TW202244019A - Glass substrate manufacruting device and tube member - Google Patents

Glass substrate manufacruting device and tube member Download PDF

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TW202244019A
TW202244019A TW111111564A TW111111564A TW202244019A TW 202244019 A TW202244019 A TW 202244019A TW 111111564 A TW111111564 A TW 111111564A TW 111111564 A TW111111564 A TW 111111564A TW 202244019 A TW202244019 A TW 202244019A
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axial direction
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convex
length
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TWI806522B (en
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林智陽
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日商安瀚視特控股股份有限公司
安瀚視特股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B5/00Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
    • C03B5/16Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
    • C03B5/167Means for preventing damage to equipment, e.g. by molten glass, hot gases, batches
    • C03B5/1672Use of materials therefor
    • C03B5/1675Platinum group metals
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B5/00Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
    • C03B5/16Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
    • C03B5/20Bridges, shoes, throats, or other devices for withholding dirt, foam, or batch

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Catalysts (AREA)
  • Exhaust Silencers (AREA)

Abstract

The present invention provides a glass substrate manufacturing device capable of suppressing local stress concentration in a corrugated portion having radial unevenness formed in a tubular member. The glass substrate manufacturing device includes: a tubular member made of a material containing a platinum group metal and having a peripheral wall extending in the axial direction. A part of the wall portion in the axial direction includes: at least one corrugated portion having radial unevenness of the wall portion formed alternately in the axial direction and continuous in the circumferential direction. Among the corrugated portions, the convex portion that is convex in the radial direction has a first convex portion having the highest convex height and a pair of second convex portions arranged on both sides in the axial direction relative to the first convex portion and having a convex height lower than that of the first convex portion. The concave portion that is concave in the radial direction of the corrugated portion has a pair of first concave portions positioned between the first convex portion and the second convex portion. In a cross-section of the wall of the plane extending axially and radially, the length of each first concave portion is greater than the length of the first convex portion.

Description

玻璃基板製造裝置及管構件Glass substrate manufacturing device and pipe member

本發明係關於一種處理熔融玻璃之管構件、及具備管構件之玻璃基板製造裝置。The present invention relates to a pipe member for processing molten glass, and a glass substrate manufacturing apparatus provided with the pipe member.

用於液晶顯示器、有機EL(Electroluminescent:電致發光)顯示器等顯示器之玻璃基板經由對將玻璃原料熔解且製造之熔融玻璃,進行移送、澄清、均質化等處理後,成形為板狀之步驟而製造。Glass substrates used in displays such as liquid crystal displays and organic EL (Electroluminescent: Electroluminescent) displays are processed by transferring, clarifying, and homogenizing the molten glass produced by melting glass raw materials, and then forming it into a plate shape. manufacture.

為了處理熔融玻璃,使用管構件。管構件具有於軸向延伸之周狀之壁部,且一面流動熔融玻璃一面進行處理。作為此種管構件,例如,於進行熔融玻璃之澄清之澄清管中,於空開間隔地設置於壁部之一對電極之間流動電流,而將澄清管加熱,藉此進行將熔融玻璃設為適於澄清之溫度。於進行此種澄清管之加熱時,為了抑制電極變得溫度過高,而使電極形成為於外周側突狀延伸之凸緣狀,可進行散熱。又,於澄清管中,有為了將澄清中自熔融玻璃釋放之氧氣等氣體排出至外部,而設置有於外周側突狀延伸之通氣管之情形。For handling molten glass, pipe members are used. The pipe member has a circumferential wall portion extending in the axial direction, and processes molten glass while flowing it. As such a tube member, for example, in a clarification tube for clarification of molten glass, an electric current is flowed between a pair of electrodes provided at a wall at intervals, and the clarification tube is heated, whereby the molten glass is set. A temperature suitable for clarification. When heating such a clarification tube, in order to prevent the temperature of the electrode from becoming too high, the electrode is formed in the shape of a flange extending protrudingly from the outer peripheral side, so that heat can be dissipated. Moreover, in order to discharge gas, such as oxygen released from molten glass during clarification, to the outside, the clarification pipe may be provided with the vent pipe which protrudes from the outer peripheral side.

另一方面,於管構件之周圍,以包圍管構件之壁部之方式配置有耐火磚等支持體。設置於澄清管之上述凸緣或通氣管等構件配置為於耐火磚之間延伸。因此,為了作業而將澄清管升溫時,凸緣或通氣管受耐火磚約束,因而使澄清管之軸向之膨脹受限制,產生內部應力,且應力容易集中於凸緣或通氣管與澄清管之連接部分。其結果,施加較斷裂應力更高之應力時,有於上述連接部分產生龜裂,使熔融玻璃自該處漏出至外部之問題。又,即便應力未達斷裂應力,亦有使澄清管之疲勞加劇,且澄清管之壽命縮短之風險。On the other hand, supports such as refractory bricks are arranged around the pipe member so as to surround the wall portion of the pipe member. Members, such as the said flange provided in the clarification pipe, and a ventilation pipe, are arrange|positioned so that it may extend between refractory bricks. Therefore, when the clarification pipe is heated up for operation, the flange or vent pipe is bound by refractory bricks, thus restricting the axial expansion of the clarification pipe, generating internal stress, and the stress is easy to concentrate on the flange or vent pipe and the clarification pipe the connection part. As a result, when a stress higher than the fracture stress is applied, there is a problem that cracks are generated in the above-mentioned connecting portion, and the molten glass leaks from the portion to the outside. Also, even if the stress does not reach the fracture stress, there is a risk that the fatigue of the clarifier tube will be increased and the life of the clarifier tube may be shortened.

先前,已知移送熔融玻璃之管構件有因熱而受到軸向之壓縮應力導致挫曲之虞,因而於熔融玻璃用導管,於軸向設置至少一個以上於周向連續之凸部(專利文獻1)。又,已知有為了對暴露於高運轉溫度之壁薄之薄板構造體之形狀剛性較低之情況進行補償,而對構造體之薄板進行波形賦予等(專利文獻2)。 [先前技術文獻] [專利文獻] Previously, it was known that a pipe member for transferring molten glass may be buckled due to axial compressive stress due to heat. Therefore, at least one convex portion continuous in the circumferential direction is provided in the axial direction in the conduit for molten glass (Patent Document 1). In addition, it is known that corrugation is applied to the thin plate of the structure in order to compensate for the low shape rigidity of the thin plate structure exposed to high operating temperature (Patent Document 2). [Prior Art Literature] [Patent Document]

[專利文獻1]國際公開第2004/070251號 [專利文獻2]日本專利特開2002-205123號公報 [Patent Document 1] International Publication No. 2004/070251 [Patent Document 2] Japanese Patent Laid-Open No. 2002-205123

[發明所欲解決之問題][Problem to be solved by the invention]

於專利文獻1及2記載之管構件中,已知於限制管構件之熱膨脹而於管構件產生內部應力之情形時,於上述凸部或波形之部分產生之應力容易集中於凸部或波形之部分之一部分區域。此種局部之應力集中提高上述凸部或波形之部分斷裂之風險,且提高熔融玻璃自該處漏出至外部之風險。In the pipe members described in Patent Documents 1 and 2, it is known that when thermal expansion of the pipe member is restricted and internal stress is generated in the pipe member, the stress generated at the above-mentioned convex portion or corrugated portion tends to concentrate on the convex portion or corrugated portion. A part of a part of an area. Such localized stress concentration increases the risk of partial breakage of the above-mentioned convex portion or wave, and increases the risk of molten glass leaking from there to the outside.

因此,本發明之目的在於,提供一種可抑制形成於管構件之具有徑向之凹凸之波形狀部中之局部之應力集中的玻璃基板製造裝置。 [解決問題之技術手段] Therefore, an object of the present invention is to provide a glass substrate manufacturing apparatus capable of suppressing local stress concentration formed in a corrugated portion having radial unevenness of a pipe member. [Technical means to solve the problem]

本發明之一態樣為玻璃基板製造裝置。 玻璃基板製造裝置之特徵在於具備:管構件,其由包含鉑族金屬之材料組成,且具有於軸向延伸之周狀之壁部;且 上述壁部於上述軸向之一部分區域,包含:至少1個波形狀部,其以於上述軸向交替排列且於周向連續之方式形成,具有上述壁部之徑向之凹凸; 上述波形狀部中朝徑向凸出之凸部具有凸出高度為最高之第1凸部、與相對於上述第1凸部配置於上述軸向之兩側,且凸出高度較上述第1凸部更低之一對第2凸部; 上述波形狀部中朝徑向凹陷之凹部具有位於上述第1凸部與上述第2凸部之間之一對第1凹部; 於沿著朝上述軸向及上述徑向延伸之平面的上述壁部之剖面中,上述第1凹部各者之長度較上述第1凸部之長度為長。 One aspect of the present invention is a glass substrate manufacturing apparatus. A glass substrate manufacturing apparatus characterized by comprising: a pipe member made of a material containing a platinum group metal and having a circumferential wall portion extending in the axial direction; and A partial area of the above-mentioned wall portion in the above-mentioned axial direction includes: at least one wave-shaped portion, which is formed in an alternate arrangement in the above-mentioned axial direction and continuous in the circumferential direction, and has radial concavities and convexities of the above-mentioned wall portion; The protruding portion protruding in the radial direction of the wave-shaped portion has a first protruding portion with the highest protruding height, and is arranged on both sides of the axial direction relative to the first protruding portion, and the protruding height is higher than that of the first protruding portion. One of the lower convex parts is the second convex part; The radially recessed concave portion of the corrugated portion has a pair of first concave portions located between the first convex portion and the second convex portion; In a cross section of the wall along a plane extending in the axial direction and the radial direction, the length of each of the first recesses is longer than the length of the first protrusions.

