TW202243768A - Method for manufacturing capillary structure and heat sink with the same - Google Patents

Abstract

A method for manufacturing a capillary structure and a heat sink with the same are used to solve the problem that the manufacturing process of the conventional heat sink is difficult to be simplified due to the arrangement of supporting columns in the chamber. The method comprises: providing at least one metal mesh, the at least one metal mesh has a plurality of metal wires, and each of the metal wires is staggered to form a plurality of pore; and the at least one metal mesh is stamped to form an integrally connected substrate and supporting portion.

Description

Manufacturing method of capillary structure and heat dissipation element having the capillary structure

The invention relates to a method for manufacturing a capillary structure, in particular to a method for manufacturing a capillary structure of a heat dissipation element and a heat dissipation element with the capillary structure.

With the advancement of electronic technology and the continuous development of semiconductor industry technology in the direction of high performance, high power and light weight and miniaturization, the heat and concentration generated by the operation of IC components have increased. Therefore, improving heat dissipation performance is an inevitable aspect of electronic related products. avoidable problems. At present, there are various heat dissipation elements on the market that can be used in electronic products. Compared with traditional heat dissipation fins, vapor chambers and heat pipes that use working fluid and capillary structure can utilize the gas-liquid phase of the working fluid. Varying heat dissipation can improve the phenomenon of concentrated hot spots, and has the advantages of fast response time, good temperature uniformity, light weight and good efficiency. Currently, the more common capillary structure types are grooved, meshed and sintered.

The above-mentioned conventional cooling element with working fluid and capillary structure, since the working fluid and capillary structure are arranged in the vacuum cavity inside the cooling element, in order to prevent the cavity from being subjected to positive pressure on the surface or negative pressure of internal vacuum to cause the surface Collapse or deformation, in addition to the above-mentioned working fluid and capillary structure, several support columns need to be set in the cavity. In the manufacturing process, the capillary structure is processed separately from the support column system, such as placing the support column into the welding operation, or directly etching the support column on the metal plate, or sintering the metal powder to form the capillary structure, or opening the capillary structure. Holes align the support posts for placement in cavities and the like. The above-mentioned manufacturing process is complicated, which increases the difficulty of manufacturing, and, Etching and drilling operations also cause loss of materials, thus making it difficult to increase production efficiency and reduce manufacturing costs. In addition, the capillary effect cannot be generated by using the etched support pillars, which is also an important factor that makes it difficult to improve the heat dissipation performance in a limited space.

In view of this, it is necessary to improve the conventional manufacturing methods of the capillary structure and the support pillars.

In order to solve the above problems, the purpose of the present invention is to provide a manufacturing method of capillary structure, the supporting part of which has dual functions of supporting and generating capillary action, which can improve heat dissipation performance and reduce volume.

Another object of the present invention is to provide a method for manufacturing a capillary structure, which can greatly reduce the pore diameter of the capillary structure and increase the number of capillary pores, thereby achieving better heat dissipation performance.

Another object of the present invention is to provide a heat dissipation element, which can simplify the manufacturing procedure of the heat dissipation element, so as to further greatly reduce the manufacturing cost of the heat dissipation element.

Another object of the present invention is to provide a heat dissipation element, which can effectively improve the heat dissipation performance and help further reduce the volume of the heat dissipation element, so that the heat dissipation element can be miniaturized or thinned.

Directionality or similar terms used throughout the present invention, such as "front", "rear", "left", "right", "upper (top)", "lower (bottom)", "inner", "outer" , "side", etc., mainly refer to the directions of the attached drawings, and each direction or its approximate terms are only used to assist in explaining and understanding the various embodiments of the present invention, and are not intended to limit the present invention.

The use of the quantifier "a" or "an" in the elements and components described throughout the present invention is only for convenience and to provide the usual meaning of the scope of the present invention; it should be construed as including shall include one or at least one, and the singular shall also include the plural unless it is obvious that it is meant otherwise.

