of the above linking group)
Figure 02_image023
(wherein, R 5' is a hydrocarbon group whose parent body has 2 to 7 carbon atoms, an organic group whose parent body has 3 to 8 carbon atoms and contains heteroatoms, or an organic group whose parent body has 2 to 7 carbon atoms and has a carboxyl group )

本發明中,(甲基)丙烯係指丙烯或甲基丙烯,(甲基)丙烯醯基係指丙烯醯基或甲基丙烯醯基,(甲基)丙烯酸係指丙烯酸或甲基丙烯酸,(甲基)丙烯酸酯係指丙烯酸酯或甲基丙烯酸酯。又,本發明中,母體之碳數係指除了取代基以外之成為主骨架之基之碳數。In the present invention, (meth)acrylic means propylene or methacrylic, (meth)acryl means acryl or methacryl, (meth)acrylic means acrylic or methacrylic, ( Meth)acrylate means acrylate or methacrylate. In addition, in the present invention, the carbon number of the matrix refers to the carbon number of the group serving as the main skeleton other than the substituent.

上述通式(1)或(1')中,上述R 2為碳數為1以上之連結基,其並無特別限制,只要是可將上述R 3及上述R 4、或上述R 3'及上述R 4連結於酯鍵之氧原子且碳數為1以上之基即可。作為上述連結基,例如可例舉:直鏈狀或支鏈狀之脂肪族飽和或不飽和烴基、脂環式飽和或不飽和烴基(包含橋聯環(bridged ring)、縮合環)、芳香族烴基、構成上述烴基之碳原子之一部分經雜原子(例如氧原子、氮原子、及硫原子等)取代而成之有機基、及該等之兩種以上鍵結而成之有機基等。又,上述烴基或上述有機基可具有各種取代基(例如鹵基、羥基、羧基、胺基、烷基、烯基、烷氧基、及芳基等)或官能基(例如酯鍵、醯胺鍵、醚鍵、硫醚鍵、及胺酯(urethane)鍵等)。 In the above-mentioned general formula (1) or (1'), the above-mentioned R 2 is a linking group with a carbon number of 1 or more, which is not particularly limited, as long as the above-mentioned R 3 and the above-mentioned R 4 , or the above-mentioned R 3' and The above-mentioned R 4 is linked to the oxygen atom of the ester bond and has a carbon number of 1 or more. Examples of the linking group include linear or branched aliphatic saturated or unsaturated hydrocarbon groups, alicyclic saturated or unsaturated hydrocarbon groups (including bridged rings and condensed rings), aromatic Hydrocarbon groups, organic groups in which part of the carbon atoms constituting the above-mentioned hydrocarbon groups are replaced by heteroatoms (such as oxygen atoms, nitrogen atoms, and sulfur atoms, etc.), and organic groups in which two or more of these are bonded together. Moreover, the above-mentioned hydrocarbon group or the above-mentioned organic group may have various substituents (such as halogen, hydroxyl, carboxyl, amino, alkyl, alkenyl, alkoxy, and aryl, etc.) or functional groups (such as ester bonds, amide groups, etc.) bond, ether bond, thioether bond, and urethane bond, etc.).

上述連結基較佳為母體之碳數為1~10之烴基、或母體之碳數為1~10且包含雜原子(例如氧原子、氮原子、及硫原子等)之有機基。又,上述連結基更佳為母體之碳數為1~7之烴基、或母體之碳數為1~7且包含雜原子(例如氧原子、氮原子、及硫原子等)之有機基。再者,於上述連結基包含雜原子之情形時,上述連結基所具有之雜原子於上述通式(1)或(1')中存在於「除了與上述R 3或R 3'之鍵結部以外之部分」、「除了與上述R 4之鍵結部以外之部分」、及「除了與酯鍵之氧原子之鍵結部以外之部分」。又,上述連結基進而較佳為母體之碳數為2~7之直鏈狀或支鏈狀之脂肪族飽和或不飽和烴基、母體之碳數為3~7之脂環式飽和或不飽和烴基、母體之碳數為4~7且亞甲基與脂環式飽和或不飽和烴基鍵結而成之烴基、母體之碳數為5~7且直鏈狀或支鏈狀之脂肪族飽和或不飽和烴基與脂環式飽和或不飽和烴基鍵結而成之烴基、或母體之碳數為2~7且包含醚鍵之有機基。 The above-mentioned linking group is preferably a hydrocarbon group whose parent body has 1 to 10 carbon atoms, or an organic group whose parent body has 1 to 10 carbon atoms and contains heteroatoms (such as oxygen atoms, nitrogen atoms, and sulfur atoms, etc.). Moreover, the above-mentioned linking group is more preferably a hydrocarbon group with a parent body having 1 to 7 carbon atoms, or an organic group with a parent body having 1 to 7 carbon atoms and containing heteroatoms (such as oxygen atoms, nitrogen atoms, and sulfur atoms, etc.). Furthermore, when the above-mentioned linking group contains heteroatoms, the heteroatoms of the above-mentioned linking group exist in the above-mentioned general formula (1) or (1') in "except for the bond with the above-mentioned R 3 or R 3' part", "a part other than the bonded part with the above - mentioned R4", and "a part other than the bonded part with the oxygen atom of the ester bond". Moreover, the above-mentioned linking group is further preferably a straight-chain or branched aliphatic saturated or unsaturated hydrocarbon group whose parent body has 2 to 7 carbon atoms, or an alicyclic saturated or unsaturated hydrocarbon group whose parent body has 3 to 7 carbon atoms. Hydrocarbyl, the carbon number of the parent is 4 to 7 and the hydrocarbon group formed by the bonding of methylene and alicyclic saturated or unsaturated hydrocarbon group, the carbon number of the parent is 5 to 7 and a straight-chain or branched aliphatic saturated Or a hydrocarbon group in which an unsaturated hydrocarbon group is bonded to an alicyclic saturated or unsaturated hydrocarbon group, or an organic group whose parent body has 2 to 7 carbon atoms and contains an ether bond.

上述通式(1)中,上述R 3為鍵結於上述R 2之連結基所具有之碳原子之由上述通式(2)所表示之有機基。上述通式(2)中,上述R 5為母體之碳數為3~8且包含雜原子(例如氧原子、氮原子、及硫原子等)之有機基、或母體之碳數為2~7且具有羧基之有機基。上述R 5較佳為母體之碳數為2~7且具有羧基之有機基。於上述R 5具有羧基之情形時,羧基之數量並無特別限制,較佳為1~2。上述有機基可具有各種取代基(例如鹵基、羥基、羧基、胺基、烷基、烯基、烷氧基、及芳基等)或官能基(例如酯鍵、醯胺鍵、醚鍵、硫醚鍵、及胺酯鍵等)。 In the above-mentioned general formula (1), the above-mentioned R 3 is an organic group represented by the above-mentioned general formula (2) that is bonded to the carbon atom of the linking group of the above-mentioned R 2 . In the above-mentioned general formula (2), the above-mentioned R 5 is an organic group whose parent body has 3-8 carbon atoms and contains heteroatoms (such as oxygen atom, nitrogen atom, and sulfur atom, etc.), or the parent body has 2-7 carbon atoms. And an organic group with a carboxyl group. The above-mentioned R 5 is preferably an organic group with a parent having 2 to 7 carbon atoms and a carboxyl group. When the above-mentioned R 5 has a carboxyl group, the number of carboxyl groups is not particularly limited, but is preferably 1-2. The above-mentioned organic groups may have various substituents (such as halogen, hydroxyl, carboxyl, amino, alkyl, alkenyl, alkoxy, and aryl, etc.) or functional groups (such as ester bond, amide bond, ether bond, thioether bond, and urethane bond, etc.).

上述通式(2)所表示之有機基較佳為下述任一有機基。

Figure 02_image025
The organic group represented by the above general formula (2) is preferably any one of the following organic groups.
Figure 02_image025

上述通式(1')中,上述R 3'為鍵結於上述R 2之連結基所具有之碳原子之由上述通式(2')所表示之有機基。上述通式(2')中,上述R 5'為母體之碳數為2~7之烴基、母體之碳數為3~8且包含雜原子(例如氧原子、氮原子、及硫原子等)之有機基、或母體之碳數為2~7且具有羧基之有機基。上述R 5'較佳為母體之碳數為2~7之烴基、或母體之碳數為2~7且具有羧基之有機基。於上述R 5'具有羧基之情形時,羧基之數量並無特別限制,較佳為1~2。作為上述烴基,可例舉:直鏈狀或支鏈狀之脂肪族飽和或不飽和烴基、脂環式飽和或不飽和烴基(包含橋聯環、縮合環)、芳香族烴基、及該等之兩種以上鍵結而成之烴基等。上述烴基或上述有機基可具有各種取代基(例如鹵基、羥基、羧基、胺基、烷基、烯基、烷氧基、及芳基等)或官能基(例如酯鍵、醯胺鍵、醚鍵、硫醚鍵、及胺酯鍵等)。 In the above-mentioned general formula (1'), the above-mentioned R 3' is an organic group represented by the above-mentioned general formula (2') that is bonded to the carbon atom of the linking group of the above-mentioned R 2 . In the above-mentioned general formula (2'), the above-mentioned R 5' is a hydrocarbon group whose parent body has 2-7 carbon atoms, and the parent body has 3-8 carbon atoms and contains heteroatoms (such as oxygen atoms, nitrogen atoms, and sulfur atoms, etc.) The organic group, or the carbon number of the parent is 2 to 7 and has a carboxyl organic group. The above-mentioned R 5' is preferably a hydrocarbon group whose parent body has 2 to 7 carbon atoms, or an organic group whose parent body has 2 to 7 carbon atoms and has a carboxyl group. When the above-mentioned R 5' has a carboxyl group, the number of carboxyl groups is not particularly limited, but is preferably 1-2. Examples of the aforementioned hydrocarbon group include linear or branched aliphatic saturated or unsaturated hydrocarbon groups, alicyclic saturated or unsaturated hydrocarbon groups (including bridging rings and condensed rings), aromatic hydrocarbon groups, and the like. A hydrocarbon group formed by bonding two or more types. The above-mentioned hydrocarbon groups or the above-mentioned organic groups may have various substituents (such as halogen groups, hydroxyl groups, carboxyl groups, amino groups, alkyl groups, alkenyl groups, alkoxy groups, and aryl groups, etc.) or functional groups (such as ester bonds, amide bonds, Ether bond, thioether bond, and urethane bond, etc.).