較佳為,上述凸部及上述凹部各者具有於上述剖面中以具有曲率半徑之方式彎曲之彎曲部。Preferably, each of the above-mentioned convex portion and the above-mentioned concave portion has a curved portion that is curved so as to have a radius of curvature in the above-mentioned cross section.

較佳為,於上述剖面中,上述第1凹部之上述彎曲部之長度較上述第1凸部之上述彎曲部之長度為長。Preferably, in the cross section, the length of the curved portion of the first concave portion is longer than the length of the curved portion of the first convex portion.

較佳為,於將上述彎曲部稱為第1彎曲部時,上述第1凹部於上述剖面中具有: 平坦部,其於與上述軸向平行之方向直線狀延伸;及 第2彎曲部,其位在與上述第1彎曲部之間夾著上述平坦部之處;且 於上述剖面中,上述彎曲部及上述平坦部之合計之長度較上述第1凸部之上述彎曲部之長度為長。 Preferably, when the above-mentioned curved portion is referred to as a first curved portion, the above-mentioned first concave portion has in the above-mentioned section: a flat portion extending linearly in a direction parallel to the aforementioned axial direction; and a second curved portion located between the first curved portion and the flat portion; and In the above cross section, the total length of the curved portion and the flat portion is longer than the length of the curved portion of the first convex portion.

較佳為,上述第1凸部之上述彎曲部之曲率半徑R1與上述第1凹部之上述彎曲部之曲率半徑R2相等,或小於該曲率半徑R2。Preferably, the radius of curvature R1 of the curved portion of the first convex portion is equal to or smaller than the radius of curvature R2 of the curved portion of the first concave portion.

較佳為,上述第1凸部之上述彎曲部之曲率半徑R1與上述第2凸部之上述彎曲部之曲率半徑R3相等,或小於該曲率半徑R3。Preferably, the radius of curvature R1 of the curved portion of the first convex portion is equal to or smaller than the radius of curvature R3 of the curved portion of the second convex portion.

較佳為,上述第2凸部之凸出高度H2為上述第1凸部之凸出高度H1之1.2~1.6倍。Preferably, the protrusion height H2 of the second protrusion is 1.2 to 1.6 times the protrusion height H1 of the first protrusion.

上述管構件適於以下情形: 於上述壁部之內側處理熔融玻璃,且進而具備: 至少1個突狀構件,其以自上述壁部朝外周側延伸之方式連接於上述壁部,且於上述處理時發揮功能;及 支持體,其支持上述壁部,且以自上述軸向之兩側夾著上述突狀構件之方式配置於上述管構件之周圍。 The above-mentioned pipe member is suitable for the following situations: Molten glass is processed on the inner side of the above-mentioned wall, and further possesses: at least one protruding member connected to the wall portion so as to extend from the wall portion toward the outer peripheral side, and function during the above-mentioned treatment; and The supporting body supports the wall portion and is disposed around the pipe member so as to sandwich the protruding member from both sides in the axial direction.

較佳為,上述突狀構件具備複數個;且 上述波形狀部、與上述突狀構件中位於最靠近該波形狀部之突狀構件之上述軸向之間隔未達上述相鄰之2個突狀構件之間隔之10%。 Preferably, there are a plurality of the above-mentioned protruding members; and The axial distance between the corrugated portion and the protruding member closest to the corrugated portion is less than 10% of the distance between the two adjacent protruding members.

較佳為,上述壁部包含形成於上述軸向之不同區域之複數個上述波形狀部。Preferably, the wall portion includes a plurality of the wave-shaped portions formed in different regions in the axial direction.

較佳為,上述管構件由沿軸向經分割之複數個單位管連接而成; 較佳為,於上述單位管各者,形成有上述突狀構件中之1個、或上述波形狀部中之1個或2個。 Preferably, the above-mentioned pipe member is formed by connecting a plurality of unit pipes divided in the axial direction; Preferably, one of the above-mentioned protruding members, or one or two of the above-mentioned corrugated portions are formed on each of the above-mentioned unit tubes.

較佳為,相對於上述單位管中形成有上述波形狀部之單位管,上述波形狀部之上述軸向之長度為該單位管之上述軸向之長度之20%以上。Preferably, the axial length of the wave-shaped portion is 20% or more of the axial length of the unit pipe relative to the unit tube in which the wave-shaped portion is formed.

本發明之另一態様為管構件,其特徵在於,其係由包含鉑族金屬之材料組成,且具有於軸向延伸之周狀之壁部者; 上述壁部於上述軸向之一部分區域中,包含:至少1個波形狀部,其以於上述軸向交替排列且於周向連續之方式形成,具有上述壁部之徑向之凹凸; 上述波形狀部中朝徑向凸出之凸部具有:凸出高度為最高之第1凸部;及一對第2凸部,其相對於上述第1凸部配置於上述軸向之兩側,且凸出高度較上述第1凸部為低; 上述波形狀部中朝徑向凹陷之凹部具有位於上述第1凸部與上述第2凸部之間之一對第1凹部; 於沿著朝上述軸向及上述徑向延伸之平面的上述壁部之剖面中,上述第1凹部各者之長度較上述第1凸部之長度為長。 [發明之效果] Another aspect of the present invention is a pipe member, which is characterized in that it is composed of a material containing a platinum group metal and has a circumferential wall portion extending in the axial direction; The above-mentioned wall part includes in a part of the above-mentioned axial direction: at least one wave-shaped part, which is formed in a manner of being alternately arranged in the above-mentioned axial direction and continuous in the circumferential direction, and has radial concavities and convexities of the above-mentioned wall part; The radially protruding protruding portion of the wave-shaped portion has: a first protruding portion with the highest protruding height; and a pair of second protruding portions, which are arranged on both sides of the axial direction relative to the above-mentioned first protruding portion , and the height of the protrusion is lower than that of the first protrusion; The radially recessed concave portion of the corrugated portion has a pair of first concave portions located between the first convex portion and the second convex portion; In a cross section of the wall along a plane extending in the axial direction and the radial direction, the length of each of the first recesses is longer than the length of the first protrusions. [Effect of Invention]

根據上述態様之玻璃基板製造裝置及管構件,可抑制形成於管構件之具有徑向之凹凸之波形狀部中之局部之應力集中。According to the glass substrate manufacturing apparatus and pipe member of the above aspect, local stress concentration formed in the corrugated portion having radial concavities and convexities of the pipe member can be suppressed.

以下,對本實施形態之玻璃基板製造裝置進行說明。Hereinafter, the glass substrate manufacturing apparatus of this embodiment is demonstrated.

(玻璃基板製造裝置之整體概要) 圖1係本實施形態之玻璃基板製造裝置之概略圖。玻璃基板製造裝置如圖1所示,主要具有熔解裝置100、成形裝置200、及切斷裝置300。熔解裝置100具有熔解槽101、澄清管102、攪拌槽103、移送管104、105、及玻璃供給管106。 於圖1所示之熔解槽101,設置有未圖示之燃燒器等加熱機構。於熔解槽101中投入添加有澄清劑之玻璃原料,進行製作熔融玻璃之熔解步驟。將於熔解槽101中熔融之熔融玻璃經由移送管104供給至澄清管102。 於澄清管102中,一面流動熔融玻璃MG,一面調整熔融玻璃MG之溫度,並利用澄清劑之氧化還原反應進行熔融玻璃之澄清(澄清步驟)。具體而言,藉由將澄清管102內之熔融玻璃升溫,熔融玻璃中包含之含有氧氣、CO 2或SO 2之氣泡吸收利用澄清劑之還原反應產生之氧氣而成長,並浮起於熔融玻璃之液面而釋放至汽相空間。其後,藉由降低熔融玻璃之溫度,利用澄清劑之還原反應產生之還原物質進行氧化反應。藉此,將殘存於熔融玻璃之氣泡中之氧氣等氣體成分於熔融玻璃中再吸收,使氣泡消失。澄清後之熔融玻璃經由移送管105供給至攪拌槽103。 於攪拌槽103中,藉由攪拌器103a攪拌熔融玻璃而進行均質化步驟。於攪拌槽103中均質化之熔融玻璃經由玻璃供給管106供給至成形裝置200。 於成形裝置200中,例如藉由溢流下拉法,使玻璃片SG自熔融玻璃成形、且緩冷。 於切斷裝置300中,形成自玻璃片SG切出之板狀之玻璃基板。 (Whole outline of glass substrate manufacturing apparatus) FIG. 1 is a schematic diagram of the glass substrate manufacturing apparatus of this embodiment. As shown in FIG. 1 , the glass substrate manufacturing apparatus mainly includes a melting apparatus 100 , a forming apparatus 200 , and a cutting apparatus 300 . The melting device 100 has a melting tank 101 , a clarification pipe 102 , a stirring tank 103 , transfer pipes 104 and 105 , and a glass supply pipe 106 . In the melting tank 101 shown in FIG. 1 , heating means such as burners not shown are provided. The glass raw material added with the clarifying agent is put into the melting tank 101, and the melting step of making molten glass is carried out. The molten glass to be melted in the melting tank 101 is supplied to the clarification pipe 102 through the transfer pipe 104 . In the clarification pipe 102, while flowing the molten glass MG, the temperature of the molten glass MG is adjusted, and clarification of the molten glass is performed by oxidation-reduction reaction of a clarifier (clarification process). Specifically, by raising the temperature of the molten glass in the clarification pipe 102, bubbles containing oxygen, CO 2 , or SO 2 contained in the molten glass absorb oxygen generated by the reduction reaction of the clarifier to grow, and float on the molten glass. The liquid surface is released to the vapor phase space. Thereafter, by lowering the temperature of the molten glass, oxidation reaction is carried out by reducing substances produced by the reduction reaction of the clarifying agent. Thereby, gas components such as oxygen remaining in the bubbles of the molten glass are reabsorbed in the molten glass, and the bubbles disappear. The clarified molten glass is supplied to the stirring tank 103 through the transfer pipe 105 . In the stirring tank 103, a homogenization process is performed by stirring molten glass with the stirrer 103a. The molten glass homogenized in the stirring tank 103 is supplied to the molding device 200 through the glass supply pipe 106 . In the forming apparatus 200, the glass sheet SG is formed from molten glass by, for example, an overflow downdraw method, and slowly cooled. In the cutting apparatus 300, the plate-shaped glass substrate cut out from the glass sheet SG is formed.