The manufacturing method of the capillary structure of the present invention includes: providing at least one metal mesh, the at least one metal mesh has several metal wires, and each of the metal wires is interlaced to form several capillary holes; and punching the at least one metal mesh Thus, a substrate and a support portion integrally connected are formed.

The heat dissipating element of the present invention comprises: a casing having a chamber filled with a working fluid; and at least one capillary structure made by the aforementioned manufacturing method accommodated in the chamber, The at least one capillary structure abuts against two opposite inner surfaces of the casing.

Accordingly, the manufacturing method of the capillary structure of the present invention is to form the support portion by the capillary structure, therefore, the process steps such as arranging the supporting columns, welding or etching the forming supporting columns of the heat dissipation element are reduced, so that the heat dissipation element The production process is simplified and the cost is greatly reduced. Since the supporting portion has dual functions of supporting and generating capillary action, it can improve the heat dissipation performance and further reduce the volume of the heat dissipation element, which is very helpful for the miniaturization or thinning of the heat dissipation element. .

Wherein, each of the metal wires is flattened and stretched at the embossed place after stamping. In this way, the surface area and surface roughness of each of the metal wires are increased after punching, which has the effect of increasing the heat conduction area and the liquid adsorption force.

Wherein, the quantity of the at least one metal mesh is several, and stamping is performed after the several metal meshes are superimposed on each other. In this way, it has the effect of increasing the number of capillary pores of the capillary structure to enhance the adsorption force of capillarity.

Wherein, the metal wires of one metal mesh may be opposite to the capillary holes of another metal mesh. In this way, a capillary with a larger pore size can be divided into several capillary pores with a smaller pore size, which has the effect of increasing the number of capillary pores per unit area.

Wherein, the several metal meshes can be superimposed on each other according to the set rotation angle. so, the The mesh shape of the capillary structure is no longer the square or rhombus grid of traditional plain weaving, but has the effect of forming high-density and complex capillary pores.

Wherein, the meshes of the several metal meshes can be different. In this way, the capillary structure has the functions of generating capillary adsorption force and forming vapor channels.

Wherein, the thicknesses of the several metal meshes can be different. In this way, the system has the effect of conveniently controlling the thickness of the capillary structure.

Wherein, the substrate may have at least one first board and at least one second board with different thicknesses. In this way, the first plate body and the second plate body can have different capillary pore diameters, and through the interaction between the capillary pores of different pore diameters, the flow rate of the working fluid can be increased to achieve better heat dissipation performance effect.

Wherein, the plurality of metal meshes can form at least one bent portion after stamping. In this way, the system has the effect of forming a capillary structure corresponding to the shape of the chamber.

Wherein, the number of the capillary structure can be two, the substrates of the two capillary structures respectively abut against two opposite inner surfaces of the housing, and the supporting parts of the two capillary structures abut against each other. In this way, the system has the effect of enabling the heat dissipation effect of gas-liquid phase change on both opposite sides of the chamber.

Wherein, the housing may be in the shape of a plate that is not on the same plane, the chamber has a height difference, and the capillary structure forms a shape corresponding to the chamber. In this way, it has the effect of avoiding position in accordance with the space of the mechanism, and it is convenient to apply heat dissipation in a narrow space.

1,1a,1b: metal mesh

11: Metal wire

12,12a,12b: capillary pores

13: Substrate

13a: the first plate body

13b: the second board

14: Support part

15: Embossing

16: Fitting part

17: Bending part

C: capillary structure

D1, D2: Thickness

H: Shell

H1: lower inner surface

H2: upper inner surface

L: working fluid

S: chamber

[FIG. 1] A perspective view of a metal mesh according to a first embodiment of the present invention.

[Fig. 2] It is a perspective view of the double-sided embossed state of the metal mesh according to the first embodiment of the present invention.

[Fig. 3] An exploded perspective view of a metal mesh according to a second embodiment of the present invention.

[Fig. 4] It is a perspective view of the superimposed state of the metal mesh according to the second embodiment of the present invention.

[Fig. 5] The perspective view of the metal mesh after stamping as in Fig. 4.