上述通式(2')所表示之有機基較佳為下述任一有機基。

Figure 02_image027
The organic group represented by the above general formula (2') is preferably any one of the following organic groups.
Figure 02_image027

又,上述通式(2)或(2')中,上述R 5或R 5'較佳為由下述通式(3)所表示之有機基。

Figure 02_image029
(式中,R 6及R 7分別獨立地為母體之碳數為1~6之烴基,R 6及R 7之母體之合計碳數為3~8) In addition, in the above-mentioned general formula (2) or (2'), it is preferable that the above-mentioned R 5 or R 5' is an organic group represented by the following general formula (3).
Figure 02_image029
(In the formula, R 6 and R 7 are independently a hydrocarbon group whose parent body has 1 to 6 carbon atoms, and the total carbon number of the parent body of R 6 and R 7 is 3 to 8)

作為上述烴基,可例舉:直鏈狀或支鏈狀之脂肪族飽和或不飽和烴基、芳香族烴基、脂環式飽和或不飽和烴基等。上述烴基可具有各種取代基(例如鹵基、羥基、羧基、胺基、烷基、烯基、烷氧基、及芳基等)。As said hydrocarbon group, a linear or branched aliphatic saturated or unsaturated hydrocarbon group, an aromatic hydrocarbon group, an alicyclic saturated or unsaturated hydrocarbon group, etc. are mentioned. The above-mentioned hydrocarbon group may have various substituents (for example, a halogen group, a hydroxyl group, a carboxyl group, an amino group, an alkyl group, an alkenyl group, an alkoxy group, an aryl group, and the like).

作為由上述通式(3)所表示之有機基之一例,可例舉下述有機基。

Figure 02_image031
As an example of the organic group represented by the said general formula (3), the following organic group is mentioned.
Figure 02_image031

較佳為上述R 6及R 7分別獨立地為母體之碳數為1~5之烴基,R 6及R 7之母體之合計碳數為3~7。 Preferably, the above-mentioned R 6 and R 7 are each independently a hydrocarbon group whose parent body has 1-5 carbon atoms, and the total carbon number of the parent body of R 6 and R 7 is 3-7.

上述通式(2)或(2')所表示之有機基較佳為下述任一有機基。

Figure 02_image033
The organic group represented by the above general formula (2) or (2') is preferably any one of the following organic groups.
Figure 02_image033

上述通式(1)或(1')中,上述R 4為鍵結於上述R 2之連結基所具有之碳原子的羥基或有機基。於上述R 4為羥基之情形時,可進而提高顯影性。又,於上述R 4為有機基之情形時,可進而賦予源自該有機基之特性(例如顯影性、密接性、及溶解性等)。上述有機基並無特別限制,例如可例舉:直鏈狀或支鏈狀之脂肪族飽和或不飽和烴基、脂環式飽和或不飽和烴基(包含橋聯環、縮合環)、芳香族烴基、構成上述烴基之碳原子之一部分經雜原子(例如氧原子、氮原子、及硫原子等)取代而成之有機基、及該等之兩種以上鍵結而成之有機基等。又,上述烴基或上述有機基可具有各種取代基(例如鹵基、羥基、羧基、胺基、烷基、烯基、烷氧基、及芳基等)或官能基(例如酯鍵、醯胺鍵、醚鍵、硫醚鍵、及胺酯鍵等)。 In the above-mentioned general formula (1) or (1′), the above-mentioned R 4 is a hydroxyl group or an organic group bonded to a carbon atom of the linking group of the above-mentioned R 2 . When the above-mentioned R 4 is a hydroxyl group, developability can be further improved. Also, when the above-mentioned R 4 is an organic group, properties derived from the organic group (such as developability, adhesiveness, and solubility, etc.) can be further imparted. The above-mentioned organic groups are not particularly limited, for example, straight-chain or branched aliphatic saturated or unsaturated hydrocarbon groups, alicyclic saturated or unsaturated hydrocarbon groups (including bridging rings, condensed rings), aromatic hydrocarbon groups . An organic group in which a part of the carbon atoms constituting the above-mentioned hydrocarbon group is replaced by a heteroatom (such as an oxygen atom, a nitrogen atom, and a sulfur atom, etc.), and an organic group in which two or more of these are bonded together, etc. Moreover, the above-mentioned hydrocarbon group or the above-mentioned organic group may have various substituents (such as halogen, hydroxyl, carboxyl, amino, alkyl, alkenyl, alkoxy, and aryl, etc.) or functional groups (such as ester bonds, amide groups, etc.) bond, ether bond, thioether bond, and urethane bond, etc.).

上述R 4之有機基較佳為包含選自由丙烯醯氧基、甲基丙烯醯氧基、醯氧基、醯胺氧基、烷氧基、芳氧基、胺基、及含氮雜環所組成之群中之一種以上官能基之有機基,更佳為丙烯醯氧基、甲基丙烯醯氧基、或由下述式之任一者所表示之有機基。

Figure 02_image035
(式中,R 10及R 11分別獨立地為段落[0039]所記載之有機基) The organic group of the above-mentioned R preferably comprises a group selected from acryloxy, methacryloxy, acyloxy, amidooxy, alkoxy, aryloxy, amino, and nitrogen-containing heterocycles. The organic group of one or more functional groups in the group is more preferably an acryloxy group, a methacryloxy group, or an organic group represented by any one of the following formulas.
Figure 02_image035
(In the formula, R 10 and R 11 are independently the organic groups described in paragraph [0039])

又,上述R 4較佳為鍵結於上述R 2之連結基之碳原子之羥基、丙烯醯氧基、甲基丙烯醯氧基、或由下述通式(4)所表示之有機基。

Figure 02_image037
(式中,R 8為氫或甲基,R 9為母體之碳數為1~5之烴基、或母體之碳數為1~5且包含雜原子之有機基) Also, the above-mentioned R 4 is preferably a hydroxyl group bonded to a carbon atom of the linking group of the above-mentioned R 2 , an acryloxy group, a methacryloxy group, or an organic group represented by the following general formula (4).
Figure 02_image037
(In the formula, R 8 is hydrogen or methyl, R 9 is a hydrocarbon group whose parent has 1 to 5 carbons, or an organic group whose parent has 1 to 5 carbons and contains heteroatoms)

上述通式(4)中,上述R 9為母體之碳數為1~5之烴基、或母體之碳數為1~5且包含雜原子(例如氧原子、氮原子、及硫原子等)之有機基。再者,於上述有機基包含雜原子之情形時,上述有機基所具有之雜原子於上述通式(4)中,存在於「除了與胺酯鍵之氮原子之鍵結部以外之部分」、及「除了與(甲基)丙烯醯氧基之氧原子之鍵結部以外之部分」。作為上述烴基,可例舉直鏈狀或支鏈狀之脂肪族飽和或不飽和烴基。上述烴基或上述有機基可具有各種取代基(例如鹵基、羥基、羧基、胺基、烷基、烯基、烷氧基、及芳基等)或官能基(例如酯鍵、醯胺鍵、醚鍵、硫醚鍵、及胺酯鍵等)。上述R 9較佳為母體之碳數為1~5之烴基,更佳為伸乙基或伸丙基。 In the above-mentioned general formula (4), the above-mentioned R 9 is a hydrocarbon group whose parent body has 1 to 5 carbon atoms, or a hydrocarbon group whose parent body has 1 to 5 carbon atoms and contains heteroatoms (such as oxygen atoms, nitrogen atoms, and sulfur atoms, etc.) Organic based. Furthermore, when the above-mentioned organic group contains heteroatoms, the heteroatoms of the above-mentioned organic group exist in "parts other than the bonding part of the nitrogen atom bonded to the urethane" in the above-mentioned general formula (4). , and "parts other than the bonded part with the oxygen atom of (meth)acryloxy group". As said hydrocarbon group, a linear or branched aliphatic saturated or unsaturated hydrocarbon group is mentioned. The above-mentioned hydrocarbon groups or the above-mentioned organic groups may have various substituents (such as halogen groups, hydroxyl groups, carboxyl groups, amino groups, alkyl groups, alkenyl groups, alkoxy groups, and aryl groups, etc.) or functional groups (such as ester bonds, amide bonds, Ether bond, thioether bond, and urethane bond, etc.). The above-mentioned R 9 is preferably a hydrocarbon group whose parent has 1 to 5 carbon atoms, more preferably an ethylidene group or a propylidene group.

作為成為除了構成上述鹼可溶性樹脂A或B之上述重複結構單元X或X'以外之重複結構單元之基礎之單體,例如可例舉:(甲基)丙烯酸、2-(甲基)丙烯醯氧基乙基琥珀酸、順丁烯二酸、及伊康酸等含羧基單體;順丁烯二酸酐、及伊康酸酐等含羧酸酐基單體;(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸苄酯、(甲基)丙烯酸月桂酯、(甲基)丙烯酸羥基乙酯、(甲基)丙烯酸羥基丙酯、(甲基)丙烯酸乙氧基乙酯、及(甲基)丙烯酸環氧丙酯等(甲基)丙烯酸烷基酯;(甲基)丙烯酸環己酯、(甲基)丙烯酸異莰酯、及(甲基)丙烯酸二環戊烯酯等脂環式(甲基)丙烯酸酯等。又,可使用苯乙烯、環己基順丁烯二醯亞胺、苯基順丁烯二醯亞胺、甲基順丁烯二醯亞胺、乙基順丁烯二醯亞胺、正丁基順丁烯二醯亞胺、月桂基順丁烯二醯亞胺、及含聚矽氧單體等作為共聚單體。該等單體可單獨使用,亦可併用兩種以上。Examples of monomers that form the basis of repeating structural units other than the repeating structural unit X or X' constituting the above-mentioned alkali-soluble resin A or B include: (meth)acrylic acid, 2-(meth)acryl Carboxyl-containing monomers such as oxyethylsuccinic acid, maleic acid, and itaconic acid; carboxylic anhydride-containing monomers such as maleic anhydride and itaconic anhydride; methyl (meth)acrylate, ( Ethyl (meth)acrylate, propyl (meth)acrylate, butyl (meth)acrylate, benzyl (meth)acrylate, lauryl (meth)acrylate, hydroxyethyl (meth)acrylate, (meth)acrylate Alkyl (meth)acrylates such as hydroxypropyl acrylate, ethoxyethyl (meth)acrylate, and glycidyl (meth)acrylate; cyclohexyl (meth)acrylate, (meth)acrylate ) isocamphoryl acrylate, and alicyclic (meth)acrylates such as dicyclopentenyl (meth)acrylate, and the like. In addition, styrene, cyclohexylmaleimide, phenylmaleimide, methylmaleimide, ethylmaleimide, n-butylmaleimide, and n-butylmaleimide can be used. Diene imide, laurylmaleimide, polysiloxane-containing monomer, etc. are used as comonomers. These monomers may be used alone or in combination of two or more.