於本實施形態中,玻璃基板製造裝置之上述構成要件中之澄清管102、移送管104、105、及玻璃供給管106之至少1者為後述之管構件。管構件進行熔融玻璃之處理。澄清管102如上所述,一面流動熔融玻璃一面進行澄清。移送管104、105及玻璃供給管106進行熔融玻璃之移送。以下,作為管構件以澄清管102為例進行說明。In this embodiment, at least one of the clarification pipe 102, the transfer pipes 104, 105, and the glass supply pipe 106 among the above-mentioned structural requirements of the glass substrate manufacturing apparatus is a pipe member described later. The pipe member is processed by molten glass. The clarification pipe 102 clarifies while flowing molten glass as mentioned above. The transfer pipes 104 and 105 and the glass supply pipe 106 transfer molten glass. Hereinafter, it demonstrates taking the clarification pipe 102 as an example as a pipe member.

(澄清管) 圖2係顯示澄清管102之構成之概略圖。 澄清管102為由包含鉑族金屬之材料組成之管狀之構件。所謂鉑族金屬意指鉑(Pt)、鈀(Pd)、銠(Rh)、釕(Ru)、鋨(Os)、銥(Ir)之6種元素。作為包含鉑族金屬之材料之例,列舉包含鉑族金屬中之單一之金屬或2種以上之金屬之合金之材料。例如,使用鉑或鉑合金。 (clarification tube) FIG. 2 is a schematic diagram showing the composition of the clarification pipe 102 . The clarification pipe 102 is a tubular member made of a material containing a platinum group metal. The so-called platinum group metals refer to six elements of platinum (Pt), palladium (Pd), rhodium (Rh), ruthenium (Ru), osmium (Os), and iridium (Ir). Examples of materials containing platinum group metals include materials containing a single metal or an alloy of two or more metals among platinum group metals. For example, platinum or a platinum alloy is used.

澄清管102為由鉑族金屬構成之構件,且具有於澄清管102之軸向延伸之周狀(筒狀)之壁部102a。以於熔融玻璃之液面之上方形成汽相空間之方式,對澄清管102供給熔融玻璃。熔融玻璃於壁部102a之內側中被澄清。澄清管102於與軸向正交之剖面中具有圓形狀之外周。澄清管102之軸向意指該剖面中與通過澄清管102之中心(圓形狀之中心)之澄清管102之中心軸平行之方向(於圖中為左右方向)。The clarification pipe 102 is a member made of a platinum group metal, and has a circumferential (cylindrical) wall portion 102 a extending in the axial direction of the clarification pipe 102 . Molten glass is supplied to the clarification pipe 102 so that a vapor phase space may be formed above the liquid surface of molten glass. The molten glass is refined inside the wall portion 102a. The clarification pipe 102 has a circular outer periphery in a cross section perpendicular to the axial direction. The axial direction of the clarification pipe 102 means the direction parallel to the central axis of the clarification pipe 102 passing through the center of the clarification pipe 102 (the center of the circle shape) in this section (the left-right direction in the figure).

於澄清管102,設置有至少1個突狀構件。突狀構件為以自壁部102a朝外周側延伸之方式連接於壁部102a,且於澄清時發揮功能之構件。作為此種突狀構件,於澄清管102,如圖2所示,設置有一對凸緣102b、102c、及通氣管102d。At least one protruding member is provided in the clarification pipe 102 . The protruding member is a member that is connected to the wall portion 102a so as to extend from the wall portion 102a toward the outer peripheral side, and functions during clarification. As such a protruding member, a pair of flanges 102b, 102c and vent pipe 102d are provided in the clarification pipe 102 as shown in FIG. 2 .

凸緣102b、102c為設置於澄清管102之軸向之兩端之圓板狀之構件。凸緣102b、102c藉由熔接而連接於壁部102a。凸緣102b、102c與未圖示之電源裝置連接,並藉由電源裝置20對凸緣102b、102c之間施加電壓,藉此於凸緣102b、102c之間之壁部102a之部分流動電流,而將澄清管102加熱。如此,凸緣102b、102c作為一對電極發揮功能。藉由該通電加熱,將澄清管102例如加熱至1650℃~1700℃左右,並將自移送管104供給之熔融玻璃MG加熱至適於去泡之溫度,例如1600℃~1700℃左右。Flanges 102b and 102c are disk-shaped members provided at both ends in the axial direction of clarification pipe 102 . The flanges 102b, 102c are connected to the wall 102a by welding. The flanges 102b, 102c are connected to a power supply device not shown in the figure, and a voltage is applied between the flanges 102b, 102c by the power supply device 20, so that a current flows in a part of the wall portion 102a between the flanges 102b, 102c, Instead, the clarification pipe 102 is heated. In this way, the flanges 102b and 102c function as a pair of electrodes. By this energization heating, the clarification pipe 102 is heated to, for example, about 1650°C to 1700°C, and the molten glass MG supplied from the transfer pipe 104 is heated to a temperature suitable for defoaming, for example, about 1600°C to 1700°C.

另一方面,於凸緣102b、102c中,沿凸緣之外周設置有供冷媒流動之冷卻管(未圖示),且藉由對冷卻管內供給冷媒,而將凸緣102b、102c冷卻,並將藉由通電加熱而發熱之凸緣102b、102c冷卻。On the other hand, in the flanges 102b, 102c, cooling pipes (not shown) through which the refrigerant flows are provided along the periphery of the flanges, and the flanges 102b, 102c are cooled by supplying the refrigerant into the cooling pipes. And cool the flanges 102b, 102c which generate heat by heating with electricity.

通氣管102d為將汽相空間與澄清管102之外部空間連通之管。通氣管102d藉由熔接而連接於壁部102a。通氣管102d具有將自熔融玻璃MG釋放至汽相空間之氧氣、CO 2、SO 2等氣體排出至外部空間之功能。 The ventilation pipe 102d is a pipe which communicates the vapor phase space and the outer space of the clarification pipe 102 . The vent pipe 102d is connected to the wall portion 102a by welding. The ventilation pipe 102d has a function of discharging gases such as oxygen, CO 2 , and SO 2 released from the molten glass MG into the vapor phase space to the external space.

玻璃基板製造裝置進而具備支持體110。 支持體110為支持澄清管102之壁部102a之構造物。支持體110由耐火磚構成。耐火磚以使凸緣102b、102c或通氣管102d於耐火磚之間延伸之方式,配置於澄清管102之周圍。因此,凸緣102b、102c及通氣管102d自軸向之兩側由耐火磚夾著。 The glass substrate manufacturing apparatus further includes a support body 110 . The support body 110 is a structure which supports the wall part 102a of the clarification pipe 102. As shown in FIG. The support body 110 is made of a refractory brick. The refractory bricks are arranged around the clarification pipe 102 so that the flanges 102b, 102c or the ventilation pipe 102d extend between the refractory bricks. Therefore, the flanges 102b, 102c and the ventilation pipe 102d are sandwiched by refractory bricks from both sides in the axial direction.

(波形狀部) 圖3係顯示澄清管102之波形狀部之一例之一部分之剖視圖。圖3中之虛線顯示與先前之波形狀部之第2凸部對應之部分。除該部分外,先前之波形狀部與本實施形態之波形狀部同樣地構成。 澄清管102之壁部102a於軸向之一部分區域(於圖2,以虛線包圍而顯示區域之例)中,包含至少1個波形狀部10。波形狀部10為以於軸向交替排列且於周向連續延伸(繞周向一周)之方式形成,具有壁部102a之徑向之凹凸之部分。 (wave shape part) FIG. 3 is a partial cross-sectional view showing an example of the corrugated portion of the clarification pipe 102. As shown in FIG. The dotted line in Fig. 3 shows a portion corresponding to the second convex portion of the previous wave-shaped portion. Except for this portion, the conventional corrugated portion has the same configuration as the corrugated portion of the present embodiment. The wall portion 102a of the clarification pipe 102 includes at least one wave-shaped portion 10 in a partial region in the axial direction (in FIG. 2 , an example of a region surrounded by a dotted line). The corrugated portion 10 is formed so as to be alternately arranged in the axial direction and continuously extend in the circumferential direction (one circle around the circumferential direction), and has radial concavo-convex portions of the wall portion 102a.