[Fig. 6] A sectional view along the line A-A in Fig. 5.

[Fig. 7] An exploded perspective view of a metal mesh according to a third embodiment of the present invention.

[Fig. 8] An exploded perspective view of a metal mesh according to a fourth embodiment of the present invention.

[FIG. 9] A combined sectional view of a fourth embodiment of the present invention.

[Fig. 10] An exploded perspective view of a metal mesh according to a fifth embodiment of the present invention.

[FIG. 11] A combined sectional view of a sixth embodiment of the present invention.

[FIG. 12] A combined sectional view of a seventh embodiment of the present invention.

[Fig. 13] A cross-sectional view of the first embodiment of the heat dissipation element of the present invention.

[Fig. 14] An assembled sectional view of the second embodiment of the heat dissipation element of the present invention.

[FIG. 15] An assembled sectional view of the third embodiment of the heat dissipation element of the present invention.

In order to make the above and other purposes, features and advantages of the present invention more comprehensible, the preferred embodiments of the present invention are specifically cited below, together with the accompanying drawings, as follows:

Please refer to Figures 1 and 2, which are the first embodiment of the manufacturing method of the capillary structure of the present invention. The manufacturing method of the capillary structure of the present invention includes: providing at least one metal mesh 1; and punching the metal mesh 1 forming.

The at least one metal mesh 1 can have a plurality of metal wires 11, each of which is interlaced with each other to form a plurality of capillary holes 12, and each of the capillary holes 12 is a space with a small aperture to generate capillary force to absorb liquid, the capillary The smaller the diameter of the pores 12, the faster the liquid can be absorbed. The metal wire 11 can be made of copper, aluminum, titanium, or stainless steel with thermal conductivity and ductility, which is not limited in the present invention.

The at least one metal mesh 1 is punched through a mold, and the at least one metal mesh 1 can be formed into a shape corresponding to the mold after being stamped by the mold, so that the at least one metal mesh 1 has a part that is relatively protruding and concave , and form a substrate 13 and at least one supporting portion 14 integrally connected, the at least one supporting portion 14 protrudes from the surface of the at least one metal mesh 1, the at least one supporting portion 14 can be circular, square or other geometric shape, the present invention is not limited. The at least one metal mesh 1 can reduce the diameter of the capillary hole 12 through the punching action.

More specifically, the at least one metal mesh 1 is punched through a mold, and the surface of the mold may have concave and convex portions spaced apart, and each of the metal wires 11 may be trimmed at the imprint 15 stamped by the mold. Flat and elongated, the surface of the embossed part 15 forms fine cracks due to stamping. In this way, the surface area and surface roughness of each of the metal wires 11 are increased after stamping. The embossed part 15 where each metal wire 11 is flattened and extended can be located on one side of the metal mesh 11, or on the opposite two sides (as shown in FIG. 2 ), each metal wire 11 is flattened, The extended embossing portion 15 can be located on the substrate 13 or the supporting portion 14 , which is not limited by the present invention.

Please refer to Figures 3 and 4, which are the second embodiment of the manufacturing method of the capillary structure of the present invention. In this embodiment, the number of the metal meshes 11 can be several, and the several metal meshes 1 can be connected to each other. Superposition, when the plurality of metal meshes 1 are superimposed, the metal wires 11 of each metal mesh 1 overlap each other. Preferably, the metal wires 11 of one metal mesh 1 can be positioned on the other metal mesh 1 capillary holes 12, so that the number of capillary holes 12 can be increased after the several metal meshes 1 are superimposed on each other. Please refer to Figures 5 and 6, after the several metal meshes 1 are stacked, and then stamped with a mold, the parts of the several metal meshes 1 are recessed, and the at least one supporting portion is formed relatively protruding. 14. After the plurality of metal nets 1 are stamped, a fitting portion 16 is formed between the two overlapping metal wires 11 of the plurality of metal nets 1, and the fitting portion 16 is helpful for fixing the overlapping two metal wires. 11, so as to prevent the two stacked metal meshes 1 from shifting and separating from each other. In addition, by making the metal wires 11 of one of the metal nets 1 opposite to the capillary holes 12 of the other metal net 1, not only can one originally larger The capillary pores 12 of aperture are divided into several capillary pores 12 with smaller apertures, and simultaneously the several metal meshes 1 can have various capillary pores 12 with different apertures, and the number of capillary pores 12 per unit area can be increased.