但是,上述鹼可溶性樹脂B不含具備如下分支側鏈之重複結構單元(以下亦稱為「重複結構單元Y」),該分支側鏈具有各者以自由基聚合性取代基結尾之2~3個末端。上述重複結構單元Y係國際公開第2018/169036號所記載之單體單元(1),詳細而言,上述各個自由基聚合性取代基例如分別於烴鏈(L)上進行取代,該烴鏈(L)例如經由-COO-基而鍵結於聚合物之主鏈。構成該烴鏈(L)之碳數例如為3~5個、3或4個、或者3個。上述自由基聚合性取代基例如為(甲基)丙烯醯氧基。However, the above-mentioned alkali-soluble resin B does not contain a repeating structural unit (hereinafter also referred to as "repeating structural unit Y") having a branched side chain having 2 to 3 substituents each terminated with a radically polymerizable substituent. ends. The above-mentioned repeating structural unit Y is the monomer unit (1) described in International Publication No. 2018/169036. Specifically, each of the above-mentioned free radically polymerizable substituents is substituted on the hydrocarbon chain (L), for example, the hydrocarbon chain (L) is bonded to the main chain of the polymer, for example, via a -COO- group. The number of carbons constituting the hydrocarbon chain (L) is, for example, 3 to 5, 3 or 4, or 3. The above radical polymerizable substituent is, for example, a (meth)acryloyloxy group.

本發明之鹼可溶性樹脂A或B例如可藉由如下方法(1)或者方法(2)等而合成:方法(1)係使含羧基化合物與「將含有含環氧基之(甲基)丙烯酸酯之單體組成物聚合而獲得之於側鏈具有環氧基之聚合物」反應,轉換成具有羥基之側鏈,然後使羧酸酐與上述羥基反應;方法(2)係使具有乙烯性不飽和基及羧基之化合物與「將含有含環氧基之(甲基)丙烯酸酯之單體組成物聚合而獲得之於側鏈具有環氧基之聚合物」反應,轉換成具有羥基及乙烯性不飽和基之側鏈,然後使具有異氰酸基等與羥基反應之官能基之化合物與上述羥基反應,進而使具有「羥基、硫醇基、及胺基等之與乙烯性不飽和基反應之官能基及羧基」之化合物與上述乙烯性不飽和基反應。Alkali-soluble resin A or B of the present invention can be synthesized, for example, by the following method (1) or method (2): method (1) is to make carboxyl-containing compounds and "(meth)acrylic acid containing epoxy groups Polymers with epoxy groups in the side chains obtained by polymerizing ester monomer compositions are converted into side chains with hydroxyl groups, and then the carboxylic anhydride is reacted with the above hydroxyl groups; Compounds with saturated groups and carboxyl groups react with "polymers having epoxy groups in side chains obtained by polymerizing monomer compositions containing epoxy-containing (meth)acrylates" to convert them into hydroxyl and vinyl compounds. The side chain of the unsaturated group, and then react the compound with the functional group such as isocyanate group and the hydroxyl group to react with the above-mentioned hydroxyl group, and then make the compound having the "hydroxyl group, thiol group, and amino group, etc., react with the ethylenically unsaturated group "functional group and carboxyl" compound reacts with the above-mentioned ethylenically unsaturated group.

上述鹼可溶性樹脂A或B可為由上述重複結構單元X或X'所構成之均聚物,又,亦可為由上述重複結構單元X或X'及其他重複結構單元所構成之無規共聚物、嵌段共聚物、交替共聚物、或週期性共聚物。The above-mentioned alkali-soluble resin A or B may be a homopolymer composed of the above-mentioned repeating structural unit X or X', and may also be a random copolymer composed of the above-mentioned repeating structural unit X or X' and other repeating structural units. compounds, block copolymers, alternating copolymers, or periodic copolymers.

上述鹼可溶性樹脂A或B中,上述重複結構單元X或X'之含量並無特別限制,基於即便於厚膜化之情形時亦形成顯影密接性及解析度優異之硬化膜之觀點、及即便於使用弱鹼性顯影液之情形時亦可於短時間內顯影之觀點考慮,於所有重複結構單元中較佳為5~50莫耳%,更佳為5~25莫耳%。In the above-mentioned alkali-soluble resin A or B, the content of the above-mentioned repeating structural unit X or X' is not particularly limited, and it is based on the viewpoint of forming a cured film excellent in developing adhesion and resolution even in the case of thickening the film, and even if From the viewpoint of being able to develop in a short time when using a weak alkaline developing solution, it is preferably 5-50 mol%, more preferably 5-25 mol% in all repeating structural units.

上述鹼可溶性樹脂A或B之重量平均分子量並無特別限制,基於感度及顯影性之觀點,較佳為5000~40000,更佳為5000~20000。上述重量平均分子量係使用凝膠滲透層析法(GPC)而測出之聚苯乙烯換算而成之值,係基於JIS 7252-4而測出之值。於後述實施例中記載之重量平均分子量亦係根據本項之記載而求出之值。The weight average molecular weight of the alkali-soluble resin A or B is not particularly limited, but is preferably 5,000-40,000, more preferably 5,000-20,000 from the viewpoint of sensitivity and developability. The above-mentioned weight average molecular weight is a value in terms of polystyrene measured using gel permeation chromatography (GPC), and is a value measured based on JIS 7252-4. The weight-average molecular weight described in the Examples described later is also a value obtained from the description in this section.

上述鹼可溶性樹脂A或B之酸值並無特別限制,基於即便於使用弱鹼性顯影液之情形時亦可於短時間內顯影之觀點考慮,較佳為20~120 mgKOH/g,更佳為20~80 mgKOH/g。The acid value of the above-mentioned alkali-soluble resin A or B is not particularly limited, and it is preferably 20-120 mgKOH/g, more preferably from the viewpoint that it can be developed in a short time even when a weak alkaline developer is used. It is 20-80 mgKOH/g.

本發明之感光性樹脂組成物至少含有上述鹼可溶性樹脂A及/或B、聚合性單體、及光聚合起始劑。The photosensitive resin composition of the present invention contains at least the above-mentioned alkali-soluble resin A and/or B, a polymerizable monomer, and a photopolymerization initiator.

上述鹼可溶性樹脂A及/或B相對於上述感光性樹脂組成物中所有固形物成分之含量之含有比例(於併用之情形時為合計)並無特別限制,基於即便於厚膜化之情形時亦形成顯影密接性及解析度優異之硬化膜之觀點、及即便於使用弱鹼性顯影液之情形時亦可於短時間內顯影之觀點考慮,通常為40~90質量%左右,較佳為40~80質量%,更佳為50~70質量%。The content ratio of the above-mentioned alkali-soluble resin A and/or B to the content of all solids in the above-mentioned photosensitive resin composition (total in the case of combined use) is not particularly limited, and is based on the fact that even in the case of thickening the film From the viewpoint of forming a cured film with excellent adhesion and resolution, and from the viewpoint of being able to develop in a short time even when a weak alkaline developer is used, it is usually about 40 to 90% by mass, preferably 40 to 80% by mass, more preferably 50 to 70% by mass.

上述聚合性單體並無特別限制,例如可例舉:壬基苯基卡必醇(甲基)丙烯酸酯、(甲基)丙烯酸2-羥基-3-苯氧基丙酯、2-乙基己基卡必醇(甲基)丙烯酸酯、(甲基)丙烯酸2-羥基乙酯、及N-乙烯基吡咯啶酮等單官能單體;二乙烯苯、鄰苯二甲酸二烯丙酯、及苯膦酸二烯丙酯(diallyl benzene phosphonate)等多官能芳香族乙烯系單體;(二)乙二醇二(甲基)丙烯酸酯、丙二醇二(甲基)丙烯酸酯、三羥甲基丙烷二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、新戊四醇二(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯、新戊四醇四(甲基)丙烯酸酯、二新戊四醇二(甲基)丙烯酸酯、二新戊四醇三(甲基)丙烯酸酯、二新戊四醇四(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯酸酯、及異氰尿酸參(羥乙基)酯之三(甲基)丙烯酸酯等多官能(甲基)丙烯酸酯等多官能單體。該等聚合性單體可單獨使用,亦可併用兩種以上。The aforementioned polymerizable monomers are not particularly limited, and examples include: nonylphenylcarbitol (meth)acrylate, 2-hydroxy-3-phenoxypropyl (meth)acrylate, 2-ethyl Monofunctional monomers such as hexyl carbitol (meth)acrylate, 2-hydroxyethyl (meth)acrylate, and N-vinylpyrrolidone; divinylbenzene, diallyl phthalate, and Diallyl benzene phosphonate and other polyfunctional aromatic vinyl monomers; (2) ethylene glycol di(meth)acrylate, propylene glycol di(meth)acrylate, trimethylolpropane Di(meth)acrylate, trimethylolpropane tri(meth)acrylate, neopentylthritol di(meth)acrylate, neopentylthritol tri(meth)acrylate, neopentylthritol tetra (Meth)acrylates, diperythritol di(meth)acrylates, diperythritol tri(meth)acrylates, diperythritol tetra(meth)acrylates, diperythritol tetra(meth)acrylates, Multi-functional (meth)acrylates such as alcohol penta(meth)acrylate, dipenteoerythritol hexa(meth)acrylate, and tri(meth)acrylate of ginseng (hydroxyethyl)isocyanurate and other multifunctional monomers. These polymerizable monomers may be used alone or in combination of two or more.

上述聚合性單體之含量並無特別限制,基於充分獲得本發明之效果之觀點,相對於上述鹼可溶性樹脂A及/或B之100質量份(於併用之情形時為合計)較佳為30~100質量份,更佳為40~80質量份,進而較佳為50~70質量份。The content of the above-mentioned polymerizable monomer is not particularly limited, and from the viewpoint of sufficiently obtaining the effects of the present invention, it is preferably 30 parts by mass relative to 100 parts by mass of the above-mentioned alkali-soluble resin A and/or B (total when used in combination). -100 mass parts, More preferably, it is 40-80 mass parts, More preferably, it is 50-70 mass parts.