波形狀部10至少於為了製造玻璃基板(作業)而升溫至上述澄清溫度之前(例如於常溫,即25℃中),具備下述說明之形態,但有時亦於作業中具備下述形態。The corrugated part 10 has the form described below at least before heating up to the clarification temperature (for example, at room temperature, 25° C.) for manufacturing a glass substrate (operation), but may also have the form described below during operation.

波形狀部10中朝徑向外周側凸出之凸部具有第1凸部11、與一對第2凸部12、12。 第1凸部11為凸出高度最高之凸部。於本說明書中,凸出高度意指於波形狀部10以外之壁部102a之部分中,與澄清管102之沿軸向所平行之方向延伸之平坦部(基部)相對之徑向之高度。作為平坦部之例,列舉後續參照之圖6中符號102e所示之部分。 第2凸部12為相對於第1凸部11配置於軸向之兩側之凸部。第2凸部12之凸出高度較第1凸部11更低。 The convex portion protruding toward the radially outer peripheral side of the corrugated portion 10 has a first convex portion 11 and a pair of second convex portions 12 , 12 . The first protrusion 11 is the protrusion with the highest protrusion height. In this specification, the protrusion height refers to the height in the radial direction opposite to the flat portion (base portion) of the clarification pipe 102 extending in the direction parallel to the axial direction in the portion of the wall portion 102a other than the corrugated portion 10 . As an example of the flat portion, a portion indicated by reference numeral 102e in FIG. 6 to be referred later is mentioned. The second convex portion 12 is a convex portion arranged on both sides in the axial direction with respect to the first convex portion 11 . The protrusion height of the second protrusion 12 is lower than that of the first protrusion 11 .

波形狀部10中朝徑向內周側凹陷之凹部具有位在第1凸部11與第2凸部12之間之2處的一對第1凹部13、13。The concave portion of the corrugated portion 10 that is depressed toward the radially inner peripheral side has a pair of first concave portions 13 , 13 located at two positions between the first convex portion 11 and the second convex portion 12 .

於澄清管102之沿軸向及徑向延伸之平面中之壁部102a之剖面(之後,亦簡稱為剖面)中,第1凹部13各者之長度較第1凸部11之長度更長。於本說明書中,與波形狀部之各部相關之剖面中之長度除特別說明之情形外,意指剖面中之波形狀部之延伸方向之長度,具體而言,意指於剖面所呈現之壁部之形狀(澄清管之輪廓)之長度。作為該長度之至少一部分區間之長度,例如包含後述之彎曲部之弧長、或與後述之平坦部之軸向平行之方向之長度。In the cross section of the wall portion 102a in the plane extending in the axial direction and radial direction of the clarification pipe 102 (hereinafter also simply referred to as cross section), the length of each of the first concave portions 13 is longer than the length of the first convex portion 11 . In this specification, unless otherwise specified, the length in the cross-section of each part of the corrugated part means the length in the extending direction of the corrugated part in the cross-section, specifically, the length of the wall shown in the cross-section. The shape of the part (outline of the clarification tube) and the length. The length of at least a part of the length includes, for example, the arc length of a curved portion described later, or the length in a direction parallel to the axial direction of a flat portion described later.

為了進行作業而將澄清管102加熱(升溫)時,如圖2所示,澄清管102欲於軸向上熱膨脹,但因凸緣102b、102c及通氣管102d受支持體110約束,故澄清管102之熱膨脹受限制,而於澄清管102產生內部應力。此時,應力易集中於凸緣、通氣管、及與澄清管之連接部分,而易產生應變。於本實施形態中,因於澄清管102之壁部102a,形成有以於軸向交替排列並於周向連續之方式形成之包含凹凸之波形狀部10,故可藉由使澄清管102中產生之內部應力之一部分於波形狀部10中產生而吸收,藉此減少於澄清管102之其他部分產生之應力,並抑制應力集中於上述連接部分等。另一方面,於波形狀部產生之應力,其應力容易集中於波形狀部之一部分區域,而根據應力之大小,波形狀部斷裂之風險提高,且熔融玻璃漏出至外部之風險提高。When the clarification pipe 102 is heated (heated) for operation, as shown in FIG. The thermal expansion is limited, and internal stress is generated in the clarification tube 102. At this time, the stress is easy to concentrate on the flange, the vent pipe, and the connecting part with the clarification pipe, and strain is easy to occur. In this embodiment, since the wall portion 102a of the clarification pipe 102 is formed with the corrugated portions 10 that are alternately arranged in the axial direction and continuously formed in the circumferential direction, it is possible by making the clarification pipe 102 Part of the generated internal stress is generated and absorbed in the corrugated portion 10, thereby reducing the stress generated in other parts of the clarification pipe 102, and suppressing stress concentration on the above-mentioned connecting portion and the like. On the other hand, the stress generated in the corrugated part tends to concentrate on a part of the corrugated part, and depending on the magnitude of the stress, the risk of breaking the corrugated part increases, and the risk of molten glass leaking to the outside increases.

根據本發明者之研究可知,於波形狀部10中, (1)第1凹部13之長度較第1凸部11之長度為長; (2)第1凸部11之凸出高度較第2凸部12之凸出高度為高; 於該情形時,波形狀部10吸收之應力容易於波形狀部10內分散產生,可抑制波形狀部10中之局部之應力集中。 According to the research of the inventors of the present invention, in the corrugated portion 10, (1) The length of the first concave portion 13 is longer than the length of the first convex portion 11; (2) The protrusion height of the first protrusion 11 is higher than the protrusion height of the second protrusion 12; In this case, the stress absorbed by the corrugated portion 10 is easily dispersed and generated in the corrugated portion 10 , and local stress concentration in the corrugated portion 10 can be suppressed.

具體而言,已確認下述內容。 若波形狀部10具備上述(1)之形態,則波形狀部10中易產生應變之區域增加,而容易將波形狀部10中產生之應力分散。其結果,可減少在波形狀部10內產生之最大應力之大小,可減少波形狀部10之斷裂之風險。 若波形狀部10具備上述(2)之形態,則容易自第2凸部12向第1凹部13傳遞力,且波形狀部10中產生之應力藉由第1凹部13而分散之效果增加。 Specifically, the following contents were confirmed. If the corrugated portion 10 has the form of (1) above, the regions where strain easily occurs in the corrugated portion 10 will increase, and the stress generated in the corrugated portion 10 will be easily dispersed. As a result, the magnitude of the maximum stress generated in the corrugated portion 10 can be reduced, and the risk of breakage of the corrugated portion 10 can be reduced. If the corrugated part 10 has the form of (2) above, it is easy to transmit force from the second convex part 12 to the first concave part 13, and the effect of dispersing the stress generated in the corrugated part 10 by the first concave part 13 is increased.

於本實施形態中,第1凸部11、第1凹部13、第2凸部12互相連接。凸部與凹部之連接位置(邊界)例如特定為,於壁部102a之剖面中使波形狀部10自凹部向凸部推進時,波形狀部10之曲率半徑之中心自澄清管102之內側移至外側之位置,或無法特定波形狀部10之曲率半徑之部分(直線形狀之平坦部)之兩端之中心位置。In this embodiment, the first convex portion 11, the first concave portion 13, and the second convex portion 12 are connected to each other. The connecting position (boundary) between the convex portion and the concave portion is specified such that when the corrugated portion 10 is pushed from the concave portion to the convex portion in the cross section of the wall portion 102a, the center of the radius of curvature of the corrugated portion 10 moves from the inside of the clarification pipe 102. The position to the outside, or the center position of both ends of the portion (flat portion of straight line shape) where the radius of curvature of the wave-shaped portion 10 cannot be specified.

第1凹部13之長度較佳為第1凸部11之長度之150~250%之長度。The length of the first concave portion 13 is preferably 150 to 250% of the length of the first convex portion 11 .

第1凸部11、第2凸部12及第1凹部13之各者,於壁部102a之剖面中,於使應力在波形狀部10內分散產生之效果(應力分散效果)較大之點上,較佳為具有曲線形狀之彎曲部,但另一方面,自確保第1凹部13之長度之觀點而言,亦較佳為具有直線形狀之平坦部。 第1凸部11、第2凸部12及第1凹部13之各者亦可具有彎曲部及平坦部之兩者。 第1凸部11、第2凸部12及第1凹部13之各者亦可分別具有複數個彎曲部及平坦部。於具有複數個彎曲部之情形時,該等彎曲部之曲線形狀可相同,亦可不同。 Each of the first convex portion 11, the second convex portion 12, and the first concave portion 13, in the cross section of the wall portion 102a, is at a point where the effect of dispersing stress in the corrugated portion 10 (stress dispersion effect) is large. Above, a curved portion having a curved shape is preferable, but on the other hand, a flat portion having a linear shape is also preferable from the viewpoint of securing the length of the first concave portion 13 . Each of the 1st convex part 11, the 2nd convex part 12, and the 1st concave part 13 may have both of a curved part and a flat part. Each of the 1st convex part 11, the 2nd convex part 12, and the 1st concave part 13 may respectively have a some curved part and a flat part. When there are a plurality of bent parts, the curved shapes of these bent parts may be the same or different.

第2凸部12之凸出高度H2較佳為第1凸部11之凸出高度H1之1.2~1.6倍。The protrusion height H2 of the second protrusion 12 is preferably 1.2 to 1.6 times the protrusion height H1 of the first protrusion 11 .