Please refer to FIG. 7 , which is the third embodiment of the manufacturing method of the capillary structure of the present invention. Preferably, the plurality of metal nets 1 can also be superimposed on each other according to the set rotation angle. In addition to further increasing the number of capillary holes 12, the mesh shape of the plurality of metal nets 1 is no longer the traditional plain weaving square Or a rhombus grid, whereby the capillary pores 12 of high density and compound shape that cannot be achieved by traditional manufacturing processes can be formed.

Please refer to Figures 8 and 9, which are the fourth embodiment of the manufacturing method of the capillary structure of the present invention. In this embodiment, the meshes of the several metal meshes 1 can be different. Preferably, after the stacked metal meshes 1 are punched, the metal meshes 1 with more meshes can form the substrate 13, and the meshes are smaller. A small amount of metal mesh 1 can form the support portion 14 . For example, in the present embodiment, two metal meshes 1a and 1b of 200 mesh and 10 mesh are used, the metal mesh 1a has more and smaller capillary holes 12a, and the metal mesh 1b has less and larger Capillary 12b. When stacking each of the metal nets 1a and 1b, the 200-mesh (more mesh) metal net 1a can be placed on the bottom layer, and the 10-mesh (less mesh) metal net 1b can be placed on the top layer. In this way, after stamping the plurality of metal meshes 1 , the metal mesh 1 a with more meshes can form the substrate 13 ; the metal mesh 1 b with fewer meshes can form the supporting portion 14 .

Please refer to Fig. 9, the thicknesses of the several metal meshes 1a, 1b can be different, preferably, after the stacked metal meshes 1a, 1b are punched, the thinner metal meshes 1a can be formed into the The substrate 13 and the thicker metal mesh 1b can form the support portion 14 . For example, in this embodiment, the supporting portion 14 is formed by the thick metal mesh 1b.

Please refer to FIG. 10 , which is the fifth embodiment of the manufacturing method of the capillary structure of the present invention. In this embodiment, the thickness of the capillary structure C can also be used in conjunction with the depth of a vacuum chamber. For example, when the depth of the vacuum chamber is 3 mm, the thicknesses of 0.1 mm and 1.3 mm respectively can be used. Two kinds of metal meshes 1a, 1b. When stacking each of the metal meshes 1a, 1b, the system Four metal meshes 1a can be used to be laminated on the bottom side, and then two metal meshes 1b can be laminated on the top side. In this way, the thickness of the several metal meshes 1 is 0.1mm*4+1.3mm*2=3mm, which can reach The depth of the vacuum chamber. Parts of the plurality of metal meshes 1 are punched to form the substrate 13 and the at least one supporting portion 14. The thickness of the at least one supporting portion 14 can maintain the original thickness of 3mm to provide supporting force in the vacuum chamber. In this way, the thickness of the capillary structure C can be conveniently controlled by using the several metal meshes 1a, 1b with different thicknesses.

Please refer to Figure 11, which is the sixth embodiment of the manufacturing method of the capillary structure of the present invention. The dies for punching the plurality of metal meshes 1 may have protrusions of different heights, so that the plurality of metal meshes 1 pass through the die. After stamping, several metal meshes 1 of the capillary structure C are compressed by different high and low convex parts to form different thicknesses. In this embodiment, where the substrate 13 is compressed by the lower convex portion of the mold, a first plate body 13a having a larger thickness D1 can be formed, and where the substrate 13 is compressed by the higher convex portion of the mold, a smaller plate body 13a can be formed. The second plate body 13b with thickness D2, the first plate body 13a protrudes from the surface of the several metal meshes 1 than the second plate body 13b, the thickness D1 of the first plate body 13a is greater than that of the second plate body 13b Thickness D2, that is, the degree of compression of the first plate body 13a can be smaller, so that the first plate body 13a can have capillary pores with larger pore diameters than the second plate body 13b, so that the first plate body 13a There may be capillary pores with different diameters between the plate body 13a and the second plate body 13b.