上述光聚合起始劑並無特別限制,例如可例舉:安息香、安息香甲醚、安息香乙醚等安息香及其烷基醚類;苯乙酮、2,2-二甲氧基-2-苯基苯乙酮、1,1-二氯苯乙酮等苯乙酮類;2-甲基蒽醌、2-戊基蒽醌、2-第三丁基蒽醌、1-氯蒽醌等蒽醌類;2,4-二甲基9-氧硫

Figure 111104539-A0304-1
Figure 111104539-A0304-2
、2,4-二異丙基9-氧硫
Figure 111104539-A0304-1
Figure 111104539-A0304-2
、2-氯9-氧硫
Figure 111104539-A0304-1
Figure 111104539-A0304-2
等9-氧硫
Figure 111104539-A0304-1
Figure 111104539-A0304-2
類;苯乙酮二甲基縮酮、二苯乙二酮二甲基縮酮等縮酮類;二苯甲酮等二苯甲酮類;2-甲基-1-[4-(甲硫基)苯基]-2-
Figure 111104539-A0304-3
啉基-丙烷-1-酮或2-苄基-2-二甲胺基-1-(4-
Figure 111104539-A0304-3
啉基苯基)-丁酮-1;醯基氧化膦類及
Figure 111104539-A0304-1
酮類等。該等光聚合起始劑可單獨使用,亦可併用兩種以上。The above-mentioned photopolymerization initiator is not particularly limited, for example, benzoin, benzoin methyl ether, benzoin ether and other benzoin and its alkyl ethers; acetophenone, 2,2-dimethoxy-2-phenyl Acetophenones such as acetophenone and 1,1-dichloroacetophenone; anthraquinones such as 2-methylanthraquinone, 2-amylanthraquinone, 2-tert-butylanthraquinone, and 1-chloroanthraquinone Class; 2,4-dimethyl 9-oxosulfur
Figure 111104539-A0304-1
Figure 111104539-A0304-2
, 2,4-Diisopropyl 9-oxosulfur
Figure 111104539-A0304-1
Figure 111104539-A0304-2
, 2-chloro 9-oxysulfur
Figure 111104539-A0304-1
Figure 111104539-A0304-2
9-oxosulfur
Figure 111104539-A0304-1
Figure 111104539-A0304-2
ketals such as acetophenone dimethyl ketal and diphenyl ketone dimethyl ketal; benzophenones such as benzophenone; 2-methyl-1-[4-(methylsulfide Base) phenyl] -2-
Figure 111104539-A0304-3
Linyl-propan-1-one or 2-benzyl-2-dimethylamino-1-(4-
Figure 111104539-A0304-3
Linylphenyl)-butanone-1; Acylphosphine oxides and
Figure 111104539-A0304-1
Ketones etc. These photopolymerization initiators may be used alone or in combination of two or more.

上述光聚合起始劑之含量並無特別限制,相對於上述鹼可溶性樹脂A及/或B之100質量份(於併用之情形時為合計),較佳為0.1~5質量份,更佳為0.2~4質量份,進而較佳為0.5~3質量份。The content of the above-mentioned photopolymerization initiator is not particularly limited, but it is preferably 0.1 to 5 parts by mass, more preferably 0.2-4 mass parts, More preferably, it is 0.5-3 mass parts.

亦可向上述感光性樹脂組成物添加光聚合起始助劑。作為光聚合起始助劑,例如可例舉:異氰尿酸1,3,5-參(3-巰基丙醯氧基乙基)酯、異氰尿酸1,3,5-參(3-巰基丁氧基乙基)酯(昭和電工公司製造,Karenz MT(註冊商標)NR1)、三羥甲基丙烷參(3-巰基丙酸酯)等三官能硫醇化合物;新戊四醇肆(3-巰基丙酸酯)、新戊四醇肆(3-巰基丁酸酯)(昭和電工公司製造,Karenz MT(註冊商標)PEI)等四官能硫醇化合物;二新戊四醇陸(3-丙酸酯)等六官能硫醇化合物等多官能硫醇。該等光聚合起始助劑可單獨使用,亦可併用兩種以上。A photopolymerization start aid may also be added to the above-mentioned photosensitive resin composition. Examples of photopolymerization initiation aids include: 1,3,5-paraffin(3-mercaptopropionyloxyethyl)isocyanurate, 1,3,5-paraffin(3-mercapto Trifunctional thiol compounds such as butoxyethyl) ester (manufactured by Showa Denko, Karenz MT (registered trademark) NR1), trimethylolpropane (3-mercaptopropionate); -Mercaptopropionate), neopentylthritol tetrakis (3-mercaptobutyrate) (manufactured by Showa Denko, Karenz MT (registered trademark) PEI) and other tetrafunctional thiol compounds; propionate) and other polyfunctional thiols such as hexafunctional thiol compounds. These photopolymerization start aids may be used individually, and may use 2 or more types together.

亦可向上述感光性樹脂組成物添加熱聚合起始劑。作為熱聚合起始劑,例如可例舉:氫過氧化異丙苯、過氧化二異丙基苯、過氧化二第三丁基、過氧化月桂基、過氧化苯甲醯、過氧化異丙基碳酸第三丁酯、過氧化(2-乙基己酸)第三丁酯、過氧化(2-乙基己酸)第三戊酯等有機過氧化物;2,2'-偶氮雙(異丁腈)、1,1'-偶氮雙(環己甲腈)(1,1'-azobis(cyclohexanecarbonitrile))、2,2'-偶氮雙(2,4-二甲基戊腈)、2,2'-偶氮雙(2-甲基丙酸)二甲酯等偶氮化合物等。該等熱聚合起始劑可單獨使用,亦可併用兩種以上。A thermal polymerization initiator can also be added to the said photosensitive resin composition. Examples of thermal polymerization initiators include cumene hydroperoxide, dicumyl peroxide, di-tert-butyl peroxide, lauryl peroxide, benzoyl peroxide, and cumene peroxide. Organic peroxides such as tert-butyl carbonate, tert-butyl peroxide (2-ethylhexanoate), tertiary pentyl peroxide; 2,2'-azobis (isobutyronitrile), 1,1'-azobis (cyclohexanecarbonitrile) (1,1'-azobis (cyclohexanecarbonitrile)), 2,2'- azobis (2,4-dimethylvaleronitrile ), 2,2'-azobis(2-methylpropionate) dimethyl ester and other azo compounds, etc. These thermal polymerization initiators may be used alone or in combination of two or more.

亦可向上述感光性樹脂組成物添加不飽和聚酯、環氧丙烯酸酯、胺酯丙烯酸酯、聚酯丙烯酸酯等自由基聚合性低聚物;環氧樹脂等硬化性樹脂。Radical polymerizable oligomers such as unsaturated polyesters, epoxy acrylates, urethane acrylates, and polyester acrylates; hardening resins such as epoxy resins may also be added to the photosensitive resin composition.

上述感光性樹脂組成物亦可含有溶劑。作為溶劑,例如可例舉:四氫呋喃、二

Figure 111104539-A0304-4
烷、乙二醇二甲醚、二乙二醇二甲醚等醚類;丙酮、甲基乙基酮、甲基異丁基酮、環己酮等酮類;乙酸乙酯、乙酸丁酯、丙二醇單甲醚乙酸酯、乙酸3-甲氧基丁酯等酯類;甲醇、乙醇、異丙醇、正丁醇、乙二醇單甲醚、丙二醇單甲醚等醇類;甲苯、二甲苯、乙基苯等芳香族烴類;氯仿、二甲基亞碸等。該等溶劑可單獨使用,亦可併用兩種以上。再者,溶劑之含量根據使用該組成物時之最佳黏度適當地設定即可。The above-mentioned photosensitive resin composition may also contain a solvent. As a solvent, for example, tetrahydrofuran, di
Figure 111104539-A0304-4
Alkanes, ethylene glycol dimethyl ether, diethylene glycol dimethyl ether and other ethers; acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone and other ketones; ethyl acetate, butyl acetate, Propylene glycol monomethyl ether acetate, 3-methoxybutyl acetate and other esters; methanol, ethanol, isopropanol, n-butanol, ethylene glycol monomethyl ether, propylene glycol monomethyl ether and other alcohols; toluene, di Aromatic hydrocarbons such as toluene and ethylbenzene; Chloroform, dimethyl sulfide, etc. These solvents may be used alone or in combination of two or more. Furthermore, the content of the solvent may be appropriately set according to the optimum viscosity when using the composition.

上述感光性樹脂組成物亦可於不損害本發明之效果之範圍內含有氫氧化鋁、滑石、黏土、硫酸鋇等填充材料,染料、顏料、消泡劑、偶合劑、調平劑、增感劑、脫模劑、潤滑劑、塑化劑、抗氧化劑、紫外線吸收劑、阻燃劑、聚合抑制劑、增黏劑、及分散劑等公知之添加劑。The above-mentioned photosensitive resin composition may also contain fillers such as aluminum hydroxide, talc, clay, barium sulfate, dyes, pigments, defoamers, coupling agents, leveling agents, sensitizers, etc. within the range that does not impair the effects of the present invention. Known additives such as additives, mold release agents, lubricants, plasticizers, antioxidants, ultraviolet absorbers, flame retardants, polymerization inhibitors, tackifiers, and dispersants.

本發明之硬化物可藉由使上述感光性樹脂組成物硬化而獲得。作為上述硬化物之製造方法,例如可例舉如下方法:將上述感光性樹脂組成物注入至成型模具(樹脂模具),或者將上述感光性樹脂組成物塗覆於基材(基板)或各種功能層上,製成所需形狀,然後照射光(例如紫外線)而使上述感光性樹脂組成物硬化。硬化條件根據所使用之上述感光性樹脂組成物而適當調整。The cured product of the present invention can be obtained by curing the aforementioned photosensitive resin composition. As a method for producing the above-mentioned cured product, for example, the method of injecting the above-mentioned photosensitive resin composition into a molding die (resin mold), or coating the above-mentioned photosensitive resin composition on a base material (substrate) or various functional layer, formed into a desired shape, and then irradiated with light (such as ultraviolet rays) to harden the above-mentioned photosensitive resin composition. Curing conditions are appropriately adjusted according to the above-mentioned photosensitive resin composition used.

上述硬化物可適宜地用作光間隔件、間隔壁材料、透鏡材料、層間絕緣膜材料、保護膜材料、光波導材料、或平坦化膜材料,尤其是可適宜地用作光間隔件。The cured product described above can be suitably used as a photo-spacer, partition wall material, lens material, interlayer insulating film material, protective film material, optical waveguide material, or planarizing film material, especially as a photo-spacer.