根據一實施形態,較佳為具有於壁部102a之剖面中以具有曲率半徑R1、R3、R2之方式彎曲之彎曲部11a、12a、13a。藉由此種形態,應力分散效果變大。尤其,藉由第1凹部13具備彎曲部13a,可有效地提高該效果。According to one embodiment, it is preferable to have the curved portions 11a, 12a, and 13a curved so as to have the radii of curvature R1, R3, and R2 in the cross section of the wall portion 102a. With such a form, the stress dispersion effect becomes large. In particular, since the first concave portion 13 is provided with the curved portion 13a, this effect can be effectively enhanced.

彎曲部11a之曲率半徑R1例如可特定為,於壁部102a之剖面中,以彎曲部11a之兩端之間之中點為中心,設定彎曲部11a之長度之特定比例(例如為25%)之長度之半徑之假想圓,並通過該假想圓與彎曲部11a之2個交點、及彎曲部11a之上述中點之3點之圓弧的曲率半徑。曲率半徑R2、R3亦可以相同要領特定。The radius of curvature R1 of the curved portion 11a can be specified, for example, in the section of the wall portion 102a, with the midpoint between the two ends of the curved portion 11a as the center, setting a specific ratio (for example, 25%) of the length of the curved portion 11a The radius of curvature of an imaginary circle with the radius of the length of the imaginary circle and the two intersection points of the imaginary circle and the curved portion 11a, and the three points of the above-mentioned midpoint of the curved portion 11a. The radii of curvature R2 and R3 can also be specified in the same manner.

代替此,彎曲部11a之曲率半徑R1可特定為,於壁部102a之剖面中,以彎曲部11a之兩端之間之特定位置(例如,自基部起第1凸部之凸出高度之70%之高度位置)為中心,設定特定長度(例如為4 mm)之半徑之假想圓,並通過該假想圓與彎曲部11a之2個交點、及彎曲部11a之上述中點之3點之圓弧的曲率半徑。 該情形時,關於曲率半徑R2,可以相同要領將假想圓之中心例如特定為,自基部起第1凸部之凸出高度之60%之高度位置,對於曲率半徑R3,例如可以相同要領特定為自基部起第2凸部之凸出高度之90%之高度位置。 Instead, the radius of curvature R1 of the curved portion 11a may be specified as, in the section of the wall portion 102a, at a specific position between the two ends of the curved portion 11a (for example, 70% of the height of the protrusion of the first convex portion from the base). % height position) as the center, set an imaginary circle with a radius of a specific length (for example, 4 mm), and pass through the two intersection points of the imaginary circle and the curved portion 11a, and the circle of three points of the above-mentioned midpoint of the curved portion 11a The radius of curvature of the arc. In this case, regarding the radius of curvature R2, the center of the imaginary circle can be specified as, for example, the height position of 60% of the protrusion height of the first convex portion from the base in the same way, and the radius of curvature R3 can be specified as, for example, in the same way. The height position of 90% of the protrusion height of the second protrusion from the base.

於第1凹部13由彎曲部11a構成之情形時,與第1凹部13之軸向平行之方向之長度(谷寬)較佳為以彎曲部13a之曲率半徑R2為半徑之圓之周長2π・R2之0.35~0.6倍之長度。When the first concave portion 13 is formed by a curved portion 11a, the length (valley width) in a direction parallel to the axial direction of the first concave portion 13 is preferably the circumference of a circle with the radius of curvature R2 of the curved portion 13a as the radius 2π・0.35~0.6 times the length of R2.

於壁部102a之剖面中,第1凹部13之彎曲部13a之長度如圖3所示,較佳為較第1凸部11之彎曲部11a之長度更長。藉此,可有效地增大應力分散效果。於圖3所示之例中,彎曲部13a相對於彎曲部11a,變長了追加圓弧部13a1之量。該形態於限制形成波形狀部10之壁部102a之部分之寬度(與澄清管102之軸向平行之方向之長度)之情形時,較為有效。In the section of the wall portion 102a, the length of the curved portion 13a of the first concave portion 13 is preferably longer than the length of the curved portion 11a of the first convex portion 11 as shown in FIG. 3 . Thereby, the stress dispersion effect can be effectively increased. In the example shown in FIG. 3, the curved portion 13a is longer than the curved portion 11a by the amount of the additional arc portion 13a1. This form is effective when restricting the width (the length in the direction parallel to the axial direction of the clarification pipe 102 ) of the portion forming the wall portion 102 a of the corrugated portion 10 .

圖4係顯示波形狀部10之另一例之一部分之剖視圖。圖4中之虛線顯示先前之波形狀部之一例。 於將第1凹部13之彎曲部13a稱為第1彎曲部13a時,根據一實施形態,第1凹部13如圖4所示,亦較佳為於壁部102a之剖面中,除第1彎曲部13a外,進而具有平坦部13b、與第2彎曲部13c。 平坦部13b為於與澄清管102之軸向平行之方向直線狀延伸之部分。 第2彎曲部13c為位在與第1彎曲部13a之間夾著平坦部13b之處之部分。 FIG. 4 is a partial cross-sectional view showing another example of the corrugated portion 10. As shown in FIG. The dotted line in Fig. 4 shows an example of the previous corrugated portion. When the curved portion 13a of the first concave portion 13 is referred to as the first curved portion 13a, according to one embodiment, the first concave portion 13, as shown in FIG. In addition to the portion 13a, it further has a flat portion 13b and a second curved portion 13c. The flat portion 13b is a portion linearly extending in a direction parallel to the axial direction of the clarification pipe 102 . The second curved portion 13c is a portion located between the first curved portion 13a and the flat portion 13b.

與平坦部13b之軸向平行之方向之長度D2較佳為第1凹部13之長度之20~80%之長度,更佳為25~50%之長度。若該比例超過80%,則有3個凸部11、12獨立,致使應力分散效果大幅度降低之情形。又,若該比例未達20%,則難以充分確保第1凹部13之長度。D2例如為2~6 mm。The length D2 in the direction parallel to the axial direction of the flat portion 13b is preferably 20-80% of the length of the first recess 13, more preferably 25-50%. If the ratio exceeds 80%, the three protrusions 11 and 12 are independent, and the effect of stress dispersion may be greatly reduced. Moreover, if this ratio is less than 20%, it will be difficult to ensure the length of the 1st recessed part 13 fully. D2 is, for example, 2 to 6 mm.

第1凸部11之彎曲部11a之曲率半徑R1較佳與第1凹部13之彎曲部13a之曲率半徑R2相等,或如圖3及圖4所示,小於該曲率半徑R2。即,較佳為R1≦R2。藉此,應力分散效果變大,可減少於波形狀部10內產生之最大應力之大小。又,於對於壁部102a之寬度存在上述之限制之情形時,藉由將第1凸部11之曲率半徑R1設得較R2更小,而容易確保第1凹部13之長度。The curvature radius R1 of the curved portion 11a of the first convex portion 11 is preferably equal to the curvature radius R2 of the curved portion 13a of the first concave portion 13, or smaller than the curvature radius R2 as shown in FIG. 3 and FIG. 4 . That is, it is preferable that R1≦R2. Thereby, the effect of stress dispersion becomes greater, and the magnitude of the maximum stress generated in the corrugated portion 10 can be reduced. Also, when there is the above-mentioned restriction on the width of the wall portion 102a, the length of the first concave portion 13 can be easily ensured by setting the curvature radius R1 of the first convex portion 11 smaller than R2.

第1凸部11之彎曲部11a之曲率半徑R1較佳與第2凸部12之彎曲部12a之曲率半徑R3相等,或小於該曲率半徑R3。即,較佳為R1≦R3。於對於壁部102a之寬度存在上述限制之情形時,為了確保第1凹部13之長度,設為滿足R3≧R1較為有效。R1較佳為R3之0.4~1倍之長度。 於對於壁部102a之寬度存在上述限制之情形時,較佳為於第1凹部13具備平坦部13b之情形時,第2凸部12之R3亦較小。 The curvature radius R1 of the curved portion 11a of the first convex portion 11 is preferably equal to or smaller than the curvature radius R3 of the curved portion 12a of the second convex portion 12 . That is, it is preferable that R1≦R3. When there is the above-mentioned restriction on the width of the wall portion 102a, it is effective to satisfy R3≧R1 in order to secure the length of the first concave portion 13 . R1 is preferably 0.4 to 1 times the length of R3. When there is the above-mentioned restriction on the width of the wall portion 102a, it is preferable that R3 of the second convex portion 12 is also small when the first concave portion 13 has a flat portion 13b.

根據一實施形態,第1凸部11之凸出高度H1較佳為第1凸部11之彎曲部11a之曲率半徑R1、與第1凹部13之彎曲部13a之曲率半徑R2之合計R1+R2之0.8~1.2倍之高度,尤其較佳為H1=R1+R2。若滿足此種關係,則容易以應力分散效果變大之方式,調整凸出高度H1相對於凸出高度H2之大小。According to one embodiment, the protrusion height H1 of the first convex portion 11 is preferably the sum R1+R2 of the curvature radius R1 of the curved portion 11a of the first convex portion 11 and the curvature radius R2 of the curved portion 13a of the first concave portion 13 The height of 0.8 to 1.2 times of , especially preferably H1=R1+R2. If this relationship is satisfied, it is easy to adjust the size of the protrusion height H1 relative to the protrusion height H2 so that the stress dispersion effect becomes greater.