Please refer to FIG. 12, which is the seventh embodiment of the manufacturing method of the capillary structure of the present invention. In this embodiment, after the capillary structure C is stamped, in addition to forming the substrate 13 and the at least one supporting portion 14, It is also possible to form at least one bending portion 17 to make the capillary structure C bend at an angle. In this way, the plurality of metal meshes 1 can form a non-flat capillary structure C with height differences.

Please refer to Figure 13, which is the first embodiment of the heat dissipation element of the present invention, which includes a housing H, at least one capillary structure C made by the aforementioned capillary structure manufacturing method is accommodated in the housing H middle.

The casing H can be made of copper, aluminum, titanium, or stainless steel and other materials with thermal conductivity. There is a chamber S in the casing H, and the chamber S can be used to fill a working fluid L. The working fluid L can easily absorb heat from a liquid state and evaporate into a gaseous state, and then the gas-liquid phase change mechanism of the working fluid L can be used to achieve heat energy transfer. The chamber S is in a vacuum-enclosed state, which can prevent the working fluid L from dissipating after it forms a gaseous state, and prevent the interior from being compressed into the space after the working fluid L forms a gaseous state due to air occupation, thereby affecting the heat dissipation performance.

The at least one capillary structure C is accommodated in the chamber S, and the at least one capillary structure C can adsorb the working fluid L by capillary phenomenon. In this embodiment, the support portion 14 of the capillary structure C is located above the substrate 13 of the capillary structure C, the capillary structure C can be abutted against the lower inner surface H1 of the housing H by the substrate 13, and can be formed by the substrate 13. The support portion 14 abuts against the upper inner surface H2 of the housing H. As shown in FIG. In this way, the chamber S can be supported by the support portion 14 and the substrate 13 to prevent the shell H from collapsing or deforming due to the influence of external positive pressure or negative pressure of internal vacuum.

Please refer to FIG. 14, which is the second embodiment of the heat dissipation element of the present invention. Preferably, the number of the capillary structure C can be two, the substrates 13 of the two capillary structures C respectively abut against the two opposite inner surfaces H1, H2 of the housing H, and the supporting parts of the two capillary structures C 14 against each other. Thereby, the system of the two capillary structures C can absorb more of the working fluid L, and make the two opposite sides of the housing H to perform the heat dissipation effect of gas-liquid phase change.

Please refer to FIG. 15, which is the third embodiment of the heat dissipation element of the present invention. When the housing H of the heat dissipation element is not in the shape of a flat plate, the cavity S of the heat dissipation element has a height difference, and the capillary structure C can be stamped to form a shape corresponding to the cavity S. After the capillary structure C is formed, it can be directly accommodated in the chamber S. In this way, compared with the conventional method of sintering metal powder to form a capillary structure, the heat dissipation element of the present invention can overcome that the metal powder is easy to fall and cannot be laid on the elevation or slope of the chamber S to form a step difference, and further resulting in inability to sinter The difficulty of forming a capillary structure also makes the shape of the heat dissipation element no longer limited to a planar shape.