光間隔件之形成方法並無特別限制,例如可將上述感光性樹脂組成物塗佈於玻璃或透明塑膠膜等基板,將其乾燥,形成塗膜,繼而利用光微影法(photolithography)來形成。於光微影法中,例如將光罩配置於塗膜上,照射紫外線,藉此使塗膜光硬化,將鹼性溶液散布於紫外線照射後之塗膜,溶解、去除未曝光部分,對殘餘之曝光部分進行水洗而進行顯影,藉此形成光間隔件。其後,可進行後烘烤。The method of forming the photo-spacer is not particularly limited. For example, the above-mentioned photosensitive resin composition can be coated on a substrate such as glass or transparent plastic film, dried to form a coating film, and then formed by photolithography. . In the photolithography method, for example, a photomask is placed on the coating film, and ultraviolet rays are irradiated to harden the coating film, and an alkaline solution is spread on the coating film after ultraviolet irradiation to dissolve and remove the unexposed part, and the remaining The exposed portion was washed with water and developed to form a photo-spacer. Thereafter, post-baking may be performed.

藉由使用本發明之感光性樹脂組成物,能夠以高顯影密接性及高解析度製造膜厚為10 μm以上、20 μm以上、30 μm以上、進而為50 μm以上之光間隔件。又,藉由使用本發明之感光性樹脂組成物,可製造縱橫比為4.0以上之光間隔件。又,本發明之感光性樹脂組成物即便於使用弱鹼性顯影液之情形時亦可於短時間內顯影,因此可以較佳之生產性製造光間隔件。 [實施例] By using the photosensitive resin composition of the present invention, it is possible to manufacture a photo-spacer with a film thickness of 10 μm or more, 20 μm or more, 30 μm or more, and furthermore, 50 μm or more with high development adhesion and high resolution. Moreover, by using the photosensitive resin composition of this invention, the photo-spacer whose aspect ratio is 4.0 or more can be manufactured. Moreover, since the photosensitive resin composition of this invention can develop in a short time even when using weak alkaline developing solution, it can manufacture a photo-spacer with good productivity. [Example]

以下,例舉實施例對本發明進行說明,但本發明並不因該等實施例而受任何限定。Hereinafter, although an Example is given and demonstrated to this invention, this invention is not limited by these Examples at all.

[合成例1]鹼可溶性樹脂1之合成 藉由下述製造方法,合成包含下述重複結構單元A及X1之鹼可溶性樹脂1。

Figure 02_image039
向具備加熱冷卻/攪拌裝置、回流冷凝管、及氮氣導入管之玻璃製燒瓶加入甲基丙烯酸環氧丙酯100 g、及丙二醇單甲醚乙酸酯212 g。用氮氣置換系統內之氣相部分,然後添加2,2'-偶氮雙(2,4-二甲基戊腈)17 g,於80℃進行加熱,於同一溫度反應8小時。向所獲得之溶液進而添加丙烯酸53.2 g、三苯基膦1.0 g、對苯二酚0.02 g、及丙二醇單甲醚乙酸酯6.0 g,於100℃反應16小時。反應後,向反應溶液進而添加琥珀酸酐3.7 g、及丙二醇單甲醚乙酸酯13.0 g,於65℃反應6小時,從而獲得包含45質量%鹼可溶性樹脂1之溶液。藉由GPC進行分子量測定,結果鹼可溶性樹脂1之重量平均分子量(Mw)為7,000。再者,分子量之測定係藉由凝膠滲透層析儀(東曹公司製造,產品編號:HLC-8120,管柱:G-5000HXL及G-3000HXL兩者連結,檢測器:RI,流動相:四氫呋喃)進行。以下亦以相同之方法測定重量平均分子量。又,鹼可溶性樹脂1之酸值為21 mgKOH/g。 [Synthesis Example 1] Synthesis of Alkali-Soluble Resin 1 Alkali-soluble resin 1 including the following repeating structural units A and X1 was synthesized by the following production method.
Figure 02_image039
100 g of glycidyl methacrylate and 212 g of propylene glycol monomethyl ether acetate were charged into a glass flask equipped with a heating/cooling/stirring device, a reflux condenser, and a nitrogen introduction tube. After substituting the gas phase portion in the system with nitrogen, 17 g of 2,2'-azobis(2,4-dimethylvaleronitrile) was added, heated at 80° C., and reacted at the same temperature for 8 hours. 53.2 g of acrylic acid, 1.0 g of triphenylphosphine, 0.02 g of hydroquinone, and 6.0 g of propylene glycol monomethyl ether acetate were further added to the obtained solution, and it was made to react at 100 degreeC for 16 hours. After the reaction, 3.7 g of succinic anhydride and 13.0 g of propylene glycol monomethyl ether acetate were further added to the reaction solution, and reacted at 65° C. for 6 hours to obtain a solution containing 45% by mass of the alkali-soluble resin 1 . As a result of measuring the molecular weight by GPC, the weight average molecular weight (Mw) of the alkali-soluble resin 1 was 7,000. Furthermore, the determination of the molecular weight is carried out by gel permeation chromatography (manufactured by Tosoh Corporation, product number: HLC-8120, column: G-5000HXL and G-3000HXL, detector: RI, mobile phase: THF). The weight average molecular weight is also measured by the same method below. Moreover, the acid value of the alkali-soluble resin 1 was 21 mgKOH/g.

[合成例2]鹼可溶性樹脂2之合成 除了將向反應溶液添加之琥珀酸酐之添加量變更為11.0 g、及丙二醇單甲醚乙酸酯之添加量變更為22.0 g以外,以與合成例1同樣之製造方法獲得包含45質量%鹼可溶性樹脂2之溶液。藉由GPC進行分子量測定,結果鹼可溶性樹脂2之重量平均分子量(Mw)為7,000。又,鹼可溶性樹脂2之酸值為54 mgKOH/g。 [Synthesis Example 2] Synthesis of Alkali-Soluble Resin 2 Except that the addition amount of succinic anhydride added to the reaction solution was changed to 11.0 g, and the addition amount of propylene glycol monomethyl ether acetate was changed to 22.0 g, a compound containing 45% by mass of alkali-soluble Solution of Resin 2. As a result of measuring the molecular weight by GPC, the weight average molecular weight (Mw) of the alkali-soluble resin 2 was 7,000. In addition, the acid value of the alkali-soluble resin 2 was 54 mgKOH/g.

[合成例3]鹼可溶性樹脂3之合成 除了將向反應溶液添加之琥珀酸酐之添加量變更為18.5 g、及丙二醇單甲醚乙酸酯之添加量變更為31.0 g以外,以與合成例1同樣之製造方法獲得包含45質量%鹼可溶性樹脂3之溶液。藉由GPC進行分子量測定,結果鹼可溶性樹脂3之重量平均分子量(Mw)為7,000。又,鹼可溶性樹脂3之酸值為66 mgKOH/g。 [Synthesis Example 3] Synthesis of Alkali-Soluble Resin 3 Except that the addition amount of succinic anhydride added to the reaction solution was changed to 18.5 g, and the addition amount of propylene glycol monomethyl ether acetate was changed to 31.0 g, a compound containing 45% by mass of alkali-soluble Solution of Resin 3. As a result of measuring the molecular weight by GPC, the weight average molecular weight (Mw) of the alkali-soluble resin 3 was 7,000. Moreover, the acid value of the alkali-soluble resin 3 was 66 mgKOH/g.

[合成例4]鹼可溶性樹脂4之合成 藉由下述製造方法合成包含下述重複結構單元A及X1之鹼可溶性樹脂4。

Figure 02_image041
向具備加熱冷卻/攪拌裝置、回流冷凝管、及氮氣導入管之玻璃制燒瓶加入甲基丙烯酸環氧丙酯100 g、及丙二醇單甲醚乙酸酯150 g。用氮氣置換系統內之氣相部分,然後添加2,2'-偶氮雙(2,4-二甲基戊腈)5.2 g,於80℃進行加熱,於同一溫度反應8小時。向所獲得之溶液進而添加丙烯酸53.2 g、三苯基膦2.0 g、對苯二酚0.02 g、及丙二醇單甲醚乙酸酯1.0 g,於100℃反應7小時。反應後,向反應溶液進而添加琥珀酸酐11 g、及丙二醇單甲醚乙酸酯9.3 g,於65℃反應6小時,從而獲得包含52質量%鹼可溶性樹脂4之溶液。藉由GPC進行分子量測定,結果鹼可溶性樹脂4之重量平均分子量(Mw)為13,000。又,鹼可溶性樹脂4之酸值為51 mgKOH/g。 [Synthesis Example 4] Synthesis of Alkali-Soluble Resin 4 Alkali-soluble resin 4 including the following repeating structural units A and X1 was synthesized by the following production method.
Figure 02_image041
100 g of glycidyl methacrylate and 150 g of propylene glycol monomethyl ether acetate were charged into a glass flask equipped with a heating/cooling/stirring device, a reflux condenser, and a nitrogen introduction tube. After substituting the gas phase in the system with nitrogen, 5.2 g of 2,2'-azobis(2,4-dimethylvaleronitrile) was added, heated at 80° C., and reacted at the same temperature for 8 hours. 53.2 g of acrylic acid, 2.0 g of triphenylphosphine, 0.02 g of hydroquinone, and 1.0 g of propylene glycol monomethyl ether acetate were further added to the obtained solution, and it was made to react at 100 degreeC for 7 hours. After the reaction, 11 g of succinic anhydride and 9.3 g of propylene glycol monomethyl ether acetate were further added to the reaction solution, and reacted at 65° C. for 6 hours to obtain a solution containing 52% by mass of alkali-soluble resin 4 . As a result of measuring the molecular weight by GPC, the weight average molecular weight (Mw) of the alkali-soluble resin 4 was 13,000. In addition, the acid value of the alkali-soluble resin 4 was 51 mgKOH/g.