如上所述,於具備凸緣102b、102c及通氣管102d作為突狀構件之情形時,波形狀部10、與突狀構件102b、102c、102d中位於最靠近該波形狀部10之突狀構件102b、102c、102d之軸向上之間隔較佳為未達相鄰之2個突狀構件102b、102c、102d之間隔之10%。波形狀部10設置於越靠近於澄清管102中產生之應力易集中之連接部分之位置,越可抑制向連接部分之應力集中,而可抑制連接部分中之龜裂之產生或疲勞之加劇。As mentioned above, when the flanges 102b, 102c and the ventilation pipe 102d are provided as the protruding members, the corrugated portion 10, and the protruding member closest to the corrugated portion 10 among the protruding members 102b, 102c, 102d The distance between 102b, 102c and 102d in the axial direction is preferably less than 10% of the distance between two adjacent protruding members 102b, 102c and 102d. The closer the corrugated part 10 is provided to the connection part where the stress generated in the clarification pipe 102 tends to concentrate, the more the stress concentration to the connection part can be suppressed, and the generation of cracks or the aggravation of fatigue in the connection part can be suppressed.

壁部102a較佳為包含形成於軸向上之不同區域之複數個波形狀部10。由於吸收於澄清管102中產生之應力之部分增加,故降低向連接部分等之應力集中之效果提高。The wall portion 102a preferably includes a plurality of wave-shaped portions 10 formed in different regions in the axial direction. Since the part which absorbs the stress which arises in the clarification pipe 102 increases, the effect which reduces the stress concentration to a connection part etc. improves.

圖5係顯示構成澄清管102之複數個單位管112之圖。 澄清管102例如圖5所示,將於軸向分割之複數個單位管112直線狀連接而構成。該情形時,較佳為於單位管112各者,形成有通氣管102d、或波形狀部10中之1個或2個。於圖5中,將形成有波形狀部10之單位管112,省略凹凸之圖示。相鄰之單位管112藉由熔接而連接。單位管112彼此之連接部分亦於澄清管102中產生內部應力時,易引發應力集中。於本實施形態之澄清管102中,藉由利用波形狀部10吸收於澄清管102中產生之應力之一部分,亦抑制單位管112彼此之連接部分中之應力集中。 FIG. 5 is a diagram showing a plurality of unit pipes 112 constituting the clarification pipe 102 . The clarification pipe 102 is formed by linearly connecting a plurality of unit pipes 112 divided in the axial direction, as shown in FIG. 5 , for example. In this case, it is preferable to form one or two of the vent pipe 102d or the corrugated portion 10 in each of the unit pipes 112 . In FIG. 5 , the unit tube 112 on which the corrugated portion 10 is formed is omitted from the illustration of the concavo-convex. Adjacent unit tubes 112 are connected by welding. Also, when internal stress is generated in the clarification pipe 102 at the connecting portion between the unit pipes 112 , stress concentration tends to occur. In the clarification pipe 102 of this embodiment, by absorbing part of the stress generated in the clarification pipe 102 by the corrugated part 10, the stress concentration in the connection part of unit pipe 112 is also suppressed.

圖6係顯示波形狀部之另一例之一部分之剖視圖。 關於單位管112中形成有波形狀部10之單位管,波形狀部10之軸向上之長度較佳為該單位管112之軸向上之長度之20%以上。若未達20%,則波形狀部10之每單位長度之應力變大,而波形狀部10斷裂之風險變高。於該點上,於將上述平坦部13b稱為第2平坦部時,第1平坦部15之長度D1之合計如圖6所示,較佳為未達單位管112之軸向之長度之80%。第1平坦部15為除波形狀部10外,還位於波形狀部10之兩側,並於與軸向平行之方向延伸之部分。 Fig. 6 is a partial sectional view showing another example of the corrugated portion. Regarding the unit tube 112 in which the corrugated portion 10 is formed, the axial length of the corrugated portion 10 is preferably 20% or more of the axial length of the unit tube 112 . If it is less than 20%, the stress per unit length of the corrugated portion 10 increases, and the risk of breaking the corrugated portion 10 increases. In this regard, when the flat portion 13b is referred to as the second flat portion, the total length D1 of the first flat portion 15 is preferably 80% of the axial length of the unit tube 112 as shown in FIG. 6 . %. The first flat portion 15 is a portion located on both sides of the corrugated portion 10 in addition to the corrugated portion 10 and extending in a direction parallel to the axial direction.

波形狀部10之軸向之長度較佳為該單位管112之軸向之長度之70%以上。The axial length of the corrugated portion 10 is preferably more than 70% of the axial length of the unit tube 112 .

於圖6所示之例中,第1平坦部15之長度D1較佳為第2凸部12之直徑2・R3之0.3~1.2倍。In the example shown in FIG. 6 , the length D1 of the first flat portion 15 is preferably 0.3 to 1.2 times the diameter 2·R3 of the second convex portion 12 .

波形狀部10如圖6所示,較佳為具有位於波形狀部10之兩端,並與第2凸部12連接之斜面部14。斜面部14較佳為具有以具有曲率半徑R4之方式彎曲之彎曲部14a。該情形時,彎曲部14a之直徑2・R4較佳為單位管112彼此之連接部分之軸向之長度之0.4~2倍。由於斜面部14為於澄清管102中產生內部應力時首先對波形狀部10傳遞力之部分,故若彎曲部14a之曲率半徑R4較大,則輸入之力易集中於斜面部14。As shown in FIG. 6 , the corrugated portion 10 preferably has inclined portions 14 located at both ends of the corrugated portion 10 and connected to the second convex portion 12 . The inclined portion 14 preferably has a curved portion 14a having a curvature radius R4. In this case, the diameter 2·R4 of the bent portion 14a is preferably 0.4 to 2 times the axial length of the connecting portion of the unit tubes 112 . Since the inclined portion 14 is the part that first transmits force to the corrugated portion 10 when internal stress is generated in the clarification pipe 102, if the curvature radius R4 of the curved portion 14a is large, the input force is easily concentrated on the inclined portion 14.

關於第2凸部12之曲率半徑R3、斜面部14之曲率半徑R4、及第2凸部12之凸出高度H2,較佳為滿足R3+R4>n・H2之關係。n為1~3之實數。再者,較佳為R3與R4之大小接近,例如,R3/R4為0.9~1.1。藉此,自第2凸部12向第1凸部11傳遞力之上述之效果增加。The curvature radius R3 of the second convex portion 12, the curvature radius R4 of the slope portion 14, and the protrusion height H2 of the second convex portion 12 preferably satisfy the relationship of R3+R4>n·H2. n is a real number from 1 to 3. Furthermore, it is preferred that R3 and R4 are close in size, for example, R3/R4 is 0.9˜1.1. Thereby, the above-mentioned effect of transmitting force from the second convex portion 12 to the first convex portion 11 is increased.

顯示波形狀部10之上述之構成要件之較佳之尺寸例。 H1為9~15 mm。 R1為4~8 mm。 R2為5~8 mm。 R3、R4、H2分別為4~8 mm。 D1為15~25 mm。 D2為2~8 mm。 波形狀部10之軸向之長度為50~70 mm。 單位管112之軸向之長度為90~120 mm。 An example of preferable dimensions of the above-mentioned constituent elements of the corrugated portion 10 is shown. H1 is 9-15mm. R1 is 4-8mm. R2 is 5-8mm. R3, R4, and H2 are 4 to 8 mm, respectively. D1 is 15-25mm. D2 is 2-8mm. The axial length of the corrugated part 10 is 50-70 mm. The axial length of the unit tube 112 is 90-120 mm.

具備波形狀部10之單位管112或澄清管102例如藉由於內部具有加工為於壁部102a形成波形狀部10之壓製面之液壓成形用模具內配置管,並自管之內側負載液壓而使壁部變形之膨脹加工(液壓成形),或使用加工為於壁部102a形成波形狀部10之壓縮成形用型,藉由壓縮成形而製作。The unit pipe 112 or clarification pipe 102 having the corrugated portion 10 is formed by, for example, placing the pipe in a hydroforming die having a pressing surface processed to form the corrugated portion 10 on the wall portion 102a, and applying hydraulic pressure from the inside of the pipe. Expansion processing (hydroforming) for deforming the wall portion, or compression molding using a mold processed to form the wave-shaped portion 10 on the wall portion 102a, is produced by compression molding.

(實驗例) 進行使用將波形狀部設為各不相同之單位管之模型,算出波形狀部內之應力分佈用的模擬。於模擬中,對無法於軸向上熱膨脹之條件下將單位管升溫至澄清溫度時,於波形狀部內產生之應力之大小進行解析。於解析時設定之各種參數如下所述。 ·單位管之材質:鉑 ·單位管之軸向之長度(寬度):120 mm ·單位管之厚度:1 mm ·升溫溫幅:30℃至1650℃ 於以上參數下,對於其後之5種模型,算出波形狀部10內之應力分佈。 (experimental example) A simulation is performed to calculate the stress distribution in the corrugated part using a model in which the corrugated part is made of different unit tubes. In the simulation, the magnitude of the stress generated in the corrugated portion was analyzed when the temperature of the unit tube was raised to the clarification temperature under the condition that thermal expansion in the axial direction was not possible. Various parameters set during analysis are as follows. ·Material of unit tube: Platinum Axial length (width) of the unit tube: 120 mm ·Thickness of unit tube: 1 mm ·Heating temperature range: 30°C to 1650°C Under the above parameters, the stress distribution in the corrugated portion 10 was calculated for the following five models.