To sum up, the manufacturing method of the capillary structure and the cooling element having the capillary structure of the present invention form the support portion by the capillary structure, thus reducing the work of arranging the supporting columns and the supporting columns for making the conventional cooling elements. Process steps such as soldering or directly etching the supporting pillars on the metal plate simplify the manufacturing process of the heat dissipation element. In particular, instead of using the metal plate to etch and form the supporting pillars, it is more helpful to greatly reduce the manufacturing cost of the heat dissipation element. Since the supporting portion has dual functions of supporting and generating capillary action, it can improve the heat dissipation performance, which is very helpful for the development of miniaturization or thinning of the heat dissipation element. And because the capillary structure is formed by stamping, the pore diameter of the capillary hole can be greatly reduced and the number of the capillary hole can be increased, thereby effectively optimizing the flow rate of the working fluid and increasing the heat dissipation performance. In addition, by making the metal wire pair of one of the metal meshes located in the capillary holes of the other metal mesh, the capillary structure has a variety of capillary holes with different pore diameters, which further increases the number of capillary holes per unit area to improve the capillary structure. The efficacy of the adsorption force of the phenomenon. The capillary structure can also be laminated with multiple layers of the metal mesh according to product requirements, so that the pore diameters of the divided capillary pores can be further divided. In this way, the pore diameter of the capillary pores can be greatly reduced and the number of capillary pores can be increased. The capillary structure can also be superimposed by several metal meshes with different meshes and thicknesses, so that the metal mesh with more meshes can absorb the liquid working fluid with better capillary force; the metal mesh with fewer meshes The larger capillary pores can form a steam channel, and facilitate the circulation of the gaseous working fluid. In addition, the several metal mesh systems with different thicknesses can conveniently control the thickness of the capillary structure. The thicker metal mesh forms The supporting part has the function of providing a more stable supporting force. In addition, there may be capillary holes with different pore diameters between the first plate body and the second plate body. Through the interaction between the capillary holes with different pore diameters, the flow rate of the working fluid can be increased, and better performance can be achieved. Cooling performance. The housing of the heat dissipation element of the present invention can also be plate-shaped in a non-uniform plane, which has the effect of avoiding position in accordance with the space of the mechanism, and is convenient for applying heat dissipation in a narrow space.

Although the present invention has been disclosed by using the above-mentioned preferred embodiments, it is not intended to limit the present invention. It is still within the scope of this invention for anyone skilled in the art to make various changes and modifications relative to the above-mentioned embodiments without departing from the spirit and scope of the present invention. The technical scope protected by the invention, therefore, the scope of protection of the present invention should be defined by the scope of the appended patent application.

1: metal mesh

11: Metal wire

12: Capillary

13: Substrate

14: Support part

15: Embossing

16: Fitting part

Claims (12)

A method of manufacturing a capillary structure, comprising: providing at least one metal mesh, the at least one metal mesh has a plurality of metal wires, each of which is interlaced with each other to form a plurality of capillaries; and The at least one metal mesh is stamped to form a base plate and a supporting part integrally connected. The manufacturing method of the capillary structure as claimed in claim 1, wherein the stamped impressions of the metal wires are flattened and stretched. The manufacturing method of the capillary structure according to claim 1, wherein the at least one metal mesh is several in number, and the several metal meshes are stacked together before stamping. The manufacturing method of the capillary structure according to claim 3, wherein the metal wire pairs of one metal mesh are located in the capillary holes of the other metal mesh. The manufacturing method of the capillary structure according to claim 3, wherein the several metal meshes are superimposed on each other according to the set rotation angle. The method for manufacturing a capillary structure according to claim 3, wherein the meshes of the plurality of metal meshes are different. The method for manufacturing a capillary structure according to claim 3, wherein the thicknesses of the plurality of metal meshes are different. The method for manufacturing a capillary structure according to claim 3, wherein the substrate has at least one first plate body and at least one second plate body with different thicknesses. The method for manufacturing a capillary structure according to claim 1, wherein the plurality of metal meshes are stamped to form at least one bent portion. A cooling element comprising: a housing having a chamber filled with a working fluid; and At least one capillary structure made as any one of claims 1 to 9 is housed in the chamber, the to At least one capillary structure abuts against two opposite inner surfaces of the casing. The heat dissipation element according to claim 10, wherein there are two capillary structures, the substrates of the two capillary structures respectively abut against two opposite inner surfaces of the casing, and the supporting parts of the two capillary structures abut against each other. The heat dissipation element according to claim 10, wherein the housing is in the shape of a plate with non-uniform planes, the cavity has a height difference, and the capillary structure forms a shape corresponding to the cavity.

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