[合成例5]鹼可溶性樹脂5之合成 藉由下述製造方法,合成包含下述重複結構單元A、B、及X2之鹼可溶性樹脂5。

Figure 02_image043
向具備加熱冷卻/攪拌裝置、回流冷凝管、及氮氣導入管之玻璃制燒瓶加入甲基丙烯酸環氧丙酯100 g、及丙二醇單甲醚乙酸酯160 g。用氮氣置換系統內之氣相部分,然後添加2,2'-偶氮雙(2,4-二甲基戊腈)7.5 g,於80℃進行加熱,於同一溫度反應8小時。向所獲得之溶液進而添加丙烯酸53.2 g、三苯基膦0.3 g、及對苯二酚0.02 g,於100℃反應15小時。反應後,向反應溶液進而添加甲基丙烯酸2-異氰酸基乙酯(昭和電工公司製造,Karenz MOI)87 g、對苯二酚0.01 g、及N,N'-二甲基苄胺0.1 g,於65℃反應15小時。反應後,向反應溶液進而添加巰基乙酸26.0 g、丙二醇單甲醚乙酸酯50 g、對苯二酚0.003 g、對甲氧基苯酚(p-methoxyphenol)0.5 g、及N,N'-二甲基苄胺0.5 g,於70℃反應20小時,從而獲得包含50質量%鹼可溶性樹脂5之溶液。藉由GPC進行分子量測定,結果鹼可溶性樹脂5之重量平均分子量(Mw)為28,000。又,鹼可溶性樹脂5之酸值為59 mgKOH/g。 [Synthesis Example 5] Synthesis of Alkali-Soluble Resin 5 Alkali-soluble resin 5 including the following repeating structural units A, B, and X2 was synthesized by the following production method.
Figure 02_image043
100 g of glycidyl methacrylate and 160 g of propylene glycol monomethyl ether acetate were charged into a glass flask equipped with a heating/cooling/stirring device, a reflux condenser, and a nitrogen introduction tube. After substituting the gas phase in the system with nitrogen, 7.5 g of 2,2'-azobis(2,4-dimethylvaleronitrile) was added, heated at 80° C., and reacted at the same temperature for 8 hours. 53.2 g of acrylic acid, 0.3 g of triphenylphosphine, and 0.02 g of hydroquinone were further added to the obtained solution, and it was made to react at 100 degreeC for 15 hours. After the reaction, 87 g of 2-isocyanatoethyl methacrylate (manufactured by Showa Denko, Karenz MOI), 0.01 g of hydroquinone, and 0.1 g of N,N'-dimethylbenzylamine were further added to the reaction solution. g, reacted at 65°C for 15 hours. After the reaction, 26.0 g of thioglycolic acid, 50 g of propylene glycol monomethyl ether acetate, 0.003 g of hydroquinone, 0.5 g of p-methoxyphenol, and N,N'-dimethoxyphenol were further added to the reaction solution. 0.5 g of methylbenzylamine was reacted at 70° C. for 20 hours to obtain a solution containing 50 mass % of alkali-soluble resin 5 . As a result of measuring the molecular weight by GPC, the weight average molecular weight (Mw) of the alkali-soluble resin 5 was 28,000. Moreover, the acid value of the alkali-soluble resin 5 was 59 mgKOH/g.

[合成例6]鹼可溶性樹脂6之合成 藉由下述製造方法,合成包含下述重複結構單元A及X3之鹼可溶性樹脂6。

Figure 02_image045
向具備加熱冷卻/攪拌裝置、回流冷凝管、及氮氣導入管之玻璃製燒瓶加入甲基丙烯酸環氧丙酯100 g、及丙二醇單甲醚乙酸酯212 g。用氮氣置換系統內之氣相部分,然後添加2,2'-偶氮雙(2,4-二甲基戊腈)17 g,於80℃進行加熱,於同一溫度反應8小時。向所獲得之溶液進而添加丙烯酸53.2 g、三苯基膦1.0 g、對苯二酚0.02 g、及丙二醇單甲醚乙酸酯6.0 g,於100℃反應16小時。反應後,向反應溶液進而添加5-降莰烯-2,3-二羧酸酐18.2 g、及丙二醇單甲醚乙酸酯31.0 g,於65℃反應19小時,從而獲得包含45質量%鹼可溶性樹脂6之溶液。藉由GPC進行分子量測定,結果鹼可溶性樹脂6之重量平均分子量(Mw)為8,000。又,鹼可溶性樹脂6之酸值為58 mgKOH/g。 [Synthesis Example 6] Synthesis of Alkali-Soluble Resin 6 Alkali-soluble resin 6 comprising the following repeating structural units A and X3 was synthesized by the following production method.
Figure 02_image045
100 g of glycidyl methacrylate and 212 g of propylene glycol monomethyl ether acetate were charged into a glass flask equipped with a heating/cooling/stirring device, a reflux condenser, and a nitrogen introduction tube. After substituting the gas phase portion in the system with nitrogen, 17 g of 2,2'-azobis(2,4-dimethylvaleronitrile) was added, heated at 80° C., and reacted at the same temperature for 8 hours. 53.2 g of acrylic acid, 1.0 g of triphenylphosphine, 0.02 g of hydroquinone, and 6.0 g of propylene glycol monomethyl ether acetate were further added to the obtained solution, and it was made to react at 100 degreeC for 16 hours. After the reaction, 18.2 g of 5-norbornene-2,3-dicarboxylic anhydride and 31.0 g of propylene glycol monomethyl ether acetate were further added to the reaction solution, and reacted at 65° C. for 19 hours to obtain an alkali-soluble compound containing 45% by mass. Solution of Resin 6. As a result of measuring the molecular weight by GPC, the weight average molecular weight (Mw) of the alkali-soluble resin 6 was 8,000. Moreover, the acid value of alkali-soluble resin 6 was 58 mgKOH/g.

[合成例7]鹼可溶性樹脂7之合成 向具備加熱冷卻/攪拌裝置、回流冷凝管、及氮氣導入管之玻璃製燒瓶加入甲基丙烯酸25.0 g、甲基丙烯酸甲酯12.8 g、甲基丙烯酸二環戊酯20.2 g、及丙二醇單甲醚乙酸酯94.6 g,然後添加2,2'-偶氮雙(2,4-二甲基戊腈)6.4 g,於氮氣環境下以80℃反應8小時。向所獲得之溶液進而添加甲基丙烯酸環氧丙酯12.3 g、對苯二酚0.2 g、及丙二醇單甲醚乙酸酯2.5 g,於100℃反應19小時,獲得包含45質量%鹼可溶性樹脂7之溶液。藉由GPC進行分子量測定,結果鹼可溶性樹脂7之重量平均分子量(Mw)為11,800。又,鹼可溶性樹脂7之酸值為107 mgKOH/g。 [Synthesis Example 7] Synthesis of Alkali-Soluble Resin 7 Put 25.0 g of methacrylic acid, 12.8 g of methyl methacrylate, 20.2 g of dicyclopentyl methacrylate, and propylene glycol monomethyl ether into a glass flask equipped with a heating/cooling/stirring device, a reflux condenser, and a nitrogen introduction tube After adding 94.6 g of acetate, 6.4 g of 2,2'-azobis(2,4-dimethylvaleronitrile) was added, and it was made to react at 80 degreeC under nitrogen atmosphere for 8 hours. 12.3 g of glycidyl methacrylate, 0.2 g of hydroquinone, and 2.5 g of propylene glycol monomethyl ether acetate were further added to the obtained solution, and reacted at 100° C. for 19 hours to obtain an alkali-soluble resin containing 45 mass % 7 solution. As a result of molecular weight measurement by GPC, the weight average molecular weight (Mw) of alkali-soluble resin 7 was 11,800. In addition, the acid value of the alkali-soluble resin 7 was 107 mgKOH/g.

[合成例8]鹼可溶性樹脂8之合成 向具備加熱冷卻/攪拌裝置、回流冷凝管、及氮氣導入管之玻璃製燒瓶加入甲基丙烯酸25.0 g、甲基丙烯酸甲酯22.6 g、甲基丙烯酸丁酯18.4 g、及丙二醇單甲醚乙酸酯99.0 g,然後添加2,2'-偶氮雙(2,4-二甲基戊腈)5.6 g,於氮氣環境下以80℃反應8小時。向所獲得之溶液進而添加甲基丙烯酸環氧丙酯18.4 g、對苯二酚0.2 g、及丙二醇單甲醚乙酸酯4.3 g,於100℃反應19小時,從而獲得包含45質量%鹼可溶性樹脂8之溶液。藉由GPC進行分子量測定,結果鹼可溶性樹脂8之重量平均分子量(Mw)為10,800。又,鹼可溶性樹脂8之酸值為106 mgKOH/g。 [Synthesis Example 8] Synthesis of Alkali-Soluble Resin 8 Add 25.0 g of methacrylic acid, 22.6 g of methyl methacrylate, 18.4 g of butyl methacrylate, and propylene glycol monomethyl ether acetic acid into a glass flask equipped with a heating/cooling/stirring device, a reflux condenser, and a nitrogen introduction tube After adding 99.0 g of ester, 5.6 g of 2,2'-azobis(2,4-dimethylvaleronitrile) was added, and it was made to react at 80 degreeC under nitrogen atmosphere for 8 hours. 18.4 g of glycidyl methacrylate, 0.2 g of hydroquinone, and 4.3 g of propylene glycol monomethyl ether acetate were further added to the obtained solution, and reacted at 100° C. for 19 hours to obtain an alkali-soluble compound containing 45% by mass. Solution of Resin 8. As a result of measuring the molecular weight by GPC, the weight average molecular weight (Mw) of the alkali-soluble resin 8 was 10,800. In addition, the acid value of alkali-soluble resin 8 was 106 mgKOH/g.

[合成例9]鹼可溶性樹脂9之合成 向具備加熱冷卻/攪拌裝置、回流冷凝管、及氮氣導入管之玻璃製燒瓶加入甲基丙烯酸環氧丙酯100 g、及丙二醇單甲醚乙酸酯212 g。用氮氣置換系統內之氣相部分,然後添加2,2'-偶氮雙(2,4-二甲基戊腈)17 g,於80℃進行加熱,於同一溫度反應8小時。向所獲得之溶液進而添加丙烯酸53.2 g、三苯基膦1.0 g、對苯二酚0.02 g、及丙二醇單甲醚乙酸酯6.0 g,於100℃反應12小時,從而獲得包含44質量%鹼可溶性樹脂9之溶液。藉由GPC進行分子量測定,結果鹼可溶性樹脂9之重量平均分子量(Mw)為9,000。又,鹼可溶性樹脂9之酸值為12 mgKOH/g。 [Synthesis Example 9] Synthesis of Alkali-Soluble Resin 9 100 g of glycidyl methacrylate and 212 g of propylene glycol monomethyl ether acetate were charged into a glass flask equipped with a heating/cooling/stirring device, a reflux condenser, and a nitrogen introduction tube. After substituting the gas phase portion in the system with nitrogen, 17 g of 2,2'-azobis(2,4-dimethylvaleronitrile) was added, heated at 80° C., and reacted at the same temperature for 8 hours. 53.2 g of acrylic acid, 1.0 g of triphenylphosphine, 0.02 g of hydroquinone, and 6.0 g of propylene glycol monomethyl ether acetate were further added to the obtained solution, and reacted at 100° C. for 12 hours to obtain a base containing 44% by mass. Solution of soluble resin 9. As a result of measuring the molecular weight by GPC, the weight average molecular weight (Mw) of the alkali-soluble resin 9 was 9,000. In addition, the acid value of alkali-soluble resin 9 was 12 mgKOH/g.