(模型1)使用具有圖3所示之波形狀部10、即滿足上述較佳之尺寸例之波形狀部10的單位管112。設定為D1=20 mm。 (模型2)如模型1,其中使用具有以圖3之虛線顯示與第1凸部對應之部分之形態之波形狀部(先前例)的單位管。 (模型3)如模型1,其中使用具有將與第1凹部對應之部分之長度設為與第1凸部之長度相等之波形狀部(比較例1)的單位管。 (模型4)如模型1,其中使用將與第1凸部對應之部分之凸出高度設為與第2凸部之凸出高度相等之波形狀部(比較例2)的單位管。 (模型5)使用具有圖4所示之波形狀部10、即滿足上述較佳之尺寸例之波形狀部10的單位管112。 (Model 1) A unit tube 112 having the corrugated part 10 shown in FIG. 3 , that is, the corrugated part 10 satisfying the above-mentioned preferable dimension example was used. Set to D1=20mm. (Model 2) As in Model 1, a unit tube having a corrugated portion (previous example) having a portion corresponding to the first convex portion shown by a dotted line in FIG. 3 was used. (Model 3) As in Model 1, a unit tube having a corrugated portion (Comparative Example 1) in which the length of the portion corresponding to the first concave portion was equal to the length of the first convex portion was used. (Model 4) As in Model 1, a unit tube of a corrugated portion (comparative example 2) in which the protrusion height of the portion corresponding to the first convex portion was equal to the protrusion height of the second convex portion was used. (Model 5) A unit tube 112 having the corrugated part 10 shown in FIG. 4 , that is, the corrugated part 10 satisfying the above-mentioned preferable dimension example was used.

自算出之應力分佈,比較模型間於單位管之軸向之兩端、第2凸部、第1凹部、第1凸部等總計7處之各處之平均應力值中為最大值之平均應力值(最大應力值),而評估應力分散效果之大小。From the calculated stress distribution, compare the average stress that is the maximum value among the average stress values at each of the 7 places including the axial ends of the unit tube, the second convex part, the first concave part, and the first convex part among the models. Value (maximum stress value) to evaluate the size of the stress dispersion effect.

比較之結果可知,模型1之最大應力值如圖7及圖8所示,較模型2(先前例)之最大應力值小,且模型1與模型2相比應力分散效果較大。圖7(a)及圖8(a)係顯示模型2之波形狀部中之應力分佈之模擬結果之圖,圖7(b)及圖8(b)係顯示模型1之波形狀部中之應力分佈之模擬結果之圖。圖7及圖8係顯示相同模擬結果之圖,圖8係將圖7中色標所示(於圖式中以單色表示)之應力分佈轉換為灰度而顯示之圖。位於圖7及圖8之左端、於上下方向階段性顯示應力值之條,顯示越上側則應力值越高。圖7之條所示之顏色,於自下端之深藍色起依序經由淡藍色、綠色、黃色、直至上端之紅色之間變化。於圖7中,波形狀部中凹部以外的部分之應力值於模型1、2中皆顯示深藍色至綠色之間之顏色,但於凹部,相對於模型2中有顯示紅色之部分,於模型1中無顯示紅色之部分。 又,可知模型5之最大應力值較模型2(先前例)之最大應力值為小,且模型5與模型2相比應力分散效果較大。 The comparison results show that the maximum stress value of Model 1 is smaller than that of Model 2 (previous example) as shown in Figure 7 and Figure 8, and the stress dispersion effect of Model 1 is greater than that of Model 2. Fig. 7 (a) and Fig. 8 (a) are the graphs showing the simulation results of the stress distribution in the wave shape part of model 2, Fig. 7 (b) and Fig. 8 (b) are the graphs showing the stress distribution in the wave shape part of model 1 A plot of the simulation results of the stress distribution. 7 and 8 are graphs showing the same simulation results, and FIG. 8 is a graph showing the stress distribution shown by the color scale in FIG. 7 (expressed in monochrome in the drawing) into grayscale. The bars located at the left ends of Fig. 7 and Fig. 8 display stress values step by step in the vertical direction, and the higher the stress value is, the higher the display is. The colors shown in the bars of Fig. 7 change from dark blue at the lower end to light blue, green, yellow, and red at the upper end. In Fig. 7, the stress value of the part other than the concave part in the wave-shaped part shows the color between dark blue and green in both models 1 and 2, but in the concave part, compared with the part shown in red in model 2, in the model In 1, there is no part shown in red. Also, it can be seen that the maximum stress value of model 5 is smaller than that of model 2 (previous example), and the stress dispersion effect of model 5 is greater than that of model 2.

模型1、5之最大應力值相對於模型3(比較例1)之最大應力值較小,且第1凹部之長度較第1凸部之長度為長,可知應力分散效果提高。 模型1、5之最大應力值相對於模型4(比較例2)之最大應力值較小,且第1凸部之凸出高度較第2凸部之凸出高度為高,可知應力分散效果提高。 另,模型3及模型4之最大應力值比模型2之最大應力值小。 The maximum stress values of models 1 and 5 are smaller than those of model 3 (comparative example 1), and the length of the first concave part is longer than the length of the first convex part, which shows that the effect of stress dispersion is improved. The maximum stress values of models 1 and 5 are smaller than those of model 4 (comparative example 2), and the protrusion height of the first convex part is higher than that of the second convex part, which shows that the stress dispersion effect is improved . In addition, the maximum stress values of Model 3 and Model 4 are smaller than that of Model 2.

以上,已對本發明之玻璃基板製造裝置及管構件進行詳細說明,但本發明不限定於上述實施形態,當可於不脫離本發明之主旨之範圍內,進行各種改良或變更。Above, the glass substrate manufacturing apparatus and pipe member of the present invention have been described in detail, but the present invention is not limited to the above embodiments, and various improvements and changes can be made without departing from the gist of the present invention.

於上述實施形態中,已對波形狀部之凸部朝徑向外周側凸出、凹部朝徑向內周側凹陷之情形進行說明,但波形狀部亦可與此相反,具有凸部朝徑向內周側凸出、而凹部朝徑向外周側凹陷之形態。於該形態中,凸部相對於壁部102a之基部,朝澄清管102之內側凸出,凹部之最大深度位置例如位於與壁部102a之基部相同高度之位置。經確認藉由此種形態之波形狀部10,應力分散效果亦有所提高。In the above-mentioned embodiment, the case where the convex portion of the wave-shaped portion protrudes toward the radially outer peripheral side and the concave portion is recessed toward the radially inner peripheral side has been described. A form that protrudes toward the inner peripheral side, and the concave portion is recessed toward the radially outer peripheral side. In this form, the convex part protrudes toward the inside of the clarification pipe 102 with respect to the base part of the wall part 102a, and the maximum depth position of a recessed part exists in the position of the same height as the base part of the wall part 102a, for example. It was confirmed that the stress dispersion effect is also improved by the corrugated portion 10 in such a form.

10:波形狀部 11:第1凸部 11a:彎曲部 12:第2凸部 12a:彎曲部 13:第1凹部 13a,13c:彎曲部 13a1:追加圓弧部 13b,15:平坦部 14:斜面部 100:熔解裝置 101:熔解槽 102:澄清管 102a:壁部 102b,102c:凸緣(突狀構件) 102d:通氣管(突狀構件) 102e:平坦部(基部) 103:攪拌槽 103a:攪拌器 104,105:移送管 106:玻璃供給管 110:支持體 112:單位管 200:成形裝置 300:切斷裝置 D1:長度 D2:長度 H1:凸出高度 H2:凸出高度 MG:熔融玻璃 R1~R4:曲率半徑 SG:玻璃片 10: Wavy part 11: 1st convex part 11a: bending part 12: The second convex part 12a: bending part 13: The first recess 13a, 13c: bending part 13a1: Add arc part 13b,15: flat part 14: Inclined part 100: melting device 101: melting tank 102: clarification tube 102a: wall 102b, 102c: flange (protruding member) 102d: Breathing pipe (protruding member) 102e: flat portion (base) 103: Stirring tank 103a: Stirrer 104,105: transfer tube 106: glass supply tube 110: support body 112: unit tube 200: forming device 300: cutting device D1: length D2: Length H1: Protrusion height H2: Protrusion height MG: molten glass R1~R4: radius of curvature SG: glass sheet

圖1係顯示玻璃基板製造裝置之概略構成之圖。 圖2係說明作用於澄清管之力之圖。 圖3係顯示波形狀部之一例之一部分之剖視圖。 圖4係顯示波形狀部之另一例之一部分之剖視圖。 圖5係顯示構成澄清管之單位管之圖。 圖6係顯示波形狀部之另一例之一部分之剖視圖。 圖7(a)係以色標顯示先前之波形狀部中之應力分佈之模擬結果之圖,(b)係以色標顯示本實施形態之波形狀部中之應力分佈之模擬結果之圖。 圖8(a)係以灰度顯示圖7(a)之模擬結果之圖,(b)係以灰度顯示圖7(b)之模擬結果之圖。 Fig. 1 is a diagram showing a schematic configuration of a glass substrate manufacturing apparatus. Figure 2 is a diagram illustrating the forces acting on the clarification tube. Fig. 3 is a partial cross-sectional view showing an example of a corrugated portion. Fig. 4 is a partial sectional view showing another example of the corrugated portion. Fig. 5 is a diagram showing unit tubes constituting the clarification tube. Fig. 6 is a partial sectional view showing another example of the corrugated portion. Fig. 7(a) is a diagram showing the simulation results of the stress distribution in the corrugated part in the previous color code, and (b) is a diagram showing the simulation results of the stress distribution in the corrugated part of the present embodiment in color code. Fig. 8(a) is a diagram showing the simulation results of Fig. 7(a) in grayscale, and (b) is a diagram showing the simulation results of Fig. 7(b) in grayscale.

10:波形狀部 10: Wavy part

11:第1凸部 11: 1st convex part

11a:彎曲部 11a: bending part

12:第2凸部 12: The second convex part

12a:彎曲部 12a: bending part

13:第1凹部 13: The first recess

13a:彎曲部 13a: bending part

13a1:追加圓弧部 13a1: Add arc part

H1:凸出高度 H1: Protrusion height

H2:凸出高度 H2: Protrusion height

R1~R3:曲率半徑 R1~R3: radius of curvature

Claims (13)

一種玻璃基板製造裝置,其特徵在於具備:管構件,其由包含鉑族金屬之材料組成,且具有於軸向延伸之周狀之壁部;且 上述壁部於上述軸向之一部分區域,包含:至少1個波形狀部,其以於上述軸向交替排列且於周向連續之方式形成,具有上述壁部之徑向之凹凸; 上述波形狀部中朝徑向凸出之凸部具有凸出高度為最高之第1凸部、與相對於上述第1凸部配置於上述軸向之兩側之一對第2凸部; 上述波形狀部中朝徑向凹陷之凹部具有位於上述第1凸部與上述第2凸部之間之一對第1凹部; 於沿著朝上述軸向及上述徑向延伸之平面的上述壁部之剖面中,上述第1凹部各者之長度較上述第1凸部之長度為長。 A glass substrate manufacturing apparatus characterized by comprising: a pipe member made of a material containing a platinum group metal and having a circumferential wall portion extending in the axial direction; and A partial area of the above-mentioned wall portion in the above-mentioned axial direction includes: at least one wave-shaped portion, which is formed in an alternate arrangement in the above-mentioned axial direction and continuous in the circumferential direction, and has radial concavities and convexities of the above-mentioned wall portion; The protruding portion protruding radially in the wave-shaped portion has a first protruding portion with the highest protruding height, and a pair of second protruding portions disposed on both sides of the axial direction relative to the first protruding portion; The radially recessed concave portion of the corrugated portion has a pair of first concave portions located between the first convex portion and the second convex portion; In a cross section of the wall along a plane extending in the axial direction and the radial direction, the length of each of the first recesses is longer than the length of the first protrusions. 如請求項1之玻璃基板製造裝置,其中上述凸部及上述凹部各者具有於上述剖面中以具有曲率半徑之方式彎曲之彎曲部。The glass substrate manufacturing apparatus according to claim 1, wherein each of the above-mentioned convex portion and the above-mentioned concave portion has a curved portion curved so as to have a radius of curvature in the above-mentioned section. 如請求項2之玻璃基板製造裝置,其中於上述剖面中,上述第1凹部之上述彎曲部之長度較上述第1凸部之上述彎曲部之長度為長。The glass substrate manufacturing apparatus according to claim 2, wherein in the cross section, the length of the curved portion of the first concave portion is longer than the length of the curved portion of the first convex portion. 如請求項2或3之玻璃基板製造裝置,其中於將上述彎曲部稱為第1彎曲部時,上述第1凹部於上述剖面中具有: 平坦部,其於與上述軸向平行之方向直線狀延伸;及 第2彎曲部,其位在與上述第1彎曲部之間夾著上述平坦部之處;且 於上述剖面中,上述彎曲部及上述平坦部之合計之長度較上述第1凸部之上述彎曲部之長度為長。 The glass substrate manufacturing apparatus according to claim 2 or 3, wherein when the curved portion is referred to as the first curved portion, the first concave portion has in the cross-section: a flat portion extending linearly in a direction parallel to the aforementioned axial direction; and a second curved portion located between the first curved portion and the flat portion; and In the above cross section, the total length of the curved portion and the flat portion is longer than the length of the curved portion of the first convex portion. 如請求項2至4中任一項之玻璃基板製造裝置,其中上述第1凸部之上述彎曲部之曲率半徑R1與上述第1凹部之上述彎曲部之曲率半徑R2相等,或小於該曲率半徑R2。The glass substrate manufacturing apparatus according to any one of claims 2 to 4, wherein the curvature radius R1 of the above-mentioned curved portion of the above-mentioned first convex portion is equal to or smaller than the curvature radius R2 of the above-mentioned curved portion of the above-mentioned first concave portion R2. 如請求項2至5中任一項之玻璃基板製造裝置,其中上述第1凸部之上述彎曲部之曲率半徑R1與上述第2凸部之上述彎曲部之曲率半徑R3相等,或小於該曲率半徑R3。The glass substrate manufacturing apparatus according to any one of claims 2 to 5, wherein the radius of curvature R1 of the curved portion of the first convex portion is equal to or smaller than the radius of curvature R3 of the curved portion of the second convex portion Radius R3. 如請求項1至6中任一項之玻璃基板製造裝置,其中上述第2凸部之凸出高度H2為上述第1凸部之凸出高度H1之1.2~1.6倍。The glass substrate manufacturing apparatus according to any one of claims 1 to 6, wherein the protrusion height H2 of the second protrusion is 1.2 to 1.6 times the protrusion height H1 of the first protrusion. 如請求項1至7中任一項之玻璃基板製造裝置,其中上述管構件於上述壁部之內側處理熔融玻璃,且進而具備: 至少1個突狀構件,其以自上述壁部朝外周側延伸之方式連接於上述壁部,且於上述處理時發揮功能;及 支持體,其支持上述壁部,且以自上述軸向之兩側夾著上述突狀構件之方式配置於上述管構件之周圍。 The glass substrate manufacturing apparatus according to any one of claims 1 to 7, wherein the pipe member processes molten glass inside the wall, and further comprises: at least one protruding member connected to the wall portion so as to extend from the wall portion toward the outer peripheral side, and function during the above-mentioned treatment; and The supporting body supports the wall portion and is disposed around the pipe member so as to sandwich the protruding member from both sides in the axial direction. 如請求項8之玻璃基板製造裝置,其中上述突狀構件備有複數個; 上述波形狀部、與上述突狀構件中位於最靠近該波形狀部之突狀構件之上述軸向之間隔,未達上述相鄰之2個突狀構件之間隔之10%。 The glass substrate manufacturing apparatus as claimed in claim 8, wherein there are a plurality of the above-mentioned protruding members; The axial distance between the above-mentioned corrugated part and the projecting member closest to the corrugated part among the above-mentioned protruding members is less than 10% of the distance between the two adjacent protruding members. 如請求項1至9中任一項之玻璃基板製造裝置,其中上述壁部包含形成於上述軸向之不同區域之複數個上述波形狀部。The glass substrate manufacturing apparatus according to any one of claims 1 to 9, wherein the wall portion includes a plurality of the wave-shaped portions formed in different regions in the axial direction. 如請求項8或9之玻璃基板製造裝置,其中上述管構件由沿軸向經分割之複數個單位管連接而成; 於上述單位管各者,形成有上述突狀構件中之1個、或上述波形狀部中之1個或2個。 The glass substrate manufacturing device according to claim 8 or 9, wherein the pipe member is formed by connecting a plurality of unit pipes divided in the axial direction; One of the above-mentioned protruding members, or one or two of the above-mentioned corrugated parts are formed on each of the above-mentioned unit tubes. 如請求項11之玻璃基板製造裝置,其中相對於上述單位管中形成有上述波形狀部之單位管,上述波形狀部之上述軸向之長度為該單位管之上述軸向之長度之20%以上。The glass substrate manufacturing apparatus according to claim 11, wherein, with respect to the unit tube having the wave-shaped portion formed in the unit tube, the axial length of the wave-shaped portion is 20% of the axial length of the unit tube above. 一種管構件,其特徵在於,其係由包含鉑族金屬之材料組成,且具有於軸向延伸之周狀之壁部者; 上述壁部於上述軸向之一部分區域,包含:至少1個波形狀部,其以於上述軸向交替排列且於周向連續之方式形成,具有上述壁部之徑向之凹凸; 上述波形狀部中朝徑向凸出之凸部具有:凸出高度為最高之第1凸部;及一對第2凸部,其相對於上述第1凸部配置於上述軸向之兩側,且凸出高度較上述第1凸部為低; 上述波形狀部中朝徑向凹陷之凹部具有位於上述第1凸部與上述第2凸部之間之一對第1凹部; 於沿著朝上述軸向及上述徑向延伸之平面的上述壁部之剖面中,上述第1凹部各者之長度較上述第1凸部之長度為長。 A pipe member, characterized in that it is composed of a material containing a platinum group metal and has a circumferential wall portion extending in the axial direction; A partial area of the above-mentioned wall portion in the above-mentioned axial direction includes: at least one wave-shaped portion, which is formed in an alternate arrangement in the above-mentioned axial direction and continuous in the circumferential direction, and has radial concavities and convexities of the above-mentioned wall portion; The radially protruding protruding portion of the wave-shaped portion has: a first protruding portion with the highest protruding height; and a pair of second protruding portions, which are arranged on both sides of the axial direction relative to the above-mentioned first protruding portion , and the height of the protrusion is lower than that of the first protrusion; The radially recessed concave portion of the corrugated portion has a pair of first concave portions located between the first convex portion and the second convex portion; In a cross section of the wall along a plane extending in the axial direction and the radial direction, the length of each of the first recesses is longer than the length of the first protrusions.
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