[合成例10]鹼可溶性樹脂10之合成 添加1,2,4-苯三甲酸酐14.2 g代替5-降莰烯-2,3-二羧酸酐18.2 g,將丙二醇單甲醚乙酸酯之添加量從31.0 g變更為26.2 g,除此以外以與合成例6同樣之製造方法獲得包含45質量%鹼可溶性樹脂10之溶液。藉由GPC進行分子量測定,結果鹼可溶性樹脂10之重量平均分子量(Mw)為16,000。又,鹼可溶性樹脂10之酸值為62 mgKOH/g。 [Synthesis Example 10] Synthesis of Alkali-Soluble Resin 10 Add 14.2 g of 1,2,4-benzenetricarboxylic anhydride instead of 18.2 g of 5-norbornene-2,3-dicarboxylic anhydride, change the amount of propylene glycol monomethyl ether acetate from 31.0 g to 26.2 g, and Other than that, the solution containing the alkali-soluble resin 10 of 45 mass % was obtained by the manufacturing method similar to the synthesis example 6. As a result of measuring the molecular weight by GPC, the weight average molecular weight (Mw) of the alkali-soluble resin 10 was 16,000. Moreover, the acid value of the alkali-soluble resin 10 was 62 mgKOH/g.

實施例1~7、及比較例1~3 [感光性樹脂組成物之製備] 混合包含45質量%鹼可溶性樹脂1之上述溶液100質量份、二新戊四醇六丙烯酸酯(日本化藥公司製造,KAYARAD DPHA)60質量份、光聚合起始劑(LAMBSON公司製造,SPEEDCURE TPO)1.6質量份、光聚合起始劑(BASF Japan股份有限公司,Irgacure OXE01)1.0質量份、及界面活性劑(BYK製造,BYK-307)0.2質量份,製備組成物中之固形物成分為50%之感光性樹脂組成物(實施例1)。除了使用包含上述各質量%鹼可溶性樹脂2~10之上述各溶液100質量份代替包含45質量%鹼可溶性樹脂1之上述溶液100質量份以外,以與上述同樣之方法製備組成物中之固形物成分為50%之感光性樹脂組成物(實施例2~7及比較例1~3)。 Examples 1-7, and Comparative Examples 1-3 [Preparation of photosensitive resin composition] 100 parts by mass of the above solution containing 45% by mass of alkali-soluble resin 1, 60 parts by mass of diperythritol hexaacrylate (manufactured by Nippon Kayaku Co., Ltd., KAYARAD DPHA), and a photopolymerization initiator (manufactured by LAMBSON, SPEEDCURE TPO) were mixed. ) 1.6 parts by mass, photopolymerization initiator (BASF Japan Co., Ltd., Irgacure OXE01) 1.0 parts by mass, and surfactant (manufactured by BYK, BYK-307) 0.2 parts by mass, the solid content in the prepared composition was 50 % of the photosensitive resin composition (embodiment 1). The solid matter in the composition was prepared in the same manner as above, except that 100 parts by mass of each of the above-mentioned solutions containing 2 to 10 mass % of the above-mentioned alkali-soluble resin was used instead of 100 parts by mass of the above-mentioned solution containing 45 mass % of alkali-soluble resin 1 50% photosensitive resin composition (Examples 2-7 and Comparative Examples 1-3).

[顯影性之評價] 使用旋轉塗佈機,將於實施例1~7及比較例1~3中製備之感光性樹脂組成物分別塗佈於10 cm×10 cm見方之各玻璃基板上,形成膜厚為30 μm之塗膜,將該塗膜於90℃之加熱板上加熱2分鐘,將溶劑完全去除。其後,針對所獲得之塗膜,使用0.3%Na 2CO 3水溶液進行鹼性顯影,將塗膜被溶解去除之時間作為最短顯影時間,進行顯影性之評價。可認為該值越小,顯影性越優異。根據以下基準劃分等級。 A:最短顯影時間為60秒以內 B:最短顯影時間超過60秒且為80秒以內 C:最短顯影時間超過80秒且為100秒以內 F:最短顯影時間超過100秒 [Evaluation of developability] Using a spin coater, the photosensitive resin compositions prepared in Examples 1 to 7 and Comparative Examples 1 to 3 were coated on glass substrates of 10 cm x 10 cm square to form For a coating film with a film thickness of 30 μm, heat the coating film on a hot plate at 90°C for 2 minutes to completely remove the solvent. Thereafter, the obtained coating film was subjected to alkaline development using a 0.3% Na 2 CO 3 aqueous solution, and the time taken for the coating film to be dissolved and removed was regarded as the shortest developing time to evaluate developability. It is considered that the smaller this value is, the more excellent the developability is. Grades are assigned based on the following criteria. A: The shortest developing time is within 60 seconds B: The shortest developing time exceeds 60 seconds and is within 80 seconds C: The shortest developing time exceeds 80 seconds and is within 100 seconds F: The shortest developing time exceeds 100 seconds

[光間隔件之製作] 使用旋轉塗佈機,調整旋轉塗佈機之轉速,以使形成後之光間隔件之高度成為30 μm之方式將實施例1~7及比較例1~3中製備之各感光性樹脂組成物塗佈於10 cm×10 cm見方之各玻璃基板上,分別形成塗膜,將各塗膜於100℃之加熱板上加熱2分鐘,將溶劑完全去除。其後,針對所獲得之各塗膜,通過「具有每1 cm 2為100個且於直徑4~30 μm之範圍內以1 μm為刻度之開口部」之光間隔件形成用光罩,以100 mJ/cm 2照射超高壓水銀燈之光(以i線換算照度為21 mW/cm 2)。再者,以100 μm之「光罩與基板之間隔(曝光間隙)」進行曝光。其後,使用0.3%之Na 2CO 3水溶液進行鹼性顯影。顯影時間為藉由上述方法測定之最短顯影時間之1.5倍。水洗之後,於230℃進行30分鐘之後烘烤,從而形成光間隔件。 [Production of Photo-Spacer] Using a spin coater, adjust the rotation speed of the spin coater so that the height of the photo-spacer after formation becomes 30 μm. Prepared in Examples 1-7 and Comparative Examples 1-3 Each photosensitive resin composition was coated on each glass substrate of 10 cm×10 cm square to form a coating film respectively, and each coating film was heated on a heating plate at 100°C for 2 minutes to completely remove the solvent. Thereafter, each of the obtained coating films was passed through a photomask for forming a photo-spacer having 100 openings per 1 cm 2 with a gradation of 1 μm in the range of 4 to 30 μm in diameter. 100 mJ/cm 2 is irradiated with the light of the ultra-high pressure mercury lamp (the illuminance is 21 mW/cm 2 in terms of i-line conversion). Furthermore, exposure was performed with a "gap between the mask and substrate (exposure gap)" of 100 μm. Thereafter, alkaline development was performed using a 0.3% Na 2 CO 3 aqueous solution. The developing time is 1.5 times of the shortest developing time measured by the above-mentioned method. After washing with water, post-baking was performed at 230° C. for 30 minutes to form a photo-spacer.

[顯影密接性之評價] 將藉由上述方法形成之光間隔件中,未藉由顯影去除而形成之最小圖案之線寬作為顯影密接性進行評價。可認為該值越小,顯影密接性越優異。根據以下基準劃分等級。 A:最小圖案未達15 μm B:最小圖案為15 μm以上且未達20 μm C:最小圖案為20 μm以上 F:無法顯影 [Evaluation of developer adhesion] In the photo-spacer formed by the above method, the line width of the smallest pattern formed without being removed by development was evaluated as development adhesion. It is considered that the smaller this value is, the more excellent the image development adhesiveness is. Grades are assigned based on the following criteria. A: The smallest pattern is less than 15 μm B: The minimum pattern is more than 15 μm and less than 20 μm C: Minimum pattern is 20 μm or more F: Unable to develop

[表1]    鹼可溶性樹脂 最短顯影時間 顯影密接性 種類 重複結構單元X或X'之含量 (莫耳%) 重量平均分子量 酸值 (mgKOH/g) 實施例1 1 5 7,000 21 B (70 s) A (10 μm) 實施例2 2 15 7,000 54 A (50 s) A (8 μm) 實施例3 3 25 7,000 66 B (70 s) A (10 μm) 實施例4 4 15 13,000 51 A (50 s) A (8 μm) 實施例5 5 40 28,000 59 B (70 s) A (12 μm) 實施例6 6 15 8,000 58 A (60 s) A (8 μm) 實施例7 10 10 16,000 62 B (80 s) B (15 μm) 比較例1 7 0 11,800 107 F (230 s) C (20 μm) 比較例2 8 0 10,800 106 F (180 s) C (20 μm) 比較例3 9 0 9,000 12 F (>>400 s) F [Table 1] Alkali soluble resin Minimum developing time Developing Adhesiveness type Content of repeating structural unit X or X' (mole %) Weight average molecular weight Acid value (mgKOH/g) Example 1 1 5 7,000 twenty one B (70s) A (10 μm) Example 2 2 15 7,000 54 A (50s) A (8 μm) Example 3 3 25 7,000 66 B (70s) A (10 μm) Example 4 4 15 13,000 51 A (50s) A (8 μm) Example 5 5 40 28,000 59 B (70s) A (12 μm) Example 6 6 15 8,000 58 A (60s) A (8 μm) Example 7 10 10 16,000 62 B (80s) B (15 μm) Comparative example 1 7 0 11,800 107 F (230s) C (20μm) Comparative example 2 8 0 10,800 106 F (180s) C (20μm) Comparative example 3 9 0 9,000 12 F (>>400s) f

根據表1之結果,可知於在形成圖案高度為30 μm左右之厚膜圖案時使用弱鹼性顯影液之情形時,與比較例1~3之感光性樹脂組成物相比,實施例1~7之感光性樹脂組成物可於短時間內顯影,且可形成顯影密接性優異之硬化膜。 [產業上之可利用性] According to the results in Table 1, it can be seen that in the case of using a weakly alkaline developing solution when forming a thick film pattern with a pattern height of about 30 μm, compared with the photosensitive resin compositions of Comparative Examples 1 to 3, Examples 1 to 3 are more effective. The photosensitive resin composition of 7 can be developed in a short time, and can form a cured film with excellent adhesiveness after development. [Industrial availability]

本發明之鹼可溶性樹脂、及含有該鹼可溶性樹脂之感光性樹脂組成物可適宜地用作光間隔件、間隔壁材料、透鏡材料、層間絕緣膜材料、保護膜材料、光波導材料、或平坦化膜材料之原料。The alkali-soluble resin of the present invention and the photosensitive resin composition containing the alkali-soluble resin can be suitably used as a photo-spacer, a partition wall material, a lens material, an interlayer insulating film material, a protective film material, an optical waveguide material, or a planar The raw material of chemical film material.

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Claims (14)

一種鹼可溶性樹脂,其包含一種以上由下述通式(1)所表示之重複結構單元X,
Figure 03_image047
(式中,R 1為氫或甲基,R 2為碳數為1以上之連結基,R 3為鍵結於上述連結基之碳原子之由下述通式(2)所表示之有機基,R 4為鍵結於上述連結基之碳原子之羥基或有機基),
Figure 03_image049
(式中,R 5為母體之碳數為3~8且包含雜原子之有機基、或母體之碳數為2~7且具有羧基之有機基)。
An alkali-soluble resin comprising one or more repeating structural units X represented by the following general formula (1),
Figure 03_image047
(In the formula, R1 is hydrogen or a methyl group, R2 is a linking group with a carbon number of 1 or more, and R3 is an organic group represented by the following general formula (2) bonded to the carbon atom of the linking group , R 4 is a hydroxyl group or an organic group bonded to the carbon atom of the above linking group),
Figure 03_image049
(In the formula, R 5 is an organic group whose parent has 3 to 8 carbon atoms and contains a heteroatom, or an organic group whose parent has 2 to 7 carbon atoms and has a carboxyl group).
一種鹼可溶性樹脂,其包含一種以上由下述通式(1')所表示之重複結構單元X',但不包含具備如下分支側鏈之重複結構單元,該分支側鏈具有各者以自由基聚合性取代基結尾之2~3個末端,
Figure 03_image051
(式中,R 1為氫或甲基,R 2為碳數為1以上之連結基,R 3'為鍵結於上述連結基之碳原子之由下述通式(2')所表示之有機基,R 4為鍵結於上述連結基之碳原子之羥基或有機基),
Figure 03_image053
(式中,R 5'為母體之碳數為2~7之烴基、母體之碳數為3~8且包含雜原子之有機基、或母體之碳數為2~7且具有羧基之有機基)。
An alkali-soluble resin comprising one or more repeating structural units X' represented by the following general formula (1'), but excluding repeating structural units having branched side chains each having a free radical 2 to 3 ends of the end of the polymerizable substituent,
Figure 03_image051
(In the formula, R 1 is hydrogen or methyl, R 2 is a linking group with a carbon number of 1 or more, and R 3' is a carbon atom bonded to the above linking group represented by the following general formula (2') An organic group, R4 is a hydroxyl group or an organic group bonded to the carbon atom of the above - mentioned linking group),
Figure 03_image053
(wherein, R 5' is a hydrocarbon group whose parent body has 2 to 7 carbon atoms, an organic group whose parent body has 3 to 8 carbon atoms and contains heteroatoms, or an organic group whose parent body has 2 to 7 carbon atoms and has a carboxyl group ).
如請求項1或2之鹼可溶性樹脂,其中,上述R 2之連結基為母體之碳數為1~10之烴基、或母體之碳數為1~10且包含雜原子之有機基。 The alkali-soluble resin according to claim 1 or 2 , wherein the above-mentioned linking group of R2 is a hydrocarbon group whose parent body has 1 to 10 carbon atoms, or an organic group whose parent body has 1 to 10 carbon atoms and contains heteroatoms. 如請求項1至3中任一項之鹼可溶性樹脂,其中,上述R 4之有機基為包含選自由丙烯醯氧基、甲基丙烯醯氧基、醯氧基、醯胺氧基、烷氧基、芳氧基、胺基、及含氮雜環所組成之群中之一種以上官能基之有機基。 The alkali-soluble resin according to any one of claim items 1 to 3 , wherein the organic group of the above-mentioned R4 is selected from the group consisting of acryloxy, methacryloxy, acyloxy, amidooxy, alkoxy An organic group with more than one functional group in the group consisting of aryloxy group, amine group, and nitrogen-containing heterocyclic ring. 如請求項1或2之鹼可溶性樹脂,其中,上述R 2之連結基為母體之碳數為1~7之烴基、或母體之碳數為1~7且包含雜原子之有機基,且 上述R 4為鍵結於上述R 2之連結基之碳原子之羥基、丙烯醯氧基、或甲基丙烯醯氧基。 The alkali-soluble resin as claimed in claim 1 or 2 , wherein the linking group of the above-mentioned R2 is a hydrocarbon group with a carbon number of 1 to 7 in the parent body, or an organic group with a carbon number in the parent body of 1 to 7 and containing heteroatoms, and the above-mentioned R 4 is a hydroxyl group, acryloxy group, or methacryloxy group bonded to the carbon atom of the linking group of R 2 . 如請求項1之鹼可溶性樹脂,其中,上述R 2之連結基為母體之碳數為1~7之烴基、或母體之碳數為1~7且包含雜原子之有機基, 上述R 5為由下述通式(3)所表示之有機基,且 上述R 4為鍵結於上述R 2之連結基之碳原子之羥基、丙烯醯氧基、甲基丙烯醯氧基、或由下述通式(4)所表示之有機基,
Figure 03_image055
(式中,R 6及R 7分別獨立地為母體之碳數為1~6之烴基,R 6及R 7之母體之合計碳數為3~8),
Figure 03_image057
(式中,R 8為氫或甲基,R 9為母體之碳數為1~5之烴基、或母體之碳數為1~5且包含雜原子之有機基)。
The alkali-soluble resin according to claim 1 , wherein the linking group of the above-mentioned R2 is a hydrocarbon group with a parent carbon number of 1-7, or an organic group with a parent carbon number of 1-7 and containing heteroatoms, and the above - mentioned R5 is An organic group represented by the following general formula ( 3 ), and the above-mentioned R4 is a hydroxyl group, an acryloxy group, a methacryloxy group bonded to the carbon atom of the linking group of the above - mentioned R2, or the following The organic group represented by the general formula (4),
Figure 03_image055
(In the formula, R 6 and R 7 are independently a hydrocarbon group whose parent body has 1 to 6 carbon atoms, and the total carbon number of the parent body of R 6 and R 7 is 3 to 8),
Figure 03_image057
(wherein, R 8 is hydrogen or methyl, and R 9 is a hydrocarbon group whose parent has 1 to 5 carbons, or an organic group whose parent has 1 to 5 carbons and contains heteroatoms).
如請求項2之鹼可溶性樹脂,其中,上述R 2之連結基為母體之碳數為1~7之烴基、或母體之碳數為1~7且包含雜原子之有機基, 上述R 5'為由下述通式(3)所表示之有機基,且 上述R 4為鍵結於上述R 2之連結基之碳原子之羥基、丙烯醯氧基、甲基丙烯醯氧基、或由下述通式(4)所表示之有機基,
Figure 03_image059
(式中,R 6及R 7分別獨立地為母體之碳數為1~6之烴基,R 6及R 7之母體之合計碳數為3~8),
Figure 03_image061
(式中,R 8為氫或甲基,R 9為母體之碳數為1~5之烴基、或母體之碳數為1~5且包含雜原子之有機基)。
The alkali-soluble resin of claim 2, wherein the linking group of the above-mentioned R 2 is a hydrocarbon group with a carbon number of 1 to 7 as a parent, or an organic group with a carbon number of 1 to 7 and containing heteroatoms, and the above R 5' is an organic group represented by the following general formula ( 3 ), and the above-mentioned R4 is a hydroxyl group, an acryloxyl group, a methacryloxyl group that is bonded to the carbon atom of the linking group of the above - mentioned R2, or the following The organic group represented by general formula (4),
Figure 03_image059
(In the formula, R 6 and R 7 are independently a hydrocarbon group whose parent body has 1 to 6 carbon atoms, and the total carbon number of the parent body of R 6 and R 7 is 3 to 8),
Figure 03_image061
(wherein, R 8 is hydrogen or methyl, and R 9 is a hydrocarbon group whose parent has 1 to 5 carbons, or an organic group whose parent has 1 to 5 carbons and contains heteroatoms).
如請求項1至7中任一項之鹼可溶性樹脂,其中,上述重複結構單元X或X'之含量於所有重複結構單元中為5~50莫耳%。The alkali-soluble resin according to any one of claims 1 to 7, wherein the content of the repeating structural unit X or X' is 5-50 mol% in all repeating structural units. 如請求項1至8中任一項之鹼可溶性樹脂,其中,上述鹼可溶性樹脂之酸值為20~120 mgKOH/g。The alkali-soluble resin according to any one of claims 1 to 8, wherein the acid value of the above-mentioned alkali-soluble resin is 20-120 mgKOH/g. 如請求項1至9中任一項之鹼可溶性樹脂,其中,上述鹼可溶性樹脂之重量平均分子量為5000~40000。The alkali-soluble resin according to any one of claims 1 to 9, wherein the weight average molecular weight of the above-mentioned alkali-soluble resin is 5,000-40,000. 一種感光性樹脂組成物,其至少含有請求項1至10中任一項之鹼可溶性樹脂、聚合性單體、及光聚合起始劑。A photosensitive resin composition comprising at least the alkali-soluble resin according to any one of claims 1 to 10, a polymerizable monomer, and a photopolymerization initiator. 一種硬化物,其係由請求項11之感光性樹脂組成物獲得。A hardened product obtained from the photosensitive resin composition of claim 11. 如請求項12之硬化物,其中,上述硬化物為光間隔件(photospacer)、間隔壁材料、透鏡材料、層間絕緣膜材料、保護膜材料、光波導材料、或平坦化膜材料。The cured product according to claim 12, wherein the cured product is a photospacer, a partition wall material, a lens material, an interlayer insulating film material, a protective film material, an optical waveguide material, or a planarizing film material. 一種影像顯示裝置,其包含請求項12或13之硬化物。An image display device comprising the cured product of claim 12 or 13.
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